Horizontal multi-joint robot and substrate conveying system including the horizontal multi-joint robot

Abstract

The present invention provides a horizontal articulated robot. The robot (100) includes a base (1), an arm (3), and a hand (8). The arm (3) is rotatably connected to the base (1) in the horizontal direction and is composed of a plurality of linkages (30) that are rotatably connected to each other in the horizontal direction. The hand (8) is rotatably connected to the arm (3) in the horizontal direction. An internal space (40) is formed in a first linkage (31) that is at least one of the plurality of linkages (30). The first linkage (31) has a partition wall (45), and the partition wall (45) divides the internal space (40) into two storage chambers, namely a first storage chamber (40A) and a second storage chamber (40B), for respectively storing components.

Description

Technical Field

[0001] The technology disclosed herein relates to a horizontal articulated robot and a substrate transfer system including the horizontal articulated robot. Background Art

[0002] So far, a horizontal articulated robot and a substrate transfer system including the horizontal articulated robot have been well known. For example, the horizontal articulated robot described in Patent Document 1 includes a base, an arm, and an end effector. The arm is rotatably connected to the base in the horizontal direction and is composed of a plurality of linkages that are rotatably connected to each other in the horizontal direction.

[0003] Patent Document 1: Japanese Unexamined Patent Application Publication No. 2015-36186 Summary of the Invention

[0004] In such a horizontally articulated robot configured as described above, each linkage has a function of accommodating various components in addition to the function of the linkage itself. For example, the arm has components related to the drive of the arm, components related to the detection of the movement of the arm, and the like. At least a part of those components is accommodated in the linkage. The robot disclosed in Patent Document 1 includes a plurality of motors that drive a plurality of linkages and an end effector. For example, two motors that drive two end effectors are accommodated in the linkage closest to the front end side in the arm.

[0005] Since the weight of the entire linkage becomes heavy in a structure in which components are accommodated in the linkage, it is preferable that the rigidity of the linkage is high. If the rigidity of the linkage is high, the rigidity of the arm becomes high, and as a result, the position accuracy of the end effector can be improved. Particularly for a linkage that accommodates a plurality of motors as described above, since the weight of the entire linkage becomes heavy, a high rigidity is required.

[0006] The technology disclosed herein is a technology in view of the above points, and an object thereof is to improve the rigidity of the linkages in a horizontal articulated robot.

[0007] The horizontally articulated robot disclosed herein includes a base, an arm, and an end effector. The arm is rotatably connected to the base in the horizontal direction and is composed of a plurality of linkages that are rotatably connected to each other in the horizontal direction. The end effector is rotatably connected to the arm in the horizontal direction. An internal space is formed in at least one of the plurality of linkages, and the at least one linkage has a partition wall that divides the internal space into two accommodation chambers that respectively accommodate components.

[0008] The substrate transfer system disclosed herein includes a housing and a horizontal articulated robot disposed within the housing. The horizontal articulated robot transfers substrates between a container and a processing device. The container is disposed adjacent to the housing and stores substrates, and the processing device is disposed adjacent to the housing and processes substrates.

[0009] (Effects of the Invention)

[0010] According to the horizontal articulated robot, the rigidity of the link can be improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] Figure 1 is a side view of the horizontal articulated robot.

[0012] Figure 2 is a simplified top view of the substrate processing apparatus.

[0013] Figure 3 is a functional block diagram of the robot.

[0014] Figure 4 is a top view of the first link in a state where a part of the first lid is broken and fractured.

[0015] Figure 5 is a bottom view of the first link in a state where a part of the second lid is broken and fractured.

[0016] Figure 6 is Figure 4 a simplified sectional view of the first link taken along line VI-VI of

[0017] Figure 7 is a bottom view of the third link in a state where a part of the second lid is broken and fractured. DETAILED DESCRIPTION OF THE INVENTION

[0018] Hereinafter, the exemplified embodiments will be described in detail with reference to the drawings.

[0019] Figure 1 is a side view of the horizontal articulated robot 100. The horizontal articulated robot (hereinafter, also simply referred to as "robot") 100 is a SCARA (SCARA: Selective compliance Assembly Robot Arm) type robot. The robot 100 includes a base 1, an arm 3, and a hand 8. The arm 3 is rotatably connected to the base 1 in the horizontal direction, and the hand 8 is rotatably connected to the arm 3 in the horizontal direction. The arm 3 is composed of a plurality of links 30 that are rotatably connected to each other in the horizontal direction. The hand 8 holds an object. For example, the object is a substrate S. The hand 8 is an example of an end effector.

[0020] Figure 2is a simplified top view of the substrate processing apparatus 120. The robot 100 is assembled, for example, into a substrate transfer system 110 that transfers the substrate S. The substrate transfer system 110 includes a housing 111 and the robot 100. For example, the substrate transfer system 110 is an EFEM (Equipment Front End Module). The substrate transfer system 110 is based on the SEMI (Semiconductor Equipment and Materials International) standard. Note that the structure of the substrate transfer system 110 may also be a structure other than the SEMI standard.

[0021] A transfer space 112 is formed inside the housing 111. The robot 100 is disposed inside the housing 111, i.e., in the transfer space 112. The robot 100 transfers the substrate S in the transfer space 112. For example, the substrate S is a disk-shaped semiconductor wafer. Hereinafter, for ease of explanation, a front-rear direction, a left-right direction, and an up-down direction (i.e., a vertical direction) that are orthogonal to each other are defined.

[0022] The housing 111 is formed in a substantially rectangular parallelepiped box shape. The housing 111 has a front wall 111a and a rear wall 111b facing each other in the front-rear direction, a left wall 111c and a right wall 111d facing each other in the left-right direction, and a ceiling wall (not shown) and a bottom wall (not shown) facing each other in the up-down direction. The interval between the left wall 111c and the right wall 111d is larger than the interval between the front wall 111a and the rear wall 111b. That is, the housing 111 is formed in a substantially rectangular shape that is longer in the left-right direction when viewed from above. The transfer space 112 is purified. The atmospheric gas filling the transfer space 112 is adjusted by a fan filter unit or the like. An aligner 113 for adjusting the position of the substrate S is provided in the transfer space 112.

[0023] For example, the substrate transfer system 110 is assembled into the substrate processing apparatus 120. The substrate processing apparatus 120 includes the substrate transfer system 110 and a plurality of storage units 121 that store the substrate S. A storage chamber is formed inside the storage unit 121. The storage chamber is purified. For example, the plurality of storage units 121 include a front opening unified pod (FOUP) 121A and a processing device 121B. The front opening unified pod 121A stores the substrate S. The processing device 121B processes the substrate S. The front opening unified pod 121A and the processing device 121B are adjacently disposed to the housing 111, respectively. The front opening unified pod 121A is an example of a container that stores semiconductor wafers.

[0024] The substrate S before and after processing is stored in the front-opening wafer cassette 121A. The front-opening wafer cassette 121A is a substrate container for a mini environment. The front-opening wafer cassette 121A stores a plurality of substrates S in a horizontal state at equal intervals in the vertical direction. The front-opening wafer cassette 121A is disposed outside the housing 111 and is mounted on the front wall 111a via a front-opening wafer cassette manual opener (not shown). In this example, four front-opening wafer cassettes 121A are provided. The four front-opening wafer cassettes 121A are arranged at equal intervals in the left-right direction. An opening 111e corresponding to the front-opening wafer cassette 121A is formed in the front wall 111a. The communication and cut-off between the transport space 112 and the internal space of the front-opening wafer cassette 121A are switched by the front-opening wafer cassette manual opener.

[0025] The processing device 121B is, for example, a processing device that performs heat treatment, impurity introduction treatment, thin film formation treatment, lithography treatment, cleaning treatment, planarization treatment, or inspection of appearance or dimensions on the substrate S. Alternatively, the processing performed by the processing device 121B may be temporary storage for delivering the substrate S. Two processing devices 121B are provided on the rear wall 111b, one processing device 121B is provided on the left wall 111C, and one processing device 121B is provided on the right wall 111d. The processing device 121B is disposed outside the housing 111. An opening 111f corresponding to the processing device 121B is formed in each wall. A door (not shown) may be provided at the opening 111f. The communication and cut-off between the transport space 112 and the internal space of the processing device 121B are switched by opening or closing the door.

[0026] In such a structure, the robot 100 included in the substrate transport system 110 transports the semiconductor wafer between the front-opening wafer cassette 121A that stores the semiconductor wafer and the processing device 121B that processes the semiconductor wafer. Specifically, the hand 8 holds the semiconductor wafer as the substrate S. The arm 3 and the hand 8 transport the semiconductor wafer between the front-opening wafer cassette 121A and the processing device 121B.

[0027] <Structure of Robot 100>

[0028] Refer to Figure 1 、 Figure 2 The structure of the robot 100 will be described.

[0029] The base 1 has a housing 11 and a lifting mechanism 2 that vertically lifts and lowers the arm 3. The housing 11 is formed in a substantially rectangular parallelepiped shape. The lifting mechanism 2 has a movable part 21 and a lifting motor 22 that drives the movable part 21. The movable part 21 is formed in a columnar shape. In the state where the movable part 21 descends the most, most of the movable part 21 is housed within the housing 11. The movable part 21 rises protruding upward from the housing 11. The arm 3 is rotatably connected to the upper end of the movable part 21 in the horizontal direction. In Figure 1 As shown by the solid line and the double-dashed line, the up and down movement of the movable part 21 causes the corresponding up and down movement of the arm 3 and the hand 8.

[0030] The arm 3 is composed of three linkages 30. When differentiating each of the three linkages 30, the linkage closest to the base 1 is sequentially called the first linkage 31, the second linkage 32, and the third linkage 33 starting from the one closer to the base 1. The first linkage 31 is the linkage connected to the base 1. The hand 8 is connected to the third linkage 33.

[0031] The linkage 30 is formed in a shape extending in a specified length direction. Hereinafter, unless otherwise specified, in each of the linkages 30, one end in the length direction is called the first end, and the end on the opposite side of the length direction from the first end is called the second end. And, unless otherwise specified, the "width direction" of the linkage 30 refers to the direction orthogonal to both the vertical direction and the length direction of the linkage 30.

[0032] The first end 31a of the first linkage 31 is rotatably connected to the base 1 about a first axis L1 extending in the vertical direction. Specifically, the first end 31a is connected to the upper end of the movable part 21. The first end 32a of the second linkage 32 is rotatably connected to the second end 31b of the first linkage 31 about a second axis L2 extending in the vertical direction. The first end 33a of the third linkage 33 is rotatably connected to the second end 32b of the second linkage 32 about a third axis L3 extending in the vertical direction. The first axis L1, the second axis L2, and the third axis L3 extend parallel to each other. The length (i.e., the dimension in the length direction) of the first linkage 31 is the longest among the three linkages 30.

[0033] The robot 100 has two hands 8, namely a first hand 8A and a second hand 8B. When not differentiating between the first hand 8A and the second hand 8B, it is only called "hand 8". The basic structures of the first hand 8A and the second hand 8B are the same. It should be noted that in Figure 2 Since the two hands 8 overlap vertically, only one hand 8 is shown in the figure from the outside.

[0034] The holding performed by the hand 8 can be achieved in various ways such as gripping, adsorbing, carrying, or fitting. The hand 8 has a main body 81 and a holding part 82. The holding part 82 is connected to the main body 81 and is divided into a forked shape. The hand 8 is formed in a plate shape. When the hand 8 is viewed in the direction of its thickness, it is formed in a substantially Y shape. The hand 8 has a holding actuator such as a cylinder (not shown). The holding and releasing of the object by the hand 8 are switched by the holding actuator.

[0035] The main body 81 of each hand 8 is rotatably connected to the second end portion 33b of the third link 33 about a fourth axis L4 extending in the vertical direction. The fourth axis L4 extends parallel to the first axis L1, the second axis L2, and the third axis L3.

[0036] The first link 31, the second link 32, the third link 33, the first hand 8A, and the second hand 8B are stacked in this order in a state where they do not contact each other from bottom to top. The first link 31, the second link 32, the third link 33, and the two hands 8 rotate in the horizontal direction without interfering with each other.

[0037] The robot 100 includes various components. For example, among the components, there are components related to the drive of the arm 3 and the hand 8 (hereinafter referred to as "the arm 3 etc.") and components related to the detection of the movement of the arm 3 etc. The components related to the drive of the arm 3 etc. include components related to the plurality of motors 6, the transmission mechanism, and the holding actuator (not shown). The plurality of motors 6 rotationally drive the plurality of links 30 and the hand 8. The transmission mechanism corresponds to each motor 6. The holding actuator performs the holding and releasing of the object by the hand 8. The components related to the holding actuator, for example, when the holding actuator is a cylinder, include a pipe for supplying air to the cylinder and a solenoid valve for switching the supply of air. The components related to the detection of the movement of the arm 3 etc., when the hand 8 holds an object by adsorption, include a pressure sensor provided in the pipe for sucking air from the adsorption part of the hand 8 to detect the pressure in the pipe. Also, the components related to the drive of the arm 3 etc. and the components related to the detection of the movement of the arm 3 etc. further include straps and pipes.

[0038] The plurality of motors 6 include a first motor 61, a second motor 62, a third motor 63, a fourth motor 64, and a fifth motor 65. The first motor 61 rotationally drives the first link 31. The second motor 62 rotationally drives the second link 32. The third motor 63 rotationally drives the third link 33. The fourth motor 64 rotationally drives the first hand 8A. The fifth motor 65 rotationally drives the second hand 8B. Without distinguishing each of the first motor 61, the second motor 62, the third motor 63, the fourth motor 64, and the fifth motor 65, they are only referred to as "motor 6".

[0039] The connecting rod 30 is formed in a hollow shape and has an internal space. The internal space of the connecting rod 30 serves as a storage chamber for storing components. For example, the motor 6 is stored in the internal space of the connecting rod 30. Specifically, the first motor 61 and the second motor 62 are stored in the internal space of the first connecting rod 31. The third motor 63 is stored in the internal space of the second connecting rod 32. The fourth motor 64 and the fifth motor 65 are stored in the internal space of the third connecting rod 33.

[0040] The base 1 of the robot 100 is disposed offset in the front-rear direction toward one of the front wall 111a and the rear wall 111b compared to the center of the housing 111. Specifically, the base 1 is disposed closer to the vicinity of the rear wall 111b than the front wall 111a. In the left-right direction, the base 1 is disposed approximately at the center of the housing 111. In this way, by disposing the base 1 offset in the front-rear direction toward one of the front wall 111a and the rear wall 111b compared to the center of the housing 111, the length of each connecting rod 30 can be increased, and the movable range of the hand 8 can be expanded.

[0041] Figure 3 It is a functional block diagram of the robot 100. The robot 100 further includes a control device 10. The control device 10 has a control unit 101, a storage unit 102, a memory 103, and an interface 104. The control unit 101 performs overall control of the robot 100. The storage unit 102 stores various programs and various data. The interface 104 is connected to the motor 6 and the like.

[0042] The storage unit 102 is a computer-readable recording medium, for example, composed of a flash memory. It should be noted that the storage unit 102 may also be composed of an optical disc such as a CD-ROM. The storage unit 102 stores various programs and various data required for executing the processing of the control unit 101.

[0043] The control unit 101 controls the motor 6 and the like according to the programs stored in the storage unit 102. The control unit 101 is composed of a processor such as a CPU (Central Processing Unit), for example. The control unit 101 executes various processes by expanding and executing the programs stored in the storage unit 102 and the like in the memory 103. It should be noted that the control unit 101 may also be implemented by hardware such as an LSI (Large Scale Integration) having the same function as the processor.

[0044] The lifting motor 22, the first motor 61, the second motor 62, the third motor 63, the fourth motor 64, and the fifth motor 65 are connected to the interface 104. And, according to the state of the end effector, an actuator for moving the end effector (when it is the hand 8, it is the holding actuator) is also connected to the interface 104.

[0045] The control device 10 controls the motor 6 or the like according to a preset operation program or an operation instruction input by the user, thereby controlling the robot 100. The control device 10 either displaces the arm 3 or causes the hand 8 to hold or release the substrate S.

[0046] For example, the control device 10 displaces the arm 3 and the hand 8, and causes the hand 8 to enter the internal space of the front-opening type wafer cassette 121A (see the solid line in Figure 2 . Further, the control device 10 causes the hand 8 to hold the substrate S in the front-opening type wafer cassette 121A. The control device 10 causes the hand 8 holding the substrate S to withdraw from the front-opening type wafer cassette 121A into the transport space 112, and then enter the processing device 121B (see the double-dot chain line in Figure 2 . The control device 10 causes the hand 8 to release the substrate S at a prescribed position within the processing device 121B. Then, the control device 10 causes the hand 8 to temporarily withdraw from the processing device 121B. In the processing device 121B, a prescribed process is performed on the substrate S. After the process is performed on the substrate S, the control device 10 causes the hand 8 to enter the processing device 121B and causes the hand 8 to hold the substrate S. The control device 10 causes the hand 8 holding the substrate S to withdraw from the processing device 121B into the transport space 112, and then enter the front-opening type wafer cassette 121A. The control device 10 causes the hand 8 to release the substrate S at a prescribed position within the front-opening type wafer cassette 121A. In this way, the control device 10 causes the robot 100 to transport the substrate S between the front-opening type wafer cassette 121A and the processing device 121B.

[0047] <Storage of the motor 6 in the arm 3>

[0048] Next, the storage of the motor 6 in the link 30 will be described. Figure 4 is a top view of the first link 31 in a state where a part of the first lid 42A is broken and fractured. Figure 5 is a bottom view of the first link 31 in a state where a part of the second lid 42B is broken and fractured. Figure 6 is Figure 4 a schematic sectional view of the first link 31 taken along line VI-VI of

[0049] First, the storage of the motor 6 in the first link 31 will be described. The number of motors 6 stored in the first link 31 is two. An internal space 40 for storing various components is formed in the first link 31. The first link 31 has a partition wall 45 that divides the internal space 40 into two storage chambers for storing components respectively. The two storage chambers are a first storage chamber 40A for storing the first motor 61 and a second storage chamber 40B for storing the second motor 62.

[0050] Specifically, the first link 31 has a housing 4 that defines the outer shape of the first link 31. An internal space 40 is formed inside the housing 4. The housing 4 has a housing body 41, a first lid 42A, and a second lid 42B that are mounted on the housing body 41.

[0051] The housing body 41 has a ceiling wall 43 and a bottom wall 44 that are vertically separated and define at least a part of the internal space 40. The housing body 41 also has an outer peripheral wall 46 that is formed in a ring shape and defines the outer shape of the first link 31 when viewed from above.

[0052] The outer peripheral wall 46 extends in a ring shape along the contour of the outer shape of the first link 31 when viewed from above. The outer peripheral wall 46 has a width (i.e., height) in the vertical direction and expands in the vertical direction.

[0053] The ceiling wall 43 is joined to the upper end of the outer peripheral wall 46 so as to block a part of the opening at the upper end of the outer peripheral wall 46 that includes the second end portion 31b of the first link 31. The bottom wall 44 is joined to the lower end of the outer peripheral wall 46 so as to block a part of the opening at the lower end of the outer peripheral wall 46 that includes the first end portion 31a of the first link 31. The ceiling wall 43 and the bottom wall 44 are arranged in the length direction of the first link 31 when viewed from above.

[0054] The partition wall 45 extends across the internal space 40 from the ceiling wall 43 to the bottom wall 44. That is, the partition wall 45 extends across the internal space 40 in the vertical direction. The upper end of the partition wall 45 is joined to the ceiling wall 43. The lower end of the partition wall 45 is joined to the bottom wall 44.

[0055] Moreover, the partition wall 45 extends across the inside of the outer peripheral wall 46 and is connected to at least two places on the outer peripheral wall 46. At this time, the partition wall 45 extends across the internal space 40 while being inclined as a whole with respect to the length direction of the first link 31 when viewed from above. More specifically, the partition wall 45 is formed in a zigzag shape when viewed from above. The partition wall 45 has a bent portion 45c that is formed by a longitudinal portion 45a extending in the length direction of the first link 31 and a lateral portion 45b extending in the width direction of the first link 31. The partition wall 45 is formed in such a manner that the longitudinal portion 45a and the lateral portion 45b are alternately connected. That is, the partition wall 45 has a plurality of bent portions 45c.

[0056] The partition wall 45 is formed integrally with the ceiling wall 43 and the bottom wall 44. Specifically, the ceiling wall 43, the bottom wall 44, and the partition wall 45 are formed of a single component. In addition, the outer peripheral wall 46 is also formed integrally with the ceiling wall 43, the bottom wall 44, and the partition wall 45. Specifically, the ceiling wall 43, the bottom wall 44, the partition wall 45, and the outer peripheral wall 46 are formed of a single component. That is, the partition wall 45 and the housing body 41 are formed of a single component. For example, the housing body 41 is formed by cutting out a metal as a single component. At this time, the partition wall 45 is cut out integrally with the housing body 41 as a part of the housing body 41. In other words, the ceiling wall 43, the bottom wall 44, the partition wall 45, and the outer peripheral wall 46 are joined together without seams such as welding.

[0057] In the housing body 41 configured as described above, a first storage chamber 40A and a second storage chamber 40B are formed. The first storage chamber 40A opens upward, and the second storage chamber 40B opens downward. In the housing body 41, the first storage chamber 40A is formed in a portion near the first end 31a including the first end 31a, and the second storage chamber 40B is formed in a portion near the second end 31b including the second end 31b.

[0058] The bottom wall 44 divides the lower part of the first storage chamber 40A. Specifically, the first storage chamber 40A is divided by the outer peripheral wall 46, the bottom wall 44, and the partition wall 45. A first lid 42A is attached to the upper end edge of the outer peripheral wall 46 by a screw 49. The first storage chamber 40A is closed by the first lid 42A.

[0059] The ceiling wall 43 divides the upper part of the second storage chamber 40B. Specifically, the second storage chamber 40B is divided by the outer peripheral wall 46, the ceiling wall 43, and the partition wall 45. A second lid 42B is attached to the lower end edge of the outer peripheral wall 46 by a screw 49. The second storage chamber 40B is closed by the second lid 42B.

[0060] A part of the movable portion 21 extending from the base 1 is disposed in the first storage chamber 40A. Specifically, the upper end portion of the movable portion 21 is formed by a first shaft 21a. An insertion hole 44a through which the first shaft 21a passes is formed in the bottom wall 44 of the first end 31a. The first shaft 21a cannot rotate relative to the base 1. The first shaft 21a passes through the insertion hole 44a and enters the first storage chamber 40A. The first shaft 21a is rotatably supported by a bearing 48a disposed in the first storage chamber 40A. The axis of the first shaft 21a coincides with the first axis L1. The bearing 48a is fixed to the housing body 41. Thus, the housing body 41 can rotate relative to the first shaft 21a via the bearing 48a. That is, the first link 31 can rotate relative to the base 1.

[0061] The first motor 61 and the first transmission mechanism 71 for transmitting the power of the first motor 61 are stored in the first storage chamber 40A.

[0062] The first motor 61 has a motor body 61a and a rotating shaft 61b. The motor body 61a is fixed to the housing body 41, and the rotating shaft 61b extends from the motor body 61a. For example, the first motor 61 is an electric motor, specifically, a servo motor. The first motor 61 has an encoder (not shown) for detecting the rotational position or rotational amount of the rotating shaft 61b. The first motor 61 is arranged in the first storage chamber 40A with the rotating shaft 61b extending in the horizontal direction (specifically, the longitudinal direction of the first link 31).

[0063] The first transmission mechanism 71 transmits the power of the first motor 61 to the first shaft 21a. The first transmission mechanism 71 has a gear train. The gear train includes a first gear 71a, a second gear 71b, a third gear 71c, a fourth gear 71d, a fifth gear 71e, and a sixth gear 71f. The first gear 71a is coaxially mounted on the rotating shaft 61b. The second gear 71b transmits the rotation of the first gear 71a via one or more gears (not shown). The third gear 71c rotates integrally with the second gear 71b. The fourth gear 71d meshes with the third gear 71c. The fifth gear 71e rotates integrally with the fourth gear 71d. The sixth gear 71f meshes with the fifth gear 71e and is coaxially mounted on the first shaft 21a. The second gear 71b and the third gear 71c rotate integrally around an axis extending in the horizontal direction. The third gear 71c and the fourth gear 71d are bevel gears. The fourth gear 71d and the fifth gear 71e rotate integrally around an axis parallel to the first axis L1. The first gear 71a, the second gear 71b, the third gear 71c, the fourth gear 71d, and the fifth gear 71e are stored in the gear box 71g. The gear box 71g is arranged in the first storage chamber 40A.

[0064] When the first motor 61 operates, the rotation of the rotating shaft 61b is transmitted to the first shaft 21a via the gear train such as the first gear 71a. Since the first shaft 21a cannot rotate, the housing 4 to which the first motor 61 is fixed rotates around the first axis L1. As a result, the first link 31 rotates relative to the base 1 around the first axis L1.

[0065] A part of a second shaft 34 extending from the second link 32 is disposed in the second storage chamber 40B. An insertion hole 43a through which the second shaft 34 passes is formed in the ceiling wall 43 of the second end portion 31b. The second shaft 34 is non-rotatably mounted on the second link 32. The front end portion of the second shaft 34 passes through the insertion hole 43a and enters the second storage chamber 40B. The second shaft 34 is rotatably supported by a bearing 48b disposed in the second storage chamber 40B. The axis of the second shaft 34 coincides with the second axis L2. The bearing 48b is fixed to the housing body 41. Thus, the second shaft 34 is relatively rotatable with respect to the housing body 41 via the bearing 48b. That is, the second link 32 is relatively rotatable with respect to the first link 31.

[0066] A second motor 62 and a second transmission mechanism 72 for transmitting the power of the second motor 62 are stored in the second storage chamber 40B.

[0067] The second motor 62 has a motor body 62a and a rotating shaft 62b. The motor body 62a is fixed to the housing body 41, and the rotating shaft 62b extends from the motor body 62a. For example, the second motor 62 is an electric motor, specifically, a servo motor. The second motor 62 has an encoder (not shown) for detecting the rotational position or rotational amount of the rotating shaft 62b. The second motor 62 is disposed in the second storage chamber 40B with the rotating shaft 62b extending in the horizontal direction (specifically, the longitudinal direction of the first link 31).

[0068] The second transmission mechanism 72 transmits the power of the second motor 62 to the second shaft 34. The second transmission mechanism 72 has a gear train. The gear train includes a first gear 72a, a second gear 72b, a third gear 72c, a fourth gear 72d, a fifth gear 72e, and a sixth gear 72f. The first gear 72a is coaxially mounted on the rotating shaft 62b. The second gear 72b transmits the rotation of the first gear 72a via one or more gears (not shown). The third gear 72c rotates integrally with the second gear 72b. The fourth gear 72d meshes with the third gear 72c. The fifth gear 72e rotates integrally with the fourth gear 72d. The sixth gear 72f meshes with the fifth gear 72e and is coaxially mounted on the second shaft 34. The second gear 72b and the third gear 72c rotate integrally about an axis extending in the horizontal direction. The third gear 72c and the fourth gear 72d are bevel gears. The fourth gear 72d and the fifth gear 72e rotate integrally about an axis parallel to the second axis L2. The first gear 72a, the second gear 72b, the third gear 72c, the fourth gear 72d, and the fifth gear 72e are stored in a gear box 72g. The gear box 72g is disposed in the second storage chamber 40B.

[0069] When the second motor 62 operates, the rotation of the rotary shaft 62b is transmitted to the second shaft 34 via a gear train such as the first gear 72a. Since the second motor 62 is fixed to the housing 4, the second shaft 34 rotates about the second axis L2. As a result, the second link 32 rotates relative to the first link 31 about the second axis L2.

[0070] In the housing body 41, the first storage chamber 40A and the second storage chamber 40B open in opposite directions in the direction of the first axis L1 or the second axis L2 (i.e., the vertical direction). Specifically, the first storage chamber 40A opens toward the ceiling wall 43 side, and the second storage chamber 40B opens toward the bottom wall 44 side. When the first motor 61 and the gearbox 71g are disposed in the first storage chamber 40A, the user enters the first storage chamber 40A from the ceiling wall 43 side. When the second motor 62 and the gearbox 72g are disposed in the second storage chamber 40B, the user enters the second storage chamber 40B from the bottom wall 44 side.

[0071] Next, the accommodation of the motor 6 in the second link 32 will be described. The number of motors 6 accommodated in the second link 32 is one. Since the second link 32 does not need to accommodate two motors 6, the width of the second link 32 is smaller than the width of the first link 31. A third motor 63 and a third transmission mechanism (not shown) for transmitting the power of the third motor 63 are accommodated in the internal space of the second link 32. The third motor 63 and the third transmission mechanism have the same structure and configuration as the second motor 62 and the second transmission mechanism 72. That is, a third shaft 35 extending from the third link 33 is disposed in a portion of the internal space of the second link 32 corresponding to the second end portion 32b (see Figure 7 ). The third shaft 35 extends coaxially with the third axis L3. The third transmission mechanism transmits the power of the third motor 63 to the third shaft.

[0072] When the third motor 63 operates, the rotation of the third motor 63 is transmitted to the third shaft 35 via a gear train. Since the third motor 63 is fixed to the housing of the second link 32, the third shaft 35 rotates about the third axis L3. As a result, the third link 33 rotates relative to the second link 32 about the third axis L3.

[0073] Next, the accommodation of the motor 6 in the third link 33 will be described. Figure 7 is a bottom view of the third link 33 in a state where a part of the second lid 52B is broken and fractured. The number of motors 6 accommodated in the third link 33 is two. An internal space 50 for accommodating the fourth motor 64 and the fifth motor 65 is formed in the third link 33.

[0074] Specifically, the third link 33 has a housing 5 that defines the outer shape of the third link 33. An internal space 50 is formed inside the housing 5. The housing 5 has a housing body 51, a first lid (not shown) mounted on the housing body 51, and a second lid 52B.

[0075] The housing body 51 has a ceiling wall 53, a bottom wall 54, and a peripheral wall 56 that define at least a part of the internal space 50.

[0076] The peripheral wall 56 extends in a contour ring shape along the outer shape of the third link 33 as viewed from above. The peripheral wall 56 has a width (i.e., height) in the vertical direction and expands in the vertical direction.

[0077] The bottom wall 54 is joined to the lower end of the peripheral wall 56 in a manner that blocks a part of the opening at the lower end of the peripheral wall 56 that includes a part of the first end 33a of the third link 33. The ceiling wall 53 is joined to the upper end of the peripheral wall 56 in a manner that blocks a part of the opening at the upper end of the peripheral wall 56 that includes a part of the second end 33b of the third link 33.

[0078] The ceiling wall 53, the bottom wall 54, and the peripheral wall 56 are formed of a single component. For example, the housing body 51 is formed by punching out a single-component metal. In other words, the ceiling wall 53, the bottom wall 54, and the peripheral wall 56 are joined together without seams such as welding.

[0079] In the internal space 50 of the housing body 51 configured as such, the part near the first end 33a that includes the first end 33a opens upward. And the part near the second end 33b that includes the second end 33b in the internal space 50 opens downward. A first lid (not shown) is mounted by screws on the upper end edge of the peripheral wall 56. The first lid closes the part that opens upward in the internal space 50. And a second lid 52B is mounted by screws 59 on the lower end edge of the peripheral wall 56. The second lid 52B closes the part that opens downward in the internal space 50. The part that opens upward and the part that opens downward in the internal space 50 are not separated by a wall such as the partition wall 45 of the first link 31.

[0080] A third shaft 35 is non-rotatably mounted on the bottom wall 54. The third shaft 35 extends coaxially with the third axis L3. One end of the third shaft 35 is disposed inside the internal space 50, and the other end (not shown) of the third shaft 35 enters the internal space of the second link 32.

[0081] A part of the shaft extending from the hand 8 is disposed in the internal space 50. Specifically, a cylindrical fourth shaft 83a is non-rotatably connected to the main body 81 of the first hand 8A. The fourth shaft 83a extends coaxially with the fourth axis L4. A cylindrical fifth shaft 83b is non-rotatably connected to the main body 81 of the second hand 8B. The fifth shaft 83b passes through the inside of the fourth shaft 83a and extends coaxially with the fourth axis L4. The fourth shaft 83a and the fifth shaft 83b are respectively rotatably supported by a plurality of bearings disposed in the internal space 50. The bearings are fixed to the housing main body 51. Thus, the first hand 8A and the second hand 8B are relatively rotatable with respect to the housing main body 51 via the bearings. That is, the first hand 8A and the second hand 8B are relatively rotatable with respect to the third link 33. The first hand 8A and the second hand 8B are rotatable independently of each other.

[0082] A fourth motor 64, a fourth transmission mechanism 74 for transmitting the power of the fourth motor 64, a fifth motor 65, and a fifth transmission mechanism 75 for transmitting the power of the fifth motor 65 are housed in the internal space 50.

[0083] The fourth motor 64 has a motor body 64a and a rotating shaft 64b. The motor body 64a is fixed to the housing main body 51, and the rotating shaft 64b extends from the motor body 64a. For example, the fourth motor 64 is an electric motor, specifically, a servo motor. The fourth motor 64 has an encoder (not shown) for detecting the rotational position or rotational amount of the rotating shaft 64b. The fourth motor 64 is disposed in the internal space 50 with the rotating shaft 64b extending in the horizontal direction (specifically, the longitudinal direction of the third link 33).

[0084] The fourth transmission mechanism 74 transmits the power of the fourth motor 64 to the fourth shaft 83a. The fourth transmission mechanism 74 has a gear train. The gear train includes a first gear, a sixth gear, and a plurality of intermediate gears. The first gear is coaxially mounted on the rotating shaft 64b, the sixth gear is coaxially mounted on the fourth shaft 83a, and the plurality of intermediate gears transmit the rotation of the first gear to the sixth gear, not shown. The gear train is housed in a gear box 74g. The gear box 74g is disposed in the internal space 50.

[0085] When the fourth motor 64 operates, the rotation of the rotating shaft 64b is transmitted to the fourth shaft 83a via the gear train. Since the fourth motor 64 is fixed to the housing 5, the fourth shaft 83a rotates about the fourth axis L4. Thus, the first hand 8A rotates relative to the third link 33 about the fourth axis L4.

[0086] The fifth motor 65 has a motor body 65a and a rotating shaft 65b. The motor body 65a is fixed to the housing body 51, and the rotating shaft 65b extends from the motor body 65a. For example, the fifth motor 65 is an electric motor, specifically, a servo motor. The fifth motor 65 has an encoder (not shown) for detecting the rotational position or rotational amount of the rotating shaft 65b. The fifth motor 65 is arranged in the internal space 50 with the rotating shaft 65b extending in the horizontal direction (specifically, the longitudinal direction of the third link 33).

[0087] The fifth transmission mechanism 75 transmits the power of the fifth motor 65 to the fifth shaft 83b. The fifth transmission mechanism 75 has a gear train. The gear train includes a first gear, a sixth gear, and a plurality of intermediate gears. The first gear is coaxially mounted on the rotating shaft 65b, the sixth gear is coaxially mounted on the fifth shaft 83b, and the plurality of intermediate gears transmit the rotation of the first gear to the sixth gear (not shown). The gear train is housed in a gear box 75g. The gear box 75g is arranged in the internal space 50.

[0088] When the fifth motor 65 operates, the rotation of the rotating shaft 65b is transmitted to the fifth shaft 83b via the gear train. Since the fifth motor 65 is fixed to the housing 5, the fifth shaft 83b rotates about the fourth axis L4. Thereby, the second hand 8B rotates relative to the third link 33 about the fourth axis L4.

[0089] In such a third link 33, two motors 6 are housed in the non-isolated internal space 50. The fourth motor 64 and the fifth motor 65 are arranged side by side in the width direction of the third link 33. Accordingly, the fourth transmission mechanism 74 and the fifth transmission mechanism 75 are arranged side by side in the width direction of the third link 33.

[0090] The arm 3 configured in this way is connected to the base 1 in a cantilever shape and rotates and displaces as well as deforms. Therefore, the self-weight and inertia force of the arm 3 act on each link 30. Since the first link 31 has a partition wall 45 that divides the internal space 40 into a first storage chamber 40A and a second storage chamber 40B, the rigidity (specifically, bending rigidity or torsional rigidity) of the first link 31 is higher than that of a structure without the partition wall 45. As a result, the position accuracy of the arm 3 can be improved, and further the position accuracy of the hand 8 can be improved.

[0091] In particular, since the first link 31 houses two motors 6 (the first motor 61 and the second motor 62), the self-weight of the first link 31 becomes larger. In addition, since the first link 31 is the link 30 closest to the base 1 among the plurality of links 30, the weights of the other links 30 and the hand 8 also act on the first link 31. And since the first link 31 is the longest among the three links 30, it is prone to bending. Therefore, increasing the rigidity of the first link 31 is effective for the rigidity of the entire arm 3.

[0092] Specifically, as Figures 4 - 6 shown, the partition wall 45 is connected to the ceiling wall 43 and the bottom wall 44. Specifically, the ceiling wall 43, the bottom wall 44, and the partition wall 45 as a whole have a shape bent like a crank. Thereby, the bending rigidity and / or torsional rigidity of the first link 31 is improved. Also, the partition wall 45 is arranged to traverse the inside of the annular outer peripheral wall 46 and is connected to two places on the outer peripheral wall 46. Thereby, the bending rigidity and / or torsional rigidity of the outer peripheral wall 46 is improved, and as a result, the rigidity of the first link 31 is further improved.

[0093] In addition, the partition wall 45 extends obliquely as a whole in the width direction of the first link 31 when viewed from above. That is, the region where the partition wall 45 exists becomes longer in the length direction of the first link 31. Thereby, the portion where the rigidity is strengthened by the partition wall 45 can be made larger in the length direction of the first link 31. As a result, the rigidity of the first link 31 is further improved.

[0094] Also, the partition wall 45 has a bent portion 45c. Thereby, the rigidity of the partition wall 45 can be improved. And since the partition wall 45 has a plurality of bent portions 45c, the rigidity of the partition wall 45 is further improved. As a result, the rigidity of the first link 31 is further improved.

[0095] Also, by making the partition wall 45 extend obliquely as a whole in the width direction of the first link 31 when viewed from above, the space of the internal space 40 of the first link 31 can be effectively utilized. Specifically, by making the partition wall 45 extend obliquely as a whole in the width direction of the first link 31 when viewed from above, each of the first storage chamber 40A and the second storage chamber 40B becomes a space longer in the length direction of the first link 31 compared to a structure in which the partition wall 45 extends in the width direction of the first link 31. Since the first shaft 21a and the gear box 71g are adjacently arranged, and the gear box 71g and the first motor 61 are adjacently arranged, the occupied space of the first shaft 21a, the gear box 71g, and the first motor 61 has a tendency to become slender as a whole. Therefore, by making the first storage chamber 40A a space longer in the length direction of the first link 31, the internal space 40 of the first link 31 can be effectively utilized to arrange the first shaft 21a, the gear box 71g, and the first motor 61.

[0096] Similarly, since the second shaft 34 and the gearbox 72g are adjacently arranged, and the gearbox 72g and the second motor 62 are adjacently arranged, the occupied space of the second shaft 34, the gearbox 72g, and the second motor 62 has a tendency to become slender as a whole. Therefore, by making the second storage chamber 40B a space that is longer in the longitudinal direction of the first link 31, the internal space 40 of the first link 31 can be effectively utilized to arrange the second shaft 34, the gearbox 72g, and the second motor 62.

[0097] As described above, the robot 100 includes a base 1, an arm 3, and a hand 8 (end effector). The arm 3 is connected to the base 1 so as to be rotatable in the horizontal direction and is composed of a plurality of links 30 that are rotatable with respect to each other in the horizontal direction. The hand 8 is rotatably connected to the arm 3. An internal space 40 is formed in the first link 31, which is at least one of the plurality of links 30. The first link 31 has a partition wall 45 that divides the internal space 40 into two storage chambers, namely, a first storage chamber 40A and a second storage chamber 40B, for respectively storing components.

[0098] With this structure, the partition wall 45 increases the rigidity of the first link 31. Specifically, the first link 31 has an internal space 40 for storing components and is formed in a hollow shape. The internal space 40 is divided by the partition wall 45 into two storage chambers, namely, a first storage chamber 40A and a second storage chamber 40B, for storing components. By dividing the internal space 40 into the first storage chamber 40A and the second storage chamber 40B, various components can be easily and neatly stored. That is, compared with storing various components in a single space, various components can be distributed into multiple storage chambers, that is, they can be sorted and stored. Also, even when assembling the robot 100, compared with arranging various components in a single space, with multiple storage chambers provided, the arrangement positions of various components are easier to grasp and it is easier to assemble. In addition, the partition wall 45 functions as a strength member in the hollow first link 31. As a result, compared with a structure without the partition wall 45, the rigidity of the first link 31, that is, the bending rigidity or torsional rigidity, can be increased.

[0099] Moreover, the components include a plurality of motors 6 that rotationally drive the plurality of links 30 and the hand 8. Each of the first storage chamber 40A and the second storage chamber 40B stores one of the plurality of motors 6.

[0100] Specifically, the first storage chamber 40A stores the first motor 61, and the second storage chamber 40B stores the second motor 62.

[0101] With this structure, since the first link 31 stores two motors 6, the weight of the entire first link 31 becomes larger. Therefore, it is very effective to provide the partition wall 45 in the first link 31 to increase the rigidity.

[0102] Moreover, the first link 31 has a ceiling wall 43 that divides at least a part of the internal space 40 and is separated in the vertical direction, and a bottom wall 44, and a partition wall 45 extends from the ceiling wall 43 to the bottom wall 44.

[0103] With this structure, the ceiling wall 43 and the bottom wall 44 are connected together by the partition wall 45. Therefore, the rigidity of the entire ceiling wall 43, bottom wall 44, and partition wall 45 is improved. As a result, the rigidity of the first link 31 is improved.

[0104] Moreover, the bottom wall 44 divides the lower part of the first storage chamber 40A, which is one of the two storage chambers, and the first storage chamber 40A is formed to open upward, and the ceiling wall 43 divides the upper part of the second storage chamber 40B, which is the other of the two storage chambers, and the second storage chamber 40B is formed to open downward.

[0105] With this structure, one storage chamber opens upward and the other storage chamber opens downward. By means of the partition wall 45 extending from the ceiling wall 43 to the bottom wall 44, it is possible to more easily realize such a structure of the storage chamber.

[0106] Moreover, the first link 31 has a housing 4 that divides the outer shape of the first link 31, and the housing 4 has a housing body 41 in which the ceiling wall 43 and the bottom wall 44 are formed, and the partition wall 45 and the housing body 41 are formed of a single component.

[0107] With this structure, since the housing body 41 and the partition wall 45 are formed of a single component, the connection between the housing body 41 and the partition wall 45 is more firm than in the structure where the partition wall 45 is mounted on the housing body 41. As a result, the rigidity of the first link 31 is further improved.

[0108] The first link 31 has an outer peripheral wall 46 that divides the outer shape of the first link 31 as viewed from above, is formed in a ring shape, and the partition wall 45 extends across the inside of the outer peripheral wall 46 and is connected to at least two places on the outer peripheral wall 46.

[0109] With this structure, the rigidity of the outer peripheral wall 46 is improved by the partition wall 45. As a result, the rigidity of the first link 31 is further improved.

[0110] The partition wall 45 has a bent portion 45c formed in a bent shape.

[0111] With this structure, the rigidity of the partition wall 45 is improved compared to when the partition wall 45 is formed flat. Since the rigidity of the partition wall 45 itself is improved, the rigidity of the first link 31 is further improved.

[0112] The plurality of links 30 are three links 30.

[0113] With this structure, the positional accuracy of the end effector is likely to decrease compared to an arm formed by one or two linkages. By increasing the rigidity of the first linkage 31, which is one of the three linkages 30, the positional accuracy of the end effector can be improved. That is, in the arm 3 composed of three linkages 30, it is particularly effective to increase the rigidity of the arm 3 by the partition wall 45.

[0114] Moreover, the first linkage 31 is the linkage among the multiple linkages 30 that is connected to the base 1.

[0115] With this structure, the weights of the other linkages 30 and the hand 8 also act on the first linkage 31. Therefore, increasing the rigidity of the first linkage 31 is effective for increasing the rigidity of the entire arm 3.

[0116] The hand 8 is an example of an end effector and holds the substrate S.

[0117] With this structure, the robot 100 transports the substrate S. By increasing the rigidity of the arm 3, the positional accuracy of the substrate S can be improved.

[0118] The hand 8 holds a semiconductor wafer as the substrate S, and the arm 3 and the hand 8 transport the semiconductor wafer between the front-opening type wafer cassette 121A, which is a container for storing the semiconductor wafer, and the processing device 121B, which processes the semiconductor wafer.

[0119] With this structure, the robot 100 transports the semiconductor wafer between the front-opening type wafer cassette 121A and the processing device 121B. Since the semiconductor wafer is delicate and the processing of the semiconductor wafer is fine, a high positional accuracy is required in the transportation of the semiconductor wafer. Therefore, it is particularly effective to increase the rigidity of the arm 3.

[0120] The substrate transport system 110 includes a housing 111 and a robot 100. The robot 100 is disposed within the housing 111. The robot 100 transports the substrate S between the front-opening type wafer cassette 121A, which is adjacent to the housing 111 and stores the substrate S, and the processing device 121B, which is adjacent to the housing 111 and processes the substrate S.

[0121] With this structure, the robot 100 is assembled into the substrate transport system 110, and the substrate transport system 110 transports the substrate S between the front-opening type wafer cassette 121A and the processing device 121B. Since the rigidity of the arm 3 of the robot 100 is high, the substrate transport system 110 can transport the substrate S with high positional accuracy.

[0122] 《Other Embodiments》

[0123] As described above, the above-described embodiments have been described as examples of the technology disclosed in the present application. However, the technology disclosed in the present disclosure is not limited thereto, and can also be applied to embodiments that have been appropriately changed, replaced, added, omitted, etc. Further, each component described in the above-described embodiments can be combined to form a new embodiment. In addition, among the components described in the drawings and the detailed description, not only the components necessary for solving the problems are included, but also components not necessary for solving the problems can be included for the purpose of exemplifying the technology. Therefore, it should not be immediately considered that those components that are not necessary are essential just because they are described in the drawings and the detailed description.

[0124] For example, although the robot 100 is assembled into the substrate transfer system 110, it is not limited thereto. The robot 100 is not a robot that is only used in a dust-free environment where semiconductors can be processed. The robot 100 can also be assembled into a production line or the like.

[0125] The substrate transfer system 110 may not be assembled into the substrate processing device 120. That is, as long as the robot 100 transfers the substrate S within the housing 111, the substrate transfer system 110 can adopt any structure. The moving starting point and the moving destination of the substrate S are not limited to the front-opening wafer cassette 121A and the processing device 121B.

[0126] The number of divisions of the arm 3, that is, the number of the linkages 30, is not limited to three. The arm 3 may also be composed of two or four or more linkages 30.

[0127] The end effector is not limited to the hand 8. For example, the end effector may also be a painting tool or a welding tool. Even when the end effector is the hand 8, the object held by the hand 8 is not limited to the substrate. Also, the number of hands 8 (that is, the number of end effectors) is not limited to two, and may be one or three or more.

[0128] The robot 100 has the same number of motors 6 as the sum of the linkages 30 and the hands 8, but the number of motors 6 may also be not the same as the sum of the linkages 30 and the hands 8. For example, one motor 6 may also rotationally drive two linkages 30.

[0129] The linkage 30 that houses two motors 6 and has the partition wall 45 may also be a linkage 30 other than the first linkage 31. The second linkage 32 or the third linkage 33 may also have a partition wall and house two motors 6.

[0130] As described above, in the structure in which the third link 33 houses two motors 6 (the fourth motor 64 and the fifth motor 65), the third link 33 may also have a partition wall. For example, the housing body 51 may also have a partition wall that divides the internal space 50 into a storage chamber for housing the fourth motor 64 and a storage chamber for housing the fifth motor 65. In Figure 7 this structure, a partition wall extending in the length direction of the third link 33 can be provided at the center in the width direction of the third link 33. This partition wall may be connected to the ceiling wall 53.

[0131] Moreover, the motors 6 housed in the two storage chambers separated by the partition wall are not limited to the first motor 61 and the second motor 62, and any two motors 6 among the plurality of motors 6 may be used. Also, the components housed in the two storage chambers are not limited to the motors 6. Components related to the drive of the arm 3 etc. such as a sling and components related to the detection of the movement of the arm 3 etc. may be housed in the respective storage chambers.

[0132] The partition wall can adopt any structure as long as it separates the two storage chambers. For example, the two storage chambers separated by the partition wall may be partially communicated. That is, the two storage chambers may not be completely separated.

[0133] The partition wall 45 only needs to be connected to at least one of the ceiling wall 43, the bottom wall 44, and the outer peripheral wall 46. For example, the partition wall 45 may be only connected to the bottom wall 44 and not connected to the ceiling wall 43 and the outer peripheral wall 46. In this case, the partition wall 45 increases the rigidity of the bottom wall 44, and as a result, the rigidity of the first link 31 is increased. Or, the partition wall 45 may not be connected to the ceiling wall 43 and the bottom wall 44, but may be connected to the outer peripheral wall 46.

[0134] The partition wall 45 may divide the internal space 40 into at least two storage chambers, or may divide the internal space 40 into three or more spaces including two storage chambers.

[0135] Moreover, the partition wall 45 may not have a bent portion 45c but may have a flat shape. The partition wall 45 may extend in the length direction or the width direction of the link 30.

[0136] The partition wall 45 may be formed separately from the housing body 41 and connected to the housing body 41 by welding or screwing etc. Even with such a structure, the rigidity of the housing body 41 is increased by the partition wall 45.

[0137] The formation of the housing body 41 including the partition wall 45 using a single component is not limited to machining. For example, the housing body 41 may be formed by casting.

[0138] The substrate S may be a thin plate made of a material that serves as a substrate for semiconductor devices such as semiconductor substrates and glass substrates. As the semiconductor substrate, for example, there are silicon substrates, sapphire substrates, etc. As the glass substrate, for example, there are glass substrates for FPD (Flat Panel Display), glass substrates for MEMS (Micro Electro Mechanical Systems), etc.

[0139] (Industrial Applicability)

[0140] As described above, the technology disclosed herein is useful for horizontal multi-joint robots and substrate transfer systems including such horizontal multi-joint robots.

[0141] (Explanation of Reference Numerals)

[0142] 100 - horizontal multi-joint robot; 110 - substrate transfer system; 3 - arm; 30 - link; 31 - first link; 40 - internal space; 40A - first storage chamber (storage chamber); 40B - second storage chamber (storage chamber); 43 - ceiling wall; 44 - bottom wall; 45 - partition wall; 46 - outer peripheral wall; 6 - motor; 61 - first motor; 62 - second motor; 8 - hand (end effector); 111 - housing; 121A - front-opening wafer cassette (container); 121B - processing device.

Claims

1. A horizontal multi-joint robot, characterized in that: the horizontal multi-joint robot includes a base, an arm, and an end effector. The arm is rotatably connected to the base in the horizontal direction and is composed of a plurality of linkages that are rotatably connected to each other in the horizontal direction. The end effector is rotatably connected to the arm in the horizontal direction, an internal space is formed in at least one of the plurality of linkages, the at least one linkage has a partition wall that divides the internal space into two storage chambers for respectively storing components, the partition wall has a plurality of bent portions that are formed by a longitudinal portion extending in the length direction of the at least one linkage and a transverse portion extending in the width direction of the at least one linkage, the partition wall is formed in a zigzag shape when viewed from above in such a way that the longitudinal portion and the transverse portion are alternately connected, the partition wall extends obliquely as a whole with respect to the width direction of the at least one linkage when viewed from above, the components include a plurality of motors that rotationally drive the plurality of linkages and the end effector, each of the two storage chambers stores one of the plurality of motors, the motors in the two storage chambers are arranged such that their respective rotation axes extend in opposite directions along the length direction of the at least one linkage.

2. The horizontal multi-joint robot according to claim 1, characterized in that: the at least one linkage has a ceiling wall and a bottom wall that divide at least a part of the internal space and are separated in the vertical direction, the partition wall extends from the ceiling wall to the bottom wall.

3. The horizontal multi-joint robot according to claim 2, characterized in that: the bottom wall divides the lower part of one of the two storage chambers, one of the storage chambers is formed to open upward, the ceiling wall divides the upper part of the other of the two storage chambers, the other storage chamber is formed to open downward.

4. The horizontal multi-joint robot according to claim 2 or 3, characterized in that: the at least one linkage has a housing that defines the outer shape of the at least one linkage, the housing has a housing body in which the ceiling wall and the bottom wall are formed, the partition wall and the housing body are formed of a single component.

5. The horizontal multi-joint robot according to claim 1 or 2, characterized in that: the at least one linkage has an outer peripheral wall that defines the outer shape of the at least one linkage when viewed from above and is formed in a ring shape, the partition wall extends across the inside of the outer peripheral wall and is connected to at least two places on the outer peripheral wall.

6. The horizontal multi-joint robot according to any one of claims 1 to 3, characterized in that: the plurality of linkages are 3 linkages.

7. The horizontal multi-joint robot according to any one of claims 1 to 3, characterized in that: the at least one linkage is the linkage among the plurality of linkages that is connected to the base.

8. The horizontal multi-joint robot according to any one of claims 1 to 3, characterized in that: The end effector is a hand that holds a substrate.

9. The horizontal multi-joint robot according to claim 8, wherein: the hand holds a semiconductor wafer as a substrate, and the arm and the hand transport the semiconductor wafer between a container that houses the semiconductor wafer and a processing device that processes the semiconductor wafer.

10. A substrate transport system, wherein: the substrate transport system includes a housing and a horizontal multi-joint robot that is disposed within the housing and is described in any one of claims 1 to 9, and the horizontal multi-joint robot transports a substrate between a container that is adjacently disposed to the housing and houses the substrate and a processing device that is adjacently disposed to the housing and processes the substrate.

Images