An inorganic orientation method for vertical orientation of liquid crystal molecules and devices

Abstract

The present invention discloses an inorganic orientation method for vertical orientation of liquid crystal molecules and devices. The present invention processes the ZnO inorganic film deposited by magnetron sputtering by using ozone and active oxygen atoms generated in an ultraviolet ozone cleaning machine in combination with a visible light band polarizer, thereby obtaining a vertical inorganic orientation film to achieve vertical orientation of liquid crystal molecules, highlighting the high stability of inorganic film orientation and the advantages of thin film layers, and is a non-contact inorganic orientation technology.

Description

Technical Field

[0001] The invention belongs to the technical field of liquid crystal device manufacturing, and in particular relates to an inorganic orientation method for vertical orientation of liquid crystal molecules and devices. Background Art

[0002] Liquid crystal orientation technology is one of the core technologies of liquid crystal display technology. It is a technology used to induce disordered liquid crystal molecules to be arranged in an orderly manner. It is a key technology for liquid crystal devices to achieve different working modes and excellent optoelectronic properties. In the field of liquid crystal orientation technology, the method of rubbing polyimide (PI) or the technology of ultraviolet exposure light orientation film is widely used to achieve the orientation of liquid crystal molecules. Organic films have always faced the problem of high temperature stability of the orientation film, and the problem of loss of driving voltage of liquid crystal devices due to the thickness of the organic film. Therefore, inorganic orientation technology has gradually become a research hotspot in the field of liquid crystal orientation technology due to its own advantages such as high stability and thin film layer.

[0003] Inorganic orientation is an orientation technology that deposits inorganic materials on the surface of a substrate to form an inorganic film that can orient liquid crystal molecules. Among the many inorganic orientation technology solutions that can orient liquid crystal molecules vertically, a friction process needs to be added to apply a force in a consistent direction to the liquid crystal molecules, so that the liquid crystal molecules produce a uniform vertical orientation effect. However, the contact friction process will generate static electricity and dust pollution during the friction process, thereby reducing the optoelectronic performance of the liquid crystal device.

[0004] From the above analysis, it can be seen that although inorganic orientation technology has advantages such as high stability and thin film layer, non-contact inorganic orientation technology is a promising technological trend for achieving high-resolution and high-performance liquid crystal devices. Summary of the invention

[0005] The purpose of the present invention is to provide an inorganic orientation method for vertical orientation of liquid crystal molecules and devices. The method is a non-contact inorganic orientation technology to solve the problems of film stability and thick film in the existing organic vertical orientation technology, as well as the technical problems of dust pollution and static electricity caused by the contact friction process in the inorganic vertical orientation technology.

[0006] In order to solve the above technical problems, the specific technical solutions of the present invention are as follows:

[0007] An inorganic orientation method for vertical orientation of liquid crystal molecules. In an ultraviolet ozone cleaning machine, the magnetron sputtered ZnO inorganic film is treated by generating ozone and active oxygen atoms in combination with a visible light band polarizer, thereby obtaining a vertical inorganic orientation film and realizing vertical orientation of liquid crystal molecules.

[0008] The invention also discloses an inorganic orientation method for vertical orientation of VA type liquid crystal device, wherein the ZnO inorganic film is magnetron sputtered on the upper surface of ITO glass.

[0009] Furthermore, the method further comprises the following steps:

[0010] Two pieces of ITO glass are used as the upper glass substrate and the lower glass substrate respectively, the frame sealant is printed on the lower substrate by screen printing, and then the backing material is evenly distributed on the upper surface of the lower substrate, so as to separate the upper substrate and the lower substrate by a certain thickness and control the uniformity of the thickness;

[0011] The upper substrate and the lower substrate are aligned and bonded according to the alignment marks, and then the frame sealant is cured at high temperature to form a liquid crystal box;

[0012] Negative liquid crystal material is poured into the liquid crystal box and sealed to finally produce a VA type liquid crystal device.

[0013] The invention also discloses an inorganic orientation method for vertical orientation of VA type LCoS device, wherein the ZnO inorganic film is magnetron sputtered on the upper surface of ITO glass and LCoS chip.

[0014] Furthermore, the method further comprises the following steps:

[0015] ITO glass is used as the upper substrate, and LCoS chip is used as the lower substrate. The frame sealant is printed on the lower substrate by screen printing. When the size of the LCoS chip is ≤1 inch, the backing material is mixed into the frame sealant. When the size of the LCoS chip is greater than 1 inch, the backing material is evenly distributed on the upper surface of the lower substrate.

[0016] Aligning and bonding the upper substrate and the lower substrate, and then curing the frame sealant at high temperature to form a liquid crystal box;

[0017] Negative liquid crystal material is poured into the liquid crystal box and sealed, and finally a VA-type LCoS device is produced.

[0018] Furthermore, the LCoS chip is an LCoS chip bare die or an LCoS chip wafer.

[0019] The inorganic alignment method for vertical alignment of liquid crystal molecules and devices of the present invention has the following advantages:

[0020] The present invention processes the magnetron sputtered ZnO inorganic film by combining ozone and active oxygen atoms generated in an ultraviolet ozone cleaning machine with a visible light band polarizer, thereby obtaining a vertical inorganic orientation film and realizing vertical orientation of liquid crystal molecules. It is a non-contact inorganic orientation solution, which is resistant to high temperatures and has a thin film layer. It can achieve high stability of the orientation film, reduce the driving voltage of the liquid crystal device, and avoid dust defects and static electricity problems caused by contact mechanical friction. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 Schematic diagram of treating ZnO inorganic film with ozone and active oxygen atoms combined with visible light polarizer of the present invention;

[0022] Figure 2 It is a schematic diagram of inorganic alignment for vertical alignment of VA type liquid crystal device of the present invention;

[0023] Figure 3 It is a schematic diagram of the inorganic orientation for vertical orientation of VA-type LCoS device of the present invention;

[0024] Figure 4 Schematic diagram of the present invention of treating the ZnO inorganic film of LCoS chip wafer with ozone and active oxygen atoms combined with a visible light polarizer;

[0025] Explanation of the marks in the figure: 1. ITO glass; 2. ZnO inorganic film; 3. Visible light band polarizer; 4. Ozone and active oxygen atoms; 5. Vertical inorganic alignment film; 6. Substrate material; 7. Frame sealing glue; 8. Negative liquid crystal; 9. LCoS chip bare die; 10. LCoS chip wafer. DETAILED DESCRIPTION

[0026] In order to better understand the purpose, structure and function of the present invention, the inorganic alignment method for vertical alignment of liquid crystal molecules and devices of the present invention is further described in detail below with reference to the accompanying drawings.

[0027] An inorganic alignment method for vertical alignment (VA type) of liquid crystal molecules and devices, including preparation of a ZnO inorganic film 2, treatment of the ZnO inorganic film 2, and a liquid crystal device based on a vertical inorganic alignment film 5;

[0028] The ZnO inorganic film 2 is prepared by depositing ZnO inorganic material on the surface of an ITO glass 1 (Indium Tin Oxide) substrate by magnetron sputtering, and the thickness of the prepared ZnO inorganic film 2 is 15nm to 100nm;

[0029] The treatment of the ZnO inorganic film 2 is as follows: In the ultraviolet ozone cleaning machine, the low-pressure ultraviolet mercury lamp can simultaneously emit ultraviolet light with wavelengths of 254nm and 185nm. The light energy of the ultraviolet light with a wavelength of 185nm can decompose the oxygen in the air into ozone, while the light energy of the ultraviolet light with a wavelength of 254nm can decompose ozone into oxygen and active oxygen atoms. The photosensitive oxidation reaction process is carried out continuously. Under the irradiation of these two short-wave ultraviolet lights, ozone and active oxygen atoms will be continuously generated, and then combined with the visible light band polarizer 3 to treat the surface of the ZnO inorganic film 2. After treatment, the ZnO inorganic film 2 becomes a vertical inorganic orientation film 5 to achieve vertical orientation of the liquid crystal molecules. In the above case, the ZnO inorganic film 2 is treated for 15min to 30min;

[0030] The packaging process of the VA mode liquid crystal device based on the ZnO vertical inorganic alignment film 5 includes:

[0031] Magnetron sputtering is performed on the surface of ITO glass 1 to obtain a ZnO inorganic film 2, the ZnO inorganic film 2 is treated with ozone and active oxygen atoms 4 combined with a visible light band polarizer 3 to obtain a vertical inorganic alignment film 5, and a conventional process is used to encapsulate it into a VA type liquid crystal device in the subsequent process;

[0032] The packaging process of the VA mode LCoS device based on the ZnO vertical inorganic alignment film 5 includes:

[0033] Magnetron sputtering is performed on the ITO glass 1 and the LCoS chip bare die 9 to obtain a ZnO inorganic film 2, the ZnO inorganic film 2 is treated with ozone and active oxygen atoms 4 combined with a visible light band polarizer 3 to obtain a vertical inorganic alignment film 5, and the subsequent process uses a conventional process to encapsulate it into a VA type LCoS liquid crystal device;

[0034] Magnetron sputtering is performed on ITO glass 1 and LCoS chip wafer 10 to obtain ZnO inorganic film 2, and the ZnO inorganic film 2 is treated with ozone and active oxygen atoms 4 combined with a visible light band polarizer 3 to obtain a vertical inorganic alignment film 5, and the subsequent process uses conventional processes to encapsulate it into a VA-type LCoS liquid crystal device.

[0035] The first embodiment of the inorganic alignment method for vertical alignment of liquid crystal molecules:

[0036] 1. The ITO glass 1 is ultrasonically cleaned for 15 minutes using detergent, deionized water, acetone, and anhydrous ethanol in sequence, and then dried;

[0037] 2. Depositing a ZnO inorganic film 2 on the ITO glass 1 by magnetron sputtering for 7 to 20 minutes with a film thickness of 15 to 100 nm;

[0038] 3. In an ultraviolet ozone cleaning machine, ozone and active oxygen atoms 4 are combined with a visible light band polarizer 3 to treat the ZnO inorganic film 2 for 25 minutes to 35 minutes to obtain a ZnO vertical inorganic alignment film 5;

[0039] The first embodiment of the inorganic alignment method for vertical alignment of VA type liquid crystal device:

[0040] 1. The ITO glass 1 is ultrasonically cleaned for 15 minutes using detergent, deionized water, acetone, and anhydrous ethanol in sequence, and then dried;

[0041] 2. Depositing a ZnO inorganic film 2 on the ITO glass 1 by magnetron sputtering for 7 to 20 minutes with a film thickness of 15 to 100 nm;

[0042] 3. In an ultraviolet ozone cleaning machine, ozone and active oxygen atoms 4 are combined with a visible light band polarizer 3 to treat the ZnO inorganic film 2 for 25 minutes to 35 minutes to obtain a ZnO vertical inorganic orientation film 5;

[0043] 4. Using two pieces of ITO glass (1) as the upper substrate and the lower substrate respectively, printing the sealing glue (7) on the lower substrate by screen printing, and then evenly distributing the backing material (6) on the upper surface of the lower substrate;

[0044] 5. The upper substrate and the lower substrate are aligned and bonded according to the alignment marks, and then the frame sealant 7 is cured at high temperature to form a liquid crystal box.

[0045] 6. Pour negative liquid crystal 8 material into the liquid crystal box and seal it, and finally produce a VA type LCD device.

[0046] The first embodiment of the inorganic alignment method for vertical alignment of VA type LCoS device:

[0047] 1. The ITO glass 1 and the LCoS chip bare die 9 are ultrasonically cleaned for 15 minutes using detergent, deionized water, acetone, and anhydrous ethanol in sequence, and then dried;

[0048] 2. Depositing a ZnO inorganic film 2 on the ITO glass 1 and the LCoS chip bare die 9 by magnetron sputtering for 7 to 20 minutes with a film thickness of 15 to 100 nm;

[0049] 3. In an ultraviolet ozone cleaning machine, ozone and active oxygen atoms 4 are combined with a visible light band polarizer 3 to treat the ZnO inorganic film 2 for 25 minutes to 35 minutes to obtain a ZnO vertical inorganic orientation film 5;

[0050] 4. The ITO glass 1 is used as the upper substrate, the LCoS chip die 9 is used as the lower substrate, and the frame sealant 7 is printed on the lower substrate by screen printing; when the size of the LCoS chip die 9 is ≤1 inch, the backing material 6 is mixed into the frame sealant 7; when the size of the LCoS chip die 9 is greater than 1 inch, the backing material 6 is evenly distributed on the upper surface of the lower substrate;

[0051] 5. The upper substrate and the lower substrate are aligned and bonded, and then the frame sealant 7 is cured at high temperature to form a liquid crystal box.

[0052] 6. Pour negative liquid crystal 8 material into the liquid crystal box and seal it, and finally obtain a VA type LCoS device.

[0053] Second embodiment of the inorganic alignment method for vertical alignment of VA type LCoS device:

[0054] 1. The ITO glass 1 and the LCoS chip wafer 10 are ultrasonically cleaned for 15 minutes using detergent, deionized water, acetone, and anhydrous ethanol in sequence, and then dried;

[0055] 2. Depositing a ZnO inorganic film 2 on the ITO glass 1 and the LCoS chip wafer 10 by magnetron sputtering for 7 to 20 minutes with a film thickness of 15 to 100 nm;

[0056] 3. In an ultraviolet ozone cleaning machine, ozone and active oxygen atoms 4 are combined with a visible light band polarizer 3 to treat the ZnO inorganic film 2 for 25 minutes to 35 minutes to obtain a ZnO vertical inorganic orientation film 5;

[0057] 4. Use the ITO glass 1 as the upper substrate and the LCoS chip wafer 10 as the lower substrate, and print the frame sealant 7 on the lower substrate by screen printing. When the size of the LCoS chip wafer 10 is ≤1 inch, mix the backing material 6 into the frame sealant 7; when the size of the LCoS chip wafer 10 is greater than 1 inch, evenly distribute the backing material 6 on the upper surface of the lower substrate;

[0058] 5. Align and bond the upper substrate and the lower substrate, and then cure the frame sealant 7 at high temperature to form a liquid crystal box.

[0059] 6. Pour negative liquid crystal 8 material into the liquid crystal box and seal it, and finally cut it to obtain a VA type LCoS device.

[0060] It is to be understood that the present invention is described by some embodiments, and it is known to those skilled in the art that various changes or equivalent substitutions may be made to these features and embodiments without departing from the spirit and scope of the present invention. In addition, under the teachings of the present invention, these features and embodiments may be modified to adapt to specific circumstances and materials without departing from the spirit and scope of the present invention. Therefore, the present invention is not limited by the specific embodiments disclosed herein, and all embodiments falling within the scope of the claims of this application are within the scope of protection of the present invention.

Claims

1. An inorganic alignment method for vertical alignment of liquid crystal molecules, characterized in that: In an ultraviolet ozone cleaning machine, the magnetron sputtered ZnO inorganic film (2) is treated by combining the generated ozone and active oxygen atoms (4) with a visible light band polarizer (3), thereby obtaining a vertical inorganic alignment film (5) to achieve vertical alignment of liquid crystal molecules; The ZnO inorganic film (2) is prepared by depositing ZnO inorganic material on the surface of the ITO glass (1) substrate by magnetron sputtering; The ZnO inorganic film (2) is treated as follows: in an ultraviolet ozone cleaning machine, a low-pressure ultraviolet mercury lamp simultaneously emits ultraviolet light with wavelengths of 254nm and 185nm, the light energy of the ultraviolet light with a wavelength of 185nm decomposes oxygen in the air into ozone, while the light energy of the ultraviolet light with a wavelength of 254nm decomposes ozone into oxygen and active oxygen atoms; the photosensitive oxidation reaction process is carried out continuously, and under the irradiation of these two short-wave ultraviolet lights, ozone and active oxygen atoms are continuously generated, and then combined with a visible light band polarizer (3) to treat the surface of the ZnO inorganic film 2; after treatment, the ZnO inorganic film (2) becomes a vertical inorganic orientation film (5) to achieve vertical orientation of liquid crystal molecules; the ZnO inorganic film (2) is treated for 15min to 30min.

2. The inorganic alignment method for vertical alignment of liquid crystal molecules according to claim 1, characterized in that: When the liquid crystal molecules are VA type liquid crystal devices, the steps further include: Two pieces of ITO glass (1) are used as an upper substrate and a lower substrate respectively, a frame sealant (7) is printed on the lower substrate by a screen printing method, and then a backing material (6) is evenly distributed on the upper surface of the lower substrate; The upper substrate and the lower substrate are aligned and bonded according to the alignment marks, and then the frame sealant (7) is cured at high temperature to form a liquid crystal box; Negative liquid crystal (8) material is poured into the liquid crystal box and sealed, thereby finally obtaining a VA type liquid crystal device.

3. The inorganic alignment method for vertical alignment of liquid crystal molecules according to claim 1, characterized in that: When the liquid crystal molecules are VA-type LCoS devices, the ZnO inorganic film (2) is magnetron sputtered on the upper surfaces of the ITO glass (1) and the LCoS chip wafer (10).

4. The inorganic alignment method for vertical alignment of liquid crystal molecules according to claim 3, characterized in that: The following steps are also included: Step 1: Using ITO glass (1) as an upper substrate and LCoS chip as a lower substrate, printing a sealing glue (7) on the lower substrate by screen printing; when the size of the LCoS chip is ≤1 inch, mixing the backing material (6) into the sealing glue (7); when the size of the LCoS chip is greater than 1 inch, evenly distributing the backing material (6) on the upper surface of the lower substrate; Step 2, aligning and bonding the upper substrate and the lower substrate, and then curing the frame sealant (7) at high temperature to form a liquid crystal box; Step 3: inject negative liquid crystal (8) material into the liquid crystal box and seal it, finally obtaining a VA type LCoS device.

5. The inorganic alignment method for vertical alignment of liquid crystal molecules according to claim 3, characterized in that: The LCoS chip is an LCoS chip bare die (9) or an LCoS chip wafer (10).

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