actuator

Abstract

An actuator is provided with a plurality of sets of flexible electrodes having flexibility and base electrodes whose opposing surfaces to the flexible electrodes are covered with an insulating layer, and is configured to deform the flexible electrodes in a manner approaching the opposing surfaces by applying a voltage between the flexible electrodes and the base electrodes. Each of the sets is arranged on the same axis, and adjacent sets are joined to each other. The axis intersects the opposing surfaces of the respective base electrodes of the sets. The respective base electrodes of the sets are divided into a plurality of electrode portions insulated from each other. The voltage is applied independently to the electrode portions.

Description

Technical Field

[0001] This invention relates to actuators. Background Technology

[0002] Soft actuators are known to use the deformation of a flexible component as a driving force to perform mechanical work (e.g., Japanese Patent No. 5714200).

[0003] Japanese Patent No. 5714200 describes an actuator in which an electroactive polymer is sandwiched between a pair of electrodes. In the actuator described in Japanese Patent No. 5714200, the pair of electrodes attract each other due to the Coulomb force of the charge accumulated by applying a voltage between them, causing the electroactive polymer to deform and thus generating displacement between the electrodes. Summary of the Invention

[0004] The problem that the invention aims to solve

[0005] The actuator described in Japanese Patent No. 5714200 can only achieve simple actions that move linearly along the direction of the distance between electrodes or along the direction of the electrodes, and it is difficult to achieve complex actions.

[0006] Technical solutions for solving the problem

[0007] The present invention provides an actuator capable of performing complex actions.

[0008] One aspect of the present invention relates to an actuator having multiple sets of flexible electrodes and base electrodes whose opposing surfaces are covered by an insulating layer. The flexible electrodes are configured to deform in a manner close to their opposing surfaces by applying a voltage between them and the base electrodes. Each of the multiple sets is arranged on the same axis, and adjacent sets are connected to each other. The axis intersects the opposing surfaces of the respective base electrodes of each set. Each of the multiple sets of base electrodes is divided into multiple mutually insulated electrode portions, to which the voltage is applied independently.

[0009] With this structure, multiple sets of flexible electrodes can deform into various shapes depending on the electrode portion to which a voltage is applied. When an output component that outputs power from the actuator to the outside is mounted on the flexible electrodes, torques of various directions and magnitudes act on the output component based on the deformation of the flexible electrodes. The output component can be displaced into various postures. Therefore, the actuator of the present invention can realize complex actions.

[0010] In the aforementioned actuator, the base electrode may be formed as a dome with a apex at a position opposite to the flexible electrode, and the plurality of electrode portions may be arranged along the circumferential direction of the axis. Alternatively, the voltage may be applied sequentially to the plurality of electrode portions along the circumferential direction.

[0011] In this way, with the output component mounted on the flexible electrode, the output component is displaced by rotating in the circumferential direction of the shaft. The actuator is able to achieve rotational motion. Therefore, the actuator can achieve complex actions.

[0012] In the aforementioned actuator, the flexible electrodes of one group of adjacent sets can be connected to the base electrodes of another group via a connecting member, which can also be formed of an elastomer.

[0013] In this way, when the output component is mounted on a flexible electrode, the displacement of the output component can be increased, and it can easily return to its initial position. The actuator can increase the amount of motion and increase the speed of motion. Therefore, the actuator can achieve high output.

[0014] In the aforementioned actuator, the flexible electrodes of one group of adjacent sets can be connected to the base electrodes of another group via a connecting component, which can also be formed of a conductor.

[0015] In this way, the flexible electrodes of one group and the base electrodes of another group in adjacent sets can be at the same potential. This simplifies the actuator's drive circuitry. Therefore, the actuator can easily perform complex actions.

[0016] In the aforementioned actuator, the flexible electrodes of one group of adjacent sets may be arranged opposite to each other and may be connected by a connecting member, which may also be formed of an insulator.

[0017] In this way, when the order of voltage application to the multiple electrode portions of the base electrodes forming one group of adjacent groups is reversed compared to the order of voltage application to the multiple electrode portions of the base electrodes forming another group of adjacent groups, each flexible electrode undergoes torsional deformation about a central axis. The actuator is capable of torsional motion about the central axis. The actuator is capable of performing complex actions.

[0018] Invention Effects

[0019] According to the present invention, an actuator capable of performing complex actions can be provided. Attached Figure Description

[0020] The features, advantages, and technical and industrial significance of exemplary embodiments of the present invention will now be described with reference to the accompanying drawings, wherein like symbols denote like elements, and wherein:

[0021] Figure 1 This is a diagram schematically showing the structure of the actuator in Embodiment 1.

[0022] Figure 2 yes Figure 1 A three-dimensional view of the substrate electrode is shown.

[0023] Figure 3 It means in Figure 1 The diagram shows an actuator with a voltage applied between the flexible electrode and the base electrode.

[0024] Figure 4 It means in Figure 3 The diagram shows the actuator in the case where the voltage application is stopped after the situation is shown.

[0025] Figure 5 It is a schematic representation of the support. Figure 1 The diagram shows the support components for the flexible electrode and the substrate electrode.

[0026] Figure 6 It is a schematic representation Figure 5 Figures showing other examples of support components.

[0027] Figure 7 This is a diagram illustrating the structure of the actuator in Embodiment 2.

[0028] Figure 8 This is a diagram illustrating the structure of the actuator in Embodiment 3.

[0029] Figure 9 This means that in Figure 8 The diagram shows an actuator with a voltage applied between the flexible electrode and the base electrode.

[0030] Figure 10 This is a diagram illustrating the structure of the actuator in Embodiment 4.

[0031] Figure 11 This is an explanation Figure 10 The diagram shows an actuator with a voltage applied between the flexible electrode and the base electrode. Detailed Implementation

[0032] Hereinafter, embodiments of the present invention will be described using the accompanying drawings. Structures given the same reference numerals in each embodiment have the same function in each embodiment unless specifically mentioned otherwise, and their descriptions are omitted.

[0033] In this embodiment, the first flexible electrode 10, the second flexible electrode 30, and the third flexible electrode 50, which will be described later, are collectively referred to as "flexible electrode 2". In this embodiment, the first base electrode 20, the second base electrode 40, and the third base electrode 60, which will be described later, are collectively referred to as "base electrode 3".

[0034] Implementation Method 1

[0035] use Figures 1-6 The actuator 1 of Embodiment 1 will be described.

[0036] Figure 1 This is a diagram schematically showing the structure of the actuator 1 in Embodiment 1. Figure 2 yes Figure 1 A three-dimensional view of the substrate electrode 3 is shown. Figure 2 The diagram is illustrated using the first base electrode 20, which is one of the base electrodes 3. Figure 2 The diagram of insulating layer 22 is omitted in the image.

[0037] Actuator 1 is a soft actuator that performs mechanical work by deforming a flexible electrode 2. Unlike conventional soft actuators that are powered by the deformation of a dielectric elastomer held between a pair of electrodes, actuator 1 is powered by the deformation of the flexible electrode 2 itself. Actuator 1 can be applied to various actuators used in robots, assistive suits that reduce the burden on the user's body, artificial muscles, or artificial joints.

[0038] In embodiment 1, the actuator 1 deforms the flexible electrode 2 by applying a Coulomb force generated by a voltage between the two electrodes, the flexible electrode 2 and the base electrode 3, so that the flexible electrode 2 approaches the opposing surface of the base electrode 3 (see reference). Figure 3 Then, actuator 1 stops applying voltage between the two electrodes, causing flexible electrode 2 to return to its original shape (see reference). Figure 4 By repeatedly applying and stopping the voltage, actuator 1 can achieve a swinging motion.

[0039] The actuator 1 comprises multiple sets of flexible electrodes 2 and base electrodes 3. The number of these sets is arbitrary. The actuator 1 of this embodiment includes a first set C1 consisting of a first flexible electrode 10 and a first base electrode 20, a second set C2 consisting of a second flexible electrode 30 and a second base electrode 40, and a third set C3 consisting of a third flexible electrode 50 and a third base electrode 60. In the actuator 1 of this embodiment, a voltage is applied between the flexible electrode 2 and the base electrode 3 in each of the multiple sets C1 to C3.

[0040] Each of the multiple groups C1 to C3 is arranged on the same axis, and adjacent groups are connected to each other. Specifically, each of the multiple groups C1 to C3 is arranged in series on axis A. The adjacent first group C1 and the second group C2 are connected by connecting member 111. The adjacent second group C2 and the third group C3 are connected by connecting member 112.

[0041] Axe A intersects with the opposing surfaces 21, 41, and 61 of the base electrodes 3 and flexible electrodes 2 of each of the multiple sets C1 to C3. Specifically, Axe A is orthogonal to the opposing surface 21 of the first base electrode 20 and the first flexible electrode 10, the opposing surface 41 of the second base electrode 40 and the second flexible electrode 30, and the opposing surface 61 of the third base electrode 60 and the third flexible electrode 50.

[0042] The first flexible electrode 10 is formed of a flexible conductor. The flexibility of the first flexible electrode 10 is such that it is deformed by the Coulomb force generated by applying a voltage between it and the first base electrode 20, and returns to its original shape (the shape before deformation, i.e., the shape before the voltage was applied) when the application of the voltage is stopped.

[0043] The first flexible electrode 10 can also be formed using conductive rubber or conductive gel. Examples of conductive rubber include, for instance, an elastomer formed by mixing conductive materials. Examples of conductive materials include, for instance, micropowders of carbon black, acetylene black, or carbon nanotubes, metallic micropowders of silver or copper, or core-shell structured conductive micropowders formed by coating metals onto insulators such as silica or alumina through sputtering. Examples of conductive gels include, for instance, functional gel materials that retain solvents such as water or humectants, electrolytes, and additives within a three-dimensional polymer matrix. Examples of such functional gel materials include, for instance, ST-gel (registered trademark) from Sekisui Chemicals Co., Ltd.

[0044] The first flexible electrode 10 is formed in a three-dimensional shape. In this embodiment, the first flexible electrode 10 is formed in a polyhedral shape, such as a hexahedron. The first flexible electrode 10 has an end face 11 extending along the direction of axis A and an end face 12. The end face 11 of the first flexible electrode 10 is the face opposite to the first base electrode 20. The other end face 12 of the first flexible electrode 10 is the face opposite to the end face 11 in the direction extending along axis A. The other end face 12 of the first flexible electrode 10 is opposite to the second base electrode 40 of the second group C2. The other end face 12 of the first flexible electrode 10 is connected to the second base electrode 40 via a connecting member 111.

[0045] The first base electrode 20 is formed of a rigid conductive material. Examples of materials used to form the first base electrode 20 include metallic materials such as iron, copper, or aluminum. Alternatively, the first base electrode 20 can be formed by covering one side of a substrate made of a non-metallic material such as ceramic, which has heat resistance, rigidity, and insulation, with a conductive metal film. The side of the substrate covering the metal film is the side facing the first flexible electrode 10.

[0046] The opposing surface 21 of the first base electrode 20 and the first flexible electrode 10 is covered by an insulating layer 22. The insulating layer 22 is formed using a ferroelectric material made of ceramic to reliably maintain the charge accumulated on the first base electrode 20 by applying a voltage between the first flexible electrode 10 and the first base electrode 20. Specifically, the insulating layer 22 is formed using a ferroelectric material having a perovskite structure. Examples of ferroelectric materials with a perovskite structure include, for example, barium titanate (BaTiO3), lead titanate (PbTiO3), lead zirconate titanate (Pb(Zr,Ti)O3), lanthanum lead zirconate titanate ((Pb,La)(Zr,Ti)O3), strontium titanate (SrTiO3), barium strontium titanate ((Ba,Sr)TiO3), or potassium sodium niobate ((NaK)NbO3). Substances such as CaZrO3 and BaSnO3 may also be dissolved in barium titanate.

[0047] Furthermore, the material used to form the insulating layer 22 is preferably a material with a high relative permittivity, capable of generating a Coulomb force that deforms the first flexible electrode 10. The relative permittivity of the insulating layer 22 can be, for example, 1000 or higher by using ceramics (fine ceramics). Barium titanate has a relative permittivity of approximately 1000 to 10000. Lead zirconate titanate has a relative permittivity of 500 to 5000. Strontium titanate has a relative permittivity of 200 to 500. These ferroelectric materials with perovskite structures are materials with high relative permittivity.

[0048] The first base electrode 20 is formed in a dome shape with a apex at a position opposite to the first flexible electrode 10. That is, as shown in the figure... Figure 2 As shown, the opposing surface 21 of the first base electrode 20 and the first flexible electrode 10 is formed into a dome shape, such as a hemispherical surface. The first base electrode 20 is arranged along axis A with the central axis of the dome-shaped opposing surface 21. The opposing surface 21 of the first base electrode 20 is inclined relative to the first flexible electrode 10. A space 23 is formed between the first flexible electrode 10 and the first base electrode 20. The space 23 is a space for receiving the first flexible electrode 10, which deforms in a manner close to the opposing surface 21 of the first base electrode 20, when a voltage is applied between the first flexible electrode 10 and the first base electrode 20.

[0049] The first base electrode 20 is divided into multiple electrode portions 25a and 25b by dividing its opposing surface 21. The multiple electrode portions 25a and 25b are insulated from each other by plate-shaped insulating portions 26, such as semicircular plates. Through the plate-shaped insulating portions 26, the multiple electrode portions 25a and 25b are independently charged with respect to the first flexible electrode 10. One electrode portion 25a and the other electrode portion 25b can also be divided into shapes that are symmetrical with respect to a plane containing axis A.

[0050] The second flexible electrode 30 and the third flexible electrode 50 are configured in the same way as the first flexible electrode 10. That is, one end face 31 and the other end face 32 of the second flexible electrode 30 are configured in the same way as one end face 11 and the other end face 12 of the first flexible electrode 10. One end face 51 and the other end face 52 of the third flexible electrode 50 are configured in the same way as one end face 11 and the other end face 12 of the first flexible electrode 10.

[0051] However, the other end face 32 of the second flexible electrode 30 is connected to the third base electrode 60 via the connecting member 112. On the other end face 52 of the third flexible electrode 50, an output member 120 is installed instead of the connecting members 111 and 112. The output member 120 is a member that outputs the power of the actuator 1 to the outside of the actuator 1. The output member 120 is a driven member that moves with the movement of the actuator 1. The output member 120 is appropriately designed according to the specifications of the external device that is the object to which the power of the actuator 1 is output.

[0052] The second base electrode 40 and the third base electrode 60 are constructed in the same manner as the first base electrode 20. Specifically, the opposing surface 41 of the second base electrode 40 is constructed in the same manner as the opposing surface 21 of the first base electrode 20. The insulating layer 42 covering the opposing surface 41 of the second base electrode 40 is constructed in the same manner as the insulating layer 22 of the first base electrode 20. The opposing surface 61 of the third base electrode 60 is constructed in the same manner as the opposing surface 21 of the first base electrode 20. The insulating layer 62 covering the opposing surface 61 of the third base electrode 60 is constructed in the same manner as the insulating layer 22 of the first base electrode 20.

[0053] Furthermore, the second base electrode 40, like the electrode portion 25a constituting one of the first base electrode 20 and the other electrode portion 25b, has an electrode portion 45a and an electrode portion 45b that are divided relative to the plane including axis A. The third base electrode 60, like the electrode portion 25a constituting one of the first base electrode 20 and the other electrode portion 25b, has an electrode portion 65a and an electrode portion 65b that are divided relative to the plane including axis A. Each electrode portion 25a, 45a, and 65a of the multiple sets of base electrodes 3 (C1 to C3) is disposed on one side of the plane including axis A, in the normal direction. Each electrode portion 25b, 45b, and 65b of the multiple sets of base electrodes 3 (C1 to C3) is disposed on the other side of the plane including axis A, in the normal direction.

[0054] Connecting component 111 connects the first flexible electrode 10 of the first group C1 and the second base electrode 40 of the second group C2. Connecting component 112 connects the second flexible electrode 30 of the second group C2 and the third base electrode 60 of the third group C3. That is, the flexible electrodes 2 of one group and the base electrodes 3 of another group of adjacent groups are connected by connecting components 111 and 112. Connecting components 111 and 112 are formed of an insulator. Preferably, connecting components 111 and 112 can also be formed of an insulator that can be elastically deformed, such as insulating rubber or an insulating spring. In other words, connecting components 111 and 112 can also be formed of an elastic material with insulating properties.

[0055] Actuator 1 is connected to drive circuits 70-90 that apply voltage between flexible electrode 2 and base electrode 3 to drive actuator 1. Drive circuits 70-90 are composed of a first drive circuit 70 that applies voltage between first flexible electrode 10 and first base electrode 20, a second drive circuit 80 that applies voltage between second flexible electrode 30 and second base electrode 40, and a third drive circuit 90 that applies voltage between third flexible electrode 50 and third base electrode 60.

[0056] The first drive circuit 70 includes: power supplies 71a and 71b composed of DC voltage sources, etc.; wiring 72a and 72b connecting each component of the first drive circuit 70 to the first flexible electrode 10 and the first base electrode 20; switches 73a to 76b composed of semiconductor elements, etc.; and a control unit 77 composed of integrated circuits, etc.

[0057] The first flexible electrode 10 is connected to one of the positive and negative terminals of the power supply 71a via wiring 72a, and is also connected to the frame ground (or ground). The electrode portion 25a of the first base electrode 20 is connected to the other of the positive and negative terminals of the power supply 71a via wiring 72a, and is also connected to the frame ground. Switch 73a is connected between the first flexible electrode 10 and the power supply 71a. Switch 74a is connected between the first flexible electrode 10 and the frame ground. Switch 75a is connected between the electrode portion 25a and the power supply 71a. Switch 76a is connected between the electrode portion 25a and the frame ground.

[0058] Additionally, the first flexible electrode 10 is connected to one of the positive and negative terminals of the power supply 71b via wiring 72b, and is also grounded to the frame. The electrode portion 25b of the first base electrode 20 is connected to the other of the positive and negative terminals of the power supply 71b via wiring 72b, and is also grounded to the frame. A switch 73b is connected between the first flexible electrode 10 and the power supply 71b. A switch 74b is connected between the first flexible electrode 10 and the frame ground. A switch 75b is connected between the electrode portion 25b and the power supply 71b. A switch 76b is connected between the electrode portion 25b and the frame ground.

[0059] The control unit 77 is a circuit that controls each component of the first drive circuit 70. The control unit 77 switches the application and cessation of the voltage between the first flexible electrode 10 and the first base electrode 20 by controlling the on / off states of switches 73a to 76b. Furthermore, the control unit 77 can control the magnitude of the applied voltage by controlling the output voltage of power supplies 71a and 71b. Therefore, the control unit 77 can control the magnitude of the Coulomb force acting on the first flexible electrode 10 and the amount of deformation of the first flexible electrode 10. Thus, the control unit 77 can control the displacement of the output component 120. Moreover, the control unit 77 can control the deformation speed of the first flexible electrode 10 and the displacement speed of the output component 120 by controlling the speed of applying and stopping the switching voltage. Furthermore, the control unit 77 can control the deformation timing of the first flexible electrode 10 and the displacement timing of the output component 120 by controlling the timing of applying and stopping the switching voltage.

[0060] The second driving circuit 80 and the third driving circuit 90 are configured in the same way as the first driving circuit 70.

[0061] Figure 3 It means in Figure 1 The diagram shows the actuator 1 when a voltage is applied between the flexible electrode 2 and the base electrode 3.

[0062] like Figure 3As shown, in the first drive circuit 70, when switches 73a and 75a are controlled to be on and switches 74a and 76a are controlled to be off, a voltage is applied between the first flexible electrode 10 and the electrode portion 25a of the first base electrode 20. In this case, the first flexible electrode 10, connected to the positive terminal of the power supply 71a, carries a positive charge, and the electrode portion 25a, connected to the negative terminal of the power supply 71a, carries a negative charge. The insulating layer 22 covering the opposing surface 21 of the electrode portion 25a undergoes dielectric polarization. The area near the interface between the insulating layer 22 and the electrode portion 25a carries a positive charge, and the area near the surface on the opposite side of the interface (space 23 side) carries a negative charge. A Coulomb force is generated between the insulating layer 22 of the electrode portion 25a and the first flexible electrode 10. Through this Coulomb force, the first flexible electrode 10 is attracted by the insulating layer 22 of the electrode portion 25a. That is, through this Coulomb force, the first flexible electrode 10 deforms in a manner close to the opposing surface 21 of the electrode portion 25a of the first base electrode 20. Through the deformation of the first flexible electrode 10, the second base electrode 40 connected to the first flexible electrode 10 is displaced in a manner inclined along the opposing surface 21 of the electrode portion 25a. Figure 3 The torque, as indicated by arrow M1, acts on output component 120. Therefore, output component 120... Figure 3 As shown by arrow M1, it is displaced in an inclined manner relative to axis A.

[0063] In both the second drive circuit 80 and the third drive circuit 90, similarly to the first drive circuit 70, when the on / off state of the switch is controlled, the second flexible electrode 30 and the third flexible electrode 50 deform in the same way as the first flexible electrode 10. As a result, the output component 120 can be displaced in a manner that allows for further tilting relative to axis A.

[0064] Figure 4 It means Figure 3 The diagram shows the actuator 1 in the case where the voltage application is stopped after the situation shown.

[0065] like Figure 4 As shown, in Figure 3Following the situation described, in the first drive circuit 70, when switches 73a and 75a are controlled to be in the off state and switches 74a and 76a are controlled to be in the on state, the application of voltage between the first flexible electrode 10 and the electrode portion 25a of the first base electrode 20 stops. In this case, the charge accumulated between the first flexible electrode 10 and the electrode portion 25a of the first base electrode 20 is released to the frame ground. The first flexible electrode 10 is deformed by the restoring force of the first flexible electrode 10 in a manner that separates from the opposing surface 21 of the electrode portion 25a, and returns to its original shape. Through the restoration of the first flexible electrode 10, the second base electrode 40 connected to the first flexible electrode 10 returns to its initial position before displacement (i.e., before the aforementioned voltage was applied).

[0066] In each of the second drive circuit 80 and the third drive circuit 90, similarly to the first drive circuit 70, when the on / off state of the switch is controlled, the second flexible electrode 30 and the third flexible electrode 50 respectively return to their original shape, just like the first flexible electrode 10. By restoring the first flexible electrode 10, the second flexible electrode 30, and the third flexible electrode 50 to their original shape, the output component 120 can return to its initial position.

[0067] exist Figure 4 Following the situation shown, in the first drive circuit 70, when switches 73b and 75b are controlled to be in the ON state and switches 74b and 76b are controlled to be in the OFF state, a voltage is applied between the first flexible electrode 10 and the electrode portion 25b of the first base electrode 20. The first flexible electrode 10 deforms in a manner close to the opposing surface 21 of the electrode portion 25b of the first base electrode 20. The output component 120 directs the voltage to the electrode portion 25b of the first base electrode 20. Figure 3 The displacement is in the opposite direction to the arrow M1 shown. Similarly to the first drive circuit 70, in both the second and third drive circuits 80, when the on / off state of the switch is controlled, the output component 120 can be displaced in the opposite direction to the arrow M1. Figure 3 The arrow M1 shown indicates a further tilt in the opposite direction of displacement.

[0068] Then, in the first drive circuit 70, when switches 73b and 75b are controlled to be in the off state and switches 74b and 76b are controlled to be in the on state, the application of voltage between the first flexible electrode 10 and the electrode portion 25b of the first base electrode 20 is stopped. The first flexible electrode 10 deforms and returns to its original shape by separating from the opposing surface 21 of the electrode portion 25b through the restoring force of the first flexible electrode 10. In the second drive circuit 80 and the third drive circuit 90, similarly to the first drive circuit 70, when the on / off state of the switches is controlled, the second flexible electrode 30 and the third flexible electrode 50 each return to their original shape in the same way as the first flexible electrode 10. The output component 120 can return to its initial position.

[0069] As described above, the drive circuits 70-90 can simultaneously apply voltage to one of the electrode portions 25a, 45a, and 65a constituting the base electrodes 3 of each of the multiple sets of C1-C3, and then simultaneously stop applying the voltage. Furthermore, the drive circuits 70-90 can simultaneously apply voltage to the other electrode portions 25b, 45b, and 65b constituting the base electrodes 3 of each of the multiple sets of C1-C3, and then simultaneously stop applying the voltage. In this way, the drive circuits 70-90 switch the application and cessation of voltage by separating one of the electrode portions 25a, 45a, and 65a constituting the base electrodes 3 of each of the multiple sets of C1-C3 from the other electrode portions 25b, 45b, and 65b. Therefore, the actuator 1 can realize an oscillating action that causes the output member 120 to oscillate in a direction intersecting axis A.

[0070] However, the drive circuits 70-90 may not simultaneously apply or stop applying voltage to the electrode portions 25a, 45a, and 65a of each of the multiple sets of C1-C3 base electrodes 3. For example, the drive circuits 70-90 may apply or stop applying voltage to the electrode portions 25a, 45a, and 65a of one side in the order of the first set of C1 furthest from the output component 120 toward the third set of C3 on which the output component 120 is mounted. The same applies to the electrode portions 25b, 45b, and 65b of the other side. As a result, the actuator 1 can make the output component 120 swing more smoothly.

[0071] As described above, the actuator 1 of Embodiment 1 has multiple sets of flexible electrodes 2 (C1 to C3) and base electrodes 3. Each set of C1 to C3 is arranged on the same axis A, and adjacent sets are connected to each other. The axis A intersects with the opposing surfaces 21, 41, and 61 of the base electrodes 3 of each set of C1 to C3 and the flexible electrodes 2. The base electrodes 3 of each set of C1 to C3 are divided into multiple mutually insulated electrode portions. A voltage is applied independently to each of the multiple electrode portions.

[0072] With this structure, the flexible electrodes 2 of each of the multiple sets of C1 to C3 can be deformed in a manner close to a portion of the multiple electrode portions constituting the base electrodes 3 of each of the multiple sets of C1 to C3. That is, the flexible electrodes 2 of each of the multiple sets of C1 to C3 can be deformed into various shapes depending on the electrode portion to which a voltage is applied. In the output component 120 connected to the flexible electrodes 2, torques of various directions and magnitudes are applied according to the deformation of the flexible electrodes 2. Moreover, the output component 120 can be displaced into various postures. Thus, the actuator 1 of Embodiment 1 can realize complex movements of the output component 120, such as a swinging motion. Furthermore, since each of the multiple sets of C1 to C3 is arranged on the same axis A, the overall deformation of the flexible electrodes 2 is increased, and therefore the displacement of the output component 120 can be increased. Thus, the actuator 1 of Embodiment 1 can increase the work output from the output component 120 to the outside. Therefore, the actuator 1 of Embodiment 1 can not only realize complex movements, but also achieve high output.

[0073] Furthermore, in Embodiment 1, adjacent sets of flexible electrodes 2 and base electrodes 3 of the actuator 1 are connected by connecting members 111 and 112 formed of an elastomer.

[0074] Therefore, the displacement of the output component 120 can be further increased when voltage is applied. The actuator 1 can increase the amount of action. In addition, the output component 120 can easily return to its initial position when the voltage application stops, so even if the application and cessation of voltage are repeated in a short cycle, it can quickly respond to this and move rapidly. The actuator 1 can achieve a high operating speed. Therefore, the actuator 1 of Embodiment 1 can achieve a further high output.

[0075] Figure 5 It is a schematic representation of the support. Figure 1 The diagram shows the support component 130 for the flexible electrode 2 and the base electrode 3. Figure 5 This represents the cross-section of actuator 1 along axis A. Figure 5 The diagrams of the multiple electrode portions and insulating portions constituting the base electrodes 3 of each of the multiple sets of C1 to C3, the insulating layers 22, 42, and 62, and the driving circuits 70 to 90 are omitted. Figure 6 Their illustrations were subsequently omitted.

[0076] The flexible electrodes 2 and the base electrode 3 of each of the multiple sets of C1 to C3 can also be made of, for example Figure 5 The support is provided by a support member 130 as shown. The support member 130 is composed of a rod-shaped member extending along axis A. The support member 130 is formed of an insulator that can elastically deform in response to the deformation of the flexible electrode 2. The support member 130 provides support by passing through multiple sets of flexible electrodes 2 (C1 to C3) and the base electrode 3 respectively.

[0077] Figure 6 It is a schematic representation Figure 5 Figures showing other examples of the support member 130.

[0078] In addition, the flexible electrodes 2 and base electrodes 3 of each of the multiple sets of C1 to C3 can also be made of, for example... Figure 6 The support member 140 is as shown. The support member 140 is composed of a cylindrical member extending along axis A. The support member 140 has: a bottomed cylindrical housing 141 that houses multiple sets of flexible electrodes 2 and base electrodes 3, respectively; a stop member 142 that closes the opening of the housing 141; and an insulating liquid 143 that fills the interior of the housing 141.

[0079] The housing 141 is formed of an insulator capable of elastically deforming in response to the deformation of the flexible electrode 2. A stop 142, such as a cap or plug formed of the insulator, prevents the insulating fluid 143 filling the interior of the housing 141 from leaking to the exterior. The insulating fluid 143 can be a non-toxic synthetic oil, mineral oil, or plant-derived insulating oil, or a machine oil such as a lubricating oil. The relative permittivity of the insulating fluid 143 is higher than that of air.

[0080] In the flexible electrode 2 and the base electrode 3 supported by the support member 140, the space between the flexible electrode 2 and the base electrode 3 is filled with an insulating liquid 143 having a high relative permittivity. Therefore, when the flexible electrode 2 and the base electrode 3 are supported by the support member 140, the actuator 1 can increase the amount of charge accumulated by applying a voltage between the two electrodes, thereby increasing the Coulomb force generated between the two electrodes. Thus, the actuator 1 can increase the deformation amount and speed of the flexible electrode 2, achieving further high output.

[0081] Furthermore, when the insulating liquid 143 is a high-viscosity machine oil, the insulating liquid 143 can also be applied to the substrate. Figure 5 The surface of the flexible electrode 2 and the base electrode 3 is supported by the support member 130 shown. Therefore, even though the flexible electrode 2 and the base electrode 3 are supported by the support member 130, the actuator 1 can increase the deformation amount and the deformation speed of the flexible electrode 2, and achieve further high output.

[0082] Implementation Method 2

[0083] use Figure 7 The actuator 1 of Embodiment 2 will be described. In the actuator 1 of Embodiment 2, the description of the same structure and operation as in the previous embodiment will be omitted.

[0084] Figure 7 This is a diagram illustrating the structure of actuator 1 in embodiment 2.

[0085] In the actuator 1 of embodiment 2, adjacent groups of flexible electrodes 2 and base electrodes 3 are connected by connecting members 113 and 114 instead of connecting members 111 and 112. Connecting member 113 connects the first flexible electrode 10 of the first group C1 and the second base electrode 40 of the second group C2. Connecting member 114 connects the second flexible electrode 30 of the second group C2 and the third base electrode 60 of the third group C3. Connecting members 113 and 114 are formed of a conductor. Preferably, connecting members 113 and 114 may also be formed of a conductor capable of elastic deformation, such as conductive rubber or a conductive spring.

[0086] In the actuator 1 of Embodiment 2, since the connecting parts 113 and 114 are formed of conductors, the first flexible electrode 10 and the second base electrode 40 are at the same potential, and the second flexible electrode 30 and the third base electrode 60 are at the same potential. Thus, the actuator 1 of Embodiment 2 can combine the first drive circuit 70, the second drive circuit 80 and the third drive circuit 90 into a drive circuit 100.

[0087] The drive circuit 100 includes: power supplies 101a and 101b configured in the same manner as the power supplies 71a and 71b of the first drive circuit 70; and wiring 102a and 102b connecting the various components of the drive circuit 100 to the flexible electrode 2 and the base electrode 3. The drive circuit 100 includes: switches 103a to 108b configured in the same manner as the switches 73a to 76b of the first drive circuit 70; and a control unit 109 configured in the same manner as the control unit 77 of the first drive circuit 70.

[0088] The first flexible electrode 10 and the third flexible electrode 50 are respectively connected to one of the positive and negative terminals of the power supply 101a via wiring 102a, and are also connected to the frame ground. The second flexible electrode 30 is connected to the other of the positive and negative terminals of the power supply 101a via wiring 102a, and is also connected to the frame ground. Switch 103a is connected between the first flexible electrode 10 and the power supply 101a. Switch 104a is connected between the first flexible electrode 10 and the frame ground. Switch 105a is connected between the third flexible electrode 50 and the power supply 101a. Switch 106a is connected between the third flexible electrode 50 and the frame ground. Switch 107a is connected between the second flexible electrode 30 and the power supply 101a. Switch 108a is connected between the second flexible electrode 30 and the frame ground.

[0089] Additionally, the first flexible electrode 10 and the third flexible electrode 50 are respectively connected to one of the positive and negative terminals of the power supply 101b via wiring 102b, and are also connected to the frame ground. The second flexible electrode 30 is connected to the other of the positive and negative terminals of the power supply 101b via wiring 102b, and is also connected to the frame ground. Switch 103b is connected between the first flexible electrode 10 and the power supply 101b. Switch 104b is connected between the first flexible electrode 10 and the frame ground. Switch 105b is connected between the third flexible electrode 50 and the power supply 101b. Switch 106b is connected between the third flexible electrode 50 and the frame ground. Switch 107b is connected between the second flexible electrode 30 and the power supply 101b. Switch 108b is connected between the second flexible electrode 30 and the frame ground.

[0090] In the drive circuit 100, when switches 103a, 105a, and 107a are controlled to be in the ON state and switches 104a, 106a, and 108a are controlled to be in the OFF state, a voltage is applied between each of the first flexible electrode 10 and the third flexible electrode 50 and the second flexible electrode 30. As described above, the first flexible electrode 10 and the second base electrode 40 are at the same potential, and the second flexible electrode 30 and the third base electrode 60 are at the same potential. Therefore, a voltage is applied between the second flexible electrode 30 and the second base electrode 40, and a voltage is applied between the third flexible electrode 50 and the third base electrode 60. The second flexible electrode 30 is deformed by the Coulomb force generated between the second flexible electrode 30 and the second base electrode 40, in a manner close to the opposing surface 41 of the electrode portion 45a of one of the second base electrode 40. The third flexible electrode 50 is deformed by the Coulomb force generated between the third flexible electrode 50 and the third base electrode 60, in a manner close to the opposing surface 61 of the electrode portion 65a of one of the third base electrode 60. As a result, the output component 120 is directed towards the... Figure 3 The arrow M1 shown is displaced in the same direction as the axis A in an inclined manner.

[0091] Then, in the drive circuit 100, when switches 103a, 105a, and 107a are controlled to be in the open state and switches 104a, 106a, and 108a are controlled to be in the closed state, the application of voltage between each of the first flexible electrode 10 and the third flexible electrode 50 and the second flexible electrode 30 is stopped. The second flexible electrode 30 and the third flexible electrode 50 respectively return to their original shape. As a result, the output component 120 returns to its initial position.

[0092] Then, in the drive circuit 100, when switches 103b to 108b are controlled in the same way as switches 103a to 108a described above, the output component 120 directs the output to the... Figure 3After being displaced in the opposite direction of arrow M1 with an inclination relative to axis A, it returns to its initial position. By repeatedly applying and stopping the voltage through the drive circuit 100 as described above, the actuator 1 of Embodiment 2, like that of Embodiment 1, can realize the action of swinging the output member 120 in a direction intersecting axis A.

[0093] As described above, the actuator 1 of Embodiment 2, by forming connecting parts 113 and 114 with conductors, can achieve complex operations in the same way as in Embodiment 1, and the structure of the drive circuit 100 can be simplified compared to Embodiment 1. Therefore, the actuator 1 of Embodiment 2 can easily achieve complex operations.

[0094] In addition, Figure 7 In the driving circuit 100 shown, no voltage is applied between the first flexible electrode 10 and the first base electrode 20. However, the driving circuit 100 can, for example, connect one electrode portion 25a of the first base electrode 20 to the other of the positive and negative terminals of the power supply 101a via wiring 102a through a switch, and connect it to the ground of the frame via the switch. Similarly, the driving circuit 100 can, for example, connect the other electrode portion 25b of the first base electrode 20 to the other of the positive and negative terminals of the power supply 101b via wiring 102b through a switch, and connect it to the ground of the frame via the switch. Thus, the actuator 1 of Embodiment 2 can apply a voltage between the first flexible electrode 10 and the first base electrode 20, and can deform the first flexible electrode 10 in a manner close to the opposing surface 21 of one electrode portion 25a or the other electrode portion 25b. Thus, the actuator 1 of Embodiment 2 can increase the displacement of the output member 120, and can achieve high output.

[0095] Implementation Method 3

[0096] use Figures 8-9 The actuator 1 of Embodiment 3 will be described. In the actuator 1 of Embodiment 3, the description of the same structure and operation as in the previous embodiments will be omitted.

[0097] Figure 8 This is a diagram illustrating the structure of actuator 1 in embodiment 3. Figure 8 Is with Figure 2 The corresponding diagram.

[0098] In the actuator 1 of embodiment 3, the base electrode 3 is divided into three or more electrode portions. The number of electrode portions is arbitrary. For example, such as... Figure 8 As shown, the first base electrode 20 in Embodiment 3 can also be divided into multiple electrode portions 25c to 25f.

[0099] The plurality of electrode portions 25c to 25f are insulated from each other by the insulating portion 26, similar to that in Embodiment 1. Voltage is applied independently to each of the plurality of electrode portions 25c to 25f in relation to the first flexible electrode 10. The plurality of electrode portions 25c to 25f are arranged along the circumferential direction of axis A. The plurality of electrode portions 25c to 25f may also be formed by equally dividing the first base electrode 20 in the circumferential direction of axis A. The voltage applied between the plurality of electrode portions 25c to 25f and the first flexible electrode 10 is applied sequentially along the circumferential direction of axis A. The second base electrode 40 and the third base electrode 60 of Embodiment 3 are also configured similarly to the first base electrode 20 of Embodiment 3.

[0100] Figure 9 This means that in Figure 8 The diagram shows the actuator 1 with a voltage applied between the flexible electrode 2 and the base electrode 3.

[0101] like Figure 9 As indicated by arrow S1, when voltage is sequentially applied to the plurality of electrode portions 25c to 25f constituting the first base electrode 20 along the circumferential direction of axis A, the first flexible electrode 10 deforms sequentially in a manner approaching the opposing surfaces 21 of each of the plurality of electrode portions 25c to 25f. When voltage is sequentially applied to the plurality of electrode portions constituting the second base electrode 40 and the third base electrode 60 in the same manner as to the electrode portions 25c to 25f, the second flexible electrode 30 and the third flexible electrode 50 deform sequentially in the same manner as the first flexible electrode 10.

[0102] The drive circuits 70-90 are capable of applying voltages sequentially applied to the multiple electrode portions constituting the base electrode 3 along the circumferential direction of axis A to each of the multiple groups C1-C3 in the same direction. Thus, as... Figure 9 As indicated by arrow M2, the output component 120 is displaced by rotating in the circumferential direction of axis A.

[0103] However, the drive circuits 70-90 do not need to simultaneously apply the voltage sequentially applied to the multiple electrode portions constituting the base electrode 3 along the circumferential direction of axis A to all groups C1-C3. Instead, they can apply the voltage separately and at timing for each group of C1-C3. For example, the drive circuits 70-90 can also apply the voltage in the order of the first group of C1 furthest from the output component 120 toward the third group of C3 on which the output component 120 is mounted. As a result, the actuator 1 can make the output component 120 rotate more smoothly.

[0104] As described above, the actuator 1 of Embodiment 3 can achieve a rotational movement that causes the output member 120 to rotate in the surrounding direction of the axis A by sequentially applying voltage to a plurality of electrode portions constituting the base electrode 3 along the circumferential direction of the axis A. Therefore, the actuator 1 of Embodiment 3 can realize complex operations of the output member 120.

[0105] Implementation Method 4

[0106] use Figures 10-11 The actuator 1 of Embodiment 4 will be described. In the actuator 1 of Embodiment 4, the description of the same structure and operation as in the previous embodiments will be omitted.

[0107] Figure 10 This is a diagram illustrating the structure of actuator 1 in embodiment 4.

[0108] In the actuator 1 of embodiment 4, adjacent sets of flexible electrodes 2 are arranged opposite each other on the same axis A and connected by a connecting member 115. For example, in the actuator 1 of embodiment 4, such as Figure 10 As shown, the first flexible electrode 10 of the first group C1 and the second flexible electrode 30 of the second group C2 are arranged opposite each other on the same axis A with a gap between them. The first flexible electrode 10 of the first group C1 and the second flexible electrode 30 of the second group C2 are connected by a connecting member 115 disposed in the gap. The output member 120 is mounted on the surface of the second base electrode 40 opposite to the opposing surface 41 in the direction extending from axis A.

[0109] In Embodiment 4, the first base electrode 20 is similarly divided into multiple electrode portions 25c to 25f arranged along the circumferential direction of axis A, as in Embodiment 3. Voltages applied between the multiple electrode portions 25c to 25f and the first flexible electrode 10 are sequentially applied along the circumferential direction of axis A. The second base electrode 40 of Embodiment 4 is also constructed in the same manner as the first base electrode 20 of Embodiment 4.

[0110] The connecting member 115 is formed of an insulator. Preferably, the connecting member 115 may also be formed of an insulator that is elastically deformable, such as insulating rubber or an insulating spring.

[0111] Figure 11 This means that in Figure 10 The diagram shows the actuator 1 with a voltage applied between the flexible electrode 2 and the base electrode 3.

[0112] like Figure 11 As indicated by arrow S2, when a voltage is sequentially applied to the plurality of electrode portions 25c to 25f constituting the first base electrode 20 along the circumferential direction of axis A, the first flexible electrode 10 deforms sequentially in a manner approaching the opposing surfaces 21 of each of the plurality of electrode portions 25c to 25f. Consequently, the second flexible electrode 30 and the second base electrode 40 of the second group C2... Figure 11 Like arrow M4, it needs to rotate in the direction of rotation around axis A.

[0113] At the same time, such as Figure 11As indicated by arrow S3, when a voltage is sequentially applied to the plurality of electrode portions constituting the second base electrode 40 along the circumferential direction of axis A, the second flexible electrode 30 deforms sequentially in a manner approaching the opposing surfaces 41 of each of the plurality of electrode portions constituting the second base electrode 40. Thus, the first flexible electrode 10 and the first base electrode 20 of the first group C1... Figure 11 Arrow M3 should rotate in the direction of rotation around axis A.

[0114] Here, as Figure 11 As shown, the order in which the voltage is applied to the first base electrode 20 (arrow S2) and the order in which the voltage is applied to the second base electrode 40 (arrow S3) are opposite to each other along the circumferential direction of axis A. In this case, since the rotation direction of the first flexible electrode 10 (arrow M3) is opposite to the rotation direction of the second flexible electrode 30 (arrow M4), the first flexible electrode 10 and the second flexible electrode 30 are torsional deformed about axis A.

[0115] That is, the drive circuits 70 and 80 apply voltages sequentially to the multiple electrode portions constituting the base electrode 3 along the circumferential direction of axis A to multiple sets of C1 and C2 in opposite directions. At this time, the drive circuits 70 and 80 simultaneously apply the same voltage to each set of C1 and C2. Thus, the actuator 1 of embodiment 4 can realize a torsional operation about axis A. In this torsional operation, the second base electrode 40, on which the output component 120 is mounted, rotates along the circumferential direction of axis A. The output component 120 is displaced along the circumferential direction of axis A in a manner that does not accompany the movement of the center of gravity as the second base electrode 40 rotates.

[0116] As described above, in the actuator 1 of Embodiment 4, adjacent sets of flexible electrodes 2 are arranged opposite each other and connected by a connecting member 115 formed of an insulator. Therefore, the actuator 1 of Embodiment 4 can realize a torsional motion about axis A. Thus, the actuator 1 of Embodiment 4 can realize complex operations of the output member 120.

[0117] Furthermore, in the actuator 1 of embodiment 4, when the connecting member 115 is formed of an insulator that can be elastically deformed, the displacement of the output member 120 can be increased, and the output member 120 can be easily restored to the initial position, thus achieving high output.

[0118] In addition, Figure 10 and Figure 11In the actuator 1 shown, the third flexible electrode 50 and the third base electrode 60 of the third group C3 are omitted. However, the actuator 1 of embodiment 4 can connect the third group C3 to the first group C1 by connecting the third flexible electrode 50 to the first base electrode 20 via the same connecting member as the connecting member 111.

[0119] The embodiments of the present invention have been described in detail above, but the present invention is not limited to the above-described embodiments, and various modifications can be made within the scope of the spirit of the present invention as described in the claims. The present invention can add the structure of one embodiment to the structure of another embodiment, replace the structure of one embodiment with another embodiment, or delete a part of the structure of one embodiment.

Claims

1. An actuator comprising a plurality of flexible electrodes and a base electrode whose opposing surface is covered by an insulating layer, the actuator being configured such that by applying a voltage between the flexible electrodes and the base electrode, the flexible electrodes deform in a manner close to the opposing surface. in, Each of the plurality of groups is configured on the same axis, adjacent groups are connected to each other, and the axis intersects the opposing surfaces of the respective base electrodes of the plurality of groups. Each of the plurality of base electrodes is divided into multiple mutually insulated electrode portions, and the voltage is applied independently to each of the multiple electrode portions. The base electrode is formed into a dome shape with a apex at a position opposite to the flexible electrode. The plurality of electrode portions are arranged along the circumferential direction of the axis, and The voltage is applied sequentially to the plurality of electrode portions along the circumferential direction.

2. The actuator according to claim 1, wherein, The flexible electrodes of one group of adjacent sets are connected to the base electrodes of the other group via connecting components, and The connecting component is made of an elastomer.

3. The actuator according to claim 1 or 2, wherein, The flexible electrodes of one group of adjacent sets are connected to the base electrodes of the other group via connecting components, and The connecting component is made of a conductor.

4. The actuator according to claim 1, wherein, The flexible electrodes of one group of adjacent groups are arranged opposite to each other and connected by a connecting component. The connecting component is made of an insulator.

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