Laser processing calibration device, calibration method, processing device and processing method

Abstract

The present invention discloses a laser processing calibration device, a calibration method, a processing device and a processing method, wherein the calibration device comprises: a calibration unit, a camera unit and a detection unit; the calibration unit comprises a plurality of calibration points; the camera unit is used to measure the height data from the objective lens to the plurality of calibration points; the detection unit is used to measure the height data from the detection unit to the plurality of calibration points; according to the height data from the detection unit to the plurality of calibration points and the height data from the objective lens to the plurality of calibration points, it is judged whether calibration is required before laser processing. The present invention improves the processing accuracy of laser cutting and has good practical use value.

Description

Technical Field

[0001] The present invention relates to the field of laser processing, and in particular to a laser processing calibration device, a calibration method, a processing device and a processing method. Background Art

[0002] In existing laser processing, laser processing devices (such as laser cutting machines) are usually equipped with a height tracking control system, so that the laser processing device (such as laser cutting machine) can detect the distance value between the processing head and the surface of the workpiece being processed in real time during the processing (cutting) process, so as to make real-time height adjustments according to the change of the value, for example, see invention patent applications CN112440010A, CN216264087U, etc. The use of the height tracking system can not only improve the quality of laser processing (cutting), but also greatly reduce the labor intensity of the preliminary work of laser processing (cutting) and improve processing efficiency.

[0003] However, in actual processes, the height following system may have technical problems such as untimely dynamic response, poor following quality, and unstable following, which greatly affects the quality of laser processing (cutting). Therefore, in order to solve the above technical problems, before laser processing, it is possible to consider and operate the error cause analysis and error elimination of the height following system of the laser processing device. For this purpose, the present application provides a laser processing calibration device, calibration method, processing device, and processing method. Summary of the invention

[0004] (1) Technical issues

[0005] In order to solve the problem of failure of height following (or dynamic focus following) in the existing laser processing process, resulting in deterioration of the quality of laser processing, the present invention provides a laser processing calibration device, calibration method, processing device and processing method, which can further and more finely improve the precision and accuracy of the existing height following technology (or dynamic focus following), thereby improving the quality of laser processing.

[0006] (2) Technical solution

[0007] In a first aspect, the present invention provides a laser processing calibration device, comprising:

[0008] A calibration unit, the calibration unit comprising a plurality of calibration points P0, P1, P2, P3, P4, P5, P6, P7, P8, P9, P10, ... Pn;

[0009] A detection unit, the detection unit is used to measure the height data from the detection unit to each calibration point P0, P1, P2, P3, P4, P5, P6, P7, P8, P9, P10, ... Pn;

[0010] A camera unit, wherein the camera unit is used to measure the height data from the objective lens to each calibration point P0, P1, P2, P3, P4, P5, P6, P7, P8, P9, P10, ... Pn;

[0011] Based on the height data from the detection unit to each calibration point P0, P1, P2, P3, P4, P5, P6, P7, P8, P9, P10, ... Pn, and the height data from the objective lens to each calibration point P0, P1, P2, P3, P4, P5, P6, P7, P8, P9, P10, ... Pn, determine whether calibration is required before laser processing, where n is an integer.

[0012] Further, taking point P0 as the calibration reference point, at point P0, the camera unit measures the height data from the objective lens to point P0, recorded as H0;…; at point Pn, the camera unit measures the height data from the objective lens to point Pn, recorded as Hn; the difference between H1 and H0 is calculated as H10=H1-H0,..., and the difference between Hn and H0 is calculated as Hn0=Hn-H0; similarly, taking point P0 as the calibration reference point, at point P0, the height data from the detection unit to point P0 is measured, recorded as D0;...; at point Pn, the height data from the detection unit to point Pn is measured, recorded as Dn; the difference between D1 and D0 is calculated as D10=D1-D0,..., and the difference between Dn and D0 is calculated as Dn0=Dn-H0.

[0013] Furthermore, the condition for determining whether calibration is required before laser processing is:

[0014] Determine whether H10 is equal to D10, whether H20 is equal to D20, ..., whether Hn0 is equal to Dn0;

[0015] When each group of H10 and D10, H20 and D20, ..., Hn0 and Dn0 is equal, no calibration is required before laser processing;

[0016] When at least one of H10 and D10, H20 and D20, ..., Hn0 and Dn0 is not equal, calibration is required before laser processing.

[0017] Furthermore, when calibration is required, the compensation values ​​C1, ..., Cn are calculated as follows:

[0018] C1=H10-D10=(H1-H0)-(D1-D0)

[0019] C2=H20-D20=(H2-H0)-(D2-D0) ...

[0020] Cn=Hn0-Dn0=(Hn-H0)-(Dn-D0).

[0021] In a second aspect, the present invention provides a laser processing device, which adopts any of the above-mentioned calibration devices, including:

[0022] An execution unit, wherein the execution unit is connected to the objective lens;

[0023] The control unit is used to adjust the height of the execution unit according to the height data of the surface of the product P to be processed measured by the detection unit, so as to adjust the focal position of the objective lens.

[0024] Further, after the calibration required before laser processing is completed, the product P to be processed is placed on the workbench L for real-time laser processing, and the height data DTn measured by the detection unit on the surface of the product P to be processed is compensated by the compensation value, and the compensated height data Dn' is calculated. The height of the execution unit is adjusted according to the compensated height data Dn' to adjust the focal position of the objective lens, wherein D1', ..., Dn' are calculated as follows:

[0025] D1'=DT1+C1

[0026] D2'=DT2+C2 ...

[0027] Dn'=DTn+Cn.

[0028] In a third aspect, the present invention provides a laser processing calibration method, using any of the calibration devices described above, comprising the following steps:

[0029] (1) measuring the height data from the detection unit to each calibration point, and measuring the height data from the objective lens to each calibration point;

[0030] (2) judging whether calibration is required based on the height data from the detection unit to each calibration point and the height data from the objective lens to each calibration point, and if so, proceeding to step (3); if not, the calibration ends;

[0031] (3) The compensation value is calculated and the calibration is completed.

[0032] Furthermore, in step (1):

[0033] Take point P0 as the calibration reference point. At point P0, the camera unit measures the height data from the objective lens to point P0, which is recorded as H0; ...; at point Pn, the camera unit measures the height data from the objective lens to point Pn, which is recorded as Hn; similarly, take point P0 as the calibration reference point. At point P0, the height data from the detection unit to point P0 is measured, which is recorded as D0; ...; at point Pn, the height data from the detection unit to point Pn is measured, which is recorded as Dn.

[0034] Furthermore, in step (2):

[0035] Calculate the difference between H1 and H0: H10=H1-H0, ..., calculate the difference between Hn and H0: Hn0=Hn-H0;

[0036] Calculate the difference between D1 and D0: D10=D1-D0, ..., calculate the difference between Dn and D0: Dn0=Dn-H0;

[0037] The conditions for determining whether calibration is required are:

[0038] Determine whether H10 is equal to D10, whether H20 is equal to D20, ..., whether Hn0 is equal to Dn0;

[0039] When each group of H10 and D10, H20 and D20, ..., Hn0 and Dn0 is equal, no calibration is required before laser processing;

[0040] When at least one of H10 and D10, H20 and D20, ..., Hn0 and Dn0 is not equal, calibration is required before laser processing.

[0041] In a fourth aspect, the present invention further provides a laser processing method, comprising the following steps:

[0042] Step S10: before laser processing, perform any of the above calibration methods;

[0043] Step S20: After the calibration in step (3) is completed, the following steps are further included: placing the product P to be processed on the workbench L for real-time laser processing, using the compensation value to compensate the height data of the surface of the product P to be processed measured by the detection unit, calculating the compensated height data, and adjusting the height of the execution unit according to the compensated height data to adjust the focal position of the objective lens for laser processing;

[0044] Or, when the result in step (2) is no, after the calibration is completed, the following steps are also included: when the product P to be processed is placed on the workbench L for real-time laser processing, the height of the execution unit is adjusted only according to the height data of the surface of the product P to be processed measured by the detection unit, so as to adjust the focal position of the objective lens for laser processing.

[0045] (3) Beneficial effects

[0046] Compared with the prior art, the technical solution provided by the present invention has the following beneficial effects:

[0047] (1) Theoretical research on the nonlinear Z-direction displacement caused by the stage's own structure and movement has improved the precision and accuracy of the "height following system" or "dynamic focus following system", ensuring real-time following adjustment of the focus position of laser processing and improving the quality of laser processing;

[0048] (2) The specific settings of the calibration unit and the calibration method are proposed, and the "height following system" or "dynamic focus following system" in the prior art is optimized, which further improves the processing accuracy of laser cutting and has good practical use value.

[0049] (3) A laser processing method of calibration before processing is proposed, which optimizes the laser processing method in the existing technology. Calibration first eliminates the influence of the nonlinear error of the workbench on the laser processing, directly improves the accuracy of laser cutting processing, and ensures the quality of subsequent laser cutting processing. BRIEF DESCRIPTION OF THE DRAWINGS

[0050] Figure 1 This is a schematic diagram of the structure of the laser processing device of the present application.

[0051] Figure 2 Schematic diagram of nonlinear height jitter data Zt of this application.

[0052] Figure 3 This is a schematic diagram of the change of height jump data Zt in the height following of this application.

[0053] Figure 4 It is a schematic diagram of an embodiment of the calibration method of the present application.

[0054] Figure 5 It is a schematic diagram of another embodiment of the calibration method of the present application.

[0055] Explanation of the symbols in the schematic diagram:

[0056] 1. Objective lens; 2. Execution unit; 3. Detection unit; 4. Camera unit

[0057] P, product to be processed; L, workbench. DETAILED DESCRIPTION

[0058] In order to further understand the content of the present invention, the present invention is described in detail in conjunction with the accompanying drawings and embodiments.

[0059] The structures, proportions, sizes, etc. illustrated in the drawings of this specification are only used to match the contents disclosed in the specification for people familiar with this technology to understand and read, and are not used to limit the limiting conditions for the implementation of the present invention, so they have no substantial technical significance. Any modification of the structure, change of the proportion relationship or adjustment of the size, without affecting the effects and purposes that can be achieved by the present invention, should still fall within the scope of the technical content disclosed by the present invention. At the same time, the terms such as "upper", "lower", "left", "right", "middle" and so on quoted in this specification are only for the convenience of description, and are not used to limit the scope of implementation. The change or adjustment of their relative relationship should also be regarded as the scope of implementation of the present invention without substantially changing the technical content.

[0060] like Figure 1 As shown, a laser processing device in the prior art includes:

[0061] A detection unit 3 is used to measure the height of the surface of the product P to be processed;

[0062] An execution unit 2 connected to the objective lens 1;

[0063] The control unit is used to adjust the height of the execution unit 2 according to the height data to adjust the focal position of the objective lens 1 so that the focal point of the laser processing acts on the correct position of the product to be processed.

[0064] The system formed by the detection unit, the execution unit, and the objective lens combination in the above-mentioned laser processing calibration device is common, which is often called a "height following system" or a "dynamic focus following system", and the product P to be processed is placed on a workbench L, and the workbench L can be adjusted in position in the X direction and / or the Y direction. It should be noted that the X-direction and / or Y-direction adjustment of the workbench L can be achieved using a conventional X-direction adjustment mechanism and / or a Y-direction adjustment mechanism, such as a conventional transverse and longitudinal screw nut adjustment mechanism, and the execution unit 2 performs up and down lifting and lowering movements in the Z direction. There are various structures for realizing the lifting and lowering movements, such as conventional motor guides, conventional cylinders, etc. These are well known to those skilled in the art and will not be repeated here.

[0065] like Figure 2As shown in the figure, in the process of laser processing, theoretically, the height data of the Z-direction displacement of the surface of the workbench L is unchanged during the movement of the workbench in the X-direction, and the flatness of the surface of the workbench L will not affect the height data measured by the detection unit 3 after the product P to be processed is placed on the workbench L in the laser processing project. However, in the actual process, affected by the structure of the X-direction driving mechanism and the adjustment mechanism itself, the displacement data of the Z-direction during the movement of the workbench L in the X-direction changes nonlinearly. When the nonlinear height jump data Zt in this movement process is also detected and captured by the detection unit 3, the height point data measured by the detection unit 3 and the height of the focal position that finally meets the processing requirements will be inconsistent.

[0066] The specific reason is that the height data measured by the detection unit 3 includes the Z-direction height data ZP of the surface of the product P to be processed, the Z-direction height data ZL of the surface of the workbench L, and the Z-direction height jump data Zt of the workbench L during the movement of the workbench L in the X-direction. After the height data of the processing point M on the surface of the product P to be processed is measured, the height jump data of the workbench L in the Z-direction is Ztm, and the control unit calculates the focal position of the adjusted objective lens. The workbench L will further move in the X-direction, and the height jump data of the workbench L in the Z-direction is Ztm, which will change. When the processing point M on the surface of the product P to be processed is moved to the bottom of the objective lens for processing, the height jump data of the workbench L in the Z-direction is Ztn. At this time, if the focal position of the adjusted objective lens calculated with the height jump data of the workbench L in the Z-direction as Ztm is used as the laser processing focal position, laser processing errors will occur. Obviously, the height data needs to be recalculated at this time. Therefore, this nonlinear change Zt will affect and act on the adjusted objective lens focus position formed by only the height data measured by the detection unit 3, causing the adjusted objective lens focus position to change, resulting in failure of "height following" or "dynamic focus following". Therefore, before laser processing, it is completely necessary to discover the height jump data Zt in the Z direction of this nonlinear change in advance, and reduce or eliminate the influence or interference of the height jump data Zt in the Z direction of this nonlinear change on the height data measured by the detection unit.

[0067] Therefore, in the first aspect, the present invention provides a calibration device for laser processing, including a detection unit, a calibration unit and a camera unit, wherein the calibration unit includes a plurality of calibration points. Specifically, the calibration unit may be composed of a calibration plate including a plurality of calibration points, or a plurality of calibration points may be formed on a workbench L. The camera unit 4 is used to measure the height from the objective lens 1 to each calibration point, and the detection unit is used to measure the height data from the detection unit to each calibration point. The camera unit 4 is mounted on the laser processing device.

[0068] exist Figure 4In the figure, the calibration unit includes multiple calibration points, such as P0, P1, P2, P3, P4, P5, P6, P7, P8, P9, P10, ... Pn, where n is an integer. The distances between two adjacent calibration points P12, P23, P34, P45, P50, P06, P67, P78, ..., Pn-1Pn (N<5 or N>7) can be equal or unequal. The positions of P0, P1, P2, P3, P4, P5, P6, P7, P8, P9, P10, ... Pn are not set in sequence. The positions of the calibration points can be randomly sorted or manually set.

[0069] Take point P0 as the calibration reference point. At point P0, the camera unit measures the height data from the objective lens to point P0, recorded as H0; during the movement of the workbench L in the X direction, the actuator moves up and down in the Z direction and moves to point P5. At point P5, the camera unit measures the height data from the objective lens to point P5, recorded as H5; ..., during the movement of the workbench L in the X direction, the actuator moves up and down in the Z direction and moves to point Pn. At point Pn, the camera unit measures the height data from the objective lens to point Pn, recorded as Hn. Calculate the difference between H5 and H0: H50 = H5-H0, calculate the difference between H1 and H0: H10 = H1-H0, calculate the difference between H2 and H0: H20 = H2-H0, ..., calculate the difference between Hn and H0: Hn0 = Hn-H0.

[0070] Similarly, take point P0 as the calibration reference point. At point P0, measure the height data from the detection unit to point P0, which is recorded as D0. When the workbench L moves in the X direction, the actuator moves up and down in the Z direction and moves to point P5. At point P5, measure the height data from the detection unit to point P5, which is recorded as D5. ..., when the workbench L moves in the X direction, the actuator moves up and down in the Z direction and moves to point Pn. At point Pn, measure the height data from the detection unit to point Pn, which is recorded as Dn. Calculate the difference between D5 and D0 as D50=D5-D0, calculate the difference between D1 and D0 as D10=D1-D0, calculate the difference between D2 and D0 as D20=H2-H0, ..., calculate the difference between Dn and D0 as Dn0=Dn-H0. The X-direction movement of the workbench L adjusts the positions of P0, P1, ... Pn, which can be based on the order of P0, P1, ... Pn, or can be based on the distance or manual setting.

[0071] The conditions for determining whether calibration is required are:

[0072] Determine whether H10 is equal to D10, whether H20 is equal to D20, ..., whether Hn0 is equal to Dn0;

[0073] When each group of H10 and D10, H20 and D20, ..., Hn0 and Dn0 is equal, no calibration is required before laser processing;

[0074] When at least one of H10 and D10, H20 and D20, ..., Hn0 and Dn0 is not equal, calibration is required before laser processing;

[0075] When calibration is required, the calibration method is: calculate the compensation value, the compensation value C1, ..., Cn calculation formula is as follows:

[0076] C1=H10-D10=(H1-H0)-(D1-D0)

[0077] C2=H20-D20=(H2-H0)-(D2-D0) ...

[0078] Cn=Hn0-Dn0=(Hn-H0)-(Dn-D0)

[0079] Therefore, based on the above calibration device, in a second aspect, the present invention can also provide a laser processing device, which adopts any of the above calibration devices, including:

[0080] An execution unit, wherein the execution unit is connected to the objective lens;

[0081] The control unit is used to adjust the height of the execution unit according to the height data of the surface of the product P to be processed measured by the detection unit, so as to adjust the focal position of the objective lens.

[0082] Furthermore, when the product P to be processed is placed on the workbench L for real-time laser processing, the compensation value is used to compensate the height data DTn of the surface of the product P to be processed measured by the detection unit, and the compensated height data Dn' is calculated. The height of the execution unit 2 is adjusted according to the compensated height data Dn' to adjust the focal position of the objective lens 1 for laser processing.

[0083] D1'=DT1+C1

[0084] D2'=DT2+C2 ...

[0085] Dn'=DTn+Cn

[0086] exist Figure 5In the figure, the calibration unit includes multiple calibration points, such as P0, P1, P2, P3, P4, P5, P6, P7, P8, P9, P10, ... Pn, where n is an integer, and the distances between two adjacent calibration points P01, P12, P23, P34, P45, P50, P06, P67, P78, ..., Pn-1Pn may be equal or unequal, and the positions of P0, P1, P2, P3, P4, P5, P6, P7, P8, P9, P10, ... Pn are set sequentially.

[0087] Take point P0 as the calibration reference point. At point P0, the camera unit measures the height data from the objective lens to point P0, recorded as H0; during the movement of the workbench L in the X direction, the actuator moves up and down in the Z direction and moves to point P1. At point P1, the camera unit measures the height data from the objective lens to point P1, recorded as H1; ..., during the movement of the workbench L in the X direction, the actuator moves up and down in the Z direction and moves to point Pn. At point Pn, the camera unit measures the height data from the objective lens to point Pn, recorded as Hn. Calculate the difference between H1 and H0: H10 = H1-H0, calculate the difference between H2 and H0: H20 = H2-H0, ..., calculate the difference between Hn and H0: Hn0 = Hn-H0.

[0088] Similarly, with point P0 as the calibration reference point, at point P0, the height data from the detection unit to point P0 is measured, recorded as D0; during the movement of the workbench L in the X direction, the actuator moves up and down in the Z direction and moves to point P1, at point P1, the height data from the detection unit to point P1 is measured, recorded as D1; ​​..., during the movement of the workbench L in the X direction, the actuator moves up and down in the Z direction and moves to point Pn, at point Pn, the height data from the detection unit to point P is measured, recorded as Dn. The difference between D1 and D0 is calculated as D10 = D1-D0, the difference between D2 and D0 is calculated as D20 = H2-H0, ..., and the difference between Dn and D0 is calculated as Dn0 = Dn-H0. The X-direction movement of the workbench L adjusts the positions of P0, P1, ...Pn, and it is performed in the order of P0, P1, ...Pn.

[0089] The conditions for determining whether calibration is required are:

[0090] Determine whether H10 is equal to D10, whether H20 is equal to D20, ..., whether Hn0 is equal to Dn0;

[0091] When each group of H10 and D10, H20 and D20, ..., Hn0 and Dn0 is equal, no calibration is required before laser processing;

[0092] When at least one of H10 and D10, H20 and D20, ..., Hn0 and Dn0 is not equal, calibration is required before laser processing;

[0093] When calibration is required, the calibration method is:

[0094] First, the compensation values ​​C1, ..., Cn are calculated as follows:

[0095] C1=H10-D10=(H1-H0)-(D1-D0)

[0096] C2=H20-D20=(H2-H0)-(D2-D0) ...

[0097] Cn=Hn0-Dn0=(Hn-H0)-(Dn-D0)

[0098] Similarly, when the product P to be processed is placed on the workbench L for real-time laser processing, the compensation value is used to compensate the height data DTn of the surface of the product P to be processed measured by the detection unit, and the compensated height data Dn' is calculated. The height of the execution unit 2 is adjusted according to the compensated height data Dn' to adjust the focal position of the objective lens 1 for laser processing.

[0099] D1'=DT1+C1

[0100] D2'=DT2+C2 ...

[0101] Dn'=DTn+Cn.

[0102] In a third aspect, the present application further provides a laser processing calibration method, which may adopt any of the above laser processing calibration devices, and comprises the following steps:

[0103] (1) Before laser processing, measure the height data from the detection unit to each calibration point, and measure the height data from the objective lens to each calibration point;

[0104] Exemplarily, the calibration unit includes a plurality of calibration points.

[0105] exist Figure 4 In the figure, the calibration unit includes multiple calibration points, such as P0, P1, P2, P3, P4, P5, P6, P7, P8, P9, P10, ... Pn, where n is an integer and the distances between two adjacent calibration points P12, P23, P34, P45, P50, P06, P67, P78, ..., Pn-1Pn (N<5 or N>7) can be equal or unequal.

[0106] Exemplarily, the camera unit 4 is used to measure the height data from the objective lens to each calibration point.

[0107] Take point P0 as the calibration reference point. At point P0, the camera unit measures the height data from the objective lens to point P0, which is recorded as H0. During the movement of the workbench L in the X direction, the actuator moves up and down in the Z direction and moves to point P5. At point P5, the camera unit measures the height data from the objective lens to point P5, which is recorded as H5. ..., during the movement of the workbench L in the X direction, the actuator moves up and down in the Z direction and moves to point Pn. At point Pn, the camera unit measures the height data from the objective lens to point Pn, which is recorded as Hn.

[0108] Specifically, the detection unit 3 is used to measure the height data from the detection unit to each calibration point.

[0109] Similarly, with point P0 as the calibration reference point, at point P0, the height data from the detection unit to point P0 is measured, recorded as D0; during the movement of the workbench L in the X direction, the actuator moves up and down in the Z direction and moves to point P5, at point P5, the height data from the detection unit to point P5 is measured, recorded as D5; ..., during the movement of the workbench L in the X direction, the actuator moves up and down in the Z direction and moves to point Pn, at point Pn, the height data from the detection unit to point Pn is measured, recorded as Dn, and there is no requirement for the order.

[0110] (2) judging whether calibration is required based on the height data from the detection unit to each calibration point and the height data from the objective lens to each calibration point, and if so, proceeding to step (3); if not, the calibration ends;

[0111] The difference between H1 and H0 is calculated as H10=H1-H0, the difference between H2 and H0 is calculated as H20=H2-H0, ..., the difference between Hn and H0 is calculated as Hn0=Hn-H0.

[0112] The difference between D1 and D0 is calculated as D10=D1-D0, the difference between D2 and D0 is calculated as D20=H2-H0, ..., the difference between Dn and D0 is calculated as Dn0=Dn-H0.

[0113] The conditions for determining whether calibration is required are:

[0114] Determine whether H10 is equal to D10, whether H20 is equal to D20, ..., whether Hn0 is equal to Dn0;

[0115] When each group of H10 and D10, H20 and D20, ..., Hn0 and Dn0 is equal, no calibration is required before laser processing;

[0116] When at least one of H10 and D10, H20 and D20, ..., Hn0 and Dn0 is not equal, calibration is required before laser processing.

[0117] It can also use the above Figure 5 The calibration unit and calibration method embodiment are the same as above. Figure 5 The contents of the description are the same and will not be repeated here.

[0118] (3) The compensation value is calculated and the calibration is completed.

[0119] Specifically, the compensation values ​​C1, ..., Cn are calculated as follows:

[0120] C1=H10-D10=(H1-H0)-(D1-D0)

[0121] C2=H20-D20=(H2-H0)-(D2-D0) ...

[0122] Cn=Hn0-Dn0=(Hn-H0)-(Dn-D0)

[0123] Therefore, based on the above calibration method, in a fourth aspect, the present invention provides a laser processing method, comprising the following steps:

[0124] Step S10: before laser processing, perform any of the calibration methods described above;

[0125] Step S20: After the calibration in step (3) is completed, the following steps are also included:

[0126] When the product P to be processed is placed on the workbench L for real-time laser processing, the compensation value is used to compensate the height data DTn of the surface of the product P to be processed measured by the detection unit, and the compensated height data Dn' is calculated. The height of the execution unit 2 is adjusted according to the compensated height data Dn' to adjust the focal position of the objective lens 1 for laser processing.

[0127] Among them, Dn' is calculated as follows:

[0128] D1'=DT1+C1

[0129] D2'=DT2+C2 ...

[0130] Dn'=DTn+Cn

[0131] Alternatively, after the calibration in step (2) is completed, the following steps are also included: when the product P to be processed is placed on the workbench L for real-time laser processing, the height of the execution unit 2 is adjusted only according to the height data of the surface of the product P to be processed measured by the detection unit, so as to adjust the focal position of the objective lens 1 for laser processing.

[0132] It should be noted that, in the calibration device and the calibration method, the detection unit can be used to measure the height data from the detection unit itself to each calibration point. In the laser processing device and the laser processing method, the detection unit can also be used to measure the height data from the detection unit itself to the surface P of the product to be processed. Therefore, the detection unit can achieve the purpose of measuring the height data from itself to the calibration point or the surface P of the product to be processed during the calibration before laser processing and during laser processing.

[0133] The present invention proposes a laser processing method of calibration before processing, which greatly optimizes the laser processing method in the prior art. Calibration is first performed to eliminate the influence of the nonlinear error of the workbench on the laser processing, and then laser processing is performed. Such calibration can eliminate in advance the technical problem of inaccurate processing accuracy of the existing height following system, directly further improve the accuracy of laser cutting processing, and ensure the quality of subsequent laser cutting processing. Compared with the prior art, its laser processing quality is more excellent.

[0134] Those skilled in the art will appreciate that the steps, measures, and schemes in the various operations, methods, and processes discussed in this application may be alternated, modified, combined, or deleted. Furthermore, other steps, measures, and schemes in the various operations, methods, and processes discussed in this application may also be alternated, modified, rearranged, decomposed, combined, or deleted.

[0135] Furthermore, the steps, measures, and schemes in the prior art that are similar to the various operations, methods, and processes disclosed in this application may also be alternated, changed, rearranged, decomposed, combined, or deleted.

[0136] In one embodiment, a computer-readable storage medium is provided, on which a computer program is stored. When the computer program is executed by a processor, the steps in the above-mentioned method embodiments are implemented.

[0137] In one embodiment, a computer program product is provided, including a computer program, which implements the steps in the above method embodiments when executed by a processor.

[0138] It should be noted that the user information (including but not limited to user device information, user personal information, etc.) and data (including but not limited to data used for analysis, stored data, displayed data, etc.) involved in the embodiments of the present disclosure are all information and data authorized by the user or fully authorized by all parties.

[0139] Those skilled in the art can understand that all or part of the processes in the above-mentioned embodiments can be completed by instructing the relevant hardware through a computer program, and the computer program can be stored in a non-volatile computer-readable storage medium. When the computer program is executed, it can include the processes of the embodiments of the above-mentioned methods. Among them, any reference to the memory, database or other medium used in the embodiments provided in the embodiments of the present disclosure can include at least one of non-volatile and volatile memory. Non-volatile memory can include read-only memory (ROM), magnetic tape, floppy disk, flash memory, optical memory, high-density embedded non-volatile memory, resistive random access memory (ReRAM), magnetoresistive random access memory (MRAM), ferroelectric random access memory (FRAM), phase change memory (PCM), graphene memory, etc. Volatile memory can include random access memory (RAM) or external cache memory, etc. As an illustration and not limitation, RAM can be in various forms, such as static random access memory (SRAM) or dynamic random access memory (DRAM). The database involved in each embodiment provided in the present disclosure may include at least one of a relational database and a non-relational database. Non-relational databases may include distributed databases based on blockchains, etc., but are not limited thereto. The processor involved in each embodiment provided in the present disclosure may be a general-purpose processor, a central processing unit, a graphics processor, a digital signal processor, a programmable logic device, a data processing logic device based on quantum computing, etc., but are not limited thereto.

[0140] The technical features of the above embodiments may be combined arbitrarily. To make the description concise, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0141] Those skilled in the art will appreciate that the steps, measures, and schemes in the various operations, methods, and processes discussed in this application may be alternated, modified, combined, or deleted. Furthermore, other steps, measures, and schemes in the various operations, methods, and processes discussed in this application may also be alternated, modified, rearranged, decomposed, combined, or deleted.

[0142] Furthermore, the steps, measures, and schemes in the prior art that are similar to the various operations, methods, and processes disclosed in this application may also be alternated, changed, rearranged, decomposed, combined, or deleted.

[0143] The above-described embodiments only express several implementation methods of the embodiments of the present disclosure, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of the patent of the embodiments of the present disclosure. It should be pointed out that, for those of ordinary skill in the art, several variations and improvements can be made without departing from the concept of the embodiments of the present disclosure, and these all belong to the protection scope of the embodiments of the present disclosure. Therefore, the protection scope of the embodiments of the present disclosure shall be subject to the attached claims.

[0144] The above description is only a partial implementation method of the present application. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principles of the present application. These improvements and modifications should also be regarded as the scope of protection of the present application.

Claims

1. A laser processing calibration device, characterized in that: include: A calibration unit, the calibration unit comprising a plurality of calibration points P0, P1, P2, P3, P4, P5, P6, P7, P8, P9, P10, ... Pn; A detection unit, the detection unit is used to measure the height data from the detection unit to each calibration point P0, P1, P2, P3, P4, P5, P6, P7, P8, P9, P10, ... Pn; A camera unit, wherein the camera unit is used to measure the height data from the objective lens to each calibration point P0, P1, P2, P3, P4, P5, P6, P7, P8, P9, P10, ... Pn; Determine whether calibration is required before laser processing according to the height data from the detection unit to each calibration point P0, P1, P2, P3, P4, P5, P6, P7, P8, P9, P10, ... Pn, and the height data from the objective lens to each calibration point P0, P1, P2, P3, P4, P5, P6, P7, P8, P9, P10, ... Pn, where n is an integer; Take point P0 as the calibration reference point. At point P0, the camera unit measures the height data from the objective lens to point P0, recorded as H0; ...; At point Pn, the camera unit measures the height data from the objective lens to point Pn, recorded as Hn; calculate the difference between H1 and H0 H10 = H1-H0, ..., calculate the difference between Hn and H0 Hn0 = Hn-H0; similarly, take point P0 as the calibration reference point. At point P0, measure the height data from the detection unit to point P0, recorded as D0; ...; At point Pn, measure the height data from the detection unit to point Pn, recorded as Dn; calculate the difference between D1 and D0 D10 = D1-D0, ..., calculate the difference between Dn and D0 Dn0 = Dn-H0; The conditions for determining whether calibration is required before laser processing are: Determine whether H10 is equal to D10, whether H20 is equal to D20, ..., whether Hn0 is equal to Dn0; When each group of H10 and D10, H20 and D20, ..., Hn0 and Dn0 is equal, no calibration is required before laser processing; When at least one of H10 and D10, H20 and D20, ..., Hn0 and Dn0 is not equal, calibration is required before laser processing.

2. The calibration device according to claim 1, characterized in that: When calibration is required, the compensation values ​​C1, ..., Cn are calculated as follows: C1=H10-D10=(H1-H0)-(D1-D0) C2=H20-D20=(H2-H0)-(D2-D0) ... Cn=Hn0-Dn0=(Hn-H0)-(Dn-D0).

3. A laser processing device, which uses the calibration device according to claim 1 or 2, characterized in that: include: An execution unit, wherein the execution unit is connected to the objective lens; The control unit is used to adjust the height of the execution unit according to the height data of the surface of the product (P) to be processed measured by the detection unit, so as to adjust the focal position of the objective lens.

4. The laser processing device according to claim 3, characterized in that: After the calibration required before laser processing is completed, the product to be processed (P) is placed on the workbench (L) for real-time laser processing. The height data DTn measured by the detection unit on the surface of the product to be processed (P) is compensated using the compensation value, and the compensated height data Dn' is calculated. The height of the execution unit is adjusted according to the compensated height data Dn' to adjust the focal position of the objective lens, wherein D1', ..., Dn' are calculated as follows: D1'=DT1+C1 D2'=DT2+C2 ... Dn'=DTn+Cn.

5. A laser processing calibration method, using the calibration device according to claim 1 or 2, characterized in that: The following steps are involved: (1) measuring the height data from the detection unit to each calibration point, and measuring the height data from the objective lens to each calibration point; (2) judging whether calibration is required based on the height data from the detection unit to each calibration point and the height data from the objective lens to each calibration point, and if so, proceeding to step (3); if not, the calibration ends; (3) The compensation value is calculated and the calibration is completed.

6. The calibration method according to claim 5, characterized in that: In the step (1): Take point P0 as the calibration reference point. At point P0, the camera unit measures the height data from the objective lens to point P0, which is recorded as H0; ...; at point Pn, the camera unit measures the height data from the objective lens to point Pn, which is recorded as Hn; similarly, take point P0 as the calibration reference point. At point P0, the height data from the detection unit to point P0 is measured, which is recorded as D0; ...; at point Pn, the height data from the detection unit to point Pn is measured, which is recorded as Dn.

7. The calibration method according to claim 5, characterized in that: In step (2): Calculate the difference between H1 and H0: H10=H1-H0, ..., calculate the difference between Hn and H0: Hn0=Hn-H0; Calculate the difference between D1 and D0: D10=D1-D0, ..., calculate the difference between Dn and D0: Dn0=Dn-H0; The conditions for determining whether calibration is required are: Determine whether H10 is equal to D10, whether H20 is equal to D20, ..., whether Hn0 is equal to Dn0; When each group of H10 and D10, H20 and D20, ..., Hn0 and Dn0 is equal, no calibration is required before laser processing; When at least one of H10 and D10, H20 and D20, ..., Hn0 and Dn0 is not equal, calibration is required before laser processing.

8. A laser processing method, characterized in that: The following steps are involved: Step S10: before laser processing, executing the calibration method described in claim 5; Step S20: After the calibration in step (3) is completed, the following steps are further included: placing the product (P) to be processed on the workbench (L) for real-time laser processing, using the compensation value to compensate the height data of the surface of the product (P) to be processed measured by the detection unit, calculating the compensated height data, and adjusting the height of the execution unit according to the compensated height data to adjust the focal position of the objective lens for laser processing; Or, when the result in step (2) is no, after the calibration is completed, the following steps are also included: when the product to be processed (P) is placed on the workbench (L) for real-time laser processing, the height of the execution unit is adjusted only according to the height data of the surface of the product to be processed (P) measured by the detection unit, so as to adjust the focal position of the objective lens for laser processing.

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