Split scanning coil and its manufacturing process

Abstract

The present invention provides a split-type scanning coil, comprising: a coil body for providing a synchronous scanning signal for an incident electron beam on the surface of a sample and for an electron beam in a cathode ray tube on a fluorescent screen; a coil skeleton for providing support for the coil body; a coil sleeve for sleeving on the outer periphery of the coil body; the diameter of the coil skeleton gradually narrows along the direction close to the coil sleeve, and the coil skeleton and the coil sleeve are detachably connected. The present invention also relates to a manufacturing process of the scanning coil. By setting the scanning coil as a split-type structure, the present invention can easily obtain the skeleton and the coil sleeve through machining and ensure high precision.

Description

Technical Field

[0001] The present invention relates to the field of electron optics technology, and particularly relates to a split-type scanning coil and a manufacturing process thereof. Background Art

[0002] The function of the scanning coil is to deflect the electron beam and perform regular scanning on the sample surface to excite various electron signals. The traditional scanning coil has an integral structure, which results in complicated processes, long time consumption, and low precision during the production and processing of such scanning coils.

[0003] Therefore, the present invention provides a new split-type scanning coil to solve the above problems. Summary of the Invention

[0004] Aiming at the deficiencies of the prior art, the first object of the present invention is to provide a split-type scanning coil, including:

[0005] A coil body for providing a synchronous scanning signal for the incident electron beam on the sample surface and the electron beam in the cathode ray tube on the fluorescent screen;

[0006] A coil skeleton for providing support for the coil body;

[0007] A coil sleeve for sleeving on the outer periphery of the coil body;

[0008] The diameter of the coil skeleton gradually becomes narrower along the direction close to the coil sleeve, and the coil skeleton is detachably connected to the coil sleeve.

[0009] Preferably, a positioning groove is further provided on the outer wall of the coil skeleton, and the coil body is fixed to the coil skeleton through the positioning groove.

[0010] Preferably, there are more than one step on the positioning groove, and the coil body is fixed to the coil skeleton by attaching to the step.

[0011] Preferably, a plurality of wire grooves are further provided on the coil skeleton to enable the wire to be led out from the wire grooves.

[0012] Preferably, a plurality of first wire grooves and a plurality of second wire grooves are further provided at one end of the coil skeleton far from the coil body, and the first wire grooves and the second wire grooves are arranged at intervals.

[0013] Preferably, the extending lengths of the wire grooves of the first wire grooves and the second wire grooves are different.

[0014] Preferably, a plurality of third wire grooves are further provided at one end of the coil skeleton close to the coil body, and each third wire groove can be used to lead out one wire.

[0015] Preferably, a sealing layer is further included, and the coil skeleton and the coil sleeve are sealed through the sealing layer.

[0016] The second object of the present invention is to provide a manufacturing process for a split-type scanning coil, including the following steps:

[0017] Wind the coil body around the outer periphery of the coil skeleton;

[0018] Set the coil sleeve on the outside of the coil body;

[0019] Set the O-ring on the coil skeleton, and the O-ring is located between the coil sleeve and the coil skeleton to form a seal between the coil skeleton and the coil sleeve.

[0020] Preferably, the coil body realizes axial positioning through the positioning groove on the coil skeleton.

[0021] Compared with the prior art, the beneficial effects of the present invention are as follows: The present invention provides a split-type scanning coil, including: a coil body for providing a synchronous scanning signal for the incident electron beam on the sample surface and the electron beam in the cathode ray tube on the fluorescent screen; a coil skeleton for providing support for the coil body; a coil sleeve for sleeving on the outer periphery of the coil body; the caliber of the coil skeleton gradually becomes narrower along the direction close to the coil sleeve, and the coil skeleton and the coil sleeve are detachably connected. The present invention also relates to the manufacturing process of the scanning coil. By setting the scanning coil as a split-type structure, the present invention can easily obtain the skeleton and the coil sleeve through mechanical processing and ensure high precision.

[0022] The above description is only an overview of the technical solution of the present invention. In order to be able to understand the technical means of the present invention more clearly and implement it according to the content of the specification, the following takes the preferred embodiments of the present invention and combines the accompanying drawings to describe in detail as follows. The specific implementation manners of the present invention are given in detail by the following embodiments and their accompanying drawings. Brief Description of the Drawings

[0023] The accompanying drawings described herein are used to provide a further understanding of the present invention, form a part of this application, and the schematic embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation to the present invention. In the drawings:

[0024] Figure 1 is a schematic structural diagram of the split-type scanning coil in the present invention;

[0025] Figure 2 is a cross-sectional view of the split-type scanning coil in the present invention;

[0026] Figure 3 is a schematic structural diagram of the connection relationship between the coil skeleton and the coil sleeve in the present invention.

[0027] Description of the reference numerals in the drawings:

[0028] 10. Scanning coil;

[0029] 101. Coil skeleton; 102. Coil body; 103. Coil sleeve; 104. Sealing layer; 105. Positioning step groove; 106. First wire groove; 107. Second wire groove; 108. Third wire groove. Detailed implementation manners

[0030] The following further describes the present invention in detail with reference to the drawings. The foregoing and other objects, features, aspects and advantages of the present invention will become more obvious, so that those skilled in the art can implement it according to the description in the specification. In the drawings, for clarity, the shapes and dimensions may be enlarged, and the same reference numerals will be used in all the drawings to indicate the same or similar components. In the following description, terms such as center, thickness, height, length, front, back, rear, left, right, top, bottom, upper, lower, etc. are based on the orientation or positional relationship shown in the drawings. In particular, "height" corresponds to the dimension from the top to the bottom, "width" corresponds to the dimension from the left to the right, and "depth" corresponds to the dimension from the front to the back. These relative terms are for convenience of description and generally do not intend to require a specific orientation. Terms related to attachment, connection, etc. (e.g., "connected" and "attached") refer to the relationship in which these structures are directly or indirectly fixed or attached to each other through an intermediate structure, and the relationship of movable or rigid attachment or connection, unless otherwise explicitly stated.

[0031] Next, the present invention will be further described in combination with the drawings and specific implementation manners. It should be noted that, on the premise of no conflict, the following-described embodiments or technical features can be arbitrarily combined with each other to form new embodiments. It should be understood that the terms such as "having", "comprising" and "including" used herein do not exclude the presence or addition of one or more other elements or their combinations.

[0032] Embodiment 1

[0033] The present invention relates to a split-type scanning coil 10, as Figure 1-2 shown, including:

[0034] The coil body 102 is used to provide a synchronous scanning signal for the incident electron beam on the sample surface and the electron beam in the cathode ray tube on the fluorescent screen;

[0035] The coil skeleton 101 is used to provide support for the coil body 102;

[0036] The coil sleeve 103 is used to sleeved on the outer periphery of the coil body 102; the coil sleeve 103 is positioned by the coil skeleton 101 and sleeved outside the coil body 102;

[0037] The caliber of the coil skeleton 101 gradually narrows along the direction close to the coil sleeve 103, and the coil skeleton 101 is detachably connected to the coil sleeve 103. By setting the scanning coil as a split structure in the present invention, the skeleton and the coil sleeve can be easily obtained through machining, and the high precision of the scanning coil is ensured.

[0038] It should be understood that in order to ensure the stiffness of the scanning coil, a vacuum sealant is filled between the coil skeleton 101, the coil body 102 and the coil sleeve 103.

[0039] In some embodiments, a positioning groove is further provided on the outer wall of the coil skeleton 101, and the coil body 102 is fixed on the coil skeleton 101 through the positioning groove; that is, by setting the positioning groove, the coil body 102 is more stably fixed on the coil skeleton 101.

[0040] In some embodiments, such as Figure 3 shown, there are more than one step on the positioning groove to form a positioning stepped groove 105, and the coil body 102 is attached to each step to be fixed on the coil skeleton 101; by setting the positioning groove as a stepped groove, the stepped groove on the coil skeleton 101 is the axial positioning and installation reference for the coil body 102. The axial position of the coil body 102 is ensured through the axial positioning tooling, and the coil body 102 is fixed on the coil skeleton 101 through epoxy resin glue fixation, that is, the stepped groove is beneficial to the accurate installation and fixation of the coil body, and helps the coil body 102 to be stably fixed on the coil skeleton 101. In some embodiments, a plurality of wire grooves are further provided on the coil skeleton 101 to fix the wires of the coil body 102 into the wire grooves; by setting the wire grooves, the wire layout is facilitated, and the wire layout on the coil skeleton 101 is kept uncluttered.

[0041] In some embodiments, a plurality of first wire grooves 106 and a plurality of second wire grooves 107 are further provided at one end of the coil skeleton 101 away from the coil body 102, and the first wire grooves 106 and the second wire grooves 107 are arranged at intervals.

[0042] In some embodiments, the extending lengths of the wire grooves of the first wire grooves 106 and the second wire grooves 107 are different to meet wires of different lengths. Specifically, as Figure 1 shown, the first wire groove 106 is a short groove, and the second wire groove 107 is a long groove, and the long groove extends in the direction away from the coil sleeve 103; the first wire groove 106 and the second wire groove 107 can both accommodate wires welded together in pairs.

[0043] In some embodiments, several third wire grooves 108 are further provided at one end of the coil bobbin 101 close to the coil body 102, and each third wire groove 108 can be used to lead out a wire. As Figure 1 shown, there are sixteen third wire grooves 108 provided on the coil bobbin 101, and each third wire groove 108 is for leading out a wire.

[0044] To ensure the sealing performance of the scanning coil, a sealing layer 104 is further included. The sealing layer is a common sealing structure in the prior art. For example, it can be an O-ring. The coil bobbin 101 and the coil sleeve 103 are sealed through the sealing layer 104.

[0045] Embodiment 2

[0046] The present invention also relates to a manufacturing process of a split-type scanning coil, including the following steps:

[0047] Wind the coil body 102 around the outer periphery of the coil bobbin 101;

[0048] Set the coil sleeve 103 on the outside of the coil body 102;

[0049] Set the O-ring on the coil bobbin 101, and the O-ring is located between the coil sleeve 103 and the coil bobbin 101 to form a seal between the coil bobbin 101 and the coil sleeve 103.

[0050] In some embodiments, the coil body 102 realizes axial positioning through the positioning grooves on the coil bobbin 101.

[0051] Each embodiment in this specification is described in a progressive manner. The same or similar parts among the embodiments can be referred to each other, and the key point of each embodiment is to illustrate the differences from other embodiments. In particular, for the system embodiment, since it is basically similar to the method embodiment, the description is relatively simple, and the relevant parts can refer to the partial description of the method embodiment.

Claims

1. A split-type scanning coil, characterized in that, Comprising: A coil body that provides a synchronous scanning signal for the incident electron beam on the sample surface and a synchronous scanning signal for the electron beam in the cathode ray tube on the fluorescent screen; A coil skeleton that provides support for the coil body; A coil sleeve that is sleeved on the outer periphery of the coil body; The diameter of the coil skeleton gradually narrows in the direction close to the coil sleeve, and the coil skeleton is detachably connected to the coil sleeve.

2. The split scanning coil according to claim 1, wherein A positioning groove is further provided on the outer wall of the coil skeleton, and the coil body is fixed to the coil skeleton through the positioning groove.

3. The split scanning coil according to claim 2, wherein More than one step is further provided on the positioning groove, and the coil body is fixed to the coil skeleton by attaching to the step.

4. The split-type scanning coil according to claim 1, wherein, A plurality of wire grooves are further provided on the coil skeleton so that the wire is led out from the wire grooves.

5. The split scanning coil according to claim 4, characterized in that, A plurality of first wire grooves and a plurality of second wire grooves are further provided at one end of the coil skeleton far from the coil body, and the first wire grooves and the second wire grooves are arranged at intervals.

6. The split-type scanning coil according to claim 5, wherein, The wire groove extension lengths of the first wire grooves and the second wire grooves are different.

7. The split-type scanning coil according to claim 4, wherein A plurality of third wire grooves are further provided at one end of the coil skeleton close to the coil body, and each third wire groove can be used to lead out one wire.

8. The split scanning coil according to claim 1, wherein, It further includes a sealing layer, and the coil skeleton and the coil sleeve are sealed through the sealing layer.

9. A manufacturing process for a split scanning coil, characterized in that, Including the following steps: Winding the coil body around the outer periphery of the coil skeleton; Sleeving the coil sleeve on the outside of the coil body; Sleeving an O-ring on the coil skeleton, and the O-ring is located between the coil sleeve and the coil skeleton to form a seal between the coil skeleton and the coil sleeve.

10. The manufacturing process of the split scanning coil according to claim 9, characterized in that, The axial positioning of the coil body is realized through the positioning groove on the coil skeleton.

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