A flexible thin film sensor array and method of making the same

By using ink coaxial direct writing 3D printing technology to fabricate two-layer thin-film sensors, the problems of complex and high cost in the production of flexible sensors have been solved, realizing a low-cost, high-performance flexible sensor array suitable for self-driven sensing, implantable medical devices, electronic skin, wearable devices and environmental monitoring.

CN115683397BActive Publication Date: 2026-07-07SHENZHEN UNIV
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
SHENZHEN UNIV
Filing Date
2022-11-16
Publication Date
2026-07-07

AI Technical Summary

Technical Problem

Existing flexible sensors have complex manufacturing processes and high production costs.

Method used

A flexible thin-film sensing array consisting of two thin-film sensing layers was prepared using an ink coaxial direct-write 3D printing method. Both the first and second thin-film sensing layers contain a first conductive electrode. A cross-layered network structure was formed on the surface of the substrate by coaxial direct-write 3D printing technology, and the acquisition and transmission of electrical signals were realized by liquid metal conductive electrodes.

Benefits of technology

It reduces production costs, simplifies manufacturing processes, and improves the response performance and flexibility of the sensor array, enabling it to maintain sensing capabilities under stretching and bending conditions, making it suitable for accurately identifying the planar shape of objects.

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Abstract

The application discloses a kind of flexible thin film sensing array and its preparation method, flexible thin film sensing array includes: flexible thin film sensing layer, by first thin film sensing layer and second thin film sensing layer stacked on the surface of the first thin film sensing layer, the first thin film sensing layer and the second thin film sensing layer are all provided with a plurality of first conductive electrodes;A plurality of second conductive electrodes, a plurality of second conductive electrodes are respectively connected with a plurality of first conductive electrodes one-to-one.Correspondingly, the arrangement direction of the first conductive electrode in the first thin film sensing layer is perpendicular to the arrangement direction of the first conductive electrode in the second thin film sensing layer.A plurality of first conductive electrodes are gallium-based liquid metal conductive electrodes.By using coaxial direct writing 3D printing technology, a cross-laminated electrode network structure is designed, which reduces the original sensor structure design of at least multiple layers to two layers, reduces the manufacturing process difficulty and reduces the production cost.
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