Conveying unit and article conveying device comprising the same

Abstract

A conveyor unit is provided. The conveyor unit is for conveying a container containing an article and travelling on a track, the conveyor unit comprising: a body having a drive; and a wheel assembly coupled to the body and travelling on the track, the wheel assembly comprising: a bearing; and a hub surrounding the bearing, and the hub can have a cushioning structure.

Description

TECHNICAL FIELD

[0001] The present application relates to a transport unit and an article transport apparatus including the same, and more particularly, to a transport unit for transporting a container in which a wafer or the like is accommodated in a semiconductor production line, and an article transport apparatus including the same. BACKGROUND

[0002] Generally, in order to manufacture semiconductor devices, various types of processes such as deposition, photolithography, and etching processes are performed, and apparatuses performing each of the processes are disposed in a semiconductor production line. An object such as a wafer for performing a semiconductor device manufacturing process can be provided to each semiconductor process apparatus in a state of being accommodated in a container such as a front opening unified pod (FOUP) or the like. Further, the object on which the process has been performed is recovered from each semiconductor process apparatus into a container, and the recovered container can be transported to the outside.

[0003] The container is transferred by overhead hoist transport (OHT). The OHT transports the container in which the object is accommodated to a load port of any one of the semiconductor process apparatuses. Further, the OHT can pick up the container in which the object on which the process has been performed is accommodated from the load port and transport it to the outside or to another one of the semiconductor process apparatuses.

[0004] A general OHT includes a track coupled with a top of the semiconductor production line and a carrier. The track includes a travel track on which the carrier travels and a turning track for changing a travel direction of the carrier. Further, the carrier includes a travel wheel that rotates in contact with the travel track and a turning track that rotates by selectively coming into contact with the turning track. The carrier travels along the travel track by rotation of the travel wheel in contact with the travel track. Further, when it is desired to change the travel direction of the carrier, the turning track comes into contact with the turning track to change the travel direction of the carrier.

[0005] In such a general OHT, vibrations generated by the track are transmitted to the carrier as they are without being attenuated. The vibrations generated by the track are transmitted to the carrier, and the vibrations transmitted to the carrier are transmitted to the container held by the carrier. The vibrations transmitted to the container can generate particles in the container. Further, the induced particles adhere to the object such as a wafer or the like, thereby causing defects in the object process. In particular, when the turning track comes into contact with the turning wheel, the travel direction of the carrier is changed, and thus the magnitude of the vibrations generated when the turning track comes into contact with the turning track is relatively large. That is, when the turning track comes into contact with the turning wheel, the vibrations transmitted to the container increase, and thus more particles are generated in the container. SUMMARY

[0006] TECHNICAL PROBLEM

[0007] An object of the present application is to provide a conveying unit capable of effectively conveying an article such as a substrate, and an article conveying apparatus including the same.

[0008] Further, an object of the present application is to provide a conveying unit capable of minimizing generation of particles in a container accommodating an article such as a substrate, and an article conveying apparatus including the same.

[0009] Further, an object of the present application is to provide a conveying unit capable of minimizing transmission of vibration generated by a track to a container accommodating an article when conveying the article, and an article conveying apparatus including the same.

[0010] Objects of the present application are not limited to the above, and other objects not mentioned will be clearly understood by those skilled in the art from the following description.

[0011] Technical Solution

[0012] The present application provides a conveying unit. The conveying unit for conveying a container accommodating an article and traveling on a track includes a main body having a driver, and a wheel assembly coupled to the main body and traveling on the track, the wheel assembly including a bearing, and a hub surrounding the bearing, and the hub can have a buffer structure.

[0013] According to one embodiment, the buffer structure can include at least one hole extending from one surface of the hub to the other surface.

[0014] According to one embodiment, the hole can have an arc shape.

[0015] According to one embodiment, the hole having the arc shape can have the same center of curvature as that of the hub.

[0016] According to one embodiment, the hole can be formed in the hub and formed in plurality, and holes having the same radius of curvature among the plurality of holes can be formed in the hub in a manner spaced apart from each other.

[0017] According to one embodiment, the hole includes a first hole, and a second hole having a radius of curvature different from that of the first hole.

[0018] According to one embodiment, the buffer structure can further include a connection hole connecting the first hole and the second hole to each other.

[0019] According to one embodiment, a virtual straight line drawn from the center of the hub in the radial direction of the hub can overlap at least one hole.

[0020] According to one embodiment, the wheel assembly can further include a resilient wheel surrounding the hub and made of a material having elasticity.

[0021] Further, the present application provides an article transport apparatus. The article transport apparatus includes a travel track disposed along a top of a semiconductor production line in which semiconductor process apparatuses are continuously arranged, a transport unit traveling on the travel track, and a turning track for changing a travel direction of the transport unit, the transport unit including a main body having a driver, a travel wheel assembly coupled to the main body and traveling on the travel track, and a turning wheel assembly coupled to the main body and coming into contact with the turning track when the travel direction is changed, the turning wheel assembly including a bearing and a hub surrounding the bearing, and the hub can have a buffer structure.

[0022] According to one embodiment, the buffer structure can include at least one hole extending from one surface of the hub to another surface.

[0023] According to one embodiment, the hole can have an arc shape.

[0024] According to one embodiment, the hole having the arc shape can have a center of curvature identical to a center of curvature of the hub.

[0025] According to one embodiment, the hole can be formed in the hub and formed in a plurality, and holes having identical radii of curvature among the plurality of holes can be formed in the hub in a manner spaced apart from each other.

[0026] According to one embodiment, the hole includes a first hole and a second hole having a radius of curvature different from that of the first hole.

[0027] According to one embodiment, the buffer structure can further include a connection hole connecting the first hole and the second hole to each other.

[0028] According to one embodiment, a virtual straight line drawn from a center of the hub in a radial direction of the hub can overlap at least one hole.

[0029] According to one embodiment, the wheel assembly can further include a resilient wheel surrounding the hub and made of a material having elasticity.

[0030] Technical Effects

[0031] According to one embodiment of the present application, an article such as a substrate can be effectively transported.

[0032] Further, according to one embodiment of the present application, generation of particles in a container accommodating an article such as a substrate can be minimized.

[0033] Further, according to one embodiment of the present application, it is possible to minimize transmission of vibration generated by a track to a container in which an article is accommodated when the article such as a substrate is transported.

[0034] Effects of the present application are not limited to the above-mentioned effects, and a person of ordinary skill in the art will clearly understand effects not mentioned from the present specification and drawings. BRIEF DESCRIPTION OF DRAWINGS

[0035] Figure 1 is a view of a semiconductor manufacturing apparatus and an article transport apparatus according to one embodiment of the present application, viewed from the top.

[0036] Figure 2 is a view of the article transport apparatus of Figure 1 , viewed from the front.

[0037] Figure 3 is a view of the article transport apparatus of Figure 1 , viewed from the side.

[0038] Figure 4 is a view of the article transport apparatus of Figure 1 , viewed from the top.

[0039] Figure 5 is a view illustrating a state in which a transport unit according to one embodiment of the present application travels without changing a traveling direction.

[0040] Figure 6 is a view illustrating a state in which the transport unit according to one embodiment of the present application changes the traveling direction.

[0041] Figure 7 is a view illustrating a steering wheel assembly included in the transport unit according to one embodiment of the present application.

[0042] Figure 8 is a schematic view illustrating a buffer structure of the steering wheel assembly of Figure 7 .

[0043] Figure 9 is a perspective view illustrating an example of the buffer structure of Figure 8 .

[0044] Figure 10 is a plan view illustrating an example of the buffer structure of Figure 8 . DETAILED DESCRIPTION

[0045] Hereinafter, embodiments of the present application will be described in detail with reference to the accompanying drawings so as to be easily carried out by one of ordinary skill in the art. However, the present application can be implemented in various different forms and is not limited to the embodiments described herein. Also, in describing preferred embodiments of the present application, detailed descriptions of functions or configurations which are determined to render the subject matter of the present application obscure will be omitted. Furthermore, in all the drawings, like reference numerals are used for the components having the similar functions and roles.

[0046] Unless specifically stated, "comprising" a certain constituent element means that other constituent elements can also be included, not excluding the same. Specifically, it is to be understood that terms such as "including" or "having," etc., are intended to indicate the presence of the described features, numbers, steps, actions, constituent elements, components, or combinations thereof, but do not preclude the presence or addition of one or more other features, numbers, steps, actions, constituent elements, components, or combinations thereof.

[0047] Unless the context clearly indicates otherwise, the singular expression includes the plural expression. Also, the shape and size of elements in the drawings can be exaggerated for a clearer explanation.

[0048] The article transport apparatus of the present embodiment can be used to transport a container. In particular, the article transport apparatus of the present embodiment can transport a container in which an article is accommodated. The article can be a substrate such as a wafer or the like, or a reticle. The container in which the article is accommodated can be a front opening unified pod (FOUP). Also, the container in which the article is accommodated can be a POD. Also, the container for accommodating the article can include a film cassette for accommodating a plurality of printed circuit boards, a tray for accommodating a plurality of semiconductor packages, or the like.

[0049] Hereinafter, an example in which the article transport apparatus transports a container in which a substrate such as a wafer or the like is accommodated to a semiconductor process apparatus arranged on a semiconductor production line will be described. However, the present application is not limited thereto, and the article transport apparatus of the present embodiment can be applied to various production lines in the same or similar manner in which an article and / or a container in which the article is accommodated needs to be transported.

[0050] Hereinafter, embodiments of the present application will be described in detail with reference to the accompanying drawings so as to be easily carried out by one of ordinary skill in the art. However, the present application can be implemented in various different forms and is not limited to the embodiments described herein. Also, in describing preferred embodiments of the present application, detailed descriptions of functions or configurations which are determined to render the subject matter of the present application obscure will be omitted. Furthermore, in all the drawings, like reference numerals are used for the components having the similar functions and roles. Figures 1 to 10 Embodiments of the present application will be described in detail.

[0051] Figure 1 is a view of a semiconductor manufacturing apparatus and an article transport apparatus according to an embodiment of the present application, viewed from the top. Referring to Figure 1The article conveying apparatus 1000 according to the present application can convey the container C in which the article is accommodated on a semiconductor production line in which the semiconductor process apparatuses 100 are continuously arranged. The article conveying apparatus 1000 can be an OHT apparatus. The article conveying apparatus 1000 can include a track 300 and a conveying unit 500. The conveying unit 500 can grip the container C. The conveying unit 500 can travel along a predetermined path along the track 300. The track 300 can be disposed along the top of the semiconductor production line.

[0052] In Figure 1 which the track 300 is shown in a substantially hexagonal shape, various modifications can be made to the shape of the track 300, such as a circular shape or a quadrangular shape, etc. The track 300 can be disposed along the top of the semiconductor production line and can be disposed such that the semiconductor process apparatus 100 can be seen from above. The disposition range of the track 300 can be disposed in a wide area so that the entire semiconductor process apparatus 100 can be seen.

[0053] Figure 2 is a view of the article conveying apparatus viewed from the front, Figure 1 is a view of the article conveying apparatus viewed from the side, Figure 3 is a view of the article conveying apparatus viewed from the top. Referring to Figure 1 , the article conveying apparatus 1000 can include a track 300 and a conveying unit 500. Figure 4 Figure 1 The track 300 can include a traveling track 310 and a turning track 330. A traveling wheel assembly 520 of the conveying unit 500, which will be described later, can be in contact with the traveling track 310. The traveling track 310 can be disposed in plural and spaced apart from each other. For example, the traveling track 310 can be disposed in pairs. A pair of traveling tracks 310 are parallel to each other and can be disposed at the same height. Figures 2 to 4 A turning wheel assembly 530 of the conveying unit 500, which will be described later, can be selectively in contact with the turning track 330. The turning track 330 can be disposed above the traveling track 310. When viewed from above, the turning track 330 can be disposed between a pair of traveling tracks 310. Further, when viewed from the top, a portion of the turning track 330 can have a curved shape. The turning track 330 can change the traveling direction of the conveying unit 500.

[0054]

[0055]

[0056] ​​​The transport unit 500 can travel on the track 300. The transport unit 500 can travel on the travel track 310. The transport unit 500 can hold the container C. The transport unit 500 can travel on the track 300 in a state of holding the container C. The transport unit 500 can include a main body 510, wheel assemblies 520, 530, a frame 540, a neck 550, a slider 560, a lifter 570, and a gripping member 580.

[0057] The wheel assemblies 520 and 530 and the neck 550 can be coupled to the main body 510. The wheel assemblies 520 and 530 can be rotatably coupled to the main body 510. Also, the neck 550 can be rotatably coupled to the main body 510. The main body 510 can have a driver (not shown) inside. The driver can rotate the wheel assemblies 520 and 530. The driver can transmit power to the wheel assemblies 520 and 530 to rotate the wheel assemblies 520 and 530. Also, the main body 510 can be provided in plural. Each of the main bodies 510 can have the driver described above. Also, the wheel assemblies 520 and 530 and the neck 550 described above can be coupled to each of the main bodies 510.

[0058] The wheel assemblies 520 and 530 can be rotatably coupled to the main body 510. The wheel assemblies 520 and 530 can be in contact with and rotate on the track 300. The wheel assemblies 520 and 530 can include a travel wheel assembly 520 and a steering wheel assembly 530.

[0059] The travel wheel assembly 520 can be coupled to the main body 510. The travel wheel assembly 520 can be rotatably coupled to the main body 510. The wheel assembly 520 can be in contact with and rotate on the travel track 310 in the track 300 to travel on the travel track 310. The travel wheel assembly 520 can be provided in plural. The travel wheel assemblies 520 can be provided in pairs. One of the travel wheel assemblies 520 can be rotatably coupled to one surface of the main body 510, and the other of the travel wheel assemblies 520 can be rotatably coupled to the other surface opposite to the one surface of the main body 510. The travel wheel assembly 520 can rotate by receiving power from the driver that the main body 510 has.

[0060] The steering wheel assembly 530 can be coupled to the main body 510. The steering wheel assembly 530 can be rotatably coupled to the main body 510. The steering wheel assembly 530 can selectively come into contact with the steering rail 330. The steering wheel assembly 530 can come into contact with the steering rail 330 when the traveling direction of the conveying unit 500 is changed. The steering wheel assembly 530 can not come into contact with the steering rail 330 when the conveying unit 500 travels without changing the traveling direction. The steering wheel assembly 530 can be coupled to the upper surface of the main body 510. The position of the steering wheel assembly 530 can be changed by power transmitted by the driver that the main body 510 has. The steering wheel assembly 530 can be coupled to the upper surface of the main body 510 so that the position of the steering wheel assembly 530 can be changed on the upper surface of the main body 510. The steering wheel assembly 530 can be coupled to the main body 510 through the guide rail 512 provided on the upper surface of the main body 510. The steering wheel assembly 530 can be provided so that its position can be changed in the length direction of the guide rail 512. The length direction of the guide rail 512 can be perpendicular to the direction in which the traveling wheel assembly 520 rotates to make the conveying unit 500 travel. In addition, the steering wheel assembly 530 can be provided in plurality. For example, the steering wheel assembly 530 can be provided in pairs. One pair of steering wheel assemblies 530 can be arranged in the traveling direction of the conveying unit 500.

[0061] The frame 540 can have an internal space. The slider 560, the lifter 570, and the gripping member 580, which will be described later, can be provided in the internal space of the frame 540. In addition, the frame 540 can have a hexahedral shape with both sides and a bottom open. That is, the frame 540 can be provided with a baffle in the front surface and the rear surface. Accordingly, it is possible to prevent the container C held by air resistance from vibrating when the conveying unit 500 travels. In addition, the frame 540 can be coupled to the main body 510 via the neck 550. The neck 550 can be provided to be rotatable with respect to the main body 510 and the frame 540. The frame 540 can be coupled to at least one or more main bodies 510 via at least one or more necks 550. For example, the frame 540 can be provided as one, and two necks 550 can be coupled to one frame 540. Also, two necks 550 can be coupled to two main bodies 510, respectively.

[0062] The slider 560 can be coupled to the frame 540. The slider 560 can be coupled so that its position can be changed with respect to the frame 540. The slider 560 is provided in the internal space of the frame 540 and can be coupled to the lower surface of the frame 540. The slider 560 can be coupled to the frame 540 to change its position in the front, the rear, the left, and the right. In addition, the slider 560 can be coupled with the lifter 570, which will be described later. Accordingly, by changing the position of the slider 560, it is possible to change the position of the lifter 570.

[0063] The lifter 570 can raise or lower the gripping member 580. The lifter 570 can include a driving member inside thereof. The driving member can raise or lower the gripping member 580 by winding or unwinding a belt 572 connected to the gripping member 580. The gripping member 580 can grip the container C. The gripping member 580 can detachably grip the container C. The gripping member 580 can load or unload the container C to or from a load port of a semiconductor process apparatus.

[0064] Hereinafter, a method of changing a traveling direction of the transport unit 500 traveling on the traveling rails 310 will be described. Figure 5 is a view illustrating a state in which a transport unit according to an embodiment of the present application travels without changing a driving direction, Figure 6 is a view illustrating a state in which a transport unit according to an embodiment of the present application changes a traveling direction. Referring to Figure 5 and Figure 6 The turning rail 330 can be disposed above the traveling rails 310. Also, when viewed from above, the turning rail 330 can be disposed between the pair of traveling rails 310. A portion of the traveling rails 310 can have a curved shape. Also, another portion of the turning rail 330 can have a linear shape. The curved portion of the turning rail 330 can be disposed in an intersection region of the traveling rails 310. The straight portion of the turning rail 330 can be disposed in a traveling region of the traveling rails 310.

[0065] When the transport unit 500 performs linear motion without changing the traveling direction, the turning wheel assembly 530 of the transport unit 500 is moved to a position not in contact with the turning rail 330. That is, since the turning wheel assembly 530 is not in contact with the turning rail 330, the transport unit 500 linearly moves as it is without changing the traveling direction (see Figure 5 ). However, even in the case of linear motion without changing the traveling direction, if the traveling direction of the transport unit 500 is not changed by the turning wheel assembly 530, the turning wheel assembly 530 can come into contact with the turning rail 330. For example, the turning wheel assembly 530 can come into contact with the left side surface of the turning rail 330 of Figure 5 .

[0066] In contrast, when it is desired to change the traveling direction of the transport unit 500, the steering wheel assembly 530 of the transport unit 500 can be moved to a position in contact with the steering rail 330. Specifically, the position of the steering wheel assembly 530 is changed to contact a surface of the steering rail 330 corresponding to the traveling direction after the change based on the traveling direction before the change of the transport unit 500. For example, when the traveling direction after the change is the right direction based on the traveling direction before the change of the transport unit 500, the position of the steering wheel assembly 530 is changed to contact the right surface of the steering rail 330 corresponding to the right direction (see FIG. 6B). Figure 6 ) is shown as an example to explain the change of the traveling direction of the transport unit 500. The right wheel assembly 520 continues to contact the traveling rail 310 based on the traveling direction of the transport unit 500. In addition, the left traveling wheel assembly 520 of the transport unit 500 is spaced apart from the traveling rail 310 while the traveling direction of the transport unit 500 is changed. Then, the steering wheel assembly 530 continues to contact the steering rail 330 until the change of the traveling direction of the transport unit 500 is completed. When the change of the traveling direction is completed, the steering wheel assembly 530 is separated from the steering rail 330, and the left traveling wheel assembly 520 is in contact with the traveling rail 310 again. Figure 6

[0067] Figure 7 is a view showing a steering wheel assembly included in a transport unit according to one embodiment of the present application. Figure 7 The structure of the steering wheel assembly 530 shown in FIG. 6B can be applied to the traveling wheel assembly 520 in the same or similar manner. Referring to FIG. 6A, the steering wheel assembly 530 can include a hub 600, a bearing 531, and an elastic wheel 532. Figure 7

[0068] The hub 600 can be provided to surround the bearing 531. In addition, the elastic wheel 532 can be provided to surround the hub 600. The hub 600 can be made of a material including metal. In addition, the elastic wheel 532 can be made of a material having elasticity. For example, the elastic wheel 532 can be made of a material containing urethane.

[0069] When the steering wheel assembly 530 is in contact with the steering rail 330 to change the traveling direction of the transport unit 500, the steering wheel assembly 530 is in contact with the steering rail 330 to generate vibration. When the generated vibration is transmitted to the transport unit 500 without attenuation, the vibration is transmitted to the container C held by the transport unit 500 as it is. In this case, the container C vibrates, and particles can be generated in the inner space of the vibrating container C. The particles generated in the inner space of the container C can adhere to an article, such as a substrate including a wafer, contained in the container. In this case, a defect can occur in the substrate.

[0070] ​​Accordingly, the hub 600 of the steering wheel assembly 530 according to one embodiment of the present application has a damping structure S as shown in Figure 8 The damping structure S can be a flexure structure. When the hub 600 has the damping structure S, vibration generated when the steering wheel assembly 530 contacts the steering track 330 can be attenuated. Accordingly, vibration transmitted to the container C can be attenuated, the vibration of the container C is minimized, and thus the delivery of the container C can be effectively performed. In addition, when the vibration transmitted to the container C is attenuated, the generation of particles within the container C can be suppressed, and thus the occurrence of defects in the articles accommodated within the container C can be minimized.

[0071] The damping structure S of the hub 600 can include various embodiments. Hereinafter, examples of the damping structure S of the hub 600 will be described in detail. Figure 9 is a perspective view showing an example of the damping structure of the hub 600, Figure 8 is a plan view showing an example of the damping structure of the hub 600. Referring to Figure 10 and Figure 8 , the damping structure S of the hub 600 can include at least one hole 610, 620, 630, 640, 650, 660 extending from one surface of the hub 600 to the other surface. Figure 9 Figure 10 The holes 610, 620, 630, 640, 650, and 660 can have an arc shape. The holes 610, 620, 630, 640, 650, and 660 having the arc shape can have the same center of curvature as the center of curvature of the hub 600.

[0072] The holes 610, 620, 630, 640, 650, and 660 can have an arc shape. The holes 610, 620, 630, 640, 650, and 660 having the arc shape can have the same center of curvature as the center of curvature of the hub 600.

[0073] ​Further, a plurality of holes 610, 620, 630, 640, 650, and 660 can be formed in the hub 600. Further, among the holes 610, 620, 630, 640, 650, 660, the holes 610, 620, 630, 640, 650, 660 having the same radius of curvature are spaced apart from each other to be formed in the hub 600. For example, the holes 610, 620, 630, 640, 650, 660 include first holes 610, second holes 620, third holes 630, fourth holes 640, fifth holes 650, and sixth holes 660. The first holes 610, the second holes 620, the third holes 630, the fourth holes 640, the fifth holes 650, and the sixth holes 660 can be respectively provided in plural. Further, the first holes 610 provided in plural can have the same radius of curvature. The second holes 620 provided in plural can have the same radius of curvature. The third holes 630 provided in plural can have the same radius of curvature. The fourth holes 640 provided in plural can have the same radius of curvature. The fifth holes 650 provided in plural can have the same radius of curvature. The sixth holes 660 provided in plural can have the same radius of curvature. That is, the holes 610, 620, 630, 640, 650, and 660 having the same radius of curvature can be spaced apart from each other to be formed in the hub 600. The holes 610, 620, 630, 640, 650, 660 having the same radius of curvature are spaced apart from each other and formed in the hub 600, so that the holes 610, 620, 630, 640, 650, 660 can be more densely formed in the hub 600. As a result, the damping effect and the attenuation of the vibration can be further improved.

[0074] Further, the first holes 610, the second holes 620, the third holes 630, the fourth holes 640, the fifth holes 650, and the sixth holes 660 have different radii of curvature. For example, the first holes 610 have the smallest radius of curvature, and the radii of curvature of the second holes 620, the third holes 630, the fourth holes 640, the fifth holes 650, and the sixth holes 660 can increase in order. Further, a virtual straight line L drawn from the center of the hub 600 in a radial direction of the hub 600 can overlap at least one hole 610, 620, 630, 640, 650, and 660. Further, the buffer structure S can further include a connection hole 690 for connecting the holes 610, 620, 630, 640, 650, and 660 having different radii of curvature to each other. As a result, the damping effect and the attenuation of the vibration can be further improved.

[0075] The above detailed description is a description of the present application. Furthermore, the above description shows and describes preferred embodiments of the present application, and the present application can be used in various other combinations, modifications, and environments. That is, modifications or changes can be made in the scope of the concept of the present application disclosed in this specification, equivalents to the disclosed content, and / or the scope of the technical or knowledge of the art. The above-described embodiments describe the best embodiments for implementing the technical idea of the present application, and various changes required in specific application fields and uses of the present application are also feasible. Therefore, the detailed description of the present application is not intended to limit the present application to the disclosed embodiments. Furthermore, the appended claims should be interpreted to include other embodiments.

[0076] [Legend of Reference Numerals]

[0077] Semiconductor process apparatus: 100

[0078] Cassette container: C

[0079] Article conveying apparatus: 1000

[0080] Track: 300

[0081] Travel track: 310

[0082] Steering track: 330

[0083] Conveying unit: 500

[0084] Main body: 510

[0085] Guide track: 512

[0086] Wheel assembly: 520, 530

[0087] Travel wheel assembly: 520

[0088] Steering wheel assembly: 530

[0089] Hub: 600

[0090] Bearing: 532

[0091] Resilient wheel: 533

[0092] Frame: 540

[0093] Neck: 550

[0094] Slider: 560

[0095] Lifter: 570

[0096] Belt: 572

[0097] Gripping member: 580

[0098] Hub: 600

[0099] Buffer structure: S

[0100] Holes: 610, 620, 630, 640, 650, 660

[0101] First hole: 610

[0102] Second hole: 620

[0103] Third hole: 630

[0104] Fourth hole: 640

[0105] Fifth hole: 650

[0106] Sixth hole: 660

[0107] Connection hole: 690.

Claims

1. A conveying unit for conveying a container containing articles and traveling on a track, the conveying unit comprising: The main body has a driver; as well as A wheel assembly connected to the main body and traveling on the track. The wheel assembly includes: Bearings; and The hub surrounding the bearing, The hub has a cushioning structure including at least one hole extending from one surface of the hub to another surface. The hole is arc-shaped, and the center of curvature of the hole is the same as the center of curvature of the hub. The hole includes a plurality of first holes and a plurality of second holes having a radius of curvature different from that of the first holes, and the buffer structure further includes a plurality of connecting holes connecting the first holes and the second holes to each other. A virtual straight line drawn from the center of the hub along the radial direction of the hub overlaps with the at least one hole.

2. The conveying unit according to claim 1, wherein, The holes are formed in the hub and are multiple in number. The multiple holes having the same radius of curvature are formed in the hub in a spaced-apart manner.

3. The conveying unit according to claim 1 or 2, wherein, The wheel assembly also includes a resilient wheel that surrounds the hub and is made of a resilient material.

4. An article conveying device, the article conveying device comprising: A travel track set along the top of a semiconductor production line where semiconductor process equipment is continuously arranged; A conveyor unit traveling on the travel track; as well as A steering track used to change the direction of travel of the conveying unit. The conveying unit includes: The main body has a driver; A travel wheel assembly connected to the main body and traveling on the travel track; and A steering wheel assembly connected to the main body and in contact with the steering track when the direction of travel is changed. The steering wheel assembly includes: Bearings; and The hub surrounding the bearing, The hub has a cushioning structure including at least one hole extending from one surface of the hub to another surface. The hole is arc-shaped, and the center of curvature of the hole is the same as the center of curvature of the hub. The hole includes a plurality of first holes and a plurality of second holes having a radius of curvature different from that of the first holes, and the buffer structure further includes a plurality of connecting holes connecting the first holes and the second holes to each other. A virtual straight line drawn from the center of the hub along the radial direction of the hub overlaps with the at least one hole.

5. The article conveying device according to claim 4, wherein, The holes are formed in the hub and are multiple in number. The multiple holes having the same radius of curvature are formed in the hub in a spaced-apart manner.

6. The article conveying device according to claim 4 or 5, wherein, The wheel assembly also includes a resilient wheel that surrounds the hub and is made of a resilient material.

7. An article conveying device, the article conveying device comprising: A travel track set along the top of a semiconductor production line where semiconductor process equipment is continuously arranged; A conveyor unit traveling on the travel track; as well as A steering track used to change the direction of travel of the conveying unit. The conveying unit includes: The main body has a driver; A travel wheel assembly connected to the main body and traveling on the travel track; and A steering wheel assembly connected to the main body and in contact with the steering track when the direction of travel is changed. Wherein, the travel wheel assembly or the steering wheel assembly includes: Bearings; and The hub surrounding the bearing; and An elastic wheel surrounds the hub and is made of a resilient material. The wheel hub has a buffer structure. The buffer structure includes at least one hole extending from one surface of the hub to another surface. The hole is arc-shaped, and the center of curvature of the hole is the same as the center of curvature of the hub. The hole includes a plurality of first holes and a plurality of second holes having a radius of curvature different from that of the first holes, and the buffer structure further includes a plurality of connecting holes connecting the first holes and the second holes to each other. A virtual straight line drawn from the center of the hub along the radial direction of the hub overlaps with the at least one hole.

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