Material receiving device for wafer recycling

Abstract

The present invention relates to a material receiving device for wafer recycling, which includes a base assembly and a first lifting assembly, and further includes a second lifting assembly having the same structure as the first lifting assembly. The first lifting assembly and the second lifting assembly are mirror-distributed and arranged on both sides of the base assembly along the X-axis direction. The present invention adopts a double cassette structure. When one cassette is full, it automatically exits, and the second cassette enters for material receiving, leaving sufficient time for taking, placing, and replacing the cassette. Through the structural setting of the lifting table including a lifting table moving plate and a lifting table bottom plate, and the cooperation of the third guide rail assembly, guide shaft, compression spring, and sensor unit, it has the function of impact protection and alarm.

Description

Technical Field

[0001] The present invention relates to the technical field related to wafer processing, and in particular to a material receiving device for wafer recycling. Background Art

[0002] The process of chip manufacturing is complex and has many processes. Among them, the loading and unloading of wafers is one of the links. Currently, the loading and unloading of equipment is basically equipped with a single material box and replaced manually. If the replacement is not timely, the machine needs to stop waiting, resulting in reduced efficiency.

[0003] In view of the above-mentioned defects, the designer actively conducts research and innovation in order to create a material receiving device for wafer recycling, making it more valuable in the industry. Summary of the Invention

[0004] To solve the above technical problems, the object of the present invention is to provide a material receiving device for wafer recycling.

[0005] To achieve the above object, the present invention adopts the following technical solutions:

[0006] A material receiving device for wafer recycling includes a base assembly and a first lifting assembly, and further includes a second lifting assembly having the same structure as the first lifting assembly. The first lifting assembly and the second lifting assembly are mirror-symmetrically distributed on both sides of the base assembly along the X-axis direction;

[0007] The base assembly includes a fixed bottom plate, a first guide rail assembly, a horizontal switching motor, and a second guide rail assembly. The horizontal switching motor is located on the fixed bottom plate between the first guide rail assembly and the second guide rail assembly. A pulley is provided on the fixed bottom plate on the positive Y-axis side of the horizontal switching motor, and the output shaft of the horizontal switching motor is connected to the pulley through a horizontal switching synchronous belt. The first guide rail assembly is located on the fixed bottom plate on the negative X-axis side of the horizontal switching motor, and the second guide rail assembly is located on the fixed bottom plate on the positive X-axis side of the horizontal switching motor, and both the first guide rail assembly and the second guide rail assembly are distributed along the Y-axis direction;

[0008] The first lifting assembly or the second lifting assembly includes a horizontal switching moving plate, a lifting motor, a lifting shaft, and a lifting table. The bottom of the horizontal switching moving plate is connected to the first guide rail assembly or the second guide rail assembly. A synchronous belt connecting plate is provided on the side of the horizontal switching moving plate facing the horizontal switching motor, and the synchronous belt connecting plate is connected to the horizontal switching synchronous belt. A lifting motor and a lifting shaft are provided on the horizontal switching moving plate, the output shaft of the lifting motor is connected to the lifting shaft through a lifting switching synchronous belt pulley assembly, and a lifting table is connected to the lifting shaft, and the lifting table can move along the lifting shaft in the Z-axis direction.

[0009] As a further improvement of the present invention, the lifting table sequentially includes a lifting table moving plate and a lifting table bottom plate from top to bottom. The lifting table bottom plate is connected to the lifting shaft. A plurality of third guide rail assemblies distributed along the Y-axis direction are arranged on the lifting table bottom plate. The lifting table moving plate is connected to the third guide rail assemblies. An upper connecting plate and a lower connecting plate are sequentially arranged along the Y-axis direction at the position between the lifting table moving plate and the lifting table bottom plate. The upper connecting plate is connected to the lifting table moving plate, and the lower connecting plate is connected to the lifting table bottom plate. A guide shaft is also arranged along the Y-axis direction at the position between the upper connecting plate and the lower connecting plate. The guide shaft passes through the central hole of the compression spring along the Y-axis direction, and the compression spring is pressed between the upper connecting plate and the lower connecting plate.

[0010] As a further improvement of the present invention, a sensor unit is also arranged between the lifting table moving plate and the lifting table bottom plate.

[0011] As a further improvement of the present invention, the sensor unit includes a mutually cooperating induction piece and a sensor. The induction piece is installed at the bottom of the lifting table moving plate, and the sensor is installed on the lifting table bottom plate.

[0012] As a further improvement of the present invention, a plurality of fourth guide rail assemblies distributed along the Z-axis direction are also arranged on the lifting shaft, and the lifting table is connected to the fourth guide rail assemblies.

[0013] By means of the above solution, the present invention has at least the following advantages:

[0014] The present invention adopts a double magazine structure. When one magazine is full, it automatically exits, and the second magazine enters for material collection, leaving sufficient time for taking, placing, and replacing the magazine; through the structural setting of the lifting table including the lifting table moving plate and the lifting table bottom plate, and the cooperation of the third guide rail assemblies, the guide shaft, the compression spring, and the sensor unit, it has the function of impact protection and alarm.

[0015] The above description is only an overview of the technical solution of the present invention. In order to be able to understand the technical means of the present invention more clearly and implement it according to the content of the specification, the following takes the preferred embodiments of the present invention and combines with the attached drawings to describe in detail as follows. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following will briefly introduce the drawings required to be used in the embodiments. It should be understood that the following drawings only show some embodiments of the present invention, so they should not be regarded as limiting the scope. For those of ordinary skill in the art, without creative efforts, other related drawings can also be obtained according to these drawings.

[0017] Figure 1 is a schematic structural diagram of a material collection device for wafer recycling according to the present invention;

[0018] Figure 2 is Figure 1 the structural schematic diagram of the middle base assembly;

[0019] Figure 3 is Figure 1 the structural schematic diagram of the first lifting assembly in

[0020] Figure 4 is Figure 3 the side view of one side;

[0021] Figure 5 is Figure 4 the cross-sectional view of the A-A section in

[0022] Among them, the meanings of the various reference numerals in the figure are as follows.

[0023] 1 Base assembly 2 First lifting assembly

[0024] 3 Second lifting assembly 4 Magazine

[0025] 5 Fixed bottom plate 6 First guide rail assembly

[0026] 7 Horizontal switching motor 8 Belt pulley

[0027] 9 Second guide rail assembly 10 Horizontal switching moving plate

[0028] 11 Synchronous belt connecting plate 12 Lifting motor

[0029] 13 Lifting shaft 14 Lifting platform

[0030] 15 Lifting platform moving plate 16 Lifting platform bottom plate

[0031] 17 Inductive sheet 18 Sensor

[0032] 19 Third guide rail assembly 20 Fourth guide rail assembly

[0033] 21 Upper connecting plate 22 Guide shaft

[0034] 23 Compression spring 24 Lower connecting plate Specific embodiments

[0035] The following combines the drawings and embodiments to further describe in detail the specific embodiments of the present invention. The following embodiments are used to illustrate the present invention, but are not used to limit the scope of the present invention.

[0036] To enable those skilled in the art to better understand the solution of the present invention, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. The components of the embodiments of the present invention described and illustrated herein can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the present invention provided in the drawings is not intended to limit the scope of the claimed invention, but merely represents the selected embodiments of the present invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without creative efforts belong to the scope of protection of the present invention.

[0037] Embodiment

[0038] As Figures 1 to 5 shown,

[0039] A material receiving device for wafer recycling includes a base assembly 1 and a first lifting assembly 2, and further includes a second lifting assembly 3 having the same structure as the first lifting assembly 2. The first lifting assembly 2 and the second lifting assembly 3 are mirror-distributed on both sides of the base assembly 1 along the X-axis direction.

[0040] The base assembly 1 includes a fixed bottom plate 5, a first guide rail assembly 6, a horizontal switching motor 7, and a second guide rail assembly 9. The horizontal switching motor 7 is located on the fixed bottom plate 5 between the first guide rail assembly 6 and the second guide rail assembly 9. A pulley 8 is provided on the fixed bottom plate 5 on the positive Y-axis side of the horizontal switching motor 7. The output shaft of the horizontal switching motor 7 is connected to the pulley 8 through a horizontal switching synchronous belt. The first guide rail assembly 6 is located on the fixed bottom plate 5 on the negative X-axis side of the horizontal switching motor 7, and the second guide rail assembly 9 is located on the fixed bottom plate 5 on the positive X-axis side of the horizontal switching motor 7. Both the first guide rail assembly 6 and the second guide rail assembly 9 are distributed along the Y-axis direction.

[0041] The first lifting component 2 or the second lifting component 3 includes a horizontal switching motion plate 10, a lifting motor 12, a lifting shaft 13, and a lifting table 14. The bottom of the horizontal switching motion plate 10 is connected to the first guide rail component 6 or the second guide rail component 9. On one side of the horizontal switching motion plate 10 facing the horizontal switching motor 7, there is a synchronous belt connecting plate 11, and the synchronous belt connecting plate 11 is connected to the horizontal switching synchronous belt. On the horizontal switching motion plate 10, there are a lifting motor 12 and a lifting shaft 13. The output shaft of the lifting motor 12 is connected to the lifting shaft 13 through a lifting switching synchronous pulley assembly. A lifting table 14 is connected to the lifting shaft 13, and the lifting table 14 can move along the lifting shaft 13 in the Z-axis direction. There are also several fourth guide rail components 20 distributed along the Z-axis direction on the lifting shaft 13, and the lifting table 14 is connected to the fourth guide rail components 20. Among them, the output shaft of the lifting motor 12 drives the lifting shaft 13 through the lifting switching synchronous pulley to achieve lifting motion. The lifting shaft 13 can be a common screw motion mechanism, and the lifting table 14 can be driven by the lifting shaft 13 to achieve synchronous lifting motion.

[0042] The lifting table 14 successively includes a lifting table motion plate 15 and a lifting table bottom plate 16 from top to bottom. The lifting table bottom plate 16 is connected to the lifting shaft 13. On the lifting table bottom plate 16, there are several third guide rail components 19 distributed along the Y-axis direction, and the lifting table motion plate 15 is connected to the third guide rail components 19. Between the lifting table motion plate 15 and the lifting table bottom plate 16, an upper connecting plate 21 and a lower connecting plate 24 are successively arranged along the Y-axis direction. The upper connecting plate 21 is connected to the lifting table motion plate 15, and the lower connecting plate 24 is connected to the lifting table bottom plate 16. A guide shaft 22 is also arranged along the Y-axis direction between the upper connecting plate 21 and the lower connecting plate 24. The guide shaft 22 passes through the central hole of the compression spring 23 along the Y-axis direction, and the compression spring 23 is pressed between the upper connecting plate 21 and the lower connecting plate 24.

[0043] A sensor unit is also arranged between the lifting table motion plate 15 and the lifting table bottom plate 16. The sensor unit includes a cooperating sensing piece 17 and a sensor 18. The sensing piece 17 is installed at the bottom of the lifting table motion plate 15, and the sensor 18 is installed on the lifting table bottom plate 16.

[0044] Among them, the above-mentioned multiple guide rail components are all common linear motion guide rail components in which the guide rail and the slider cooperate with each other.

[0045] A brief description of the working principle and working process of the present invention:

[0046] The lifting motor 12 drives the lifting shaft 13 through the lifting switching synchronous belt, moving the lifting tables 14 on the first lifting component 2 and the second lifting component 3 up and down, so that one of the two lifting tables 14 is at a high position and the other is at a low position.

[0047] The horizontal switching motor 7 drives the first lifting assembly 2 and the second lifting assembly 3 to move in the horizontal direction through the horizontal switching synchronous belt to achieve the exchange of two positions; after being in place, the first lifting assembly 2 and the second lifting assembly 3 can move freely up and down respectively.

[0048] Before horizontal switching, it must be ensured that one of the lifting platforms 14 of the first lifting assembly 2 and the second lifting assembly 3 is in a high position and the other is in a low position; if the height difference between the two lifting platforms is not enough, horizontal switching will be performed, and the two lifting platforms will collide, the lifting platform moving plate 15 will slide along the third guide rail assembly 19, the compression spring 23 will be compressed, and the induction sheet 17 on the lifting platform moving plate 15 will also move together, and the induction sheet 17 will move into the sensor 18, and the sensor 18 will send out an alarm signal, indicating an abnormal situation; manual intervention will separate the two lifting platforms, the compression spring 23 will return to its original state, the induction sheet 17 will leave the sensor 18, and the alarm signal will be released.

[0049] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", etc. are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly referring to the number of technical features indicated. Therefore, features defined as "first", "second", etc. may explicitly or implicitly include one or more of the features. In the description of the present invention, unless otherwise specified, "multiple" means two or more.

[0050] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be the internal connection of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood through specific circumstances.

[0051] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. It should be pointed out that a person skilled in the art can make several improvements and modifications without departing from the technical principles of the present invention, and these improvements and modifications should also be regarded as within the scope of protection of the present invention.

Claims

1. The receiving device for wafer recycling includes a base assembly (1) and a first lifting assembly (2), and is characterized in that, It further includes a second lifting component (3) having the same structure as the first lifting component (2), and the first lifting component (2) and the second lifting component (3) are mirror-distributed and arranged on both sides of the base component (1) along the X-axis direction; The base component (1) includes a fixed base plate (5), a first guide rail component (6), a horizontal switching motor (7) and a second guide rail component (9). The horizontal switching motor (7) is located on the fixed base plate (5) between the first guide rail component (6) and the second guide rail component (9). A pulley (8) is arranged on the fixed base plate (5) on the positive Y-axis side of the horizontal switching motor (7). The output shaft of the horizontal switching motor (7) is connected to the pulley (8) through a horizontal switching synchronous belt. The first guide rail component (6) is located on the fixed base plate (5) on the negative X-axis side of the horizontal switching motor (7), and the second guide rail component (9) is located on the fixed base plate (5) on the positive X-axis side of the horizontal switching motor (7), and both the first guide rail component (6) and the second guide rail component (9) are arranged along the Y-axis direction; The first lifting component (2) or the second lifting component (3) includes a horizontal switching moving plate (10), a lifting motor (12), a lifting shaft (13) and a lifting platform (14). The bottom of the horizontal switching moving plate (10) is connected to the first guide rail component (6) or the second guide rail component (9). A synchronous belt connecting plate (11) is arranged on the side of the horizontal switching moving plate (10) facing the horizontal switching motor (7), and the synchronous belt connecting plate (11) is connected to the horizontal switching synchronous belt. A lifting motor (12) and a lifting shaft (13) are arranged on the horizontal switching moving plate (10). The output shaft of the lifting motor (12) is connected to the lifting shaft (13) through a lifting switching synchronous belt pulley assembly. A lifting platform (14) is connected to the lifting shaft (13), and the lifting platform (14) can move along the lifting shaft (13) in the Z-axis direction; The lifting platform (14) sequentially includes a lifting platform moving plate (15) and a lifting platform base plate (16) from top to bottom. The lifting platform base plate (16) is connected to the lifting shaft (13). A plurality of third guide rail components (19) arranged along the Y-axis direction are arranged on the lifting platform base plate (16). The lifting platform moving plate (15) is connected to the third guide rail components (19). An upper connecting plate (21) and a lower connecting plate (24) are sequentially arranged along the Y-axis direction between the lifting platform moving plate (15) and the lifting platform base plate (16). The upper connecting plate (21) is connected to the lifting platform moving plate (15), and the lower connecting plate (24) is connected to the lifting platform base plate (16). A guide shaft (22) is also arranged along the Y-axis direction between the upper connecting plate (21) and the lower connecting plate (24). The guide shaft (22) passes through the central hole of the compression spring (23) along the Y-axis direction, and the compression spring (23) is pressed between the upper connecting plate (21) and the lower connecting plate (24); A sensor unit is also provided between the lifting table moving plate (15) and the lifting table bottom plate (16); The sensor unit includes a mutually cooperating induction sheet (17) and a sensor (18). The induction sheet (17) is installed at the bottom of the lifting table moving plate (15), and the sensor (18) is installed on the lifting table bottom plate (16).

2. The receiving device for wafer recycling according to claim 1, characterized in that, A plurality of fourth guide rail assemblies (20) distributed along the Z-axis direction are further provided on the lifting shaft (13), and the lifting table (14) is connected to the fourth guide rail assemblies (20).

Images