Substrate storage container
By designing a combined structure of a cover-side substrate support and a substrate edge auxiliary part in the substrate storage container, the problems of easy damage and cross-insertion of the substrate under impact are solved, achieving effective protection and improved stability of the substrate.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- MIRAIAL CO LTD
- Filing Date
- 2020-05-19
- Publication Date
- 2026-07-07
AI Technical Summary
Existing substrate storage containers are prone to substrate breakage when subjected to impact, and there is a phenomenon of substrate detaching from the front retaining member and inserting into adjacent positions.
A substrate storage container is designed, which adopts a combination structure of a substrate support part on the cover side and a substrate edge auxiliary part. The substrate edge auxiliary part has an auxiliary groove. The substrate edge is inserted into the auxiliary groove in a non-contact state to avoid surface contact with the groove, and the substrate is protected by elastic displacement to suppress cross insertion.
It effectively protects the substrate from impact damage and suppresses cross-insertion, thus improving the safety and stability of the substrate.
Smart Images
Figure CN115605412B_ABST
Abstract
Description
Technical Field
[0001] This invention relates to substrate storage containers used for storing, storing, handling, and transporting substrates made of semiconductor wafers, etc. Background Technology
[0002] As a substrate storage container for storing and transporting substrates made of semiconductor wafers, a substrate storage container having a container body and a lid is known in the past.
[0003] The container body has a cylindrical wall portion with an opening at one end and closed at the other end. A substrate storage space is formed within the container body. This substrate storage space, surrounded by the wall portion, is capable of accommodating multiple substrates. A lid is detachable from the container body opening and can close the opening.
[0004] A front retainer is provided on a portion of the lid, opposite the substrate storage space, when the container body opening is closed. The front retainer supports the edges of multiple substrates when the container body opening is closed by the lid. A rear retainer is provided on the wall in pair with the front retainer. The rear retainer supports the edges of multiple substrates. When the container body opening is closed by the lid, the rear retainer, in cooperation with the front retainer, supports multiple substrates, holding them in a state where adjacent substrates are separated and arranged at predetermined intervals.
[0005] The front retaining member has multiple grooves recessed in a direction away from the substrate storage space (see, for example, Patent Documents 1, 2, and 3). In the conventional substrate storage container described in the aforementioned publication, when the opening of the container body is closed by the lid and the substrate stored in the substrate storage space is transported, the end of the substrate is always in contact with the front retaining member. Therefore, when transporting the substrate using the substrate storage container, the substrate is easily damaged at the front retaining member when the substrate storage container is subjected to impact.
[0006] Patent Document 1: Japanese Patent No. 4903893
[0007] Patent Document 2: Japanese Patent No. 4412235
[0008] Patent Document 3: Japanese Patent No. 5483351 Summary of the Invention
[0009] In recent years, there has been a demand for further substrate protection against impacts acting on substrate storage containers. Furthermore, there is a strong demand for a so-called "cross slot" configuration that prevents the substrate supported at a predetermined position on the front retaining member from detaching from that predetermined position and moving to an adjacent position for insertion due to impacts acting on the substrate storage container.
[0010] The purpose of this invention is to provide a substrate storage container that, in the front retaining member, can protect the substrate from impacts acting on the substrate storage container and can suppress cross-insertion.
[0011] This invention relates to a substrate storage container, comprising: a container body having a cylindrical wall portion, the wall portion having a container body opening at one end and being closed at the other end, and a substrate storage space formed by the inner surface of the wall portion capable of storing multiple substrates and communicating with the container body opening; a lid detachable from the container body opening and capable of closing the container body opening; a lid-side substrate support portion disposed on a portion of the lid portion and facing the substrate storage space when the container body opening is closed by the lid portion, capable of supporting the edges of the multiple substrates when the container body opening is closed by the lid portion; and a rear-side substrate support portion disposed opposite to the lid-side substrate support portion within the substrate storage space, capable of supporting the edges of the multiple substrates. When the container body opening is closed by the cover, the cover-side substrate support supports the plurality of substrates with their edges aligned. A substrate edge auxiliary portion, disposed on a part of the cover and opposite the substrate receiving space when the container body opening is closed by the cover, has multiple auxiliary grooves. These grooves have openings wider than the thickness of the substrate edges to allow insertion of substrate edges. The auxiliary grooves have opposing groove forming surfaces, allowing insertion of the substrate edges one by one, at least when the container body opening is closed by the cover. Furthermore, relative to the central axis of the cylindrical wall, the auxiliary portion is positioned circumferentially outside or inside the substrate edges, closer to the cover-side substrate support.
[0012] When the container body opening is closed by the cover, the auxiliary groove is inserted in a non-contact state where the edge of the substrate forms a space between the edge of the substrate and the groove forming surface and the edge of the substrate does not contact the groove forming surface.
[0013] Preferably, the cover side substrate support portion corresponding to the same substrate is connected to the substrate edge auxiliary portion.
[0014] Preferably, the groove forming surface is generally a straight plane, and the angle between the surface or back of the substrate and the groove forming surface is less than 30 degrees.
[0015] Preferably, the substrate storage container includes side substrate support portions arranged in pairs within the substrate storage space. When the container body opening is not closed by the cover, the support portions can support the edges of the plurality of substrates in a state where adjacent substrates are separated from each other at a predetermined interval. The auxiliary groove has a depth such that when the container body opening is not closed by the cover and the edges of the plurality of substrates are supported by the side substrate support portions, the edges of the substrates are not inserted into the auxiliary groove; when the container body opening is closed by the cover, the edges of the substrates are inserted into the auxiliary groove.
[0016] Preferably, when the container body opening is closed by the cover, the cover side substrate support portion can be elastically displaced by a first displacement in the direction from the other end of the container body toward one end, and when the container body opening is closed by the cover, the substrate edge auxiliary portion can be elastically displaced by a second displacement smaller than the first displacement in the direction from the other end of the container body toward one end.
[0017] According to the present invention, a substrate storage container can be provided, wherein the front retaining member can protect the substrate from impacts acting on the substrate storage container and can suppress cross-insertion. Attached Figure Description
[0018] Figure 1 This is an exploded perspective view showing a state in which multiple substrates W are stored in the substrate storage container 1 of the first embodiment of the present invention.
[0019] Figure 2 This is a perspective view of the container body 2 of the substrate storage container 1 according to the first embodiment of the present invention.
[0020] Figure 3 This is a perspective view of the cover 3 of the substrate storage container 1 according to the first embodiment of the present invention.
[0021] Figure 4 This is a perspective view showing the front holding member 7 of the substrate storage container 1 according to the first embodiment of the present invention.
[0022] Figure 5 This is a partial front view of the front holding member 7 of the substrate storage container 1 according to the first embodiment of the present invention.
[0023] Figure 6 yes Figure 5The AA-line sectional view shown.
[0024] Figure 7A yes Figure 6 The BB line section view shown.
[0025] Figure 7B yes Figure 6 The CC-line sectional view shown.
[0026] Figure 8 This is a top sectional view showing the positional relationship between the substrate storage container 1 and the substrate W in the closed state.
[0027] Figure 9 yes Figure 8 A magnified view of a part (and) Figure 6 (Corresponding diagram).
[0028] Figure 10A yes Figure 9 The DD-line cross-sectional view shown.
[0029] Figure 10B yes Figure 9 The EE line section view shown.
[0030] Figure 11 This is a partially enlarged view showing the displacement of the cover-side substrate support and the auxiliary part of the substrate edge in the open and closed states.
[0031] Figure 12 This is a cross-sectional view of the front retaining member 7A according to the second embodiment of the present invention (and...). Figure 6 (Corresponding diagram).
[0032] Figure 13 This is a cross-sectional view of the front retaining member 7B according to the third embodiment of the present invention (and...). Figure 6 (Corresponding diagram).
[0033] Figure 14 This is a cross-sectional view of the front retaining member 7C according to the fourth embodiment of the present invention (and...). Figure 6 (Corresponding diagram).
[0034] Explanation of reference numerals in the attached figures:
[0035] 1. Substrate storage container
[0036] 2. Container body
[0037] 3. Cover
[0038] 5. Substrate support plate (side substrate support)
[0039] 6. Rear substrate support portion
[0040] 21. Opening of the container body
[0041] 27. Substrate storage space
[0042] 28. Peripheral part of the opening
[0043] 73. Cover side base plate support portion
[0044] 75 Substrate edge auxiliary part
[0045] 76 auxiliary slots
[0046] 761 Opposite surface (groove forming surface)
[0047] 762 Back face (groove forming surface)
[0048] DC Circumferential
[0049] H73 First Displacement
[0050] H75 Second Displacement
[0051] H76 Depth
[0052] J20 central axis
[0053] W substrate
[0054] θ1 Angle
[0055] θ2 angle Detailed Implementation
[0056] [First Implementation Method]
[0057] Hereinafter, the substrate storage container 1 of the first embodiment will be described with reference to the accompanying drawings.
[0058] Figure 1 This is an exploded perspective view showing a state in which multiple substrates W are stored in the substrate storage container 1 of the first embodiment of the present invention. Figure 2 This is a perspective view of the container body 2 of the substrate storage container 1 according to the first embodiment of the present invention.
[0059] For ease of explanation, the direction from the container body 2 towards the lid 3 will be described later. Figure 1 The direction from the upper right to the lower left (as described later) is defined as the forward direction D11, and the opposite direction is defined as the backward direction D12. Together, they are defined as the forward-backward direction D1. Additionally, the direction from the lower wall 24 to the upper wall 23 (described later) is also defined as... Figure 1 The upward direction (as described later) is defined as the upward direction D21, and the opposite direction is defined as the downward direction D22. Together, they are defined as the vertical direction D2. Additionally, the direction from the second sidewall 26 towards the first sidewall 25 (described later) Figure 1The direction from the bottom right to the top left is defined as the left direction D31, the opposite direction as the right direction D32, and the two directions together are defined as the left-right direction D3. The arrows representing these directions are illustrated in the main figure.
[0060] Additionally, the substrate W (refer to) stored in the substrate storage container 1 Figure 1 Substrate W is a disc-shaped silicon wafer, glass wafer, sapphire wafer, etc., and is a thin substrate used in industry. In this embodiment, substrate W is a silicon wafer with a diameter of 300 mm.
[0061] like Figure 1 as well as Figure 2 As shown, the substrate storage container 1 stores a substrate W made of silicon wafers as described above, and serves as a shipping container for transporting the substrate W via land, air, or sea transport. It includes a container body 2 and a cover 3. The container body 2 has a substrate support plate-like portion 5 serving as a side substrate support portion and a rear substrate support portion 6, also referred to as a rear retaining member. The cover 3 has a front retaining member 7, which has a cover-side substrate support portion 73 and a substrate edge auxiliary portion 75 (see reference). Figures 3-6 ).
[0062] like Figure 1 As shown, the container body 2 has a cylindrical wall portion 20 with a container body opening 21 formed at one end and closed at the other end. A substrate storage space 27 is formed within the container body 2. The substrate storage space 27 is formed by being surrounded by the wall portion 20. Figure 2 As shown, a substrate support plate-like portion 5 is disposed in a portion of the wall portion 20 that forms the substrate storage space 27. Figure 1 As shown, multiple substrates W can be stored in the substrate storage space 27.
[0063] The substrate support plate-shaped portions 5 are provided in pairs on the wall portion 20 within the substrate storage space 27. When the container body opening 21 is not closed by the cover 3 (in the open state), the substrate support plate-shaped portions 5 abut against the edges of the multiple substrates W, enabling them to support the edges of the multiple substrates W in a state where adjacent substrates W are separated from each other at a predetermined interval and arranged. A rear substrate support portion 6 is provided on the rear wall 22 (described later) of the wall portion 20 of the container body 2.
[0064] Rear substrate support portion 6 (refer to) Figure 2 (etc.) are placed within the substrate storage space 27 with the front retaining member 7 (see below) described later. Figure 8 The substrates are arranged in pairs on the wall portion 20. When the container body opening 21 is closed by the cover 3 (in the closed state), the rear substrate support portion 6 abuts against the edge portions of the multiple substrates W, thereby supporting the rear portion of the edge portions of the multiple substrates W.
[0065] The cover 3 can be positioned relative to the periphery 28 of the opening that forms the opening 21 of the container body. Figure 1 (etc.) can be disassembled and assembled, and can close the opening 21 of the container body. The front retaining member 7 is provided on a part of the cover 3 and is opposite to the substrate storage space 27 when the container body opening 21 is closed by the cover 3. The front retaining member 7 is arranged in pairs with the rear substrate support 6 inside the substrate storage space 27.
[0066] When the container body opening 21 is closed by the cover 3, the front retaining member 7 abuts against the edges of the plurality of substrates W, thereby supporting the front of the edges of the plurality of substrates W. When the container body opening 21 is closed by the cover 3, the front retaining member 7 cooperates with the rear substrate support 6 to support the plurality of substrates W, thereby holding the substrates W in a state in which adjacent substrates W are separated from each other at a predetermined interval and arranged.
[0067] The substrate storage container 1 is made of resin, such as plastic materials. Examples of resins used as materials include thermoplastic resins such as polycarbonate, cyclic olefin polymers, polyetherimide, polyetherketone, polybutylene terephthalate, polyetheretherketone, and liquid crystal polymers, as well as their alloys. To impart conductivity to the resins of these molding materials, conductive substances such as carbon fibers, carbon powder, carbon nanotubes, and conductive polymers are selectively added. Furthermore, to improve rigidity, glass fibers and carbon fibers may also be added.
[0068] The following is a detailed explanation of each part. For example... Figure 1 As shown, the wall portion 20 of the container body 2 has a rear wall 22, an upper wall 23, a lower wall 24, a first side wall 25, and a second side wall 26. The rear wall 22, upper wall 23, lower wall 24, first side wall 25, and second side wall 26 are made of the aforementioned material and are integrally formed.
[0069] The first sidewall 25 and the second sidewall 26 are opposite each other, and the upper wall 23 and the lower wall 24 are opposite each other. The rear ends of the upper wall 23, the lower wall 24, the first sidewall 25, and the second sidewall 26 are all connected to the rear wall 22. The front ends of the upper wall 23, the lower wall 24, the first sidewall 25, and the second sidewall 26 form the periphery of the opening 28, which forms the container body opening 21 with a positional relationship opposite to the rear wall 22 and a generally rectangular shape.
[0070] An opening periphery 28 is provided at one end of the container body 2, and a rear wall 22 is located at the other end of the container body 2. The container body 2, formed by the outer surface of the wall portion 20, has a box-shaped shape. The inner surfaces of the wall portion 20, namely the inner surface of the rear wall 22, the inner surface of the upper wall 23, the inner surface of the lower wall 24, the inner surface of the first side wall 25, and the inner surface of the second side wall 26, form a substrate storage space 27 surrounded by them. The container body opening 21 formed in the opening periphery 28 communicates with the substrate storage space 27 surrounded by the wall portion 20 and formed inside the container body 2. Up to 25 substrates W can be stored in the substrate storage space 27.
[0071] like Figure 1 As shown, latching recesses 231A, 231B, 241A, and 241B are formed on a portion of the upper wall 23 and the lower wall 24, near the opening periphery 28, and are recessed outward toward the substrate receiving space 27. One latching recess 231A, 231B, 241A, and 241B is formed near each of the left and right ends of the upper wall 23 and the lower wall 24, for a total of four.
[0072] like Figure 1 As shown, a top flange 236 is fixed to the center of the upper wall 23. The top flange 236 is a component that is hooked and suspended in the substrate storage container 1 when suspending the substrate storage container 1 in AMHS (Automatic Wafer Handling System), PGV (Plane Transport Vehicle), etc.
[0073] The substrate support plate-shaped portions 5 are integrally formed on the first sidewall 25 and the second sidewall 26, and are arranged in pairs in the left-right direction D3. Alternatively, the substrate support plate-shaped portions 5 may be components different from the first sidewall 25 and the second sidewall 26.
[0074] The substrate support plate-shaped portion 5 has a generally arcuate plate shape. Twenty-five substrate support plate-shaped portions 5 are provided on each of the first sidewall 25 and the second sidewall 26 along the vertical direction D2, for a total of 50 portions. Adjacent substrate support plate-shaped portions 5 are arranged in a parallel position, separated from each other by intervals of 10mm to 12mm in the vertical direction D2. Furthermore, above the uppermost substrate support plate-shaped portion 5, another plate-shaped member parallel to the substrate support plate-shaped portion 5 is arranged. This member serves to guide the substrate W, which is located at the uppermost position and inserted into the substrate receiving space 27, during insertion.
[0075] Furthermore, the 25 substrate support plate-like portions 5 disposed on the first sidewall 25 and the 25 substrate support plate-like portions 5 disposed on the second sidewall 26 are positioned opposite each other in the left-right direction D3. Additionally, the 50 substrate support plate-like portions 5 and the plate-like guiding members parallel to the substrate support plate-like portions 5 are positioned parallel to the inner surface of the lower wall 24. Figure 2 As shown, a protrusion is provided on the upper surface of the substrate support plate-shaped portion 5. The substrate W supported on the substrate support plate-shaped portion 5 only contacts the protruding end of the protrusion, and does not contact the substrate support plate-shaped portion 5 in a planar manner.
[0076] The substrate support plate-shaped portion 5 can support the edges of multiple substrates W in a state where adjacent substrates W are separated from each other at a predetermined interval and are in a parallel position to each other.
[0077] The rear substrate support 6 is an internal component provided on the rear wall 22 and disposed within the substrate storage space 27. The structure of the rear substrate support 6 will be briefly described. The rear substrate support 6 has at least a lower inclined surface and an upper inclined surface.
[0078] The lower inclined surface is formed by an inclined surface that extends in an upward direction D21 away from the center of the substrate storage space 27. The end of the back side of the substrate W slides on the lower inclined surface. The upper inclined surface is formed by an inclined surface that extends in an upward direction D21 towards the center of the substrate storage space 27.
[0079] The lower and upper inclined surfaces form a V-shaped groove, which is a recessed groove that allows the end of the substrate W to engage and is located away from the center of the substrate storage space 27. When the container body opening 21 is closed by the cover 3, the substrate W slides and rises relative to the lower inclined surface. When the substrate W reaches the apex of the V-shaped groove, the V-shaped groove supports the edge of the substrate W. Furthermore, the V-shaped groove only needs to be approximately V-shaped when viewed as a whole; additionally, it can have a surface approximately parallel to the D1-D3 plane, a surface approximately parallel to the D2-D3 plane, etc. The rear substrate support 6 can be integral with the rear wall 22.
[0080] Next, the cover 3 and the front retaining member 7 will be described in detail. Figure 3 This is a perspective view of the cover 3 of the substrate storage container 1 according to the first embodiment of the present invention. Figure 4 This is a perspective view showing the front holding member 7 of the substrate storage container 1 according to the first embodiment of the present invention. Figure 5 This is a partial front view of the front holding member 7 of the substrate storage container 1 according to the first embodiment of the present invention.
[0081] like Figure 1As shown, the lid 3 has a generally rectangular shape that substantially matches the shape of the opening periphery 28 of the container body 2. The lid 3 can be attached to and detached from the opening periphery 28 of the container body 2. By attaching the lid 3 to the opening periphery 28, the lid 3 can close the opening 21 of the container body. On the inner surface of the lid 3 ( Figure 1 An annular sealing member 4 is installed on the back side of the cover 3 shown. The sealing member 4 is made of various thermoplastic elastomers such as polyester and polyolefin, fluororubber, and silicone rubber that can be elastically deformed. The sealing member 4 is arranged around the outer periphery of the cover 3.
[0082] When the cover 3 is installed onto the opening periphery 28, the sealing member 4 is held between the opening periphery 28 and the inner surface of the cover 3 and deforms elastically, so that the cover 3 seals the container body opening 21 in a sealed state. By removing the cover 3 from the opening periphery 28, the substrate W can be removed or placed into the substrate storage space 27 inside the container body 2.
[0083] The cover 3 has a main body shaped like the cover 3, and a latching mechanism is provided on the main body. The latching mechanism is located near the left and right ends of the main body, such as... Figure 1 As shown, the cover body has two upper latching portions 32A that protrude upwards in a direction D21 from the top edge of the cover body, and two lower latching portions 32B that protrude downwards in a direction D22 from the bottom edge of the cover body. The two upper latching portions 32A are located near the left and right ends of the top edge of the cover body, and the two lower latching portions 32B are located near the left and right ends of the bottom edge of the cover body.
[0084] An operating part 33 is provided on the outer surface of the main body of the cover. By operating the operating part 33 from the front of the main body of the cover, the upper latch part 32A and the lower latch part 32B can be made to protrude from the top and bottom of the main body of the cover, or to be in a state where they do not protrude from the top and bottom.
[0085] The upper latch portion 32A protrudes upward from the upper side of the cover body in the direction of D21 and engages with the latch engagement recesses 231A and 231B of the container body 2, and the lower latch portion 32B protrudes downward from the lower side of the cover body in the direction of D22 and engages with the latch engagement recesses 241A and 241B of the container body 2, thereby fixing the cover 3 to the opening periphery 28 of the container body 2.
[0086] like Figure 3 As shown, a recess 34 is formed on the inner side of the cover body that constitutes the cover body 3, recessed towards the outer side (front direction D11) of the substrate receiving space 27. The front retaining member 7 is fixedly provided on the cover body portion inside the recess 34.
[0087] Figure 6 yes Figure 5The AA-line sectional view shown. Figure 7A yes Figure 6 The BB line section view shown. Figure 7B yes Figure 6 The CC-line sectional view shown. Figure 8 This is a top sectional view showing the positional relationship between the substrate storage container 1 and the substrate W in the closed state. Figure 9 yes Figure 8 A magnified view of a part (and) Figure 6 (Corresponding diagram). Figure 10A yes Figure 9 The DD-line cross-sectional view shown. Figure 10B yes Figure 9 The EE line section view shown. Figure 11 This is a partially enlarged view showing the displacement of the cover-side substrate support and the auxiliary part of the substrate edge in the open and closed states.
[0088] like Figures 4 to 11 As shown, the front retaining member 7 has a cover-side substrate support portion 73, a substrate edge auxiliary portion 75, a foot portion 72, and a longitudinal frame 71. The cover-side substrate support portion 73 and the substrate edge auxiliary portion 75, which are corresponding to the same substrate W, are connected via the foot portion 72.
[0089] Two cover-side substrate support portions 73 are arranged in pairs, spaced apart at predetermined intervals in the left-right direction D3. Thus, the two pairs of cover-side substrate support portions 73 are arranged in 25 pairs in the vertical direction D2, each supported by elastically deformable legs 72. The legs 72 extend along the left-right direction D3, separating from each of the two cover-side substrate support portions 73, and are bent forward in the forward direction D11. Furthermore, as... Figure 4 , Figure 5 As shown, a longitudinal frame 71 extending parallel to the vertical direction D2 is integrally formed with the foot 72 at the end of the foot 72. By storing the substrate W in the substrate storage space 27 and closing the cover 3, the substrate support portion 73 on the cover side uses the elastic force of the foot 72 to clamp and support the edge of the substrate W with a force applied toward the center of the substrate storage space 27.
[0090] like Figure 7A as well as Figure 10A As shown, the cover side substrate support portion 73 has an upper inclined surface 731 and a lower inclined surface 732.
[0091] When the container body opening 21 is closed by the cover 3, the upper inclined surface 731 abuts against the edge of the surface (upper surface) of the substrate W. The lower inclined surface 732 abuts against the edge of the back surface (lower surface) of the substrate W. Specifically, the upper inclined surface 731 is formed by an inclined surface that extends inclined towards the center of the substrate storage space 27 in the front-rear direction D1 along the upward direction D21. The lower inclined surface 732 is formed by an inclined surface that extends inclined away from the center of the substrate storage space 27 in the front-rear direction D1 along the upward direction D21. The upper inclined surface 731 and the lower inclined surface 732 form a V-shaped groove 74, which is a recessed groove that is recessed away from the center of the substrate storage space 27. When the container body opening 21 is closed by the cover 3, the edge of the surface of the substrate W and the edge of the back surface of the substrate W abut against the upper inclined surface 731 and the lower inclined surface 732, respectively.
[0092] Two substrate edge auxiliary portions 75 are arranged in pairs, spaced apart at a predetermined interval in the left-right direction D3. Thus, the two substrate edge auxiliary portions 75 are arranged in pairs, forming 25 pairs in the vertical direction D2, and each is supported by a foot 72. In this embodiment, the substrate edge auxiliary portions 75 are arranged in the left-right direction D3 between the cover-side substrate support portion 73 and the vertical frame 71.
[0093] The substrate edge auxiliary portion 75 is disposed on a part of the cover 3 and is the portion opposite to the substrate storage space 27 when the container body opening 21 is closed by the cover 3. A plurality of auxiliary grooves 76 are formed in the substrate edge auxiliary portion 75. These auxiliary grooves 76 have openings wider than the thickness of the edge portion of the substrate W, allowing insertion into the edge portion of the substrate W. The groove forming surface of the auxiliary grooves 76 has a surface facing portion 761, a back facing portion 762, and a bottom portion 763.
[0094] like Figure 10B As shown, when the container body opening 21 is closed by the cover 3, the edge of the substrate W is inserted into the auxiliary groove 76 in a non-contact state, where a space is formed between the edge of the substrate W and the groove forming surface (surface opposing surface 761, back opposing surface 762, bottom surface 763) of the auxiliary groove 76, and the edge of the substrate W does not contact the groove forming surface.
[0095] like Figure 7B as well as Figure 10B As shown, the auxiliary groove 76 has a generally rectangular shape when viewed in cross-section. The auxiliary groove 76 has opposing groove-forming surfaces (facing surface 761 and facing back surface 762). At least when the container body opening 21 is closed by the cover 3, the edges of the plurality of substrates W are inserted into the auxiliary groove 76 one by one. Furthermore, as... Figure 6As shown, the auxiliary groove 76 is disposed on the outer side of the circumferential DC of the cylindrical wall portion 20 relative to the central axis J20 of the cylindrical wall portion 20, which is closer to the edge of the substrate W of the cover side substrate support portion 73.
[0096] When the container body opening 21 is closed by the cover 3, the surface-facing portion 761 is positioned approximately parallel to the surface W1 of the substrate W, and a portion of the surface-facing portion 761 is opposite to the surface W1 in the direction connecting the surface W1 and the back surface W2, i.e., the vertical direction D2. When the container body opening 21 is closed by the cover 3, the back-facing portion 762 is positioned approximately parallel to the back surface W2 of the substrate W, and a portion of the back-facing portion 762 is opposite to the back surface W2 in the direction connecting the surface W1 and the back surface W2, i.e., the vertical direction D2. The bottom portion 763 forms the bottom of the auxiliary groove 76 and is connected to both the surface-facing portion 761 and the back-facing portion 762.
[0097] The surface-facing face 761 and the back-facing face 762 are generally flat. The surface-facing face 761 and the back-facing face 762 are a pair of slightly inclined surfaces that are slightly widened as the opening 764 of the auxiliary groove 76 approaches from the bottom of the auxiliary groove 76. The angle θ1 between the surface W1 of the substrate W and the surface-facing face 761 and / or the angle θ2 between the back surface W2 and the back-facing face 762 is, for example, 30 degrees or less, preferably 15 degrees or less.
[0098] The auxiliary slot 76 has the following depth H76 (refer to...) Figure 7B When the container body opening 21 is not closed by the cover 3 and the edges of multiple substrates W are not supported by the substrate support plate 5 which serves as a side substrate support, the edges of the substrates W are not inserted into the auxiliary groove 76 (see reference). Figure 7B On the other hand, when the container body opening 21 is closed by the cover 3, an auxiliary groove 76 is inserted into the edge of the substrate W (see reference). Figure 10B ).
[0099] like Figure 11 As shown, when the container body opening 21 is closed by the lid 3, the lid-side substrate support 73 of the front retaining member 7 can be elastically displaced by a first displacement H73 in the direction from the other end of the container body 2 toward one end (forward direction D11). When the container body opening 21 is closed by the lid 3, the substrate edge auxiliary part 75 can be elastically displaced by a second displacement H75, which is smaller than the first displacement H73, in the direction from the other end of the container body 2 toward one end (forward direction D11).
[0100] Next, in the aforementioned substrate storage container 1, the operation of storing the substrate W in the substrate storage space 27 and closing the container body opening 21 with the cover 3 will be described.
[0101] First, such as Figure 1 As shown, the container body 2 is arranged so that the front-to-back direction D1 and the left-to-right direction D3 are parallel to the horizontal plane. Next, multiple substrates W are placed on the lower inclined surfaces of the substrate support plate 5 and the rear substrate support 6. At this time, as... Figures 6-7B As shown, the substrate W is not located in the V-shaped groove 74 of the substrate support portion 73 on the cover side and the auxiliary groove 76 of the substrate edge auxiliary portion 75 (they do not overlap when viewed from above).
[0102] Next, as Figures 8 to 10A As shown, the lid 3 is brought close to the opening 21 of the container body, and the lower inclined surface 732 of the front retaining member 7 abuts against the edge of the back (lower surface) of the substrate W, and the upper inclined surface 731 of the front retaining member 7 abuts against the edge of the surface of the substrate W. Then, if the lid 3 is brought further close to the opening 21 of the container body, the substrate W is pressed backward in the direction D12 by the lower inclined surface 732 and the upper inclined surface 731 of the front retaining member 7 at the front, and pressed forward in the direction D11 by abutting against the rear substrate support 6 at the rear, thus being held clamped from the front direction D11 and the rear direction D12. The rear side (rear direction D12 side) of the substrate W moves in the vertical direction D2, while the opening side (front direction D11 side) of the substrate W does not move in the vertical direction D2. At this time, as... Figure 10B As shown, the substrate W is located in the auxiliary groove 76 of the auxiliary part 75 at the edge of the substrate (overlapping when viewed from above).
[0103] Then, the substrate storage container 1 is rotated 90° so that the opening 21 of the container body faces the vertical direction for transport, or it is transported without rotating 90° while keeping the opening 21 of the container body facing the horizontal direction.
[0104] During the transport of the substrate storage container 1 containing the substrate W, if an impact is applied to the substrate storage container 1 from the outside, the substrate W, which is in contact with the V-groove 74 of the cover-side substrate support portion 73, may detach from the V-groove 74. Even in this case, the substrate W is difficult to detach from the auxiliary groove 76 of the substrate edge auxiliary portion 75 because it does not contact the auxiliary groove 76 of the substrate edge auxiliary portion 75. Therefore, it is possible to prevent the substrate W from detaching from the cover-side substrate support portion 73, i.e., from cross-insertion.
[0105] According to the substrate storage container 1 of the first embodiment having the above-described configuration, the following effects can be obtained.
[0106] The substrate storage container 1 according to the first embodiment includes: a container body 2, having a cylindrical wall portion 20 with a container body opening 21 formed at one end and closed at the other end, and a substrate storage space 27 formed on the inner surface of the wall portion 20, the substrate storage space 27 being capable of storing multiple substrates W and communicating with the container body opening 21; a cover 3, which is detachable from the container body opening 21 and capable of closing the container body opening 21; and a cover-side substrate support portion 73, which is disposed on a part of the cover 3 and is the portion opposite to the substrate storage space 27 when the container body opening 21 is closed by the cover 3, and is capable of supporting multiple substrates W when the container body opening 21 is closed by the cover 3. The substrate W has an edge portion; a rear substrate support portion 6, arranged in pairs with the cover-side substrate support portion 73 within the substrate storage space 27, capable of supporting the edges of multiple substrates W, cooperating with the cover-side substrate support portion 73 when the container body opening 21 is closed by the cover 3, supporting multiple substrates W with their edges arranged; and a substrate edge auxiliary portion 75, disposed in a part of the cover 3 and opposite to the substrate storage space 27 when the container body opening 21 is closed by the cover 3, having formed multiple auxiliary grooves 76, each auxiliary groove 76 having an opening wider than the thickness of the edge portion of the substrate W, so that the edge portion of the substrate W can be inserted. The multiple auxiliary grooves 76 have opposing groove forming surfaces 761, 762, and at least when the container body opening 21 is closed by the cover 3, the edges of multiple substrates W are inserted one by one. Furthermore, relative to the central axis J20 of the cylindrical wall portion 20, it is disposed outside the circumferential DC of the edge portion of the substrate W, closer to the cover-side substrate support portion 73. When the container body opening 21 is closed by the cover 3, the edge of the substrate W is inserted into the auxiliary groove 76 in a non-contact state where a space is formed between the edge of the substrate W and the groove forming surfaces 761 and 762 and the edge of the substrate W does not contact the groove forming surfaces 761 and 762.
[0107] Based on the above configuration, during the transport of the substrate storage container 1 containing the substrate W, even if an impact is applied to the substrate storage container 1 from the outside, and the substrate W, which is in contact with the cover-side substrate support 73, tries to detach from the cover-side substrate support 73, it is difficult for the substrate W to detach from the auxiliary groove 76 of the substrate edge auxiliary portion 75 because the substrate W does not contact the auxiliary groove 76 of the substrate edge auxiliary portion 75. Therefore, the substrate W can be protected against impacts acting on the substrate storage container 1, and the detachment of the substrate W from the cover-side substrate support 73, i.e., cross-insertion, can be prevented.
[0108] In addition, the cover side substrate support portion 73 and the substrate edge auxiliary portion 75 corresponding to the same substrate W are connected.
[0109] According to the above configuration, for the cover-side substrate support portion 73 and the substrate edge auxiliary portion 75 corresponding to the same substrate W, if the substrate W presses down on the cover-side substrate support portion 73 and causes it to shift, the substrate edge auxiliary portion 75 will also shift in conjunction. Therefore, the cover-side substrate support portion 73 and the substrate edge auxiliary portion 75 are arranged in conjunction with each other in a position suitable for performing their respective main functions.
[0110] Furthermore, the substrate storage container 1 of the first embodiment includes a side substrate support portion (substrate support plate-like portion 5), which is arranged in pairs within the substrate storage space 27. When the container main body opening 21 is not closed by the cover 3, it can support the edges of multiple substrates W in a state where adjacent substrates W are separated from each other at a predetermined interval and arranged. The auxiliary groove 76 has a depth H76 such that when the container main body opening 21 is not closed by the cover 3 and the edges of multiple substrates W are supported by the side substrate support portion (substrate support plate-like portion 5), the edges of the substrates W are not inserted into the auxiliary groove 76; when the container main body opening 21 is closed by the cover 3, the edges of the substrates W are inserted into the auxiliary groove 76.
[0111] According to the above configuration, when the edges of multiple substrates W are supported by the side substrate support portion (substrate support plate-shaped portion 5), even if the substrates W move significantly due to an accident, the edge of the substrates W can be prevented from contacting the auxiliary groove 76.
[0112] [Second Implementation]
[0113] Next, the substrate storage container of the second embodiment of the present invention will be described with reference to the accompanying drawings. Figure 12 This is a cross-sectional view of the front retaining member 7A according to the second embodiment of the present invention (and...). Figure 6 (Corresponding diagram).
[0114] like Figure 12 As shown, in the second embodiment, compared to the first embodiment, in the cover-side substrate support portion 73, the substrate edge auxiliary portion 75 is disposed on the inner side of the left-right direction D3 (near the central axis J20 of the wall portion 20). For other configurations of the second embodiment, since they are the same as in the first embodiment, the same reference numerals are used to illustrate the same components and descriptions are omitted.
[0115] [Third Implementation Method]
[0116] Next, the substrate storage container of the third embodiment of the present invention will be described with reference to the accompanying drawings. Figure 13 This is a cross-sectional view of the front retaining member 7B according to the third embodiment of the present invention (and...). Figure 6 (Corresponding diagram).
[0117] like Figure 13As shown, in the third embodiment, compared to the first embodiment, the width (width in the left-right direction D3) of the substrate edge auxiliary portion 75 in the cover-side substrate support portion 73 is wider. For other configurations in the third embodiment, since they are the same as in the first embodiment, the same reference numerals are used to illustrate the same components and descriptions are omitted.
[0118] [Fourth Implementation Method]
[0119] Next, the substrate storage container of the fourth embodiment of the present invention will be described with reference to the accompanying drawings. Figure 14 This is a cross-sectional view of the front retaining member 7C according to the fourth embodiment of the present invention (and...). Figure 6 (Corresponding diagram).
[0120] like Figure 14 As shown, in the fourth embodiment, compared to the first embodiment, in the cover-side substrate support portion 73, the substrate edge auxiliary portion 75 is disposed inside in the left-right direction D3 (close to the central axis J20 of the wall portion 20), and the cover-side substrate support portion 73 is disposed outside in the left-right direction D3. From another angle, the plurality of auxiliary grooves 76 of the substrate edge auxiliary portion 75 are disposed inside the circumferential direction DC of the edge portion of the substrate W, relative to the central axis J20 of the wall portion 20. For other configurations in the fourth embodiment, since they are the same as in the first embodiment, the same reference numerals are used to illustrate the same components, and descriptions are omitted.
[0121] The present invention is not limited to the above-described embodiments, and modifications can be made within the technical scope described in the claims.
[0122] For example, the shape of the container body and lid, the number and size of the substrates W that can be accommodated in the container body are not limited to the shape of the container body 2 and lid 3, or the number and size of the substrates W that can be accommodated in the container body 2 in this embodiment. That is, the configuration of the side substrate support (substrate support plate 5), the front holding member 7, and the rear substrate support 6 are not limited to the configuration of this embodiment. In addition, the substrate W in this embodiment is a silicon wafer with a diameter of 300 mm, but it is not limited to this value.
Claims
1. A substrate storage container, characterized in that, The substrate storage container includes: The container body has a cylindrical wall, which has an opening at one end and is closed at the other end. The inner surface of the wall forms a substrate storage space that can accommodate multiple substrates and communicates with the opening of the container body. The lid is detachable from the opening of the container body and can close the opening of the container body. A cover-side substrate support portion is disposed on a part of the cover and is the portion opposite to the substrate storage space when the container body opening is closed by the cover. When the container body opening is closed by the cover, the edge portion of the plurality of substrates can be supported. The rear substrate support portion is arranged in pairs with the cover-side substrate support portion within the substrate storage space. It is capable of supporting the edges of the plurality of substrates. When the container body opening is closed by the cover, it cooperates with the cover-side substrate support portion to support the plurality of substrates with the edges of the plurality of substrates aligned. as well as An auxiliary portion for the substrate edge, disposed on a part of the cover and opposite the substrate receiving space when the container body opening is closed by the cover, is formed with a plurality of auxiliary grooves. These auxiliary grooves have openings wider than the thickness of the substrate edge to allow insertion into the substrate edge. The plurality of auxiliary grooves have opposing groove forming surfaces, and are inserted one by one into the edge portions of the plurality of substrates, at least when the container body opening is closed by the cover. Furthermore, relative to the central axis of the cylindrical wall portion, they are arranged circumferentially outside the edge portion of the substrate, closer to the edge portion of the substrate than the substrate support portion on the cover side. When the container body opening is closed by the cover, the auxiliary groove is inserted in a non-contact state where the edge of the substrate forms a space between the edge of the substrate and the groove forming surface and the edge of the substrate does not contact the groove forming surface.
2. The substrate storage container according to claim 1, characterized in that, The cover side substrate support portion and the substrate edge auxiliary portion are connected to the same substrate.
3. The substrate storage container according to claim 1 or 2, characterized in that, The groove forming surface is a straight plane, and the angle between the surface or back of the substrate and the groove forming surface is less than 30 degrees.
4. The substrate storage container according to claim 1 or 2, characterized in that, The substrate storage container includes side substrate support portions, which are arranged in pairs within the substrate storage space. When the container body opening is not closed by the cover, these side substrate support portions can support the edges of the plurality of substrates while adjacent substrates are separated from each other at a predetermined interval and arranged. The auxiliary groove has the following depth: when the container body opening is not closed by the cover and the edges of the plurality of substrates are supported by the side substrate support, the edges of the substrates are not inserted into the auxiliary groove; when the container body opening is closed by the cover, the edges of the substrates are inserted into the auxiliary groove.
5. The substrate storage container according to claim 1 or 2, characterized in that, When the container body opening is closed by the lid, the lid side plate support portion can be elastically displaced by a first displacement in a direction from the other end of the container body toward one end. When the container body opening is closed by the cover, the substrate edge auxiliary portion can be elastically displaced in a direction from the other end of the container body toward one end by a second displacement amount smaller than the first displacement amount.