Coating-before monitoring equipment and coating-before monitoring method for perovskite solar cells

Abstract

The present invention discloses a pre - coating monitoring device for perovskite solar cells, which includes a base, a cleaning air knife device, an image acquisition device and a control device; the tabletop of the base is provided with a conveyor belt for conveying TCO substrates; the cleaning air duct device is installed on the base and suspended above the conveyor belt; the cleaning air duct device is used to clean and dry the TCO substrates; the image acquisition device is installed on the base and suspended above the conveyor belt; the image acquisition device is used to acquire images of the TCO substrates that have been cleaned and dried by the cleaning air knife device; the control device is used to receive the pictures acquired by the image acquisition device and compare them with the preset template size of the TCO substrates to monitor whether there are cases of missing etching and / or scribing offset of the TCO substrates. The above - mentioned pre - coating monitoring device can monitor the P1 scribing quality of the TCO substrates, screen out the TCO substrates with poor P1 scribing quality before coating and avoid coating them, thereby improving the yield rate of the coating process. The present invention also provides a pre - coating monitoring method for the above - mentioned pre - coating monitoring device.

Description

Technical Field

[0001] The present invention relates to the technical field of perovskite solar cell production, and more specifically, to a pre-coating monitoring device for perovskite solar cells, and also to a pre-coating monitoring method for perovskite solar cells. Background Art

[0002] Perovskite solar cells are a rising star in the field of photovoltaic cells in recent years. The photoelectric conversion efficiency of this type of cell has advanced by leaps and bounds in the past decade or so, rapidly increasing from the initial 3.8% to 25.7%, surpassing polycrystalline silicon and approaching single-crystalline silicon, and the efficiency of perovskite / silicon tandem cells has even exceeded 29%. Perovskite solar cells have the characteristics of simple synthesis, high efficiency, low cost, and high benefits, and are regarded as a new generation of thin-film photovoltaic technology most promising to subvert the traditional crystalline silicon cell industry.

[0003] At present, the industrialization development process of perovskite solar cell technology has accelerated, and small-scale mass production has been achieved. In the production of perovskite solar cells, a method of vacuum coating on conductive glass is adopted to ensure reliable stability and high light conversion efficiency.

[0004] In the production process of perovskite solar cells, there are high requirements for the quality of the coating process. Before coating, it is necessary to use laser scribing to perform P1 scribing on the TCO (Transparent Conductive Oxide) substrate. It is difficult to ensure the quality of P1 scribing, and situations such as scribing position deviation and / or unscribing often occur. Coating the TCO substrate with poor P1 scribing quality will result in poor coating quality and affect the yield of perovskite solar cell products.

[0005] In addition, the light transmittance and wettability of the TCO substrate also affect the yield of perovskite solar cell products.

[0006] Therefore, how to avoid coating the TCO substrate with poor P1 scribing quality, improve the yield of the coating process in the production process, and improve the yield of perovskite solar cell products is an urgent problem to be solved by those skilled in the art. Summary of the Invention

[0007] In view of this, the present invention provides a pre-coating monitoring device for perovskite solar cells, which can monitor whether there is scribing position deviation and / or unscribing in the TCO substrate after P1 scribing, facilitating the screening of TCO substrates with poor P1 scribing quality before coating to avoid subsequent coating processes, improving the yield of the TCO substrate coating process in the production process, and thus improving the yield of perovskite solar cell products. The present invention also provides a pre-coating monitoring method for the above pre-coating monitoring device, which is beneficial to improving the yield of perovskite solar cell products.

[0008] To achieve the above object, the present invention provides the following technical solutions:

[0009] A pre-coating monitoring device for a perovskite solar cell, comprising:

[0010] A base, on the tabletop of which there is a conveyor belt for conveying TCO substrates;

[0011] A cleaning air knife device, which is installed on the base and suspended above the conveyor belt; the cleaning air knife device is used to clean and dry the TCO substrate;

[0012] An image acquisition device, which is installed on the base and suspended above the conveyor belt; the image acquisition device is used to acquire images of the TCO substrate that has been cleaned and dried by the cleaning air knife device;

[0013] A control device, which is used to receive the pictures acquired by the image acquisition device and compare them with the preset TCO substrate template size to monitor whether there are missing etchings and scribing offsets on the TCO substrate.[[ID=j]]

[0014] Preferably, in the above pre-coating monitoring device, there is also a transmittance test device installed on the base. The transmittance test device is used to perform specific spectral measurement on the TCO substrate that has been cleaned and dried by the cleaning air knife device, and transmit the measurement signal to the control device. The control device is used to calculate and obtain the haze and the transmittance of the overall light wave of the TCO substrate.

[0015] Preferably, in the above pre-coating monitoring device, the transmittance test device includes a light-emitting device and a sensor respectively installed on the base. The light-emitting device is used to provide light of a specific wavelength to the TCO substrate; the sensor is used to measure the light transmitted through the TCO substrate and transmit the measurement signal to the control device.

[0016] Preferably, in the above pre-coating monitoring device, there are also a plasma cleaning treatment device and a contact angle test device respectively installed on the base; the plasma cleaning treatment device is used to perform plasma treatment on the TCO substrate that has been cleaned and dried by the cleaning air knife device; the contact angle test device measures the angle of the plasma-treated TCO substrate and transmits the measurement result to the control device. The control device is used to judge whether the wettability of the TCO substrate is good.

[0017] Preferably, in the above pre-coating monitoring device, the contact angle test device is close to the tail end of the conveyor belt.

[0018] Preferably, in the above pre - coating monitoring device, it further includes a TCO waste - film recycling box installed on the base, and the TCO waste - film recycling box is located on the side of the contact - angle testing device away from the conveyor belt.

[0019] Preferably, in the above pre - coating monitoring device, the conveyor belt is a roller conveyor belt.

[0020] A pre - coating monitoring method for a perovskite solar cell, which is used for the pre - coating monitoring device described in any one of the above technical solutions, includes:

[0021] Clean and dry the TCO substrate after P1 scribing.

[0022] Collect an image of the TCO substrate after cleaning and drying, and compare it with a preset TCO - substrate template size to monitor whether there are any missing etchings and scribing offsets on the TCO substrate.

[0023] Preferably, in the above pre - coating monitoring method, it further includes:

[0024] Perform specific spectral measurement on the TCO substrate after cleaning and drying to monitor whether the transmittance of the TCO substrate meets the requirements.

[0025] Perform plasma treatment on the TCO substrate after cleaning and drying, and then perform a contact - angle test to monitor whether the wettability of the TCO substrate is good.

[0026] Screen the TCO substrates that meet the preset conditions for the subsequent coating process, and recycle the TCO substrates that do not meet the preset conditions.

[0027] Preferably, in the above pre - coating monitoring method, the preset conditions are: there are no missing etchings and scribing offsets on the TCO substrate, the transmittance of the TCO substrate meets the requirements, and the wettability of the TCO substrate is good.

[0028] The present invention provides a pre - coating monitoring device for a perovskite solar cell, including a base, a cleaning air - knife device, an image - acquisition device, and a control device; the tabletop of the base is provided with a conveyor belt for transporting the TCO substrate; the cleaning air - duct device is installed on the base and is suspended above the conveyor belt; the cleaning air - duct device is used to clean and dry the TCO substrate; the image - acquisition device is installed on the base and is suspended above the conveyor belt; the image - acquisition device is used to acquire an image of the TCO substrate that has been cleaned and dried by the cleaning air - knife device; the control device is used to receive the picture acquired by the image - acquisition device and compare it with a preset TCO - substrate template size to monitor whether there are any missing etchings and / or scribing offsets on the TCO substrate.

[0029] The pre - coating monitoring device provided by the present invention can monitor whether there are offset of the scribing position and / or un - scribed or un - through scribing in the TCO substrate after P1 scribing, which is convenient for screening out TCO substrates with poor scribing quality before coating to avoid subsequent coating processes, improving the yield rate of the TCO substrate coating process during production, and further improving the yield rate of perovskite solar cell products.

[0030] The present invention also provides a pre - coating monitoring method for the above - mentioned pre - coating monitoring device, which is beneficial to improving the yield rate of perovskite solar cell products. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings required in the description of the embodiments or the prior art. Obviously, the following drawings are only some embodiments of the present invention. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0032] Figure 1 It is a schematic structural diagram of the pre - coating monitoring device for perovskite solar cells provided by the embodiment of the present invention;

[0033] Among them, Figure 1 In:

[0034] Cleaning air knife device 1; Image acquisition device 2; Transmittance test device 3; Control device 4; Contact angle test device 5; TCO waste sheet recycling box 6; Plasma cleaning treatment device 7; Base 8. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0035] The embodiment of the present invention discloses a pre - coating monitoring device for perovskite solar cells, which can monitor whether there are offset of the scribing position and / or un - scribed in the TCO substrate after P1 scribing, which is convenient for screening out TCO substrates with poor scribing quality before coating to avoid subsequent coating processes, improving the yield rate of the TCO substrate coating process during production, and further improving the yield rate of perovskite solar cell products. The embodiment of the present invention also discloses a pre - coating monitoring method for the above - mentioned pre - coating monitoring device, which is beneficial to improving the yield rate of perovskite solar cell products.

[0036] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the drawings in the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, rather than all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts belong to the scope of protection of the present invention.

[0037] Please refer to Figure 1, an embodiment of the present invention provides a pre - coating monitoring device for a perovskite solar cell, including a base 8, a cleaning air knife device 1, an image acquisition device 2, and a control device 4; the tabletop of the base 8 is provided with a conveyor belt for conveying a TCO substrate; the cleaning air duct device is installed on the base 8 and suspended above the conveyor belt; the cleaning air duct device is used to clean and dry the TCO substrate; the image acquisition device 2 is installed on the base 8 and suspended above the conveyor belt; the image acquisition device 2 is used to acquire images of the TCO substrate located on the conveyor belt and cleaned and dried by the cleaning air knife device 1; the control device 4 is used to receive the pictures acquired by the image acquisition device 2 and compare them with a preset TCO substrate template size to monitor whether there are cases of missing etching and / or scribing offset of the TCO substrate.

[0038] The pre - coating monitoring device provided by the embodiment of the present invention can monitor whether there are scribing position offsets and / or cases where the missing etching is not scribed through for the TCO substrate scribed by P1, which is convenient for screening out TCO substrates with poor scribing quality before coating to avoid subsequent coating processes, improving the yield rate of the TCO substrate coating process during production, and further improving the yield rate of perovskite solar cell products.

[0039] The cleaning air knife device 1 includes a cleaning roller brush and an air knife respectively installed on the base 8. During use, the cleaning roller brush cleans the TCO substrate on the conveyor belt, which can remove the residual glass debris after P1 scribing; the air knife can dry the TCO substrate cleaned by the roller brush.

[0040] The control device 4 can be set to be independently installed or installed on the base 8, and this embodiment does not make a limitation. The image acquisition device 2 includes a CCD camera.

[0041] The above - mentioned pre - coating monitoring device further includes a transmittance testing device 3 installed on the base 8. The transmittance testing device 3 is used to perform specific spectral measurement on the TCO substrate conveyed by the conveyor belt and cleaned and dried by the cleaning air knife device 1, and transmit the measurement signal to the control device 4. The control device 4 is used to calculate and obtain the haze and the transmittance of the overall light wave of the TCO substrate.

[0042] The pre - coating detection device provided by the embodiment of the present invention adds a transmittance testing device 3, which can perform transmittance monitoring before coating the TCO substrate, facilitating the screening of TCO substrates with transmittance lower than the requirements to avoid subsequent coating processes, and further improving the yield rate of the coating process during production.

[0043] In the above-mentioned surface monitoring device, the cleaning air knife device is located at a position corresponding to the front end of the conveyor belt (i.e., the starting end for conveying the TCO substrate); the cleaning air knife device, the image acquisition device, and the transmittance testing device are arranged in sequence along the conveying direction of the conveyor belt, so that the TCO substrate is successively cleaned and dried, the P1 scribing quality is monitored, and the specific spectrum is measured under the conveying action of the conveyor belt; alternatively, the cleaning air knife device, the transmittance testing device, and the image acquisition device are arranged in sequence along the conveying direction of the conveyor belt, so that the TCO substrate is successively cleaned and dried, the specific spectrum is measured, and the P1 scribing quality is monitored under the conveying action of the conveyor belt. In this embodiment, the front and rear positions of the transmittance testing device and the image acquisition device along the conveying direction of the conveyor belt are not limited.

[0044] Specifically, in the above-mentioned pre-coating detection device, the transmittance testing device includes a light-emitting device and a sensor respectively installed on the base 8. The light-emitting device is used to provide light with a specific wavelength to the TCO substrate; the sensor is used to measure the light transmitted through the TCO substrate and transmit the measurement signal to the control device 4.

[0045] Further, in the above-mentioned pre-coating detection device, there are also a plasma cleaning treatment device 7 and a contact angle testing device 5 respectively installed on the base 8; the plasma cleaning treatment device 7 is used to perform plasma treatment on the TCO substrate that has been cleaned and dried by the cleaning air knife device 1; the contact angle testing device 5 measures the angle of the TCO substrate after plasma treatment and transmits the measurement result to the control device 4, and the control device 4 is used to judge whether the wettability of the TCO substrate is good according to the measurement result of the contact angle testing device 5. Specifically, when the measured angle is within the preset range, the wettability of the TCO substrate is good; when the measured angle is not within the preset range, the wettability of the TCO substrate is poor.

[0046] The plasma cleaning treatment device 7 is suspended above the tail end of the conveyor belt (i.e., the end for conveying the TCO substrate); the contact angle testing device 5 is located outside the corresponding range of the conveyor belt and close to the tail end of the conveyor belt, so as to measure the contact angle of the TCO substrate conveyed by the conveyor belt.

[0047] The pre-coating monitoring device provided in this embodiment is additionally provided with a plasma cleaning treatment device 7 and a contact angle testing device 5, which can monitor whether the wettability of the TCO substrate after plasma treatment meets the requirements, so that only the TCO substrates with qualified wettability can enter the subsequent coating process, preventing the perovskite film layer from being unable to spread smoothly due to poor wettability, further improving the film-forming quality, and improving the yield of the coating process.

[0048] To prevent TCO substrates with poor P1 scribing quality, transmittance not meeting requirements, and / or wettability not meeting requirements from entering the subsequent coating process, the above pre - coating monitoring device further includes a TCO waste - sheet recycling box 6 installed on the base 8. The TCO waste - sheet recycling box 6 is located on the side of the contact - angle testing device 5 away from the conveyor belt.

[0049] The TCO waste - sheet recycling box 6 is located inside the base 8 and has an open upper end. The opening of the TCO waste - sheet recycling box 6 is provided with an openable and closable end - cover. When the end - cover is closed, its upper surface is flush with the table - top of the base 8.

[0050] In the pre - coating monitoring device provided in this embodiment, the cleaning air - knife device 1, the image - acquisition device 2, the transmittance - testing device 3, the plasma - cleaning treatment device 7, the contact - angle testing device 5, and the TCO waste - sheet recycling box 6 are arranged in sequence along the conveying direction of the conveyor belt. Or the cleaning air - knife device 1, the transmittance - testing device 3, the image - acquisition device 2, the plasma - cleaning treatment device 7, the contact - angle testing device 5, and the TCO waste - sheet recycling box 6 are arranged in sequence along the conveying direction of the conveyor belt. The arrangement is reasonable, enabling the TCO substrate to complete three kinds of monitoring in sequence, facilitating the screening of TCO substrates with all three monitoring results being qualified for the subsequent coating process, and maximizing the yield of the coating process.

[0051] Specifically, in the above pre - coating monitoring device, the conveyor belt is a roller conveyor belt. The roller conveyor belt is driven by a motor, and the motor is installed inside the base, as Figure 1 shown.

[0052] The pre - coating monitoring device provided in this embodiment not only has a cleaning air - knife device 1 and an image - acquisition device 2, but also integrates a transmittance - testing device 3, a contact - angle testing device 5, and a plasma - cleaning treatment device 7. It has a high degree of integration and can complete various monitoring of TCO.

[0053] The embodiment of the present invention also provides a pre - coating monitoring method for a perovskite solar cell, which is used for the pre - coating monitoring device provided in the above embodiment and includes:

[0054] (1) Cleaning and drying the TCO substrate after P1 scribing;

[0055] (2) Acquiring the image of the TCO substrate after cleaning and drying, and comparing it with the preset TCO - substrate template size to monitor whether there are cases of missing etching and scribing deviation of the TCO substrate.

[0056] Further, the above pre - coating monitoring method further includes:

[0057] (3) Performing specific spectral measurement on the TCO substrate after cleaning and drying to monitor whether the transmittance of the TCO substrate meets the requirements;

[0058] (4) The TCO substrate after cleaning and drying is subjected to plasma treatment, and then the contact angle is measured to monitor whether the wettability of the TCO substrate is good;

[0059] (5) The TCO substrates that meet the preset conditions are selected for the subsequent coating process, and the TCO substrates that do not meet the preset conditions are recycled.

[0060] The above-mentioned preset conditions are as follows: the TCO substrate has no leakage etching and scribing offset, the transmittance of the TCO substrate meets the requirements, and the wettability of the TCO substrate is good.

[0061] In addition, for steps (3) and (4) of the above-mentioned pre-coating monitoring method, the order can be reversed according to the specific structure of the pre-coating monitoring device, and this embodiment does not make a limitation.

[0062] The pre-coating monitoring method provided in this embodiment is used for the pre-coating monitoring device provided in the above-mentioned embodiment, which is beneficial to improving the yield of perovskite solar cell products. Of course, the pre-coating monitoring method provided in this embodiment also has other effects related to the pre-coating monitoring device provided in the above-mentioned embodiment, which will not be elaborated here.

[0063] In this specification, each embodiment is described in a progressive manner. The key point of each embodiment is to illustrate the differences from other embodiments. The same or similar parts among the embodiments can be referred to each other.

[0064] The above description of the disclosed embodiments enables those skilled in the art to implement or use the present invention. Various modifications to these embodiments will be obvious to those skilled in the art. The general principles defined herein can be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to the embodiments shown herein, but will be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A monitoring device before coating for a perovskite solar cell, characterized in that, include: A base, wherein a conveyor belt for conveying the TCO substrate is provided on a table top of the base; A cleaning air knife device, the cleaning air knife device is mounted on the base and suspended above the conveyor belt; the cleaning air knife device is used to clean and dry the TCO substrate; An image acquisition device, the image acquisition device being mounted on the base and suspended above the conveyor belt; the image acquisition device being used to acquire an image of the TCO substrate cleaned and dried by the cleaning air knife device; A control device, the control device being configured to receive the image captured by the image capture device and compare the image with a preset TCO substrate template size to monitor whether the TCO substrate has any omissions or line deviations; The system further comprises a transmittance testing device mounted on the base, the transmittance testing device being used to perform specific spectrum measurement on the TCO substrate cleaned and dried by the cleaning air knife device, and transmit the measurement signal to the control device, the control device being used to calculate the haze and overall light wave transmittance of the TCO substrate; It also includes a plasma cleaning device and a contact angle testing device respectively installed on the base; the plasma cleaning device is used to perform plasma treatment on the TCO substrate cleaned and dried by the cleaning air knife device; the contact angle testing device measures the angle of the TCO substrate after plasma treatment and transmits the measurement results to the control device, and the control device is used to determine whether the wettability of the TCO substrate is good.

2. The pre-coating monitoring device according to claim 1, wherein The transmittance testing device includes a light emitting device and a sensor respectively mounted on a base, wherein the light emitting device is used to provide light of a specific wavelength to the TCO substrate; the sensor is used to measure the light passing through the TCO substrate and transmit the measurement signal to the control device.

3. The pre-coating monitoring device according to claim 1, characterized in that, The contact angle testing device is close to the tail end of the conveyor belt.

4. The pre-coating monitoring device according to claim 3, wherein The device further comprises a TCO waste film recovery box installed on the base, wherein the TCO waste film recovery box is located on a side of the contact angle testing device away from the conveyor belt.

5. The pre-coating monitoring device according to claim 1, characterized in that The conveyor belt is a roller conveyor belt.

6. A pre-coating monitoring method for a perovskite solar cell, which is used for the pre-coating monitoring device described in any one of claims 1-5, and is characterized in that, include: Clean and dry the TCO substrate after P1 scribe line; An image of the TCO substrate after cleaning and drying is collected and compared with a preset TCO substrate template size to monitor whether the TCO substrate has any omissions or line deviations.

7. The pre-coating monitoring method according to claim 6, wherein Also includes: Performing specific spectrum measurement on the TCO substrate after cleaning and drying to monitor whether the transmittance of the TCO substrate meets the requirements; Plasma treatment is performed on the cleaned and dried TCO substrate, and then a contact angle test is performed to monitor whether the wettability of the TCO substrate is good; The TCO substrates that meet the preset conditions are screened for subsequent coating processes, and the TCO substrates that do not meet the preset conditions are recycled.

8. The pre-coating monitoring method according to claim 7, characterized in that, The preset conditions are: the TCO substrate has no missed etching and no scribing line deviation, the transmittance of the TCO substrate meets the requirements, and the wettability of the TCO substrate is good.

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