Solid target processing system

By introducing a holding part and a moving mechanism into the solid target handling system, the problems of reduced conveying speed and solid target adhesion caused by residual cooling water were solved, achieving high-precision solid target conveying.

CN115151014BActive Publication Date: 2026-04-07SUMITOMO HEAVY IND LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2022-03-29
Publication Date
2026-04-07

AI Technical Summary

Technical Problem

In existing solid target handling systems, cooling water adheres to the solid target and may cause problems such as reduced transport speed and solid targets sticking to the transport channel during transport.

Method used

The device employs a holding section and a moving mechanism. The holding section holds the solid target after particle beam irradiation, while the moving mechanism moves it, thus avoiding cooling water residue and improving delivery reliability.

Benefits of technology

This improves the reliability of solid target delivery after particle beam irradiation and prevents problems such as reduced delivery speed and solid target adhesion caused by residual moisture.

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Abstract

The present application provides a solid target processing system capable of improving the reliability of transporting a solid target after particle beam irradiation. The solid target processing system (100) of the present application includes a holding unit (4) capable of holding a solid target (50) after particle beam (B) irradiation. Furthermore, the solid target processing system (100) includes a moving mechanism (6) capable of moving the holding unit (4) holding the solid target (50). Thus, the moving mechanism (6) can move the held solid target (50) by moving the holding unit (4). At this time, the solid target (50) moves in the state of being held by the holding unit (4), so that the problem of moisture remaining on the solid target (50) adhering to the conveying path or reducing the conveying speed, etc. does not occur.
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Description

Technical Field

[0001] This application claims priority based on Japanese Patent Application No. 2021-057187, filed on March 30, 2021. The entire contents of that Japanese application are incorporated herein by reference.

[0002] This invention relates to a solid target processing system. Background Technology

[0003] As a conventional solid target processing system, the system described in Patent Document 1 is known. In this system, the solid target is held at the exit of the particle beam by a target device. Furthermore, while the particle beam irradiates the target material of the solid target, the target device supplies cooling water to the solid target for cooling. Once the irradiation of the solid target by the particle beam ends, the target device releases its holding, allowing the solid target to fall and be placed into a receiving component. Thus, the solid target placed into the receiving component is transported to the recovery unit while rolling in the transport channel.

[0004] Patent Document 1: Japanese Patent Application Publication No. 2013-167489

[0005] As mentioned above, during cooling, cooling water adheres to the solid target. When transporting via a conveyor channel, this cooling water sometimes remains on the surface of the solid target. Therefore, problems may arise, such as the solid target sticking to the conveyor channel or a decrease in conveying speed due to the adhering moisture. Summary of the Invention

[0006] Therefore, the purpose of this invention is to provide a solid target processing system that can improve the delivery reliability of a solid target after particle beam irradiation.

[0007] One aspect of the present invention relates to a solid target processing system for processing a solid target having a target material having been irradiated with a particle beam. The solid target processing system includes: a holding part capable of holding the solid target after irradiation with the particle beam; and a moving mechanism capable of moving the holding part holding the solid target.

[0008] The solid target processing system includes a holding section capable of holding the solid target after particle beam irradiation. Furthermore, the system includes a moving mechanism capable of moving the holding section holding the solid target. Therefore, by moving the holding section, the moving mechanism can simultaneously move the held solid target. In this state, the solid target moves while still held in the holding section, thus preventing problems such as residual moisture adhering to the transport path or reduced transport speed. These improvements enhance the reliability of solid target transport after particle beam irradiation.

[0009] The holding section may include a guiding mechanism for retrieving and placing the solid target relative to its holding position. In this case, when the solid target is placed into the holding section, it can be guided to the holding position with high precision. Furthermore, when transferring the solid target from the holding section to a container at its destination, the guiding mechanism enables a highly precise transfer.

[0010] Alternatively, the holding part can be equipped with an opening and closing mechanism that can switch between an open state and a closed state. In the open state, a solid target can be inserted into the holding part, and in the closed state, the solid target inserted into the holding part can be held within the holding part. In this case, the holding part can transport the solid target to the transport destination while being in the open state to receive the solid target and in the closed state to internally contain the solid target. Thus, when transporting the solid target while internally containing it, it is easier to hold it compared to the case where the solid target is clamped and transported by control pressure.

[0011] The retaining part may include a support mechanism having a support surface and supporting a portion of the solid target by pressing with the support surface. In this case, the retaining part can hold the solid target in a state that suppresses swaying. When swaying is suppressed in this way, contact between the target material of the solid target and the wall surface of the retaining part can be prevented.

[0012] The support surface can support parts of the solid target other than the target material. In this case, it can suppress contamination caused by the peeling of the target material.

[0013] The support surface can have a notch to prevent contact with the target material. In this case, contact between the target material and the support surface can be easily suppressed simply by forming a notch on the support surface.

[0014] The moving mechanism can move the solid target by rotating the holding part that holds it. The up-and-down movement and rotation of the holding part can be completed in a single action, thus enabling the solid target to be moved with fewer components and reducing equipment malfunctions.

[0015] The moving mechanism can be moved by sliding the holding part that holds the solid target. In this case, the moving mechanism can move the holding part by linear movement. Therefore, the moving mechanism can be designed with a compact structure.

[0016] The moving mechanism can be composed of a robotic arm. In this case, the moving mechanism can move the holding part along with complex movements.

[0017] Invention Effects

[0018] According to the present invention, a solid target processing system is provided that can improve the delivery reliability of a solid target after particle beam irradiation. Attached Figure Description

[0019] Figure 1 This is a schematic structural diagram of the solid target processing system according to an embodiment of the present invention.

[0020] Figure 2 This is a schematic structural diagram of the solid target processing system according to an embodiment of the present invention.

[0021] Figure 3 This is a cross-sectional view of the retaining part viewed from the first direction.

[0022] Figure 4 This is a cross-sectional view of the retaining part viewed from the second direction.

[0023] Figure 5 This is a schematic diagram showing the moving mechanism involved in the variation.

[0024] Figure 6 This is a schematic diagram showing the retaining part involved in the modified example.

[0025] In the figure: 4-holding part, 6-moving mechanism, 30-guiding mechanism, 40-opening and closing mechanism, 70-robotic arm, 80, 90-supporting mechanism, 81a, 91a-supporting surface, 82, 92-notch, 100-solid target processing system. Detailed Implementation

[0026] Hereinafter, various embodiments will be described in detail with reference to the accompanying drawings. Furthermore, in each drawing, the same or equivalent parts are labeled with the same symbols, and repeated descriptions are omitted.

[0027] Figure 1 and Figure 2 This is a schematic structural diagram of a solid target processing system 100 according to an embodiment of the present invention. The solid target processing system 100 is a system for processing a solid target 50 containing target material having irradiated particle beams B. Figure 1 and Figure 2 As shown, the solid target processing system 100 includes a target device 2, a chute 3, a holding part 4, a moving mechanism 6, and a receiving part 7. It should be noted that in each figure, the direction parallel to the irradiation direction of the particle line B in the horizontal direction is shown, i.e., the first direction D1. Furthermore, in each figure, the direction orthogonal to the first direction D1 in the horizontal direction is shown, i.e., the second direction D2.

[0028] The target device 2 is used to irradiate the particle beam B while holding a solid target 50. The target device 2 is mounted to the outlet 10a of the accelerator 10 via a manifold 11 that emits the particle beam B. The target device 2 holds the solid target 50 at the outlet position of the outlet 10a. The particle beam B irradiates the target material within the solid target 50 held in the target device 2. While the particle beam B irradiates the solid target 50, the target device 2 cools the solid target 50 by supplying cooling water to the back side of the irradiated surface. Once the irradiation of the solid target 50 by the particle beam B is complete, the target device 2 releases the solid target 50, allowing it to fall into the chute 3. It should be noted that known devices can be used as the target device 2, and there are no particular limitations on the specific structure of the target device 2.

[0029] The material used for the solid target 50 is a material that is insoluble in the solution, such as Au or Pt. Figure 3 As shown in (a), the solid target 50 is formed in the shape of a circular plate, but its shape and thickness are not particularly limited. Examples of target materials 51 include... 64 Ni、 89 Y、 100 Mo、 89 YO2, etc. Examples of radioactive isotopes generated corresponding to the target material 51 include... 64 Cu、 89 Zr、 99m Tc, etc. The target material 51 is formed into a layer at the center of one of the main surfaces of the solid target 50 by plating or the like. It should be noted that the particles of the irradiated particle line B are, for example, protons, deuterons, alpha particles, or... 3 He et al.

[0030] like Figure 1 and Figure 2 As shown, the chute 3 is a mechanism disposed below the target device 2. The chute 3 receives the solid target 50 that falls after being released from the target device 2. For example, the chute 3 can be configured to easily receive the solid target 50 by widening the upper receiving opening and providing a taper. Furthermore, the chute 3 causes the solid target 50 to fall along a falling path inside, thereby controlling the falling position of the solid target 50. The chute 3 causes the solid target 50 to fall toward the holding part 4 disposed below. It should be noted that the chute 3 is supported by the wall 16 of the accelerator 10 (see reference 14) via the support member 14. Figure 1 ).

[0031] The holding part 4 is a component capable of holding the solid target 50 after irradiation by the particle beam B. The holding part 4 receives the solid target 50 that has fallen from the chute part 3. Furthermore, the holding part 4 holds the received solid target 50. It should be noted that the state in which the solid target 50 is held is such that, regardless of whether the holding part 4 is oriented laterally or downwards, movement away from the holding part 4 is restricted by the solid target 50 extending entirely outwards from the holding part 4. It should be noted that even if a portion of the solid target 50 protrudes from the area of ​​the holding part 4, the other portion remains within the holding part 4, limiting further protrusion, this is equivalent to holding the solid target 50. In this case, it can be said that the solid target 50 is held in a state where it remains within or near the holding part 4. Furthermore, when the holding part 4 transfers the solid target 50 to the receiving part 7, it can release the holding of the solid target 50. The specific structure of the holding part 4 will be described later.

[0032] The moving mechanism 6 is a mechanism capable of moving the holding part 4, which holds the solid target 50. The moving mechanism 6 moves the holding part 4, which contains the solid target 50 via the slide 3, to the receiving part 7. In this embodiment, the receiving part 7 is located below the target device 2 and the slide 3. Therefore, if the holding part 4 receives the solid target 50 directly below the slide 3, the moving mechanism 6 moves the holding part 4 downward from that position. Furthermore, when the holding part 4 is moved to the receiving part 7, the moving mechanism 6 stops the holding part 4 at that position. Then, the holding part 4 releases its grip and transfers the solid target 50 to the receiving part 7.

[0033] In this embodiment, the moving mechanism 6 moves the holding portion 4, which holds the solid target 50, by rotating it. Specifically, the moving mechanism 6 includes a rotating shaft portion 21, an arm portion 22, and a support portion 23. The rotating shaft portion 21 is a component that rotates the holding portion 4 via the arm portion 22. The rotating shaft portion 21 is positioned approximately at the midpoint in the vertical direction between the slide portion 3 and the receiving portion 7. The rotating shaft portion 21 is positioned at this position so that it can rotate about the center line CL1. The support portion 23 rotatably supports the rotating shaft portion 21 at this position. The rotating shaft portion 21 is supported by the support portion 23 on the wall portion 16 of the accelerator 10 (see reference). Figure 1 The centerline CL1 is set to extend parallel to the second direction. The arm 22 extends outward from the rotating shaft 21 and connects to the retaining part 4. When the retaining part 4 is positioned directly below the slide groove 3, the arm 22 extends vertically. Furthermore, the lower end of the arm 22 connects to the rotating shaft 21, and the upper end of the arm 22 connects to the retaining part 4. The arm 22 rotates around the centerline CL1 along with the retaining part 4 as the rotating shaft 21 rotates. Thus, the retaining part 4 rotates on the rotary track RL.

[0034] The receiving unit 7 is a mechanism for receiving the solid target 50 irradiated by particle beam B from the holding unit 4, which has been moved to the receiving position. The receiving unit 7 includes a container 26 and a track section 27. The container 26 is a component that receives and houses the solid target 50 from the holding unit 4. Since the solid target 50 is activated after irradiation by particle beam B, the container 26 can accommodate the solid target 50 using a shielding component, such as a thick-walled lead structure. Furthermore, the container 26 may have a cover 25 that can be opened or closed. The container 26 is in the receiving position RP (refer to...). Figure 2 The container is in a standby state with the cover 25 open. If the holding part 4 reaches directly above the container 26, the solid target 50 is released by the holding part 4 and falls into the container 26. It should be noted that the container 26 may have a support mechanism made of a soft material such as sponge inside to prevent damage to the received solid target 50. Such a support mechanism can hold the solid target 50, which falls from the holding part 4, in an upright position. The track part 27 is a mechanism for transporting the container 26 containing the received solid target 50. The track part 27 extends from the receiving position RP in a second direction (see reference). Figure 2 The track section 27 is provided on the base plate section 29. The container 26 can move along the track section 27 via the sliding section 28. It should be noted that the direction in which the track section 27 extends, i.e. the direction in which the container 26 moves, is not limited to the second direction, and can also be configured to move in other directions.

[0035] Next, refer to Figure 3 and Figure 4 The structure of the retaining part 4 will be described in detail. Figure 3 (a) and (b) are cross-sectional views of the retaining part 4 as viewed from the first direction D1. Figure 3 (a) indicates the state of the holding section 4 immediately after receiving the solid target 50 from the chute section 3. Figure 3 (b) indicates the state just before the holding section 4 is about to hand over the solid target 50 to the receiving section 7. Figure 4 (a) and (b) are cross-sectional views of the retaining part 4 as viewed from the second direction D2. Figure 4 (a) indicates the state after the holding part 4 is about to receive the solid target 50 from the chute part 3. Figure 4 (b) indicates that the holding part 4 retains the solid target 50. It should be noted that, unless otherwise specified, this is used here. Figure 3 (a) and Figure 4 (a) is used as a reference, and words such as "up" and "down" are used to describe it.

[0036] like Figure 3 and Figure 4 As shown, the holding part 4 includes a guiding mechanism 30, a receiving component 35, and an opening and closing mechanism 40.

[0037] The guiding mechanism 30 is a mechanism for guiding the solid target 50 to be removed and placed relative to the holding position of the holding part 4. The guiding mechanism 30 includes guide members 31A and 31B. Guide members 31A and 31B are configured to face each other in the second direction. It should be noted that guide members 31A and 31B have a structure that is symmetrical about each other with respect to the center line CL2 when viewed from the first direction D1 (see reference). Figure 3 (a) Furthermore, the guide 31B has a structure that is symmetrical about the centerline CL2 when viewed from the second direction D2 (see reference). Figure 4 (a)). Although Figure 4 (a) is not shown, but the guide 31A also has a structure that is symmetrical about the center line CL2 when viewed from the second direction D2.

[0038] like Figure 3 As shown in (a), guides 31A and 31B extend upward from both ends of the base member 36 of the holding part 4 in the second direction. Guides 31A and 31B each have guide surfaces 31a and 31a extending vertically in a manner opposite to each other in the second direction. The guide surfaces 31a of guide 31A and 31B are set to form a gap slightly larger than the diameter of the solid target 50. Thus, the guide surfaces 31a of guides 31A and 31B guide the solid target 50 as it falls from the groove part 3 to the holding position and as it falls from the holding position to the receiving part 7. Furthermore, the guide surfaces 31a of guides 31A and 31B restrict swaying in the second direction D2. A tapered surface 31b, which expands towards the front end, is formed at the front end portion of the guide surfaces 31a of guides 31A and 31B, respectively. Therefore, the conical surface 31b of the guides 31A and 31B can receive the solid target 50 falling from the slide section 3 and guide it to the holding position.

[0039] Guide members 31A and 31B are provided with a pair of guide wall portions 32 that clamp the guide surface 31a and the conical surface 31b from both sides in the first direction D1 (see also [reference]). Figure 4(a) The pair of guide walls 32 of guide members 31A and 31B can guide the solid target 50 in a manner that clamps near both ends in the second direction D2. The pair of guide walls 32 of guide members 31A and 31B have guide surfaces 32a and conical surfaces 32b. The pair of guide surfaces 32a of guide members 31A and 31B are set to form a gap distance larger than the thickness of the solid target 50. Thus, the guide surfaces 32a of guide members 31A and 31B guide the solid target 50 from the slide section 3 to the holding position and from the holding position to the receiving section 7. Furthermore, the pair of guide surfaces 32a of guide members 31A and 31B restricts tilting in the first direction D1. The pair of conical surfaces 32b of guide members 31A and 31B can receive the solid target 50 falling from the slide section 3 and guide it to the holding position.

[0040] like Figure 3 As shown in (a), the receiving component 35 is positioned between the guide members 31B. The receiving component 35 is placed near the lower end of the solid target 50 in the holding position. The receiving component 35 has a receiving surface 35a that curves along the outer peripheral surface of the solid target 50. It should be noted that the height of the receiving component 35 is not particularly limited, but when the solid target 50 is positioned on the receiving surface 35a, it is acceptable as long as the upper end of the solid target 50 is positioned at a height lower than the upper ends of the guide members 31A, 31B and the opening / closing components 41A, 41B described later.

[0041] like Figure 4 As shown in (a), the opening and closing mechanism 40 includes opening and closing components 41A and 41B. Opening and closing components 41A and 41B are configured to face each other in the first direction D1. It should be noted that opening and closing components 41A and 41B have a structure that is symmetrical about each other with respect to the centerline CL2 when viewed from the second direction D2 (see reference). Figure 4 (a) Furthermore, the opening and closing component 41A has a structure that is symmetrical about the center line CL2 when viewed from the first direction D1 (see reference). Figure 3 (a)). Although Figure 3 (a) is not shown, but the opening and closing component 41B also has a structure that is symmetrical about the center line CL2 when viewed from the first direction D1.

[0042] like Figure 4As shown in (a), opening and closing components 41A and 41B are provided at both ends of the base component 36 in the first direction. When viewed from the second direction D2, the opening and closing components 41A and 41B have an L-shaped shape and include a main body 42 and a sliding portion 43. The main body 42 extends upward from the base component 36. The base components 36 of the opening and closing components 41A and 41B are opposite to each other in the first direction D1. The sliding portion 43 is provided at the lower end of the main body 42. The sliding portion 43 has a slider 43a, which allows it to reciprocate along a guide portion 44 provided on the base component 36. The guide portion 44 extends in the first direction, thus enabling the opening and closing components 41A and 41B to reciprocate along the first direction D1. It should be noted that the opening and closing components 41A and 41B are driven by a drive unit (not shown). It should be noted that the drive unit may be an air supply mechanism or the like. However, there are no particular limitations on the type of drive unit. In addition to air supply mechanisms, known methods such as motors can also be used for drive.

[0043] The main body 42 of opening / closing member 41A and the main body 42 of opening / closing member 41B each have opposing surfaces 42a that clamp a solid target 50 disposed in a holding position and are positioned opposite each other. A protruding wall portion 46 is formed at the upper end of the opposing surfaces 42a of opening / closing members 41A and 41B, protruding toward the center line CL2 in the first direction D1. If opening / closing members 41A and 41B move toward the center line CL2, then... Figure 4 As shown in (b), the protruding wall portions 46 of the opening and closing components 41A and 41B are in contact with each other. At this time, the opposing surfaces 42a of the opening and closing components 41A and 41B are positioned at a distance from the solid target 50. In this state, the solid target 50 is accommodated in the space between the opposing surfaces 42a of the opening and closing components 41A and 41B, and is unable to detach from this space due to the blocked protruding wall portions 46. In this state, the solid target 50 is held by the holding portion 4, preventing it from detaching from the holding portion 4 even during movement based on the moving mechanism 6.

[0044] With the structure described above, the opening and closing mechanism 40 can switch Figure 4 (a) shows the open state and Figure 4 (b) shows the off state. Figure 4 In the open state shown in (a), the protruding wall portions 46 of the opening and closing components 41A and 41B are spaced apart from each other, thus allowing the solid target 50 to be inserted into the holding portion 4. Figure 4 In the closed state shown in (b), the solid target 50 inserted into the holding part 4 can be held within the holding part 4. Furthermore, as... Figure 3As shown in (b), if the solid target 50 is set to the open state with the protruding wall portion 46 positioned on the lower side, the solid target 50 falls from the gap between the pair of protruding wall portions 46.

[0045] Next, the effects of the solid target processing system 100 according to this embodiment will be explained.

[0046] The solid target processing system 100 includes a holding section 4 capable of holding the solid target 50 after irradiation with particle beam B. Furthermore, the solid target processing system 100 includes a moving mechanism 6 capable of moving the holding section 4 holding the solid target (50). Therefore, by moving the holding section 4, the moving mechanism 6 can simultaneously move the held solid target 50. At this time, the solid target 50 moves while held in the holding section 4, thus preventing problems such as residual moisture on the solid target 50 adhering to the transport path or a decrease in transport speed. Through these improvements, the transport reliability of the solid target 50 after irradiation with particle beam B can be enhanced.

[0047] The holding section 4 may be equipped with a guiding mechanism 30 for guiding the solid target 50 to be taken out and placed in the holding position relative to the holding section 4. At this time, when the solid target 50 is put into the holding section 4, it can be guided to the holding position with high precision. Furthermore, when the solid target 50 is transferred from the holding section 4 to the container 26 at the delivery destination, the transfer can be performed with high precision by means of the guiding mechanism 30.

[0048] Alternatively, the holding part 4 may include an opening and closing mechanism 40 that can switch between an open state and a closed state. In the open state, a solid target 50 can be inserted into the holding part 4, and in the closed state, the solid target 50 inserted into the holding part 4 can be held within the holding part 4. In this case, the holding part 4 can transport the solid target 50 to the transport destination while being in the open state to receive the solid target 50 and in the closed state to internally contain the solid target 50. Thus, when the holding part 4 internally contains the solid target 50 for transport, it is easier to maintain the solid target 50 compared to the case where the solid target 50 is clamped and transported by control pressure.

[0049] The moving mechanism 6 can move the solid target 50 by rotating the holding part 4 that holds it. The up-and-down movement and rotation of the holding part 4 can be completed in one action, so the solid target 50 can be moved with fewer components, reducing the possibility of equipment malfunction.

[0050] The present invention is not limited to the embodiments described above.

[0051] For example, the specific structure of the moving mechanism 6 is not limited to the above-described embodiments. For example, such as Figure 5As shown in (a), the moving mechanism 6 can be moved by sliding the holding part 4 that holds the solid target 50. In this case, the moving mechanism 6 can move the holding part 4 by linear movement. Therefore, the moving mechanism 6 can be designed with a compact structure. For example, as... Figure 5 As shown in (a), the moving mechanism 6 includes a rotary drive 61 that rotatably supports the holding part 4 and a rodless cylinder 62 that slides the rotary drive 61 together with the holding part 4. At this time, the holding part 4, which receives the solid target 50 at the upper position of the rodless cylinder 62, moves downward via the rodless cylinder 62. The holding part 4 can be rotated at the lower position by the rotary drive 61, causing the solid target 50 to fall downward.

[0052] like Figure 5 As shown in (b), the moving mechanism 6 can be composed of a robotic arm 70. In this case, the moving mechanism 6 can move the holding part 4 along with complex movements.

[0053] Furthermore, the structure of the retaining part 4 is not limited to this embodiment. For example, the retaining part 4 can be made of other materials. Figure 6 The retaining part is shown. For example, Figure 6 (a) The retaining part 4 may include a support mechanism 80, which has a support surface 81a, and supports a portion of the solid target 50 by pressing with the support surface 81a. The support mechanism 80 includes support members 81 respectively provided in the opening and closing members 41A and 41B. The support member 81 has a support surface 81a that supports the solid target 50 by pressing with it. A notch 82 is formed in the support surface 81a to avoid contact with the target material 51. Therefore, the support surface 81a supports a portion of the solid target 50 surrounding the outer periphery of the target material 51. It should be noted that a sealing member such as an O-ring is provided in the support surface 81a.

[0054] Furthermore, it can be adopted Figure 6 (b) The support mechanism 90. The support mechanism 90 holds the solid target 50 by pressing it against the receiving wall portion 91 by a support member 81 on one side. A notch 92 is formed on the support surface 91a of the receiving wall portion 91 at a location corresponding to the target material 51. It should be noted that the receiving wall portion 91 may be the wall of the guide member 130 of the guide mechanism 30 that guides the solid target 50. The guide member 130... Figure 3 (a) The guide wall portion 32 of guide member 31A and the guide wall portion 32 of guide member 31B are connected to each other.

[0055] As mentioned above, in Figure 6In (a) and (b), the holding part 4 may be provided with support mechanisms 80 and 90 that support a portion of the solid target 50 by pressing it with support surfaces 81a and 91a. The holding part 4 can hold the solid target 50 in a state that suppresses movement of the solid target 50 relative to the wall surface of the holding part 4 and suppresses shaking. When shaking is suppressed in this way, contact between the target material 51 of the solid target 50 and the wall surface of the holding part 4 can be prevented.

[0056] The support surfaces 81a and 91a can support the parts of the solid target 50 other than the target material 51. At this time, it is possible to suppress contamination caused by the peeling of the target material 51.

[0057] The support surfaces 81a and 91a may have recesses 82 and 92 to prevent contact with the target material 51. In this case, contact between the target material 51 and the support surfaces 81a and 91a can be easily suppressed simply by forming recesses 82 and 92 on the support surfaces 81a and 91a.

Claims

1. A solid target processing system for processing a solid target having a target material containing irradiated particle beams, the solid target processing system comprising: The holding section is capable of holding the solid target after it has been irradiated by the particle beam; The support mechanism supports a portion of the solid target by pressing the support surface of the retaining part; and The moving mechanism is capable of moving the holding part that holds the solid target in its current state. The support surface has a notch to avoid contact with the target material.

2. The solid target processing system according to claim 1, wherein, The holding part has a guiding mechanism for guiding the solid target to be removed and placed in relative to the holding position of the holding part.

3. The solid target processing system according to claim 1 or 2, wherein, The retaining part has an opening and closing mechanism. The opening and closing mechanism can switch between open and closed states. In the open state, the solid target can be inserted into the holding part. In the closed state, the solid target inserted into the holding part can be held in a state where it is contained within the holding part.

4. The solid target processing system according to claim 3, wherein, The support surface supports the parts of the solid target other than the target material.

5. The solid target processing system according to any one of claims 1 to 4, wherein, The moving mechanism moves the solid target by rotating the holding part that holds the solid target.

6. The solid target processing system according to any one of claims 1 to 4, wherein, The moving mechanism moves the solid target by sliding the holding portion that holds the solid target.

7. The solid target processing system according to any one of claims 1 to 4, wherein, The moving mechanism consists of a robotic arm.

Citation Information

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