A device for detecting the pump maintenance quality of a photoresist supply system of a coating machine

Abstract

The present invention provides a pump maintenance quality detection device for a photoresist supply system of a coating machine, comprising: a support frame; a pump fixing support, fixed on the support frame, used to fix the pump after maintenance; a motor, fixed on the support frame, used to drive the pump after maintenance; a first liquid storage tray, fixed on the support frame and located below the pump fixing support; a first leakage detection device, fixed on the bottom surface of the inner cavity of the first liquid storage tray; a first pipeline module, used to connect with the upper liquid inlet and upper liquid outlet of the pump after maintenance; a second pipeline module, used to connect with the lower liquid inlet and lower liquid outlet of the pump after maintenance; a PLC, fixed on the support frame, and connected to communicate with the motor, the first leakage detection device, the first pipeline module, and the second pipeline module respectively. The leakage detection device can detect whether the pump is leaking, and can determine whether the load change of the pump meets the requirements by detecting the load change of the motor, thereby reducing product defects or scrapping and avoiding delays in production.

Description

Technical Field

[0001] The invention relates to the technical field of coating machine maintenance, in particular to a device for detecting the maintenance quality of a pump of a coating machine photoresist supply system. Background Art

[0002] The injection pump of the existing coating machine is maintained by the factory itself, usually manually maintained and the sealing ring is replaced by personnel. The maintenance is affected by human factors and the effect of maintenance cannot be quantified. Improper maintenance may cause pump leakage or load exceeding the allowable range.

[0003] In the prior art, after the maintenance is completed, the pump is usually directly installed back to its original position. Whether the maintenance quality of the pump meets the requirements, which usually include whether there is leakage and whether the load is qualified, is usually not tested. There is no corresponding equipment for testing in the prior art, which results in the pump not being found to be unqualified in maintenance until it is put into production. This not only delays production, but also causes production waste and increases the defect rate. Summary of the invention

[0004] The technical problem to be solved by the present invention is to provide a device for detecting the pump maintenance quality of a photoresist supply system of a coating machine, which can detect whether the quality of pump maintenance meets the requirements, reduce product defects or scrap, and avoid delays in production.

[0005] The present invention is implemented as follows: a device for detecting the pump maintenance quality of a photoresist supply system of a coating machine, comprising:

[0006] Support frame;

[0007] A pump fixing support, fixed on the support frame, used to fix the pump after maintenance;

[0008] a motor, fixed to the support frame, for driving the pump after maintenance;

[0009] A first liquid receiving pan, fixed to the support frame and located below the pump fixed support;

[0010] A first liquid leakage detection device is fixed to the bottom surface of the inner cavity of the first liquid receiving tray;

[0011] A first pipeline module, used to connect with the upper liquid inlet and the upper liquid outlet of the pump after maintenance;

[0012] A second pipeline module is used to connect with the lower liquid inlet and the lower liquid outlet of the pump after maintenance;

[0013] The PLC is fixed on the support frame and is respectively connected and communicated with the motor, the first liquid leakage detection device, the first pipeline module, and the second pipeline module.

[0014] Furthermore, the first pipeline module includes:

[0015] The first sealed container is provided with a first pressure relief valve, a first interface, a second interface and a first liquid filling port; the first liquid filling port is provided with a first plug; the first sealed container is fixed on the support frame;

[0016] A first air-controlled valve, fixedly connected to the support frame, with an inlet air-tightly connected to the first interface, and an outlet air-tightly connected to the upper liquid inlet;

[0017] A first solenoid valve is fixed on the support frame and is airtightly connected to the control port of the first air-controlled valve and is communicatively connected to the PLC;

[0018] A second air-controlled valve, fixedly connected to the support frame, with an outlet air-tightly connected to the second interface, and an inlet air-tightly connected to the upper liquid outlet;

[0019] A second solenoid valve is fixed on the support frame and is airtightly connected to the control port of the second air-controlled valve and is communicatively connected to the PLC;

[0020] a third solenoid valve, fixed on the support frame, and airtightly connected to the first sealed container, and communicatively connected to the PLC;

[0021] The first pressure gauge is connected between the first sealed container and the third solenoid valve, and is communicatively connected to the PLC.

[0022] Furthermore, the second pipeline module includes:

[0023] The second sealed container is provided with a second pressure relief valve, a third interface and a second liquid filling port; the second liquid filling port is provided with a second plug; the second sealed container is fixed on the support frame;

[0024] A third air-controlled valve, fixedly connected to the support frame, with an inlet air-tightly connected to the third interface, and an outlet air-tightly connected to the lower liquid inlet;

[0025] a fourth solenoid valve, fixed on the support frame, and air-tightly connected to the control port of the third air-controlled valve, and communicatively connected to the PLC;

[0026] A fourth air-controlled valve, fixedly connected to the support frame, with an outlet for connecting to a discharge container and an inlet for air-tight connection to the lower liquid outlet;

[0027] a fifth solenoid valve, fixed on the support frame, and air-tightly connected to the control port of the fourth air-controlled valve, and communicatively connected to the PLC;

[0028] a sixth solenoid valve, fixed on the support frame, and airtightly connected to the second sealed container, and communicatively connected to the PLC;

[0029] The second pressure gauge is connected between the second sealed container and the sixth solenoid valve, and is communicatively connected to the PLC.

[0030] Furthermore, it also includes:

[0031] A first pressure regulating valve is fixed on the support frame, and its outlet is respectively connected to the third solenoid valve and the sixth solenoid valve in an airtight manner, and is communicatively connected to the PLC;

[0032] A filter pressure regulating valve is fixed on the support frame, and its outlet is respectively connected to the inlet of the first pressure regulating valve, the first solenoid valve, the second solenoid valve, the fourth solenoid valve and the fifth solenoid valve in an airtight manner, and is communicatively connected to the PLC;

[0033] The manual valve is fixed on the support frame, one end of which is air-tightly connected to the inlet of the filter pressure regulating valve, and the other end is used to connect to the air source.

[0034] Furthermore, it also includes a spare solenoid valve, which is fixed to the support frame and is air-tightly connected to the outlet of the filter pressure regulating valve and is communicatively connected to the PLC.

[0035] Furthermore, it also includes a valve seat, which is fixed to the support frame and is air-tightly connected to the outlet of the filter pressure regulating valve;

[0036] Wherein, the first solenoid valve, the second solenoid valve, the fourth solenoid valve, the fifth solenoid valve and the spare solenoid valve are connected to the valve seat in parallel.

[0037] Furthermore, it also includes:

[0038] A second liquid tray is fixed to the support frame; wherein the first sealed container and the second sealed container are respectively fixed in the second liquid tray;

[0039] The second liquid leakage detection device is fixed to the bottom surface of the inner cavity of the first liquid receiving tray and is communicatively connected to the PLC.

[0040] Furthermore, the pump fixing seat comprises:

[0041] A fixed bottom plate is fixed to the support frame; the motor is fixed to the fixed bottom plate;

[0042] There are two clamping seats, which are fixed to the fixed bottom plate at intervals vertically;

[0043] A screw rod is rotatably connected to the fixed base plate, arranged vertically, and connected to the output shaft of the motor;

[0044] A nut, threadedly connected to the screw rod;

[0045] An interface chuck is fixed to the fixed base plate and is coaxially arranged below the clamping seat;

[0046] A slide rail, vertically fixed to the fixed bottom plate;

[0047] A slider, slidably connected to the slide rail;

[0048] The plum bolt is fixed to the slider and is used to connect with the piston rod of the pump after maintenance.

[0049] Furthermore, the support frame comprises:

[0050] Support tripod;

[0051] The cabinet body is provided with a cabinet door and is fixed on the supporting legs; the cabinet door is provided with a viewing window;

[0052] Wherein, the pump fixing seat and the first liquid receiving tray are fixed in the cabinet; and the control panel of the PLC is fixed on the side of the cabinet.

[0053] Furthermore, it also includes:

[0054] The alarm device is fixed on the support frame and is communicatively connected to the PLC.

[0055] A power switch, fixedly connected to the support frame and electrically connected to the PLC;

[0056] The first travel switch is fixed on the pump fixing base, is connected to the PLC for communication, and is used to detect whether the piston rod of the pump is extended into place;

[0057] The second travel switch is fixed on the pump fixing seat, is connected to the PLC for communication, and is used to detect whether the piston rod of the pump is retracted into position.

[0058] The present invention has the following advantages: a pump maintenance quality detection device for a coating machine photoresist supply system, comprising: a support frame; a pump fixing support, fixed on the support frame, used to fix the pump after maintenance; a motor, fixed on the support frame, used to drive the pump after maintenance; a first liquid storage tray, fixed on the support frame and located below the pump fixing support; a first leakage detection device, fixed to the bottom surface of the inner cavity of the first liquid storage tray; a first pipeline module, used to connect with the upper liquid inlet and upper liquid outlet of the pump after maintenance; a second pipeline module, used to connect with the lower liquid inlet and lower liquid outlet of the pump after maintenance; a PLC, fixed on the support frame, and connected to the motor, the first leakage detection device, the first pipeline module, and the second pipeline module for communication. The leakage detection device can detect whether the pump is leaking, and by detecting the load change of the motor, it can be concluded whether the load change of the pump meets the requirements, which can reduce product defects or scrapping and avoid delays in production. BRIEF DESCRIPTION OF THE DRAWINGS

[0059] The present invention will be further described below in conjunction with embodiments with reference to the accompanying drawings.

[0060] Figure 1 A three-dimensional diagram of a device for detecting the pump maintenance quality of a photoresist supply system of a coating machine according to the present invention.

[0061] Figure 2 It is a front view of a device for detecting the pump maintenance quality of a photoresist supply system of a coating machine according to the present invention.

[0062] Figure 3 A top view of a device for detecting the pump maintenance quality of a photoresist supply system of a coating machine according to the present invention.

[0063] Figure 4 The present invention is a left side view of a device for detecting the pump maintenance quality of a photoresist supply system of a coating machine.

[0064] Figure 5 for Figure 4 A local enlarged schematic diagram of point A in the middle.

[0065] Figure 6 It is a right view of a device for detecting the pump maintenance quality of a photoresist supply system of a coating machine according to the present invention.

[0066] Figure 7 for Figure 6 BB section view in.

[0067] Figure 8 for Figure 7 A partial enlarged schematic diagram of point C in the middle.

[0068] Fig. 9 It is a three-dimensional view of the pump fixing support of the present invention.

[0069] Fig.10 It is an exploded view of the pump fixing support and the pump of the present invention.

[0070] Fig.11 It is a pipeline diagram of the present invention.

[0071] Description of reference numerals:

[0072] Support frame 1, support foot frame 11, cabinet body 12, cabinet door 121, visual window 122;

[0073] Pump fixed support 2, fixed base plate 21, clamping seat 22, screw rod 23, nut 24, interface chuck 25, slide rail 26, slide block 27, plum bolt 28;

[0074] Motor 3;

[0075] The first liquid receiving tray 4;

[0076] A first liquid leakage detection device 5;

[0077] PLC6,

[0078] A first sealed container 71, a first pressure relief valve 711, a first interface 712, a second interface 713, a first liquid filling port 714, a first plug 715, a first air control valve 72, a first solenoid valve 73, a second air control valve 74, a second solenoid valve 75, a third solenoid valve 76, and a first pressure gauge 77;

[0079] A second sealed container 81, a second pressure relief valve 811, a third interface 812, a second liquid filling port 813, a second plug 814, a third air control valve 82, a fourth solenoid valve 83, a fourth air control valve 84, a fifth solenoid valve 85, a sixth solenoid valve 86, and a second pressure gauge 87;

[0080] Discharge container 9;

[0081] A first pressure regulating valve 10;

[0082] Filter pressure regulating valve 20;

[0083] Manual valve 30;

[0084] Spare solenoid valve 40;

[0085] Valve seat 50;

[0086] A second liquid receiving tray 60;

[0087] A second liquid leakage detection device 70;

[0088] Alarm device 80;

[0089] Power switch 90;

[0090] Pump 100 , upper liquid inlet 101 , upper liquid outlet 102 , lower liquid inlet 103 , lower liquid outlet 104 , first travel switch 105 , second travel switch 106 . DETAILED DESCRIPTION

[0091] In the description of the invention, it should be understood that the description indicating the orientation or positional relationship is based on the orientation or positional relationship shown in the drawings and is only for the convenience of describing the invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it should not be understood as limiting the scope of protection of the invention.

[0092] In the description of the invention, it should be noted that, unless otherwise clearly specified and limited, the terms "disposed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two elements. For ordinary technicians in this field, the specific meanings of the above terms in the invention can be understood according to specific circumstances.

[0093] The inventive concept of the present invention is as follows: the pump is driven to work by a motor to simulate the actual working condition of the pump, thereby testing the pump to determine whether the quality of the pump after maintenance meets the requirements.

[0094] (1) If the pump 100 leaks after maintenance, the liquid will leak into the first liquid receiving tray 4, and then be detected by the first leakage detection device 5, and fed back to the PLC 6, so that the pump 100 can be detected to be leaking;

[0095] (2) Since the pump 100 is driven by the motor 3, the load change of the pump 100 will be transmitted to the motor 3. Therefore, the load change of the pump 100 can be obtained by detecting the load change of the motor 3. The load change range of the motor 3 can be preset, and the detected data is compared with the preset range. When it exceeds the preset range, it indicates that the load of the pump 100 is unqualified, that is, the maintenance is unqualified. If it is within the preset range, it indicates that the load of the pump 100 is qualified.

[0096] The preset load variation range of the motor 3 can be tested in advance with a qualified pump 100 to detect the preset range, wherein the motor 3 is of the same model as that used in actual production, and the liquid delivered to the pump 100 is also the same as that in actual production, such as the first sealed container 71 containing photoresist liquid, and the second sealed container 72 containing PGMEA liquid, and other operating parameters also simulate actual production.

[0097] (3) The function of the second leakage detection device 70 is to detect whether the first sealed container 71 or the second sealed container 81 is leaking, to ensure the quality of the two containers themselves, and to play a role in safety protection. This is because the two containers will be inflated and pressurized during the detection process. If there is a leak, the liquid in the container will seep out, affecting the test effect.

[0098] See also Figures 1 to 11 shown.

[0099] A device for detecting the pump maintenance quality of a photoresist supply system of a coating machine of the present invention comprises:

[0100] Support frame 1;

[0101] A pump fixing support 2, fixed on the support frame 1, for fixing the pump 100 after maintenance;

[0102] The motor 3 is fixed on the support frame 1 and is used to drive the pump 100 after maintenance. The motor 3 of the same model as the actual production model can be selected to make the test more accurate.

[0103] The first liquid collecting pan 4 is fixed to the support frame 1 and is located below the pump fixing support 2; when the pump 100 leaks due to improper maintenance, the first liquid collecting pan 4 collects the leaked liquid to prevent it from leaking onto the machine or the floor and causing contamination.

[0104] The first liquid leakage detection device 5 is fixed to the bottom surface of the inner cavity of the first liquid receiving tray 4. When liquid leakage occurs, it can be sensed by the first liquid leakage detection device 5 and fed back to the PLC in time, and the PLC controls each electrical device to stop the detection work;

[0105] The first pipeline module is used to connect with the upper liquid inlet 101 and the upper liquid outlet 102 of the pump 100 after maintenance; the first pipeline module transports the first liquid, such as photoresist liquid, to the upper cavity of the pump 100 to simulate the actual production state of the pump 100.

[0106] The second pipeline module is used to connect with the lower liquid inlet 103 and the lower liquid outlet 104 of the pump 100 after maintenance; the second pipeline module transports a second liquid, such as PGMEA liquid, to the lower cavity of the pump 100 to simulate the actual production state of the pump 100.

[0107] The PLC 6 is fixed on the support frame 1 and is respectively connected and communicated with the motor 3 , the first liquid leakage detection device 5 , the first pipeline module, and the second pipeline module.

[0108] The first pipeline module comprises:

[0109] The first sealed container 71 is provided with a first pressure relief valve 711, a first interface 712, a second interface 713 and a first liquid filling port 714; the first liquid filling port 714 is provided with a first plug 715; the first sealed container 71 is fixed on the support frame 1; in a specific implementation, the first sealed container 71 can be a photoresist barrel, which is used to hold photoresist liquid to simulate the actual working state of the pump 100. The first pressure relief valve 711 is connected to the first sealed container 71 and is used to release pressure after the detection is completed. The first liquid filling port 714 is used to add the test liquid into the first sealed container 71, and the first plug 715 is used to plug the seal after the addition is completed.

[0110] The first air-controlled valve 72 is fixedly connected to the support frame 1, and its inlet is air-tightly connected to the first interface 712, and its outlet is used to be air-tightly connected to the upper liquid inlet 101; the first air-controlled valve 72 is used to control the opening and closing of the connecting pipeline between the upper liquid inlet 101 of the pump 100 and the first sealed container 71. If the model is AMD01-6UP-4-1, it is a one-way valve, and the liquid flow direction is: first sealed container 71→first air-controlled valve 72→upper liquid inlet 101.

[0111] The first solenoid valve 73 is fixed on the support frame 1 and is airtightly connected to the control port of the first air control valve 72 and is communicatively connected to the PLC 6; the first solenoid valve 73 is used to control the on-off of the first air control valve 72, thereby controlling the opening and closing of the pipeline. For example, the model is SY5120-5LZD-01.

[0112] The second air-controlled valve 74 is fixedly connected to the support frame 1, and its outlet is air-tightly connected to the second interface 713, and its inlet is used for air-tight connection with the upper liquid outlet 102; the second air-controlled valve 74 is used to control the opening and closing of the connecting pipeline between the upper liquid outlet 102 of the pump 100 and the first sealed container 71. If the model is AMD01-6UP-4-1, it is a one-way valve, and the liquid flow direction is: upper liquid outlet 102→second air-controlled valve 74→first sealed container 71.

[0113] The second solenoid valve 75 is fixed on the support frame 1 and is airtightly connected to the control port of the second air-controlled valve 74 and is communicatively connected to the PLC 6; the second solenoid valve 75 is used to control the on-off of the second air-controlled valve 74, thereby controlling the opening and closing of the pipeline. For example, the model is SY5120-5LZD-01.

[0114] The third solenoid valve 76 is fixed on the support frame 1 and is airtightly connected to the first sealed container 71 and is communicatively connected to the PLC 6; the inlet end of the third solenoid valve 76 is connected to the gas source to control the opening and closing of the pipeline for conveying compressed gas into the first sealed container 71, pressurize the first sealed container 71, convey the liquid in the first sealed container from the upper liquid inlet 101 into the upper cavity of the pump 100, and finally discharge it from the upper liquid outlet 102 and flow back into the first sealed container 71. The model of the third solenoid valve 76 can be VT307V-5G1-01.

[0115] The first pressure gauge 77 is connected between the first sealed container 71 and the third electromagnetic valve 76 and is communicatively connected to the PLC 6 . The first pressure gauge 77 is used to detect the pressure of the compressed gas delivered from the third electromagnetic valve 76 to the first sealed container 71 .

[0116] The second pipeline module comprises:

[0117] The second sealed container 81 is provided with a second pressure relief valve 811, a third interface 812 and a second liquid filling port 813; the second liquid filling port 813 is provided with a second plug 814; the second sealed container 81 is fixed on the support frame 1; in a specific implementation, the second sealed container 81 can be a barrel for containing PGMEA liquid. The second pressure relief valve 811 is used to relieve the pressure of the second sealed container 81 after the detection. The second liquid filling port 813 is used to add liquid into the second sealed container 81, and the second plug 814 is used to plug the seal after the addition is completed.

[0118] The third air-controlled valve 82 is fixedly connected to the support frame 1, and its inlet is air-tightly connected to the third interface 812, and its outlet is used to be air-tightly connected to the lower liquid inlet 103; the third air-controlled valve 82 is used to control the opening and closing of the connecting pipeline between the lower liquid inlet 103 of the pump 100 and the second sealed container 81. If the model is AMD01-6UP-4-1, it is a one-way valve, and the liquid flow direction is: second sealed container 81→third air-controlled valve 82→lower liquid inlet 101.

[0119] The fourth solenoid valve 83 is fixed on the support frame 1 and is airtightly connected to the control port of the third air control valve 82 and is communicatively connected to the PLC 6; the fourth solenoid valve 83 is used to control the on-off of the third air control valve 82, thereby controlling the opening and closing of the pipeline. For example, the model is SY5120-5LZD-01.

[0120] The fourth air-controlled valve 84 is fixedly connected to the support frame 1, and its outlet is used to connect to the discharge container 9, and its inlet is used to be air-tightly connected to the lower liquid outlet 104; the fourth air-controlled valve 84 is used to control the opening and closing of the connecting pipeline between the lower liquid outlet 104 of the pump 100 and the discharge container 9. If the model is AMD01-6UP-4-1, it is a one-way valve, and the liquid flow direction is: lower liquid outlet 104→fourth air-controlled valve 84→discharge container 9.

[0121] The fifth solenoid valve 85 is fixed on the support frame 1 and is airtightly connected to the control port of the fourth air control valve 84 and is communicatively connected to the PLC 6; the fifth solenoid valve 85 is used to control the on-off of the fourth air control valve 84, thereby controlling the opening and closing of the pipeline. For example, the model is SY5120-5LZD-01.

[0122] The sixth solenoid valve 86 is fixed on the support frame 1 and is airtightly connected to the second sealed container 81 and is communicatively connected to the PLC 6; the inlet end of the sixth solenoid valve 86 is connected to the gas source to control the opening and closing of the pipeline for conveying compressed gas into the second sealed container 81, pressurize the second sealed container 81, convey the liquid in the second sealed container from the lower liquid inlet 103 into the lower cavity of the pump 100, and finally discharge it from the lower liquid outlet 104 into the discharge container 9. The model of the sixth solenoid valve 86 can be VT307V-5G1-01.

[0123] The second pressure gauge 87 is connected between the second sealed container 81 and the sixth solenoid valve 86 and is communicatively connected to the PLC 6 . The second pressure gauge 87 is used to detect the pressure of the compressed gas delivered from the sixth solenoid valve 86 to the second sealed container 81 .

[0124] The difference between the first pipeline module and the second pipeline module is that in the first pipeline module, the first sealed container 71, the upper liquid inlet 101, and the upper liquid outlet 102 form a liquid circulation loop. In the second pipeline module, the first sealed container 81 transports liquid to the lower liquid inlet 103, and the liquid discharged from the lower liquid outlet 104 enters the discharge container 9, which is not a circulation loop. Therefore, the second sealed container 71 needs to be replenished with liquid in a timely manner.

[0125] Also includes:

[0126] The first pressure regulating valve 10 is fixed on the support frame 1, and the outlets are respectively connected to the third solenoid valve 76 and the sixth solenoid valve 86 in an airtight manner, and are communicatively connected to the PLC 6;

[0127] The filter pressure regulating valve 20 is fixed on the support frame 1, and the outlet is respectively connected to the inlet of the first pressure regulating valve 10, the first solenoid valve 73, the second solenoid valve 75, the fourth solenoid valve 83 and the fifth solenoid valve 85 in an airtight manner, and is communicatively connected to the PLC 6;

[0128] The manual valve 30 is fixed on the support frame 1, one end of which is airtightly connected to the inlet of the filter pressure regulating valve 20, and the other end is used to connect the gas source. The manual valve 30 plays a dual protection role. When the power is off or the solenoid valve is damaged, the manual valve 30 can be used to control the opening and closing of the gas circuit.

[0129] The gas source in the factory is connected from the manual valve 30, filtered and pressure-regulated by the filter pressure regulating valve 20, and then the gas pressure is adjusted to the required pressure by the first pressure regulating valve 10, and then delivered to the first pipeline module or the second pipeline module.

[0130] It also includes a spare solenoid valve 40, which is fixed to the support frame 1 and is airtightly connected to the outlet of the filter pressure regulating valve 20, and is communicatively connected to the PLC 6. When one of the first solenoid valve 73, the second solenoid valve 75, the fourth solenoid valve 83 or the fifth solenoid valve 85 is damaged, the pipeline of the spare solenoid valve 40 can be connected to the spare solenoid valve 40 for use, thereby reducing the waiting time for maintenance.

[0131] It also includes a valve seat 50, which is fixed to the support frame 1 and is airtightly connected to the outlet of the filter pressure regulating valve 20;

[0132] The first solenoid valve 73 , the second solenoid valve 75 , the fourth solenoid valve 83 , the fifth solenoid valve 85 and the standby solenoid valve 40 are connected in parallel to the valve seat 50 , and the valve seat 50 facilitates the installation and wiring of the five solenoid valves.

[0133] Also includes:

[0134] The second liquid receiving tray 60 is fixed to the support frame 1; wherein the first sealed container 71 and the second sealed container 81 are respectively fixed in the second liquid receiving tray 60; the second liquid receiving tray 60 can receive the leaked liquid of the first sealed container 71 or the second sealed container 81, and plays a role of safety protection, because in actual detection, the first sealed container 71 is filled with photoresist liquid and the second sealed container 81 is filled with PGMEA liquid, and these liquids are corrosive.

[0135] The second liquid leakage detection device 70 is fixed to the bottom surface of the inner cavity of the first liquid receiving tray 4 and is communicatively connected to the PLC 6. When the first sealed container 71 or the second sealed container 81 leaks due to quality problems, the second liquid leakage detection device 70 can detect it in time and feed back to the PLC, and the PLC controls the alarm device to issue an alarm prompt and control each device to stop working.

[0136] The pump fixing base 2 comprises:

[0137] The fixed base plate 21 is fixed to the support frame 1 ; the motor 3 is fixed to the fixed base plate 21 ; as in a specific embodiment, the fixed base plate 21 is a rectangular parallelepiped, which is vertically fixed to the support frame 1 .

[0138] There are two clamping seats 22, which are fixed vertically at intervals on the fixed base plate 21; as in a specific embodiment, the pump 100 is a cylinder, and the clamping seats 22 can adopt existing shaft clamping seats, and the pump 100 is vertically fixed in the two clamping seats 22, and the piston rod is arranged vertically downward.

[0139] The screw rod 23 is rotatably connected to the fixed base plate 21, arranged vertically, and connected to the output shaft of the motor 3;

[0140] A nut 24 is threadedly connected to the screw rod 23;

[0141] The interface chuck 25 is fixed to the fixed base plate 21 and is coaxially arranged below the clamp seat 22 . The pump 100 is inserted into the interface chuck 25 , and the piston rod passes through the interface chuck 25 and is connected to the plum bolt 28 .

[0142] A slide rail 26, vertically fixed to the fixed bottom plate 21;

[0143] A slider 27, slidably connected to the slide rail 26;

[0144] The plum bolt 28 is fixed to the slider 27 and is used to connect with the piston rod of the pump 100 after maintenance.

[0145] The pump 100 is installed on the pump fixing seat 2 in the following way: the pump 100 is fixed vertically in the two clamping seats 22, and the interface chuck 25 is inserted, the piston rod passes vertically downward through the interface chuck 25, and the plum blossom bolt 28 is locked into the internal threaded hole at the end of the piston rod, and the two are connected and fixed. During the test, the PLC6 controls the motor 3 to work, drives the screw rod 23 to rotate, drives the nut 24 to move in the vertical direction, and then drives the slider 27 to move in the vertical direction, thereby driving the plum blossom bolt 28 to move in the vertical direction, and finally drives the piston rod to perform telescopic movement.

[0146] The support frame 1 comprises:

[0147] Supporting tripod 11;

[0148] The cabinet body 12 is provided with a cabinet door 121 and is fixed on the supporting leg frame 11; the cabinet door 12 is provided with a viewing window 122;

[0149] The pump fixing base 2 and the first liquid tray 4 are fixed in the cabinet 12; the control panel 61 of the PLC 6 is fixed to the side of the cabinet 12. The cabinet 12 can serve as a safety shield, because the quality of the pump 100 after maintenance cannot be guaranteed, and in order to avoid accidents, the pump fixing base 2 and the pump 100 are arranged in the cabinet 12.

[0150] Also includes:

[0151] The alarm device 80 is fixed on the support frame 1 and is communicatively connected to the PLC 6.

[0152] A power switch 90, fixedly connected to the support frame 1, and electrically connected to the PLC 6;

[0153] The first travel switch 105 is fixed on the pump fixing base 2 and is in communication connection with the PLC 6 and is used to detect whether the piston rod of the pump 100 is extended into place;

[0154] The second travel switch 106 is fixed on the pump fixing base 2, is connected to the PLC 6 for communication, and is used to detect whether the piston rod of the pump 100 is retracted into position.

[0155] In a specific implementation, an emergency stop button may also be provided, which is electrically connected to the PLC6.

[0156] Specific usage:

[0157] Set up working procedures.

[0158] The PLC presets the load variation range of the motor 3 in advance.

[0159] Photoresist liquid is injected into the first sealed container 71, and PGMEA liquid is injected into the second sealed container 81. The motor 3 is a stepping motor.

[0160] The first liquid leakage detection device 5 and the second liquid leakage detection device 70 may be liquid leakage sensors.

[0161] The first travel switch 105 and the second travel switch 106 are fixed on the pump fixing base 2 and are respectively connected to the PLC for communication, wherein the first travel switch 105 corresponds to the piston rod of the pump 100 extending into position, and the second travel switch 106 corresponds to the piston rod retracting into position.

[0162] The pump 100 is installed vertically downward on the pump fixing base 2, and the plum bolt 28 and the piston rod of the pump 100 are fixed.

[0163] The manual valve 30 is in a normally open state.

[0164] Press the power switch 90, PLC6 works according to the preset working procedure:

[0165] PLC6 controls the third solenoid valve 76 to open the gas circuit, and the compressed gas is filled into the first sealed container 71. At the same time, PLC controls the first solenoid valve 73 to ventilate and connect the first air-controlled valve 72, and controls the second solenoid valve 74 to ventilate and connect the second air-controlled valve 72, and controls the fifth solenoid valve 85 to ventilate and connect the fourth air-controlled valve 84; at the same time, it also controls the motor 3 to rotate forward; at this time, the motor 3 drives the screw rod to rotate forward, thereby driving the piston rod to extend downward. On the other hand, the compressed gas pressurizes the photoresist liquid in the first sealed container 71 and transports it into the upper liquid inlet 101, pushing the piston rod to extend downward, and the photoresist liquid then flows back into the first sealed container 71 from the upper liquid outlet 102, and the lower cavity is in a pressure relief state, and the PGMEA liquid is discharged from the lower liquid outlet 104 to the discharge container 9. When the piston rod is extended downward to the full position, it is sensed by the first stroke switch 105, and the first stroke switch 105 feeds back a signal to PLC6;

[0166] Then PLC6 controls the motor 3 to reverse, and controls the sixth solenoid valve 86 to open the air circuit, and the compressed gas is filled into the second sealed container 81. At the same time, PLC controls the third solenoid valve 76 to close the air circuit, and controls the first solenoid valve 73 to cut off the air to close the first air control valve 72, and controls the second air control valve 72 and the fourth air control valve 84 to continue to be connected, and also controls the fourth solenoid valve 83 to ventilate to connect the third air control valve 82; at this time, the motor 3 drives the screw rod to reverse, thereby driving the piston rod to retract upward. On the other hand, the compressed gas pressurizes the PGMEA liquid in the second sealed container 81 and transports it into the lower liquid inlet 103, pushing the piston rod to retract upward, and the PGMEA liquid is then discharged from the lower liquid outlet 104 to the discharge container 9; while the upper cavity is in a pressure relief state, and the photoresist liquid is discharged from the upper liquid outlet 102 to the first sealed container 71. When the piston rod retracts upward to its position, it is sensed by the second stroke switch 106, and the second stroke switch 106 feeds back a signal to PLC6;

[0167] The pump completes one telescopic movement, and similarly, PLC6 controls motor 3 to drive the piston rod of pump 100 to perform reciprocating telescopic movement until the detection is completed.

[0168] During this process, if the pump leaks, the liquid will drip into the first liquid receiving tray 4 and then be detected by the first leakage detection device 5, which will feed back a signal to PLC6. PLC6 will control the alarm device 80 to issue an alarm prompt, display the leakage on the control panel 61, and control each component to stop working and wait for staff to handle it.

[0169] On the other hand, when the piston rod of the pump 100 is in the process of extension and retraction, the load change of the motor 3 is fed back to the PLC6 in real time. The PLC records, saves and generates a load change curve. If it exceeds the preset change range, the PLC6 controls the alarm device 80 to issue an alarm prompt, and displays the load abnormality on the control panel 61, and controls each component to stop working and wait for staff to handle it.

[0170] After completing the test, PLC6 disconnects the power supply and automatically turns off the power.

[0171] Although the specific implementation modes of the present invention are described above, those skilled in the art should understand that the specific implementation modes described are only illustrative and are not intended to limit the scope of the present invention. Equivalent modifications and changes made by those skilled in the art in accordance with the spirit of the present invention should be included in the scope of protection of the claims of the present invention.

Claims

1. A device for detecting the pump maintenance quality of a photoresist supply system of a coating machine, characterized in that: include: Support frame; A pump fixing support, fixed on the support frame, used to fix the pump after maintenance; a motor, fixed to the support frame, for driving the pump after maintenance; A first liquid receiving pan, fixed to the support frame and located below the pump fixed support; A first liquid leakage detection device is fixed to the bottom surface of the inner cavity of the first liquid receiving tray; A first pipeline module, used to connect with the upper liquid inlet and the upper liquid outlet of the pump after maintenance; A second pipeline module is used to connect with the lower liquid inlet and the lower liquid outlet of the pump after maintenance; A PLC is fixed on the support frame and is respectively connected and communicated with the motor, the first liquid leakage detection device, the first pipeline module, and the second pipeline module; The first pipeline module comprises: The first sealed container is provided with a first pressure relief valve, a first interface, a second interface and a first liquid filling port; the first liquid filling port is provided with a first plug; the first sealed container is fixed on the support frame; A first air-controlled valve, fixedly connected to the support frame, with an inlet air-tightly connected to the first interface, and an outlet air-tightly connected to the upper liquid inlet; A first solenoid valve is fixed on the support frame and is airtightly connected to the control port of the first air-controlled valve and is communicatively connected to the PLC; A second air-controlled valve, fixedly connected to the support frame, with an outlet air-tightly connected to the second interface, and an inlet air-tightly connected to the upper liquid outlet; A second solenoid valve is fixed on the support frame and is airtightly connected to the control port of the second air-controlled valve and is communicatively connected to the PLC; a third solenoid valve, fixed on the support frame, and airtightly connected to the first sealed container, and communicatively connected to the PLC; a first pressure gauge connected between the first sealed container and the third solenoid valve, and communicatively connected to the PLC; The second pipeline module comprises: The second sealed container is provided with a second pressure relief valve, a third interface and a second liquid filling port; the second liquid filling port is provided with a second plug; the second sealed container is fixed on the support frame; A third air-controlled valve, fixedly connected to the support frame, with an inlet air-tightly connected to the third interface, and an outlet air-tightly connected to the lower liquid inlet; a fourth solenoid valve, fixed on the support frame, and air-tightly connected to the control port of the third air-controlled valve, and communicatively connected to the PLC; A fourth air-controlled valve, fixedly connected to the support frame, with an outlet for connecting to a discharge container and an inlet for air-tight connection to the lower liquid outlet; a fifth solenoid valve, fixed on the support frame, and air-tightly connected to the control port of the fourth air-controlled valve, and communicatively connected to the PLC; a sixth solenoid valve, fixed on the support frame, and airtightly connected to the second sealed container, and communicatively connected to the PLC; a second pressure gauge connected between the second sealed container and the sixth solenoid valve, and communicatively connected to the PLC; Also includes: A first pressure regulating valve is fixed on the support frame, and its outlet is respectively connected to the third solenoid valve and the sixth solenoid valve in an airtight manner, and is communicatively connected to the PLC; A filter pressure regulating valve is fixed on the support frame, and its outlet is respectively connected to the inlet of the first pressure regulating valve, the first solenoid valve, the second solenoid valve, the fourth solenoid valve and the fifth solenoid valve in an airtight manner, and is communicatively connected to the PLC; A manual valve is fixed on the support frame, one end of which is airtightly connected to the inlet of the filter pressure regulating valve, and the other end is used to connect to the air source; Also includes: A second liquid tray is fixed to the support frame; wherein the first sealed container and the second sealed container are respectively fixed in the second liquid tray; The second liquid leakage detection device is fixed to the bottom surface of the inner cavity of the first liquid receiving tray and is communicatively connected to the PLC.

2. The device for detecting the pump maintenance quality of the photoresist supply system of a coating machine according to claim 1, characterized in that: It also includes a spare solenoid valve, which is fixed to the support frame and is air-tightly connected to the outlet of the filter pressure regulating valve and is communicatively connected to the PLC.

3. The device for detecting the pump maintenance quality of the photoresist supply system of a coating machine according to claim 2, characterized in that: It also includes a valve seat, which is fixed to the support frame and is air-tightly connected to the outlet of the filter pressure regulating valve; Wherein, the first solenoid valve, the second solenoid valve, the fourth solenoid valve, the fifth solenoid valve and the spare solenoid valve are connected to the valve seat in parallel.

4. A device for detecting the pump maintenance quality of a photoresist supply system of a coating machine according to any one of claims 1 to 3, characterized in that: The pump fixing seat comprises: A fixed bottom plate is fixed to the support frame; the motor is fixed to the fixed bottom plate; There are two clamping seats, which are fixed to the fixed bottom plate at intervals vertically; A screw rod is rotatably connected to the fixed base plate, arranged vertically, and connected to the output shaft of the motor; A nut, threadedly connected to the screw rod; An interface chuck is fixed to the fixed base plate and is coaxially arranged below the clamping seat; A slide rail, vertically fixed to the fixed bottom plate; A slider, slidably connected to the slide rail; The plum bolt is fixed to the slider and is used to connect with the piston rod of the pump after maintenance.

5. A device for detecting the pump maintenance quality of a photoresist supply system of a coating machine according to any one of claims 1 to 3, characterized in that: The support frame comprises: Support tripod; The cabinet body is provided with a cabinet door and is fixed on the supporting legs; the cabinet door is provided with a viewing window; Wherein, the pump fixing seat and the first liquid receiving tray are fixed in the cabinet; and the control panel of the PLC is fixed on the side of the cabinet.

6. A device for detecting the pump maintenance quality of a photoresist supply system of a coating machine according to any one of claims 1 to 3, characterized in that: Also includes: An alarm device is fixed on the support frame and is communicatively connected to the PLC. A power switch, fixedly connected to the support frame and electrically connected to the PLC; The first travel switch is fixed on the pump fixing base, is connected to the PLC for communication, and is used to detect whether the piston rod of the pump is extended into place; The second travel switch is fixed on the pump fixing seat, is connected to the PLC for communication, and is used to detect whether the piston rod of the pump is retracted into position.

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