A laser pulse power supply and corresponding excimer laser

Abstract

The present invention discloses a laser pulse power supply and a corresponding excimer laser. The pulse power supply includes a first power supply module, a second power supply module, a fast response module, a high-voltage module, a first energy storage capacitor, a second energy storage capacitor, a current sampling module, a first voltage sampling module, and a second voltage sampling module. The present invention adds a fast response module to the existing technology. This module is used to adjust the voltage on the first energy storage capacitor based on real-time collection of relevant feedback current and voltage, thereby resolving the issue of slow high-voltage module response during the pulse discharge process of existing laser pulse power supplies. This ensures that the voltage output by the laser pulse power supply remains stable and does not drop during the pulse discharge process of a pulse load.

Description

Technical Field

[0001] The invention relates to a laser pulse power supply and also to a corresponding excimer laser, belonging to the field of laser technology. Background Art

[0002] Excimer lasers are pulsed gas lasers designed for deep ultraviolet applications. They feature high repetition rate, high energy, short wavelength, and narrow linewidth, making them an ideal laser source for microelectronic lithography systems. To ensure the stability of the excimer laser's output energy, a stable pulsed power supply is required for the discharge chamber. This pulsed power supply must have fast response speed and high peak pulse power.

[0003] In the existing technology, a high-voltage module is usually used as a pulse power supply for the laser. During the pulse discharge process, there is a problem of slow response of the high-voltage module, which causes the pulse power supply to drop out of voltage. The voltage drop problem caused by the pulse discharge of the excimer laser is often solved by increasing the energy storage capacitor. Although increasing the energy storage capacitor can reduce the voltage drop during the power supply process, it cannot fundamentally solve the problem of pulse power supply drop in the process of excimer laser pulse discharge. Summary of the Invention

[0004] The primary technical problem to be solved by the present invention is to provide a laser pulse power supply.

[0005] Another technical problem to be solved by the present invention is to provide an excimer laser including the above-mentioned laser pulse power supply.

[0006] In order to achieve the above object, the present invention adopts the following technical solutions:

[0007] According to a first aspect of an embodiment of the present invention, there is provided a laser pulse power supply, comprising a high-voltage module, a first energy storage capacitor, a second energy storage capacitor, a first fast response module, a current sampling module, and a first voltage sampling module, wherein the high-voltage module is connected to the second energy storage capacitor, the second energy storage capacitor, the first fast response module, and the first energy storage capacitor are interconnected, the first fast response module is connected to the current sampling module and the first voltage sampling module, the current sampling module is connected in series to the output circuit of the first fast response module, and the first voltage sampling module is connected to the output end of the laser pulse power supply;

[0008] During the pulse load discharge process, when the first fast response module determines that the feedback current collected by the current sampling module first received increases, the voltage on the first energy storage capacitor is controlled to change positively with the change of the feedback current; otherwise, the output voltage regulation of the laser pulse power supply is stopped;

[0009] After the feedback current exits the regulation of the output voltage of the laser pulse power supply, the first quick response module determines the change trend of the output voltage of the laser pulse power supply collected by the first voltage sampling module, so as to control the voltage on the first energy storage capacitor to change in the opposite direction as the output voltage of the laser pulse power supply changes.

[0010] Preferably, the first fast response module includes a first operational amplifier, a first comparator, a first resistor, a second resistor, a second comparator, an inverter, a control switch, a diode and an inductor;

[0011] The non-inverting input of the first operational amplifier is connected to the first reference voltage, the inverting input of the first operational amplifier is connected to the output of the first voltage sampling module, the output of the first operational amplifier is connected to one end of the first resistor, the non-inverting input of the first comparator is connected to the output of the current sampling module, the inverting input of the first comparator is connected to the second reference voltage, the output of the first comparator is connected to one end of the second resistor, the other end of the first resistor and the second resistor is connected to the inverting input of the second comparator, the non-inverting input of the second comparator is connected to a triangular wave, the output of the second comparator is connected to the input of the inverter, the output of the inverter is connected to the control end of the control switch, the input of the control switch is connected to the positive electrode of the first power supply module, the output of the control switch is connected to the cathode of the diode and one end of the inductor, the other end of the inductor is connected to one end of the first energy storage capacitor, and the other end of the first energy storage capacitor is connected to the anode of the diode and the negative electrode of the first power supply module.

[0012] According to a second aspect of an embodiment of the present invention, a laser pulse power supply is provided, comprising a high-voltage module, a first energy storage capacitor, a second energy storage capacitor, a second fast response module, a current sampling module, a first voltage sampling module, and a second voltage sampling module, wherein the high-voltage module is connected to the second energy storage capacitor, the second energy storage capacitor, the second voltage sampling module, the first fast response module, and the first energy storage capacitor are connected to each other, the first fast response module is connected to the current sampling module and the first voltage sampling module, the current sampling module is connected in series to the output circuit of the first fast response module, and the first voltage sampling module is connected to the output end of the laser pulse power supply;

[0013] During the pulse load discharge process, when the second fast response module determines that the feedback current collected by the current sampling module first received increases, the voltage on the first energy storage capacitor is controlled to change positively with the change of the feedback current; otherwise, the output voltage regulation of the laser pulse power supply is stopped;

[0014] After the feedback current exits the regulation of the output voltage of the laser pulse power supply, if the second quick response module determines that the output voltage of the laser pulse power supply collected by the first voltage sampling module increases and / or the voltage on the second energy storage capacitor collected by the second voltage sampling module increases, the voltage on the first energy storage capacitor is controlled to change inversely with the change of the output voltage of the laser pulse power supply.

[0015] Alternatively, after the feedback current exits the regulation of the output voltage of the laser pulse power supply, if the second quick response module determines that the reduction amplitude of the output voltage of the laser pulse power supply collected by the first voltage sampling module has increased and / or the reduction amplitude of the voltage on the second energy storage capacitor collected by the second voltage sampling module has increased, then the voltage on the first energy storage capacitor is controlled to change in the opposite direction to the change of the output voltage of the laser pulse power supply.

[0016] Preferably, the second fast response module includes a first operational amplifier, a second operational amplifier, a first comparator, a first resistor, a second resistor, a third resistor, a second comparator, an inverter, a control switch, a diode and an inductor;

[0017] The non-inverting input of the first operational amplifier is connected to the first reference voltage, the inverting input of the first operational amplifier is connected to the output of the first voltage sampling module, the output of the first operational amplifier is connected to one end of the first resistor, the non-inverting input of the first comparator is connected to the output of the current sampling module, the inverting input of the first comparator is connected to the second reference voltage, the output of the first comparator is connected to one end of the second resistor, the non-inverting input of the second operational amplifier is connected to the output of the second voltage sampling module, the inverting input of the first operational amplifier is connected to the third reference voltage, the output of the second operational amplifier is connected to one end of the third resistor, the other ends of the first resistor, the second resistor, and the third resistor are connected to the inverting input of the second comparator, the non-inverting input of the second comparator is connected to a triangular wave, the output of the second comparator is connected to the input of the inverter, the output of the inverter is connected to the control end of the control switch, the input of the control switch is connected to the positive electrode of the first power supply module, the output of the control switch is connected to the cathode of the diode and one end of the inductor, the other end of the inductor is connected to one end of the first energy storage capacitor, and the other end of the first energy storage capacitor is connected to the anode of the diode and the negative electrode of the first power supply module.

[0018] Preferably, the current sampling module is implemented using a current sensor.

[0019] Preferably, the first voltage sampling module and the second voltage sampling module are respectively implemented using voltage sensors.

[0020] Preferably, the control switch is implemented using a switching device.

[0021] According to a third aspect of the embodiments of the present invention, there is provided an excimer laser, comprising the above-mentioned laser pulse power supply.

[0022] The laser pulse power supply and the corresponding excimer laser provided by the present invention add a fast response module on the basis of the existing technology. The fast response module is used to adjust the voltage on the first energy storage capacitor according to the real-time collection of relevant feedback current and voltage, thereby solving the problem of slow response of the high-voltage module in the pulse discharge process of the existing laser pulse power supply, and ensuring that the voltage output by the laser pulse power supply is stable and does not drop during the pulse discharge process of the pulse load. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 A circuit diagram of a pulse power supply for an existing laser;

[0024] Figure 2 A working curve diagram of the existing laser pulse power supply;

[0025] Figure 3 A circuit diagram of a laser pulse power supply provided in Example 1 of the present invention;

[0026] Figure 4 A circuit schematic diagram of a first fast response module in the laser pulse power supply provided in Example 1 of the present invention;

[0027] Figure 5 A circuit schematic diagram of a laser pulse power supply provided in Example 2 of the present invention;

[0028] Figure 6 This is a circuit schematic diagram of the second fast response module in the laser pulse power supply provided in Example 2 of the present invention. DETAILED DESCRIPTION

[0029] The technical content of the present invention is further described in detail below with reference to the accompanying drawings and specific embodiments.

[0030] like Figure 1As shown in the figure, when the existing high-voltage module (High Voltage Power Source, abbreviated as HVPS) is used as the laser pulse power supply, the larger the discharge energy storage capacitor C0 is, the smaller the voltage drop generated on the discharge energy storage capacitor C0 during the pulse discharge process. Since the response speed of the high-voltage module is slow, the capacitor can generally only be charged after the pulse ends. Therefore, when a pulse occurs quickly, the charging voltage of the high-voltage module on the discharge energy storage capacitor C0 during the pulse generation process is ignored.

[0031] like Figure 2 As shown, when the existing laser pulse power supply provides a stable pulse power supply for the discharge cavity, during the pulse discharge process, the pulse discharge load switch S1 is disconnected in the initial state, and the initial voltage on the discharge energy storage capacitor C0 is V0; at time t0, the pulse discharge load switch S1 is closed, and the discharge energy storage capacitor C0 begins to discharge the pulse load (excimer laser); at time t1, the pulse discharge load switch S1 is disconnected, and the discharge energy storage capacitor C0 finishes discharging the pulse load, and the voltage on the discharge energy storage capacitor C0 is V1 at this time; due to the slow response speed of the existing high-voltage module, it is considered that only the discharge energy storage capacitor C0 participates in the discharge during the entire pulse discharge process, and the power of the entire laser pulse power supply can be calculated according to Q=1 / 2*C0*V0 2 Calculate the energy consumed in one pulse discharge cycle Q = 1 / 2 2-*C0 2 *=(V0); then, the pulse discharge power P=1 / (t1-t0)*Q=1 / 2*(t1-t0)*C0*(V0 2 -V1 2 ); The pulse discharge power is provided by the voltage drop of the discharge energy storage capacitor C0; when the pulse time is constant, if you want to reduce the voltage drop of the discharge energy storage capacitor C0, then the capacitance of the discharge energy storage capacitor C0 needs to be increased. If the capacitance is small, the voltage drop of the discharge energy storage capacitor C0 will increase, thereby reducing the discharge accuracy of the discharge energy storage capacitor C0; as the withstand voltage increases, the volume of the discharge energy storage capacitor C0 becomes very large, which has various inconveniences in actual use.

[0032] Through the analysis of the existing laser pulse power supply in the excimer laser pulse discharge process, it is not difficult to find that the pulse power supply has a voltage drop due to the slow response of the laser pulse power supply during the pulse discharge process, thereby consuming a certain amount of energy. Therefore, in order to solve the problem of slow response of the existing laser pulse power supply in the pulse discharge process and avoid the problem of pulse power supply voltage drop during the excimer laser pulse discharge process, Figures 3 to 6 As shown, the embodiments of the present invention provide a variety of laser pulse power supplies, which are described in detail below.

[0033] Example 1

[0034] like Figure 3 As shown, the laser pulse power supply provided in this embodiment includes a first power supply module V3, a second power supply module V2, a fast response module PS1, a high-voltage module, a first energy storage capacitor C1, a second energy storage capacitor C2, a current sampling module 1, a first voltage sampling module 2 and a pulse discharge switch K; the first power supply module V3 is connected to the fast response module PS1, the second power supply module V2 is connected to the high-voltage module, the positive pole of the power supply of the fast response module PS1 is connected to one end of the first energy storage capacitor C1 and the moving end of the pulse discharge switch K, the fixed end of the pulse discharge switch K is connected to the pulse load, the pulse load, the second power supply module V2 are connected to the high-voltage module, the positive pole of the power supply of the fast response module PS1 is connected to one end of the first energy storage capacitor C1 and the moving end of the pulse discharge switch K, the fixed end of the pulse discharge switch K is connected to the pulse load, the pulse load, the second power supply module V3 are connected to the high-voltage module, the positive pole of the power supply of the fast response module PS1 is connected to the One end of the two energy storage capacitors C2 and the negative power supply of the high-voltage module are grounded respectively, and the positive power supply of the high-voltage module is connected to the other ends of the first energy storage capacitor C1 and the second energy storage capacitor C2 and the negative power supply of the fast response module PS1. The current sampling module 1 is connected in series to the output circuit of the fast response module PS1. The output end of the current sampling module 1 is connected to the first sampling end of the fast response module PS1. The input end of the first voltage sampling module 2 is connected to the voltage output end V, and the output end of the first voltage sampling module 2 is connected to the second sampling end of the fast response module PS1. The neutral point end of the first voltage sampling module 2 is grounded. Among them, the first power supply module V3 and the second power supply module V2 provide power supply voltage for the fast response module PS1 and the high-voltage module respectively.

[0035] In this embodiment, the voltages on the first energy storage capacitor C1 and the second energy storage capacitor C2 are added together as the output voltage of the laser pulse power supply, thereby providing a pulse power supply for the pulse load. In the pulse discharge process of the pulse load, when the high-voltage module cannot respond to the change in the output voltage of the laser pulse power supply in a timely manner and adjust the voltage on the second energy storage capacitor C2 accordingly, and thus cannot ensure that the voltage output by the laser pulse power supply is stable and does not drop, the fast response module PS1 is used to adjust the voltage on the second energy storage capacitor C2 accordingly to compensate for the voltage reduction output by the laser pulse power supply or weaken the voltage increase output by the laser pulse power supply, thereby ensuring that the voltage output by the laser pulse power supply is stable and does not drop. The working principle of the laser pulse power supply is as follows:

[0036] When the pulse discharge switch K is in the off state, the pulse load is not discharged. During this process, since the output voltage of the laser pulse power supply fluctuates, it is necessary to use the fast response module PS1 to adjust the output voltage of the laser pulse power supply to stabilize it according to the voltage Vt1 output by the voltage output terminal V of the laser pulse power supply collected by the first voltage sampling module 2. At the same time, the fast response module PS1 and the high-voltage module not only charge the first energy storage capacitor C1 and the second energy storage capacitor C2 accordingly, but also filter the charging voltage on the first energy storage capacitor C1 and the second energy storage capacitor C2.

[0037] When the pulse discharge switch K is in the on state, the pulse load enters the discharge process. During this process, the feedback current It on the output circuit of the fast response module PS1 collected by the current sampling module 1 increases a lot instantly. The fast response module PS1 will control the voltage on the first energy storage capacitor C1 to increase, so that the output voltage of the laser pulse power supply increases; when the feedback current It on the output circuit of the fast response module PS1 collected by the current sampling module 1 decreases, the output voltage of the laser pulse power supply is exited at this time. During the pulse discharge process of the pulse load and after the feedback current It exits the regulation of the output voltage of the laser pulse power supply, since the voltage Vt1 output by the voltage output terminal V of the laser pulse power supply collected by the first voltage sampling module 2 increases with the increase of the output voltage of the high-voltage module (i.e., the voltage Vt1 increases), it is necessary to control the voltage on the first energy storage capacitor C1 through the fast response module PS1 to decrease, so that the output voltage of the laser pulse power supply decreases; similarly, during the pulse discharge process of the pulse load, if the voltage Vt1 output by the voltage output terminal V of the laser pulse power supply collected by the first voltage sampling module 2 decreases more (i.e., the output voltage of the high-voltage module decreases more), the voltage on the first energy storage capacitor C1 is controlled to increase, so that the output voltage of the laser pulse power supply increases.

[0038] Specifically, if Figure 4 As shown, the fast response module PS1 includes a first operational amplifier U2, a first comparator U4, a first resistor R3, a second resistor R5, a second comparator U1, an inverter N, a control switch S, a diode D and an inductor L; wherein the control switch S can be implemented using a switching device, such as Mosfet, SiCMOS, GaN, etc.

[0039] The connection relationship between the various parts of the fast response module PS1 is as follows: the non-inverting input terminal of the first operational amplifier U2 is connected to the first reference voltage Ur1, the inverting input terminal of the first operational amplifier U2 is connected to the output terminal of the first voltage sampling module 2, the output terminal of the first operational amplifier U2 is connected to one end of the first resistor R3, the non-inverting input terminal of the first comparator U4 is connected to the output terminal of the current sampling module 1, the inverting input terminal of the first comparator U4 is connected to the second reference voltage Ur3, the output terminal of the first comparator U4 is connected to one end of the second resistor R5, the other end of the first resistor R3 and the second resistor R5 are connected to the inverting input terminal of the second comparator U1, the non-inverting input terminal of the second comparator U1 is connected to the triangular wave, the output terminal of the second comparator U1 is connected to the input terminal of the inverter N, and the output terminal of the inverter N is connected to the control terminal of the control switch S (such as Figure 4 The gate of the NMOS tube shown in FIG. 1 ) controls the input end of the switch S (such as Figure 4The drain of the NMOS tube shown in FIG. 1 is connected to the positive electrode of the first power supply module V3, and the output end of the control switch S (such as Figure 4 The source of the NMOS tube shown is connected to the cathode of the diode D and one end of the inductor, the other end of the inductor is connected to one end of the first energy storage capacitor C1 and the moving end of the pulse discharge switch K, and the other end of the first energy storage capacitor C1 is connected to the anode of the diode D and the negative electrode of the first power supply module V3.

[0040] The first reference voltage Ur1 is the reference voltage output by the laser pulse power supply in normal operation; the second reference voltage Ur3 is the current monitoring reference voltage for the collected feedback current It. The diode D and inductor L provide freewheeling, ensuring that the first power supply module V3 provides a continuous supply voltage to the fast response module PS1.

[0041] The working principle of the fast response module PS1 in this embodiment is as follows: when the pulse discharge switch K is in the off state, the pulse load is not discharged. In this process, when the voltage Vt1 output by the voltage output terminal V of the laser pulse power supply collected by the first voltage sampling module 2 received by the first operational amplifier U2 is greater than the first reference voltage Ur1, the voltage output by the first operational amplifier U2 through the first resistor R3 will decrease. After the voltage is input to the second comparator U1 and compared with the triangle wave, the output duty cycle becomes larger, and the duty cycle output decreases after passing through the inverter N, so that the conduction time of the control switch S is short, and the voltage on the first energy storage capacitor C1 is controlled to decrease, thereby achieving the purpose of reducing the output voltage of the laser pulse power supply; when When the voltage Vt1 output by the voltage output terminal V of the laser pulse power supply collected by the first voltage sampling module 2 and received by the first operational amplifier U2 is less than the first reference voltage Ur1, the voltage output by the first operational amplifier U2 through the first resistor R3 will increase. After the voltage is input to the second comparator U1 and compared with the triangle wave, the output duty cycle decreases, and the duty cycle output increases after passing through the inverter N, so that the control switch S is turned on for a long time, and the voltage on the first energy storage capacitor C1 is controlled to increase, thereby achieving the purpose of increasing the output voltage of the laser pulse power supply; at the same time, the first power supply module V3 charges the first energy storage capacitor C1 through the inductor L, and filters the charging voltage thereon through the first energy storage capacitor C1.

[0042] When the pulse discharge switch K is in the on state, the pulse load enters the discharge process. During this process, if the voltage Vit corresponding to the feedback current It collected by the current sampling module 1 first received by the first comparator U4 exceeds the second reference voltage Ur3, the voltage output by the first comparator U4 through the second resistor R5 will increase rapidly and significantly. After the voltage is input to the second comparator U1 and compared with the triangle wave, the output duty cycle is greatly reduced. After passing through the inverter N, the duty cycle output is as large as possible, so that the control switch S is turned on for a long time, and the voltage on the first energy storage capacitor C1 is controlled to increase, thereby achieving the purpose of rapidly increasing the output voltage of the laser pulse power supply; when the voltage Vit corresponding to the feedback current It collected by the current sampling module 1 received by the first comparator U4 drops below the second reference voltage Ur3, the adjustment of the output voltage of the laser pulse power supply is exited. During the pulse discharge process of the pulse load and after the feedback current It exits the regulation of the output voltage of the laser pulse power supply, the voltage Vt1 output by the voltage output terminal V of the laser pulse power supply collected by the first voltage sampling module 2 adjusts the voltage on the first energy storage capacitor C1. When the voltage Vt1 output by the voltage output terminal V of the laser pulse power supply collected by the first voltage sampling module 2 received by the first operational amplifier U2 is greater than the first reference voltage Ur1, the voltage output by the first operational amplifier U2 through the first resistor R3 will decrease. After the voltage is input to the second comparator U1 and compared with the triangle wave, the output duty cycle increases, and the duty cycle output decreases after passing through the inverter N, so that the control switch S is turned on. The time is short, and the voltage on the first energy storage capacitor C1 is controlled to decrease, thereby achieving the purpose of reducing the output voltage of the laser pulse power supply; similarly, if the voltage Vt1 output by the voltage output terminal V of the laser pulse power supply collected by the first voltage sampling module 2 received by the first operational amplifier U2 is less than the first reference voltage Ur1, the voltage output by the first operational amplifier U2 through the first resistor R3 will increase, and after the voltage is input to the second comparator U1 and compared with the triangular wave, the output duty cycle is reduced, and the duty cycle output is increased after the inverter N, so that the control switch S is turned on for a long time, and the voltage on the first energy storage capacitor C1 is controlled to increase, thereby achieving the purpose of increasing the output voltage of the laser pulse power supply.

[0043] In summary, during the pulse discharge process of the pulse load, the feedback current on the output circuit of the quick response module PS1 and the voltage outputted from the voltage output terminal V of the laser pulse power supply are collected in real time. The quick response module PS1 adjusts the voltage on the first energy storage capacitor C1 to change positively with the positive feedback current according to the change trend of the feedback current obtained first (expressed mathematically as the first-order derivative) or exits the regulation of the output voltage of the laser pulse power supply. After the feedback current exits the regulation of the output voltage of the laser pulse power supply, the quick response module PS1 is used to adjust the voltage on the first energy storage capacitor C1 to change inversely with the change of the output voltage of the laser pulse power supply according to the change trend of the voltage outputted from the voltage output terminal V (expressed mathematically as the first-order derivative), thereby solving the problem that the pulse discharge process of the existing laser pulse power supply cannot ensure that the voltage outputted by the laser pulse power supply is stable and does not drop due to the slow response.

[0044] Example 2

[0045] like Figure 5 As shown, the laser pulse power supply provided in this embodiment includes a first power supply module V3, a second power supply module V2, a fast response module PS1, a high-voltage module, a first energy storage capacitor C1, a second energy storage capacitor C2, a current sampling module 1, a first voltage sampling module 2, a second voltage sampling module 3 and a pulse discharge switch K; the first power supply module V3 is connected to the fast response module PS1, the second power supply module V2 is connected to the high-voltage module, the positive power supply of the fast response module PS1 is connected to one end of the first energy storage capacitor C1 and the moving end of the pulse discharge switch K, the fixed end of the pulse discharge switch K is connected to the pulse load, the pulse load, one end of the second energy storage capacitor C2 and the negative power supply of the high-voltage module are grounded respectively, and the high-voltage module The positive pole of the power supply is connected to the other end of the first energy storage capacitor C1, the second energy storage capacitor C2, and the negative pole of the power supply of the fast response module PS1; the current sampling module 1 is connected in series to the output circuit of the fast response module PS1, the output end of the current sampling module 1 is connected to the first sampling end of the fast response module PS1, the input end of the first voltage sampling module 2 is connected to the voltage output end V, the output end of the first voltage sampling module 2 is connected to the second sampling end of the fast response module PS1, the input end of the second voltage sampling module 3 is connected to the other end of the second energy storage capacitor C2, the output end of the second voltage sampling module 3 is connected to the third sampling end of the fast response module PS1, and the neutral point end of the first voltage sampling module 2 and the second voltage sampling module 3 is grounded. Among them, the first power supply module V3 and the second power supply module V2 provide power supply voltage for the fast response module PS1 and the high-voltage module respectively.

[0046] In this embodiment, the voltages on the first energy storage capacitor C1 and the second energy storage capacitor C2 are added together as the output voltage of the laser pulse power supply, thereby providing a pulse power supply for the pulse load. The working principle of the laser pulse power supply is as follows:

[0047] When the pulse discharge switch K is in the off state, the pulse load is not discharged. During this process, since the output voltages of the laser pulse power supply and the high-voltage module fluctuate, it is necessary to use the fast response module PS1 to adjust the output voltage of the laser pulse power supply to stabilize it based on the voltage Vt1 output from the voltage output terminal V of the laser pulse power supply collected by the first voltage sampling module 2 and the voltage Vt2 on the second energy storage capacitor C2 collected by the second voltage sampling module 3. At the same time, the fast response module PS1 and the high-voltage module not only charge the first energy storage capacitor C1 and the second energy storage capacitor C2 accordingly, but also filter the charging voltages on the first energy storage capacitor C1 and the second energy storage capacitor C2.

[0048] When the pulse discharge switch K is in the on state, the pulse load enters the discharge process. During this process, the feedback current It on the output circuit of the fast response module PS1 collected by the current sampling module 1 increases a lot instantaneously, so the voltage on the first energy storage capacitor C1 is controlled to increase, so that the output voltage of the laser pulse power supply increases; when the feedback current It on the output circuit of the fast response module PS1 collected by the current sampling module 1 decreases, the adjustment of the output voltage of the laser pulse power supply is exited at this time. During the pulse discharge process of the pulse load and after the feedback current It exits the regulation of the output voltage of the laser pulse power supply, since the voltage Vt1 output by the voltage output terminal V of the laser pulse power supply collected by the first voltage sampling module 2 and / or the voltage Vt2 on the second energy storage capacitor C2 collected by the second voltage sampling module 3 increases with the increase of the output voltage of the high-voltage module (i.e., the voltage Vt1 increases), it is necessary to control the voltage on the first energy storage capacitor C1 to decrease through the fast response module PS1, so that the output voltage of the laser pulse power supply decreases; similarly, during the pulse discharge process of the pulse load, if the reduction amplitude of the voltage Vt1 output by the voltage output terminal V of the laser pulse power supply collected by the first voltage sampling module 2 becomes larger and / or the reduction amplitude of the voltage Vt2 on the second energy storage capacitor C2 collected by the second voltage sampling module 3 becomes larger, the voltage on the first energy storage capacitor C1 is controlled to increase, so that the output voltage of the laser pulse power supply increases.

[0049] Specifically, if Figure 6As shown, the fast response module PS1 includes a first operational amplifier U2, a second operational amplifier U3, a first comparator U4, a first resistor R3, a second resistor R5, a third resistor R4, a second comparator U1, an inverter N, a control switch S, a diode D and an inductor L; the non-inverting input terminal of the first operational amplifier U2 is connected to the first reference voltage Ur1, the inverting input terminal of the first operational amplifier U2 is connected to the output terminal of the first voltage sampling module 2, the output terminal of the first operational amplifier U2 is connected to one end of the first resistor R3, the non-inverting input terminal of the first comparator U4 is connected to the output terminal of the current sampling module 1, the inverting input terminal of the first comparator U4 is connected to the second reference voltage Ur3, the output terminal of the first comparator U4 is connected to one end of the second resistor R5, and the non-inverting input terminal of the second operational amplifier U3 is connected to the second voltage sampling module The output end of block 3, the inverting input end of the first operational amplifier U2 is connected to the third reference voltage Ur2, the output end of the second operational amplifier U3 is connected to one end of the third resistor R4, the other ends of the first resistor R3, the second resistor R5 and the third resistor R4 are connected to the inverting input end of the second comparator U1, the non-inverting input end of the second comparator U1 is connected to the triangular wave, the output end of the second comparator U1 is connected to the input end of the inverter N, the output end of the inverter N is connected to the control end of the control switch S, the input end of the control switch S is connected to the positive pole of the first power supply module V3, the output end of the control switch S is connected to the cathode of the diode D and one end of the inductor, the other end of the inductor is connected to one end of the first energy storage capacitor C1 and the moving end of the pulse discharge switch K, and the other end of the first energy storage capacitor C1 is connected to the anode of the diode D and the negative pole of the first power supply module V3.

[0050] The working principle of the fast response module PS1 in this embodiment is as follows: when the pulse discharge switch K is in the off state, the pulse load is not discharged. In this process, when the voltage Vt1 output by the voltage output terminal V of the laser pulse power supply collected by the first voltage sampling module 2 received by the first operational amplifier U2 is greater than the first reference voltage Ur1, the voltage output by the first operational amplifier U2 through the first resistor R3 will decrease. After the voltage is input to the second comparator U1 and compared with the triangle wave, the output duty cycle becomes larger, and the duty cycle output decreases after passing through the inverter N, so that the conduction time of the control switch S is short, and the voltage on the first energy storage capacitor C1 is controlled to decrease. Small, thereby achieving the purpose of reducing the output voltage of the laser pulse power supply; when the voltage Vt1 output by the voltage output terminal V of the laser pulse power supply collected by the first voltage sampling module 2 received by the first operational amplifier U2 is less than the first reference voltage Ur1, the voltage output by the first operational amplifier U2 through the first resistor R3 will increase, and after the voltage is input to the second comparator U1 and compared with the triangular wave, the output duty cycle decreases, and the duty cycle output increases after passing through the inverter N, so that the control switch S is turned on for a long time, and the voltage on the first energy storage capacitor C1 is controlled to increase, thereby achieving the purpose of increasing the output voltage of the laser pulse power supply. At the same time, when the voltage Vt2 on the second energy storage capacitor C2 collected by the second voltage sampling module 3 and received by the second operational amplifier U3 is greater than the third reference voltage Ur2, the voltage output by the second operational amplifier U3 through the third resistor R4 will decrease. After the voltage is input to the second comparator U1 and compared with the triangular wave, the output duty cycle becomes larger, and the duty cycle output decreases after passing through the inverter N, so that the control switch S is turned on for a short time, and the voltage on the first energy storage capacitor C1 is controlled to decrease, thereby achieving the purpose of reducing the output voltage of the laser pulse power supply; when the voltage Vt2 on the second energy storage capacitor C2 collected by the second voltage sampling module 3 and received by the second operational amplifier U3 is less than the third reference voltage Ur2, the voltage output by the second operational amplifier U3 through the third resistor R4 will increase. After the voltage is input to the second comparator U1 and compared with the triangular wave, the output duty cycle decreases, and the duty cycle output increases after passing through the inverter N, so that the control switch S is turned on for a long time, and the voltage on the first energy storage capacitor C1 is controlled to increase, thereby achieving the purpose of increasing the output voltage of the laser pulse power supply. In addition, the first power supply module V3 charges the first energy storage capacitor C1 through the inductor L, and filters the charging voltage thereon through the first energy storage capacitor C1.

[0051] When the pulse discharge switch K is in the on state, the pulse load enters the discharge process. During this process, if the voltage Vit corresponding to the feedback current It collected by the current sampling module 1 first received by the first comparator U4 exceeds the second reference voltage Ur3, the voltage output by the first comparator U4 through the second resistor R5 will increase rapidly and significantly. After the voltage is input to the second comparator U1 and compared with the triangle wave, the output duty cycle is greatly reduced. After passing through the inverter N, the duty cycle output is as large as possible, so that the control switch S is turned on for a long time, and the voltage on the first energy storage capacitor C1 is controlled to increase, thereby achieving the purpose of rapidly increasing the output voltage of the laser pulse power supply; when the voltage Vit corresponding to the feedback current It collected by the current sampling module 1 received by the first comparator U4 drops below the second reference voltage Ur3, the adjustment of the output voltage of the laser pulse power supply is exited. During the pulse discharge process of the pulse load and after the feedback current It exits the regulation of the output voltage of the laser pulse power supply, the voltage Vt1 output by the voltage output terminal V of the laser pulse power supply collected by the first voltage sampling module 2 and / or the voltage Vt2 on the second energy storage capacitor C2 collected by the second voltage sampling module 3 adjusts the voltage on the first energy storage capacitor C1. When the following three situations occur, the control switch S is turned on for a short time, and the voltage on the first energy storage capacitor C1 is controlled to decrease, thereby achieving the purpose of reducing the output voltage of the laser pulse power supply; the first situation: when the voltage Vt1 output by the voltage output terminal V of the laser pulse power supply collected by the first voltage sampling module 2 received by the first operational amplifier U2 is greater than the first reference voltage Ur1, the voltage output by the first operational amplifier U2 through the first resistor R3 The voltage Vt2 on the second energy storage capacitor C2 collected by the second voltage sampling module 3 received by the second operational amplifier U3 is greater than the third reference voltage Ur2, the voltage output through the third resistor R4 will decrease, and the ...The third case: If the voltage Vt1 output by the voltage output terminal V of the laser pulse power supply collected by the first voltage sampling module 2 and received by the first operational amplifier U2 is greater than the first reference voltage Ur1, and the voltage Vt2 on the second energy storage capacitor C2 collected by the second voltage sampling module 3 and received by the second operational amplifier U3 is greater than the third reference voltage Ur2, the voltage output through the first resistor R3 and the third resistor R4 will decrease. After the voltage is input to the second comparator U1 and compared with the triangle wave, the output duty cycle increases, and the duty cycle output after the inverter N decreases, so that the conduction time of the control switch S is short, the voltage on the first energy storage capacitor C1 is controlled to decrease, thereby achieving the purpose of reducing the output voltage of the laser pulse power supply. In the opposite case to the above three cases, the conduction time of the control switch S is long, the voltage on the first energy storage capacitor C1 is controlled to increase, thereby achieving the purpose of increasing the output voltage of the laser pulse power supply.

[0052] To sum up, during the pulse discharge process of the pulse load, the feedback current It on the output circuit of the quick response module PS1, the voltage output from the voltage output terminal V of the laser pulse power supply, and the voltage output by the high-voltage module are collected in real time. The quick response module PS1 adjusts the voltage on the first energy storage capacitor C1 to change positively with the positive-changing feedback current It (to achieve the purpose of rapidly increasing the output voltage of the laser pulse power supply) or exits the adjustment of the output voltage of the laser pulse power supply according to the change trend of the feedback current It obtained first (mathematically expressed as the first-order derivative). After the feedback current It exits the regulation of the output voltage of the laser pulse power supply, the quick response module PS1 adjusts the voltage on the first energy storage capacitor C1 to change inversely with the change in the output voltage of the laser pulse power supply, thereby solving the problem that the existing laser pulse power supply cannot ensure that the voltage output by the laser pulse power supply is stable and does not drop due to slow response during the pulse discharge process. The voltage change on the first energy storage capacitor C1 is achieved according to the following two situations: when the quick response module PS1 determines that the voltage outputted by the voltage output terminal V increases and / or the voltage Vt2 on the second energy storage capacitor C2 increases, the voltage on the first energy storage capacitor C1 is adjusted to change inversely with the change in the output voltage of the laser pulse power supply. When the quick response module PS1 determines that the reduction amplitude of the voltage outputted by the voltage output terminal V increases and / or the reduction amplitude of the voltage Vt2 on the second energy storage capacitor C2 increases, the voltage on the first energy storage capacitor C1 is adjusted to change inversely with the change in the output voltage of the laser pulse power supply.

[0053] Based on the above embodiments, the present invention further provides an excimer laser, which includes the above-mentioned various laser pulse power supplies.

[0054] It should be noted that the current sampling module 1 in the embodiment of the present invention can be implemented by a current sensor. The first voltage sampling module 2 and the second voltage sampling module 3 can be implemented by voltage sensors respectively.

[0055] The laser pulse power supply provided by the present invention adds a fast response module on the basis of the existing technology. The fast response module is used to adjust the voltage on the first energy storage capacitor according to the real-time collection of relevant feedback current and voltage, thereby solving the problem of slow response of the high-voltage module in the pulse discharge process of the existing laser pulse power supply, and ensuring that the voltage output by the laser pulse power supply is stable and does not drop during the pulse discharge process of the pulse load.

[0056] The laser pulse power supply and the corresponding excimer laser provided by the present invention are described in detail above. For those skilled in the art, any obvious modifications made thereto without departing from the essence of the present invention will fall within the scope of protection of the present invention.

Claims

1. A laser pulse power supply, comprising a high voltage module, characterized in that It also includes a first fast response module, a first energy storage capacitor, a second energy storage capacitor, a current sampling module and a first voltage sampling module, the high-voltage module is connected to the second energy storage capacitor, the second energy storage capacitor, the first fast response module and the first energy storage capacitor are connected to each other, the first fast response module is connected to the current sampling module and the first voltage sampling module, the current sampling module is connected in series to the output circuit of the first fast response module, and the first voltage sampling module is connected to the output end of the laser pulse power supply; During the pulse load discharge process, when the first fast response module determines that the feedback current collected by the current sampling module first received increases, the voltage on the first energy storage capacitor is controlled to change positively with the change of the feedback current; otherwise, the output voltage regulation of the laser pulse power supply is stopped; After the feedback current exits the regulation of the output voltage of the laser pulse power supply, the first quick response module determines the change trend of the output voltage of the laser pulse power supply collected by the first voltage sampling module to control the voltage on the first energy storage capacitor to change in the opposite direction as the output voltage of the laser pulse power supply changes.

2. The laser pulse power supply according to claim 1, wherein: The first fast response module includes a first operational amplifier, a first comparator, a first resistor, a second resistor, a second comparator, an inverter, a control switch, a diode and an inductor; The non-inverting input of the first operational amplifier is connected to a first reference voltage, the inverting input of the first operational amplifier is connected to the output of the first voltage sampling module, the output of the first operational amplifier is connected to one end of the first resistor, the non-inverting input of the first comparator is connected to the output of the current sampling module, the inverting input of the first comparator is connected to a second reference voltage, the output of the first comparator is connected to one end of the second resistor, the other end of the first resistor and the second resistor is connected to the inverting input of the second comparator, the non-inverting input of the second comparator is connected to a triangular wave, the output of the second comparator is connected to the input of the inverter, the output of the inverter is connected to the control end of the control switch, the input of the control switch is connected to the positive electrode of the first power supply module, the output of the control switch is connected to the cathode of the diode and one end of the inductor, the other end of the inductor is connected to one end of the first energy storage capacitor, and the other end of the first energy storage capacitor is connected to the anode of the diode and the negative electrode of the first power supply module.

3. A laser pulse power supply, including a high voltage module, characterized in that It also includes a second fast response module, a first energy storage capacitor, a second energy storage capacitor, a current sampling module, a first voltage sampling module and a second voltage sampling module, the high-voltage module is connected to the second energy storage capacitor, the second energy storage capacitor, the second voltage sampling module, the second fast response module and the first energy storage capacitor are interconnected, the second fast response module is connected to the current sampling module and the first voltage sampling module, the current sampling module is connected in series to the output circuit of the second fast response module, and the first voltage sampling module is connected to the output end of the laser pulse power supply; During the pulse load discharge process, when the second fast response module determines that the feedback current collected by the current sampling module first received increases, the voltage on the first energy storage capacitor is controlled to change positively with the change of the feedback current; otherwise, the output voltage regulation of the laser pulse power supply is stopped; After the feedback current exits the regulation of the output voltage of the laser pulse power supply, if the second quick response module determines that the output voltage of the laser pulse power supply collected by the first voltage sampling module increases and / or the voltage on the second energy storage capacitor collected by the second voltage sampling module increases, the voltage on the first energy storage capacitor is controlled to change inversely with the change of the output voltage of the laser pulse power supply.

4. A laser pulse power supply, comprising a high voltage module, characterized in that It also includes a second fast response module, a first energy storage capacitor, a second energy storage capacitor, a current sampling module, a first voltage sampling module and a second voltage sampling module, the high-voltage module is connected to the second energy storage capacitor, the second energy storage capacitor, the second voltage sampling module, the second fast response module and the first energy storage capacitor are interconnected, the second fast response module is connected to the current sampling module and the first voltage sampling module, the current sampling module is connected in series to the output circuit of the second fast response module, and the first voltage sampling module is connected to the output end of the laser pulse power supply; During the pulse load discharge process, when the second fast response module determines that the feedback current collected by the current sampling module first received increases, the voltage on the first energy storage capacitor is controlled to change positively with the change of the feedback current; otherwise, the output voltage regulation of the laser pulse power supply is stopped; After the feedback current exits the regulation of the output voltage of the laser pulse power supply, if the second quick response module determines that the reduction amplitude of the output voltage of the laser pulse power supply collected by the first voltage sampling module becomes larger and / or the reduction amplitude of the voltage on the second energy storage capacitor collected by the second voltage sampling module becomes larger, then the voltage on the first energy storage capacitor is controlled to change in the opposite direction to the change of the output voltage of the laser pulse power supply.

5. The laser pulse power supply according to claim 3 or 4, characterized in that: The second fast response module includes a first operational amplifier, a second operational amplifier, a first comparator, a first resistor, a second resistor, a third resistor, a second comparator, an inverter, a control switch, a diode and an inductor; The non-inverting input of the first operational amplifier is connected to a first reference voltage, the inverting input of the first operational amplifier is connected to the output of the first voltage sampling module, the output of the first operational amplifier is connected to one end of the first resistor, the non-inverting input of the first comparator is connected to the output of the current sampling module, the inverting input of the first comparator is connected to a second reference voltage, the output of the first comparator is connected to one end of the second resistor, the non-inverting input of the second operational amplifier is connected to the output of the second voltage sampling module, the inverting input of the first operational amplifier is connected to a third reference voltage, the output of the second operational amplifier is connected to one end of the third resistor, the other ends of the first resistor, the second resistor, and the third resistor are connected to the inverting input of the second comparator, the non-inverting input of the second comparator is connected to a triangular wave, the output of the second comparator is connected to the input of the inverter, the output of the inverter is connected to the control end of the control switch, the input of the control switch is connected to the positive electrode of the first power supply module, the output of the control switch is connected to the cathode of the diode and one end of the inductor, the other end of the inductor is connected to one end of the first energy storage capacitor, and the other end of the first energy storage capacitor is connected to the anode of the diode and the negative electrode of the first power supply module.

6. The laser pulse power supply according to any one of claims 1 to 4, characterized in that: The current sampling module is implemented by a current sensor.

7. The laser pulse power supply according to any one of claims 1 to 4, characterized in that: The first voltage sampling module and the second voltage sampling module are respectively implemented by voltage sensors.

8. The laser pulse power supply according to claim 2, wherein: The control switch is implemented by a switch device.

9. The laser pulse power supply according to claim 5, characterized in that: The control switch is implemented by a switch device.

10. An excimer laser, characterized in that The laser pulse power supply comprises the laser pulse power supply according to any one of claims 1 to 9.

Images