flow path unit

Abstract

A flow path unit (1) has a substrate (2) and a plurality of fluid devices (3) provided to the substrate (2). The plurality of fluid devices (3) include a first fluid device (31) having a first flow path hole (31b) and a second fluid device (32) having a second flow path hole (32b). The first fluid device (31) is disposed on an upper side of the substrate (2) and is detachably provided to the substrate (2), and the second fluid device (32) is disposed on a lower side of the substrate (2) and is detachably provided to the substrate (2). The substrate (2) has a first through hole (21) formed through in a thickness direction of the substrate (2) in order to communicate the first flow path hole (31b) and the second flow path hole (32b).

Description

Technical Field

[0001] This invention relates to a flow path unit. Background Technology

[0002] In the manufacturing processes of various technologies such as semiconductors, liquid crystals, and organic EL, as a flow path unit used to deliver and circulate fluids such as liquid medicines, it is known to have a structure that includes multiple fluid devices such as pumps, valves, accumulators, filters, flow meters, pressure sensors, and piping, as well as multiple substrate blocks that connect the flow path holes formed in two fluid devices to each other (for example, see Figure 11A of Patent Document 1).

[0003] In Patent Document 1, a U-shaped flow path is formed inside the substrate block, with both ends of the flow path opening onto the upper surface of the substrate block. Multiple fluid devices are arranged horizontally on the upper surface of the substrate block. The flow path hole of one of two adjacent fluid devices is connected to an opening on one side of the flow path of the substrate block, and the flow path hole of the other fluid device is connected to an opening on the other side of the flow path of the substrate block. Thus, the flow path holes of all fluid devices are connected sequentially via the flow path of the substrate block. Therefore, it is not necessary to directly connect all the fluid devices, allowing each fluid device to be individually attached and detached relative to the substrate block.

[0004] Patent Document 1: Japanese Patent Publication No. 2019-518175 Summary of the Invention

[0005] In the manufacturing processes of semiconductors, liquid crystals, organic ELs, etc., flow path units are preferably configured compactly to reduce their installation space. However, regarding the flow path unit shown in Patent Document 1, all fluid devices need to be arranged horizontally along the upper surface of the substrate in such a way that the flow path holes of multiple fluid devices are connected sequentially through the flow path of the substrate. Therefore, a large installation space is required in the horizontal direction when arranging the flow path unit.

[0006] The present invention was made in view of this situation, and its object is to provide a flow path unit that can connect the flow path holes of multiple fluid devices in a compact structure and can assemble and disassemble the multiple fluid devices separately.

[0007] (1) The flow path unit of the present invention comprises: a substrate; and a plurality of fluid devices disposed on the substrate, wherein the plurality of fluid devices comprises at least: a first fluid device having a first flow path hole; and a second fluid device having a second flow path hole, the first fluid device being disposed on one side of the substrate in the thickness direction and being freely detachable from the substrate, the second fluid device being disposed on the other side of the substrate in the thickness direction and being freely detachable from the substrate, the substrate having a through hole formed through the substrate in the thickness direction for communicating the first flow path hole and the second flow path hole.

[0008] According to the present invention, the first fluid device and the second fluid device are respectively disposed on one side and the other side of the substrate in the thickness direction, and the first flow path hole of the first fluid device and the second flow path hole of the second fluid device are connected by a through hole that penetrates the substrate in the thickness direction. Therefore, compared to the conventional case where all fluid devices are arranged on one side of the substrate in the thickness direction, the flow path units are compactly formed in a direction orthogonal to the thickness direction of the substrate, allowing the flow path holes of the first fluid device and the second fluid device to be interconnected. Furthermore, since the first fluid device and the second fluid device are respectively detachably mounted and detachable from the substrate, the first fluid device and the second fluid device can be individually mounted and detached relative to the substrate.

[0009] (2) Preferably, the flow path unit further comprises a gasket disposed in the through hole, the gasket comprising: a cylindrical gasket body having a connecting flow path formed inside therein connecting the first flow path hole and the second flow path hole; a first sealing part disposed on one axial side of the gasket body, which is detachably connected to the first fluid device to seal the connection portion; and a second sealing part disposed on the other axial side of the gasket body, which is detachably connected to the second fluid device to seal the connection portion.

[0010] In this case, the first sealing portion of the gasket is connected to the first fluid device, and the second sealing portion of the gasket is connected to the second fluid device, thereby sealing the connection using the first and second sealing portions. Furthermore, the first flow path hole and the second flow path hole can be connected using the connecting flow path within the gasket. Therefore, by using the gasket, the flow path holes of the first and second fluid devices can be connected to each other in a way that prevents fluid leakage.

[0011] (3) Preferably, the axial length of the washer is greater than the length of the through hole.

[0012] In this case, at least one axial end of the gasket protrudes outward from the through hole in the substrate. Therefore, when disconnecting the fluid device connected to the axial end of the gasket, the gasket can be easily removed from the substrate by grasping the portion protruding from the through hole.

[0013] The effects of the invention

[0014] According to the present invention, the flow path holes of multiple fluid devices can be connected in a space-saving manner, and multiple fluid devices can be disassembled and assembled individually. Attached Figure Description

[0015] Figure 1 This is a perspective view showing the flow path unit according to the first embodiment of the present invention.

[0016] Figure 2 This is a cross-sectional view of the main part of the flow path unit.

[0017] Figure 3 This is a cross-sectional view showing the main part of the flow path unit according to the second embodiment of the present invention.

[0018] Figure 4 This is a cross-sectional view showing the main part of the flow path unit according to the third embodiment of the present invention.

[0019] Figure 5 This is a cross-sectional view showing the main part of the flow path unit according to the fourth embodiment of the present invention. Detailed Implementation

[0020] [First Implementation]

[0021] First, preferred embodiments of the present invention will be described with reference to the accompanying drawings. Furthermore, at least some of the various embodiments described below can be combined arbitrarily.

[0022] Figure 1 This is a perspective view showing the flow path unit according to the first embodiment of the present invention. Figure 1 In, for example, the flow path unit 1 of this embodiment is used when conveying and circulating a liquid used in a semiconductor manufacturing apparatus. In the following description, directions such as up, down, left, and right refer to… Figure 1 direction shown.

[0023] The flow path unit 1 has a substrate 2, multiple fluid devices 3, an inflow pipe block 4, and an outflow pipe block 5.

[0024] The substrate 2 is, for example, a rectangular plate having a specified thickness in the vertical direction, and is formed to extend longer in the horizontal direction.

[0025] Multiple fluid devices 3 include, for example, a first fluid device 31, a second fluid device 32, a third fluid device 33, and a fourth fluid device 34. Each fluid device 31 to 34 is composed of a pump, valve, accumulator, filter, flow meter, or pressure sensor, and is formed into a block. In addition, the fluid devices 31 to 34 have a first mounting surface 31a, a second mounting surface 32a, a third mounting surface 33a, and a fourth mounting surface 34a respectively provided on the substrate 2 (see reference). Figure 2 ).

[0026] The first fluid device 31 and the third fluid device 33 are configured such that each mounting surface 31a, 33a is disposed on the upper surface 2a of the substrate 2. Figure 1 In this configuration, the first fluid device 31 is positioned near the left end of the upper surface 2a of the substrate 2, and the third fluid device 33 is positioned near the right side of the first fluid device 31 on the upper surface 2a of the substrate 2. The first fluid device 31 is freely fixed to the upper surface 2a of the substrate 2 by a plurality of bolts 11. The third fluid device 33 is freely fixed to the upper surface 2a of the substrate 2 by a plurality of bolts 13.

[0027] The second fluid device 32 and the fourth fluid device 34 are configured such that each mounting surface 32a, 34a is disposed on the lower surface 2b of the substrate 2. Figure 1 In this configuration, the fourth fluid device 34 is positioned near the right end of the lower surface 2b of the substrate 2, and the second fluid device 32 is positioned near the left side of the fourth fluid device 34 on the lower surface 2b of the substrate 2. The second fluid device 32 is freely fixed to the lower surface 2b of the substrate 2 by a plurality of bolts 12. The fourth fluid device 34 is freely fixed to the lower surface 2b of the substrate 2 by a plurality of bolts 14.

[0028] The inflow pipe block 4 is a piping block for the medicine to flow in from the outside. The inflow pipe block 4 is located at the left end of the lower surface 2b of the substrate 2. The inflow pipe block 4 is made of multiple bolts 15 ( Figure 1 (Only one shown) is freely fixed to the lower surface 2b of the substrate 2. The inflow tube block 4 has a protruding tube portion 4a that protrudes to the left. An inlet 4c for the inflow of liquid medicine is formed at the front end of the protruding tube portion 4a.

[0029] The outflow pipe block 5 is a piping block that discharges the liquid medicine to the outside. The outflow pipe block 5 is disposed at the right end of the upper surface 2a of the substrate 2. The outflow pipe block 5 is freely fixed to the upper surface 2a of the substrate 2 by a plurality of bolts 16. The outflow pipe block 5 has a protruding pipe portion 5a that protrudes to the right. An outlet 5d for the liquid medicine to flow out is formed at the front end of the protruding pipe portion 5a.

[0030] Figure 2 This is a partial cross-sectional view of flow path unit 1. Figure 2In this device, first flow path holes 31b, second flow path holes 32b, third flow path holes 33b, and fourth flow path holes 34b are formed inside the first to fourth fluid devices 31 to 34, respectively, for the flow of the drug solution. The diameters of the flow path holes 31b to 34b are all set to be approximately the same size.

[0031] The inlet (not shown) and outlet 31d of the first flow path hole 31b are both formed to open on the first mounting surface 31a. The inlet of the first flow path hole 31b is connected to the inlet 4c of the inflow pipe block 4 (see reference) via flow path holes (not shown) formed in the inflow pipe block 4 and the substrate 2 respectively. Figure 1 The outlet 31d of the first flow path 31b is formed at the right end of the first fluid device 31.

[0032] The inlet 32c and outlet 32d of the second flow path orifice 32b are both formed to open on the second mounting surface 32a. The inlet 32c of the second flow path orifice 32b is formed at the left end of the second fluid device 32, below the outlet 31d of the first flow path orifice 31b. The outlet 32d of the second flow path orifice 32b is formed at the right end of the second fluid device 32.

[0033] The inlet 33c and outlet 33d of the third flow path orifice 33b are both formed as openings on the third mounting surface 33a. The inlet 33c of the third flow path orifice 33b is formed at the left end of the third fluid device 33, above the outlet 32d of the second flow path orifice 32b. The outlet 33d of the third flow path orifice 33b is formed at the right end of the third fluid device 33.

[0034] The inlet 34c and outlet (not shown) of the fourth flow path hole 34b are both formed as openings on the fourth mounting surface 34a. The inlet 34c of the fourth flow path hole 34b is formed at the left end of the fourth fluid device 34, below the outlet 33d of the third flow path hole 33b. The outlet of the fourth flow path hole 34b is connected to the outlet 5d of the outflow tube block 5 (see reference) via flow path holes (not shown) formed in the substrate 2 and the outflow tube block 5 respectively. Figure 1 Connect.

[0035] The substrate 2 has a first through hole 21, a second through hole 22, and a third through hole 23 formed through it in the thickness direction. The diameter of the through holes 21 to 23 is set to be larger than the outer diameter of the washer 6 described later.

[0036] A first through-hole 21 is formed on the substrate 2 at a position connecting the outlet 31d of the first flow path hole 31b with the inlet 32c of the second flow path hole 32b. A second through-hole 22 is formed on the substrate 2 at a position connecting the outlet 32d of the second flow path hole 32b with the inlet 33c of the third flow path hole 33b. A third through-hole 23 is formed on the substrate 2 at a position connecting the outlet 33d of the third flow path hole 33b with the inlet 34c of the fourth flow path hole 34b.

[0037] The flow path unit 1 also has a plurality of washers 6. The plurality of washers 6 include: a first washer 61 disposed in the first through hole 21; a second washer 62 disposed in the second through hole 22; and a third washer 63 disposed in the third through hole 23.

[0038] The first washer 61 to the third washer 63 are formed with the same shape, and their axial length L1 is greater than the vertical length L2 of the first through hole 21 to the third through hole 23. The upper ends (one axial end) of the first washer 61 to the third washer 63 are configured to protrude upwards beyond the substrate 2. In addition, the lower ends (the other axial end) of the first washer 61 to the third washer 63 are configured to protrude downwards beyond the substrate 2.

[0039] Each washer 6 has: a washer body 6a; a first sealing part 6b disposed on the upper side (one axial side) of the washer body 6a; and a second sealing part 6c disposed on the lower side (the other axial side) of the washer body 6a.

[0040] Each washer body 6a is, for example, formed in a cylindrical shape. From... Figure 2 The interior of each washer body 6a arranged sequentially on the left side has a connecting flow path 6d that connects the upper flow path holes 31b, 33b, 33b with the lower flow path holes 32b, 32b, 34b. The diameter of the connecting flow path 6d is set to be approximately the same as the diameter of the flow path holes 31b, 32b, 33b, 34b.

[0041] The first sealing part 6b has, for example, an annular radially inner sealing part 6b1 and an annular radially outer sealing part 6b2.

[0042] The radially inner sealing portion 6b1 is formed on the radially inner side of the gasket body 6a and protrudes upward. The radially inner sealing portion 6b1 is pressed into the radially inner sealing groove 3a formed on the upper fluid device 3 (31, 33).

[0043] The radially outer sealing portion 6b2 is formed on the radially outer side of the gasket body 6a and protrudes upward. The radially outer sealing portion 6b2 is pressed into the radially outer sealing groove 3b formed on the upper side of the fluid device 3.

[0044] Thus, the first sealing part 6b can be freely connected to the fluid device 3 on the upper side, sealing the connection part.

[0045] The second sealing part 6c has, for example, an annular radially inner sealing part 6c1 and an annular radially outer sealing part 6c2.

[0046] The radially inner sealing portion 6c1 is formed on the radially inner side of the gasket body 6a and protrudes downward. The radially inner sealing portion 6c1 is pressed into the radially inner sealing groove 3c formed on the fluid device 3 (32, 34) on the lower side.

[0047] The radially outer sealing portion 6c2 is formed on the radially outer side of the gasket body 6a and protrudes downward. The radially outer sealing portion 6c2 is pressed into the radially outer sealing groove 3d formed on the lower side of the fluid device 3.

[0048] Thus, the second sealing part 6c can be freely connected to the fluid device 3 on the lower side, sealing the connection part.

[0049] According to the above structure, the liquid medicine flowing in from the inlet 4c of the inflow pipe block 4 passes through the first flow path hole 31b of the first fluid device 31, the connecting flow path 6d of the first gasket 61, the second flow path hole 32b of the second fluid device 32, the connecting flow path 6d of the second gasket 62, the third flow path hole 33b of the third fluid device 33, the connecting flow path 6d of the third gasket 63, and the fourth flow path hole 34b of the fourth fluid device 34, and then exits from the outlet 5d of the outflow pipe block 5.

[0050] According to the flow path unit 1 of the first embodiment, the first fluid device 31 and the third fluid device 33 are disposed on the upper side of the substrate 2, and the second fluid device 32 and the fourth fluid device 34 are disposed on the lower side of the substrate 2. Furthermore, the flow path holes 31b, 33b, 33b of the upper fluid devices 31 and 33, and the flow path holes 32b, 32b, 34b of the lower fluid devices 32 and 34 are connected by the connecting flow path 6d of the first to third gaskets 61, 62, 63 disposed in the through holes 21, 22, 23 of the substrate 2. Therefore, compared to the conventional case where all fluid devices are arranged on the upper surface of the substrate, the flow path unit 1, being compactly configured in the left-right direction of the substrate 2, allows for communication between the upper flow path holes 31b, 33b, 33b and the lower flow path holes 32b, 32b, 34b. In addition, each fluid device 31 to 34 is freely detachable and detachable from the substrate 2, so each fluid device 31 to 34 can be detached and detached independently relative to the substrate 2.

[0051] Furthermore, the first sealing portion 6b of each of the first to third gaskets 61, 62, and 63 is connected to the upper fluid devices 31 and 33, and the second sealing portion 6c of each of the first to third gaskets 61, 62, and 63 is connected to the lower fluid devices 32 and 34. This allows the first sealing portion 6b and the second sealing portion 6c to seal the connection. Therefore, the first to third gaskets 61, 62, and 63 can connect the upper flow path holes 31b, 33b, and 33b to the lower flow path holes 32b, 32b, and 34b in a way that prevents leakage of the liquid.

[0052] Furthermore, the axial length L1 of each washer 6 is greater than the length L2 of the through holes 21-23 of the substrate 2. Moreover, when the upper fluid devices 31 and 33 are removed from the washer 6, the upper end portion (first sealing portion 6b) of the washer 6 protrudes upwards (outwards) from the through holes 21, 22, and 23 of the substrate 2. Similarly, when the lower fluid devices 32 and 34 are removed from the washer 6, the lower end portion (second sealing portion 6c) of the washer 6 protrudes downwards (outwards) from the through holes 21, 22, and 23. Therefore, by grasping the portions protruding from the through holes 21, 22, and 23 of the washer 6, the washer 6 can be easily removed from the substrate 2.

[0053] Furthermore, in the first embodiment, the plurality of fluid devices 3 includes four fluid devices 31 to 34, but it is sufficient to include at least two fluid devices. For example, the plurality of fluid devices 3 may include only a third fluid device 33 and a fourth fluid device 34. In this case, one of the third fluid device 33 and the fourth fluid device 34 becomes a "first fluid device" disposed on one side of the thickness direction of the substrate 2, and the other fluid device becomes a "second fluid device" disposed on the other side of the thickness direction of the substrate 2.

[0054] [Second Implementation]

[0055] Figure 3 This is a cross-sectional view showing the essential parts of the flow path unit according to the second embodiment of the present invention. Figure 3 In the flow path unit 1 of this embodiment, the plurality of fluid devices 3 include, for example, a first fluid device 31 and a second fluid device 32. The first fluid device 31 has a cylindrical first protrusion 31e that protrudes downward beyond the first mounting surface 31a provided on the upper surface 2a of the substrate 2. The second fluid device 32 has a cylindrical second protrusion 32e that protrudes upward beyond the second mounting surface 32a provided on the lower surface 2b of the substrate 2.

[0056] An outlet 31d of a first flow path hole 31b is formed on the lower surface of the first protrusion 31e of the first fluid device 31. An inlet 32c of a second flow path hole 32b is formed on the upper surface of the second protrusion 32e of the second fluid device 32. The inlet 32c of the second flow path hole 32b is formed below the outlet 31d of the first flow path hole 31b.

[0057] The substrate 2 has a first through hole 21 formed to extend through its thickness direction. A first protrusion 31e of a first fluid device 31 is inserted into the first through hole 21 from its upper side. In addition, a second protrusion 32e of a second fluid device 32 is inserted into the first through hole 21 from its lower side.

[0058] A first washer 61 is disposed in the first through hole 21 of the substrate 2. The axial length L1 of the first washer 61 is the same as or less than the vertical length L2 of the first through hole 21. The radially inner sealing portion 6b1 and the radially outer sealing portion 6b2 of the first sealing portion 6b of the first washer 61 are pressed into the radially inner sealing groove 3a and the radially outer sealing groove 3b formed in the first protrusion 31e of the first fluid device 31. The radially inner sealing portion 6c1 and the radially outer sealing portion 6c2 of the second sealing portion 6c of the first washer 61 are pressed into the radially inner sealing groove 3c and the radially outer sealing groove 3d formed in the second protrusion 32e of the second fluid device 32.

[0059] According to the above structure, the first flow path hole 31b of the first fluid device 31 and the second flow path hole 32b of the second fluid device 32 are connected via the connecting flow path 6d of the first washer 61. Other structures in this embodiment are the same as in the first embodiment, therefore the same reference numerals are used and their descriptions are omitted.

[0060] According to the flow path unit 1 of the second embodiment, the first fluid device 31 is disposed on the upper side of the substrate 2, and the second fluid device 32 is disposed on the lower side of the substrate 2. Furthermore, the flow path holes 31b of the first fluid device 31 and 32b of the second fluid device 32 are connected via a flow path 6d through a first washer 61 disposed in the first through hole 21 of the substrate 2. Therefore, compared to the conventional arrangement of all fluid devices on the upper surface of the substrate, the first flow path hole 31b and the second flow path hole 32b can be connected while the flow path unit 1 is compactly configured in the left-right direction of the substrate 2. In addition, each fluid device 31 and 32 is freely detachable from the substrate 2, allowing for individual detachment and assembly of each fluid device 31 and 32 relative to the substrate 2.

[0061] Furthermore, by connecting the first sealing portion 6b of the first gasket 61 to the first fluid device 31 and the second sealing portion 6c of the first gasket 61 to the second fluid device 32, the connection portion can be sealed using the first sealing portion 6b and the second sealing portion 6c. Therefore, the first flow path hole 31b and the second flow path hole 32b can be connected using the first gasket 61 in a manner that prevents leakage of the liquid.

[0062] [Third Implementation]

[0063] Figure 4 This is a cross-sectional view showing the essential parts of the flow path unit according to the third embodiment of the present invention. The flow path unit 1 of this embodiment is a variation of the second embodiment. Figure 4 In the first fluid device 31, an external thread 31f is formed on the outer periphery of the first protrusion 31e. An external thread 32f is also formed on the outer periphery of the second protrusion 32e of the second fluid device 32. In this embodiment, the external threads 31f and 32f of the first protrusion 31e and the second protrusion 32e are left-handed threads.

[0064] The substrate 2 has a main body 24, a cylindrical first raised portion 25, and a cylindrical second raised portion 26. The first raised portion 25 is formed to protrude upward from the upper surface 24a of the main body 24. The second raised portion 26 is formed to protrude downward from the lower surface 24b of the main body 24.

[0065] An external thread 25a is formed on the outer periphery of the first raised portion 25. The second raised portion 26 is formed on the opposite side of the plate body 24 relative to the formation position of the first raised portion 25. An external thread 26a is formed on the outer periphery of the second raised portion 26. The external threads 25a and 26a of the first raised portion 25 and the second raised portion 26 are reverse threads relative to the external threads 31f and 32f of the first protrusion 31e and the second protrusion 32e. In this embodiment, the external threads 25a and 26a are right-hand threads.

[0066] The flow path unit 1 of this embodiment includes: a first nut 7, which freely fixes the first fluid device 31 to the substrate 2; and a second nut 8, which freely fixes the second fluid device 32 to the substrate 2.

[0067] A first internal thread portion 7a is formed on the upper half of the inner circumference of the first nut 7, and a second internal thread portion 7b is formed on the lower half of the inner circumference of the first nut 7. The first internal thread portion 7a and the second internal thread portion 7b are provided with opposite threads to each other. In this embodiment, the first internal thread portion 7a is provided with a left-hand thread, and the second internal thread portion 7b is provided with a right-hand thread.

[0068] The first internal thread 7a of the first nut 7 engages with the external thread 31f of the first protrusion 31e. The second internal thread 7b of the first nut 7 engages with the external thread 25a of the first raised portion 25. Thus, the first protrusion 31e of the first fluid device 31 and the first raised portion 25 of the substrate 2 are connected by the first nut 7.

[0069] A first internal thread portion 8a is formed on the lower half of the inner circumference of the second nut 8, and a second internal thread portion 8b is formed on the upper half of the inner circumference of the second nut 8. The first internal thread portion 8a and the second internal thread portion 8b are provided with opposite threads to each other. In this embodiment, the first internal thread portion 8a is provided with a left-hand thread, and the second internal thread portion 8b is provided with a right-hand thread.

[0070] The first internal thread 8a of the second nut 8 engages with the external thread 32f of the second protrusion 32e. The second internal thread 8b of the second nut 8 engages with the external thread 26a of the second raised portion 26. Thus, the second protrusion 32e of the second fluid device 32 and the second raised portion 26 of the substrate 2 are connected by the second nut 8.

[0071] A first through hole 21 is formed in the thickness direction of the substrate 2 on the first raised portion 25 and the second raised portion 26. A first washer 61 is disposed in the first through hole 21 of the substrate 2. The axial length L1 of the first washer 61 is greater than the vertical length L2 of the first through hole 21 to the third through hole 23.

[0072] The radially inner sealing portion 6b1 and radially outer sealing portion 6b2 of the first sealing portion 6b of the first washer 61 are pressed into the radially inner sealing groove 3a and radially outer sealing groove 3b of the first fluid device 31 by tightening the first nut 7. With the first nut 7 tightened, the axial ( Figure 4 The two ends of the first fluid device 31 (in the vertical direction) abut against the first mounting surface 31a of the first fluid device 31 and the upper surface 24a of the plate body 24. Thus, the first mounting surface 31a of the first fluid device 31 is mounted on the upper side of the base plate 2 via the first nut 7.

[0073] Tightening the second nut 8 presses the radially inner sealing portion 6c1 and radially outer sealing portion 6c2 of the second sealing portion 6c of the first washer 61 into the radially inner sealing groove 3c and radially outer sealing groove 3d of the second fluid device 32. With the second nut 8 tightened, the axial ( Figure 4 The two end faces (in the vertical direction) abut against the second mounting surface 32a of the second fluid device 32 and the lower surface 24b of the plate body 24. Thus, the second mounting surface 32a of the second fluid device 32 is mounted on the lower side of the base plate 2 via the second nut 8.

[0074] Furthermore, in this embodiment, the two axial end faces of the first nut 7 abut against the first mounting surface 31a of the first fluid device 31 and the upper surface 24a of the plate body 24, and the two axial end faces of the second nut 8 abut against the second mounting surface 32a of the second fluid device 32 and the lower surface 24b of the plate body 24. However, they may not abut against each other, and a space may be provided between the first mounting surface 31a and the upper surface 24a and between the second mounting surface 32a and the lower surface 24b.

[0075] The other structures of this embodiment are the same as those of the second embodiment, so the same reference numerals are used and their descriptions are omitted.

[0076] In the flow path unit 1 of the third embodiment, the same effect as in the second embodiment can be achieved. Furthermore, the axial length L1 of each washer 6 is formed to be greater than the length L2 of the first through hole 21 of the substrate 2. Moreover, when the first fluid device 31 is removed from the first washer 61, the upper end portion (first sealing portion 6b) of the first washer 61 protrudes upwards (outer side) of the first through hole 21 of the substrate 2. Similarly, when the second fluid device 32 is removed from the first washer 61, the lower end portion (second sealing portion 6c) of the first washer 61 protrudes downwards (outer side) of the first through hole 21. Therefore, by grasping the portion protruding from the first through hole 21 of the first washer 61, the first washer 61 can be easily removed from the substrate 2.

[0077] [Fourth Implementation]

[0078] Figure 5 This is a cross-sectional view showing the essential parts of the flow path unit according to the fourth embodiment of the present invention. The flow path unit 1 of this embodiment is a variation of the third embodiment. Figure 5 In the first fluid device 31, there is a first main body portion 311 and a cylindrical first protrusion 312 protruding downward from the first main body portion 311. An annular first flange portion 313 protruding radially outward (left-right direction) is formed on the outer periphery of the lower end of the first protrusion 312.

[0079] The second fluid device 32 has a second main body 321 and a cylindrical second protrusion 322 protruding upward from the second main body 321. An annular second flange 323 protruding radially outward is formed on the outer periphery of the upper end of the second protrusion 322.

[0080] The substrate 2 has: an annular first flange portion 27, which is formed to protrude radially outward on the outer periphery of the upper end of the first raised portion 25; and an annular second flange portion 28, which is formed to protrude radially outward on the outer periphery of the lower end of the second raised portion 26.

[0081] The flow path unit 1 of this embodiment includes: a first clamping member 9, which freely fixes the first fluid device 31 to the substrate 2; and a second clamping member 10, which freely fixes the second fluid device 32 to the substrate 2.

[0082] The first clamping member 9 is formed, for example, in an approximately C-shaped cross section, to clamp and fasten the first flange portion 313 of the first fluid device 31 and the first flange portion 27 of the substrate 2, thereby connecting the two flange portions 313 and 27. Thus, the first fluid device 31 is disposed on the upper side of the substrate 2 via the first clamping member 9.

[0083] The second clamping member 10 is formed, for example, in an approximately C-shaped cross section, to clamp and fasten the second flange portion 323 of the second fluid device 32 and the second flange portion 28 of the substrate 2, thereby connecting the two flange portions 323 and 28. Thus, the second fluid device 32 is disposed on the underside of the substrate 2 via the second clamping member 10.

[0084] The radially inner sealing portion 6b1 and radially outer sealing portion 6b2 of the first sealing portion 6b of the first gasket 61 are pressed into the radially inner sealing groove 3a and radially outer sealing groove 3b of the first fluid device 31 by fastening the first clamping member 9.

[0085] The radially inner sealing portion 6c1 and radially outer sealing portion 6c2 of the second sealing portion 6c of the first gasket 61 are pressed into the radially inner sealing groove 3c and radially outer sealing groove 3d of the second fluid device 32 by fastening the second clamping member 10.

[0086] The other structures in this embodiment are the same as in the third embodiment, therefore the same reference numerals are used and their descriptions are omitted. The same effects as in the third embodiment can also be achieved in the flow path unit 1 of the fourth embodiment.

[0087] [other]

[0088] In the above embodiment, the flow path holes of the fluid device 3 disposed on the upper side and the fluid device 3 disposed on the lower side are connected to each other through the connecting flow path 6d of the gasket 6, but they may also be connected only through the through holes 21 (22, 23) of the substrate 2.

[0089] In addition to semiconductor manufacturing apparatus, the flow path unit of the present invention can also be applied to the fields of liquid crystal / organic EL, medical / pharmaceutical, or automotive-related fields.

[0090] It should be understood that the embodiments disclosed herein are illustrative in all respects and not limiting. The scope of the invention is not indicated by the foregoing, but by the claims, and is intended to include the equivalent scope of the claims and all modifications within that scope.

[0091] Explanation of the label

[0092] 1. Flow path unit

[0093] 2 substrate

[0094] 3. Fluid equipment

[0095] 6 Washers

[0096] 6a Washer Body

[0097] 6b First sealing part

[0098] 6c Second sealing part

[0099] 21. First through hole (through hole)

[0100] 31. First Fluid Equipment

[0101] 31b 1st flow path hole

[0102] 32. Second Fluid Equipment

[0103] 32b 2nd flow path hole

[0104] L1 is the axial length of the washer.

[0105] Length of L2 through hole

Claims

1. A flow path unit comprising: a substrate; and a plurality of fluid devices disposed on the substrate, wherein, The plurality of fluid devices includes at least: a first fluid device having a first flow path orifice; And a second fluid device having a second flow path orifice, The first fluid device is disposed on one side of the substrate in the thickness direction and is freely detachable from the substrate. The second fluid device is disposed on the other side of the substrate in the thickness direction and is freely detachable from the substrate. The substrate has a through hole formed in the thickness direction of the substrate to connect the first flow path hole and the second flow path hole. The flow path unit also includes a washer disposed in the through hole. The washer has: The cylindrical washer body has a connecting flow path inside that connects the first flow path hole and the second flow path hole; A first sealing portion, disposed on one axial side of the gasket body, is freely detachable and detachable from the first fluid device to seal the connection portion; and The second sealing part is located on the other axial side of the gasket body, and can be freely connected to the second fluid device to seal the connection part. The first fluid device further comprises: a first mounting surface disposed on one side of the substrate; a first protrusion protruding further to the other side than the first mounting surface and inserted into the through hole; and an outlet of the first flow path hole formed on the other side of the first protrusion. The second fluid device further comprises: a second mounting surface disposed on the other side of the substrate; a second protrusion protruding further to one side than the second mounting surface and inserted into the through hole; and an inlet of the second flow path hole formed on the side of the second protrusion. The first sealing part is freely detachable and connectable to the first protrusion. The second sealing part is freely detachable and connectable to the second protrusion.

2. The flow path unit according to claim 1, wherein, The axial length of the washer is less than the length of the through hole.

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