Connector for electrical connection

Abstract

A connector for electrical connection is provided between a detection device and a device to be detected. The connector includes at least one elastic conductive portion extending in a vertical direction, a support portion supporting the elastic conductive portion, and an insulating portion combined with the support portion and having at least one through hole into which the elastic conductive portion is inserted in the vertical direction. A gap is formed between an inner surface of the through hole and an outer surface of the elastic conductive portion by at least a portion of the inner surface of the through hole and at least a portion of the outer surface of the elastic conductive portion.

Description

TECHNICAL FIELD

[0001] The present invention relates to a connector for electrically connecting a testing device to a device under test. BACKGROUND

[0002] In order to test a device under test such as a semiconductor device, a connector for electrically connecting a testing device and the device under test is used in the art. The connector is disposed between the testing device and the device under test. The connector transmits an electrical test signal of the testing device to the device under test, and transmits an electrical response signal of the device under test to the testing device. As an example of such a connector, a conductive rubber sheet is known in the art.

[0003] The conductive rubber sheet has a plurality of elastic conductive portions in which a plurality of metal particles are conductively gathered in a vertical direction. The plurality of elastic conductive portions transmit signals between the testing device and the device under test. The plurality of elastic conductive portions are maintained in the vertical direction by an insulating portion composed of silicone rubber.

[0004] The elastic conductive portion and the insulating portion can be molded together from a liquid molding material in which a plurality of metal particles are mixed in a liquid insulating substance. The elastic conductive portion can be formed by applying a magnetic field to the liquid molding material, thereby gathering the plurality of metal particles in the vertical direction. In the process of molding the elastic conductive portion together with the insulating portion, the metal particles of one elastic conductive portion and the metal particles of an adjacent elastic conductive portion can be connected, thereby failing to achieve insulation of the elastic conductive portion.

[0005] As a solution for achieving insulation between the elastic conductive portions, Korean Laid-Open Patent Publication No. 10-2009-0077991 proposes a manufacturing method in which a through hole is formed in the insulating portion, and a plurality of elastic insulating portions, which are previously manufactured in a pin shape, are respectively inserted into the through hole. SUMMARY

[0006] TECHNICAL PROBLEM

[0007] The aforementioned manufacturing method of inserting the elastic conductive portion in the pin shape into the through hole of the insulating portion is complicated because it requires the plurality of elastic conductive portions to be respectively manufactured and assembly between the respective elastic conductive portions and the insulating portion. In addition, the aforementioned manufacturing method increases the time required for manufacturing the conductive rubber sheet, increases the manufacturing cost, and reduces the mass productivity of the conductive rubber sheet. Furthermore, since the respective elastic conductive portions are low in workability, the conductive characteristics of the conductive rubber sheet are reduced.

[0008] In the detection using the conductive rubber sheet, in order to make the elastic conductive part of the conductive rubber sheet exhibit a certain degree or more of conductivity (low resistance), the pressure applied by the device under test must be a predetermined degree or more. However, in the conventional conductive rubber sheet, the elastic conductive part cannot be elastically deformed or elastically restored to a desired degree or more because it is restrained by the insulating part. Therefore, a strong pressure must be applied to the elastic conductive part by the device under test. The strong pressure can damage the device under test. In addition, the service life of the conductive rubber sheet subjected to repeated detection under a strong pressure will be reduced. As described above, the conventional conductive rubber sheet does not have an elastic conductive part that elastically deforms flexibly even under a low pressure, and cannot operate with high reliability under a low force.

[0009] An embodiment of the present application provides a connector for electrical connection, which has an elastic conductive part that elastically deforms flexibly under a low force and has high operability. An embodiment of the present application provides a connector for electrical connection, which has high operability and a plurality of elastic conductive parts that are modularized.

[0010] Technical means for solving the problem

[0011] An embodiment of the present application relates to a connector provided between two electronic devices and electrically connecting the two electronic devices. The connector for electrical connection according to an embodiment includes at least one elastic conductive part extending in a vertical direction, a support part supporting the elastic conductive part, and an insulating part having at least one through-hole and combined with the support part, the elastic conductive part being inserted into the through-hole in the vertical direction. A gap is formed between an inner surface of the through-hole and an outer surface of the elastic conductive part by at least a portion of the inner surface and at least a portion of the outer surface.

[0012] In an embodiment, the support part is a film provided on a horizontal plane orthogonal to the vertical direction, and an upper surface of the support part is bonded to a lower surface of the insulating part. The film can include polyimide.

[0013] In an embodiment, the connector further includes an insulating film penetrating a terminal guide hole corresponding to the through-hole, and the insulating film is attached to an upper surface of the insulating part.

[0014] In an embodiment, the insulating part includes a polyimide film.

[0015] In an embodiment, in a diameter direction with respect to a central axis of the through-hole, a ratio of a diameter of the through-hole to a diameter of the elastic conductive part is in a range of 1:0.8 to 1:0.95.

[0016] In one embodiment, the upper end of the elastic conductive portion is positioned lower than the upper surface of the insulating portion, and the ratio of the thickness of the insulating portion to the difference in thickness from the upper surface of the insulating portion to the upper end of the elastic conductive portion is in the range of 1:0.1 to 1:0.3.

[0017] In one embodiment, the elastic conductive portion includes a plurality of conductive substances that are capable of conductively contacting in the vertical direction, and an elastic substance that maintains the plurality of conductive substances in the vertical direction.

[0018] In one embodiment, the elastic conductive portion further includes an insulating protective portion that surrounds the plurality of conductive substances in the horizontal direction along the vertical direction. In the diametrical direction with respect to the central axis of the through-hole, the ratio of the diameter of the elastic conductive portion to the diameter of the portion of the elastic conductive portion occupied by the plurality of conductive substances is in the range of 1:0.6 to 1:0.9.

[0019] In one embodiment, the elastic conductive portion further includes a conductive spring that is capable of elastically deforming in the vertical direction.

[0020] In one embodiment, the elastic conductive portion and the support portion are formed integrally, and constitute at least one conductive module that is removably coupled to the insulating portion.

[0021] In one embodiment, the at least one conductive module includes a first conductive module that includes an elastic conductive portion configured not to protrude from the insulating portion in the vertical direction.

[0022] In one embodiment, the at least one conductive module includes a second conductive module that includes an elastic conductive portion configured to protrude from the insulating portion in the vertical direction.

[0023] In one embodiment, the support portion of the first conductive module and the support portion of the second conductive module are proximate to each other in the horizontal direction orthogonal to the vertical direction, and can be coupled to the insulating portion.

[0024] In one embodiment, the support portion of the first conductive module and the support portion of the second conductive module can partially overlap in the vertical direction.

[0025] Effects of the Invention

[0026] According to an embodiment of the present disclosure, since the elastic conductive part is separated from the through hole of the insulating part by a gap, the elastic conductive part can be elastically deformed and elastically recovered without being constrained by the insulating part. Thus, the elastic conductive part has improved operability and elastic recovery force, and can exhibit high conductivity at low pressure. In addition, since the elastic conductive parts in the connector of an embodiment can be operated individually, the connector of an embodiment can correspond to terminals of a device under test having terminals of different heights due to bending of the device under test or problems in a manufacturing method. That is, each elastic conductive part can appropriately contact a plurality of terminals having different heights.

[0027] In addition, according to an embodiment of the present disclosure, since at least one elastic conductive part and a support part constitute one conductive module, and such a conductive module is combined with an insulating part, a highly efficient connector manufacturing method can be implemented and manufacturing costs can be reduced. In addition, due to the combined structure between the conductive module and the insulating part, the connector can be configured to match the terminal form of the device under test. In addition, the combined structure between the conductive module and the insulating part makes it possible to replace only a plurality of damaged elastic conductive parts. BRIEF DESCRIPTION OF DRAWINGS

[0028] Figure 1 An example in which a connector according to an embodiment is applied is schematically shown.

[0029] Figure 2 A cross-sectional view schematically showing a part of a connector according to a first embodiment is shown.

[0030] Figure 3 An exploded cross-sectional view schematically showing Figure 2 a part of the connector shown.

[0031] Figure 4 A plan view schematically showing Figure 2 a part of the connector shown.

[0032] Figure 5 A cross-sectional view schematically showing Figure 4 an operating state of a part of the connector shown.

[0033] Figure 6a An example of manufacturing a conductive module of a connector according to an embodiment is schematically shown.

[0034] Figure 6b An example of manufacturing an insulating part of a connector according to an embodiment is schematically shown.

[0035] Figure 7 An exploded cross-sectional view schematically showing a part of a connector according to a second embodiment is shown.

[0036] Figure 8This is a partial anatomical view of a portion of the connector according to the third embodiment.

[0037] Figure 9 To show Figure 8 A plan view of a portion of the connector shown.

[0038] Figure 10 This is a cross-sectional view showing a portion of the connector according to the fourth embodiment.

[0039] Figure 11 A cross-sectional view of a portion of the connector according to the fifth embodiment is shown schematically.

[0040] Figure 12 To illustrate Figure 11 A partial anatomical view of a portion of the connector is shown.

[0041] Figure 13 A partial anatomical view of a portion of the connector according to the sixth embodiment is shown schematically.

[0042] Figure 14 A cross-sectional view of a portion of the connector according to the seventh embodiment is shown for illustrative purposes.

[0043] Figure 15 To illustrate Figure 14 A partial anatomical view of a portion of the connector is shown.

[0044] Figure 16a A plan view of a connector according to one embodiment is shown.

[0045] Figure 16b Show Figure 16a The area of ​​the conductive module used for the ball terminals in the connector shown.

[0046] Figure 16c Show Figure 16a The area of ​​the conductive module used for the land-shaped terminal in the connector shown.

[0047] Figure 17 A partial anatomical view of a portion of the connector according to the eighth embodiment is shown schematically. Detailed Implementation

[0048] To illustrate the technical concept of the present invention, embodiments of the invention are illustrated. The scope of the invention is not limited to the embodiments presented below or the detailed descriptions of these embodiments.

[0049] Unless otherwise defined, all technical and scientific terms used in the present application have the meaning commonly understood by one of ordinary skill in the art. All terms used herein are selected from among terms commonly used in the art in order to more clearly explain the present application, and are not intended to limit the scope of rights according to the present application.

[0050] Expressions such as "include", "have", "possess", etc. used in the present application are understood to be open-ended terms that encompass the possibility of including other elements unless otherwise stated in the phrase or sentence in which the expression appears.

[0051] Unless otherwise stated, the expressions recited in the singular form in the present application can include the meaning of the plural form, and the same applies to the expressions recited in the singular form in the claims.

[0052] The expressions "first", "second", etc. used in the present application are used to distinguish a plurality of constituent elements from each other, and do not limit the order or importance of the corresponding constituent elements.

[0053] In the present application, when one constituent element is recited as being "connected" or "coupled" to another constituent element, it is understood that the certain constituent element can be directly connected or coupled to the other constituent element, or can be connected or coupled with a new another constituent element as a medium.

[0054] The direction-indicating expression "upper" used in the present application is based on the direction of the connector with respect to the detection device, and the direction-indicating expression "lower" indicates the opposite direction of the upper direction. It should be understood that the direction-indicating expression "vertical direction" used in the present application includes the upper direction and the lower direction, and does not mean a specific one of the upper direction and the lower direction.

[0055] Embodiments are explained with reference to examples shown in the accompanying drawings. In the drawings, the same or corresponding constituent elements are assigned the same reference numerals. In addition, in the explanation of the following embodiments, repeated recitation of the same or corresponding constituent elements can be omitted. However, even if the recitation of the constituent elements is omitted, it does not mean that the constituent element is not included in a certain embodiment.

[0056] The embodiments explained below and the examples shown in the drawings relate to a connector for electrically connecting two electronic devices. In the applicable case of the connector of the embodiments, one of the two electronic devices can be a detection device, and the other of the two electronic devices can be a detected device detected by the detection device. The connector of the embodiments can be used for electrical connection between the detection device and the detected device at the time of electrical detection of the detected device. For example, the connector of the embodiments can be used for final electrical detection of a semiconductor device in post-processing in a manufacturing method of the semiconductor device, but examples of applying the connector of the embodiments are not limited thereto.

[0057] Figure 1 An example in which a connector according to an embodiment is applied is shown. Figure 1 A connector and an electronic device in contact with the connector are schematically shown, Figure 1 The shapes shown are merely examples selected for understanding the embodiments.

[0058] Referring to Figure 1 The connector 10 according to an embodiment is a sheet-like structure provided between two electronic devices. In Figure 1 In the example shown, one of the two electronic devices can be a detection apparatus 20, and the other can be a device under test 30 detected by the detection apparatus 20.

[0059] As one example, the connector 10 can be mounted on a test socket 40, and can be provided on the detection apparatus 20 through the test socket 40. The test socket 40 can be removably mounted to the detection apparatus 20. The test socket 40 accommodates the device under test 30, which is carried to the detection apparatus 20 in a manual manner or by a carrying apparatus, and can align the device under test 30 with respect to the connector 10. In detecting the device under test 30, the connector 10 is in contact with the detection apparatus 20 and the device under test 30 in a vertical direction VD, and electrically connects the detection apparatus 20 and the device under test 30 to each other.

[0060] The device under test 30 can be a semiconductor device in which a semiconductor IC chip and a plurality of terminals are packaged into a hexahedral form using a resin material. The device under test 30 has a plurality of terminals on a lower side thereof. The terminals of the device under test 30 can be ball-shaped terminals and land-shaped terminals having a height smaller than the ball-shaped terminals. For example, the device under test 30 can have only first terminals 31 which are ball-shaped. Alternatively, the device under test 30 can have the first terminals 31 which are ball-shaped and second terminals 32 which are land-shaped. Alternatively, the device under test 30 can have only the second terminals 32 which are land-shaped.

[0061] The detection apparatus 20 can detect various operational characteristics of the device under test 30. The detection apparatus 20 can have a board on which detection is performed, and can have a detection circuit 21 for detecting the device under test on the board. Further, the detection circuit 21 has a plurality of terminals 22 electrically connected to the terminals of the device under test through the connector 10. The terminals 22 of the detection apparatus 20 can transmit an electrical test signal and can receive a response signal.

[0062] The connector 10 can be configured to be capable of contacting the terminals 22 of the testing device 20 through the test socket 40. In testing the tested device 30, the connector 10 electrically connects the terminals 31, 32 of the tested device and the terminals 22 of the testing device corresponding thereto in the vertical direction VD, and the testing of the tested device 30 is performed by the testing device 20 through the connector 10.

[0063] At least a portion of the connector 10 can be composed of an elastic substance. In order to test the tested device 30, a pressure P can be applied downward on the connector 10 in the vertical direction VD by a mechanical device or manually. By the pressure P, the terminals 31, 32 of the tested device and the terminals 22 of the testing device can be in contact in the vertical direction VD through the connector 10. In addition, a portion of the connector 10 can be elastically deformed in the downward direction and the horizontal direction HD by the pressure P. When the pressure P is removed, the portion of the connector 10 can return to its original shape.

[0064] Referring to Figure 1 , the connector 10 includes at least one elastic conductive portion 110, a support portion 120, and an insulating portion 130. The elastic conductive portion 110 extends in the vertical direction VD and is configured to be capable of conducting electricity in the vertical direction VD. The support portion 120 is disposed in the horizontal direction HD orthogonal to the vertical direction VD. The support portion 120 constitutes one face (for example, a lower surface of the connector) of the connector 10 in the vertical direction VD. The support portion 120 extends in the horizontal direction HD and supports and maintains the elastic conductive portion 110 in the vertical direction VD. The insulating portion 130 is combined with the support portion 120 in the vertical direction VD. For example, the insulating portion 130 is disposed on the upper side of the support portion 120. The thickness of the insulating portion 130 in the vertical direction can be less than or greater than the protrusion height of the elastic conductive portion 110 protruding from the support portion 120. The insulating portion 130 has at least one through-hole 133 into which the elastic conductive portion 110 is inserted in the vertical direction VD, and the through-hole 133 is bored in the insulating portion 130 in the vertical direction VD. The elastic conductive portion 110 and the insulating portion 130 are separated by a gap 140 formed in the through-hole 133 and enabling the elastic conductive portion 110 to be elastically deformed.

[0065] The elastic conductive portion 110 contacts the first terminal 31 or the second terminal 32 of the device under test at its upper end and contacts the terminal 22 of the testing device at its lower end. Accordingly, a conductive path is formed in the vertical direction with the elastic conductive portion 110 as a medium between the terminal of the device under test corresponding to the elastic conductive portion 110 and the terminal 22 of the testing device. Therefore, the testing signal of the testing device can be transmitted from the terminal 22 to the first terminal 31 or the second terminal 32 of the device under test 30 through the elastic conductive portion 110, and the response signal of the device under test 30 can be transmitted from the first terminal 31 and the second terminal 32 to the terminal 22 of the testing device 20 through the elastic conductive portion 110. The upper end of the elastic conductive portion 110 can be flush with the upper surface 131 of the insulating portion 130, or can be slightly protruded from the upper surface of the insulating portion 130, or can be located lower than the upper surface of the insulating portion 130.

[0066] The connector 10 can include a plurality of elastic conductive portions 110. The planar arrangement of the plurality of elastic conductive portions 110 can be various depending on the arrangement of the first terminal 31 and the second terminal 32 of the device under test 30. For example, the elastic conductive portions 110 can be arranged in one row or a plurality of rows in the insulating portion 130.

[0067] Referring to Figures 2 to 17 a connector according to an embodiment will be described. Figures 2 to 17 The shape of the connector, the shape of the elastic conductive portion, the shape of the elements constituting the elastic conductive portion, the shape of the support portion, and the shape of the insulating portion are schematically shown. Figures 2 to 17 The shapes shown are only examples selected for the understanding of the embodiments.

[0068] Figure 2 FIG. 1 is a cross-sectional view schematically showing a part of a connector according to a first embodiment of the present application, Figure 3 FIG. 2 is an exploded cross-sectional view schematically showing Figure 2 a part of the connector shown in FIG. 1. Figure 4 FIG. 3 is a plan view schematically showing Figure 2 a part of the connector shown in FIG. 1, Figure 5 FIG. 4 is a cross-sectional view schematically showing Figure 4 an operating state of a part of the connector shown in FIG. 1. Referring to Figures 2 to 5 a connector according to the first embodiment will be described.

[0069] In the connector 10, the elastic conductive portion 110 performs signal transmission in the vertical direction VD between the testing device and the device under test. The elastic conductive portion 110 can have a cylindrical shape extending in the vertical direction VD, but the shape of the elastic conductive portion is not limited to the cylindrical shape.

[0070] The elastic conductive portion 110 contacts the terminal of the device under test at its upper end and the terminal of the detection device at its lower end. Accordingly, a vertical conductive path is formed between the terminal of the device under test and the terminal of the detection device, corresponding to one elastic conductive portion 110, using the elastic conductive portion 110 as a medium. The test signal from the detection device can be transmitted from the terminal of the detection device to the terminal of the device under test via the elastic conductive portion 110, and the response signal from the device under test can also be transmitted from the terminal of the device under test to the terminal of the detection device via the elastic conductive portion 110.

[0071] In one embodiment, each elastic conductive portion 110 includes a plurality of conductive materials 111 and elastic materials 112. The plurality of conductive materials 111 are conductively contacting each other in the vertical direction VD and are assembled along the vertical direction VD, for example, in a cylindrical shape. The plurality of conductive materials 111 that are conductively contacting each other in the vertical direction VD form a conductor, which performs signal transmission in the vertical direction VD within the elastic conductive portion 110. For example, the conductor composed of the plurality of conductive materials 111 may have a cylindrical shape, in which the size of the lower end may be larger than the size of the middle.

[0072] As an example, such as Figure 2 As shown, the conductive material 111 can be particles. The particles of the conductive material 111 can be composed of a highly conductive metallic material. Alternatively, the particles of the conductive material 111 can have a form in which the highly conductive metallic material is coated onto a core composed of an elastic resin material or a metallic material. As another example, the conductive material 111 can be an elongated fiber or wire, and the fiber or wire can be composed of metal or carbon.

[0073] The elastic material 112 is in a hardened state and is elastic. The elastic material 112 holds a plurality of conductive materials 111 in a vertical direction VD, such that the plurality of conductive materials 111 form the shape of the conductor. The elastic material 112 may fill the spaces between the plurality of conductive materials 111. The elastic material 112 and the plurality of conductive materials 111 are integrally formed to constitute an elastic conductive portion 110. The elastic material 112 may be insulating. For example, the elastic material 112 may comprise hardened silicone rubber. Alternatively, a conductive elastic material may be used as the elastic material 112.

[0074] The elastic conductive portion 110, including the elastic material 112, is elastic and capable of elastic deformation in the vertical direction VD and the horizontal direction HD. (See reference...) Figure 1 As described above, pressure P is applied to connector 10. That is, when testing the device under test, the first terminal 31 or the second terminal 32 of the device under test (refer to...) Figure 1) The elastic conductive portion 110 is pressed downward. Hereinafter, a state in which the elastic conductive portion 110 is pressed by the terminal of the device under test is referred to as a pressurized state of the elastic conductive portion. The pressurized state of the elastic conductive portion can indicate a state in which the elastic conductive portion is pressed by the terminal of the device under test in the vertical direction and elastically deformed. In the pressurized state of the elastic conductive portion, the elastic conductive portion 110 can be elastically deformed to be compressed downward while slightly expanding in the horizontal direction HD. When the pressure applied to the connector by the device under test is removed, the elastic conductive portion 110 can elastically recover from the pressurized state to its original shape. Hereinafter, a free state in which the elastic conductive portion 110 is not applied with pressure is referred to as a non-pressurized state of the elastic conductive portion. The non-pressurized state of the elastic conductive portion can mean a state in which the terminal of the device under test does not press the elastic conductive portion in the vertical direction, that is, a state in which the pressure in the vertical direction is not applied to the elastic conductive portion and the elastically deformed portion maintains its original shape. In the connector of the embodiment, the elastic conductive portion 110 can be reversibly deformed to the non-pressurized state and the pressurized state.

[0075] In the connector 10, the support portion 120 is located on a side facing the detection device. The support portion 120 is provided to constitute a horizontal plane of the connector 10 in the horizontal direction HD and functions as a support body that supports one elastic conductive portion or a plurality of elastic conductive portions in the vertical direction VD. In the connector of the embodiment, at least one elastic conductive portion 110 and the support portion 120 or a plurality of elastic conductive portions 110 and the support portion 120 can be formed to be implemented as an integrated structure. Therefore, the plurality of elastic conductive portions 110 and the support portion 120 formed to be integrated can constitute one conductive module that performs conduction in the vertical direction. The connector of the embodiment can have one or more of the conductive modules.

[0076] The support portion 120 extends in the horizontal direction HD and is integrated with a portion near the lower end of the elastic conductive portion 110 in the horizontal direction HD. The support portion 120 is coupled to the lower end portion of the elastic conductive portion 110 so that the thickness of the support portion 120 in the vertical direction across a part of the region of the length of the elastic conductive portion 110 in the vertical direction near the lower end of the elastic conductive portion 110. The support portion 120 separates and insulates the plurality of elastic conductive portions 110 in the horizontal direction HD. The interval between the elastic conductive portions 110 supported by the support portion 120 can correspond to the interval (i.e., pitch) between the terminals of the device under test. The lower end of the elastic conductive portion 110 protrudes downward from the lower surface 121 of the support portion 120. Alternatively, the elastic conductive portion 110 can be formed so that the lower end thereof does not protrude from the lower surface of the support portion 120.

[0077] The support portion 120 can be composed of a substance having insulating properties or a substance having insulating properties and elasticity. As an example, the support portion 120 can be a film provided on a horizontal plane orthogonal to the vertical direction VD. As an example, the film constituting the support portion 120 can include polyimide, but the material constituting the support portion 120 is not limited thereto. As another example, the support portion 120 can include the same substance as the elastic substance 112 of the elastic conductive portion 110.

[0078] As described above, the elastic conductive portion 110 and the support portion 120 formed as one body constitute one conductive module, and the connector of the embodiment can have one or more conductive modules. The conductive modules can be removably coupled to the insulating portion 130. In this embodiment, a plurality of elastic conductive portions 110 and support portions 120 constitute a first conductive module 151. The plurality of elastic conductive portions 110 in the first conductive module 151 protrude upward from one support portion 120, and thus the first conductive module 151 has one support portion 120 and a plurality of elastic conductive portions 110. As shown in FIG. 1, the elastic conductive portions 110 in the first conductive module 151 are configured not to protrude upward from the insulating portion 130. Figure 2

[0079] In the connector 10, the insulating portion 130 is located on a side facing the device under test. The insulating portion 130 can be formed as one elastic body. The insulating portion 130 can be removably coupled to the support portion 120. For example, as shown in FIG. 1, the support portion 120 and the insulating portion 130 can be coupled by bonding the upper surface 122 of the support portion 120 to the lower surface 132 of the insulating portion 130. The coupling of the support portion 120 and the insulating portion 130 can be performed by an adhesive bonding method using an adhesive, but is not limited thereto. Figure 3

[0080] The insulating portion 130 can be formed in a film form or a block form having a predetermined thickness. The insulating portion 130 can be composed of a substance having insulating properties or a substance having insulating properties and elasticity. As an example, the insulating portion 130 can be composed of polyimide. Specifically, the insulating portion 130 can include a polyimide film. The insulating portion 130 composed of polyimide has cold resistance and heat resistance, and thus can effectively prevent deformation due to temperature changes. As another example, the insulating portion 130 can be composed of silicone rubber. The insulating portion 130 composed of silicone rubber can have a better elastic recovery force. The material constituting the insulating portion 130 is not limited to the foregoing examples, and any material having insulating properties and elasticity can be used as the material of the insulating portion 130.

[0081] ​​The insulating portion 130 has a plurality of through holes 133 into which the elastic conductive portion 110 is inserted in the vertical direction VD. The through holes 133 are through the insulating portion 130 in the vertical direction VD, and extend from the upper surface 131 of the insulating portion 130 to the lower surface 132 of the insulating portion 130 in the vertical direction VD. The thickness of the insulating portion 130 in the vertical direction can correspond to most of the length of the elastic conductive portion 110 in the vertical direction VD. The elastic conductive portion 110 is inserted into the through holes 133 from the bottom to the top in a state of being supported by the supported portion 120. Accordingly, in a state in which the elastic conductive portion 110 is accommodated in the through holes 133 in the vertical direction VD, the insulating portion 130 faces the device under test.

[0082] The shape of the through holes 133 in the horizontal direction can correspond to the cross-sectional shape of the elastic conductive portion 110. When the elastic conductive portion 110 has a cylindrical shape, the shape of the through holes 133 in the horizontal direction can be substantially circular.

[0083] In the connector of the embodiment, the size in the horizontal direction of the through holes 133 is larger than the size in the horizontal direction of the elastic conductive portion 110. A gap 140 is formed between the inner surface of the through hole 133 and the outer surface of the elastic conductive portion 110 as a space formed by a part or all of the inner surface of the through hole 133 and a part or all of the outer surface of the elastic conductive portion 110. In the non-pressurized state of the elastic conductive portion, the shape of the gap 140 in the horizontal direction can be a circular ring shape (for example, a shape in which an inner circle and an outer circle are arranged concentrically). Alternatively, in the non-pressurized state of the elastic conductive portion, the shape of the gap 140 in the horizontal direction can be a shape in which the inner circle of the circular ring shape is inscribed in the outer circle. Such a shape can occur when a part of the elastic conductive portion is slightly tilted in the horizontal direction in the actual product of the connector, and a part of the outer surface of such an elastic conductive portion contacts a part of the inner surface of the through hole.

[0084] In the non-pressurized state of the elastic conductive portion 110, one elastic conductive portion 110 located in one through hole 133 does not contact the through hole 133 in a part of the outer surface thereof where the gap 140 is located in the diameter direction DD and the circumferential direction CD. When the gap 140 has the aforementioned circular ring shape, the elastic conductive portion 110 does not contact the through hole 133 in the entire gap 140. In the non-pressurized state of the elastic conductive portion, one elastic conductive portion 110 and the insulating portion 130 are separated in the region of the gap 140 formed between one through hole 133 and the elastic conductive portion 110 corresponding thereto, that is, in the non-pressurized state of the elastic conductive portion, the gap 140 separates the through hole 133 and the elastic conductive portion 110 corresponding thereto in the diameter direction DD and maintains substantially constant in the vertical direction VD. In contrast, in the pressurized state of the elastic conductive portion, the gap 140 can have a shape that changes in the vertical direction VD. As described above, the gap 140 can be formed in the elastic conductive portion 110 and the insulating portion 130.Figure 3 and Figure 4 As shown in FIG. 1, the diametric direction DD indicates a diametric direction of the center axis CA passing through the center of one of the through holes in the vertical direction, and the circumferential direction CD indicates a circumferential direction with respect to the center axis CA. The gap 140 can be formed in the vertical direction VD and the horizontal direction HD between the through hole 133 and the corresponding elastic conductive portion 110, and in the diametric direction DD and the circumferential direction CD, and extend in the circumferential direction CD along the outer surface of the elastic conductive portion 110. The gap 140 can be filled with air.

[0085] In the connector 10, the gap 140 allows elastic deformation of each elastic conductive portion 110 within each through hole 133. The gap 140 allows each elastic conductive portion 110 to elastically deform in the vertical direction and the horizontal direction without being constrained by the through hole 133 of the insulating portion 130. That is, the elastic conductive portion 110 can freely elastically deform in the through hole 133 except for the portion fixed to the support portion 120. The dimensions of the elastic conductive portion 110, the through hole 133, and the gap 140 can be specified so that the elastic conductive portion 110 elastically deforms flexibly.

[0086] Figure 4 An example of the elastic conductive portion 110, the through hole 133, and the gap 140 is schematically shown, Figure 5 An example of the operating state of the elastic conductive portion 110 is schematically shown. Figure 4 and Figure 5 The left side of FIG. 2 illustrates the aforementioned non-pressurized state of the elastic conductive portion. Figure 5 The right side of FIG. 2 illustrates the aforementioned pressurized state of the elastic conductive portion. Referring to Figure 4 and Figure 5 The elastic deformation of the elastic conductive portion 110 and the gap are described.

[0087] The through hole 133 can have a circular shape in the horizontal direction HD, and the inner surface of the through hole 133 can have a cylindrical shape extending in the vertical direction VD. The maximum width of the through hole 133 can be defined as a diameter D1 passing through the center axis CA in the diametric direction DD. The elastic conductive portion 110 can have a circular shape in the horizontal direction HD, and thus the outer surface of the elastic conductive portion 110 can have a cylindrical shape extending in the vertical direction VD. The maximum width of the elastic conductive portion 110 can be defined as a diameter D2 passing through the center of the elastic conductive portion in the diametric direction DD. Therefore, in the non-pressurized state of the elastic conductive portion, the gap 140 formed between the outer surface of the elastic conductive portion 110 and the inner surface of the through hole 133 can have an annular shape or a cylindrical shape extending in the vertical direction VD.

[0088] In this annular or cylindrical gap, the gap 140 can have a width W1 in the diameter direction DD of the central axis CA of the through-hole 133. In the non-pressurized state of the elastic conductive portion, the width W1 of the gap 140 in the diameter direction can actually remain constant in the vertical direction VD. That is, in the non-pressurized state of the elastic conductive portion, the width W1 of the gap in the diameter direction can remain substantially constant between the upper end portion of the elastic conductive portion 110 and the joint between the elastic conductive portion 110 and the support portion 120 in the vertical direction VD. Further, in the non-pressurized state of the elastic conductive portion, the width W1 of the gap in the diameter direction can remain substantially constant in the circumferential direction CD, or can narrow or widen in the circumferential direction CD. On the other hand, in the actual product of the connector, due to manufacturing errors or assembly problems, some points or surfaces on the outer surface of the elastic conductive portion 110 can come into contact with some points or surfaces on the inner surface of the through-hole 133, and the size of the gap 140 can change in the vertical direction VD, the diameter direction DD, or the circumferential direction CD. However, it should be understood that such contact and change conform to the case where the gap remains substantially constant in the non-pressurized state of the elastic conductive portion.

[0089] The width W1 of the gap 140 in the diameter direction can be determined in consideration of the flexible deformation and elastic recovery of the elastic conductive portion 110 in the vertical direction VD and the horizontal direction HD. For example, in the diameter direction DD with respect to the central axis CA of the through-hole 133, the ratio of the diameter D1 of the through-hole 133 to the diameter D2 of the elastic conductive portion 110 can be 1:0.8 to 1:0.95. Accordingly, in the diameter direction DD with respect to the central axis CA of the through-hole 133, the ratio of the diameter D1 of the through-hole 133 to the width W1 of the gap 140 can be in the range of 1:0.025 to 1:0.1. In the actual product of the connector, by calculating the average diameter of the through-hole 133 as the diameter D1 and the average diameter of the elastic conductive portion 110 as the diameter D2, it can be confirmed whether the gap 140 exists or not and the numerical range of the gap 140. In this case, in the calculation of the average diameter, a method of calculating by measuring the volume of the through-hole 133 and the elastic conductive portion 110 can be applied.

[0090] As shown on the left side of FIG. 10, in the non-pressurized state of the elastic conductive portion 110, the width W1 of the gap 140 in the diameter direction can be constant along the vertical direction VD. Within the gap 140, most of the elastic conductive portion 110 not combined with the support portion 120 can be elastically deformed in the vertical direction and the horizontal direction. As shown on the right side of FIG. 10, in the pressurized state of the elastic conductive portion 110, the width W1 of the gap 140 in the diameter direction can be constant along the vertical direction VD. Within the gap 140, most of the elastic conductive portion 110 not combined with the support portion 120 can be elastically deformed in the vertical direction and the horizontal direction. Figure 5 Figure 5 ​right side, in the pressed state of the elastic conductive portion 110 by the first terminal 31 of the detected device 30, the elastic conductive portion 110 can be reduced in the vertical direction and can be expanded in the horizontal direction HD (or the aforementioned diameter direction). However, since the elastic conductive portion 110 and the insulating portion 130 are separated on the outer surface of the elastic conductive portion 110 where the gap 140 is present, the elastic conductive portion 110 can be elastically deformed flexibly without being restrained by the insulating portion 130. That is, the gap 140 provides a space that allows the elastic conductive portion 110 to be elastically deformed in the vertical direction and the horizontal direction. When the terminal of the detected device presses the elastic conductive portion 110, the width Wl of the gap 140 in the diameter direction can be the smallest at the middle portion of the gap 140 in the vertical direction. When the force of pressing the detected device is strong, the width Wl can be almost non-existent in the middle portion of the gap 140 in the vertical direction. When the detected device is removed from the elastic conductive portion 110, the elastic conductive portion 110 can be elastically recovered from the pressed state shown on the right side to the non-pressed state shown on the left side. Figure 5 Figure 5

[0091] As described above, since the gap 140 separates the elastic conductive portion 110 and the insulating portion 130 from each other, the gap 140 can improve the operability of the elastic conductive portion 110 and improve the elastic recovery force of the elastic conductive portion 110 when detecting the detected device. Furthermore, even when the detected device is pressed on the elastic conductive portion 110 with a small pressure, the elastic conductive portion 110 can be elastically deformed easily and exhibit high conductivity. In addition, since the plurality of elastic conductive portions 110 can work individually, the plurality of elastic conductive portions 110 can be in contact with the terminals of a plurality of detected devices having different heights of terminals as appropriate.

[0092] In an embodiment, in a state where the elastic conductive portion 110 is inserted in the through-hole 133, the upper end of the elastic conductive portion 110 is located at a position lower than the upper surface 131 of the insulating portion 130. Thereby, for example, since the first terminal 31 (refer to Figure 1 ) of the detected device in a spherical shape can be guided to the elastic conductive portion 110 through the upper end portion of the through-hole 133, the insulating portion 130 can also serve to guide the first terminal of the detected device to the elastic conductive portion. In some embodiments, an inclined surface can be formed between the upper surface 131 of the insulating portion 130 and the through-hole 133 to guide the first terminal of the detected device.

[0093] The dimensions of the elastic conductive portion 110 and the through-hole 133 in the vertical direction can be determined to allow the elastic conductive portion 110 to be elastically deformed flexibly with the presence of the gap 140. As Figure 2 ​​As shown, the upper end of a portion of the elastic conductive portion 110 can be positioned lower than the upper surface 131 of the insulating portion 130. The insulating portion 130 can have a thickness T1 in the vertical direction VD, the elastic conductive portion 110 can have an insertion thickness T2 corresponding to the length from the upper surface 122 of the support portion 120 to the upper end of the elastic conductive portion 110, and a thickness difference T3 in the vertical direction VD from the upper surface 131 of the insulating portion 130 to the upper end of the elastic conductive portion 110 can be formed. The ratio of the thickness T1 of the insulating portion 130 to the insertion thickness T2 of the elastic conductive portion 110 can be 1:0.7 to 1:0.9. Therefore, the ratio of the thickness T1 of the insulating portion 130 to the thickness difference T3 can be in the range of 1:0.1 to 1:0.3. That is, when the thickness of the insulating portion 130 is 100%, the thickness difference T3 can be selected in the range of 10% to 30% of the thickness of the insulating portion 130.

[0094] The connector according to the foregoing embodiment can be manufactured by combining the conductive module composed of the plurality of elastic conductive portions and the support portion with the insulating portion formed with the through hole. Referring to Figure 3 、 Figure 6a and Figure 6b An example of manufacturing the connector according to an embodiment is described.

[0095] The conductive module composed of the elastic conductive portion and the support portion and the insulating portion are manufactured and prepared, respectively. Referring to Figure 6a The conductive module can be manufactured using a molding die 51 and a liquid molding material 52 (for example, as shown in FIG. 6). Referring to Figure 2 and Figure 3The liquid molding material 52 includes a liquid substance of an elastic substance 112 constituting the elastic conductive portions and a plurality of conductive substances 111 dispersed in the liquid substance. The molding mold 51 has a molding hole 53 corresponding to the shape of the plurality of elastic conductive portions 110 at each position where the elastic conductive portions 110 are formed. In addition, a magnet 54 is provided in the molding mold 51, which can apply a magnetic field in the vertical direction in the molding hole 53 where the elastic conductive portions 110 are molded. The liquid molding material 52 is injected into the molding hole 53 of the molding mold 51. In addition, a film member 55 constituting the support portions 120 is put into the molding mold, and a through hole is formed in the film member at each position where the elastic conductive portions 110 are formed. By the magnetic field applied by the magnet 54, the plurality of conductive substances 111 are gathered and contacted in the vertical direction VD, thereby forming the elastic conductive portions 110 having a conductive body that performs conduction in the vertical direction. Then, the elastic substance of the liquid molding material 52 is hardened by a predetermined hardening process. Accordingly, the first conductive module 151 having the plurality of elastic conductive portions 110 is molded, which are integrated with the support portions 120 and protrude from the support portions 120. Then, the conductive module is separated from the molding mold 51.

[0096] Next, referring to Figure 6b , an insulating member 61 such as a film or a block composed of an insulating substance constituting the insulating portions 130 is prepared, and a through hole 133 is formed in the insulating member 61 by laser or by drilling, thereby manufacturing the insulating portions 130 of the connector.

[0097] Next, referring to Figure 3 , the first conductive module 151 is combined with the insulating portions 130 so that each elastic conductive portion 110 is inserted into the corresponding through hole 133. As an example, the combination of the first conductive module 151 and the insulating portions 130 can be performed by an adhesive method using an adhesive. The first conductive module 151 and the insulating portions 130 combined with each other constitute the connector 10 as shown in Figure 2 . The first conductive module 151 having the plurality of elastic conductive portions 110 protruding from the support portions 120 is combined with the insulating portions 130, so that the efficiency of the manufacturing process can be improved and the manufacturing cost can be reduced. In addition, if necessary, the first conductive module 151 is removed from the insulating portions 130 so that only the conductive module having an elastic conductive portion damaged can be replaced among the plurality of elastic conductive portions provided in the connector.

[0098] Figure 7 An exploded sectional view showing a part of a connector according to a second embodiment of the present application is shown. Referring to Figure 7 , the connector 10 further includes an insulating film 160 attached to the upper surface of the insulating portions 130.

[0099] As Figure 7 shown in the embodiment, the insulating portion 130 can be composed of silicone rubber. An insulating film 160 is attached to the upper surface of the insulating portion 130 to cover the upper surface of the insulating portion 130, and a terminal guide hole 161 corresponding to the through-hole 133 penetrates the insulating film 160 in the vertical direction VD. As an example, the insulating film 160 can include a film composed of a polyimide film having insulating properties or a polymer having insulating properties. The insulating film 160 can prevent deformation of the insulating portion 130 composed of silicone rubber and improve the durability of the insulating portion 130. In addition, the insulating film 160 can prevent the detection device from being adhered to the insulating portion 130 composed of silicone rubber. As another example, the insulating film 160 can be applied to the insulating portion 130 composed of polyimide.

[0100] Figure 8 To show a cross-sectional view of a portion of the connector according to the third embodiment of the present application, Figure 9 To show Figure 8 a plan view of a portion of the connector shown.

[0101] Referring to Figure 8 and Figure 9 , the elastic conductive portion 110 further includes an insulating protection portion 113 that insulates the plurality of conductive substances 111 that are capable of conductively contacting in the vertical direction VD. The insulating protection portion 113 is formed to surround the plurality of conductive substances 111 that are collected in the vertical direction VD in the circumferential direction along the vertical direction VD. Alternatively, the insulating protection portion 113 is formed to surround the conductor composed of the conductive substances 111 that are collected in the vertical direction VD in the circumferential direction. The height of the insulating protection portion 113 in the vertical direction VD is the same as the height of the conductor composed of the conductive substances 111 in the vertical direction VD. The insulating protection portion 113 can be composed of the same substance as the elastic substance 112 of the elastic conductive portion 110, or can be composed of an elastic insulating substance different from the elastic substance 112.

[0102] As Figure 9 shown, the cross-sectional shape of the insulating protection portion 113 can be a substantially circular ring shape. Therefore, the insulating protection portion 113 can have a ring shape extending in the vertical direction VD. Figure 9 The conductor of the conductive substances and the insulating protection portion are shown to have a concentric circular shape with respect to the center axis CA, but Figure 9 the shape shown is merely exemplary. In an actual product of the connector, some of the insulating protection portions of the plurality of elastic conductive portions 110 can have an eccentric shape with respect to the center axis CA.

[0103] Referring to Figure 6aThe outer surface of the insulating protection portion 113 becomes the outer surface of the elastic conductive portion 110. In the diameter direction DD with respect to the center axis CA of the through-hole 133, the insulating protection portion 113 has a width W2. The width W2 of the insulating protection portion 113 can be constant or can vary in the circumferential direction CD. In the elastic conductive portion 110 having the insulating protection portion 113, in the diameter direction with respect to the center axis CA of the through-hole 133, the ratio of the diameter D2 of the elastic conductive portion 110 to the diameter D3 of the portion of the elastic conductive portion occupied by the plurality of conductive substances 111 can be determined to be in the range of 1:0.6 to 1:0.9. In connection therewith, the portion of the elastic conductive portion occupied by the plurality of conductive substances 111 indicates a conductor composed of the plurality of conductive substances 111 collected in the vertical direction. Accordingly, in the diameter direction with respect to the center axis CA of the through-hole 133, the ratio of the diameter D2 of the elastic conductive portion 110 to the width W2 of the insulating protection portion 113 can be in the range of 1:0.05 to 1:0.2. The width W2 of the insulating protection portion can be determined in consideration of the conductivity of the conductor of the conductive substance 111 and the elastic deformation of the elastic conductive portion 110.

[0104] When the conductive module of the elastic conductive portion and the support portion is molded, the insulating protection portion 113 can be formed on the elastic conductive portion 110. In order to mold the insulating protection portion 113, the size of the molding hole in the molding die for molding the elastic conductive portion can have a size larger than the size of the molding hole in the embodiment shown in Figure 6a . Alternatively, the size of the magnet for applying a magnetic field to the liquid molding material can have a size smaller than the size of the magnet for collecting the conductive substance in the vertical direction in the embodiment shown in Figure 10 . When a magnetic field is applied to the liquid molding material in the vertical direction, the plurality of conductive substances will be collected in the middle along the vertical direction within the molding hole for molding the elastic conductive portion provided in the molding die, and the elastic substance present around the plurality of conductive substances collected in the middle can form the insulating protection portion 113.

[0105] Figure 10 A cross-sectional view showing a portion of a connector according to a fourth embodiment of the present application is shown. Referring to Figure 10 , the elastic conductive portion 110 of the connector includes a conductive spring 114.

[0106] The conductive spring 114 is provided in the elastic conductive portion 110 such that the direction in which it elastically deforms is the vertical direction VD. The conductive spring 114 can have, for example, the shape of a compression coil spring. The conductive spring 114 is maintained in the vertical direction by the elastic substance 112 and can elastically deform and elastically recover together with the elastic substance 112 when the elastic conductive portion 110 elastically deforms.

[0107] InFigure 10 In the illustrated embodiment, the conductive spring 114 is provided in the elastic conductive portion 110 so as to be in contact with the plurality of conductive substances 111. As another embodiment, the elastic conductive portion 110 can include only the elastic substance 112 and the conductive spring 114. As described above, the elastic conductive portion 110 including the conductive spring 114 that is capable of elastically deforming in the vertical direction can have more improved elastic restoring force, conductivity, and durability.

[0108] In Figure 6a In the illustrated example, the insulating portion 130 can be composed of polyimide or silicone rubber. In addition, the upper end of the elastic conductive portion 110 can be protruded upward from the upper surface of the insulating portion 130, but can also be located at a position lower than the upper surface of the insulating portion 130.

[0109] The conductive module having the elastic conductive portion 110 including the conductive spring 114 can be manufactured by a method similar to the method described with reference to Figure 11 The conductive module having the elastic conductive portion 110 including the conductive spring 114 can be manufactured by a method similar to the method described with reference to

[0110] Figure 12 FIG. 6 is a cross-sectional view schematically showing a part of a connector according to a fifth embodiment of the present application, Figure 11 FIG. 7 is an exploded cross-sectional view schematically showing a part of the connector shown in FIG. 6. Figure 11 FIG. 8 is a cross-sectional view schematically showing a part of the connector shown in FIG. 7.

[0111] Figure 12 and Figure 1 The connector 10 shown in FIG. 1 can be applied to a second terminal having a land shape (refer to FIG. 2). Figure 13The device being tested. The resilient conductive portion 210 of the connector has a structure similar to that of the aforementioned resilient conductive portion 110. The resilient conductive portion 210 has an upper end portion 215 that protrudes upward from the upper surface 131 of the insulating portion 130, thereby contacting the aforementioned land-shaped second terminal. The upper end portion 215 is composed of the aforementioned conductive material and the aforementioned elastic material. The portion of the resilient conductive portion 210, excluding the upper end portion 215, is separated from the through hole 133 by a gap 140, which is a space formed by a portion or all of the outer surface of the resilient conductive portion 210 and a portion or all of the inner surface of the through hole 133. The ratio of the diameter of the portion of the resilient conductive portion 210, excluding the upper end portion 215, to the diameter of the through hole 133 can be determined within the aforementioned ratio range. The ratio of the diameter of the through hole 133 to the width in the diametrical direction of the gap 140 can be determined within the aforementioned ratio range. Similar to the support portion in the aforementioned embodiment, the support portion 120 is configured to support the elastic conductive portion 210 and is integrally formed with it near the lower end of the elastic conductive portion 210. That is, the support portion 120 and the elastic conductive portion 210 are integrally formed, with the elastic conductive portion 210 protruding upwards from the support portion 120. This elastic conductive portion 210 and the support portion 120 can be integrally formed to constitute a second conductive module 152, which is removably attached to the insulating portion 130.

[0112] Figure 13 This is a partial anatomical view illustrating a portion of the connector according to a sixth embodiment of the present invention. (Refer to...) Figure 1 In connector 10, the resilient conductive portion 210 that contacts the second terminal of the land-shaped connector includes the aforementioned insulating protective portion 113. In this embodiment, the insulating protective portion 113 may be provided on the portion of the resilient conductive portion 210 other than the upper end portion 215.

[0113] For reference Figures 14 to 17 The device under test 30 may have only a spherical first terminal 31 or only a land-shaped second terminal 32. Alternatively, the device under test 30 may have a spherical first terminal 31 in some areas and a land-shaped second terminal 32 in other areas. A connector of one embodiment can be applied to a device under test having both a spherical first terminal and a land-shaped second terminal. Such an example connector is illustrated in... Figure 14 middle.

[0114] Figure 15 To illustrate a cross-sectional view of a portion of the connector according to the seventh embodiment of this disclosure, Figure 14 To show Figures 16a to 16c A partial anatomical view of a portion of the connector is shown. Figure 14 For the purpose of illustrating manufacturing Figure 14 A plan view of an example connector shown.

[0115] Reference Figure 1 The connector 10 includes the aforementioned elastic conductive portion 110 and the aforementioned elastic conductive portion 210, both capable of conducting electricity in the vertical direction. The elastic conductive portion 110 is connected to the aforementioned elastic conductive portion 210 in the vertical direction VD. Figure 1 The spherical first terminal 31 shown is in contact, and the elastic conductive part 210 is in contact with the vertical direction VD. Figure 14 The second terminal 32 of the landform shown is in contact. Therefore, Figures 2 to 4 The connector 10 shown can be applied to detect devices having both a spherical first terminal and a land-shaped second terminal. That is, connector 10 can be used to detect devices having a spherical first terminal in one area and a land-shaped second terminal in another area. The elastic conductive portion 110 of this embodiment can be used with reference to... Figure 11 The elastic conductive portion 110 described herein is constructed identically, and the elastic conductive portion 210 of this embodiment can be the same as that described in the reference. Figure 12 and Figure 14 The elastic conductive part 210 described herein is constructed in the same manner.

[0116] The connector in this embodiment is configured such that multiple resilient conductive portions correspond to the first and second terminals according to their terminal positions. In connector 10, multiple resilient conductive portions 110 and a support portion 120 integrally formed with the multiple resilient conductive portions 110 constitute a first conductive module 151. The first conductive module 151 includes resilient conductive portions 110 configured not to protrude from the insulating portion 130 in the vertical direction. Additionally, in connector 10, multiple resilient conductive portions 210 and a support portion 120 integrally formed with the multiple resilient conductive portions 210 constitute a second conductive module 152. The second conductive module 152 includes resilient conductive portions 210 configured to protrude from the insulating portion 130 in the vertical direction. The insulating portion 130 may be configured as a single component, in which a through hole 133 is formed in the vertical direction VD, and the resilient conductive portions 110 and 210 are inserted into and accommodated in the through hole 133.

[0117] like Figure 15 and Figure 6aAs shown, for electrical connection to the spherical first terminal, the elastic conductive part 110 of the first conductive module 151 is inserted into and accommodated in the through-hole 133 from bottom to top, and the support part 120 of the first conductive module 151 is combined with the lower surface 132 of the insulating part 130. A gap 140 is formed between the outer surface of the elastic conductive part 110 and the inner surface of the through-hole 133, and the gap 140 allows elastic deformation of the elastic conductive part 110. In addition, for electrical connection to the land-shaped second terminal, the elastic conductive part 210 of the second conductive module 152 is inserted into and accommodated in the through-hole 133 from bottom to top, and the support part 120 of the second conductive module 152 is combined with the lower surface 132 of the insulating part 130. A gap 140 is formed between the outer surface of the elastic conductive part 210 and the inner circumferential surface of the through-hole 133, and the gap 140 allows elastic deformation of the elastic conductive part 210. The support part 120 of the first conductive module 151 and the support part 120 of the second conductive module 152 can be located at the same level with respect to the lower surface of the insulating part 130. In addition, the support part 120 of the first conductive module 151 and the support part 120 of the second conductive module 152 can be arranged adjacent to each other in the horizontal direction HD. Since the first conductive module 151 and the second conductive module 152 are combined to the insulating part 130, the connector 10 can be configured to correspond to the required positions of different types of terminals.

[0118] The first conductive module 151 including the elastic conductive part 110 and the support part 120 and the second conductive module 152 including the elastic conductive part 210 and the support part 120 can be molded by referring to the molding method described above. Figures 16a to 16c The separately molded first conductive module and the second conductive module can be applied to the connector according to the required positions of the terminals of the device under test. Figure 16a An example of applying different conductive modules according to the required positions of the terminals of the device under test is shown.

[0119] Referring to Figure 16b , the first area A1 is an area for the elastic conductive part 110 for electrical connection to the spherical first terminal, and the second area A2 is an area for the elastic conductive part 110 for electrical connection to the land-shaped second terminal. Referring to Figure 16c , the plurality of first conductive modules having the elastic conductive part 110 can be separately manufactured and combined with the insulating part 130 to be arranged in the first area A1. Referring to Figure 16a , the plurality of second conductive modules having the elastic conductive part 210 can be separately manufactured and combined with the insulating part 130 to be arranged in the second area A2. The plurality of first conductive modules for the first area A1 and the plurality of second conductive modules for the second area A2 are combined to the insulating part 130, thereby providing a connector 10 for testing a device under test having terminals of spherical and land shapes as shown in Figure 17 .

[0120] As described above, in one embodiment of the connector 10, multiple conductive modules are employed. Each conductive module has multiple elastic conductive portions, each of which possesses the characteristics required for each region of the device being tested. Since the conductive modules are combined with the insulating portion to form the connector, the connector can be manufactured using an efficient manufacturing method and with reduced manufacturing costs. Furthermore, when a portion of the elastic conductive portion of the connector is damaged, the corresponding conductive module detaches from the insulating portion, and a new conductive module can be combined with the insulating portion. Therefore, the elastic conductive portion belonging to the partially damaged area can be easily replaced.

[0121] Figure 17 This is a partial anatomical view illustrating a portion of the connector according to an eighth embodiment of the present invention. (Refer to...) ​ The connector 10 can be configured such that the support portion 120 of the first conductive module 151 and the support portion 120 of the second conductive module 152 partially overlap in the vertical direction VD. As an example, the support portion 120 of the second conductive module 152 can be disposed on the support portion 120 of the first conductive module 151. The support portion 120 of the second conductive module can be coupled to the lower surface 132 of the insulating portion 130, and the support portion 120 of the first conductive module can be coupled to the lower surface 121 of the support portion 120 of the second conductive module. In a structure in which multiple supports overlap in the vertical direction, the elastic conductive portion 110 and the elastic conductive portion 210 can be located only in their respective conductive modules. Alternatively, in a structure in which multiple supports overlap in the vertical direction, the supports can also overlap in the horizontal direction. In this example, the elastic conductive portion 110 can be inserted into the through hole 133 through the support portion 120 of the second conductive module, and the elastic conductive portion 210 can also be inserted into the support portion 120 of the first conductive module at its lower end. As described above, the first conductive module 151 and the second conductive module 152 can be configured such that the support portion supporting the elastic conductive portion overlaps in the vertical direction, and the spherical first terminal and the terrestrial second terminal can correspond to the area of ​​the device being tested arranged in a narrower region.

[0122] Although the technical concept of the present invention has been illustrated by the examples shown in the foregoing embodiments and accompanying drawings, various substitutions, modifications, and changes can be made without departing from the technical concept and scope of the present invention that will be understood by those skilled in the art. Furthermore, such substitutions, modifications, and changes should be considered to fall within the scope of the appended claims.

Claims

1. A connector, the connector being a connector for electrical connection, and comprising: at least one elastic conductive portion extending in a vertical direction; a support portion supporting the elastic conductive portion; an insulating portion having at least one through hole and combined with the support portion, the elastic conductive portion being inserted in the through hole in the vertical direction, wherein a gap is formed between an inner surface of the through hole and an outer surface of the elastic conductive portion, the gap separating the through hole and the elastic conductive portion along a circumferential direction of the through hole, and wherein the gap is a space filled with air formed by at least a portion of the inner surface and at least a portion of the outer surface.

2. The connector according to claim 1, wherein the support portion is a film provided on a horizontal plane orthogonal to the vertical direction, an upper surface of the support portion being bonded to a lower surface of the insulating portion.

3. The connector according to claim 2, wherein the film includes polyimide.

4. The connector according to claim 2, further comprising an insulating film having terminal guide holes corresponding to the through holes therethrough, the insulating film being attached to an upper surface of the insulating portion.

5. The connector according to claim 1, wherein the insulating portion includes a polyimide film.

6. The connector according to claim 1, wherein a ratio of a diameter of the through hole to a diameter of the elastic conductive portion in a diametrical direction with respect to a central axis of the through hole is in a range of 1:0.8 to 1:0.

95.

7. The connector according to claim 1, wherein an upper end of the elastic conductive portion is located at a position lower than an upper surface of the insulating portion, a ratio of a thickness of the insulating portion to a thickness difference between the upper surface of the insulating portion and the upper end of the elastic conductive portion is in a range of 1:0.1 to 1:0.

3.

8. The connector according to claim 1, wherein the elastic conductive portion includes a plurality of conductive substances collected along the vertical direction and an elastic substance maintaining the plurality of conductive substances in the vertical direction.

9. The connector according to claim 8, wherein the elastic conductive portion further includes an insulating protection portion surrounding the plurality of conductive substances in a horizontal direction along the vertical direction.

10. The connector according to claim 9, wherein a ratio of a diameter of the elastic conductive portion to a diameter of a portion of the elastic conductive portion occupied by the plurality of conductive substances in a diametrical direction with respect to a central axis of the through hole is in a range of 1:0.6 to 1:0.

9.

11. The connector according to claim 1 or 8, wherein the elastic conductive portion includes a conductive spring elastically deformable in the vertical direction.

12. The connector according to claim 1, wherein the elastic conductive portion is integrated with the support portion, constituting at least one conductive module removably combined with the insulating portion.

13. The connector of claim 12, wherein the at least one conductive module includes a first conductive module, the first conductive module including the elastic conductive portion configured not to protrude from the insulating portion in the vertical direction.

14. The connector of claim 13, wherein the at least one conductive module includes a second conductive module, the second conductive module including the elastic conductive portion configured to protrude from the insulating portion in the vertical direction.

15. The connector of claim 14, wherein the support portion of the first conductive module and the support portion of the second conductive module are positioned close to each other in a horizontal direction orthogonal to the vertical direction, in combination with the insulating portion.

16. The connector of claim 14, wherein the support portion of the first conductive module and the support portion of the second conductive module partially overlap in the vertical direction.

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