A counterweight anti-drift management device
By using a cross-laid layout of X-axis and Y-axis anti-drift components, the problem that existing equipment cannot meet the anti-drift requirements of high thrust and high torque is solved, and stable anti-drift control of the balance block in multiple directions is achieved.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- BEIJING U PRECISION TECH
- Filing Date
- 2021-07-14
- Publication Date
- 2026-07-07
AI Technical Summary
Existing anti-drift management equipment for counterweights cannot meet the anti-drift control requirements for high thrust or high torque.
The system employs a combination of multiple X-axis anti-drift elements and multiple Y-axis anti-drift elements. The X-axis anti-drift elements are distributed along a first direction, while the Y-axis anti-drift elements are distributed along a second direction at an angle to the first direction. The X-axis and Y-axis anti-drift elements are arranged in a cross configuration to provide greater anti-drift braking force and torque.
Effective anti-drift control of the balance block in the X, Y and Rz directions was achieved, improving the stability and reliability of the anti-drift management equipment and meeting the requirements of high thrust and high torque.
Smart Images
Figure CN115616864B_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of photolithography technology for semiconductors, and more specifically, to a balance block anti-drift management device. Background Technology
[0002] The lithography machine is one of the most important ultra-precision equipment in the manufacturing of very large-scale integrated circuits. Among them, the workpiece stage, which is a key subsystem of the lithography machine, largely determines the resolution, overlay accuracy and yield of the lithography machine.
[0003] Workpiece stages typically incorporate counterweight technology to address vibration reduction issues in the overall system. For example, a patented method for anti-drift motion control of a counterweight mass is used, where a long-stroke module is driven by a track-mounted motor. During the movement of the long-stroke module, according to the law of conservation of momentum, the counterweight mass will drift along the X, Y, and Rz directions. The anti-drift management device consists of two two-axis manipulators symmetrically arranged relative to the center of mass of the main counterweight mass. After the counterweight mass drifts, it corrects and compensates for the drift based on feedback information.
[0004] While the aforementioned anti-drift management equipment can achieve a certain degree of anti-drift effect for the balance block, it cannot meet the anti-drift control requirements for large thrust or large torque. Summary of the Invention
[0005] The purpose of this invention is to provide a counterweight anti-drift management device to solve the technical problem that existing counterweight anti-drift management devices cannot meet the anti-drift control requirements of large thrust or large torque.
[0006] The present invention provides a balance block anti-drift management device, comprising a plurality of X-axis anti-drift elements and a plurality of Y-axis anti-drift elements disposed between a bottom frame and a balance block. The X-axis anti-drift elements are mounted on the bottom frame and are used to provide a force along the X-axis to the balance block; the plurality of X-axis anti-drift elements are distributed along a first direction. The Y-axis anti-drift elements are mounted on the bottom frame and are used to provide a force along the Y-axis to the balance block; the plurality of Y-axis anti-drift elements are distributed along a second direction; the second direction is set at an angle to the first direction.
[0007] Furthermore, there are two X-axis anti-drift elements and two Y-axis anti-drift elements, wherein the two Y-axis anti-drift elements are respectively disposed on both sides of the line connecting the two X-axis anti-drift elements.
[0008] Furthermore, the first direction is the direction of the Y-axis.
[0009] Furthermore, the second direction is the direction of the X-axis.
[0010] Furthermore, the two X-direction anti-drift elements are respectively disposed on the edges of a pair of opposite sides of the balance block.
[0011] Furthermore, the two Y-axis anti-drift elements are respectively disposed on the edges of another set of opposite sides of the balance block.
[0012] Furthermore, the two Y-axis anti-drift elements are arranged collinearly with one of the X-axis anti-drift elements.
[0013] Furthermore, the line connecting the centers of the two X-direction anti-drift elements coincides with the centerline of the balance block along the X direction.
[0014] Furthermore, the distance between the center lines of the two X-direction anti-drift elements is a, and the distance between the center lines of the two Y-direction anti-drift elements is b, wherein 1800mm≤a≤2200mm, 1200mm≤b≤1600mm.
[0015] Furthermore, the X-axis anti-drift element is a linear motor, and / or the Y-axis anti-drift element is a linear motor.
[0016] The beneficial effects of the balance block anti-drift management device of the present invention are:
[0017] By setting up a balance block anti-drift management device mainly composed of multiple X-axis anti-drift elements and multiple Y-axis anti-drift elements, both the X-axis and Y-axis anti-drift elements are installed on the bottom frame. The X-axis anti-drift elements are configured to provide a force along the X-axis to the balance block, and the multiple X-axis anti-drift elements are distributed along the first direction. The Y-axis anti-drift elements are configured to provide a force along the Y-axis to the balance block, and the multiple Y-axis anti-drift elements are distributed along a second direction that is set at an angle to the first direction.
[0018] During the operation of the workpiece stage, the X-axis anti-drift element and the Y-axis anti-drift element operate. By setting multiple X-axis anti-drift elements, the balance block can obtain a greater anti-drift braking force in the X-axis, and by setting multiple Y-axis anti-drift elements, the balance block can obtain a greater anti-drift braking force in the Y-axis. Simultaneously, the above configuration also enables the balance block to obtain a greater anti-drift torque in the Rz-axis, allowing this balance block anti-drift management device to meet the requirements of high thrust and high torque anti-drift control. Attached Figure Description
[0019] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on the provided drawings without creative effort.
[0020] Figure 1 This is a three-dimensional layout diagram of the balance block anti-drift management device provided in an embodiment of the present invention;
[0021] Figure 2 This is a two-dimensional layout diagram of the balance block anti-drift management device provided in an embodiment of the present invention;
[0022] Figure 3 This diagram illustrates the torque experienced by the balance block after using the anti-drift management device for the balance block provided in this embodiment of the invention.
[0023] Explanation of reference numerals in the attached figures:
[0024] 100 - Bottom frame; 200 - Balance block; 300 - Plate holder;
[0025] 410-X-direction anti-drift element; 420-Y-direction anti-drift element. Detailed Implementation
[0026] To make the above-mentioned objects, features, and advantages of the present invention more apparent and understandable, specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
[0027] Figure 1 This is a three-dimensional layout diagram of the balance block anti-drift management device provided in this embodiment. Figure 2 This is a two-dimensional layout diagram of the anti-drift management device for the balance weight provided in this embodiment. Figure 1 and Figure 2 As shown, this embodiment provides a balance block anti-drift management device, disposed between the bottom frame 100 and the balance block 200. The balance block anti-drift management device includes multiple X-direction anti-drift elements 410 and multiple Y-direction anti-drift elements 420. Specifically, the X-direction anti-drift elements 410 are installed on the bottom frame 100 to provide a force along the X direction to the balance block 200, and the multiple X-direction anti-drift elements 410 are distributed along a first direction. The Y-direction anti-drift elements 420 are installed on the bottom frame 100 to provide a force along the Y direction to the balance block 200, and the multiple Y-direction anti-drift elements 420 are distributed along a second direction. The second direction forms an angle with the first direction.
[0028] During the operation of the workpiece stage, the X-axis anti-drift element 410 and the Y-axis anti-drift element 420 operate. By setting multiple X-axis anti-drift elements 410, the balance block 200 can obtain a greater anti-drift braking force in the X-axis, and by setting multiple Y-axis anti-drift elements 420, the balance block 200 can obtain a greater anti-drift braking force in the Y-axis. Simultaneously, the above arrangement also enables the balance block 200 to obtain a greater anti-drift torque in the Rz-axis, allowing the balance block anti-drift management device to meet the requirements of high thrust and high torque anti-drift control.
[0029] Preferably, in this embodiment, the X-axis anti-drift element 410 is a linear motor. Specifically, the stator assembly and guide assembly of the X-axis anti-drift element 410 are mounted on the bottom frame 100, and the magnet assembly of the X-axis anti-drift element 410 is fixed as a mover on the main frame (not shown in the figure) of the balance block 200.
[0030] This configuration, which utilizes a linear motor as the X-axis anti-drift element 410, enables the X-axis anti-drift element 410 to achieve a large thrust within a limited space. While fulfilling the anti-drift function, it saves space between the balance block 200 and the bottom frame 100, reducing space occupation. Moreover, the mover of the X-axis anti-drift element 410 can directly output power to the balance block 200, resulting in fast response speed, good anti-drift timeliness, and good anti-drift effect.
[0031] In other embodiments, the X-axis anti-drift element 410 may also be a combination of a rotary motor and a transmission mechanism. Its specific structure can be easily obtained by those skilled in the art based on existing technology, and therefore will not be described in detail.
[0032] It should be noted that the anti-drift management device mainly implements 3DOF drive of the balance block, together with the measurement component, to ensure that the BM module is in the set position during initialization, and to correct excessive drift in the three degrees of freedom of X, Y and Rz during the movement of the BM module.
[0033] Preferably, in this embodiment, the Y-axis anti-drift element 420 is a linear motor. Specifically, the stator assembly and guide assembly of the Y-axis anti-drift element 420 are mounted on the bottom frame 100, and the magnet assembly of the Y-axis anti-drift element 420 is fixed as a mover on the main frame of the balance block 200.
[0034] This configuration, which utilizes a linear motor as the Y-axis anti-drift element 420, enables the Y-axis anti-drift element 420 to achieve a large thrust within a limited space. While fulfilling the anti-drift function, it saves space between the balance block 200 and the bottom frame 100, reducing space occupation. Moreover, the mover of the Y-axis anti-drift element 420 can directly output power to the balance block 200, resulting in fast response speed, good anti-drift timeliness, and good anti-drift effect.
[0035] It should be noted that the structure of the linear motor is existing technology well known to those skilled in the art, and this embodiment has not made any improvements to it, so it will not be described in detail here.
[0036] In other embodiments, similarly, the Y-axis anti-drift element 420 can also be a combination of a rotary motor and a transmission mechanism. Its specific structure can be easily obtained by those skilled in the art based on existing technology, and therefore will not be described in detail.
[0037] Please continue to refer to Figure 1 and Figure 2 In this embodiment, there are two X-axis anti-drift elements 410 and two Y-axis anti-drift elements 420. Specifically, the two Y-axis anti-drift elements 420 are disposed on both sides of the line connecting the two X-axis anti-drift elements 410. That is to say, the two Y-axis anti-drift elements 420 and the two X-axis anti-drift elements 410 are arranged in a crisscross pattern.
[0038] By distributing the two Y-axis anti-drift elements 420 on both sides of the line connecting the two X-axis anti-drift elements 410, the two Y-axis anti-drift elements 420 and the two X-axis anti-drift elements 410 are arranged in a cross pattern. This allows both sides of the line connecting the two X-axis anti-drift elements 410 to perform anti-drift management on the balance block 200, enabling the balance block 200 to obtain a greater anti-drift torque in the Rz direction. This further increases the anti-drift management capability of the balance block anti-drift management device in the Rz direction of this embodiment.
[0039] Please continue to refer to Figure 1 and Figure 2 In this embodiment, the first direction is the direction of the Y-axis. That is, the two X-axis anti-drift elements 410 are opposite each other in the Y-axis direction. This arrangement ensures the range of anti-drift management of the balance block 200 in the X-axis direction, so that when the balance block 200 is subjected to an impulse in the Rz direction, the two X-axis anti-drift elements 410 can respond in time in the X-axis direction and effectively manage the anti-drift of the balance block 200.
[0040] Please continue to refer to Figure 1 and Figure 2 In this embodiment, the second direction is the direction of the X-axis. That is, the two Y-axis anti-drift elements 420 are opposite each other in the X-axis direction. This arrangement ensures the range of anti-drift management of the balance block 200 in the Y-axis direction, so that when the balance block 200 is subjected to an impulse in the Rz direction, the two Y-axis anti-drift elements 420 can respond in time in the Y-axis direction and effectively manage the anti-drift of the balance block 200.
[0041] In other words, in this embodiment, the two X-axis anti-drift elements 410 and the two Y-axis anti-drift elements 420 are arranged perpendicularly and intersectingly. This arrangement of anti-drift elements not only enables the balance block 200 to have good anti-drift management capabilities in the X and Y directions, but also ensures that the balance block 200 has good anti-drift management capabilities in the Rz direction, reducing the vibration of the balance block 200 and ensuring the stability of the plate support stage 300.
[0042] Please continue to refer to Figure 1 and Figure 2 In this embodiment, two X-direction anti-drift elements 410 are respectively disposed on the edges of a pair of opposite sides of the balance block 200. That is, the two X-direction anti-drift elements 410 are disposed close to the edge of the balance block 200 along the Y direction.
[0043] This configuration increases the anti-drift management range of the X-direction anti-drift element 410, enabling it to effectively cover any area of the balance block 200 along the Y direction, thereby ensuring that the balance block 200 can receive anti-drift management along the X direction at both ends of the Y direction.
[0044] Please continue to refer to Figure 1 and Figure 2 In this embodiment, two Y-direction anti-drift elements 420 are respectively disposed on the edges of another set of opposite sides of the balance block 200. That is, the two Y-direction anti-drift elements 420 are disposed close to the edge of the balance block 200 along the X direction.
[0045] This configuration increases the drift control range of the Y-axis drift control element 420, enabling it to effectively cover any area of the balance block 200 along the X-axis, thereby ensuring that the balance block 200 can receive drift control along the Y-axis at both ends of the X-axis.
[0046] Please continue to refer to Figure 1 and Figure 2 In this embodiment, two Y-axis anti-drift elements 420 are arranged collinearly with one X-axis anti-drift element 410. That is, the two Y-axis anti-drift elements 420 are located on the left and right sides of the workpiece stage measuring side. This arrangement facilitates layout and installation.
[0047] Please continue to refer to Figure 1 and Figure 2 In this embodiment, the line connecting the centers of the two X-direction anti-drift elements 410 coincides with the centerline of the balance block 200 along the X direction. That is, the two X-direction anti-drift elements 410 are located at the centerline of the balance block 200, and the centers of the two X-direction anti-drift elements 410 are located in the YZ plane.
[0048] This symmetrical layout ensures the balance of forces on the balance block 200 and only occupies the central space between the balance block 200 and the bottom frame 100, making it easy to arrange.
[0049] Please continue to refer to Figure 2 In this embodiment, the distance between the center lines of the two X-direction anti-drift elements 410 is a, and the distance between the center lines of the two Y-direction anti-drift elements 420 is b, wherein 1800mm≤a≤2200mm and 1200mm≤b≤1600mm.
[0050] This configuration ensures good anti-drift management, thereby guaranteeing the stability of the balance block 200 during operation.
[0051] Specifically, in this embodiment, the output constants of the two X-direction anti-drift elements 410 are measured to be 80-100 N / A, and the Y-direction distance between their coil centers is approximately 2000 mm (a≈2000 mm); the thrust constants of the two Y-direction anti-drift elements 420 are measured to be 200-220 N / A, and the X-direction distance between their coil centers is approximately 1400 mm (b≈1400 mm); the design thrust constant is greater than the target budget.
[0052] When the current is set to 8A, the two X-axis anti-drift elements 410 and the two Y-axis anti-drift elements 420 work together and rotate clockwise or counterclockwise to obtain a torque of 3500-3600Nm.
[0053] Figure 3 This diagram illustrates the torque experienced by the balance block 200 after using the balance block anti-drift management device provided in this embodiment. The effect of the balance block anti-drift management device on the balance block 200 was measured on the workpiece table, as shown below. Figure 3 As shown, the torque TZ experienced by the balance block 200 is below 1600 Nm.
[0054] In addition, in this embodiment, each anti-drift component weighs approximately 40 kg, and correspondingly, the heat generation power under the specified driving force is less than the target budget; the anti-drift motor has a temperature sensor inside for detection, the anti-drift motor adopts water cooling and has a leakage sensor at the bottom. When leakage occurs, the leakage sensor will detect the signal and issue an alarm through the corresponding component; the anti-drift motor heat sink adopts a reliable sealing structure that has been tested in the prototype.
[0055] In summary, the anti-drift management device for balance weights provided in this embodiment has at least the following advantages:
[0056] (1) It can make the balance block 200 obtain a greater anti-drift braking force in the Y direction.
[0057] (2) It can also make the balance block 200 obtain a greater anti-drift torque in the Rz direction.
[0058] (3) By adopting a vertical cross-axis motor layout, the balance module can obtain greater PID control stiffness in anti-drift control, which is more stable and reasonable, thus achieving more effective anti-drift control of the balance block 200 together with (1) and (2) above.
[0059] (4) By controlling the overall layout and quantity of the anti-drift motors, the load on a single anti-drift motor is reduced while achieving the same anti-drift control effect as the balance block 200, thereby improving the performance of the anti-drift motors and the overall reliability of the machine.
[0060] While the present invention has been disclosed above, it is not limited thereto. Any person skilled in the art can make various modifications and alterations without departing from the spirit and scope of the invention; therefore, the scope of protection of the present invention should be determined by the scope defined in the claims.
[0061] Finally, it should be noted that in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the term "comprising" or any other variations thereof is intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.
[0062] In the above embodiments, descriptions of directions such as "left," "right," and "side" are based on the accompanying drawings.
[0063] The above description of the disclosed embodiments enables those skilled in the art to make or use the invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the invention. Therefore, the invention is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims
1. A piston anti- drift management device, characterized by, The anti-drift management device for the balance block (200), located between the bottom frame (100) and the balance block (200), includes multiple X-axis anti-drift elements (410) and multiple Y-axis anti-drift elements (420). During the operation of the worktable, the X-axis anti-drift elements (410) and the Y-axis anti-drift elements (420) operate. The X-axis anti-drift elements (410) are mounted on the bottom frame (100) to provide anti-drift braking force along the X-axis to the balance block (200). The X-direction anti-drift elements (410) are distributed along the first direction; the Y-direction anti-drift elements (420) are mounted on the bottom frame (100) to provide anti-drift braking force along the Y direction for the balance block (200), and the plurality of Y-direction anti-drift elements (420) are distributed along the second direction; the X-direction anti-drift elements (410) and the Y-direction anti-drift elements (420) also enable the balance block (200) to obtain anti-drift torque in the Rz direction; the second direction is set at an angle to the first direction.
2. The anti-drift management device for the balance weight according to claim 1, characterized in that, The number of X-direction anti-drift elements (410) and Y-direction anti-drift elements (420) are both two, wherein the two Y-direction anti-drift elements (420) are respectively disposed on both sides of the line connecting the two X-direction anti-drift elements (410).
3. The anti-drift management device for balance weights according to claim 2, characterized in that, The first direction is the direction of the Y-axis.
4. The anti-drift management device for balance weights according to claim 2, characterized in that, The second direction is the direction of the X-axis.
5. The anti-drift management device for balance weights according to claim 2, characterized in that, The two X-direction anti-drift elements (410) are respectively disposed on the edges of a set of opposite sides of the balance block (200).
6. The anti-drift management device for balance weights according to claim 5, characterized in that, The two Y-direction anti-drift elements (420) are respectively disposed on the edges of another set of opposite sides of the balance block (200).
7. The anti-drift management device for balance weights according to claim 6, characterized in that, The two Y-axis anti-drift elements (420) are arranged collinearly with one of the X-axis anti-drift elements (410).
8. The anti-drift management device for balance weights according to claim 5, characterized in that, The line connecting the centers of the two X-direction anti-drift elements (410) coincides with the centerline of the balance block (200) along the X direction.
9. The anti-drift management device for balance weights according to claim 2, characterized in that, The distance between the center lines of the two X-direction anti-drift elements (410) is a, and the distance between the center lines of the two Y-direction anti-drift elements (420) is b, wherein 1800mm≤a≤2200mm and 1200mm≤b≤1600mm.
10. The anti-drift management device for balance weights according to claim 1, characterized in that, The X-axis anti-drift element (410) is a linear motor, and / or the Y-axis anti-drift element (420) is a linear motor.