A silicon rod cutting / grinding flexible manufacturing system based on a traveling clamp

Abstract

The present application belongs to the technical field of flexible production line of square cutting and grinding process of photovoltaic solar monocrystalline silicon and polycrystalline silicon, and discloses a silicon rod square cutting / grinding flexible manufacturing system based on a following clamp. The system comprises a following clamp, a loading / unloading machine, a square cutting machine, a square grinding machine, an AGV trolley, a finished product silicon rod conveying line, a blank rod conveying line, and a loading / unloading robot. The loading / unloading machine, the square cutting machine, and the square grinding machine are placed on both sides of the system, the finished product silicon rod conveying line and the blank rod conveying line are placed on both sides of one end of the system, and the loading / unloading robot for moving and comparing workpieces is arranged between the finished product silicon rod conveying line, the blank rod conveying line, and the loading / unloading machine. The AGV trolley is used for moving the following clamp between the loading / unloading machine, the square cutting machine, and the square grinding machine, and the square cutting machine and the square grinding machine are respectively provided with power docking mechanisms for connecting with the following clamp and rotating the workpiece. The system can improve the processing efficiency, reduce the silicon material loss, and reduce the equipment investment and operation and maintenance costs.

Description

TECHNICAL FIELD

[0001] The present application belongs to the technical field of flexible production line of square cutting and grinding process of photovoltaic solar monocrystalline silicon and polycrystalline silicon, and relates to a silicon rod square cutting / grinding flexible manufacturing system based on a following clamp. BACKGROUND

[0002] The existing processing technology is to form a square cutting automatic line and a grinding(polishing) automatic line by a certain automatic logistics technology through a general square cutting machine and a general grinding machine. The square cutting machine has the functions of reversing, finding a meridian line, finding a center, clamping and then cutting. The grinding machine has the functions of feeding, finding a center, clamping, detecting a grinding surface angle, rough grinding, fine grinding, detecting and then discharging. However, this is not one-time clamping, has a large error and causes serious workpiece loss. Another type is a square cutting-grinding integrated machine(manufacturing island), which integrates the square cutting and grinding processes into one machine tool and realizes one-time clamping. This technology solves the error of non-coincidence of the datum caused by two-time clamping and reduces the loss of silicon material. However, this integrated machine causes problems such as high equipment failure rate, difficult maintenance and high maintenance cost. SUMMARY

[0003] In order to overcome the shortcomings of the prior art, the present application provides a silicon rod square cutting / grinding flexible manufacturing system based on a following clamp, which can be applied to the flexible production line of square cutting and grinding process of photovoltaic solar monocrystalline silicon and polycrystalline silicon, can improve processing efficiency, reduce silicon material loss, greatly improve reliability, and reduce equipment investment and operation and maintenance cost.

[0004] The above object of the present application is achieved by the following technical scheme:

[0005] A silicon rod square cutting / grinding flexible manufacturing system based on a following clamp, comprising a following clamp, a feeding / discharging machine, a square cutting machine, a square grinding machine, an AGV trolley, a finished product silicon rod conveying line, a blank rod conveying line and a feeding / discharging robot, wherein the feeding / discharging machine, the square cutting machine and the square grinding machine are arranged on both sides of the system, the finished product silicon rod conveying line and the blank rod conveying line are arranged on both sides of one end of the system, the feeding / discharging machine is arranged at one end adjacent to the finished product silicon rod conveying line and the blank rod conveying line, the feeding / discharging robot for moving workpieces and comparing workpieces is arranged between the finished product silicon rod conveying line, the blank rod conveying line and the feeding / discharging machine, the AGV trolley is used to move the following clamp between the feeding / discharging machine, the square cutting machine and the square grinding machine, and the AGV trolley is movably connected with the feeding / discharging machine, the square cutting machine and the square grinding machine, the following clamp is connected with the feeding / discharging machine, the square cutting machine and the square grinding machine and can be detached, and the square cutting machine and the square grinding machine are respectively provided with power docking mechanisms for connecting with the following clamp and rotating workpieces.

[0006] The following clamp, the feeding / discharging machine, the square cutting machine, the square grinding machine and the AGV trolley can be arranged according to the working condition requirements.

[0007] The traveling clamp moves with the AGV trolley. The AGV trolley is not limited to a specific model, and its working function is realized, preferably AGV (F4-1000C).

[0008] The AGV trolley is provided with a traveling bracket, which is installed on the forks of the AGV trolley. Four universal bearings are arranged at the bottom of the traveling bracket in contact with the forks, and each universal bearing is arranged in a limiting seat. Two supports are arranged on each side of the bottom of the traveling bracket, and a compression spring is arranged on each support to achieve floating in a small range. An electric cylinder is arranged on each side of the upper part of the traveling bracket. A latch B is arranged on each electric cylinder to lock and prevent the traveling clamp from falling during transportation. Two wedge-shaped positioning pins are arranged at the bottom of the contact surface between the traveling bracket and other square cutting machines, square grinding machines, and loading / unloading machines for positioning with two wedge-shaped positioning blocks on the square cutting machines, square grinding machines, and loading / unloading machines. A coarse positioning pin is arranged on the contact surface between the traveling bracket and the traveling clamp to limit the position.

[0009] The loading / unloading robot is a robot vision loading / unloading device, and the structure is disclosed in the patent CN216613042U applied by the applicant.

[0010] The traveling clamp includes a traveling clamp body, a fixed chuck body, and a movable chuck body. The fixed chuck body is arranged at one end of the traveling clamp body, and a floating fixed chuck is inserted at the bottom of the front end of the fixed chuck body. A power docking gear plate A is connected to the upper end of the floating fixed chuck. A linear guide rail B and a T-shaped lead screw are arranged on the traveling clamp body. The movable chuck body is movably connected to the traveling clamp body through the linear guide rail B, the T-shaped lead screw, and a sliding block. A floating movable chuck is installed on the top of the movable chuck body, and a rotary clamping cylinder A is arranged on the side of the top of the movable chuck body. A connecting plate is connected to the front end of the piston rod of the cylinder A. A bearing seat A is installed at one end of the traveling clamp body, a bearing A is arranged in the bearing seat A, and a clamping docking shaft is arranged on the bearing A. The clamping docking shaft is connected to the T-shaped lead screw through a coupling A, and a pneumatic clamp is arranged adjacent to the bearing A.

[0011] The fixed chuck seat is fixedly connected with one side of the upper part of the movable clamp seat body. The power connecting tooth disc A and the floating fixed chuck are connected to form a power connecting piece, and the power connecting piece penetrates the front end of the fixed chuck seat. The two ends of the T-shaped screw rod are respectively installed on the screw rod seat A and the screw rod seat B, and the screw rod seat A and the screw rod seat B are installed on the movable clamp seat body. The clamping connecting shaft is connected with the movable clamp seat body through the bearing seat A, and the clamping connecting shaft is arranged on one side of the fixed chuck seat. The locking nut A is installed on the clamping connecting shaft and is used for locking the bearing A. The pneumatic clamp device is arranged adjacent to the bearing A and is used for locking the T-shaped screw rod. The floating movable chuck is installed on the top of the movable chuck seat. The movable chuck seat is moved and the single crystal silicon rod is clamped through the rotation of the T-shaped screw rod. The rotary clamping cylinder A is used for clamping the edge skin of the single crystal silicon rod during machining. The connecting plate is arranged on the bottom of the movable chuck seat. Two movable clamp clamping rods are installed on the connecting plate. The positioning plate is further arranged on the movable clamp seat body, and a plurality of pin holes are arranged on the positioning plate. The positioning plate is arranged below the movable chuck seat.

[0012] Further, the side surface of the movable clamp seat body is provided with a positioning hole, and the number of the positioning holes is not limited. Only one is drawn in the figure for explanation, which is used for connecting with the precise positioning pin on the square grinding machine, square cutting machine and loading / unloading machine. The movable clamp can automatically clamp various specifications of crystal rods with a diameter of 200-310 mm and a length of 700-950 mm.

[0013] The power docking mechanism comprises a power docking support, a power docking gear plate B, the bottom of the power docking support is provided with a linear guide rail A, the power docking mechanism is connected with the stand column through the linear guide rail A and a sliding block, a small oil cylinder (CXR-LA40X80) is arranged on the power docking support; a bearing seat B is arranged at the front end of the power docking support, a bearing B is arranged in the bearing seat B, the power docking gear plate B is installed on the bearing seat B through the bearing B, the power docking gear plate B is connected with a servo motor A through a shaft coupling B, the servo motor A is installed on the power docking support; a gland is installed at one end of the bearing seat B, and the gland is in contact with the outer ring of the bearing B; a locking nut B is arranged on the power docking gear plate B, and the locking nut B is in contact with the inner ring of the bearing B. An unlocking pin is further arranged on the power docking support, a positioning pin hole is further arranged on the adjacent surface of the following fixture, and the unlocking pin is movably connected with the positioning pin hole. An unlocking pin is arranged at the adjacent position of the power docking gear plate B, and a pin shaft is further arranged on the following fixture; the pin shaft is arranged directly below the unlocking pin, a spring A is arranged at the outer periphery of the lower part of the pin shaft, a locking pin is arranged below the pin shaft, one end of the locking pin is connected with the spring B, and the other end is connected with a floating fixed chuck in the following fixture. The locking pin and the pin shaft are perpendicular to each other, the locking pin is horizontally arranged, the middle part of the locking pin is concave, and is used for movably connecting with the bottom of the pin shaft; and then the locking pin is driven to move and compress the spring B. After the following fixture is installed on the stand column of the machine tool, the small oil cylinder of the power docking mechanism is actuated, the front end power docking gear plate B on the power docking mechanism is engaged with the end surface gear power docking gear plate A on the following fixture, the unlocking pin pushes the pin shaft to move downward and compresses the spring A, then the locking pin is driven to move to the left and compresses the spring B, the floating fixed chuck is released from the limiting, and the connection between the power docking mechanism and the following fixture can realize the rotation of the clamping head.

[0014] The upper / lower feeding machine comprises an upper / lower feeding machine base; a stand column A is arranged on the upper / lower feeding machine base, one side of the stand column A is in a concave structure, a butt joint mechanism is arranged on the upper end of the concave surface of the stand column A, and corner oil cylinders A are arranged on the inner sides of the two sides of the concave surface of the stand column A; the butt joint mechanism comprises two straight linear guides D and a sliding plate, the two straight linear guides D are arranged on the stand column A, a clamping screw is arranged in the middle of the two straight linear guides D, the sliding plate is connected with the straight linear guides D through a sliding block and the clamping screw, a screw rod seat C arranged on the top of the clamping screw is connected with a speed reducer B and a servo motor C, a bearing box is arranged on the sliding plate, a power butt joint shaft is arranged in the bearing box, the top of the power butt joint shaft is connected with the servo motor B through the speed reducer A, and a butt joint toothed disc is arranged at the bottom of the power butt joint shaft; a butt joint workbench A is arranged on the upper / lower feeding machine base, a rough positioning pin A is arranged on the butt joint workbench A, the butt joint workbench A is connected with the upper / lower feeding machine base through a straight linear guide C, an L-shaped push plate is arranged below the straight linear guide C, a cylinder B is arranged at the middle of the rear part of the upper / lower feeding machine base, and the front end of the piston rod of the cylinder B is connected with the L-shaped push plate; and the upper / lower feeding machine base is in a U-shaped structure. The four corner oil cylinders A are symmetrically arranged in pairs. The front end of the straight linear guide C is provided with a limiting block A to prevent the AGV trolley from suddenly losing control and colliding with the machine tool. The clamping screw is a trapezoidal self-locking screw. Two wedge-shaped positioning blocks A are arranged at the two ends of the concave surface of the upper / lower feeding machine base, and are used for movably connecting with the AGV trolley carrying the traveling fixture.

[0015] The square cutting machine comprises a square cutting machine base, a stand column B, a left cutting head body, a right cutting head body and a power butt joint mechanism; the stand column B is arranged on the square cutting machine base, the left cutting head body and the right cutting head body are connected with the stand column B through guide mechanisms respectively; a speed reducer C and a servo motor D are connected with the top of each guide mechanism, cutting members are arranged on the left cutting head body and the right cutting head body respectively, and cutting wheel driving motors are arranged on the left cutting head body and the right cutting head body respectively; an edge skin taking support is arranged on the upper half of the stand column B, the traveling fixture is arranged on the upper part of the middle of the square cutting machine base when the traveling fixture is connected with the square cutting machine, and the traveling fixture is detachably connected with the square cutting machine; the power butt joint mechanism is connected with the stand column B through a straight linear guide A and is located at the middle position of the upper part of the stand column B; the square cutting machine base is in a U-shaped structure, and a water receiving disc A is arranged in the center concave part of the square cutting machine base. The left cutting head body and the right cutting head body are arranged vertically with the plane of the stand column B. The two sides of the water receiving disc A are movably connected with the square cutting machine base through a guide rail and a sliding block. Two wedge-shaped positioning blocks B are arranged at the two ends of the concave surface of the square cutting machine base, and are used for movably connecting with the AGV trolley carrying the traveling fixture.

[0016] Each guide mechanism comprises two linear guides E, ball screws; two linear guides E are arranged on both sides of one side of the column B, the middle of the two linear guides E is installed with a ball screw, the ball screw is connected with the screw seat D arranged on the top of the column B, the upper part of the ball screw is connected with the speed reducer C and the servo motor D. The cutting head has left and right moving functions, each guide mechanism further comprises a cross slide; the cross slide is installed on the linear guide E, a linear guide I and a ball screw A are arranged on the upper surface of the cross slide, one end of the ball screw A is connected with the screw seat E arranged on the cross slide, the other end of the screw seat E is connected with the servo motor F, the right cutting head body is installed on the linear guide I and connected with the nut of the ball screw A, and the left cutting head body has the same structure as the right cutting head body. The cutting member is four cutting wheels surrounding a rectangle; and the cutting wheels are wound with annular diamond wires.

[0017] The edge taking support comprises an X-axis cross beam, a Y-axis cross beam and a Z-axis cross beam; the edge taking support is connected with both sides of the column B; an X-axis cross beam is arranged on the front end of the edge taking support, linear guides G are arranged on the upper part and the lower part of the front surface of the X-axis cross beam, a rack is arranged on the middle region of the front surface of the X-axis cross beam, a Z-axis cross beam is connected with the X-axis cross beam through the linear guides G and the sliding blocks, a servo motor E is arranged on the adjacent position of the Z-axis cross beam, a gear wheel is arranged on the front end of the servo motor E and engaged with the rack; the bottom of the Z-axis cross beam is connected with the Y-axis cross beam through the linear guides F and the sliding blocks, a cylinder C is arranged on the horizontal surface of the Y-axis cross beam, the front end of the piston of the cylinder C is connected with the Z-axis cross beam, two clamping cylinders are arranged on the front end of the Y-axis cross beam, one vacuum chuck is arranged on each clamping jaw of the clamping cylinders, and a single crystal silicon rod edge skin is placed on the front end of the vacuum chuck.

[0018] The back surface of the following clamp is positioned and connected with the column B through the fine positioning pin A, four corner cylinders B are arranged on the inner sides of the two guide mechanisms, when the following clamp is connected with the column B, the four corner cylinders B on both sides of the following clamp are locked, a butt joint workbench B is arranged on the cutting machine base, and a coarse positioning pin B is arranged on the butt joint workbench B; the butt joint workbench B is positioned and connected with the following clamp through the positioning hole and the coarse positioning pin B, the butt joint workbench B is connected with the cutting machine base through the linear guide H, an L-shaped push plate is arranged below the linear guide H, a cylinder E is arranged on the middle of the rear part of the cutting machine base, and the front end of the piston rod of the cylinder E is connected with the L-shaped push plate. A cross beam is arranged on the top of the column B, a cylinder bracket is arranged on the cross beam, clamping rods and reinforcing plates are arranged on the two side surfaces of the front end of the cross beam; a cylinder D is arranged on the cylinder bracket, a floating joint is arranged below the piston rod of the cylinder D, and the clamping rods are connected with the bottom of the floating joint; when the following clamp is positioned and locked on the column B of the cutting machine, the piston rod of the cylinder D is extended to drive the floating joint and the clamping rods to extend forward and press the upper end surface of the clamped silicon rod, and then the cylinder D is locked to maintain the clamping force.

[0019] The cutting machine is also provided with an edge receiving box for collecting the edge skin after cutting the silicon rod. The front end of the water receiving tray A is provided with two iron blocks for connecting with the electromagnet at the front end of the support fork of the AGV (F4-1000C) trolley. The lower left corner of the right cutting head body and the lower right corner of the left cutting head body are respectively provided with a cutting wheel driving motor for driving the rotation of the cutting wheel and the movement of the annular diamond wire. The right cutting head body and the left cutting head body are respectively provided with a weight. The weight is used to adjust the tension of the annular diamond wire.

[0020] The cutting machine can also be a horizontal structure. The cutting machine has vertical and horizontal structures. When facing the machine tool, the silicon rod is perpendicular to the ground, and the cutting head is above. When facing the machine tool, the silicon rod is horizontal to the ground, and the cutting head is on the left or right side of the machine tool.

[0021] The grinding machine comprises a grinding machine base, a stand C arranged on the grinding machine base, two sides on one side of the stand C connected with grinding heads through guide mechanisms, two grinding heads, a servo motor H and a speed reducer arranged on each guide mechanism, a docking workbench C arranged on the grinding machine base, the docking workbench C connected with the grinding machine base through a linear guide rail L, an L-shaped push plate arranged below the linear guide rail L, a cylinder F installed at the middle of the rear part of the grinding machine base, the front end of the piston rod of the cylinder F connected with the L-shaped push plate, and the grinding machine base in a U-shaped structure with a recessed center provided with a water receiving tray B. The two sides of the water receiving tray B are connected with the grinding machine base through guide rails and sliding blocks and are movably connected.

[0022] Each guide mechanism comprises two linear guide rails J and a ball screw B. The two linear guide rails J are arranged on the two sides of one side of the stand C, the ball screw B is installed in the middle of the two linear guide rails J, the ball screw B is connected with a screw rod seat G arranged on the top of the stand C and a screw rod seat F arranged on the lower part of the stand C, the upper part of the screw rod seat G is connected with the speed reducer D and the servo motor H, a grinding head sliding plate is arranged on the linear guide rail J, two horizontal linear guide rails K and a horizontal ball screw C are arranged on the grinding head sliding plate, the ball screw C is arranged in the middle of the two horizontal linear guide rails K, one end of the ball screw C is connected with the screw rod seat G, the screw rod seat G is arranged on the grinding head sliding plate, the other end of the screw rod seat G is connected with the servo motor G, a grinding head is arranged on the linear guide rail K and connected with the nut of the ball screw C, and the other grinding head is arranged in the same structure. Each grinding head is provided with a measuring probe connected with a PLC system.

[0023] The power docking mechanism is connected with the column C through the precise positioning pin B in the middle of the back of the traveling clamp and the column C, and four corner oil cylinders C are arranged on the inner side of the two guide mechanisms, and when the traveling clamp is connected with the column C, the four corner oil cylinders C on both sides of the traveling clamp are locked, the docking workbench C is connected with the traveling clamp through the positioning hole and the coarse positioning pin, and the power docking mechanism is connected with the column C through the linear guide rail A and located at the middle position of the upper part of the column C.

[0024] When the traveling clamp is connected with the feeding / discharging machine, the precise positioning pin is arranged on the feeding / discharging machine, the back of the traveling clamp is connected with the column A through the precise positioning pin in the middle of the column A, when the traveling clamp is connected with the column A, the four corner oil cylinders A on both sides of the traveling clamp are locked, and the docking workbench A is connected with the traveling clamp through the positioning hole and the coarse positioning pin A.

[0025] The system is also provided with a PLC system, the finished product silicon rod conveying line, the blank rod conveying line, the small oil cylinder, the servo motor A, the cylinder A, the pneumatic clamp device, the cylinder B, the corner oil cylinder A, the servo motor B, the servo motor C, the servo motor D, the servo motor E, the cylinder C, the cylinder D, the cylinder E, the corner oil cylinder B, the cutting wheel driving motor, the clamping cylinder, the vacuum chuck, the servo motor F, the cylinder F, the corner oil cylinder C, the servo motor G and the servo motor H are connected with the PLC system, and are not limited to a specific model, and the working functions are realized.

[0026] The cutting machine is also provided with a shell, and the front of the shell is provided with a roller shutter door. The front of the shell of the cutting machine is provided with a roller shutter door, and the side is provided with a roller shutter window.

[0027] The accompanying fixture features a good clamping reference and low error rate, while reducing silicon material loss, improving grinding efficiency, simplifying the functions of other squaring and grinding machines, and lowering production costs. The accompanying fixture can automatically clamp crystal rods of various specifications with diameters of 200-310mm and lengths of 700-950mm. After the accompanying fixture is docked with the machine tool, the servo motor A drives the end gear plate to move and compress the pin to open the locking pin. The two gear plates dock and are tightened by a hydraulic cylinder. After processing, it returns to its initial position, the hydraulic pressure releases the tensioning mechanism, the servo motor A moves away from the accompanying fixture, the end pin of the accompanying fixture returns to its original position, and the radial locking pin locks in place. The locking component on the accompanying fixture, as shown in the figure, consists of two vertically intersecting spring pins. When the end pin is displaced, the radial locking pin is subjected to radial force from the conical surface of the end pin and moves away from the axis. Simultaneously, the end cone disengages from the rotating shaft, releasing the lock. Conversely, under the action of the spring force, the end face pin moves towards the end face, and the radial locking pin moves towards the axis under the action of the spring force and pushes into the tapered hole of the rotating shaft, thereby locking the axial rotation of the workpiece and maintaining its angular position. Precise positioning is achieved through the positioning locking pin, ensuring positioning accuracy and locking state.

[0028] The beneficial effects of this invention compared to the prior art are:

[0029] The system provided by this invention allows for simultaneous production by a squaring machine or a grinding machine in a production line, thereby accelerating work efficiency, reducing work errors and losses, and lowering maintenance costs.

[0030] This invention involves a loading / unloading robot that picks up a rough round silicon rod, uses vision on the robot to locate the center and crystal line positions of the silicon rod, and then clamps it onto a traveling fixture.

[0031] By using a mobile robot (AGV) to feed the accompanying fixture into a simplified squaring machine for squaring, and then sending the clamped silicon rod into a simplified grinding machine for grinding, the squaring and grinding processes of the silicon rod can be completed in a single clamping operation. This reduces the datum misalignment error caused by secondary clamping of the silicon rod, while also reducing the grinding allowance and silicon material loss during processing. The reduction in the functions of the squaring machine and the grinding machine significantly reduces equipment costs, while also greatly improving equipment reliability, reducing maintenance costs, increasing efficiency, and lowering process costs.

[0032] The system is equipped with multiple sets of accompanying fixtures that can be arbitrarily connected to multiple square cutting machines and multiple square grinding machines, and is completely interchangeable.

[0033] The present application can automatically clamp various specifications of crystal bars with a diameter of 200-310 mm and a length of 700-950 mm, can ensure the change of part specifications by adjusting the distance between the two cutting heads of the cutting machine, and can obtain the information of the crystal bar by scanning the two-dimensional code of the raw bar through the feeding / discharging robot, so that the feeding position and processing parameters are automatically adjusted through the PLC system to realize flexible manufacturing.

[0034] The AGV trolley carries the following clamp to realize accurate positioning of the following clamp and the cutting machine and the grinding machine: the positioning error (10 mm) of the AGV trolley generally cannot meet the docking requirements of the following clamp and the machine tool, so mechanical accurate positioning is required; the present technology adopts a forklift AGV trolley for transportation, four universal bearings are arranged on the double forks of the AGV trolley, eight supports are arranged around the two forks, a compression spring is arranged on one side of each support, the spring is in contact with the following bracket, the following bracket is held at the center of the two forks, two wedge-shaped positioning pins are arranged on the front end of the following bracket, which are used for docking and positioning with the cutting machine or the grinding machine, the following clamp is placed on the following bracket, and the two pins B on the front end of the following bracket are connected and fixed, when the two wedge-shaped positioning pins on the following bracket of the AGV trolley are in contact with the two wedge-shaped positioning blocks on the machine tool, the following bracket and the following clamp can be deflected due to the four universal bearings arranged between the lower part of the following bracket and the lifting fork, when the AGV trolley continues to move forward, the deviation caused by the error of the AGV trolley is continuously corrected, so that the horizontal center of the following clamp coincides with the center between the two wedge-shaped positioning blocks on the machine tool, after docking and positioning, the electric cylinder on the following bracket of the AGV trolley acts to pull out the locking pin pin B, the AGV trolley fork is lowered to make the following clamp fall into the coarse positioning pin of the docking workbench, the AGV trolley fork continues to descend to the original position, and the AGV trolley exits.

[0035] AGV trolley and machine tool water pan follow-up: the present application is to connect the water pan of the cutting machine and the grinding machine with the AGV trolley, when the machine calls for material, the AGV trolley runs to the front of the machine, the lower front end of the AGV trolley pushes the water pan to move to the rear of the machine synchronously with the AGV trolley, the AGV takes the material (the following clamp) and then exits, and pulls the water pan to move forward, when the water pan moves to the end, the water pan is separated from the AGV, and the AGV trolley leaves to perform the next process. BRIEF DESCRIPTION OF DRAWINGS

[0036] The present application will be further described below in combination with the drawings and embodiments:

[0037] Figure 1 is a schematic diagram of a silicon rod cutting / grinding flexible manufacturing system based on a following clamp.

[0038] Figure 2 is a schematic diagram of a power docking mechanism.

[0039] Figure 3 is a power docking mechanism cross-sectional view.

[0040] Figure 4 is a follow-up clamp structure schematic diagram.

[0041] Figure 5 is a follow-up clamp cross-sectional view.

[0042] Figure 6 is a power docking mechanism and follow-up clamp docking schematic diagram.

[0043] Figure 7 is a feeding / discharging machine and follow-up clamp connection schematic diagram.

[0044] Figure 8 is a square cutting machine perspective view.

[0045] Figure 9 is a square cutting machine cross-sectional view.

[0046] Figure 10 is a cutting head left-right movement schematic diagram in the square cutting machine.

[0047] Figure 11 is a square grinding machine perspective view.

[0048] Figure 12 is a square grinding machine cross-sectional view.

[0049] Figure 13 is an AGV trolley carrying follow-up clamp structure schematic diagram.

[0050] Fig. 1. Power docking mechanism, 2. Follow-up clamp, 3. Up / down feeder, 4. Square cutting machine, 5. Square grinding machine, 6. AGV trolley, 7. Finished silicon rod conveying line, 8. Blank rod conveying line, 9. Up / down feeder robot, 101. Power docking gear disc B, 102. Unlocking pin, 103. Power docking support, 104. Linear guide rail A, 105. Small oil cylinder, 106. Servo motor A, 107. Bearing seat B, 108. Bearing B, 109. Pressure cover, 110. Locking nut B, 111. Coupling B, 201. Follow-up clamp seat body, 202. Linear guide rail B, 203. T-shaped screw, 204. Floating movable chuck seat, 205. Floating movable chuck, 206. Follow-up clamp clamping rod, 207. Connecting plate, 208. Cylinder A, 209. Single crystal silicon rod, 210. Floating fixed chuck, 211. Power docking gear disc A, 212. Fixed chuck seat, 213. Clamping docking shaft, 214. Pneumatic clamp device, 215. Bearing A, 216. Bearing seat A, 217. Locking nut A, 218. Coupling A, 219. Screw seat A, 220. Positioning hole, 221. Screw seat B, 222. Pin shaft, 223. Spring A, 224. Locking pin, 225. Spring B; 301. Linear guide rail C, 302. Rough positioning pin A, 303. Up / down feeder base, 304. Cylinder B, 305. Angle oil cylinder A, 306. Column A, 307. Linear guide rail D, 308. Bearing box, 309. Reducer A, 310. Servo motor B, 311. Reducer B, 312. Servo motor C, 313. Screw seat C, 314. Slide plate, 315. Power docking shaft, 316. Limit block A, 317. Wedge-shaped positioning block A, 318. Docking workbench A, 401. Iron block, 402. Wedge-shaped positioning block B, 403. Square cutting machine base, 404. Linear guide rail E, 405. Column B, 406. Edge skin support, 407. Floating joint, 408. Right cutting head body, 409. Screw seat D, 410. Reducer C, 411. Servo motor D, 412. Left cutting head body, 413. Ring diamond wire, 414. Cutting wheel, 415. Weight, 416. Servo motor E, 417. Z-axis cross beam, 418. Linear guide rail F, 419. Cylinder C, 420. Edge skin box, 421. X-axis cross beam, 422. Cylinder D, 423. Clamping rod, 424. Reinforcing plate, 425. Water pan A, 426. Angle oil cylinder B, 427. Cutting wheel driving motor, 428. Rack, 429. Linear guide rail G, 430. Single crystal silicon rod edge skin, 431. Y-axis cross beam, 432. Clamping cylinder, 433. Vacuum chuck, 434. Linear guide rail H, 435. Rough positioning pin B, 436. Docking workbench B, 437. Cylinder E, 438. Fine positioning pin A, 439. Cylinder support, 440. Cross slide, 441. Linear guide rail I, 442. Ball screw A, 443. Screw seat E, 444. Servo motor F, 445. Cross beam, 501.502. Dating worktable C, 503. Cylinder F, 504. Angle cylinder C, 505. Leadscrew seat F, 506. Ball screw B, 507. Column C, 508. Linear guide J, 509. Linear guide K, 510. Servo motor G, 511. Leadscrew seat G, 512. Grinding head slide plate, 513. Ball screw C, 514. Leadscrew seat H, 515. Servo motor H, 516. Reducer D, 517. Grinding head, 518. Limit block B, 519. 8. Linear guide rail L; 519. Pin A; 520. Water receiving tray B; 521. Precision positioning pin B; 522. Wedge positioning block C; 523. Grinding machine base; 524. Grinding wheel; 601. Limit seat; 602. Bracket A; 603. Compression spring; 604. Universal bearing; 605. Bracket B; 606. Traveling bracket; 607. Electric cylinder; 608. Pin B; 609. Precision positioning pin sleeve; 610. Wedge positioning pin; 611. Electromagnet. Detailed Implementation

[0051] The present invention will now be described in detail through specific embodiments, but this does not limit the scope of protection of the present invention.

[0052] Example 1

[0053] A flexible manufacturing system for silicon rod squaring / grinding based on a traveling fixture, such as Figures 1-13 As shown, the system includes a following fixture 2, a loading / unloading machine 3, a squaring machine 4, a grinding machine 5, an AGV trolley 6, a finished silicon rod conveyor line 7, a blank rod conveyor line 8, and a loading / unloading robot 9. The loading / unloading machine 3, squaring machine 4, and grinding machine 5 are positioned on opposite sides of the system. The finished silicon rod conveyor line 7 and the blank rod conveyor line 8 are placed on opposite sides of one end of the system. The loading / unloading machine 3 is positioned at the adjacent end of the finished silicon rod conveyor line 7 and the blank rod conveyor line 8, and is used for moving and comparing workpieces. 9 is set between the finished silicon rod conveyor line 8, the blank rod conveyor line 9, and the loading / unloading machine 3; the AGV trolley 6 is used to move the accompanying fixture 2 between the loading / unloading machine 3, the squaring machine 4, and the grinding machine 5, and the AGV trolley 6 is movably docked with the loading / unloading machine 3, the squaring machine 4, and the grinding machine 5; the accompanying fixture 2 is connected to the loading / unloading machine 3, the squaring machine 4, and the grinding machine 5 and is detachably connected; the squaring machine 4 and the grinding machine 5 are respectively equipped with a power docking mechanism 1 for connecting with the accompanying fixture 2 and for workpiece rotation.

[0054] The accompanying clamp 2, loading / unloading machine 3, square cutting machine 4, square grinding machine 5, and AGV trolley 6 can be configured in several quantities according to working conditions.

[0055] The accompanying clamp 2 is moved by the AGV trolley 6. The AGV trolley 6 is not limited to a specific model, as long as it performs its working function, and the preferred model is AGV (F4-1000C).

[0056] The AGV 6 is provided with a traveling bracket 606, which is installed on the forks of the AGV 6, four universal bearings 604 are arranged at the bottom of the traveling bracket 606 and in contact with the forks, and each universal bearing 604 is arranged in a limiting seat 601. Two supports are arranged on each side of the bottom of the traveling bracket 606, and a compression spring 603 is arranged on each support to play a floating role in a small range. An electric cylinder 607 is arranged on each side of the upper part of the traveling bracket 606. A latch B 608 is arranged on each electric cylinder 607 to prevent the traveling clamp 2 from falling during transportation. Two wedge-shaped positioning pins are arranged at the bottom of the contact surface between the traveling bracket 606 and other square cutting machines 4, square grinding machines 5, and loading / unloading machines 3. The two wedge-shaped positioning pins are used for butt joint positioning with two wedge-shaped positioning blocks on the square cutting machine 4, the square grinding machine 5, and the loading / unloading machine 6. A coarse positioning pin is arranged on the contact surface between the traveling bracket 606 and the traveling clamp 2 to play a limiting role.

[0057] The loading / unloading robot is a robot vision loading / unloading device, and the structure is disclosed in the patent CN216613042U applied by the applicant.

[0058] The traveling clamp 2 includes a traveling clamp body 201, a fixed clamp head seat 212, and a movable clamp head seat 204. The fixed clamp head seat 212 is arranged at one end of the traveling clamp body 201, and a floating fixed clamp head 210 is inserted at the bottom of the front end of the fixed clamp head seat 212. The floating fixed clamp head 210 is connected with a power butt joint tooth disc A 211 at the upper end. A linear guide rail B 202 and a T-shaped screw 203 are arranged on the traveling clamp body 201. The movable clamp head seat 204 is movably connected with the traveling clamp body 201 through the linear guide rail B 202, the T-shaped screw 203, and a sliding block. A floating movable clamp head 205 is installed on the top of the movable clamp head seat 204. A rotary clamping cylinder A 208 is arranged on the side of the top of the movable clamp head seat 204. The piston rod of the cylinder A 208 is connected with a connecting plate 207. A bearing seat A 216 is installed at one end of the traveling clamp body 201, and a bearing A 215 is arranged in the bearing seat A 216. A clamping butt joint shaft 213 is arranged on the bearing A 215. The clamping butt joint shaft 213 is connected with the T-shaped screw 203 through a shaft coupling A 218. A pneumatic clamp 214 is arranged adjacent to the bearing A 215.

[0059] The fixed chuck seat 212 is fixedly connected with one side of the upper part of the follow-up clamp seat body 201. The power docking tooth disc A 211 is connected with the floating fixed chuck 210 to form a power connecting piece, and the power connecting piece penetrates through the front end of the fixed chuck seat 212. The two ends of the T-shaped lead screw 203 are respectively installed on the lead screw seat A 219 and the lead screw seat B 221, and the lead screw seat A 219 and the lead screw seat B 221 are installed on the follow-up clamp seat body 201. The clamping docking shaft 213 is connected with the follow-up clamp seat body 201 through the bearing seat A 216, and the clamping docking shaft 213 is arranged on one side of the fixed chuck seat 212. The clamping docking shaft 213 is provided with a locking nut A 217 for locking the bearing A 215. The bearing A 215 is provided with a pneumatic clamp device 214 adjacent to the bearing A 215 for locking the T-shaped lead screw 203. The top of the movable chuck seat 204 is provided with the floating movable chuck 205. Through the rotation of the T-shaped lead screw 203, the movable chuck seat 204 moves and clamps the single crystal silicon rod 209. The rotary clamping cylinder A 208 is used for clamping the edge skin of the single crystal silicon rod 209 during processing. The connecting plate 207 is arranged at the bottom of the movable chuck seat 204. The connecting plate 207 is provided with two follow-up clamp clamping rods 206. The follow-up clamp seat body 201 is further provided with a positioning plate, and the positioning plate is provided with a plurality of pin holes. The positioning plate is arranged below the movable chuck seat 204.

[0060] Further, the side surface of the follow-up clamp seat body 201 is provided with a positioning hole 220, and the positioning hole 220 is not limited in number, and only one is drawn in the figure for explanation, which is used for connecting with the precise positioning pin on the square grinding machine 5, the square cutting machine 4 and the feeding and discharging machine 3. The follow-up clamp 2 can automatically clamp various specifications of crystal rods with a diameter of 200-310 mm and a length of 700-950 mm.

[0061] The power docking mechanism 1 comprises a power docking support 103, a power docking gear disc B 101, the bottom of the power docking support 103 is provided with a linear guide rail A 104, the power docking mechanism 1 is connected with the column through the linear guide rail A 104 and the sliding block, a small oil cylinder 105 (CXR-LA40X80) is arranged on the power docking support 103; a bearing seat B 107 is arranged at the front end of the power docking support 103, a bearing B 108 is arranged in the bearing seat B 107, the power docking gear disc B 101 is installed on the bearing seat B 107 through the bearing B 108, the power docking gear disc B 101 is connected with a servo motor A 106 through a shaft coupling B 111, the servo motor A 106 is installed on the power docking support 103; a gland 109 is installed at one end of the bearing seat B 107, and the gland 109 is in contact with the outer ring of the bearing B 108; a locking nut B 110 is arranged on the power docking gear disc B 101, and the locking nut B 110 is in contact with the inner ring of the bearing B 108. An unlocking pin 102 is further arranged on the power docking support 103, a positioning pin hole can be arranged on the adjacent surface of the power docking support 103 and the following fixture 2, and the unlocking pin 102 is movably connected with the positioning pin hole. An unlocking pin 102 is arranged adjacent to the power docking gear disc B 101, and a pin shaft 222 is further arranged on the following fixture 2; the pin shaft 222 is arranged directly below the unlocking pin 102, a spring A 223 is arranged on the outer periphery of the lower part of the pin shaft 222, a locking pin 224 is arranged below the pin shaft 222, one end of the outer periphery of the locking pin 224 is connected with part of the spring B 225, and the other end is connected with the floating fixed chuck 210 in the following fixture 2. The locking pin 224 and the pin shaft 222 are perpendicular to each other, the locking pin 224 is horizontally arranged, the middle part of the locking pin 224 is concave, and is movably connected with the bottom of the pin shaft 222; and the locking pin 224 moves to compress the spring B 225. After the following fixture 2 is installed on the column of the machine tool, the small oil cylinder 105 of the power docking mechanism 1 acts, the front end power docking gear disc B 101 on the power docking mechanism 1 is engaged with the end surface gear power docking gear disc A 211 on the following fixture 2, the unlocking pin 102 pushes the pin shaft 222 to move downward to compress the spring A 223, the locking pin 224 moves to the left to compress the spring B 225, the floating fixed chuck 210 is released from the limiting, and the connection between the power docking mechanism 1 and the following fixture 2 can realize the rotation of the chucking head.

[0062] The upper / lower feeding machine 3 comprises an upper / lower feeding machine base 303; the upper / lower feeding machine base 303 is provided with a stand column A 306, one side of the stand column A 306 is a concave structure, a butt joint mechanism is arranged at the upper end of the concave surface of the stand column A 306, and corner oil cylinders A 305 are arranged on the inner sides of the two sides of the concave surface of the stand column A 306; the butt joint mechanism comprises two straight linear guides D 307 and a sliding plate 314, the two straight linear guides D 307 are arranged on the stand column A 306, a clamping screw is arranged in the middle of the two straight linear guides D 307, the sliding plate 314 is connected with the straight linear guides D 307 through a sliding block and the clamping screw; a screw rod seat C 313 arranged at the top of the clamping screw is connected with a speed reducer B 311 and a servo motor C 312, a bearing box 308 is arranged on the sliding plate 314, a power butt joint shaft 315 is arranged in the bearing box 308, the top of the power butt joint shaft 315 is connected with a servo motor B 310 through a speed reducer A 309, and the bottom of the power butt joint shaft 315 is provided with a butt joint toothed disc; the upper / lower feeding machine base 303 is provided with a butt joint workbench A 318, the butt joint workbench A 318 is provided with a rough positioning pin A 302, the butt joint workbench A 318 is connected with the upper / lower feeding machine base 303 through a straight linear guide C 301, an L-shaped push plate is arranged below the straight linear guide C 301, a gas cylinder B 304 is installed at the middle of the rear part of the upper / lower feeding machine base 303, and the front end of the piston rod of the gas cylinder B 304 is connected with the L-shaped push plate; the upper / lower feeding machine base 303 has a U-shaped structure. The corner oil cylinders A 305 are arranged in pairs and symmetrically. The front end of the straight linear guide C 301 is provided with a limiting block A 316 to prevent the AGV trolley 6 from suddenly losing control and colliding with the machine tool. The clamping screw is a trapezoidal self-locking screw. The upper / lower feeding machine base 303 is provided with two wedge-shaped positioning blocks A 317 at the two ends of the concave surface, which are used for active connection with the AGV trolley 6 of the transport follow-up clamp 2.

[0063] The cutting machine 4 comprises a cutting machine base 403, a column B 405, a left cutting head body 412, a right cutting head body 408, and a power docking mechanism 1; the column B 405 is arranged on the cutting machine base 403, and the left cutting head body 412 and the right cutting head body 408 are respectively connected with the column B 405 through a guide mechanism; a reducer C 410 and a servo motor D 411 are connected at the top of each guide mechanism; each of the left cutting head body 412 and the right cutting head body 408 is provided with a cutting member, and each is provided with a cutting wheel driving motor 427; an edge skin taking support 406 is arranged on the upper half of the column B 405, and the following clamp 2 is arranged on the upper part of the cutting machine base 403 when the following clamp 2 is connected with the cutting machine 4, and the connection is detachable; the power docking mechanism 1 is connected with the column B 405 through a linear guide rail A 104 and is located at the middle position of the upper part of the column B 405; the cutting machine base 403 is in a U-shaped structure, and a water receiving disc A 425 is arranged in the center of the cutting machine base 403. The left cutting head body 412 and the right cutting head body 408 are arranged vertically with the plane of the column B 405. The two sides of the water receiving disc A 425 are connected with the cutting machine base 403 through a guide rail and a sliding block and are movably connected. Two wedge-shaped positioning blocks B 402 are arranged at the two ends of the concave surface of the cutting machine base 403, and are movably connected with the AGV trolley 6 for transporting the following clamp 2.

[0064] Each guide mechanism comprises two linear guide rails E 404 and a ball screw; the two linear guide rails E 404 are arranged on the two sides of one side of the column B 405, a ball screw is arranged in the middle of the two linear guide rails E 404, the ball screw is connected with a screw seat D 409 arranged on the top of the column B 405, and the upper part of the ball screw is connected with the reducer C 410 and the servo motor D 411. The cutting head has a left-right moving function, and each guide mechanism further comprises a cross slide 440; the cross slide 440 is arranged on the linear guide rail E 404, a linear guide rail I 441 and a ball screw A 442 are arranged on the cross slide 440, one end of the ball screw A 442 is connected with a screw seat E 443 arranged on the cross slide 440, the other end of the screw seat E 443 is connected with a servo motor F 444, the right cutting head body 408 is arranged on the linear guide rail I 441 and is connected with the nut of the ball screw A 442, and the connection structure of the left cutting head 412 is the same as that of the right cutting head body 408. The cutting member is four cutting wheels 414 arranged in a rectangular shape, and the cutting wheels 414 are wound with annular diamond wires 413.

[0065] The edge taking support 406 comprises an X-axis crossbeam 421, a Y-axis crossbeam 431 and a Z-axis crossbeam 417; the edge taking support 406 is connected with both sides of the column B 405; an X-axis crossbeam 421 is arranged on the front end of the edge taking support 406, linear guides G 429 are respectively arranged on the upper part and the lower part of the front of the X-axis crossbeam 421, a rack 428 is arranged on the middle region of the front of the X-axis crossbeam 421, the Z-axis crossbeam 417 is connected with the X-axis crossbeam 421 through the linear guides G 429 and the sliding blocks, a servo motor E 416 is arranged on the adjacent position of the Z-axis crossbeam 417, a gear wheel is arranged on the front end of the servo motor E 416 and engaged with the rack 428; the Z-axis crossbeam 417 is connected with the Y-axis crossbeam 431 through the linear guides F 418 and the sliding blocks, a cylinder C 419 is arranged on the horizontal plane of the Y-axis crossbeam 431, the front end of the piston of the cylinder C 419 is connected with the Z-axis crossbeam 417, two clamping cylinders 432 are arranged on the front end of the Y-axis crossbeam 431, a vacuum chuck 433 is arranged on each of the two clamping jaws of the clamping cylinder 432, and a single crystal silicon rod edge skin 430 is placed on the front end of the vacuum chuck 433.

[0066] The back of the following clamp 2 is positioned and connected with the column B 405 through a fine positioning pin A 438 at the middle of the column B 405, four corner cylinders B 426 are arranged on the inner sides of the two guide mechanisms, when the following clamp 2 is connected with the column B 405, the four corner cylinders B 426 on both sides of the following clamp 2 are locked, a butt joint workbench B 436 is arranged on the cutting square machine base 403, and a coarse positioning pin B 435 is arranged on the butt joint workbench B 436; the butt joint workbench B 436 is positioned and connected with the following clamp 2 through the positioning hole 220 and the coarse positioning pin B 435, the butt joint workbench B 436 is connected with the cutting square machine base 403 through the linear guides H 434, an L-shaped push plate is arranged below the linear guides H 434, a cylinder E 437 is arranged at the middle of the rear of the cutting square machine base 403, and the front end of the piston rod of the cylinder E 437 is connected with the L-shaped push plate. A crossbeam 445 is arranged on the top of the column B 405, a cylinder support 439 is arranged on the crossbeam 445, clamping rods 423 and reinforcing plates 424 are arranged on the two sides of the front end of the crossbeam 445; a cylinder D 422 is arranged on the cylinder support 439, a floating joint 407 is arranged below the piston rod of the cylinder D 422, and the floating joint 407 is connected with the clamping rod 423 at the bottom; when the following clamp 2 is positioned and locked on the column B 405 of the cutting square machine 4, the piston rod of the cylinder D 422 is extended to drive the floating joint 407 and the clamping rod 423 to extend forward and press the upper end surface of the clamped silicon rod of the following clamp 2, and then the cylinder D 422 is locked to maintain the clamping force.

[0067] The cutting machine 4 is also provided with an edge receiving box 420 for collecting the edge skin after cutting the silicon rod. The front end of the water receiving tray A 425 is provided with two iron blocks 401 for connecting with the electromagnet 611 at the front end of the support fork of the AGV (F4-1000C) trolley 6. The lower left corner of the right cutting head body 408 and the lower right corner of the left cutting head body 412 are respectively provided with a cutting wheel driving motor 427 for driving the rotation of the cutting wheel and moving the annular diamond wire 413. The right cutting head body 408 and the left cutting head body 412 are respectively provided with a weight 415. The weight 415 is used to adjust the tension of the annular diamond wire 413.

[0068] The grinding machine 5 includes a grinding machine base 523, a stand C 506 is arranged on the grinding machine base 523, two sides on one side of the stand C 506 are respectively connected with grinding heads 516 through guide mechanisms, the grinding heads 516 are provided with two, each guide mechanism is also provided with a servo motor H 514 and a speed reducer; the grinding machine base 523 is provided with a docking workbench C 501, the docking workbench C 501 is connected with the grinding machine base 523 through a linear guide rail L 518, an L-shaped push plate is arranged below the linear guide rail L 518, a cylinder F 502 is installed at the middle of the rear part of the grinding machine base 523, the front end of the piston rod of the cylinder F 502 is connected with the L-shaped push plate; the grinding machine base 523 is of a U-shaped structure, and a center recess is provided with a water receiving tray B 520. The two sides of the water receiving tray B 520 are connected with the grinding machine base 523 through guide rails and sliding blocks and are movably connected. The front end of the water receiving tray B 520 is provided with two iron blocks; for connecting with the electromagnet 611 at the front end of the support fork of the AGV (F4-1000C) trolley 6.

[0069] Each guide mechanism includes two linear guide rails J 507 and a ball screw B 505; the two linear guide rails J 507 are arranged on the two sides of one side of the stand C 506, the ball screw B 505 is installed in the middle of the two linear guide rails J 507, the ball screw B 505 is connected with a screw rod seat G 510 arranged on the top of the stand C 506 and a screw rod seat F 504 arranged on the lower part of the stand C 506, the upper part of the screw rod seat G 510 is connected with the speed reducer D 515 and the servo motor H 514; a grinding head sliding plate 511 is arranged on the linear guide rail J 507, the grinding head sliding plate 511 is provided with two horizontal linear guide rails K 508 and a horizontal ball screw C 512, the ball screw C 512 is arranged in the middle of the two horizontal linear guide rails K 508, one end of the ball screw C 512 is connected with the screw rod seat G 510, the screw rod seat G 510 is arranged on the grinding head sliding plate 511, the other end of the screw rod seat G 510 is connected with the servo motor G 509, a grinding head 516 is arranged on the linear guide rail K 508 and is connected with the nut of the ball screw C 512, and another grinding head 516 is arranged in the same structure. Each grinding head 516 is provided with a measuring probe and is connected with a PLC system.

[0070] The power docking mechanism 1 is connected with the column C 506 through the fine positioning pin B521 in the middle of the back of the follow-up clamp 2, and four corner oil cylinders C 503 are arranged on the inner side of the two guide mechanisms. When the follow-up clamp 2 is connected with the column C 506, the four corner oil cylinders C 503 on both sides of the follow-up clamp 2 are locked. The docking workbench C 501 is provided with a coarse positioning pin, and is connected with the follow-up clamp 2 through the positioning hole 220 and the coarse positioning pin. The power docking mechanism 1 is connected with the column C 506 through the linear guide rail A 104, and is located at the middle position of the upper part of the column C 506. The front end of the linear guide rail L518 is provided with a limiting block B 517. The front end of each grinding head 516 is also provided with a grinding wheel 524. The water pan B 520 is provided with a plurality of plugs A 519 at the front end, which are used for active connection with the AGV trolley 6 for transporting the follow-up clamp 2. The concave surface of the grinding square machine base 523 is provided with two wedge-shaped positioning blocks C 522 at both ends, which are used for active connection with the AGV trolley 6 for transporting the follow-up clamp 2.

[0071] When the follow-up clamp 2 is connected with the feeding and discharging machine 3, the fine positioning pin is arranged on the feeding and discharging machine 3, and the back of the follow-up clamp 2 is positioned and connected with the column A 306 through the fine positioning pin in the middle. When the follow-up clamp 2 is connected with the column A 306, the four corner oil cylinders A 305 on both sides of the follow-up clamp 2 are locked. The docking workbench A 318 is connected with the follow-up clamp 2 through the positioning hole 220 and the coarse positioning pin A 302. The docking mechanism adopts end face tooth disc docking technology, that is, one end face tooth disc is connected with the follow-up clamp 2, and the other end face tooth disc is connected with one end of the docking mechanism. After docking, the power is transmitted through the end teeth.

[0072] The system is also provided with a PLC system. The finished silicon rod conveying line 7, the blank rod conveying line 8, the small oil cylinder 105, the servo motor A 106, the air cylinder A 208, the pneumatic clamp device 214, the air cylinder B 304, the corner oil cylinder A 305, the servo motor B 310, the servo motor C 312, the servo motor D 411, the servo motor E 416, the air cylinder C 419, the air cylinder D 422, the air cylinder E 437, the corner oil cylinder B 426, the cutting wheel driving motor 427, the clamping air cylinder 432, the vacuum chuck 433, the servo motor F 444, the air cylinder F 502, the corner oil cylinder C 503, the servo motor G 509, and the servo motor H 514 are connected with the PLC system. They are not limited to a specific model, and their working functions can be realized.

[0073] The cutting square machine 4 is also provided with a shell, and the front of the shell is provided with a roller shutter door. The side is provided with a roller shutter window. The grinding square machine 5 is also provided with a shell, and the front of the shell is provided with a roller shutter door. The side is provided with a roller shutter window.

[0074] When the system works: the blank rod conveying line 8 picks up the round crystal rod, finds the crystal line and the center, the AGV car 6 moves the empty follow-up clamp to the loading and unloading machine 3, the loading and unloading robot 9 moves to the loading and unloading machine 3 and then places the crystal rod on the follow-up clamp 2, the AGV car 6 moves to the loading and unloading machine 3 and is connected with the follow-up clamp 2 and is taken off, then the AGV car 6 takes the follow-up clamp 2 to the vertical square cutting machine 4 and is connected with it, then the AGV car 6 exits the square cutting machine 4, transports other follow-up clamps 2, after the round crystal rod is processed into a square rod, the nearby empty AGV car 6 moves to the vertical square cutting machine 4 again and is connected with it, then the follow-up clamp 2 is taken off, is sent to the vertical square grinding machine 5 and is connected with it, then the AGV car 6 exits and transports other follow-up clamps 2, after the square grinding is completed, the nearby empty AGV car 6 moves to the vertical square grinding machine 5 again and is connected with it to take off the follow-up clamp 2, is sent to the loading and unloading machine 3 and is connected with it, the AGV car 6 exits, the loading and unloading robot 9 takes off the square crystal rod after grinding from the follow-up clamp 2 and places it on the finished product silicon rod conveying line 7 and sends it away, then the loading and unloading robot 9 picks up the round crystal rod from the blank rod conveying line 8 again, finds the crystal line and the center, and repeats the above actions. The AGV car 6 is provided with an MES system and is not limited to a specific model. The loading and unloading robot 9 is provided with an MES system and is not limited to a specific model. The whole system control receives signals through the MES system and the PLC system and gives instructions to realize.

[0075] When the traveling clamp 2 is applied to the loading / unloading machine 3, the working process is as follows: first, the AGV (F4-1000C) vehicle 6 carries the empty traveling clamp 2 to the center of the loading / unloading machine 3, then the AGV vehicle 6 forks and the traveling clamp 2 are raised to a certain height, exceeding the height of the coarse positioning pin A 302 on the docking workbench A 318 of the loading / unloading machine 3, then the AGV vehicle 6 continues to advance for a distance, when the wedge-shaped positioning pin on the traveling bracket 606 of the AGV vehicle 6 contacts the two wedge-shaped positioning blocks A 317 on the loading / unloading machine 3, due to the universal bearing 604 of the traveling bracket 606, the traveling bracket 606 and the traveling clamp 2 can be deflected, when the AGV vehicle 6 continues to advance, due to the limitation of the wedge-shaped positioning block A 317, the traveling bracket 606 and the traveling clamp 2 are deflected, ensuring that the horizontal center of the traveling clamp 2 coincides with the center between the two wedge-shaped positioning blocks on the loading / unloading machine 3, after docking and positioning, the electric cylinder 607 on the traveling bracket 606 of the AGV vehicle 6 operates, pulling out the locking pin plug B 608, so that the coarse positioning pin A 302 on the docking workbench A 318 of the loading / unloading machine 3 corresponds to the pin hole at the bottom of the traveling clamp 2, then the fork of the AGV vehicle 6 and the traveling bracket 606 are lowered back to the original position, and then the AGV vehicle 6 exits the loading / unloading machine 3; at the same time, the traveling clamp 2 and the docking workbench A 318 are positioned and docked by the two coarse positioning pins A 302, the fine positioning hole 220 on the back of the traveling clamp 2 is positioned with the fine positioning pin on the column A 306 of the loading / unloading machine 3, so that the back of the traveling clamp 2 is tightly attached to the front of the column A 306 of the loading / unloading machine 3; then the loading / unloading machine 3 drives the docking gear on the upper part of the loading / unloading machine 3 to dock with the power docking gear A211 on the upper part of the traveling clamp 2 through the servo motor of the loading / unloading machine 3, and simultaneously opens the pneumatic clamp 214. The loading / unloading robot 9 grabs the silicon rod, finds the crystal line and center line position of the silicon rod, and then sends it to the middle position between the two chucks of the traveling clamp 2 in the loading / unloading machine 3, the servo motor of the loading / unloading machine 3 operates to drive the docking gear and the power docking gear A211 to rotate, at the same time, the T-shaped lead screw 203 rotates to further drive the movable chuck seat 204 and the floating movable chuck 205 thereon to move upwards, when the end face of the floating movable chuck 205 contacts the lower end face of the single crystal silicon rod 209, the gripper of the loading / unloading robot 9 moves upwards together with the movable chuck seat 204, when the end face of the floating fixed chuck 210 on the fixed chuck seat 212 contacts the upper end face of the single crystal silicon rod 209, the gripper of the loading / unloading robot 9 stops following, the servo motor in the loading / unloading machine 3 continues to rotate until it reaches the set torque, then stops rotating, at the same time, the air inlet of the pneumatic clamp 214 is cut off, the T-shaped lead screw 203 is locked, and the clamping state of the single crystal silicon rod 209 is maintained; the gripper of the loading / unloading robot 9 is released and returns to the original position.The docking workbench A 318 and the accompanying fixture 2 move to the front end, the accompanying fixture 2 is separated from the column A 306 of the feeding and discharging machine 3, the empty AGV trolley 6 takes the accompanying bracket 606 into the middle position of the feeding and discharging machine 3, is lifted to make the lower bottom surface of the accompanying fixture 2 separate from the docking work platform A 318, the lifting height exceeds the rough positioning pin A 302, and then the AGV trolley 6 takes the accompanying fixture 2 out of the workbench, and the forks of the AGV trolley 6 are lowered back to the original position and exit the feeding and discharging machine 3.

[0076] When the traveling clamp 2 is applied to the cutting machine 4 / grounding machine 5 in cooperation with the power docking mechanism 1, the AGV 6 carries the traveling clamp 2 to the cutting machine 4 / grounding machine 5, the forks of the AGV 6 and the traveling clamp 2 are lifted to a certain height, which exceeds the height of the rough positioning pin on the docking workbench of the cutting machine 4 / grounding machine 5, then the AGV 6 moves with the traveling clamp 2 and the water pan of the cutting machine 4 / grounding machine 5 to the inside of the cutting machine 4 / grounding machine 5, when the two wedge-shaped positioning pins on the traveling bracket 606 of the AGV 6 contact the two wedge-shaped positioning blocks on the cutting machine 4 / grounding machine 5, the traveling bracket 606 and the traveling clamp 2 can be deflected due to the four universal bearings 604 between the lower part of the traveling bracket 606 and the lifting forks, when the AGV 6 continues to advance, the traveling bracket 606 and the traveling clamp 2 are deflected due to the limitation of the wedge-shaped positioning blocks, which ensures that the horizontal center of the traveling clamp 2 coincides with the center between the two wedge-shaped positioning blocks on the cutting machine 4 / grounding machine 5, after docking and positioning, the electric cylinder 607 on the traveling bracket 606 of the AGV 6 acts to pull out the locking pin plug B 608, so that the rough positioning pin on the docking workbench of the cutting machine 4 / grounding machine 5 corresponds to the positioning pin hole at the bottom of the traveling clamp 2, then the forks of the AGV 6 and the traveling bracket 606 are lowered back to the original position, then the cutting machine 4 / grounding machine 5 is withdrawn, and the water pan is withdrawn to the original position; at the same time, the traveling clamp 2 is positioned and docked with the two rough positioning pins on the docking workbench of the cutting machine 4 / grounding machine 5, the fine positioning hole on the back of the traveling clamp 2 is positioned with the fine positioning pin in front of the column of the cutting machine 4 / grounding machine 5, the back of the traveling clamp 2 closely fits the front of the column of the cutting machine 4 / grounding machine 5, the servo motor A 106 drives the power docking gear plate A 211 to relatively dock with the power docking gear plate B 101, so that the power docking support 103 and the traveling clamp 2 form an integral whole; after the cutting or grounding process is completed, the servo motor A 106 on the power docking support 103 is connected to the PLC system instruction to rotate 90°, then the cylinder A 208 of the traveling clamp 2 acts to re-clamp the silicon rod; then the process of the first cutting or grounding is repeated, after the cutting or grounding is completed, the servo motor A 106 on the power docking support 103 is connected to the instruction to reversely rotate 90° to return to the original position, the power docking gear plate A 211 is separated from the power docking gear plate B 101, so that the power docking support 103 and the traveling clamp 2 form a separation;The movable workbench and the accompanying fixture 2 move to the front end, the accompanying fixture 2 is separated from the column of the square cutting machine 4 / square grinding machine 5, the empty AGV trolley 6 carries the accompanying bracket 606 into the middle position of the square cutting machine 4 / square grinding machine 5, the supporting position of the accompanying bracket 606 is just below the lower surface of the accompanying fixture 2, the fork and the accompanying bracket 606 above are lifted, the lower surface of the accompanying fixture 2 is separated from the butt joint workbench of the square cutting machine 4 / square grinding machine 5, the lifting height exceeds the coarse positioning pin, then the AGV trolley 3 carries the accompanying fixture 2 out of the butt joint workbench, the fork of the AGV trolley 3 and the accompanying fixture are lowered back to the original position, and the AGV trolley 3 exits the square cutting machine 4 / square grinding machine 5.

[0077] After the accompanying fixture 2 is installed on the machine tool column, the small oil cylinder 105 of the power butt joint mechanism 1 acts, the front end power butt joint disc B 101 on the power butt joint mechanism 1 meshes with the end surface tooth power butt joint disc A 211 on the accompanying fixture 2, at the same time, the unlocking pin 102 pushes the pin shaft 222 to move downward, compresses the spring A 223, and then drives the locking pin 224 to move left to compress the spring B 225, releases the limit of the floating fixed chuck 210, at this time, the connection of the power butt joint mechanism 1 and the accompanying fixture 2 can realize the rotation of the chuck. After the square cutting machine 4 completes the processing of two edge skins or the square grinding machine 5 completes the grinding processing of two planes of the square bar, the servo motor A 106 on the power butt joint mechanism 1 receives the instruction to rotate 90°, the power butt joint disc B 101 connected with the servo motor A 106 and the power butt joint disc A 211 on the accompanying fixture 2 rotate 90° together, at the same time, the floating fixed chuck 210 connected with the power butt joint disc A 211, the single crystal silicon bar 209 and the floating movable chuck 205 also rotate 90° together, then the edge skin processing of the square cutting is completed or the square grinding processing is completed; when the four planes of the silicon bar are ground, the servo motor A 106 receives the instruction to continue to rotate, and the four small arc surfaces of the silicon bar are ground, when the four small arc surfaces are ground, the servo motor A 106 receives the instruction to continue to rotate back to the original zero position, and the grinding processing of the whole silicon bar is completed.

[0078] The working process of the travelling fixture and the loading / unloading machine 3: the AVG car 6 carries the travelling fixture 2 and the single crystal silicon rod 209 after grinding, and moves to the loading / unloading machine 3. The AVG car 6 is raised and continues to move forward. When the two wedge-shaped positioning pins on the travelling bracket 606 on the AVG car 6 contact the two wedge-shaped positioning blocks A 317 on the loading / unloading machine 3, the travelling bracket 606 and the travelling fixture 2 can be deflected due to the four universal bearings 604 between the lower part of the travelling bracket 606 and the lifting forks. When the AVG car 6 continues to move forward, the travelling bracket 606 and the travelling fixture 2 are deflected due to the limitation of the wedge-shaped positioning blocks A 317, so as to ensure that the horizontal center of the travelling fixture 2 coincides with the center between the two wedge-shaped positioning blocks A 317 on the loading / unloading machine 3. After the butt joint positioning, the electric cylinder 607 on the travelling bracket 606 on the AVG car 6 is actuated to pull out the locking pin plug B 608. The AVG car 6 is lowered, the travelling fixture 2 is butt jointed with the butt joint workbench A 318, is positioned through the coarse positioning pin A 302, and then the cylinder B 304 is actuated to pull the travelling fixture 2 and the stand A 6 close to each other, is positioned through the fine positioning pin, and the corner oil cylinder A 305 is pressurized and locked. The AVG car 6 exits the loading / unloading machine 3. Then the gripper of the loading / unloading robot 9 moves to the center position of the length of the single crystal silicon rod 209, clamps the single crystal silicon rod 209, the servo motor C 312 on the butt joint mechanism is actuated to make the clamping butt joint shaft 213 on the travelling fixture 2 butt joint, and then the servo motor B 310 is rotated to loosen the movable chuck at the bottom of the travelling fixture 2. The loading / unloading robot 9 puts the single crystal square rod into the finished product silicon rod conveying line 7 and moves away. At the same time, the gripper of the loading / unloading robot 9 moves to the blank rod conveying line 8, clamps the blank single crystal round rod, rotates the gripper, stands up the single crystal silicon rod 209, moves to the crystal line and the center line, finds the crystal line and the center line, moves to the center of the travelling fixture 2 for taking out the crystal rod, makes the center of the single crystal silicon rod 209 coincide with the center of the two chucks of the travelling fixture 2, and then the servo motor B 310 is reversely rotated to clamp the single crystal silicon rod 209. The gripper of the loading / unloading robot 9 is loosened and moved away. The corner oil cylinder A 305 is unlocked, the cylinder B 304 is actuated to eject the travelling fixture 2, the AVG car 6 moves to the loading / unloading machine 3, the lifting forks of the AVG car 6 are raised, butt jointed with the travelling fixture 2, continue to be raised to make the travelling fixture 2 and the butt joint workbench A 318 disengage, the AVG car 6 exits the loading / unloading machine 3, and the lifting forks are lowered back to the original position, and then are sent to the square cutting machine for butt joint machining.

[0079] The working process of the square cutting machine is as follows: the AGV trolley 6 carries the accompanying clamp 2 and the single crystal silicon rod 209 to the square cutting machine 4, the front end of the AGV trolley 6 is connected with the water receiving tray A 425, the AGV trolley 6 and the water receiving tray A 425 continue to move to the inside of the square cutting machine 4, and when the AGV trolley 6 reaches a certain depth, the AGV trolley 6 is lifted and continues to move forward, when the two wedge-shaped positioning pins on the accompanying bracket 606 on the AGV trolley 6 contact the two wedge-shaped positioning blocks B 402 on the square cutting machine 4, the accompanying bracket 606 and the accompanying clamp 2 can be deflected due to the four universal bearings 604 between the lower part of the accompanying bracket 606 and the lifting fork, when the AGV trolley 6 continues to move forward, the accompanying bracket 606 and the accompanying clamp 2 are deflected due to the limitation of the wedge-shaped positioning blocks B 402, so that the horizontal center of the accompanying clamp 2 coincides with the center between the two wedge-shaped positioning blocks B 402 on the square cutting machine 4, after the butt joint positioning, the electric cylinder 607 on the accompanying bracket 606 on the AGV trolley 6 drives the locking pin plug B 608 to be pulled out, then the AGV trolley 6 is lowered, the accompanying clamp 2 is connected with the butt joint workbench B 436, the butt joint workbench B 436 is positioned through the coarse positioning pin B 435, the AGV trolley 6 continues to be lowered to the original position, then the AGV trolley 6 exits the square cutting machine 4 and pulls the water receiving tray A 425 back to the original position, then the cylinder E 437 operates to pull the butt joint workbench B 436 to move backward, and the accompanying clamp 2 is pulled close to the stand B 405, the butt joint workbench B 436 is positioned through the fine positioning pin B 435, and the corner cylinder B 426 is locked by pressure, the cylinder D 422 operates, the clamping rod 423 clamps the edge skin part on the upper end of the single crystal silicon rod 209, the cylinder A 208 on the lower part of the accompanying clamp 2 operates, the clamping rod 423 clamps the edge skin part on the lower end of the single crystal silicon rod 209, at the same time, the power butt joint mechanism 1 is connected with the end surface gear disc of the accompanying clamp 2, the concave square cutting machine base 403 is arranged at the front end of the roll-up protective door, when the accompanying clamp 2 is connected with the stand 405, the roll-up protective door is closed, and the single crystal silicon rod is ready to be machined, when the machining is started, the left cutting head body 412 and the right cutting head body 408 machine from top to bottom, when the machining is completed, the left cutting head body 412 and the right cutting head body 408 are lifted back to the original position, the protective door is opened, the vacuum suction cup 433 on the edge skin support 406 moves to the edge skin 430 of the single crystal silicon rod, the vacuum suction cup 433 adsorbs the edge skin, the cylinder D 422 and the cylinder A 208 at the lower end of the accompanying clamp 2 operate to open the clamping rod 423, the edge skin support 406 moves to take out the edge skin, the protective door is closed, then the servo motor A 106 on the power butt joint mechanism 1 rotates by 90°, at the same time, the accompanying clamp 2 is rotated to make the single crystal silicon rod 209 also rotate by 90°, the edge skins on the other two sides are machined, after the machining is completed, the left cutting head body 412 and the right cutting head body 408 are lifted back to the original position, the edge skin support 406 takes out the edge skin, the servo motor A 106 of the power butt joint mechanism 1 rotates to restore the original position of the single crystal silicon rod 209, then the power butt joint mechanism 1 is disconnected to restore the original position.The corner cylinder B 426 is loosened, the bottom cylinder E 437 pushes out the butt joint workbench B 436 with the travelling clamp 2, and the AVG trolley 6 enters the square cutting machine 4, is lifted and butts with the travelling clamp 2 and is taken out, is transported to the next process square grinding machine 5, and then another AVG trolley 6 enters with the travelling clamp 2, and the processing of the next single crystal silicon rod 209 is carried out.

[0080] The working process of the square grinding machine 5 is as follows: the AGV trolley 6 carrying the accompanying clamp 2 and the processed single crystal silicon rod 209 is transported to the square grinding machine 5, the front end of the AGV trolley 6 is docked with the water receiving tray B 520, the AGV trolley 6 continues to move towards the inside of the square grinding machine 5 while driving the water receiving tray B 520 to move forward, after entering a certain depth, the AGV trolley 6 is raised and continues to advance, when the two wedge-shaped positioning pins on the accompanying bracket 606 on the AGV trolley 6 contact the two wedge-shaped positioning blocks C 522 on the square grinding machine 5, the accompanying bracket 606 and the accompanying clamp 2 can be deflected due to the four universal bearings 604 between the lower part of the accompanying bracket 606 and the lifting fork, when the AGV trolley 6 continues to advance, the accompanying bracket 606 and the accompanying clamp 2 are deflected due to the restriction of the wedge-shaped positioning blocks C 522, so as to ensure that the horizontal center of the accompanying clamp 2 coincides with the center between the two wedge-shaped positioning blocks C 522 on the square grinding machine 5, after docking and positioning, the electric cylinder 607 on the AGV trolley 6 operates to pull out the locking pin plug B 608, then the AGV trolley 6 is lowered, the accompanying clamp 2 is docked with the docking workbench C 501, the AGV trolley 6 continues to descend to the original position, then the AGV trolley 6 exits the square grinding machine 5 while pulling the water receiving tray B 520 back to the original position; then the gas cylinder F 502 operates to pull the docking workbench C 501 to move backward, while pulling the accompanying clamp 2 and the vertical column C 506 close, the accompanying clamp 2 is positioned through the fine positioning pin B 521, the corner oil cylinder C 503 is locked, the protective door is closed, the small oil cylinder 105 on the power docking mechanism 1 operates to dock with the docking toothed disc on the accompanying clamp 2, then the grinding head 516 with the measuring probe moves to the bottom of the vertical column C 506, the size of the single crystal silicon rod 209 is measured first, the processing amount is calculated, then the single crystal silicon rod 209 is ground from the bottom to the top, after the grinding and processing, the servo motor A 106 on the power docking mechanism 1 rotates by 90°, while rotating the two chucks on the accompanying clamp 2, so that the single crystal silicon rod 209 also rotates by 90°, the other two sides are ground, after the processing, the servo motor A 106 on the power docking mechanism 1 rotates by another 45°, the edges of the single crystal silicon rod 209 are ground, after the processing, the servo motor A 106 rotates by another 90°, the other two edges are ground, after the processing, the servo motor A 106 rotates to the starting position, the corner oil cylinder C 503 is released, the bottom gas cylinder F 502 ejects the docking workbench C 501 and the accompanying clamp 2, at the same time, the AGV trolley 6 enters the square grinding machine 5, is raised to dock with the accompanying clamp 2 and is taken out, is transported to the loading / unloading machine 3, then another AGV trolley 6 carrying the accompanying clamp 2 (after being opened) enters to perform the grinding and processing of the next single crystal silicon rod 209. The above process is repeated.

[0081] The above-described embodiments are merely preferred embodiments of the present application, but are not all the embodiments that can be implemented by the present application. Any obvious modifications made by those skilled in the art to the present application without departing from the principles and spirit of the present application should be considered to fall within the scope of protection of the claims of the present application.

Claims

1. A silicon rod cutting / squaring and grinding flexible manufacturing system based on a traveling jig, characterized by, The system comprises a travelling clamp (2), a feeding / discharging machine (3), a square cutting machine (4), a square grinding machine (5), an AGV trolley (6), a finished product silicon rod conveying line (7), a blank rod conveying line (8), a feeding / discharging robot (9); wherein the feeding / discharging machine (3), the square cutting machine (4) and the square grinding machine (5) are arranged on both sides of the system, the finished product silicon rod conveying line (7) and the blank rod conveying line (8) are arranged on both sides of one end of the system, the feeding / discharging machine (3) is arranged at one end adjacent to the finished product silicon rod conveying line (7) and the blank rod conveying line (8), the feeding / discharging robot (9) for moving workpieces and comparing workpieces is arranged between the finished product silicon rod conveying line (7), the blank rod conveying line (8) and the feeding / discharging machine (3); the AGV trolley (6) is used for moving the travelling clamp (2) between the feeding / discharging machine (3), the square cutting machine (4) and the square grinding machine (5), and the AGV trolley (6) is movably connected with the feeding / discharging machine (3), the square cutting machine (4) and the square grinding machine (5); the travelling clamp (2) is connected with the feeding / discharging machine (3), the square cutting machine (4) and the square grinding machine (5) and is detachably connected with them; the square cutting machine (4) and the square grinding machine (5) are respectively provided with a power docking mechanism (1) for connecting with the travelling clamp (2) and rotating workpieces; The travelling clamp (2), the feeding / discharging machine (3), the square cutting machine (4), the square grinding machine (5) and the AGV trolley (6) can be arranged according to the working condition requirements; the AGV trolley (6) is provided with a travelling bracket (606) arranged on a fork of the AGV trolley (6), four universal bearings (604) are arranged at the bottom of the travelling bracket (606) and the contact position with the fork, each universal bearing (604) is arranged in a limiting seat (601), two supports are arranged on each side of the bottom of the travelling bracket (606), and a compression spring (603) is arranged on each support; an electric cylinder (607) is arranged on each side of the upper part of the travelling bracket (606); each electric cylinder (607) is provided with a latch B (608) for locking; two wedge-shaped positioning pins are arranged at the bottom of the contact surface of the travelling bracket (606) and other square cutting machines (4), square grinding machines (5) and feeding / discharging machines (3); a rough positioning pin is arranged on the contact surface of the travelling bracket (606) and the travelling clamp (2); The accompanying clamp (2) includes an accompanying clamp seat body (201), a fixed clamp head seat (212), and a movable clamp head seat (204); one end of the accompanying clamp seat body (201) is provided with the fixed clamp head seat (212), and the front end of the fixed clamp head seat (212) is provided with a floating fixed clamp head (210); the upper end of the floating fixed clamp head (210) is connected with a power docking gear disc A (211); the accompanying clamp seat body (201) is provided with a linear guide rail B (202) and a T-shaped lead screw (203), the movable clamp head seat (204) is movably connected with the accompanying clamp seat body (201) through the linear guide rail B (202), the T-shaped lead screw (203), and a sliding block; the top of the movable clamp head seat (204) is provided with a floating movable clamp head (205), and the top side of the movable clamp head seat (204) is provided with a rotary clamping air cylinder A (208); the front end of the piston rod of the air cylinder A (208) is connected with a connecting plate (207), one end of the accompanying clamp seat body (201) is provided with a bearing seat A (216), the bearing seat A (216) is internally provided with a bearing A (215), and the bearing A (215) is provided with a clamping docking shaft (213) penetrating therethrough; the clamping docking shaft (213) is connected with the T-shaped lead screw (203) through a shaft coupling A (218), and a pneumatic clamp device (214) is arranged at the adjacent position of the bearing A (215); the fixed clamp head seat (212) is fixedly connected with one side of the upper portion of the accompanying clamp seat body (201); the power docking gear disc A (211) and the floating fixed clamp head (210) are connected to form a power connecting piece, and the power connecting piece penetrates through the front end of the fixed clamp head seat (212); the two ends of the T-shaped lead screw (203) are respectively installed on a lead screw seat A (219) and a lead screw seat B (221), and the lead screw seat A (219) and the lead screw seat B (221) are installed on the accompanying clamp seat body (201); the clamping docking shaft (213) is connected with the accompanying clamp seat body (201) through the bearing seat A (216), and the clamping docking shaft (213) is arranged on one side of the fixed clamp head seat (212); a locking nut A (217) is installed on the clamping docking shaft (213) and used for locking the bearing A (215); the pneumatic clamp device (214) is arranged at the adjacent position of the bearing A (215) and used for locking the T-shaped lead screw (203); the top of the movable clamp head seat (204) is provided with the floating movable clamp head (205), the movable clamp head seat (204) is moved and the monocrystalline silicon rod (209) is clamped by rotating the T-shaped lead screw (203); the rotary clamping air cylinder A (208) is used for clamping the side skin of the monocrystalline silicon rod (209) during machining; the connecting plate (207) is arranged at the bottom of the movable clamp head seat (204); two accompanying clamp clamping rods (206) are installed on the connecting plate (207); a positioning plate is further arranged on the accompanying clamp seat body (201), a plurality of pin holes are arranged on the positioning plate, and the positioning plate is arranged below the movable clamp head seat (204); a positioning hole (220) is arranged on the side surface of the accompanying clamp seat body (201); The accompanying clamp (2) can clamp a crystal rod with a diameter of 200-310 mm and a length of 700-950 mm.

2. A silicon rod sawing / grinding flexible manufacturing system based on a carrier clamp according to claim 1, wherein The power docking mechanism (1) comprises a power docking support (103), a power docking gear plate B (101), a linear guide rail A (104) arranged at the bottom of the power docking support (103), and a slide block and a stand connected through the linear guide rail A (104); a small oil cylinder (105) is arranged on the power docking support (103); a bearing seat B (107) is arranged at the front end of the power docking support (103), a bearing B (108) is arranged in the bearing seat B (107), the power docking gear plate B (101) is arranged on the bearing seat B (107) through the bearing B (108), the power docking gear plate B (101) is connected with a servo motor A (106) through a shaft coupling B (111), and the servo motor A (106) is arranged on the power docking support (103); a gland (109) is arranged at one end of the bearing seat B (107) and is in contact with the outer ring of the bearing B (108); a locking nut B (110) is arranged on the power docking gear plate B (101) and is in contact with the inner ring of the bearing B (108); an unlocking pin (102) is further arranged on the power docking support (103), a positioning pin hole is further arranged on the adjacent surface of the power docking support (103) and the following fixture (2) and is movably connected with the unlocking pin (102); the unlocking pin (102) is arranged at the adjacent position of the power docking gear plate B (101), and a pin shaft (222) is further arranged on the following fixture (2); the pin shaft (222) is arranged directly below the unlocking pin (102), a spring A (223) is arranged at the lower outer periphery of the pin shaft (222), a locking pin (224) is arranged below the pin shaft (222), one end of the outer periphery of the locking pin (224) is connected with a spring B (225), and the other end is connected with a floating fixed chuck (210) in the following fixture (2).

3. A silicon rod slicing / grinding flexible manufacturing system based on a carrier clamp as claimed in claim 2, wherein, The feeding / discharging machine (3) comprises a feeding / discharging machine base (303), and a stand column A (306) is arranged on the feeding / discharging machine base (303); one side of the stand column A (306) is in a concave structure, a butt joint mechanism is arranged on the upper end of the concave surface of the stand column A (306), and corner oil cylinders A (305) are arranged on the inner sides of the two sides of the concave surface of the stand column A (306); the butt joint mechanism comprises two straight linear guides D (307) and a sliding plate (314), the two straight linear guides D (307) are arranged on the stand column A (306), a clamping screw is arranged in the middle of the two straight linear guides D (307), and the sliding plate (314) is connected with the straight linear guides D (307) through a sliding block and the clamping screw; a screw rod seat C (313) arranged at the top of the clamping screw is connected with a speed reducer B (311) and a servo motor C (312), a bearing box (308) is arranged on the sliding plate (314), a power butt joint shaft (315) is arranged in the bearing box (308), the top of the power butt joint shaft (315) is connected with a servo motor B (310) through a speed reducer A (309), and the bottom of the power butt joint shaft (315) is provided with a butt joint toothed disc; a butt joint workbench A (318) is arranged on the feeding / discharging machine base (303), a rough positioning pin A (302) is arranged on the butt joint workbench A (318), the butt joint workbench A (318) is connected with the feeding / discharging machine base (303) through a straight linear guide C (301), an L-shaped push plate is arranged below the straight linear guide C (301), a cylinder B (304) is arranged at the middle of the rear part of the feeding / discharging machine base (303), and the front end of the piston rod of the cylinder B (304) is connected with the L-shaped push plate; the feeding / discharging machine base (303) is in a U-shaped structure; the corner oil cylinders A (305) are arranged in a symmetrical mode in twos, and four corner oil cylinders A (305) are arranged in total; a limiting block A (316) is arranged at the front end of the straight linear guide C (301); the clamping screw is a trapezoidal self-locking screw; two wedge-shaped positioning blocks A (317) are arranged at the two ends of the concave surface of the feeding / discharging machine base (303), and are used for movably connecting with an AGV trolley (6) of a transport traveling clamp (2).

4. A silicon rod slicing / grinding flexible manufacturing system based on a carrier clamp as defined in claim 3, wherein the carrier clamp is provided with a plurality of clamping pins for clamping the silicon rod. The cutting machine (4) comprises a cutting machine base (403), a column B (405), a left cutting head body (412), a right cutting head body (408), and a power docking mechanism (1); the column B (405) is arranged on the cutting machine base (403), the left cutting head body (412) and the right cutting head body (408) are connected with the column B (405) through guide mechanisms respectively; a reducer C (410) and a servo motor D (411) are connected at the top of each guide mechanism; each of the left cutting head body (412) and the right cutting head body (408) is provided with a cutting element, and each of the left cutting head body (412) and the right cutting head body (408) is provided with a cutting wheel driving motor (427); an edge skin taking support (406) is arranged on the upper half of the column B (405), and a following clamp (2) is arranged on the upper part of the middle of the cutting machine base (403) when the following clamp (2) is connected with the cutting machine (4), and the connection is detachable; the power docking mechanism (1) is connected with the column B (405) through a linear guide rail A (104) and is located at the middle position of the upper part of the column B (405); the cutting machine base (403) has a U-shaped structure, and a water receiving disc A (425) is arranged in the center of the cutting machine base (403); the left cutting head body (412) and the right cutting head body (408) are arranged vertically with the plane of the column B (405); the two sides of the water receiving disc A (425) are connected with the cutting machine base (403) through guide rails and sliding blocks and are movably connected; two wedge-shaped positioning blocks B (402) are arranged at the two ends of the concave surface of the cutting machine base (403) and are movably connected with an AGV trolley (6) for transporting the following clamp (2).

5. A silicon rod slicing / grinding flexible manufacturing system based on a carrier clamp as claimed in claim 4, wherein, Each guide mechanism comprises two linear guide rails E (404) and a ball screw; the two linear guide rails E (404) are arranged on the two sides of one side of the column B (405), a ball screw is arranged in the middle of the two linear guide rails E (404), the ball screw is connected with a screw seat D (409) arranged on the top of the column B (405), and the upper part of the ball screw is connected with the reducer C (410) and the servo motor D (411); the cutting head has a left-right moving function, and each guide mechanism further comprises a cross slide (440); the cross slide (440) is arranged on the linear guide rail E (404), a linear guide rail I (441) and a ball screw A (442) are arranged on the cross slide (440), one end of the ball screw A (442) is connected with a screw seat E (443), the screw seat E (443) is arranged on the cross slide (440), the other end of the screw seat E (443) is connected with a servo motor F (444), the right cutting head body (408) is arranged on the linear guide rail I (441) and is connected with a nut of the ball screw A (442), and the connection structure of the left cutting head body (412) is the same as that of the right cutting head body (408); the cutting element is four cutting wheels (414) surrounding a rectangle, and the cutting wheels (414) are wound with annular diamond wires (413). The edge taking support (406) comprises an X-axis crossbeam (421), a Y-axis crossbeam (431) and a Z-axis crossbeam (417); the edge taking support (406) is connected to both sides of the column B (405); an X-axis crossbeam (421) is arranged on the front end of the edge taking support (406); the upper part and the lower part of the front of the X-axis crossbeam (421) are respectively provided with linear guides G (429); a rack (428) is arranged in the middle region of the front of the X-axis crossbeam (421); the Z-axis crossbeam (417) is connected to the X-axis crossbeam (421) through the linear guides G (429) and the sliding blocks; a servo motor E (416) is arranged at the adjacent position of the Z-axis crossbeam (417); the front end of the servo motor E (416) is provided with a gear which is engaged with the rack (428); the bottom of the Z-axis crossbeam (417) is connected to the Y-axis crossbeam (431) through the linear guides F (418) and the sliding blocks; a cylinder C (419) is arranged on the horizontal plane of the Y-axis crossbeam (431); the front end of the piston of the cylinder C (419) is connected to the Z-axis crossbeam (417); two clamping cylinders (432) are arranged on the front end of the Y-axis crossbeam (431) in an up-down manner; a vacuum chuck (433) is arranged on each of the two clamping jaws of the clamping cylinder (432); a single crystal silicon rod edge skin (430) is placed on the front end of the vacuum chuck (433); The back of the following clamp (2) is positioned and connected to the column B (405) through a fine positioning pin A (438) which is located in the middle of the column B (405); four corner cylinders B (426) are arranged on the inner sides of the two guide mechanisms; when the following clamp (2) is connected to the column B (405), the four corner cylinders B (426) on the two sides of the following clamp (2) are locked; a butt joint workbench B (436) is arranged on the cutting square machine base (403); a coarse positioning pin B (435) is arranged on the butt joint workbench B (436); the butt joint workbench B (436) is positioned and connected to the following clamp (2) through the positioning hole (220) and the coarse positioning pin B (435); the butt joint workbench B (436) is connected to the cutting square machine base (403) through the linear guides H (434); an L-shaped push plate is arranged below the linear guides H (434); a cylinder E (437) is arranged in the middle of the rear part of the cutting square machine base (403); the front end of the piston rod of the cylinder E (437) is connected to the L-shaped push plate; a crossbeam (445) is arranged on the top of the column B (405); a cylinder support (439) is arranged on the crossbeam (445); clamping rods (423) and reinforcing plates (424) are arranged on the two sides of the front end of the crossbeam (445); a cylinder D (422) is arranged on the cylinder support (439); a floating joint (407) is arranged below the piston rod of the cylinder D (422); the bottom of the floating joint (407) is connected to the clamping rods (423).

6. A silicon rod sawing / grinding flexible manufacturing system based on a carrier clamp according to claim 5, wherein The grinding machine (5) comprises a grinding machine base (523); a stand C (506) is arranged on the grinding machine base (523), two sides on one side of the stand C (506) are connected with grinding heads (516) through guide mechanisms respectively, the grinding heads (516) are provided in two, and each guide mechanism is further provided with a servo motor H (514) and a speed reducer; a docking workbench C (501) is arranged on the grinding machine base (523) and connected with the grinding machine base (523) through a linear guide rail L (518), an L-shaped push plate is arranged below the linear guide rail L (518), a cylinder F (502) is installed at the middle of the rear part of the grinding machine base (523), and the front end of the piston rod of the cylinder F (502) is connected with the L-shaped push plate; the grinding machine base (523) is of a U-shaped structure, and a water receiving disc B (520) is arranged in the center recess of the grinding machine base (523); the two sides of the water receiving disc B (520) are connected with the grinding machine base (523) through guide rails and sliding blocks and are movably connected with the grinding machine base (523).

7. A silicon rod sawing / grinding flexible manufacturing system based on a carrier clamp according to claim 6, wherein Each guide mechanism comprises two linear guides J (507), a ball screw B (505); the two linear guides J (507) are arranged on both sides of one side of the column C (506), and the ball screw B (505) is installed in the middle of the two linear guides J (507); the ball screw B (505) is connected with the screw seat G (510) arranged on the top of the column C (506) and the screw seat F (504) arranged on the lower part of the column C (506); the upper part of the screw seat G (510) is connected with the speed reducer D (515) and the servo motor H (514); the grinding head sliding plate (511) is arranged on the linear guide J (507), and the grinding head sliding plate (511) is provided with two horizontal linear guides K (508) and a horizontal ball screw C (512); the ball screw C (512) is arranged in the middle of the two horizontal linear guides K (508); one end of the ball screw C (512) is connected with the screw seat G (510), the screw seat G (510) is arranged on the grinding head sliding plate (511), and the other end of the screw seat G (510) is connected with the servo motor G (509); the grinding head (516) is arranged on the linear guide K (508) and is connected with the nut of the ball screw C (512); the other grinding head (516) is arranged in the same manner; the square grinding machine (5) is provided with a power docking mechanism (1); the back of the following clamp (2) is positioned and connected with the column C (506) through the fine positioning pin B (521) in the middle of the column C (506); four corner oil cylinders C (503) are arranged on the inner sides of the two guide mechanisms; when the following clamp (2) is connected with the column C (506), the four corner oil cylinders C (503) on both sides of the following clamp (2) are locked; the coarse positioning pin is arranged on the docking workbench C (501); the docking workbench C (501) is positioned and connected with the following clamp (2) through the positioning hole (220) and the coarse positioning pin; the power docking mechanism (1) is connected with the column C (506) through the linear guide A (104) and is located in the middle position of the upper part of the column C (506); the limiting block B (517) is arranged at the front end of the linear guide L (518); the front end of each grinding head (516) is further provided with a grinding wheel (524).

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