Data Monitoring Method, Device, Computer Equipment and Medium for Specification Management System

Abstract

The present application relates to a data monitoring method, device, computer device and medium for a specification management system. The method includes: obtaining a log file of the specification management system; parsing the log file to obtain parsed data and saving the parsed data into a database; according to the database, displaying the queried target data and the historical data corresponding to the target data on the same interface according to a preset rule. The present application facilitates the user to compare the target data and the historical data corresponding to the target data on the same interface, timely discover data changes and restore the data, so as to avoid the user from changing the saved data due to misoperation; it also facilitates the user to analyze the historical data to timely discover production anomaly information or fault information, and take corresponding measures in a timely manner to avoid unnecessary losses.

Description

Technical Field

[0001] This application relates to the technical field of data monitoring, and in particular, to a data monitoring method, device, computer device, and medium for a specification management system. Background Art

[0002] With the rapid development of technology and the continuous improvement of the automation level, the Manufacturing Execution System (MES) and the Material Manager (MM) play an important role in the automation production process, connecting the upper and lower levels. They receive basic parameters or rules from the Specification Manager (SM) and operate automatically according to the data or rules set in the SM.

[0003] In order to better monitor the efficiency and reliability of the automated operation of MES or MM, it is necessary to actively collect and monitor production data in real time for production process management, ensure production quality, and effectively guide the production operation of the factory.

[0004] However, the data in the traditional SM is huge and the data structure is diverse, which is not convenient for users to view, and it does not have the function of providing historical data to ordinary users. Due to the lack of SM historical data, process personnel cannot compare and analyze the parameter setting data of product processes in different time intervals based on SM data to discover abnormalities or faults in the production process in a timely manner; moreover, if there are human errors in setting data in the SM, resulting in incorrect modification or loss of data, it is very difficult to quickly restore the original data, causing unnecessary losses. Summary of the Invention

[0005] Based on this, in view of the problems in the above background art, it is necessary to provide a data monitoring method, device, computer device, and medium for a specification management system, which is convenient for users to obtain historical data in the production management system, compare current data with historical data, discover data or production abnormalities in a timely manner, and improve the efficiency and reliability of automated operation.

[0006] The first aspect of this application provides a data monitoring method for a specification management system, including:

[0007] Obtain the log file of the specification management system;

[0008] Parse the log file to obtain parsed data, and save the parsed data to a database;

[0009] According to the database, display the queried target data and the historical data corresponding to the target data on the same interface according to a preset rule.

[0010] In the data monitoring method of the specification management system in the above embodiments, by obtaining the log file of the specification management system, parsing the log file to obtain parsed data, and saving the parsed data to a database, so as to display the queried target data and the historical data corresponding to the target data on the same interface according to the database according to a preset rule, facilitating the user to compare the target data and the historical data corresponding to the target data on the same interface, discovering data changes in a timely manner and restoring the data, avoiding changes to the saved data caused by the user's misoperation; it also facilitates the user to analyze historical data to timely discover production anomaly information or fault information, and take corresponding measures in a timely manner to avoid unnecessary losses.

[0011] In one embodiment, the parsing the log file to obtain parsed data includes:

[0012] Performing real-time parsing on each of the log files to obtain the parsed data.

[0013] In one embodiment, the performing real-time parsing on each of the log files includes:

[0014] Obtaining a template with categories and styles of parsed data pre-added;

[0015] Performing real-time parsing on each of the log files according to the template to obtain the parsed data.

[0016] In one embodiment, the performing real-time parsing on each of the log files according to the template includes:

[0017] If the log file includes multiple categories of data, classifying the data of the same category to obtain multiple data sets;

[0018] Performing loop parsing on each data set including data of the same category according to the template.

[0019] In one embodiment, the style includes a preset file identifier and a preset document field; the performing loop parsing on each data set including data of the same category according to the template includes:

[0020] Searching for a target file corresponding to the preset file identifier in the data set;

[0021] Reading a target field corresponding to the preset document field in the target file;

[0022] Generating parsed data based on the category, the preset file identifier, and the target field.

[0023] In one embodiment, the performing real-time parsing on each of the log files according to the template includes:

[0024] Parse each of the log files in real time according to the template to obtain a plurality of first parsed data;

[0025] Store each of the first parsed data as a first parsed file;

[0026] If a truncation event occurs, parse the next adjacent log file in real time according to the generation time of the log file to obtain second parsed data; wherein, the truncation event is that the parsed log file reaches a preset capacity, or the generation time of the parsed log file reaches a preset time length;

[0027] Store the second parsed data as a second parsed file, and save the first parsed file and the second parsed file to the database.

[0028] In one embodiment, the displaying the query target data and the historical data corresponding to the target data on the same interface according to the database includes:

[0029] Obtain an instruction to query the target data;

[0030] Read the corresponding parsed data from the database according to the instruction, and the read parsed data includes the target data and the historical data corresponding to the target data;

[0031] Display the target data and the historical data on the same interface according to the preset rule.

[0032] In one embodiment, the instruction includes at least one of a start time and an end time, a category, a name, and a change identifier for querying the target data; the change identifier includes at least one of a modification identifier, a new addition identifier, and a deletion identifier.

[0033] In one embodiment, the displaying the target data and the historical data on the same interface according to the preset rule includes:

[0034] Compare the target data and the historical data to determine the target row or target field where the change occurs;

[0035] Display the target data in the first area of the interface, and display the historical data in the second area of the interface. The data displayed in the first area and the second area both include a first-level identification column or a second-level identification column;

[0036] Add a corresponding change identifier to the first-level identification column or the second-level identification column corresponding to the row where the change occurs according to the target row or the target field.

[0037] In one embodiment, adding a corresponding change identifier to the first-level identification column or the second-level identification column corresponding to the row where the change occurs according to the target row or the target field includes:

[0038] If the row where the change occurs is the target row and the target data contains the target row, add a new identifier to the first-level identification column and the second-level identification column in the first area of the target row, add the target row to the historical data, and add a deletion identifier to the first-level identification column and the second-level identification column in the second area of the target row;

[0039] If the row where the change occurs is the target row and the historical data contains the target row, add a new identifier to the first-level identification column and the second-level identification column in the second area of the target row, add the target row to the target data, and add a deletion identifier to the first-level identification column and the second-level identification column in the first area of the target row;

[0040] If the row where the change occurs is the target field, add a modification identifier to the second-level identification column in the first area and the second-level identification column in the second area of the row corresponding to the target field.

[0041] In one embodiment, displaying the target data and the historical data according to the preset rules on the same interface further includes:

[0042] Displaying the target rows containing the new identifier in the first area and the second area in a first color; or

[0043] Displaying the target rows containing the deletion identifier in the first area and the second area in a second color; or

[0044] Displaying the target fields containing the modification identifier in the first area and the second area in a third color.

[0045] In one embodiment, the specification management system is a system for monitoring parameter setting data in the semiconductor manufacturing process.

[0046] A second aspect of the present application provides a data monitoring device for a specification management system, including a log file acquisition module, a parsed data acquisition module, and a monitoring display module. The log file acquisition module is used to acquire the log file of the specification management system; the parsed data acquisition module is used to parse the log file to obtain parsed data and save the parsed data to a database; the monitoring display module is used to display the queried target data and the historical data corresponding to the target data on the same interface according to the database according to preset rules.

[0047] In the data monitoring device of the specification management system in the above embodiments, the log file of the specification management system is obtained through the log file acquisition module, the log file is parsed by the parsed data acquisition module to obtain parsed data, and the parsed data is saved to the database, so that the monitoring display module can display the queried target data and the historical data corresponding to the target data on the same interface according to the database according to a preset rule, facilitating the user to compare the target data and the historical data corresponding to the target data on the same interface, timely discovering data changes and restoring the data, and preventing the user from changing the saved data due to misoperation; it also facilitates the user to analyze historical data to timely discover production anomaly information or fault information, and take corresponding measures in a timely manner to avoid unnecessary losses.

[0048] In one of the embodiments, the monitoring display module includes a query instruction acquisition module, and the query instruction acquisition module is used to acquire an instruction for querying target data, and the instruction includes at least one of the start and end time, category, name, and change identifier of the query target data, and the change identifier includes at least one of a modification identifier, a new addition identifier, and a deletion identifier. This embodiment facilitates the user to input an instruction for querying target data through the query instruction acquisition module. By inputting an instruction including at least one of the start and end time, category, name, and change identifier of the query target data to the query instruction acquisition module, the queried target data and the historical data corresponding to the target data are displayed on the same interface, where the change identifier includes at least one of a modification identifier, a new addition identifier, and a deletion identifier.

[0049] The third aspect of this application provides a computer device, including a memory and a processor, where a computer program executable on the processor is stored on the memory, and when the processor executes the program, the steps of the method in any one of the embodiments of this application are implemented.

[0050] The fourth aspect of this application provides a computer-readable storage medium, on which a computer program is stored, and when the computer program is executed by a processor, the steps of the method in any one of the embodiments of this application are implemented.

[0051] In the computer device or computer-readable storage medium in the above embodiments, by obtaining the log file of the specification management system, parsing the log file to obtain parsed data, and saving the parsed data into a database, so as to display the queried target data and the historical data corresponding to the target data on the same interface according to the database, facilitating the user to compare the target data and the historical data corresponding to the target data on the same interface, timely discovering data changes and restoring the data, avoiding changes to the saved data caused by the user's misoperation; it also facilitates the user to analyze historical data to timely discover production anomaly information or fault information, and take corresponding measures in time to avoid unnecessary losses. BRIEF DESCRIPTION OF THE DRAWINGS

[0052] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the accompanying drawings required for the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings in the following description are only some embodiments of the present application. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0053] Figure 1 FIG. is a schematic diagram of an application scenario of a data monitoring method for a specification management system provided in the first embodiment of the present application;

[0054] Figure 2 FIG. is a schematic flowchart of a data monitoring method for a specification management system provided in the second embodiment of the present application;

[0055] Figure 3 FIG. is a schematic flowchart of a data monitoring method for a specification management system provided in the third embodiment of the present application;

[0056] Figure 4 FIG. is a schematic flowchart of a data monitoring method for a specification management system provided in the fourth embodiment of the present application;

[0057] Figure 5 FIG. is a schematic flowchart of a data monitoring method for a specification management system provided in the fifth embodiment of the present application;

[0058] Figure 6 FIG. is a schematic flowchart of a data monitoring method for a specification management system provided in the sixth embodiment of the present application;

[0059] Figure 7 FIG. is a schematic flowchart of a data monitoring method for a specification management system provided in the seventh embodiment of the present application;

[0060] Figure 8 FIG. is a schematic flowchart of a data monitoring method for a specification management system provided in the eighth embodiment of the present application;

[0061] Figure 9 It is a schematic flowchart of a data monitoring method for a specification management system provided in the ninth embodiment of the present application;

[0062] Figure 10 It is a schematic flowchart of a data monitoring method for a specification management system provided in the tenth embodiment of the present application;

[0063] Figure 11 It is a schematic flowchart of a data monitoring method for a specification management system provided in the eleventh embodiment of the present application;

[0064] Figure 12 It is a block diagram of the structure of a data monitoring device for a specification management system provided in the twelfth embodiment of the present application;

[0065] Figure 13 It is a block diagram of the structure of a data monitoring device for a specification management system provided in the thirteenth embodiment of the present application;

[0066] Figure 14 It is a schematic diagram of the structure of a computer device provided in the fourteenth embodiment of the present application. Detailed implementation manners

[0067] To facilitate the understanding of the present application, the present application will be described more comprehensively below with reference to the relevant drawings. The preferred embodiments of the present application are shown in the drawings. However, the present application can be implemented in many different forms and is not limited to the embodiments described herein. On the contrary, these embodiments are provided to make the understanding of the disclosure of the present application more thorough and comprehensive.

[0068] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by those of ordinary skill in the technical field to which the present application belongs. The terms used in the specification of the present application herein are only for the purpose of describing specific embodiments and are not intended to limit the present application. The term "and / or" used herein includes any and all combinations of one or more of the related listed items.

[0069] When using "including", "having", and "comprising" described herein, unless a clear limiting term is used, such as "only", "consisting of", etc., another component can also be added. Unless otherwise mentioned, terms in the singular form can include the plural form and should not be construed as having a quantity of one.

[0070] It should be understood that although terms such as "first" and "second" may be used herein to describe various elements, these elements should not be limited by these terms. These terms are only used to distinguish one element from another. For example, without departing from the scope of the present application, the first element may be referred to as the second element, and similarly, the second element may be referred to as the first element.

[0071] Please refer to Figure 1 , in the semiconductor manufacturing production process, relevant staff set the process rules of the process through the Standardized management system 100 (SM), and perform basic parameter settings on the Manufacturing Execution System 200 (MES) or Material Management system 300 (MM) that communicates and interconnects with it through the SM, so that the MES and MM operate automatically according to the parameter data and rules set in the SM. However, currently, the SM can only record and query the real-time set data used by the MM. If the data is modified, the user cannot obtain the historical data before the current data, and cannot record or query operations such as data modification or deletion; and the SM data is huge and the data structure is diverse, and the user cannot view the required target data and historical data before on the same screen. Therefore, taking the semiconductor manufacturing production process as an example, in order to facilitate users to obtain historical data in the production management system, compare the current data with the historical data, timely discover data anomalies or production anomalies, and improve the efficiency and reliability of automated operations, the present application provides the data monitoring method, device, computer device and medium of the standardized management system described in the following embodiments.

[0072] Please refer to Figure 2 , in an embodiment of the present application, a data monitoring method for a standardized management system is provided, including:

[0073] Step 2, obtaining a log file of the standardized management system;

[0074] Step 4, parsing the log file to obtain parsed data, and saving the parsed data to a database;

[0075] Step 6, according to the database, displaying the queried target data and the historical data corresponding to the target data on the same interface according to a preset rule.

[0076] Specifically, please continue to refer to Figure 2, by obtaining the log files of the specification management system, parsing the log files to obtain parsed data, and saving the parsed data into a database, so as to display the queried target data and the historical data corresponding to the target data on the same interface according to the database, facilitating the user to compare the target data and the historical data corresponding to the target data on the same interface, promptly discovering data changes and restoring the data, and preventing the user from changing the saved data due to misoperation; it also facilitates the user to analyze the historical data to promptly discover production anomaly information or fault information, and take corresponding measures in a timely manner to avoid unnecessary losses.

[0077] Further, please refer to Figure 3 , in an embodiment of the present application, the parsing the log files to obtain parsed data includes:

[0078] Step 42, perform real-time parsing on each of the log files to obtain the parsed data, and save the parsed data into a database.

[0079] Specifically, please continue to refer to Figure 3 , during the process of automated production, a large amount of real-time data will be generated in each production link, and the monitoring devices in each generation link will also obtain various preset types of real-time monitoring data, so that the monitoring center can observe and analyze the real-time operation conditions of each production link through the real-time monitoring data. In order to comprehensively monitor the data in the specification management system, perform real-time parsing on each log file of the obtained specification management system, obtain the parsed data, and save the parsed data into a database, so as to obtain the target data and the historical data corresponding to the target data according to the parsed data, and prevent monitoring loopholes; at the same time, it facilitates the user to compare the target data and the historical data corresponding to the target data on the same interface, promptly discover data changes and restore the data, and prevent the user from changing the saved data due to misoperation, resulting in unnecessary losses.

[0080] Further, please refer to Figure 4 , in an embodiment of the present application, the performing real-time parsing on each of the log files includes:

[0081] Step 422, obtain a template with the categories and styles of the parsed data preset;

[0082] Step 424, perform real-time parsing on each of the log files according to the template to obtain the parsed data, and save the parsed data into a database.

[0083] Specifically, please continue to refer to Figure 4, To improve the efficiency of real-time parsing of each log file in the obtained specification management system, the template method can be used to perform real-time parsing on each log file. For example, template style data of the data categories (Class) to be read can be added to the real-time monitoring program (Watch Dog) in the specification management system. The monitoring program will automatically classify and parse the encountered log files, obtain the parsed data, and save the parsed data to the database. There will be a large amount of redundant and useless data in the log files. Through the template method, the monitoring program will automatically identify whether the data in the log files meets the reading requirements through the special fields set in the template, thereby effectively improving the efficiency of real-time parsing of the data in the log files.

[0084] Furthermore, please refer to Figure 5 , In an embodiment of the present application, the real-time parsing of each of the log files according to the template includes:

[0085] Step 4242, if the log file includes multiple categories of data, classify the data of the same category to obtain multiple data sets;

[0086] Step 4243, circularly parse each data set including data of the same category according to the template to obtain the parsed data, and save the parsed data to the database.

[0087] Specifically, please continue to refer to Figure 5 , To improve the efficiency of real-time parsing of each log file in the obtained specification management system, the template method can be used to perform real-time parsing on each log file. When processing a large number of data of the same type, the monitoring program uses the set method to centrally process the data of the same type. For example, a template with preset special fields can be obtained. If the monitoring program identifies data corresponding to the preset special fields in the log file, the monitoring program will classify it as a whole into a set. For each piece of data in the set, it will classify the set members, and circularly parse and read the set data centrally to obtain the parsed data, and save the parsed data to the database, thereby effectively improving the efficiency of real-time parsing of the data in the log files, reducing the complexity of the data parsing program, and improving the efficiency of program operation.

[0088] Furthermore, please refer to Figure 6 , In an embodiment of the present application, the circularly parsing each data set including data of the same category according to the template includes:

[0089] Step 42431, search for the target file corresponding to the preset file identifier in the data set, and the style includes the preset file identifier and the preset document fields;

[0090] Step 42432, read the target field corresponding to the preset document field in the target file;

[0091] Step 42433, generate parsing data based on the category, the preset file identifier, and the target field, and save the parsing data to the database.

[0092] Specifically, please continue to refer to Figure 6 , the style in the template can be set to include a preset file identifier and a preset document field. Among them, the preset file identifier can be used to indicate the file name, and the preset document field can be used as a search keyword to match and search for the content in the target file corresponding to the preset file identifier in the data set. For example, the target file corresponding to the preset file identifier in the obtained data set can be searched and retrieved, and the target field corresponding to the preset document field in the target file can be read, so as to generate parsing data based on the category, the preset file identifier, and the target field of the parsing data, and save the parsing data to the database. For example, the category can be set to folder AAA, the preset file identifier can be set to CCC, and the target field can be set to XXXX, to query the XXXX field in the file with the file name including CCC in the folder with the folder name including AAA, generate parsing data according to the query result, and save the parsing data to the database.

[0093] Furthermore, please refer to Figure 7 , in an embodiment of the present application, the real-time parsing of each of the log files according to the template includes:

[0094] Step 42411, perform real-time parsing on each of the log files according to the template to obtain a plurality of first parsing data;

[0095] Step 42412, store each of the first parsing data as a first parsing file;

[0096] Step 42413, if a truncation event occurs, perform real-time parsing on the next adjacent log file according to the generation time of the log file to obtain second parsing data; wherein, the truncation event is that the parsed log file reaches a preset capacity, or the generation time of the parsed log file reaches a preset time length;

[0097] Step 42414, store the second parsing data as a second parsing file to save the first parsing file and the second parsing file to the database.

[0098] Specifically, please continue to refer to Figure 7, to facilitate the storage, query, or copying of the generated parsed data, after each of the log files is parsed in real time according to the template to obtain a plurality of first parsed data, each of the first parsed data is stored as a first parsed file; since during the process of parsing each of the log files in real time, due to the limitation of the file storage space volume or the parsing time length, a parsing truncation event may occur. Therefore, if a truncation event occurs, the next adjacent log file is parsed in real time according to the generation time of the log file to obtain second parsed data, the second parsed data is stored as a second parsed file, and the first parsed file and the second parsed file are saved to the database, where the truncation event is that the parsed log file reaches a preset capacity, or the generation time of the parsed log file reaches a preset time length.

[0099] Further, please refer to Figure 8 , in an embodiment of the present application, the displaying the queried target data and the historical data corresponding to the target data on the same interface according to the database includes:

[0100] Step 62, obtaining an instruction to query the target data;

[0101] Step 64, reading the corresponding parsed data from the database according to the instruction, and the read parsed data includes the target data and the historical data corresponding to the target data;

[0102] Step 66, displaying the target data and the historical data on the same interface according to the preset rule.

[0103] Specifically, please continue to refer to Figure 8 , to facilitate the user to query and obtain the target data and the historical data corresponding to the target data, an instruction input prompt message can be generated on the display interface. The instruction that the user can input to query the target data can include at least one of the start and end times, category, name, and change identifier of the target data to be queried. For example, an authentication method can be adopted. First, the user querying the data is authenticated by prompting the user to input a personal work number and a system login account. After the user successfully logs in to the system, an input prompt dialog box can be generated on the display interface. For example, a data start time input box (Start), a data end time input box (End), a data category input box (Class ID), a data name input box (Class Name), and a change identifier input box (Change Notice) can be generated on the display interface to prompt the user to input corresponding content in the corresponding input boxes to filter out the desired target data and the historical data corresponding to the target data from the database. As an example, in an embodiment of the present application, the change identifier includes at least one of a modification identifier, a new addition identifier, and a deletion identifier.

[0104] Further, please refer to Figure 9 , in an embodiment of the present application, displaying the target data and the historical data on the same interface according to the preset rule includes:

[0105] Step 661, comparing the target data and the historical data to determine the target row or target field where the change occurs;

[0106] Step 662, displaying the target data in the first area of the interface and displaying the historical data in the second area of the interface. The data displayed in the first area and the second area both include a first-level identification column or a second-level identification column;

[0107] Step 663, adding a corresponding change identifier to the first-level identification column or the second-level identification column corresponding to the row where the change occurs according to the target row or the target field.

[0108] Specifically, please continue to refer to Figure 9 , since during the process of querying data by the user, there may be accidental operations on the current data or historical data, resulting in data loss or change. In order to save the changed content of the data during the user's accidental operation, compare the target data and the historical data to determine the target row or target field where the change occurs; display the target data in a row-column distribution in the first area of the interface and display the historical data in a row-column distribution in the second area of the interface, so as to facilitate the user to observe and compare the target data and the historical data and discover data anomalies in a timely manner. Set a first-level identification column or a second-level identification column in the data displayed in the first area and the second area. For example, the first-level identification column can be used as the main identification field, and the second-level identification column can be used as the secondary identification field, so that the user can determine the row where the data change occurs by comparing the content of the first-level identification column and the second-level identification column in the target data and the historical data, and add a corresponding change identifier. For example, if the content of the first-level identification column in the target data and the historical data is inconsistent, it is considered that there is a whole-row change, such as adding a row or deleting a row; if the content of the first-level identification column in the target data and the historical data is the same, and the content of the second-level identification column is different, it is considered that there is a data change in the target row; if the content of the first-level identification column and the second-level identification column in the target data and the historical data are both the same, it is considered that there is no data change.

[0109] Further, please refer to Figure 10 , in an embodiment of the present application, adding a corresponding change identifier to the first-level identification column or the second-level identification column corresponding to the row where the change occurs according to the target row or the target field includes:

[0110] Step 6631, if the row with changes is the target row and the target data contains the target row, add a new identifier to the first-level identification columns and second-level identification columns in the first area of the target row, add the target row to the historical data, and add a deletion identifier to the first-level identification columns and second-level identification columns in the second area of the target row;

[0111] Step 6632, if the row with changes is the target row and the historical data contains the target row, add a new identifier to the first-level identification columns and second-level identification columns in the second area of the target row, add the target row to the target data, and add a deletion identifier to the first-level identification columns and second-level identification columns in the first area of the target row;

[0112] Step 6633, if the changed item is the target field, add a modification identifier to the second-level identification column in the first area and the second-level identification column in the second area of the row corresponding to the target field.

[0113] Specifically, please continue to refer to Figure 10 To save the content changed by the user in the database, visually present the changed content, and facilitate the user to restore the misoperated data. If it is detected that the content of the first-level identification column in the target data and the historical data is inconsistent, it is considered that a whole-row change has occurred. If the row with changes is the target row and the target data contains the target row, add a new identifier to the first-level identification columns and second-level identification columns in the first area of the target row, add the target row to the historical data, and add a deletion identifier to the first-level identification columns and second-level identification columns in the second area of the target row; if it is detected that the content of the first-level identification column in the target data and the historical data is inconsistent, it is considered that a whole-row change has occurred. If the row with changes is the target row and the historical data contains the target row, add a new identifier to the first-level identification columns and second-level identification columns in the second area of the target row, add the target row to the target data, and add a deletion identifier to the first-level identification columns and second-level identification columns in the first area of the target row; if the content of the first-level identification column of the target data is the same as that of the historical data and the content of the second-level identification column is different, it is considered that the changed item of the target row is the target field, and add a modification identifier to the second-level identification column in the first area and the second-level identification column in the second area of the row corresponding to the target field; if the content of the first-level identification column and the content of the second-level identification column of the target data and the historical data are both the same, it is considered that no data change has occurred, and directly display the target data in a row-column distribution in the first area of the interface, and display the historical data in a row-column distribution in the second area of the interface, so as to facilitate the user to observe and compare the target data and the historical data, and visually see the change records related to the target data or the historical data.

[0114] Further, please refer to Figure 11 In an embodiment of the present application, displaying the target data and the historical data on the same interface according to the preset rule further includes:

[0115] Step 6634, displaying the target rows including the new identification in the first area and the second area in a first color;

[0116] Step 6635, displaying the target rows including the deletion identification in the first area and the second area in a second color;

[0117] Step 6636, displaying the target fields including the modification identification in the first area and the second area in a third color.

[0118] Specifically, please continue to refer to Figure 11 By displaying the target rows including the new identification in the first area and the second area in a first color, displaying the target rows including the deletion identification in the first area and the second area in a second color, and displaying the target fields including the modification identification in the first area and the second area in a third color. For example, the target rows including the new identification in the first area and the second area can be displayed in green, the target rows including the deletion identification in the first area and the second area can be displayed in gray, and the target fields including the modification identification in the first area and the second area can be displayed in red, which is convenient for the user to intuitively see the change records related to the target data or the historical data.

[0119] As an example, in an embodiment of the present application, the specification management system is a system for monitoring parameter setting data in the semiconductor manufacturing process.

[0120] It should be understood that although Figures 2 - 11 the steps in the flowchart of Figures 2 - 11 are displayed in sequence according to the indication of the arrows, these steps are not necessarily executed in the order indicated by the arrows. Unless there is a clear description in this article, the execution of these steps is not strictly restricted in sequence, and these steps can be executed in other sequences. Moreover, although

[0121] at least a part of the steps in Figure 12, in an embodiment of the present application, a data monitoring device 100 for a specification management system is provided, including a log file acquisition module 102, a parsed data acquisition module 104, and a monitoring display module 106. The log file acquisition module 102 is used to acquire the log file of the specification management system; the parsed data acquisition module 104 is used to parse the log file to obtain parsed data and save the parsed data into a database; the monitoring display module 106 is used to display the queried target data and the historical data corresponding to the target data on the same interface according to the database according to a preset rule.

[0122] Specifically, please continue to refer to Figure 12 , the log file acquisition module 102 acquires the log file of the specification management system, the parsed data acquisition module 104 parses the log file to obtain parsed data, and saves the parsed data into the database, so that the monitoring display module 106 can display the queried target data and the historical data corresponding to the target data on the same interface according to the database according to a preset rule, which is convenient for the user to compare the target data and the historical data corresponding to the target data on the same interface, discover the data change situation in time and restore the data, and avoid the user from changing the saved data due to misoperation; it is also convenient for the user to analyze the historical data to discover production anomaly information or fault information in time, and take corresponding measures in time to avoid unnecessary losses.

[0123] Furthermore, please refer to Figure 13 , in an embodiment of the present application, the monitoring display module 106 includes a query instruction acquisition module 1061. The query instruction acquisition module 1061 is used to acquire an instruction for querying target data, and the instruction includes at least one of the start and end time, category, name, and change identifier of the query target data. The change identifier includes at least one of a modification identifier, a new addition identifier, and a deletion identifier. This embodiment is convenient for the user to input an instruction for querying target data through the query instruction acquisition module. It is convenient for the user to input an instruction including at least one of the start and end time, category, name, and change identifier of the query target data to the query instruction acquisition module, and display the queried target data and the historical data corresponding to the target data on the same interface, where the change identifier includes at least one of a modification identifier, a new addition identifier, and a deletion identifier. It is convenient for the user to compare the target data and the historical data corresponding to the target data on the same interface, discover the data change situation in time and restore the data, and avoid the user from changing the saved data due to misoperation; it is also convenient for the user to analyze the historical data to discover production anomaly information or fault information in time, and take corresponding measures in time to avoid unnecessary losses.

[0124] For the specific limitations of the data monitoring device of the specification management system, reference may be made to the limitations of the data monitoring method of the specification management system in the foregoing text, which will not be elaborated herein.

[0125] Each module in the above-mentioned data monitoring device of the specification management system can be implemented in whole or in part by software, hardware, and their combination. The above-mentioned modules can be embedded in the processor of the computer device in hardware form or be independent of it, or can be stored in the memory of the computer device in software form, so as to facilitate the processor to call and execute the operations corresponding to the above-mentioned modules.

[0126] Further, please refer to Figure 14 , in an embodiment of the present application, a computer device is provided, including a memory and a processor, a computer program that can run on the processor is stored on the memory, and when the processor executes the program, the steps of the method described in any embodiment of the present application are implemented.

[0127] Further, in an embodiment of the present application, a computer-readable storage medium is provided, on which a computer program is stored, and when the computer program is executed by the processor, the steps of the method described in any embodiment of the present application are implemented.

[0128] In the computer device or the computer-readable storage medium in the above-mentioned embodiments, by obtaining the log file of the specification management system, parsing the log file to obtain parsed data, and saving the parsed data to the database, so as to display the queried target data and the historical data corresponding to the target data on the same interface according to the database according to preset rules, which is convenient for the user to compare the target data and the historical data corresponding to the target data on the same interface, timely discover data changes and restore the data, and avoid the user from changing the saved data due to misoperation; it is also convenient for the user to analyze the historical data to timely discover production anomaly information or fault information, and take corresponding measures in time to avoid unnecessary losses.

[0129] Those of ordinary skill in the art can understand that all or part of the processes in the methods of the above embodiments can be completed by instructing relevant hardware through a computer program. The computer program can be stored in a non-volatile computer-readable storage medium. When the computer program is executed, it can include the processes of the embodiments of the above methods. Among them, any reference to a memory, storage, database, or other medium used in the embodiments provided in the present application can include non-volatile and / or volatile memories. Non-volatile memories can include read-only memory (ROM), programmable ROM (PROM), electrically programmable ROM (EPROM), electrically erasable programmable ROM (EEPROM), or flash memory. Volatile memories can include random access memory (RAM) or external cache memory. By way of illustration and not limitation, RAM is available in various forms, such as static RAM (SRAM), dynamic RAM (DRAM), synchronous DRAM (SDRAM), double data rate SDRAM (DDR SDRAM), enhanced SDRAM (ESDRAM), synchronous link DRAM (SLDRAM), Rambus direct RAM (RDRAM), direct memory bus dynamic RAM (DRDRAM), and Rambus dynamic RAM (RDRAM), etc.

[0130] The technical features of the above embodiments can be combined arbitrarily. For the sake of brevity of description, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, it should be considered as the scope recorded in this specification.

[0131] The above embodiments only represent several implementation manners of the present application. The description is relatively specific and detailed, but it should not be construed as a limitation on the scope of the patent application. It should be noted that for those of ordinary skill in the art, without departing from the concept of the present application, several modifications and improvements can still be made, and these all belong to the protection scope of the present application. Therefore, the protection scope of the patent of the present application should be subject to the appended claims.

Claims

1. A method for data monitoring of a specification management system, characterized in that, The method includes: Obtaining the log file of the specification management system; Parsing the log file to obtain parsed data, and saving the parsed data to a database; According to the database, displaying the queried target data and the historical data corresponding to the target data on the same interface according to a preset rule; The step of displaying the queried target data and the historical data corresponding to the target data on the same interface according to a preset rule according to the database includes: Obtaining an instruction to query target data; Reading corresponding parsed data from the database according to the instruction, and the read parsed data includes target data and historical data corresponding to the target data; Displaying the target data and the historical data on the same interface according to the preset rule; The step of displaying the target data and the historical data on the same interface according to the preset rule includes: Comparing the target data and the historical data to determine the target row or target field where changes occur; Displaying the target data in the first area of the interface, and displaying the historical data in the second area of the interface, and the data displayed in the first area and the second area both include a first-level identification column or a second-level identification column; Adding a corresponding change identifier to the first-level identification column or the second-level identification column corresponding to the row where the change occurs according to the target row or the target field.

2. The method according to claim 1, characterized in that, The step of parsing the log file to obtain parsed data includes: Performing real-time parsing on each log file to obtain the parsed data.

3. The method according to claim 2, characterized in that, The step of performing real-time parsing on each log file includes: Obtaining a template with pre-added categories and styles of parsed data; Performing real-time parsing on each log file according to the template to obtain the parsed data.

4. The method according to claim 3, characterized in that, The step of performing real-time parsing on each log file according to the template includes: If the log file includes multiple categories of data, classifying the data of the same category to obtain multiple data sets; Performing loop parsing on each data set including data of the same category according to the template.

5. The method according to claim 4, characterized in that, The style includes a preset file identifier and a preset document field; the step of performing loop parsing on each data set including data of the same category according to the template includes: Searching for the target file corresponding to the preset file identifier in the data set; Reading the target field corresponding to the preset document field in the target file; Generating parsed data based on the category, the preset file identifier, and the target field.

6. The method according to claim 3, characterized in that, The step of performing real-time parsing on each log file according to the template further includes: Performing real-time parsing on each log file according to the template to obtain multiple first parsed data; Storing each first parsed data as a first parsed file; If a truncation event occurs, performing real-time parsing on the next adjacent log file according to the generation time of the log file to obtain second parsed data; wherein, the truncation event is that the parsed log file reaches a preset capacity, or the generation time of the parsed log file reaches a preset time length; Storing the second parsed data as a second parsed file to save the first parsed file and the second parsed file to the database.

7. The method according to claim 1, characterized in that, The instruction includes at least one of a start time, an end time, a category, a name, and a change identifier of the target data; The change identifier includes at least one of a modification identifier, a new addition identifier, and a deletion identifier.

8. The method according to claim 1, wherein Adding a corresponding change identifier to a first-level identification column or a second-level identification column corresponding to the row where the change occurs according to the target row or the target field includes: If the row where the change occurs is the target row and the target data has the target row, adding a new addition identifier to the first-level identification column and the second-level identification column in the first area of the target row, adding the target row to the historical data, and adding a deletion identifier to the first-level identification column and the second-level identification column in the second area of the target row; If the row where the change occurs is the target row and the historical data has the target row, adding a new addition identifier to the first-level identification column and the second-level identification column in the second area of the target row, adding the target row to the target data, and adding a deletion identifier to the first-level identification column and the second-level identification column in the first area of the target row; If the field where the change occurs is the target field, adding a modification identifier to the second-level identification column in the first area and the second-level identification column in the second area of the row corresponding to the target field.

9. The method according to claim 8, wherein Displaying the target data and the historical data on the same interface according to the preset rule further includes: Displaying the target rows containing the new addition identifier in the first area and the second area in a first color; or Displaying the target rows containing the deletion identifier in the first area and the second area in a second color; or Displaying the target fields containing the modification identifier in the first area and the second area in a third color.

10. The method according to any one of claims 1 - 6, wherein The specification management system is a system for monitoring parameter setting data in the semiconductor manufacturing process.

11. A data monitoring device for a specification management system, wherein The device includes: A log file acquisition module for acquiring a log file of the specification management system; A parsed data acquisition module for parsing the log file to obtain parsed data and saving the parsed data to a database; A monitoring and display module for displaying the queried target data and the historical data corresponding to the target data on the same interface according to the database and according to a preset rule; Displaying the queried target data and the historical data corresponding to the target data on the same interface according to the database and according to a preset rule includes: Obtaining an instruction for querying the target data; Reading corresponding parsed data from the database according to the instruction, and the read parsed data includes target data and historical data corresponding to the target data; Displaying the target data and the historical data on the same interface according to the preset rule; Displaying the target data and the historical data on the same interface according to the preset rule includes: Comparing the target data and the historical data to determine the target row or target field where the change occurs; Displaying the target data in the first area of the interface and displaying the historical data in the second area of the interface, and the data displayed in the first area and the second area both include a first-level identification column or a second-level identification column; According to the target row or the target field, add a corresponding change identifier to the first-level identification column or the second-level identification column corresponding to the row where the change occurs.

12. The device according to claim 11, wherein The monitoring and display module includes: A query instruction acquisition module, configured to acquire an instruction for querying target data, where the instruction includes at least one of a start time, an end time, a category, a name, and a change identifier of the target data to be queried, and the change identifier includes at least one of a modification identifier, a new addition identifier, and a deletion identifier.

13. A computer device, comprising a memory and a processor, wherein a computer program is stored on the memory and can run on the processor, and wherein When the processor executes the program, the steps of the method according to any one of claims 1-10 are implemented.

14. A computer-readable storage medium, on which a computer program is stored, and wherein When the computer program is executed by a processor, the steps of the method according to any one of claims 1-10 are implemented.

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