Laser measurement module and laser radar

Abstract

The embodiment of the present application discloses a laser measurement module and a laser radar, which can be used in the fields of autonomous driving, intelligent driving, etc. In the laser measurement module, N laser ranging components are used to make an outgoing light beam incident on a reflector; the reflector is used to turn the optical path of the outgoing light beam and make the outgoing light beam incident on a MEMS micro-vibration mirror after the turn; the MEMS micro-vibration mirror is used to change the direction of the outgoing light beam to achieve two-dimensional scanning; it is also used to change the direction of the echo light beam and make the echo light beam incident on the reflector, and the echo light beam is the light beam reflected by the outgoing light beam incident on the target object; the reflector is also used to turn the optical path of the echo light beam and make the echo light beam incident on the N laser ranging components; the N laser ranging components are also used to receive the echo light beam and measure the distance according to the time difference between the outgoing light beam and the echo light beam.

Description

[0001] This application is a divisional application. The application number of the original application is 201910581553.3, and the original application date is June 29, 2019. The entire contents of the original application are incorporated by reference into this application. The original application claims priority to the Chinese patent application with application number 201811639922.1 filed on December 29, 2018, and the invention name is “A multi-threaded micro-vibration mirror laser measurement module and laser radar”, the entire contents of which are incorporated by reference into this application. Technical field

[0002] The present application relates to the field of optical communication technology, and in particular to a laser measurement module and a laser radar. Background Art

[0003] LiDAR is an active remote sensing instrument that uses laser as a measuring light source. It has the advantages of long measuring distance, high accuracy, high resolution, and all-day measurement. It plays an important role in geographic information mapping, autonomous driving of unmanned vehicles, digital cities, and other fields. In recent years, autonomous driving technology has developed rapidly, and LiDAR is gradually changing from mechanization to solid-state. Solid-state LiDAR with micro-electromechanical system (MEMS) micro-vibration mirror as beam pointing controller has the advantages of high measurement accuracy, fast scanning speed, flexible scanning line number, low mechanical wear, low cost, and mass production. It represents the future development direction. At the same time, MEMS LiDAR has high integration, small size, and low power consumption, which is conducive to integration inside the vehicle body and can greatly improve the aesthetics of unmanned vehicles.

[0004] Although solid-state LiDAR has great potential, it is far behind mechanical LiDAR in key technical indicators such as scanning angle and resolution. In order to meet the technical requirements of unmanned driving, the scanning angle and resolution of the system need to be further improved. Therefore, the most direct and effective technical method is to integrate multiple groups of laser scanning components in the LiDAR, that is, to increase the number of laser scanning components to improve the measurement angle and resolution of the system.

[0005] A typical coaxial MEMS laser radar is provided in the prior art, which includes multiple groups of laser scanning components, each of which includes a laser light source, a detector and a MEMS micro-vibration mirror. The measurement beam of each group of laser scanning components is emitted through an optical window, and each group of laser scanning components is structurally arranged to achieve the splicing of the scanned point cloud. Since each group of laser scanning components is equipped with an independent MEMS micro-vibration mirror, the integration of the entire laser radar is low and the manufacturing cost of the laser radar is increased. Summary of the invention

[0006] The embodiments of the present application provide a laser measurement module and a laser radar, which are used to improve the integration and compactness of the laser measurement module and effectively reduce the manufacturing cost of the laser radar.

[0007] To solve the above technical problems, the present application provides the following technical solutions:

[0008] In a first aspect, an embodiment of the present application provides a laser measurement module, comprising: N laser ranging components, a reflector and a micro-electromechanical system MEMS micro-vibration mirror, wherein N is a positive integer greater than or equal to 2, wherein the N laser ranging components are used to make an outgoing light beam incident on the reflector; the reflector is used to perform an optical path deflection on the outgoing light beam, and make the deflected outgoing light beam incident on the MEMS micro-vibration mirror; the MEMS micro-vibration mirror is used to change the direction of the outgoing light beam to achieve two-dimensional scanning; it is also used to change the direction of an echo light beam, and make the echo light beam incident on the reflector, wherein the echo light beam is a light beam reflected by the outgoing light beam incident on a target object; the reflector is also used to perform an optical path deflection on the echo light beam, and make the deflected echo light beam incident on the N laser ranging components; the N laser ranging components are also used to receive the echo light beam, and perform ranging according to the time difference between the outgoing light beam and the echo light beam.

[0009] In an embodiment of the present application, the laser measurement module includes N laser ranging components, a reflector and a MEMS micro-vibration mirror. The outgoing light beams of the N laser ranging components can be incident on the MEMS micro-vibration mirror through the reflector. The MEMS micro-vibration mirror changes the direction of the outgoing light beam to achieve two-dimensional scanning. After the outgoing light beam is emitted from the MEMS micro-vibration mirror, it will generate an echo light beam when it is incident on the target object. The MEMS micro-vibration mirror can also change the direction of the echo light beam and incident the echo light beam into the N laser ranging components through the reflector. Therefore, the N laser ranging components can receive the echo light beam and perform distance measurement based on the time difference between the outgoing light beam and the echo light beam. In the embodiment of the present application, the reflector of the laser measurement module can reflect the outgoing light beams and the echo light beams of N laser ranging components, so that the N laser ranging components can share one MEMS micro-vibration mirror. Therefore, only one MEMS micro-vibration mirror needs to be set in the laser measurement module, and there is no need to set a corresponding MEMS micro-vibration mirror for each laser ranging component. The reflector is used to realize the optical path connection between multiple laser ranging components and a single MEMS micro-vibration mirror, thereby improving the integration and compactness of the laser measurement module, effectively reducing the manufacturing cost of the laser radar, and can be used in the fields of autonomous driving and intelligent driving.

[0010] In a possible implementation of the first aspect, the laser measurement module further includes: N beam steering elements; the N beam steering elements correspond to the N reflectors one by one; each of the N laser ranging components, through the corresponding beam steering element, directs the outgoing beam to the corresponding reflector. Among them, the number of laser ranging components in the laser measurement module is equal to the number of reflectors, both of which are N. One laser ranging component corresponds to one reflector, that is, the outgoing beam of each laser ranging component is only sent to the reflector corresponding to the laser ranging component. Similarly, the echo beam received by a reflector from the MEMS micro-vibration mirror is also only sent to the laser ranging component corresponding to the reflector. In the embodiment of the present application, the N laser ranging components share the same MEMS micro-vibration mirror, and each laser ranging component corresponds to a completely independent reflector, which makes the position of the laser ranging component in the laser measurement module always fixed. Only by adjusting the design of the reflector, the properties such as the scanning angle, light emitting direction and appearance of the laser radar can be changed. The flexible optical path architecture greatly improves the application scalability of the laser radar. In addition, in the embodiment of the present application, each laser ranging component can send its own outgoing light beam to the corresponding reflector, so the position of the laser ranging component is fixed and unchanged, and the optical path adjustment is only performed by adjusting the passive reflector, which can improve the stability and convenience of the optical path adjustment.

[0011] In a possible implementation of the first aspect, the laser measurement module further includes: N beam steering elements; the N beam steering elements correspond one-to-one to the N reflectors; each of the N laser ranging components passes through the corresponding beam steering element to direct the outgoing beam to the corresponding reflector. Specifically, the laser measurement module further includes N beam steering elements. Since the number of laser ranging components and reflectors in the laser measurement module is N, the number of beam steering elements in the laser measurement module is equal to the number of laser ranging components, and the number of beam steering elements in the laser measurement module is also equal to the number of reflectors. For each of the N laser ranging components, a beam steering element is passed through to send the outgoing beam of each laser ranging component to the corresponding reflector.

[0012] In a possible implementation of the first aspect, the light beam steering element is a steering mirror.

[0013] In a possible implementation of the first aspect, the laser measurement module further includes: a beam steering element; the beam steering element is used to refract the outgoing beam of the laser ranging component and to incident the refracted outgoing beam onto the reflector; the beam steering element is also used to incident the echo beam sent by the reflector into the laser ranging component. The beam steering element is used to realize the steering of the beam received by the element. For example, the beam steering element has a beam refraction function, so that the direction of the beam received by the element can be changed. The beam steering element receives the outgoing beam from the laser ranging component and can refract the outgoing beam. The beam steering element receives the echo beam from the reflector, refracts the echo beam, and finally sends the echo beam to the laser ranging component, which performs ranging.

[0014] In a possible implementation of the first aspect, the light beam steering element is a folding mirror.

[0015] In a possible implementation of the first aspect, when the value of N is an odd number greater than or equal to 5, the laser measurement module also includes: (N-1) beam steering elements; if i is less than (N+1) / 2, the i-th laser ranging component among the N laser ranging components is connected to the i-th beam steering element among the (N-1) beam steering elements and the i-th reflector among the N reflectors; if i is greater than (N+1) / 2, the i-th laser ranging component among the N laser ranging components is connected to the i-th reflector among the N reflectors through the (i-1)th beam steering element among the (N-1) beam steering elements; wherein i is a positive integer less than or equal to N. Specifically, when the value of N is an odd number greater than or equal to 5, the laser measurement module also includes (N-1) beam steering elements. Since the number of laser ranging components and reflectors in the laser measurement module is N, the number of beam steering elements in the laser measurement module is 1 less than the number of laser ranging components. For the (N+1) / 2nd laser ranging component located at the center of the N laser ranging components, the outgoing light beam of the (N+1) / 2nd laser ranging component is directly sent to the (N+1) / 2nd reflector without passing through the beam steering element. For the other laser ranging components among the N laser ranging components except the (N+1) / 2nd laser ranging component, the outgoing light beam is sent to the corresponding reflector through the beam steering element.

[0016] In a possible implementation of the first aspect, when the value of N is an even number greater than or equal to 6, the laser measurement module also includes: (N-2) beam steering elements; if i is less than N / 2, the i-th laser ranging component among the N laser ranging components is connected to the i-th reflector among the N reflectors via the i-th beam steering element among the (N-2) beam steering elements; if i is greater than (N+2) / 2, the i-th laser ranging component among the N laser ranging components is connected to the i-th reflector among the N reflectors via the (i-2)-th beam steering element among the (N-2) beam steering elements; wherein i is a positive integer less than or equal to N. Specifically, when the value of N is an even number greater than or equal to 6, the laser measurement module further includes (N-2) beam steering elements. Since the number of laser ranging components and reflectors in the laser measurement module is both N, the number of beam steering elements in the laser measurement module is 2 less than the number of laser ranging components. For the (N+2) / 2nd laser ranging component and the N / 2nd laser ranging component located in the center of the N laser ranging components, the outgoing beam of the (N+2) / 2nd laser ranging component is directly sent to the (N+2) / 2nd reflector without passing through the beam steering element, and the outgoing beam of the N / 2nd laser ranging component is sent to the N / 2nd reflector. For the other laser ranging components except the (N+2) / 2nd laser ranging component and the N / 2nd laser ranging component among the N laser ranging components, the outgoing beam is sent to the corresponding reflector through the beam steering element.

[0017] In a possible implementation of the first aspect, the N reflectors are located on the same straight line, and when N is an odd number greater than or equal to 5, the (N+1) / 2th reflector is taken as the center; if i is an integer greater than 2 and less than or equal to (N+1) / 2, the spacing between the (i-2)th reflector and the (i-1)th reflector among the N reflectors is not less than the spacing between the (i-1)th reflector and the i-th reflector; if i is an integer greater than (N+1) / 2 and less than or equal to N, the spacing between the (i-2)th reflector and the (i-1)th reflector among the N reflectors is not greater than the spacing between the (i-1)th reflector and the i-th reflector. The N reflectors are located on the same straight line, for example, the centers of the mirror surfaces of the N reflectors can be located on the same straight line, the N reflectors are symmetrically distributed, and the spacing between two adjacent reflectors among the N reflectors is not equal. When the value of N is an odd number greater than or equal to 5, the (N+1) / 2th reflector is taken as the center. For example, when the value of N is 5, the 3rd reflector is taken as the center. The reflectors other than the (N+1) / 2th reflector among the N reflectors are symmetrically and unequally spaced. The intervals between two adjacent reflectors among the N reflectors may be equal or unequal. For example, when N is equal to 3, the intervals between two adjacent reflectors are equal. For another example, the intervals between two adjacent reflectors among the N reflectors are unequal, and the intervals between the two reflectors closer to the center are smaller, and the intervals between the two reflectors farther from the center are larger. For example, if i is greater than 2 and less than or equal to (N+1) / 2, the spacing between the (i-2)th reflector and the (i-1)th reflector among the N reflectors is not less than the spacing between the (i-1)th reflector and the i-th reflector, and the (i-2)th reflector, the (i-1)th reflector, and the i-th reflector gradually approach the center (i.e., the (N+1) / 2th reflector), so the spacing between the (i-1)th reflector and the i-th reflector is not greater than the spacing between the (i-2)th reflector and the (i-1)th reflector. Similarly, if i is greater than (N+1) / 2 and less than or equal to N, the spacing between the (i-2)th reflector and the (i-1)th reflector among the N reflectors is not greater than the spacing between the (i-1)th reflector and the i-th reflector.

[0018] In a possible implementation of the first aspect, the N reflectors are located on the same straight line, and when the value of N is an even number greater than or equal to 6, the midpoint between the N / 2th reflector and the N / 2+1th reflector is taken as the center; if i is an integer greater than 2 and less than or equal to N / 2, the spacing between the (i-2)th reflector and the (i-1)th reflector among the N reflectors is not less than the spacing between the (i-1)th reflector and the i-th reflector; if i is an integer greater than N / 2 and less than or equal to N, the spacing between the (i-2)th reflector and the (i-1)th reflector among the N reflectors is not greater than the spacing between the (i-1)th reflector and the i-th reflector. The N reflectors are located on the same straight line, for example, the centers of the mirror surfaces of the N reflectors can be located on the same straight line, the N reflectors are symmetrically distributed, and the spacing between two adjacent reflectors among the N reflectors is not equal. When the value of N is an even number greater than or equal to 6, with the midpoint between the N / 2th reflector and the N / 2+1th reflector as the center, the remaining reflectors among the N reflectors except the N / 2th reflector and the (N / 2+1)th reflector are symmetrically and unequally spaced. The intervals between two adjacent reflectors among the N reflectors may be equal or unequal. For example, when N is equal to 3, the intervals between two adjacent reflectors are equal. For another example, the intervals between two adjacent reflectors among the N reflectors are unequal, and the intervals between two reflectors closer to the center are smaller, and the intervals between two reflectors farther from the center are larger. For example, if i is greater than 2 and less than or equal to N / 2, the spacing between the (i-2)th reflector and the (i-1)th reflector among the N reflectors is not less than the spacing between the (i-1)th reflector and the i-th reflector, and the (i-2)th reflector, the (i-1)th reflector, and the i-th reflector gradually approach the center (i.e., the midpoint between the N / 2th reflector and the N / 2+1th reflector), so the spacing between the (i-1)th reflector and the i-th reflector is not greater than the spacing between the (i-2)th reflector and the (i-1)th reflector. Similarly, if i is greater than N / 2 and less than or equal to N, the spacing between the (i-2)th reflector and the (i-1)th reflector among the N reflectors is not greater than the spacing between the (i-1)th reflector and the i-th reflector.

[0019] In a possible implementation of the first aspect, the angle between the mirror normal of the i-th reflector among the N reflectors and the outgoing light beam of the i-th reflector is equal to the angle between the mirror normal of the (i+1)-th reflector among the N reflectors and the outgoing light beam of the (i+1)-th reflector; wherein i is a positive integer less than or equal to N. In the embodiment of the present application, the i-th reflector and the (i+1)-th reflector among the N reflectors are two adjacent reflectors, and the outgoing light beam of the i-th reflector and the outgoing light beam of the (i+1)-th reflector are both sent to the MEMS micro-vibration mirror. The angle between the mirror normal of the i-th reflector among the N reflectors and the outgoing light beam of the i-th reflector is the first angle, and the angle between the mirror normal of the (i+1)-th reflector among the N reflectors and the outgoing light beam of the (i+1)-th reflector is the second angle. The first angle and the second angle are equal, that is, the angle between the mirror normal of each reflector among the N reflectors and the outgoing light beam of the reflector is the same, thereby ensuring that the outgoing light beams of the N reflectors are incident on the MEMS micro-vibration mirror in the same direction, thereby ensuring that the MEMS micro-vibration mirror can receive N outgoing light beams from the same direction.

[0020] In a possible implementation of the first aspect, the MEMS micro-vibration mirror is used to receive the outgoing light beams sent by the N reflectors respectively, and change the directions of the outgoing light beams sent by the N reflectors respectively, and send out the outgoing light beams corresponding to the N reflectors respectively, so as to realize two-dimensional scanning; wherein, the angles between two adjacent outgoing light beams in the N outgoing light beams sent by the MEMS micro-vibration mirror are equal. Specifically, the laser measurement module may include N reflectors, and the N reflectors can send out N outgoing light beams, and the MEMS micro-vibration mirror is used to receive the outgoing light beams sent by the N reflectors respectively, and change the directions of the outgoing light beams sent by the N reflectors respectively, so as to realize two-dimensional scanning; and send out the outgoing light beams corresponding to the N reflectors respectively. For the outgoing light beams corresponding to the N reflectors sent by the MEMS micro-vibration mirror, the angles between the outgoing light beams sent by two adjacent reflectors are equal, that is, the angles between the N outgoing beams sent by the MEMS micro-vibration mirror are equal.

[0021] In a possible implementation of the first aspect, the N laser ranging components are parallel to each other. That is, in the laser measurement module, the N laser ranging components are parallel to each other, so that it is convenient to set up multiple laser ranging components in the laser measurement module, as long as the multiple laser ranging components are parallel to each other. Therefore, the internal components of the laser measurement module provided in the embodiment of the present application are more compact, and the miniaturization of the laser measurement module is achieved.

[0022] In a possible implementation of the first aspect, the N laser ranging components and the MEMS micro-vibration mirror are located on the same side of the reflector; the N laser ranging components are symmetrically distributed on the left and right sides of the MEMS micro-vibration mirror with the MEMS micro-vibration mirror as the center.

[0023] Among them, in the laser measurement module, the MEMS micro-vibration mirror can be used as the center, and N laser ranging components are distributed symmetrically on the left and right. For example, if the value of N is an even number, the first N / 2 laser ranging components can be located in the left half plane centered on the MEMS micro-vibration mirror, and the other N / 2 laser ranging components can be located in the right half plane centered on the MEMS micro-vibration mirror, thereby achieving the left-right symmetrical distribution of the N laser ranging components. For example, if the value of N is an odd number, the first (N-1) / 2 laser ranging components can be located in the left half plane centered on the MEMS micro-vibration mirror, the (N+1) / 2 laser ranging component and the MEMS micro-vibration mirror are located on the same vertical plane centered on the MEMS micro-vibration mirror, and the other (N-1) / 2 laser ranging components can be located in the right half plane centered on the MEMS micro-vibration mirror, thereby achieving the left-right symmetrical distribution of the N laser ranging components.

[0024] In a possible implementation of the first aspect, an angle θ between the output light beams of two adjacent laser ranging assemblies among the N laser ranging assemblies on a horizontal plane and a horizontal swing angle χ of the MEMS micro-vibration mirror satisfy the following relationship:

[0025] θ≤2χ.

[0026] Among them, the horizontal swing angle χ of the MEMS micro-vibration mirror and the angle θ of the output light beams of any adjacent laser ranging components on the horizontal plane must satisfy the above relationship, which can ensure that the point cloud scanning trajectories of multiple groups of laser ranging components are seamlessly spliced ​​in the horizontal direction.

[0027] In a possible implementation of the first aspect, the number N of the laser ranging components is related to the horizontal scanning angle of the laser measurement module. The horizontal swing angle χ of the MEMS micro-vibration mirror and the angle θ of the output light beams of two adjacent laser distance measuring components on the horizontal plane satisfy the following relationship:

[0028]

[0029] Among them, the horizontal scanning angle of the laser measurement module The horizontal swing angle χ of the MEMS micro-vibration mirror (the swing range of the MEMS micro-vibration mirror is from -χ / 2 to χ / 2) and the angle θ of the outgoing light beam of the adjacent laser ranging component on the horizontal plane satisfy the above relationship. N needs to satisfy the above constraint relationship to ensure the horizontal scanning angle range of the laser measurement module, such as the horizontal scanning angle of the laser radar. When θ=106°, χ=8°, and θ=15°, the value of N can be 6 or 7.

[0030] In a possible implementation of the first aspect, the plane where the N laser ranging components are located is different from the plane where the MEMS micro-vibration mirror is located. The N laser ranging components and the bracket are fixed on the bottom plate, the MEMS micro-vibration mirror is installed on the bracket, and the plane where the N laser ranging components are located is different from the plane where the MEMS micro-vibration mirror is located, so that the laser ranging components and the MEMS micro-vibration mirror can be placed in layers, thereby effectively avoiding the risk of the laser ranging component blocking the vertical scanning angle, and maximizing the vertical scanning angle of the laser radar.

[0031] In a possible implementation of the first aspect, an angle α between an incident light beam and an outgoing light beam on the reflector in a vertical plane of each of the N laser ranging assemblies, a vertical tilt angle β of the MEMS micro-vibration mirror, and a vertical swing angle ω of the MEMS micro-vibration mirror satisfy the following relationship:

[0032] α≥ε(2β+ω),

[0033] Wherein, ε is the installation error factor of the reflector and the MEMS micro-vibration mirror.

[0034] Among them, the vertical swing angle of the MEMS micro-vibration mirror is ω, and the swing range of the MEMS micro-vibration mirror is from -ω / 2 to ω / 2. In order to ensure that the laser radar is not blocked in the vertical direction of the scanning angle, the above relationship is satisfied between α, β and ω. ε is the installation error factor of the reflector and the MEMS micro-vibration mirror. ε is determined by the installation error caused by the external dimensions of the reflector and the MEMS micro-vibration mirror. For example, the value of ε can be any value from 1.05 to 1.3, and the specific value of ε is not limited. For example, when α=20°, β=5°, ω=15° and ε=1, the vertical scanning angle range of the laser radar is -5 to 25°, that is, the vertical scanning angle is 30°, and no angle blockage will occur at this time.

[0035] In a possible implementation of the first aspect, the angle α between the incident light beam and the outgoing light beam of each of the N laser ranging assemblies on the reflector in the vertical plane is equal; and α is greater than or equal to 10 degrees and less than or equal to 50 degrees.

[0036] In a possible implementation of the first aspect, a vertical tilt angle β of the MEMS micro-vibration mirror is greater than or equal to 5 degrees and less than or equal to 45 degrees.

[0037] Among them, the angle α between the incident light beam and the outgoing light beam of the laser ranging component on the reflector on the vertical plane should be controlled within the range of 10° to 50°, for example, the angle α is 20°, or 25°, or 40°, etc. The value range of the MEMS micro-vibration mirror tilt angle β is 5° to 45°, for example, the angle β is 10°, or 15°, or 30°, etc. α is in the range of 10° to 50°, and β is in the range of 5° to 45°. If the angles of α and β are too small, the distance between the MEMS micro-vibration mirror and the reflector will increase, and the volume of the laser radar will increase. If the angles of α and β are too large, it means that the incident light angle on the MEMS micro-vibration mirror is also large, and the scanned image of the point cloud will be distorted. Therefore, α is in the range of 10° to 50°, and β is in the range of 5° to 45°, which can reduce the volume of the laser radar and avoid the distortion of the scanned image of the point cloud.

[0038] In a possible implementation of the first aspect, the number of the reflectors is M, and M is a positive integer; when N is equal to M, the laser ranging assembly and the reflector are in a one-to-one correspondence. That is, N reflectors can be provided in the laser measurement module, and since the laser measurement module is provided with N laser ranging assemblies, each laser ranging assembly can use a dedicated reflector for sending an outgoing light beam and receiving an echo light beam of the laser ranging assembly.

[0039] In a possible implementation of the first aspect, the number of the reflectors is M, and M is a positive integer; when N is greater than M, at least two of the N laser ranging components correspond to the same reflector. That is, M (M is not equal to N) reflectors can be set in the laser measurement module. Since the laser measurement module is provided with N laser ranging components, and N is greater than M, there must be at least two laser ranging components in the laser measurement module that share the same reflector, and each laser ranging component can use a corresponding reflector for sending an outgoing light beam and receiving an echo light beam of the laser ranging component.

[0040] In a possible implementation of the first aspect, each of the N laser ranging components includes: a laser, a spectroscope, and a detector; the laser is used to generate an outgoing light beam, and the outgoing light beam is incident on the reflector through the spectroscope; the spectroscope is used to receive the echo light beam incident from the reflector and incident the echo light beam into the detector; the detector is used to receive the echo light beam and perform distance measurement according to the time difference between the outgoing light beam and the echo light beam. Wherein, each laser ranging component is provided with a laser, a spectroscope, and a detector. The laser can be used to generate a light beam, and the light beam is defined as an outgoing light beam. In the embodiment of the present application, the outgoing light beam generated by the laser will not be directly incident on the MEMS micro-vibration mirror, but the outgoing light beam is first incident on the reflector by the spectroscope, and the reflector can perform an optical path deflection. The outgoing light beam can be incident on the MEMS micro-vibration mirror through the optical path deflection of the reflector.

[0041] In a possible implementation of the first aspect, the N laser ranging components and the MEMS micro-vibration mirror are respectively connected to a data processing circuit.

[0042] In a second aspect, an embodiment of the present application further provides a multi-threaded micro-vibration mirror laser radar, comprising: a laser measurement module as described in any one of the first aspects above, and a data processing circuit; the N laser ranging components and the MEMS micro-vibration mirror are respectively connected to the data processing circuit; the data processing circuit is used to obtain data from the N laser ranging components and the MEMS micro-vibration mirror, respectively, and perform data processing.

[0043] The multi-threaded micro-vibration mirror laser radar provided in the embodiment of the present application includes a laser measurement module and a data processing circuit, and N laser ranging components and MEMS micro-vibration mirrors are respectively connected to the data processing circuit. After the data processing circuit obtains data from the N laser ranging components and the MEMS micro-vibration mirror, the data can be processed, wherein the data processing circuit obtains the distance value of the target from the laser ranging component and the angle value of the target from the MEMS micro-vibration mirror, and the spatial coordinates of the target can be converted from the distance value and the angle value.

[0044] In a possible implementation of the second aspect, the multi-threaded micro-vibration mirror laser radar also includes: a base plate, a bracket, and a connecting rod, wherein the N laser ranging components and the reflector are located on the base plate; the bracket is located on the base plate, and the MEMS micro-vibration mirror is located on the bracket; the two ends of the connecting rod are respectively connected to the base plate and the data processing circuit, and the connecting rod is used to support the data processing circuit.

[0045] Among them, a three-dimensional structure diagram of a multi-threaded micro-vibration mirror laser radar will be provided in the subsequent embodiments, and the base plate, bracket, and connecting rod will be described in detail through the three-dimensional structure of the multi-threaded micro-vibration mirror laser radar. Among them, N laser ranging components, reflectors, and brackets are all fixed on the base plate, and the MEMS micro-vibration mirror is located on the bracket. The bracket is used to increase the position of the MEMS micro-vibration mirror relative to the plane where the base plate is located, so that the layered setting of the MEMS micro-vibration mirror and the N laser ranging components can be realized, and by setting the reflector and the bracket, the positional relationship between the N laser ranging components, the reflector and the MEMS micro-vibration mirror can be adjusted to achieve the optimal optical performance of the laser measurement module. The subsequent examples will explain the angular relationship between the three outgoing light beams.

[0046] In an embodiment of the present application, the two ends of the connecting rod are respectively connected to the base plate and the data processing circuit. The connecting rod is used to support the data processing circuit, so that the data processing circuit and the base plate can be arranged in layers, so that the data processing circuit and the laser measurement module can be located in the same three-dimensional space, which is conducive to the integrated and compact design of the multi-threaded micro-vibration mirror laser radar and reduces the manufacturing cost of the multi-threaded micro-vibration mirror laser radar.

[0047] Next, the multi-threaded micro-vibration mirror laser radar (referred to as laser radar) provided in the embodiment of the present application is illustrated as an example. The embodiment of the present application relates to a multi-threaded micro-vibration mirror laser radar, in which a group of reflectors are arranged between multiple groups of laser ranging components and MEMS micro-vibration mirrors to achieve the purpose of connecting the optical path, so that the laser ranging components can be arranged symmetrically, making the system layout more compact and flexible. Multiple groups of laser ranging components and MEMS micro-vibration mirrors can be placed in layers, thereby effectively avoiding the obstruction of the scanning angle.

[0048] In a third aspect, an embodiment of the present application provides a laser scanning method implemented based on the laser measurement module described in the first aspect, and the laser scanning method may include the following steps: incident the outgoing light beams of N laser ranging components onto a reflector; performing optical path deflection on the outgoing light beam, and incident the deflected outgoing light beam onto the MEMS micro-vibration mirror; changing the direction of the outgoing light beam to achieve two-dimensional scanning; using a MEMS micro-vibration mirror to receive an echo light beam from a target object, and then changing the direction of the echo light beam, and incident the echo light beam onto the reflector, wherein the echo light beam is a light beam reflected by the outgoing light beam incident on the target object; performing optical path deflection on the echo light beam, and incident the deflected echo light beam onto the N laser ranging components; using N laser ranging components to receive the echo light beam, and performing ranging based on the time difference between the outgoing light beam and the echo light beam.

[0049] The laser scanning method provided in the embodiment of the present application also includes: other method processes executed based on the laser measurement module described in the first aspect. For details, please refer to the functional description of the component structure in the laser measurement module in the first aspect mentioned above, which will not be described in detail here. BRIEF DESCRIPTION OF THE DRAWINGS

[0050] Figure 1 A schematic diagram of the structure of a multi-threaded micro-vibration mirror laser measurement module provided in an embodiment of the present application;

[0051] Figure 2 A schematic diagram of the structure of a laser ranging assembly provided in an embodiment of the present application;

[0052] Figure 3 A schematic diagram of the structure of a multi-threaded micro-vibration mirror laser radar provided in an embodiment of the present application;

[0053] Figure 4 A schematic diagram of the propagation path of a light beam in a multi-threaded micro-vibration mirror laser radar provided in an embodiment of the present application;

[0054] Figure 5 A schematic diagram of the three-dimensional structure of a multi-threaded micro-vibration mirror laser radar provided in an embodiment of the present application;

[0055] Figure 6 A schematic diagram of the horizontal scanning range of a multi-threaded micro-vibration mirror laser radar provided in an embodiment of the present application;

[0056] Figure 7 A schematic diagram of the relative position relationship between a laser ranging component and a MEMS micro-vibration mirror provided in an embodiment of the present application;

[0057] Figure 8 A schematic diagram of the three-dimensional structure of another multi-threaded micro-vibration mirror laser radar provided in an embodiment of the present application;

[0058] Fig. 9 A schematic diagram of the relative position relationship between another laser ranging component and a MEMS micro-vibration mirror provided in an embodiment of the present application;

[0059] Fig.10 A schematic diagram of the relative position relationship between another laser ranging component and a MEMS micro-vibration mirror provided in an embodiment of the present application;

[0060] Fig.11 A schematic diagram of a structure in which multiple reflectors are arranged in a multi-threaded micro-vibration mirror laser radar provided in an embodiment of the present application;

[0061] Fig.12 Another structural schematic diagram of a multi-threaded micro-vibration mirror laser radar provided in an embodiment of the present application in which multiple reflectors are arranged;

[0062] Fig.13 Another structural schematic diagram of the laser ranging assembly provided in the embodiment of the present application;

[0063] Fig.14 Another structural schematic diagram of the laser ranging assembly provided in the embodiment of the present application;

[0064] Fig.15 Another structural schematic diagram of the laser ranging assembly provided in the embodiment of the present application;

[0065] Fig.16 Another structural schematic diagram of the laser ranging assembly provided in the embodiment of the present application;

[0066] Fig.17 Another structural schematic diagram of the laser ranging assembly provided in the embodiment of the present application;

[0067] Fig.18 A stereoscopic diagram of a laser ranging assembly provided in an embodiment of the present application;

[0068] Fig.19 A top view of the laser ranging assembly provided in an embodiment of the present application;

[0069] Fig. 20 A side view of a laser ranging assembly provided in an embodiment of the present application;

[0070] Fig.21 Another stereoscopic view of the laser distance measuring assembly provided in an embodiment of the present application;

[0071] Fig. 22 Another structural schematic diagram of the laser ranging assembly provided in the embodiment of the present application;

[0072] Fig.23 Another top view of the laser ranging assembly provided in an embodiment of the present application;

[0073] Fig.24 Another stereoscopic view of the laser distance measuring assembly provided in an embodiment of the present application;

[0074] Fig.25 Another structural schematic diagram of the laser ranging assembly provided in an embodiment of the present application. DETAILED DESCRIPTION

[0075] The embodiments of the present application provide a laser measurement module and a laser radar, which are used to improve the integration and compactness of the laser measurement module and effectively reduce the manufacturing cost of the laser radar.

[0076] The embodiments of the present application are described below in conjunction with the accompanying drawings.

[0077] The terms "first", "second", etc. in the specification and claims of the present application and the above-mentioned drawings are used to distinguish similar objects, and need not be used to describe a specific order or sequential order. It should be understood that the terms used in this way can be interchangeable under appropriate circumstances, which is only to describe the distinction mode adopted by the objects of the same attributes when describing in the embodiments of the present application. In addition, the terms "including" and "having" and any of their variations are intended to cover non-exclusive inclusions, so that the process, method, system, product or equipment comprising a series of units need not be limited to those units, but may include other units that are not clearly listed or inherent to these processes, methods, products or equipment.

[0078] like Figure 1 As shown, the embodiment of the present application provides a multi-threaded micro-vibration mirror laser measurement module 100, which includes: N laser ranging components 101, a reflector 102 and a MEMS micro-vibration mirror 103, where N is a positive integer greater than or equal to 2, wherein:

[0079] N laser distance measuring components 101, used to make the outgoing light beam incident on the reflector 102;

[0080] The reflector 102 is used to deflect the optical path of the outgoing light beam and make the deflected outgoing light beam incident on the MEMS micro-vibration mirror 103;

[0081] The MEMS micro-vibration mirror 103 is used to change the direction of the outgoing light beam to achieve two-dimensional scanning; it is also used to change the direction of the echo light beam to make the echo light beam incident on the reflector 102, wherein the echo light beam is the light beam reflected by the outgoing light beam incident on the target object;

[0082] The reflector 102 is also used to deflect the optical path of the echo light beam and make the deflected echo light beam incident on the N laser ranging components 101;

[0083] The N laser distance measuring components 101 are also used to receive the echo light beam and perform distance measurement according to the time difference between the outgoing light beam and the echo light beam.

[0084] The multi-threaded micro-vibration mirror laser measurement module provided in the embodiment of the present application includes multiple laser ranging components, and the number of laser ranging components is represented by N. For example, three laser ranging components can be provided in the multi-threaded micro-vibration mirror laser measurement module, and six laser ranging components can be provided in the multi-threaded micro-vibration mirror laser measurement module, etc., depending on the application scenario. The laser ranging component is used to generate a light beam, which is defined as an outgoing light beam. In the embodiment of the present application, the outgoing light beams generated by the N laser ranging components will not be directly incident on the MEMS micro-vibration mirror. Instead, the laser ranging component first incidents the outgoing light beam on the reflector, and the reflector can perform optical path deflection. Through the optical path deflection of the reflector, the outgoing light beam can be incident on the MEMS micro-vibration mirror. Therefore, only one MEMS micro-vibration mirror is needed, and there is no need to set a corresponding MEMS micro-vibration mirror for each laser ranging component. The reflector is used to realize the optical path connection between multiple laser ranging components and a single MEMS micro-vibration mirror, thereby improving the integration and compactness of the laser measurement module, effectively reducing the manufacturing cost of the laser radar, and being suitable for vehicle-mounted environments with strict requirements on volume, size and cost.

[0085] In the embodiment of the present application, after the outgoing light beam is emitted from the MEMS micro-vibration mirror, it will be incident on the target object to generate an echo light beam. The MEMS micro-vibration mirror can also change the direction of the echo light beam, and the echo light beam is incident on N laser ranging components through a reflector. Therefore, the N laser ranging components can receive the echo light beam and perform ranging according to the time difference between the outgoing light beam and the echo light beam. The ranging algorithm used by the laser ranging component in the embodiment of the present application is not limited. It should be understood that the time difference can be the time difference between the laser ranging component emitting the outgoing light beam and receiving the echo light beam.

[0086] In the embodiment of the present application, the MEMS micro-vibration mirror can change the direction of the outgoing light beam to achieve two-dimensional scanning. The two-dimensional scanning means that the MEMS micro-vibration mirror can swing in two directions perpendicular to each other to achieve two-dimensional scanning of the light beam.

[0087] In the embodiment of the present application, the reflector may be a plane reflector or a prism coated with a metal film or a dielectric film, or may be an optical element such as a grating or a nano-optical antenna having a bidirectional beam deflection function.

[0088] In an embodiment of the present application, N laser ranging components can share the same MEMS micro-vibration mirror. Since the outgoing light beam generated by the laser ranging component will not be directly incident on the MEMS micro-vibration mirror, but the laser ranging component first incidents the outgoing light beam on the reflector, the reflector can realize the optical path turning, and the outgoing light beams of the N laser ranging components can be incident on the same MEMS micro-vibration mirror through the optical path turning of the reflector. The outgoing light beams of the N laser ranging components do not need to be directly incident on the MEMS micro-vibration mirror, but need to be incident on the MEMS micro-vibration mirror after the reflector turns. Therefore, when N laser ranging components and MEMS micro-vibration mirrors are set in the multi-threaded micro-vibration mirror laser measurement module, the positional relationship between the laser ranging component and the MEMS micro-vibration mirror is flexible, so the multi-threaded micro-vibration mirror laser measurement module can achieve high integration and a more compact structure, reducing the manufacturing cost of the multi-threaded micro-vibration mirror laser measurement module. When the multi-threaded micro-vibration mirror laser measurement module is applied to a multi-threaded micro-vibration mirror laser radar, the manufacturing cost of the multi-threaded micro-vibration mirror laser radar can be reduced.

[0089] In some embodiments of the present application, N laser ranging components and the MEMS micro-vibration mirror are located on the same side of the reflector. Furthermore, the N laser ranging components are symmetrically distributed on the left and right sides of the MEMS micro-vibration mirror with the MEMS micro-vibration mirror as the center. Among them, in the multi-threaded micro-vibration mirror laser measurement module, the MEMS micro-vibration mirror can be used as the center, and the N laser ranging components are symmetrically distributed on the left and right sides. An example is given as follows. If the value of N is an even number, the first N / 2 laser ranging components can be located in the left half plane centered on the MEMS micro-vibration mirror, and the other N / 2 laser ranging components can be located in the right half plane centered on the MEMS micro-vibration mirror, thereby achieving a left-right symmetrical distribution of the N laser ranging components. For example, if the value of N is an odd number, the first (N-1) / 2 laser ranging components can be located in the left half plane with the MEMS micro-vibration mirror as the center, the (N+1) / 2 laser ranging component and the MEMS micro-vibration mirror are located on the same vertical plane with the MEMS micro-vibration mirror as the center, and the other (N-1) / 2 laser ranging components can be located in the right half plane with the MEMS micro-vibration mirror as the center, thereby achieving left-right symmetrical distribution of the N laser ranging components.

[0090] In some embodiments of this application, please refer to Figure 2 , which is a schematic diagram of the structure of the laser ranging assembly provided in an embodiment of the present application, wherein each laser ranging assembly 101 of the N laser ranging assemblies includes: a laser 1011, a beam splitter 1012, and a detector 1013;

[0091] The laser 1011 is used to generate an outgoing light beam, and the outgoing light beam is incident on the reflector through a beam splitter;

[0092] A beam splitter 1012, used for receiving the echo beam incident from the reflector, and incident the echo beam into the detector 1013;

[0093] The detector 1013 is used to receive the echo light beam and measure the distance according to the time difference between the outgoing light beam and the echo light beam.

[0094] Among them, each laser ranging component is provided with a laser, a spectroscope, and a detector. The laser can be used to generate a light beam, which is defined as an outgoing light beam. In the embodiment of the present application, the outgoing light beam generated by the laser will not be directly incident on the MEMS micro-vibration mirror, but the spectroscope will first incident the outgoing light beam on the reflector, and the reflector can perform optical path deflection. Through the optical path deflection of the reflector, the outgoing light beam can be incident on the MEMS micro-vibration mirror. The type of the spectroscope is not limited in the embodiment of the present application.

[0095] In the embodiment of the present application, after the outgoing light beam is emitted from the MEMS micro-vibration mirror, it will be incident on the target object to generate an echo light beam. The MEMS micro-vibration mirror can also change the direction of the echo light beam, and the echo light beam is incident on the spectroscope through the reflector. The spectroscope can receive the echo light beam, and then the echo light beam is incident on the detector. Finally, the detector measures the distance according to the time difference between the outgoing light beam and the echo light beam. The distance measurement algorithm used by the detector in the embodiment of the present application is not limited.

[0096] In some embodiments of the present application, the number of reflectors provided in the multi-threaded micro-vibration mirror laser measurement module is M, where M is an integer, for example, M is a positive integer. When N is equal to M, the laser ranging component and the reflector are in a one-to-one correspondence. That is, N reflectors can be provided in the multi-threaded micro-vibration mirror laser measurement module. Since N laser ranging components are provided in the multi-threaded micro-vibration mirror laser measurement module, each laser ranging component can use a dedicated reflector for sending the outgoing beam of the laser ranging component and receiving the echo beam.

[0097] It is not limited that, in other embodiments of the present application, the number of reflectors provided in the multi-threaded micro-vibration mirror laser measurement module is M, and M can be a positive integer. When N is greater than M, at least two of the N laser ranging components correspond to the same reflector. That is, M (M is not equal to N) reflectors can be provided in the multi-threaded micro-vibration mirror laser measurement module. Since N laser ranging components are provided in the multi-threaded micro-vibration mirror laser measurement module, and N is greater than M, there must be at least two laser ranging components in the multi-threaded micro-vibration mirror laser measurement module that share the same reflector, and each laser ranging component can use a corresponding reflector for the outgoing light beam sending and echo light beam receiving of the laser ranging component. The situation in which multiple reflectors are provided in the multi-threaded micro-vibration mirror laser measurement module will be described in detail in the subsequent embodiments.

[0098] In some embodiments of the present application, N laser ranging components and the MEMS micro-vibration mirror are respectively connected to the data processing circuit. The data processing algorithm used by the data processing circuit can be configured according to the specific requirements of the laser radar, and the algorithms used for data processing are not described one by one here.

[0099] The above embodiment describes the multi-threaded micro-vibration mirror laser measurement module in detail. Next, a multi-threaded micro-vibration mirror laser radar provided in the embodiment of the present application is described by example. Figure 3 As shown, the multi-threaded micro-vibration mirror laser radar 10 includes: the multi-threaded micro-vibration mirror laser measurement module 100 as described in the above embodiment, and the data processing circuit 200;

[0100] The multi-threaded micro-vibration mirror laser measurement module 100 includes: N laser distance measurement components 101, a reflector 102 and a MEMS micro-vibration mirror 103, wherein:

[0101] N laser distance measuring components 101 and MEMS micro-vibration mirrors 102 are respectively connected to the data processing circuit 200;

[0102] The reflector 102 is used to deflect the outgoing light beams of the N laser distance measuring components 101 to the MEMS micro-vibration mirror 103; deflect the optical path of the echo light beam, and make the deflected echo light beam incident on the N laser distance measuring components 101;

[0103] The data processing circuit 200 is used to obtain data from the N laser ranging components 101 and the MEMS micro-vibration mirror 103 respectively, and perform data processing.

[0104] Among them, the multi-threaded micro-vibration mirror laser radar provided in the embodiment of the present application includes a multi-threaded micro-vibration mirror laser measurement module and a data processing circuit, and N laser ranging components and MEMS micro-vibration mirrors are respectively connected to the data processing circuit. After the data processing circuit obtains data from the N laser ranging components and MEMS micro-vibration mirrors respectively, the data can be processed, wherein the data processing circuit obtains the distance value of the target from the laser ranging component and the angle value of the target from the MEMS micro-vibration mirror, and the spatial coordinates of the target can be converted from the distance value and the angle value. The data processing algorithm used by the data processing circuit can be configured according to the specific requirements of the laser radar, and the algorithms used for data processing will not be described one by one here.

[0105] In some embodiments of the present application, in addition to a multi-threaded micro-vibration mirror laser measurement module and a data processing circuit, the multi-threaded micro-vibration mirror laser radar also includes: a base plate, a bracket, and a connecting rod, wherein:

[0106] N laser distance measuring components and reflectors are located on the bottom plate;

[0107] The bracket is located on the bottom plate, and the MEMS micro-vibration mirror is located on the bracket;

[0108] Two ends of the connecting rod are respectively connected to the bottom plate and the data processing circuit, and the connecting rod is used to support the data processing circuit.

[0109] Among them, a three-dimensional structure diagram of a multi-threaded micro-vibration mirror laser radar will be provided in the subsequent embodiments, and the base plate, bracket, and connecting rod will be described in detail through the three-dimensional structure of the multi-threaded micro-vibration mirror laser radar. Among them, N laser ranging components, reflectors, and brackets are all fixed on the base plate, and the MEMS micro-vibration mirror is located on the bracket. The bracket is used to increase the position of the MEMS micro-vibration mirror relative to the plane where the base plate is located, so that the layered setting of the MEMS micro-vibration mirror and the N laser ranging components can be realized, and by setting the reflector and the bracket, the positional relationship between the N laser ranging components, the reflector and the MEMS micro-vibration mirror can be adjusted to achieve the optimal optical performance of the laser measurement module. The subsequent examples will explain the angular relationship between the three outgoing light beams.

[0110] In an embodiment of the present application, the two ends of the connecting rod are respectively connected to the base plate and the data processing circuit. The connecting rod is used to support the data processing circuit, so that the data processing circuit and the base plate can be arranged in layers, so that the data processing circuit and the multi-threaded micro-vibration mirror laser measurement module can be located in the same three-dimensional space, which is conducive to the integrated and compact design of the multi-threaded micro-vibration mirror laser radar and reduces the manufacturing cost of the multi-threaded micro-vibration mirror laser radar.

[0111] Next, the multi-threaded micro-vibration mirror laser radar (referred to as laser radar) provided in the embodiment of the present application is illustrated as an example. The embodiment of the present application relates to a multi-threaded micro-vibration mirror laser radar, in which a group of reflectors are arranged between multiple groups of laser ranging components and MEMS micro-vibration mirrors to achieve the purpose of connecting the optical path, so that the laser ranging components can be arranged symmetrically, making the system layout more compact and flexible. Multiple groups of laser ranging components and MEMS micro-vibration mirrors can be placed in layers, thereby effectively avoiding the obstruction of the scanning angle.

[0112] The present application embodiment relates to a multi-threaded micro-vibration mirror laser radar, such as Figure 4As shown, the number of laser ranging components N included in the laser radar is 3, and the n groups (n=3 in the example) of laser ranging components are 100a, 100b and 100c, a reflector 110, a MEMS micro-vibration mirror 120 and a data processing circuit 130. The n groups of laser ranging components are configured exactly the same. Taking 100a as an example, 100a is mainly composed of a laser 101a, a spectroscope 102a, and a detector 103a. Similarly, 100b is mainly composed of a laser 101b, a spectroscope 102b, and a detector 103b, and 100c is mainly composed of a laser 101c, a spectroscope 102c, and a detector 103c. The outgoing light beam 104a in the laser distance measuring component 100a is incident on the reflector 110, and the reflector 110 turns the optical path. After the turning, the light beam is incident on the MEMS micro-vibration mirror 120 again, and the MEMS micro-vibration mirror 120 realizes the scanning of the light beam 140a through two-dimensional swing. Similarly, the light beam 140b generated by the laser distance measuring component 100b is incident on the MEMS micro-vibration mirror 120, and the light beam 140c generated by the laser distance measuring component 100c is incident on the MEMS micro-vibration mirror 120, and the MEMS micro-vibration mirror 120 realizes the scanning of the light beam 140b and the light beam 140c through two-dimensional swing. The outgoing light beam 104a, after being adjusted in direction by the MEMS micro-vibration mirror 120, hits the target object, and its echo light beam 105a returns along the original path, and is received by the detector 103a after passing through the MEMS micro-vibration mirror 120, the reflector 110 and the beam splitter 102a. The three groups of laser distance measuring components 100a, 100b and 100c have the same structure and emit laser beams in time. The data processing circuit 130 is used for controlling and processing data of the n groups of laser distance measuring components 100a, 100b and 100c and the MEMS micro-vibration mirror 120.

[0113] In the embodiment of the present application, a group of reflectors 110 are set between n groups of laser ranging components 100 and MEMS micro-vibration mirrors 120, so that the layout of the laser radar is more compact and the space utilization rate is higher. By using the reflector to turn the light path, multiple groups of laser ranging components 100 and MEMS micro-vibration mirrors 110 are placed on the same side, which is conducive to the routing of the circuit board. At the same time, the MEMS micro-vibration mirror 120 can be used as the center, and the laser ranging component 100 can be arranged symmetrically on both sides of the MEMS with the MEMS as the center, so that the structure of the whole machine is more beautiful, reasonable and convenient. In this structure, the configuration of the laser radar can be flexibly adjusted by simply increasing or decreasing the number of laser ranging components 100. In addition, a reflector is added, and by using its function of turning the light path, the laser ranging component 100 and the MEMS micro-vibration mirror 120 can be placed in layers, thereby effectively avoiding the risk of the laser ranging component 100 blocking the scanning angle and maximizing the scanning angle of the laser radar. If no reflector is added, multiple components and the MEMS micro-vibration mirror are placed on the same plane. If the distance between the two is too close, the scanning angle may be blocked; if the distance between the two is too far, the structure of the entire lidar will not be compact enough. Therefore, a reflector is needed to fold the optical path and achieve layered placement of the two.

[0114] like Figure 5 As shown, it is a schematic diagram of the three-dimensional structure of a multi-threaded micro-vibration mirror laser radar provided in an embodiment of the present application. Seven groups of laser ranging components (100a, 100b, 100c, 100d, 100e, 100f and 100g) and a reflector 110 are placed on the base plate 140. Taking the laser ranging component 100a as an example, its outgoing light beam 104a is emitted horizontally and hits the reflector 110. The reflector 110 causes the outgoing light beam 104a to be folded. The folded outgoing light beam 104a is incident on the MEMS micro-vibration mirror 120. The beam scanning is realized by the two-dimensional swing of the MEMS micro-vibration mirror 120, and the echo light beam 105a scattered by the target object returns along the original light path. The optical paths of each laser ranging component are independent of each other and do not interfere with each other. Among them, the function of the bracket 1201 is to raise the position of the MEMS micro-vibration mirror 120, and the MEMS micro-vibration mirror 120 and the laser ranging component can be arranged in layers.

[0115] In the embodiment of the present application, a reflector 110 is used to connect the optical path, so that the MEMS micro-vibration mirror 120 and n groups of laser ranging components 100 can be placed on the same side, so that the routing channels of the laser ranging component 100 and the MEMS micro-vibration mirror 120 are consistent, which is beneficial to the circuit board wiring and heat dissipation of the laser ranging radar machine.

[0116] In the embodiment of the present application, a coordinate system is established with the MEMS micro-vibration mirror 120 to describe the positional relationship among the MEMS micro-vibration mirror 120, the laser ranging assembly 100 and the reflector 110. Figure 5 In the figure, the MEMS micro-vibration mirror 120 is in a three-dimensional xyz space, the xz plane is a horizontal plane, the yz plane is a vertical plane, and the MEMS micro-vibration mirror 120 mainly includes: a mirror surface 1201, a bottom surface 1202 of an outer frame, a front surface 1203 of an outer frame, a horizontal swing axis 1205, and a vertical swing axis 1204, wherein the horizontal swing axis 1205 and the vertical swing axis 1204 are perpendicular to each other, and when the mirror surface 1201 is stationary, the mirror surface 1201 is parallel to the front surface 1203 of the outer frame and perpendicular to the bottom surface 1202 of the outer frame. To simplify the description, the swing angle of the mirror surface 1201 is equivalent to the swing angle of the MEMS micro-vibration mirror 120, that is, the MEMS micro-vibration mirror 120 swings along the horizontal swing axis 1205, and its horizontal swing angle is x, and the MEMS micro-vibration mirror 120 swings along the vertical swing axis 1204, and its vertical swing angle is ω. Optionally, the horizontal swing angle and the vertical swing angle may be swing angles supported by the MEMS micro-vibration mirror 120 in a normal working state.

[0117] In the embodiment of the present application, the reflector 110 is used to arrange the multiple laser distance measuring components 100 symmetrically on the left and right sides of the bottom plate 140 with the MEMS micro-vibration mirror 120 as the center (for example, it can be considered that the horizontal swing axis 1205 of the MEMS micro-vibration mirror is the center), as shown in detail. Figure 6 . Figure 6 There are 7 groups of laser ranging components, with laser ranging component 100d in the middle, laser ranging components 100a, 100b and 100c, and laser ranging components 100e, 100f and 100g symmetrically arranged on both sides of laser ranging component 100d, respectively. The angles of the emitted light beams of adjacent laser ranging components on the horizontal plane can be flexibly designed to meet the requirements of the specified horizontal scanning angle. For example, when the horizontal swing angle of the MEMS micro-vibration mirror is 10°, a laser ranging component with a MEMS micro-vibration mirror can measure a horizontal angle of 20°. Using 3 laser ranging components to share the same MEMS micro-vibration mirror for horizontal angle splicing, a horizontal angle of 60° can be achieved. If the horizontal swing angle of the MEMS micro-vibration mirror is changed to 5°, a laser ranging component with a MEMS micro-vibration mirror only measures a horizontal angle of 10°. Six laser ranging components share the same MEMS micro-vibration mirror for horizontal angle stitching. Under this condition, a horizontal angle of 60° can also be achieved, but the resolution of the laser radar can be doubled compared to the resolution when the horizontal swing angle of the MEMS micro-vibration mirror is 10°. The reason is that the number of laser ranging components has increased from 3 to 6. The output light beams 104a, 104b, 104c, 104d, 104e, 104f, and 104g of the seven groups of laser ranging components 100 scan different areas respectively and perform angle stitching in the horizontal direction. For details, see Figure 6 shown.

[0118] In some embodiments of the present application, Figure 5 As shown, the aforementioned three-dimensional space coordinate system is defined on the MEMS micro-vibration mirror, and the angle θ between the outgoing light beams of two adjacent laser ranging components in the N laser ranging components on the horizontal plane and the horizontal swing angle χ of the MEMS micro-vibration mirror satisfy the following relationship:

[0119] θ≤2χ.

[0120] Among them, Figure 6 As shown, for example, the angle between the outgoing light beams of the laser ranging component 100c and the laser ranging component 100d on the horizontal plane is θ. The horizontal swing angle χ of the MEMS micro-vibration mirror and the angle θ between the outgoing light beams of any adjacent laser ranging components on the horizontal plane must satisfy the above relationship, which can ensure that the point cloud scanning tracks of multiple groups of laser ranging components are seamlessly spliced ​​in the horizontal direction.

[0121] In some embodiments of the present application, the number N of laser ranging components is related to the horizontal scanning angle of the multi-threaded micro-vibration mirror laser measurement module. The horizontal swing angle χ of the MEMS micro-vibration mirror and the angle θ of the outgoing light beams of two adjacent laser ranging components on the horizontal plane satisfy the following relationship:

[0122]

[0123] Among them, Figure 6 As shown, for example, the angle of the emitted light beams of the laser distance measuring component 100c and the laser distance measuring component 100d on the horizontal plane is θ, and the horizontal scanning angle of the multi-threaded micro-vibration mirror laser measurement module is The number of laser ranging components used is N; then the horizontal scanning angle of the multi-threaded micro-vibration mirror laser measurement module The horizontal swing angle χ of the MEMS micro-vibration mirror 120 (the swing range of the MEMS micro-vibration mirror is from -χ / 2 to χ / 2) and the angle θ of the output light beam of the adjacent laser ranging component on the horizontal plane satisfy the above relationship. N needs to satisfy the above constraint relationship to ensure the horizontal scanning angle range of the multi-threaded micro-vibration mirror laser measurement module, such as the horizontal scanning angle of the laser radar. When 106°, χ=8°, θ=15°, the value of N can be 6 or 7. The horizontal scanning angle of the multi-threaded micro-vibration mirror laser measurement module The horizontal swing angle χ of the MEMS micro-vibration mirror and the angle θ between the output light beams of two adjacent laser ranging components on the horizontal plane satisfy the above relationship, and the number of laser ranging components can be determined.

[0124] In some embodiments of the present application, the plane where the N laser distance measuring components are located and the plane where the MEMS micro-vibration mirror is located are different planes. Figure 5As shown, N laser ranging components and brackets are fixed on the base plate, and the MEMS micro-vibration mirror is installed on the bracket. The plane where the N laser ranging components are located and the plane where the MEMS micro-vibration mirror is located are different planes, so that the laser ranging components and the MEMS micro-vibration mirror can be placed in layers, thereby effectively avoiding the risk of the laser ranging component blocking the vertical scanning angle and maximizing the vertical scanning angle of the lidar.

[0125] In the embodiment of the present application, another function of the reflector 110 is to effectively avoid the obstruction of the vertical scanning angle, see Figure 7 As shown. Figure 7 In the figure, the outgoing light beam 104d of the laser distance measuring component 100d is horizontally incident on the reflector 110, and the angle between the incident light beam and the outgoing light beam on the reflector 110 in the vertical plane is α. In order to make the outgoing light beam still incident on the MEMS micro-vibration mirror 120, it is necessary to use the MEMS support 1201 to raise the MEMS micro-vibration mirror. By placing the MEMS micro-vibration mirror 120 and the laser distance measuring component 100d in layers, it is possible to effectively avoid angle obstruction of the outgoing light beam 104d during vertical scanning.

[0126] When the outer frame bottom surface 1202 of the MEMS micro-vibration mirror 120 is parallel to the bottom plate plane 140, the angle α between the incident light beam and the outgoing light beam on the reflector in the vertical plane is the vertical incident angle of the outgoing light beam 104d on the mirror surface 1201 of the MEMS micro-vibration mirror. When the angle α between the incident light beam and the outgoing light beam on the reflector in the vertical plane is too large, the scanning trajectory of the point cloud will be distorted, affecting the quality of the point cloud image. To solve this problem, in the embodiment of the present application, the MEMS micro-vibration mirror 120 can be tilted vertically downward along its vertical swing axis 1204 at a fixed angle, that is, the vertical tilt angle β of the MEMS micro-vibration mirror, to reduce the incident angle of the light beam on the mirror surface, and the tilt angle β is related to α.

[0127] In some embodiments of the present application, the angle α between the incident light beam and the outgoing light beam on the reflector of each of the N laser ranging components, the vertical tilt angle β of the MEMS micro-vibration mirror, and the vertical swing angle ω of the MEMS micro-vibration mirror satisfy the following relationship:

[0128] α≥ε(2β+ω),

[0129] Where ε is the installation error factor of the reflector and the MEMS mirror.

[0130] by Figure 7For example, the vertical swing angle of the MEMS micro-vibration mirror 120 is ω, and the swing range of the MEMS micro-vibration mirror is from -ω / 2 to ω / 2. To ensure that the laser radar is not blocked in the vertical direction of the scanning angle, the above relationship is satisfied between α, β and ω. ε is the installation error factor of the reflector and the MEMS micro-vibration mirror. ε is determined by the installation error caused by the external dimensions of the reflector and the MEMS micro-vibration mirror. For example, the value of ε can be any value from 1.05 to 1.3, and the specific value of ε is not limited. For example, when α=20°, β=5°, ω=15° and ε=1, the vertical scanning angle range of the laser radar is -5 to 25°, that is, the vertical scanning angle is 30°, and no angle blockage will occur at this time.

[0131] In some embodiments of the present application, the angle α between the incident light beam and the outgoing light beam of each of the N laser ranging assemblies on the reflector in the vertical plane is equal;

[0132] α is greater than or equal to 10 degrees and less than or equal to 50 degrees.

[0133] In some embodiments of the present application, the vertical tilt angle β of the MEMS micro-vibration mirror is greater than or equal to 5 degrees and less than or equal to 45 degrees.

[0134] Among them, the angle α between the incident light beam and the outgoing light beam on the reflector of each of the N laser ranging components in the vertical plane should be controlled within the range of 10° to 50°, for example, the angle α is 20°, or 25°, or 40°, etc. The vertical tilt angle β of the MEMS micro-vibration mirror ranges from 5° to 45°, for example, the angle β is 10°, or 15°, or 30°, etc. α is in the range of 10° to 50°, and β is in the range of 5° to 45°. If the angles α and β are too small, the distance between the MEMS micro-vibration mirror and the reflector will increase, and the volume of the laser radar will increase. If the angles α and β are too large, it means that the angle of the incident light on the MEMS micro-vibration mirror is also large, and the scanned image of the point cloud will be distorted. Therefore, α is in the range of 10° to 50°, and β is in the range of 5° to 45°, which can reduce the volume of the laser radar and avoid the distortion of the scanned image of the point cloud.

[0135] like Figure 8 As shown, the spatial positions of seven groups of laser ranging components 100, reflectors 110 and MEMS micro-vibration mirrors 120 are designed to form a multi-threaded micro-vibration mirror laser radar. Figure 8In the embodiment, the laser distance measuring assembly 100, the reflector 110, the MEMS micro-vibration mirror 120 and the bracket are installed on the bottom plate 140, and the connecting rod 150 is used to support the data processing circuit 130. The data processing circuit 130 is connected to the laser distance measuring assembly 100 through the cable 160, and the data processing circuit 130 is connected to the micro-vibration mirror 120 through the cable 170. The data processing circuit 130 is used for device control and data transmission. The outgoing light beams of the 7 groups of laser distance measuring assemblies are directed to the target through the housing window 180.

[0136] In the aforementioned Figures 5 to 8 The reflector in the figure further illustrates that the specific function of the reflector 110 is to change the pointing angle of the light beam. Both the outgoing light beam 104a and the echo light beam 105b can be deflected at an angle by the reflector 110. The reflector 110 can be a plane reflector or prism coated with a metal film or a dielectric film, or it can be an optical element with a bidirectional beam deflection function, such as a grating or a nano-optical antenna.

[0137] In some embodiments of the present application, the number and placement of laser ranging components can be flexibly changed to flexibly adjust the scanning angle and resolution of the laser radar. The more laser ranging components are used and the denser their arrangement, the higher the point cloud resolution that can be obtained, but the cost and size will also increase accordingly. Fig. 9 and Fig.10 The optical path structure of the whole machine when using 4 sets of laser ranging components and 3 sets of laser ranging components respectively. Fig. 9 In the embodiment, the laser distance measuring components 100a, 100b and the laser distance measuring components 100c, 100d are symmetrically distributed about the MEMS micro-vibration mirror 120. Fig.10 In the figure, the laser distance measuring component 100a and the laser distance measuring component 100c are symmetrically distributed about the MEMS micro-vibration mirror 120, and the laser distance measuring component 100b and the MEMS micro-vibration mirror 120 are located on the same vertical plane.

[0138] In the aforementioned Figure 5 , Figure 6 , Figure 8 In the embodiment, multiple groups of laser distance measuring components correspond to only one reflector 110. Sometimes, in order to reduce the size of the reflector 110, it can be split so that each group of laser distance measuring components corresponds to one reflector. Fig.11 shown. Fig.11 In the embodiment, three groups of laser ranging components 100b, 100d and 100f are used in total, and the output light beams 104b, 104d and 104f thereof hit the reflective mirrors 110b, 110d and 110f respectively, and are incident on the MEMS micro-vibration mirror 120 after the light beams are refracted.

[0139] exist Fig.12 In the method, multiple groups of laser ranging components can correspond to multiple groups of reflectors. Fig.12 In the embodiment, a total of 7 groups of laser ranging components are used, among which the outgoing light beams 104a and 104b of the laser ranging components 100a and 100b hit the reflector 110a, the outgoing light beams 104c, 104d and 104e of the laser ranging components 100c, 100d and 100e hit the reflector 110b, and the outgoing light beams 104f and 104g of the laser ranging components 100f and 100g hit the reflector 110c, that is, a total of 3 groups of reflectors are used to deflect the outgoing light beams of the 7 groups of laser ranging components and guide the 7 groups of light beams to the MEMS micro-vibration mirror 120.

[0140] A multi-threaded micro-vibration mirror laser radar provided in an embodiment of the present application mainly includes multiple groups of laser ranging components, a reflector, a single MEMS micro-vibration mirror, and a data processing circuit, wherein the reflector folds the outgoing light beams of the multiple groups of laser ranging components onto the MEMS micro-vibration mirror, and realizes the light beam scanning through the two-dimensional swing of the MEMS micro-vibration mirror. The reflector is used to fold the light path so that the MEMS micro-vibration mirror and the multiple groups of laser ranging components are placed on the same side, and the multiple groups of laser ranging components are symmetrically arranged on both sides of the MEMS micro-vibration mirror, which is conducive to improving the integration of the system. The reflector folds the light beam emitted by the laser ranging component upward by a fixed angle of 10° to 50°, so that the multiple groups of laser ranging components and the MEMS micro-vibration mirror are placed in layers to avoid the laser ranging component from blocking the beam scanning angle. The MEMS micro-vibration mirror is tilted downward by a fixed angle of 5° to 45° to reduce the incident angle of the light beam on the MEMS micro-vibration mirror, so as to achieve the purpose of reducing the distortion of the point cloud image.

[0141] In addition, in the embodiments of the present application, multiple groups of laser ranging components can share one or more groups of reflectors.

[0142] The reflector can be a plane reflector or a prism coated with a metal film or a dielectric film, or can be an optical element with a bidirectional beam deflection function, such as a grating or a nano-optical antenna.

[0143] The present application proposes a multi-threaded micro-vibration mirror laser radar optical-mechanical structure, which uses a reflector to realize the optical path connection of multiple groups of laser ranging components and a single MEMS micro-vibration mirror, so that the integration and compactness of the laser radar system are greatly improved and the cost is effectively reduced. The multi-threaded laser radar provided in the embodiment of the present application is characterized not only by a single reflector, but by using the reflector, the overall optical-mechanical structure of the laser radar is significantly improved in terms of integration and compactness.

[0144] like Fig.13As shown, the embodiment of the present application provides a laser measurement module 100, including: N laser ranging components 101, N reflectors 102 and MEMS micro-vibration mirrors 103, N is a positive integer greater than or equal to 2, wherein,

[0145] The N laser distance measuring components 101 correspond to the N reflectors 102 one by one;

[0146] The outgoing light beam of each laser distance measuring assembly 101 in the N laser distance measuring assemblies 101 is incident on the corresponding reflecting mirror 102 in the N reflecting mirrors 102;

[0147] Each of the N reflectors 102 is used to deflect the optical path of the outgoing light beam of the corresponding laser distance measuring component 101, and make the deflected outgoing light beam incident on the MEMS micro-vibration mirror 103;

[0148] The MEMS micro-vibration mirror 103 is used to receive the outgoing light beams sent by the N reflectors respectively, change the directions of the outgoing light beams sent by the N reflectors respectively, and send out the outgoing light beams corresponding to the N reflectors respectively to achieve scanning; it is also used to change the direction of the echo light beam and make the echo light beam incident on the corresponding reflector 102, wherein the echo light beam is the light beam reflected by the outgoing light beam incident on the target object;

[0149] Each of the N reflectors 102 is used to deflect the optical path of the echo light beam sent by the MEMS micro-vibration mirror 103, and to make the deflected echo light beam incident on the corresponding laser ranging component 101;

[0150] Each of the N laser ranging components 101 is also used to receive the echo light beam sent by the corresponding reflector 102, and to perform distance measurement according to the time difference between the outgoing light beam emitted by each laser ranging component 101 and the received echo light beam.

[0151] The laser measurement module provided in the embodiment of the present application includes a plurality of laser ranging components, and the number of laser ranging components is represented by N. For example, three laser ranging components may be provided in the laser measurement module, and six laser ranging components may be provided in the laser measurement module, etc., depending on the application scenario. The laser ranging component is used to generate a light beam, which is defined as an outgoing light beam, and the outgoing light beam generated by the N laser ranging components in the embodiment of the present application will not be directly incident on the MEMS micro-vibration mirror, but the laser ranging component first incidents the outgoing light beam on the reflector, and the reflector can be turned by the optical path, and the outgoing light beam can be incident on the MEMS micro-vibration mirror through the optical path turning of the reflector, so only one MEMS micro-vibration mirror is needed, and there is no need to set a corresponding MEMS micro-vibration mirror for each laser ranging component, and the reflector is used to realize the optical path connection between multiple laser ranging components and a single MEMS micro-vibration mirror, thereby improving the integration and compactness of the laser measurement module, effectively reducing the manufacturing cost of the laser radar, and being suitable for vehicle-mounted environments with strict requirements on volume, size and cost.

[0152] Among them, the number of laser ranging components and the number of reflectors in the laser measurement module are equal. For example, the number of laser ranging components and the number of reflectors are both N. One laser ranging component corresponds to one reflector, that is, the outgoing light beam of each laser ranging component is only sent to the reflector corresponding to the laser ranging component. Similarly, the echo light beam received by a reflector from a MEMS micro-vibration mirror is also only sent to the laser ranging component corresponding to the reflector. In the embodiment of the present application, N laser ranging components share the same MEMS micro-vibration mirror, and each laser ranging component corresponds to a completely independent reflector, which makes the position of the laser ranging component in the laser measurement module always fixed. Only by adjusting the design of the reflector, the properties of the laser radar such as the scanning angle, light emitting direction and appearance can be changed. The flexible optical path architecture greatly improves the application scalability of the laser radar. In addition, in the embodiment of the present application, each laser ranging component can send its own outgoing light beam to the corresponding reflector, so the position of the laser ranging component is fixed and unchanged, and the optical path adjustment is only performed by adjusting the passive reflector, which can improve the stability and convenience of the optical path adjustment.

[0153] As an example, the N laser ranging components are the first laser ranging component, the second laser ranging component, ..., the Nth laser ranging component. The N reflectors are the first reflector, the second reflector, ..., the Nth reflector. Next, the light beam transmission between the i-th laser ranging component and the i-th reflector is described in detail, where i is a positive integer less than or equal to N.

[0154] For example, the outgoing light beam of the i-th laser ranging assembly among the N laser ranging assemblies is incident on the i-th reflector among the N reflectors;

[0155] The i-th reflector is used to deflect the optical path of the outgoing light beam of the i-th laser ranging component, and make the deflected outgoing light beam incident on the MEMS micro-vibration mirror;

[0156] The i-th reflector is used to deflect the optical path of the echo light beam sent by the MEMS micro-vibration mirror, and to make the deflected echo light beam incident on the i-th laser ranging component;

[0157] The i-th laser ranging component is also used to receive the echo light beam sent by the i-th reflector, and to perform ranging according to the time difference between the outgoing light beam emitted by the i-th laser ranging component and the received echo light beam.

[0158] Among them, combined Fig.13 As shown, each laser ranging component corresponds to a reflector, for example, the i-th laser ranging component corresponds to the i-th reflector. Since each laser ranging component in the embodiment of the present application can send its own outgoing light beam to the corresponding reflector, the position of the laser ranging component is fixed and unchanged, and the optical path is adjusted only by adjusting the passive reflector. For the ranging algorithm executed by the i-th laser ranging component, please refer to the description of the aforementioned embodiment, which will not be repeated here.

[0159] In some embodiments of the present application, a plurality of beam steering elements may be further provided in the laser measurement module. Among them, the beam steering element is used to realize the steering of the light beam received by the beam steering element, for example, the beam steering element has a beam reflection function, or has a beam refraction function, so as to change the direction of the light beam received by the element. In the embodiment of the present application, the beam steering element may be provided between the laser ranging component and the reflector. It is not limited that, in the embodiment of the present application, the light beam can be directly transmitted between the laser ranging component and the reflector, that is, without the aid of the beam steering element, or the light beam can be transmitted between the laser ranging component and the reflector through the beam steering element, and a detailed example is given below.

[0160] It should be noted that in the embodiments of the present application, if the laser ranging component and the reflector can transmit the light beam through the light beam steering element, the light beam steering element and the reflector can be collectively referred to as a reflector group. In the subsequent embodiments, the light beam steering element and the reflector are collectively referred to as a reflector group for illustration.

[0161] In some embodiments of this application, please refer to Fig.14 As shown, Fig.14 In the example, N is greater than or equal to 7. However, the value of N is not limited thereto, and the value of N may also be 3 or 5. The laser measurement module further includes: (N-1) beam steering elements;

[0162] When the value of N is an odd number greater than or equal to 5, if i is a positive integer less than (N+1) / 2, the i-th laser ranging assembly 101 among the N laser ranging assemblies 101 sends the output light beam to the i-th reflector 102 among the N reflectors 102 through the i-th beam steering element among the (N-1) beam steering elements;

[0163] If i is a positive integer greater than (N+1) / 2, the i-th laser ranging assembly 101 among the N laser ranging assemblies 101 sends the output light beam to the i-th reflector 102 among the N reflectors 102 through the (i-1)-th beam steering element among the (N-1) beam steering elements;

[0164] Wherein, i is a positive integer less than or equal to N.

[0165] Specifically, when the value of N is an odd number, the laser measurement module also includes (N-1) beam steering elements. Since the number of laser ranging components and reflectors in the laser measurement module is N, the number of beam steering elements in the laser measurement module is one less than the number of laser ranging components. For the (N+1) / 2nd laser ranging component located at the center of the N laser ranging components, the outgoing light beam of the (N+1) / 2nd laser ranging component is directly output and sent to the (N+1) / 2nd reflector without passing through the beam steering element. For the other laser ranging components among the N laser ranging components except the (N+1) / 2nd laser ranging component, the outgoing light beam is sent to the corresponding reflector through the beam steering element.

[0166] exist Fig.14 For the first (N-1) / 2 laser ranging components and the first (N-1) / 2 reflectors in the laser measurement module, the optical path connection can be achieved through the (N-1) / 2th beam steering element. For the (N+1) / 2th laser ranging component and the (N+1) / 2th reflector in the laser measurement module, the optical path connection is directly made without passing through the beam steering element. For the (N+3) / 2th laser ranging component and the (N+3) / 2th reflector in the laser measurement module, the optical path connection can be achieved through the (N+1) / 2th beam steering element. Similarly, for the Nth laser ranging component and the Nth reflector in the laser measurement module, the optical path connection can be achieved through the (N-1)th beam steering element.

[0167] In some embodiments of the present application, the angle between the i-th reflector and the i-th laser ranging component is less than a preset first angle threshold. Fig.14The laser measurement module shown. The value of the first angle threshold can be determined according to the positional relationship between the reflector and the laser ranging component on the laser measurement module. For example, the first angle threshold can be any angle value within the range of 20 degrees to 50 degrees.

[0168] For example, the laser measurement module includes N reflector groups. When N is an odd number greater than or equal to 5, if i is not equal to (N+1) / 2, the i-th reflector group includes: a reflector and a beam steering element. If i is equal to (N+1) / 2, the i-th reflector group includes a reflector, and the i-th reflector group does not include a beam steering element. For example, in combination Fig.14 As shown, when the value of i is equal to (N+1) / 2, the reflectors (N+1) / 2 constitute a reflector group, and when i is not equal to (N+1) / 2, a reflector and a beam steering element constitute a reflector group.

[0169] In some embodiments of this application, please refer to Fig.15 As shown, Fig.15 In the example, N is greater than or equal to 8. However, the value of N is not limited thereto, and the value of N may also be 2, 4, 6, etc. The laser measurement module further includes: (N-2) beam steering elements;

[0170] When the value of N is an even number greater than or equal to 6, if i is less than N / 2, the i-th laser ranging assembly 101 among the N laser ranging assemblies 101 sends the output light beam to the i-th reflector 102 among the N reflectors 102 through the i-th beam steering element among the (N-2) beam steering elements;

[0171] If i is greater than (N+2) / 2, the i-th laser ranging assembly 101 among the N laser ranging assemblies 101 sends the output beam to the i-th reflector 102 among the N reflectors 102 through the (i-2)-th beam steering element among the (N-2) beam steering elements;

[0172] Wherein, i is a positive integer less than or equal to N.

[0173] Specifically, when the value of N is an even number, the laser measurement module further includes (N-2) beam steering elements. Since the number of laser ranging components and reflectors in the laser measurement module is N, the number of beam steering elements in the laser measurement module is 2 less than the number of laser ranging components. For the (N+2) / 2nd laser ranging component and the N / 2nd laser ranging component located in the center of the N laser ranging components, the outgoing beam of the (N+2) / 2nd laser ranging component is sent to the (N+2) / 2nd reflector without passing through the beam steering element, and the outgoing beam of the N / 2nd laser ranging component is sent to the N / 2nd reflector. For the other laser ranging components except the (N+2) / 2nd laser ranging component and the N / 2nd laser ranging component among the N laser ranging components, the outgoing beam is sent to the corresponding reflector through the beam steering element.

[0174] exist Fig.15 In the example, for the first (N-2) / 2 laser ranging components and the first (N-2) / 2 reflectors in the laser measurement module, the optical path connection can be achieved through the (N-2) / 2 beam steering element. For the N / 2th laser ranging component and the N / 2th reflector in the laser measurement module, the optical path connection is directly made without passing through the beam steering element. Similarly, for the (N+2) / 2th laser ranging component and the (N+2) / 2th reflector in the laser measurement module, the optical path connection is directly made without passing through the beam steering element. For the (N+4) / 2th laser ranging component and the (N+4) / 2th reflector in the laser measurement module, the optical path connection can be achieved through the N / 2th beam steering element. Similarly, for the Nth laser ranging component and the Nth reflector in the laser measurement module, the optical path connection can be achieved through the (N-2)th beam steering element.

[0175] In some embodiments of the present application, the angle between the i-th reflector and the i-th laser ranging component is less than a preset first angle threshold. Fig.15 The laser measurement module shown. The value of the first angle threshold can be determined according to the positional relationship between the reflector and the laser ranging component on the laser measurement module. For example, the first angle threshold can be any angle value within the range of 20 degrees to 50 degrees.

[0176] For example, the laser measurement module includes N reflector groups. When N is an even number greater than or equal to 6, if i is not equal to (N+2) / 2 and not equal to N / 2, the i-th reflector group includes: a reflector and a beam steering element. If i is equal to (N+2) / 2 or equal to N / 2, the i-th reflector group includes a reflector, but the i-th reflector group does not include a beam steering element. For example, in combination Fig.15As shown, when the value of i is equal to (N+2) / 2 or equal to N / 2, reflector (N+2) / 2 constitutes a reflector group, and reflector N / 2 constitutes a reflector group. When i is not equal to (N+2) / 2 and not equal to N / 2, a reflector and a beam steering element constitute a reflector group.

[0177] In some embodiments of the present application, the beam steering element 104 is used to refract the outgoing beam of the laser ranging component 101 and make the refracted outgoing beam incident on the reflector 102;

[0178] The beam steering element 104 is also used to direct the echo beam sent by the reflector 102 into the laser ranging component 101 .

[0179] The beam steering element 104 can be used to realize steering the beam received by the beam steering element 104. For example, the beam steering element 104 has a beam refraction function, so that the direction of the beam received by the beam steering element 104 can be changed. The beam steering element 104 receives the outgoing beam from the laser ranging component 101 and can refract the outgoing beam. The beam steering element 104 receives the echo beam from the reflector 102, refracts the echo beam, and finally sends the echo beam to the laser ranging component 101, which performs ranging.

[0180] In some embodiments of the present application, the light beam steering element may be a folding mirror, which has a light beam refraction function, and the folding mirror may be arranged between the laser distance measuring component and the reflector. For example, the folding mirror includes: a prism. In the subsequent embodiments, the prism is used to implement the light path refraction function. It is not limited to that in Fig.14 and Fig.15 The light beam steering element shown may also be other devices with a light beam refraction function, which is only used as an example here and is not intended to limit the embodiments of the present application.

[0181] In some embodiments of this application, please refer to Fig.16 As shown, the laser measurement module also includes: N beam steering elements;

[0182] The N beam steering elements correspond one to one with the N reflectors 102;

[0183] Each of the N laser distance measuring assemblies 101 directs the outgoing light beam to the corresponding reflector 102 through the corresponding light beam steering element.

[0184] Specifically, the laser measurement module also includes N beam steering elements. Since the number of laser ranging components and reflectors in the laser measurement module is N, the number of beam steering elements in the laser measurement module is equal to the number of laser ranging components, and the number of beam steering elements in the laser measurement module is also equal to the number of reflectors. Each of the N laser ranging components passes through a beam steering element, and the outgoing beam of each laser ranging component is sent to the corresponding reflector.

[0185] exist Fig.16 In the laser measurement module, each laser distance measuring component and each reflector can be optically connected through a beam steering element. For example, laser distance measuring component 1 and reflector 1 are optically connected through beam steering element 1, laser distance measuring component 2 and reflector 2 are optically connected through beam steering element 2, and laser distance measuring component N and reflector N are optically connected through beam steering element N.

[0186] In some embodiments of the present application, the angle between the i-th reflector and the i-th laser ranging component is greater than a preset first angle threshold. Fig.16 The laser measurement module shown. The value of the first angle threshold can be determined according to the positional relationship between the reflector and the laser ranging component on the laser measurement module. For example, the first angle threshold can be any angle value within the range of 20 degrees to 50 degrees.

[0187] For example, the laser measurement module includes N reflector groups, i is any positive integer less than or equal to N, and the i-th reflector group includes: a reflector and a beam steering element. Fig.16 As shown, when the value of i is equal to (N / 2+1), the reflector (N / 2+1) constitutes a reflector group. The value of i here can also be other values ​​less than or equal to N. This is only for illustration and not for limitation of the embodiments of the present application.

[0188] based on Fig.16 As shown, the beam steering element is used to realize steering the light beam received by the element. For example, the beam steering element has a beam reflection function, so that the direction of the light beam received by the element can be changed. The beam steering element 104 receives the outgoing light beam from the laser ranging component 101 and can reflect the outgoing light beam. The beam steering element 104 receives the echo light beam from the reflector 102, then reflects the echo light beam, and finally sends the echo light beam to the laser ranging component 101, which performs ranging.

[0189] In some embodiments of the present application, the beam steering element may be a steering mirror, which has a beam reflection function. The steering mirror may be arranged between the laser ranging component and the reflector. In the subsequent embodiments, the steering mirror is used to realize the light path reflection function. Fig.16 The light beam steering element shown may also be other devices with a light beam reflection function, which is only used as an example here and is not intended to limit the embodiments of the present application.

[0190] In some embodiments of the present application, N reflectors are located on the same straight line, and when the value of N is an odd number greater than or equal to 5,

[0191] If i is an integer greater than 2 and less than or equal to (N+1) / 2, the spacing between the (i-2)th reflector and the (i-1)th reflector among the N reflectors is not less than the spacing between the (i-1)th reflector and the i-th reflector;

[0192] If i is an integer greater than (N+1) / 2 and less than or equal to N, the spacing between the (i-2)th reflector and the (i-1)th reflector among the N reflectors is not greater than the spacing between the (i-1)th reflector and the i-th reflector.

[0193] Optionally, with the (N+1) / 2th reflector as the center, the remaining reflectors among the N reflectors except the (N+1) / 2th reflector are symmetrically distributed.

[0194] Among them, N reflectors are located on the same straight line, for example, the centers of the mirror surfaces of the N reflectors can be located on the same straight line, and the N reflectors are symmetrically distributed. For example, the intervals between two adjacent reflectors among the N reflectors are not equal. When the value of N is an odd number greater than or equal to 5, the (N+1) / 2th reflector is taken as the center, for example, when the value of N is 5, the 3rd reflector is taken as the center. The reflectors except the (N+1) / 2th reflector among the N reflectors are symmetrically and unequally spaced.

[0195] In an embodiment of the present application, the intervals between two adjacent reflectors in the N reflectors may be equal or unequal. For example, when N is equal to 3, the intervals between two adjacent reflectors are equal. For another example, the intervals between two adjacent reflectors in the N reflectors are unequal, and the intervals between the two reflectors closer to the center are smaller, and the intervals between the two reflectors farther from the center are larger. For example, if i is an integer greater than 2 and less than or equal to (N+1) / 2, the interval between the (i-2)th reflector and the (i-1)th reflector in the N reflectors is not less than the interval between the (i-1)th reflector and the i-th reflector, and the (i-2)th reflector, the (i-1)th reflector, and the i-th reflector gradually approach the center (i.e., the (N+1) / 2th reflector) in sequence, so the interval between the (i-1)th reflector and the i-th reflector is not greater than the interval between the (i-2)th reflector and the (i-1)th reflector. Similarly, if i is an integer greater than (N+1) / 2 and less than or equal to N, the spacing between the (i-2)th reflector and the (i-1)th reflector among the N reflectors is not greater than the spacing between the (i-1)th reflector and the i-th reflector.

[0196] In some embodiments of the present application, N reflectors are located on the same straight line, and when the value of N is an even number greater than or equal to 6,

[0197] If i is an integer greater than 2 and less than or equal to N / 2, the spacing between the (i-2)th reflector and the (i-1)th reflector among the N reflectors is not less than the spacing between the (i-1)th reflector and the i-th reflector;

[0198] If i is an integer greater than N / 2 and less than or equal to N, the spacing between the (i-2)th reflector and the (i-1)th reflector among the N reflectors is not greater than the spacing between the (i-1)th reflector and the i-th reflector.

[0199] Optionally, with the midpoint between the N / 2th reflector and the N / 2+1th reflector as the center, the remaining reflectors among the N reflectors except the N / 2th reflector and the N / 2+1th reflector are symmetrically distributed.

[0200] The N reflectors are located on the same straight line, for example, the centers of the mirror surfaces of the N reflectors can be located on the same straight line, and the N reflectors are symmetrically distributed. For example, the intervals between two adjacent reflectors in the N reflectors are not equal. When the value of N is an even number greater than or equal to 6, the midpoint between the N / 2th reflector and the N / 2+1th reflector is taken as the center, and the remaining reflectors in the N reflectors except the N / 2th reflector and the N / 2+1th reflector are symmetrically and unequally spaced.

[0201] In some embodiments of the present application, the intervals between two adjacent reflectors in the N reflectors may be equal or unequal. For example, when N is equal to 3, the intervals between two adjacent reflectors are equal. For another example, the intervals between two adjacent reflectors in the N reflectors are unequal, and the intervals between the two reflectors closer to the center are smaller, and the intervals between the two reflectors farther from the center are larger. For example, if i is an integer greater than 2 and less than or equal to N / 2, the interval between the (i-2)th reflector and the (i-1)th reflector in the N reflectors is not less than the interval between the (i-1)th reflector and the i-th reflector, and the (i-2)th reflector, the (i-1)th reflector, and the i-th reflector gradually approach the center (i.e., the midpoint between the N / 2th reflector and the N / 2+1th reflector) in sequence, so the interval between the (i-1)th reflector and the i-th reflector is not greater than the interval between the (i-2)th reflector and the (i-1)th reflector. Similarly, if i is an integer greater than N / 2 and less than or equal to N, the spacing between the (i-2)th reflector and the (i-1)th reflector among the N reflectors is not greater than the spacing between the (i-1)th reflector and the i-th reflector.

[0202] An example is given below. For example, if the value of N is 5, in order to ensure that the scanning areas of the five groups of laser ranging components are continuously spliced ​​and the scanned images are not misaligned, it is required that the five groups of outgoing light beams after the MEMS micro-vibration mirror are distributed at equal angles in the horizontal direction (X axis) and have the same outgoing angle in the vertical direction (Y axis). The five reflectors need to be arranged in a straight line along the X axis. For example, with the third reflector as the center, the first two reflectors and the last two reflectors are in a left-right mirror relationship, and the five reflectors are arranged at unequal intervals. The intervals between the two outer reflectors on both sides are larger, and the intervals between the two reflectors near the center are smaller. By changing the intervals, shapes and other parameters of the five reflectors, the angle of the light beam incident on the MEMS micro-vibration mirror can be changed, thereby achieving a specific scanning angle output.

[0203] In some embodiments of the present application, the angle between the mirror normal of the i-th reflector among the N reflectors and the output light beam of the i-th reflector is equal to the angle between the mirror normal of the (i+1)-th reflector among the N reflectors and the output light beam of the (i+1)-th reflector;

[0204] Wherein, i is a positive integer less than or equal to N.

[0205] In an embodiment of the present application, the i-th reflector and the (i+1)-th reflector among the N reflectors are two adjacent reflectors, and the outgoing light beam of the i-th reflector and the outgoing light beam of the (i+1)-th reflector are both sent to the MEMS micro-vibration mirror. The angle between the mirror normal of the i-th reflector among the N reflectors and the outgoing light beam of the i-th reflector is the first angle, and the angle between the mirror normal of the (i+1)-th reflector among the N reflectors and the outgoing light beam of the (i+1)-th reflector is the second angle, then the first angle and the second angle are equal, that is, the angle between the mirror normal of each reflector among the N reflectors and the outgoing light beam of the reflector is the same, thereby ensuring that the outgoing light beams of the N reflectors are incident on the MEMS micro-vibration mirror in the same direction, thereby ensuring that the MEMS micro-vibration mirror can receive N outgoing light beams from the same direction.

[0206] It should be noted that the equality of the first angle and the second angle here means that the two angles are equal when the error is ignored and the precision is the same. For example, if the first angle is 32 degrees and the second angle is also 32 degrees, then the first angle and the second angle are equal. If there is a certain error, they can also be considered equal. For example, if the error is 0.1 degrees, the first angle is 32.01 degrees, and the second angle is also 32.03 degrees, then the first angle and the second angle can also be considered equal.

[0207] An example is given below. Taking the value of N as 5, after being reflected by 5 reflectors and the MEMS micro-vibration mirror, 5 outgoing light beams are emitted at equal angles in the same plane, with an angle interval of 15°, and the plane 400 is parallel to the bottom surface where the laser ranging component is located. The MEMS micro-vibration mirror swings in a two-dimensional space. For example, the swing angle of the MEMS micro-vibration mirror in one dimension (such as the horizontal direction) is 20°, and the swing angle of the MEMS micro-vibration mirror in another dimension (such as the vertical direction) is 20°. The swing angle of the MEMS micro-vibration mirror can be abbreviated as 20*20°. Five groups of laser ranging components and five groups of reflectors can be used to achieve a scanning range of 100*20°, where 100*20° means that the swing angle in one dimension is 100° and the swing angle in another dimension is 20°.

[0208] In some embodiments of the present application, the MEMS micro-vibration mirror is used to receive the outgoing light beams sent by N reflectors respectively, and change the directions of the outgoing light beams sent by the N reflectors respectively to achieve two-dimensional scanning; and send out the outgoing light beams corresponding to the N reflectors respectively;

[0209] Among them, the included angles between the outgoing light beams sent by two adjacent reflectors in the outgoing light beams corresponding to the N reflectors sent by the MEMS micro-vibration mirror are equal.

[0210] Specifically, the laser measurement module may include N reflectors, and the N reflectors may emit N outgoing light beams. The MEMS micro-vibration mirror is used to receive the outgoing light beams sent by the N reflectors respectively, and change the directions of the outgoing light beams sent by the N reflectors respectively, to achieve two-dimensional scanning; and send out the outgoing light beams corresponding to the N reflectors respectively. For the outgoing light beams corresponding to the N reflectors sent by the MEMS micro-vibration mirror, the angles between the outgoing light beams sent by two adjacent reflectors are equal, that is, the angles between the N outgoing beams sent by the MEMS micro-vibration mirror are equal, see the stereogram description in the subsequent embodiments for details.

[0211] In some embodiments of the present application, N laser ranging components are parallel to each other. That is, in the laser measurement module, N laser ranging components are parallel to each other, so it is convenient to set multiple laser ranging components in the laser measurement module, as long as the multiple laser ranging components are parallel to each other. Therefore, the internal components of the laser measurement module provided in the embodiment of the present application are more compact, and the miniaturization of the laser measurement module is achieved. See the stereogram in the subsequent embodiments for an example of the parallel relationship of multiple laser ranging components.

[0212] Next, the laser measurement module provided in the embodiment of the present application is described in detail with reference to a detailed application scenario.

[0213] The embodiment of the present application relates to a MEMS micro-vibration mirror laser measurement module, which has high scalability and can use multiple laser ranging components to share the same MEMS micro-vibration mirror. Each laser ranging component corresponds to a reflector group, and the reflector group is used to link the optical path between the laser ranging component and the MEMS micro-vibration mirror. Each laser ranging component corresponds to a completely independent reflector group, which makes the laser ranging component always fixed. Only by adjusting the design of the reflector group, the properties of the laser radar such as the scanning angle, light emitting direction and appearance can be changed. The flexible optical path architecture greatly improves the application scalability of the MEMS laser radar. In addition, the position of the laser ranging component is fixed, and the optical path adjustment is only performed by adjusting the passive reflector group, which can improve the stability and convenience of the optical path adjustment.

[0214] For example Fig.17 The MEMS micro-vibration mirror laser measurement module shown, Fig.17The laser distance measuring components of N groups are included, N=4, laser distance measuring components 100a, 100b, 100c and 100d, four reflector groups 110a, 110b, 110c and 110d, and a MEMS micro-vibration mirror 120. The configurations of the four laser distance measuring components are exactly the same. Taking 100a as an example, 100a is mainly composed of a laser 101a, a beam splitter 102a, a detector 103a and other necessary optical components (conventional components such as a collimator and a light collecting mirror are not shown) and a driving circuit. The reflector group is mainly composed of optical components such as a beam steering element (for example, a steering mirror and a refracting mirror) and a reflector. If the beam steering element is a refracting mirror, the reflector group can also be called a refracting mirror group. Taking the reflector group 110a as an example, taking the refracting mirror as a wedge, the reflector group includes: a wedge 111a and a reflector 112a, wherein the parameters or spatial positions of the wedges and reflectors in the four reflector groups 110a, 110b, 110c and 110d are all different.

[0215] The outgoing light beam 104a in the laser distance measuring assembly 100a is incident on the reflector assembly 110a. The outgoing light beam 104a is first refracted by the prism 111a, and then incident on the reflector 112a. The outgoing light beam 104a after passing through the reflector 112a is incident on the MEMS micro-vibration mirror 120, and the MEMS micro-vibration mirror 120 realizes the beam scanning 130a through two-dimensional swing. The outgoing light beam 104a after changing the direction by the MEMS micro-vibration mirror 120 hits the target, and its echo light beam 105a returns along the original path, passes through the optical components such as the MEMS micro-vibration mirror 120, the reflector 112a, the prism 11a and the beam splitter 102a again, and is finally received by the detector 103a.

[0216] The four groups of laser distance measuring components 100a, 100b, 100c and 100d form a one-to-one relationship with the four groups of reflector groups 110a, 110b, 110c and 110d, and the outgoing light beams 104a, 104b, 104c and 104d are modulated in direction by the reflector groups 110a, 110b, 110c and 110d respectively, and then incident on the MEMS micro-vibration mirror 120, so as to realize the angle splicing of the four groups of scanning light 130a, 130b, 130c and 130d in the horizontal direction. In order to achieve accurate angle splicing, the folding mirror group needs to be designed according to the position and light emission direction of the corresponding laser distance measuring component.

[0217] like Fig.18As shown, it is a specific embodiment 1 of the present application, 5 groups of laser ranging components 100a, 100b, 100c, 100d and 100e, mirror groups 110a, 110b, 110c, 110d and 110e, a MEMS micro-vibration mirror 120 and a bracket 121 are placed on the bottom plate 200, wherein the 5 groups of laser ranging components and the 4 groups of mirror groups form a one-to-one relationship. The direction of the outgoing beam of the laser ranging component is defined as the Z direction, the direction perpendicular to the bottom plate upward is the Y direction, and the X direction satisfies the right-hand rule.

[0218] Taking the laser distance measuring component 100a as an example, its outgoing light beam 104a passes through the reflector group 110a and is incident on the MEMS micro-vibration mirror 120. The outgoing light beam paths of the remaining laser distance measuring components 100b, 100c, 100d and 100e are similar to that of the laser distance measuring component 110a, and their outgoing light beams pass through their corresponding reflector groups 110b, 110c, 110d and 110e and are incident on the MEMS micro-vibration mirror 120. The function of the reflector groups 110a, 110b, 110c, 110d and 110e is to change the outgoing light direction of the laser distance measuring components 100a, 100b, 100c, 100d and 100e so that they hit the MEMS micro-vibration mirror 120 according to the specified path. When the MEMS micro-vibration mirror 120 swings in two dimensions, the scanning angle splicing of multiple laser distance measuring components is realized. When the swing angle of the MEMS micro-vibration mirror 120 is 20*20°, a scanning angle range of 100*20° can be achieved by using 5 groups of laser distance measurement components and 5 groups of reflective mirrors for scanning angle splicing.

[0219] like Fig.19As shown, it is a top view of a specific embodiment 1 of the present application, in which laser ranging components 100a, 100b, 100c, 100d and 100e are arranged parallel to the X axis and at equal intervals, so that the space occupied by the components is minimized. The outgoing light beams of the five groups of laser ranging components are incident on the MEMS micro-vibration mirror 120 after passing through the reflector groups 110a, 110b, 110c, 110d and 110e respectively. Taking the outgoing light beam 104a of the laser ranging component 100a as an example, the outgoing light beam 104a is refracted on the prism 111a. The function of the prism 111a is to bring the outgoing light beam 104a closer to the center to achieve the effect of reducing the optical path length. After passing through the prism 111a, the outgoing light beam 104a hits the reflector 112a. The function of the reflector 112a is to change the direction of the outgoing light beam 104a so that it is incident on the MEMS micro-vibration mirror 120. The functions and characteristics of the reflector groups 110b, 110d and 110e are consistent with those of the reflector group 100a, but the middle reflector group 110c is different from the reflector groups 110b, 110d, 110e and the reflector group 100a, that is, the reflector group 100c does not have a wedge, but only a single reflector 112c. If the folding mirror group 110c is taken as the center, the folding mirror groups 110a and 110b are in a left-right mirror relationship with the folding mirror groups 110d and 110e.

[0220] In the present embodiment 1, the reflectors 112a, 112b, 112c, 112d and 112e in the five reflector groups 100a, 100b, 100c, 100d and 100e are necessary optical elements for reflecting the outgoing light beams 104a, 104b, 104c, 104d and 104e of the laser ranging components 100a, 100b, 100c, 100d and 100e respectively onto the MEMS micro-vibration mirror 120, which can realize optical path folding and greatly shorten the optical path length, such as Fig.19 As shown, 300 indicates a straight line where five reflectors are located.

[0221] In order to ensure that the scanning areas of the five groups of laser distance measuring components are continuously spliced ​​and the scanning images are not misaligned, it is required that the five groups of outgoing light beams 104a, 104b, 104c, 104d and 104e are distributed at equal angles in the horizontal direction (X axis) after passing through the MEMS micro-vibration mirror 120, and the outgoing angles in the vertical direction (Y axis) are consistent. Under this constraint, the five reflectors 112a, 112b, 112c, 112d and 112e need to be arranged in a straight line along the X axis. With the reflector 112c as the center, the reflectors 112a and 112b are in a left-right mirror relationship with the reflectors 112d and 112e, and the reflectors 112a, 112b, 112c, 112d and 112e are arranged at unequal intervals, the intervals between the reflectors 112a and 112b on the outside on both sides are larger, and the intervals between the reflectors 112b and 112c close to the center are smaller. By changing parameters such as the interval and shape of the reflectors 112a, 112b, 112c, 112d and 112e, the angle of the light beam incident on the MEMS micro-mirror 120 can be changed, thereby achieving a specific scanning angle output.

[0222] like Fig. 20 The figure shows a side view of a specific embodiment 1 of the present application. Taking the laser distance measuring component 100c placed in the center as an example, its outgoing light beam 104c is incident on the reflector 112c, and 1121c is the reflective surface of the reflector 112c. The outgoing light beam 104c after passing through the reflective surface 1121c points to the MEMS micro-vibration mirror 120, and 1201 is the mirror surface of the MEMS micro-vibration mirror 120. In order to ensure that the optical path is not blocked, there is a certain height difference between the MEMS micro-vibration mirror 120 and the laser distance measuring component 110c and the reflector 112c, so the MEMS micro-vibration mirror 120 needs to be placed on the bracket 121. Fig. 20 In the YZ plane, the reflective surface 1121c of the reflector 112c and the mirror surface 1201 of the MEMS micro-vibration mirror 120 are parallel to each other, so that after the outgoing light beam 104c from the laser ranging component 100c is reflected twice, the angle of the light beam does not change.

[0223] like Fig.21As shown, it is a light path diagram of a specific embodiment 1 of the present application, the initial outgoing light beams 104a, 104b, 104c, 104d and 104e of the laser ranging components 100a, 100b, 100c, 100d and 100e point to the Z axis, parallel to the bottom plate 200, and the bottom plate is in the XZ plane. After being reflected by the reflector group and the MEMS micro-vibration mirror, the 5 outgoing light beams 104a, 104b, 104c, 104d and 104e are emitted at equal angles in the plane 400, wherein the angle interval between two adjacent outgoing light beams is 15°, and the plane 400 is parallel to the bottom surface 200. In the specific embodiment 1, when the swing angle of the MEMS micro-vibration mirror is 20*20°, using 5 groups of laser ranging components and 5 groups of reflector groups, a scanning range of 100*20° can be achieved.

[0224] like Fig. 22 As shown, it is a specific embodiment 2 of the present application, 4 groups of laser ranging components 100a, 100b, 100c and 100d, mirror groups 110a, 110b, 110c and 110d, a MEMS micro-vibration mirror 120 and a bracket 121 are placed on the bottom plate 200, wherein the MEMS micro-vibration mirror 120 is placed on the bracket 121, and each laser ranging component corresponds to a group of mirror groups. Define the direction of the outgoing beam of the laser ranging component as the X direction, the direction perpendicular to the bottom plate upward is the Y direction, and the Z direction satisfies the right-hand rule.

[0225] Taking the laser distance measuring component 100a as an example, its outgoing light beam 104a passes through the reflector group 110a and is incident on the MEMS micro-vibration mirror 120. The outgoing light beam paths of the remaining laser distance measuring components 100b, 100c and 100d are similar to that of the laser distance measuring component 110a, and their outgoing light beams all pass through their corresponding reflector groups 110b, 110c and 110d and are incident on the MEMS micro-vibration mirror 120. The function of the reflector groups 110a, 110b, 110c and 110e is to change the direction of the outgoing light of the laser distance measuring component so that it hits the MEMS micro-vibration mirror 120 according to the specified path. When the MEMS micro-vibration mirror 120 performs two-dimensional swinging, the scanning angle splicing of multiple laser distance measuring components can be realized. The MEMS micro-vibration mirror swings at an angle in two-dimensional space. For example, the swing angle of the MEMS micro-vibration mirror in one dimension (such as the horizontal direction) is 15°, and the swing angle of the MEMS micro-vibration mirror in another dimension (such as the vertical direction) is 30°. The swing angle of the MEMS micro-vibration mirror can be abbreviated as 15*30°. By using 4 groups of laser ranging components and 4 groups of reflector groups for scanning angle splicing, a scanning angle range of 60*30° can be achieved, where 60*30° means that the swing angle in one dimension is 60° and the swing angle in another dimension is 30°.

[0226] like Fig.23As shown, it is a top view of a specific embodiment 2 of the present application, and the laser ranging components 100a, 100b, 100c and 100d are arranged parallel to the X axis and at equal intervals, so that the space size occupied by the components is minimized. The outgoing light beams 104a, 104b, 104c and 104d of the four groups of laser ranging components are incident on the MEMS micro-vibration mirror 120 after passing through the reflector groups 110a, 110b, 110c and 110d respectively. Taking the outgoing light beam 104c of the laser ranging component 100c as an example, the outgoing light beam 104c is turned on the steering mirror 111c, thereby changing the light emitting direction of the laser measurement module. The outgoing light beam 104c after passing through the steering mirror 111c hits the reflector 112c, and the reflector 112c guides the outgoing light beam 104c to the MEMS micro-vibration mirror 120, thereby realizing angle splicing.

[0227] Compared with the aforementioned embodiment 1, in embodiment 2, the reflectors 112a, 112b, 112c and 112d respectively reflect the outgoing light beams 104a, 104b, 104c and 104d of the laser ranging components 100a, 100b, 100c and 100d to the MEMS micro-vibration mirror 120, so as to realize the folding of the light path and greatly shorten the length of the light path. Fig.23 At the same time, in order to ensure that the scanning areas of the four groups of laser ranging components are continuously spliced ​​and the scanning images are not misaligned, it is required that the four groups of outgoing light beams 104a, 104b, 104c and 104d are distributed at equal angles in the horizontal direction (X axis) after passing through the MEMS micro-vibration mirror 120, and the outgoing angles in the vertical direction (Y axis) are consistent. Under this constraint, the four reflectors 112a, 112b, 112c and 112d need to be arranged in a straight line along the X axis.

[0228] With the MEMS micro-vibration mirror 120 as the center, the reflectors 112a and 112b are in a left-right mirror relationship with the reflectors 112d and 112e, and the reflectors 112a, 112b, 112c, 112d and 112e are arranged at unequal intervals, the interval between the reflectors 112a and 112b on the outer sides is larger, and the interval between the reflectors 112b and 112c near the center is smaller. By changing the interval, shape and other parameters of the reflectors 112a, 112b, 112c, 112d and 112e, the angle of the light beam incident on the MEMS micro-vibration mirror 120 can be changed, so as to achieve a specific scanning angle output.

[0229] like Fig.24As shown, it is a light path diagram of a specific embodiment 2 of the present application, the initial outgoing light beams 104a, 104b, 104c and 104d of the laser ranging components 100a, 100b, 100c and 100d point to the Z axis, parallel to the bottom plate 200, and the bottom plate is in the XZ plane. After the 4 outgoing light beams are reflected by the reflector group and the MEMS micro-vibration mirror 120, the 4 outgoing light beams 104a, 104b, 104c and 104d are emitted at equal angles in the plane 400, wherein the angle interval between two adjacent outgoing light beams is 15°, and the plane 400 is parallel to the bottom surface 200. When the swing angle of the MEMS micro-vibration mirror is 15*30°, a scanning range of 60*30° can be achieved by using 4 groups of laser ranging components and 4 groups of reflector groups.

[0230] like Fig.25 As shown, this is the specific embodiment 3 of the present application. Fig.25 The embodiment includes five groups of laser distance measuring components 100a, 100b, 100c, 100d and 100e, mirror groups 110a, 110b, 110c, 110d and 110e, and a MEMS micro-vibration mirror 120. Different from the embodiment 1, there is no wedge in the mirror group, only a single mirror, but because the mirrors are arranged at unequal intervals, the corresponding five groups of laser distance measuring components are also arranged at unequal intervals, the laser distance measuring components 100b, 100c and 100d near the center of the MEMS micro-vibration mirror 120 are arranged at a smaller interval, and the laser distance measuring components 100a and 100e on both sides are arranged at a larger interval.

[0231] In the embodiment of the present application, N groups of reflector groups are arranged between N groups of laser ranging components and a single MEMS micro-vibration mirror, wherein the reflector group includes single or multiple optical elements such as prisms and wedges and reflectors. The N groups of reflector groups correspond to the N groups of laser ranging components one by one, and the reflector group can transmit the outgoing light beam of the laser ranging component to the MEMS micro-vibration mirror, thereby realizing accurate splicing of the scanning angle and increasing the scanning angle of the laser radar.

[0232] In the embodiment of the present application, N reflector groups are added between N laser ranging components and a single MEMS micro-vibration mirror, and the reflector group includes at least one reflector, so that the optical path has at least one turn, which can avoid the length of the optical path, thereby greatly reducing the optical and mechanical size of the laser radar. Each laser ranging component corresponds to an independent reflector group. The laser ranging component can be fixed in the development of the laser radar, and the properties such as the scanning angle and light emitting direction of the laser radar can be changed only by changing the parameter design of the reflector group. The flexible optical path architecture can enrich the product appearance and installation method of the MEMS laser radar without changing the components and circuit boards, thereby improving its application scalability. In addition, in the embodiment of the present application, the laser ranging component is fixed and unchanged, and the optical path adjustment is only implemented through a passive reflector group, which is conducive to improving the efficiency and stability of the optical path adjustment.

[0233] It should also be noted that the device embodiments described above are merely illustrative, wherein the units described as separate components may or may not be physically separated, and the components shown as units may or may not be physical units, that is, they may be located in one place or distributed over multiple units. Some or all of the modules may be selected according to actual needs to achieve the purpose of the present embodiment.

[0234] In the above embodiments, the above laser measurement module and laser radar may be implemented in whole or in part by hardware, firmware or any combination thereof.

Claims

1. A laser measurement module, characterized in that: The laser measurement module includes: N laser ranging components, a reflector and a micro-electromechanical system MEMS micro-vibration mirror, wherein N is a positive integer greater than or equal to 2, wherein: The N laser distance measuring components are used to make the outgoing light beam incident on the reflecting mirror; The reflector is used to deflect the optical path of the outgoing light beam and make the deflected outgoing light beam incident on the MEMS micro-vibration mirror; The MEMS micro-vibration mirror is used to change the direction of the outgoing light beam to achieve two-dimensional scanning; it is also used to change the direction of the echo light beam to make the echo light beam incident on the reflector, wherein the echo light beam is the light beam reflected by the outgoing light beam incident on the target object; The reflector is also used to deflect the optical path of the echo light beam and inject the deflected echo light beam into the N laser ranging components; the angle α between the incident light beam and the outgoing light beam on the reflector on the vertical plane, the vertical tilt angle β of the MEMS micro-vibration mirror, and the vertical swing angle ω of the MEMS micro-vibration mirror satisfy the following relationship: α≥ε(2β+ω), Wherein, ε is the installation error factor of the reflector and the MEMS micro-mirror; The N laser ranging components are also used to receive the echo light beam.

2. The laser measurement module according to claim 1, characterized in that: The N laser ranging components and the MEMS micro-vibration mirror are located on the same side of the reflector; The N laser distance measuring components are symmetrically distributed on the left and right sides of the MEMS micro-vibration mirror, with the MEMS micro-vibration mirror as the center.

3. The laser measurement module according to claim 1, characterized in that: The angle θ between the emitted light beams of two adjacent laser distance measuring assemblies in the N laser distance measuring assemblies on the horizontal plane and the horizontal swing angle χ of the MEMS micro-vibration mirror satisfy the following relationship: θ≤2χ.

4. The laser measurement module according to any one of claims 1 to 3, characterized in that: The number N of the laser ranging components and the horizontal scanning angle of the laser measurement module The horizontal swing angle χ of the MEMS micro-vibration mirror and the angle θ of the output light beams of two adjacent laser distance measuring components on the horizontal plane satisfy the following relationship:

5. The laser measurement module according to any one of claims 1 to 3, characterized in that: The plane where the N laser distance measuring components are located and the plane where the MEMS micro-vibration mirror is located are different planes.

6. The laser measurement module according to any one of claims 1 to 3, characterized in that: The angle α between the incident light beam and the outgoing light beam of each laser distance measuring assembly on the reflector in the N laser distance measuring assemblies on the vertical plane is equal; The angle α is greater than or equal to 10 degrees and less than or equal to 50 degrees.

7. The laser measurement module according to any one of claims 1 to 3, characterized in that: The vertical tilt angle β of the MEMS micro-vibration mirror is greater than or equal to 5 degrees and less than or equal to 45 degrees.

8. The laser measurement module according to any one of claims 1 to 3, characterized in that: The number of the reflectors is M, and M is a positive integer; When the N is equal to the M, the laser ranging assembly and the reflector are in a one-to-one correspondence.

9. The laser measurement module according to any one of claims 1 to 3, characterized in that: The number of the reflectors is M, and M is a positive integer; When N is greater than M, at least two of the N laser ranging assemblies correspond to the same reflector.

10. The laser measurement module according to any one of claims 1 to 3, characterized in that: Each of the N laser distance measuring components comprises: a laser, a spectroscope, and a detector; The laser is used to generate an outgoing light beam, and the outgoing light beam is incident on the reflecting mirror through the beam splitter; The beam splitter is used to receive the echo light beam incident from the reflector and to make the echo light beam incident into the detector; The detector is used to receive the echo light beam and perform distance measurement according to the time difference between the outgoing light beam and the echo light beam.

11. The laser measurement module according to any one of claims 1 to 3, characterized in that: The N laser distance measuring components and the MEMS micro-vibration mirror are respectively connected to the data processing circuit.

12. The laser measurement module according to claim 1, characterized in that: The laser measurement module comprises: N reflectors; The N laser ranging components correspond to the N reflectors one by one; The outgoing light beam of each laser distance measuring assembly in the N laser distance measuring assemblies is incident on the corresponding reflecting mirror in the N reflecting mirrors; Each of the N reflectors is used to deflect the optical path of an outgoing light beam of a corresponding laser ranging component, and to make the deflected outgoing light beam incident on the MEMS micro-vibration mirror; and is also used to deflect the optical path of an echo light beam sent by the MEMS micro-vibration mirror, and to make the deflected echo light beam incident on the corresponding laser ranging component.

13. The laser measurement module according to claim 12, characterized in that: The laser measurement module also includes: N beam steering elements; The N beam steering elements correspond one-to-one to the N reflectors; Each of the N laser distance measuring components directs the outgoing light beam to the corresponding reflecting mirror through the corresponding light beam steering element.

14. The laser measurement module according to claim 13, characterized in that: The light beam steering element is a steering mirror.

15. The laser measurement module according to claim 12, characterized in that: The laser measurement module further includes: a beam steering element; The beam steering element is used to refract the outgoing beam of the laser ranging component and make the refracted outgoing beam incident on the corresponding reflecting mirror; The beam steering element is also used to direct the echo beam sent by the reflector into the corresponding laser ranging component.

16. The laser measurement module according to claim 15, characterized in that: The light beam steering element is a folding mirror.

17. The laser measurement module according to any one of claims 12 to 16, characterized in that: N of the reflectors are located on the same straight line, and when N is an odd number greater than or equal to 5, the (N+1) / 2th reflector is taken as the center; If i is an integer greater than 2 and less than or equal to (N+1) / 2, the spacing between the (i-2)th reflector and the (i-1)th reflector among the N reflectors is not less than the spacing between the (i-1)th reflector and the i-th reflector; If i is an integer greater than (N+1) / 2 and less than or equal to N, the spacing between the (i-2)th reflector and the (i-1)th reflector among the N reflectors is not greater than the spacing between the (i-1)th reflector and the i-th reflector.

18. The laser measurement module according to any one of claims 12 to 16, characterized in that: N of the reflectors are located on the same straight line, and when N is an even number greater than or equal to 6, the center is the midpoint between the N / 2th reflector and the N / 2+1th reflector; If i is an integer greater than 2 and less than or equal to N / 2, the spacing between the (i-2)th reflector and the (i-1)th reflector among the N reflectors is greater than the spacing between the (i-1)th reflector and the i-th reflector; If i is an integer greater than N / 2 and less than or equal to N, the spacing between the (i-2)th reflector and the (i-1)th reflector among the N reflectors is smaller than the spacing between the (i-1)th reflector and the i-th reflector.

19. The laser measurement module according to any one of claims 12 to 16, characterized in that: The angle between the mirror normal of the i-th reflector among the N reflectors and the outgoing light beam of the i-th reflector is equal to the angle between the mirror normal of the (i+1)-th reflector among the N reflectors and the outgoing light beam of the (i+1)-th reflector; Wherein, i is a positive integer less than or equal to N.

20. The laser measurement module according to any one of claims 12 to 16, characterized in that: The MEMS micro-vibration mirror is used to receive the outgoing light beams sent by the N reflecting mirrors respectively, change the directions of the outgoing light beams sent by the N reflecting mirrors respectively, and send out the outgoing light beams corresponding to the N reflecting mirrors respectively, so as to realize two-dimensional scanning; Among the N outgoing light beams sent out by the MEMS micro-vibration mirror, the included angles between two adjacent outgoing light beams are equal.

21. The laser measurement module according to any one of claims 12 to 16, characterized in that: The N laser ranging components are parallel to each other.

22. A laser radar, characterized in that: The laser radar comprises: a laser measurement module as claimed in any one of claims 1 to 21, and a data processing circuit; The N laser distance measuring components and the MEMS micro-vibration mirror are respectively connected to the data processing circuit; The data processing circuit is used to obtain data from the N laser ranging components and the MEMS micro-vibration mirror respectively, and perform data processing.

23. The laser radar according to claim 22, characterized in that: The laser radar further includes: a base plate, a bracket, and a connecting rod, wherein: The N laser distance measuring components and the reflector are located on the bottom plate; The bracket is located on the bottom plate, and the MEMS micro-vibration mirror is located on the bracket; Two ends of the connecting rod are respectively connected to the bottom plate and the data processing circuit, and the connecting rod is used to support the data processing circuit.

Images