Vacuum coating machine reciprocating translation workpiece holder

Abstract

The application relates to the field of coating auxiliary frames, in particular to a reciprocating translation workpiece frame of a vacuum coating machine, which comprises a mounting frame used for being mounted in a vacuum chamber of the vacuum coating machine, a planetary gear train mounted on the mounting frame, a driving mechanism used for driving the revolution or revolution of the planetary gears of the planetary gear train, and a translation mechanism mounted on the mounting frame and comprising a follow-up plate used for driving the reciprocating movement of a workpiece to be plated and a transmission assembly connected between the follow-up plate and any planetary gear of the planetary gear train, wherein the transmission assembly drives the reciprocating movement of the follow-up plate through the revolution of the planetary gears. The application has the effects of reducing the detection cost and the complexity during the detection of the workpiece to be plated.

Description

Technical Field

[0001] This application relates to the field of coating auxiliary frames, and more particularly to a reciprocating translational workpiece frame for a vacuum coating machine. Background Technology

[0002] Currently, when coating workpieces, the main method used is to use a single-unit coating machine (also known as a vacuum coating machine). The single-unit coating machine mainly consists of a circular vacuum chamber. During coating, the target material is directly installed on the inner wall of the circular vacuum chamber. Then, a workpiece holder is installed inside the vacuum chamber, and the workpiece is placed on the workpiece holder, thereby coating the workpiece through the target material.

[0003] To ensure the uniformity of the coating, the existing workpiece holder mainly includes a fixed disk installed at the bottom of the vacuum chamber and a planetary gear system installed on the fixed disk. By installing the fixed disk at the center of the bottom of the vacuum chamber, the workpiece to be coated is installed on the planetary gears of the planetary gear system. The planetary gear system drives the workpiece to be coated to revolve or rotate, so as to achieve uniform coating on the workpiece.

[0004] However, this method is mainly suitable for small-sized workpieces with double-sided coating. For large-sized plate-like workpieces with single-sided coating, the coating operation often needs to be carried out under constant target-substrate distance. Therefore, for large-sized plate-like workpieces with single-sided coating, the continuous coating line method is currently mainly used to ensure coating quality and improve coating efficiency. The continuous coating line consists of multiple chambers connected in sequence. Each chamber is equipped with a different target material to coat different films on the workpiece. The multiple chambers are connected by a transmission line, and the workpiece passes through each chamber sequentially through the transmission line, achieving multi-layer coating of the workpiece.

[0005] Before coating or when changing targets, it is often necessary to statistically analyze the static deposition rate, dynamic deposition rate, cumulative temperature of the coating, and adhesion of the film on the workpiece. This data is used to determine the coating time of the workpiece at each target, thereby controlling the coating quality. However, since continuous coating lines are typically tens of meters long, when it is necessary to test the coating parameters of the workpiece on the continuous coating line, the entire production line must be shut down, and the workpiece must be removed for testing. This involves repeatedly starting and stopping the entire production line, resulting in high testing costs. Furthermore, as the workpiece is coated sequentially in different chambers, it needs to be removed from different locations, making the operation very inconvenient. Summary of the Invention

[0006] In order to reduce the inspection cost and simplify the inspection process for workpieces to be coated, this application provides a reciprocating translational workpiece holder for a vacuum coating machine.

[0007] The technical solution provided in this application for a reciprocating translational workpiece holder for a vacuum coating machine adopts the following:

[0008] A reciprocating translational workpiece holder for a vacuum coating machine, comprising:

[0009] Mounting bracket for installation inside the vacuum chamber of a single-unit coating machine;

[0010] The planetary gear train is mounted on the mounting bracket;

[0011] A drive mechanism for driving the planetary gears of the planetary gear train to rotate or revolve;

[0012] The translation mechanism, mounted on the mounting frame, includes a follower plate for driving the workpiece to be plated to reciprocate and a transmission assembly connecting the follower plate and any planetary gear in the planetary gear train. The transmission assembly drives the follower plate to reciprocate through the self-rotation of the planetary gear.

[0013] By adopting the above technical solution, when it is necessary to detect the parameters of the workpiece to be coated, the translation mechanism is directly installed inside the single-unit coating machine. The workpiece is then mounted on a follower plate, and a drive mechanism drives the planetary gears to rotate. During the rotation of the planetary gears, the planetary gears drive the follower plate to reciprocate through the transmission assembly, and the follower plate also drives the workpiece to move linearly, simulating the coating conditions on a continuous coating line. During the coating process, the operator can stop the single-unit coating machine at any time as needed and directly remove the workpiece from the machine without affecting other workpieces. Different types of targets can be installed on the inner walls of the single-unit coating machine. After one layer of film is coated on the workpiece, the drive mechanism drives the planetary gears to revolve, changing the position of the workpiece and transferring it to another target. Then, the drive mechanism drives the planetary gears to rotate, coating the workpiece with another target. By installing the translation mechanism within an existing single-unit coating machine, coating of the workpiece can be achieved, simulating the coating requirements of a continuous coating line while maintaining a constant target-substrate distance between the workpiece and the target material. This significantly reduces the inspection costs and simplifies the inspection process.

[0014] Optionally, the transmission assembly includes a mounting base mounted on the mounting bracket, an incomplete gear rotatably connected to the mounting base, and two racks slidably connected to the mounting base. The follower plate is simultaneously fixed to the two racks, and the teeth of the two racks are arranged opposite to each other. The incomplete gear is coaxially fixed to any planetary gear in the planetary gear train and is located between the two racks. When the incomplete gear rotates, it meshes with the two racks in sequence to drive the racks to reciprocate.

[0015] By adopting the above technical solution, when the drive mechanism drives the planetary gear to rotate, the planetary gear connected to the incomplete gear also drives the incomplete gear to rotate. When the incomplete gear meshes with one of the racks, it will drive the rack to move to one end along its length. When the incomplete gear meshes with the other rack, since the teeth of the two racks are set opposite to each other, it will drive the other rack to move in the opposite direction, thus realizing the reciprocating motion of the rack.

[0016] Optionally, two support rails are fixedly connected to the mounting base, and the two racks are slidably connected within the two support rails respectively.

[0017] By adopting the above technical solution, the support rail can guide the rack.

[0018] Optionally, the mounting bracket includes a fixed disk for fixing inside the vacuum chamber, a main shaft rotatably connected to the fixed disk, and a tooling disk rotatably connected to the main shaft. The translation mechanism is mounted on the tooling disk, the central gear of the planetary gear train is fixed to the main shaft, and the planetary gears of the planetary gear train are rotatably connected to the tooling disk.

[0019] By adopting the above technical solution, during use, the fixed plate is directly installed at the bottom of the single-unit coating machine. When the drive device drives the main shaft to rotate, it will drive the central gear to rotate, which in turn drives the planetary gears meshing with the central gear to rotate, realizing the self-rotation of the planetary gears. When the drive mechanism drives the central shaft and the tooling plate to rotate simultaneously, it will realize the revolution of the planetary gears. During use, the drive mechanism can be operated to drive the appropriate components to rotate as needed.

[0020] Optionally, the drive mechanism includes a servo motor and a reversing transmission assembly connected between the servo motor and the spindle. The reversing transmission assembly is used to transmit the power of the servo motor to the mounting bracket to drive the planetary gear to rotate or revolve.

[0021] By adopting the above technical solution, the servo motor can provide rotational power to the planetary gear train, and the force transmitted from the servo motor to the planetary gear train can be changed by the reversing transmission component, so as to realize the self-rotation or revolution of the planetary gears.

[0022] Optionally, the reversing transmission assembly includes a telescopic rod that rotates synchronously with the output shaft of the servo motor. A first driving gear and a second driving gear are fixedly connected at intervals along the axial direction of the telescopic rod. A first driven gear is fixedly connected to the main shaft, and a second driven gear that rotates synchronously with the tooling disc is sleeved on the main shaft. The telescopic rod has at least two telescopic states to correspond to the rotation and revolution of the planetary gear. When the telescopic rod is in the first state, the first driven gear meshes with the first driving gear, and the second driven gear meshes with the second driving gear. When the telescopic rod is in the second state, the second driven gear disengages from the second driving gear, and the first driven gear changes from meshing with the first driving gear to meshing with the second driving gear.

[0023] By adopting the above technical solution, when the telescopic rod is in the first state, the servo motor will simultaneously drive the first and second driving gears to rotate via the telescopic rod. The first and second driving gears, in turn, will drive the central shaft and the tooling disc to rotate simultaneously via the first and second driven gears, thereby driving the central gear and planetary gears to rotate simultaneously, achieving the revolution of the planetary gears. When the telescopic rod is in the second state, the servo motor will simultaneously drive the first and second driving gears to rotate. The first driving gear will then drive the first driven gear to rotate, thereby driving the planetary gears to rotate via the tooling disc, achieving the rotation of the planetary gears.

[0024] Optionally, the telescopic rod includes a sliding sleeve that rotates synchronously with the output shaft of the servo motor and a sliding shaft that is slidably connected within the sliding sleeve. A positioning pin is provided on the side wall of the sliding sleeve, and at least two positioning holes are provided on the sliding shaft for the positioning pin to pass through. The telescopic rod has at least two telescopic states when the positioning pin is engaged with at least two of the positioning holes respectively.

[0025] By adopting the above technical solution, the state of the telescopic rod can be changed by operating the positioning pin and cooperating with at least two positioning holes, so as to drive the planetary gear to rotate or revolve.

[0026] Optionally, a drive pulley is fixedly connected to the output shaft of the servo motor, a driven pulley is fixedly connected to the sliding sleeve, and a transmission belt is sleeved between the drive pulley and the driven pulley.

[0027] By adopting the above technical solution, the servo motor drives the driven pulley to rotate via the transmission belt, which in turn drives the sliding sleeve to rotate, thereby realizing the transmission of power.

[0028] Optionally, a connecting sleeve is sleeved on the main shaft, and the tooling disc and the second driven gear are both fixedly connected to the connecting sleeve.

[0029] By adopting the above technical solution, the tooling disc and the second driven gear are connected together through a connecting cylinder, so as to realize the synchronous rotation of the second driven gear and the tooling disc.

[0030] Optionally, a positioning bolt is detachably connected to the fixed plate, and the positioning bolt is threadedly connected to the tooling plate.

[0031] By adopting the above technical solution, when the planetary gear rotates, the fixed plate and the tooling plate can be connected and fixed by the positioning bolts, so as to avoid the tooling plate rotating synchronously with the central gear when the central gear drives the planetary gear to rotate.

[0032] In summary, this application includes at least one of the following beneficial technical effects:

[0033] 1. This application installs a planetary gear system and a translation mechanism inside a single-unit coating machine. The drive mechanism can drive the planetary gears of the planetary gear system to rotate, thereby driving the workpiece to be coated to slide back and forth through the translation mechanism. During the back and forth sliding process, the target material installed in the single-unit coating machine will coat the workpiece. During the back and forth sliding process of the workpiece, the distance between the workpiece and the target material is the same at all points, so as to simulate the working conditions of the workpiece on a continuous coating line. The operator can directly stop the single-unit coating machine at a specific time as needed, take out the workpiece to be coated, and check and record the coating parameters of the workpiece, without having to stop the entire continuous coating line. This greatly reduces the inspection cost and cumbersomeness of inspecting the workpiece.

[0034] 2. By setting up a translation mechanism, this application enables the translation mechanism to be installed in any single-unit coating machine. When the planetary gears of the planetary gear system in the single-unit coating machine rotate, the follower plate will be driven to reciprocate through the transmission component, thus converting the rotation of the planetary gears into the linear motion of the workpiece to be coated.

[0035] 3. This application provides a telescopic rod with at least two telescopic states, allowing the planetary gears to rotate or revolve by adjusting the telescopic rod to different states. Attached Figure Description

[0036] Figure 1 This is a schematic diagram to illustrate the structure of the workpiece being coated, installed inside a single coating machine.

[0037] Figure 2 This is a schematic diagram to illustrate the change in the target-base distance at various points on the workpiece as it rotates with the planetary gears.

[0038] Figure 3 This is a schematic diagram illustrating the structure of the vacuum coating machine reciprocating translation workpiece holder installed inside a single coating machine.

[0039] Figure 4 This is a schematic diagram of the overall structure of the reciprocating translational workpiece holder for the vacuum coating machine of this application.

[0040] Figure 5 This is a schematic diagram made to show the installation relationship between the translation mechanism and the planetary gear system after the follower plate is hidden.

[0041] Figure 6 This is a half-section front view created to show the drive mechanism, mounting bracket, and planetary gear connection.

[0042] Explanation of reference numerals in the attached drawings: 1. Mounting bracket; 11. Fixed plate; 12. Main shaft; 121. First driven gear; 13. Tooling plate; 131. Second driven gear; 132. Connecting cylinder; 14. Positioning bolt; 2. Planetary gear train; 21. Planetary gear; 22. Central gear; 3. Drive mechanism; 31. Servo motor; 32. Reversing transmission assembly; 321. Sliding sleeve; 322. Sliding shaft; 323. First driving gear; 324. Second driving gear; 325. Positioning pin 326. Positioning hole; 3261. First positioning hole; 3262. Second positioning hole; 3263. Third positioning hole; 33. Driving pulley; 34. Driven pulley; 35. Transmission belt; 4. Translation mechanism; 41. Follower plate; 42. Transmission assembly; 421. Mounting base; 4211. Mounting plate; 4212. Support leg; 422. Incomplete gear; 423. Rack; 424. Support rail; 5. Bracket; 51. Support rod; 52. Connecting plate; 53. Guide wheel. Detailed Implementation

[0043] The following is in conjunction with the appendix Figure 1-6 This application will be described in further detail.

[0044] Reference Figure 1 and Figure 2 The diagram shows a top view of the workpiece mounted inside a single-unit coating machine. When the workpiece is mounted on planetary gear 21 of the planetary gear train 2 within the machine, the distance between the workpiece and the target material is called the target-base distance D. When the workpiece is mounted on planetary gear 21, the center point of the workpiece coincides with the axis of planetary gear 21. When planetary gear 21 drives the workpiece to rotate, the workpiece rotates around the axis of rotation of planetary gear 21. At this time, the target-base distance D at the center point of the workpiece remains constant, while the target-base distance D at other points constantly changes. This change in target-base distance D leads to poor uniformity of film thickness at different points on the workpiece, resulting in weaker adhesion between the film and the substrate during subsequent use. When the workpiece is a large plate-like part, the film thickness uniformity on a single workpiece is even worse.

[0045] This application discloses a reciprocating translational workpiece holder for a vacuum coating machine, which can be installed within an existing standalone coating machine. (See also...) Figure 3 The vacuum coating machine reciprocating translational workpiece holder includes a mounting frame 1 for installation in the vacuum chamber of the single coating machine, a planetary gear train 2 mounted on the mounting frame 1, a drive mechanism 3 for driving the planetary gears 21 of the planetary gear train 2 to rotate or revolve, and a translation mechanism 4 mounted on the mounting frame 1.

[0046] Reference Figure 3 and Figure 4 The translation mechanism 4 includes a follower plate 41 for driving the workpiece to be plated to reciprocate and a transmission component 42 connected between the follower plate 41 and any planetary gear 21 on the planetary gear train 2. The transmission component 42 can drive the follower plate 41 to reciprocate through the rotation of the planetary gear 21 to simulate the linear motion of the workpiece to be plated on the continuous coating line.

[0047] Reference Figure 4 and Figure 5 The transmission assembly 42 includes a mounting base 421 mounted on the mounting frame 1, an incomplete gear 422 rotatably connected to the mounting base 421, and two racks 423 slidably connected to the mounting base 421. A follower plate 41 is simultaneously fixed to the two racks 423. The mounting base 421 is mounted on one of the planetary gears 21 and includes a mounting plate 4211 and a support leg 4212 fixed to one side of the mounting plate 4211. The end of the support leg 4212 away from the mounting plate 4211 can be detachably connected to the mounting frame 1 via bolts or the like. The rotation shaft of the planetary gear 21 passes through the mounting plate 4211 and is fixed to the incomplete gear 422, making the incomplete gear 422 coaxially fixed to the planetary gear 21. When the planetary gear 21 rotates, it also drives the incomplete gear 422 to rotate. Two racks 423 are located on opposite sides of the incomplete gear 422, with their teeth facing each other. When the planetary gear 21 drives the incomplete gear 422 to rotate, the incomplete gear 422 will mesh with the two racks 423 respectively. The length of the teeth on the incomplete gear 422 is 1 / 4 of the circumference of the incomplete gear 422, so that the incomplete gear 422 will not mesh with both racks 423 simultaneously during rotation. Since the teeth of the two racks 423 are facing each other, when the incomplete gear 422 rotates to mesh with one rack 423, it will drive the follower plate 41 to move in one direction through the rack 423; when the incomplete gear 422 rotates to mesh with the other rack 423, it will drive the follower plate 41 to move in the opposite direction through the other rack 423. Through the continuous rotation of the incomplete gear 422, the follower plate 41 is driven to reciprocate, thereby driving the workpiece to be plated mounted on the follower plate 41 to reciprocate.

[0048] Two parallel support rails 424 are fixedly connected to the mounting plate 4211, and two racks 423 are slidably connected to the two support rails 424 respectively. The two support rails 424 can guide the sliding of the two racks 423.

[0049] In use, the mounting base 421 is directly installed on the mounting frame 1, and one side of the support rail 424 is parallel to the surface of the target material. At this time, the rotation of the planetary gear 21 can drive the workpiece to be plated to slide along the plane parallel to the target material, ensuring that the target base distance is the same at all points of the workpiece during the reciprocating movement of the workpiece.

[0050] Of course, in another example of this application, the incomplete gear 422 and rack 423 can also be replaced by a cam coaxially fixed to the planetary gear and a spring fixed between the mounting base 421 and the follower plate 41, with the cam located on the side of the follower plate away from the spring. When the cam rotates to the point where its major axis abuts against the follower plate 41, it can slide against the follower plate 41 in the direction of the spring; when the cam rotates to the point where its minor axis abuts against the follower plate 41, it can push the follower plate 41 to move in the direction of the cam under the action of the spring, thereby driving the follower plate 41 to reciprocate.

[0051] It is understandable that there can be one or more translation mechanisms 4. Multiple translation mechanisms 4 correspond one-to-one with multiple planetary gears 21, so that multiple workpieces to be coated can be inspected simultaneously, resulting in better inspection results.

[0052] Reference Figure 5 and Figure 6 The mounting bracket 1 includes a horizontally placed fixed plate 11 for fixing within a vacuum chamber, a main shaft 12 rotatably connected to the center of the fixed plate 11, and a tooling plate 13 rotatably connected to the main shaft 12. The main shaft 12 is placed vertically, and the tooling plate 13 is located above the mounting plate. The central gear 22 of the planetary gear train 2 is fixed to the upper end of the main shaft 12, and the planetary gears 21 of the planetary gear train 2 are rotatably connected to the tooling plate 13. Multiple planetary gears 21 are spaced around the axis of the main shaft 12. This application uses four planetary gears 21 as an example for illustration.

[0053] The drive mechanism 3 includes a servo motor 31 and a reversing transmission assembly 32 connected between the servo motor 31 and the spindle 12. The reversing transmission assembly 32 is used to transmit the power of the servo motor 31 to the mounting frame 1 to drive the planetary gear 21 to rotate or revolve.

[0054] Reference Figure 6The reversing transmission assembly 32 includes a telescopic rod coaxially fixed to the servo motor 31. The telescopic rod includes a sliding sleeve 321 that rotates synchronously with the output shaft of the servo motor 31 and a sliding shaft 322 slidably connected within the sliding sleeve 321. A first driving gear 323 and a second driving gear 324 are fixedly connected at intervals along the axial direction of the sliding shaft 322, with the first driving gear 323 located on the side of the second driving gear 324 closer to the servo motor 31. Simultaneously, a first driven gear 121 is fixedly connected to the lower end of the main shaft 12, and a second driven gear 131 that rotates synchronously with the tooling disc 13 is sleeved on the main shaft 12, located above the first driven gear 121. The telescopic rod has at least two telescopic states to correspond to the rotation and revolution of the planetary gear 21.

[0055] Specifically, positioning pins 325 are provided on opposite sides of the sliding sleeve 321, and at least two positioning holes 326 are provided on the side wall of the sliding shaft 322 for the positioning pins 325 to pass through. When the positioning pins 325 are engaged with at least two positioning holes 326 respectively, at least two telescopic states of the telescopic rod are formed.

[0056] When there are two positioning holes 326, the positioning hole 326 located away from the first driving gear 323 is called the first positioning hole 3261, and the positioning hole 326 located close to the first driving gear 323 is called the second positioning hole 3262.

[0057] When the locating pin 325 passes through the first locating hole 3261 to fix the position of the sliding shaft 322 within the sliding sleeve 321, the state of the telescopic rod is called the first state. At this time, the first driven gear 121 meshes with the first driving gear 323, and the second driven gear 131 meshes with the second driving gear 324. When the servo motor 31 starts, the output shaft of the servo motor 31 will drive the telescopic rod to rotate, thereby simultaneously driving the main shaft 12 and the tooling disk 13 to rotate through the meshing of the first driving gear 323 with the first driven gear 121 and the meshing of the second driving gear 324 with the second driven gear 131, thus realizing the revolution of the planetary gear 21.

[0058] When the locating pin 325 passes through the second locating hole 3262 to fix the position of the sliding shaft 322 within the sliding sleeve 321, the state of the telescopic rod is called the second state. At this time, the second driven gear 131 is neither meshed with the first driving gear 323 nor with the second driving gear 324, while the first driven gear 121 meshes with the second driving gear 324. The telescopic rod drives the main shaft 12 to rotate, thereby driving the central gear 22 to rotate and realizing the self-rotation of the planetary gear 21. At this time, the tooling plate 13 is fixed and does not rotate. In order to prevent the tooling plate 13 from rotating synchronously with the main shaft 12, a detachable locating bolt 14 is connected to the fixed plate 11. The locating bolt 14 can be screwed onto the tooling plate 13 to fix the relative position of the tooling plate 13 and the fixed plate 11. When it is necessary to operate the tooling plate 13 to rotate, the locating bolt 14 can be removed directly.

[0059] Of course, it is understandable that there can be three positioning holes 326 on the sliding shaft 322. In this case, the third positioning hole 326 is called the third positioning hole 3263, which is located on the side of the first positioning hole 3261 away from the second positioning hole 3262. When the positioning pin 325 is inserted into the third positioning hole 3263, the first driven gear 121 does not mesh with the first driving gear 323 or the second driving gear 324, and the second driven gear 131 meshes with the first driving gear 323. Through the telescopic rod, the tooling disk 13 is driven to rotate, realizing the revolution and rotation of the planetary gear 21.

[0060] It is understood that the positions of the first driving gear 323 and the second driving gear 324 can be interchanged, and the positions of the first driven gear 121 and the second driven gear 131 can also be interchanged. This application takes the second driven gear 131 located on the side of the first driven gear 121 facing the tooling plate 13 as an example. A connecting cylinder 132 for connecting the tooling plate 13 and the second driven gear 131 is sleeved on the main shaft 12. One end of the connecting cylinder 132 is fixedly connected to the tooling plate 13, and the other end is fixedly connected to the second driven gear 131. The inner wall of the connecting cylinder 132 is rotatably connected to the main shaft 12 through a bearing, and the outer wall is rotatably connected to the fixed plate 11. A thrust bearing can also be provided between the tooling plate 13 and the fixed plate 11 to ensure smooth rotation between the tooling plate 13 and the fixed plate 11.

[0061] Reference Figure 4 and Figure 6 In this embodiment, the output shaft of the servo motor 31 rotates synchronously with the sliding sleeve 321. Specifically, the output shaft of the servo motor 31 can be directly fixed to the sliding sleeve 321. Of course, the output shaft of the servo motor 31 and the sliding sleeve 321 can also be connected through an intermediate transmission component, such as a belt or chain. This application uses the example of the output shaft of the servo motor 31 driving the sliding sleeve 321 to rotate through a belt for illustration.

[0062] A drive pulley 33 is fixedly connected to the output shaft of the servo motor 31, and a driven pulley 34 is fixedly connected to the sliding sleeve 321. A transmission belt 35 is sleeved between the drive pulley 33 and the driven pulley 34 to achieve synchronous rotation between the sliding sleeve 321 and the output shaft of the servo motor 31.

[0063] Reference Figure 4 In order to fix the position of the workpiece to be plated on the translation mechanism 4, a bracket 5 for supporting the workpiece to be plated is also provided on the tooling plate 13.

[0064] The support 5 includes multiple support rods 51 fixed to the tooling plate 13 and a connecting plate 52 fixed to the end of the support rods 51 away from the tooling plate 13. Multiple guide wheels 53 are rotatably connected to the side of the connecting plate 52 facing the support rods 51. The axis of each guide wheel 53 is vertically arranged. Two guide wheels 53 form a group for clamping the same workpiece to be plated. Multiple groups of guide wheels 53 are correspondingly arranged with multiple planetary gears 21. During installation, the lower end of the workpiece to be plated is directly fixed to the follower plate 41, and the upper end of the workpiece to be plated is inserted between two guide wheels 53 of the same group. The workpiece is clamped by the two guide wheels 53 of the same group, thus fixing its position. When the planetary gears 21 rotate to drive the workpiece to reciprocate through the follower plate 41, the workpiece also slides back and forth between the two guide wheels 53. When the planetary gears 21 revolve to the next target material, the tooling plate 13 simultaneously drives the support 5 to rotate.

[0065] The implementation principle of the reciprocating translational workpiece holder of the vacuum coating machine in this embodiment is as follows: When it is necessary to inspect the coating of the workpiece, the corresponding target material for the type of coating to be applied is installed in advance on the inner wall of the vacuum chamber of the single coating machine, and multiple targets are arranged at intervals around the center line of the hollow chamber. Then, the translation mechanism 4 is installed on the tooling plate 13, and the axis of the incomplete gear 422 is aligned with the axis of the planetary gear 21. The workpiece to be coated is then installed on the follower plate 41, and the position of the workpiece on the follower plate 41 is fixed by the bracket 5. By changing the state of the telescopic rod, the servo motor 31 drives the planetary gear 21 to rotate, so that the translation mechanism 4 drives the workpiece to move back and forth, simulating the working condition of the workpiece on the continuous coating line, thereby improving the accuracy of detecting the parameters of the workpiece. After a certain coating time, the servo motor 31 is stopped, the workpiece to be coated is taken out, and the coating parameters on the workpiece can be detected. After the detection is completed, the workpiece can be installed in the single coating machine for further coating. When it is necessary to change the coating material, simply change the state of the telescopic rod to make the planetary gear 21 revolve or rotate + revolve, thereby changing the position of the workpiece to be coated, so that the workpiece is rotated to the next target material, and the workpiece can be coated through the next target material.

[0066] The above are all preferred embodiments of this application, and are not intended to limit the scope of protection of this application. Therefore, all equivalent changes made in accordance with the structure, shape and principle of this application should be covered within the scope of protection of this application.

Claims

1. A reciprocating translational workpiece holder for a vacuum coating machine, characterized in that, include: Mounting bracket (1) is used for installation in the vacuum chamber of a vacuum coating machine; Planetary gear train (2) is mounted on the mounting bracket (1); The drive mechanism (3) is used to drive the planetary gears (21) of the planetary gear train (2) to rotate or revolve; The translation mechanism (4) is installed on the mounting frame (1) and includes a follower plate (41) for driving the workpiece to be plated to move back and forth and a transmission assembly (42) connecting the follower plate (41) and any planetary gear (21) on the planetary gear train (2). The transmission assembly (42) drives the follower plate (41) to move back and forth through the rotation of the planetary gear (21). The transmission assembly (42) includes a mounting base (421) mounted on the mounting bracket (1), an incomplete gear (422) rotatably connected to the mounting base (421), and two racks (423) slidably connected to the mounting base (421). The follower plate (41) is fixedly connected to both racks (423). The teeth of the two racks (423) are arranged opposite to each other. The incomplete gear (422) is coaxially fixedly connected to any planetary gear (21) on the planetary gear train (2) and located between the two racks (423). When the incomplete gear (422) rotates, the incomplete gear (422) meshes with the two racks (423) in sequence to drive the racks (423) to reciprocate.

2. The reciprocating translational workpiece holder of the vacuum coating machine according to claim 1, characterized in that: Two support rails (424) are fixedly connected to the mounting base (421), and two racks (423) are slidably connected in the two support rails (424).

3. The reciprocating translational workpiece holder of the vacuum coating machine according to claim 1, characterized in that: The mounting bracket (1) includes a fixed plate (11) for fixing in the vacuum chamber, a main shaft (12) rotatably connected to the fixed plate (11), and a tooling plate (13) rotatably connected to the main shaft (12). The translation mechanism (4) is mounted on the tooling plate (13). The central gear (22) of the planetary gear train (2) is fixed to the main shaft (12), and the planetary gears (21) of the planetary gear train (2) are rotatably connected to the tooling plate (13).

4. The reciprocating translational workpiece holder of the vacuum coating machine according to claim 3, characterized in that: The drive mechanism (3) includes a servo motor (31) and a reversing transmission assembly (32) connected between the servo motor (31) and the spindle (12). The reversing transmission assembly (32) is used to transmit the power of the servo motor (31) to the mounting frame (1) to drive the planetary gear (21) to rotate or revolve.

5. The reciprocating translational workpiece holder of the vacuum coating machine according to claim 4, characterized in that: The reversing transmission assembly (32) includes a telescopic rod that rotates synchronously with the output shaft of the servo motor (31). A first driving gear (323) and a second driving gear (324) are fixedly connected at intervals along the axial direction of the telescopic rod. A first driven gear (121) is fixedly connected to the main shaft (12). A second driven gear (131) that rotates synchronously with the tooling disc (13) is sleeved on the main shaft (12). The telescopic rod has at least two telescopic states to correspond to the rotation and revolution of the planetary gear (21). When the telescopic rod is in the first state, the first driven gear (121) meshes with the first driving gear (323), and the second driven gear (131) meshes with the second driving gear (324). When the telescopic rod is in the second state, the second driven gear (131) disengages from the second driving gear (324), and the first driven gear (121) changes from being engaged with the first driving gear (323) to being engaged with the second driving gear (324).

6. The reciprocating translational workpiece holder of the vacuum coating machine according to claim 5, characterized in that: The telescopic rod includes a sliding sleeve (321) that rotates synchronously with the output shaft of the servo motor (31) and a sliding shaft (322) that is slidably connected within the sliding sleeve (321). A positioning pin (325) is provided on the side wall of the sliding sleeve (321), and at least two positioning holes (326) are provided on the sliding shaft (322) for the positioning pin (325) to pass through. The telescopic rod has at least two telescopic states when the positioning pin (325) is engaged with at least two of the positioning holes (326).

7. The reciprocating translational workpiece holder of the vacuum coating machine according to claim 6, characterized in that: A drive pulley (33) is fixedly connected to the output shaft of the servo motor (31), a driven pulley (34) is fixedly connected to the sliding sleeve (321), and a transmission belt (35) is sleeved between the drive pulley (33) and the driven pulley (34).

8. The reciprocating translational workpiece holder of the vacuum coating machine according to claim 5, characterized in that: A connecting cylinder (132) is sleeved on the main shaft (12), and the tooling disc (13) and the second driven gear (131) are both fixedly connected to the connecting cylinder (132).

9. The reciprocating translational workpiece holder of the vacuum coating machine according to claim 5, characterized in that: The fixed plate (11) is detachably connected to a positioning bolt (14), which is threadedly connected to the tooling plate (13).

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