Device and method for calibrating concentricity of chip nozzle and ejector pin

Abstract

The present invention discloses a device and method for calibrating the concentricity of a chip nozzle and a thimble. By using a pre-inspection camera, it not only realizes image acquisition of the chip but also can calibrate the positions of the nozzle and the thimble with the pre-inspection camera, eliminating the need to additionally install a magnifying glass or a microscope and saving some complicated structures. Among them, an adjustable pre-inspection lens adjustment block is arranged on the pre-inspection camera module to ensure the concentricity of the nozzle and the pre-inspection camera, which is both simple and economical. And a manual slide table A and a manual slide table B are arranged on the thimble module to adjust the X / Y directions of the thimble module. Thus, the concentricity of the nozzle and the thimble can be quickly and accurately calibrated, avoiding excessive deviation in the pick-up position.

Description

Technical Field

[0001] The present invention relates to the technical field of chip detection, and particularly to a device and method for calibrating the concentricity of a chip suction nozzle and a thimble. Background Art

[0002] Generally, after a chip is cut, its appearance needs to be detected. Currently, most detections are performed on the entire chip wafer, and this type of detection can only detect the upper surface of the chip; in the chip appearance detection process, it is also necessary to detect a single chip, that is, to detect the front, back, and four sides of the chip. Therefore, it is necessary to individually remove the chip from the wafer and place it on a platform for detection, and then move it to another wafer tray. In the chip picking structure, the most commonly used is still the thimble and suction nozzle mode. Different chips correspond to different suction nozzle and thimble structures, and the corresponding picking methods also vary.

[0003] In the existing method of picking chips using a thimble and a suction nozzle, it is necessary to ensure the concentricity of the suction nozzle and the thimble. Regarding how to calibrate the coaxiality of the suction nozzle and the thimble, currently in the prior art, an external magnifying glass or microscope is basically used to observe the positions of the suction nozzle and the thimble from the side. This method is rather troublesome to operate. It is necessary to set magnifying glasses or microscopes in both the X and Y directions of the suction nozzle and the thimble, and there will also be a large deviation in the calibrated positions, which is extremely inconvenient. Summary of the Invention

[0004] The main purpose of the present invention is to provide a device and method for calibrating the concentricity of a chip suction nozzle and a thimble, so as to solve the technical problem of how to quickly and accurately calibrate the concentricity of the suction nozzle and the thimble.

[0005] To achieve the above object, the present invention proposes a device for calibrating the concentricity of a chip suction nozzle and a thimble, and the device includes: a picking hand module 6, a thimble module 7, and a pre-inspection camera module 8; wherein:

[0006] The picking hand module 6 is installed on a linear motor 5, and the overall movement of the picking hand module 6 is realized through the linear motor 5; the linear motor 5 is installed on a marble platform 1; both the thimble module 7 and the pre-inspection camera module 8 are installed on the marble platform 1, the thimble module 7 is directly below the pre-inspection camera module 8, and the picking hand module 6 is movably arranged between the thimble module 7 and the pre-inspection camera module 8, and moves along the horizontal and vertical directions.

[0007] Among them, the pick-up hand module 6 includes: a Z-axis electric cylinder 601, a nozzle fixing plate 602, a slide rail mounting plate 603, a spring mounting seat 604, a first slider plate 605, a nozzle mounting seat 606, a nozzle joint 607, a nozzle locking sleeve 608, a nozzle 609, a probe 610, a micro air pipe joint 611, a probe mounting block 612, a first compression spring 613, a transparent cover plate 614, and a micro guide rail 615; the Z-axis electric cylinder 601 is installed on the linear motor 5, and the nozzle fixing plate 602 is installed on the Z-axis electric cylinder 601; the slide rail mounting plate 603 is installed at the lower end of the nozzle fixing plate 602; spring mounting seats 604 are installed at the upper and lower ends of the slide rail mounting plate 603, the micro guide rail 615 is vertically installed in the middle of the slide rail mounting plate 603, and both ends of the micro guide rail 615 are stuck in the spring mounting seats 604 respectively; the first slider plate 605 is movably installed on the micro guide rail 615, first compression springs 613 are arranged at the upper and lower ends of the first slider plate 605, one end of each first compression spring 613 presses against the first slider plate 605, and the other end presses against the spring mounting seat 604; the nozzle mounting seat 606 is fixed on the first slider plate 605, a nozzle joint 607 is installed at the extending end of the nozzle mounting seat 606, the lower end of the nozzle joint 607 is connected to the nozzle 609, and the nozzle 609 is locked by the nozzle locking sleeve 608; the nozzle mounting seat 606 is communicated with the nozzle joint 607 and the nozzle 609 to form an air path; a micro air pipe joint 611 is connected to the side of the nozzle mounting seat 606, and an external vacuum air path is connected through the micro air pipe joint 611 and is communicated with the nozzle 609 to realize the vacuum adsorption of the chip by the nozzle 609.

[0008] Among them, a transparent cover plate 614 is installed above the nozzle mounting seat 606; a light source is installed below the nozzle 609, and a pre-inspection camera is installed above the nozzle 609. When the nozzle 609 is positioning at a point, the light source passes through the internal air holes of the nozzle 609 and the transparent cover plate 614, and the position of the air holes of the nozzle 609 is observed through the pre-inspection camera installed above the nozzle 609 to ensure that the nozzle 609 is aligned with the center of the chip, realizing the calibration of the chip pick-up position; a pair of probes 610 are installed on the side of the first slider plate 605, one of the probes 610 is fixed on the first slider plate 605, and the other is fixed on the slide rail mounting plate 603 through the probe mounting block 612 to calibrate the height of the nozzle 609.

[0009] Among them, the ejector pin module 7 includes: an ejector pin assembly fixing block 701, a manual slide table A 702, an ejector pin assembly limit block 703, a bottom plate 704, a guide rail A 708, a manual displacement table slider plate 709, an ejector pin module vertical plate 710, a cylinder 737, a floating joint 738, a cylinder push rod head 739, and a guide rail C 740; where:

[0010] Install a thimble component fixing block 701 on the right side of the thimble module vertical plate 710, and install a manual displacement table slider plate 709 on the left side of the thimble module vertical plate 710; install a bottom plate 704 below the thimble component fixing block 701, and arrange a manual slide table A702 and a guide rail C740 between the thimble component fixing block 701 and the bottom plate 704 for overall adjustment of the thimble module 7. And a thimble component limit block 703 is arranged at the end of the thimble component fixing block 701 to fix the manual slide table A702; a guide rail A708 is vertically installed between the thimble module vertical plate 710 and the manual displacement table slider plate 709; install a cylinder 737 on the side of the thimble module vertical plate 710. The cylinder body of the cylinder 737 is fixed on the thimble module vertical plate 710, and the head of the movable guide rod of the cylinder 737 is fixed on the manual displacement table slider plate 709 through a cylinder push rod head 739. A floating joint 738 is also arranged at the head position of the movable guide rod of the cylinder 737; through the arrangement of the cylinder 737 and the guide rail A708, the overall vertical movement of the manual displacement table slider plate 709 is realized.

[0011] Among them, install a cylinder limit block 743 on the upper end of the thimble module vertical plate 710, and install a hydraulic buffer 744 on the cylinder limit block 743 to realize buffer limit when the cylinder 737 extends; arrange a second slider plate 714 on the left side of the manual displacement table slider plate 709, and install a manual slide table B712 and a guide rail B713 between the manual displacement table slider plate 709 and the second slider plate 714 to realize the adjustment of the second slider plate 714;

[0012] Install a thimble plate 721 and a thimble slider plate 723 on the second slider plate 714. The thimble plate 721 is installed on the left side of the second slider plate 714, and the thimble slider plate 723 is installed on the right side of the second slider plate 714; the same cam 716, stepper motor 717, induction rod 718, photoelectric sensor 719, and limit rod 720 structures are installed below both the thimble plate 721 and the thimble slider plate 723 to realize the up and down movement of the thimble plate 721 and the thimble slider plate 723.

[0013] Wherein, a guide rail is provided between the top column plate 721 and the second slider plate 714 to realize the up-and-down movement of the top column plate 721; a ball bearing 722 is installed at the bottom of the top column plate 721, and a cam 716 is movably connected below the ball bearing 722. The cam 716 is connected to a stepper motor 717. By rotating the cam 716 with the stepper motor 717, the top column plate 721 is pushed to move upward reciprocally; and an induction rod 718 and a limiting rod 720 are installed on the cam 716; the stepper motor 717 is installed on the second slider plate 714, and a photoelectric sensor 719 is installed on the second slider plate 714. The photoelectric sensor 719 cooperates with the induction rod 718 to form the origin position of the stepper motor, and the limiting rod 720 is used for the rotational limit of the cam 716;

[0014] Wherein, a tension spring B741 is installed on the second slider plate 714. One end of the tension spring B741 is fixed on the top column plate 721, and the other end is fixed on the second slider plate 714 to enable the elastic up-and-down movement of the top column plate 721; the same structure of the cam 716, stepper motor 717, induction rod 718, photoelectric sensor 719, and limiting rod 720 is also installed in the middle of the second slider plate 714. Another ball bearing 722 is also connected above the cam 716; the difference is that the other ball bearing 722 is connected to the ejector pin slider plate 723. The ejector pin slider plate 723 is connected to the second slider plate 714 through a guide rail. A tension spring B741 is connected to the lower end of the ejector pin slider plate 723, and the other end of the tension spring B741 is fixed on the second slider plate 714 to realize the elastic up-and-down movement of the ejector pin slider plate 723;

[0015] The upper end of the top column plate 721 is L-shaped and extends above the ejector pin slider plate 723; an ejector pin mounting post 724 is installed at the upper end of the ejector pin slider plate 723. The inside of the ejector pin mounting post 724 is through, and an ejector pin 731 is installed at the top thereof. The ejector pin 731 is locked by an ejector pin fixing head 730. A top block 732, a second compression spring 733, and a setscrew 736 are sequentially installed inside the ejector pin mounting post 724 along the lower side of the ejector pin 731. The compression amount of the second compression spring 733 is adjusted by the setscrew 736, and then the height of the ejector pin 731 extending out of the ejector pin mounting post 724 is adjusted.

[0016] Among them, a top head mounting seat 726 is installed at the upper end of the top column plate 721. The ejector pin mounting column 724 passes through the top head mounting seat 726 at the upper end of the top column plate 721 with a clearance. A top head 729 is threadedly connected to the top of the top head mounting seat 726. The top head 729 has a sleeve structure with an open end at one end. Tiny vent holes are evenly distributed on the closed end surface of the top head 729. An air pipe joint 742 is installed outside the top head mounting seat 726. The external vacuum air path enters the interior of the top head mounting seat 726 through the air pipe joint 742, and then enters the interior of the top head 729 along the gap between the top head mounting seat 726 and the ejector pin mounting column 724, and finally passes through the tiny vent holes evenly distributed on the surface.

[0017] A sealing ring A 734 is provided at the connection between the top head mounting seat 726 and the top column plate 721, and the ejector pin mounting column 724 and the top column plate 721 are circumferentially sealed by a sealing cover plate 725 and a sealing ring B 735. During the up and down movement of the ejector pin mounting column 724, the ejector pin 731 at its upper end expands and contracts on the vent hole at the center of the surface of the top head 729, thereby realizing the lifting and peeling of the chip.

[0018] An anti-collision cup 727 is installed outside the top head mounting seat 726, and a tension spring A 728 is wound around the anti-collision cup 727 to achieve elastic collision of the ejector pin module 7 in sequence.

[0019] Among them, the pre-inspection camera module 8 includes: a pre-inspection electric cylinder 801, an electric cylinder mounting plate 802, a pre-inspection lens mounting plate 803, a pre-inspection camera 804, a pre-inspection lens 805, a pre-inspection lens fixing block A 806, a pre-inspection lens fixing block B 807, an annular light source 808, a pre-inspection lens adjusting block 809, an annular light source mounting plate 810, and a pre-inspection lens adjusting seat 811. The pre-inspection camera module 8 is fixed on the marble support block A 2 through the electric cylinder mounting plate 802. The pre-inspection electric cylinder 801 is installed on the electric cylinder mounting plate 802, and the pre-inspection lens mounting plate 803 is installed on the slider of the pre-inspection electric cylinder 801. The pre-inspection camera 804 is installed on the pre-inspection lens 805. The pre-inspection lens 805 is locked by the pre-inspection lens fixing block A 806 and the pre-inspection lens fixing block B 807, and the pre-inspection lens fixing block B 807 is installed on the pre-inspection lens mounting plate 803 through the pre-inspection lens adjusting block 809. The pre-inspection lens adjusting seats 811 are installed on both sides of the pre-inspection lens mounting plate 803. The annular light source 808 is installed at the lower end of the pre-inspection lens mounting plate 803 through the annular light source mounting plate 810. The annular light source 808 and the pre-inspection lens 805 are coaxial. The pre-inspection camera module 8 is used to pick up the position of the chip through the camera. The pre-inspection lens adjusting seat 811 is used to adjust the position of the pre-inspection lens 805 by using screws or set screws, and then adjust the pre-inspection camera 804.

[0020] The present invention also provides a method for calibrating the concentricity of a chip nozzle and a thimble, including the following steps:

[0021] S1: Move the pick-up hand module 6 to move the nozzle 609 on the pick-up hand module 6 below the pre-inspection camera module 8, and illuminate the area below the nozzle 609;

[0022] S2: Turn on the pre-inspection camera 804 and the annular light source 808 on the pre-inspection camera module 8, and observe the position of the vent hole of the nozzle 609 through the display connected to the pre-inspection camera 804 to determine whether the vent hole is at the center of the camera's field of view;

[0023] S3: Move the linear motor 5 to move the nozzle 609 to the X-axis line of the camera's field of view;

[0024] S4: Install screws or set screws on the pre-inspection lens adjustment base 811; turn the screws or set screws to adjust the pre-inspection lens adjustment block 809, and then adjust the pre-inspection camera 804 to make the Y-axis line of the camera's field of view coincide with the nozzle 609. Save the position of the linear motor 5 at this time and fix the pre-inspection camera module 8 to achieve the concentric calibration of the pre-inspection camera 804 and the nozzle 609;

[0025] S5: Move the pick-up hand module 6 out from below the pre-inspection camera module 8, then start the cylinder 737 to lift the thimble module 7 upward, and then control the stepping motor 717 to extend the thimble 731 out of the thimble head 729;

[0026] S6: Observe the position of the thimble 731 through the pre-inspection camera 804 to determine whether the thimble 731 is at the center of the camera's field of view;

[0027] S7: Adjust the manual slide A702 on the thimble module 7 to move the thimble 731 to the Y-axis line of the camera's field of view; adjust the manual slide B712 on the thimble module 7 to move the thimble 731 to the X-axis line of the camera's field of view, thereby making the thimble 731 at the center of the camera's field of view;

[0028] S8: Fix the manual slide A702 and the manual slide B712 to complete the concentric calibration of the nozzle 609, the thimble 731, and the pre-inspection camera 804.

[0029] A device and method for calibrating the concentricity of a chip nozzle and a thimble. By using a pre-inspection camera, it can not only capture images of the chip but also calibrate the positions of the nozzle and the thimble. There is no need to additionally install a magnifier or a microscope, saving some complicated structures. Among them, an adjustable pre-inspection lens adjustment block is set on the pre-inspection camera module to ensure the concentricity of the nozzle and the pre-inspection camera, which is simple and economical. A manual slide A and a manual slide B are set on the thimble module 7 to adjust the X / Y directions of the thimble module. Thus, the concentricity of the nozzle and the thimble can be quickly and accurately calibrated, avoiding excessive deviation in the pick-up position. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 It is an isometric view A of the calibration structure of the chip nozzle, thimble, and camera;

[0031] Figure 2 It is an isometric view B of the calibration structure of the chip nozzle, thimble, and camera;

[0032] Figure 3 It is the front view of the calibration structure of the chip nozzle, thimble, and camera;

[0033] Figure 4 It is the side view of the calibration structure of the chip nozzle, thimble, and camera;

[0034] Figure 5 It is the top view of the calibration structure of the chip nozzle, thimble, and camera;

[0035] Figure 6 It is a schematic diagram of the pick-up hand nozzle structure;

[0036] Figure 7 It is the side view of the pick-up hand nozzle;

[0037] Figure 8 It is the isometric view of the thimble structure;

[0038] Figure 9 It is the front view of the thimble structure;

[0039] Figure 10 It is the sectional view A-A of the thimble structure;

[0040] Figure 11 It is the partial view B of the thimble structure;

[0041] Figure 12 It is the partial view C of the thimble structure;

[0042] Figure 13 It is the rear view of the thimble structure;

[0043] Figure 14 It is the side view of the thimble structure;

[0044] Figure 15It is a schematic diagram of the pre-inspection camera structure;

[0045] Figure 16 It is the front view of the pre-inspection camera structure;

[0046] Figure 17 It is the top view of the pre-inspection camera structure;

[0047] Figure 18 It is the side view of the pre-inspection camera structure.

[0048] Reference numerals: 1. Marble platform; 2. Marble support block A; 3. Marble support block B; 4. Marble support block C; 5. Linear motor; 6. Material picking hand module; 7. Thimble module; 8. Pre-inspection camera module;

[0049] 601. Z-axis electric cylinder; 602. Suction nozzle fixing plate; 603. Slide rail mounting plate; 604. Spring mounting seat; 605. First slider plate; 606. Suction nozzle mounting seat; 607. Suction nozzle joint; 608. Suction nozzle locking sleeve; 609. Suction nozzle; 610. Probe; 611. Micro air pipe joint; 612. Probe mounting block; 613. First compression spring; 614. Transparent cover plate; 615. Micro guide rail;

[0050] 701 Thimble assembly fixing block; 702. Manual slide table A; 703. Thimble assembly limit block; 704. Base plate; 705. Drag chain plate A; 706. Drag chain plate B; 707. Drag chain; 708. Guide rail A; 709. Manual displacement table slider plate; 710. Thimble module vertical plate; 711 Terminal transfer board; 712. Manual slide table B; 713. Guide rail B; 714. Second slider plate; 715. Fan; 716. Cam; 717. Stepper motor; 718. Induction rod; 719. Photoelectric sensor; 720. Limit rod; 721. Thimble plate; 722. Ball bearing; 723. Thimble slider plate; 724. Thimble mounting post; 725. Sealing cover plate; 726. Thimble head mounting seat; 727. Anti-collision cup; 728. Tensile spring A; 729. Thimble head; 730. Thimble fixed head; 731. Thimble; 732. Top block; 733. Second compression spring; 734. Sealing ring A; 735. Sealing ring B; 736. Set screw; 737. Cylinder; 738. Floating joint; 739. Cylinder push rod head; 740. Guide rail C; 741. Tensile spring B; 742. Air pipe joint; 743. Cylinder limit block; 744. Hydraulic buffer; 801. Pre-inspection electric cylinder; 802. Electric cylinder mounting plate; 803. Pre-inspection lens mounting plate; 804. Pre-inspection camera; 805. Pre-inspection lens; 806. Pre-inspection lens fixing block A; 807. Pre-inspection lens fixing block B; 808. Ring light source; 809. Pre-inspection lens adjustment block; 810. Ring light source mounting plate; 811. Pre-inspection lens adjustment seat. Detailed implementation manners

[0051] It should be understood that the specific embodiments described herein are only used to explain the present invention, and are not used to limit the present invention.

[0052] See attached Figures 1 to 18 As shown, the present invention proposes a device for calibrating the concentricity of a chip suction nozzle and an ejector pin, comprising three modules: a material picking hand module 6, an ejector pin module 7, and a pre-inspection camera module 8; the material picking hand module 6 is installed on a linear motor 5, and the overall movement of the material picking hand module 6 is realized by the linear motor 5; the linear motor 5 is installed on a marble support block C4; the marble support block C4 is fixed on a marble support block B3, and the marble support block B3 is fixed on a marble platform 1; the ejector pin module 7 is installed on the marble platform 1; the pre-inspection camera module 8 is installed on a marble support block A2; the ejector pin module 7 is located directly below the pre-inspection camera module 8, and the material picking hand module 6 is movably arranged between the ejector pin module 7 and the pre-inspection camera module 8, and moves in horizontal and vertical directions.

[0053] See attached Figures 6 to 7 The material picking hand module 6 includes a Z-axis electric cylinder 601, a nozzle fixing plate 602, a slide rail mounting plate 603, a spring mounting seat 604, a first slider plate 605, a nozzle mounting seat 606, a nozzle joint 607, a nozzle locking sleeve 608, a nozzle 609, a probe 610, a micro air pipe joint 611, a probe mounting block 612, a first compression spring 613, a transparent cover 614, and a micro guide rail 615; the Z-axis electric cylinder 601 is mounted on the linear motor 5, and the nozzle fixing plate 602 is mounted on the Z-axis electric cylinder 601; the slide rail mounting plate 603 is mounted on the lower end of the nozzle fixing plate 602; spring mounting seats 604 are installed at the upper and lower ends of the slide rail mounting plate 603, and the micro guide rail 615 is vertically mounted In the middle of the slide rail mounting plate 603, the two ends of the micro guide rail 615 are respectively stuck in the spring mounting seat 604; the first slider plate 605 is movably installed on the micro guide rail 615, and the upper and lower ends of the first slider plate 605 are provided with first compression springs 613, one end of the first compression spring 613 presses the first slider plate 605, and the other end presses the spring mounting seat 604, thereby making the first slider plate 605 elastic on the micro guide rail 615, and the upper and lower first compression springs 613 have the function of making the suction nozzle 609 have a certain elasticity when sucking the chip, and secondly, offset the gravity of the first slider plate 605, the suction nozzle mounting seat 606, the suction nozzle joint 607, the suction nozzle locking sleeve 608, and the suction nozzle 609 itself as much as possible.

[0054] The nozzle mounting base 606 is fixed on the first slider plate 605. A nozzle joint 607 is installed at the extending end of the nozzle mounting base 606. The lower end of the nozzle joint 607 is connected to a nozzle 609, and the nozzle 609 is locked by a nozzle locking sleeve 608. The nozzle mounting base 606 is in communication with the nozzle joint 607 and the nozzle 609 to form an air path. A micro air pipe joint 611 is connected to the side of the nozzle mounting base 606, and an external vacuum air path is connected through the micro air pipe joint 611 and is in communication with the nozzle 609, achieving the effect of vacuum adsorption of the chip by the nozzle 609.

[0055] A transparent cover plate 614 is installed above the nozzle mounting base 606. The function of the transparent cover plate 614 is that when the nozzle 609 is positioning, a light source is installed below the nozzle 609. The light source passes through the internal air holes of the nozzle 609 and the transparent cover plate 614, and then a pre-inspection camera installed above the nozzle 609 is used to observe the position of the air holes of the nozzle 609, ensuring that the nozzle 609 is aligned with the center of the chip and achieving the calibration of the chip picking position.

[0056] Furthermore, a pair of probes 610 are installed on the side of the first slider plate 605. One of the probes 610 is fixed on the first slider plate 605, and the other is fixed on the slide rail mounting plate 603 through a probe mounting block 612. The function of the probes 610 is for height calibration. Because after the nozzle 609 is replaced, the height of the nozzle 609 may not be the same as the position of the previous nozzle 609. In this case, height calibration needs to be redone. That is, after replacing the nozzle 609, the picking hand module 6 can be moved to the position of the height calibration block of the equipment, and then the Z-axis electric cylinder 601 is lowered. When the nozzle 609 touches the height calibration block, the entire first slider plate 605 is lifted by the force, and the two probes 610 are separated immediately, and the signal is disconnected. Thus, it is determined that the current height position of the nozzle 609 is the same as the position of the previous nozzle 609. Finally, this height position is remembered and saved by the software.

[0057] See Appendix Figures 8 to 14, the thimble module 7 includes a thimble component fixing block 701, a manual slide table A702, a thimble component limiting block 703, a bottom plate 704, a drag chain plate A705, a drag chain plate B706, a drag chain 707, a guide rail A708, a manual displacement table slider plate 709, a thimble module vertical plate 710, a terminal adapter plate 711, a manual slide table B712, a guide rail B713, a second slider plate 714, a fan 715, a cam 716, a stepping motor 717, an induction rod 718, a photoelectric sensor 719, a limiting rod 720, a thimble plate 721, a ball bearing 722, a thimble slider plate 723, a thimble mounting post 724, a sealing cover plate 725, a thimble head mounting seat 726, a collision-proof cup 727, a tension spring A728, a thimble head 729, a thimble fixing head 730, a thimble 731, a top block 732, a second compression spring 733, a sealing ring A734, a sealing ring B735, a set screw 736, a cylinder 737, a floating joint 738, a cylinder push rod head 739, a guide rail C740, a tension spring B741, an air pipe joint 742, a cylinder limiting block 743, and a hydraulic buffer 744.

[0058] See Figure 14 , the thimble component fixing block 701 is installed on the right side of the thimble module vertical plate 710, and the manual displacement table slider plate 709 is installed on the left side of the thimble module vertical plate 710; a bottom plate 704 is installed below the thimble component fixing block 701, and a manual slide table A702 and a guide rail C740 are arranged between the thimble component fixing block 701 and the bottom plate 704 for overall adjustment of the thimble module 7, and a thimble component limiting block 703 is arranged at the end of the thimble component fixing block 701 to fix the manual slide table A702. See Figure 11 , a guide rail A708 is vertically installed between the thimble module vertical plate 710 and the manual displacement table slider plate 709; See Figure 13 and Figure 14 , a cylinder 737 is installed on the side of the thimble module vertical plate 710, the cylinder body of the cylinder 737 is fixed on the thimble module vertical plate 710, and the head of the movable guide rod of the cylinder 737 is fixed on the manual displacement table slider plate 709 through a cylinder push rod head 739, and a floating joint 738 is also arranged at the head position of the movable guide rod of the cylinder 737; through the arrangement of the cylinder 737 and the guide rail A708, the overall vertical movement of the manual displacement table slider plate 709 is effectively realized.

[0059] Furthermore, in order to limit the movement stroke of the cylinder 737, as Figure 11 shown, a cylinder limiting block 743 is installed at the upper end of the thimble module vertical plate 710, and a hydraulic buffer 744 is installed on the cylinder limiting block 743 to realize the buffer limit when the cylinder 737 extends. See Figure 14, a second slider plate 714 is provided on the left side of the manual displacement table slider plate 709. A manual slide table B712 and a guide rail B713 are installed between the manual displacement table slider plate 709 and the second slider plate 714 to adjust the second slider plate 714. With the design of this thimble module 7, through the design of the manual slide table A702 and the manual slide table B712, the adjustment of the thimble module 7 in the X / Y directions is achieved.

[0060] Furthermore, referring to Figure 9 , Figure 11 , Figure 12 and Figure 14 , a thimble plate 721 and a thimble slider plate 723 are installed on the second slider plate 714. Referring to Figure 11 , the thimble plate 721 is installed on the left side of the second slider plate 714, and the thimble slider plate 723 is installed on the right side of the second slider plate 714; the same cam 716, stepper motor 717, sensing rod 718, photoelectric sensor 719, and limit rod 720 structures are installed below the thimble plate 721 and the thimble slider plate 723 to achieve the up and down movement of the thimble plate 721 and the thimble slider plate 723. Specifically, a guide rail is provided between the thimble plate 721 and the second slider plate 714 to achieve the up and down movement of the thimble plate 721; a ball bearing 722 is installed at the bottom of the thimble plate 721, and a cam 716 is movably connected below the ball bearing 722. The cam 716 is connected to the stepper motor 717. By rotating the cam 716 by the stepper motor 717, the thimble plate 721 is pushed to move up and down reciprocally; and a sensing rod 718 and a limit rod 720 are installed on the cam 716; the stepper motor 717 is installed on the second slider plate 714, and a photoelectric sensor 719 is installed on the second slider plate 714. The photoelectric sensor 719 cooperates with the sensing rod 718 to form the origin position of the stepper motor, and the limit rod 720 is used for the rotational limit of the cam 716.

[0061] Further, referring to Figure 14, a tension spring B741 is installed on the second slider plate 714. One end of the tension spring B741 is fixed on the ejector pin plate 721, and the other end is fixed on the second slider plate 714, thereby enabling the ejector pin plate 721 to move up and down elastically. Similarly, the same structure of a cam 716, a stepper motor 717, a sensing rod 718, a photoelectric sensor 719, and a limit rod 720 is also installed in the middle of the second slider plate 714. Another ball bearing 722 is also connected above the cam 716. The difference is that the other ball bearing 722 is connected to the ejector pin slider plate 723, and the ejector pin slider plate 723 is connected to the second slider plate 714 through a guide rail. The lower end of the ejector pin slider plate 723 is connected to a tension spring B741, and the other end of the tension spring B741 is fixed on the second slider plate 714, thereby also realizing the up and down elastic movement of the ejector pin slider plate 723.

[0062] See Figure 12 , the upper end portion of the ejector pin plate 721 is L-shaped and extends above the ejector pin slider plate 723. The upper end of the ejector pin slider plate 723 is provided with an ejector pin mounting post 724. The inside of the ejector pin mounting post 724 is through, and an ejector pin 731 is installed at its top. The ejector pin 731 is locked by an ejector pin fixing head 730. Inside the ejector pin mounting post 724, an ejector block 732, a second compression spring 733, and an adjusting screw 736 are sequentially installed along the lower side of the ejector pin 731. The compression amount of the second compression spring 733 is adjusted by the adjusting screw 736, thereby adjusting the height of the ejector pin 731 extending out of the ejector pin mounting post 724, and also enabling the ejector pin 731 to have a certain elasticity.

[0063] Furthermore, an ejector pin head mounting seat 726 is installed at the upper end of the ejector pin plate 721. The ejector pin mounting post 724 passes through the ejector pin head mounting seat 726 at the upper end of the ejector pin plate 721 with a clearance. An ejector pin head 729 is threadedly connected to the top of the ejector pin head mounting seat 726. The ejector pin head 729 has a sleeve structure with one end open. Tiny vent holes are evenly distributed on the closed end surface of the ejector pin head 729. An air pipe joint 742 is installed outside the ejector pin head mounting seat 726. The external vacuum air path enters the inside of the ejector pin head mounting seat 726 through the air pipe joint 742, and enters the inside of the ejector pin head 729 along the clearance between the ejector pin head mounting seat 726 and the ejector pin mounting post 724, and finally through the tiny vent holes evenly distributed on the surface.

[0064] To ensure the sealing of the vacuum air path, a sealing ring A734 is provided at the connection between the top stud mounting seat 726 and the top stud plate 721. The top pin mounting post 724 and the top stud plate 721 are circumferentially sealed by a sealing cover plate 725 and a sealing ring B735. The sealing of the sealing cover plate 725 and the sealing ring B735 can avoid excessive air leakage on the one hand and ensure that the top pin mounting post 724 can still move up and down on the other hand. During the up and down movement of the top pin mounting post 724, the top pin 731 at its upper end expands and contracts on the vent hole at the center of the surface of the top stud 729, thereby realizing the lifting and peeling of the chip.

[0065] Further, referring to Figure 12 , a collision-proof cup 727 is installed outside the top stud mounting seat 726, and a tension spring A728 is wound around the collision-proof cup 727 to achieve elastic collision of the top pin module 7 in sequence.

[0066] Referring to the appendix Figures 15 to 18 , the pre-inspection camera module 8 includes: a pre-inspection electric cylinder 801, an electric cylinder mounting plate 802, a pre-inspection lens mounting plate 803, a pre-inspection camera 804, a pre-inspection lens 805, a pre-inspection lens fixing block A806, a pre-inspection lens fixing block B807, an annular light source 808, a pre-inspection lens adjusting block 809, an annular light source mounting plate 810, and a pre-inspection lens adjusting seat 811; the pre-inspection camera module 8 is fixed on the marble support block A2 through the electric cylinder mounting plate 802, the pre-inspection electric cylinder 801 is installed on the electric cylinder mounting plate 802, and the pre-inspection lens mounting plate 803 is installed on the slider of the pre-inspection electric cylinder 801; the pre-inspection camera 804 is installed on the pre-inspection lens 805, the pre-inspection lens 805 is locked by the pre-inspection lens fixing block A806 and the pre-inspection lens fixing block B807, and the pre-inspection lens fixing block B807 is installed on the pre-inspection lens mounting plate 803 through the pre-inspection lens adjusting block 809, and the pre-inspection lens adjusting seats 811 are installed on both sides of the pre-inspection lens mounting plate 803; the annular light source 808 is installed at the lower end of the pre-inspection lens mounting plate 803 through the annular light source mounting plate 810; the annular light source 808 is coaxial with the pre-inspection lens 805. The function of the pre-inspection camera module 8 is to pick up the position of the chip through the camera; the function of the pre-inspection lens adjusting seat 811 is to adjust the position of the pre-inspection lens 805 by using screws or set screws, thereby adjusting the pre-inspection camera 804.

[0067] Combined with Figures 1 to 18 , a method for calibrating the concentricity of a chip suction nozzle and a top pin in the present invention includes the following steps:

[0068] S1: Move the pick-up hand module 6, move the suction nozzle 609 on the pick-up hand module 6 below the pre-inspection camera module 8, and illuminate below the suction nozzle 609.

[0069] S2: Turn on the pre-inspection camera 804 and the ring light source 808 on the pre-inspection camera module 8, observe the position of the air vent of the nozzle 609 through the display connected to the pre-inspection camera 804, and determine whether the air vent is at the center of the camera's field of view;

[0070] S3: Move the linear motor 5 to move the nozzle 609 to the X-axis line of the camera's field of view;

[0071] S4: Install screws or set screws on the pre-inspection lens adjustment base 811; Rotate the screws or set screws to adjust the pre-inspection lens adjustment block 809, and then adjust the pre-inspection camera 804 so that the Y-axis line of the camera's field of view coincides with the nozzle 609. Save the position of the linear motor 5 at this time and fix the pre-inspection camera module 8, thereby achieving the concentric calibration of the pre-inspection camera 804 and the nozzle 609;

[0072] S5: Move the pick-up hand module 6 out from under the pre-inspection camera module 8, then start the cylinder 737 to lift the ejector pin module 7 upward, and then control the stepping motor 717 to extend the ejector pin 731 out of the ejector pin head 729;

[0073] S6: Observe the position of the ejector pin 731 through the pre-inspection camera 804 and determine whether the ejector pin 731 is at the center of the camera's field of view;

[0074] S7: Adjust the manual slide A702 on the ejector pin module 7 to move the ejector pin 731 to the Y-axis line of the camera's field of view; Adjust the manual slide B712 on the ejector pin module 7 to move the ejector pin 731 to the X-axis line of the camera's field of view, thereby achieving that the ejector pin 731 is at the center of the camera's field of view;

[0075] S8: Fix the manual slide A702 and the manual slide B712, thereby completing the concentric calibration of the nozzle 609, the ejector pin 731 and the pre-inspection camera 804.

[0076] After completing the concentric calibration of the nozzle 609, the ejector pin 731 and the pre-inspection camera 804, move the chip to directly below the field of view of the pre-inspection camera 804, and then use the ejector pin 731 and the nozzle 609 to pick up the chip, thereby completing the chip pick-up work.

[0077] The device and method for calibrating the concentricity of the chip nozzle and the ejector pin of the present invention utilize the pre-inspection camera to not only achieve image acquisition of the chip, but also calibrate the positions of the nozzle and the ejector pin using the pre-inspection camera. There is no need to additionally set up a magnifying glass or a microscope, saving some complicated structures; among them, an adjustable pre-inspection lens adjustment block is provided on the pre-inspection camera module to ensure the concentricity of the nozzle and the pre-inspection camera, which is both simple and economical; and manual slide A and manual slide B are provided on the ejector pin module 7 to adjust the X\Y directions of the ejector pin module; thereby being able to quickly and accurately calibrate the concentricity of the nozzle and the ejector pin and avoid excessive deviation in the pick-up position.

[0078] The above are only the preferred embodiments of the present invention, and do not limit the patent scope of the present invention accordingly. Any equivalent structure or equivalent process transformation made by using the content of the specification and drawings of the present invention, or directly or indirectly applied in other related technical fields, shall similarly be included within the patent protection scope of the present invention.

Claims

1. A device for calibrating the concentricity of a chip nozzle and a thimble, characterized in that The device includes: a pick-up hand module (6), a thimble module (7), and a pre-inspection camera module (8); among which: The pick-up hand module (6) is installed on the linear motor (5), and the overall movement of the pick-up hand module (6) is achieved through the linear motor (5); the linear motor (5) is installed on the marble platform (1); both the thimble module (7) and the pre-inspection camera module (8) are installed on the marble platform (1), the thimble module (7) is directly below the pre-inspection camera module (8), and the pick-up hand module (6) is movably arranged between the thimble module (7) and the pre-inspection camera module (8), moving along the horizontal and vertical directions; The pick-up hand module (6) includes a nozzle mounting base (606), a nozzle joint (607) is installed at the extended end of the nozzle mounting base (606), the lower end of the nozzle joint (607) is connected to a nozzle (609), and the nozzle (609) is locked by a nozzle locking sleeve (608); the nozzle mounting base (606) is in communication with the nozzle joint (607) and the nozzle (609) to form an air path; a transparent cover plate (614) is installed above the nozzle mounting base (606); a light source is installed below the nozzle (609), and a pre-inspection camera is installed above the nozzle (609). When the nozzle (609) is positioning at a point, the light source passes through the internal air holes of the nozzle (609) and the transparent cover plate (614), and the position of the air holes of the nozzle (609) is observed through the pre-inspection camera installed above the nozzle (609) to ensure that the nozzle (609) is aligned with the center of the chip, realizing the calibration of the chip pick-up position; The ejector pin module (7) includes: an ejector pin assembly fixing block (701), a manual slide table A (702), a bottom plate (704), a manual displacement table slider plate (709), an ejector pin module vertical plate (710), an ejector pin (731), and a cylinder (737); a guide rail A (708) is vertically installed between the ejector pin module vertical plate (710) and the manual displacement table slider plate (709), a bottom plate (704) is installed below the ejector pin assembly fixing block (701), and a manual slide table A (702) and a guide rail C (740) are arranged between the ejector pin assembly fixing block (701) and the bottom plate (704) for moving the ejector pin (731) to the Y-axis line of the camera field of view; a cylinder (737) is installed on the side of the ejector pin module vertical plate (710), the cylinder block of the cylinder (737) is fixed on the ejector pin module vertical plate (710), and the head of the movable guide rod of the cylinder (737) is fixed on the manual displacement table slider plate (709) through a cylinder push rod head (739), and a floating joint (738) is also arranged at the head position of the movable guide rod of the cylinder (737); through the arrangement of the cylinder (737) and the guide rail A (708), the overall vertical movement of the manual displacement table slider plate (709) is realized; a second slider plate (714) is arranged on the left side of the manual displacement table slider plate (709), and a manual slide table B (712) and a guide rail B (713) are installed between the manual displacement table slider plate (709) and the second slider plate (714) for moving the ejector pin (731) to the X-axis line of the camera field of view; The pre-inspection camera module (8) includes: a pre-inspection lens adjustment seat (811), a pre-inspection camera (804), and a pre-inspection lens (805), and the pre-inspection camera module (8) is used to pick up the position of the chip through the camera; the pre-inspection lens adjustment seat (811) is used to adjust the position of the pre-inspection lens (805) by using screws or set screws, and thus adjust the pre-inspection camera (804).

2. The device according to claim 1, wherein The pick-up hand module (6) further includes: a Z-axis electric cylinder (601), a nozzle fixing plate (602), a slide rail mounting plate (603), a spring mounting seat (604), a first slider plate (605), a probe (610), a micro air pipe joint (611), a probe mounting block (612), a first compression spring (613), and a micro guide rail (615); the Z-axis electric cylinder (601) is mounted on the linear motor (5), and the nozzle fixing plate (602) is mounted on the Z-axis electric cylinder (601); the slide rail mounting plate (603) is mounted on the lower end of the nozzle fixing plate (602); spring mounting seats (604) are mounted at the upper and lower ends of the slide rail mounting plate (603), the micro guide rail (615) is vertically mounted in the middle of the slide rail mounting plate (603), and both ends of the micro guide rail (615) are respectively stuck in the spring mounting seats (604); the first slider plate (605) is movably mounted on the micro guide rail (615), first compression springs (613) are arranged at the upper and lower ends of the first slider plate (605), one end of the first compression spring (613) presses against the first slider plate (605), and the other end presses against the spring mounting seat (604); the nozzle mounting seat (606) is fixed on the first slider plate (605); the micro air pipe joint (611) is connected to the side of the nozzle mounting seat (606), and the external vacuum air path is connected through the micro air pipe joint (611) and is in communication with the nozzle (609) to realize the vacuum adsorption of the chip by the nozzle (609).

3. The device according to claim 2, wherein A pair of probes (610) are mounted on the side of the first slider plate (605), one of the probes (610) is fixed on the first slider plate (605), and the other is fixed on the slide rail mounting plate (603) through the probe mounting block (612) to calibrate the height of the nozzle (609).

4. The device according to claim 3, characterized in that The ejector pin module (7) further includes: an ejector pin assembly limit block (703), a cylinder push rod head (739); wherein: An ejector pin assembly fixing block (701) is mounted on the right side of the ejector pin module vertical plate (710), and a manual displacement table slider plate (709) is mounted on the left side of the ejector pin module vertical plate (710); an ejector pin assembly limit block (703) is arranged at the end of the ejector pin assembly fixing block (701) to fix the manual slide table A (702).

5. The device according to claim 4, characterized in that, A cylinder limit block (743) is mounted on the upper end of the ejector pin module vertical plate (710), and a hydraulic buffer (744) is mounted on the cylinder limit block (743) to realize the buffer limit when the cylinder (737) extends; Install the ejector plate (721) and the ejector pin slider plate (723) on the second slider plate (714). The ejector plate (721) is installed on the left side of the second slider plate (714), and the ejector pin slider plate (723) is installed on the right side of the second slider plate (714). The same cam (716), stepper motor (717), induction rod (718), photoelectric sensor (719), and limit rod (720) structures are installed below the ejector plate (721) and the ejector pin slider plate (723) to realize the up and down movement of the ejector plate (721) and the ejector pin slider plate (723).

6. The device according to claim 5, characterized in that A guide rail is provided between the ejector plate (721) and the second slider plate (714) to realize the up and down movement of the ejector plate (721). A ball bearing (722) is installed at the bottom of the ejector plate (721). A cam (716) is movably connected below the ball bearing (722). The cam (716) is connected to the stepper motor (717). By rotating the cam (716) with the stepper motor (717), the ejector plate (721) is pushed to move up and down reciprocally. An induction rod (718) and a limit rod (720) are installed on the cam (716). The stepper motor (717) is installed on the second slider plate (714), and a photoelectric sensor (719) is installed on the second slider plate (714). The photoelectric sensor (719) cooperates with the induction rod (718) to form the origin position of the stepper motor, and the limit rod (720) is used for the rotation limit of the cam (716).

7. The device according to claim 6, characterized in that, A tension spring B (741) is installed on the second slider plate (714). One end of the tension spring B (741) is fixed on the ejector plate (721), and the other end is fixed on the second slider plate (714) to enable the elastic up and down movement of the ejector plate (721). The same cam (716), stepper motor (717), induction rod (718), photoelectric sensor (719), and limit rod (720) structures are also installed in the middle of the second slider plate (714). Another ball bearing (722) is also connected above the cam (716). The other ball bearing (722) is connected to the ejector pin slider plate (723). The ejector pin slider plate (723) is connected to the second slider plate (714) through a guide rail. A tension spring B (741) is connected to the lower end of the ejector pin slider plate (723), and the other end of the tension spring B (741) is fixed on the second slider plate (714) to realize the elastic up and down movement of the ejector pin slider plate (723). The upper end of the top pillar plate (721) is L-shaped and extends above the ejector pin slider plate (723); an ejector pin mounting post (724) is installed at the upper end of the ejector pin slider plate (723). The inside of the ejector pin mounting post (724) is through, and an ejector pin (731) is installed at its top. The ejector pin (731) is locked by an ejector pin fixing head (730). Inside the ejector pin mounting post (724), a top block (732), a second compression spring (733), and an adjusting screw (736) are installed in sequence along the lower side of the ejector pin (731). The compression amount of the second compression spring (733) is adjusted by the adjusting screw (736), thereby adjusting the height of the ejector pin (731) protruding from the ejector pin mounting post (724).

8. The device according to claim 7, characterized in that, A top head mounting seat (726) is installed at the upper end of the top pillar plate (721). The ejector pin mounting post (724) passes through the top head mounting seat (726) at the upper end of the top pillar plate (721) with a clearance. A top head (729) is threadedly connected to the top of the top head mounting seat (726). The top head (729) has a sleeve structure with one end open. Tiny vent holes are evenly distributed on the closed end surface of the top head (729); an air pipe joint (742) is installed outside the top head mounting seat (726). The external vacuum air path enters the inside of the top head mounting seat (726) through the air pipe joint (742), and enters the inside of the top head (729) along the clearance between the top head mounting seat (726) and the ejector pin mounting post (724), and finally through the tiny vent holes evenly distributed on the surface; A sealing ring A (734) is provided at the connection between the top head mounting seat (726) and the top pillar plate (721), and the ejector pin mounting post (724) and the top pillar plate (721) are circumferentially sealed by a sealing cover plate (725) and a sealing ring B (735); during the up and down movement of the ejector pin mounting post (724), the ejector pin (731) at its upper end expands and contracts on the vent hole at the center of the surface of the top head (729), thereby realizing the lifting and peeling of the chip; An anti-collision cup (727) is installed outside the top head mounting seat (726), and a tension spring A (728) is wound around the anti-collision cup (727) to achieve elastic collision of the ejector pin module (7) in sequence.

9. The device according to claim 8, wherein, The pre-inspection camera module (8) further includes: a pre-inspection electric cylinder (801), an electric cylinder mounting plate (802), a pre-inspection lens mounting plate (803), a pre-inspection lens fixing block A (806), a pre-inspection lens fixing block B (807), a ring light source (808), a pre-inspection lens adjustment block (809), and a ring light source mounting plate (810); the pre-inspection camera module (8) is fixed on the marble support block A (2) through the electric cylinder mounting plate (802), the pre-inspection electric cylinder (801) is mounted on the electric cylinder mounting plate (802), and the pre-inspection lens mounting plate (803) is mounted on the slider of the pre-inspection electric cylinder (801); the pre-inspection camera (804) is mounted on the pre-inspection lens (805), the pre-inspection lens (805) is locked by the pre-inspection lens fixing block A (806) and the pre-inspection lens fixing block B (807), and the pre-inspection lens fixing block B (807) is mounted on the pre-inspection lens mounting plate (803) through the pre-inspection lens adjustment block (809), and pre-inspection lens adjustment seats (811) are mounted on both sides of the pre-inspection lens mounting plate (803); the ring light source (808) is mounted at the lower end of the pre-inspection lens mounting plate (803) through the ring light source mounting plate (810); the ring light source (808) and the pre-inspection lens (805) are coaxial.

10. A method for calibrating the concentricity of a chip nozzle and a thimble, characterized in that, It includes the following steps: S1: Move the material taking hand module (6), move the suction nozzle (609) on the material taking hand module (6) below the pre-inspection camera module (8), and illuminate below the suction nozzle (609). S2: Turn on the pre-inspection camera (804) and the ring light source (808) on the pre-inspection camera module (8), observe the position of the ventilation hole of the suction nozzle (609) through the display connected to the pre-inspection camera (804), and judge whether the ventilation hole is at the center of the camera's field of view. S3: Move the linear motor (5) to move the suction nozzle (609) to the X-axis line of the camera's field of view. S4: Install screws or set screws on the pre-inspection lens adjustment seats (811); rotate the screws or set screws to adjust the pre-inspection lens adjustment block (809), and then adjust the pre-inspection camera (804) to make the Y-axis line of the camera's field of view coincide with the suction nozzle (609), save the position of the linear motor (5) at this time, and fix the pre-inspection camera module (8) to achieve the concentric calibration of the pre-inspection camera (804) and the suction nozzle (609). S5: Move the material taking hand module (6) out from below the pre-inspection camera module (8), then start the cylinder (737) to lift the thimble module (7) upward, and then control the stepping motor (717) to extend the thimble (731) out of the thimble head (729). S6: Observe the position of the thimble (731) through the pre-inspection camera (804) and judge whether the thimble (731) is at the center of the camera's field of view. S7: Adjust the manual slide A (702) on the thimble module (7) to move the thimble (731) to the Y-axis line of the camera's field of view; adjust the manual slide B (712) on the thimble module (7) to move the thimble (731) to the X-axis line of the camera's field of view, thereby making the thimble (731) at the center of the camera's field of view. S8: Fix the manual slide A (702) and the manual slide B (712), thereby completing the concentric calibration of the nozzle (609), the ejector pin (731) and the pre-inspection camera (804).

Images