Conveyor platform transfer device, conveyor system and conveyor platform transfer method

Abstract

The link mechanism (9) connecting the driving member (63) driven by the motor (623) (driving source) and the movable member (79) supporting the movable linear conveyor (7) has more than one degree of freedom. Therefore, the link mechanism (9) bends due to its degree of freedom according to the parallelism between the direct-acting guide rail (64) and the direct-acting guide rail (83), so that the load applied to the driving member (63) and the movable member (79) can be suppressed. As a result, the movable linear conveyor 7 can be moved smoothly without the need for precise adjustment work on the installation of the driving member (63) and the movable member (79) to the direct-acting guide rail (64) and the direct-acting guide rail (83).

Description

Technical Field

[0001] The present invention relates to a technology for transferring a conveyor table between a plurality of fixed linear conveyors capable of driving the conveyor tables individually. Background Art

[0002] Patent document 1 describes a conveying system for circulating a trolley. The conveying system has two conveying paths arranged in parallel. The conveying path has a plurality of guide rails arranged in series, and a plurality of coils are arranged in series on each guide rail. In addition, the conveying path drives the conveying platform by the magnetic force between the permanent magnet built into the trolley as the conveying platform and the coil. The conveying path functions as a fixed linear conveyor that is fixedly arranged.

[0003] Furthermore, the conveying system includes two transfer devices disposed at both ends of the two fixed linear conveyors. Each transfer device includes a movable linear conveyor that drives the conveying table by magnetic force in the same manner as described above, and moves the movable linear conveyor between two relative positions that are respectively opposite to the two fixed linear conveyors. Furthermore, the movable linear conveyor performs the transfer of the conveying table between itself and the opposite fixed linear conveyor.

[0004] Prior art literature

[0005] Patent Literature

[0006] Patent Document 1: Japanese Patent Application Publication No. 2019-062614 Summary of the invention

[0007] Problems to be solved by the invention

[0008] However, when the movable linear conveyor is moved in this way, a structure is considered in which the movable member supporting the movable linear conveyor is moved according to the driving member driven by the driving source. In this structure, if the direct-acting guide member guiding the driving member driven by the driving source and the direct-acting guide member guiding the movable member supporting the movable linear conveyor are not parallel, an unreasonable load will be applied to the driving member and the movable member, and the movable linear conveyor cannot be moved smoothly. On the other hand, in order to install these direct-acting guide members with high parallelism, precise adjustment work is required.

[0009] The present invention has been completed in view of the above-mentioned problems, and its purpose is to provide a technology that, when a movable member supporting a movable linear conveyor is moved according to a driving member driven by a driving source, there is no need to perform precise adjustment work on the installation of the direct-acting guide members of the driving member and the movable member, so that the movable linear conveyor can be moved smoothly.

[0010] Technical solutions to solve problems

[0011] The conveyor table transfer device involved in the present invention comprises: a driving part, having a driving member, a driving source for driving the driving member, and a first direct-motion guide member for guiding the movement of the driving member driven by the driving source; a movable member, supporting a movable linear conveyor for driving the conveyor table; a second direct-motion guide member, guiding the movement of the movable member; and a connecting rod mechanism, connecting the movable member and the driving member and having more than one degree of freedom, when the driving member is driven along the first direct-motion guide member, the movable member is driven by the driving member via the connecting rod mechanism and moves along the second direct-motion guide member, and the movable linear conveyor moves in a specified moving direction.

[0012] The conveyor table shifting method involved in the present invention includes: a process of driving a driving component using a driving source and guiding the driving component using a first direct-motion guide component; and a process of guiding the movement of a movable component using a second direct-motion guide component, wherein the movable component supports a movable linear conveyor that drives the conveyor table, and the movable component and the driving component are connected by a connecting rod mechanism with more than one degree of freedom. When the driving component is driven along the first direct-motion guide component, the movable component is driven by the driving component via the connecting rod mechanism and moves along the second direct-motion guide component, and the movable linear conveyor moves in a specified moving direction.

[0013] In the present invention (conveyor table transfer device and method) constructed in this way, the driving member driven by the driving source and the movable member supporting the movable linear conveyor are connected by a connecting rod mechanism. And, when the driving member is driven along the first direct-motion guide member, the movable member is driven by the driving member via the connecting rod mechanism and moves along the second direct-motion guide member, and the movable linear conveyor moves in a specified moving direction. At this time, the connecting rod mechanism has more than one degree of freedom. Therefore, according to the parallelism between the first direct-motion guide member and the second direct-motion guide member, the connecting rod mechanism bends due to its degree of freedom, so that the load applied to the driving member and the movable member can be suppressed. As a result, the movable linear conveyor can be moved smoothly without the need for precise adjustment work on the installation of the direct-motion guide members of the driving member and the movable member.

[0014] In addition, the conveyor table transfer device can also be configured such that the link mechanism has a spherical bearing and has a degree of freedom due to the spherical bearing. In this way, by using a spherical bearing with three degrees of freedom for the link mechanism, the link mechanism can be flexibly bent, and the load applied to the driving member and the movable member can be more reliably suppressed. As a result, even if the parallelism between the first straight-moving guide member and the second straight-moving guide member is low, the movable linear conveyor can be moved smoothly.

[0015] In addition, the conveyor table transfer device may be configured such that the link mechanism has two spherical bearings arranged at different positions in the moving direction. In this way, by using two spherical bearings for the link mechanism, the link mechanism can be bent more flexibly, and the load applied to the driving member and the movable member can be further reliably suppressed.

[0016] In addition, the conveyor platform transfer device may be configured such that the spherical bearing has an outer ring and an inner ring disposed inside the outer ring and in contact with the outer ring with a spherical surface, and the conveyor platform transfer device further has a force applying member that generates a pressing force having a component in the moving direction that presses the outer ring and the inner ring of the spherical bearing. In this structure, the shaking between the outer ring and the inner ring of the spherical bearing in the moving direction can be suppressed. As a result, the influence of the shaking of the spherical bearing on the position of the movable linear conveyor can be eliminated.

[0017] This structure is particularly preferred when the moving direction is horizontal. That is, in this case, since the weight of the outer ring and the inner ring of the spherical bearing does not contribute to suppressing their shaking, it is preferred to use a biasing member to suppress the shaking.

[0018] In addition, the conveyor table transfer device may be configured such that the driving unit moves the movable linear conveyor in the moving direction between a first relative position and a second relative position, wherein the first relative position is a position relative to the first fixed linear conveyor installed on the mounting frame, and the second relative position is a position relative to the second fixed linear conveyor installed on the mounting frame. In this structure, by using the driving unit to position the movable linear conveyor at the first relative position, the conveyor table can be transferred between the movable linear conveyor and the first fixed linear conveyor, and by using the driving unit to position the movable linear conveyor at the second relative position, the conveyor table can be transferred between the movable linear conveyor and the second fixed linear conveyor. In particular, in the present invention, according to the parallelism between the first straight-acting guide member and the second straight-acting guide member, the link mechanism is bent due to its degree of freedom, so that the movable linear conveyor can be guided to the first and second relative positions in an appropriate posture. As a result, the conveyor table can be transferred between the movable linear conveyor and the first and second fixed linear conveyors smoothly.

[0019] In addition, the conveyor table transfer device can also be configured such that the second direct-acting guide member is installed on the first fixed linear conveyor and is installed on the second fixed linear conveyor. In this structure, since the movable linear conveyor is guided to move to the first relative position by the direct-acting guide member installed on the first fixed linear conveyor, the movable linear conveyor moved to the first relative position can be accurately positioned relative to the first fixed linear conveyor. Similarly, since the movable linear conveyor is guided to move to the second relative position by the direct-acting guide member installed on the second fixed linear conveyor, the movable linear conveyor moved to the second relative position can be accurately positioned relative to the second fixed linear conveyor. As a result, regardless of the deformation and thermal deformation of the mounting frame on which the fixed linear conveyor is installed, a smooth transfer of the conveyor table between the fixed linear conveyor and the movable linear conveyor can be performed.

[0020] In addition, the conveyor table transfer device may be configured such that the conveyor table transfer device further includes a position detection unit for detecting the position of the movable linear conveyor, and the driving unit controls the position of the movable linear conveyor based on the position detected by the position detection unit, thereby controlling the positioning of the movable linear conveyor to the first relative position and controlling the positioning of the movable linear conveyor to the second relative position. In this structure, based on the detection result of the position detection unit, the position of the movable linear conveyor relative to the first and second fixed linear conveyors can be accurately controlled. However, the position detection unit only detects the position of the movable linear conveyor at the position where it is arranged, and therefore cannot detect the posture of the movable linear conveyor. Therefore, if only the position detection unit is used, it is possible to perform the transfer of the conveyor table in a state where the posture of the movable linear conveyor is tilted relative to the first and second fixed linear conveyors. In contrast, in the present invention, according to the parallelism between the first straight-moving guide member and the second straight-moving guide member, the link mechanism is bent due to its degree of freedom, so that the movable linear conveyor can be guided to the first and second relative positions in an appropriate posture. As a result, the movable linear conveyor can be positioned at an appropriate position and posture relative to the first and second fixed linear conveyors.

[0021] The conveying system of the present invention comprises: a first fixed linear conveyor driving a conveying table; a second fixed linear conveyor driving the conveying table; and the conveying table transfer device, wherein the conveying table is transferred between the first fixed linear conveyor and the second fixed linear conveyor by the conveying table transfer device. Therefore, the movable linear conveyor can be moved smoothly without performing precise adjustment work on the installation of the direct-acting guide members of the driving member and the movable member.

[0022] Effects of the Invention

[0023] According to the present invention, when the movable member supporting the movable linear conveyor is moved by the driving member driven by the driving source, the movable linear conveyor can be moved smoothly without performing precise adjustment work on the mounting of the driving member and the direct motion guide member of each of the movable member. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 It is a front view schematically showing the conveying system involved in the present invention.

[0025] Figure 2 Yes means Figure 1 A partial stereogram of the conveying system.

[0026] Figure 3 Yes means Figure 1 A partial stereogram of the conveying system.

[0027] Figure 4 This is a partial perspective view showing how the fixed linear conveyor is mounted on the mounting frame.

[0028] Figure 5 This is a partial perspective view showing how the fixed linear conveyor is mounted on the mounting frame.

[0029] Figure 6 It is a partial perspective view showing the peripheral structure of the movable linear conveyor.

[0030] Figure 7 This is a diagram schematically showing a cross section of a part of the link mechanism.

[0031] Figure 8 It is a diagram schematically showing the structure of a position detection unit that detects the position of the movable linear conveyor.

[0032] Fig. 9 It is a top view showing a conveying system according to a modified example.

[0033] Fig.10 Yes means Figure 1 A partial stereogram of the conveying system.

[0034] Fig.11 It is schematically indicated Fig. 9 A diagram showing an example of a link mechanism included in the conveying system shown. DETAILED DESCRIPTION

[0035] Figure 1 1 is a front view schematically showing the conveying system involved in the present invention. In this specification, the X direction as a horizontal direction, the Y direction as a horizontal direction orthogonal to the X direction, and the Z direction as a vertical direction are appropriately shown for explanation. Figure 1As shown, the conveying system 1 has a configuration for cyclically conveying a plurality of conveying tables T. On the conveying tables T, workpieces to be worked on in a factory where the conveying system 1 is installed can be placed, for example.

[0036] The conveying system 1 includes a mounting stand 2 made of metal, for example. The mounting stand 2 includes a base 21, a mounting stand 23a, and a mounting stand 23b. The base 21, the mounting stand 23a, and the mounting stand 23b are rectangular flat plates arranged horizontally and arranged at intervals in the Z direction. The mounting stand 2 includes pillars 27 erected along the Z direction at four corners of the upper surface 211 of the base 21, and the mounting stand 23a is mounted on the upper ends of these pillars 27 and faces the upper surface 211 of the base 21 from above. The mounting stand 2 includes pillars 29 erected along the Z direction at four corners of the upper surface 231 of the mounting stand 23a, and the mounting stand 23b is mounted on the upper ends of these pillars 29 and faces the upper surface 231 of the mounting stand 23a from above. The upper surface 211 of the base 21 , the upper surface 231 of the mounting table 23 a , and the upper surface 231 of the mounting table 23 b are horizontal planes and have a rectangular shape having sides parallel to the X and Y directions when viewed from above in the Z direction.

[0037] The conveying system 1 includes: a fixed linear conveyor 5a mounted on the upper surface 231 of the mounting table 23a; and a fixed linear conveyor 5b mounted on the upper surface 231 of the mounting table 23b. The fixed linear conveyor 5a is arranged in parallel with the X direction, and both ends of the fixed linear conveyor 5a protrude from both ends of the upper surface 231 of the mounting table 23a in the X direction. The fixed linear conveyor 5b is arranged in parallel with the X direction, and both ends of the fixed linear conveyor 5b protrude from both ends of the upper surface 231 of the mounting table 23b in the X direction. In each of the fixed linear conveyors 5a and 5b, the conveying table T can be engaged and disengaged from the end in the X direction, and the fixed linear conveyors 5a and 5b drive the conveying table T engaged with each other in the X direction by magnetic force.

[0038] Furthermore, the conveying system 1 includes a conveyor table transfer device 6 disposed on both sides of the mounting frame 2 in the X direction, in other words, disposed on both sides of the fixed linear conveyors 5a and 5b. Each conveyor table transfer device 6 transfers the conveyor table T from the fixed linear conveyor 5a to the fixed linear conveyor 5b, and transfers the conveyor table T from the fixed linear conveyor 5b to the fixed linear conveyor 5a.

[0039] The conveyor table transfer device 6 includes a movable linear conveyor 7 arranged parallel to the X direction. The conveyor table T can be engaged with and disengaged from the end of the X direction in the movable linear conveyor 7, and the movable linear conveyor 7 drives the conveyor table T engaged therewith in the X direction by magnetic force. In addition, the conveyor table transfer device 6 drives the movable linear conveyor 7 in the Z direction, thereby moving the movable linear conveyor 7 between a relative position Pa relative to the fixed linear conveyor 5a in the X direction and a relative position Pb relative to the fixed linear conveyor 5b in the X direction. The movable linear conveyor 7 and the fixed linear conveyor 5a at the relative position Pa are arranged side by side in the X direction and can transfer the conveyor table T to each other, and the movable linear conveyor 7 and the fixed linear conveyor 5b at the relative position Pb are arranged side by side in the X direction and can transfer the conveyor table T to each other.

[0040] According to the conveyor table transfer device 6, the conveyor table T can be transferred from the fixed linear conveyor 5a to the fixed linear conveyor 5b as follows. First, the conveyor table transfer device 6 positions the movable linear conveyor 7 at the relative position Pa. Then, the conveyor table T moves from the fixed linear conveyor 5a to the movable linear conveyor 7 at the relative position Pa. Next, the conveyor table transfer device 6 moves the movable linear conveyor 7 from the relative position Pa to the relative position Pb. Finally, the conveyor table T moves from the movable linear conveyor 7 at the relative position Pb to the fixed linear conveyor 5b. In this way, the transfer of the conveyor table T is completed. In addition, by performing the opposite action, the conveyor table T can be transferred from the fixed linear conveyor 5b to the fixed linear conveyor 5a.

[0041] In addition, since the structures on both sides of the mounting platform 2 (two conveyor transfer devices 6, etc.) are common, the following mainly shows Figure 1 The conveying system 1 will be described from the right side of the figure. In addition, since the linear conveyors 5a and 5b have the same structure, they are appropriately referred to as the fixed linear conveyor 5 when they are not particularly distinguished. In addition, the mounting tables 23a and 23b on which the fixed linear conveyors 5a and 5b are mounted are also appropriately referred to as the mounting tables 23.

[0042] Figure 2 and Figure 3 Yes means Figure 1 A partial stereogram of the conveying system. Figure 4 and Figure 5 This is a partial perspective view showing how the fixed linear conveyor is installed on the mounting frame. Figure 6 This is a partial perspective view showing the peripheral structure of the movable linear conveyor. Figure 2 In FIG. 1 , the movable linear conveyor 7 is shown in the state of being located at the relative position Pa. Figure 3 , the movable linear conveyor 7 is shown to be located halfway between the relative position Pa and the relative position Pb. Figure 4 In FIG. 1 , the fixed linear conveyor 5b is shown to be disengaged upward from the mounting platform 23b. Figure 5 In order to show the internal structure of the fixed linear conveyor 5b, an end cross section of the fixed linear conveyor 5b is shown. As shown in these figures, the fixed linear conveyor 5 has: a linear housing 51; a stage cover 53 facing the linear housing 51 from above; and a support plate 55 supporting the stage cover 53 relative to the linear housing 51.

[0043] The linear housing 51 has a main housing 511 extending in the X direction. The main housing 511 and the support plate 55 are integrally formed, and the cover 53 is fastened to the upper end of the support plate 55. The main housing 511 surrounds a storage space opening downward from the top and the side, and has an inverted U shape when viewed from the side in the X direction. In addition, the linear housing 51 has an electrical equipment box 512 arranged in the storage space of the main housing 511. The electrical equipment box 512 extends in the X direction and accommodates an electrical equipment system that fixes the linear conveyor 5. Moreover, the linear housing 51 has a mounting flange 513 protruding laterally (in the Y direction) from the lower end of the main housing 511. The mounting flange 513 extends from both sides of the main housing 511 in the Y direction. The bottom surfaces of the main housing 511 and the mounting flange 513 are flush with each other, forming a bottom surface 514 ( Figure 4 ). The bottom surface 514 is a horizontal plane and contacts the upper surface 231 of the mounting table 23. In addition, the main housing 511 and the mounting flange 513 may be configured separately or integrally. Furthermore, the mounting flange 513 is fastened to the upper surface 231 of the mounting table 23 by fastening members (screws) at a plurality of fastening locations arranged along the X direction. In this way, the fixed linear conveyor 5a is fixed to the upper surface 231 of the mounting table 23a, and the fixed linear conveyor 5b is fixed to the upper surface 231 of the mounting table 23b.

[0044] The stage cover 53 is extended in the X direction, and the conveyor stage T can be fitted and detached from both ends of the stage cover 53 in the X direction. The conveyor stage T engaged with the stage cover 53 moves in the X direction along the stage cover 53. In addition, the support plate 55 is extended in the X direction and is erected in the Z direction, and supports the stage cover 53 at a distance from the upper surface of the main housing 511 of the linear housing 51.

[0045] Furthermore, the fixed linear conveyor 5 has a linear motor stator 56 disposed between the upper surface of the main housing 511 and the table cover 53. The linear motor stator 56 has a plurality of coils arranged in the X direction, and drives the conveyor table T in the X direction by utilizing the magnetic force generated between the linear motor mover (permanent magnet) and the coils provided on the conveyor table T. In addition, the current flowing through the coils of the linear motor stator 56 is controlled by the electrical equipment system housed in the electrical equipment box 512.

[0046] In addition, the fixed linear conveyor 5 has a pair of direct-acting guide rails 57 disposed between the upper surface of the main housing 511 and the table cover 53. The pair of direct-acting guide rails 57 are extended in the X direction and are disposed at intervals in the Y direction. The pair of direct-acting guide rails 57 are disposed at both ends of the upper surface of the main housing 511 in the Y direction in a manner that the support plate 55 and the linear motor stator 56 are separated in the Y direction. The conveying table T can be engaged with and disengaged from both ends of the direct-acting guide rails 57 in the X direction, and the movement of the conveying table T engaged with the direct-acting guide rails 57 is guided in the X direction by the direct-acting guide rails 57.

[0047] As described above, the conveyor stage transfer device 6 includes the movable linear conveyor 7. The movable linear conveyor 7 is different from the fixed linear conveyor 5 in length in the X direction (the movable linear conveyor 7 is shorter than the fixed linear conveyor 5). However, the movable linear conveyor 7 has the same structure as the fixed linear conveyor 5 in other respects.

[0048] That is, the movable linear conveyor 7 has a linear housing 71 extending in the X direction, and the linear housing 71 has a main housing 711, an electrical equipment box 712, and a mounting flange 713. In addition, the movable linear conveyor 7 has a stage cover 73 and a support plate 75, and the stage cover 73 is spaced apart from the upper surface of the main housing 711 of the linear housing 71 and supported by the support plate 75. In addition, the conveying table T can be externally fitted and detached from both ends of the stage cover 73 in the X direction, and the conveying table T engaged with the stage cover 73 can move in the X direction along the stage cover 73.

[0049] Furthermore, the movable linear conveyor 7 has a linear motor stator 76 disposed between the upper surface of the main housing 711 and the table cover 73. The linear motor stator 76 drives the conveyor table T in the X direction by utilizing the magnetic force generated between the linear motor stator 76 and the linear motor mover of the conveyor table T based on the control of the electrical equipment system housed in the electrical equipment box 712. In addition, the movable linear conveyor 7 has a pair of direct-acting guide rails 77 disposed between the upper surface of the main housing 711 and the table cover 73. The pair of direct-acting guide rails 77 extend in the X direction and are disposed at intervals in the Y direction. The conveyor table T can be engaged and disengaged with respect to both ends of the direct-acting guide rails 77 in the X direction, and the movement of the conveyor table T engaged with the direct-acting guide rails 77 is guided in the X direction by the direct-acting guide rails 77.

[0050] In addition, the conveyor table transfer device 6 has a direct-acting guide mechanism 8 that guides the movement of the movable linear conveyor 7 in the Z direction between the relative position Pa and the relative position Pb. The direct-acting guide mechanism 8 has: a mounting block 81a mounted on the fixed linear conveyor 5a; and a mounting block 81b mounted on the fixed linear conveyor 5b. The mounting block 81a and the mounting block 81b are different in the point of the mounting object, but have the same structure as each other. Therefore, when they are not particularly distinguished, they are appropriately referred to as the mounting block 81.

[0051] The mounting block 81 has a pair of side wall plates 811 arranged at intervals in the Y direction. Each side wall plate 811 is a flat plate arranged parallel to the Z direction and the X direction, and has a rectangular shape extending in the Z direction. In addition, the mounting block 81a has a mounting plate 812 extending along the Y direction between the upper ends of the pair of side wall plates 811. The mounting plate 812 is a horizontally arranged flat plate, and the upper surface 813 of the mounting plate 812 is a horizontal plane. Moreover, the mounting block 81a has a reinforcing plate 814 horizontally arranged between the pair of side wall plates 811 on the lower side of the mounting plate 812. The reinforcing plate 814 has the same structure as the mounting plate 812. The two ends of the Y direction of these mounting plates 812 and the reinforcing plate 814 are fixed to the pair of side wall plates 811. In addition, the mounting block 81 has a pair of reinforcing plates 815 extending along the Z direction between the mounting plate 812 and the reinforcing plate 814. Each reinforcing plate 815 is a flat plate arranged parallel to the Z direction and the X direction, and has a rectangular shape extending in the Z direction. Both ends of the reinforcing plates 815 in the Z direction are fixed to the mounting plate 812 and the reinforcing plate 814 .

[0052] Furthermore, the mounting block 81 has a positioning member 816 for positioning with the fixed linear conveyor 5. Figure 5 As shown, the positioning member 816 is fixed to the upper surface 813 of the mounting plate 812, and has a pair of engaging holes 817 arranged at intervals in the Y direction, and each engaging hole 817 opens upward. On the other hand, the fixed linear conveyor 5 has a pair of engaging protrusions 58 arranged at the above intervals in the Y direction at the end in the X direction. Each engaging protrusion 58 protrudes downward from the bottom surface 514. And, the pair of engaging protrusions 58 of the fixed linear conveyor 5 engage with the pair of engaging holes 817 of the positioning member 816 from above, thereby the fixed linear conveyor 5 and the mounting block 81 are positioned in the horizontal direction (X direction, Y direction).

[0053] The mounting block 81 is mounted on the fixed linear conveyor 5 in the following manner. That is, the upper surface 813 of the mounting plate 812 of the mounting block 81 is arranged flush with the upper surface 231 of the mounting table 23, and the portion (mounting surface) of the bottom surface 514 of the fixed linear conveyor 5 that protrudes in the X direction is in contact with the upper surface 813 of the mounting plate 812. In addition, the pair of engaging protrusions 58 are provided on the portion (mounting surface) that protrudes in the X direction from the mounting table 23, and are engaged with the pair of engaging holes 817. The mounting flange 513 of the fixed linear conveyor 5 protrudes from the mounting table 23 toward the mounting plate 812 in the X direction, contacts the upper surface 813 of the mounting plate 812, and is fastened to the upper surface 231 of the mounting table 23 by fastening members (screws) at a plurality of fastening locations arranged in the X direction. In this way, the upper surface 813 of the mounting block 81a is mounted on the bottom surface 514 of the fixed linear conveyor 5a, and the upper surface 813 of the mounting block 81b is mounted on the bottom surface 514 of the fixed linear conveyor 5b.

[0054] In addition, the direct-acting guide mechanism 8 has a pair of support plates 82 for mounting the mounting block 81 on the mounting table 23. Each support plate 82 is a horizontally arranged flat plate having a rectangular shape extending in the X direction, and the pair of support plates 82 are arranged on both sides of the Y direction of the fixed linear conveyor 5. In contrast, in the Y direction, the mounting plate 812 protrudes to both sides of the fixed linear conveyor 5, and each support plate 82 is mounted on the upper surface 231 of the mounting table 23 and the upper surface 813 of the mounting plate 812 (the portion protruding from the fixed linear conveyor 5 in the Y direction). In addition, each support plate 82 is fastened to the mounting table 23 and the mounting plate 812 at a plurality of fastening locations by fastening members (screws). That is, the mounting block 81 is supported by the mounting table 23 via a pair of support plates 82.

[0055] The mounting block 81a mounted on the fixed linear conveyor 5a and the mounting block 81b mounted on the fixed linear conveyor 5b are arranged at a distance in the Z direction. The pair of side wall plates 811 of the mounting block 81a and the pair of side wall plates 811 of the mounting block 81b are respectively arranged at a distance in the Z direction. Figure 2 to Figure 6 In the embodiment, if the left side along the Y direction is set as one side and the right side is set as the other side, the side wall plate 811 on one side of the mounting block 81a and the side wall plate 811 on one side of the mounting block 81b are opposed to each other with a gap in the Z direction, and the side wall plate 811 on the other side of the mounting block 81a and the side wall plate 811 on the other side of the mounting block 81b are opposed to each other with a gap in the Z direction.

[0056] Furthermore, the direct-acting guide mechanism 8 is provided with a pair of direct-acting guide rails 83 respectively extending in the Z direction. These direct-acting guide rails 83 are arranged in parallel with each other at intervals in the Y direction. The pair of direct-acting guide rails 83 are provided corresponding to a pair of side wall plates 811 of the mounting blocks 81a and 81b. That is, the direct-acting guide rail 83 on one side is mounted on the side wall plate 811 on one side of the mounting block 81a and the side wall plate 811 on one side of the mounting block 81b, and the direct-acting guide rail 83 on the other side is mounted on the side wall plate 811 on the other side of the mounting block 81a and the side wall plate 811 on the other side of the mounting block 81b.

[0057] In the Z direction, the position (height) of the lower end of the direct-acting guide rail 83 coincides with the position (height) of the lower end of the side wall plate 811 of the mounting block 81a, and the position (height) of the upper end of the direct-acting guide rail 83 coincides with the position (height) of the upper end of the side wall plate 811 of the mounting block 81b. In addition, a predetermined range from the lower end of the direct-acting guide rail 83 contacts the side wall plate 811 of the mounting block 81a from the X direction and is fastened by a fastening member (screw), and a predetermined range from the upper end of the direct-acting guide rail 83 contacts the side wall plate 811 of the mounting block 81b from the X direction and is fastened by a fastening member (screw).

[0058] Each direct-acting guide rail 83 has split guide rails 831, 832 and an intermediate guide rail 833. The split guide rail 831 is mounted on the side wall plate 811 of the mounting block 81a from the X direction and is supported by the side wall plate 811 in parallel with the Z direction. In the Z direction, the lower end of the split guide rail 831 is located at the same position (height) as the lower end of the side wall plate 811 of the mounting block 81a, and on the other hand, the upper end of the split guide rail 831 protrudes upward from the side wall plate 811. In addition, the split guide rail 832 is mounted on the side wall plate 811 of the mounting block 81b from the X direction and is supported by the side wall plate 811 in parallel with the Z direction. In the Z direction, the upper end of the split guide rail 832 is located at the same position (height) as the upper end of the side wall plate 811 of the mounting block 81b, and on the other hand, the lower end of the split guide rail 832 protrudes downward from the side wall plate 811.

[0059] The split guide rails 831 and the split guide rails 832 are spaced apart from each other in the Z direction, and the intermediate guide rail 833 is arranged parallel to the Z direction between the split guide rails 831 and the split guide rails 832. In this way, the split guide rails 831, the intermediate guide rails 833, and the split guide rails 832 are sequentially arranged in a straight line in the Z direction. In addition, a play (gap) is provided between the split guide rails 831 and the intermediate guide rails 833, and a play (gap) is provided between the intermediate guide rails 833 and the split guide rails 832.

[0060] The segmented guide rails 831, 832 and the middle guide rail 833 are made of different materials. Specifically, the segmented guide rails 831, 832 are quenched iron, and the middle guide rail 833 is unquenched iron. Therefore, the middle guide rail 833 has a lower strength than the segmented guide rails 831, 832 and deforms softly with respect to the load.

[0061] In addition, the linear guide rail 83 has a connecting member 837 for mutually mounting the split guide rail 831 and the intermediate guide rail 833, and a connecting member 838 for mutually mounting the split guide rail 832 and the intermediate guide rail 833. That is, the connecting member 837 has a structure in which a stay arranged across the split guide rail 831 and the intermediate guide rail 833 is fastened to the split guide rail 831 and the intermediate guide rail 833 by a fastening member, thereby fixing and connecting the split guide rail 831 and the intermediate guide rail 833 to each other. In addition, the connecting member 838 has a structure in which a stay arranged across the split guide rail 832 and the intermediate guide rail 833 is fastened to the split guide rail 832 and the intermediate guide rail 833 by a fastening member, thereby fixing and connecting the split guide rail 832 and the intermediate guide rail 833 to each other. In the X direction, the connecting members 837 and 838 are arranged on the same side as the side wall plates 811 with respect to the linear motion guide rail 83 and are located between the side wall plates 811 of the mounting blocks 81 a and 81 b .

[0062] Furthermore, the conveyor table transfer device 6 is provided with a movable member 79 for moving the movable linear conveyor 7 along the direct-acting guide rails 83 of the direct-acting guide mechanism 8. The movable member 79 has a movable plate 791 arranged parallel to the Y direction and the Z direction. In the X direction, the movable plate 791 is arranged on the opposite side of the side wall plate 811 with respect to the direct-acting guide rails 83, and both ends of the movable plate 791 in the Y direction are opposite to the pair of direct-acting guide rails 83 from the X direction.

[0063] In addition, the movable member 79 has slides 792 respectively mounted on one end and the other end of the movable plate 791 in the Y direction. These slides 792 are extended in the Z direction. And the slide 792 at one end of the movable plate 791 is located between the movable plate 791 and the direct-acting guide rail 83 on one side, and is engaged with the direct-acting guide rail 83 on the one side. The slide 792 at the other end of the movable plate 791 is located between the movable plate 791 and the direct-acting guide rail 83 on the other side, and is engaged with the direct-acting guide rail 83 on the other side. These slides 792 can slide in the Z direction along the engaged direct-acting guide rail 83.

[0064] In addition, the movable member 79 has a support plate 793 mounted on the upper end of the movable plate 791. The support plate 793 protrudes from the upper end of the movable plate 791 to the opposite side of the side wall plate 811 in the X direction and is supported horizontally. The upper surface 794 of the support plate 793 is a horizontal plane. In addition, the movable member 79 has a pair of reinforcing support members 795 mounted on the movable plate 791 and the support plate 793, and each reinforcing support member 795 reinforces the support of the movable plate 791 to the support plate 793.

[0065] Furthermore, the movable linear conveyor 7 is mounted on the upper surface 794 of the support plate 793. That is, the bottom surfaces of the main housing 711 and the mounting flange 713 of the movable linear conveyor 7 are flush with each other, forming the bottom surface 714 ( Figure 6 ). The bottom surface 714 of the movable linear conveyor 7 is in contact with the upper surface 794 of the support plate 793, and each mounting flange 713 of the movable linear conveyor 7 is fastened to the upper surface 794 of the support plate 793 by fastening members (screws) at a plurality of fastening locations arranged in the X direction. In addition, in the bottom surface 714 of the movable linear conveyor 7, a portion (half) of the mounting stand 2 side in the X direction is in contact with the upper surface 794 of the support plate 793, and on the other hand, a portion (half) of the opposite side of the mounting stand 2 protrudes from the upper surface 794 of the support plate 793.

[0066] In this structure, the movable linear conveyor 7 can be guided to move in the Z direction by the direct-acting guide rail 83 engaged with the movable member 79 supporting the movable linear conveyor 7. In addition, the conveyor table transfer device 6 is provided with a driving unit 61 in order to drive the movable linear conveyor 7 in the Z direction. The driving unit 61 includes: a single-axis robot 62 provided parallel to the Z direction; a driving member 63 moved in the Z direction by the driving force of the single-axis robot 62; and a pair of direct-acting guide rails 64 for guiding the movement of the driving member 63.

[0067] The single-axis robot 62 is offset in the Y direction relative to the movable linear conveyor 7 and the movable member 79, and has a robot housing 621 extending in the Z direction, a ball screw 622 arranged parallel to the Z direction, and a motor 623 for rotating the ball screw 622. The robot housing 621 of the single-axis robot 62 has an opening 624 facing the movable linear conveyor 7 from the Y direction. The ball screw 622 is arranged in the robot housing 621, and the motor 623 is installed at the upper end of the robot housing 621. In addition, the ball screw 622 is coupled to the motor 623. The single-axis robot 62 is installed on the mounting frame 2 by means of a mounting fitting composed of a back plate 671 and an L-shaped fitting 672. Specifically, the back plate 671 is a flat plate parallel to the Z direction and the X direction and long in the Z direction. The back plate 671 is installed on the surface of the single-axis robot 62 on the side opposite to the movable linear conveyor 7 in the Y direction. Furthermore, the back plate 671 is mounted on the mounting stand 2 by the plurality of L-shaped fittings 67 arranged in the Z direction. In this way, the single-axis robot 62 is fixed and supported on the mounting stand 2.

[0068] In addition, a pair of linear guide rails 64 are arranged at a distance in the X direction and parallel to the Z direction. These linear guide rails 64 are arranged in the robot housing 621 to sandwich the ball screw 622 when viewed from the Y direction, and are attached to the inner wall of the robot housing 621 .

[0069] The driving member 63 is offset to the uniaxial robot 62 side than the movable member 79 in the Y direction, and is located between the movable member 79 and the uniaxial robot 62. The driving member 63 has a driving plate 631 arranged parallel to the Z direction and the X direction, and a sliding member 632 respectively mounted on both ends of the driving plate 631 in the X direction. These sliding members 632 are extended in the Z direction. In addition, in the X direction, the sliding member 632 at one end of the driving plate 631 and the sliding member 632 at the other end engage with a pair of direct-acting guide rails 64. That is, in the X direction, the sliding member 632 at one end of the driving plate 631 engages with the direct-acting guide rail 64 on one side, and the sliding member 632 at the other end of the driving plate 631 engages with the direct-acting guide rail 64 on the other side. In addition, the driving plate 631 is mounted on the nut of the ball screw 622, and moves in the Z direction along with the nut.

[0070] In this configuration, the driving member 63 can be moved in the Z direction by rotating the ball screw 622 using the motor 623. Furthermore, the movement of the driving member 63 in the Z direction can be guided by the linear motion guide rail 64 engaged with the driving member 63.

[0071] Furthermore, the conveyor stage transfer device 6 includes a link mechanism 9 that connects a movable member 79 supporting the movable linear conveyor 7 and a driving member 63 driven by the single-axis robot 62. Figure 7 The link mechanism 9 will be described. Figure 7 This is a diagram schematically showing a cross section of a part of the link mechanism.

[0072] The link mechanism 9 includes a connecting plate 91 arranged parallel to the Z direction and the X direction, and an arm 92 extending from the connecting plate 91 to the Y direction. The connecting plate 91 is mounted on the driving plate 631 of the driving member 63, and the arm 92 extends from the connecting plate 91 to the movable member 79 side in parallel to the Y direction. The arm 92 is a flat plate having a tapered shape with the front end becoming thinner as it moves toward the movable member 79 side in the Y direction. In addition, the arm 92 is arranged on the opposite side of the direct-acting guide rail 83 with respect to the movable plate 791 in the X direction.

[0073] The link mechanism 9 includes a shaft holder 931 mounted on the front end of the arm 92 in the Y direction (the end on the movable member 79 side of the two ends of the arm 92), and a shaft 932 held by the shaft holder 931. The shaft 932 is held parallel to the X direction, and the front end of the shaft 932 protrudes from the shaft holder 931 toward the movable plate 791 in the X direction. A spherical bearing 94 is mounted on the front end of the shaft 932. The spherical bearing 94 includes an inner ring 941 fixed to the shaft 932 and an outer ring 942 fitted on the inner ring 941, and the inner ring 941 and the outer ring 942 can slide against each other in spherical contact.

[0074] In addition, the link mechanism 9 includes a shaft holder 951 mounted on the movable plate 791 and a shaft 952 held by the shaft holder 951. The shaft 952 is held parallel to the X direction, and the front end of the shaft 952 protrudes from the shaft holder 951 toward the shaft holder 931 side in the X direction. In addition, a spherical bearing 96 is mounted on the front end of the shaft 952. The spherical bearing 96 includes an inner ring 961 fixed to the shaft 952 and an outer ring 962 externally fitted on the inner ring 961, and the inner ring 961 and the outer ring 962 can slide against each other in spherical contact.

[0075] Thus, the link mechanism 9 has the spherical bearing 94 and the spherical bearing 96 arranged in the Z direction. Furthermore, the link mechanism 9 has a retaining plate 97 for retaining the outer rings 942 and 962 of the spherical bearings 94 and 96, respectively. That is, the outer ring 942 of the spherical bearing 94 and the outer ring 962 of the spherical bearing 96 are fixed to the retaining plate 97.

[0076] In this way, the link mechanism 9 connects the driving member 63 and the movable member 79 through the two spherical bearings 94 and 96 each having three degrees of freedom. In this structure, when the driving member 63 is guided by the pair of direct-acting guide rails 64 and moves in the Z direction along with the rotation of the ball screw 622 caused by the driving unit 61, the movement of the driving member 63 is transmitted to the movable member 79 via the link mechanism 9, and the movable member 79 is driven in the Z direction. As a result, the movable linear conveyor 7 is guided by the pair of direct-acting guide rails 83 and driven in the Z direction.

[0077] According to the conveyor bed moving device 6, the movable linear conveyor 7 can be positioned at the relative position Pa and the relative position Pb by the driving unit 61. In order to accurately perform the positioning, the conveyor bed moving device 6 has a position detection unit 69 ( Figure 8 ).

[0078] Figure 8 69 is a diagram schematically showing the structure of a position detection unit for detecting the position of a movable linear conveyor. The position detection unit 69 has a linear scale 691 and a linear sensor 692. The linear scale 691 is mounted on the mounting block 81a and the mounting block 81b, respectively. Figure 2 and Figure 3 As shown, the linear scale 691 is mounted on the reinforcing plate 815 of the mounting block 81 and is arranged parallel to the Z direction. On the other hand, the linear sensor 692 is mounted on the movable plate 791 of the movable member 79 supporting the movable linear conveyor 7 and is arranged parallel to the Z direction. In this structure, the linear sensor 692 detects the position (height) of the movable linear conveyor 7 in the Z direction by facing the linear scale 691 from the X direction and reading the linear scale 691.

[0079] When the movable linear conveyor 7 is positioned at the relative position Pa, the motor 623 of the conveyor stage moving device 6 controls the rotation amount of the ball screw 622 based on the result obtained by the linear sensor 692 reading the linear scale 691 installed on the mounting block 81a. In this way, the movable linear conveyor 7 can be accurately positioned at the relative position Pa. In addition, when the movable linear conveyor 7 is positioned at the relative position Pb, the motor 623 of the conveyor stage moving device 6 controls the rotation amount of the ball screw 622 based on the result obtained by the linear sensor 692 reading the linear scale 691 installed on the mounting block 81b. In this way, the movable linear conveyor 7 can be accurately positioned at the relative position Pb.

[0080] In addition, if Figure 2As shown, when the movable linear conveyor 7 is located at the relative position Pa, the movable member 79 is opposed to the mounting block 81a from the X direction via the direct-acting guide rail 83. That is, the mounting block 81a is adjacent to the movable member 79 engaged with the direct-acting guide rail 83 from the X direction, and supports the lower end portion of the direct-acting guide rail 83 engaged with the movable member 79 from the opposite side of the surface of the movable member 79 mounted on the direct-acting guide rail 83 (the surface on the movable member 79 side in the X direction). Thus, the movable linear conveyor 7 located at the relative position Pa can be firmly supported by the mounting block 81a.

[0081] Similarly, when the movable linear conveyor 7 is located at the relative position Pb, the movable member 79 is opposed to the mounting block 81b from the X direction via the direct-acting guide rail 83. That is, the mounting block 81b is adjacent to the movable member 79 engaged with the direct-acting guide rail 83 from the X direction, and supports the upper end portion of the direct-acting guide rail 83 engaged with the movable member 79 from the opposite side of the surface of the movable member 79 mounted on the direct-acting guide rail 83 (the surface on the movable member 79 side in the X direction). Thus, the movable linear conveyor 7 located at the relative position Pb can be firmly supported by the mounting block 81b.

[0082] In the embodiment described above, the driving member 63 driven by the motor 623 (driving source) and the movable member 79 supporting the movable linear conveyor 7 are connected by the link mechanism 9. And, when the driving member 63 is driven along the direct-acting guide rail 64 (first direct-acting guide member), the movable member 79 is driven by the driving member 63 via the link mechanism 9 and moves along the direct-acting guide rail 83 (second direct-acting guide member), and the movable linear conveyor 7 moves in the Z direction (prescribed moving direction). At this time, the link mechanism 9 has more than one degree of freedom. Therefore, according to the parallelism between the direct-acting guide rail 64 and the direct-acting guide rail 83, the link mechanism 9 bends due to its degree of freedom, so that the load applied to the driving member 63 and the movable member 79 can be suppressed. As a result, the movable linear conveyor 7 can be moved smoothly without the need for precise adjustment work on the installation of the driving member 63 and the movable member 79 to the direct-acting guide rail 64 and the direct-acting guide rail 83, respectively.

[0083] In addition, the link mechanism 9 has spherical bearings 94 and 96, and has degrees of freedom due to the spherical bearings 94 and 96. In this way, by using the spherical bearings 94 and 96 having three degrees of freedom for the link mechanism 9, the link mechanism 9 can be flexibly bent, and the load applied to the drive member 63 and the movable member 79 can be more reliably suppressed. As a result, even when the parallelism between the direct-acting guide rail 64 and the direct-acting guide rail 83 is low, the movable linear conveyor 7 can be moved smoothly.

[0084] In addition, the link mechanism 9 has two spherical bearings 94 and 96 arranged at different positions in the Z direction (movement direction). In this way, by using the two spherical bearings 94 and 96 for the link mechanism 9, the link mechanism 9 can be bent more flexibly, and the load applied to the drive member 63 and the movable member 79 can be further reliably suppressed.

[0085] In addition, the driving unit 61 moves the movable linear conveyor 7 in the Z direction between a relative position Pa relative to the fixed linear conveyor 5a (first fixed linear conveyor) mounted on the mounting frame 2 and a relative position Pb (second relative position) relative to the fixed linear conveyor 5b (second fixed linear conveyor) mounted on the mounting frame 2. In this structure, by positioning the movable linear conveyor 7 at the relative position Pa by the driving unit 61, the transfer of the transport table T can be performed between the movable linear conveyor 7 and the fixed linear conveyor 5a, and by positioning the movable linear conveyor 7 at the relative position Pb by the driving unit 61, the transfer of the transport table T can be performed between the movable linear conveyor 7 and the fixed linear conveyor 5b. In particular, in this embodiment, the link mechanism 9 is bent due to its degree of freedom according to the parallelism between the direct-acting guide rail 64 and the direct-acting guide rail 83, so that the movable linear conveyor 7 can be guided to the relative positions Pa and Pb in an appropriate posture. As a result, the transfer of the transport table T between the movable linear conveyor 7 and the fixed linear conveyors 5 a and 5 b can be smoothly performed.

[0086] In addition, the direct-acting guide rail 83 is installed on the fixed linear conveyor 5a and is installed on the fixed linear conveyor 5b. In this structure, since the movable linear conveyor 7 is guided to move to the relative position Pa by the direct-acting guide rail 83 installed on the fixed linear conveyor 5a, the movable linear conveyor 7 moved to the relative position Pa can be accurately positioned relative to the fixed linear conveyor 5a. Similarly, since the movable linear conveyor 7 is guided to move to the relative position Pb by the direct-acting guide rail 83 installed on the fixed linear conveyor 5b, the movable linear conveyor 7 moved to the relative position Pb can be accurately positioned relative to the fixed linear conveyor 5b. As a result, regardless of the deformation and thermal deformation of the mounting frame 2 on which the fixed linear conveyors 5a and 5b are mounted, the conveying platform T between the fixed linear conveyors 5a and 5b and the movable linear conveyor 7 can be smoothly transferred.

[0087] In addition, a position detection unit 69 is provided for detecting the position of the movable linear conveyor 7. And the driving unit 61 controls the position of the movable linear conveyor 7 based on the position detected by the position detection unit 69, thereby controlling the positioning of the movable linear conveyor 7 to the relative positions Pa and Pb. In this structure, based on the detection result of the position detection unit 69, the position of the movable linear conveyor 7 relative to the fixed linear conveyors 5a and 5b can be accurately controlled. However, the position detection unit 69 only detects the position of the movable linear conveyor 7 at the position where it is arranged, and therefore cannot detect the posture of the movable linear conveyor 7. Therefore, if only the position detection unit 69 is used, it is possible to perform the transfer of the conveyor table T in a state where the posture of the movable linear conveyor 7 is tilted relative to the fixed linear conveyors 5a and 5b. In contrast, in this embodiment, according to the parallelism between the linear guide rail 64 and the linear guide rail 83, the link mechanism 9 is bent due to its degree of freedom, so that the movable linear conveyor 7 can be guided to the relative positions Pa and Pb in an appropriate posture. As a result, the movable linear conveyor 7 can be positioned at an appropriate position and posture with respect to the fixed linear conveyors 5a and 5b.

[0088] Thus, in the above-mentioned embodiment, the conveying system 1 is equivalent to an example of the “conveying system” of the present invention, the mounting stand 2 is equivalent to an example of the “mounting stand” of the present invention, the fixed linear conveyor 5a is equivalent to an example of the “first fixed linear conveyor” of the present invention, the fixed linear conveyor 5b is equivalent to an example of the “second fixed linear conveyor” of the present invention, the conveying table moving device 6 is equivalent to an example of the “conveying table moving device” of the present invention, the motor 623 is equivalent to an example of the “driving source” of the present invention, the driving member 63 is equivalent to an example of the “driving member” of the present invention, the direct-acting guide rail 64 is equivalent to an example of the “first direct-acting guide member” of the present invention, and the position detection unit 69 is equivalent to the present invention. The movable linear conveyor 7 is equivalent to an example of the “movable linear conveyor” of the present invention, the movable member 79 is equivalent to an example of the “movable member” of the present invention, the direct-acting guide rail 83 is equivalent to an example of the “second direct-acting guide member” of the present invention, the connecting rod mechanism 9 is equivalent to an example of the “connecting rod mechanism” of the present invention, the spherical bearings 94 and 96 are equivalent to an example of the “spherical bearing” of the present invention, the relative position Pa is equivalent to an example of the “first relative position” of the present invention, the relative position Pb is equivalent to an example of the “second relative position” of the present invention, the conveying table T is equivalent to an example of the “conveying table” of the present invention, and the Z direction is equivalent to an example of the “moving direction” of the present invention.

[0089] In addition, the present invention is not limited to the above-mentioned embodiment, and various changes can be made to the above-mentioned embodiment as long as it does not deviate from the main purpose. Figures 9 to 11 The modified example shown is constructed as shown. Fig. 9is a top view showing a conveying system according to a modified example, Fig.10 Yes means Figure 1 A partial stereogram of the conveying system. Fig.11 It is schematically indicated Fig. 9 FIG. 1 is a diagram showing an example of a link mechanism provided in a conveying system. Fig.11 In FIG. 1 , the internal structure of a part of the link mechanism 9 is indicated by a dotted line.

[0090] Figures 1 to 8 The above-mentioned embodiment shown in Figures 9 to 11 The difference between the modified examples shown mainly lies in the driving direction of the movable linear conveyor 7. In the above embodiment, the movable linear conveyor 7 is driven in the Z direction, while in the modified example, the movable linear conveyor 7 is driven in the Y direction. Therefore, the differences from the above embodiment will be mainly described, and the common structures are marked with corresponding reference numerals and the description is appropriately omitted. In addition, by having a common structure, it is of course possible to achieve the same effect.

[0091] In the conveying system 1 according to the modified example, the fixed linear conveyor 5a and the fixed linear conveyor 5b are mounted on the upper surface 231 of the same mounting table 23, and are arranged in parallel with the X direction and spaced apart from each other in the Y direction. In contrast, the conveying table transfer device 6 drives the movable linear conveyor 7 in the Y direction, thereby moving the movable linear conveyor 7 between a relative position Pa relative to the fixed linear conveyor 5a in the X direction and a relative position Pb relative to the fixed linear conveyor 5b in the X direction.

[0092] In the direct-acting guide mechanism 8, mounting blocks 81a and 81b are arranged in the Y direction corresponding to the fixed linear conveyors 5a and 5b. Furthermore, the upper surface of the mounting block 81a is mounted on the bottom surface of the fixed linear conveyor 5a, and the upper surface of the mounting block 81b is mounted on the bottom surface of the fixed linear conveyor 5b. A pair of direct-acting guide rails 83 are arranged along the Y direction on these mounting blocks 81a and 81b. The pair of direct-acting guide rails 83 are installed on the mounting blocks 81a and 81b at intervals in the Z direction, and are supported parallel to the Y direction, respectively. Furthermore, the movable component 79 engages with the pair of direct-acting guide rails 83. Therefore, the movable component 79 is guided by the direct-acting guide rails 83 and moves along the Y direction between the relative position Pa and the relative position Pb.

[0093] In addition, the single-axis robot 62 of the driving unit 61 is arranged parallel to the Y direction, and drives the driving member 63 supported parallel to the Y direction and the Z direction in the Y direction by the motor 623. In addition, the single-axis robot 62 is equipped with a pair of linear guide rails 64 ( Fig. 9(not shown), the driving member 63 driven by the motor 623 is guided by the direct-acting guide rail 64 and moves in the Y direction.

[0094] Furthermore, the driving member 63 driven by the motor 623 and the movable member 79 supporting the movable linear conveyor 7 are connected by the link mechanism 9. Therefore, when the driving member 63 driven by the motor 623 is guided by the pair of direct-acting guide rails 64 and moves in the Y direction, the movement of the driving member 63 is transmitted to the movable member 79 via the link mechanism 9, and the movable member 79 is driven in the Y direction. As a result, the movable linear conveyor 7 is guided by the pair of direct-acting guide rails 83 and driven in the Y direction.

[0095] In addition, in the link mechanism 9, the connecting plate 91 is arranged parallel to the Y direction and the Z direction and is mounted on the driving member 63, and the arm 92 is bent and extended from the connecting plate 91 in the X direction, the Y direction and the Z direction, and extends upward. The shaft holder 931 is mounted on the front end (upper end) of the arm 92, and the front end of the shaft 932 protrudes from the shaft holder 931 toward the movable plate 791 side in the X direction. In addition, a spherical bearing 94 is mounted on the front end of the shaft 932. In addition, the front end of the shaft 952 protrudes from the shaft holder 951 mounted on the movable plate 791 toward the shaft holder 931 side in the X direction. In addition, a spherical bearing 96 is mounted on the front end of the shaft 952. In this way, in the link mechanism 9, the spherical bearing 94 and the spherical bearing 96 are arranged in the Y direction and are held by the retaining plate 97.

[0096] Furthermore, the link mechanism 9 has a biasing spring 98 disposed between the shaft retaining member 931 and the shaft retaining member 951. Both ends of the biasing spring 98 are attached to the shaft retaining member 931 and the shaft retaining member 951, and the biasing spring 98 generates an elastic force that causes the shaft retaining member 931 and the shaft retaining member 951 to approach each other. Fig.11 As shown, the shaft holder 931 and the shaft holder 951 are arranged offset in the Y direction. Therefore, in the Y direction, a force is generated to bring the spherical bearing 94 and the spherical bearing 96 closer to each other, and the inner ring 941 and the outer ring 942 of the spherical bearing 94 are pressed by the pressing force Fy, and the inner ring 961 and the outer ring 962 of the spherical bearing 96 are pressed by the pressing force Fy. In this way, the shaking of the spherical bearings 94 and 96 in the Y direction is suppressed. In addition, the force spring 98 is not limited to a tension coil spring that generates an elastic force to bring the two ends closer together, and can also be a compression coil spring that generates an elastic force to separate the two ends.

[0097] In this modification, the link mechanism 9 connecting the driving member 63 driven by the motor 623 (driving source) and the movable member 79 supporting the movable linear conveyor 7 also has one or more degrees of freedom. Therefore, the link mechanism 9 bends according to the degree of parallelism between the direct-acting guide rail 64 and the direct-acting guide rail 83, so that the load applied to the driving member 63 and the movable member 79 can be suppressed. As a result, the movable linear conveyor 7 can be moved smoothly without performing precise adjustment work on the installation of the driving member 63 and the movable member 79 to the direct-acting guide rail 64 and the direct-acting guide rail 83, respectively.

[0098] In addition, the spherical bearings 94 and 96 have outer rings 942 and 962 and inner rings 941 and 961 arranged inside the outer rings 942 and 962 and in contact with the outer rings 942 and 962 with a spherical surface. In addition, there is a biasing spring 98 (biasing member) that generates a pressing force Fy having a component in the Y direction (movement direction) that presses the outer rings 942 and 962 and the inner rings 941 and 961 of the spherical bearings 94 and 96. In this structure, the play between the outer rings 942 and 962 and the inner rings 941 and 961 of the spherical bearings 94 and 96 in the Y direction can be suppressed. As a result, the influence of the play of the spherical bearings 94 and 96 on the position of the movable linear conveyor 7 can be eliminated.

[0099] In particular, as in the above-mentioned modification, when the moving direction of the movable linear conveyor 7 is the horizontal direction (Y direction), it is preferable to provide a structure in which the biasing spring 98 is provided. That is, in this case, the dead weight of the outer rings 942, 962 and the inner rings 941, 961 of the spherical bearings 94, 96 does not contribute to suppressing their shaking, so it is preferable to suppress the shaking by the biasing spring 98.

[0100] In addition, changes other than those shown in the above-mentioned modified examples can be appropriately made. For example, it is also possible to configure that the movable linear conveyor 7 is driven in the Z direction. Figure 1 to Figure 7 A biasing spring 98 is provided in the structure to suppress the shaking of the spherical bearings 94 and 96.

[0101] In addition, the number of spherical bearings provided in the link mechanism 9 is not limited to two, and may be one or three or more.

[0102] In addition, the specific structure for providing the link mechanism 9 with a degree of freedom is not limited to a spherical bearing, and other types of bearings or the like may be used.

[0103] In addition, the number of degrees of freedom of the link mechanism 9 is not limited to the above example, and may be one or more.

[0104] In addition, the number of fixed linear conveyors 5 is not limited to two, and may be three or more. In this case, the direct-acting guide mechanism 8 may be installed on all fixed linear conveyors 5, or may be installed on only a part of the fixed linear conveyors 5. Even in the latter case, the same effect as described above can be obtained for the part of the fixed linear conveyors 5.

[0105] In addition, the method of driving the transport table T by the fixed linear conveyor 5 and the movable linear conveyor 7 may not rely on the linear motor, but may adopt a combination of a lead screw and a hollow motor.

[0106] In addition, the specific structure of the mounting blocks 81a and 81b is not limited to the above-mentioned example of combining a plurality of plates. For example, the mounting block 81 may be constituted by a single rectangular member.

[0107] In addition, the linear motion guide rail 83 may be constituted by a single rail instead of a plurality of rails.

[0108] In addition, when the linear motion guide rail 83 is constituted by a plurality of rails, the intermediate guide rail 833 may not be provided, and the linear motion guide rail 83 may be constituted by only the two divided guide rails 831 and 832 .

[0109] Alternatively, the linear motion guide rail 83 may be composed of a plurality of rails, or may be composed of four or more rails.

[0110] In addition, the characteristics of the split guide rail 831, the split guide rail 832, and the connecting guide rail 833 can be appropriately changed. Specifically, the split guide rail 831 and the connecting guide rail 833 can be configured to be different from each other in at least one of material, strength, and rigidity. When the rigidity is made different, the rigidity of the connecting guide rail 833 can be made lower than the rigidity of the split guide rail 831. Similarly, the split guide rail 832 and the connecting guide rail 833 can be configured to be different from each other in at least one of material, strength, and rigidity. When the rigidity is made different, the rigidity of the connecting guide rail 833 can be made lower than the rigidity of the split guide rail 832.

[0111] In addition, the linear motion guide rails 83 and 64 may be replaced with other members that perform linear motion guiding, such as linear bushings, ball splines, or cam followers.

[0112] Furthermore, when the linear conveyor 5 and the mounting block 81 are positioned and fixed by the engagement of the engagement protrusion and the engagement hole, the engagement hole may be provided in the fixed linear conveyor 5 and the engagement protrusion may be provided in the mounting block 81 .

[0113] Description of symbols

[0114] 1…Conveying system;

[0115] 2…Install the stand;

[0116] 5a ... fixed linear conveyor (first fixed linear conveyor);

[0117] 5b ... fixed linear conveyor (second fixed linear conveyor);

[0118] 6…Conveyor platform transfer device;

[0119] 623…electric motor (driving source);

[0120] 63…driving member;

[0121] 64 ... linear guide rail (first linear guide member);

[0122] 69…position detection unit;

[0123] 7… Movable linear conveyor;

[0124] 79… movable member;

[0125] 83 ... a direct-motion guide rail (a second direct-motion guide member);

[0126] 9…connecting rod mechanism;

[0127] 94…Spherical bearings;

[0128] 96…spherical bearings;

[0129] Pa…relative position (first relative position);

[0130] Pb…relative position (second relative position);

[0131] T…Conveyor table;

[0132] Z...Z direction (moving direction).

Claims

1. A conveyor platform transfer device, comprising: a driving unit including a driving member, a driving source for driving the driving member, and a first direct-acting guide member for guiding movement of the driving member driven by the driving source; A movable member supports a movable linear conveyor that drives the conveyor platform; a second direct-acting guide member, guiding the movement of the movable member; and A connecting rod mechanism connects the movable member and the driving member and has more than one degree of freedom, When the driving member is driven along the first linear motion guide member, the movable member is driven by the driving member via the link mechanism to move along the second linear motion guide member, and the movable linear conveyor moves in a predetermined moving direction. The driving unit moves the movable linear conveyor along the moving direction between a first relative position and a second relative position, wherein the first relative position is a position relative to a first fixed linear conveyor mounted on a mounting frame, and the second relative position is a position relative to a second fixed linear conveyor mounted on the mounting frame. The second direct-motion guide member is mounted on the first fixed linear conveyor and is mounted on the second fixed linear conveyor.

2. The conveyor platform transfer device according to claim 1, wherein: The link mechanism has a spherical bearing, and has the degree of freedom due to the spherical bearing.

3. The conveyor platform transfer device according to claim 2, wherein: The link mechanism includes two spherical bearings arranged at different positions in the moving direction.

4. The conveyor table transfer device according to claim 2 or 3, wherein: The spherical bearing comprises an outer ring and an inner ring arranged inside the outer ring and in contact with the outer ring with a spherical surface. The conveyor stage transfer device further includes a biasing member that generates a pressing force having a component in the moving direction for pressing the outer ring and the inner ring of the spherical bearing.

5. The conveyor platform transfer device according to claim 4, wherein: The moving direction is a horizontal direction.

6. The conveyor table transfer device according to any one of claims 1 to 3 and 5, wherein: The conveyor table transfer device further includes a position detection unit for detecting the position of the movable linear conveyor. The driving unit controls the position of the movable linear conveyor based on the position detected by the position detecting unit, thereby controlling the positioning of the movable linear conveyor to the first relative position and controlling the positioning of the movable linear conveyor to the second relative position.

7. A conveying system comprising: A first fixed linear conveyor drives the conveyor table; A second fixed linear conveyor drives the conveying platform; and The conveyor table transfer device according to any one of claims 1 to 6, The conveyor table transfer device is used to transfer the conveyor table between the first fixed linear conveyor and the second fixed linear conveyor.

8. A conveyor table transfer method, comprising: The step of causing the driving unit to drive the driving member using the driving source and guiding the driving member using the first linear guide member; and a step of guiding the movement of a movable member supporting a movable linear conveyor driving a conveying table by a second linear motion guide member, The movable member and the driving member are connected by a link mechanism having more than one degree of freedom. When the driving member is driven along the first linear motion guide member, the movable member is driven by the driving member via the link mechanism to move along the second linear motion guide member, and the movable linear conveyor moves in a predetermined moving direction. The driving unit moves the movable linear conveyor along the moving direction between a first relative position and a second relative position, wherein the first relative position is a position relative to a first fixed linear conveyor mounted on a mounting frame, and the second relative position is a position relative to a second fixed linear conveyor mounted on the mounting frame. The second direct-motion guide member is mounted on the first fixed linear conveyor and is mounted on the second fixed linear conveyor.

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