A fluid peristaltic pump

Abstract

The present invention relates to the technical field of fluid control, and in particular to a fluid peristaltic pump, which includes a fluid actuator and a pump chamber; the fluid actuator includes a plurality of variable-volume chambers connected through a communication chamber; at least one of all the chambers is formed as an actuating chamber, and the others are formed as actuating chambers. The actuating chamber is correspondingly provided with an actuating unit, and the actuating unit is used to drive the actuating chamber to generate a volume change, so as to cause the fluid working medium to flow into or out of each actuating chamber, so as to control the volume change of the actuating chamber. The effective volume of the actuating section distributed in the pump chamber changes with the volume change of the chamber connected thereto correspondingly. The effective volume change speed of the one of the two adjacent actuating sections that is closer to the inlet in the outflow direction is ≥ that of the other. Therefore, the function characteristics of the existing peristaltic pump can be realized with fewer or even a single actuating unit. Compared with a multi-chamber multi-actuating unit, the structure is compact, and it is easy to achieve a higher degree of thinness, lightness and miniaturization. The actuating process control is simple, and the cost is low and the power consumption is small.

Description

Technical Field

[0001] The present invention relates to the technical field of fluid control, and in particular to a fluid peristaltic pump. Background Art

[0002] With the development of technology, fluid control technology shows an increasingly diversified development trend in the application side, gradually expanding from the initial industrial production, biological medicine, and healthcare product applications to electronic heat dissipation and portable wearable device fields. As a key component of fluid control technology, pumps play an increasingly important role. Fluid pumps utilize the historical process of unsteady fluid flow and the phase differences of flow parameters in the time-space distribution, and the mutual influence and restriction of many factors to achieve flow control and improve flow characteristics.

[0003] The peristaltic pump is a typical structure of fluid pumps, usually including multiple cavities or pump chambers connected by flow channels, and each cavity or pump chamber is correspondingly provided with an actuating unit. For example, in a piezoelectric-driven peristaltic pump, the actuating unit is a piezoelectric vibrator. The vibration deformation of the piezoelectric vibrator causes the volume of the corresponding cavity or pump chamber to change. By matching the timing of the excitation of multiple piezoelectric vibrators, the timing of the volume change of the corresponding multiple cavities or pump chambers is caused, thereby realizing the continuous unidirectional pumping of fluid. As described in the structure form of the patent No. US20020184907A1 "MEMS HEAT PUMPS FOR INTEGRATED CIRCUIT HEATDISSIPATION", the pump chambers and the connecting channels between the pump chambers are constructed on an integrated circuit board, and piezoelectric vibrators are covered on the pump chambers. Through the continuous timing vibration of the multi-cavity piezoelectric vibrators, the heat dissipation medium inside the heat dissipation flow channel is directly driven to circulate. Another example is the patent CN110639075A "A Piezoelectric Peristaltic Pump for Blood Delivery". The structure also includes multiple pump chambers and the corresponding piezoelectric vibrators for each pump chamber. The difference is that the piezoelectric vibrator does not directly drive the fluid in the pump chamber, but a medium chamber is arranged between the piezoelectric vibrator and the pump chamber, and the medium chamber and the pump chamber are separated by a flexible membrane. The vibration of the piezoelectric vibrator causes the medium in the medium chamber to generate volume flow, which in turn causes the deformation of the flexible membrane and transmits pressure at the same time. By matching the timing of the excitation of multiple piezoelectric vibrators, the timing of the deformation of the corresponding flexible membranes is caused, and pressure is transmitted at the same time, promoting the timing of the volume change of the corresponding multiple chambers, thereby realizing the continuous pumping of liquid. The above structure forms all include multiple cavities and multiple actuating units, and each actuating unit requires a separate excitation control. First of all, both the structure and the actuating process control are relatively complex, and the size is limited by multiple actuating units, and the degree of thinning and miniaturization is limited; secondly, the manufacturing cost is high and the power consumption is large. Summary of the Invention

[0004] The technical problem to be solved by the present invention is: to solve the problems of complex structure and actuation control process, low degree of miniaturization, high cost and high power consumption existing in peristaltic pumps in the prior art, and a fluid peristaltic pump is provided herein.

[0005] The technical solution adopted by the present invention to solve its technical problems is: a fluid peristaltic pump, comprising a fluid actuator and a pump chamber;

[0006] The fluid actuator includes a plurality of variable-volume chambers connected through a communication chamber, and the chambers and the communication chamber together form a closed chamber-fluid cavity for accommodating a fluid working medium; at least one of all the chambers is formed as an actuation chamber, and the others are formed as execution chambers. An actuation unit is correspondingly arranged in the actuation chamber, and the actuation unit is used to drive the actuation chamber to generate a volume change so as to prompt the fluid working medium to flow into or out of each execution chamber, thereby controlling the volume change of the execution chamber;

[0007] The pump chamber includes an inlet and an outlet, and the direction in which the fluid flows from the inlet through the pump chamber to the outlet is the outflow direction. At least three actuation segments are sequentially distributed along the outflow direction in the pump chamber; each actuation segment is at least correspondingly connected to one chamber, and at least one of the chambers connected to all the actuation segments is an execution chamber;

[0008] The effective volume for fluid flow in the actuation segment becomes smaller as the volume of the chamber correspondingly connected to the actuation segment becomes larger, and becomes larger as the volume of the chamber correspondingly connected to the actuation segment becomes smaller; wherein, for two adjacent actuation segments, the effective volume change speed of the one closer to the inlet in the outflow direction is ≥ that of the other, and the effective volume change speed of the actuation segment closest to the inlet in the outflow direction > the effective volume change speed of the actuation segment closest to the outlet in the outflow direction.

[0009] Further, the volume change speed of the chamber correspondingly connected to the one closer to the inlet in the outflow direction among two adjacent actuation segments > the volume change speed of the chamber correspondingly connected to the other.

[0010] Further, the actuation segment is an actuation segment with variable volume, and the chamber connected to the actuation segment drives the effective volume of the actuation segment connected thereto to change when the volume changes.

[0011] Further, the chamber connected to the actuation segment is located within the actuation segment correspondingly connected thereto.

[0012] Further, the chamber connected to the actuation segment is located outside the actuation segment correspondingly connected thereto.

[0013] Further, when the actuation unit is not working, the chamber correspondingly connected to the actuation segment completely separates the inlet and the outlet.

[0014] Further, part or all of the side walls enclosing the execution cavity are soft membranes, and the soft membranes can deform as the fluid working medium flows into or out of the execution cavity where they are located.

[0015] Further, part or all of the side walls enclosing the cavity are soft membranes, and the soft membranes can deform as the fluid working medium flows into or out of the cavity where they are located.

[0016] Further, the communication cavity includes a first communication cavity, and the actuation cavity is communicated with the execution cavity through the first communication cavity.

[0017] Further, the communication cavity further includes a second communication cavity, and at least two execution cavities are communicated through the second communication cavity.

[0018] Further, the actuation unit is a piezoelectric actuator, an electrostatic actuator, an electromagnetic actuator, a shape memory metal actuator, a gas actuator, a thermal actuator or a mechanical actuator.

[0019] Further, a flow resistance regulator for adjusting the flow resistance of the fluid inside it is provided on the communication cavity.

[0020] Further, the cavity is filled with a fluid working medium, and the fluid working medium is compressible or incompressible.

[0021] The beneficial effects of the present invention are as follows:

[0022] 1), The function characteristics of a peristaltic pump can be achieved with fewer or even a single actuation unit. Compared with multiple cavities and multiple actuation units, the structure is compact, and it is easier to achieve a higher degree of thinness, lightness and miniaturization. The actuation process control is simple, with low cost and low power consumption.

[0023] 2), The actuation unit does not directly contact the fluid being pumped, and can be used for both liquid pumping and gas pumping. The usage range of a single type of fluid pump is improved.

[0024] 3), The fluid peristaltic pump of the present invention itself belongs to a valve-less pump, but the cavity generates a volume change at a specific time sequence between the inlet and outlet of the pump cavity. When the cavity becomes larger, it can separate the inlet and outlet of the pump cavity, forming a valve effect, and it is equivalent to an active valve rather than a passive valve, with a large opening. Compared with traditional valve-less pumps, the working efficiency is high, and compared with traditional valve pumps, the ability to discharge bubbles and foreign objects is enhanced.

[0025] 4), The fluid peristaltic pump of the present invention can form a normally closed fluid pump, that is, the cavity deforms to separate the inlet and outlet of the pump cavity in the initial state, and the cut-off property in the non-working state is high.

[0026] 5), By matching the number and arrangement form of the actuation cavity and the execution cavity, it is easy to achieve multi-path pumping control and can be applied to the quantitative mixing of different types of fluids. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] The present invention will be further described below in conjunction with the drawings and embodiments.

[0028] Figure 1 It is a schematic structural diagram of the series-type fluid peristaltic pump in Embodiment 1 of the present invention;

[0029] Figure 2 It is a schematic scheduling diagram of the series-type fluid peristaltic pump in Embodiment 1 of the present invention;

[0030] Figure 3 It is a schematic suction stroke diagram of the series-type fluid peristaltic pump in Embodiment 1 of the present invention;

[0031] Figure 4 It is a schematic structural diagram of another series-type fluid peristaltic pump in Embodiment 2 of the present invention;

[0032] Figure 5 It is a schematic structural diagram of the parallel-type fluid peristaltic pump in Embodiment 3 of the present invention;

[0033] Figure 6 It is a schematic scheduling diagram of the parallel-type fluid peristaltic pump in Embodiment 3 of the present invention;

[0034] Figure 7 It is a schematic suction stroke diagram of the parallel-type fluid peristaltic pump in Embodiment 3 of the present invention;

[0035] Figure 8 It is a schematic structural diagram of another parallel-type fluid peristaltic pump in Embodiment 4 of the present invention;

[0036] Figure 9 It is a schematic scheduling diagram of another parallel-type fluid peristaltic pump in Embodiment 4 of the present invention;

[0037] Figure 10 It is a schematic suction stroke diagram of another parallel-type fluid peristaltic pump in Embodiment 4 of the present invention;

[0038] Figure 11 It is a schematic structural diagram of the series-parallel type fluid peristaltic pump in Embodiment 5 of the present invention;

[0039] Figure 12 It is a schematic structural diagram of another series-parallel type fluid peristaltic pump in Embodiment 5 of the present invention;

[0040] Figure 13 It is a schematic structural diagram of the series-type fluid peristaltic pump in Embodiment 6 of the present invention, in which the actuation cavity itself can provide an actuation effect;

[0041] Figure 14 It is a schematic structural diagram of the parallel-type fluid peristaltic pump in Embodiment 6 of the present invention, in which the actuation cavity itself can provide an actuation effect;

[0042] Figure 15 It is a schematic structural diagram of the first multi-channel controlled fluid peristaltic pump in Embodiment 7 of the present invention;

[0043] Figure 16 It is a schematic structural diagram of the second multi-channel controlled fluid peristaltic pump in Embodiment 7 of the present invention;

[0044] Figure 17 It is a schematic structural diagram of the third multi-channel controlled fluid peristaltic pump in Embodiment 7 of the present invention;

[0045] Figure 18 It is a schematic structural diagram of the fourth multi-channel controlled fluid peristaltic pump in Embodiment 7 of the present invention;

[0046] Figure 19 It is a schematic structural diagram of the fifth multi-channel controlled fluid peristaltic pump in Embodiment 7 of the present invention

[0047] Figure 20 It is a schematic structural diagram of the sixth multi-channel controlled fluid peristaltic pump in Embodiment 7 of the present invention;

[0048] Figure 21 It is a schematic structural diagram of the first multi-actuator cavity fluid peristaltic pump in Embodiment 8 of the present invention;

[0049] Figure 22 It is a schematic structural diagram of the second multi-actuator cavity fluid peristaltic pump in Embodiment 9 of the present invention;

[0050] Figure 23 It is a schematic structural diagram of the bidirectional controlled fluid peristaltic pump in Embodiment 10 of the present invention;

[0051] Figure 24 It is a schematic diagram of a normally closed state in Embodiment 11 of the present invention;

[0052] Figure 25 It is another schematic diagram of a normally closed state in Embodiment 11 of the present invention.

[0053] In the figure: 1. Actuator cavity;

[0054] 2. Execution cavity, 2-1. Execution cavity I, 2-2. Execution cavity II, 2-3. Execution cavity III;

[0055] 3. Pump cavity, 31. Inlet, 32. Actuating section, 32-1. Actuating section I, 32-2. Actuating section II, 32-3. Actuating section III, 32-4. Actuating section IV, 33. Outlet;

[0056] 4. First communication cavity;

[0057] 5. Second communication cavity, 5-1. Second communication cavity I, 5-2. Second communication cavity II;

[0058] 6. Soft film. Detailed implementation mode

[0059] Now, the present invention will be further described in detail with reference to the accompanying drawings. These drawings are all simplified schematic diagrams, only illustrating the basic structure of the present invention in a schematic manner. Therefore, they only show the components related to the present invention, and directions and references (such as up, down, left, right, etc.) can only be used to assist in the description of the features in the drawings. Therefore, the following specific implementation modes are not adopted in a restrictive sense, and the scope of the claimed subject matter is only defined by the appended claims and their equivalent forms.

[0060] Embodiment 1

[0061] As Figure 1-3 shown, a fluid peristaltic pump of the present invention is composed of a fluid actuator and a pump chamber 3.

[0062] The fluid actuator includes a plurality of variable-volume chambers connected through a communication chamber. The chambers and the communication chamber together form a closed mass chamber filled with a fluid working medium. At least one of all the chambers is formed as an actuating chamber 1, and the others are formed as actuating chambers 2. The communication chamber connecting the actuating chamber 1 and the actuating chamber 2 is defined as the first communication chamber 4, and the communication chamber connecting at least two actuating chambers 2 is defined as the second communication chamber 5; an actuating unit is correspondingly arranged in the actuating chamber 1. The actuating unit provides power for the change in the volume of the actuating chamber 1, that is, the actuating unit causes the volume of the actuating chamber 1 to change under the action of excitation. The actuating unit is fixedly connected to the actuating chamber 1. Even the actuating unit forms a part of the actuating chamber 1, or the actuating unit is arranged near or around the actuating chamber 1. The actuating unit can be a piezoelectric actuator, an electrostatic actuator, an electromagnetic actuator, a shape memory metal actuator, a gas actuator, a thermal actuator or a mechanical actuator. There is no limitation here. Specifically:

[0063] When the actuating unit is a piezoelectric actuator, a shape memory metal actuator or a mechanical actuator, the driving force needs to act on the actuating chamber 1 through the direct contact of structural components. At this time, the actuating unit needs to be fixedly connected to the actuating chamber 1, and even the actuating unit can be used as a part of the enclosure of the actuating chamber 1; when the actuating unit is an electrostatic actuator, an electromagnetic actuator, a gas actuator or a thermal actuator, it is not necessary to transmit the driving force through the direct contact of structural components. At this time, the actuating unit can be arranged near or around the actuating chamber 1. It should be noted that in addition to the above several forms, the form of the actuating unit also includes any other driving form that can cause the component to move or deform. Its main purpose is to cause the volume of the actuating chamber 1 to change.

[0064] The volume change of the actuating chamber 1 causes the fluid working medium in the mass chamber to generate a volume flow and transmit pressure, thereby driving the volume of the actuating chamber 2 to change. By adjusting the excitation of the actuating unit, the flow resistance of the connecting chamber, and the size of the chambers, the volumes of the chambers are caused to change in a specific time sequence, so as to form a predetermined actuating effect.

[0065] It should be noted that the actuating chamber 1 generates a volume change under the action of the driving force of the actuating unit. It can either provide an actuating effect on the external fluid or component like the actuating chamber 2 connected thereto. At this time, part or all of the side walls enclosing the chambers (including the actuating chamber 1 and the actuating chamber 2) are formed as the flexible film 6; it can also only be used as a condition for enabling the connected actuating chambers 2 to provide an actuating effect on the external fluid or component, and it itself does not participate in the actuation of the fluid in the pump chamber 3. At this time, at least part or all of the side walls of the actuating chamber 2 enclosing the chambers are formed as the flexible film 6. In short, at least three of the chambers need to provide an actuating effect on the external fluid or component to form the specific time sequence required for the peristaltic pump.

[0066] In addition, the material of the flexible film 6 can be a metal film, a polymer film, or a composite film composed of metal and polymer, which is not limited herein. The characteristic of the flexible film 6 is that it is easy to deform under pressure.

[0067] It is not difficult to understand that during the process in which the volume change of the actuating chamber 1 causes the fluid working medium in the mass chamber to generate a volume flow, the connecting chamber connected between the chambers itself has a flow resistance. By adjusting the characteristic parameters such as the cross-sectional shape, size, and length of the connecting chamber, the flow resistance of the connecting chamber can be regulated. At the same time, a flow resistance regulator for adjusting the fluid flow resistance (referred to as flow resistance for short) can also be provided in the connecting chamber to cooperate in regulating the flow resistance between the chambers. And / or reasonably configure the sizes of the chambers and the difficulty of their volume changes (specifically, the difficulty of deformation and the deformation displacement of the flexible film 6) to enable the volumes of the chambers to change in a specific time sequence, so as to form a predetermined actuating effect.

[0068] The fluid working medium filled in the mass chamber can be compressible, weakly compressible, or incompressible, and can be high-pressure oil, water, air, or others, which is not limited herein. The fluid working medium in the mass chamber generates a volume flow under the action of the driving force of the actuating unit, and this process is accompanied by pressure transmission, thereby promoting the volume change of each chamber.

[0069] The pump chamber 3 includes an inlet 31 and an outlet 33. The direction in which the fluid flows from the inlet 31 through the pump chamber 3 to the outlet 33 is the outflow direction. Along the outflow direction, the pump chamber 3 is sequentially provided with at least three actuating segments 32; each actuating segment 32 is at least correspondingly connected to one chamber, and at least one of the chambers connected to all the actuating segments 32 is the actuating chamber 2;

[0070] The effective volume for fluid flow within the actuating section 32 decreases as the volume of the cavity correspondingly connected to the actuating section 32 increases, and increases as the volume of the cavity correspondingly connected to the actuating section 32 decreases; wherein, for two adjacent actuating sections 32, the effective volume change rate of the one closer to the inlet 31 in the outflow direction is ≥ that of the other, and the effective volume change rate of the actuating section 32 closest to the inlet 31 in the outflow direction > the effective volume change rate of the actuating section 32 closest to the outlet 33 in the outflow direction; to achieve a better pumping effect, the volume change rate of the cavity correspondingly connected to the actuating section 32 closer to the inlet 31 in the outflow direction among two adjacent actuating sections 32 can be made > the volume change rate of the cavity correspondingly connected to the other actuating section 32.

[0071] A fluid peristaltic pump of the present invention can be provided with different numbers and connection forms of actuating cavities 1 and actuating chambers 2 according to different application scenarios, and the present invention will be described one by one through different embodiments;

[0072] As Figure 1-3 shown, in this embodiment, the actuating section 32 is an actuating section 32 with variable volume. When the volume of the cavity connected to the actuating section 32 changes, it drives the change of the effective volume of the actuating section 32 connected thereto. The cavity connected to the actuating section 32 is located within the actuating section 32 corresponding to the connection, and each actuating section 32 is provided with one cavity, and the cavities are connected in series to form a single communication path; taking the example that the cavity includes one actuating cavity 1 and three actuating chambers 2, part or all of the side walls enclosing the actuating chamber 2 are formed as soft membranes 6; the three actuating chambers 2 are respectively the actuating chamber Ⅰ 2-1, the actuating chamber Ⅱ 2-2, and the actuating chamber Ⅲ 2-3 distributed in sequence along the outflow direction, and the three actuating sections 32 are respectively the actuating section Ⅰ 32-1, the actuating section Ⅱ 32-2, and the actuating section Ⅲ 32-3 distributed in sequence along the outflow direction. The actuating chamber Ⅰ 2-1 is located within the actuating section Ⅰ 32-1, the actuating chamber Ⅱ 2-2 is located within the actuating section Ⅱ 32-2, and the actuating chamber Ⅲ 2-3 is located within the actuating section Ⅲ 32-3; there are two second communication cavities 5, namely the second communication cavity Ⅰ 5-1 and the second communication cavity Ⅱ 5-2; the actuating cavity 1 is communicated with the actuating chamber Ⅰ 2-1 through the first communication cavity 4, the actuating chamber Ⅰ 2-1 is communicated with the actuating chamber Ⅱ 2-2 through the second communication cavity Ⅰ 5-1, and the actuating chamber Ⅱ 2-2 is communicated with the actuating chamber Ⅲ 2-3 through the second communication cavity Ⅱ 5-2; the working process of the fluid peristaltic pump can be divided into continuous suction stroke and discharge stroke:

[0073] During scheduling, under the excitation of the actuating unit, the volume of the actuating chamber 1 decreases, and the working fluid flows out of the actuating chamber 1 and into the actuating chamber 2, causing the flexible membranes 6 of the actuating chambers 2 to expand. Due to the variable volume of each actuating chamber 2 and the preset flow resistance of each connecting chamber, the expansion speeds of the flexible membranes 6 of the actuating chambers 2 are different. Specifically, this speed difference is jointly determined by the ease of expansion of the flexible membrane 6 of the actuating chamber 2, the deformation displacement, and the flow resistance of the working fluid flowing through the connecting chamber. In this embodiment, when the working fluid enters the actuating chamber I 2-1, since the flexible membrane 6 is designed to be relatively easy to deform and the flow resistance of the second connecting chamber I 5-1 is designed to be relatively large, the working fluid is more inclined to drive the flexible membrane 6 of the actuating chamber I 2-1 to expand. At this time, less working fluid flows through the second connecting chamber I 5-1. When the flexible membrane 6 of the actuating chamber I 2-1 expands to a certain extent, the difficulty of expansion of the flexible membrane 6 increases, resulting in a continuous increase in the pressure in the actuating chamber I 2-1, thereby increasing the amount of working fluid flowing through the second connecting chamber I 5-1, that is, increasing the amount of working fluid flowing into the actuating chamber II 2-2. This dynamic change in the flow rate distribution of the working fluid objectively causes an effect, that is, the instantaneous flow rate of the working fluid entering the actuating chamber I 2-1 is much greater than the instantaneous flow rate of the working fluid entering the actuating chamber II 2-2, resulting in the expansion speed of the flexible membrane 6 of the actuating chamber I 2-1 being greater than the expansion speed of the flexible membrane 6 of the actuating chamber II 2-2. By analogy, the expansion speed of the flexible membrane 6 of the actuating chamber II 2-2 is greater than the expansion speed of the flexible membrane 6 of the actuating chamber III 2-3. Thus, generally, it can be observed that the flexible membranes 6 of the three actuating chambers 2 expand in the order of the working fluid inflow.

[0074] The soft film 6 of the execution chamber I 2-1 expands fastest in the actuation section I 32-1 of the pump chamber 3, starts to build internal pressure and generates an actuation effect on the fluid that entered the actuation section I 32-1 of the pump chamber 3 during the previous suction stroke and is connected to the soft film 6 of the execution chamber I 2-1. The fluid pressure near the soft film 6 of the execution chamber I 2-1 in the actuation section I 32-1 increases. At the same time, the volume of the pump chamber 3 decreases. During the expansion of the soft film 6 of the execution chamber I 2-1, the inlet 31 and the pump chamber 3 are gradually separated, and the resistance of the fluid flowing out in the reverse direction from the inlet 31 gradually increases. At the same time, the soft film 6 of the execution chamber II 2-2 expands at a slower speed compared to the soft film 6 of the execution chamber I 2-1, starts to build internal pressure and generates an actuation effect on the fluid that entered the pump chamber 3 during the previous suction stroke and is connected to the soft film 6 of the execution chamber II 2-2. The fluid pressure near the soft film 6 of the execution chamber II 2-2 in the actuation section II 32-2 of the pump chamber 3 increases, and at the same time the volume of the pump chamber 3 further decreases. Due to the sequential difference in the expansion speeds of the soft films 6 of the execution chamber I 2-1 and the execution chamber II 2-2 in the pump chamber 3, there is a pressure difference in the fluid near the soft films 6 of the execution chamber I 2-1 and the execution chamber II 2-2 in the pump chamber 3. Also, since the soft film 6 of the execution chamber III 2-3 adjacent to the outlet 33 of the pump chamber 3 deforms at the slowest speed, relatively speaking, the pressure at the outlet 33 of the pump chamber 3 is the lowest. This process is accompanied by a continuous increase in the resistance of the fluid flowing out in the reverse direction from the inlet 31. Under the action of the internal and external pressure differences, the fluid in the pump chamber 3 is mainly pumped out from the outlet 33. When the soft film 6 of the execution chamber III 2-3 reaches the maximum deformation state, the discharge process is completed, as Figure 2 shown.

[0075] During the suction stroke, under the excitation of the actuating unit, the volume of the actuating chamber 1 increases, and the fluid working medium flows back into the actuating chamber 1, causing the flexible membranes 6 of the respective actuating chambers 2 to contract. Due to the variable volume of each actuating chamber 2 and the preset flow resistance of each connecting chamber, the contraction speeds of the flexible membranes 6 of the respective actuating chambers 2 are different. Similar to the expansion process, this speed difference is jointly determined by the ease of contraction of the flexible membrane 6 of the actuating chamber 2, the deformation displacement, and the flow resistance of the fluid working medium flowing through the connecting chamber. In this embodiment, the fluid working medium in the actuating chamber I 2-1 closest to the actuating chamber 1 first flows back into the actuating chamber 1. Since the flexible membrane 6 is designed to be relatively easy to deform and the flow resistance of the second connecting chamber I 5-1 is designed to be relatively large, the fluid working medium is more inclined to drive the contraction of the flexible membrane 6 of the actuating chamber I 2-1. At this time, less fluid working medium flows back through the second connecting chamber I 5-1. When the flexible membrane 6 of the actuating chamber I 2-1 contracts to a certain extent, the difficulty of contraction of the flexible membrane 6 increases, resulting in a continuous decrease in the pressure in this chamber, thereby increasing the fluid working medium flowing through the second connecting chamber I 5-1, that is, increasing the fluid working medium flowing back from the actuating chamber II 2-2. This dynamic change in the flow rate distribution mode of the fluid working medium objectively causes an effect, that is, the instantaneous flow rate of the fluid working medium flowing back through the actuating chamber I 2-1 is much greater than the instantaneous flow rate of the fluid working medium flowing back through the actuating chamber II 2-2, resulting in the contraction speed of the flexible membrane 6 of the actuating chamber I 2-1 being greater than the contraction speed of the flexible membrane 6 of the actuating chamber II 2-2. By analogy, the contraction speed of the flexible membrane 6 of the actuating chamber II 2-2 is greater than the contraction speed of the flexible membrane 6 of the actuating chamber III 2-3. Thus, overall, it can be observed that the flexible membranes 6 of the three actuating chambers 2 contract in sequence according to the order of the fluid working medium flowing back.

[0076] The flexible membrane 6 of the actuating chamber I 2-1 contracts fastest from the maximum deformation state established in the previous stroke. The volume of the actuating chamber I 2-1 decreases, causing the effective volume of the actuating section I 32-1 connected thereto to increase, and the volume of the pump chamber 3 also increases. At the same time, the flexible membrane 6 of the actuating chamber II 2-2 contracts at a slower speed than the flexible membrane 6 of the actuating chamber I 2-1 from the maximum deformation state established in the previous stroke. The volume of the actuating chamber II 2-2 decreases, causing the effective volume of the actuating section II 32-2 connected thereto to increase, and the volume of the pump chamber 3 further increases. In sequence, the flexible membrane 6 of the actuating chamber III 2-3 contracts slowest from the maximum deformation state established in the previous stroke. The volume of the actuating chamber III 2-3 decreases, causing the effective volume of the actuating section III 32-3 connected thereto to increase, and the volume of the pump chamber 3 reaches the maximum. During this process, as the volume of the pump chamber 3 gradually increases, the pressure in the pump chamber 3 gradually decreases. Since the flexible membrane 6 of the actuating chamber I 2-1 contracts fastest from the maximum deformation state established in the previous stroke, at this time, the flexible membrane 6 of the actuating chamber III 2-3 still maintains a relatively large deformation state. Under the action of the pressure difference inside and outside the pump chamber 3, the fluid mainly enters the pump chamber 3 from the inlet 31. When the flexible membrane 6 of the actuating chamber III 2-3 completely contracts, the suction stroke is completed, as Figure 3As shown in the figure; under periodic excitation, this reciprocates to form continuous unidirectional pumping of the fluid.

[0077] Embodiment 2

[0078] As Figure 4 shown, the structural principle of this embodiment is the same as that of Embodiment 1, except that the cavity is located outside the corresponding actuating section 32 connected thereto;

[0079] And one cavity is provided for each actuating section 32, and the cavities are connected in series to form a single communication path; taking the cavity containing one actuating cavity 1 and three actuating chambers 2 as an example for illustration, part or all of the side walls enclosing the actuating chamber 2 are formed as soft membranes 6, and part of the side walls enclosing the actuating section 32 is the soft membrane 6; the three actuating chambers 2 are respectively the actuating chamber I 2-1, the actuating chamber II 2-2 and the actuating chamber III 2-3 distributed in sequence along the outflow direction, and the three actuating sections 32 are respectively the actuating section I 32-1, the actuating section II 32-2 and the actuating section III 32-3 distributed in sequence along the outflow direction. The actuating chamber I 2-1 is connected to the actuating section I 32-1 and is located outside the actuating section I 32-1; the actuating chamber II 2-2 is connected to the actuating section II 32-2 and is located outside the actuating section II 32-2; the actuating chamber III 2-3 is connected to the actuating section III 32-3 and is located outside the actuating section III 32-3; the actuating cavity 1 is communicated with the actuating chamber I 2-1 through the first communication cavity 4, the actuating chamber I 2-1 is communicated with the actuating chamber II 2-2 through the second communication cavity I 5-1, and the actuating chamber II 2-2 is communicated with the actuating chamber III 2-3 through the second communication cavity II 5-2.

[0080] Embodiment 3

[0081] As Figures 5-7 shown, the structural principle of this embodiment is basically the same as that of Embodiment 1 or 2, except that the actuating cavity 1 is separately communicated with each actuating chamber 2 through a plurality of first communication cavities 4, that is, a parallel structure is formed between each actuating chamber 2 and the actuating cavity 1; the plurality of actuating chambers 2 are arranged on the connection channel between the inlet 31 and the outlet 33 in the pump chamber 3 along a single path; taking the cavity containing one actuating cavity 1 and three actuating chambers 2 as an example for illustration, part or all of the side walls enclosing the actuating chamber 2 are formed as soft membranes 6; the three actuating chambers 2 are respectively the actuating chamber I 2-1, the actuating chamber II 2-2 and the actuating chamber III 2-3 distributed in sequence along the outflow direction, and the three actuating sections 32 are respectively the actuating section I 32-1, the actuating section II 32-2 and the actuating section III 32-3 distributed in sequence along the outflow direction. The actuating chamber I 2-1 is located in the actuating section I 32-1, the actuating chamber II 2-2 is located in the actuating section II 32-2, the actuating chamber III 2-3 is located in the actuating section III 32-3, and the actuating chamber I 2-1, the actuating chamber II 2-2 and the actuating chamber III 2-3 are each separately communicated with the actuating cavity 1 through the first communication cavity 4.

[0082] When the actuating unit is under the excitation effect and causes the volume of the actuating chamber 1 to change, the fluid working medium flows out of or flows back into the actuating chamber 1, causing the flexible membranes 6 of the respective actuating chambers 2 to expand or contract. Due to the variable volume of each actuating chamber 2 and the preset flow resistance of each first communication chamber 4, the expansion or contraction speeds of the flexible membranes 6 of the respective actuating chambers 2 are different. Specifically, this speed difference is jointly determined by the ease of expansion of the flexible membrane 6 of the actuating chamber 2, the deformation displacement, and the flow resistance of the fluid working medium flowing through the communication chamber. By adjusting the ease of deformation, the deformation displacement of the flexible membrane 6 enclosing each actuating chamber 2, and the flow resistance of the fluid working medium flowing through each first communication chamber 4, the difference in the deformation speed and displacement of the flexible membranes 6 of each actuating chamber 2 can be adjusted, so that each actuating chamber 2 generates a volume change in a specific time sequence, thereby forming a predetermined actuating effect. In this embodiment, the flexible membrane 6 of the actuating chamber I 2-1 adjacent to the inlet 31 of the pump chamber 3 is designed to expand or contract the fastest, while the flexible membrane 6 of the actuating chamber III 2-3 adjacent to the outlet 33 of the pump chamber 3 is designed to expand or contract the slowest. Similarly, the working process of the fluid peristaltic pump can be divided into continuous suction and discharge processes:

[0083] During the discharge process, the flexible membrane 6 of the actuating chamber I 2-1 expands fastest in the actuating section I 32-1 of the pump chamber 3, starts to build internal pressure and generates an actuating effect on the fluid that entered the pump chamber 3 during the previous suction process and is connected to the flexible membrane 6 of the actuating chamber I 2-1. The fluid pressure near the flexible membrane 6 of the actuating chamber I 2-1 in the pump chamber 3 increases. At the same time, the volume of the pump chamber 3 decreases. During the process of the flexible membrane 6 of the actuating chamber I 2-1 deforming towards the pump chamber 3, the inlet 31 and the pump chamber 3 are gradually separated, and the resistance of the fluid flowing out in the reverse direction from the inlet 31 gradually increases. At the same time, the flexible membrane 6 forming the actuating chamber II 2-2 expands in the actuating section II 32-2 of the pump chamber 3 at a slower speed compared to the flexible membrane 6 of the actuating chamber I 2-1, starts to build internal pressure and generates an actuating effect on the fluid that entered the pump chamber 3 during the previous suction process and is connected to the flexible membrane 6 of the actuating chamber II 2-2. The fluid pressure near the flexible membrane 6 of the actuating chamber II 2-2 in the pump chamber 3 increases, and at the same time, the volume of the pump chamber 3 further decreases. Due to the time sequence of the fast and slow expansion of the flexible membranes 6 of the actuating chamber I 2-1 and the actuating chamber II 2-2 in the pump chamber 3, there is a pressure difference in the fluid near the flexible membranes 6 of the actuating chamber I 2-1 and the actuating chamber II 2-2 in the pump chamber 3. Also, since the flexible membrane 6 of the actuating chamber III 2-3 adjacent to the outlet 33 of the pump chamber 3 expands at the slowest speed in the actuating section III 32-3 of the pump chamber 3, the pressure at the outlet 33 end of the pump chamber 3 is the smallest compared. This process is accompanied by a continuous increase in the resistance of the fluid flowing out in the reverse direction from the inlet 31 end. Under the action of the internal and external pressure difference, the fluid in the pump chamber 3 is mainly pumped out from the outlet 33. When the flexible membrane 6 of the actuating chamber III 2-3 adjacent to the outlet 33 of the pump chamber 3 reaches the maximum deformation state towards the pump chamber 3 side, the discharge process is completed, as Figure 6 shown.

[0084] During the suction stroke, the soft film 6 of the execution chamber I 2-1 contracts fastest from the maximum deformation state established in the previous stroke. The volume of the execution chamber I 2-1 decreases, causing the effective volume of the actuating section I 32-1 connected thereto to increase, and the volume of the pump chamber 3 also increases. At the same time, the soft film 6 of the execution chamber II 2-2 contracts from the maximum deformation state established in the previous stroke at a slower speed than that of the execution chamber I 2-1. The volume of the execution chamber II 2-2 decreases, causing the effective volume of the actuating section I 32-2 connected thereto to increase, and the volume of the pump chamber 3 further increases. In sequence, the soft film 6 of the execution chamber III 2-3 adjacent to the outlet 33 of the pump chamber 3 contracts slowest from the maximum deformation state established in the previous stroke. The volume of the execution chamber III 2-3 decreases, causing the effective volume of the actuating section III 32-3 connected thereto to increase, and the volume of the pump chamber 3 reaches the maximum. During this process, as the volume of the pump chamber 3 gradually increases, the pressure in the pump chamber 3 gradually decreases. Since the soft film 6 of the execution chamber I 2-1 constituting the adjacent pump chamber 3 inlet 31 contracts fastest from the maximum deformation state established in the previous stroke, at this time, the soft film 6 of the execution chamber III 2-3 constituting the adjacent pump chamber 3 outlet 33 still maintains a large deformation state. Under the action of the pressure difference inside and outside the pump chamber 3, the fluid mainly enters the pump chamber 3 from the inlet 31. When the soft film 6 of the execution chamber III 2-3 constituting the adjacent pump chamber 3 outlet 33 is completely contracted, the suction stroke is completed, as Figure 7 shown; under periodic excitation, this process is repeated to form continuous unidirectional pumping of the fluid.

[0085] Embodiment 4

[0086] As Figures 8-10 shown, the basic structural principle of this embodiment is the same as that of Embodiment 3. The difference is that the cavity is located outside the actuating section 32 corresponding to it; the actuating cavity 1 is separately connected to each execution chamber 2 through a plurality of first communication cavities 4, that is, a parallel structure is formed between each execution chamber 2 and the actuating cavity 1; taking the cavity containing one actuating cavity 1 and three execution chambers 2 as an example for illustration, part or all of the side walls surrounding the execution chamber 2 are formed as soft films 6, and part of the side walls surrounding the actuating section 32 are soft films 6; the three execution chambers 2 are respectively the execution chamber I 2-1, the execution chamber II 2-2, and the execution chamber III 2-3 arranged in sequence along the outflow direction, and the three actuating sections 32 are respectively the actuating section I 32-1, the actuating section II 32-2, and the actuating section III 32-3 arranged in sequence along the outflow direction. The execution chamber I 2-1 is connected to the actuating section I 32-1 and is located outside the actuating section I 32-1; the execution chamber II 2-2 is connected to the actuating section II 32-2 and is located outside the actuating section II 32-2; the execution chamber III 2-3 is connected to the actuating section III 32-3 and is located outside the actuating section III 32-3; the actuating cavity 1 is connected to the execution chamber I 2-1 through the first communication cavity 4, and the execution chamber I 2-1, the execution chamber II 2-2, and the execution chamber III 2-3 are each separately connected to the actuating cavity 1 through the first communication cavity 4.

[0087] When the actuating unit is under the excitation effect and causes the volume of the actuating chamber 1 to change, the working fluid flows out of or back into the actuating chamber 1, causing the flexible membranes 6 of the respective actuating chambers 2 to expand or contract. Due to the variable volume of each actuating chamber 2 and the preset flow resistance of each first communication chamber 4, the expansion or contraction speeds of the flexible membranes 6 of the respective actuating chambers 2 are different. Specifically, this speed difference is jointly determined by the difficulty of expansion of the flexible membrane 6 of the actuating chamber 2, the deformation displacement, and the flow resistance of the working fluid flowing through the communication chamber. By adjusting the difficulty of deformation, the deformation displacement of the flexible membrane 6 enclosing the deformation of each actuating chamber 2, and the flow resistance of the working fluid flowing through each first communication chamber 4, the difference in the deformation speed and displacement of the flexible membranes 6 of each actuating chamber 2 can be adjusted, so that each actuating chamber 2 generates a volume change in a specific time sequence, thereby forming a predetermined actuating effect. In this embodiment, the flexible membrane 6 of the actuating chamber I 2-1 adjacent to the inlet 31 of the pump chamber 3 is designed to expand or contract fastest, while the flexible membrane 6 of the actuating chamber III 2-3 adjacent to the outlet 33 of the pump chamber 3 is designed to expand or contract slowest. Similarly, the working process of the fluid peristaltic pump can be divided into continuous suction and discharge processes:

[0088] During the discharge process, the flexible membrane 6 of the actuating chamber I 2-1 expands fastest towards the actuating section I 32-1 side of the pump chamber 3, driving the actuating section I 32-1 to deform together, and the actuating section I 32-1 deforms accordingly and its volume decreases, starting to build internal pressure and generating an actuating effect on the fluid that entered the actuating section I 32-1 of the pump chamber 3 during the previous suction process. The fluid pressure near the flexible membrane 6 of the actuating chamber I 2-1 in the pump chamber 3 increases. At the same time, the volume of the pump chamber 3 decreases. During the process of the flexible membrane 6 of the actuating chamber I 2-1 deforming towards the pump chamber 3 side, the inlet 31 and the pump chamber 3 are gradually separated, and the resistance to the reverse flow of the fluid from the inlet 31 gradually increases. At the same time, the flexible membrane 6 forming the actuating chamber II 2-2 expands towards the actuating section II 32-2 side of the pump chamber 3 at a slower speed than the actuating chamber I 2-1, and the actuating section II 32-2 deforms accordingly and its volume decreases, starting to build internal pressure and generating an actuating effect on the fluid that entered the actuating section II 32-2 during the previous suction process. The fluid pressure near the flexible membrane 6 of the actuating chamber II 2-2 in the pump chamber 3 increases, and at the same time, the volume of the pump chamber 3 further decreases. Due to the time sequence of the fast and slow expansion of the flexible membranes 6 of the actuating chambers I 2-1 and II 2-2 towards the pump chamber 3 side, there is a pressure difference in the fluid near the flexible membranes 6 of the actuating chambers I 2-1 and II 2-2 in the pump chamber 3. Also, since the flexible membrane 6 of the actuating chamber III 2-3 adjacent to the outlet 33 of the pump chamber 3 expands towards the pump chamber 3 side at the slowest speed, relatively speaking, the pressure at the outlet 33 of the pump chamber 3 is the smallest. During this process, the resistance to the reverse flow of the fluid from the inlet 31 continuously increases. Under the action of the internal and external pressure difference, the fluid in the pump chamber 3 is mainly pumped out from the outlet 33. When the flexible membrane 6 of the actuating chamber III 2-3 adjacent to the outlet 33 of the pump chamber 3 reaches the maximum deformation state towards the pump chamber 3 side, the discharge process is completed, as Figure 9as shown

[0089] During the suction stroke, the soft film 6 of the execution chamber I 2-1 contracts fastest from the maximum deformation state established in the previous stroke. The volume of the execution chamber I 2-1 decreases, causing the actuation section I 32-1 to deform accordingly and its effective volume to increase. The volume of the pump chamber 3 also increases. At the same time, the soft film 6 of the execution chamber II 2-2 contracts from the maximum deformation state established in the previous stroke at a slower speed than that of the execution chamber I 2-1. The volume of the execution chamber II 2-2 decreases, causing the effective volume of the connected actuation section II 32-2 to increase, and the volume of the pump chamber 3 to further increase. In sequence, the soft film 6 of the execution chamber III 2-3 adjacent to the outlet 33 of the pump chamber 3 contracts slowest from the maximum deformation state established in the previous stroke. The volume of the execution chamber III 2-3 decreases, causing the effective volume of the connected actuation section III 32-3 to increase, and the volume of the pump chamber 3 to reach the maximum. During this process, as the volume of the pump chamber 3 gradually increases, the pressure inside the pump chamber 3 gradually decreases. Since the soft film 6 of the execution chamber I 2-1 forming the adjacent pump chamber 3 inlet 31 contracts fastest from the maximum deformation state established in the previous stroke, at this time, the soft film 6 of the execution chamber III 2-3 forming the adjacent pump chamber 3 outlet 33 still maintains a large deformation state. Under the action of the pressure difference inside and outside the pump chamber 3, the fluid mainly enters the pump chamber 3 from the inlet 31. When the soft film 6 of the execution chamber III 2-3 forming the adjacent pump chamber 3 outlet 33 completely contracts, the suction stroke is completed, as Figure 10 shown; under periodic excitation, this process repeats, forming continuous unidirectional pumping of the fluid.

[0090] Embodiment 5

[0091] As Figures 11-12 shown, the structural principle of this embodiment is basically the same as that of Embodiment 2 and Embodiment 4, the difference being that at least two execution chambers 2 are connected through a second communication chamber 5.

[0092] Embodiment 6

[0093] As Figures 13-14 , the structural principle and layout form of this embodiment are basically the same as those of Embodiment 2 or 4, the difference being that part or all of the side walls surrounding the cavity containing the actuation cavity 1 and the execution chamber 2 are formed as the soft film 6, that is, the actuation cavity 1 itself can provide an actuation effect on the fluid in the pump chamber 3, and the actuation cavity 1 can be arranged on the actuation section 32 closest to the inlet 31 in the outflow direction.

[0094] Taking the example that the cavity contains an actuating cavity 1 and three actuating chambers 2, the three actuating chambers 2 are respectively the actuating chamber I 2-1, the actuating chamber II 2-2, and the actuating chamber III 2-3 which are distributed in sequence along the outflow direction, and the four actuating segments 32 are respectively the actuating segment I 32-1, the actuating segment II 32-2, the actuating segment III 32-3, and the actuating segment IV 32-4 which are distributed in sequence along the outflow direction. The actuating cavity 1 is connected to the actuating segment I 32-1 and is located outside the actuating segment I 32-1; the actuating chamber I 2-1 is connected to the actuating segment II 32-2 and is located outside the actuating segment II 32-2; the actuating chamber II 2-2 is connected to the actuating segment III 32-3 and is located outside the actuating segment III 32-3; the actuating chamber III 2-3 is connected to the actuating segment IV 32-4 and is located outside the actuating segment IV 32-4; as Figure 13 shown, the actuating cavity 1 is communicated with the actuating chamber 2 through the first communication cavity 4, and the two actuating chambers 2 are communicated with each other through the second communication cavity 5; or, as Figure 14 shown, each actuating chamber 2 is independently communicated with the actuating cavity 1 through the first communication cavity 4.

[0095] Embodiment 7

[0096] As Figures 15-20 shown, the principle of this embodiment is the same as that of Embodiments 1-6. The difference is that by matching the number and connection form of the actuating cavity 1 and the actuating chamber 2, multi-path pumping control is realized, which can be applied to the simultaneous pumping or quantitative mixing of different types of fluids.

[0097] Embodiment 8

[0098] As Figure 21 shown, compared with Embodiment 1 or 3, the difference of this embodiment is that when the actuating force efficiency of a single actuating cavity 1 is insufficient, the actuating force efficiency can be improved by setting multiple actuating cavities 1, which will not be elaborated here.

[0099] Embodiment 9

[0100] As Figure 22 shown, compared with Embodiment 2 or 4, the difference of this embodiment is that when the actuating force efficiency of a single actuating cavity 1 is insufficient, the actuating force efficiency can be improved by setting multiple actuating cavities 1, which will not be elaborated here.

[0101] Embodiment 10

[0102] As Figure 23As shown in the figure, the principle of this embodiment is the same as that of Embodiments 1-8. The difference is that the pump chamber 3 includes a first pump port and a second pump port. One of the first pump port and the second pump port is an inlet 31, and the other is an outlet 33. One or more actuating chambers 1 are provided at positions adjacent to the first pump port and the second pump port. The actuating chamber 1 adjacent to the first pump port is communicated with the actuating chamber 2 adjacent to the first pump port, and the actuating chamber 1 adjacent to the second pump port is communicated with the actuating chamber 2 adjacent to the second pump port. The effect that can be achieved is that when the actuating unit corresponding to the actuating chamber 1 adjacent to the first pump port is excited, and the actuating unit corresponding to the actuating chamber 1 adjacent to the second pump port is not excited, the first pump port is the inlet 31, the second pump port is the outlet 33, and the fluid enters the pump chamber 3 from the inlet 31 and is pumped out from the outlet 33. When the actuating unit corresponding to the actuating chamber 1 adjacent to the second pump port is excited, and the actuating unit corresponding to the actuating chamber 1 adjacent to the first pump port is not excited, the first pump port is the outlet 33, the second pump port is the inlet 31, and the fluid enters the pump chamber 3 from the inlet 31 and is pumped out from the outlet 33. Thus, the bidirectional pumping control of the fluid can be realized.

[0103] Embodiment 11

[0104] As Figures 24-25 shown in the figure, the difference between this embodiment and Embodiments 1-10 is that the cavity corresponding to the actuating section 32 is completely separated from the inlet 31 and the outlet 33 when the actuating unit is not working; that is, in the initial state, the soft film 6 forming each actuating chamber 2 or the soft film 6 forming each cavity including the actuating chamber 1 and the actuating chamber 2 is in the maximum expansion state toward the pump chamber side, separating the inlet 31 and the outlet 33. The effect that can be achieved is that the fluid peristaltic pump forms a normally closed fluid pump, and the cut-off property in the non-working state is high.

[0105] Inspired by the ideal embodiments of the present invention, through the above description, relevant staff can make various changes and modifications within the scope not deviating from the technical idea of this invention. The technical scope of this invention is not limited to the content in the specification, and its technical scope must be determined according to the scope of the claims.

Claims

1. A fluid peristaltic pump, characterized in that: Comprising a fluid actuator and a pump chamber (3); The fluid actuator includes a plurality of variable - volume chambers connected through a communication chamber. The chambers and the communication chamber together form a closed mass - volume chamber for containing a fluid working medium. At least one of all the chambers is formed as an actuating chamber (1), and the others are formed as actuating chambers (2). An actuating unit is correspondingly arranged in the actuating chamber (1). The actuating unit is used to drive the actuating chamber (1) to generate a volume change, so as to prompt the fluid working medium to flow into or out of each actuating chamber (2), thereby controlling the volume change of the actuating chamber (2); The pump chamber (3) includes an inlet (31) and an outlet (33). The direction in which the fluid flows from the inlet (31) through the pump chamber (3) to the outlet (33) is the outflow direction. At least three actuating sections (32) are sequentially distributed in the pump chamber (3) along the outflow direction; Each actuating section (32) is at least correspondingly connected to one chamber, and at least one of the chambers connected to all the actuating sections (32) is an actuating chamber (2); The effective volume for fluid flow in the actuating section (32) becomes smaller as the volume of the chamber correspondingly connected to the actuating section (32) becomes larger, and becomes larger as the volume of the chamber correspondingly connected to the actuating section (32) becomes smaller; Among them, for two adjacent actuating sections (32), the effective volume change speed of the one closer to the inlet (31) in the outflow direction is ≥ that of the other, and the effective volume change speed of the actuating section (32) closest to the inlet (31) in the outflow direction > the effective volume change speed of the actuating section (32) closest to the outlet (33) in the outflow direction; Part or all of the side walls enclosing the actuating chamber (2) are soft membranes (6); During the discharge process, under the excitation of the actuating unit, the volume of the actuating chamber (1) is reduced, the fluid working medium flows out of the actuating chamber (1), and flows into the actuating chamber (2), causing the soft membranes (6) of each actuating chamber (2) to expand; During the suction process, under the excitation of the actuating unit, the volume of the actuating chamber (1) is increased, the fluid working medium flows back into the actuating chamber (1), causing the soft membranes (6) of each actuating chamber (2) to contract.

2. The fluid peristaltic pump according to claim 1, characterized in that: The volume change speed of the chamber correspondingly connected to the actuating section (32) closer to the inlet (31) in the outflow direction among two adjacent actuating sections (32) > the volume change speed of the chamber correspondingly connected to the other actuating section (32).

3. The fluid peristaltic pump according to claim 1, characterized in that: The actuating section (32) is an actuating section (32) with variable volume. When the volume of the chamber connected to the actuating section (32) changes, it drives the effective volume of the actuating section (32) connected to it to change.

4. The fluid peristaltic pump according to claim 3, characterized in that: The chamber connected to the actuating section (32) is located inside the actuating section (32) corresponding to the connection.

5. The fluid peristaltic pump according to claim 3, characterized in that: The chamber connected to the actuating section (32) is located outside the actuating section (32) corresponding to the connection.

6. The fluid peristaltic pump according to claim 1, characterized in that: When the actuating unit is not working, the chamber correspondingly connected to the actuating section (32) completely separates the inlet (31) and the outlet (33).

7. The fluid peristaltic pump according to claim 1, characterized in that: Part or all of the side walls enclosing the chamber are soft membranes (6), and the soft membranes (6) can deform as the fluid working medium flows into or out of the chamber where they are located.

8. The fluid peristaltic pump according to claim 1, characterized in that: The communication chamber includes a first communication chamber (4), and the actuating chamber (1) is communicated with the actuating chamber (2) through the first communication chamber (4).

9. The fluid peristaltic pump according to claim 8, characterized in that: The communication cavity further includes a second communication cavity (5), and at least two actuator cavities (2) are communicated through the second communication cavity (5).

10. The fluid peristaltic pump according to claim 1, characterized in that: The actuating unit is a piezoelectric actuator, an electrostatic actuator, an electromagnetic actuator, a shape memory metal actuator, a gas actuator, a thermal actuator or a mechanical actuator.

11. The fluid peristaltic pump according to claim 1, characterized in that: A flow resistance regulator for adjusting the flow resistance of the fluid inside is provided on the communication cavity.

12. The fluid peristaltic pump according to claim 1, characterized in that: The solute cavity is filled with a fluid working medium, and the fluid working medium is compressible or incompressible.

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