Mask assembly, evaporation method of array substrate, array substrate and display panel

Abstract

The present disclosure relates to a mask plate assembly, an evaporation method of an array substrate, the array substrate and a display panel. The mask plate assembly comprises: an alignment mask plate having an opening area and a shielding area, the opening area is configured to be arranged in alignment with a display area, and the shielding area is configured to be arranged in alignment with a non-display area; and an evaporation mask plate arranged opposite to the alignment mask plate in a vertical direction, the evaporation mask plate has a plurality of evaporation pattern areas, each evaporation pattern area is matched with a sub-pixel pattern area, and the evaporation mask plate is configured to move horizontally relative to the alignment mask plate so that the plurality of evaporation pattern areas are sequentially and completely moved into the opening area and arranged in alignment with the matched sub-pixel pattern areas. At least part of the remaining evaporation pattern areas is opposite to the shielding area when one of the plurality of evaporation pattern areas is completely moved into the opening area and arranged in alignment with the matched sub-pixel pattern area. Evaporation is performed by using two mask plates, thereby saving evaporation time, improving production capacity and reducing cost.

Description

TECHNICAL FIELD

[0001] The present disclosure belongs to the technical field of display, and particularly relates to a mask plate assembly, an evaporation method of an array substrate, an array substrate and a display panel. BACKGROUND

[0002] OLED, i.e. Organic Light-Emitting Diode, as a new type of display technology, is widely applied, and a commonly used pixel architecture is Pen Tile arrangement. According to the difference in the service life of Oled light-emitting materials, the pixel size is redesigned to achieve good display effect.

[0003] However, in this pixel architecture, three independent mask plates need to be used for evaporation of Oled materials, and changing the evaporation mask plate in multiple processes will consume more time, which is not conducive to the improvement of production capacity and the control of cost. SUMMARY

[0004] The purpose of the present disclosure is to provide a mask plate assembly, an evaporation method of an array substrate, an array substrate and a display panel, which can reduce the number of mask plates used, shorten the evaporation time of Oled materials, reduce the cost and improve the production capacity.

[0005] The first aspect of the present disclosure provides a mask plate assembly applied to evaporate light-emitting materials to a substrate, wherein the substrate has a display area and a non-display area, the display area has a plurality of sub-pixel pattern areas, the plurality of sub-pixel pattern areas correspond to different colors of evaporated light-emitting materials, and the mask plate assembly comprises:

[0006] a positioning mask plate having an opening area and a shielding area, the opening area is configured to be positioned with the display area, and the shielding area is configured to be positioned with the non-display area;

[0007] an evaporation mask plate, which is arranged opposite to the positioning mask plate in the vertical direction, the evaporation mask plate has a plurality of evaporation pattern areas, the evaporation pattern areas are one-to-one matched with the sub-pixel pattern areas, and the evaporation mask plate is configured to move horizontally relative to the positioning mask plate, so that the plurality of evaporation pattern areas are sequentially and completely moved into the opening area and positioned with the matched sub-pixel pattern areas;

[0008] wherein, when one of the plurality of evaporation pattern areas is completely moved into the opening area and positioned with the matched sub-pixel pattern area, at least part of the remaining evaporation pattern areas is opposite to the shielding area.

[0009] In an exemplary embodiment of the present disclosure, the evaporation mask plate has a plurality of evaporation holes configured to be arranged in alignment with the sub-pixel regions of the sub-pixel pattern region during the evaporation process; wherein,

[0010] The plurality of evaporation holes are arranged in a regular pattern to form the plurality of evaporation pattern regions, and a part of the evaporation holes are shared between the plurality of evaporation pattern regions, and a part of the evaporation holes are independent of each other.

[0011] In an exemplary embodiment of the present disclosure, the plurality of evaporation holes have the same shape and size.

[0012] In an exemplary embodiment of the present disclosure, the display region has a red sub-pixel pattern region, a green sub-pixel pattern region and a blue sub-pixel pattern region, the sub-pixel regions in the red sub-pixel pattern region correspond to red light-emitting materials, the sub-pixel regions in the green sub-pixel pattern region correspond to green light-emitting materials, the sub-pixel regions in the blue sub-pixel pattern region correspond to blue light-emitting materials, and the red sub-pixel pattern region, the green sub-pixel pattern region and the blue sub-pixel pattern region are arranged in a regular pattern to form a pixel region of the display region, the pixel region includes a smallest repeating pattern region, the smallest repeating pattern region includes nine sub-pixels, the sub-pixels with coordinates (n, m), (n-1, m+1) and (n+1, m-1) correspond to a first color, the sub-pixels with coordinates (n, m+1), (n+1, m) and (n-1, m-1) correspond to a second color, and the sub-pixels with coordinates (n+1, m+1), (n-1, m) and (n, m-1) correspond to a third color, one of the first color, the second color and the third color is red, another is green, and the remaining one is blue; wherein n and m are positive integers.

[0013] In an exemplary embodiment of the present disclosure, the first color is red, the second color is green, and the third color is blue, and the areas of the blue sub-pixels, the red sub-pixels and the green sub-pixels gradually decrease; and / or

[0014] The alignment mask plate is arranged above the evaporation mask plate.

[0015] The second aspect of the present disclosure provides an evaporation method for manufacturing an array substrate by using the mask plate assembly of any one of the above-mentioned aspects, including the following steps:

[0016] A substrate is provided;

[0017] The evaporation mask plate and the alignment mask plate are arranged in the vertical direction of the substrate;

[0018] The evaporation mask plate is driven to move horizontally relative to the alignment mask plate, so that the evaporation pattern area is sequentially matched with the pattern of the sub-pixel pattern area, to evaporate different color light emitting materials to the sub-pixel pattern area.

[0019] In another exemplary embodiment of the present disclosure, the evaporation method of the array substrate further comprises:

[0020] After evaporating the sub-pixel area of the same size on the substrate, the size of the sub-pixel area to be evaporated next is compared with the size of the sub-pixel area evaporated last time, and a comparison result is obtained, and the distance between the evaporation mask plate and the evaporation source is controlled according to the comparison result.

[0021] In another exemplary embodiment of the present disclosure, the method for controlling the distance between the evaporation mask plate and the evaporation source comprises:

[0022] If the size of the sub-pixel area to be evaporated next is smaller than the size of the sub-pixel area evaporated last time, the evaporation mask plate is controlled to move away from the evaporation source;

[0023] If the size of the sub-pixel area to be evaporated next is larger than the size of the sub-pixel area evaporated last time, the evaporation mask plate is controlled to move towards the evaporation source.

[0024] The third aspect of the present disclosure provides an array substrate, comprising a substrate and a plurality of sub-pixels evaporated on the substrate by the evaporation mask plate and the alignment mask plate according to any one of the above-mentioned evaporation methods, the sub-pixels of the same color are aligned diagonally on the substrate, and the color and size of adjacent sub-pixels are different in the row direction and the column direction.

[0025] The fourth aspect of the present disclosure provides a display panel, comprising a cathode layer, an encapsulation layer and an array substrate formed by the evaporation method of the array substrate according to any one of the above-mentioned evaporation methods, the encapsulation layer is arranged on the side of the cathode layer away from the array substrate.

[0026] The present disclosure has the following beneficial effects:

[0027] The evaporation method of the array substrate, the array substrate and the display panel provided by the present disclosure can evaporate light emitting materials by two mask plates, evaporate light emitting materials of different colors on the substrate without replacing the mask plate, form sub-pixel pattern areas of different colors, and then form an array substrate. In this way, the array substrate can be manufactured by two mask plates, which saves evaporation time, improves production capacity, reduces manufacturing cost, and reduces the manufacturing cost of the array substrate and the display panel.

[0028] Other features and advantages of the present disclosure will become apparent from the following detailed description, taken in conjunction with the accompanying drawings, which illustrate, by way of example, the principles of the disclosure.

[0029] It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the disclosure. BRIEF DESCRIPTION OF DRAWINGS

[0030] The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the present disclosure and serve to explain the principles of the present disclosure. It is readily apparent to one skilled in the art that the following figures are merely some embodiments of the present disclosure and other figures can be obtained by one of ordinary skill in the art without any creative work under the premise that the following description of the figures is merely illustrative and explanatory.

[0031] Figure 1 The arrangement of different color sub-pixel regions on the substrate provided by the first embodiment or the third embodiment of the present disclosure is shown.

[0032] Figure 2 The structural schematic diagram of the alignment mask plate, the evaporation mask plate and the substrate provided by the first embodiment of the present disclosure is shown.

[0033] Figure 3 The structural schematic diagram of the alignment mask plate provided by the first embodiment of the present disclosure is shown.

[0034] Figure 4 The structural schematic diagram of the evaporation mask plate provided by the first embodiment of the present disclosure is shown.

[0035] Figure 5 The structural schematic diagram of the evaporation source scattering light emitting material to the opening region provided by the first embodiment of the present disclosure is shown.

[0036] Figure 6 The structural schematic diagram of the distance between the evaporation mask plate and the evaporation source for forming the red sub-pixel region on the substrate provided by the first embodiment of the present disclosure is shown.

[0037] Figure 7 The structural schematic diagram of the distance between the evaporation mask plate and the evaporation source for forming the blue sub-pixel region on the substrate provided by the first embodiment of the present disclosure is shown.

[0038] Figure 8 The structural schematic diagram of the evaporation mask plate and the alignment mask plate cooperating provided by the first embodiment of the present disclosure is shown.

[0039] Figure 9 The structural schematic diagram of the evaporation mask plate provided by the first embodiment of the present disclosure is shown. Figure 8 The evaporation mask plate is moved to the left by one evaporation hole.

[0040] Figure 10The array substrate provided by the embodiment of the present disclosure is shown. Figure 9 The evaporation mask plate moves to the left by one evaporation hole position.

[0041] Figure 11 The flowchart of the evaporation method of the array substrate provided by the second embodiment of the present disclosure is shown.

[0042] Figure 12 The structure diagram of the display panel provided by the fourth embodiment of the present disclosure is shown.

[0043] Explanation of reference signs:

[0044] 10, alignment mask plate; 101, opening area; 102, shielding area; 20, evaporation mask plate; 201, evaporation hole; 201a, first evaporation hole; 201b, second evaporation hole; 201c, third evaporation hole; 201d, fourth evaporation hole; 201e, fifth evaporation hole; 202, oblique evaporation hole group; 30, evaporation source; 40, substrate; 401, red sub-pixel area; 402, blue sub-pixel area; 403, green sub-pixel area; 50, display panel; 501, array substrate; 502, cathode layer; 503, encapsulation layer; D, first pitch; d, second pitch; X, first horizontal oblique direction; Y, second horizontal oblique direction. DETAILED DESCRIPTION

[0045] Example implementations will now be described more fully with reference to the accompanying drawings. Example implementations may, however, be implemented in many different forms and should not be construed as limited to the implementations set forth herein; rather, these implementations are provided so that this disclosure will be thorough and complete, and will fully convey the inventive concept to those skilled in the art.

[0046] In the present disclosure, the terms "first", "second", etc. are used only for the purpose of description, and should not be understood as indicating or implying relative importance or implicitly indicating the number of the technical features indicated. Therefore, the features defined with "first", "second" can explicitly or implicitly include one or more of the features. In the description of the present disclosure, the meaning of "a plurality of" is two or more, unless otherwise explicitly specified and limited.

[0047] In the present disclosure, unless otherwise explicitly specified and limited, the terms "assembly", "connection" and the like should be understood broadly, for example, can be fixedly connected, or can be detachably connected, or integrated; can be mechanically connected, or can be electrically connected; can be directly connected, or indirectly connected through an intermediate medium; can be the internal communication of two elements or the interaction relationship between two elements. For those skilled in the art, the specific meaning of the above terms in the present disclosure can be understood according to the specific circumstances.

[0048] Moreover, the described features, structures, or characteristics can be combined in any suitable manner in one or more embodiments. In the following description, numerous specific details are provided to give a thorough understanding of embodiments of the disclosure. One skilled in the relevant art will recognize, however, that the

[0049] Example I

[0050] The first embodiment provides a mask assembly applied to evaporate light emitting material to a substrate 40, the substrate 40 having a display area and a non-display area, the display area having a plurality of sub-pixel pattern areas for evaporating light emitting material, and the plurality of sub-pixel pattern areas corresponding to different colors of evaporated light emitting material; for example, the red sub-pixel pattern area corresponds to red light emitting material, the green sub-pixel pattern area corresponds to green light emitting material, and the blue sub-pixel pattern area corresponds to blue light emitting material, as shown in Figure 1 .

[0051] Further, the mask assembly is used to form light emitting materials of the same color on the substrate 40 in a diagonal alignment, that is, the colors between adjacent two pixels in the row and column directions are different, which can better improve the display effect; and the area size of the evaporated light emitting material can also be controlled according to the service life of the pixel, that is, the colors and area sizes between adjacent two pixels are different.

[0052] Referring to Figure 2 and Figure 3 , the mask assembly includes an alignment mask 10 and an evaporation mask 20.

[0053] The alignment mask 10 has an opening area 101 and a shielding area 102, the opening area 101 is configured to be aligned with the display area, and the opening area 101 penetrates through the alignment mask 10 to hollow out the position of the display area on the substrate 40, so as to ensure that the light emitting material can be evaporated into the sub-pixel pattern area in the display area. The shielding area 102 is configured to be aligned with the non-display area, so as to shield the position on the substrate 40 which does not need to evaporate light emitting material, so as to ensure that the light emitting material can only be evaporated into the sub-pixel pattern area of the substrate 40, and improve the evaporation accuracy of the mask assembly. In this way, the substrate 40 is evaporated by the opening area 101 and the shielding area 102, which can not only improve the evaporation accuracy of the mask assembly, but also avoid waste of light emitting material, that is, save the use of light emitting material, and reduce the corresponding production cost.

[0054] It should be noted that the opening area 101 can have the same size as the display area, or the size of the opening area 101 can be slightly larger than the size of the display area. In this way, it is more convenient to evaporate the luminescent material into the display area of the substrate 40. It should be noted that the number of opening areas 101 can be the same as the number of display areas, so as to realize overall evaporation of the display area of the substrate 40 and save evaporation time.

[0055] The evaporation mask plate 20 includes a plurality of obliquely arranged evaporation holes 201, which are aligned in the same direction as the pixels.

[0056] Further, the evaporation mask plate 20 is arranged opposite to the alignment mask plate 10 in the vertical direction, so as to cooperate with the alignment mask plate 10 to evaporate the luminescent material into the sub-pixel pattern area on the substrate 40.

[0057] For example, the evaporation mask plate 20 has a plurality of evaporation pattern areas, which are one-to-one matched with the patterns of the sub-pixel pattern areas. The evaporation mask plate 20 is configured to move horizontally relative to the alignment mask plate 10, so as to sequentially move the plurality of evaporation pattern areas into the opening area 101 on the alignment mask plate 10 and be arranged opposite to the sub-pixel pattern areas matched therewith; that is, the evaporation pattern area in the opening area 101 is evaporated once, to form the corresponding sub-pixel pattern area in the display area. When the evaporation mask plate 20 moves horizontally relative to the alignment mask plate 10, the evaporation pattern area in the opening area 101 also changes, and the next evaporation is performed on the evaporation pattern area moved into the opening area 101.

[0058] It should be noted that the color of the luminescent material released by the evaporation pattern area in the opening area 101 before movement is different from the color of the luminescent material released by the evaporation pattern area in the opening area 101 after movement, so as to form sub-pixel pattern areas of different colors on the substrate 40.

[0059] In addition, the sequential movement of the evaporation pattern area into the opening area 101 on the alignment mask plate 10 means that the evaporation pattern area is directly opposite to the opening area 101, that is, the orthographic projection of the opening area 101 covers or coincides with the orthographic projection of the evaporation pattern area.

[0060] It should be understood that the evaporation mask plate 20 and the alignment mask plate 10 are arranged opposite in the vertical direction, and the evaporation direction is the same, that is, the evaporation direction of the mask plate assembly adopts a top-down evaporation mode.

[0061] In the plurality of evaporation pattern areas, one of the plurality of evaporation pattern areas is completely moved into the opening area 101 and is arranged in alignment with the sub-pixel pattern area, and at least part of the remaining evaporation pattern areas is opposite to the shielding area 102; that is, the opening area 101 can correspond to one evaporation pattern area, or one evaporation pattern area and part of one evaporation pattern area, or two evaporation pattern areas, and so on. In this way, the evaporation pattern area located in the opening area 101 can be evaporated to form a sub-pixel pattern area corresponding to the evaporation pattern area on the substrate 40.

[0062] The two mask plates described above can form a plurality of sub-pixel pattern areas with different colors on the substrate 40 without replacing the mask plate, saving the time consumed by switching the mask plate, improving the production capacity, and saving the production cost.

[0063] It is worth mentioning that the number of movements of the evaporation mask plate 20 can be set according to the number of sub-pixel pattern areas with different colors. For example, if the substrate 40 has two sub-pixel pattern areas with different colors, the evaporation mask plate 20 needs to be moved once in the horizontal direction relative to the alignment mask plate 10; if the substrate 40 has three sub-pixel pattern areas with different colors, the evaporation mask plate 20 needs to be moved twice in the horizontal direction relative to the alignment mask plate 10, and so on. Here, it is not necessary to repeat the description.

[0064] Further, referring to FIG. 2, Figure 4 As shown in FIG. 2, the evaporation mask plate 20 has a plurality of evaporation holes 201, which are arranged in alignment with the sub-pixel areas of the sub-pixel pattern area during the evaporation process.

[0065] The plurality of evaporation holes 201 are arranged in a regular pattern to form a plurality of evaporation pattern areas, and part of the evaporation holes 201 are shared between the plurality of evaporation pattern areas, and part of the evaporation holes 201 are independent of each other.

[0066] For example, the sub-pixel pattern area corresponds to three sub-pixel areas, i.e., a red sub-pixel area 401 (R), a green sub-pixel area 403 (G), and a blue sub-pixel area 402 (B). The plurality of evaporation holes 201 are arranged in a regular pattern to form a plurality of evaporation pattern areas, and part of the evaporation holes 201 are shared between the plurality of evaporation pattern areas, and part of the evaporation holes 201 are independent of each other; that is, during the evaporation of the red sub-pixel area 401, the green sub-pixel area 403, and the blue sub-pixel area 402 on the substrate 40, part of the evaporation holes 201 can be used to evaporate red light-emitting materials, green light-emitting materials, and blue light-emitting materials, and part of the evaporation holes 201 can be used to evaporate only red light-emitting materials, only green light-emitting materials, or only blue light-emitting materials.

[0067] In this way, the different color sub-pixel areas can be correspondingly evaporated in the display area by using the evaporation mask plate 20 and the alignment mask plate 10, the time consumed by switching the mask plate is saved, the production capacity is improved, and the production cost is reduced.

[0068] In addition, referring to Figure 4 , the shapes and sizes of the plurality of evaporation holes 201 are the same, so that the time consumed by opening the evaporation holes 201 in the evaporation mask plate 20 is saved.

[0069] It is worth mentioning that, referring to Figure 5 , the evaporation source 30, the alignment mask plate 10 and the evaporation mask plate 20 are used to scatter the corresponding color light-emitting material to the sub-pixel pattern area; in other words, the evaporation source 30 can scatter red, green or blue light-emitting material to the evaporation hole 201 located in the opening area 101 of the alignment mask plate 10, so as to form a red sub-pixel area 401, a green sub-pixel area 403 or a blue sub-pixel area 402 in the display area.

[0070] Further, the evaporation mask plate 20 can move in the vertical direction relative to the evaporation source 30, so as to adjust the distance between the evaporation hole 201 on the evaporation mask plate 20 and the evaporation source 30, so that the evaporation hole 201 on the evaporation mask plate 20 can correspond to the sub-pixel area of different sizes, as shown in Figure 2 .

[0071] It should be noted that, as shown in Figure 5 , the evaporation source 30 and the evaporation mask plate 20 have a first distance D, and the evaporation mask plate 20 and the substrate 40 have a second distance d, by adjusting the ratio between the first distance D and the second distance d, the area size of the sub-pixel area evaporated by the evaporation source 30 on the substrate 40 is adjusted, and then the area size of the sub-pixel area can be matched according to the service life of the light-emitting material.

[0072] For example, the area size of the sub-pixel area can be matched according to the service life of different Oled light-emitting materials, for example, the service life of blue Oled light-emitting material is shorter, and a larger light-emitting area is required, the service life of green Oled light-emitting material is longer, and a smaller light-emitting area is required, and the service life of red Oled light-emitting material is between that of blue and green Oled light-emitting material, so the area of the red sub-pixel area is between that of the blue and green sub-pixel areas 403. Because the evaporation material is scattered evaporation, according to the diffraction phenomenon, the sub-pixel area formed by the evaporation mask plate 20 closer to the evaporation source 30 has a larger area, and the sub-pixel area formed by gradually moving away from the evaporation source 30 has a gradually decreasing area, as shown in Figure 1 , Figure 6 and Figure 7 .

[0073] In this way, the distance between the evaporation mask plate 20 and the evaporation source 30 can be adjusted according to different light-emitting materials, so as to match the light-emitting characteristics of different light-emitting materials, so that the light-emitting life of each sub-pixel area is the same, and the light-emitting effect of each sub-pixel area is ensured.

[0074] Further, referring to FIG. 1, Figure 5 As shown in the figure, the evaporation mask plate 20 is arranged on the side away from the evaporation source 30 of the alignment mask plate 10, that is, the evaporation mask plate 20 is arranged below the alignment mask plate 10. In this way, the evaporation range of the light-emitting material is pre-planned on the alignment mask plate 10, that is, the display area on the substrate 40 is pre-corresponded, and then the light-emitting material is evaporated into the display area through the evaporation holes 201 on the evaporation mask plate 20. In this way, the evaporation range of the light-emitting material is more accurate, and the evaporation efficiency is improved.

[0075] Of course, the alignment mask plate 10 can also be arranged on the side away from the evaporation source 30 of the evaporation mask plate 20, that is, the evaporation mask plate 20 is arranged above the alignment mask plate 10. In this way, different color sub-pixel areas can also be evaporated in the display area on the substrate 40, but compared with the structure that the evaporation mask plate 20 is arranged below the alignment mask plate 10, since the evaporation source 30 is a scattering evaporation, when pre-passing through the evaporation holes 201 and then passing through the opening area 101, it is easy to make part of the evaporation holes 201 only partially evaporate into the display area, and another part evaporates into the non-display area, causing the evaporation of the sub-pixel area to be incomplete.

[0076] It should be noted that the alignment mask plate 10 can be arranged with a gap from the evaporation mask plate 20, or can be arranged in close contact with the evaporation mask plate 20, and the specific design can be designed according to different panel structures.

[0077] It can be understood that since the light-emitting material is evaporated onto the substrate 40, the evaporation method is that the evaporation material scatters from top to bottom through the opening area 101 and the evaporation hole 201. When the evaporation mask plate 20 is arranged with a gap from the alignment mask plate 10, the larger the range of evaporation material scattered on the evaporation mask plate 20, the more evaporation holes 201 on the evaporation mask plate 20 are passed through, and it is easy to cause the evaporation material to evaporate into the non-display area, causing waste of the light-emitting material. When the evaporation mask plate 20 is arranged in close contact with the alignment mask plate 10, the evaporation material scatters according to the evaporation holes 201 in the opening area 101, that is, only the evaporation holes 201 in the opening area 101 are passed through by the evaporation material. This way can avoid the evaporation material evaporating into the non-display area, reduce the waste of the evaporation material, and reduce the production cost.

[0078] Further, the alignment mask plate 10 and the evaporation mask plate 20 are movably connected, and the evaporation mask plate 20 can move horizontally relative to the alignment mask plate 10 to form sub-pixel areas of different colors on the substrate 40. The evaporation mask plate 20 can also move vertically relative to the alignment mask plate 10 to form sub-pixel areas of different sizes on the substrate 40 to match the service life of different light-emitting materials.

[0079] Further, as shown in Figure 4 The evaporation mask plate 20 includes a plurality of oblique evaporation hole groups 202, and each oblique evaporation hole group 202 includes a plurality of evaporation holes 201 arranged along a first horizontal oblique direction X, and the plurality of oblique evaporation hole groups 202 are arranged along a second horizontal oblique direction Y. In this way, the same color sub-pixel areas can be arranged along the first horizontal oblique direction X, that is, the colors of the sub-pixel areas in the same column or the same row are different, and the same color sub-pixel areas are arranged along the first horizontal oblique direction X, thereby avoiding color edge errors and making the color of the Oled display panel more uniform and improving the display effect of the Oled display panel.

[0080] It should be noted that the shapes and sizes of the evaporation holes 201 in the evaporation hole group 202 are the same, and the shape of the evaporation hole 201 can be square, circular, oval, or polygonal.

[0081] The display area has a red sub-pixel pattern area, a green sub-pixel pattern area, and a blue sub-pixel pattern area, the sub-pixel areas in the red sub-pixel pattern area correspond to red light-emitting materials, the sub-pixel areas in the green sub-pixel pattern area correspond to green light-emitting materials, and the sub-pixel areas in the blue sub-pixel pattern area correspond to blue light-emitting materials. The red sub-pixel pattern area, the green sub-pixel pattern area, and the blue sub-pixel pattern area are arranged according to a rule to form pixel areas of the display area, that is, light-emitting areas of the display area.

[0082] The pixel area includes a smallest repeating pattern area. The smallest repeating pattern area includes nine sub-pixels corresponding to different coordinates; wherein the coordinates (n, m), (n-1, m+1), and (n+1, m-1) correspond to a first color, the coordinates (n, m+1), (n+1, m), and (n-1, m-1) correspond to a second color, and the coordinates (n+1, m+1), (n-1, m), and (n, m-1) correspond to a third color, n and m can be positive integers; the colors of the first color, the second color, and the third color are different, one of the first color, the second color, and the third color is red, another is green, and the last is blue; for example, the first color is red, the second color is green, and the third color is blue; that is, in the column and row directions, the colors of adjacent sub-pixels are different.

[0083] It should be noted that when the display area includes a number of sub-pixel pattern areas of a number of different colors, the minimum repeating pattern area includes a number of sub-pixels arranged in a number of rows and a number of columns; for example, when the display area includes four sub-pixel pattern areas of four different colors, the minimum repeating pattern area includes a 4x4 arrangement of sub-pixels.

[0084] Optionally, the sub-pixel pattern area has three sub-pixel areas of red, green and blue, and the three sub-pixel areas correspond to three evaporation pattern areas, the three evaporation pattern areas correspond to a first arrangement unit, a second arrangement unit and a third arrangement unit in the opening area 101, and the first arrangement unit, the second arrangement unit and the third arrangement unit each include a first evaporation hole, a second evaporation hole and a third evaporation hole; when evaporating the three sub-pixel areas of red, green and blue, a part of the evaporation holes in the first arrangement unit, the second arrangement unit and the third arrangement unit are shared, and another part of the evaporation holes are used separately.

[0085] The three evaporation holes in the first arrangement unit are respectively located in different rows and different columns, and the first evaporation hole, the second evaporation hole and the third evaporation hole are arranged in a diagonal alignment, and the first arrangement unit is evaporated to obtain a red sub-pixel area, as shown in Figure 8 .

[0086] The three evaporation holes in the second arrangement unit are respectively located in different rows and different columns, the first evaporation hole is located at the upper right corner of the opening area, the second evaporation hole is located at the left side of the opening area, and the third evaporation hole is located in the middle column between the second evaporation hole and the first evaporation hole, and the second arrangement unit is evaporated to obtain a blue sub-pixel area, as shown in Figure 9 .

[0087] The three evaporation holes in the third arrangement unit are respectively located in different rows and different columns, the third evaporation hole is located at the lower left corner of the opening area, the second evaporation hole is located at the right side of the opening area, and the first evaporation hole is located in the middle column between the second evaporation hole and the third evaporation hole, and the third arrangement unit is evaporated to obtain a green sub-pixel area, as shown in Figure 10 .

[0088] In this way, the first arrangement unit can obtain the second arrangement unit by moving one sub-pixel area, the second arrangement unit can obtain the third arrangement unit by moving one sub-pixel area, and the third arrangement unit can obtain the first arrangement unit by moving one sub-pixel area, and so on; that is, after evaporating the sub-pixel area corresponding to one arrangement unit, moving the position of one sub-pixel area can evaporate the sub-pixel area of another color, and a part of the evaporation holes in the three arrangement units are shared and another part are used separately during the evaporation process, so that the formation of sub-pixel areas of different colors is more simple and convenient, the time for replacing the mask plate is reduced, the production capacity is improved, and the production cost is reduced.

[0089] For example, referring to Figure 4 and Figure 8As shown, the evaporation mask 20 includes five groups of oblique evaporation hole groups 202, which are arranged along a first horizontal oblique direction X and each oblique evaporation hole group 202 is arranged along a second horizontal oblique direction Y, and the first horizontal oblique direction X is perpendicular to the second horizontal oblique direction Y. The number of evaporation holes 201 corresponding to the oblique evaporation hole group 202 in the middle is the largest, and the number of evaporation holes 201 gradually decreases when moving from the middle to the edge along the second horizontal oblique direction Y.

[0090] Of course, the evaporation hole group 202 is not limited to five groups, but can also be six groups, seven groups, eight groups, etc.

[0091] The evaporation mask 20 and the alignment mask 10 are used to form Figure 1 The process of the sub-pixel area in the dashed box is as follows:

[0092] First, the first arrangement unit is covered with three evaporation holes 201, which are the first evaporation hole 201a, the second evaporation hole 201b and the third evaporation hole 201c, and the first, second and third evaporation holes 201c are from the same group, that is, the first, second and third evaporation holes 201c are arranged along the first horizontal oblique direction X.

[0093] In addition, referring to Figure 8 As shown, the fourth evaporation hole 201d and the fifth evaporation hole 201e are provided at the shielding area 102 adjacent to the right side of the opening area 101. The fourth evaporation hole 201d is located in the same row as the first evaporation hole 201a, and the first evaporation hole 201a and the fourth evaporation hole 201d are spaced apart by two sub-pixel areas. The fifth evaporation hole 201e is located in the same row as the second evaporation hole 201b, and the second evaporation hole 201b and the fifth evaporation hole 201e are spaced apart by two sub-pixel areas.

[0094] During evaporation, the evaporation source 30 scatters red light-emitting materials, which pass through the opening area 101 and the first evaporation hole 201a, the second evaporation hole 201b and the third evaporation hole 201c in the opening area 101 in turn, to form red sub-pixel areas 401 in the sub-pixel pattern area of the substrate 40, and the positions of the red sub-pixel areas 401 are the same as the layout of the first evaporation hole 201a, the second evaporation hole 201b and the third evaporation hole 201c. Among them, the coordinates of the red sub-pixel formed by the first evaporation hole 201a are (n-1, m+1), the coordinates of the red sub-pixel formed by the second evaporation hole 201b are (n, m), and the coordinates of the red sub-pixel formed by the third evaporation hole 201c are (n+1, m-1), n and m are positive integers.

[0095] Secondly, referring to Figure 9As shown, after the red sub-pixel region 401 is vapor deposited, the vapor deposition mask 20 is moved horizontally to the left by one sub-pixel region, the first vapor deposition hole 201a is moved to the shielding region 102, the second vapor deposition hole 201b and the third vapor deposition hole 201c are moved to the positions originally occupied by the first vapor deposition hole 201a and the second vapor deposition hole 201b respectively, and the fourth vapor deposition hole 201d is moved to the position originally occupied by the third vapor deposition hole 201c, and the fifth vapor deposition hole 201e is moved by one sub-pixel region and is still in the shielding region 102, thereby changing from the first arrangement unit to the second arrangement unit. At this time, the evaporation source 30 releases blue light emitting material, and since the life of the blue light emitting material is short, the vapor deposition mask 20 needs to be moved upward before the light emitting material is released to adjust the distance between the vapor deposition mask 20 and the evaporation source 30, so that the area of the blue sub-pixel region 402 formed is larger than that of the red sub-pixel region 401. The position of the blue sub-pixel region 402 corresponds to the positions of the second vapor deposition hole 201b, the third vapor deposition hole 201c and the fourth vapor deposition hole 201d after movement, wherein the coordinates of the blue sub-pixel formed by the second vapor deposition hole 201b are (n-1, m), the coordinates of the blue sub-pixel formed by the third vapor deposition hole 201c are (n, m-1), and the coordinates of the blue sub-pixel formed by the fourth vapor deposition hole 201d are (n+1, m+1), n and m are positive integers.

[0096] It can be understood that when changing from the first arrangement unit to the second arrangement unit, the first vapor deposition hole 201a is only used to vapor deposit red light emitting material, and the second vapor deposition hole 201b and the third vapor deposition hole 201c are also used to vapor deposit blue light emitting material, that is, part of the vapor deposition holes are shared, and another part is used to vapor deposit the light emitting material corresponding thereto. In this way, the vapor deposition time can be effectively reduced, and the production cost can be reduced.

[0097] Then, referring to Figure 10As shown, after the blue sub-pixel area 402 is deposited, the deposition mask 20 moves horizontally to the left by one deposition hole 201 position. The first deposition hole 201a is still located in the shielding area 102, the second deposition hole 201b gradually moves into the shielding area 102, and the third deposition hole 201c and the fourth deposition hole 201d move to the left by one sub-pixel area position, respectively below the second deposition hole 201b after the first movement and above the third deposition hole 201c after the first movement. At the same time, the fifth deposition hole 201e gradually moves from the shielding area 102 into the opening area 101, and comes below the fourth deposition hole 201d after the first movement, and then from the second arrangement unit to the third arrangement unit. At this time, the evaporation source 30 releases green luminescent material. Because the green luminescent material has a long lifespan, before releasing the luminescent material, the evaporation mask 20 needs to be moved downwards to adjust the distance between it and the evaporation source 30, so that the area of ​​the formed green sub-pixel region 403 is smaller than the areas of the red sub-pixel region 401 and the blue sub-pixel. Furthermore, the position of this green sub-pixel region 403 corresponds one-to-one with the positions of the moved third evaporation hole 201c, fourth evaporation hole 201d, and fifth evaporation hole 201e. The coordinates of the green sub-pixel formed by the third evaporation hole 201c are (n-1, m-1), the coordinates of the green sub-pixel formed by the fourth evaporation hole 201d are (n, m+1), and the coordinates of the green sub-pixel formed by the fifth evaporation hole 201e are (n+1, m), where n and m are positive integers.

[0098] It is understandable that when moving from the second to the third arrangement unit, the second evaporation hole 201b is only used for evaporating blue luminescent material, while the third evaporation hole 201c and the fourth evaporation hole 201d are also used for evaporating green luminescent material. That is, some evaporation holes are shared, while others are used exclusively for evaporating their corresponding luminescent materials. In this way, the evaporation time can be effectively reduced, and production costs can be reduced.

[0099] After moving the vapor deposition mask 20 sequentially, a minimum repeating pattern area is formed, such as... Figure 1 As shown in the dashed box, this pixel unit includes nine sub-pixels. Different colored sub-pixels correspond to different area sizes. For example, the blue sub-pixel has the largest area, followed by the red sub-pixel, and the green sub-pixel has the smallest area.

[0100] In this way, different color sub-pixel areas can be formed on the substrate 40 by horizontally moving the evaporation mask plate 20, the time required for replacing the mask plate is reduced, the production cost is reduced, and the production capacity is improved. In addition, by moving in the vertical direction, the service life of each sub-pixel area can be matched to the service life of the light-emitting material, so that the service life of each sub-pixel area is the same, and the display effect is the same. In addition, the colors of the sub-pixel areas in the same column and the same row are different, which can avoid color edge errors, make the color of the Oled display panel more uniform, and improve the display effect of the Oled display panel.

[0101] It should be noted that the evaporation mask plate 20 can also move horizontally to the right relative to the alignment mask plate 10, and the forming principle is the same as that of the above-mentioned left movement, which will not be repeated here.

[0102] In addition, the sub-pixel pattern area can also correspond to four, five or more different color sub-pixel areas, and the corresponding evaporation pattern area can also correspond to four, five or more different evaporation pattern areas, each of which corresponds to a different arrangement unit. For example, four evaporation pattern areas correspond to four different arrangement units, and five evaporation pattern areas correspond to five different arrangement units.

[0103] It is worth mentioning that, as shown in Figure 8 , Figure 9 or Figure 10 , the opening area 101 can be square, circular or elliptical. For example, when the opening area 101 is square, the first horizontal diagonal X direction can coincide with the diagonal of the opening area 101. In this way, the corresponding positions of the opening area 101 and the evaporation hole 201 are more accurate, the positions of each sub-pixel area are more uniform, and the display effect is guaranteed.

[0104] Further, the mask plate assembly further comprises a driving member and a driver, the driving member being capable of adjusting the movement of the evaporation mask plate 20 in the horizontal and vertical directions according to the evaporation condition of the sub-pixel area obtained by the driver, so as to adjust the formation of different color sub-pixel areas on the substrate 40 and the area size difference between sub-pixel areas of different colors.

[0105] It can be understood that the size of the evaporation mask plate 20 and the alignment mask plate 10 can be the same as, smaller than or larger than the size of the substrate 40. In addition, the size of the evaporation mask plate 20 can be the same as or smaller than the size of the alignment mask plate 10.

[0106] It is worth mentioning that the display area size on the fixed size substrate 40 is the same, so that the alignment mask plate 10 can be used on the substrate 40 of the same size different display panel, improve the reusability of the alignment mask plate 10.

[0107] Embodiment two

[0108] As Figure 11 shown, the embodiment two provides a kind of evaporation method for making array substrate using mask plate assembly in embodiment one, including the following steps:

[0109] Step S100, provide a substrate 40.

[0110] Step S200, evaporation mask plate 20 and alignment mask plate 10 are provided in the vertical direction of substrate 40.

[0111] The opening area 101 in alignment mask plate 10 corresponds to the display area on substrate 40, and the evaporation hole 201 in evaporation mask plate 20 is partially located in the opening area 101. And evaporation mode is from top to bottom evaporation, so the evaporation mask plate 20 and alignment mask plate 10 are respectively arranged above substrate 40.

[0112] Step S300, drive evaporation mask plate 20 to move horizontally relative to alignment mask plate 10, so that evaporation pattern area is matched with the pattern of sub-pixel pattern area one by one, to evaporate different color light emitting materials to sub-pixel pattern area.

[0113] After evaporation is carried out on evaporation hole 201 located in the opening area 101 of alignment mask plate 10, evaporation mask plate 20 is driven by driving member to move horizontally right or horizontally left, the position of evaporation hole 201 in opening area 101 is changed, to form different color sub-pixel area in the display area of substrate 40.

[0114] Step S400, after evaporation is completed on the same size sub-pixel area on substrate 40, the size of the next evaporation sub-pixel area is compared with the size of the last evaporation sub-pixel area, and the comparison result is obtained, and the distance between evaporation mask plate 20 and evaporation source 30 is controlled according to the comparison result.

[0115] Step S401, if the size of the next evaporation sub-pixel area is smaller than the size of the last evaporation sub-pixel area, control evaporation mask plate 20 to move away from evaporation source 30;

[0116] Step S402, if the size of the next evaporation sub-pixel area is larger than the size of the last evaporation sub-pixel area, control evaporation mask plate 20 to move close to evaporation source 30.

[0117] The size of the sub-pixel area for the next evaporation is obtained by the comparator, the controller controls the evaporation mask 20 to move in the vertical direction of the substrate 40, adjusts the ratio of the first distance D between the evaporation mask 20 and the evaporation source 30 and the second distance d between the evaporation mask 20 and the substrate 40, and then changes the area of the sub-pixel area on the substrate 40.

[0118] The area of the sub-pixel area can be adjusted according to the life of the material to adjust the first distance D; if the life of the material of the sub-pixel area is shorter, the sub-pixel area needs a larger light-emitting area, that is, the first distance D is reduced and the second distance d is increased. If the life of the material of the sub-pixel area is longer, the sub-pixel area needs a smaller light-emitting area, that is, the first distance D is increased and the second distance d is reduced, so that the area of the sub-pixel area is smaller.

[0119] For example, the life of the blue light-emitting material is shorter, the life of the green light-emitting material is longer, and the life of the red light-emitting material is between the blue light-emitting material and the green light-emitting material. Therefore, the area of the blue sub-pixel area formed by the blue light-emitting material is larger, the area of the green sub-pixel area formed by the green light-emitting material is smaller, and the area of the red sub-pixel area formed by the red light-emitting material is between the blue sub-pixel area and the green sub-pixel area.

[0120] In this way, different color sub-pixel areas can be formed on the substrate 40 by the evaporation mask 20 and the alignment mask 10, the time required for replacing the mask is saved, the production capacity of the array substrate is improved, and the production cost is reduced. In addition, the colors of the sub-pixel areas in the same column and the same row can be different by using the evaporation mask 20 and the alignment mask 10, the color edge error can be avoided, the color of the Oled display panel is more uniform, and the display effect of the Oled display panel is improved.

[0121] Embodiment three

[0122] As shown in Figure 1 The embodiment three provides an array substrate, which includes a substrate 40 and a plurality of sub-pixels evaporated on the substrate 40 by using the evaporation mask 20 and the alignment mask 10 in the embodiment one.

[0123] For example, the plurality of sub-pixels of the same color are aligned in the first horizontal direction X on the substrate 40; and in the row direction and the column direction, the colors of the adjacent sub-pixels are different, the color edge error can be avoided, the color of the Oled display panel is more uniform, and the display effect of the Oled display panel is improved.

[0124] In addition, the spacing between the vapor deposition mask 20 and the vapor deposition source 30 can be adjusted, thereby adjusting the size of the sub-pixel area formed on the substrate 40.

[0125] For example, such as Figure 1 As shown, the blue subpixel has a shorter lifetime and forms a larger area; the green subpixel has a longer lifetime and forms a smaller area; while the red subpixel has a lifetime between that of the blue and green subpixels, and its area also falls between that of the blue and green subpixels.

[0126] Example 4

[0127] like Figure 12 As shown, this embodiment four provides a display panel 50, which includes a cathode layer 502, an encapsulation layer 503 and an array substrate 501 of embodiment three; wherein, the cathode layer 502 and the encapsulation layer 503 are both disposed on the array substrate 501, and the encapsulation layer 503 is disposed on the side of the cathode layer 502 away from the array substrate 501, so as to protect the array substrate 501 and the cathode layer 502.

[0128] In this process, different colored light-emitting materials are deposited onto the array substrate using a vapor deposition mask 20 and a alignment mask 10, forming sub-pixel areas of different colors and sizes, which in turn form the light-emitting layer of the display panel. This method of forming different sub-pixel areas using two masks not only reduces the number of masks needed but also decreases the time spent replacing them, increasing production capacity and reducing costs. Furthermore, the differences in color and size between adjacent sub-pixels after vapor deposition result in more uniform color in the display panel, avoiding color edge errors and improving the display effect.

[0129] Furthermore, this fourth embodiment is applied to an organic light-emitting diode (OLED) display panel.

[0130] In the description of this specification, references to terms such as "some embodiments," "exemplarily," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of this disclosure. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0131] Although the embodiments of the present disclosure have been shown and described above, it is understood that the above-described embodiments are exemplary, and are not to be construed as limiting the present disclosure, and those ordinarily skilled in the art can make changes, modifications, replacements and variations to the above-described embodiments within the scope of the present disclosure, and any changes or modifications made according to the claims and the specification of the present disclosure shall be within the scope of the present disclosure.

Claims

1. A mask assembly for depositing a light-emitting material onto a substrate, the substrate having a display area and a non-display area, the display area having a plurality of sub-pixel pattern areas, the plurality of sub-pixel pattern areas corresponding to different colors of the deposited light-emitting material, characterized in that, The mask plate assembly comprises: An alignment mask plate having an opening region and a shielding region, the opening region being configured to be arranged in alignment with the display region, and the shielding region being configured to be arranged in alignment with the non-display region; An evaporation mask plate arranged opposite the alignment mask plate in a vertical direction, the evaporation mask plate having a plurality of evaporation pattern regions, the evaporation pattern regions being matched one-to-one with the sub-pixel pattern regions, the evaporation mask plate being configured to move horizontally relative to the alignment mask plate so that the plurality of evaporation pattern regions are sequentially and completely moved into the opening region and arranged in alignment with the sub-pixel pattern regions matched therewith; In the process of switching evaporation colors by moving the evaporation mask plate horizontally relative to the alignment mask plate, the relative distance between the evaporation mask plate and the evaporation source is controlled so that different distances are provided between the evaporation mask plate and the evaporation source when different colors of light-emitting materials are evaporated; When one of the plurality of evaporation pattern regions is completely moved into the opening region and arranged in alignment with the sub-pixel pattern region matched therewith, at least part of the remaining evaporation pattern regions is opposite the shielding region; The pixel region of the display region comprises a minimum repeating pattern region containing nine sub-pixels, the sub-pixels at coordinates (n, m), (n-1, m+1) and (n+1, m-1) corresponding to a first color, the sub-pixels at coordinates (n, m+1), (n+1, m) and (n-1, m-1) corresponding to a second color, and the sub-pixels at coordinates (n+1, m+1), (n-1, m) and (n, m-1) corresponding to a third color, n and m being positive integers; The evaporation mask plate has a first distance D from the evaporation source and a second distance d from the substrate, and the area of the sub-pixel pattern region evaporated by the evaporation source on the substrate is adjusted by adjusting the ratio between the first distance D and the second distance d; The shielding region covers the non-display region in the evaporation process to prevent light-emitting materials from being evaporated to the non-display region.

2. The mask assembly of claim 1, wherein, The evaporation mask plate has a plurality of evaporation holes configured to be arranged in alignment with the sub-pixel regions of the sub-pixel pattern regions in the evaporation process; wherein The plurality of evaporation holes are arranged according to a rule to form the plurality of evaporation pattern regions, and a part of the evaporation holes are shared between the plurality of evaporation pattern regions, and a part of the evaporation holes are independent of each other.

3. The mask assembly of claim 2, wherein, The shapes and sizes of the plurality of evaporation holes are the same.

4. The mask assembly of claim 3, wherein, The display area has a red sub-pixel pattern area, a green sub-pixel pattern area and a blue sub-pixel pattern area, the sub-pixel area in the red sub-pixel pattern area corresponds to a red light-emitting material, the sub-pixel area in the green sub-pixel pattern area corresponds to a green light-emitting material, the sub-pixel area in the blue sub-pixel pattern area corresponds to a blue light-emitting material, and the red sub-pixel pattern area, the green sub-pixel pattern area and the blue sub-pixel pattern area are arranged according to rules to form a pixel area of the display area, the pixel area includes a minimum repeating pattern area, the minimum repeating pattern area includes nine sub-pixels, the sub-pixels with coordinates (n, m), (n-1, m+1) and (n+1, m-1) correspond to a first color, the sub-pixels with coordinates (n, m+1), (n+1, m) and (n-1, m-1) correspond to a second color, and the sub-pixels with coordinates (n+1, m+1), (n-1, m) and (n, m-1) correspond to a third color, one of the first color, the second color and the third color is red, another is green, and the other is blue; wherein n and m are positive integers.

5. The mask assembly of claim 4, wherein, The first color is red, the second color is green, and the third color is blue, and the areas of the blue sub-pixels, the red sub-pixels and the green sub-pixels gradually decrease; and / or The alignment mask plate is arranged above the evaporation mask plate.

6. An evaporation method for manufacturing an array substrate using the shadow mask assembly according to any one of claims 1 to 5, characterized by, The method comprises the following steps: A substrate is provided; The evaporation mask plate and the alignment mask plate are arranged in the vertical direction of the substrate; The evaporation mask plate is driven to move horizontally relative to the alignment mask plate, so that the evaporation pattern area is matched with the pattern of the sub-pixel pattern area one by one, so as to evaporate different color light-emitting materials to the sub-pixel pattern area; wherein the mask plate assembly is configured to: during the horizontal movement of the evaporation mask plate relative to the alignment mask plate to switch the evaporation color, by controlling the relative distance between the evaporation mask plate and the evaporation source, the evaporation mask plate and the evaporation source have different distances when evaporating different color light-emitting materials; the pixel area of the display area includes a minimum repeating pattern area, the minimum repeating pattern area includes nine sub-pixels, the sub-pixels with coordinates (n, m), (n-1, m+1) and (n+1, m-1) correspond to a first color, the sub-pixels with coordinates (n, m+1), (n+1, m) and (n-1, m-1) correspond to a second color, and the sub-pixels with coordinates (n+1, m+1), (n-1, m) and (n, m-1) correspond to a third color, n and m are positive integers; the evaporation mask plate and the evaporation source have a first distance D, and the evaporation mask plate and the substrate have a second distance d, by adjusting the ratio relationship between the first distance D and the second distance d, the area size of the sub-pixel pattern area evaporated by the evaporation source to the substrate is adjusted; the shielding area covers the non-display area during evaporation to prevent light-emitting materials from being evaporated to the non-display area.

7. The array substrate evaporation method according to claim 6, wherein The evaporation method of the array substrate further comprises: After the same size sub-pixel area is evaporated on the substrate, the size of the next evaporated sub-pixel area is compared with the size of the last evaporated sub-pixel area, and a comparison result is obtained, and the distance between the evaporation mask plate and the evaporation source is controlled according to the comparison result.

8. The array substrate evaporation method according to claim 7, wherein The method for controlling the distance between the evaporation mask plate and the evaporation source comprises: If the size of the next evaporated sub-pixel area is smaller than the size of the last evaporated sub-pixel area, the evaporation mask plate is controlled to move away from the evaporation source; If the size of the next evaporated sub-pixel area is larger than the size of the last evaporated sub-pixel area, the evaporation mask plate is controlled to move towards the evaporation source.

9. An array substrate, characterized by, The substrate and a plurality of sub-pixels evaporated on the substrate by using the mask plate assembly of any one of claims 1-5 are included, the sub-pixels of the same color are aligned diagonally on the substrate, and the color and size of adjacent sub-pixels are different in the row direction and the column direction.

10. A display panel, characterized by, The array substrate comprises a cathode layer, an encapsulation layer, and the array substrate of claim 9, and the encapsulation layer is arranged on the side of the cathode layer away from the array substrate.

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