A hand-held fixture for photomasks

Abstract

The present invention relates to the field of clamping equipment, and discloses a handheld clamp for photomasks, including a mounting frame, a clamping assembly, a transmission assembly, a driving assembly and a locking assembly, wherein a handheld portion is fixed at one end of the mounting frame; the clamping assembly includes a left clamp and a right clamp, which are symmetrically arranged and both slidably mounted on the bottom side of the mounting frame; the transmission assembly includes a first rack, a second rack and a gear, wherein one end of the first rack is fixed on the left clamp, and one end of the second rack is fixed on the right clamp, and the gear is rotatably mounted in the mounting frame, and the gear is located between the first rack and the second rack, and meshes with the first rack and the second rack; the driving assembly is used to drive the right clamp to move toward a side close to the left clamp; the locking assembly includes a card shell and a card plate. The present invention is convenient for clamping and transferring photomasks, is very labor-saving, and is also very convenient to operate.

Description

Technical Field

[0001] The invention relates to the technical field of clamping equipment, and in particular to a handheld clamp for a photomask. Background Art

[0002] The mask is an indispensable part of the photolithography process. The quality of the mask directly affects the factory's semiconductor manufacturing capabilities. In addition to improving the process level during mask manufacturing, how to prevent the mask from being damaged after manufacturing is also an important issue, especially for some complex masks, which usually do not have backups. Therefore, it is particularly important to protect the mask in normal times.

[0003] During the processing of the mask, the mask needs to be transferred, for example, from one mask box to another, or between a mask box and a crystal box. In order to ensure that the mask is not contaminated or damaged, a special fixture is usually used to transfer the mask.

[0004] However, ordinary clamps can usually only clamp the photomask. When clamping the photomask, it is necessary to hold the transmission component of the clamp firmly to keep the clamp holding the photomask stably, which is not only inconvenient but also very laborious. Summary of the invention

[0005] In view of this, an object of the present invention is to provide a handheld clamp for a photomask, which solves the problem pointed out in the background art that the existing clamp is inconvenient and laborious when clamping the photomask.

[0006] The present invention solves the above technical problems by the following technical means:

[0007] A handheld clamp for a photomask, comprising a mounting frame, a clamping assembly, a transmission assembly, a driving assembly and a locking assembly, wherein a handheld portion is fixed at one end of the mounting frame; the clamping assembly comprises a left clamp and a right clamp, the left clamp and the right clamp are symmetrically arranged and both are slidably mounted on the bottom side of the mounting frame; the transmission assembly comprises a first rack, a second rack and a gear, one end of the first rack is fixed on the left clamp, one end of the second rack is fixed on the right clamp, the gear is rotatably mounted in the mounting frame, the gear is located between the first rack and the second rack, and is meshed with the first rack and the second rack; the driving assembly is used to drive the right clamp to move toward a side close to the left clamp; the locking assembly comprises a card shell and a card plate, the card shell is slidably mounted on the mounting frame and fixed to the left clamp, the card plate slide plate is mounted in the mounting frame, and a first spring is provided between the card plate and the mounting frame, a wedge block is provided on the card plate, and a card hole matching the wedge block is provided on the card shell.

[0008] Furthermore, the left clamp includes a sliding block, a connecting arm and a supporting block, one end of the connecting arm is fixed on the sliding block, and the other end of the connecting arm is fixed to the supporting block, the right clamp has the same structure as the left clamp and is symmetrically arranged, a first sliding groove is provided on the bottom side of the mounting frame, the sliding blocks of the left clamp and the right clamp are both slidably installed in the first sliding groove, and a first limiting rod is fixed on the mounting frame in the first sliding groove, and the first limiting rod passes through the sliding blocks of the left clamp and the right clamp.

[0009] Furthermore, the first rack is fixed on the sliding block of the left clamp, the second rack is fixed on the sliding block of the right clamp, the mounting frame is fixed with a first fixed shaft in the first sliding groove, and the gear is rotatably mounted on the first fixed shaft.

[0010] Furthermore, the mounting frame is provided with a mounting groove on the bottom side near the hand-held part, the driving assembly is installed in the mounting groove, the driving assembly includes a push rod and a cam, the mounting frame is provided with a sliding hole connecting the mounting groove and the first sliding groove, the push rod is slidably installed in the sliding hole, one end of the push rod extends into the first sliding groove and is fixed to the sliding block of the right clamp, the other end of the push rod extends into the mounting groove and is fixed with a push plate, the part of the push rod located in the mounting groove is sleeved with a second spring, one end of the second spring rests on the push plate, and the other end of the second spring rests on the inner side wall of the mounting groove; the mounting frame is fixed with a second fixed shaft in the mounting groove, the cam is rotatably mounted on the second fixed shaft, and a torsion spring is installed between the cam and the second fixed shaft, the cam rests on the side of the push plate away from the push rod, and a trigger is fixed on the bottom side of the cam, and the trigger is located outside the mounting groove.

[0011] Furthermore, the housing is a U-shaped housing, both ends of the housing are fixed with limiting slides, both sides of the mounting frame are provided with limiting slide grooves, and the limiting slide is slidably installed in the limiting slide groove on the same side thereof.

[0012] Furthermore, the housing is a U-shaped housing, both ends of the housing are fixed with limiting slides, both sides of the mounting frame are provided with limiting slide grooves, and the limiting slide is slidably installed in the limiting slide groove on the same side thereof.

[0013] Furthermore, a pressing groove is provided on the top side of the mounting frame near the hand-held part, the card plate is slidably installed in the pressing groove, the first spring is also installed in the pressing groove, one end of the first spring is fixed to the bottom of the card plate, and the other end of the first spring is fixed to the bottom side wall in the pressing groove, and a pressing block is provided on the end of the card plate away from the wedge block, and one end of the pressing block extends outside the pressing groove.

[0014] Furthermore, rectangular holes are provided on the bottom sides of the sliding blocks of the left clamp and the right clamp, and a clamping rod is slidably installed on the sliding block in the rectangular hole. The lower end of the clamping rod extends out of the rectangular hole, and the lower end of the clamping rod is always located on the upper side of the support block, and a second limiting rod is passed through the end of the clamping rod located in the rectangular hole, and a vertical sliding groove connected to the rectangular hole is provided on the side wall of the sliding block, and an oblique sliding groove connected to the first sliding groove is provided on the side wall of the mounting frame, and one end of the second limiting rod is slidably installed in the vertical sliding groove and the oblique sliding groove.

[0015] Furthermore, buffer pads are provided on the lower side of the abutting rod, the side wall of the connecting arm and the upper side of the supporting block.

[0016] The beneficial effects of the present invention are as follows: by setting up structures such as a mounting frame, a clamping assembly, a transmission assembly, a driving assembly, and a locking assembly, when it is necessary to transfer the photomask, it is only necessary to pull the trigger to make the left clamp and the right clamp come close to each other to clamp the photomask; and when the left clamp and the right clamp come close to each other, the clamping rod can also be moved downward, and through the cooperation between the clamping rod and the supporting block, the photomask can be fixed in the vertical direction, further improving the fixing effect of the clamp; and when the left clamp moves to the right side, the wedge block can be inserted into the clamping hole of the clamp shell to limit the clamp shell, the left clamp and the right clamp, so that the left clamp and the right clamp maintain a state of clamping the photomask, so that the staff can clamp the photomask without continuous force, which is convenient for the staff to transfer the photomask, very labor-saving, and very convenient to operate. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a structural schematic diagram of a handheld clamp for a photomask of the present invention;

[0018] Figure 2 is a cross-sectional view of a handheld clamp for a photomask of the present invention;

[0019] Figure 3 It is a partial structural exploded schematic diagram of a handheld clamp for a photomask of the present invention;

[0020] Among them, 1. mounting frame; 11. first slide groove; 12. first limiting rod; 13. first fixed axis; 14. mounting groove; 15. second fixed axis; 16. limiting slide groove; 17. second slide groove; 18. pressing groove; 19. oblique slide groove; 2. clamping assembly; 21. left clamp; 211. sliding block; 212. connecting arm; 213. supporting block; 214. vertical slide groove; 22. right clamp; 23. tightening rod; 231. second limiting rod; 232. Buffer pad; 3. Transmission assembly; 31. First rack; 32. Second rack; 33. Gear; 4. Drive assembly; 41. Push rod; 411. Push plate; 412. Second spring; 42. Cam; 421. Trigger; 5. Locking assembly; 51. Jam; 511. Limiting slide plate; 512. Connecting block; 513. Clamping hole; 52. Clamping plate; 521. First spring; 522. Wedge block; 523. Pressing block; 6. Hand-held part. DETAILED DESCRIPTION

[0021] The following describes the implementation of the present invention through specific specific embodiments, and those skilled in the art can understand the advantages and effects of the present invention from the contents disclosed in this specification. It should be noted that the illustrations provided in the following embodiments are only for exemplary descriptions, and only schematic diagrams are shown, not physical diagrams, and cannot be understood as limitations on the present invention. In order to better illustrate the embodiments of the present invention, some parts in the figures may be omitted, enlarged or reduced, and do not represent the size of the actual product; for those skilled in the art, it is understandable that some well-known structures and their descriptions may be omitted in the figures.

[0022] The same or similar numbers in the figures of the embodiments of the present invention correspond to the same or similar parts. In the description of the present invention, it should be understood that if the terms "upper", "lower", "left", "right", "front", "back", etc. indicate the orientation or position relationship, they are based on the orientation or position relationship shown in the figure. It is only for the convenience of describing the present invention and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation. Therefore, the terms describing the position relationship in the figures are only used for illustrative purposes and cannot be understood as limiting the present invention. For ordinary technicians in this field, the specific meanings of the above terms can be understood according to the specific circumstances.

[0023] like Figure 1 and Figure 2As shown, a handheld clamp for a photomask of the present invention comprises a mounting frame 1, a clamping assembly 2, a transmission assembly 3, a driving assembly 4 and a locking assembly 5. The main body of the mounting frame 1 is a bar-shaped structure, and a hand-held portion 6 is integrally formed at one end of the mounting frame 1 for people to hold and use. The clamping assembly 2 comprises a left clamp 21 and a right clamp 22. The left clamp 21 and the right clamp 22 have the same structure and are symmetrically arranged. The left clamp 21 comprises a sliding block 211, a connecting arm 212 and a supporting block 213. The upper end of the connecting arm 212 is fixed to the sliding block 211. At the lower end, the lower end of the connecting arm 212 is integrally formed with the support block 213, and the connecting arm 212 and the support block 213 form an L-shaped structure. A first slide groove 11 is provided on the bottom side of the mounting frame 1, and the sliding blocks 211 of the left clamp 21 and the right clamp 22 are both slidably installed in the first slide groove 11. The mounting frame 1 is fixed with a first limiting rod 12 in the first slide groove 11, and the first limiting rod 12 passes through the sliding blocks 211 of the left clamp 21 and the right clamp 22. Through the first limiting rod 12, the two sliding blocks 211 can be restricted from sliding in the first slide groove 11.

[0024] like Figure 2 As shown, the transmission assembly 3 includes a first rack 31, a second rack 32 and a gear 33. The left end of the first rack 31 is fixed to the right side wall of the sliding block 211 of the left clamp 21, and the right end of the second rack 32 is fixed to the left side wall of the sliding block 211 of the right clamp 22. The mounting frame 1 is fixed with a first fixed shaft 13 in the first slide groove 11, and the gear 33 is rotatably mounted on the first fixed shaft 13. The gear 33 is also located between the first rack 31 and the second rack 32, and is meshed with the first rack 31 and the second rack 32.

[0025] like Figure 2 As shown, the mounting frame 1 is provided with a mounting groove 14 at the bottom side near the hand-held portion 6, and the driving component 4 is installed in the mounting groove 14. The driving component 4 is used to drive the right clamp 22 to move to the side close to the left clamp 21. The driving component 4 includes a push rod 41 and a cam 42. A sliding hole connecting the mounting groove 14 and the first sliding groove 11 is provided in the mounting frame 1. The push rod 41 is slidably installed in the sliding hole. The left end of the push rod 41 extends into the first sliding groove 11 and is fixed to the sliding block 211 of the right clamp 22. The right end of the push rod 41 extends into the mounting groove 14 and is fixed with a push plate 411. The push rod 41 is located in the mounting groove 1 4 is sleeved with a second spring 412, one end of the second spring 412 abuts against the push plate 411, and the other end of the second spring 412 abuts against the inner wall of the mounting groove 14; the mounting frame 1 is fixed with a second fixed shaft 15 in the mounting groove 14, the second fixed shaft 15 is located on the right side of the push plate 411, the cam 42 is rotatably mounted on the second fixed shaft 15, and a torsion spring is installed between the cam 42 and the second fixed shaft 15, the side of the cam 42 that is lower and away from it abuts against the right side of the push plate 411, and a trigger 421 is fixed to the bottom side of the cam 42, and the trigger 421 is located outside the mounting groove 14.

[0026] like Figure 1 , Figure 2 and Figure 3 As shown, the jamming assembly 5 includes a jamming shell 51 and a jamming plate 52. The jamming shell 51 is a U-shaped shell, and its shape is adapted to the shape of the upper side of the mounting frame 1. The jamming shell 51 is slidably installed on the mounting frame 1. Specifically, both ends of the jamming shell 51 are integrally formed with a limiting slide plate 511, and both sides of the mounting frame 1 are provided with a limiting slide groove 16, and the limiting slide plate 511 is slidably installed in the limiting slide groove 16 on the same side thereof; a connecting block 512 is fixed to the bottom side of the jamming shell 51 near the left end, and a second slide groove 17 connected to the first slide groove 11 is provided on the upper side of the mounting frame 1, and the connecting block 512 is slidably installed in the second slide groove 17, and the lower end of the connecting block 512 extends into the first slide groove 11 and is fixedly connected to the sliding block 211 of the left clamp 21; the mounting frame 1 is provided with a top side near the handheld portion 6 There is a pressing groove 18, and the card plate 52 is slidably installed in the pressing groove 18. A first spring 521 is provided between the card plate 52 and the mounting frame 1, and the first spring 521 is also located in the pressing groove 18. The upper end of the first spring 521 is fixed to the bottom of the card plate 52, and the lower end of the first spring 521 is fixed to the bottom side wall in the pressing groove 18. A wedge block 522 is integrally formed on the card plate 52. When the first spring 521 is not subjected to external force, the wedge block 522 is located outside the pressing groove 18. A card hole 513 adapted to the wedge block 522 is provided on the card shell 51. The wedge block 522 is located on the movement trajectory of the card hole 513. A pressing block 523 is integrally formed on the end of the card plate 52 away from the wedge block 522, and the upper end of the pressing block 523 extends to the outside of the pressing groove 18.

[0027] like Figure 1 , Figure 2 and Figure 3As shown, when the staff uses the clamp to transfer the photomask, they first hold the hand-held portion 6, pick up the clamp, and place the photomask between the left clamp 21 and the right clamp 22, then pull the trigger 421 to drive the cam 42 to rotate, the cam 42 pushes the push plate 411 to move to the left, and then pushes the right clamp 22 to move to the left through the push rod. When the right clamp 22 moves to the left, through the cooperation of the transmission component 3, it can also drive the left clamp 21 to move to the right, so that the left clamp 21 and the right clamp 22 move closer to the middle to clamp the photomask; at the same time, when the left clamp 21 moves to the right, because the left clamp 21 is fixed to the card shell 51, it can also drive the card shell 51 to move to the right until the card hole 51 of the card shell 51 is When the left clamp 21 and the right clamp 22 are moved to the position of the wedge block 522 and the wedge block 522 is inserted into the clamping hole 513, the left clamp 21 and the right clamp 22 also completely clamp the light mask. At this time, the trigger 421 can be released, and the cam 42 is subjected to the elastic force of the torsion spring, which will drive the trigger 421 to reset, and the left clamp 21 and the right clamp 22 will keep clamping the light mask, so that the staff can clamp the light mask without continuous force, which is convenient for the staff to transfer the light mask. When the light mask needs to be placed, the pressing block 523 can be pressed to separate the wedge block 522 from the clamping hole 513, thereby escaping from the stuck state. Then, under the elastic force of the second spring 412, the left clamp 21, the right clamp 22 and the card shell 51 will reset, and the light mask can be released, so that the light mask can be placed, which is convenient to operate.

[0028] like Figure 1 , Figure 2 and Figure 3 As shown, rectangular holes are provided on the bottom sides of the sliding blocks 211 of the left clamp 21 and the right clamp 22, and a rectangular structured clamping rod 23 is slidably installed in the sliding block 211 in the rectangular hole. The lower end of the clamping rod 23 extends out of the rectangular hole, and the lower end of the clamping rod 23 is always located on the upper side of the support block 213. A second limiting rod 231 is passed through one end of the clamping rod 23 located in the rectangular hole, and a vertical slide groove 214 connected to the rectangular hole is provided on the side wall of the sliding block 211, and an oblique slide groove 19 connected to the first slide groove 11 is provided on the side wall of the mounting frame 1, and one end of the second limiting rod 231 extends into the vertical slide groove 214 and the oblique slide groove 19, and is slidably installed in the vertical slide groove 214 and the oblique slide groove 19. When the staff pulls the trigger 421 to move the left clamp 21 and the right clamp 22 closer to each other to clamp the light shield, since the second limit rod 231 is slidably installed in the vertical slide groove 214 and the oblique slide groove 19, the clamping rod 23 can move downward when the left clamp 21 and the right clamp 22 move closer to each other. Through the mutual cooperation of the clamping rod 23 and the support block 213, the light shield can be fixed in the vertical direction, further improving the fixing effect of the clamp.

[0029] like Figure 2As shown, a buffer pad 232 is provided on the lower side of the pressing rod 23, the side wall of the connecting arm 212 and the upper side of the supporting block 213. These side surfaces are all parts in contact with the photomask, and the buffer pad 232 can protect the photomask.

[0030] The above embodiments are only used to illustrate the technical solutions of the present invention and are not intended to limit the present invention. Although the present invention is described in detail with reference to the preferred embodiments, it should be understood by those skilled in the art that the technical solutions of the present invention may be modified or replaced by equivalents without departing from the purpose and scope of the technical solutions of the present invention, which should be included in the scope of the claims of the present invention. The techniques, shapes, and structural parts not described in detail in the present invention are all known technologies.

Claims

1. A handheld clamp for a photomask, characterized in that: The invention comprises a mounting frame, a clamping assembly, a transmission assembly, a driving assembly and a locking assembly, wherein a hand-held part is fixed at one end of the mounting frame; the clamping assembly comprises a left clamp and a right clamp, the left clamp and the right clamp are symmetrically arranged and are both slidably mounted on the bottom side of the mounting frame; the transmission assembly comprises a first rack, a second rack and a gear, one end of the first rack is fixed on the left clamp, one end of the second rack is fixed on the right clamp, the gear is rotatably mounted in the mounting frame, the gear is located between the first rack and the second rack, and is meshed with the first rack and the second rack; the driving assembly is used to drive the right clamp to move toward the side close to the left clamp; the locking assembly comprises a card shell and a card plate, the card shell is slidably mounted on the mounting frame and fixed to the left clamp, the card plate is slidably mounted in the mounting frame, and a first spring is provided between the card plate and the mounting frame, a wedge block is provided on the card plate, and a card hole matching the wedge block is provided on the card shell; The first rack is fixed on the sliding block of the left clamp, the second rack is fixed on the sliding block of the right clamp, the mounting frame is fixed with a first fixed shaft in the first sliding groove, and the gear is rotatably mounted on the first fixed shaft; The mounting frame is provided with a mounting groove on the bottom side near the hand-held part, and the driving assembly is installed in the mounting groove, and the driving assembly includes a push rod and a cam, and the mounting frame is provided with a sliding hole connecting the mounting groove and the first sliding groove, and the push rod is slidably installed in the sliding hole, one end of the push rod extends into the first sliding groove and is fixed to the sliding block of the right clamp, and the other end of the push rod extends into the mounting groove and is fixed with a push plate, and the part of the push rod located in the mounting groove is sleeved with a second spring, one end of the second spring abuts on the push plate, and the other end of the second spring abuts on the inner side wall of the mounting groove; the mounting frame is fixed with a second fixed shaft in the mounting groove, the cam is rotatably mounted on the second fixed shaft, and a torsion spring is installed between the cam and the second fixed shaft, the cam abuts on the side of the push plate away from the push rod, and a trigger is fixed on the bottom side of the cam, and the trigger is located outside the mounting groove.

2. A handheld clamp for a photomask according to claim 1, characterized in that: The left clamp includes a sliding block, a connecting arm and a supporting block, one end of the connecting arm is fixed on the sliding block, and the other end of the connecting arm is fixed to the supporting block. The right clamp has the same structure as the left clamp and is symmetrically arranged. A first sliding groove is provided on the bottom side of the mounting frame, and the sliding blocks of the left clamp and the right clamp are both slidably installed in the first sliding groove. The mounting frame is fixed with a first limiting rod in the first sliding groove, and the first limiting rod passes through the sliding blocks of the left clamp and the right clamp.

3. A handheld clamp for a photomask according to claim 1, characterized in that: The housing is a U-shaped housing, both ends of the housing are fixed with limiting slides, both sides of the mounting frame are provided with limiting slides, and the limiting slide is slidably installed in the limiting slide on the same side.

4. A handheld clamp for a photomask according to claim 3, characterized in that: A connecting block is fixed on the bottom side of the card shell, and a second slide groove connected to the first slide groove is provided on the upper side of the mounting frame. The connecting block is slidably installed in the second slide groove, and one end of the connecting block away from the card shell extends into the first slide groove and is fixedly connected to the sliding block of the left clamp.

5. A handheld clamp for a photomask according to claim 4, characterized in that: A pressing groove is provided on the top side of the mounting frame close to the hand-held part, the card plate is slidably installed in the pressing groove, the first spring is also installed in the pressing groove, one end of the first spring is fixed to the bottom of the card plate, and the other end of the first spring is fixed to the bottom side wall in the pressing groove, and a pressing block is provided at the end of the card plate away from the wedge block, and one end of the pressing block extends out of the pressing groove.

6. A handheld clamp for a photomask according to any one of claims 2 to 5, characterized in that: The bottom sides of the sliding blocks of the left and right clamps are both provided with rectangular holes, and the sliding blocks are slidably installed with a clamping rod in the rectangular hole. The lower end of the clamping rod extends out of the rectangular hole, and the lower end of the clamping rod is always located on the upper side of the support block, and a second limiting rod is passed through one end of the clamping rod located in the rectangular hole, and a vertical sliding groove connected with the rectangular hole is provided on the side wall of the sliding block, and an oblique sliding groove connected with the first sliding groove is provided on the side wall of the mounting frame, and one end of the second limiting rod is slidably installed in the vertical sliding groove and the oblique sliding groove.

7. A handheld clamp for a photomask according to claim 6, characterized in that: Buffer pads are arranged on the lower side of the abutting rod, the side wall of the connecting arm and the upper side of the supporting block.

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