In-plane two-dimensional translational optical actuator

Abstract

The present application relates to a kind of translational optical actuators, specifically a kind of in-plane two-dimensional translational optical actuators.It overcomes the problem that the volume of existing in-plane two-dimensional translational optical actuators is large and the fatigue life of elastomer is difficult to meet the life demand of elastomer under high resonant frequency long time working condition.It includes a fixed plate, a translational plate, i sets of elastic components located between the fixed plate and the translational plate and connected to the fixed plate and the translational plate at both ends, and j sets of electromagnetic drive components fixed between the fixed plate and the translational plate;The fixed plate is provided with a light transmission area;The translational plate is provided with a light transmission hole for placing an optical element;Each set of elastic components is composed of the same number or different number of elastic elements, and the number of elastic elements in at least one set of elastic components in the i sets of elastic components is greater than or equal to 2;J sets of electromagnetic drive components are arranged in two different directions in the plane, for driving the translational plate to move in two different directions in the plane of the translational plate relative to the fixed plate, to realize the two-dimensional translation of the translational plate.

Description

Technical Field

[0001] This invention relates to a translational optical actuator, specifically an in-plane two-dimensional translational optical actuator. Background Technology

[0002] In-plane two-dimensional translational optical actuators can drive optical elements to perform in-plane two-dimensional translational motion. They are suitable for optical applications requiring in-plane translational motion and can be used as actuators in optical devices such as laser speckle dynamic elimination devices and optical switches. Some high-resonance frequency, long-term operating conditions place stringent requirements on the high-cycle fatigue life of in-plane motion optical actuators, requiring a fatigue life of at least 10 billion cycles. Furthermore, to achieve miniaturization of optical systems, the space for in-plane motion optical actuators in the optical path is often limited. This necessitates miniaturizing the actuator size as much as possible; excessively large sizes would increase the overall volume of the optical system.

[0003] Invention patents (US 2016 / 0306183 A1) and (WO2010078662) disclose in-plane two-dimensional translational optical actuators with magnetoresistive drive structure and electroactive polymer drive structure. The drive structure and elastic component arranged around the translational plate of fixed optical element occupy a large in-plane space. In addition, the driving force of the magnetoresistive drive structure is relatively small, and the high-cycle fatigue life of the electroactive polymer drive structure is also significantly different, making it difficult to apply to high-frequency conditions for a long time. Summary of the Invention

[0004] The purpose of this invention is to provide an in-plane two-dimensional translational optical actuator, which overcomes the problems of large size and difficulty in meeting the fatigue life requirements of the elastomer under high resonant frequency and long-term operating conditions in existing in-plane two-dimensional translational optical actuators.

[0005] The technical solution of this invention is:

[0006] A two-dimensional in-plane translational optical actuator is characterized by comprising a fixed plate, a translational plate, i sets of elastic components located between the fixed plate and the translational plate and connected at both ends to the fixed plate and the translational plate respectively, and j sets of electromagnetic drive components fixed between the fixed plate and the translational plate; wherein i and j are both integers greater than or equal to 2.

[0007] The mounting plate has a light-transmitting area;

[0008] The translation plate is provided with light-transmitting holes for placing optical components;

[0009] The positions of the light-transmitting area and the light-passing aperture must ensure that the light beam can pass through the light-transmitting area and enter the optical element placed in the light-passing aperture;

[0010] Each group of elastic components is composed of elastic elements with the same or different number, and the number of elastic elements in at least one group of elastic components is greater than or equal to 2;

[0011] The j sets of electromagnetic driving assemblies are arranged in two different directions in the plane to drive the moving plate to move relative to the fixed plate in the plane of the moving plate in two different directions, thereby realizing two-dimensional translation of the moving plate.

[0012] Further, each set of electromagnetic driving assemblies comprises a driving coil and a magnet arranged at the driving end of the driving coil.

[0013] The driving coil is arranged on the fixed plate and the magnet is arranged on the moving plate, or the driving coil is arranged on the moving plate and the magnet is arranged on the fixed plate.

[0014] Further, each set of electromagnetic driving assemblies comprises at least two magnets arranged at the two driving ends of the driving coil, and the two magnets have opposite polarities and are located at the axial center line of the driving coil.

[0015] Further, the elastic elements are made of conductive material to provide an electrical signal path for a component (such as an optical element) on the moving plate to the fixed plate, and the resonant frequency of the actuator can be adjusted by adjusting the number of elastic elements.

[0016] Further, in order to make the moving plate translate in the X and Y directions, the number of elastic elements in each group of elastic components is the same, and the i groups of elastic components are symmetric about the central axis of the fixed plate. In order to make the moving plate translate in a direction other than the X and Y directions, the number of elastic elements in each group of elastic components is different, or the position is not symmetric about the central axis of the fixed plate, forming an asymmetric structure, and the translation direction of the moving plate deviates from the X and Y directions and the two directions can be not perpendicular; the translation direction of the translation actuator can be adjusted by adjusting the number of elastic elements in each group of elastic components and the distribution mode of the elastic elements.

[0017] Further, in order to ensure that the moving plate translates in one direction with the same displacement on both sides, j = 4, two sets of electromagnetic driving assemblies form a driving unit, and there are two driving units in total; the two sets of electromagnetic driving assemblies in the same driving unit are used to drive the moving plate to move relative to the fixed plate in the plane of the moving plate in the same direction.

[0018] Further, the above-mentioned in-plane two-dimensional translation optical actuator further comprises a driving coil support seat and a magnet support seat; the driving coil is fixed on the driving coil support seat, and the magnet is fixed on the magnet support seat.

[0019] The driving coil support seat is fixed on the fixed plate, and the magnet support seat is fixed on the moving plate, or the driving coil support seat is fixed on the moving plate, and the magnet support seat is fixed on the fixed plate.

[0020] Furthermore, the drive coil support includes two sets of parallel support arms. One end of the support arm is fixed to a fixed plate or a translational plate, and the other end has a slot. The two drive ends of the drive coil are inserted into the slot to achieve fixation. In one set of drive units, the axial center line of the drive coil of the two sets of electromagnetic drive components is parallel to the X direction, and in the other set of drive units, the axial center line of the drive coil of the two sets of electromagnetic drive components is parallel to the Y direction.

[0021] Furthermore, a light-transmitting hole can be opened in the light-transmitting area of ​​the fixing plate to facilitate the direct passage of light beams to the optical element placed in the light-transmitting hole. In order to provide a path for the driving electrical signals of the device and the electrical signals of the optical element, a PCB circuit board is used as the fixing plate, and the output end of the driving coil can be soldered to the corresponding pad on the fixing plate.

[0022] Furthermore, to reduce the mass of the translation board and achieve a larger displacement under the same driving force, cutouts are made outside the functional area of ​​the translation board. Alternatively, a PCB circuit board can be used as the translation board.

[0023] Furthermore, both the fixed plate and the translational plate are rectangular PCB circuit boards, which are parallel to each other, and the center of the fixed plate and the center of the translational plate are on the same straight line;

[0024] The light-transmitting area of ​​the fixed plate is located at the center of the fixed plate, and the light-transmitting hole of the translational plate is located at the center of the translational plate;

[0025] i=4, the four sets of elastic components are parallel to each other, one end of which is fixed at the four opposite corners of the fixed plate, and the other end is fixed at the four opposite corners of the translation plate; the electromagnetic drive component is located between each pair of adjacent elastic components.

[0026] Furthermore, the drive coil is made by winding wires on the magnetic core, and the cross-section of the magnet is rectangular. When the two-dimensional motion is reduced, the relative position of the magnetic core magnet in the drive structure changes due to the movement in one direction caused by the movement in another direction, which leads to the problem that the driving force in that direction is disturbed.

[0027] The beneficial effects of this invention are:

[0028] 1. The in-plane two-dimensional translational optical actuator of the present invention employs multiple sets of multiple elastic elements as elastic components, ensuring both the resonant frequency and the high high-cycle fatigue life of the elastic components. Simultaneously, the electromagnetic drive assembly is placed between the fixed plate and the translational plate, reducing the in-plane space required by the actuator. Two-dimensional translation is achieved by arranging the electromagnetic drive assembly in two directions.

[0029] 2、The application arranges the opposite polarity magnets on both sides of the driving coil to form the electromagnetic driving assembly with significantly reduced volume, and the two opposite polarity magnets generate the push-pull force under the action of the driving coil, which greatly increases the driving force, so that the actuator is easy to realize large displacement translation.

[0030] 3、The elastic element of conductive material is adopted to provide the elastic restoring force for the actuator and to provide the electrical signal path transmitted to the fixed plate for the component followed by the translation plate, so that the problem of establishing the electrical signal path of the movable component is overcome.

[0031] 4、The number of the elastic elements is adjusted to adjust the resonant frequency of the actuator, and the number and arrangement mode of each group of elastic elements are adjusted to adjust the translation direction of the translation plate, so that the actuator is flexibly applied to various application scenarios.

[0032] 5、The two-dimensional translation is realized by arranging the electromagnetic driving assembly on both sides in two directions, and the arrangement mode of the single-direction double-sided electromagnetic structure unifies the motion amplitude of both sides of the translation plate, and further increases the driving force, so that the large displacement translation is more easily realized.

[0033] 6、The fixed plate and the translation plate in the in-plane two-dimensional translation optical actuator can adopt the PCB circuit board to provide the path for the driving electrical signal of the device and the electrical signal of the optical element. BRIEF DESCRIPTION OF DRAWINGS

[0034] Figure 1 It is a structure schematic view of the in-plane two-dimensional translation optical actuator of the embodiment 1 of the application;

[0035] Figure 2 It is a structure schematic view of the fixed plate in the in-plane two-dimensional translation optical actuator of the embodiment 1 of the application;

[0036] Figure 3 It is a structure schematic view of the translation plate in the in-plane two-dimensional translation optical actuator of the embodiment 1 of the application;

[0037] Figure 4 It is a structure schematic view of the fixed plate, the translation plate and the elastic assembly in the in-plane two-dimensional translation optical actuator of the embodiment 1 of the application;

[0038] Figure 5 It is a view for adjusting the translation direction of the translation plate in the in-plane two-dimensional translation optical actuator of the embodiment 1 of the application by adjusting the number of each group of elastic elements and the distribution mode of the elastic elements; wherein a is a local structure schematic view of the in-plane two-dimensional translation optical actuator after adjusting the number of the elastic elements, and b is a view for the translation direction of the translation plate;

[0039] Figure 6 Figure 1 is a schematic diagram of a partial structure of an in-plane two-dimensional translational optical actuator according to an embodiment of the present application;

[0040] Figure 7 Figure 2 is a schematic diagram of a structure of an electromagnetic driving assembly in the in-plane two-dimensional translational optical actuator according to the embodiment of the present application; wherein (a), (b), (c), and (d) represent different magnet pole arrangement modes;

[0041] Figure 8 Figure 3 is a schematic diagram of a structure of a single electromagnetic driving assembly in the in-plane two-dimensional translational optical actuator according to the embodiment of the present application;

[0042] Figure 9 Figure 4 is a schematic diagram of a connection of all driving coils in the in-plane two-dimensional translational optical actuator according to the embodiment of the present application; wherein in Figure a, each driving coil is connected in series, and in Figure b, driving coils located at opposite sides are connected in parallel;

[0043] Figure 10 Figure 5 is a schematic diagram of a structure of an in-plane two-dimensional translational optical actuator according to another embodiment of the present application;

[0044] In the drawings, the reference signs are as follows:

[0045] 1, fixed plate; 1.2, first light passing hole; 2, driving coil support seat; 3, elastic assembly; 4, driving coil; 5, magnet support seat; 6, magnet; 7, translational plate; 7.2, second light passing hole;

[0046] 1.1-1, 1.1-2, 1.1-3, 1.1-4, 7.1-1, 7.1-2, 7.1-3, and 7.1-4 are all connecting holes;

[0047] 5.1-1, 5.1-2, 5.2-1, 5.2-2, 5.3-1, 5.3-2, 5.4-1, and 5.4-2 are all magnets;

[0048] 6.1-1, 6.1-2, 6.2-1, 6.2-2, 6.3-1, 6.3-2, 6.4-1, and 6.4-2 are all magnet support seats

[0049] 4.1, 4.2, 4.3, and 4.4 are all driving coils. DETAILED DESCRIPTION

[0050] The present application will be further described below in conjunction with the drawings and specific embodiments.

[0051] Embodiment 1

[0052] The in-plane two-dimensional translation optical actuator mainly comprises a fixed plate 1, a translation plate 7, at least two groups of elastic components 3 and at least two sets of driving components. In order to ensure that the elastic component has high high-cycle fatigue life, a plurality of elastic elements are used as the elastic component 3. The two ends of the plurality of elastic elements are fixed on the fixed plate 1 and the translation plate 7 respectively. The driving components are fixed between the fixed plate 1 and the translation plate 7, which greatly reduces the volume of the brake relative to the peripheral arrangement structure. The driving components include a driving coil 4 and a magnet 6. In order to fix the driving coil 4 and the magnet 6, a driving coil support seat 2 and a magnet support seat 5 can also be provided.

[0053] As shown in Figure 1 , the driving coil support seat 2 comprises two groups of parallel support arms, one end of the support arm is fixed on the fixed plate, the other end is provided with a clamping groove, the two ends of the driving coil 4 are clamped into the clamping groove to realize fixation; the upper end of the elastic element of the elastic component 3 is connected with the fixed plate 1, and the lower end is connected with the translation plate 7; the magnet support seat 5 is connected with the translation plate 7 to provide support for the magnet 6, and the magnet 6 is arranged on the corresponding support structure on the magnet support seat 6 and is arranged in the center of the driving coil 4.

[0054] As shown in Figure 2 , the rectangular fixed plate is used in the embodiment, connection holes 1.1-1, 1.1-2, 1.1-3 and 1.1-4 are provided at four corners of the fixed plate, which are used for connecting with the upper ends of the elastic elements in the four groups of elastic components 3 to fix the upper end of the elastic component 3; a first light transmission hole 1.2 is also provided in the center of the fixed plate to avoid the fixed plate 1 from blocking the light beam. In other embodiments, the first light transmission hole can not be provided, and the corresponding area of the fixed plate first light transmission hole can be provided with a light transmission material. The fixed plate 1 can be a PCB circuit board, which provides a path for the driving electrical signal of the device and the electrical signal of the optical element. The outgoing end of the driving coil 4 can be welded on the corresponding pad of the fixed plate 1, which is also convenient for making a small electrical connection hole for a small elastic element.

[0055] As shown in Figure 3As shown, in this embodiment, the translational plate 7 can also be rectangular. Connecting holes 7.1-1, 7.1-2, 7.1-3, and 7.1-4 are also provided at the four opposite corners of the rectangular translational plate for connecting to the lower ends of each elastic element in the four sets of elastic components 3, thereby fixing the lower ends of the elastic components 3. The connecting holes 7.1-1, 7.1-2, 7.1-3, and 7.1-4 correspond one-to-one with the connecting holes 1.1-1, 1.1-2, 1.1-3, and 1.1-4 on the fixing plate 1. A second light-transmitting hole 7.2 is also provided on the translational plate 7 for placing optical elements. The position and size of the second light-transmitting hole 7.2 and the first light-transmitting hole 7.1 need to ensure that the light beam can pass through the first light-transmitting hole 7.1 and be incident on the optical element placed in the second light-transmitting hole 7.2. The translational plate 7 is hollowed out outside the functional area to reduce the mass of the translational plate 7. The translation board 7 can provide a path for the driving electrical signals of devices and the electrical signals of optical components on the PCB circuit board, and facilitate the creation of tiny electrical connection holes for small elastic elements.

[0056] like Figure 4 As shown, this embodiment includes four sets of elastic components 3, defined as elastic component 3.1, elastic component 3.2, elastic component 3.3, and elastic component 3.4, respectively. Each set of elastic components 3 includes multiple elastic elements. The upper end of the elastic element is connected to the corresponding connection holes 1.1-1, 1.1-2, 1.1-3, and 1.1-4 of the fixed plate 1, and the lower end is connected to the corresponding connection holes 7.1-1, 7.1-2, 7.1-3, and 7.1-4 of the translation plate 7, providing elastic restoring force for the actuator. In this embodiment, the elastic elements constituting the elastic components 3 are made of conductive materials, such as piano wire, stainless steel wire, beryllium copper wire, titanium wire, and other high-strength metal wires, providing an electrical signal path for the component moving on the translation plate 7 to be transmitted to the fixed plate 1. In the four sets of elastic components 3, at least one set of elastic elements has a quantity of more than or equal to 2. Multiple elastic elements distribute the stress generated by translation evenly. Under the same free length and translational displacement of the elastic element, the stress borne by a single elastic element is greatly reduced, effectively improving the high-cycle fatigue life of the device. At the same time, it increases the number of electrical signal paths that the moving parts can transmit to the fixed plate 1.

[0057] Figure 4 In the elastic component 3, the number of elastic elements in each group is the same and their positions are symmetrical about the center of the two-dimensional translational optical actuator in the entire plane. The translational direction of the translational plate 7 is the direction in which X and Y are perpendicular to each other. By adjusting the number of elastic elements, the stiffness of the elastic component 3 and the resonant frequency of the actuator can be adjusted.

[0058] The translational direction of the translational plate can be adjusted by changing the number of elastic elements in each group of the elastic assembly or by adjusting the arrangement of the elastic components. Figure 5As shown, the number of elastic elements in each group of elastic components 3 is different or their positions are not symmetrical about the center of the entire translational plate, forming an asymmetrical structure. The translational direction of the translational plate deviates from the X and Y directions, and the two directions may not be perpendicular. Figure 5 In the middle, adjust the number and position of elastic element 3.1 and elastic element 3.3 to adjust the translational direction of the actuator to the X' and Y' directions.

[0059] Figure 6 As shown, the drive coil 4 is made of wire wound on a magnetic core. Magnets 5.1-1, 5.1-2, 5.2-1, 5.2-2, 5.3-1, 5.3-2, 5.4-1 and 5.4-2 are placed on the support structures of magnet support seats 6.1-1, 6.1-2, 6.2-1, 6.2-2, 6.3-1, 6.3-2, 6.4-1 and 6.4-2 respectively, and are aligned with the centers of the corresponding drive coils 4.1, 4.2, 4.3 and 4.4, forming four sets of bilaterally symmetrical electromagnetic drive structures.

[0060] The cross-sections of the magnetic core and magnet 6 are square or rectangular. Preferably, the cross-section of magnet 6 is rectangular. This reduces the problem that when two-dimensional motion occurs, the relative position of the magnetic core and magnet in the driving structure changes due to the movement in one direction caused by the movement in another direction, which in turn causes the driving force in that direction to be disturbed.

[0061] like Figure 7 As shown, magnets with the same polarity are arranged opposite each other on the same side. One side of the energized coil repels the magnet, while the other side attracts it. The push-pull force drives the magnet to move along the axial direction of the drive coil. As shown in Figure (a), the N poles of magnets 6.1-1, 6.1-2, 6.2-1, 6.2-2, 6.3-1, and 6.4-1 are opposite each other. The magnetic properties of the opposite poles can be interchanged. Figures (b)-(d) show different magnet arrangements.

[0062] The opposing magnetic poles of the magnets corresponding to the opposite coils can be the same or different, as long as the push-pull force generated between the opposite coils and the magnets at the same time is in the same direction. Two magnets located at the same corner, with opposite poles facing each other at a 90° angle, attract each other, making it easy to mount the magnets on the magnet support base, such as... Figure 7 As shown in 7(b) and 7(d). Alternatively, the two magnets located at the same corner can be replaced by a magnet with its magnetic poles oriented at 90°.

[0063] The gaps between the drive coil 4 and the two corresponding magnets 6 are equal, i.e., g1 = g2, and are greater than the amplitude of motion in that direction, such as... Figure 8Optionally, the gap between the driving coil 4 and the two corresponding magnets 6 is not equal, i.e. g1≠g2, so that the translation plate has an initial displacement, which is used to adjust the initial position of the optical element.

[0064] The working principle of the in-plane two-dimensional translation actuator is as follows: the driving signals are applied to the two driving coils 4.1 and 4.3 on the opposite sides, and the pushing and pulling forces in the same direction are formed between the driving coils and the corresponding magnets 6, which push the magnet support 5 to drive the translation plate 7 to translate along the Y direction. The driving signals are applied to the two driving coils 4.2 and 4.4 on the opposite sides, and the pushing and pulling forces in the same direction are formed between the driving coils and the corresponding magnets 6, which push the magnet support 5 to drive the translation plate 7 to translate along the X direction. Thus, the translation plate 7 drives the optical element to translate along the two perpendicular directions of X and Y. The resonance frequency and the translation direction of the actuator are adjusted by adjusting the number and position of the elastic elements of the elastic assembly 3.

[0065] As shown in Figure 9 The two driving coils 4.1 and 4.3 on the opposite sides can be connected in series or in parallel, and the driving forces in the same direction are formed on the two sides. Similarly, the driving coils 4.2 and 4.4 can be connected in series or in parallel.

[0066] Embodiment 2

[0067] As shown in Figure 10As shown, the in-plane two-dimensional translation optical actuator of the embodiment comprises a fixed plate 1, a drive coil support 2, an elastic assembly 3 composed of multiple groups of multiple elastic elements, a drive coil 4, a magnet support 5, a magnet 6 and a translation plate 7. The magnet support 5 is connected with the fixed plate 1 to provide support for the magnet 6, which is placed on the corresponding support structure of the magnet support 6; the drive coil support 2 is connected with the translation plate 7 to provide support for the drive coil 4, which is placed on the corresponding support structure of the drive coil support 2 and arranged in the center with the magnet 6; the elastic elements of the elastic assembly 3 are connected with the fixed plate 1 at the upper end and connected with the translation plate 7 at the lower end. The outgoing ends of the drive coil 4 are welded on the corresponding pads of the translation plate 7, and the drive electrical signal is introduced into the electrical signal channel of the fixed plate 1 through the elastic assembly 3 from the translation plate 7. The working principle of the in-plane two-dimensional translation actuator is as follows: the drive signals are applied on the two drive coils 4.1 and 4.3 on the opposite sides, the push-pull force in the same direction is formed between the drive coils and the corresponding magnets 6, which pushes the drive coil support 2 to drive the translation plate 7 to translate along the Y direction. The drive signals are applied on the two drive coils 4.2 and 4.4 on the opposite sides, the push-pull force in the same direction is formed between the drive coils and the corresponding magnets 6, which pushes the drive coil support 2 to drive the translation plate 7 to translate along the X direction. Thus, the translation plate 7 drives the optical element to translate along the X and Y directions perpendicular to each other. The resonance frequency and translation direction of the actuator are adjusted by adjusting the number and position of each group of elastic elements of the elastic assembly 3.

Claims

1. An in-plane two-dimensional translational optical actuator, characterized in that: It includes a fixed plate (1), a translational plate (7), i sets of elastic components (3) located between the fixed plate (1) and the translational plate (7) and connected at both ends to the fixed plate (1) and the translational plate (7) respectively, and j sets of electromagnetic drive components fixed between the fixed plate (1) and the translational plate (7); wherein i and j are both integers greater than or equal to 2; The fixed plate (1) has a light-transmitting area; The translation plate (7) is provided with a second light-transmitting hole (7.2) for placing optical components; The position and size of the light-transmitting area and the second light-passing aperture (7.2) must ensure that the light beam can pass through the light-transmitting area and be incident on the optical element placed in the second light-passing aperture (7.2); Each group of elastic components (3) is composed of the same or different number of elastic elements. At least one group of elastic components (3) has more than or equal to 2 elastic elements. The elastic elements are made of conductive material and are used to provide an electrical signal path for the component located on the translation plate (7) to be transmitted to the fixed plate (1). j sets of electromagnetic drive components are arranged in two different directions to drive the translation plate (7) to move relative to the fixed plate (1) in two different directions in the plane where the translation plate (7) is located, so as to realize the two-dimensional translation of the translation plate (7); Each electromagnetic drive assembly includes a drive coil (4) and a magnet (6) arranged at the drive end of the drive coil (4).

2. The in-plane two-dimensional translational optical actuator according to claim 1, characterized in that: The drive coil (4) is disposed on the fixed plate (1) and the magnet (6) is disposed on the translation plate (7); or, the drive coil (4) is disposed on the translation plate (7) and the magnet (6) is disposed on the fixed plate (1).

3. The in-plane two-dimensional translational optical actuator according to claim 2, characterized in that: Each electromagnetic drive assembly includes at least two magnets (6), which are respectively arranged at the two drive ends of the drive coil (4), and the two magnets (6) are opposite in polarity and their centers are located on the axial center line of the drive coil (4).

4. The in-plane two-dimensional translational optical actuator according to claim 3, characterized in that: The number of elastic elements in each group of elastic components (3) is the same, and the i-th group of elastic components (3) is symmetrical about the central axis of the fixed plate (1), or the number of elastic elements in each group of elastic components (3) is different, or the i-th group of elastic components (3) forms an asymmetrical structure.

5. The in-plane two-dimensional translational optical actuator according to any one of claims 1-4, characterized in that: j=4, two electromagnetic drive components form a drive unit, which includes two drive units in total; the two sets of electromagnetic drive components in the same drive unit are used to drive the translation plate (7) to move relative to the fixed plate (1) in the same direction in the plane where the translation plate (7) is located.

6. The in-plane two-dimensional translational optical actuator according to claim 5, characterized in that: It also includes a drive coil support base (2) and a magnet support base (5); the drive coil (4) is fixed on the drive coil support base (2), and the magnet (6) is fixed on the magnet support base (5); The drive coil support (2) is fixed on the fixed plate (1), and the magnet support (5) is fixed on the translation plate (7); Alternatively, the drive coil support (2) is fixed on the translation plate (7), and the magnet support (5) is fixed on the fixed plate (1).

7. The in-plane two-dimensional translational optical actuator according to claim 6, characterized in that: The drive coil support base (2) includes two parallel support arms. One end of the support arm is fixed on the fixed plate (1) or the translation plate (7), and the other end is opened with a slot. The two drive ends of the drive coil (4) are inserted into the slot to achieve fixation. The axial center line of the drive coil (4) of the two sets of electromagnetic drive components in one drive unit is parallel to the X direction, and the axial center line of the drive coil (4) of the two sets of electromagnetic drive components in the other drive unit is parallel to the Y direction.

8. The in-plane two-dimensional translational optical actuator according to claim 7, characterized in that: The light-transmitting area of ​​the fixing plate (1) is provided with a first light-transmitting hole (1.2); the fixing plate (1) is a PCB circuit board, and the output end of the driving coil (4) is soldered to the corresponding pad on the fixing plate (1).

9. The in-plane two-dimensional translational optical actuator according to claim 8, characterized in that: The translation board (7) is a PCB circuit board, and the functional areas of the translation board (7) are hollowed out.

10. The in-plane two-dimensional translational optical actuator according to claim 9, characterized in that: Both the fixed plate (1) and the translation plate (7) are rectangular PCB circuit boards, which are parallel to each other, and the center of the fixed plate (1) and the center of the translation plate (7) are on the same straight line. The light-transmitting area of ​​the fixed plate (1) is located at the center of the fixed plate (1), and the second light-transmitting hole (7.2) of the translational plate (7) is located at the center of the translational plate (7); i=4, the four sets of elastic components (3) are parallel to each other, one end of which is fixed at the four opposite corners of the fixed plate (1), and the other end is fixed at the four opposite corners of the translation plate (7). The electromagnetic drive assembly is located between two adjacent elastic components (3).

11. The in-plane two-dimensional translational optical actuator according to claim 10, characterized in that: The drive coil (4) is made by winding wires on the magnetic core. The end face of the magnetic core is round, rectangular or square. The cross-section of the magnet (6) in the electromagnetic drive assembly that is opposite to the two end faces of the magnetic core is rectangular.

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