Light source device and light source control method

Abstract

Light source device and light source control method. The light source device is adapted to provide a light source for a device under test, and includes: a circuit board, a controller, a sampling module, and a driving module disposed on the circuit board, and a light source module electrically connected to the sampling module and the driving module, wherein: The driving module is adapted to output a corresponding driving signal to the light source module based on an input driving control signal; The sampling module is adapted to collect the driving signal output by the driving module and output it to the controller; The controller is adapted to calculate the difference between the driving signal and a preset target driving signal based on the driving signal, and based on the difference, adjust the duty cycle of the pulse width adjustment signal output by the controller, and adjust the driving control signal based on the duty cycle; The light source module is adapted to emit light with a corresponding luminous flux according to the input driving signal. By adopting the above solution, stable light can be output to meet the requirements of optical detection.

Description

Technical Field

[0001] The embodiments of this specification relate to the technical field of optical detection, and in particular, to a light source device and a light source control method. Background Art

[0002] Automated optical inspection is based on optical principles. It mainly illuminates the object to be detected through an illumination system, and uses an imaging system to image the object to be measured, and then analyzes and processes the image to obtain the corresponding parameters of the object to be measured.

[0003] During the entire detection process, the selection of the light source directly affects the imaging quality and the accuracy and stability of the detection results. At present, the commonly used light sources mainly include fluorescent lamps, halogen light sources, and LED (Light Emitting Diode) light sources, etc. Comparatively speaking, LED light sources have the advantages of high energy conversion efficiency, small heat generation, and long service life, and are often used in light source devices in illumination systems.

[0004] However, in the actual operation process, the power of a single LED lamp is very low, generally only a few watts, and the luminous flux emitted by it is far from sufficient. Although the problem of luminous flux can be solved by arranging multiple LED lamps in an array, using multiple LED lamps will generate too much heat. Since the volt-ampere characteristic of an LED lamp shows that the voltage drop decreases as the temperature rises, too much heat will cause the electrical signals obtained by each LED lamp to be unstable, and then cause the luminous flux output by the LED lamp to be unstable, which cannot meet the requirements of optical detection. Summary of the Invention

[0005] In view of this, the embodiments of this specification provide a light source device and a light source control method, which can output stable light and meet the requirements of optical detection.

[0006] First of all, the embodiments of this specification provide a light source device suitable for providing a light source for an object to be detected. Among them, the light source device includes: a circuit board, a controller, a sampling module, and a driving module provided on the circuit board, and a light source module electrically connected to the sampling module and the driving module, where:

[0007] The driving module is suitable for outputting a corresponding driving signal to the light source module based on the input driving control signal;

[0008] The sampling module is suitable for collecting the driving signal output by the driving module and outputting it to the controller;

[0009] The controller is adapted to calculate the difference between the drive signal and a preset target drive signal based on the drive signal, and based on the difference, adjust the duty cycle of the pulse width adjustment signal output by the controller, and adjust the drive control signal based on the duty cycle;

[0010] The light source module is adapted to emit light with a corresponding luminous flux according to the input drive signal.

[0011] Optionally, the drive signal includes a drive current signal, and the target drive signal includes a target drive current signal;

[0012] The sampling module is adapted to collect a first drive current signal and a second drive current signal corresponding to the light source module within two preset sampling periods and output them to the controller;

[0013] The controller is adapted to calculate a first drive current difference between the first drive current signal and the target drive current signal, and calculate a second drive current difference between the second drive current signal and the target drive current signal, and obtain a corresponding voltage difference according to the first drive current difference, the second drive current difference, the second drive current signal, and a preset calculation formula, and based on the voltage difference, adjust the duty cycle of the pulse width adjustment signal output by the controller, and adjust the drive current signal based on the duty cycle.

[0014] Optionally, the controller is adapted to adjust the counter value inside the controller based on the voltage difference, and obtain a pulse width adjustment signal corresponding to the counter value with a corresponding duty cycle according to the counter value and the mapping relationship between the counter value and the duty cycle of the pulse width adjustment signal.

[0015] Optionally, the light source device further includes: a power selection module and a power supply module, where:

[0016] The power supply module is respectively connected to the controller and the drive module and is adapted to provide voltage;

[0017] The power selection module is connected to the drive module and has a first state and a second state;

[0018] The controller is further adapted to output a drive control analog signal to the drive module;

[0019] The driving module is adapted to, when the power supply selection module is in the first state, based on the driving control analog signal input by the controller and the voltage provided by the power supply module, input the obtained first driving signal to the light source module; and when the power supply selection module is in the second state, select the power supply voltage of the driving module itself as the driving control signal, and based on the voltage provided by the power supply module, input the obtained second driving signal to the light source module.

[0020] Optionally, the driving module includes a relay unit, an operational amplifier unit, and a driving unit, where:

[0021] The relay unit is adapted to, when the power supply selection module is in the first state, output the driving control analog signal output by the control device to the operational amplifier unit; and when the power supply selection module is in the second state, use the power supply voltage of the driving module itself as the driving control analog signal and output it to the operational amplifier module;

[0022] The operational amplifier unit is adapted to amplify the driving control analog signal to obtain the driving control signal and output it to the driving unit;

[0023] The driving unit is adapted to generate a driving signal according to the driving control signal and output it to the light source module.

[0024] Optionally, the relay unit includes:

[0025] A first voltage input terminal, connected to the power supply module;

[0026] A second voltage input terminal, connected to the power supply of the driving module itself;

[0027] A control terminal, connected to the power supply selection module;

[0028] A relay, connected between the first voltage input terminal and the control terminal;

[0029] A driving control analog signal input terminal, connected to the controller;

[0030] An output terminal, connected to the driving control analog signal input terminal and the second voltage input terminal respectively.

[0031] Optionally, the light source device further includes: a first voltage dividing module and a second voltage dividing module provided on the circuit board;

[0032] The relay unit further includes:

[0033] A first voltage dividing input terminal, connected to the first voltage dividing module;

[0034] The second voltage dividing input terminal, connected to the second voltage dividing module, is adapted to make the first driving signal and the second driving signal the same.

[0035] Optionally, the operational amplifier unit includes: a first operational amplifier, a first resistor, a second resistor, a voltage dividing module, a second operational amplifier, and a third operational amplifier, where:

[0036] The positive input terminal of the first operational amplifier is connected to the output terminal of the relay unit, its negative input terminal and output terminal are connected to the first end of the first resistor, its first control terminal is connected to the power supply voltage of the driving unit itself, and its second control terminal is grounded;

[0037] The second end of the first resistor is connected to the negative input terminal of the second operational amplifier;

[0038] The voltage dividing module includes a third resistor and a fourth resistor. Wherein, the first end of the third resistor is respectively connected to the power supply voltage of the driving unit itself and the positive input terminal of the second operational amplifier; the first end of the fourth resistor is connected to the positive input terminal of the second operational amplifier, and its second end is grounded;

[0039] The negative input terminal of the second operational amplifier is connected to the positive input terminal of the third operational amplifier through the second resistor, its output terminal is connected to the positive input terminal of the third operational amplifier, its first control terminal is connected to the power supply voltage of the driving module itself, and its second control terminal is grounded;

[0040] The negative input terminal of the third operational amplifier is connected to its output terminal, its first control terminal is connected to the power supply voltage of the driving module itself, and its second control terminal is grounded.

[0041] Optionally, the light source device further includes: a housing, adapted to accommodate the circuit board;

[0042] The power supply module includes:

[0043] A power supply interface, provided on the housing, is adapted to externally connect a power supply;

[0044] A switching power supply, connected to the power supply interface, is adapted to convert the voltage level of the externally connected power supply and provide voltage for the light source device.

[0045] Optionally, the light source module includes: a light source; a connection component, one end of which is provided on the housing and the other end is connected to the lamp bead bracket; the lamp bead bracket, provided inside the housing, is adapted to place the light source.

[0046] Optionally, the light source device further includes: a light guiding module, provided on the housing, is adapted to guide out the light emitted by the light source module.

[0047] Optionally, the light source device further includes: a heat dissipation module disposed on the light source module and adapted to dissipate heat from the light source module.

[0048] Optionally, the light source device further includes: a temperature detection module connected between the light source module and the driving module and adapted to disconnect the connection between the light source module and the driving module when detecting that the temperature of the light source module is greater than a preset temperature.

[0049] Correspondingly, an embodiment of the present specification further provides a light source control method adapted to control the light output by the light source device. The light source device includes a circuit board, a controller, a sampling module, and a driving module disposed on the circuit board, and a light source module electrically connected to the sampling module. The light source control method includes:

[0050] In response to an input driving control signal, output a corresponding driving signal to the light source module;

[0051] Collect the driving signal output by the driving module and output it to the controller;

[0052] Based on the driving signal, calculate the difference between the driving signal and a preset target driving signal, and based on the difference, adjust the duty cycle of the pulse width adjustment signal output by the controller, and adjust the driving control signal based on the duty cycle;

[0053] Control the light source module to emit light with a corresponding luminous flux according to the input driving signal.

[0054] By using the light source device in the embodiment of the present specification, based on the input driving control signal, the driving module can output a corresponding driving signal, the sampling module can collect the driving signal output by the driving module and output it to the controller, and the controller can calculate the difference between the driving signal and the preset target driving signal, and based on the difference, adjust the duty cycle of the pulse width adjustment signal output by the controller, and adjust the driving control signal based on the duty cycle, so that the driving signal can be the same as the preset target driving signal and output to the light source module, so that the light source module can obtain the same driving as the target driving signal, that is, the driving signal output to the light source module can maintain a stable state, and thus can output stable light. Therefore, by using the light source device provided in the embodiment of the present specification, stable light can be output to meet the optical detection requirements.

[0055] Further, the drive signal includes a drive current signal, and the target drive signal includes a target drive current signal. By separately calculating the differences between the first drive current signal and the second drive current signal collected by the sampling module within two preset sampling periods and the target drive current signal, a first drive current difference and a second drive current difference can be obtained. Moreover, based on the obtained first drive current difference, second drive current difference, second current signal, and a preset calculation formula, a corresponding voltage difference can be obtained. Based on the voltage difference, the duty cycle of the pulse width adjustment signal output by the controller can be adjusted. Based on the duty cycle, the second drive current signal can be adjusted so that the second current signal is the same as the target drive current signal. And by calculating the voltage differences in the two sampling periods, the error caused by temperature changes can be reduced, the accuracy of the duty cycle of the obtained pulse width adjustment signal can be improved, and further the accuracy of the adjusted drive signal can be improved.

[0056] Further, the light source device may further include a power supply selection module, a power supply module, and a controller. The controller is further adapted to output a drive control analog signal to the drive module. When the power supply selection module is in the first state, the drive module can input a first drive signal to the light source module based on the drive control analog signal input by the controller and the voltage provided by the power supply module. And when the power supply selection module is in the second state, the drive module selects its own power supply voltage as the drive control signal and inputs a second drive signal to the light source module based on the voltage provided by the power supply module. By means of the power supply selection module having the first state and the second state, the drive signal of the drive module can be manually or automatically selected to suit different application scenarios and improve the universality of the light source device.

[0057] Further, the light source device may further include a light guide module disposed on the housing. Through the light guide module, the light emitted from the light source module can be guided out of the housing.

[0058] Further, the light source device may further include a temperature detection module. When the temperature detection module detects that the temperature of the light source module is greater than a preset temperature, the path between the light source module and the drive module can be disconnected to prevent damage to the light source module due to excessive temperature. BRIEF DESCRIPTION OF THE DRAWINGS

[0059] In order to more clearly illustrate the technical solutions of the embodiments of this specification, the following will briefly introduce the drawings required for describing the embodiments of this specification or the prior art. Obviously, the following described drawings are only some embodiments of this specification. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0060] Figure 1 Shows a schematic diagram of an image of an object to be measured collected by a detection system;

[0061] Figure 2 Shows a schematic structural diagram of a light source device in an embodiment of the present specification

[0062] Figure 3 Shows a schematic structural diagram of a driving module in an embodiment of the present specification;

[0063] Figure 4 Shows a schematic structural diagram of a light source device in a specific application scenario in an embodiment of the present specification;

[0064] Figure 5 Shows in an embodiment of the present specification Figure 4 The corresponding installation layout diagram of the light source device therein;

[0065] Figure 6A and 6B Shows a schematic diagram of an image of an object to be measured collected under different illumination environments by a detection system using a light source device in an embodiment of the present specification;

[0066] Figure 7 Shows a flowchart of a light source control method in an embodiment of the present specification. Detailed implementation manners

[0067] As can be seen from the background art, the luminous flux output by the current light source device is unstable and it is difficult to meet the requirements of optical detection.

[0068] Referring to Figure 1 The schematic diagram of an image of an object to be measured collected by a detection system shown, as Figure 1 shown, using the detection system in the existing solution, due to the unstable light output by the light source device, it causes Figure 1 the captured image to be relatively blurred, and due to weak illumination, some areas captured are black. When performing detection, it is difficult to obtain the corresponding feature points and the detection process cannot be completed.

[0069] To solve the above technical problems, an embodiment of this specification provides a light source device. Based on an input drive control signal, a drive module can output a corresponding drive signal. A sampling module can collect the drive signal output by the drive module and output it to a controller. The controller can calculate the difference between the drive signal and a preset target drive signal, and based on the difference, adjust the duty cycle of the pulse width adjustment signal output by the controller, and based on the duty cycle, adjust the drive control signal, so that the drive signal can be the same as the preset target drive signal and is output to the light source module, so that the light source module can obtain the same drive as the target drive signal, that is, no matter how the temperature changes, the drive signal output to the light source module can remain in a stable state, and thus can output stable light. Therefore, by using the light source device provided in this embodiment of the specification, stable light can be output to meet the optical detection requirements.

[0070] To enable those skilled in the art to better understand and implement the embodiments of this specification, the following will refer to the accompanying drawings and be described in detail through specific application examples.

[0071] Refer to Figure 2 The structural schematic diagram of a light source device in the embodiments of this specification is shown as Figure 2 shown. The light source device 200 can provide light for a measured object (for example, a wafer). Specifically, it can include a circuit board 210, a controller 240, a sampling module 230, and a drive module 220 disposed on the circuit board 210, and a light source module 250 electrically connected to the controller 240, the sampling module 230, and the drive module 220, where:

[0072] The drive module 220 is adapted to output a corresponding drive signal to the light source module 250 based on an input drive control signal;

[0073] The sampling module 230 is adapted to collect the drive signal output by the drive module 220 and output it to the controller 240;

[0074] The controller 240 is adapted to calculate the difference between the drive signal and a preset target drive signal based on the drive signal, and based on the difference, adjust the duty cycle of the pulse width adjustment signal output by the controller 240, and adjust the drive control signal based on the duty cycle;

[0075] The light source module 250 is adapted to emit light according to the corresponding luminous flux according to the input drive signal.

[0076] The working principle of the light source device 200 in the above embodiment is briefly described as follows:

[0077] In a specific implementation, the driving module 220 can generate a corresponding driving signal to the light source module 250 based on the input driving control signal. During this process, the sampling module 230 can collect the driving signal output by the driving module 220 and output it to the connected controller 240. The controller 240 can calculate the difference between the driving signal and a preset target driving signal, and based on the magnitude of the difference, adjust the duty cycle of the pulse width adjustment signal output by the controller, and adjust the driving control signal based on the duty cycle, so that the driving control signal adjusted by the controller 240 is the same as the target driving signal in magnitude, and further enable the driving signal output by the driving module 220 to maintain a stable state. After that, the light source module 250 can emit light according to the corresponding luminous flux based on the input driving signal.

[0078] Thus, based on the difference between the driving signal and the preset target driving signal, the duty cycle of the pulse width adjustment signal output by the controller can be adjusted, and the driving control signal can be adjusted based on the duty cycle, so that the driving signal can be the same as the preset target driving signal and output to the light source module, enabling the light source module to obtain the same driving as the target driving signal, that is, regardless of how the temperature changes, the driving signal output to the light source module can maintain a stable state, and thus a stable light can be output.

[0079] To enable those skilled in the art to better understand and implement the embodiments of this specification, the concepts, solutions, principles, advantages, etc. of the embodiments of this specification will be described in detail below in conjunction with the drawings and through specific application examples.

[0080] In some embodiments of this specification, the controller can be implemented by a processing chip such as a Central Processing Unit (CPU) or a Field Programmable Gate Array (FPGA), or can also be implemented by an Application Specific Integrated Circuit (ASIC) or one or more integrated circuits configured to implement the embodiments of the present invention.

[0081] In a specific implementation, the controller can use a general computer device to perform data communication and data operations with the acquisition module and the driving module. The embodiments of this specification do not involve improvements to the specific working methods of the computing device. The processes of the computing device for obtaining data and the comparison process can both be implemented using existing technologies or conventional technical means in the art.

[0082] In a specific implementation, the circuit board, controller, sampling module and driving module can be designed in an integrated manner. On the one hand, the volume of the entire light source device can be reduced; on the other hand, the interference of the external environment on the controller, sampling module and driving module can be reduced, and the accuracy of the output driving control signal can be improved.

[0083] In a specific implementation, based on the actual application scenario, the driving signal output to the light source module may be a driving current signal or a driving voltage signal. In some embodiments of this specification, the driving signal output by the driving module based on the input driving signal may be a driving current signal, and accordingly, the target driving signal in the embodiments of this specification may be a target current driving signal.

[0084] As mentioned above, during the light source device's light emission process, its internal temperature will rise, thereby affecting the stability of the electrical signal output to the light source module. Based on this, in order to reduce the impact of temperature changes, in some embodiments of this specification, the sampling module can collect the first driving current signal e corresponding to the light source module within two preset sampling periods T. i-1 and the second driving current signal e i , and outputs it to the controller; accordingly, the controller can calculate the first drive current signal e i-1 The target drive current signal e x The first driving current difference e n-1 , and calculate the second drive current signal e i The target drive current signal e x The second driving current difference e n , and according to the first driving current difference e n-1 , the second driving current difference e n , the second driving current signal e i And the preset calculation formula to get the corresponding voltage difference u (n) , and based on the voltage difference u (n) , adjusting the duty cycle of the pulse width adjustment signal output by the controller, and adjusting the drive current signal based on the duty cycle so that the drive current signal is consistent with the target drive current signal e x same.

[0085] As an optional example, the voltage difference u can be calculated using the following formula: (n) :

[0086]

[0087] Among them, K p is the proportional control parameter, K i is the integral control parameter, K dis the differential control parameter, and n represents the number of sampling times. Specifically, the magnitudes of the respective parameters can be selected according to actual requirements.

[0088] Thus, by calculating the voltage difference between two sampling periods, the error caused by temperature change can be reduced, the accuracy of the duty cycle of the obtained pulse width adjustment signal can be improved, and further the accuracy of the adjusted drive signal can be improved.

[0089] In a specific implementation, to further reduce the influence of temperature change on the drive current signal, the acquisition module can respectively acquire the first drive current signal and the second drive current signal corresponding to the light source module in two consecutive sampling periods.

[0090] In a specific implementation, the controller can adjust the value of the internal counter according to the magnitude of the voltage difference calculated by formula (1) to change the duty cycle of the pulse width adjustment signal.

[0091] Specifically, the controller can adjust the value of the internal counter based on the voltage value difference, and according to the counter value and the mapping relationship between the counter value and the duty cycle of the pulse width adjustment signal, obtain a pulse width adjustment signal corresponding to the counter value with a corresponding duty cycle.

[0092] Specifically, when the calculated voltage difference is greater than 0, it indicates that the sampled drive current signal is greater than the target drive current. At this time, the value of the counter can be decreased. Since there is a corresponding relationship between the counter value and the duty cycle of the pulse width adjustment signal, when the counter value decreases, the duty cycle of the pulse width adjustment signal decreases accordingly. Furthermore, through the duty cycle, the magnitude of the output drive current signal can be decreased, making the drive current signal equal to the target drive current. When the calculated voltage difference is less than 0, it indicates that the sampled drive current signal is less than the target drive current. At this time, the value of the counter can be increased. Since there is a corresponding relationship between the counter value and the duty cycle of the pulse width adjustment signal, when the counter value increases, the duty cycle of the pulse width adjustment signal increases accordingly. Furthermore, through the duty cycle, the magnitude of the output drive current signal can be increased, making the drive current signal equal to the target drive current.

[0093] It should be noted that the method of changing the duty cycle of the pulse width adjustment signal by changing the value of the internal counter of the controller is only an example for illustration. In the embodiments of this specification, the method of adjusting the pulse width adjustment signal is not limited. For example, the controller can also be externally connected to a counter, and the duty cycle of the pulse width adjustment signal can be changed by the change of the external counter value.

[0094] Through the above method, the drive signal output to the light source module can be made the same as the target drive signal by changing the duty cycle of the pulse width adjustment signal, and further the light source module can emit light according to the corresponding luminous flux.

[0095] On this basis, according to specific application scenarios and actual situations, the above embodiments can be further extended and optimized. For example, in some scenarios, there may be multiple sources of the drive control signal for the drive pulse width. In this case, it is necessary to select a specific source to select the corresponding drive control signal.

[0096] In some embodiments of this specification, continuing to refer to Figure 2 , the light source device 200 may further include a power supply selection module 270 and a power supply module 260, where: the power supply module 260 is respectively connected to the controller 240 and the drive module 220 and is adapted to provide a voltage; the power supply selection module 270 is connected to the drive module 220 and has a first state and a second state; the controller 240 is further adapted to output a drive control analog signal to the drive module 220; the drive module 220 is adapted to, when the power supply selection module 270 is in the first state, based on the drive control analog signal input by the controller 240 and the voltage provided by the power supply module 260, input a first drive signal to the light source module 250; and when the power supply selection module 270 is in the second state, select the power supply voltage of the drive module 220 itself as the drive control signal and, based on the voltage provided by the power supply module 260, input a second drive signal to the light source module 250.

[0097] Specifically, the power supply module 260 can supply power to the drive module 220 and the controller 240. By setting the state of the power supply selection module 270 (for example, the first state and the second state), different drive control signals can be selected, and then the corresponding drive signals can be input to the light source module 250. For example, when the power supply selection module 270 is in the first state, the drive module 220 can, according to the drive control analog signal input by the controller 240 and the voltage provided by the power supply module 260, input a first drive signal to the light source module 250; when the power supply selection module 270 is in the second state, the drive module 220 can select its own power supply voltage as the drive control signal and, based on the voltage provided by the power supply module, input a second drive signal to the light source module 250.

[0098] Thus, through the power supply selection module having the first state and the second state, the drive signal of the drive module can be manually or automatically selected to suit different application scenarios and improve the universality of the light source device.

[0099] In a specific implementation, in combination with Figure 2 , referring to Figure 3 the schematic structural diagram of a drive module in the embodiments of this specification shown in Figure 3As shown, the driving module 220 may include a relay unit 221, an operational amplifier unit 222, and a driving unit 223, where:

[0100] The relay unit 221 is adapted to output the driving control analog signal output by the controller 240 to the operational amplifier unit 222 when the power supply selection module 270 is in the first state; and output the voltage of the driving module 220 itself as the driving control analog signal to the operational amplifier unit 222 when the power supply selection module 270 is in the second state;

[0101] The operational amplifier unit 222 is adapted to amplify the driving control analog signal to obtain the driving control signal and output it to the driving unit 223;

[0102] The driving unit 223 is adapted to generate a driving signal according to the driving control signal and output it to the light source module 250.

[0103] Specifically, when the power supply selection module 270 is in the first state, the relay unit 221 can output the driving control analog signal output by the controller 240 to the operational amplifier unit 222, and the operational amplifier unit 222 can amplify the driving control analog signal and output the obtained driving control signal to the driving unit 223. Under the control of the driving control signal, a corresponding driving signal can be output to the light source module 250; when the power supply selection module 270 is in the second state, the relay unit 221 can use the power supply voltage of the driving module 220 itself as the driving control analog signal and output it to the operational amplifier module 222. The operational amplifier unit 222 can amplify the driving control analog signal and output the obtained driving control signal to the driving unit 223. Under the control of the driving control signal, a corresponding driving signal can be output to the light source module 250, and the light source module 250 can emit light.

[0104] It should be noted that whether obtaining the driving control analog signal from the controller or using the power supply voltage of the driving module itself as the driving control analog signal, ultimately only one driving control analog signal is input to the operational amplifier unit, that is, the operational amplifier unit only amplifies one driving control analog signal, and then generates one driving control signal to the driving unit.

[0105] In some embodiments of this specification, continue to refer to Figure 3 , the relay unit 222 may include:

[0106] A first voltage input terminal 5, connected to the power supply module 260;

[0107] The second voltage input terminal 1 is connected to the power supply of the driving module itself ( Figure 3 not shown).

[0108] The control terminal 4 is connected to the power supply selection module 270.

[0109] The relay K is connected between the first voltage input terminal 5 and the control terminal 4.

[0110] The driving control analog signal input terminal 6 is connected to the controller 240.

[0111] The output terminal 7 is respectively connected to the driving control analog signal input terminal 6 and the second voltage input terminal 1.

[0112] Specifically, the control terminal 4 can select the driving control analog signal IN+ input by the control 240 as the driving control signal according to the status signal Rs input by the power input module, and output it to the operational amplifier unit 222 through the output terminal 7, or use the power supply V2 of the driving module itself connected to the second voltage input terminal 1 as the driving control signal and output it to the operational amplifier unit 222 through the output terminal 7.

[0113] In a specific implementation, the voltage magnitude of the second voltage input terminal can be changed so that the first driving signal and the second driving signal output to the power supply module are the same. Based on this, continue to refer to Figure 3 , the light source device in the embodiment of this specification may further include a first voltage dividing module 280 and a second voltage dividing module 281 provided on the circuit board. Correspondingly, the relay unit 221 may further include:

[0114] The first voltage dividing input terminal 8 is connected to the first voltage dividing module 280.

[0115] The second voltage dividing input terminal 2 is connected to the second voltage dividing module 281 and is adapted to make the first driving signal and the second driving signal the same.

[0116] Thus, by externally connecting corresponding voltage dividing modules (for example, the first voltage dividing module 280 and the second voltage dividing module 281), the magnitude of the second voltage V2 input to the relay unit 221 through the second voltage input terminal 1 can be flexibly adjusted according to actual requirements, and further the first driving signal and the second driving signal.

[0117] It can be understood that the embodiments of this specification do not limit the forms of the first voltage dividing module and the second voltage dividing module. For example, the first voltage dividing module can be formed by multiple resistors in parallel and / or in series-parallel, and the second voltage dividing module can include a capacitor in parallel with the resistor in addition to the resistor.

[0118] Continue to refer to Figure 3, the operational amplifier unit 222 may include: a first operational amplifier A1, a first resistor R1, a second resistor R2, and a voltage dividing module ( Figure 3 not shown), a second operational amplifier A2, and a third operational amplifier A3, where:

[0119] The positive input terminal of the first operational amplifier A1 is connected to the output terminal 7 of the relay unit, its negative input terminal and output terminal are connected to the first end of the first resistor R1, its first control terminal is connected to the power supply voltage V2 of the drive unit itself, and its second control terminal is grounded to GND;

[0120] The second end of the first resistor R1 is connected to the negative input terminal of the second operational amplifier A2;

[0121] The voltage dividing module includes a third resistor R3 and a fourth resistor R4. Wherein, the first end of the third resistor R3 is respectively connected to the power supply voltage V2 of the drive module itself and the positive input terminal of the second operational amplifier A2; the first end of the fourth resistor R4 is connected to the positive input terminal of the second operational amplifier A2, and its second end is grounded to GND;

[0122] The negative input terminal of the second operational amplifier A2 is connected to the positive input terminal of the third operational amplifier A3 through the second resistor R2, its output terminal is connected to the positive input terminal of the third operational amplifier A3, its first control terminal is connected to the power supply voltage V2 of the drive module itself, and its second control terminal is grounded to GND;

[0123] The negative input terminal of the third operational amplifier A3 is connected to its output terminal, its first control terminal is connected to the power supply voltage V2 of the drive module itself, and its second control terminal is grounded to GND.

[0124] In some embodiments of this specification, the drive unit 223 may be a constant current source device. Based on the drive signal output by the operational amplifier unit, a constant current signal is output to the light source module 250.

[0125] The following combines Figure 3 , and details the drive process of the drive module.

[0126] Under the action of the power supply module 260, the relay unit 221 can work normally. When the status signal Rs input at the control terminal 4 is in the first state (for example, the first state can be a low level), the controller 240 can input a drive control analog signal IN+ through the drive control analog signal input terminal 6. At this time, the drive control analog signal input terminal 6 is connected to the output terminal 7. Since the relay K is not powered on, the first voltage input terminal is disconnected from the output terminal 7. Then, the output terminal 7 can output a voltage VIN corresponding to the drive control analog signal IN+ to the non-inverting input terminal of the first operational amplifier A1. Since the inverting input terminal of the first operational amplifier A1 is connected to its output terminal, the first operational amplifier A1 can be regarded as a voltage follower, that is, the first operational amplifier A1 outputs V out1 = VIN.

[0127] Continuing to refer to Figure 3 , the voltage at the non-inverting input terminal of the second operational amplifier A2 is V2*R4 / (R3 + R4). Correspondingly, the voltage at its inverting input terminal is also V2*R4 / (R3 + R4). Then, the voltage V out2 at its output terminal is:

[0128]

[0129] Similarly, since the inverting input terminal of the third operational amplifier A3 is connected to its output terminal, the third operational amplifier A3 can be regarded as a voltage follower, that is, the third operational amplifier A3 outputs V out3 = V out2 .

[0130] The drive unit can generate a corresponding drive current signal according to the voltage V out3 output by the third operational amplifier A3.

[0131] When the status signal Rs input at the control terminal 4 is in the second state (for example, the second state can be a high level), at this time, the relay K is powered on, the second voltage input terminal 1 can be connected to the power supply voltage V2 of the drive module itself, and the output terminal 7 is disconnected from the drive control analog signal input terminal 6. The output terminal 7 can output a voltage VIN corresponding to the power supply voltage V2 of the drive module itself to the non-inverting input terminal of the first operational amplifier A1, and perform amplification processing on VIN. Finally, the output voltage V out3 = V out2 . For the specific process, reference can be made to the foregoing embodiments, and details will not be elaborated herein.

[0132] In a specific implementation, to make the VIN values output by the drive control analog signal input terminal 6 and the second voltage input terminal 1 through the output terminal 7 the same, in some embodiments, a corresponding voltage division module can be connected through the first voltage division input terminal 8 or the second voltage division output terminal 2.

[0133] The amplification process of the operational amplifier unit is described below through specific examples.

[0134] Assume that resistors R1 = R2 = R3 = R4 = 1 kΩ, and the power supply voltage V2 of the drive module itself is 5V. Then the range of VIN output by the relay unit is 0 to 5V.

[0135] After being amplified by the first operational amplifier A1, the output V out1 = VIN. After being amplified by the second operational amplifier A2, as can be seen from formula (2), the output V out2 = (-VIN + 5)V. Then the output V after being amplified by the third operational amplifier A3 out3 = V out2 = (-VIN + 5)V. That is, the voltage range output by the operational amplifier unit is 0 to 5V. When the voltage output at the output terminal 6 is the maximum value of 5V, the minimum value of 0V is obtained, and the output drive current is the maximum at this time; when the voltage output at the output terminal 6 is the maximum value of 0V, the maximum value of 5V is obtained, and the output drive current is 0A.

[0136] In a specific implementation, according to the design requirements, the power supply module can be set inside the light source device, or an external power supply can be used to supply power to the light source device. In some embodiments of this specification, the light source device can adopt an external power supply method. Correspondingly, the light source device can further include a housing adapted to accommodate the circuit board. The power supply module can include a power supply interface provided on the housing and adapted to connect to an external power supply; a switching power supply connected to the power supply interface and adapted to convert the voltage level of the external power supply to supply power to the light source device.

[0137] Specifically, when the light source device needs to emit light, it can be connected to an external power supply through the power supply interface. Since the voltage levels of the light source device and the external power supply are different, the switching power supply can be used to convert the voltage of the external power supply into the voltage required by the light source device to supply power to the light source device.

[0138] As a specific example, the voltage of the external power supply can be 220V, and the switching power supply can be a 220V to 24V switching power supply. Thus, through the 220V to 24V switching power supply, the power supply voltage obtained by the light source device is 24V, that is Figure 3 the input voltage of the first voltage input terminal 5 in

[0139] It should be noted that the above description of the switching power supply is only for illustrative purposes. The embodiments of this specification do not limit the specific type of the switching power supply, as long as it can be adapted to the voltage of the external power supply and the voltage of the light source device.

[0140] In some embodiments of this specification, the light source module may include a light source, a connection component, and a lamp bead bracket, where: one end of the connection component is disposed on the housing, and the other end is connected to the lamp bead bracket; the lamp bead bracket is disposed inside the housing and is provided with ports for placing the light source.

[0141] In some embodiments of this specification, the light source placed on the lamp bead bracket may include one or more coupled light-emitting diodes, and the multiple light-emitting diodes may be connected in series, in parallel, or in a combination of series and parallel.

[0142] In specific implementation, the light emitted by the light source device may be at a relatively long distance from the object to be detected. If the light emitted by the light source device is directly used for detection light, it may be difficult to meet the detection requirements. Therefore, in order to improve the lighting reliability of the light source device, the light source device provided in the embodiments of this specification may further include a light guide module disposed on the housing and adapted to export the light emitted by the light source module. Thus, through the light guide module, the light emitted by the light source module can be exported to the outside of the housing.

[0143] In some embodiments of this specification, the light guide module may be an optical fiber. Using the optical fiber, the light generated by the light source device can be output to an optical detection device (such as a camera) for collecting an image of the object to be measured, so as to provide light that meets the detection requirements.

[0144] In specific implementation, if the light source device emits light continuously or the light source device is in an environment with a relatively high temperature, its internal temperature will rise extremely rapidly. If the temperature is too high, the internal light-emitting module may be burned out. Therefore, the light source device in the embodiments of this specification may further include a heat dissipation module disposed on the light source module and adapted to dissipate heat from the light source module.

[0145] In specific implementation, the temperature of the light source module cannot be too high. When it reaches a certain temperature, the light source module needs to be disconnected. Therefore, the light source device in the embodiments of this specification may further include a temperature detection module connected between the light source module and the drive module and adapted to disconnect the connection between the light source module and the drive module when detecting that the temperature of the light source module is greater than a preset temperature.

[0146] For example, when the temperature detection module detects that the temperature on the surface of the light source module reaches 60 degrees, the temperature detection module automatically disconnects, so that the path between the light source module and the drive module is disconnected, and the light source module stops emitting light, achieving the purpose of protecting the light source module.

[0147] To enable those skilled in the art to better understand and implement the embodiments of this specification, the following uses a structural schematic diagram of a light source device in a specific application scenario to detail the structure and working process of the light source device in the embodiments of this specification.

[0148] Referring to Figure 4 the schematic structural diagram of the light source device in a specific application scenario in the embodiment of this specification as shown in Figure 4 the figure, the light source device M may include: a housing ( Figure 4 not shown), a circuit board M20 disposed inside the housing, and a controller ( Figure 4 not shown), a sampling module ( Figure 4 not shown), and a driving module ( Figure 4 not shown) disposed on the circuit board M20, and a light source module M30 electrically connected to the controller, the sampling module, and the driving module.

[0149] Continuing to refer to Figure 4 , the housing may include a bottom plate M11 and a cover plate M12, wherein; the bottom plate M11 may include a cavity Q0, and the cavity Q0 may accommodate the circuit board M20, as well as the controller, the sampling module, and the driving module disposed on the circuit board M20; the cover plate M12 fits with the bottom plate M11 and is adapted to cover the bottom plate M11.

[0150] It can be understood that the above structure of the housing is only an example for illustration, and the embodiment of this specification does not limit the specific structure of the housing, as long as it can accommodate the circuit board, as well as the controller, the sampling module, and the driving module disposed on the circuit board. For example, in some other examples, the bottom plate and the cover surface may be integrally cylindrical.

[0151] For the specific composition and working principle of the controller, the sampling module, and the driving module, reference may be made to the foregoing embodiments, and details will not be elaborated herein.

[0152] The light source module M30 may include a light source M31, a connection component M32 disposed on the bottom plate M11, and a lamp bead bracket M33 connected to the connection component M32, and the port of the lamp bead bracket M33 may place the light source M31.

[0153] As a specific example, the light source M31 may be a light emitting diode.

[0154] In a specific implementation, the driving module can generate a corresponding driving signal to the light source M31 based on the input driving control signal. During this process, the sampling module can collect the driving signal output by the driving module and output it to the connected controller. The controller can calculate the difference between the driving signal and a pre-set target driving signal, and based on the magnitude of the difference, adjust the duty cycle of the pulse width adjustment signal output by the controller, and adjust the driving control signal based on the duty cycle, so that the driving control signal adjusted by the controller is the same size as the target driving signal, thereby making the driving signal output by the driving module stable, and the light source M31 can emit light according to the corresponding luminous flux.

[0155] Continue to refer to Figure 4 , the light source device M further includes: a power supply selection module M50 and a power supply module M40, where: the power supply module M40 can include: a power supply interface M41 provided on the housing, and a switching power supply M42 connected to the power supply interface M41. For the descriptions of the power supply interface M41 and the switching power supply M42, please refer to the foregoing embodiments and will not be elaborated here.

[0156] The power supply selection module M50 can be connected to the driving module and has two states (a first state and a second state).

[0157] In a specific implementation, by twisting the power supply selection module M50, the switching between the two states can be achieved. For example, when the power supply selection module M50 is adjusted to the lowest gear, at this time the power supply selection module M50 corresponds to the first state, that is, the on state. At this time, the relay in the relay unit in the driving module is not powered on, and the driving module can input the obtained first driving signal to the light source module according to the input driving control analog signal of the controller; when the power supply selection module M50 is adjusted to the highest gear, at this time the power supply selection module M50 corresponds to the second state, that is, the off state. At this time, the relay in the relay unit in the driving module is powered on, and the driving module can use its own power supply voltage as the driving control signal and input it to the light source module as the second driving signal.

[0158] Continue to refer to Figure 4 , the light source device M in the embodiments of this specification may further include a light guide module M60 provided on the housing. The light guide module M60 has a through hole, and through the through hole, the light emitted by the light source module M30 can be output to the outside.

[0159] Continue to refer to Figure 4 , the light source device M in the embodiments of this specification may further include a heat dissipation module M70 provided on the light source module M30, which can dissipate heat from the light source module M30.

[0160] Continue to refer to Figure 4, the light source device M in the embodiments of this specification may further include a temperature detection module M80 connected between the light source module and the drive module, and when it detects that the temperature of the light source module is greater than a preset temperature, disconnect the connection between the light source module and the drive module.

[0161] It can be understood that the above description examples of the light source device are only for illustrative purposes. In actual applications, those skilled in the art can adaptively select and / or deform the structures and connection relationships of the above modules according to actual needs and application scenarios. Thus, more implementation schemes can be extended, and the embodiments of this specification do not limit these extended schemes. For example, to further improve the heat dissipation effect, a heat dissipation port can be provided on one side of the bottom plate; or a radiator, such as a fan, can be provided in the cavity to further improve the heat dissipation effect.

[0162] Figure 5 shows in the embodiments of this specification Figure 4 the installation layout schematic diagram of the light source device in Figure 5 As shown, the light source device M may include: a housing M10, a circuit board M20 disposed inside the housing M10, and a controller ( Figure 5 not shown), a sampling module ( Figure 5 not shown) and a drive module ( Figure 5 not shown) disposed on the circuit board M20, and a light source module M30 electrically connected to the controller, the sampling module, and the drive module.

[0163] Among them, the light source module M30 may include a light source M31, a connection component M32 disposed on the bottom plate M11, and a lamp bead bracket M33 connected to the connection component M32. The port of the lamp bead bracket M33 can place the light source M31.

[0164] Continue to refer to Figure 5 , the light source device M further includes: a power selection module M50 and a power supply module ( Figure 5 not shown), where: the power supply module may include: a power supply interface M41 disposed on the housing, and a switching power supply M42 electrically connected to the power supply interface M41. For the description of the power supply interface M41 and the switching power supply M42, please refer to the foregoing embodiments and will not be elaborated here.

[0165] In some embodiments of this specification, the power supply interface M41 and the switching power supply M42 can be electrically connected through a communication interface M43.

[0166] Continue to refer to Figure 5, the light source device M in the embodiments of this specification may further include a light guide module M60 disposed on the housing. The light guide module M60 has a through hole, and through the through hole, the light emitted by the light source module M30 can be output to the outside.

[0167] Continuing to refer to Figure 5 , the light source device M in the embodiments of this specification may further include a heat dissipation module M70 disposed on the light source module M30, which can dissipate heat from the light source module M30.

[0168] Continuing to refer to Figure 5 , the light source device M in the embodiments of this specification may further include a temperature detection module ( Figure 5 not shown) connected between the light source module and the driving module. When it is detected that the temperature of the light source module is greater than a preset temperature, the connection between the light source module and the driving module is disconnected.

[0169] It can be understood that the above description examples of the light source device are only for illustrative purposes. In actual applications, those skilled in the art can adaptively select and / or deform the structures and connection relationships of the above modules according to actual needs and application scenarios. Thus, more implementation schemes can be derived, and the embodiments of this specification do not limit these extended schemes. For example, to further improve the heat dissipation effect, a heat dissipation port can be provided on one side of the bottom plate; or a radiator (such as Figure 5 shown as M90) can be disposed in the cavity. For example, the radiator can be a fan to further improve the heat dissipation effect.

[0170] Therefore, based on the difference between the driving signal and the pre-set target driving signal, the duty cycle of the pulse width adjustment signal output by the controller can be adjusted, and the driving control signal can be adjusted based on the duty cycle, so that the driving signal can be the same as the pre-set target driving signal and output to the light source module, so that the light source module can obtain the same driving as the target driving signal, that is, no matter how the temperature changes, the driving signal output to the light source module can maintain a stable state, and then a stable light can be output, so that a light that meets the detection requirements can be output.

[0171] Referring to Figure 6A and Figure 6B the images of the object to be measured collected under different illumination environments of a light source device in the embodiments of this specification shown, where: Figure 6A shows the surface imaging of the object to be measured under blue light illumination conditions, Figure 6B shows the surface imaging of the object to be measured under white light illumination conditions.

[0172] From Figure 6A and Figure 6B it can be seen that relative to Figure 1In terms of this, for a detection system adopting the light source device in the embodiments of this specification, regardless of whether it is under white light illumination or blue light illumination, the images of the object to be measured (such as a wafer) collected are clear, and the light and dark at the intersections of different regions are distinct, which can well display the details of different regions of the object to be measured.

[0173] It can be understood that the description of the above illumination environment is only for illustrative purposes. In specific implementations, sampling of the object to be measured can also be performed under illumination conditions such as yellow and red. Specifically, by replacing the light source on the light source module, the light source module can output light of different colors.

[0174] The embodiments of this specification also provide a light source control method, which is suitable for controlling the light output by the light source device. Among them, the light source device includes a circuit board, a controller, a sampling module, and a driving module arranged on the circuit board, and a light source module electrically connected to the controller and the sampling module.

[0175] Among them, for the composition and working principle of each module in the light source device, reference can be made to the foregoing embodiments, and details will not be elaborated here.

[0176] The following combines the drawings and details the light source control method in the embodiments of this specification through specific examples.

[0177] Refer to Figure 7 For the described light source control method, in some embodiments of this specification, the following steps can be specifically adopted to control the light output by the light source device.

[0178] S11, in response to the input drive control signal, output a corresponding drive signal to the light source module.

[0179] In specific implementations, based on the actual application scenario, according to the input drive control signal, the drive signal output to the light source module can be a drive current signal or a drive voltage signal. The embodiments of this specification do not limit the type of the drive signal.

[0180] As a specific example, the drive signal can be a drive current signal.

[0181] S12, collect the drive signal output by the driving module and output it to the controller.

[0182] S13, based on the drive signal, calculate the difference between the drive signal and a pre-set target drive signal, and based on the difference, adjust the duty cycle of the pulse width adjustment signal output by the controller, and adjust the drive control signal based on the duty cycle.

[0183] Specifically, by calculating the difference between the drive signal and a pre-set target drive signal, the duty cycle of the pulse width adjustment signal output by the controller can be adjusted, and further, the magnitude of the drive control signal can be adjusted, so that the drive control signal output to the drive module is the same as the target drive signal.

[0184] S14, emit light according to the corresponding luminous flux based on the input drive signal.

[0185] As can be seen from the above, based on the difference between the drive signal and the pre-set target drive signal, the duty cycle of the pulse width adjustment signal output by the controller can be adjusted, and based on the duty cycle, the drive control signal can be adjusted, so that the drive signal output to the light source module is the same as the pre-set target drive signal, that is, regardless of how the temperature changes, the drive signal output to the light source module can remain stable, and further, stable light can be output.

[0186] As described above, the drive signal output by the drive module based on the input drive signal can be a drive current signal. Correspondingly, the target drive signal in the embodiments of this specification can be a target current drive signal. Moreover, during the light emission process of the light source device, its internal temperature will rise, which will further affect the stability of the electrical signal output to the light source module. Based on this, in order to reduce the influence caused by temperature changes, during the actual operation process, the drive signal output by the drive module is collected and output to the controller, including: within two preset sampling periods, the first drive current signal and the second drive current signal corresponding to the light source module are collected and output to the controller.

[0187] In a specific implementation, in order to further reduce the influence of temperature changes on the drive current signal, the acquisition module can collect the first drive current signal and the second drive current signal corresponding to the light source module in two consecutive sampling periods respectively.

[0188] The controller can obtain the corresponding voltage difference according to the first drive current signal and the second drive current signal collected by the sampling module within two preset sampling periods and a pre-set calculation formula, and based on the voltage difference, adjust the duty cycle of the pulse width adjustment signal.

[0189] Specifically, calculating the difference between the driving signal and a preset target driving signal, and based on the difference, adjusting the duty cycle of the pulse width adjustment signal output by the controller may include: respectively calculating a first driving current difference between the first driving current signal and the target driving current signal, and calculating a second driving current difference between the second driving current signal and the target driving current signal; obtaining a corresponding voltage difference according to the first driving current difference, the second driving current difference, the second driving current signal, and a preset calculation formula; and based on the voltage difference, adjusting the duty cycle of the pulse width adjustment signal output by the controller.

[0190] Wherein, for the process of obtaining the voltage difference in the above manner, reference may be made to the foregoing embodiments and formula (1), and the embodiments of the present specification will not be elaborated herein.

[0191] Further, in specific implementation, the controller may change the duty cycle of the pulse width adjustment signal by adjusting the counter value inside it according to the magnitude of the voltage difference calculated by the formula.

[0192] Specifically, the adjusting the duty cycle of the pulse width adjustment signal output by the controller based on the voltage difference may include: adjusting the counter value inside the controller based on the voltage value difference; and obtaining a pulse width adjustment signal corresponding to the counter value and having a corresponding duty cycle according to the counter value and the mapping relationship between the counter value and the duty cycle of the pulse width adjustment signal.

[0193] Specifically, when the calculated voltage difference is greater than 0, it indicates that the sampled driving current signal is greater than the target driving current. At this time, the value of the counter may be decreased. Since there is a corresponding relationship between the counter value and the duty cycle of the pulse width adjustment signal, when the counter value decreases, the duty cycle of the pulse width adjustment signal decreases accordingly. Further, through the duty cycle, the magnitude of the output driving current signal may be decreased, so that the driving current signal is equal to the target driving current. When the calculated voltage difference is less than 0, it indicates that the sampled driving current signal is less than the target driving current. At this time, the value of the counter may be increased. Since there is a corresponding relationship between the counter value and the duty cycle of the pulse width adjustment signal, when the counter value increases, the duty cycle of the pulse width adjustment signal increases accordingly. Further, through the duty cycle, the magnitude of the output driving current signal may be increased, so that the driving current signal is equal to the target driving current.

[0194] It should be noted that in the description of this specification, terms such as "first" and "second" are only used for descriptive purposes and should not be construed as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, features defined with terms such as "first" and "second" may explicitly or implicitly include one or more such features. Moreover, terms such as "first" and "second" are used to distinguish similar objects and do not necessarily have to be used to describe a specific order or indicate importance. It can be understood that such terms can be interchanged under appropriate circumstances so that the embodiments of this specification described herein can be implemented in an order other than those illustrated or described herein.

[0195] Although the embodiments of this specification are disclosed as above, this specification is not limited thereto. Any person skilled in the art can make various changes and modifications without departing from the spirit and scope of the present invention. Therefore, the protection scope of the invention should be subject to the scope defined by the claims.

Claims

1. A light source device, adapted to provide a light source for an object to be measured, characterized in that, Comprising: A circuit board, a controller, a sampling module, and a driving module disposed on the circuit board, as well as a light source module, a power selection module, and a power supply module electrically connected to the sampling module and the driving module, wherein: The power supply module is respectively connected to the controller and the driving module and is adapted to provide a voltage; The power selection module is connected to the driving module and has a first state and a second state; The driving module is adapted to output a corresponding driving signal to the light source module based on an input driving control signal; and is adapted to, when the power selection module is in the first state, based on the input driving control analog signal of the controller and the voltage provided by the power supply module, input a first driving signal to the light source module; and when the power selection module is in the second state, select the power supply voltage of the driving module itself as the driving control signal and, based on the voltage provided by the power supply module, input a second driving signal to the light source module; The sampling module is adapted to collect the driving signal output by the driving module and output it to the controller; the controller is adapted to calculate the difference between the driving signal and a preset target driving signal based on the driving signal, and based on the difference, adjust the duty cycle of the pulse width adjustment signal output by the controller, and adjust the driving control signal based on the duty cycle; and is also adapted to output the driving control analog signal to the driving module; The light source module is adapted to emit light with a corresponding luminous flux according to the input driving signal.

2. The light source device according to claim 1, wherein The driving signal includes a driving current signal, and the target driving signal includes a target driving current signal; The sampling module is adapted to collect a first driving current signal and a second driving current signal corresponding to the light source module within two preset sampling periods and output them to the controller; The controller is adapted to calculate a first driving current difference between the first driving current signal and the target driving current signal, and calculate a second driving current difference between the second driving current signal and the target driving current signal, and obtain a corresponding voltage difference according to the first driving current difference, the second driving current difference, the second driving current signal, and a preset calculation formula, and based on the voltage difference, adjust the duty cycle of the pulse width adjustment signal output by the controller, and adjust the driving current signal based on the duty cycle.

3. The light source device according to claim 2, wherein The controller is adapted to adjust the counter value inside the controller based on the voltage difference, and obtain a pulse width adjustment signal corresponding to the counter value with a corresponding duty cycle according to the counter value and the mapping relationship between the counter value and the duty cycle of the pulse width adjustment signal.

4. The light source device according to claim 1, characterized in that, The driving module includes a relay unit, an operational amplifier unit, and a driving unit, wherein: The relay unit is adapted to output the drive control analog signal output by the controller to the operational amplifier unit when the power supply selection module is in the first state; and when the power supply selection module is in the second state, output the power supply voltage of the drive module itself as the drive control analog signal to the operational amplifier unit; The operational amplifier unit is adapted to amplify the drive control analog signal to obtain the drive control signal and output it to the drive unit; The drive unit is adapted to generate a drive signal according to the drive control signal and output it to the light source module.

5. The light source device according to claim 4, characterized in that The relay unit includes: A first voltage input terminal connected to the power supply module; A second voltage input terminal connected to the power supply of the drive module itself; A control terminal connected to the power supply selection module; A relay connected between the first voltage input terminal and the control terminal; A drive control analog signal input terminal connected to the controller; An output terminal connected to the drive control analog signal input terminal and the second voltage input terminal respectively.

6. The light source device according to claim 5, characterized in that, It further includes: A first voltage dividing module and a second voltage dividing module provided on the circuit board; The relay unit further includes: A first voltage dividing input terminal connected to the first voltage dividing module; A second voltage dividing input terminal connected to the second voltage dividing module, adapted to make the first drive signal and the second drive signal the same.

7. The light source device according to claim 4, wherein The operational amplifier unit includes: a first operational amplifier, a first resistor, a second resistor and a voltage dividing module, a second operational amplifier and a third operational amplifier, where: For the first operational amplifier, its non-inverting input terminal is connected to the output terminal of the relay unit, its inverting input terminal and output terminal are connected to the first end of the first resistor, its first control terminal is connected to the power supply voltage of the drive unit itself, and its second control terminal is grounded; For the first resistor, its second end is connected to the inverting input terminal of the second operational amplifier; The voltage dividing module includes a third resistor and a fourth resistor. Among them, the first end of the third resistor is respectively connected to the power supply voltage of the drive unit itself and the non-inverting input terminal of the second operational amplifier; the first end of the fourth resistor is connected to the non-inverting input terminal of the second operational amplifier, and its second end is grounded; For the second operational amplifier, its inverting input terminal is connected to the non-inverting input terminal of the third operational amplifier through the second resistor, its output terminal is connected to the non-inverting input terminal of the third operational amplifier, its first control terminal is connected to the power supply voltage of the drive module itself, and its second control terminal is grounded; For the third operational amplifier, its inverting input terminal is connected to its output terminal, its first control terminal is connected to the power supply voltage of the drive module itself, and its second control terminal is grounded.

8. The light source device according to claim 1, wherein, It further includes: A housing adapted to accommodate the circuit board; The power supply module includes: A power supply interface provided on the housing, adapted to externally connect a power supply; A switching power supply connected to the power supply interface, adapted to convert the voltage level of the externally connected power supply to provide voltage for the light source device.

9. The light source device according to claim 8, characterized in that, The light source module includes: A light source; A connecting component, one end of which is provided on the housing and the other end is connected to the lamp bead bracket; The lamp bead bracket is arranged inside the housing and is suitable for placing the light source.

10. The light source device according to claim 9, wherein, It further includes: A light guide module, which is arranged on the housing and is suitable for guiding out the light emitted by the light source module.

11. The light source device according to any one of claims 1 to 10, characterized in that, It further includes: A heat dissipation module, which is arranged on the light source module and is suitable for dissipating heat from the light source module.

12. The light source device according to any one of claims 1-10, characterized in that, It further includes: A temperature detection module, which is connected between the light source module and the drive module and is suitable for disconnecting the connection between the light source module and the drive module when it detects that the temperature of the light source module is greater than a preset temperature.

13. A light source control method, suitable for controlling the light output by a light source device, wherein, The light source device includes a circuit board, a controller, a sampling module, and a drive module arranged on the circuit board, a light source module electrically connected to the sampling module, a power supply module respectively connected to the controller and the drive module, and a power supply selection module connected to the drive module and having a first state and a second state. It is characterized in that the light source control method includes: In response to an input drive control signal, output a corresponding drive signal to the light source module; Collect the drive signal output by the drive module and output it to the controller, and the controller is also suitable for outputting a drive control analog signal; Based on the drive signal, calculate the difference between the drive signal and a preset target drive signal, and based on the difference, adjust the duty cycle of the pulse width adjustment signal output by the controller, and adjust the drive control signal based on the duty cycle; Based on the drive control analog signal input to the controller and the voltage provided by the power supply module, when the power supply selection module is in the first state, obtain a first drive signal; and when the power supply selection module is in the second state, select the power supply voltage of the drive module itself as the drive control signal, and obtain a second drive signal based on the voltage provided by the power supply module and input it to the light source module Control the light source module to emit light with a corresponding luminous flux according to the input drive signal.

14. The light source control method according to claim 13, wherein The drive signal includes a drive current signal, and the target drive signal includes a target drive current signal; The collecting the drive signal output by the drive module and outputting it to the controller includes: Within two preset sampling periods, collect a first drive current signal and a second drive current signal corresponding to the light source module and output them to the controller.

15. The light source control method according to claim 14, characterized in that, The calculating the difference between the drive signal and a preset target drive signal and, based on the difference, adjusting the duty cycle of the pulse width adjustment signal output by the controller includes: Respectively calculate a first drive current difference between the first drive current signal and the target drive current signal, and calculate a second drive current difference between the second drive current signal and the target drive current signal; According to the first drive current difference, the second drive current difference, the second drive current signal, and a preset calculation formula, obtain a corresponding voltage difference; Based on the voltage difference, adjust the duty cycle of the pulse width adjustment signal output by the controller.

16. The light source control method according to claim 15, characterized in that, The adjusting the duty cycle of the pulse width adjustment signal output by the controller based on the voltage difference includes: Based on the voltage difference, adjust the counter value inside the controller; According to the counter value and the mapping relationship between the counter value and the duty cycle of the pulse width adjustment signal, obtain a pulse width adjustment signal corresponding to the counter value and having a corresponding duty cycle.

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