Rod taking tool for hard shaft single crystal furnace, single crystal furnace assembly and rod taking vehicle

Abstract

The application discloses a rod taking tool for a hard shaft single crystal furnace, a single crystal furnace assembly and a rod taking vehicle. The rod taking tool comprises a support assembly, a clamping jaw assembly, a bottom support assembly and a transmission assembly. The clamping jaw assembly comprises a first clamping jaw and a second clamping jaw, and the first clamping jaw and the second clamping jaw are respectively slidably connected with the support assembly along a first direction. The bottom support assembly comprises a bottom support. The transmission assembly comprises an elastic connecting assembly, a first connecting rod and a second connecting rod. One end of the elastic connecting assembly is connected with the upper end of the support assembly, and the other end of the elastic connecting assembly is connected with the bottom support assembly. The bottom support is movable between a first position and a second position along the up-down direction. When the bottom support moves downward to the first position, the bottom support drives the elastic connecting assembly to be elongated, and under the drive of the first connecting rod and the second connecting rod, the first clamping jaw and the second clamping jaw move toward each other to be in a clamping state. According to the rod taking tool, the production cost is reduced, and the reliability is high.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of crystal preparation, and particularly to a crystal bar taking tool for a hard-shaft single crystal furnace, a single crystal furnace assembly and a crystal bar taking vehicle. BACKGROUND

[0002] The hard-shaft single crystal furnace does not have the structural characteristics that the soft-shaft system of the soft-shaft single crystal furnace is prone to inherent resonance interference, such as a simple pendulum and a spring oscillator, and is more advantageous than the soft-shaft in improving the crystal growth rate and the intrinsic quality of the single crystal material.

[0003] However, in the related art, a crystal bar taking and placing vehicle is generally used to clamp the crystal bar, and an electric or pneumatic control mode is required to control the clamping jaw assembly to take and place the crystal bar, which is high in cost, easy to cause damage to the crystal bar, poor in reliability and high in safety hazard. SUMMARY

[0004] The present application aims to at least solve one of the technical problems existing in the prior art. To this end, the present application is directed to a crystal bar taking tool for a hard-shaft single crystal furnace, which is advantageous in reducing production cost and high in reliability.

[0005] The present application also proposes a single crystal furnace assembly having the above-mentioned crystal bar taking tool.

[0006] The present application also proposes a crystal bar taking vehicle having the above-mentioned crystal bar taking tool.

[0007] The rod taking tool for the hard shaft single crystal furnace according to the embodiment of the present application comprises: a support assembly; a clamping jaw assembly, which comprises a first clamping jaw and a second clamping jaw, the first clamping jaw and the second clamping jaw are spaced apart along a first direction, and the first clamping jaw and the second clamping jaw are respectively slidably connected with the support assembly along the first direction; a base support assembly, which comprises a base support, the base support is arranged at a lower end of the support assembly, the base support is slidably connected with the support assembly along an up-down direction, the base support has a through hole adapted to be connected with a crystal rod, and the base support is further provided with a gap adapted for the conical body of the crystal rod to enter or exit the through hole; and a transmission assembly, which comprises: a resilient connecting assembly, one end of the resilient connecting assembly is connected with an upper end of the support assembly, the other end of the resilient connecting assembly is connected with the base support assembly, one end of a first connecting rod is rotatably connected with the first clamping jaw, the other end of the first connecting rod is rotatably connected with the resilient connecting assembly, one end of a second connecting rod is rotatably connected with the second clamping jaw, and the other end of the second connecting rod is rotatably connected with the resilient connecting assembly, wherein the rotation center lines of the other end of the first connecting rod and the other end of the second connecting rod are on the same straight line, the base support is movable along the up-down direction between a first position and a second position, when the base support moves downward to the first position, the base support drives the resilient connecting assembly to be elongated, under the driving of the first connecting rod and the second connecting rod, the first clamping jaw and the second clamping jaw move towards each other to be in a clamped state.

[0008] The rod taking tool for the hard shaft single crystal furnace according to the embodiment of the present application, when the base support moves downward to the first position, the base support drives the resilient connecting assembly to be elongated, under the driving of the first connecting rod and the second connecting rod, the first clamping jaw and the second clamping jaw move towards each other to clamp the crystal rod, when the base support moves upward to the second position, the resilient connecting assembly is contracted, under the driving of the first connecting rod and the second connecting rod, the first clamping jaw and the second clamping jaw move away from each other to release the crystal rod, the traditional electric or pneumatic control of the actions of the first clamping jaw and the second clamping jaw can be avoided, the production cost is reduced, the reliability is high, and the safety hazard is reduced.

[0009] In some embodiments of the present application, the clamping jaw assembly is multiple, and the multiple clamping jaw assemblies are arranged in the up-down direction and are spaced apart, the first clamping jaw and the second clamping jaw of each clamping jaw assembly are respectively connected with the resilient connecting assembly through the corresponding first connecting rod and the corresponding second connecting rod.

[0010] In some embodiments of the present application, the support assembly is provided with a first sliding rail extending along the first direction, the first clamping jaw is provided with a first sliding block matched with the first sliding rail, the second clamping jaw is provided with a second sliding block matched with the first sliding rail, and the first sliding rail is provided with a first stop block and a second stop block at two ends thereof respectively, the first stop block is used for limiting the maximum stroke of the first clamping jaw, and the second stop block is used for limiting the maximum stroke of the second clamping jaw.

[0011] In some embodiments of the present application, the first clamping jaw and the first connecting rod are spaced apart along a second direction, the first clamping jaw and the first connecting rod are connected through a first connecting frame, the second clamping jaw and the second connecting rod are spaced apart along the second direction, the second clamping jaw and the second connecting rod are connected through a second connecting frame, and the first connecting frame and the second connecting frame are open in a direction away from each other, wherein the second direction is perpendicular to the first direction.

[0012] In some embodiments of the present application, the elastic connecting assembly comprises a spring stretching mechanism, the spring stretching mechanism comprises a first spring support, a stretching spring and a second spring support, the first spring support is arranged at the top end of the support assembly, the second spring support is arranged below the first spring support, and the stretching spring is arranged between the first spring support and the second spring support; a first guide rod, the upper end of the first guide rod is connected with the second spring support, and the lower end of the first guide rod is connected with the bottom support assembly; the support assembly is further provided with a linear bearing, the central axis of the linear bearing extends vertically, and the first guide rod is arranged in the linear bearing.

[0013] In some embodiments of the present application, the elastic connecting assembly further comprises an unloading mechanism, the unloading mechanism comprises a connecting fixed plate, a spring plunger and a second guide rod, the connecting fixed plate is connected with the bottom support assembly, the spring plunger is arranged on one side of the connecting fixed plate, the second guide rod is arranged on the other side of the connecting fixed plate, the upper end of the second guide rod is connected with the first guide rod, the second guide rod is provided with a lock hole penetrating through the second guide rod in the thickness direction of the connecting fixed plate, and the spring plunger has a locked state and an unlocked state, in the locked state, the lock pin of the spring plunger is inserted into the lock hole through the connecting fixed plate, and in the unlocked state, the lock pin of the spring plunger is disengaged from the lock hole.

[0014] In some embodiments of the present application, the unloading mechanism further comprises a sliding plate, a sliding groove and a threaded fastener, the sliding plate is located between the sliding groove and the connecting fixed plate, the sliding groove and the sliding plate define a matching channel suitable for the second guide rod to pass through, and the threaded fastener is connected to the connecting fixed plate in sequence through the sliding groove and the sliding plate.

[0015] In some embodiments of the present application, the elastic connecting assembly further comprises a universal connecting mechanism, the universal connecting mechanism comprises a connecting male head, a connecting female head and a fastening nut, the connecting male head penetrates into the connecting female head and is threadedly matched with the connecting female head, so that the overall length of the universal connecting mechanism is adjustable, the fastening nut is threadedly matched with the connecting male head and is suitable for abutting against the connecting female head, the lower end of the connecting female head is hingedly connected to the upper end of the second guide rod, the upper end of the connecting male head is hingedly connected to the lower end of the first guide rod, and the rotation center line of the connecting female head relative to the upper end of the second guide rod and the rotation center line of the connecting male head relative to the lower end of the first guide rod are perpendicular.

[0016] In some embodiments of the present application, the support assembly is further provided with two shockproof members, the two shockproof members are located above the second spring support, the two ends of the second spring support in the length direction have lugs, and after the locking pin of the spring plunger is disengaged from the lock hole, the two shockproof members are in one-to-one abutting engagement with the two lugs.

[0017] In some embodiments of the present application, the through hole is formed in an elliptical shape, the center axis of the notch and the long axis of the through hole are on the same straight line, the base support assembly further comprises a second sliding rail and a third sliding rail, the second sliding rail extends in the up-down direction, the base support is in sliding engagement with the second sliding rail in the up-down direction, the third sliding rail extends in the first direction and is fixedly connected with the support assembly, and the second sliding rail and the third sliding rail are in sliding engagement in the first direction.

[0018] The single crystal furnace assembly according to the embodiment of the present application comprises: a single crystal furnace provided with a crystal taking arm; and a rod taking tool, which is the rod taking tool for a hard shaft single crystal furnace as described above, and is detachably connected with the crystal taking arm.

[0019] The single crystal furnace assembly according to the embodiment of the present application, by providing the rod taking tool as described above, can reduce the cost and improve the overall performance of the single crystal furnace assembly.

[0020] The rod taking vehicle according to the embodiment of the present application comprises: a vehicle body; and a rod taking tool, which is the rod taking tool for a hard shaft single crystal furnace as described above, and is detachably connected with the vehicle body.

[0021] The rod taking vehicle according to the embodiment of the present application is provided with the rod taking tool for the hard shaft single crystal furnace, so that the cost is reduced and the overall performance of the rod taking vehicle is improved.

[0022] Additional aspects and advantages of the present application will be set forth in part in the following description, will become apparent from the following description, or will be learned through practice of the present application. BRIEF DESCRIPTION OF DRAWINGS

[0023] Figure 1 is a schematic view of a sub-furnace, a rod taking tool and a crystal taking arm according to an embodiment of the present application, wherein the rod taking tool is in a clamping state;

[0024] Figure 2 is a schematic view of a sub-furnace, a rod taking tool and a crystal taking arm according to an embodiment of the present application, wherein the crystal rod is in a state of being taken out of the sub-furnace;

[0025] Figure 3 is a structural schematic view of a rod taking tool according to an embodiment of the present application, wherein a base support is in a first position and a jaw assembly is in a clamping state;

[0026] Figure 4 is a structural schematic view of a rod taking tool according to an embodiment of the present application from another angle;

[0027] Figure 5 is a structural schematic view of a rod taking tool according to an embodiment of the present application, wherein a base support is in a second position and a jaw assembly is in a releasing state;

[0028] Figure 6 is a structural schematic view of a rod taking tool according to an embodiment of the present application, wherein a second welding main body is removed;

[0029] Figure 7 is a planar schematic view of a rod taking tool according to an embodiment of the present application;

[0030] Figure 8 is a schematic view of a rod taking tool and a crystal rod cooperating according to an embodiment of the present application;

[0031] Figure 9 is a structural schematic view of a linkage system composed of a base support assembly, a jaw assembly and a transmission assembly according to an embodiment of the present application;

[0032] Figure 10 is a cooperation schematic view of a first jaw, a second jaw and a first sliding rail according to an embodiment of the present application;

[0033] Figure 11 is a connection schematic view of a jaw assembly and a first guide rod according to an embodiment of the present application, wherein a first jaw and a second jaw are in a clamping state;

[0034] Figure 12 is a schematic view of the connection of the first guide rod and the first connecting frame according to an embodiment of the present application, wherein the first clamp jaw and the second clamp jaw are in a loosened state;

[0035] Figure 13 is a schematic view of the structure of the first connecting frame according to an embodiment of the present application;

[0036] Figure 14 is a schematic view of the assembly of the bottom support, the second sliding rail and the third sliding rail according to an embodiment of the present application;

[0037] Figure 15 is a schematic view of the structure of the unloading mechanism according to an embodiment of the present application;

[0038] Figure 16 is a schematic view of the structure of the unloading mechanism according to an embodiment of the present application, wherein the sliding groove is removed;

[0039] Figure 17 is a schematic view of the structure of the universal connecting mechanism according to an embodiment of the present application;

[0040] Figure 18 is a schematic view of the structure of the first guide rod, the linear bearing and the connecting plate according to an embodiment of the present application;

[0041] Figure 19 is a schematic view of the cooperation of the first guide rod, the second spring support and the shockproof piece according to an embodiment of the present application;

[0042] Figure 20 is a schematic view of the structure of the rod taking vehicle according to an embodiment of the present application, wherein the crystal rod is in a horizontal state;

[0043] Figure 21 is a schematic view of the structure of the rod taking vehicle according to an embodiment of the present application, wherein the crystal rod is in a vertical state.

[0044] Reference signs:

[0045] rod taking tool 100;

[0046] support assembly 10; first welding body 10a; second welding body 10b; connecting column 10c; first sliding rail 11; first stopper 111; second stopper 112; linear bearing 113; connecting plate 1131; shockproof piece 114; fixed folding plate 1141; hanging mechanism 115; positioning cylinder 116; supporting piece 117;

[0047] clamp jaw assembly 20; first clamp jaw 21; first sliding block 21a; first connecting frame 211; clamp jaw connecting block 212; intermediate connecting block 213; connecting rod block 214; second clamp jaw 22; second sliding block 21b; second connecting frame 221;

[0048] Bottom support assembly 30; bottom support 31; through hole 311; notch 312; protrusion 313; vertical slider 314; graphite retainer 315; crystal bar stopper 316;

[0049] Second slide rail 32; horizontal slider 321; third slide rail 33;

[0050] Transmission assembly 40;

[0051] Elastic connection assembly 41; spring tension mechanism 411; first spring bracket 4111; tension spring 4112; second spring bracket 4113; lug 41131; first guide rod 412;

[0052] First connecting rod 42; second connecting rod 43;

[0053] Unloading mechanism 44; connecting fixed plate 441; spring plunger 442; locking pin 4421; second guide rod 443; locking hole 4431; sliding plate 444; sliding groove 445; matching channel 446; threaded fastener 447;

[0054] Universal connecting mechanism 45; connecting male head 451; connecting female head 452; fastening nut 453;

[0055] Crystal bar 200; conical body 201;

[0056] Single crystal furnace assembly 1000; secondary furnace chamber 1001; seed crystal hard shaft 1002; crystal taking arm 1003;

[0057] Crystal taking trolley 2000; trolley body 2001; positioning column 2002; rotating mechanism 2003. DETAILED DESCRIPTION

[0058] Embodiments of the present application are described in detail below with reference to several drawings. The embodiments of this application are illustrated by way of example and thus are not limited by the accompanying drawings. Like reference numerals can be used to denote like elements throughout the accompanying drawings.

[0059] The following disclosure provides many different embodiments, or examples, for implementing different structures of the present application. For purposes of explanation and non- limitation, specific details of certain examples are described. Of course, many modifications can be made to the embodiments without departing from the spirit and scope of the application. Additionally, the present application can be implemented in different examples with different combinations of features. It is intended that the application not be limited to the specific examples described in this detailed description. Furthermore, the examples described herein are provided by way of example only. The language used is intended to be illustrative and not to limit the scope of the application. Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used herein is for describing particular embodiments only and is not intended to be limiting.

[0060] The following description refers to Figures 1-21 A rod taking tool 100, a single crystal furnace assembly 1000 and a rod taking vehicle 2000 for a hard shaft single crystal furnace according to embodiments of the present application are described.

[0061] For example, referring to Figure 1 and Figure 2 , the single crystal furnace assembly 1000 includes a sub-furnace chamber 1001 and a crystal taking arm 1003 connected with the rod taking tool 100, the crystal taking arm 1003 is adapted to move up and down and rotate the rod taking tool 100 to take out the crystal rod 200 in the sub-furnace chamber 1001, after the rod taking tool 100 takes out the crystal rod 200, the rod taking tool 100 and the crystal rod 200 can be placed as a whole in the vehicle body 2001 of the rod taking vehicle 2000 (see Figure 19 and Figure 20 ).

[0062] Referring to Figure 2 and Figure 3 , the rod taking tool 100 for a hard shaft single crystal furnace according to embodiments of the present application includes a bracket assembly 10, a gripper assembly 20, a bottom support assembly 30 and a transmission assembly 40.

[0063] Referring to Figure 2 and Figure 3 , the gripper assembly 20 includes a first gripper 21 and a second gripper 22, the first gripper 21 and the second gripper 22 are spaced apart along a first direction (see the left-right direction in Figure 3 , the first gripper 21 and the second gripper 22 are respectively slidably connected with the bracket assembly 10 along the first direction, the first gripper 21 and the second gripper 22 can move towards each other to hold the crystal rod 200 (see Figure 3 ), and the first gripper 21 and the second gripper 22 can also move away from each other to release the crystal rod 200 (see Figure 5 ). Optionally, as shown in Figure 3 , the first gripper 21 and the second gripper 22 are arranged symmetrically and spaced apart in the left-right direction.

[0064] Referring to Figure 3 and Figure 4 , the bottom support assembly 30 includes a bottom support 31, the bottom support 31 is arranged at the lower end of the bracket assembly 10, the bottom support 31 is slidably connected with the bracket assembly 10 along the up-down direction, the bottom support 31 has a through hole 311 adapted to cooperate with the crystal rod 200, and the bottom support 31 is further provided with a gap 312 adapted for the tapered body 201 of the crystal rod 200 to enter or exit the through hole 311. For example, as shown in Figure 3As shown, the through hole 311 is arranged as an elliptical hole, a short axis of the through hole 311 extends in the left-right direction, a long axis of the through hole 311 extends in the front-rear direction, and the notch 312 is arranged on the front side of the bottom support 31 and extends along the long axis direction of the through hole 311 to communicate with the through hole 311.

[0065] Referring to Figure 5 and Figure 6 As shown, the transmission assembly 40 comprises: an elastic connecting assembly 41, a first connecting rod 42 and a second connecting rod 43, one end of the elastic connecting assembly 41 is connected with the upper end of the support assembly 10, the other end of the elastic connecting assembly 41 is connected with the bottom support assembly 30, one end of the first connecting rod 42 is rotatably connected with the first jaw 21, the other end of the first connecting rod 42 is rotatably connected with the elastic connecting assembly 41, one end of the second connecting rod 43 is rotatably connected with the second jaw 22, the other end of the second connecting rod 43 is rotatably connected with the elastic connecting assembly 41, wherein the rotation center lines of the other end of the first connecting rod 42 and the other end of the second connecting rod 43 are on the same straight line, so as to ensure that the rotation angles of the first connecting rod 42 and the second connecting rod 43 are the same.

[0066] Referring to Figure 3 and Figure 5 As shown, the bottom support 31 is movable in the up-down direction between a first position (see Figure 3 ) and a second position (see Figure 5 ), the second position is above the first position, when the bottom support 31 moves downward to the first position, the bottom support 31 drives the elastic connecting assembly 41 to elongate, under the drive of the first connecting rod 42 and the second connecting rod 43, the first jaw 21 and the second jaw 22 move towards each other to be in a clamping state, wherein in the clamping state, the first jaw 21 and the second jaw 22 can cooperate to clamp the crystal bar 200. It should be noted that when the bar taking tool 100 is in a normal state, i.e. the bottom support 31 does not place the crystal bar 200, referring to Figure 5 , the bottom support 31 is in the second position, and the first jaw 21 and the second jaw 22 are in a loosening state to loosen the crystal bar 200.

[0067] For example, when the crystal bar 200 needs to be taken out from the auxiliary furnace chamber 1001, referring to Figure 1 and Figure 5As shown, first open the side door of the sub-chamber 1001, place the rod taking tool 100 into the sub-chamber 1001 through the crystal taking arm 1003, when the crystal taking arm 1003 drives the rod taking tool 100 to rotate into the sub-chamber 1001, the conical body 201 at the lower end of the crystal bar 200 enters the through hole 311 through the gap 312 relative to the bottom support 31, then the seed crystal shaft 1002 drives the crystal bar 200 to move downward, the conical body 201 at the lower end of the crystal bar 200 will extend into the through hole 311 of the bottom support 31 and the conical body 201 contacts with the inner wall of the through hole 311, with the downward movement of the crystal bar 200, the bottom support 31 is pushed to move to the first position (refer to Figure 3 ), the elastic connecting assembly 41 is elongated, under the driving of the first connecting rod 42 and the second connecting rod 43, the first clamping jaw 21 and the second clamping jaw 22 move towards each other to clamp the crystal bar 200, thereby realizing the linkage control of the bottom support 31 and the clamping jaw assembly 20, which can avoid the action of the first clamping jaw 21 and the second clamping jaw 22 controlled by the traditional electric or pneumatic mode, is conducive to reducing the production cost, and has high reliability, which is conducive to reducing the safety hazard.

[0068] Therefore, according to the rod taking tool 100 for the hard shaft single crystal furnace in the embodiment of the present application, when the bottom support 31 moves downward to the first position, the bottom support 31 drives the elastic connecting assembly 41 to elongate, under the driving of the first connecting rod 42 and the second connecting rod 43, the first clamping jaw 21 and the second clamping jaw 22 move towards each other to be in the clamping state, when the bottom support 31 moves upward to the second position, the elastic connecting assembly 41 is contracted, under the driving of the first connecting rod 42 and the second connecting rod 43, the first clamping jaw 21 and the second clamping jaw 22 move away from each other to be in the loosening state, which can avoid the action of the first clamping jaw 21 and the second clamping jaw 22 controlled by the traditional electric or pneumatic mode, is conducive to reducing the production cost, and has high reliability, which is conducive to reducing the safety hazard.

[0069] In some embodiments of the present application, referring to Figures 5-7 As shown, the clamping jaw assembly 20 is multiple, the multiple clamping jaw assemblies 20 are arranged in the up-down direction, and the first clamping jaw 21 and the second clamping jaw 22 of each clamping jaw assembly 20 are connected with the elastic connecting assembly 41 through the corresponding first connecting rod 42 and the corresponding second connecting rod 43 respectively. It should be noted that multiple means two and more than two in the present application. For example, as Figure 4As shown, the clamp jaw assemblies 20 are two, the two clamp jaw assemblies 20 are arranged in the up-down direction, the first connecting rods 42 and the second connecting rods 43 are two respectively, the first clamp jaw 21 and the second clamp jaw 22 of each clamp jaw assembly 20 are connected with the first guide rod 412 through the corresponding first connecting rod 42 and the corresponding second connecting rod 43 respectively. It can be understood that by making the clamp jaw assemblies 20 multiple, the rod taking tool 100 can be suitable for taking out large-size crystal rods 200, which is beneficial to increase the application range of the rod taking tool 100, especially for 12-inch large crystal rods 200, the equal length is greater than two meters, and the rod taking difficulty is large. By using the rod taking tool 100 of the embodiment of the application, the 12-inch large crystal rod 200 can be reliably taken out.

[0070] In some optional embodiments of the present application, referring to Figure 10 As shown, the support assembly 10 is provided with a first sliding rail 11 extending along the first direction (referring to the left-right direction in Figure 3 The first clamp jaw 21 is provided with a first sliding block 21a matched with the first sliding rail 11, and the second clamp jaw 22 is provided with a second sliding block 21b matched with the first sliding rail 11. The two ends of the first sliding rail 11 are respectively provided with a first stop block 111 and a second stop block 112. The first stop block 111 is used to limit the maximum stroke of the first clamp jaw 21, and the second stop block 112 is used to limit the maximum stroke of the second clamp jaw 22. It can be understood that by setting the first stop block 111 and the second stop block 112, the maximum movement stroke of the first clamp jaw 21 and the second clamp jaw 22 in the direction away from each other can be limited, and the reliability of the operation of the clamp jaw assembly 20 can be ensured, which is beneficial to reduce the security risks.

[0071] In some embodiments of the present application, referring to Figure 11 and Figure 12 As shown, the first clamp jaw 21 and the first connecting rod 42 are spaced apart along the second direction (referring to the front-back direction in Figure 3 The first clamp jaw 21 and the first connecting rod 42 are connected through a first connecting frame 211, and the second clamp jaw 22 and the second connecting rod 43 are spaced apart along the second direction. The second clamp jaw 22 and the second connecting rod 43 are connected through a second connecting frame 221, and the first connecting frame 211 and the second connecting frame 221 are open in the direction away from each other. As shown in Figure 4 The support assembly 10 includes a first welded main body 10a and a second welded main body 10b arranged in the front-back direction, and the first connecting main body and the second welded main body 10b are connected through a connecting column 10c. Alternatively, as shown in Figure 13 The first connecting frame 211 includes a clamp jaw connecting block 212, an intermediate connecting block 213 and a connecting rod block 214 connected in sequence, and the second connecting frame 221 and the first connecting frame 211 are the same in structure.

[0072] It can be understood that, by arranging the first connecting frame 211 to connect the first clamping jaw 21 and the first connecting rod 42, and by arranging the second connecting frame 221 to connect the second clamping jaw 22 and the second connecting rod 43, the first connecting rod 42 and the second connecting rod 43 can be spaced apart from the first clamping jaw 21 and the second clamping jaw 22 in the second direction, thereby facilitating the transmission assembly 40 to be located between the first welding body 10a and the second welding body 10b, and facilitating to ensure the reliability of the transmission assembly 40, and further ensuring the stability and reliability of the rod taking tool 100.

[0073] In some specific embodiments of the present application, referring to Figure 6 and Figure 7 , the elastic connecting assembly 41 comprises a spring tensioning mechanism 411 and a first guide rod 412, the spring tensioning mechanism 411 comprises a first spring bracket 4111, a tension spring 4112 and a second spring bracket 4113, the first spring bracket 4111 is arranged at the top end of the bracket assembly 10, the second spring bracket 4113 is arranged below the first spring bracket 4111, the tension spring 4112 is arranged between the first spring bracket 4111 and the second spring bracket 4113, the upper end of the first guide rod 412 is connected with the second spring bracket 4113, and the lower end of the first guide rod 412 is connected with the bottom support assembly 30. The bracket assembly 10 is further provided with a linear bearing 113, the central axis of the linear bearing 113 extends vertically, and the first guide rod 412 is arranged in the linear bearing 113. For example, referring to Figure 6 and Figure 18 , the linear bearing 113 is connected with the first welding body 10a through a connecting cross plate 1131. It can be understood that, by arranging the first guide rod 412 in the linear bearing 113, the linear bearing 113 can guide the up-and-down movement of the first guide rod 412, thereby preventing the first guide rod 412 from being unable to reset due to deflection, and further ensuring the reliability of the rod taking tool 100.

[0074] For example, in some examples, referring to Figure 6 and Figure 7 , the first connecting rod 42 and the second connecting rod 43 are two groups, and the first clamping jaw 21 and the second clamping jaw 22 of each clamping jaw assembly 20 are connected with the first guide rod 412 through the corresponding first connecting rod 42 and the corresponding second connecting rod 43, respectively.

[0075] In some embodiments of the present application, referring to Figure 6 , Figure 15 and Figure 16As shown, the elastic connecting assembly 41 further comprises an unloading mechanism 44, which comprises a connecting fixed plate 441, a spring plunger 442 and a second guide rod 443. The connecting fixed plate 441 is connected with the bottom support assembly 30. The spring plunger 442 is arranged on one side of the connecting fixed plate 441. The second guide rod 443 is arranged on the other side of the connecting fixed plate 441, and the upper end of the second guide rod 443 is connected with the first guide rod 412, for example, referring to Figure 6 As shown, the upper end of the second guide rod 443 is connected with the first guide rod 412 through a universal connecting mechanism 45 described below. The second guide rod 443 is provided with a lock hole 4431 (referring to Figure 16 As shown) which penetrates the guide rod in the thickness direction of the connecting fixed plate 441. The spring plunger 442 has a locked state and an unlocked state. In the locked state, the lock pin 4421 of the spring plunger 442 is inserted into the lock hole 4431 through the connecting fixed plate 441. In the unlocked state, the lock pin 4421 of the spring plunger 442 is disengaged from the lock hole 4431.

[0076] Therefore, after the worker takes down the crystal bar 200 from the auxiliary furnace chamber 1001 (for example, puts it on the vehicle body 2001) through the taking arm 1003 and the taking bar tool 100, the worker can rotate the spring plunger 442 to switch the spring plunger 442 from the locked state to the unlocked state. At this time, the elastic connecting assembly 41 is contracted, and the first clamping jaw 21 and the second clamping jaw 22 move towards the direction away from each other to be in the loosened state, so as to facilitate the worker to take down the crystal bar 200 from the taking bar tool 100, which is convenient to operate.

[0077] For example, referring to Figure 7 and Figure 14As shown, the protruding part 313 at the rear end of the bottom support 31 is connected with the connecting fixed plate 441, the spring plunger 442 is arranged at the rear side of the connecting fixed plate 441, the second guide rod 443 is arranged at the front side of the connecting fixed plate 441 and the upper end of the second guide rod 443 is connected with the first guide rod 412, the second guide rod 443 is provided with a lock hole 4431 penetrating the second guide rod 443 in the thickness direction of the connecting fixed plate 441, the spring plunger 442 has a locked state and an unlocked state, in the locked state, the lock pin 4421 of the spring plunger 442 is inserted into the lock hole 4431 through the connecting fixed plate 441, in the unlocked state, the lock pin 4421 of the spring plunger 442 is disengaged from the lock hole 4431, in the initial state of the rod taking tool 100, i.e. before taking the rod, the spring plunger 442 is in the locked state, when the rod taking tool 100 loaded with the crystal rod 200 is transferred to the vehicle body 2001 of the rod taking vehicle 2000, after the rod taking tool 100 is changed from the vertical state to the horizontal state by the rotating mechanism 2003 of the vehicle body 2001, the spring plunger 442 is rotated, the first guide rod 412 drives the first connecting rod 42 and the second connecting rod 43 to move under the action of the spring stretching mechanism 411, so as to loosen the crystal rod 200 by the jaw assembly 20, and then the worker can take out the crystal rod 200.

[0078] In some optional embodiments of the present application, referring to Figure 15 and Figure 16 As shown, the unloading mechanism 44 further comprises a sliding plate 444, a sliding groove 445 and a threaded fastener 447, the sliding plate 444 is arranged between the sliding groove 445 and the connecting fixed plate 441, the sliding groove 445 and the sliding plate 444 define a matching channel 446 suitable for the second guide rod 443 to pass through, and the threaded fastener 447 is connected with the connecting fixed plate 441 in sequence through the sliding groove 445 and the sliding plate 444. Optionally, the sliding plate 444 and the sliding groove 445 are made of wear-resistant and lubricating materials such as polytetrafluoroethylene. It can be understood that by making the second guide rod 443 slide in the matching channel 446 defined by the sliding groove 445 and the sliding plate 444, the fine particles generated by the friction between metal parts can be avoided, which is beneficial to avoid the pollution to the crystal rod 200 during the taking and placing process, and ensure the quality of the wafer processed from the crystal rod 200 subsequently.

[0079] In some embodiments of the present application, referring to Figure 7 and Figure 17As shown, the elastic connecting assembly 41 further comprises a universal connecting mechanism 45, which comprises a connecting male head 451, a connecting female head 452, and a fastening nut 453. The connecting male head 451 penetrates into the connecting female head 452 and is threadedly matched with the connecting female head 452, so that the overall length of the universal connecting mechanism 45 is adjustable. The fastening nut 453 is threadedly matched with the connecting male head 451 and is adapted to abut against the connecting female head 452. The lower end of the connecting female head 452 is hingedly connected with the upper end of the second guide rod 443, and the upper end of the connecting male head 451 is hingedly connected with the lower end of the first guide rod 412. The rotation center line of the connecting female head 452 relative to the upper end of the second guide rod 443 and the rotation center line of the connecting male head 451 relative to the lower end of the first guide rod 412 are perpendicular.

[0080] It can be understood that, by penetrating the connecting male head 451 into the connecting female head 452 and threadedly matching the connecting male head 451 with the connecting female head 452, the length of the universal connecting mechanism 45 can be controlled by controlling the depth of the connecting male head 451 screwed into the connecting female head 452, so that the tightness of the clamping jaw assembly 20 clamping the crystal bar 200 can be controlled, which is beneficial to further optimizing the performance of the bar taking tool 100 and reducing the damage of the clamping jaw assembly 20 to the crystal bar 200. Meanwhile, by making the rotation center line of the connecting female head 452 relative to the upper end of the second guide rod 443 and the rotation center line of the connecting male head 451 relative to the lower end of the first guide rod 412 perpendicular, the second guide rod 443 is rotatable relative to the first guide rod 412 in the left-right direction and the front-back direction (see Figure 3 and Figure 17 ), that is, the activity freedom of the second guide rod 443, the universal connecting mechanism 45, and the first guide rod 412 as a whole can be increased, which is beneficial to avoiding the jamming of the transmission assembly 40 and improving the reliability of the bar taking tool 100.

[0081] In some optional embodiments of the present application, as shown in Figure 9 and Figure 19 , the bracket assembly 10 is further provided with two shockproof members 114, which are located above the second spring bracket 4113. The two ends of the second spring bracket 4113 in the length direction have lugs 41131. After the locking pin 4421 of the spring plunger 442 is disengaged from the locking hole 4431, the two shockproof members 114 are in one-to-one abutting engagement with the two lugs 41131. For example, as shown in Figure 9 and Figure 19As shown, the shockproof pieces 114 can be rubber pads, and the shockproof pieces 114 are connected to the first welding main body 10a through the fixed flaps 1141. It can be understood that, after the locking pin 4421 of the spring plunger 442 is disengaged from the locking hole 4431, the two shockproof pieces 114 are in one-to-one abutting cooperation with the two lugs 41131, thereby achieving the shock absorption and limiting of the second spring support 4113, which is beneficial to guarantee the reliability of the rod taking tool 100 and reduce the safety hazard.

[0082] In some embodiments of the present application, with reference to Figure 14 As shown, the through hole 311 is formed in an elliptical shape, and the center axis of the notch 312 and the long axis of the through hole 311 are on the same straight line; the base support assembly 30 further comprises a second sliding rail 32 and a third sliding rail 33, the second sliding rail 32 extends in the up-down direction, the base support 31 is in sliding cooperation with the second sliding rail 32 in the up-down direction, and the third sliding rail 33 extends in the first direction (with reference to the left-right direction in Figure 14 ) and is fixedly connected to the support assembly 10, and the second sliding rail 32 is in sliding cooperation with the third sliding rail 33 in the first direction.

[0083] For example, with reference to Figure 14 As shown, the third sliding rail 33 is four, the four third sliding rails 33 are divided into two groups and arranged in the left-right direction, the four third sliding rails 33 are respectively fixedly connected to the first welding main body 10a, the second sliding rail 32 is two and arranged in the left-right direction, the second sliding rail 32 extends in the up-down direction, the rear side of each second sliding rail 32 is provided with two transverse sliding blocks 321 arranged in the up-down direction and spaced apart, the transverse sliding block 321 and the second sliding rail 32 are connected through fasteners, the two transverse sliding blocks 321 on the second sliding rail 32 on the left side are in sliding cooperation with the two third sliding rails 33 on the left side in the left-right direction, the two transverse sliding blocks 321 on the second sliding rail 32 on the right side are in sliding cooperation with the two third sliding rails 33 on the right side in the left-right direction, the base support 31 is provided with two vertical sliding blocks 314 arranged in the left-right direction and spaced apart, the vertical sliding block 314 and the base support 31 are connected through fasteners, and the two vertical sliding blocks 314 and the two second sliding rails 32 are in sliding cooperation in the up-down direction.

[0084] It can be understood that, by setting the second sliding rail 32 and the third sliding rail 33, the vertical sliding block 314 is in sliding cooperation with the second sliding rail 32 in the up-down direction so that the bottom support 31 can move up and down relative to the support assembly 10, and the horizontal sliding block 321 is in sliding cooperation with the third sliding rail 33 in the left-right direction so that the bottom support 31 can move left and right relative to the support assembly 10, that is, the bottom support 31, the vertical sliding block 314, the second sliding rail 32, and the horizontal sliding block 321 form a floating bottom support system, the bottom support 31 can move up and down and left and right relative to the support assembly 10, and the through hole 311 on the bottom support 31 is formed in an elliptical shape, so that, when the center of the crystal bar 200 and the center of the crystal bar taking tool 100 have a deviation in the first direction, the contact between the crystal bar 200 and the elliptical through hole 311 of the bottom support 31 will push the bottom support 31 to move in the opposite direction until the center axis of the crystal bar 200 and the center axis of the through hole 311 are on the same straight line, so that the bottom support assembly 30 realizes self-adaptive centering relative to the crystal bar 200, which is beneficial to prevent the crystal bar 200 from being stressed due to the deviation of the bottom support 31 relative to the crystal bar 200, and to prevent the seed crystal from breaking and other out-of-control situations.

[0085] In one example of the present application, referring to Figure 14 The bottom support assembly 30 further includes a graphite retainer ring 315, which is connected to the bottom support 31 by a fastener and surrounds the through hole 311. It can be understood that, by setting the graphite retainer ring 315, it is beneficial to avoid damage caused by direct contact between the crystal bar 200 and the bottom support 31 made of metal.

[0086] Optionally, referring to Figure 14 The upper surface of the bottom support 31 is provided with two crystal bar stoppers 316, which are arranged around the through hole 311 and are adapted to abut against the outer peripheral wall of the crystal bar. It can be understood that, in some production scenarios, the crystal bar 200 may be hung, that is, the bottom of the crystal bar 200 cannot form a tapered body 201, and in the present application, by setting the two crystal bar stoppers 316 adapted to abut against the outer peripheral wall of the hung crystal bar, the crystal bar taking tool 100 can also be applied to the hung crystal bar, thereby enriching the application range of the crystal bar taking tool 100.

[0087] Optionally, referring to Figure 5 The crystal bar taking tool 100 further includes a plurality of support members 117, which are spaced apart in the up-down direction on the support assembly 10 and have recesses adapted to position the crystal bar 200. For example, the support members 117 can be arranged between the bottom support 31 and the jaw assembly 20, or the support members 117 can also be arranged between two adjacent jaw assemblies 20, thereby further achieving reliable positioning of the crystal bar 200 and preventing the crystal bar 200 from falling and causing personnel injury. Optionally, the recess is formed in a V-shaped groove.

[0088] According to the single crystal furnace assembly 1000 of the embodiment of the present application, the single crystal furnace has a sub-furnace chamber 1001, and the single crystal furnace is provided with a crystal taking arm 1003, and the rod taking tool 100 is the rod taking tool 100 for the hard shaft single crystal furnace according to the above-mentioned embodiment of the present application, and the crystal taking arm 1003 is detachably connected with the rod taking tool 100.

[0089] Referring to Figure 1 and Figure 2 , according to the single crystal furnace assembly 1000 of the embodiment of the present application, by arranging the rod taking tool 100 according to the above-mentioned embodiment of the present application, the cost is reduced, and the overall performance of the single crystal furnace assembly 1000 is improved.

[0090] For example, in one example of the present application, referring to Figure 4 , the support assembly 10 of the rod taking tool 100 is further provided with a mounting mechanism 115, and the crystal taking arm 1003 is connected with the mounting mechanism 115 through clamping. Thus, the mounting and dismounting between the rod taking tool 100 and the crystal taking arm 1003 is further facilitated, and the efficiency of taking and placing the crystal rod 200 is improved.

[0091] According to the rod taking vehicle 2000 of the embodiment of the present application, the rod taking vehicle 2000 comprises a vehicle body 2001 and a rod taking tool 100, the rod taking tool 100 is the rod taking tool 100 for the hard shaft single crystal furnace according to the above-mentioned embodiment of the present application, and the rod taking tool 100 is detachably connected with the vehicle body 2001.

[0092] Referring to Figure 20 and Figure 21 , according to the rod taking vehicle 2000 of the embodiment of the present application, by arranging the rod taking tool 100 for the hard shaft single crystal furnace according to the above-mentioned embodiment of the present application, the cost is reduced, and the overall performance of the rod taking vehicle 2000 is improved.

[0093] For example, referring to Figure 20 , the vehicle body 2001 is provided with two positioning columns 2002 extending in the up-down direction, and the support assembly 10 is provided with two positioning cylinders 116 (referring to Figure 4 ), and the two positioning columns 2002 are inserted into the two positioning cylinders 116 one by one to realize pin sleeve cooperation. Thus, the mounting and dismounting between the rod taking tool 100 and the vehicle body 2001 is further facilitated, and the efficiency of taking and placing the crystal rod 200 is improved.

[0094] Specifically, in one example, as Figures 1-21As shown, the rod taking tool 100, the crystal taking arm 1003 and the vehicle body 2001 are used in cooperation, when the crystal rod 200 needs to be taken out from the sub-furnace chamber 1001, first open the side door of the sub-furnace chamber 1001, place the rod taking tool 100 into the sub-furnace chamber 1001 through the crystal taking arm 1003, when the crystal taking arm 1003 drives the rod taking tool 100 to rotate into the sub-furnace chamber 1001, the conical body 201 at the lower end of the crystal rod 200 enters the through hole 311 through the gap 312 relative to the bottom support 31, and the conical body 201 will contact with the inner wall of the oval through hole 311, the lateral force generated by the two will push the bottom support 31 to move left and right to realize that the central axis of the bottom support 31 and the central axis of the crystal rod 200 are on the same straight line, at the same time, the downward force of the crystal rod 200 on the bottom support 31 will push the bottom support 31 to move downward, with the downward movement of the crystal rod 200, the bottom support 31 will be moved from the second position (refer to Figure 5 ) to the first position (refer to Figure 3 ), the bottom support 31 drives the unloading mechanism 44, the universal connecting mechanism 45 and the first guide rod 412 to move downward together under the guidance of the linear bearing 113, the spring stretching mechanism 411 is stretched, at the same time, under the driving of the first connecting rod 42 and the second connecting rod 43, the first clamping jaw 21 and the second clamping jaw 22 move towards each other to clamp the crystal rod 200, then disconnect the connection between the seed crystal hard shaft 1002 and the crystal rod 200, the crystal taking arm 1003 realizes the transfer of the rod taking tool 100 loaded with the crystal rod 200 out of the sub-furnace chamber 1001;

[0095] After the crystal taking arm 1003 transfers the rod taking tool 100 loaded with the crystal rod 200 out of the sub-furnace chamber 1001, first make the mounting mechanism 115 of the crystal taking arm 1003 and the rod taking tool 100 disengage to take down the rod taking tool 100 and the crystal rod 200 as a whole, then transfer the rod taking tool 100 and the crystal rod 200 as a whole to the vehicle body 2001, through the rotating mechanism 2003 of the vehicle body 2001, the rod taking tool 100 and the crystal rod 200 are changed from the vertical state (refer to Figure 21 ) to the horizontal state (refer to Figure 20), the first guide rod 412 drives the first connecting rod 42 and the second connecting rod 43 to move under the action of the spring stretching mechanism 411, so as to drive the jaw assembly 20 to loosen the crystal bar 200, and then facilitate the staff to take out the crystal bar 200. Thus, on the one hand, the self-adaptive centering of the bar taking tool 100 relative to the crystal bar 200 is realized, which is beneficial to prevent the uncontrolled situation caused by the deviation of the bottom support 31 relative to the crystal bar 200, such as the stress seed crystal fracture of the crystal bar 200, and on the other hand, the linkage setting of the bottom support 31 and the jaw assembly 20 and the setting of the unloading mechanism 44 facilitate the switching of the jaw assembly 20 between the clamping state and the loosening state, which can avoid the action of the first jaw 21 and the second jaw 22 controlled by the traditional electric or pneumatic mode, is beneficial to reduce the production cost, has high reliability, and is beneficial to reduce the safety hazard.

[0096] In the description of the present application, it should be understood that the orientations or positional relationships indicated by the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like are based on the orientations or positional relationships shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the devices or elements indicated must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application.

[0097] In addition, the terms "first" and "second" are only for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined with "first" and "second" can explicitly or implicitly include one or more of the features. In the description of the present application, the meaning of "a plurality of" is two or more, unless otherwise specifically limited.

[0098] In the present application, unless otherwise specifically defined and limited, the terms "mounting", "connection", "connection", "fixing" and the like should be understood in a broad sense, for example, it can be fixed connection, or detachable connection, or integrated; it can be mechanical connection, or electrical connection, or communication; it can be directly connected, or indirectly connected through an intermediate medium, or the communication or interaction relationship between two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0099] In the present application, unless otherwise explicitly specified and limited, a first feature is "on" or "under" a second feature can mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, the first feature "over", "above" and "on top of" the second feature can mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is horizontally higher than the second feature. The first feature "under", "below" and "underneath" the second feature can mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is horizontally lower than the second feature.

[0100] In the description of the present application, the description of the terms "one embodiment", "some embodiments", "an example", "a specific example", or "some examples" etc. means that the specific features, structures, materials or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present application. In the present application, the illustrative description of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any appropriate manner in one or more embodiments or examples. In addition, the person skilled in the art can combine and combine the different embodiments or examples described in the present application and the features of the different embodiments or examples without contradiction.

[0101] Although the embodiments of the present application have been shown and described, those of ordinary skill in the art can understand that various changes, modifications, replacements and variations can be made to the embodiments without departing from the principles and spirit of the present application, and the scope of the present application is defined by the claims and their equivalents.

Claims

1. A rod-taking tool for a hard-axis single crystal furnace, characterized in that, include: Support assembly; A gripper assembly, comprising a first gripper and a second gripper, wherein the first gripper and the second gripper are spaced apart and symmetrically arranged along a first direction, and the first gripper and the second gripper are respectively slidably engaged with the bracket assembly along the first direction; A base support assembly, the base support assembly including a base support disposed at the lower end of the support assembly, the base support and the support assembly slidingly in a vertical direction, the base support having a through hole suitable for engaging with a crystal rod, and the base support also having a notch suitable for a conical part of the crystal rod to enter and exit the through hole; A transmission assembly includes: an elastic connecting component, a first connecting rod, and a second connecting rod. One end of the elastic connecting component is connected to the upper end of the support assembly, and the other end of the elastic connecting component is connected to the base assembly. One end of the first connecting rod is rotatably connected to the first gripper, and the other end of the first connecting rod is rotatably connected to the elastic connecting component. One end of the second connecting rod is rotatably connected to the second gripper, and the other end of the second connecting rod is rotatably connected to the elastic connecting component. The rotation center lines of the other ends of the first and second connecting rods are on the same straight line. The elastic connection assembly includes a spring tensioning mechanism and a first guide rod. The spring tensioning mechanism includes a first spring support, a tension spring, and a second spring support. The first spring support is located at the top of the support assembly, and the second spring support is located below the first spring support. The tension spring is located between the first spring support and the second spring support. The upper end of the first guide rod is connected to the second spring support, and the lower end of the first guide rod is connected to the base assembly. The support assembly also includes a linear bearing with its central axis extending vertically. The first guide rod passes through the linear bearing. The base is movable between a first position and a second position in the vertical direction. When the base moves downward to the first position, the base causes the elastic connecting component to extend. Under the action of the first connecting rod and the second connecting rod, the first gripper and the second gripper move toward each other to be in a clamping state.

2. The rod-taking fixture for a hard-axis single crystal furnace according to claim 1, characterized in that, The gripper assembly comprises multiple gripper assemblies, which are arranged at intervals in the vertical direction. The first gripper and the second gripper of each gripper assembly are respectively connected to the elastic connecting assembly via a corresponding first connecting rod and a corresponding second connecting rod.

3. The rod-taking fixture for a hard-axis single crystal furnace according to claim 1, characterized in that, The bracket assembly is provided with a first slide rail extending along the first direction, the first gripper is provided with a first slider that cooperates with the first slide rail, the second gripper is provided with a second slider that cooperates with the first slide rail, and a first stop block and a second stop block are respectively provided at both ends of the first slide rail. The first stop block is used to limit the maximum stroke of the first gripper, and the second stop block is used to limit the maximum stroke of the second gripper.

4. The rod-taking fixture for a hard-axis single crystal furnace according to claim 3, characterized in that, The first gripper and the first connecting rod are spaced apart along a second direction and are connected by a first connecting frame. The second gripper and the second connecting rod are spaced apart along a second direction and are connected by a second connecting frame. The first connecting frame and the second connecting frame are open in directions away from each other, wherein the second direction is perpendicular to the first direction.

5. The rod-taking fixture for a hard-axis single crystal furnace according to claim 1, characterized in that, The resilient connection component also includes: The unloading mechanism includes a connecting fixing plate, a spring plunger, and a second guide rod. The connecting fixing plate is connected to the base assembly. The spring plunger is located on one side of the connecting fixing plate, and the second guide rod is located on the other side of the connecting fixing plate, with its upper end connected to the first guide rod. The second guide rod has a locking hole that penetrates the connecting fixing plate in the thickness direction. The spring plunger has a locked state and an unlocked state. In the locked state, the locking pin of the spring plunger passes through the connecting fixing plate and is inserted into the locking hole. In the unlocked state, the locking pin of the spring plunger disengages from the locking hole.

6. The rod-taking fixture for a hard-axis single crystal furnace according to claim 5, characterized in that, The unloading mechanism further includes: a sliding plate, a sliding groove, and a threaded fastener. The sliding plate is located between the sliding groove and the connecting fixing plate. The sliding groove and the sliding plate define a mating channel suitable for the second guide rod to pass through. The threaded fastener passes through the sliding groove, the sliding plate, and is connected to the connecting fixing plate in sequence.

7. The rod-taking fixture for a hard-axis single crystal furnace according to claim 5, characterized in that, The resilient connection component also includes: The universal joint mechanism includes a male connector, a female connector, and a fastening nut. A portion of the male connector passes through the female connector and is threadedly engaged with it, allowing the overall length of the universal joint mechanism to be adjustable. The fastening nut is threadedly engaged with the male connector and is adapted to abut against the female connector. The lower end of the female connector is hinged to the upper end of the second guide rod, and the upper end of the male connector is hinged to the lower end of the first guide rod. The rotation center line of the female connector relative to the upper end of the second guide rod and the rotation center line of the male connector relative to the lower end of the first guide rod are perpendicular.

8. The rod-taking fixture for a hard-axis single crystal furnace according to claim 5, characterized in that, The bracket assembly is also provided with two shock absorbers, which are located above the second spring bracket. The two ends of the second spring bracket in the length direction have lugs. After the locking pin of the spring plunger disengages from the locking hole, the two shock absorbers and the two lugs abut against each other in a corresponding manner.

9. The rod-taking fixture for a hard-axis single crystal furnace according to claim 5, characterized in that, The through hole is elliptical in shape, and the central axis of the notch and the major axis of the through hole are on the same straight line; The base support assembly further includes a second slide rail and a third slide rail. The second slide rail extends in the vertical direction, and the base support slides and engages with the second slide rail in the vertical direction. The third slide rail extends in the first direction and is fixedly connected to the bracket assembly. The second slide rail and the third slide rail slide and engage in the first direction.

10. A single-crystal furnace assembly, characterized in that, include: A single crystal furnace, wherein the single crystal furnace is equipped with a crystal picking arm; The rod-taking fixture is a rod-taking fixture for a hard-axis single crystal furnace according to any one of claims 1-9, wherein the crystal-taking arm is detachably connected to the rod-taking fixture.

11. A rod-retrieving cart, characterized in that, include: Vehicle body; The rod-taking fixture is a rod-taking fixture for a hard-axis single crystal furnace according to any one of claims 1-9, and the rod-taking fixture is detachably connected to the vehicle body.

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