Actuating device

Abstract

The present invention relates to an actuator, comprising: an actuator and a fixing part. The actuator has at least one driving part; the fixing part is arranged at any position of the actuator, so that the driving part forms a first driving part and a second driving part, and when the setting position of the fixing part is adjusted, the first driving part and the second driving part can achieve the same or different actuation capabilities.

Description

Technical Field

[0001] The present invention relates to an actuating device, and more particularly to an actuating device in which a single actuator has multiple driving parts and multi-directional driving control. Background Art

[0002] In recent years, pressure flow control devices have been widely used to replace mass flow controllers in precision manufacturing equipment such as semiconductor processes. This type of pressure flow control device has the characteristics of high corrosion resistance, low dust volume, excellent gas replacement and fast switching speed. The driving device of the pressure flow control device usually uses a piezoelectric element driving device with strong thrust, fast response and excellent control characteristics, also known as a piezoelectric actuator.

[0003] Piezoelectric drive devices control mechanical movement through piezoelectric actuators. They mainly apply voltage to the piezoelectric actuators, use the piezoelectric actuators to drive the machine to move, and make the manipulated components move the push rod or lever. At present, piezoelectric drive devices are widely used in various industries, especially in the field of production technology, including electronic peripheral product manufacturing, biomedical engineering, aerospace, automotive electronics, biotechnology, and precision tools. Summary of the invention

[0004] The invention relates to an actuating device, which enables a first driving part and a second driving part to achieve the same or different actuating capabilities by adjusting the setting position of a fixing part.

[0005] The actuator device of the present invention comprises: an actuator and a fixing part. The actuator has at least one driving part, and the driving part has a long axis; the fixing part is arranged at any position of the actuator, so that the driving part forms a first driving part and a second driving part, and when the setting position of the fixing part is adjusted, the first driving part and the second driving part can achieve the same or different actuation capabilities; wherein the first driving part and the second driving part are formed on the long axis and located on both sides of the fixing part in different directions.

[0006] In one embodiment of the present invention, the actuator is composed of at least one smart material, and the smart material includes: memory metal, thermoelectric material, piezoelectric material, thermodeformable material, etc.

[0007] In one embodiment of the present invention, the driving unit has at least one electrode that is driven independently.

[0008] In one embodiment of the present invention, the first driving unit has at least one first electrode, and the second driving unit has at least one second electrode.

[0009] In one embodiment of the present invention, the first electrode and the second electrode are electrically isolated from each other.

[0010] In one embodiment of the present invention, the actuator has at least one supporting member.

[0011] In one embodiment of the present invention, the actuator and the fixing portion are disposed in the inner space of the housing.

[0012] In one embodiment of the present invention, the housing has at least one port, and the opening or closing of the port can be independently controlled by a driving portion of the actuator.

[0013] In one embodiment of the present invention, the actuating device is applied to valve products.

[0014] Based on the above, the actuator device of the present invention forms a first drive part and a second drive part by setting the fixing part at any position of the actuator. By adjusting the position of the fixing part, the first drive part and the second drive part can achieve the same or different actuation capabilities.

[0015] In order to make the above features and advantages of the present invention more clearly understood, embodiments are given below and described in detail with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 is a cross-sectional schematic diagram of an actuating device according to a first embodiment of the present invention.

[0017] Figure 2 is a schematic three-dimensional diagram of an actuating device according to a first embodiment of the present invention.

[0018] Figure 3 FIG. 1 is a schematic diagram of electrodes of a driving portion of an actuator according to a first embodiment of the present invention.

[0019] Figure 4 is a cross-sectional schematic diagram of an actuating device according to a second embodiment of the present invention.

[0020] Figure 5 is a schematic three-dimensional diagram of an actuating device according to a second embodiment of the present invention.

[0021] Figure 6 FIG. 4 is a schematic diagram of electrodes of a driving portion of an actuator according to a second embodiment of the present invention.

[0022] Figure 7 It is a cross-sectional schematic diagram showing that the actuator and the fixing portion are disposed in the inner space of the housing according to the third embodiment of the present invention.

[0023] Figure 8 It is a three-dimensional schematic diagram showing that the actuator and the fixing portion are disposed in the inner space of the housing according to the third embodiment of the present invention.

[0024]

Main component symbol description

[0025] 100, 100a, 100b: Actuating device 10: Actuator

[0026] 101: driving unit 101a: first driving unit

[0027] M1: First active area A1: First A electrode

[0028] B1: First B electrode C1: First C electrode

[0029] 101b: second driving part M2: second operating area

[0030] A2: Second A electrode B2: Second B electrode

[0031] C2: second C electrode 102: support member

[0032] 20: Fixing part 30: Housing

[0033] 31: Internal space 32: Port DETAILED DESCRIPTION

[0034] Figure 1 is a cross-sectional schematic diagram of an actuating device according to a first embodiment of the present invention. Figure 2 is a three-dimensional schematic diagram of an actuating device according to a first embodiment of the present invention. Figure 1 and Figure 2 The actuator device 100 of this embodiment includes: an actuator 10 and a fixing part 20. The actuator 10 has at least one driving part 101. The fixing part 20 is arranged at any position of the actuator 10 so that the driving part forms a first driving part 101a and a second driving part 101b.

[0035] See also Figure 1 and Figure 2 In this embodiment, the fixing portion 20 is disposed at the middle position of the actuator 10 to form a first driving portion 101a and a second driving portion 101b. By fine-tuning the setting position of the fixing portion 20, the first driving portion 101a and the second driving portion 101b can achieve the same or different actuation capabilities.

[0036] See also Figure 1 and Figure 2In this embodiment, the material of the actuator 10 is selected from at least one smart material, and the smart material includes memory metal, thermoelectric material, piezoelectric material, thermo-induced deformation material, etc., but the material of the actuator 10 is not limited to this. In addition, the actuator 10 includes at least one support member 102. After the position of the fine-tuning fixing part 20 is set, if the length of the first driving part 101a or the second driving part 101b is longer, the support member 102 is used to strengthen the structural strength of the first driving part 101a or the second driving part 101b, so that the overall actuator 10 is stably set in the valve product. Therefore, through the extension and change design of the support member 102, the structural strength of the actuator 10 is increased, so that the actuator device 100 of the present invention can be more widely used in various valve products.

[0037] Figure 3 1 is a schematic diagram of electrode deformation of the actuator device according to the first embodiment of the present invention. In this embodiment, the driving part 101 has at least one electrode driven independently. When the fixing part 20 is arranged at the middle position of the actuator 10, the first driving part forms at least one first electrode, the second driving part forms at least one second electrode, and the first electrode and the second electrode are electrically isolated from each other, that is, the first driving part 101a and the second driving part 101b respectively have at least one electrode driven independently. When the actuator device 100 is operated, the first actuation area M1 corresponding to the first driving part 101a can be controlled by the electric field of the first A electrode A1, the first B electrode B1 and the first C electrode C1, so that the first driving part 101a can be deformed in different directions. Similarly, the second actuation area M2 corresponding to the second driving part 101b can be controlled by the electric field of the second A electrode A2, the second B electrode B2 and the second C electrode C2, so that the second driving part 101b can be deformed in different directions. Among them, the first A electrode A1, the first B electrode B1, the second A electrode A2, the second B electrode B2, the first C electrode C1 and the second C electrode C2 are all independent electrically isolated electrodes. However, the first C electrode C1 and the second C electrode C2 can be electrically independent electrodes or electrically connected common electrodes.

[0038] The following describes another type of actuating device 100a. The same or similar elements as those in the previous embodiment are represented by the same or similar symbols, and will not be described in detail. Only the main differences between the different embodiments will be described below.

[0039] Figure 4 is a cross-sectional schematic diagram of an actuating device according to a second embodiment of the present invention. Figure 5 is a perspective schematic diagram of an actuating device according to a second embodiment of the present invention. Figure 4 and Figure 5The main difference between the actuator device 100a of this embodiment and the actuator device 100 of the previous embodiment is that in this embodiment, the fixing portion 20 is disposed at a position of the actuator 10 adjacent to the second driving portion 101b, so that the overall length of the first driving portion 101a is longer. Therefore, a support member 102 is added in the middle of the first driving portion 101a to enhance the structural strength, while the second driving portion 101b is shorter in length, so the support member 102 is not disposed. As described in the previous embodiment, this embodiment achieves the same or different actuation capabilities of the first driving portion 101a and the second driving portion 101b by fine-tuning the location of the fixing portion 20.

[0040] Figure 6 Schematic diagram of electrode deformation of the actuator according to the second embodiment of the present invention. In this embodiment, when the actuator 100a is operated, the fixed portion 20 is disposed near the second actuation area M2 (i.e., the second driving portion 101b), so that the first actuation area M1 is wider and the second actuation area M2 is narrower. When the actuator 100a is actuated, the first actuation area M1 corresponding to the first driving portion 101a is controlled by the electric field of the first A electrode A1, the first B electrode B1, and the first C electrode C1, so that the first driving portion 101a can be deformed in different directions. Similarly, the second driving portion 101b and its corresponding second actuation area M2 are controlled by the electric field of the second A electrode A2, the second B electrode B2, and the second C electrode C2, so that the second driving portion 101b can be deformed in different directions. Among them, the first A electrode A1, the first B electrode B1, the second A electrode A2, the second B electrode B2, the first C electrode C1 and the second C electrode C2 are all independent electrically isolated electrodes. However, the first C electrode C1 and the second C electrode C2 can be electrically independent electrodes or electrically connected common electrodes.

[0041] Figure 7 It is a cross-sectional schematic diagram showing that the actuator and the fixing portion are disposed in the inner space of the housing according to the third embodiment of the present invention. Figure 8 is a three-dimensional schematic diagram of the actuator and the fixing part being arranged in the inner space of the housing according to the third embodiment of the present invention. Figure 7 and Figure 8 The main difference between the actuator device 100b of the present embodiment and the actuator device 100 of the first embodiment is that in the present embodiment, the actuator 10 and the fixing portion 20 are arranged in the internal space 31 of the shell 30. The fixing portion 20 can be fixed by bolts, welding, snap-fitting, integral stamping, etc., as long as the fixing portion 20 can be firmly arranged in the internal space 31 of the shell 30, so that the actuator 10 can be freely controlled in the internal space 31.

[0042] See also Figure 7 and Figure 8In this embodiment, the actuator 10 has at least one driving part 101, and at least one port 32 is set in the internal space 31 of the shell 30. The port 32 is independently opened or closed by the driving part 101 of the actuator 10. Through the matching design of the actuator 10 and the fixing part 20, the actuating device of the present invention can be more widely used in various valve products.

[0043] See also Figure 7 and Figure 8 In the present embodiment, when two ports 32 are provided in the internal space 31 of the shell 30, the actuator 10 is positioned by setting the position of the fixing portion 20 so as to form a first driving portion 101a and a second driving portion 101b, and then the first driving portion 101a is used to independently control the opening or closing of one of the ports 32, and in addition, the second driving portion 101b is used to independently control the opening or closing of the other port 32.

[0044] By fine-tuning the setting position of the fixing part 20 and the actuator 10 of the present invention, the corresponding number of driving parts can be adjusted according to the number of ports 32 set in the valve product shell, so that each port has a corresponding controlled driving part, and each driving part is controlled to achieve the same or different actuation capabilities.

[0045] In summary, the actuator device of the present invention forms a first driving part and a second driving part by setting the fixing part at any position of the actuator. By adjusting the position of the fixing part, the first driving part and the second driving part can achieve the same or different actuation capabilities.

[0046] The above description is only a preferred embodiment of the present invention and does not limit the present invention in any form. Although the present invention has been disclosed as a preferred embodiment as above, it is not used to limit the present invention. Any technician familiar with the profession can make some changes or modify the technical contents disclosed above into equivalent embodiments without departing from the scope of the technical solution of the present invention. However, any simple modification, equivalent change and modification made to the above embodiments according to the technical essence of the present invention without departing from the content of the technical solution of the present invention still fall within the scope of the technical solution of the present invention.

Claims

1. An actuating device, comprising: an actuator having at least one drive portion having an elongated axis; and A fixing part, which is arranged at any position of the actuator, so that the driving part forms a first driving part and a second driving part, characterized in that when the setting position of the fixing part is adjusted, the first driving part and the second driving part can achieve the same or different actuation capabilities; The first driving part and the second driving part are formed on the long axis and located on two sides of the fixing part in different directions.

2. The actuating device according to claim 1, characterized in that: The actuator is composed of at least one smart material, and the smart material includes: memory metal, or thermoelectric material, or piezoelectric material, or thermodeformable material.

3. The actuating device according to claim 1, characterized in that: The driving unit includes at least one electrode that is driven independently.

4. The actuating device according to claim 1, characterized in that: The first driving unit has at least one first electrode, and the second driving unit has at least one second electrode.

5. The actuating device according to claim 4, characterized in that: The first electrode and the second electrode are electrically isolated from each other.

6. The actuating device according to claim 1, characterized in that: The actuator has at least one support.

7. The actuating device according to claim 1, characterized in that: The actuator and the fixing part are arranged in the inner space of the shell.

8. The actuating device according to claim 7, characterized in that: The housing has at least one port, and the opening or closing of the port can be independently controlled by the driving part of the actuator.

9. The actuating device according to claim 1, characterized in that: The actuating device is applied to valve products.

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