A vacuum actuator

Abstract

The present invention discloses a vacuum actuator, comprising: a vacuum actuator main cavity, a vacuum sealing cover and a motor, wherein the vacuum sealing cover is installed between the vacuum actuator main cavity and the motor, and a coupling is provided between the motor and the vacuum sealing cover; a lead screw nut, a lead screw, a first bearing, a first optical axis fixing seat, an optical axis, a lead screw fixing seat, a linear bearing, a second bearing, a second optical axis fixing seat, and a third bearing are provided in the vacuum actuator main cavity; a lead screw nut is installed inside the vacuum actuator main cavity away from one end of the vacuum sealing cover, the lead screw cooperates with the lead screw nut, and the lead screw is located on the central axis of the vacuum actuator main cavity, and the lead screw fixing seat is installed outside the lead screw; the optical axis is located between the lead screw and the lead screw fixing seat, and the first optical axis fixing seat and the second optical axis fixing seat are installed at both ends of the optical axis. The present invention can solve the technical problems of the prior art occupying the volume of the vacuum cavity and requiring the additional arrangement of multiple connectors to connect with the motor in the vacuum cavity.

Description

Technical Field

[0001] The invention relates to the technical field of detection instruments, and in particular to a vacuum actuator. Background Art

[0002] With the advancement of science and technology, two-dimensional materials represented by graphene have received widespread attention. Two-dimensional materials refer to materials in which electrons can only move freely (planar motion) at the nanoscale (1-100nm) in two dimensions. When studying and analyzing two-dimensional materials, a two-dimensional material vacuum transfer device is needed.

[0003] A vacuum actuator is required in a two-dimensional material vacuum transfer device. In order to achieve driving in a vacuum environment, the vacuum actuator in the prior art generally places a motor in a vacuum chamber, which not only occupies the volume of the vacuum chamber, but also requires the installation of multiple connectors to connect with the motor in the vacuum chamber. Summary of the invention

[0004] To this end, the purpose of the present invention is to provide a vacuum actuator to solve the technical problems of the prior art that the volume of the vacuum chamber is occupied and a plurality of connectors need to be additionally provided to connect with the motor in the vacuum chamber.

[0005] The present invention provides a vacuum actuator, comprising: a vacuum actuator main chamber, a vacuum sealing cover and a motor, wherein the vacuum sealing cover is installed between the vacuum actuator main chamber and the motor, and a coupling is provided between the motor and the vacuum sealing cover;

[0006] A lead screw nut, a lead screw, a first bearing, a first optical axis fixing seat, an optical axis, a lead screw fixing seat, a linear bearing, a second bearing, a second optical axis fixing seat, and a third bearing are arranged in the main cavity of the vacuum actuator;

[0007] A lead screw nut is installed inside the end of the main cavity of the vacuum actuator away from the vacuum sealing cover, the lead screw cooperates with the lead screw nut, and the lead screw is located on the central axis of the main cavity of the vacuum actuator, and the lead screw fixing seat is installed outside the lead screw;

[0008] The optical axis is located between the screw and the screw fixing seat, the first optical axis fixing seat and the second optical axis fixing seat are installed at both ends of the optical axis, and the second optical axis fixing seat is located between the optical axis and the vacuum sealing cover, and the coupling is installed in the second optical axis fixing seat;

[0009] The first bearing is installed on the first optical axis fixing seat, the second bearing and the third bearing are installed between the vacuum actuator main cavity and the second optical axis fixing seat, and the third bearing is arranged close to the vacuum sealing cover, and the linear bearing is installed in the screw fixing seat.

[0010] According to the vacuum actuator provided by the present invention, the vacuum sealing cover is installed between the main cavity of the vacuum actuator and the motor, that is, the motor that plays a driving role is placed outside the main cavity of the vacuum actuator, and the main cavity of the vacuum actuator is provided with a screw nut, a screw, a first bearing, a first optical axis fixing seat, an optical axis, a screw fixing seat, a linear bearing, a second bearing, a second optical axis fixing seat, and a third bearing, that is, the driven part is placed inside the main cavity of the vacuum actuator, which not only avoids occupying too much volume of the vacuum cavity, but also saves components such as a connector. In addition, it is also more convenient to operate the driving part outside the main cavity of the vacuum actuator.

[0011] As an embodiment, the vacuum actuator also includes a first sealing ring, a second sealing ring, and a third sealing ring. The first sealing ring is installed between the second optical axis fixing seat and the main cavity of the vacuum actuator, the second sealing ring is installed between the second optical axis fixing seat and the vacuum sealing cover, and the third sealing ring is installed between the main cavity of the vacuum actuator and the vacuum sealing cover.

[0012] As an embodiment, the main cavity of the vacuum actuator is provided with a first coaxial hole of the main cavity, a second coaxial hole of the main cavity, a third coaxial hole of the main cavity, a fourth coaxial hole of the main cavity, and a fifth coaxial hole of the main cavity which are coaxially arranged;

[0013] The first coaxial hole of the main cavity and the second coaxial hole of the main cavity are used to install the screw nut, and the second coaxial hole of the main cavity is interference fit with the first bearing;

[0014] The third coaxial hole of the main cavity is used to install the first bearing and provide a movable space for the first optical axis fixing seat, the optical axis, and the screw fixing seat;

[0015] The fourth coaxial hole of the main cavity is used to install the second bearing, the second optical axis fixing seat, and the first sealing ring, and the fourth coaxial hole of the main cavity is interference fit with the second bearing;

[0016] The fifth coaxial hole of the main cavity is used for installing the third bearing, and the fifth coaxial hole of the main cavity is connected to the third bearing.

[0017] As an implementation mode, a main cavity of the vacuum actuator is provided with a main cavity first sealing ring installation groove and a main cavity second sealing ring installation groove. The main cavity first sealing ring installation groove is used to install a fourth sealing ring to provide a vacuum sealing connection between the vacuum sealing cover and the main cavity of the vacuum actuator. The main cavity second sealing ring installation groove is used to install a third sealing ring.

[0018] As an implementation mode, a main cavity of the vacuum actuator is provided with a main cavity first bolt mounting hole and a main cavity second bolt mounting hole;

[0019] The first bolt mounting hole of the main cavity is used to install bolts to fix the vacuum actuator main cavity and the vacuum sealing cover together, and the second bolt mounting hole of the main cavity is used to install bolts to fix the motor, the vacuum actuator main cavity and the vacuum sealing cover together.

[0020] As an implementation manner, the first optical axis fixing seat includes: a first optical axis fixing seat first truncated cone, a first optical axis fixing seat second truncated cone, and a first optical axis fixing seat third truncated cone;

[0021] The first truncated cone of the first optical axis fixing seat is used to install the first bearing, and the first truncated cone of the first optical axis fixing seat is interference fit with the first bearing;

[0022] A step structure is formed between the second truncated cone of the first optical axis fixing seat and the first truncated cone of the first optical axis fixing seat, and the second truncated cone of the first optical axis fixing seat is used to provide an avoidance space for the first bearing;

[0023] A first optical axis fixing seat avoidance coaxial hole is provided in the middle of the end surface of the third truncated cone of the first optical axis fixing seat, and the first optical axis fixing seat avoidance coaxial hole is used to provide an avoidance space for the screw rod, and a plurality of optical axis mounting holes are provided on the end surface of the third truncated cone of the first optical axis fixing seat, and the optical axis mounting holes are used to mount the optical axis;

[0024] A plurality of first optical axis fixing seat side threaded holes are arranged on the side of the third truncated cone of the first optical axis fixing seat, and the first optical axis fixing seat side threaded holes are arranged corresponding to the optical axis mounting holes, and the first optical axis fixing seat side threaded holes are used to install top screws to fix the optical axis.

[0025] As an implementation mode, a screw rod mounting hole is provided in the middle of the screw rod fixing seat, and a plurality of linear bearing mounting holes are provided on the periphery of the screw rod mounting hole. The screw rod mounting hole is used to install the screw rod, and the linear bearing mounting hole is used to install the linear bearing. The axes of all the linear bearing mounting holes are on the same cylindrical surface, and the cylindrical surface is coaxial with the screw rod mounting hole.

[0026] As an implementation manner, the second optical axis fixing seat includes a first truncated cone of the second optical axis fixing seat, a second truncated cone of the second optical axis fixing seat, a third truncated cone of the second optical axis fixing seat, and a fourth truncated cone of the second optical axis fixing seat;

[0027] The end surface of the first truncated cone of the second optical axis fixing seat is provided with a plurality of second optical axis fixing seat optical axis mounting holes, the second optical axis fixing seat optical axis mounting holes are interference fit with the optical axis, the axes of all the second optical axis fixing seat optical axis mounting holes are on the same cylindrical surface, and the cylindrical surface is coaxial with the first truncated cone of the second optical axis fixing seat, and the side surface of the first truncated cone of the second optical axis fixing seat is used for mounting the second bearing;

[0028] The second truncated table of the second optical axis fixing seat is used to provide an escape space for the second bearing;

[0029] A plurality of second optical axis fixing seat first sealing ring installation grooves are provided on the side surface of the third truncated cone of the second optical axis fixing seat, and the second optical axis fixing seat first sealing ring installation grooves are used to install the first sealing ring;

[0030] A coupling air avoidance groove and a second optical axis fixing seat second sealing ring installation groove are provided on the end surface of the fourth truncated cone of the second optical axis fixing seat. The second optical axis fixing seat second sealing ring installation groove is used to install the second sealing ring. A second optical axis fixing seat center boss is provided in the middle of the coupling air avoidance groove. The coupling air avoidance groove and the second optical axis fixing seat center boss work together to form the installation environment of the coupling.

[0031] As an embodiment, the vacuum sealing cover includes a vacuum sealing cover round platform and a vacuum sealing cover polygonal platform;

[0032] The end surface of the vacuum sealing cover polygonal platform is provided with a first coaxial hole of the vacuum sealing cover polygonal platform and a second coaxial hole of the vacuum sealing cover polygonal platform. The first coaxial hole of the vacuum sealing cover polygonal platform is used for coaxial positioning of the motor, and the second coaxial hole of the vacuum sealing cover polygonal platform is used for providing an avoidance space for the coupling.

[0033] A vacuum sealing cover polygonal platform side hole is arranged on the side of the vacuum sealing cover polygonal platform, and vacuum sealing cover bolt mounting holes are arranged on the four corners of the first coaxial hole of the vacuum sealing cover polygonal platform.

[0034] As an embodiment, the vacuum actuator further comprises a manual knob, and the manual knob is mounted on an end of the motor away from the vacuum sealing cover.

[0035] Additional aspects and advantages of the present invention will be given in part in the following description and in part will be obvious from the following description or will be learned through embodiments of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] The above and / or additional aspects and advantages of the embodiments of the present invention will become apparent and easily understood from the description of the embodiments in conjunction with the following drawings, in which:

[0037] Figure 1 is a schematic structural diagram of a vacuum actuator provided by an embodiment of the present invention;

[0038] Figure 2 is a schematic diagram of the structure of the main chamber of the vacuum actuator;

[0039] Figure 3 yes Figure 2 Sectional view of the AA plane;

[0040] Figure 4 is a structural schematic diagram of the first optical axis fixing seat;

[0041] Figure 5 yes Figure 4 Sectional view of the FF plane;

[0042] Figure 6 It is a structural schematic diagram of the screw rod fixing seat;

[0043] Figure 7 is a structural schematic diagram of the second optical axis fixing seat;

[0044] Figure 8 yes Figure 7 Sectional view of the middle EE plane;

[0045] Fig. 9 is a schematic diagram of the structure of a vacuum sealing cover;

[0046] Fig.10 is a cross-sectional view of a vacuum sealing cover. DETAILED DESCRIPTION

[0047] In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the technical solution in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0048] See also Figure 1 A vacuum actuator provided by an embodiment of the present invention includes a screw nut 1, a vacuum actuator main chamber 2, a screw 3, a first bearing 4, a first optical axis fixing seat 5, an optical axis 6, a screw fixing seat 7, a linear bearing 8, a second bearing 9, a second optical axis fixing seat 10, a third bearing 12, a second sealing ring 13, a third sealing ring 14, a coupling 15, a vacuum sealing cover 16, a motor 17, and a manual knob 18.

[0049] The vacuum sealing cover 16 is installed between the vacuum actuator main chamber 2 and the motor 17 , and a coupling 15 is provided between the motor 17 and the vacuum sealing cover 16 .

[0050] A screw nut 1, a screw 3, a first bearing 4, a first optical axis fixing seat 5, an optical axis 6, a screw fixing seat 7, a linear bearing 8, a second bearing 9, a second optical axis fixing seat 10, and a third bearing 12 are arranged in the main cavity 2 of the vacuum actuator.

[0051] A lead screw nut 1 is installed inside the end of the vacuum actuator main chamber 2 away from the vacuum sealing cover 16 , the lead screw 3 cooperates with the lead screw nut 1 , and the lead screw 3 is located on the central axis of the vacuum actuator main chamber 2 , and the lead screw fixing seat 7 is installed outside the lead screw 3 .

[0052] The optical axis 6 is located between the screw 3 and the screw fixing seat 7, the first optical axis fixing seat 5 and the second optical axis fixing seat 10 are installed at both ends of the optical axis 6, and the second optical axis fixing seat 10 is located between the optical axis 6 and the vacuum sealing cover 16, and the coupling 15 is installed in the second optical axis fixing seat 10.

[0053] The first bearing 4 is installed on the first optical axis fixing seat 5, the second bearing 9 and the third bearing 12 are installed between the vacuum actuator main cavity 2 and the second optical axis fixing seat 10, and the third bearing 12 is arranged close to the vacuum sealing cover 16, and the linear bearing 8 is installed in the screw fixing seat 7.

[0054] The first sealing ring 11 is installed between the second optical axis fixing seat 10 and the vacuum actuator main chamber 2 , the second sealing ring 13 is installed between the second optical axis fixing seat 10 and the vacuum sealing cover 16 , and the third sealing ring 14 is installed between the vacuum actuator main chamber 2 and the vacuum sealing cover 16 .

[0055] The manual knob 18 is mounted on an end of the motor 17 away from the vacuum sealing cover 16 .

[0056] See also Figure 2 and Figure 3 The vacuum actuator main chamber 2 is provided with a coaxially arranged first coaxial hole 2-1, a second coaxial hole 2-2, a third coaxial hole 2-3, a fourth coaxial hole 2-4 and a fifth coaxial hole 2-5.

[0057] The first coaxial hole 2-1 of the main cavity and the second coaxial hole 2-2 of the main cavity are used to install the screw nut 1. The material of the screw nut 1 is oxygen-free copper, which is well compatible with the vacuum environment. The matching relationship between the first coaxial hole 2-1 of the main cavity and the screw nut 1 is an interference fit. After installation, the two will not easily move relative to each other. During installation, place the vacuum actuator main cavity 2 and the screw nut 1 in a glove box with a nitrogen environment, heat the vacuum actuator main cavity 2 on a hot plate, and cool the screw nut 1 on a freezing plate, and then press the screw nut 1 into the first coaxial hole 2-1 and the second coaxial hole 2-2 of the main cavity of the vacuum actuator main cavity 2.

[0058] The second coaxial hole 2-2 of the main cavity is interference fit with the first bearing 4. Specifically, the diameter of the second coaxial hole 2-2 of the main cavity and the outer diameter of the first bearing 4 satisfy the interference fit relationship. After the first bearing 4 is installed in the second coaxial hole 2-2 of the main cavity, there will be a certain friction resistance between the two. When the inner ring of the first bearing 4 rotates, the outer ring and the main cavity 2 of the vacuum actuator will not slide relative to each other.

[0059] The third coaxial hole 2 - 3 of the main cavity is used to install the first bearing 4 and provide a movable space for the first optical axis fixing seat 5 , the optical axis 6 , and the screw fixing seat 7 .

[0060] The fourth coaxial hole 2-4 of the main cavity is used to install the second bearing 9, the second optical axis fixing seat 10, and the first sealing ring 11, and the fourth coaxial hole 2-4 of the main cavity is interference fit with the second bearing 9. Specifically, the diameter of the fourth coaxial hole 2-4 of the main cavity and the outer diameter of the second bearing 9 meet the interference fit relationship. After the second bearing 9 is installed in the fourth coaxial hole 2-4 of the main cavity, there will be a certain friction resistance between the two. When the inner ring of the second bearing 9 rotates, there will be no relative sliding between the outer ring and the main cavity 2 of the vacuum actuator. The side wall roughness of the fourth coaxial hole 2-4 of the main cavity is better than 0.8 to obtain a better sealing effect.

[0061] The fifth coaxial hole 2-5 of the main cavity is used to install the third bearing 12, and the fifth coaxial hole 2-5 of the main cavity and the third bearing 12. Specifically, the diameter of the fifth coaxial hole 2-5 of the main cavity and the outer diameter of the third bearing 12 satisfy the interference fit relationship. After the third bearing 12 is installed in the fifth coaxial hole 2-5 of the main cavity, there will be a certain friction resistance between the two. When the inner ring of the third bearing 12 rotates, the outer ring and the main cavity 2 of the vacuum actuator will not slide relative to each other.

[0062] The vacuum actuator main chamber 2 is provided with a main chamber first sealing ring installation groove 2-6 and a main chamber second sealing ring installation groove 2-7. The roughness of the three surfaces of these two sealing grooves is better than 0.8. The main chamber first sealing ring installation groove 2-6 is used to install the fourth sealing ring 19 to provide a vacuum sealing connection between the vacuum sealing cover 16 and the vacuum actuator main chamber 2. The main chamber second sealing ring installation groove 2-7 is used to install the third sealing ring 14, thereby providing a vacuum sealing connection between the vacuum actuator and other external vacuum equipment.

[0063] The vacuum actuator main chamber 2 is provided with a main chamber first bolt mounting hole 2-8 and a main chamber second bolt mounting hole 2-9.

[0064] The first bolt mounting hole 2-8 of the main cavity is used to install bolts to fix the vacuum actuator main cavity 2 and the vacuum sealing cover 16 together to compress the sealing ring between the two. The second bolt mounting hole 2-9 of the main cavity is used to install bolts to fix the motor 17, the vacuum actuator main cavity 2 and the vacuum sealing cover 16 together.

[0065] See also Figure 4 and Figure 5 The first optical axis fixing seat 5 includes: a first optical axis fixing seat first truncated table 5-1, a first optical axis fixing seat second truncated table 5-2, and a first optical axis fixing seat third truncated table 5-3.

[0066] The first cone 5-1 of the first optical axis fixing seat is used to install the first bearing 4, and the first cone 5-1 of the first optical axis fixing seat has an interference fit with the first bearing 4. Specifically, the diameter of the first cone 5-1 of the first optical axis fixing seat and the inner diameter of the first bearing 4 for installing satisfy the interference fit relationship. When the first cone 5-1 of the first optical axis fixing seat is installed to the inner ring of the first bearing 4, there will be a certain friction resistance between the two.

[0067] A step structure is formed between the second truncated cone 5-2 of the first optical axis fixing seat and the first truncated cone 5-1 of the first optical axis fixing seat. The second truncated cone 5-2 of the first optical axis fixing seat is used to provide an avoidance space for the first bearing 4. When the first bearing 4 rotates, the first optical axis fixing seat 5 will not rub against the outer ring of the first bearing 4.

[0068] A first optical axis fixing seat avoidance coaxial hole 5-4 is provided in the middle of the end face of the third truncated cone 5-3 of the first optical axis fixing seat, and the first optical axis fixing seat avoidance coaxial hole 5-4 is used to provide avoidance space for the screw rod 3. A plurality of optical axis mounting holes 5-5 are provided on the end face of the third truncated cone 5-3 of the first optical axis fixing seat, and the optical axis mounting holes 5-5 are used to install the optical axis 6, and the centers of these optical axis mounting holes 5-5 are on the same circle.

[0069] A plurality of first optical axis fixing seat side threaded holes 5-6 are provided on the side of the third truncated cone 5-3 of the first optical axis fixing seat. The first optical axis fixing seat side threaded holes 5-6 are arranged corresponding to the optical axis mounting holes 5-5. The first optical axis fixing seat side threaded holes 5-6 are used to install top screws to fix the optical axis 6.

[0070] See also Figure 6 A screw mounting hole 7-1 is provided in the middle of the screw fixing seat 7, and a plurality of linear bearing mounting holes 7-2 are provided on the periphery of the screw mounting hole 7-1. The screw mounting hole 7-1 is used to mount the screw 3, and the thread shape of the screw mounting hole 7-1 is consistent with the thread shape of the screw 3.

[0071] The linear bearing mounting holes 7-2 are used to mount the linear bearings 8, and the axes of all the linear bearing mounting holes 7-2 are on the same cylindrical surface, and the cylindrical surface is coaxial with the screw mounting hole 7-1.

[0072] The diameter of the linear bearing mounting hole 7-2 and the outer diameter of the linear bearing 8 satisfy an interference fit relationship. After installation, the linear bearing 8 will be firmly embedded in the linear bearing mounting hole 7-2.

[0073] See also Figure 7 and Figure 8 The second optical axis fixing seat 10 includes a first truncated cone 10-1, a second truncated cone 10-2, a third truncated cone 10-3, and a fourth truncated cone 10-4.

[0074] The end face of the first cone 10-1 of the second optical axis fixing seat is provided with a plurality of second optical axis fixing seat optical axis mounting holes 10-10, and the second optical axis fixing seat optical axis mounting holes 10-10 are interference fit with the optical axis 6. Specifically, the diameter of the second optical axis fixing seat optical axis mounting holes 10-10 and the outer diameter of the optical axis 6 satisfy the interference fit relationship, and the optical axis 6 will be firmly fixed after being installed in the second optical axis fixing seat optical axis mounting holes 10-10.

[0075] The axes of all the second optical axis fixing seat optical axis mounting holes 10-10 are on the same cylindrical surface, and the cylindrical surface is coaxial with the second optical axis fixing seat first truncated cone 10-1, and the side surface of the second optical axis fixing seat first truncated cone 10-1 is used to install the second bearing 9. The outer diameter of the second optical axis fixing seat first truncated cone 10-1 satisfies the interference fit relationship with the second bearing 9, and after the second bearing 9 is on the second optical axis fixing seat first truncated cone 10-1, the inner ring of the second bearing 9 is firmly fixed by the second optical axis fixing seat first truncated cone 10-1.

[0076] The second truncated cone 10 - 2 of the second optical axis fixing seat is used to provide an escape space for the second bearing 9 to prevent the outer ring of the second bearing 9 from rubbing against the second optical axis fixing seat 10 when the second bearing 9 rotates.

[0077] The side of the third truncated cone 10-3 of the second optical axis fixing seat is provided with a plurality of second optical axis fixing seat first sealing ring installation grooves 10-8, which are used to install the first sealing ring 11. The roughness of the three sides of the second optical axis fixing seat first sealing ring installation groove 10-8 is better than 1.6.

[0078] A coupling air avoidance groove 10-6 and a second optical axis fixing seat second sealing ring installation groove 10-5 are provided on the end face of the fourth cone 10-4 of the second optical axis fixing seat. The second optical axis fixing seat second sealing ring installation groove 10-5 is used to install the second sealing ring 13. A second optical axis fixing seat center boss 10-7 is provided in the middle of the coupling air avoidance groove 10-6. The coupling air avoidance groove 10-6 and the second optical axis fixing seat center boss 10-7 work together to form the installation environment of the coupling 15.

[0079] The roughness of the three surfaces of the second sealing ring mounting groove 10-5 of the second optical axis fixing seat is better than 1.6.

[0080] See also Fig. 9 and Fig.10 The vacuum sealing cover 16 includes a vacuum sealing cover circular platform 16 - 1 and a vacuum sealing cover polygonal platform 16 - 2 .

[0081] The end face of the vacuum sealing cover polygonal platform 16-2 is provided with a first coaxial hole 16-3 of the vacuum sealing cover polygonal platform and a second coaxial hole 16-4 of the vacuum sealing cover polygonal platform. The first coaxial hole 16-3 of the vacuum sealing cover polygonal platform is used for coaxial positioning of the motor 17, and the second coaxial hole 16-4 of the vacuum sealing cover polygonal platform is used to provide avoidance space for the coupling 15.

[0082] A vacuum sealing cover polygonal platform side hole 16-5 is provided on the side of the vacuum sealing cover polygonal platform 16-2. The vacuum sealing cover polygonal platform side hole 16-5 is used to provide an air escape space for the hexagonal wrench to tighten the top screw of the coupling 15 to lock the coupling 15 and the output shaft of the motor 17.

[0083] Vacuum sealing cover bolt mounting holes 16-6 are respectively provided at the four corners of the first coaxial hole 16-3 of the vacuum sealing cover polygonal platform.

[0084] The assembly process of the above vacuum actuator is as follows:

[0085] Step 1: Heat the vacuum actuator main cavity 2 with a hot plate in a glove box, cool the lead screw nut 1 with a cold plate, and then press the lead screw nut 1 into the first coaxial hole 2-1 and the second coaxial hole 2-2 of the vacuum actuator main cavity 2 with a hand press.

[0086] Step: 2: Apply a proper amount of epoxy resin glue in the screw mounting hole 7-1, then screw the screw 3 into the screw mounting hole 7-1, fix the screw mounting hole 7-1 and the screw 3 coaxially with a screw mounting fixture, and then put it into the oven to accelerate the curing of the epoxy resin glue.

[0087] Step 3: Press the linear bearing 8 into the linear bearing mounting hole 7 - 2 of the screw fixing seat 7 .

[0088] Step 4: Press the first bearing 4 into the first truncated cone 5 - 1 of the first optical axis fixing seat 5 .

[0089] Step 5: Apply a certain amount of epoxy resin glue to the inner hole and one end of the coupling 15, then install the coupling 15 into the coupling installation space formed by the coupling avoidance groove 10-6 of the second optical axis fixing seat 10 and the second optical axis fixing seat center boss 10-7, and then wait for the epoxy resin glue to cure.

[0090] Step 6: Press the second bearing 9 into the first truncated cone 10 - 1 of the second optical axis fixing seat 10 .

[0091] Step 7: Press the third bearing 12 into the fourth truncated cone 10 - 4 of the second optical axis fixing seat 10 .

[0092] Step 8: Install the first sealing ring 11 into the second optical axis fixing seat first sealing ring installation groove 10 - 8 of the second optical axis fixing seat 10 .

[0093] Step 9: Press one end of the optical axis 6 into the second optical axis fixing seat optical axis mounting hole 10 - 10 of the second optical axis fixing seat 10 .

[0094] Step 10: Press the other end of the optical axis 6 into the optical axis mounting hole 5 - 5 of the first optical axis fixing seat 5 .

[0095] Step 11: Install the whole assembled in the above steps into the main chamber 2 of the vacuum actuator.

[0096] Step 12: Install the second sealing ring 13 into the second sealing ring installation groove 10-5 of the second optical axis fixing seat.

[0097] Step 13: Install the third sealing ring 14 into the second sealing ring installation groove 2-7 of the main cavity.

[0098] Step 14: Install the vacuum sealing cover cone 16-1 into the fifth coaxial hole 2-5 of the main cavity.

[0099] Step 15: Install the motor 17 into the first coaxial hole 16-3 of the vacuum sealing cover polygonal platform, and use bolts to pass through the second bolt mounting hole 2-9 of the main cavity and the bolt mounting hole 16-6 of the vacuum sealing cover to lock the motor 17, the vacuum actuator main cavity 2 and the vacuum sealing cover 16 together.

[0100] Step 16: Install the manual knob 18 onto the rear end output shaft of the motor 17.

[0101] In summary, according to the vacuum actuator provided by the present invention, the vacuum sealing cover is installed between the main cavity of the vacuum actuator and the motor, that is, the motor that plays a driving role is placed outside the main cavity of the vacuum actuator, and the main cavity of the vacuum actuator is provided with a screw nut, a screw, a first bearing, a first optical axis fixing seat, an optical axis, a screw fixing seat, a linear bearing, a second bearing, a second optical axis fixing seat, and a third bearing, that is, the driven part is placed inside the main cavity of the vacuum actuator, which not only avoids occupying too much volume of the vacuum cavity, but also saves components such as connectors. In addition, it is also more convenient to operate the driving part outside the main cavity of the vacuum actuator.

[0102] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner.

[0103] Although the embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the claims and their equivalents.

Claims

1. A vacuum actuator, characterized in that: include: A vacuum actuator main chamber (2), a vacuum sealing cover (16) and a motor (17), wherein the vacuum sealing cover (16) is installed between the vacuum actuator main chamber (2) and the motor (17), and a coupling (15) is provided between the motor (17) and the vacuum sealing cover (16); A lead screw nut (1), a lead screw (3), a first bearing (4), a first optical axis fixing seat (5), an optical axis (6), a lead screw fixing seat (7), a linear bearing (8), a second bearing (9), a second optical axis fixing seat (10), and a third bearing (12) are provided in a main chamber (2) of the vacuum actuator; A lead screw nut (1) is installed inside the end of the vacuum actuator main chamber (2) away from the vacuum sealing cover (16), the lead screw (3) cooperates with the lead screw nut (1), and the lead screw (3) is located on the central axis of the vacuum actuator main chamber (2), and the lead screw fixing seat (7) is installed outside the lead screw (3); The optical axis (6) is located between the screw (3) and the screw fixing seat (7), the first optical axis fixing seat (5) and the second optical axis fixing seat (10) are installed at two ends of the optical axis (6), and the second optical axis fixing seat (10) is located between the optical axis (6) and the vacuum sealing cover (16), and the coupling (15) is installed in the second optical axis fixing seat (10); The first bearing (4) is mounted on the first optical axis fixing seat (5), the second bearing (9) and the third bearing (12) are mounted between the vacuum actuator main chamber (2) and the second optical axis fixing seat (10), and the third bearing (12) is arranged close to the vacuum sealing cover (16), and the linear bearing (8) is mounted in the screw fixing seat (7); The first optical axis fixing seat (5) comprises: a first optical axis fixing seat first truncated table (5-1), a first optical axis fixing seat second truncated table (5-2), and a first optical axis fixing seat third truncated table (5-3); The first truncated table (5-1) of the first optical axis fixing seat is used for mounting the first bearing (4), and the first truncated table (5-1) of the first optical axis fixing seat and the first bearing (4) are interference fit; A step structure is formed between the second truncated table (5-2) of the first optical axis fixing seat and the first truncated table (5-1) of the first optical axis fixing seat, and the second truncated table (5-2) of the first optical axis fixing seat is used to provide an escape space for the first bearing (4); A first optical axis fixing seat avoidance coaxial hole (5-4) is provided in the middle of the end surface of the third truncated cone (5-3) of the first optical axis fixing seat, the first optical axis fixing seat avoidance coaxial hole (5-4) is used to provide an avoidance space for the screw rod (3), and a plurality of optical axis mounting holes (5-5) are provided on the end surface of the third truncated cone (5-3) of the first optical axis fixing seat, the optical axis mounting holes (5-5) are used to mount the optical axis (6); A plurality of first optical axis fixing seat side threaded holes (5-6) are provided on the side of the third truncated cone (5-3) of the first optical axis fixing seat, the first optical axis fixing seat side threaded holes (5-6) are arranged corresponding to the optical axis mounting holes (5-5), and the first optical axis fixing seat side threaded holes (5-6) are used to install top screws to fix the optical axis (6); The second optical axis fixing seat (10) comprises a second optical axis fixing seat first truncated table (10-1), a second optical axis fixing seat second truncated table (10-2), a second optical axis fixing seat third truncated table (10-3), and a second optical axis fixing seat fourth truncated table (10-4); The end surface of the first truncated cone (10-1) of the second optical axis fixing seat is provided with a plurality of second optical axis fixing seat optical axis mounting holes (10-10), the second optical axis fixing seat optical axis mounting holes (10-10) are interference fit with the optical axis (6), the axes of all the second optical axis fixing seat optical axis mounting holes (10-10) are on the same cylindrical surface, and the cylindrical surface is coaxial with the first truncated cone (10-1) of the second optical axis fixing seat, and the side surface of the first truncated cone (10-1) of the second optical axis fixing seat is used for mounting a second bearing (9); The second truncated table (10-2) of the second optical axis fixing seat is used to provide an escape space for the second bearing (9); A plurality of second optical axis fixing seat first sealing ring installation grooves (10-8) are provided on the side surface of the third truncated cone (10-3) of the second optical axis fixing seat, and the second optical axis fixing seat first sealing ring installation grooves (10-8) are used for installing the first sealing ring (11); A coupling avoidance groove (10-6) and a second optical axis fixing seat second sealing ring installation groove (10-5) are provided on the end surface of the fourth truncated cone (10-4) of the second optical axis fixing seat. The second optical axis fixing seat second sealing ring installation groove (10-5) is used to install a second sealing ring (13). A second optical axis fixing seat center boss (10-7) is provided in the middle of the coupling avoidance groove (10-6). The coupling avoidance groove (10-6) and the second optical axis fixing seat center boss (10-7) work together to form an installation environment for the coupling (15).

2. The vacuum actuator according to claim 1, characterized in that: The vacuum actuator further comprises a first sealing ring (11), a second sealing ring (13), and a third sealing ring (14); the first sealing ring (11) is mounted between the second optical axis fixing seat (10) and the main chamber (2) of the vacuum actuator, the second sealing ring (13) is mounted between the second optical axis fixing seat (10) and the vacuum sealing cover (16), and the third sealing ring (14) is mounted between the main chamber (2) of the vacuum actuator and the vacuum sealing cover (16).

3. The vacuum actuator according to claim 2, characterized in that: The vacuum actuator main cavity (2) is provided with a main cavity first coaxial hole (2-1), a main cavity second coaxial hole (2-2), a main cavity third coaxial hole (2-3), a main cavity fourth coaxial hole (2-4), and a main cavity fifth coaxial hole (2-5) which are coaxially arranged; The first coaxial hole (2-1) of the main cavity and the second coaxial hole (2-2) of the main cavity are used to install the screw nut (1), and the second coaxial hole (2-2) of the main cavity and the first bearing (4) are interference fit; The third coaxial hole (2-3) of the main cavity is used to install the first bearing (4) and to provide a movable space for the first optical axis fixing seat (5), the optical axis (6), and the screw fixing seat (7); The fourth coaxial hole (2-4) of the main cavity is used to install the second bearing (9), the second optical axis fixing seat (10), and the first sealing ring (11), and the fourth coaxial hole (2-4) of the main cavity is interference-fitted with the second bearing (9); The fifth coaxial hole (2-5) of the main cavity is used for mounting the third bearing (12).

4. The vacuum actuator according to claim 3, characterized in that: A main chamber first sealing ring installation groove (2-6) and a main chamber second sealing ring installation groove (2-7) are provided on the vacuum actuator main chamber (2); the main chamber first sealing ring installation groove (2-6) is used to install a fourth sealing ring (19) to provide a vacuum sealing connection between the vacuum sealing cover (16) and the vacuum actuator main chamber (2); and the main chamber second sealing ring installation groove (2-7) is used to install a third sealing ring (14).

5. The vacuum actuator according to claim 1, characterized in that: A main cavity first bolt mounting hole (2-8) and a main cavity second bolt mounting hole (2-9) are provided on the main cavity (2) of the vacuum actuator; The main chamber first bolt mounting hole (2-8) is used to mount bolts to fix the vacuum actuator main chamber (2) and the vacuum sealing cover (16) together, and the main chamber second bolt mounting hole (2-9) is used to mount bolts to fix the motor (17), the vacuum actuator main chamber (2) and the vacuum sealing cover (16) together.

6. The vacuum actuator according to claim 1, characterized in that: A screw rod mounting hole (7-1) is provided in the middle of the screw rod fixing seat (7), and a plurality of linear bearing mounting holes (7-2) are provided on the periphery of the screw rod mounting hole (7-1). The screw rod mounting hole (7-1) is used to mount the screw rod (3), and the linear bearing mounting hole (7-2) is used to mount the linear bearing (8). The axes of all the linear bearing mounting holes (7-2) are on the same cylindrical surface, and the cylindrical surface is coaxial with the screw rod mounting hole (7-1).

7. The vacuum actuator according to claim 1, characterized in that: The vacuum sealing cover (16) comprises a vacuum sealing cover round platform (16-1) and a vacuum sealing cover polygonal platform (16-2); The end surface of the vacuum sealing cover polygonal platform (16-2) is provided with a vacuum sealing cover polygonal platform first coaxial hole (16-3) and a vacuum sealing cover polygonal platform second coaxial hole (16-4); the vacuum sealing cover polygonal platform first coaxial hole (16-3) is used for coaxial positioning of the motor (17), and the vacuum sealing cover polygonal platform second coaxial hole (16-4) is used to provide an avoidance space for the coupling (15); A vacuum sealing cover polygonal platform side hole (16-5) is provided on the side of the vacuum sealing cover polygonal platform (16-2), and vacuum sealing cover bolt mounting holes (16-6) are respectively provided on the four corners of the first coaxial hole (16-3) of the vacuum sealing cover polygonal platform.

8. The vacuum actuator according to claim 1, characterized in that: The vacuum actuator further comprises a manual knob (18), which is mounted on an end of the motor (17) away from the vacuum sealing cover (16).

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