Mother panel adsorption device

Abstract

According to an embodiment of the present invention, a mother panel adsorption device, as a device for inspecting whether there are defects in the display panel by adsorbing the other surface which is the reverse side of the above-mentioned one surface in a state where one surface of the mother panel faces downward, can minimize the decline of the adsorption ability even if part of the adsorption ability is lost during the process of adsorbing a large mother panel and transporting it to the required position, thereby preventing the decline of the stability and accuracy of transportation.

Description

Technical Field

[0001] The present invention relates to a mother panel adsorption device, and more particularly, to a mother panel adsorption device capable of adsorbing a large mother panel in a face-down manner and stably transporting it to a desired position. Background Art

[0002] Organic Light Emitting Diode (OLED) used as a flat panel display device has the advantages of wide viewing angle, excellent contrast, and fast response speed, so it has been widely used in smartphones, TVs, etc. recently.

[0003] In Organic Light Emitting Diode (OLED), an organic material layer for forming an organic light emitting layer is deposited on a panel serving as a substrate, thereby realizing pixels that emit light and colors through an electric signal.

[0004] Among them, if pixels are realized by depositing an organic material layer on a panel serving as a substrate, it is necessary to check whether there are defects in the pixels before the encapsulation process.

[0005] In the past, in order to prevent contamination from scattered particles during inspection, etc., inspection was performed in a face-down manner, that is, inspection was performed in a state where one surface where the deposition part of the display panel to be inspected is located faces down.

[0006] The display panel can be made into various sizes according to the usage purpose. In the manufacturing process, it is set on a mother glass panel, and the mother panel can be a single type with multiple display panels of the same size or a mixed type formed by mixing display panels of various sizes to improve the chamfering efficiency.

[0007] In the past, in order to inspect whether there are defects in the display panel, it was placed on a fishbone type platform module in a state where one surface where the deposition part of the display panel on the mother panel is located faces down, and the fishbone type platform module clamped the outer contour part where there is no deposition part on one surface where the deposition part is located in the above-mentioned state where the deposition part faces down, and moved it into the chamber for inspection.

[0008] After that, the other surface of the mother panel where there is no deposition part is adsorbed by a vacuum panel, and moved to the position where the probe block of the probe unit is located, and then the contact pads of the display panel are brought into contact with the probe block to perform inspection.

[0009] Although the conventional inspection method can be used to inspect the display panel on a mother panel with a small size, when inspecting whether there are defects in the display panel on a large mother panel in a face-down manner, serious problems will occur, so the conventional inspection method is in a situation where it is difficult to apply.

[0010] That is to say, if a large mother panel is placed on a Fishbone - type platform module with the surface where the evaporation - coating part is located facing down, the Fishbone - type platform module will support the outer contour part of the surface where the evaporation - coating part is located and where no evaporation - coating part is formed. At this time, the central part of the large mother panel sinks due to its own weight, so in fact, accurate inspection cannot be carried out.

[0011] In addition, the following problems occur in the conventional inspection method in addition to the above - mentioned problems.

[0012] The probe unit can only install probe blocks for inspecting whether a display panel of one type has defects. Therefore, when there are display panels of various sizes to be inspected on the mother panel and the display panels to be inspected are different, it is necessary to replace the new probe unit that matches it inevitably.

[0013] The replacement work of the probe unit is usually carried out manually by staff, so there are problems that the time required for replacement work increases and the output decreases.

[0014] Moreover, when replacing the probe unit, injuries or electric shocks to staff often occur.

[0015] Therefore, there is an urgent need to research and develop a device that can quickly and accurately inspect whether various types of display panels on a large mother panel have defects in a face - down manner to prevent contamination from scattered particles during inspection. Summary of the Invention

[0016] Problems to be Solved by the Invention

[0017] The object of the present invention is to provide a mother - panel adsorption device that can stably inspect whether there are defects in display panels of various sizes included in a large mother panel in a face - down manner.

[0018] More specifically, a mother - panel adsorption device is provided which can minimize the decrease in adsorption performance to prevent the decline in the stability and accuracy of transportation even if some adsorption functions are lost during the process of adsorbing a large mother panel and transporting it to a required position.

[0019] Solutions for Solving the Problems

[0020] According to the mother panel adsorption device of an embodiment of the present invention, in a state where one surface of the mother panel faces downward, by adsorbing the other surface, which is the reverse side of the mother panel, it is checked whether there are defects in the display panel. Among them, on one surface of the mother panel, at least one type of display panel with an organic material layer for forming an organic light-emitting layer vapor-deposited is provided. It is characterized in that it may include: a platform module that adsorbs and fixes the other surface of the mother panel in a normal state where one surface of the mother panel faces upward. The platform module includes a plurality of platform units for preventing the center of the mother panel from sinking due to its own weight, and rotates to change the mother panel from the normal state to a flipped state where one surface faces downward; a transportation module that adsorbs the other surface of the mother panel that changes from the normal state to the flipped state on the platform module, and then moves the mother panel in the flipped state to a position for checking whether there are defects in the display panel; among them, the plurality of platform units are respectively placed at intervals to form a first space therebetween. The transportation module includes: a plurality of transportation units that, when the platform module rotates to change the mother panel from the normal state to the flipped state, are inserted into the first space and adsorb the other surface placed in the flipped state, and prevent the center of the mother panel from sinking due to its own weight. The plurality of transportation units are respectively provided with adsorption parts placed at intervals to adsorb the other surface. The plurality of transportation units are divided into a plurality of combinations including at least one, and the plurality of combinations respectively control the adsorption function independently. When the adsorption parts included in a specific combination lose the adsorption function, the adsorption function of the adsorption parts included in other combinations is used to prevent the mother panel adsorbed on the other surface in the flipped state from falling off.

[0021] According to the mother panel adsorption device of an embodiment of the present invention, it is characterized in that the plurality of transportation units may respectively include vacuum pipelines for realizing the adsorption function, and the plurality of combinations share the vacuum pipelines.

[0022] According to the mother panel adsorption device of another embodiment of the present invention, in a state where one surface of the mother panel faces downward, by adsorbing the other surface, which is the reverse side of the above-mentioned mother panel, it is checked whether there are defects in the above-mentioned display panel. Among them, at least one type of display panel with an organic matter layer for forming an organic light-emitting layer vapor-deposited on one surface of the above-mentioned mother panel, and it is characterized in that it may include: a platform module, which adsorbs and fixes the other surface of the above-mentioned mother panel in a normal state where one surface of the mother panel faces upward. The above-mentioned platform module includes a plurality of platform units for preventing the central part of the above-mentioned mother panel from sinking due to its own weight, and rotates to change the above-mentioned mother panel from the above-mentioned normal state to the above-mentioned flipped state where one surface faces downward; a transportation module, which adsorbs the other surface of the above-mentioned mother panel that changes from the above-mentioned normal state to the above-mentioned flipped state on the above-mentioned platform module, and then moves the above-mentioned mother panel in the above-mentioned flipped state to a position for checking whether there are defects in the above-mentioned display panel; among them, the above-mentioned plurality of platform units are respectively placed at intervals, so as to form a first space between them. The above-mentioned transportation module includes: a plurality of transportation units, which are inserted into the above-mentioned first space and adsorb the above-mentioned other surface placed in the flipped state when the above-mentioned platform module rotates to change the above-mentioned mother panel from the above-mentioned normal state to the above-mentioned flipped state, and prevent the central part of the above-mentioned mother panel from sinking due to its own weight. The above-mentioned plurality of transportation units are respectively provided with adsorption parts placed at intervals to adsorb the above-mentioned other surface. The adsorption functions of the adsorption parts respectively provided in the above-mentioned plurality of transportation units are controlled individually. When an adsorption part loses the above-mentioned adsorption function, the above-mentioned mother panel adsorbed in the above-mentioned flipped state is prevented from falling off through the above-mentioned adsorption function of other adsorption parts.

[0023] According to another embodiment of the present invention, the mother panel adsorption device checks whether there are defects in the display panel by adsorbing the other surface, which is the reverse side of the mother panel, in a state where one surface of the mother panel faces downward. Among them, at least one type of display panel with an organic material layer for forming an organic light-emitting layer vapor-deposited on one surface of the mother panel. It is characterized in that it may include: a platform module that adsorbs and fixes the other surface of the mother panel in a normal state where one surface of the mother panel faces upward. The platform module includes a plurality of platform units for preventing the center of the mother panel from sinking due to its own weight, and rotates to change the mother panel from the normal state to a flipped state where one surface faces downward. A transport module that adsorbs the other surface of the mother panel that has changed from the normal state to the flipped state on the platform module, and then moves the mother panel in the flipped state to a first position for checking whether there are defects in the display panel. A vacuum adsorption module that checks whether there are defects in the display panel through the interaction with a probe unit equipped with a probe block. And a pickup module that adsorbs the other surface of the mother panel that has been moved to the first position by the transport module, and then moves to a second position while maintaining the flipped state. Through the vacuum adsorption module, the other surface of the mother panel is adsorbed in the flipped state, and the display panel is checked for defects through the interaction. The pickup module includes a plurality of pickup units that are arranged at intervals to be able to evenly adsorb the other surface of the mother panel. The plurality of pickup units are divided based on adsorption portions placed at intervals in the horizontal or vertical direction, and are divided into at least one plurality of combinations. Each of the plurality of combinations controls the adsorption function separately. When the adsorption portion included in a specific combination loses the adsorption function, the adsorption function of the adsorption portion included in other combinations is used to prevent the mother panel adsorbed on the other surface in the flipped state from falling off.

[0024] According to another embodiment of the present invention, the mother panel adsorption device is characterized in that each of the plurality of pickup units may include a vacuum pipeline for realizing the adsorption function, and the plurality of combinations share the vacuum pipeline.

[0025] The mother panel adsorption device according to another embodiment of the present invention inspects whether there are defects in the display panel by adsorbing the other surface which is the reverse side of the mother panel in a state where one surface of the mother panel faces downward. Among them, at least one type of display panel with an organic material layer for forming an organic light-emitting layer vapor-deposited on one surface of the mother panel, and it is characterized in that it may include: a platform module which adsorbs and fixes the other surface of the mother panel in a normal state where one surface of the mother panel faces upward. The platform module includes a plurality of platform units for preventing the center part of the mother panel from sinking due to its own weight, and rotates to change the mother panel from the normal state to a flipped state where one surface faces downward; a transportation module which adsorbs the other surface of the mother panel that changes from the normal state to the flipped state on the platform module, and then moves the mother panel in the flipped state to a first position for inspecting whether the display panel has defects; a vacuum adsorption module which inspects whether the display panel has defects through the interaction with a probe unit equipped with a probe block; and a pick-up module which adsorbs the other surface of the mother panel that is moved to the first position by the transportation module, and then moves to a second position while maintaining the flipped state. Through the vacuum adsorption module, the other surface of the mother panel in the flipped state is adsorbed, and whether the display panel has defects is inspected through the above interaction. The pick-up module includes a plurality of pick-up units which are arranged at intervals from each other so as to be able to evenly adsorb the other surface of the mother panel, and the adsorption functions of the plurality of pick-up units are controlled separately. When a specific pick-up unit loses the adsorption function, the mother panel adsorbed on the other surface in the flipped state is prevented from falling off through the adsorption functions of other pick-up units.

[0026] The mother panel adsorption device according to another embodiment of the present invention inspects whether there are defects in the display panel by adsorbing the other surface, which is the reverse side of the mother panel, in a state where one surface of the mother panel faces downward. Among them, at least one type of display panel with an organic material layer for forming an organic light-emitting layer vapor-deposited on one surface of the mother panel is provided. It is characterized in that it may include: a platform module that adsorbs and fixes the other surface of the mother panel in a normal state where one surface of the mother panel faces upward. The platform module includes a plurality of platform units for preventing the central part of the mother panel from sinking due to its own weight, and rotates to change the mother panel from the normal state to a flipped state where one surface faces downward; a transport module that adsorbs the other surface of the mother panel that has changed from the normal state to the flipped state on the platform module, and then moves the mother panel in the flipped state to a first position for inspecting whether there are defects in the display panel; a pickup module that adsorbs the other surface of the mother panel that has been moved to the first position by the transport module, and then moves to a second position while maintaining the flipped state; and a vacuum adsorption module that inspects whether there are defects in the display panel through the interaction between the mother panel moved to the second position by the pickup module and a probe unit equipped with a probe block. The vacuum adsorption module includes a plurality of vacuum adsorption units that are arranged at intervals to be able to evenly adsorb the other surface of the mother panel. The plurality of vacuum adsorption units are divided based on adsorption parts placed at intervals in the horizontal or vertical direction, and are divided into at least one plurality of combinations. Each of the plurality of combinations controls the adsorption function independently. When the adsorption part included in a specific combination loses the adsorption function, the adsorption function of the adsorption part included in other combinations is used to prevent the mother panel adsorbed on the other surface in the flipped state from falling off.

[0027] The mother panel adsorption device according to another embodiment of the present invention is characterized in that each of the plurality of pickup units may include a vacuum pipeline for realizing the adsorption function, and the plurality of combinations share the vacuum pipeline.

[0028] According to another embodiment of the present invention, a mother panel adsorption device inspects whether there are defects in the display panel by adsorbing the other surface, which is the reverse side of the mother panel, in a state where one surface of the mother panel faces downward. Among them, at least one type of display panel with an organic material layer for forming an organic light-emitting layer vapor-deposited on one surface of the mother panel. It is characterized by including: a platform module that adsorbs and fixes the other surface of the mother panel in a normal state where one surface of the mother panel faces upward. The platform module includes a plurality of platform units for preventing the central part of the mother panel from sinking due to its own weight, and rotates to change the mother panel from the normal state to a flipped state where one surface faces downward; a transportation module that adsorbs the other surface of the mother panel that has changed from the normal state to the flipped state on the platform module, and then moves the mother panel in the flipped state to a first position for inspecting whether there are defects in the display panel; a pick-up module that adsorbs the other surface of the mother panel that has been moved to the first position by the transportation module, and then moves to a second position while maintaining the flipped state; and a vacuum adsorption module that checks whether there are defects in the display panel through the interaction between the mother panel moved to the second position by the pick-up module and the probe unit equipped with a probe block. The vacuum adsorption module includes a plurality of vacuum adsorption units that are arranged at intervals to be able to evenly adsorb the other surface of the mother panel. The adsorption functions of the plurality of vacuum adsorption units are controlled separately. When a specific pick-up unit loses its adsorption function, the mother panel adsorbed on the other surface in the flipped state is prevented from falling off through the adsorption functions of other pick-up units.

[0029] Advantages of the Invention

[0030] According to the mother panel adsorption device of the present invention, it is possible to stably inspect whether there are defects in display panels of various sizes included in a large mother panel in a face-down manner.

[0031] In addition, during the process of adsorbing a large mother panel in a face-down manner and transporting it to a required position, even if some adsorption functions are lost, it is possible to prevent the decline in the stability and accuracy of transportation by minimizing the reduction in adsorption performance. Description of the Drawings

[0032] Figure 1 It is a diagram for explaining a display panel inspected for defects by a display panel inspection device according to the present invention.

[0033] Figure 2 It is a diagram for explaining various embodiments of the combination of display panels included in a mother panel that can be installed on a platform module provided in a display panel inspection device according to the present invention.

[0034] Figure 3 It is a structural block diagram for explaining the display panel inspection device of the present invention.

[0035] Figure 4 It is a diagram for explaining the display panel inspection device of the present invention.

[0036] Figure 5 and Figure 6 It is a diagram for explaining the air flow inside the inspection process execution device provided in the display panel inspection device of the present invention; wherein, Figure 5 is along Figure 4 a schematic cross-sectional view along the AA line of Figure 6 is along Figure 4 a schematic cross-sectional view along the BB line of

[0037] Figure 7 It is a flowchart for explaining the process of adsorbing a mother panel to a vacuum adsorption module by the mother panel conveying device provided in the display panel inspection device of the present invention.

[0038] Figure 8 It is a diagram for explaining the situation of installing a mother panel in a normal state on the platform module of the mother panel conveying device provided in the present invention.

[0039] Figure 9 and Figure 10 is for explaining in the Figure 8 shown situation, the diagram of transforming the mother panel in the normal state into the flipped state by the rotation of the platform module.

[0040] Figure 11 It is a diagram for explaining the situation where the conveying module of the mother panel conveying device provided in the present invention enters the platform module.

[0041] Figure 12 and Figure 13 It is a diagram for explaining the situation where the conveying module of the mother panel conveying device provided in the present invention adsorbs the mother panel in the flipped state.

[0042] Figure 14 It is a diagram for explaining the situation where the conveying module of the mother panel conveying device provided in the present invention moves to the first position.

[0043] Figure 15 and Figure 16 It is a diagram for explaining the situation where the pickup module of the mother panel conveying device provided in the present invention descends and adsorbs the mother panel in the flipped state.

[0044] Figure 17 It is a diagram for explaining the situation where the conveying module of the mother panel conveying device provided in the present invention returns to the original position.

[0045] Figure 18 This is a diagram for explaining the situation where the pick-up module of the mother panel conveying device provided in the present invention rises to the second position.

[0046] Figure 19 This is a diagram for explaining the situation where the pick-up module of the mother panel conveying device provided in the present invention rises to the third position.

[0047] Figure 20 This is a diagram for explaining the display panel inspection device of the display panel inspection equipment provided in the present invention.

[0048] Figures 21 to 28 This is a diagram for explaining the situation where the 65-inch display panel and the 55-inch display panel provided on the mother panel are inspected for defects by the inspection device of the display panel of the present invention.

[0049] Figure 29 This is a diagram for explaining another method of supplying power to the probes provided on the probe block.

[0050] Figure 30 and Figure 31 This is a diagram for explaining the method of fixing or detaching the probe block on the probe unit. Detailed implementation mode

[0051] The mother panel adsorption device according to an embodiment of the present invention checks whether there are defects in the display panel by adsorbing the other surface, which is the reverse side of the mother panel, in a state where one surface of the mother panel faces downward. Among them, at least one type of display panel with an organic material layer for forming an organic light-emitting layer vapor-deposited on one surface of the mother panel is provided. It is characterized in that it may include: a platform module that adsorbs and fixes the other surface of the mother panel in a normal state where one surface of the mother panel faces upward. The platform module includes a plurality of platform units for preventing the central part of the mother panel from sinking due to its own weight, and rotates to change the mother panel from the normal state to a flipped state where one surface faces downward; a transport module that adsorbs the other surface of the mother panel that changes from the normal state to the flipped state on the platform module, and then moves the mother panel while maintaining the flipped state to a position for checking whether there are defects in the display panel. Among them, the plurality of platform units are respectively placed at intervals to form a first space therebetween. The transport module includes: a plurality of transport units that, when the platform module rotates to change the mother panel from the normal state to the flipped state, are inserted into the first space and adsorb the other surface placed in the flipped state, and prevent the central part of the mother panel from sinking due to its own weight. The plurality of transport units are respectively provided with adsorption parts placed at intervals to adsorb the other surface. The plurality of transport units are divided into a plurality of combinations including at least one, and the plurality of combinations respectively control the adsorption function independently. When the adsorption parts included in a specific combination lose the adsorption function, the mother panel adsorbed on the other surface in the flipped state is prevented from falling off by the adsorption function of the adsorption parts included in other combinations.

[0052] Best Mode for Carrying Out the Invention

[0053] Hereinafter, specific embodiments of the present invention will be described in detail with reference to the accompanying drawings. However, the idea of the present invention is not limited to the mentioned embodiments. Those skilled in the art who understand the idea of the present invention can easily propose other inventions that lag behind or other embodiments within the scope of the idea of the present invention by adding, changing, deleting, etc. to other components. However, these are also included in the scope of the idea of the present invention.

[0054] Moreover, components having the same functions within the same scope of the idea shown in the drawings of each embodiment are described using the same reference numerals.

[0055] 1. Display Panel and Mother Panel

[0056] Figure 1 It is a diagram for explaining a display panel for checking whether there are defects by a display panel inspection device according to the present invention; Figure 2FIG. is a diagram for explaining various embodiments of combinations of display panels included in a mother panel that can be installed on a platform module of a display panel inspection device according to the present invention.

[0057] Referring to Figure 1 , the display panel DP has an organic layer for forming an organic light-emitting layer vapor-deposited on a panel as a substrate to implement pixels, and before the encapsulation process, it can be inspected for defects by the display panel inspection device 1000 of the present invention (refer to Figure 3 and Figure 4 ).

[0058] To inspect whether the pixels are defective, the display panel DP may include: a first electrode plate EP1 formed along a first edge region of one of the edge regions of the upper surface; a second electrode plate EP2 formed along another second edge region of the edge regions of the upper surface; a third electrode plate EP3 formed along yet another third edge region of the edge regions of the upper surface; and a fourth electrode plate EP4 formed along yet another fourth edge region of the edge regions of the upper surface.

[0059] However, in the above display panel DP, the formation positions and numbers of the electrode plates may vary according to the characteristics of the panel. Hereinafter, taking the display panel DP shown in Figure 1 as an example, the process of inspecting for defects and the like will be described.

[0060] In the manufacturing process, after forming a plurality of the above display panels DP on a mother panel MP whose size is dependently determined by the size of the platform module 110 (refer to Figure 3 and Figure 4 ), the above display panel DP can be manufactured through processes such as cutting, and the above mother panel MP can be a glass substrate serving as the production basis of the display panel DP.

[0061] In order to minimize the blank space and improve the efficiency of defect inspection, that is, improve the chamfering efficiency, the above mother panel MP can be a single type with a plurality of display panels DP of the same size or a mixed type formed by mixing various sizes of display panels DP.

[0062] For example, the above mother panel MP can be a mixed type of 2 98-inch display panels as shown in a of Figure 2 , a mixed type of 3 65-inch display panels and 6 32-inch display panels as shown in b of Figure 2 , a single type of 18 31.5-inch display panels as shown in c of Figure 2 , a mixed type of 2 49-inch display panels and 2 75-inch display panels as shown in d of Figure 2 and as shown in Figure 2a hybrid type including three 65-inch display panels and two 55-inch display panels as shown in e, but not necessarily limited thereto. The above-mentioned mother panel MP can be a panel of a hybrid type applicable to display panels of various sizes.

[0063] The display panel inspection device 1000 of the present invention can separately inspect whether all the display panels included in the mother panel MP of the above-mentioned various combinations of hybrid types are defective; hereinafter, the case where the mother panel is of a hybrid type formed with three 65-inch display panels and two 55-inch display panels will be described as a typical example.

[0064] 2. Display Panel Inspection Device

[0065] Figure 3 is a structural block diagram for explaining the display panel inspection device according to the present invention. Figure 4 is a diagram for explaining the display panel inspection device according to the present invention.

[0066] Referring to Figure 3 and Figure 4 , the display panel inspection device 1000 of the present invention can be an inspection device as follows: It can inspect whether the display panels DP of various sizes included in the mother panel MP are defective by a back adsorption method (i.e., a face-down method) without replacing the probe units PU1, PU2 (refer to Figure 20 ), thereby maximizing the accuracy and speed of the defect inspection. The above-mentioned display panel inspection device 1000 can include an inspection process preparation device 1100 and an inspection process execution device 1200.

[0067] The inspection process preparation device 1100 is a device for moving the mother panel MP. When at least one or more display panels DP are formed on one surface of the mother panel MP, wherein an organic layer for forming an organic light-emitting layer is vapor-deposited on the above-mentioned display panel DP, and in the normal state where the other surface of the mother panel MP faces upward, when the other surface of the mother panel MP is adsorbed to the platform module 110, the platform module 110 rotates to make the mother panel MP change from the normal state to a flipped state where one surface is face down, and then the transfer module 120 receives the mother panel MP in the flipped state and is used for subsequent processes while maintaining the flipped state.

[0068] The inspection process execution device 1200 can be a device that, after the pick-up module 130 adsorbs the other surface of the mother panel MP that enters through the above-mentioned transfer module 120, the vacuum adsorption module 140 adsorbs the mother panel MP in the flipped state by moving the position of the pick-up module 130, and makes the electrode plate of the display panel DP contact the probe 3002 (refer to Figure 22 ) of the probe block PB (refer to Figure 22 ) of the display panel inspection device 200 through the position movement of the vacuum adsorption module 140 to check whether there are defects in the display panel DP.

[0069] On the other hand, in the display panel inspection device 1000 of the present invention, the components from when the mother panel MP is installed on the platform module 110 to when the mother panel MP is adsorbed by the vacuum adsorption module 140 through the transfer module 120 by means of the pick-up module 130 can be defined as the mother panel transfer device 100; refer to Figures 20 to 28 Specifically describe the process of checking whether there are defects in the display panel DP adsorbed on the vacuum adsorption module 140 by the mother panel transfer device 100 through the display panel inspection device 200 including the probe block assembly 2000 and the probe block carrying unit 3000.

[0070] Figure 5 And Figure 6 are diagrams for explaining the air flow in the inspection process execution device provided on the display panel inspection device according to the present invention; among them, Figure 5 is a schematic cross-sectional view along the Figure 4 AA line of Figure 6 is a schematic cross-sectional view along the Figure 4 BB line of

[0071] Refer to Figure 5 and Figure 6 and Figure 3 and Figure 4 , the inspection process execution device 1200 can include: a first space portion 300, which checks whether there are defects in the display panel DP by making the electrode plate of the display panel DP contact the probe 3002 (refer to Figure 22 ) of the probe block PB (refer to Figure 22 ); and a second space portion 400, which is provided with a vision module 410, wherein the vision module 410 is movably arranged and checks whether there are stains, scratches, etc. on the display panel DP by photographing the display panel DP that is the object to be inspected for defects.

[0072] Among them, for example, the above-mentioned vision module 410 may include 4 camera units. The working distance (WD) of the camera units varies according to the size of the display panel DP as the object to be photographed, so it can be moved upward or downward.

[0073] In addition, the 4 camera units need to photograph the entire area of the display panel DP corresponding to the size of the display panel DP as the object to be photographed. Therefore, they need to be located at the center of the 1 / 4 area of the display panel DP as the object to be photographed respectively. For this purpose, they can be moved forward or backward, left or right. In addition, according to needs, they can also rotate forward or backward to correspond to the rotation of the display panel DP as the object to be photographed.

[0074] On the other hand, the inspection of whether there are defects in the display panel DP inside the inspection process preparation device 1100 and the inspection process execution device 1200 can be carried out in a nitrogen atmosphere.

[0075] In particular, for the inspection process execution device 1200, the above-mentioned nitrogen needs to achieve stable circulation in the first space part 300 and the second space part 400 without staying.

[0076] For this purpose, the above-mentioned inspection process execution device 1200 may include: a forced circulation module 310 located in the upper part of the first space part 300; a first circulation pipeline module 320 that connects the upper and lower parts for the circulation of the nitrogen in the first space part 300; and a second circulation pipeline module 420 that connects the first space part 300 and the second space part 400.

[0077] The above-mentioned second circulation pipeline module 420 can enable the nitrogen flowing from the first space part 300 into the second space part 400 to flow back into the first space part 300 to achieve circulation. A forced air suction module 430 may be formed in the above-mentioned second circulation pipeline module 420.

[0078] Among them, the above-mentioned forced circulation module 310 and the above-mentioned forced air suction module 430 are a kind of suction fans. The above-mentioned forced air suction module 430 is located on the above-mentioned second circulation pipeline module 420. After inhaling the nitrogen flowing from the first space part 300 into the second space part 400, it discharges it into the first space part 300.

[0079] Therefore, the above-mentioned inspection process execution device 1200 can carry out the display panel inspection process in a uniform nitrogen atmosphere.

[0080] On the other hand, when maintaining the process preparation equipment 1100 and the inspection process execution equipment 1200, it is necessary for the staff to enter the interior, so it can be converted into a Clean Dry Air (CDA) atmosphere.

[0081] 3. Mother Panel Transfer Device

[0082] It is a flowchart for explaining the process of adsorbing the mother panel to the vacuum adsorption module by the mother panel transfer device provided on the display panel inspection equipment according to the present invention.

[0083] First, refer to Figure 3 and Figure 4 , the mother panel transfer device 100 may include a platform module 110, a transfer module 120, a pickup module 130, a vacuum adsorption module 140, etc.

[0084] The above platform module 110, as a component for adsorbing and fixing the other surface of the mother panel MP in a normal state where one surface of the mother panel MP faces upward, at least one or more display panels DP may be formed on one surface of the mother panel MP. Among them, an organic layer for forming an organic light-emitting layer is vapor-deposited on the display panel DP.

[0085] Among them, the above other surface of the mother panel MP may be an overall non-vapor-deposited portion.

[0086] The above platform module 110 can rotate so as to inspect the display panel in a face-down manner, so that the mother panel MP placed and adsorbed on the platform module 110 in the above normal state can become a flipped state, that is, a state where the above one surface faces downward.

[0087] The above transfer module 120 may be a component for adsorbing the other surface of the mother panel MP whose state changes from the above normal state to the above flipped state on the platform module 110, and then keeping the mother panel MP in the above flipped state and moving it to the first position for defect inspection.

[0088] The above pickup module 130, as a component for adsorbing the other surface of the mother panel MP that has moved to the first position through the above transfer module 120 and then moving it to the second position while maintaining the above flipped state, that is, a position that rises based on the above first position, the pickup module 130 can cause the plate-shaped vacuum adsorption module 140 described later to adsorb the mother panel MP in the above flipped state.

[0089] The above-mentioned vacuum adsorption module 140 can be a component that, when the mother panel MP in the inverted state is moved to the second position by the above-mentioned conveying module 120, can adsorb the mother panel MP while maintaining smoothness in the inverted state, and then checks whether the display panel DP is defective through the interaction between the probe 3002 of the probe block PB of the display panel inspection device 200.

[0090] When the mother panel MP is adsorbed in the inverted state by the above-mentioned vacuum adsorption module 140, the vacuum adsorption module 140 makes the electrode plate of the display panel DP contact the probe 3002 of the probe block PB through position movement while keeping the mother panel MP in the inverted state, so as to check whether the display panel DP is defective in the inverted state.

[0091] Among them, the reason why the mother panel MP finally needs to be adsorbed on the vacuum adsorption module 140 while maintaining the inverted state is to accurately control the position of the display panel DP for checking whether the display panel DP is defective and to maintain the smoothness of the display panel DP. If the display panel inspection device 200 is moved in a state where the mother panel MP is adsorbed by other components rather than the vacuum adsorption module 140, problems such as smoothness will occur, so it is impossible to ensure accurate defect inspection.

[0092] Hereinafter, the process in which the mother panel MP is adsorbed on the vacuum adsorption module 140 by the mother panel conveying device 100 according to the present invention will be described.

[0093] Refer to Figure 7 , the steps of adsorbing the mother panel on the vacuum adsorption module by the mother panel conveying device 100 according to the present invention may include: the first step S10, the mother panel MP is placed on the platform module 110 in a normal state; the second step S20, the above-mentioned platform module 110 rotates; the third step S30, the conveying module 120 enters and adsorbs the above-mentioned mother panel MP; the fourth step S40, the above-mentioned conveying module 120 moves to the first position; the fifth step S50, the pickup module 130 descends and adsorbs the above-mentioned mother panel MP; the sixth step S60, the above-mentioned conveying module 120 returns; the seventh step S70, the above-mentioned pickup module 130 rises to the second position; the eighth step S80, the display panel DP is adsorbed by the vacuum adsorption module 140; and the ninth step S90, the above-mentioned pickup module 130 rises and moves to the third position.

[0094] Hereinafter, refer to Figures 8 to 19 Specifically describe each of the above steps.

[0095] Figure 8This is a diagram for explaining the situation where a mother panel is installed in a normal state on a platform module provided on a mother panel conveying device according to the present invention.

[0096] Referring to Figure 8 , the mother panel MP can be adsorbed after being placed on the platform module 110 in a normal state (S10).

[0097] Here, it should be noted that, for the sake of easy explanation, one surface of the above-mentioned mother panel MP having at least one display panel DP is represented by shading.

[0098] On the other hand, the method of placing the above-mentioned mother panel MP on the above-mentioned platform module 110 is not particularly limited, and it can be, for example, an automatic method such as by means of a robot device in a nitrogen atmosphere or a manual method by a worker, etc.

[0099] The above-mentioned platform module 110 may include a plurality of platform units 112 for adsorbing the other surface SF2 of the above-mentioned mother panel MP in the above-mentioned normal state, and the above-mentioned platform units 112 are respectively placed at intervals from each other, so as to form a first space S1 therebetween.

[0100] For example, as Figure 8 shown, 9 such platform units 112 can be formed, but it is not necessarily limited thereto. As long as the above-mentioned mother panel MP to be supported can be stably supported so that its central part does not sink due to its own weight, the number can be changed.

[0101] The above-mentioned platform unit 112 may be provided with a plurality of adsorption parts 114 for adsorbing the above-mentioned mother panel MP, and the above-mentioned adsorption parts 114 can achieve the adsorption function through vacuum.

[0102] Figure 9 And Figure 10 This is a diagram for explaining the situation where, in the case shown in Figure 8 , through the rotation of the platform module, the mother panel in the normal state is changed to the flipped state.

[0103] Referring to Figure 9 And Figure 10 , the above-mentioned platform module 110 can rotate R (S20) in the state of adsorbing the above-mentioned mother panel MP in the normal state, and the rotation direction is not restricted.

[0104] The driving method for rotating the above-mentioned platform module 110 is not particularly limited. For example, a known motor or the like can be used for rotation.

[0105] When the above-mentioned platform module 110 rotates, the state of the mother panel MP adsorbed in the normal state will become the flipped state, that is, the surface SF1 formed with the evaporation part faces downward.

[0106] During the inspection for defects, the above-mentioned mother panel MP remains in the flipped state all the time, so that it can be checked for defects by the display panel DP in the face-down manner.

[0107] Figure 11 It is a diagram for explaining the situation where the conveying module provided on the mother panel conveying device according to the present invention enters the platform module. Figure 12 and Figure 13 It is a diagram for explaining the situation where the conveying module provided on the mother panel conveying device according to the present invention adsorbs the mother panel in the flipped state.

[0108] Refer to Figures 11 to 13 , when the mother panel MP is in the flipped state by the rotation of the above-mentioned platform module 110, the conveying module 120 will adsorb the mother panel MP (S30) after entering the above-mentioned platform module 110.

[0109] The above-mentioned conveying module 120 may include a plurality of conveying units 122 for adsorbing the other surface SF2 of the above-mentioned mother panel MP inserted into the first space S1 formed by the above-mentioned platform unit 112 and placed in the flipped state.

[0110] The above-mentioned conveying units 122 may also be placed at intervals similar to the above-mentioned platform unit 112.

[0111] For example, as Figure 8 shown, the above-mentioned conveying units 122 may be formed into 8, but not limited thereto.

[0112] The above-mentioned conveying units 122 may adsorb the other surface SF2 of the mother panel MP after entering the first space S1 formed by the mother panel MP and the platform unit 112, and for the need of adsorbing the mother panel MP, it is okay to move in the vertical direction even.

[0113] The above-mentioned conveying units 122 may be provided with a plurality of adsorption parts 124 for respectively adsorbing the mother panel MP placed at intervals, and the above-mentioned adsorption parts 124 may achieve the adsorption function through vacuum.

[0114] As described above, when the mother panel MP is adsorbed by the above-mentioned conveying units 122, the adsorption of the mother panel MP by the above-mentioned platform unit 112 is released, so that the mother panel MP is linked with the movement of the above-mentioned conveying units 122.

[0115] Figure 14 It is a diagram for explaining the situation where the conveying module provided on the mother panel conveying device according to the present invention moves to the first position.

[0116] Reference Figure 14 While in the state of the mother panel MP in the adsorption and flipping state, the transportation module 120 maintains the above flipping state and moves to the first position (S40) for checking whether there are defects.

[0117] Among them, the above first position may refer to the position where the mother panel MP in the above flipping state is located below it, based on the positions where the vacuum adsorption module 140 and the picking module 130 are placed. Thus, in the subsequent steps, the above picking module 130 stably adsorbs the above mother panel MP in the above flipping state in a manner that maintains the above flipping state.

[0118] Figure 15 And Figure 16 is a diagram for explaining the situation where the picking module provided on the mother panel transportation device according to the present invention descends and adsorbs the mother panel in the adsorption and flipping state. Figure 17 is a diagram for explaining the situation where the transportation module provided on the mother panel transportation device according to the present invention returns to the original position.

[0119] Reference Figure 15 And Figure 16 While in the state of being located at the third position, the picking module 130 can descend, move to the first position after passing through the vacuum adsorption module 140, and can adsorb the mother panel MP in the flipping state that has moved to the above first position through the transportation module 120 (S50).

[0120] The above picking module 130 may include a plurality of picking units placed at intervals from each other, which evenly adsorb the other surface SF2 of the above mother panel MP to prevent it from sagging.

[0121] The above plurality of picking units may be divided based on the adsorption parts 132 placed at intervals in the horizontal or vertical direction, and the above adsorption parts 132 can achieve the adsorption function through vacuum.

[0122] When the above mother panel MP is adsorbed by the above picking module 130, as Figure 17 shown, the transportation module 120 can release the adsorption and separate from the above mother panel MP, and thus move to the original position (S60).

[0123] The above transportation module 120 that has moved to the original position can be operated to check other display panels provided in other mother panels.

[0124] Figure 18 is a diagram for explaining the situation where the picking module provided on the mother panel transportation device according to the present invention rises to the second position.

[0125] Reference Figure 18, after the pickup module 130 picks up the mother panel MP in the adsorption and flipping state, it can move up to the second position (S70), so that the vacuum adsorption module 140 can adsorb the above-mentioned mother panel MP.

[0126] Among them, the above-mentioned second position can be based on the above-mentioned first position. By the above-mentioned pickup module 130 moving up to the position of the above-mentioned vacuum adsorption module 140, the above-mentioned vacuum adsorption module 140 can stably adsorb the above-mentioned mother panel MP in a flipped state through the above-mentioned pickup module 130.

[0127] As Figure 15 shown, the vacuum adsorption module 140 can include a plurality of vacuum adsorption units 142 arranged at intervals to uniformly adsorb the other surface SF2 of the above-mentioned mother panel MP.

[0128] The above-mentioned plurality of vacuum adsorption units 142 can be divided based on the adsorption parts 144 arranged at intervals in the horizontal or vertical direction, and the above-mentioned adsorption parts 144 can achieve the adsorption function through vacuum.

[0129] Figure 19 is a diagram for explaining the situation where the pickup module provided on the mother panel conveying device according to the present invention rises to the third position.

[0130] Refer to Figure 19 , when the other surface SF2 of the above-mentioned mother panel MP moved to the second position is adsorbed by the above-mentioned vacuum adsorption module 140, the pickup module 130 will release the adsorption and separate from the above-mentioned mother panel MP, and then rise and return to the above-mentioned third position (S990).

[0131] Then, the inspection for defects can be carried out through the interaction between the above-mentioned vacuum adsorption module 140 and the display panel inspection device 200.

[0132] Among them, the above-mentioned interaction can refer to achieving contact with the probe 3002 of the electrode plate and the probe block PB of the display panel DP placed on the mother panel MP by moving the position of the vacuum adsorption module 140, so as to inspect whether the display panel DP has defects.

[0133] Hereinafter, the process of inspecting whether the display panel DP has defects by the display panel inspection device 200 will be specifically described.

[0134] 4. Display Panel Inspection Device

[0135] Figure 20 is a diagram for explaining the display panel inspection device provided on the display panel inspection device according to the present invention.

[0136] Refer toFigure 20 The display panel inspection device 200, as a device capable of inspecting LCDs, OLEDs, etc., is applicable to all devices that use the probe units PU1, PU2, and the probe block PB to inspect the display panel.

[0137] That is to say, the above-mentioned display panel inspection device 200 can be applicable not only to the device that inspects in the face-down manner as described with reference to Figures 1 to 19 but also to the device that inspects in the face-up manner.

[0138] Hereinafter, the case where the above-mentioned display panel inspection device 200 is applicable to the device that inspects in the face-down manner as described with reference to Figures 1 to 19 will be taken as an example for description.

[0139] The above-mentioned display panel inspection device 200 may include a probe block assembly 2000 and a probe block carrier unit 3000.

[0140] The above-mentioned probe block assembly 2000 is configured to move the position of the vacuum adsorption module 140 that adsorbs the other surface of the mother panel MP in a face-down flipped state on one surface of the mother panel MP, so that the display panel DP moved to the inspection position can be inspected for defects in a flipped state. The above-mentioned probe block assembly 2000 may include a probe block PB that contacts the electrode plate of the above-mentioned display panel DP and probe units PU1, PU2 that support the above-mentioned probe block PB.

[0141] Among them, the above-mentioned probe block assembly 2000 may also be configured to move the position of the vacuum adsorption module that adsorbs the mother panel MP in the face-up manner, so that the display panel DP moved to the inspection position can be inspected for defects.

[0142] The above-mentioned probe block carrier unit 3000 is configured to carry and store various types of probe blocks PB, and can carry the carried probe blocks PB in and out.

[0143] In order to perform the detection of the display panel DP, the above-mentioned probe block PB can be selected and carried out in the state of being carried on the above-mentioned probe block carrier unit 3000, and installed at a specified position on the above-mentioned probe units PU1, PU2.

[0144] The above-mentioned probe units PU1, PU2 may include a first probe unit PU1 for inspecting the display panel DP and a second probe unit PU2 for inspecting other display panels of different sizes after the inspection of the above-mentioned display panel DP is completed.

[0145] The above-mentioned first probe unit PU1 may include: a first-1 probe unit PU1-1 arranged along the transverse direction D1, a first-2 probe unit PU1-2 arranged along the longitudinal direction D2, a first-3 probe unit PU1-3 arranged along the longitudinal direction D2, and a first-4 probe unit PU1-4 arranged along the transverse direction D1.

[0146] The above-mentioned second probe unit PU2 may include: a second-1 probe unit PU2-1 arranged along the transverse direction D1, a second-2 probe unit PU2-2 arranged along the longitudinal direction D2, a second-3 probe unit PU2-3 arranged along the longitudinal direction D2, and a second-4 probe unit PU2-4 arranged along the transverse direction D1.

[0147] Among them, the above-mentioned first-1 probe unit PU1-1 and the second-1 probe unit PU2-1 may be formed as a single unit as shown in the figure.

[0148] The probe block PB carried on the above-mentioned probe block carrying unit 3000 may be carried out and installed on the probe units PU1 and PU2 based on the display panel DP to be inspected, and the carrying out and installation of the probe block PB may be performed by a carrying out and installation device not shown in the figure.

[0149] The carrying out and installation device may be various known devices such as a robotic arm, for example, including a belt or a guide rail, etc., and there is no particular limitation.

[0150] Hereinafter, a process of inspecting whether there are defects in a 65-inch display panel and a 55-inch display panel placed on a mother panel by the display panel inspection device 200 shown in Figure 20 will be described.

[0151] Figures 21 to 28 is a diagram for explaining a case where a 65-inch display panel and a 55-inch display panel placed on a mother panel are inspected for defects by the display panel inspection device according to the present invention.

[0152] First, an example will be described as follows: Assume that a mother panel MP contains 3 65-inch display panels and 2 55-inch display panels, and electrode plates are provided on each side of each display panel. Assume that the 65-inch display panels are preferentially inspected, and after all the 65-inch display panels are inspected, the 55-inch display panels are inspected.

[0153] The display panel inspection device 200 according to the present invention detects through a detection unit not shown that the mother panel MP contains 3 65-inch display panels and 2 55-inch display panels.

[0154] The above detection unit may include an imaging unit using a camera or the like and / or various sensor units or the like. After the above mother panel MP is placed on the platform module 110, in a state where the above mother panel MP is adsorbed on the above vacuum adsorption module 140 and before or during the movement to the position where the above probe units PU and PU2 are placed, the size of the display panel DP constituting the above mother panel MP, the number of electrode plates of the display panel DP, and the formation position and the like are detected.

[0155] Of course, for the detection of the number and formation position and the like of the electrode plates of the above display panel DP by the above detection unit, as long as it is before the inspection by the display panel inspection device 200, there is no time limit.

[0156] When the size and / or type of the display panel DP constituting the above mother panel MP is detected by the above detection unit, the control unit determines which type of display panel to inspect first. As described above, the following takes the case where the 65-inch display panel is determined as the inspection object first compared to the 55-inch display panel as an example for explanation.

[0157] The control unit detects the size and / or type of the display panel formed on the mother panel MP. When the 65-inch display panel is preferentially detected among the detected display panels, the above control panel selects the probe block PB required for inspection from the probe blocks PB carried on the probe block carrying unit 3000 based on the number and formation position and the like of the electrode plates of the 65-inch display panel detected by the above detection unit, and in the installation area SR on the probe units PU1 and PU2, selects and determines the installation area SR where the selected probe block is to be installed.

[0158] Among them, the above installation area SR is an area for separately installing each probe block PB, and the above probe units PU1 and PU2 may include multiple installation areas SR, and according to the type of the display to be inspected, the formation position and number of electrode plates and the like, the probe block may not be installed in a specific installation area SR.

[0159] On the other hand, when the above process is completed, the above control unit controls the first probe unit PU1.

[0160] That is, in a state where the above first - 1 probe unit PU1 - 1 is fixed, the above control unit moves at least one of the above first - 2 probe unit PU1 - 2, the above first - 3 probe unit PU1 - 3, and the above first - 4 probe unit PU1 - 4, so that the first probe unit PU1 is placed at a position corresponding to the electrode plates provided on the above 65-inch display panel.

[0161] For example, as Figure 21As shown, in a state where the above-described first probe unit PU1-1 is fixed to the support plate unit 210, the control unit can move the position of the above-described first probe unit PU1-2, the above-described first probe unit PU1-3, and the above-described first probe unit PU1-4 on the above-described support plate unit 210, and the position movement can be a position movement based on linear movement.

[0162] Among them, the above-described position movement can be achieved using various known components such as linear motion guides, motors, ball screws, and ball nuts, but this is only an example, and various known movement methods can be applied to achieve it.

[0163] The above-described first probe unit PU1-2 and the above-described first probe unit PU1-3 can approach each other by a predetermined distance, and the first probe unit PU1-4 can approach the first probe unit PU1-1 by a predetermined distance.

[0164] Among them, when the above-described first probe unit PU1-4 performs a linear movement, the position movement can be achieved below the above-described first probe unit PU1-2 and the above-described first probe unit PU1-3 to prevent interference with the above-described first probe unit PU1-2 and the above-described first probe unit PU1-3.

[0165] As described above, when the position movement of the first probe unit PU1 is completed for inspecting a 65-inch display panel, the control unit controls the transfer and installation device so that the selected probe block PB is installed in a predetermined area SR in the first probe unit PU1-1, a predetermined area SR in the first probe unit PU1-2, a predetermined area in the first probe unit PU1-3, and a predetermined area in the first probe unit PU1-4 through the above-described transfer and installation device.

[0166] As Figure 22 and Figure 23 shown, the installation of the probe block PB can be stably achieved through the interaction of the position fixing portions 3001, 3003 and the guiding portions 3005, 3007. The above-described position fixing portions 3001, 3003 can include a first position fixing portion 3001 recessed from the bottom surface of the above-described probe block PB, and a second position fixing portion 3003 protruding from the bottom surface.

[0167] The above-described guiding portions 3005, 3007 can include a first guiding portion 3005 protruding from the upper surface of the above-described probe units PU1, PU2, and a second guiding portion 3007 recessed from the upper surface.

[0168] In the above-mentioned probe block PB, the first position fixing portion 3001 cooperates with the first guiding portion 3005, and the second position fixing portion 3003 cooperates with the second guiding portion 3007, so that it can be stably installed in the installation area SR on the above-mentioned probe units PU1 and PU2.

[0169] In order to guide the installation position of the probe block PB, guiding portions 3005 and 3007 that interact with the position fixing portions 3001 and 3003 formed on the probe block PB can be provided in the installation area SR of the above-mentioned probe units PU1 and PU2. And as a method for stably installing the above-mentioned probe block PB in the above-mentioned probe units PU1 and PU2, other known methods other than the above-mentioned method can also be used.

[0170] On the other hand, when the above-mentioned probe block PB is removed from the above-mentioned probe block carrier unit 3000 and installed in the installation area SR on the above-mentioned probe units PU1 and PU2, as Figure 22 and Figure 23 shown, power can be supplied to the probe 3002 of the above-mentioned probe block PB through the electrical connection between the connection terminal 3006 and the power supply applying portion 3009.

[0171] The above-mentioned power supply applying portion 3009 can be a circuit board formed with a power supply terminal pattern. When the above-mentioned probe block PB is installed on the above-mentioned probe units PU1 and PU2, the above-mentioned power supply applying portion 3009 can supply power to the above-mentioned probe block PB.

[0172] The above-mentioned probe block PB can include: a probe 3002 that contacts the electrode plate of the display panel; a main body 3004 that supports the above-mentioned probe 3002, and a connection terminal 3006 that applies the above-mentioned power to the above-mentioned probe 3002 through contact with the above-mentioned power supply applying portion 3009; and a circuit pattern portion 3008 that electrically connects the above-mentioned probe 3002 and the above-mentioned connection terminal 3006. And the above-mentioned circuit pattern portion 3008 can be a printed circuit board.

[0173] Among them, the above-mentioned connection terminal 3006 can be formed to have the same number as or less than the number of power supply terminals powered by the power supply applying portion 3009. And when the number of the above-mentioned probes 3002 is less than the number of the above-mentioned power supply terminals, the above-mentioned circuit pattern portion 3008 can be a printed circuit board that can apply only a part of the power applied to the above-mentioned power supply terminals to the above-mentioned probes 3002.

[0174] On the other hand, among the probe blocks removed from the probe block carrier unit 3000 by moving out the mounting unit, in the height direction D3, compared with the probe blocks PB removed from the above-mentioned probe block carrier unit 3000 and mounted on the above-mentioned first-second probe unit PU1-2 or the above-mentioned first-third probe unit PU1-3, the probe block PB mounted in the above-mentioned first-fourth probe unit PU1-4 is formed to be longer, so as to compensate for the position of the above-mentioned first-fourth probe unit PU1-4 in the above-mentioned height direction D3 based on the above-mentioned first-second probe unit PU1-2 and the above-mentioned first-third probe unit PU1-3.

[0175] In other words, the display panel DP as the object to be inspected will remain in a horizontal state. In this state, in order to make the probes 3002 of all the probe blocks PB contact all the electrode plates, the probes 3002 of all the probe blocks PB need to be located at the same height.

[0176] For the above reasons, compared with the above-mentioned first-second probe unit PU1-2 and the above-mentioned first-third probe unit PU1-3, for the first-fourth probe unit PU1-4 located at a relatively lower position, compared with the probe blocks PB mounted on the above-mentioned first-second probe unit PU1-2 and the above-mentioned first-third probe unit PU1-3, a longer probe block PB needs to be mounted in the height direction D3.

[0177] Finally, when the probe block PB needs to be mounted on the first-fourth probe unit PU1-4, the control unit will select the probe block PB for position compensation in the height direction D3.

[0178] Of course, for the probe block PB that needs to be mounted on the above-mentioned first-fourth probe unit PU1-4, it can also be combined with a separate component such as a spacer, so that, compared with the probe blocks PB mounted on the above-mentioned first-second probe unit PU1-2 and the above-mentioned first-third probe unit PU1-3, it is formed to be longer in the height direction D3.

[0179] The above describes the case where after the first probe unit PU1 is placed at a position corresponding to the electrode plates provided on the above-mentioned 65-inch display panel by the control unit, the probe block PB is mounted on the above-mentioned first probe unit PU1. However, it is not limited to this. It can also be that after the above-mentioned probe block PB is mounted on the above-mentioned first probe unit PU1, the above-mentioned first probe unit PU1 mounted on the above-mentioned probe block PB is placed at a position corresponding to the electrode plates provided on the above-mentioned 65-inch display panel.

[0180] As Figure 24 shown, when the installation of the probe block PB for inspecting the above-mentioned 65-inch display panel is completed on the first probe unit PU1, asFigure 25 As shown, the above-mentioned first probe unit PU1 will rotate 180 degrees through the support plate unit 210.

[0181] After the first probe unit PU1 rotates through the rotation of the support plate unit 210, the position movement of the vacuum adsorption module 140 causes the probe 3002 of the probe block PB mounted on the first probe unit PU1 to contact the electrode plate in the 65-inch display panel, and the power supply from the power supply application unit 3009 is used to check for defects.

[0182] On the other hand, as Figure 26 shown, during the process of checking for defects in the 65-inch display panel by the first probe unit PU1, the second probe unit PU2 will prepare to check for defects in the 55-inch display panel through the control unit.

[0183] With the second - 1 probe unit PU2 - 1 in a fixed state, the control unit moves the position of at least one of the second - 2 probe unit PU2 - 2, the second - 3 probe unit PU2 - 3, and the second - 4 probe unit PU2 - 4 so that the second probe unit PU2 is placed at a position corresponding to the electrode plate provided on the above-mentioned 55-inch display panel.

[0184] For example, as Figure 26 shown, with the above-mentioned second - 1 probe unit PU2 - 1 fixed to the support plate unit 210, the control unit can move the positions of the second - 2 probe unit PU2 - 2, the second - 3 probe unit PU2 - 3, and the second - 4 probe unit PU2 - 4 on the support plate unit 210, and the position movement can be a position movement based on linear movement.

[0185] Among them, the above-mentioned position movement can be achieved using various well-known components such as linear motion guides, motors, ball screws, ball nuts, etc., but this is only an example, and various well-known moving methods can be applied to achieve it.

[0186] The above-mentioned second - 2 probe unit PU2 - 2 and the second - 3 probe unit PU2 - 3 can approach each other by a specified distance, and the second - 4 probe unit PU2 - 4 can approach the second - 1 probe unit PU2 - 1 by a specified distance.

[0187] Among them, when the above-mentioned second - 4 probe unit PU2 - 4 makes a linear movement, the position movement can be achieved under the second - 2 probe unit PU2 - 2 and the second - 3 probe unit PU2 - 3 to prevent interference with the above-mentioned second - 2 probe unit PU1 - 2 and the second - 3 probe unit PU1 - 3.

[0188] As described above, when the position movement of the second probe unit PU2 is completed in order to inspect the 55-inch display panel, the control unit controls the conveying and installation device so that the selected probe block PB is installed through the above-mentioned conveying and installation device to the area SR specified in the 2-1 probe unit PU2-1, the area SR specified in the 2-2 probe unit PU2-2, the area specified in the 2-3 probe unit PU2-3, and the area specified in the 2-4 probe unit PU2-4.

[0189] The results, such as Figure 27 As shown, when the installation of the probe block PB for inspecting the above-mentioned 55-inch display panel is completed on the second probe unit PU2, and the inspection of all 65-inch display panels is completed by the first probe unit PU1, as shown in FIG. Figure 28 As shown, the second probe unit PU2 is rotated 180 degrees by the rotation R of the support plate unit 210 .

[0190] When the second probe unit PU2 rotates by rotating the support plate unit 210, the electrode plate in the 55-inch display panel contacts the probe 3002 of the probe block PB installed in the second probe unit PU2 by moving the position of the vacuum adsorption module 140, and the power supply of the power application part 3009 is used to check whether there are defects.

[0191] The probe block PB installed in the first probe unit PU1 is prepared for inspecting display panels of other sizes (eg, by moving the mounting device to the probe block carrying unit 3000, etc.), and the above process is repeated.

[0192] On the other hand, the above describes the case where electrode plates of the display panel DP to be inspected are formed on four sides as an example, but the electrode plates of the display panel DP to be inspected may also be formed only on some of the four sides. Of course, in this case, only a part of the probe units required for inspection may be used.

[0193] The above contents are organized as follows.

[0194] The display panel inspection device 200 according to the present invention is a device that inspects the display panel DP by selectively installing the probe blocks PB required for inspection in the probe units PU1 and PU2, and when other display panels DP are to be inspected, the inspection operation is made more convenient by replacing the probe blocks PB, thereby improving production, etc.

[0195] Therefore, the above display panel inspection device 200 may include: a probe block assembly 2000 and a probe block carrier unit 3000. The above probe block assembly 2000 includes: a plurality of probe blocks PB for contacting a plurality of electrode plates arranged on the side of the display panel DP; and a probe unit PU1, PU2 for supporting the above plurality of probe blocks PB.

[0196] Among them, after the above plurality of probe blocks PB are selected and carried out in the state of being carried on the above probe block carrier unit 3000, they are installed at a specified position in the above probe units PU1, PU2 to perform an inspection on the display panel DP.

[0197] In the above probe units PU1, PU2, a plurality of installation areas SR for separately installing the probe blocks PB may be provided, and based on the number and formation positions of the electrode plates of the display panel DP to be inspected, an installation area SR for installing the probe blocks PB is selected from the above plurality of installation areas SR.

[0198] On the other hand, the above probe units PU1, PU2 may include: a first probe unit PU1 and a second probe unit PU2. When the inspection of a specific display panel is completed through the above first probe unit PU1 and the probe blocks PB installed on the above first probe unit PU1, in order to inspect other display panels with different sizes, the positions of the above first probe unit PU1 and the above second probe unit PU2 are exchanged by rotation, and the inspection of the above other display panels is performed through the above second probe unit PU2 and the probe blocks PB installed on the above second probe unit PU2.

[0199] The above-mentioned probe block assembly 2000, as a component that can install a plurality of probe blocks PB required for inspecting the display panel DP on the probe unit as needed, so as to perform the inspection of the above display panel DP, can be applied to all devices for inspecting the display panel DP in a face-down or face-up manner.

[0200] At this time, the control method of the above probe block assembly 2000 may include: a first step of detecting the number and formation positions of a plurality of electrode plates of a first display panel that needs to be inspected for defects among at least one or more display panels included in the mother panel MP, wherein a plurality of electrode plates are arranged along the side of the above display panel;

[0201] Second step: Based on the detection result of the above first step, select the probe blocks required for inspection from the probe blocks carried by the probe block carrier unit; Third step: Based on the detection result of the above first step, select the installation areas on the probe unit where the probe blocks need to be installed; and Fourth step: Remove the selected probe blocks from the above probe block carrier unit and install them in the selected installation areas.

[0202] Among them, the above fourth step may include, after the inspection of the first display panel is completed, when at least one of the probe blocks installed in the above installation area is not needed or needs to be alternated for inspecting a second display panel of a different size, selecting the probe blocks that are not needed or need to be alternated, and then removing and carrying them on the above probe block carrier unit.

[0203] And, the above fourth step may include, after the inspection of the first display panel is completed, when additional probe blocks are needed for inspecting a second display panel of a different size, selecting the above additional probe blocks from the probe blocks carried in the above probe block carrier unit, selecting the installation areas where the above additional probe blocks need to be installed, and then installing the selected above additional probe blocks in the selected above installation areas.

[0204] Therefore, the above probe block assembly can check for defects in various types of display panels by replacing the probe blocks.

[0205] Figure 29 It is a diagram for explaining another method of supplying power to the probes provided in the probe block.

[0206] Refer to Figure 29 , the connection between the connection terminal 3106 of the probe block PB' and the power supply application unit 3109 can be achieved by methods such as a socket.

[0207] Among them, when removing the probe block PB' from the probe block carrier unit 3000, the removal and installation unit grasps the main body 3104 and the connection terminal 3106, and while installing the above main body 3104 in the installation area on the probe unit, inserts the above connection terminal 3106 into the power supply application unit 3109, thereby realizing the electrical connection between the above connection terminal 3106 and the above power supply application unit 3109.

[0208] Figure 30 And Figure 31 It is a diagram for explaining the method of fixing or detaching the probe block on the probe unit.

[0209] Refer to Figure 30, the installation area of the probe unit can be separated by the partition wall W, and the probe block PB can be fixed and separated by the first fixing unit 3200 and the second fixing unit 3300.

[0210] The first fixing unit 3200 described above can move in the height direction D3, and when moving downward along the height direction D3, the second fixing unit 3300 rotates based on the hinge, so that the probe block PB can be separated.

[0211] Refer to Figure 31 , the position of the probe block PB can be fixed and separated by the third fixing unit 3400. By sliding the third fixing unit 3400, the pressing unit 3500 that presses the probe block PB rotates, so that the probe block PB can be separated.

[0212] 5. Regarding the stability and accuracy of the transportation of the mother panel in the display panel inspection device

[0213] The above has described the situation where in the display panel inspection device 1000, after the mother panel MP adsorbed on the platform module 110 is finally transported to the vacuum adsorption module 140 through the transportation module 120 and the pickup module 130, the display panel DP is inspected for defects.

[0214] Specifically, by sequentially realizing the adsorption by the adsorption part 114 on the platform unit 112 of the platform module 110, the adsorption by the adsorption part 124 on the transportation unit 122 of the transportation module 120, the adsorption by the adsorption part 132 on the pickup unit of the pickup module 130, and the adsorption by the adsorption part 144 on the vacuum adsorption unit 142 of the vacuum adsorption module 140, the inspection for whether there are defects in the display panel DP provided on the mother panel MP is performed.

[0215] Among them, from the perspective of the adsorption function for the other surface SF2 of the mother panel MP, the above platform module 110, the above transportation module 120, the above pickup module 130, and the above vacuum adsorption module 140 can all be generally used as the mother panel adsorption device. Hereinafter, the principle of preventing the mother panel MP from falling off even in the case of an abnormality when adsorbing using the above mother panel adsorption device will be described in detail.

[0216] (1) The platform module as the mother panel adsorption device

[0217] As described in reference to Figure 8 , the platform module 110 may include a plurality of platform units 112 placed at intervals.

[0218] The above platform unit 112 may be provided with a plurality of adsorption portions 114 for respectively adsorbing the above mother panel MP.

[0219] The above plurality of platform units 112 may be divided into a plurality of combinations including at least one, and the above adsorption functions may be separately controlled for each of the above plurality of combinations.

[0220] For example, the above plurality of platform units 112 may be formed into a total of 9, and the above plurality of platform units 112 may be respectively divided into one combination, and the above plurality of platform units 112 may be separately controlled.

[0221] The above plurality of platform units 112 may be divided into a total of 9 combinations.

[0222] Among them, the plurality of adsorption portions 114 provided on one platform unit 112 may be jointly controlled.

[0223] The above plurality of platform units 112 include vacuum pipelines for respectively realizing the adsorption function, and the above plurality of combinations may respectively share the above vacuum pipelines.

[0224] The above vacuum pipeline may be connected to a vacuum generating unit for vacuum adsorption, and any well-known device may be applicable to the above vacuum generating unit.

[0225] The above 9 combinations may respectively share and separately control the vacuum pipeline. Therefore, even if the adsorption portions 114 included in a specific combination lose their adsorption function, the adsorption function of the adsorption portions 114 included in other combinations can be used to prevent the mother panel MP adsorbed on the other surface SF2 in a flipped state from falling off in advance.

[0226] Of course, the case where the mother panel MP is adsorbed in a flipped state by the platform module 110 may be the case where the mother panel MP rotates after being adsorbed in a normal state.

[0227] Another example is that the above plurality of platform units 112 may be formed into a total of 9, and the above plurality of platform units 112 may be formed with the outermost 2 as one combination, and in the inner direction, with every 2 forming another combination.

[0228] At this time, the platform unit 112 located at the center may be formed with each one forming one combination, and the above plurality of platform units 112 may be divided into a total of 5 combinations.

[0229] The above 5 combinations may respectively share and separately control the vacuum pipeline. Therefore, even if the adsorption portions 114 included in a specific combination lose their adsorption function, the adsorption function of the adsorption portions 114 included in other combinations can be used to prevent the mother panel MP adsorbed on the other surface SF2 in a flipped state from falling off in advance.

[0230] Of course, the case where the mother panel MP is adsorbed in a flipped state by the platform module 110 can be a case where the mother panel MP rotates after being adsorbed in a normal state.

[0231] In addition to the above combinations, various combinations can also be formed, which can be variously changed according to the size of the mother panel MP, etc.

[0232] On the other hand, the vacuum pipelines can also be shared based on the adsorption portions 114 instead of combinations. For example, each adsorption portion 114 is connected to a vacuum pipeline, and each adsorption portion 114 can be individually controlled.

[0233] (2) The transportation module as the mother panel adsorption device

[0234] As referred to Figures 11 to 14 As described above, the transportation module 120 can include a plurality of transportation units 122. When the platform module 110 rotates to cause a state change of the mother panel MP from a normal state to a flipped state, the above-mentioned plurality of transportation units 122 are inserted into the first space S1 and adsorb the other surface SF2 of the mother panel MP placed in the above-mentioned flipped state, so as to prevent the central portion of the above-mentioned mother panel MP from sinking due to its own weight.

[0235] Among them, the above-mentioned plurality of transportation units 122 can be respectively provided with adsorption portions 124 that are placed at intervals for adsorbing the above-mentioned other surface SF2.

[0236] The above-mentioned plurality of platform units 122 can be divided into at least one plurality of combinations, and the above-mentioned adsorption functions can be individually controlled by the above-mentioned plurality of combinations respectively.

[0237] For example, the above-mentioned plurality of platform units 122 can be formed into a total of 8, and the above-mentioned plurality of platform units 122 can be respectively divided into one combination, and the above-mentioned plurality of platform units 122 can be individually controlled respectively.

[0238] The above-mentioned plurality of platform units 122 can be divided into a total of 8 combinations.

[0239] Among them, the plurality of adsorption portions 124 provided on one platform unit 122 can be jointly controlled.

[0240] The above-mentioned plurality of platform units 122 include vacuum pipelines for respectively realizing adsorption functions, and the above-mentioned plurality of combinations can respectively share the above-mentioned vacuum pipelines.

[0241] The above-mentioned vacuum pipelines can be connected to a vacuum generation unit for vacuum adsorption, and any well-known device can be applied to the above-mentioned vacuum generation unit.

[0242] The above eight combinations can share and control the vacuum pipelines separately. Therefore, even if the adsorption part 124 included in a specific combination loses its adsorption function, the falling off of the mother panel MP adsorbed on the other surface SF2 in the flipped state can be prevented in advance by the adsorption function of the adsorption part 124 included in other combinations.

[0243] For another example, the above-mentioned plurality of platform units 122 can be formed into a total of eight. The above-mentioned plurality of platform units 122 can be grouped with the two outermost ones as one combination, and in the inner direction, other combinations can be formed with every two as one combination.

[0244] The above-mentioned plurality of platform units 112 can be divided into a total of four combinations.

[0245] The above four combinations can share and control the vacuum pipelines separately. Therefore, even if the adsorption part 124 included in a specific combination loses its adsorption function, the falling off of the mother panel MP adsorbed on the other surface SF2 in the flipped state can be prevented in advance by the adsorption function of the adsorption part 124 included in other combinations.

[0246] In addition to the above combination cases, combinations in various situations can also be formed, which can be variously changed according to the size of the mother panel MP, etc.

[0247] On the other hand, the vacuum pipelines can also be shared based on the adsorption part 124 instead of the combination. For example, each adsorption part 124 is connected to a vacuum pipeline, and each adsorption part 124 can be individually controlled.

[0248] (3) The picking module as the mother panel adsorption device

[0249] As shown in reference to Figures 15 to 17 The picking module 130 can include a plurality of picking units, which are placed at intervals and uniformly adsorb the other surface SF2 of the mother panel MP to prevent it from sagging.

[0250] The above-mentioned plurality of picking units can be divided based on the adsorption parts 132 placed at intervals in the horizontal or vertical direction. The above-mentioned adsorption parts 132 can achieve the adsorption function through vacuum.

[0251] The above-mentioned plurality of picking units can be divided into a plurality of combinations each including at least one, and the above-mentioned adsorption functions can be individually controlled by the above-mentioned plurality of combinations respectively.

[0252] For example, the above-mentioned plurality of picking units can be formed into a total of seven. The above-mentioned plurality of picking units can be divided into one combination respectively, and the above-mentioned plurality of picking units can be individually controlled respectively.

[0253] The above-mentioned plurality of picking units can be divided into a total of seven combinations.

[0254] Among them, a plurality of adsorption parts 132 provided on one pickup unit can be controlled jointly.

[0255] The above-mentioned plurality of pickup units include vacuum pipelines for respectively realizing the adsorption function, and the above-mentioned plurality of combinations can respectively share the above-mentioned vacuum pipelines.

[0256] The above-mentioned vacuum pipeline can be connected to a vacuum generating unit for vacuum adsorption, and any well-known device can be applied to the above-mentioned vacuum generating unit.

[0257] The above-mentioned 7 combinations can respectively share and independently control the vacuum pipeline. Therefore, even if the adsorption part 132 included in a specific combination loses its adsorption function, the detachment of the mother panel MP adsorbed on the other surface SF2 in a flipped state can be prevented in advance by the adsorption function of the adsorption part 132 included in other combinations.

[0258] For another example, the above-mentioned plurality of pickup units can be formed into a total of 7. The above-mentioned plurality of pickup units can be formed with the two outermost ones as one combination, and in the inner direction, with every two forming another combination.

[0259] At this time, the pickup unit located at the center can be formed with each one as one combination, and the above-mentioned plurality of pickup units can be divided into a total of 4 combinations.

[0260] The above-mentioned 4 combinations can respectively share and independently control the vacuum pipeline. Therefore, even if the adsorption part 132 included in a specific combination loses its adsorption function, the detachment of the mother panel MP adsorbed on the other surface SF2 in a flipped state can be prevented in advance by the adsorption function of the adsorption part 132 included in other combinations.

[0261] In addition to the above combination cases, various combination cases can also be formed, which can be variously changed according to the size of the mother panel MP, etc.

[0262] On the other hand, the vacuum pipeline can also be shared based on the adsorption part 132 rather than the combination. For example, each adsorption part 132 is connected to a vacuum pipeline, and each adsorption part 132 can be independently controlled.

[0263] (4) Vacuum adsorption module as the mother panel adsorption device

[0264] As described with reference to 19, the vacuum adsorption module 140 can include a plurality of vacuum adsorption units 142, which are placed at intervals from each other so as to evenly adsorb the other surface SF2 of the mother panel MP.

[0265] The above-mentioned multiple vacuum adsorption units 142 can be distinguished based on the adsorption parts 144 placed at intervals in the horizontal or vertical direction, and the adsorption function of the adsorption parts 144 can be realized through vacuum.

[0266] The above-mentioned multiple vacuum adsorption units 142 can be divided into multiple combinations each including at least one, and the adsorption function can be controlled separately for each of the above-mentioned multiple combinations.

[0267] The separate control of the adsorption function is the same as that of the pickup module 130, so the detailed description thereof is omitted.

[0268] The above has described in detail the process in which the display panel DP provided on the mother panel MP is successively adsorbed by the adsorption part 114 on the platform unit 112 of the platform module 110, adsorbed by the adsorption part 124 on the transport unit 122 of the transport module 120, adsorbed by the adsorption part 132 on the pickup unit of the pickup module 130, and adsorbed by the adsorption part 144 on the vacuum adsorption unit 142 of the vacuum adsorption module 140. Even in case of an abnormality, the stable and accurate transport of the mother panel MP can be realized through the separate control of the adsorption.

[0269] The above has described the composition and features of the present invention based on the embodiments of the present invention, but the present invention is not limited thereto. It should be noted that those skilled in the art can make various changes or deformations thereto without exceeding the idea and scope of the present invention, and these changes or deformations also fall within the scope of the claims of this application.

Claims

1. A mother panel adsorption device, on one surface of the mother panel, there is provided at least one type of display panel on which an organic material layer for forming an organic light-emitting layer is vapor-deposited. In a state where one surface of the mother panel faces downward, by adsorbing the other surface which is the reverse side of the mother panel, it is checked whether there are defects in the display panel, and it is characterized in that Comprising: A platform module that adsorbs and fixes another surface of the mother panel in a normal state with one surface of the mother panel facing upward. The platform module includes a plurality of platform units for preventing the central portion of the mother panel from sinking due to its own weight, and rotates to change the mother panel from the normal state to a flipped state with the one surface facing downward. A conveying module that adsorbs the another surface of the mother panel that has changed from the normal state to the flipped state on the platform module, and then moves the mother panel in the flipped state to a position for inspecting whether the display panel is defective. Wherein, the plurality of platform units are respectively placed at intervals to form a first space therebetween. The conveying module includes: A plurality of conveying units that, when the platform module rotates to change the mother panel from the normal state to the flipped state, insert into the first space and adsorb the another surface placed in the flipped state, and prevent the central portion of the mother panel from sinking due to its own weight. The plurality of conveying units are respectively provided with adsorption portions placed at intervals to adsorb the another surface. The plurality of conveying units are divided into a plurality of combinations each including at least one, and the plurality of combinations respectively control the adsorption function independently. When the adsorption portions included in a specific combination lose the adsorption function, the mother panel adsorbed in the flipped state is prevented from falling off by the adsorption function of the adsorption portions included in other combinations.

2. The mother panel adsorption device according to claim 1, wherein: The plurality of conveying units respectively include vacuum pipelines for realizing the adsorption function. The plurality of combinations respectively share the vacuum pipelines.

3. A mother panel adsorption device, on one surface of the mother panel, there is provided at least one type of display panel on which an organic material layer for forming an organic light-emitting layer is vapor-deposited. In a state where one surface of the mother panel faces downward, by adsorbing the other surface which is the reverse side of the mother panel, it is checked whether there are defects in the display panel, and it is characterized in that, Comprising: A platform module that adsorbs and fixes another surface of the mother panel in a normal state with one surface of the mother panel facing upward. The platform module includes a plurality of platform units for preventing the central portion of the mother panel from sinking due to its own weight, and rotates to change the mother panel from the normal state to a flipped state with the one surface facing downward. A conveying module that adsorbs the another surface of the mother panel that has changed from the normal state to the flipped state on the platform module, and then moves the mother panel in the flipped state to a position for inspecting whether the display panel is defective. Wherein, the plurality of platform units are respectively placed at intervals to form a first space therebetween. The conveying module includes: A plurality of conveying units that, when the platform module rotates to change the mother panel from the normal state to the flipped state, insert into the first space and adsorb the another surface placed in the flipped state, and prevent the central portion of the mother panel from sinking due to its own weight. The plurality of conveying units are respectively provided with adsorption portions placed at intervals to adsorb the another surface. Adsorption parts are respectively arranged on the multiple conveying units, and the adsorption function is controlled individually. When an adsorption part loses the adsorption function, the falling-off of the mother panel adsorbed on the other surface in the inverted state is prevented by the adsorption function of other adsorption parts.

4. A mother panel adsorption device, on one surface of the mother panel, there is provided at least one type of display panel on which an organic material layer for forming an organic light-emitting layer is vapor-deposited. In a state where one surface of the mother panel faces downward, by adsorbing the other surface which is the reverse side of the mother panel, it is checked whether there are defects in the display panel, and it is characterized in that Comprising: A platform module that adsorbs and fixes the other surface of the mother panel in a normal state with one surface of the mother panel facing upward. The platform module includes a plurality of platform units for preventing the central part of the mother panel from sinking due to its own weight, and rotates to change the mother panel from the normal state to an inverted state with one surface facing downward. A conveying module that adsorbs the other surface of the mother panel that changes from the normal state to the inverted state on the platform module, and then moves the mother panel in the inverted state to a first position for inspecting whether the display panel is defective. A vacuum adsorption module that inspects whether the display panel is defective through the interaction with a probe unit equipped with a probe block; and A picking module that adsorbs the other surface of the mother panel that is moved to the first position by the conveying module, and then moves to a second position while maintaining the inverted state. Through the vacuum adsorption module, the other surface of the mother panel in the inverted state is adsorbed, and whether the display panel is defective is inspected through the interaction. The picking module includes a plurality of picking units that are arranged at intervals from each other so as to be able to evenly adsorb the other surface of the mother panel. The plurality of picking units are divided based on adsorption parts placed at intervals in the horizontal or vertical direction, and are divided into a plurality of combinations each including at least one. The adsorption functions of the plurality of combinations are controlled individually. When an adsorption part included in a specific combination loses the adsorption function, the falling-off of the mother panel adsorbed on the other surface in the inverted state is prevented by the adsorption function of the adsorption parts included in other combinations.

5. The mother panel adsorption device according to claim 4, wherein Each of the plurality of picking units includes a vacuum pipeline for realizing the adsorption function. The plurality of combinations share the vacuum pipeline respectively.

6. A mother panel adsorption device, on one surface of the mother panel, there is provided at least one type of display panel on which an organic material layer for forming an organic light-emitting layer is vapor-deposited. In a state where one surface of the mother panel faces downward, by adsorbing the other surface which is the reverse side of the mother panel, whether there are defects in the display panel is inspected. It is characterized in that, Comprising: A platform module that adsorbs and fixes the other surface of the mother panel in a normal state with one surface of the mother panel facing upward. The platform module includes a plurality of platform units for preventing the central part of the mother panel from sinking due to its own weight, and rotates to change the mother panel from the normal state to an inverted state with one surface facing downward. A conveying module that adsorbs the other surface of the mother panel that changes from the normal state to the inverted state on the platform module, and then moves the mother panel in the inverted state to a first position for inspecting whether the display panel is defective. A vacuum adsorption module that inspects whether the display panel is defective through the interaction with a probe unit equipped with a probe block; and A pick-up module that adsorbs the other surface of the mother panel that has been moved to the first position by the transport module, and then moves to the second position while maintaining the flipped state. Through the vacuum adsorption module, the other surface of the mother panel is adsorbed while maintaining the flipped state, and the display panel is inspected for defects through the interaction. The pick-up module includes a plurality of pick-up units that are arranged at intervals to be able to evenly adsorb the other surface of the mother panel. The adsorption functions of the plurality of pick-up units are controlled separately. When a specific pick-up unit loses its adsorption function, the mother panel adsorbed on the other surface in the flipped state is prevented from falling off by the adsorption functions of the other pick-up units.

7. A mother panel adsorption device, on one surface of the mother panel, there is provided at least one type of display panel on which an organic material layer for forming an organic light-emitting layer is vapor-deposited. In a state where one surface of the mother panel faces downward, by adsorbing the other surface which is the reverse side of the mother panel, it is checked whether there are defects in the display panel, and it is characterized in that, Comprising: A platform module that adsorbs and fixes the other surface of the mother panel in a normal state with one surface of the mother panel facing upward. The platform module includes a plurality of platform units for preventing the central part of the mother panel from sinking due to its own weight, and rotates to change the mother panel from the normal state to a flipped state with one surface facing downward. A transport module that adsorbs the other surface of the mother panel that has been changed from the normal state to the flipped state on the platform module, and then moves the mother panel to the first position for inspecting whether the display panel has defects while maintaining the flipped state. A pick-up module that adsorbs the other surface of the mother panel that has been moved to the first position by the transport module, and then moves to the second position while maintaining the flipped state; and A vacuum adsorption module that inspects whether the display panel has defects through the interaction between the mother panel moved to the second position by the pick-up module and the probe unit equipped with a probe block. The vacuum adsorption module includes a plurality of vacuum adsorption units that are arranged at intervals to be able to evenly adsorb the other surface of the mother panel. The plurality of vacuum adsorption units are divided based on adsorption parts placed at intervals in the horizontal or vertical direction, and are divided into a plurality of combinations each including at least one. The adsorption functions of the plurality of combinations are controlled separately. When the adsorption part included in a specific combination loses its adsorption function, the mother panel adsorbed on the other surface in the flipped state is prevented from falling off by the adsorption functions of the adsorption parts included in other combinations.

8. A mother panel adsorption device, on one surface of the mother panel, there is provided at least one type of display panel on which an organic material layer for forming an organic light-emitting layer is vapor-deposited. In a state where one surface of the mother panel faces downward, by adsorbing the other surface which is the reverse side of the mother panel, it is checked whether there are defects in the display panel, and it is characterized in that Comprising: A platform module that adsorbs and fixes the other surface of the mother panel in a normal state with one surface of the mother panel facing upward. The platform module includes a plurality of platform units for preventing the central part of the mother panel from sinking due to its own weight, and rotates to change the mother panel from the normal state to a flipped state with one surface facing downward. A transport module that adsorbs the other surface of the mother panel that has been changed from the normal state to the flipped state on the platform module, and then moves the mother panel to the first position for inspecting whether the display panel has defects while maintaining the flipped state. A pickup module that adsorbs the other surface of the mother panel that has been moved to the first position by the transport module and then moves to the second position while maintaining the flipped state; and A vacuum adsorption module that checks whether the display panel is defective through the interaction between the mother panel that has been moved to the second position by the pickup module and the probe unit equipped with the probe block, The vacuum adsorption module includes a plurality of vacuum adsorption units that are arranged at intervals from each other so as to be able to evenly adsorb the other surface of the mother panel, The adsorption functions of the plurality of vacuum adsorption units are controlled separately. When a specific pickup unit loses its adsorption function, the adsorption function of other pickup units is used to prevent the mother panel adsorbed on the other surface in the flipped state from falling off.

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