Methods for converting the format of map data

Abstract

This invention provides a method for converting layout data into a specific format, comprising: providing layout data in GDSII format; parsing a polygonal shape from the GDSII layout data; determining whether the polygonal shape is a quadrilateral; if so, calculating the offsets of two vertices relative to the other two vertices based on the position coordinates of the four vertices of the quadrilateral, and using the two offsets and the position coordinates of the other two vertices together as the OASIS format layout data of the quadrilateral; if not, converting the polygonal shape according to the position coordinates of each vertex as the OASIS format layout data of the polygon. This invention converts GDSII format layout data into OASIS format layout data, resulting in a smaller file size.

Description

Technical Field

[0001] This invention relates to the field of semiconductor technology, and in particular to a method for converting layout data formats. Background Technology

[0002] Optical Proximity Correction (OPC) uses specific calculation methods to modify the shape and size of patterns on a photomask to varying degrees. For example, it can alter the topology of a transparent area on the photomask or add corresponding fine auxiliary patterns to ensure that the actual pattern projected onto the photoresist is as consistent as possible with the design pattern. OPC plays a crucial role in semiconductor manufacturing processes. The current mainstream layout data storage formats are GDSII and OASIS. By applying OPC to the layout data, the pattern projected onto the photoresist can be kept as distortion-free as possible compared to the original pattern on the photomask, thereby improving the yield of integrated circuit designs.

[0003] Currently, the GDSII format has 70 records used to store various information about the layout, including layout structure information, coordinate information, hierarchical information, etc.

[0004] However, in existing technologies, the GDSII format is used to store layout data, resulting in file sizes of several GB or even hundreds of GB, which consumes a large amount of space. Summary of the Invention

[0005] The purpose of this invention is to provide a method for converting layout data into a format that can convert layout data in GDSII format to layout data in OASIS format, thereby reducing the file size.

[0006] To achieve the above objectives, the present invention provides a method for converting layout data format, used to convert layout data in GDSII format into layout data in OASIS format, comprising:

[0007] Step S1: Provide layout data in GDSII format, and parse out a polygonal shape from the layout data in GDSII format;

[0008] Step S2: Determine whether the polygonal shape is a quadrilateral;

[0009] Step S3: If so, calculate the offset of two vertices relative to the other two vertices based on the position coordinates of the four vertices of the quadrilateral, and use the two offsets and the position coordinates of the other two vertices together as the layout data of the quadrilateral in OASIS format.

[0010] Step S4: If not, convert the position coordinates of each vertex of the polygon into layout data in OASIS format for the polygon.

[0011] Optionally, in the method for converting the layout data format, multiple polygonal graphics can be parsed from the GDSII format layout data, and each polygonal graphic is sequentially processed through steps S2 to S4 until the format conversion of all polygonal graphics is completed.

[0012] Optionally, in the method for format conversion of the map data, the quadrilateral includes rectangles, parallelograms, and trapezoids.

[0013] Optionally, in the method for format conversion of the map data, the four vertices of the quadrilateral are named as first vertex, second vertex, third vertex and fourth vertex in a clockwise direction, or the four vertices of the quadrilateral are named as first vertex, second vertex, third vertex and fourth vertex in a counterclockwise direction.

[0014] Optionally, in the aforementioned layout data format conversion method, the method of calculating the offset of two vertices relative to their neighboring vertices based on the position coordinates of the four vertices of the quadrilateral, and using the two offsets and the position coordinates of the two vertices together as the OASIS format layout data of the quadrilateral, includes:

[0015] Calculate the position coordinates of the first vertex, the second vertex, the third vertex, and the fourth vertex;

[0016] If the edge formed by the first vertex and the second vertex is parallel to the edge formed by the third vertex and the fourth vertex, and the side length of the edge formed by the first vertex and the second vertex is greater than the side length of the edge formed by the third vertex and the fourth vertex, then the line connecting the first vertex and the second vertex is taken as the first edge, and the length of the first edge is calculated.

[0017] Calculate the vertical distance from the third vertex to the first edge, and calculate the offset of the third vertex relative to the second vertex;

[0018] Calculate the offset of the fourth vertex relative to the first vertex;

[0019] The length of the first side, the vertical distance from the third vertex to the first side, the offset from the third vertex to the second vertex, and the offset of the fourth vertex relative to the first vertex are stored in the layout data in OASIS format.

[0020] Optionally, in the method for format conversion of the map data, the offset from the third vertex to the second vertex is an offset in a direction parallel to the first side.

[0021] Optionally, in the method for format conversion of the map data, the offset of the fourth vertex relative to the first vertex is an offset in a direction parallel to the first edge.

[0022] Optionally, in the method for format conversion of the layout data, if the quadrilateral is a rectangle, the offset is 0.

[0023] Optionally, in the method for format conversion of the map data, if the third vertex and the fourth vertex are below the first vertex and the second vertex, the offset of the third vertex from the second vertex and the offset of the fourth vertex relative to the first vertex are swapped and stored.

[0024] Optionally, in the method for format conversion of the map data, if the first vertex and the fourth vertex are to the right of the second vertex and the third vertex, the values ​​of the offset from the third vertex to the second vertex and the offset of the fourth vertex relative to the first vertex are negative and then saved.

[0025] The layout data format conversion method provided by this invention includes: providing layout data in GDSII format; parsing a polygonal shape from the GDSII format layout data; determining whether the polygonal shape is a quadrilateral; if so, calculating the offset of two vertices relative to their neighboring vertices based on the position coordinates of the four vertices of the quadrilateral, and using the two offsets and the position coordinates of the two vertices together as the OASIS format layout data of the quadrilateral; if not, directly converting it to OASIS format layout data. This invention converts GDSII format layout data to OASIS format layout data, resulting in a smaller file size. Attached Figure Description

[0026] Figure 1 This is a flowchart of a method for format conversion of layout data according to an embodiment of the present invention;

[0027] Figures 2 to 5 This is a schematic diagram of a quadrilateral shape parsed from layout data in GDSII format according to an embodiment of the present invention. Detailed Implementation

[0028] The specific embodiments of the present invention will now be described in more detail with reference to the accompanying drawings. The advantages and features of the present invention will become clearer from the following description. It should be noted that the accompanying drawings are all in a very simplified form and use non-precise proportions, and are only used to facilitate and clarify the illustration of the embodiments of the present invention.

[0029] In the following text, the terms “first,” “second,” etc., are used to distinguish between similar elements and are not necessarily used to describe a specific order or chronological sequence. It should be understood that these terms, as used herein, may be replaced where appropriate. Similarly, if the methods described herein comprise a series of steps, and the order of these steps presented herein is not necessarily the only possible order in which they can be performed, and some described steps may be omitted and / or other steps not described herein may be added to the method.

[0030] Please refer to Figure 1 This invention provides a method for converting layout data into OASIS format layout data, comprising:

[0031] Step S1: Provide layout data in GDSII format, and parse out a polygonal shape from the layout data in GDSII format;

[0032] Step S2: Determine whether the polygonal shape is a quadrilateral;

[0033] Step S3: If so, based on the position coordinates of the four vertices of the quadrilateral, calculate the offset of two vertices relative to the other two vertices, and use the two offsets and the position coordinates of the other two vertices together as the layout data of the quadrilateral in OASIS format.

[0034] Step S4: If not, convert the position coordinates of each vertex of the polygon into layout data in OASIS format for that polygon.

[0035] In this embodiment of the invention, multiple polygonal graphics can be parsed from the layout data in GDSII format. Each polygonal graphic is processed sequentially through steps S2 to S4 until the format conversion of all polygonal graphics is completed.

[0036] In this embodiment of the invention, the quadrilateral includes a rectangle, a parallelogram, and a trapezoid.

[0037] In this embodiment of the invention, the four vertices of the quadrilateral are named sequentially in a clockwise direction: first vertex P1, second vertex P2, third vertex P3, and fourth vertex P4. If the naming is clockwise, it is considered to be of the type along the X direction. For example, Figure 2 Alternatively, the four vertices of the quadrilateral can be named counter-clockwise as vertex P1, vertex P2, vertex P3, and vertex P4. If the naming is counter-clockwise, it is considered a type along the Y-direction. For example, Figure 3 and Figure 5 .

[0038] In the embodiments of the present invention, please refer to Figure 2The method for calculating the offsets of two adjacent vertices relative to their nearest vertices based on the position coordinates of the four vertices of a quadrilateral, and using these two offsets and the position coordinates of the two vertices together as the layout data of the quadrilateral in OASIS format, includes: calculating the position coordinates of the first vertex P1, the second vertex P2, the third vertex P3, and the fourth vertex P4; the vertex coordinates can be directly read from the original format layout data; if the edge formed by the first vertex P1 and the second vertex P2 is parallel to the edge formed by the third vertex P3 and the fourth vertex P4, and the side length of the edge formed by the first vertex P1 and the second vertex P2 is greater than that of the third vertex P3 and the fourth vertex P4... The length of the edge formed by P4 is calculated by taking the line connecting the first vertex P1 and the second vertex P2 as the first edge 'a' and calculating its length. The perpendicular distance 'b' from the third vertex P3 to the first edge 'a' is calculated, along with the offset 'Delta-a' of the third vertex P3 relative to the second vertex P2. This offset is parallel to the direction of the first edge 'a'. Only the offset on the X-axis is needed; the offset on the Y-axis is not required. The offset 'Delta-b' of the fourth vertex P4 relative to the first vertex P1 is also parallel to the direction of the first edge 'a'. Again, only the offset on the X-axis is needed; the X and Y axes are perpendicularly formed using conventional techniques. The length of the first edge, the perpendicular distance from the third vertex to the first edge, the offset from the third vertex to the second vertex, and the offset of the fourth vertex relative to the first vertex are stored in OASIS format layout data.

[0039] In this embodiment of the invention, Figure 5 The third and fourth vertices are above the first and second vertices, if Figure 5 If the third and fourth vertices are below the first and second vertices, then the offsets from the third to the second vertex and the offset of the fourth vertex relative to the first vertex are swapped in storage. That is, the values ​​represented by Delta-a and Delta-b are swapped in storage.

[0040] In this embodiment of the invention, if the first vertex and the fourth vertex are to the right of the second vertex and the third vertex, such as... Figure 4 Then, the offsets from the third vertex to the second vertex and the offset of the fourth vertex relative to the first vertex are negativeed and saved. That is, the original values ​​are multiplied by -1 before being saved. The above... Figures 2 to 4This refers to the case where the quadrilateral is a trapezoid. In a trapezoid, the naming of the four vertices can be arbitrary, but regardless of the naming, the length of the lower base, the perpendicular distance from the upper base to the lower base, and the offsets of the two vertices of the upper base to the two vertices of the lower base along the direction of the upper base's extension (the offset of a vertex of the upper base is calculated by selecting the adjacent vertex of the upper base) will all be calculated. If the quadrilateral is a rectangle or parallelogram, the method of calculating the length of the first side, the perpendicular distance of the second side to the first side (assuming the second side is parallel to the first side), and the offsets of the two vertices of the first side to the two vertices of the second side can still be used. In a rectangle, the offset is 0; in a parallelogram, the offset can be positive or negative. The layout data in GDSII format before conversion might be several gigabytes, while the layout data after conversion to OASIS format might be several hundred megabytes, significantly reducing file storage space.

[0041] In summary, the layout data format conversion method provided in this embodiment of the invention includes: providing layout data in GDSII format; parsing a polygonal shape from the GDSII format layout data; determining whether the polygonal shape is a quadrilateral; if so, calculating the offset of two vertices relative to their neighboring vertices based on the position coordinates of the four vertices of the quadrilateral, and using the two offsets and the position coordinates of the two vertices together as the OASIS format layout data of the quadrilateral; if not, directly converting it to OASIS format layout data. This invention converts GDSII format layout data to OASIS format layout data, resulting in a smaller file size.

[0042] The above are merely preferred embodiments of the present invention and do not constitute any limitation on the present invention. Any equivalent substitutions or modifications made by those skilled in the art to the technical solutions and content disclosed in the present invention without departing from the scope of the present invention shall be deemed to have remained within the protection scope of the present invention.

Claims

1. A method for converting layout data from a GDSII format to an OASIS format, comprising the steps of: The method comprises: ​ Step S1: providing GDSII format layout data, and parsing a polygon figure from the GDSII format layout data; Step S2: judging whether the polygon figure is a quadrangle; Step S3: if yes, calculating offsets of two vertices of the quadrangle relative to the other two vertices according to position coordinates of the four vertices of the quadrangle, and taking the two offsets and the position coordinates of the other two vertices as OASIS format layout data of the quadrangle; Step S4: if no, converting the position coordinates of the vertices of the polygon figure to OASIS format layout data of the polygon.

2. The layout data format conversion method according to Claim 1, wherein A plurality of polygon figures are parsed from the GDSII format layout data, and each of the polygon figures is subjected to Steps S2-S4 until format conversion of all the polygon figures is completed.

3. The layout data format conversion method of claim 1, wherein, The quadrangle includes a rectangle, a parallelogram and a trapezoid.

4. The layout data format conversion method of claim 1, wherein, The four vertices of the quadrangle are named clockwise as a first vertex, a second vertex, a third vertex and a fourth vertex, or are named counterclockwise as a first vertex, a second vertex, a third vertex and a fourth vertex.

5. The layout data format conversion method according to Claim 4, wherein The method for calculating offsets of two vertices of the quadrangle relative to the other two vertices according to position coordinates of the four vertices of the quadrangle comprises: calculating position coordinates of the first vertex, the second vertex, the third vertex and the fourth vertex; if a side formed by the first vertex and the second vertex is parallel to a side formed by the third vertex and the fourth vertex, and a length of the side formed by the first vertex and the second vertex is greater than a length of the side formed by the third vertex and the fourth vertex, taking a line connecting the first vertex and the second vertex as a first side, and calculating a length of the first side; calculating a perpendicular distance from the third vertex to the first side, and calculating an offset of the third vertex relative to the second vertex; calculating an offset of the fourth vertex relative to the first vertex; saving the length of the first side, the perpendicular distance from the third vertex to the first side, the offset of the third vertex relative to the second vertex and the offset of the fourth vertex relative to the first vertex in OASIS format layout data.

6. The layout data format conversion method according to Claim 5, wherein The offset of the third vertex relative to the second vertex is an offset in a direction parallel to the first side.

7. The layout data format conversion method of Claim 5, wherein, The offset of the fourth vertex relative to the first vertex is an offset in a direction parallel to the first side.

8. The layout data format conversion method of claim 5, wherein, If the quadrangle is a rectangle, the offsets are 0.

9. The layout data format conversion method of Claim 5, wherein, If the third vertex and the fourth vertex are below the first vertex and the second vertex, the offset of the third vertex relative to the second vertex and the offset of the fourth vertex relative to the first vertex are exchanged.

10. The layout data format conversion method of Claim 5, wherein, If the first vertex and the fourth vertex are right of the second vertex and the third vertex, the offset of the third vertex relative to the second vertex and the offset of the fourth vertex relative to the first vertex are saved after being negated.

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