Optical field-electric field coupling detection electrode and preparation method and detection device thereof

Abstract

The application discloses a light field-electric field coupling detection electrode and a preparation method and a detection device thereof. 10 The application discloses a light field-electric field coupling detection electrode and a preparation method and a detection device thereof. 10 The application discloses a light field-electric field coupling detection electrode and a preparation method and a detection device thereof. ‑1 The application discloses a light field-electric field coupling detection electrode and a preparation method and a detection device thereof. The Si / Ag / WO3 / Bi

Description

Technical Field

[0001] This invention relates to an optical field-electric field coupled detection electrode, its preparation method, and detection device, belonging to the field of electronic devices. Background Technology

[0002] Surface electromyography (sEMG) is a bioelectrical signal generated in biological tissues and organs. It is a bioelectrical signal accompanying muscle contraction and is easily affected by electrode placement, sleep posture, and skin resistance. Bruxism is a phenomenon where the teeth unconsciously bear a certain amount of biting force while the mandible makes rhythmic movements or exhibits a significant tendency to move. Because bruxism is thought to be related to muscle activity, sEMG devices are frequently used to assess it. However, in reality, bruxism patients often have difficulty falling asleep when electrodes are attached to the masseter or temporalis muscles. To date, there is no effective method for managing bruxism.

[0003] Current solutions for detecting muscle activity rely on expensive sEMG sensor technology. Furthermore, detecting muscle activity during molar activity remains a challenge. Factors such as user sweating, poor sensor adhesion, or sensor misalignment all hinder the acquisition of electromyographic signals during molar activity.

[0004] Chinese patent CN111248856A, entitled "Bruxism Measurement Device and Bruxism Diagnostic System," discloses a bruxism measurement device and a bruxism diagnostic system. One embodiment of the bruxism measurement device includes an ear-insertion body and a sensor unit. The ear-insertion body is inserted into the ear and has a first contact line and a second contact line spaced apart at its front end. The sensor unit is connected to the front end of the ear-insertion body to detect surface movements of the ear canal caused by molarity or mandibular occlusion. The sensor unit includes an earphone, a flexure sensor, a first signal line, and a second signal line. The earphone is detachably mounted to the front end. The flexure sensor is mounted on the earphone to detect surface movements of the ear canal. The first and second signal lines are disposed in the earphone to electrically connect the flexure sensor to the first and second contact lines, respectively. The bruxism measurement described in this patent is achieved by continuously detecting changes in air pressure in the inner ear canal using a pressure sensor, belonging to the field of single-mechanical-electrical detection. This device easily misdetects snoring as bruxism, has poor accuracy, and requires customization based on individual ear canal conditions, resulting in high cost.

[0005] In the paper "Synergistic enhancing photoelectrochemical response of Bi 10The paper "O6S9 with WO3 optical heterojunction in wide wavelength range" (DOI:10.1016 / j.apsusc.2019.144697) introduces a WO3 / Bi... 10 O6S9 heterojunction photoelectrode. Bi2O3 is grown in situ on WO3 nanoplatelets using a chemical bath deposition method. 10 O6S9 nanosheets were used to form a simple synergistic optical heterojunction structure by coupling a multidimensional interlaced heterojunction with a light-trapping structure. Results showed that, over the long wavelength range, the device exhibited accelerated interfacial charge transfer, enhanced light absorption, and improved separation and transfer efficiency of photoexcited electron-hole pairs. The photocurrent response was 1.16 mA·cm⁻¹ at -0.1 V (relative to a saturated calomel electrode). -2 They are pure WO3 electrodes and pure Bi electrodes, respectively. 10 The O6S9 electrode has a 21-fold and 1.8-fold difference. This optical heterojunction did not reach the expected size, and the band bending of n-Si was too large, which was not conducive to carrier transit. Summary of the Invention

[0006] To address the problems existing in the prior art, this invention provides an optical-electric field coupling detection electrode, its preparation method, and a detection device, which solves the difficulties in the electromyography signal acquisition process. The optical-electric field coupling detection device with heart rate monitoring and electromyography sensing functions can be used for the diagnosis of bruxism, and can be supplemented with biofeedback to achieve the effect of alleviating or treating bruxism.

[0007] To achieve the above objectives, the present invention employs an optical-electric field coupled detection electrode, wherein the optical-electric field coupled detection electrode is Si / Ag / WO3 / Bi. 10 O6S9 / P2O3 / black phosphorus working electrode;

[0008] The substrate is Si / Ag, and the mass percentages of each element are W = (40-50)%, Si = (15-25)%, O = (15-25)%, Bi = (10-20)%, S = (1-5)%, Ag = (0.1-1)%, and P = (0-0.5)%.

[0009] Preferably, the Si is n-Si, and its surface is coated with an Ag layer with a thickness of (50-150) nm.

[0010] WO3 thin films are nanoplate-like structures, vertically and intersectingly distributed on an n-Si / Ag substrate. The thickness of the WO3 film is (920–980) nm, with the area of ​​a single WO3 crystal being (940–1000) nm * (920–980) nm and a thickness of (180–220) μm. A (200–240) nm thick Bi layer is formed on top of the WO3 film. 10 O6S9 thin film, Bi 10 The O6S9 thin film is a nanoparticle structure that is uniformly filled in the gaps between WO3 nanoplates.

[0011] Black phosphorus nanosheets uniformly coated on WO3 / Bi 10 In the interstitial space of O6S9, P2O3 is Bi 10 At the interface between the O6S9 film and black phosphorus, there is a dense oxide film with a thickness of (20-40) nm, and the P2O3 and black phosphorus are connected by PO bonds.

[0012] In addition, the present invention also provides a method for fabricating the optical-electric field coupled detection electrode, comprising the following steps:

[0013] 1) Fabrication of WO3 electrode: Dissolve Na2WO4·2H2O and (NH4)2C2O4·H2O in deionized water, and add HCl solution, H2O2 solution and anhydrous C2H5O in sequence to fabricate WO3 film on n-Si / Ag substrate, and then perform annealing treatment;

[0014] 2) Make WO3 / Bi 10 O6S9 electrode: Bi(NO3)3·5H2O is dissolved in C6H 15 In NO3, after cooling, CH4N2S and NH3·H2O are added. The substrate is immersed in the solution and heated in a water bath. The obtained electrode is washed with deionized water and then air-dried naturally.

[0015] 3) Make WO3 / Bi 10 O6S9 / P2O3 / black phosphorus electrode: Under conditions of temperature (20-25)℃ and humidity (50-60)%, the prepared WO3 / Bi 10 Black phosphorus solution was spin-coated onto the O6S9 electrode. After spin-coating, the electrode was placed in a glove box hot table with a water content of (0-0.15) ppm and an oxygen content of (0-0.2) ppm for constant temperature annealing at (200-350) ℃ for (20-40) min.

[0016] Preferably, the concentration of the black phosphorus solution in step 3) is (1.2–1.5) mg·mL. -1 Spin coater speed (2500~3000) r·min -1Apply the coating twice every 3 to 5 minutes.

[0017] In addition, the present invention also provides an optical field-electric field coupling detection device, including a sensing module, an optical device module, a microprocessor module, a power management module, a wireless module and a biofeedback module;

[0018] The power management module is connected to the sensing module, the optical device module, the microprocessor module, the wireless module, and the biofeedback module, respectively. The microprocessor module is connected to the sensing module, the wireless module, and the biofeedback module, respectively. The optical device module is connected to the sensing module.

[0019] The sensing module includes the optical-electric field coupled detection electrode, counter electrode, reference electrode, and Na2SO3 electrolyte. The sensing module is used to capture electric field signals and optical signals and convert them into electrical signals.

[0020] The optical device module is used to provide a light source; the power management module is used to provide power.

[0021] The microprocessor module is used to receive, record, process signals input from the sensing module and transmit instructions to the biofeedback module;

[0022] The biofeedback module is used to provide feedback based on the analysis results of the microprocessor module;

[0023] The wireless module is used to send diagnostic data and analysis results to external devices or receive control signals from external devices.

[0024] Preferably, the optical device module consists of two LEDs that emit green light with a wavelength of (492-520) nm, and is controlled by a power management module to blink at a frequency of (200-250) Hz.

[0025] Preferably, the microprocessor module includes a preamplifier, a bandpass filter, and a digital signal processor; the microprocessor module is used to acquire signals from the sensing module and the optical device module, and after being amplified by the preamplifier, filtered by the bandpass filter, and analyzed and processed by the digital signal processor in the microprocessor module, the signals are output to the wireless module and the biofeedback module.

[0026] Preferably, the wireless module can send diagnostic data and analysis results to external devices such as mobile phones, computers or wireless receivers, and can also receive control signals from external devices. It consists of a wireless transceiver chip and a pair of microwave antennas.

[0027] Preferably, the power management module is connected to the power ports of the sensing module, optical device module, microprocessor module, wireless module, and biofeedback module, respectively.

[0028] The microprocessor module includes a data acquisition input terminal, a control output terminal, a power input terminal, a data output terminal, and a control terminal. The data acquisition input terminal is connected to the Si / Ag / WO3 / Bi sensor module. 10 The O6S9 / P2O3 / black phosphorus working electrode, reference electrode, and counter electrode are connected to the control input of the biofeedback module, the power input of the power management module, and the data output and control terminals of the wireless module.

[0029] Finally, the present invention also provides a molar monitoring feedback system based on the aforementioned optical field-electric field coupling detection device, comprising a sensing module, an optical device module, a microprocessor module, a power management module, a wireless module, and a biofeedback module;

[0030] The sensing module is used to detect the electromyographic signal of the temporalis muscle. The optical device module is used to cooperate with the sensing module to perform optical signal heart rate monitoring. The power management module outputs a bias voltage to the sensing module and outputs a voltage at a frequency of (200-250) Hz to enable the optical device module to work. The microprocessor module receives the electromyographic intensity data of the temporalis muscle and the heart rate fluctuation data collected by the sensing module, amplifies, filters and extracts the data through the microprocessor module, and finally outputs the data to an external device through the wireless module.

[0031] The biofeedback module provides feedback to the user after the microprocessor module analyzes the user's teeth grinding data and it exceeds a set threshold (0.5~1) mV, causing the user to stop the incorrect teeth grinding activity. The biofeedback module includes a scroll system, which includes a micro stepper motor. After receiving the teeth grinding signal, the scroll system works for a set time (2~8) s to achieve a tightening effect, causing the bruxism patient to stop the incorrect teeth grinding activity.

[0032] Preferably, the molar monitoring and feedback system includes a molar detection unit and a feedback unit;

[0033] The molar detection unit includes the following detection steps:

[0034] S1. After the user puts on the monitoring feedback system and turns on the power, the microprocessor module detects and records the background current I of the environment. S1 ;

[0035] S2. The power management module controls the application of a bias voltage to the sensing module, and the optical device module works continuously.

[0036] S3, the sensing module detects and records the current intensity I during the time period of (3-5) seconds after power-on at a frequency of (5-10) Hz. 1～n (15≤n≤50);

[0037] S4. The microprocessor module receives the timing current intensity values, compares the data sizes, and calculates the average of the three maximum values, I. max , will I max -I S1 Compare with the engineering setting value I0;

[0038] S5, if I max -I S1 If I < I0, the microprocessor module sends a command to the wireless module to transmit data to the peripheral device, prompting the user to adjust the device position; if I max -I S1 If I > 0, then data is sent to the external device, indicating that the device is aligned;

[0039] The feedback unit includes the following feedback steps:

[0040] S1, The microprocessor module detects and records the background current I of the environment. S1 ;

[0041] S2. The power management module controls the application of bias voltage to the sensing module and controls the power on and off of the optical device module at a frequency of (200~250)Hz.

[0042] S3. The microprocessor module synchronously samples the signal transmitted from the sensor module at a sampling rate of (200-250) Hz. Every three sampling cycles are divided into an execution cycle, and the average value of the coupled field induced current during optical transmission is calculated within each execution cycle. The average value of the electric field induced current when the light is off Since the coupled field induced current measured during light transmission is generated by the superposition of the electromyographic electric field and the reflected light field, the average value of the induced current of the light field within one execution cycle can be obtained from... It can be concluded that;

[0043] S4, the timing signals of the electric field and the light field are amplified and filtered by the preamplifier and bandpass filter of the microprocessor module. Finally, the data is analyzed and processed by the microprocessor chip and output to the wireless transceiver chip of the wireless module, and controls whether the scroll system of the biofeedback module works.

[0044] The Si / Ag / WO3 / Bi of the present invention 10 The working principle of the O6S9 / P2O3 / black phosphorus working electrode is as follows:

[0045] As shown in Figure 1(a), under the "optical field off" and "applied electric field off" states, Si / Ag / WO3 / Bi 10 The O6S9 / P2O3 / black phosphorus region does not excite any charge carriers, and the anions (SO3) 2- (marked as dotted pattern spheres) and cations (Na) +(marked as black spheres) are randomly distributed in the electrolyte material surrounding black phosphorus.

[0046] As shown in Figure 1(b), under the "light field on" and "applied electric field on" states, the applied electric field and light-induced electrons and holes in black phosphorus and Bi... 10 O6S9, WO3, and n-Si regions are formed. In black phosphorus, excited holes (or excited electrons) move towards the external circuit (or Bi). 10 O6S9) layer migration; in Bi 10 In O6S9, excited holes (or excited electrons) migrate towards the black phosphorus (or WO3) layer; in WO3, excited holes migrate towards Bi. 10 During O6S9 layer migration, excited electrons migrate through the silver layer to the n-Si layer; in the n-Si, excited holes migrate to the Ag / n-Si interface and partially recombine with electrons from WO3; simultaneously, excited electrons in the n-Si migrate to the n-Si / electrolyte interface. Electrons migrate between these semiconductors until the Fermi levels of the semiconductors reach equilibrium, causing the energy bands of these semiconductors to bend at the interfaces.

[0047] As shown in Figure 1(c), under the "light field off" and "applied electric field off" states, black phosphorus and Bi... 10 Electrons and holes in the O6S9, WO3, and n-Si regions migrate to regions with lower electron and hole concentrations, while anions and cations move in the opposite direction to their original regions.

[0048] Compared with the prior art, the beneficial effects of the present invention are:

[0049] 1) Related to the paper "Synergistic enhancing photoelectrochemical response of Bi 10 The Si / WO3 / Bi prepared in O6S9 with WO3 optical heterojunction in wide wavelength range (DOI:10.1016 / j.apsusc.2019.144697) 10 Compared to the O6S9 working electrode, the Si / Ag / WO3 / Bi prepared in this invention 10 The O6S9 / P2O3 / black phosphorus working electrode, under the same light field intensity of 100W, showed a 2.2-fold increase in photocurrent response; at 1100V·m -1 Under the superposition of the same electric field strength and the same 100W light field strength, the current response increased by 1.75 times.

[0050] 2) The optical field-electric field coupling detection device of the present invention has both optical field sensing and electric field sensing functions;

[0051] Si / Ag / WO3 / Bi 10 The O6S9 / P2O3 / black phosphorus working electrode is subjected to a spatial electric field, which accelerates the generation of electron-hole pairs, forming a built-in electric field and thus generating an induced bias voltage; Si / Ag / WO3 / Bi 10 When the O6S9 / P2O3 / black phosphorus working electrode is subjected to a light field, the generation of electron-hole pairs is accelerated inside. Black phosphorus acts as a co-catalyst, effectively enhancing the separation of photogenerated electron-hole pairs in the WO3-black phosphorus heterojunction, thereby enhancing the photoelectrochemical performance in both electric and light fields.

[0052] 3) In the optical-electric field coupling detection device of the present invention, the power management module is sequentially connected to the three electrodes (Si / Ag / WO3 / Bi) of the sensing module. 10 The O6S9 / P2O3 / black phosphorus working electrode, reference electrode, and counter electrode test system, the LED light source of the optical device module, the microprocessor chip of the microprocessor module, the wireless transceiver chip of the wireless module, and the scroll system of the biofeedback module are powered by these components. The microprocessor chip of the microprocessor module is connected to the three-electrode test system of the sensing module and receives the current signal collected by the three-electrode test system of the sensing module. The wireless transceiver chip of the wireless module receives the signal processed by the microprocessor chip of the microprocessor module and then transmits it to the peripheral device through the antenna of the wireless module via a wire. The scroll system of the biofeedback module receives instructions from the microprocessor chip of the microprocessor module and is always ready to receive working signals.

[0053] 4) The light-electric field coupling detection device is fixed on the temporalis muscle. After the device is powered on, it first checks whether the impedance of the working electrode is within the normal range. After confirming that the impedance is normal, the background current under dark and light conditions is detected and recorded respectively. The optical device module is powered on and off at a fixed frequency of (200-250) Hz, and the instantaneous light field current and electric field current of each cycle are calculated. After amplifying, filtering, and analyzing the data of the molar signal, it is judged whether the heart rate and electromyography data are abnormal. If abnormal, biofeedback is initiated to correct the erroneous molar activity and the molar information is sent to external devices (such as mobile phones, computers, wireless receivers, etc.).

[0054] 5) The optical field-electric field coupling detection device of the present invention combines traditional electromyography signal detection with heart rate signal detection, which to a certain extent solves the misjudgment behavior that often occurs in bruxism detection and correction devices; at the same time, while ensuring the normal sleep quality of bruxism patients, it avoids the occurrence of pulpitis, periapical periodontitis and even gastrointestinal diseases, and improves the problems of tooth wear and daytime temporomandibular joint pain caused by nocturnal bruxism. Attached Figure Description

[0055] Figure 1(a), (b), and (c) are schematic diagrams illustrating the principle of electric field and photoelectric conversion implemented by the sensing module of the present invention.

[0056] Figure 2 This is a schematic diagram of the optical-electric field coupling device of the present invention, wherein 1 is a sensing module, consisting of three electrodes and an electrolyte; 2 is an optical device module, consisting of two identical LEDs operating in the green light band; 3 is a microprocessor module; 4 is a power management module, consisting of a power management chip and an ultra-thin lithium battery; 5 is a wireless module, consisting of a wireless transceiver chip and a pair of antennas; and 6 is a biofeedback module, consisting of a scroll system controlled by a micro stepper motor.

[0057] Figure 3 This is a schematic diagram of the optical field-electric field coupling device of the present invention being worn;

[0058] Figure 4 The Si / Ag / WO3 / Bi in Embodiments 1 and 2 of this invention 10 Schematic diagram of the preparation method of O6S9 / P2O3 / black phosphorus working electrode;

[0059] Figure 5 This is a framework diagram showing the module division and working relationships between the modules of the present invention;

[0060] Figure 6 This is a flowchart illustrating the operation of the stepper motor in the biofeedback module of this invention.

[0061] Figure 7 This is a flowchart of the molar detection and correction process of the device of the present invention;

[0062] Figure 8 This invention provides a schematic diagram of the power management module controlling the on / off frequency of the optical device module and a schematic diagram of the optical waveform obtained by the difference method.

[0063] Figure 9 This is an energy level diagram of the working electrode material in the sensing module of the present invention. Detailed Implementation

[0064] The following embodiments are further illustrations of the present invention and serve as explanations of the technical content of the present invention. However, the essence of the present invention is not limited to the embodiments described below. Those skilled in the art can and should know that any simple changes or substitutions based on the spirit of the present invention should fall within the protection scope claimed by the present invention.

[0065] Example 1

[0066] like Figure 4 As shown, a method for fabricating an optical-electric field coupled detection electrode includes the following steps:

[0067] 1) Fabrication of WO3 electrode: Dissolve 1.21 mmol Na2WO4·2H2O and 1.06 mmol (NH4)2C2O4·H2O in 33 mL of deionized water, add 9 mL HCl while stirring, then add 8 mL H2O2 solution and stir for 10 min. Add 30 mL anhydrous C2H6O and stir for 10 min. Synthesize WO3 film on n-Si / Ag (1 cm × 2 cm) by water bath heating (80 °C, 200 min, n-Si is placed vertically in 40 mL WO3 solution), and then anneal at 500 °C for 2 h.

[0068] 2) Make WO3 / Bi 10 O6S9 electrode: 0.50 g Bi(NO3)3·5H2O was dissolved in 5.60 g C6H under heating and stirring. 15 In NO3, until a clear solution is obtained, after natural cooling, 0.79 g CH4N2S and 0.5 mL NH3·H2O are added to the solution. Then, the solution volume is diluted to 50 mL in a volumetric flask by adding deionized water. Then, 5 mL of the precursor solution is poured into a test tube and the substrate is immersed in the solution. Finally, the test tube is placed in water at 100 °C and kept in a constant temperature water bath for 60 min. Finally, the obtained composite electrode is washed twice with deionized water and then air-dried naturally.

[0069] 3) Preparation of Si / Ag / WO3 / Bi 10 O6S9 / P2O3 / black phosphorus working electrode: In the prepared WO3 / Bi 10 On the O6S9 electrode, at 3000 r·min -1 At a rotation speed of 25°C and a humidity of about 60%, black phosphorus was spin-coated twice every 5 minutes, each time for 30 seconds. After spin-coating, the mixture was placed in a hot table in a glove box filled with argon and annealed at a constant temperature of 300°C for 30 minutes.

[0070] The Si / Ag / WO3 / Bi prepared in Example 1 10 The mass percentages of each element in the O6S9 / P2O3 / black phosphorus working electrode are W = 44%, Si = 17%, O = 20%, Bi = 16%, S = 2%, Ag = 0.2%, P = 0.1% (with trace amounts of impurity elements such as Pt and Al);

[0071] The working electrode structure is as follows: a 920nm thick WO3 thin film on an n-Si / Ag substrate, wherein the area of ​​a single WO3 crystal is (940nm*920nm) and the thickness is 180μm; and a 200nm thick Bi layer is formed on the WO3 thin film. 10 O6S9 thin film, Bi 10The O6S9 thin film is a nanoparticle structure that uniformly fills the gaps between WO3 nanoplates; black phosphorus nanosheets are uniformly coated on WO3 / Bi. 10 In the interstitial space of O6S9, P2O3 is Bi 10 A dense oxide film with a thickness of 20 nm is formed at the interface between O6S9 and black phosphorus.

[0072] Example 2

[0073] like Figure 4 As shown, a method for fabricating an optical-electric field coupled detection electrode includes the following steps:

[0074] 1) Fabrication of WO3 electrode: Dissolve 1.25 mmol Na2WO4·2H2O and 1.16 mmol (NH4)2C2O4·H2O in 36 mL of deionized water, add 12 mL HCl while stirring, then add 10 mL H2O2 solution and stir for 15 min. Add 35 mL of anhydrous C2H6O and stir for 15 min. Synthesize WO3 film on n-Si / Ag (1 cm × 2 cm) by water bath heating (85 °C, 250 min, n-Si is placed vertically in 50 mL WO3 solution), and then anneal at 550 °C for 3 h.

[0075] 2) Make WO3 / Bi 10 O6S9 electrode: 0.45g Bi(NO3)3·5H2O was dissolved in 5.20g C6H under heating and stirring. 15 In NO3, until a clear solution is obtained, after natural cooling, 0.69 g CH4N2S and 0.4 mL NH3·H2O are added to the solution. Then, the solution volume is diluted to 45 mL in a volumetric flask by adding deionized water. Then, 5 mL of the precursor solution is poured into a test tube and the substrate is immersed in the solution. Finally, the test tube is placed in water at 100 °C and kept in a constant temperature water bath for 50 min. Finally, the obtained composite electrode is washed three times with deionized water and then air-dried naturally.

[0076] 3) Preparation of Si / Ag / WO3 / Bi 10 O6S9 / P2O3 / black phosphorus working electrode: In the prepared WO3 / Bi 10 On the O6S9 electrode, at 2500 r·min -1 At a rotation speed of 24℃ and 50% humidity, black phosphorus was spin-coated twice every 3 minutes, each time for 20 seconds. After spin-coating, the mixture was placed in a hot table in a glove box filled with argon and annealed at a constant temperature of 350℃ for 40 minutes.

[0077] The prepared Si / Ag / WO3 / Bi 10The mass percentages of each element in the O6S9 / P2O3 / black phosphorus working electrode are W = 43%, Si = 16%, O = 21%, Bi = 17%, S = 2%, Ag = 0.2%, P = 0.2% (with trace amounts of impurity elements such as Pt and Al);

[0078] The working electrode structure is as follows: a 960nm thick WO3 thin film on an n-Si / Ag substrate, wherein the area of ​​a single WO3 crystal is (980nm*940nm) and the thickness is 200μm; and a 230nm thick Bi layer is formed on the WO3 thin film. 10 O6S9 thin film, Bi 10 The O6S9 thin film is a nanoparticle structure that uniformly fills the gaps between WO3 nanoplates; black phosphorus nanosheets are uniformly coated on WO3 / Bi. 10 In the interstitial space of O6S9, P2O3 is Bi 10 A dense oxide film with a thickness of 30 nm is formed at the interface between O6S9 and black phosphorus.

[0079] Example 3

[0080] like Figure 2 , Figure 5 As shown, an optical field-electric field coupling detection device includes a sensing module 1, an optical device module 2, a microprocessor module 3, a power management module 4, a wireless module 5, and a biofeedback module 6.

[0081] Sensing module 1 is a closed structure composed of Si / Ag / WO3 / Bi. 10 The module consists of an O6S9 / P2O3 / black phosphorus working electrode, a reference electrode, a counter electrode, and a Na2SO3 electrolyte solution; the optical device module 2 consists of two identical green LEDs; the microprocessor module 3 mainly includes a preamplifier, a bandpass filter, and a digital signal processor; the power management module 4 consists of a power management chip and an ultra-thin lithium battery; the wireless module 5 consists of a wireless transceiver chip and a pair of antennas; and the biofeedback module 6 mainly consists of a scroll system controlled by a micro stepper motor.

[0082] The power management module 4 is connected to the power ports of the sensing module 1, optical device module 2, microprocessor module 3, wireless module 5, and biofeedback module 6, respectively. The ports of the microprocessor module 3 include a data acquisition input terminal, a control output terminal, a power input terminal, a data output terminal, and a control terminal, wherein the data acquisition input terminal is connected to the Si / Ag / WO3 / Bi of the sensing module 1, respectively. 10The working electrode, reference electrode, and counter electrode of the O6S9 / P2O3 / black phosphorus are connected to the control input of the biofeedback module 6, the power input is connected to the output of the power management module 4, and the data output and control are connected to the data input and data output of the wireless module 5. The positive and negative electrodes of the lithium battery sheet are connected to the power management module 4 through wires passing through the sandwich panel.

[0083] The power management module 4 is sequentially connected to the three electrodes (Si / Ag / WO3 / Bi) of the sensing module 1. 10 The O6S9 / P2O3 / black phosphorus working electrode, reference electrode, and counter electrode test system, the LED light source of the optical device module 2, the microprocessor chip of the microprocessor module 3, the wireless transceiver chip of the wireless module 5, and the scroll system of the biofeedback module 6 are powered by these components. Next, the microprocessor chip of the microprocessor module 3 connects to the three-electrode test system of the sensing module 1 and receives the current signal collected by the three-electrode test system of the sensing module 1. Then, the wireless transceiver chip of the wireless module 5 receives the signal processed by the microprocessor chip of the microprocessor module 3 and transmits it to the peripheral device via the antenna of the wireless module 5 connected by a wire. Finally, the scroll system of the biofeedback module 6 receives instructions from the microprocessor chip of the microprocessor module 3 and is always ready to receive working signals.

[0084] The optical-electric field coupling detection device in this embodiment can be designed as a head-mounted device, worn on the human head, such as... Figure 3 As shown.

[0085] Example 4

[0086] A molar monitoring feedback system based on an optical field-electric field coupling detection device includes a sensing module 1, an optical device module 2, a microprocessor module 3, a power management module 4, a wireless module 5, and a biofeedback module 6.

[0087] The sensing module 1 is used to detect the electromyographic signal of the temporalis muscle. The optical device module 2 is used to cooperate with the sensing module 1 to perform optical signal heart rate monitoring. The power management module 4 outputs a bias voltage to the sensing module 1 and outputs a voltage at a frequency of (200~250) Hz to enable the optical device module 2 to work. The microprocessor module 3 receives the electromyographic intensity data of the temporalis muscle and the heart rate fluctuation data collected by the sensing module 1, amplifies, filters and extracts the data through the microprocessor module 3, and finally outputs the data to an external device through the wireless module 5.

[0088] The workflow of bruxism biofeedback is as follows: Figure 6As shown, the biofeedback module 6 can provide feedback to the user after the microprocessor module 3 analyzes the user's teeth grinding data and it exceeds a certain threshold, so as to make the user stop the incorrect teeth grinding activity. It consists of a scroll system and uses a telescopic headband to correct the teeth grinding activity. The scroll system contains a micro stepper motor, which works for a fixed time after receiving the teeth grinding signal to achieve a "tightening" effect so that the bruxism patient stops the incorrect teeth grinding activity.

[0089] The specific work process is as follows:

[0090] The microprocessor module records the initial value of the stepper motor's operation and sets the maximum number of pulses sent to the stepper motor to 100. It also sets the direction command of the stepper motor to reverse. When the system determines that the molar activity is in progress, the microprocessor module sends 50 processed pulse signals to the stepper motor, thereby controlling the stepper motor to complete a 90° angular displacement. When the system determines that the molar activity has stopped, the microprocessor module sets the direction command of the stepper motor to reverse and sends 50 pulse signals to the stepper motor, so that the headband returns to its initial longest state.

[0091] Example 5

[0092] A detection method using the aforementioned molar monitoring feedback system includes the following steps:

[0093] S1. After the user puts on the monitoring feedback system and turns on the power, the microprocessor module detects and records the background current I of the environment. S1 It is 2μA;

[0094] S2. The power management module controls the application of a 1V bias voltage to the sensing module, and the optical device module works continuously.

[0095] S3, the sensing module detects and records the current intensity I within a 5-second period after power-on at a frequency of 5Hz. 1～25 ;

[0096] S4. The microprocessor module receives the timing current intensity values, compares the data sizes, and calculates the average of the three maximum values, I. max , will I max -I S1 Compare with the engineering setting value I0;

[0097] S5, if (I max -I S1 If I < I0, the microprocessor module sends a command to the wireless module to send data to the peripheral device, prompting the user to adjust the device position; if I max -I S1 If I > I0, then data is sent to the peripheral device, the device is aligned, and the predetermined program can be executed.

[0098] Example 6

[0099] A pre-defined procedure used to accurately determine whether bruxism has occurred and to take biofeedback measures to stop bruxism, such as... Figure 7 , Figure 8 As shown:

[0100] S1, The microprocessor module detects and records the background current I of the environment. S1 3μA;

[0101] S2. The power management module controls the application of a 1V bias voltage to the sensing module and controls the power supply to the optical device module at a frequency of 200Hz.

[0102] S3. The microprocessor module synchronously samples the signal from the sensor module at a sampling rate of 200Hz. Every three sampling cycles are divided into an execution cycle, and the average value of the coupled field induced current during optical transmission is calculated within each execution cycle. The average value of the electric field induced current when the light is off is 50mA. The value is 5mA. Since the coupled field induced current measured when the light is on is generated by the superposition of the electromyographic field and the reflected light field, the average value of the induced current of the light field in one execution cycle is (50-5)mA.

[0103] The average value of the coupled field induced current when the light is on and the average value of the electric field induced current when the light is off are calculated by the following formula:

[0104]

[0105]

[0106] The average value of the induced current in the light field can then be calculated:

[0107] S4, the timing signals of the electric field and the light field are amplified and filtered by the preamplifier and bandpass filter of the microprocessor module. Finally, the data is analyzed and processed by the microprocessor chip and output to the wireless transceiver chip of the wireless module, and controls whether the scroll system of the biofeedback module works.

[0108] Example 7

[0109] The Si / Ag / WO3 / Bi prepared in Example 1 10 Energy level diagram of the O6S9 / P2O3 / black phosphorus working electrode, as shown Figure 9 As shown;

[0110] Among them, the valence band top and conduction band bottom potentials of n-Si are 0.69 eV and 0.44 eV, respectively; the valence band top and conduction band bottom potentials of WO3 are 3.34 eV and 0.83 eV, respectively; and Bi...10 The valence band top and conduction band bottom potentials of O6S9 are 1.71 eV and 0.33 eV, respectively, while those of black phosphorus are 0.69 eV and 0.81 eV, respectively.

[0111] Electrons are excited by photons and transition from the valence band to the conduction band, becoming free electrons. Driven by the built-in electric field and the applied bias voltage, negatively charged electrons drift from n-Si / Ag to black phosphorus to participate in the reduction reaction; positively charged holes drift from black phosphorus to n-Si / Ag to participate in the oxidation reaction. The applied bias voltage accelerates the separation of electrons and holes, allowing the entire electrochemical reaction to proceed smoothly.

[0112] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions or improvements made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. An optical field-electric field coupling detection electrode, characterized by, The light field-electric field coupling detection electrode is Si / Ag / WO3 / Bi 10 O6S9 / P2O3 / black phosphorus working electrode Si / Ag as the substrate, the mass percentage of each element is W=(40-50)%, Si=(15-25)%, O=(15-25)%, Bi=(10-20)%, S=(1-5)%, Ag=(0.1-1)%, and P=(0-0.5)%; The Si is n-Si, and the surface of the n-Si is attached with an Ag layer with a thickness of (50-150) nm; The WO3 thin film is a nanoplate-like structure, vertically and intersectingly distributed on an n-Si / Ag substrate. The thickness of the WO3 film is (920~980) nm, with each individual WO3 crystal having an area of ​​(940~1000) nm * (920~980) nm and a thickness of (180~220) μm. A (200~240) nm thick Bi layer is formed on top of the WO3 film. 10 O6S9 thin film, Bi 10 The O6S9 thin film is a nanoparticle structure that is uniformly filled in the gaps between WO3 nanoplates. The black phosphorus nanosheet uniformly covers the WO3 / Bi 10 P2O3 is Bi 10 A dense oxide film with a thickness of (20~40) nm is formed at the interface between the P2O3 and the black phosphorus, and a P-O bond is formed between P2O3 and black phosphorus.

2. A method of fabricating the optical field-electric field coupling detection electrode of claim 1, wherein, The method comprises the following steps: 1) preparing a WO3 electrode: dissolving Na2WO4·2H2O and (NH4)2C2O4·H2O in deionized water, sequentially adding HCl solution, H2O2 solution and anhydrous C2H5O, preparing a WO3 thin film on an n-Si / Ag substrate, and then performing annealing treatment; 2) WO3 / Bi 10 O6S9 electrode: Bi(NO3)3-5H2O was dissolved in C6H 15 NO3, after cooling, CH4N2S and NH3-H2O were added, the substrate was immersed in the solution and heated in a water bath, the obtained electrode was washed with deionized water and then naturally dried in air; 3) WO3 / Bi 10 O6S9 / P2O3 / Black phosphorus electrode: under the conditions of temperature (20~25) ℃, humidity (50~60) %, spin-coat black phosphorus solution on the prepared WO3 / Bi 10 O6S9 electrode, and after spin-coating, place it in a glove box hot stage with water content (0~0.15) ppm and oxygen content (0~0.2) ppm for (200~350) ℃ constant temperature annealing treatment for (20~40) min.

3. The method of claim 2, wherein the method further comprises: The concentration of the black phosphorus solution in the step 3) is (1.2~1.5) mg·mL -1 The rotating speed of the homogenizer is (2500~3000) r·min -1 The spin coating is performed twice every (3~5) min.

4. An optical field-electric field coupling detection device, characterized by, The sensor module, the light device module, the microprocessor module, the power management module, the wireless module and the biofeedback module are connected to each other. The sensor module, the light device module, the microprocessor module, the power management module, the wireless module and the biofeedback module are connected to each other. The sensor module comprises the light field-electric field coupling detection electrode, the counter electrode, the reference electrode and the Na2SO3 electrolyte, and is used for capturing electric field signals and optical signals and converting them into electric signals. The light device module is used for providing a light source. The power management module is used for providing a power supply. The microprocessor module is used for receiving, recording and processing signals input by the sensor module and transmitting instructions to the biofeedback module. The biofeedback module is used for feedback according to the analysis result of the microprocessor module. The wireless module is used for sending diagnostic data and analysis results to an external device or receiving control signals from the external device.

5. The optical field-electric field coupling detection device of claim 4, wherein, The light device module is composed of two green LEDs with an emission wavelength of (492-520) nm, and is controlled by the power management module to flash at a frequency of (200-250) Hz.

6. The optical field-electric field coupling detection device of claim 4, wherein, The microprocessor module comprises a preamplifier, a bandpass filter and a digital signal processor. The microprocessor module is used for collecting signals from the sensor module and the light device module, and the signals are amplified by the preamplifier, filtered by the bandpass filter and analyzed and processed by the digital signal processor in sequence, and then output to the wireless module and the biofeedback module.

7. The optical field-to-electric field coupling detection device of claim 4, wherein, The power management module is connected to the power supply ports of the sensor module, the light device module, the microprocessor module, the wireless module and the biofeedback module. The port of the microprocessor module includes a data input terminal, a control output terminal, a power input terminal, a data output terminal and a control terminal, wherein the data input terminal is connected with the Si / Ag / WO3 / Bi of the sensing module respectively 10 O6S9 / P2O3 / black phosphorus working electrode, reference electrode, counter electrode, the control output terminal is connected with the control input terminal of the biofeedback module, the power input terminal is connected with the output terminal of the power management module, and the data output terminal and the control terminal are connected with the data input terminal and the data output terminal of the wireless module.

8. A molar monitoring feedback system based on the light field-electric field coupling detection apparatus of any one of claims 4-7, characterized in that, The sensor module, the light device module, the microprocessor module, the power management module, the wireless module and the biofeedback module are connected to each other. The sensing module is used for detecting the temporal muscle electromyography signal, the optical device module is used for cooperating with the sensing module to perform optical signal heart rate monitoring, the power management module outputs a bias voltage to the sensing module, and the optical device module is operated by outputting a voltage at a frequency of (200-250) Hz, the microprocessor module receives the temporal muscle electromyography intensity data and the heart rate fluctuation data collected by the sensing module, and the data is amplified, filtered and extracted via the microprocessor module, and finally output to an external device by the wireless module; The biological feedback module gives feedback to the user to stop the wrong tooth grinding activity after the microprocessor module analyzes the user's tooth grinding data exceeding the set threshold (0.5-1) mV, and the biological feedback module includes a reel system, the reel system includes a micro stepping motor, and works for a set time (2-8) s after receiving the tooth grinding signal, so as to achieve the effect of tightening and make the bruxism patient stop the wrong tooth grinding activity.

9. A bruxism monitoring feedback system according to claim 8, wherein, The tooth grinding detection unit and the feedback unit are included. The tooth grinding detection unit includes the following detection steps: S1, after the user wears the monitoring feedback system and starts the power supply, the microprocessor module detects and records the background current of the environment ; S2, the power management module controls the bias voltage applied to the sensing module, and the optical device module works continuously; S3, the sensor module detects and records the current intensity in the period of (3-5) seconds after the power supply is started at a frequency of (5-10) Hz (15 50); S4, the microprocessor module receives the current intensity values in time sequence, compares the data size, calculates the average value of the three maximum values , the engineered set value is compared with the measured value S5, if then the microprocessor module issues an instruction to the wireless module to send data to the external device prompting the user to adjust the device position; if then the data is sent to the external device and the device is aligned. The feedback unit includes the following feedback steps: S1, the microprocessor module detects and records the background current of the environment ; S2, the power management module controls the bias voltage applied to the sensing module, and the optical device module works continuously; S3, the microprocessor module synchronously samples the signal transmitted by the sensor module at a sampling rate of 200-250 Hz, and divides each three sampling periods into an execution period, and calculates the average value of the coupling field induced current during the light-on time and the average value of the electric field induced current during the light-off time Since the coupling field induced current measured during the light-on time is generated by the superposition of the electromyographic field and the reflected light field, the average value of the light field induced current during an execution period can be obtained from ​​ S4, the time sequence signals of the electric field and the optical field are amplified and filtered via the preamplifier and the band-pass filter of the microprocessor module, and finally the data is output to the wireless transceiver chip of the wireless module after being analyzed and processed by the microprocessor chip, and whether the reel system of the biological feedback module works or not is controlled.

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