Magnetooptical kerr test device

Abstract

The magnetic-optical Kerr test device provided by the application can adjust the optical path through an optical path adjusting assembly, can at least realize adjustment of the tilt degree of the incident light of the measured object, and realizes adjustment of the incident angle of the test light of the measured object; the magnetic-optical Kerr test device provided by the application can realize switching of the incident light of the measured object in the tilt direction and the vertical direction, breaks the isolation between the magnetic-optical Kerr test devices with the incident light being perpendicular incidence and being incident at an angle, fuses the two types of magnetic-optical Kerr devices into the same device, realizes corresponding functions, and greatly reduces the cost of the magnetic-optical Kerr test.

Description

Technical Field

[0001] This invention belongs to the field of magnetic variable measurement technology, and relates to measurement using the magneto-optical effect, specifically, to a magneto-optical Kerr test device. Background Technology

[0002] Magneto-optical characterization technology investigates the magnetic state of materials by detecting the magneto-optical response induced by the interaction between light and materials. The magneto-optical Kerr effect refers to the phenomenon where a beam of linearly polarized light, composed of left-handed and right-handed circularly polarized light, is reflected from a magnetic test object and becomes elliptically polarized, with the polarization plane of the ellipse deflecting at an angle relative to the incident polarization plane. A magneto-optical Kerr testing device utilizes the magneto-optical Kerr effect to measure the magnetism of a test object.

[0003] Figure 1 This paper illustrates a technical solution for a conventional magneto-optical Kerr test apparatus. A light-generating component 100 emits a beam of polarized light towards a test object 300. This polarized light is then dispersed by a beam-splitting component 200 and incident on the surface of the test object 300. The light reflected from the test object 300 is then dispersed by the beam-splitting component 200 and incident on a photosensitive component 400. The photosensitive component 400 outputs a corresponding signal based on the polarization state of the received light. In some application scenarios, to meet specific testing requirements, it is necessary to adjust the incident angle of the light incident on the test object 300. However, according to… Figure 1 The existing magneto-optical Kerr testing apparatus shown, when adjusting the incident angle of polarized light illuminating the test object 300 by tilting the incident light path or tilting the test object 300, will cause the reflected light to fail to reach the photosensitive component 400 via the beam splitter 200. Even worse, it will prevent the reflected light from reaching the beam splitter 200, resulting in no measurement. Therefore, in the prior art, the magneto-optical Kerr testing apparatus where polarized light is incident perpendicular to the test object 300 and the magneto-optical Kerr testing apparatus where polarized light is incident at a preset angle to the test object 300 are independent of each other and cannot be combined.

[0004] Figure 6This paper illustrates another existing magneto-optical Kerr testing device, namely the aforementioned magneto-optical Kerr testing device in which polarized light is incident at a preset angle to the test object 300. In this device, the light generating component 100 emits a beam of polarized light towards the test object 300. The light reflected from the test object 300 illuminates the photosensitive component 400, which outputs a corresponding signal based on the polarization state of the received light. The light generating component 100 forms a non-perpendicular angle with the test surface of the test object 300, meaning the polarized light incident on the test object 300 is incident at the test position in a non-perpendicular direction. In this case, if the incident angle illuminating the test object 300 needs to be adjusted, the angles and positions of the light generating component 100 and the photosensitive component 400 need to be adjusted simultaneously. This requires high precision in adjusting both angles and positions. Furthermore, since the light generating component 100 and the photosensitive component 400 typically have significant weight and volume, adjustment is quite difficult. Summary of the Invention

[0005] To address the problems of existing technologies, such as the inability to change the incident angle in vertically incident magneto-optical Kerr testing devices and the difficulty in adjusting the incident light angle in magneto-optical Kerr testing devices with incident light at an angle, this invention provides a magneto-optical Kerr testing device.

[0006] This invention provides a magneto-optical Kerr testing device, comprising a light generating component, a light sensing component, a beam splitting component, a beam focusing component, and an optical path adjustment component. The light generating component is configured to generate polarized light, and the light sensing component is configured to output a signal based on the polarization state of the received light. The test position of the object under test is located at the focal point of the beam focusing component. The polarized light generated by the light generating component is irradiated onto the object under test through the optical path adjustment component, the beam splitting component, and the beam focusing component. The polarized light reflected by the object under test is irradiated onto the incident position of the light sensing component through the beam focusing component and the beam splitting component. The optical path adjustment component includes a pair of wedge mirrors configured to have a fixed angle and be relatively movable. The direction of the incident light and the direction of the outgoing light are parallel to each other, and the light incident on the optical path adjustment component passes through the wedge mirrors sequentially.

[0007] Optionally, the magneto-optical Kerr test device further includes a second focusing component, and the incident position of the photosensitive component is set at the focal point of the second focusing component; the polarized light reflected by the test object is irradiated by the focusing component, the beam splitting component, and the second focusing component to the incident position of the photosensitive component.

[0008] Optionally, the magneto-optical Kerr test device further includes a second optical path adjustment component, wherein the light reflected by the object under test passes through the focusing component, the beam splitting component, and the second optical path adjustment component before entering the photosensitive component.

[0009] Optionally, the photosensitive component is configured to be movable at least in a direction perpendicular to its optical axis.

[0010] Preferably, the incident end of the photosensitive component is the incident region.

[0011] Preferably, the optical path adjustment component can switch between the following states: first state: the light-transmitting surfaces of each wedge mirror that are close to each other are in contact with each other; second state: a preset distance is provided between the light-transmitting surfaces of each wedge mirror that are close to each other.

[0012] Optionally, in the first state, the light incident on the object being tested is perpendicular; in the second state, the light incident on the object being tested is non-perpendicular.

[0013] Optionally, it also includes a third state, which is a state at an intermediate moment during the switching process between the first and second states. Further, in the third state, the light incident on the object under test is perpendicular; in the first and second states, the light incident on the object under test is located on both sides of the perpendicular line from the measured position of the object. More preferably, the angle between the light incident on the object and the object under test ranges from (0°, 180°).

[0014] Optionally, the optical axis of the focusing component is perpendicular to the object under test; in the first state, the light emitted from the optical path adjustment component coincides with the optical axis of the focusing component.

[0015] Preferably, the beam splitting component is a beam splitting prism, and the light incident on and emitted from the beam splitting prism is perpendicular to the corresponding incident and emitted surfaces.

[0016] This invention also provides another magneto-optical Kerr testing device, including a light generating component, a light sensing component, a light focusing component, a first optical path adjustment component, and a second optical path adjustment component. The light generating component is configured to generate polarized light, and the light sensing component is configured to output a signal based on the polarization state of the received light. The optical axis of the light generating component forms a non-perpendicular angle with the object under test. The test position of the object under test is located at the focal plane of the light focusing component. The polarized light generated by the light generating component illuminates the object under test after passing through the first optical path adjustment component and the light focusing component. The polarized light reflected by the object under test illuminates the incident position of the light sensing component after passing through the light focusing component and the second optical path adjustment component. The light between the first optical path adjustment component and the light focusing component, and the light between the second optical path adjustment component and the light focusing component, have mutually parallel propagation paths. The optical path adjustment component includes a pair of wedge mirrors configured to have a fixed angle and be relatively movable. The light incident on the optical path adjustment component passes through the wedge mirrors sequentially.

[0017] Optionally, at least one of the wedge mirrors in the first optical path adjustment assembly and at least one of the wedge mirrors in the second optical path adjustment assembly are configured to move synchronously.

[0018] The present invention also provides a magneto-optical Kerr testing device, comprising a light generating component, a light sensing component, a beam splitting component, a beam focusing component, and an optical path adjustment component. The light generating component is configured to generate polarized light, and the light sensing component is configured to output a signal based on the polarization state of the received light. The test position of the object under test is located at the focal point of the beam focusing component. The polarized light generated by the light generating component is irradiated onto the object under test through the optical path adjustment component, the beam splitting component, and the beam focusing component. The polarized light reflected by the object under test is irradiated onto the incident position of the light sensing component through the beam focusing component and the beam splitting component. The optical path adjustment component includes a wedge mirror. The optical axis of the light generating module forms a preset angle with the optical axis of the beam focusing component. The direction of the light emitted from the wedge mirror is parallel to the optical axis of the beam focusing component. The wedge mirror is configured to be movable at least in the propagation direction of the light incident on the wedge mirror.

[0019] Optionally, the magneto-optical Kerr test device further includes a second focusing component, and the incident position of the photosensitive component is set at the focal point of the second focusing component; the polarized light reflected by the test object is irradiated by the focusing component, the beam splitting component, and the second focusing component to the incident position of the photosensitive component.

[0020] Optionally, the magneto-optical Kerr test device further includes a second optical path adjustment component, wherein the light reflected by the object under test passes through the focusing component, the beam splitting component, and the second optical path adjustment component before entering the photosensitive component.

[0021] Optionally, the photosensitive component is configured to be movable at least in a direction perpendicular to its optical axis.

[0022] The present invention has at least the following beneficial effects: The magneto-optical Kerr testing device provided by the present invention can adjust the optical path by adjusting the optical path through the optical path adjustment component, thereby adjusting the tilt of the incident light of the test object and the incident angle of the test light of the test object; The magneto-optical Kerr testing device provided by the present invention can switch the incident light of the test object in the tilted and vertical directions, breaking the isolation between magneto-optical Kerr testing devices with vertical incident light and angled incident light, integrating the two types of magneto-optical Kerr devices into one device and realizing the corresponding functions, greatly reducing the cost of magneto-optical Kerr testing. Attached Figure Description

[0023] Figure 1 This is a schematic diagram of an existing magneto-optical Kerr test device.

[0024] Figure 2 This is a schematic diagram of a state according to one embodiment of the present invention.

[0025] Figure 3 This is a schematic diagram illustrating the adjustment method of the optical path adjustment component according to one embodiment of the present invention.

[0026] Figure 4 for Figure 2 Another state diagram of the embodiment shown.

[0027] Figure 5 This is a schematic diagram of one state of an embodiment of the present invention.

[0028] Figure 6 This is a schematic diagram of another existing magneto-optical Kerr test device.

[0029] Figure 7 This is a schematic diagram of one state of an embodiment of the present invention.

[0030] Figure 8 for Figure 7 A schematic diagram of another state of the embodiment shown.

[0031] Figure 9 This is a schematic diagram of one state of an embodiment of the present invention.

[0032] Figure 10 for Figure 9 A schematic diagram of another state of the embodiment shown.

[0033] Figure 11 This is a schematic diagram of one embodiment of the present invention. Detailed Implementation

[0034] To make the objectives and features of the present invention more apparent and understandable, the specific embodiments of the present invention will be further described below with reference to the accompanying drawings. It should be noted that the drawings are all in a very simplified form and use non-precise ratios, and are only used to conveniently and clearly assist in illustrating the objectives of the embodiments of the present invention.

[0035] For clarity, not all features of the actual embodiments are described. In the following description, well-known functions and structures are not detailed in detail, as they would confuse the invention with unnecessary detail. It should be understood that in the development of any actual embodiment, numerous implementation details must be made to achieve the developer's specific objectives.

[0036] In the description of this invention, it should be understood that the orientation descriptions, such as up, down, front, back, left, right, etc., are based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limiting this invention.

[0037] The magneto-optical Kerr testing device includes a light generating component 100, a light sensing component 400, a beam splitter 200, a beam focusing component 600, and an optical path adjustment component 500. The light generating component 100 generates polarized light, and the light sensing component 400 outputs a signal based on the polarization state of the received light. The test position of the object under test 300 is located at the focal point of the beam focusing component 600. The polarized light generated by the light generating component 100 passes through the optical path adjustment component 500, the beam splitter 200, and the beam focusing component 600 to illuminate the test position of the object under test 300. The polarized light reflected from the object under test 300 passes through the beam focusing component 600 and the beam splitter 200 to illuminate the incident position of the light sensing component 400. The optical path adjustment component 500 includes a pair of wedge mirrors configured with a fixed angle and capable of relative movement. The direction of the incident light and the direction of the outgoing light are parallel to each other, and the light incident on the optical path adjustment component 500 passes through the wedge mirrors sequentially.

[0038] Please see Figure 3 This illustrates a specific implementation of the optical path adjustment assembly 500. Both wedge mirrors 510 and 520 can be configured to be movable as needed. For ease of explanation, the wedge mirror 510 is described as having a relatively fixed position, while the wedge mirror 520 is movable. Figure 3 In the image, the wedge mirror 520 in multiple positional states is depicted with dashed lines to illustrate examples of the position of the wedge mirror 520 before and after movement and during movement.

[0039] In the first state, the light-transmitting surfaces of wedge mirrors 510 and 520 are in contact with each other, that is, the exit surface 511 of wedge mirror 510 and the incident surface 521 of wedge mirror 520 are in contact with each other. At this time, the light from the incident light path adjustment assembly 500 enters the wedge mirror 510, and the light exiting the wedge mirror 510 immediately enters the wedge mirror 520. Since the wedge mirrors 510 and 520 are made of the same material, no refraction occurs when the light passes through the wedge mirrors 510 and 520, and the light paths within the wedge mirrors 510 and 520 are coaxial. Figure 3In the scenario shown, the incident surface 512 of the wedge mirror 510 is perpendicular to the incident light, and the exit surface 522 of the wedge mirror 520 is perpendicular to the exit light. At this time, the light does not change direction within the wedge mirrors 510 and 520, nor at the incident and exit surfaces of the wedge mirrors 510 and 520. The light from the incident light path adjustment assembly 500 and the light from the exit light path adjustment assembly 500 propagate along the same straight line. Figure 3 As shown, the light from the outgoing light path adjustment component 500 propagates along s1, and s1 is coaxial with the light from the incoming light path adjustment component 500.

[0040] In the second state, the light-transmitting surfaces of wedge mirrors 510 and 520'' are spaced apart by a predetermined distance, that is, the exit surface 511 of wedge mirror 510 and the incident surface 521 of wedge mirror 520'' are spaced apart by a predetermined distance. At this time, the light exiting wedge mirror 510 is deflected, and the deflected light travels a predetermined distance between the light-transmitting surfaces 511 and 521 before entering wedge mirror 520''. The light entering wedge mirror 520'' is deflected at the incident surface 521. Since the angles of wedge mirrors 510 and 520 are relatively fixed, even after wedge mirror 520'' moves, the exit surface 511 of wedge mirror 510 and the incident surface 521 of wedge mirror 520'' remain parallel to each other. Since wedge mirrors 510 and 520'' are made of the same material, after exiting wedge mirror 510 and then entering wedge mirror 520'', the propagation paths of the light within wedge mirrors 510 and 520'' are parallel and exist at a certain distance. More specifically, in Figure 3 In the case shown, the incident surface 512 of the wedge mirror 510 is perpendicular to the incident light, and the exit surface 522 of the wedge mirror 520'' is perpendicular to the exit light. At this time, the propagation path of the light in the exit light path adjustment component 500 changes, that is, it moves from s1 to s2. The propagation path of the light after the change is still parallel to the propagation path before the change.

[0041] The first state and the second state can be switched between each other. For example, when switching from the first state to the second state, one of the wedge mirrors 510 and 520 is fixed, while the other is moved. More specifically, Figure 3 The diagram illustrates a fixed wedge mirror 510 and a movable wedge mirror 520. The wedge mirror 520 moves slowly along the direction of the incident light from the optical path adjustment assembly 500, passing through an intermediate state 520' until reaching a preset second state 520''. During this process, the light from the outgoing light adjustment assembly 500 gradually translates. When the wedge mirror 520'' moves a distance A, the light from the outgoing light adjustment assembly 500 undergoes a translation of D1. The translation of the light from the outgoing light adjustment assembly 500 is continuous during the switching between the first and second states. Furthermore, when the moving speed and direction of the wedge mirror 520 remain constant, the translation of the light from the outgoing light adjustment assembly 500 is continuous and uniform.

[0042] Figure 2A magneto-optical Kerr test apparatus using the aforementioned light adjustment component 500 is shown, with the light adjustment component 500 in a first state. Figure 3 exist Figure 2 Based on this, the light adjustment component 500 is placed in the second state. Please refer to... Figure 2 In the first state, the light generated by the light generating component 100 passes through the light adjusting component 500, the beam splitting component 200, and the focusing component 600 before illuminating the object under test 300. In a specific state, the propagation direction of the light incident on the focusing component 600 is coaxial with the optical axis of the focusing component 600, and the propagation path of the light exiting the focusing component 600 is substantially undeflected, being focused at the focal point of the focusing component 600. Since the optical axis of the focusing component 600 is perpendicular to the surface of the object under test 300, the light exiting the focusing component 600 illuminates the measurement position of the object under test 300 substantially perpendicular to the surface of the object under test 300. In this case, it can be considered that the polarized light illuminates the object under test 300 perpendicularly, thereby performing the test. Please refer to [link to relevant documentation]. Figure 3 In the second state, the light generated by the light generating component 100 passes through the light adjusting component 500, the beam splitting component 200, and the beam focusing component 600 before illuminating the object under test 300. After the aforementioned state change of the light adjusting component 500, the propagation direction of the light emitted from the light adjusting component 500 shifts from s1 to s2, resulting in a translation of distance D1. Correspondingly, the propagation direction of the light incident on the beam focusing component 600 also shifts by distance D1, causing the light incident on the beam focusing component 600 to be non-coaxial with the optical axis of the beam focusing component 600. At this time, the beam focusing component 600 deflects the incident light, causing the light emitted from the beam focusing component 600 to propagate towards the focal point of the beam focusing component 600 and illuminate the measured position of the object under test 300. Since the optical axis of the beam focusing component 600 is perpendicular to the measured surface of the object under test 300, the light emitted from the beam focusing component 600 forms a non-perpendicular angle θ1 with the measured surface of the object under test 300. At this point, it can be assumed that the polarized light is irradiating the test object 300 at an angle, thus performing the test. By switching between the aforementioned first and second states, the incident light direction on the test object 300 can be switched between vertical and inclined states, thereby meeting different testing requirements. This breaks down the isolation between magneto-optical Kerr testing devices with vertical and angled incident light, merging the two types of magneto-optical Kerr devices into a single device and achieving the corresponding functions. Therefore, when using the technical solution provided by this invention for magneto-optical Kerr testing, it is unnecessary to purchase separate equipment for vertical and non-vertical angled incident light; multiple tests can be completed using only one device. This reduces equipment procurement costs and avoids unexpected situations such as damage, errors, and time consumption caused by frequent disassembly and reassembly of the test object, improving testing effectiveness and efficiency.

[0043] In addition, a third state may be included, which is an intermediate state between the first and second states. Please refer to [link / reference]. Figure 3 Specifically, in the first state, the wedge mirrors are wedge mirrors 510 and 520, and the direction of light from the outgoing light adjustment component 500 is s1; in the second state, the wedge mirrors are wedge mirrors 510 and 520'', and the direction of light from the outgoing light adjustment component 500 is s2; in the third state, the wedge mirrors are wedge mirrors 510 and 520', and the direction of light from the outgoing light adjustment component 500 is s3. More specifically, in Figure 2 Based on the magneto-optical Kerr test device shown, s3 is made coaxial with the optical axis of the focusing component 600, and s1 and s2 are respectively set on both sides of s3, so that the adjustment range of θ1 reaches 0° < θ1 < 180°.

[0044] Please see Figure 2 , Figure 4 When the incident light on the object being measured 300 changes between perpendicular and at an angle, the reflected light, after passing through the focusing component 600 and the beam-splitting component 200, also experiences a change in its propagation direction as it propagates towards the light-sensing component 400. For example, as... Figure 4 As shown, when the light incident on the beam-concentrating assembly 600 in the incident light path of the object under test 300 shifts by D1, the incident light on the object under test 300 experiences an angle θ1 ≠ 90°. Correspondingly, in the reflected light path of the object under test 300, the reflected light is not perpendicular to the optical axis of the beam-concentrating assembly 600, and a translation D2 occurs in the propagation direction of the reflected light through the beam-concentrating assembly 600 and the beam-splitting assembly 200. At this time, it is necessary to ensure that the reflected light can still illuminate the incident position of the photosensitive assembly 400. Figure 2 , Figure 4 Two available methods are shown. Specifically, as follows: Figure 2 As shown, a second focusing component 700 is positioned in the optical path between the beam-splitting component 200 and the photosensitive component 400, with the incident position of the photosensitive component 400 located at the focal point of the second focusing component 700. At this time, although the reflected light undergoes a D2 shift, its propagation directions in each state are parallel. After being deflected by the second focusing component 700, the reflected light propagates towards the focal point of the second focusing component 700, and then enters the incident position of the photosensitive component 400. It should be noted that... Figure 2 , Figure 4 The diagram shows the case where the optical axis of the second focusing component 700 is parallel to the reflected light. Alternatively, the optical axis of the second focusing component 700 can be made at an angle to the direction of the reflected light, and the incident position of the photosensitive component 400 can be set at the convergence point of the reflected light after passing through the second focusing component 700.

[0045] Figure 5Another configuration of the photosensitive component 400 is shown. Specifically, the photosensitive component 400 can move at least in the direction perpendicular to its optical axis; that is, the photosensitive component 400 can move accordingly when the reflected light is translated by a distance D2. It should be noted that since the reflected light is usually a beam, the incident position of the photosensitive component 400 is usually a region. Therefore, there is a certain redundancy between the moving distance D3 of the photosensitive component 400 and the translation D2 of the reflected light. For example, when D2 is small, the reflected light can still illuminate the incident position of the photosensitive component 400 even without movement, in which case D3 = 0; when D2 is large, the photosensitive component 400 moves accordingly by a distance D3. Since the incident area of ​​the photosensitive component 400 is large, D3 ≤ D2. Of course, D3 ≥ D2 can also be made so that when D2 is further increased, there is no need to move the photosensitive component 400. Furthermore, when the incident area of ​​the photosensitive component 400 is large enough—that is, large enough to accommodate the reflected light when D2 reaches its maximum and minimum values—the photosensitive component 400 can be fixed. Because the photosensitive component 400 has a high degree of movement redundancy, even with low movement accuracy, effective reception of reflected light can be achieved, thus significantly reducing the control accuracy requirements of the photosensitive component 400 and consequently lowering its control cost.

[0046] Figures 1 to 2 , Figures 4 to 5 The beam-splitting component shown is a beam-splitting prism. The light incident on and exiting the beam-splitting prism is perpendicular to the corresponding incident and exit surfaces, which can reduce the translation of the incident light caused by the beam-splitting component. When a beam splitter is used, since the beam splitter itself has a certain thickness, the light incident on and exiting the beam splitter has different propagation directions, resulting in a certain translation between their propagation paths. Based on the aforementioned technical solution, the translation of the incident light caused by the beam splitter needs to be taken into account. The specific setup is similar to the above content and will not be repeated here.

[0047] like Figure 2 , Figures 4 to 5 The optical axis of the focusing component 600 is perpendicular to the object under test 300. In the first state, the light emitted from the light path adjustment component 500 coincides with the optical axis of the focusing component. Alternatively, the optical axis of the focusing component 600 can be made to form a non-perpendicular angle with the object under test 300, allowing the light path adjustment component 500 to be positioned such that the light emitted from the focusing component 600 towards the object under test 300 is perpendicular to the object under test 300 at a certain point during the light path adjustment process.

[0048] The present invention also provides another magneto-optical Kerr test device, including a light generating component 100, a light sensing component 400, a light focusing component 600, a first optical path adjustment component 500, and a second optical path adjustment component 500'. The light generating component 100 generates polarized light, and the light sensing component 400 outputs a corresponding signal according to the polarization state of the received light.

[0049] The optical axis of the light generating component 100 forms a non-perpendicular angle with the plane where the measured position of the object under test 300 is located, that is, the polarized light generated by the light generating component 100 propagates to the measured position of the object under test 300 at a preset non-perpendicular angle. The test position of the object 300 is located at the focal plane of the focusing component 600. The polarized light generated by the light generating component 100 is irradiated onto the object through the first optical path adjustment component 500 and the focusing component 600. The polarized light reflected by the object is irradiated onto the incident position of the photosensitive component 400 through the focusing component 600 and the second optical path adjustment component 500', and thus enters the photosensitive component 400. The light between the first optical path adjustment component 500 and the focusing component 600, and the light between the second optical path adjustment component 500' and the focusing component 600, have mutually parallel propagation paths. The optical path adjustment components 500 and 500' include a pair of wedge mirrors. The pair of wedge mirrors are configured to have a fixed angle and be able to move relative to each other. The light incident on the optical path adjustment components passes through the wedge mirrors in sequence.

[0050] For one embodiment of the optical path adjustment components 500 and 500', please refer to [reference needed]. Figure 3 The aforementioned description of the optical path adjustment component will not be repeated here.

[0051] Please see Figure 7 A schematic diagram of the overall structure of a magneto-optical Kerr test apparatus in its first state is shown. (See also...) Figure 8This diagram illustrates the overall structure of a magneto-optical Kerr test apparatus in a second state. In this second state, the optical path adjustment component 500 causes a translation D1 between the incident and outgoing light, which then illuminates the focusing component 600. Since the incident light before and after the translation is essentially parallel, the light exiting the focusing component 600 is converged at a point within the focal plane of the focusing component 600 after being deflected by it. This focal point is essentially the test position of the object under test 300. In other words, regardless of how the light incident on the focusing component 600 is translated, the incident light will converge at a fixed position on the focal plane after being focused by the focusing component 600. Correspondingly, when the optical path adjustment component 500 is in the first, second, third, or intermediate states, since the light incident on the focusing component 600 is always translated, the position of the light exiting the focusing component 600 and illuminating the object 300 remains the same. Because the light incident on the focusing component 600 is translated, the exit position of the light from the exiting focusing component 600 shifts accordingly, and the angle between the light from the exiting focusing component 600 and the plane containing the measured position of the object 300 also changes, such as... Figure 8 As shown, this allows for the adjustment of the incident light angle required for magneto-optical Kerr testing.

[0052] When the incident light on the object under test 300 changes its angle of incidence, the reflected light also changes direction. After being deflected by the focusing component 600, the reflected light will propagate along a direction parallel to the optical axis of the light generating module 100, as shown in the following example. Figure 7 , Figure 8 As shown. Since both the incident and reflected light from the object under test 300 are deflected by the same focusing module 600, the optical path translation distance D1 generated when the optical path adjustment component 500 switches from the first state to the second state is approximately equal to the translation D2 generated after the reflected light from the object under test 300 is deflected by the focusing component 600. When the focusing component 600 is an ideal lens, D1 = D2. At this time, the photosensitive component 400 can be translated at least in the direction perpendicular to its optical axis to receive the reflected light from the object under test 300. For specific details, please refer to the aforementioned section on... Figure 5 Detailed explanation. Figure 7 , Figure 8 This illustrates a method for altering the propagation path of reflected light from the object under test 300 using an optical path adjustment component 500'. For details on the underlying principle, please refer to [link / reference needed]. Figure 3The aforementioned explanations will not be repeated here. By adjusting the position of the wedge mirror in the optical path adjustment component 500', the propagation paths of the incident and outgoing light in the optical path adjustment component 500' are shifted, allowing the light from the outgoing optical path adjustment component 500' to enter the photosensitive component 400. According to the aforementioned, D1=D2. Therefore, when the optical path adjustment component 500' and the optical path adjustment component 500 have the same structure but opposite orientation, the wedge mirrors in both only need to have the same spacing to allow the photosensitive component 400 to receive the reflected light from the object 300 without displacement. In other words, at least one of the wedge mirrors in the first optical path adjustment component 500 and at least one of the wedge mirrors in the second optical path adjustment component 500' can be configured to move synchronously, thereby causing the spacing between the wedge mirrors in the optical path adjustment components 500 and 500' to change synchronously.

[0053] The present invention also provides another magneto-optical Kerr testing device, comprising a light generating component 100, a light sensing component 400, a beam splitting component 200, a beam focusing component 600, and an optical path adjustment component 500. The light generating component 100 generates polarized light, and the light sensing component 400 outputs a signal according to the polarization state of the received light. The test position of the object 300 is located at the focal point of the beam focusing component 600. The polarized light generated by the light generating component 100 is irradiated onto the object 300 after passing through the optical path adjustment component 500, the beam splitting component 200, and the beam focusing component 600. The polarized light reflected by the object 300 is irradiated onto the incident position of the light sensing component 400 after passing through the beam focusing component 600 and the beam splitting component 200. The optical path adjustment assembly 500 includes a wedge mirror; the optical axis of the light generating module 100 forms a preset angle with the optical axis of the focusing assembly 600, the direction of the light emitted from the wedge mirror is parallel to the optical axis of the focusing assembly 600, and the wedge mirror is configured to be movable at least in the direction of propagation of the light incident on the wedge mirror.

[0054] Please see Figures 9 to 11 Several embodiments of the above-described magneto-optical Kerr test apparatus are shown, wherein the optical path adjustment component 500 is a wedge mirror 510. Please refer to... Figure 9 This illustrates the case where incident light perpendicularly illuminates the test object 300. In this case, the light generating component 100 emits polarized light. After being deflected by the wedge mirror 510, the polarized light passes through the beam splitter 200 and enters the beam condenser 600 along its optical axis, subsequently illuminating the test object 300 perpendicularly. The light reflected from the test object 300 passes through the beam condenser 600 and the beam splitter 200 before propagating towards and entering the photosensitive component 400. Please refer to... Figure 10This illustrates a state where the optical path adjustment assembly 500 adjusts the optical path, specifically showing the situation when the wedge mirror 510 is moved to 510'. Because the wedge mirror 510 moves to 510', the position of the light exiting the wedge mirror 510' is shifted by D1. After passing through the beam splitter 200 and entering the focusing assembly 600, the shifted light, while not coaxial with the optical axis of the focusing assembly 600, is parallel to it. Therefore, when the light deflected by the wedge mirror 510' exits the focusing assembly 600, it propagates towards the focal point of the focusing assembly 600 and forms a non-perpendicular angle θ1 with the object under test 300. At this time, the incident light on the object under test 300 is non-perpendicular. Based on the foregoing discussion, it can be understood that by adjusting the position of the wedge mirror 510, the propagation path of the light exiting the wedge mirror 510 can be adjusted, thereby changing the position of the light incident on the focusing assembly 600, and consequently changing the incident angle of the light on the object under test 300. The adjustment process of the position of the wedge mirror 510 in the optical path adjustment assembly 500 can be further subdivided into a first state, a second state, and a third state. For example, in the first state, the propagation path of the light entering the focusing assembly 600 from the wedge mirror 510 is coaxial with the optical axis of the focusing assembly 600; in the second state, the propagation path of the light entering the focusing assembly 600 from the wedge mirror 510 is located on one side of the optical axis of the focusing assembly 600; and in the third state, the propagation path of the light entering the focusing assembly 600 from the wedge mirror 510 is located on the other side of the optical axis of the focusing assembly 600.

[0055] The light reflected from the object under test 300, after passing through the focusing assembly 600 and the beam-splitting assembly 200, propagates towards the photosensitive assembly 400. For details on how the light reflected from the object under test 300 enters the photosensitive assembly 400, please refer to the previous description of the light transmission process reflected from the object under test 300, and the description of... Figure 2 , Figure 4 , Figure 5 And related descriptions, which will not be repeated here.

[0056] The aforementioned focusing component 600 mainly refers to the ability to converge light emitted from the light source that has not been reflected by the object under test 300. More specifically, the focusing component 600 can be a lens or lens group with positive optical power; for example, the focusing component 600 can be a convex lens with a positive optical angle. The aforementioned light-sensing component 400 mainly refers to a component capable of receiving polarized light and converting the polarization signal of the polarized light into an electrical signal; for example, a combination of an analyzer and a photosensitive element, or a combination of an analyzer, a photosensitive element, and a lens group. When using... Figure 2 , Figure 4 , Figure 9 , Figure 10When the second focusing component 700 shown allows the reflected light from the object 300 to enter the photosensitive component 400, it can be noted that in some cases, the light entering the photosensitive component 400 does not propagate along the optical axis of the photosensitive component 400. In this case, the photosensitive component 400 needs to include a corresponding lens group so that the light entering the photosensitive component 400 can ultimately be received by the photosensitive element and generate a corresponding signal. Regarding the specific arrangement of the optical elements within the photosensitive component 400, those skilled in the art can make corresponding configurations to achieve the aforementioned objectives, which is not the focus of this invention and will not be elaborated upon here.

[0057] Figure 2 , 4 The second focusing component 700 in 5, 9, and 10 can also be replaced by an optical path adjustment component 500 to shift the propagation path of the light directed toward the photosensitive component 400 so that it enters the photosensitive component 400. In this case, the adjustment method of the optical path adjustment component 500 before the photosensitive component 400 is as described above, and will not be repeated here.

[0058] The positional relationships shown in the attached figures are for illustrative purposes only. For example, in actual use, the distance between the object under test 300 and the focusing component 600 is relatively small; the range of θ1 can be adjusted within the range of 0° < θ1 < 180° as needed. This adjustment can be achieved simply by further increasing the adjustment degree of the optical path adjustment component 500 or decreasing the focal length of the focusing component 600.

[0059] The foregoing has shown and described the basic principles, main features, and advantages of the present invention. Therefore, the above descriptions are merely embodiments of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The embodiments and descriptions in the specification are merely principles of the present invention. Various equivalent changes and modifications are included without departing from the spirit and scope of the present invention, and all such changes and modifications fall within the scope of the present invention as claimed.

Claims

1. A magneto-optical Kerr testing device, characterized in that: It includes a light generating component, a light sensing component, a beam splitting component, a beam focusing component, and an optical path adjustment component. The light generating component is configured to generate polarized light, and the light sensing component is configured to output a signal based on the polarization state of the received light. The test position of the object under test is located at the focal point of the light-gathering component. The polarized light generated by the light-generating component is irradiated onto the object under test through the light path adjustment component, the beam splitting component, and the light-gathering component. The polarized light reflected by the object under test is irradiated onto the incident position of the light-sensing component through the light-gathering component and the beam splitting component. The optical path adjustment component includes a pair of wedge mirrors, which are configured to have a fixed angle and be able to move relative to each other. The direction of the incident light and the direction of the outgoing light of the optical path adjustment component are parallel to each other, and the light incident on the optical path adjustment component passes through the wedge mirrors in sequence.

2. The magneto-optical Kerr testing device as described in claim 1, characterized in that: The magneto-optical Kerr test device further includes a second focusing component, and the incident position of the photosensitive component is set at the focal point of the second focusing component; the polarized light reflected by the test object is irradiated by the focusing component, the beam splitting component, and the second focusing component to the incident position of the photosensitive component.

3. The magneto-optical Kerr testing device as described in claim 1, characterized in that: The photosensitive component is configured to be movable at least in a direction perpendicular to its optical axis.

4. The magneto-optical Kerr testing device as described in claim 1, characterized in that: The optical path adjustment component can switch between the following states: First state: The light-transmitting surfaces of each of the aforementioned wedge-shaped mirrors are in contact with each other; Second state: A preset distance is provided between the light-transmitting surfaces of each of the wedge-shaped mirrors that are close to each other.

5. The magneto-optical Kerr testing device as described in claim 4, characterized in that: The optical axis of the focusing component is perpendicular to the object being measured; in the first state, the light emitted from the optical path adjustment component coincides with the optical axis of the focusing component.

6. The magneto-optical Kerr testing device as described in claim 1, characterized in that: The beam splitting component is a beam splitting prism, and the light incident on and emitted from the beam splitting prism is perpendicular to the corresponding incident and emitted surfaces.

7. A magneto-optical Kerr testing device, characterized in that: It includes a light generating component, a light sensing component, a light focusing component, a first optical path adjustment component, and a second optical path adjustment component. The light generating component is configured to generate polarized light, and the light sensing component is configured to output a signal based on the polarization state of the received light. The optical axis of the light generating component forms a non-perpendicular angle with the object under test; the test position of the object under test is located at the focal plane of the focusing component; the polarized light generated by the light generating component illuminates the object under test after passing through the first optical path adjustment component and the focusing component; the polarized light reflected by the object under test illuminates the incident position of the photosensitive component after passing through the focusing component and the second optical path adjustment component; the light between the first optical path adjustment component and the focusing component, and the light between the second optical path adjustment component and the focusing component, have mutually parallel propagation paths; The optical path adjustment assembly includes a pair of wedge mirrors, which are configured to have a fixed angle and be able to move relative to each other. Light incident on the optical path adjustment assembly passes through the wedge mirrors in sequence. At least one of the wedge mirrors in the first optical path adjustment assembly and at least one of the wedge mirrors in the second optical path adjustment assembly are configured to move synchronously.

8. A magneto-optical Kerr testing device, characterized in that: It includes a light generating component, a light sensing component, a beam splitting component, a beam focusing component, and an optical path adjustment component. The light generating component is configured to generate polarized light, and the light sensing component is configured to output a signal based on the polarization state of the received light. The test position of the object under test is located at the focal point of the light-gathering component. The polarized light generated by the light-generating component is irradiated onto the object under test through the light path adjustment component, the beam splitting component, and the light-gathering component. The polarized light reflected by the object under test is irradiated onto the incident position of the light-sensing component through the light-gathering component and the beam splitting component. The optical path adjustment component includes a wedge mirror; the optical axis of the light generating module forms a preset angle with the optical axis of the light focusing component, the direction of the light emitted from the wedge mirror is parallel to the optical axis of the light focusing component, and the wedge mirror is configured to be movable at least in the propagation direction of the light incident on the wedge mirror.

9. The magneto-optical Kerr testing device as described in claim 8, characterized in that: The magneto-optical Kerr test device further includes a second focusing component, and the incident position of the photosensitive component is set at the focal point of the second focusing component; the polarized light reflected by the test object is irradiated by the focusing component, the beam splitting component, and the second focusing component to the incident position of the photosensitive component.

10. The magneto-optical Kerr testing device as described in claim 8, characterized in that: The photosensitive component is configured to be movable at least in a direction perpendicular to its optical axis.

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