Equipment and manufacturing method for preparing curved high-temperature resistant polymer precursor ceramic thin film sensors

Abstract

This invention relates to the field of thin-film sensor fabrication technology, specifically to a fabrication device and manufacturing method for a curved high-temperature resistant polymer precursor ceramic thin-film sensor. The invention includes a worktable and a brushing device movable along the X-axis, Y-axis, and Z-axis directions on the worktable. The brushing device includes an adjustable angle frame and a scraper; the scraper includes a pen and a flexible brush head, which are detachably connected. The adjustable angle frame and the scraper are both tilted from 0° to 85°. A V-shaped clamp includes a V-shaped seat, a pressure rod, a clamping screw, and a sliding rod. The V-shaped seat is fixed to the top of a perforated plate, and the bottom of the sliding rod is fixed to the V-shaped seat. This invention utilizes the flexible properties of polyimide film to adapt to brushing on different curved surfaces, eliminating the need for precise control of the distance between the needle and the surface. It exhibits strong material compatibility and eliminates the need to know the surface data in advance and then write complex programs.

Description

Technical Field

[0001] This invention relates to the field of thin-film sensor fabrication technology, specifically to a fabrication apparatus and manufacturing method for a curved high-temperature resistant polymer precursor ceramic thin-film sensor. Background Technology

[0002] In high-temperature fields such as aerospace, temperature is an important indicator for monitoring the health status of components. High-temperature resistant thin-film temperature sensors with conformal curved surfaces can monitor the temperature of curved high-temperature components such as turbine blades in real time, which is of great significance for predicting the failure of curved high-temperature components.

[0003] Currently, the traditional method for fabricating curved thin-film temperature sensors mainly involves using physical vapor deposition or chemical vapor deposition to prepare thin-film thermocouples or resistance thermometers from precious metals such as platinum and platinum-rhodium. However, vapor deposition equipment is expensive and requires specialized flexible templates and multiple targets to fabricate curved conformal thin-film temperature sensors.

[0004] To address the above issues, existing technologies, such as the cylindrical precursor ceramic thin film temperature sensor and its preparation device and method proposed in patent application number "CN115900986A", prepare polymer precursor ceramic thin film temperature sensors through a four-axis inkjet printing platform. However, the equipment cost is high, there are strict requirements on the viscosity of the direct-write raw materials, and a precise three-dimensional model of the curved surface needs to be known in advance before writing complex programs.

[0005] Therefore, it is necessary to develop a fabrication process for polymer precursor ceramic thin film temperature sensors that is low in equipment cost, high in efficiency, and simple in process. Summary of the Invention

[0006] The purpose of this invention is to provide a fabrication apparatus and manufacturing method for a curved high-temperature resistant polymer precursor ceramic thin film sensor, in order to solve the problems mentioned in the background art.

[0007] The objective of this invention can be achieved through the following technical solutions:

[0008] A fabrication apparatus for a curved high-temperature resistant polymer precursor ceramic thin film sensor includes a worktable and a brushing device that can move along the X-axis, Y-axis and Z-axis directions on the worktable. The brushing device includes an adjustable angle frame and a scraper. The scraper includes a pen and a flexible brush head, which are detachably connected. Both the adjustable angle frame and the scraper are inclined from 0 to 85°.

[0009] The V-shaped clamp includes a V-shaped seat, a pressure rod, a clamping screw, and a slide rod. The V-shaped seat is fixed to the top of the perforated plate, the bottom of the slide rod is fixed to the V-shaped seat, the pressure rod is used to fix the curved alumina substrate a, the pressure rod is sleeved with the slide rod, and the pressure rod is fixed to the slide rod by the clamping screw.

[0010] Preferably, the adjustable angle bracket is mounted on the Z-axis slider by a first set screw, and each of the four corners of the Z-axis slider has a set screw hole that cooperates with the first set screw. The pen barrel is mounted on the adjustable angle bracket by a clamping screw.

[0011] Preferably, the workbench includes a workbench body, a power supply, a start switch and an emergency stop switch are provided on one side of the workbench body, a perforated plate is installed on the top of the workbench body, and a Y-axis module and an auxiliary module are respectively provided on both sides of the perforated plate.

[0012] Preferably, the Y-axis module includes a Y-axis motor, a Y-axis connecting plate, a Y-axis ball screw, a Y-axis limit proximity sensor, a Y-axis base plate, a Y-axis positioning ruler, and a Y-axis slider;

[0013] The Y-axis base plate is fixed to the main body of the worktable and located on one side of the perforated plate. Y-axis connecting plates are fixedly connected to the top of both ends of the Y-axis base plate. A Y-axis motor is installed on one of the Y-axis connecting plates. A Y-axis ball screw is fixedly connected to the output end of the Y-axis motor. The end of the Y-axis ball screw away from the Y-axis motor is rotatably connected to the other Y-axis connecting plate. A Y-axis slider is threaded onto the Y-axis ball screw. A Y-axis limit proximity sensor is installed on the Y-axis base plate. A Y-axis positioning ruler is fixedly connected to one side of the Y-axis base plate.

[0014] Preferably, the auxiliary module includes an auxiliary connecting plate, an auxiliary guide rod, an auxiliary base plate, and an auxiliary slider;

[0015] The auxiliary base plate is fixed to the main body of the workbench and located on one side of the perforated plate. Auxiliary connecting plates are fixedly connected to the top of both ends of the auxiliary base plate. An auxiliary guide rod is rotatably connected between the two auxiliary connecting plates, and an auxiliary slider is slidably connected on the auxiliary guide rod.

[0016] Preferably, an X-axis module is provided above the worktable. The X-axis module includes an X-axis motor, an X-axis connecting plate, an X-axis ball screw, an X-axis limit proximity sensor, an X-axis base plate, an X-axis positioning ruler, and an X-axis slider.

[0017] The system includes two X-axis connecting plates, which are fixed to the Y-axis slider and the auxiliary slider, respectively. An X-axis base plate is fixedly connected between the two X-axis connecting plates. An X-axis motor is mounted on one of the X-axis connecting plates, and an X-axis ball screw is fixedly connected to the output end of the X-axis motor. The end of the X-axis ball screw away from the X-axis motor is rotatably connected to the other X-axis connecting plate. An X-axis slider is threaded onto the X-axis ball screw. An X-axis limit proximity sensor is mounted on the X-axis base plate, and an X-axis positioning ruler is mounted on one side of the X-axis limit proximity sensor.

[0018] Preferably, the X-axis slider is connected to a Z-axis module, which includes a Z-axis motor, a Z-axis connecting plate, a Z-axis ball screw, a Z-axis limit proximity sensor, a Z-axis base plate, a Z-axis positioning ruler, and a Z-axis slider.

[0019] The Z-axis base plate is fixedly connected to the X-axis slider. Z-axis connecting plates are fixedly connected to the top and bottom of the Z-axis base plate. A Z-axis motor is fixedly installed on the top Z-axis connecting plate. A Z-axis ball screw is fixedly connected to the output end of the Z-axis motor. The bottom of the Z-axis ball screw is rotatably connected to the bottom Z-axis connecting plate. A Z-axis slider is threaded onto the Z-axis ball screw. A Z-axis limit proximity sensor is installed on the Z-axis base plate. A Z-axis positioning ruler is fixedly connected to one side of the Z-axis base plate.

[0020] Preferably, the worktable body is equipped with a driver and a motion controller. The X-axis motor, Y-axis motor and Z-axis motor are all electrically connected to the driver and motion controller. The motion controller is used to read and write G code and control the movement of the X-axis motor, Y-axis motor and Z-axis motor so that the brushing device can brush the ceramic film sensitive layer and ceramic film protective layer b on the curved alumina substrate a.

[0021] A method for manufacturing a curved high-temperature resistant polymer precursor ceramic thin film sensor includes the following steps:

[0022] ① A single-sided polyimide thin tape with a thickness of 0.01mm to 0.2mm, a width of 10mm to 20mm, and a length of 10mm to 20mm is laid flat on a planar alumina substrate. A carbon dioxide laser is used to scan the designed path. The laser spot size is 0.1mm to 0.5mm, the scanning line width is set to 0.1mm to 0.8mm, the scanning speed is 100 to 500mm / s, and the scanning line spacing is 0.1mm to 0.5mm. The scanning path is determined according to the sensor type and design to obtain a carbonized polyimide pattern in the scanning area.

[0023] ② Fill 10wt% to 30wt% of titanium diboride nanopowder and 10wt% to 30wt% of zirconium diboride nanopowder into liquid polymer precursor ceramics PSN, PSO, PSNB or PCS, and stir magnetically for more than 1 hour to form precursor ceramic slurry.

[0024] ③ Clean the curved aluminum oxide substrate a with alcohol. After cleaning, place the curved aluminum oxide substrate a on the V-shaped seat. Fix the curved aluminum oxide substrate a by tightening the screws and the pressure rod and slide rod. Make the contact angle between the flexible brush head of the brushing device and the curved surface 0° to 85°.

[0025] ④ After scanning, the polyimide pattern along with the alumina substrate is placed in alcohol for decarbonization to obtain a polyimide tape with a mesh template. The tape is then peeled off from the alumina substrate and attached to the curved alumina substrate a.

[0026] ⑤ Move the flexible brush head to the processing origin and set the processing origin as the origin of the machine tool coordinate system. After the machine tool coordinate system origin is reset, it coincides with the workpiece coordinate system on which the G code is based.

[0027] ⑥ Turn on the power, input the G code in the motion controller, apply the precursor slurry to the curved surface with the polyimide template, start the brushing equipment to automatically brush the slurry, the running trajectory fills the template mesh with slurry and scrapes off the excess slurry in the mesh, and after the template is removed, the desired pattern is left on the curved surface.

[0028] ⑦ The curved alumina is placed in a tube furnace and sintered in an air atmosphere to obtain a curved ceramic sensitive film with a thickness of 10μm to 50μm.

[0029] ⑧ Place a 3mm wide and 15mm long polyimide tape onto the alumina sheet, then place one end of the platinum wire onto the tape, and apply the PDC solder joint precursor slurry to the platinum wire on the polyimide tape, so that the diameter of the solder joint precursor is less than 3mm and the thickness is less than 3mm.

[0030] ⑨ The alumina sheet, along with the platinum wire, tape, and PDC solder joint precursor slurry, is placed in a tube furnace and heated using the same method as the curved film to obtain ceramic solder joints connected to the platinum wire.

[0031] ⑩ Apply the slurry to the pins of the curved ceramic sensitive film, press the flat side of the ceramic solder joint onto the pins coated with slurry, fix it with tape, and heat it in a tube furnace to 800-900℃ to obtain a curved high-temperature resistant polymer precursor ceramic thin film sensor.

[0032] Preferably, in step ③, the V-shaped seat can be placed in any orientation.

[0033] The beneficial effects of this invention are:

[0034] The fabrication equipment for curved high-temperature resistant polymer precursor ceramic thin film sensors proposed in this invention overcomes the problems of expensive equipment, complex processes, and uneven curved film compared to traditional physical vapor deposition and chemical vapor deposition sensor fabrication methods. Compared to manual sensor fabrication methods, which are not suitable for high-precision applications, this invention improves the stability, efficiency, and success rate of film quality and saves time and costs.

[0035] II. The fabrication equipment for the curved high-temperature resistant polymer precursor ceramic thin film sensor proposed in this invention, compared with four-axis direct writing, can adapt to the brushing of different curved surfaces by utilizing the flexible properties of polyimide film, without the need for precise control of the distance between the needle and the surface, has strong material compatibility and does not require prior knowledge of the curved surface data before writing complex programs.

[0036] Third, the manufacturing method of the curved high-temperature resistant polymer precursor ceramic thin film sensor proposed in this invention uses a carbon dioxide laser to process flexible polyimide on a plane as a template to control the thickness of the thin film coated by the equipment. In the process of preparing the curved high-temperature resistant polymer precursor ceramic thin film sensor, polyimide is used as the flexible brush head of the coating device. The direction of the raw material coating is kept at 0° to 85° with the normal direction of the curved surface, which can ensure the uniformity and controllability of the film and overcome the film surface quality problems caused by liquid advance and lag phenomena in traditional triaxial direct writing equipment. Attached Figure Description

[0037] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, for those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0038] Figure 1 This is a schematic diagram of the fabrication equipment for the curved high-temperature resistant polymer precursor ceramic thin film sensor of the present invention;

[0039] Figure 2 for Figure 1 An enlarged view of part A;

[0040] Figure 3 for Figure 1 An enlarged view of part B;

[0041] Figure 4 (a) is a schematic diagram of the preparation equipment of the present invention starting to brush the alumina spherical curved surface film;

[0042] Figure 4 (b) is a schematic diagram of the preparation equipment of the present invention reaching the starting point of the brush-coated alumina spherical curved surface film;

[0043] Figure 4 (c) is a schematic diagram of the preparation equipment of the present invention reaching the endpoint of the brush-coated alumina spherical curved film;

[0044] Figure 4 (d) is a schematic diagram of the preparation equipment of the present invention completing the brush coating of alumina spherical curved surface film;

[0045] Figure 5 (a) An optical image of a spherical curved surface brush-coated thin film (with a mass ratio of filling powder to liquid precursor of 2:8) prepared using the equipment of the present invention;

[0046] Figure 5 (b) An optical image of a spherical curved surface coated with a thin film (the mass ratio of filling powder to liquid precursor is 1.5:8.5) using the preparation equipment of the present invention;

[0047] Figure 5 (c) An optical image of a spherical curved surface brush-coated thin film (with a mass ratio of filling powder to liquid precursor of 1:9) prepared using the equipment of the present invention;

[0048] Figure 6 This is a schematic diagram of the preparation equipment and manufacturing method using the present invention;

[0049] Figure 7 A schematic diagram of a curved high-temperature resistant polymer precursor ceramic thin film sensor using the preparation equipment and manufacturing method of the present invention and with alumina spheres as a substrate.

[0050] Figure 8 An exploded view of a curved high-temperature resistant polymer precursor ceramic thin film sensor using the preparation equipment and manufacturing method of the present invention and with alumina spheres as a substrate;

[0051] Figure 9 This is an optical image of the alumina spherical curved surface high-temperature resistant polymer precursor ceramic thin film sensor prepared in Example 1 of this invention;

[0052] Figure 10 The resistance variation curves of the alumina spherical curved surface high-temperature resistant polymer precursor ceramic thin film sensor prepared in Example 1 of the present invention are obtained by six rounds of temperature test curves.

[0053] Figure 11 The resistance curve of the spherical curved surface high-temperature resistant polymer precursor ceramic thin film sensor prepared in Example 1 of the present invention as a function of temperature;

[0054] Figure 12 This is an optical image of the alumina cylindrical curved surface high-temperature resistant polymer precursor ceramic thin film sensor prepared in Example 2 of the present invention.

[0055] Figure 13 The resistance-temperature variation test curves of the alumina cylindrical curved surface high-temperature resistant polymer precursor ceramic thin film sensor prepared in Example 2 of the present invention are shown in six rounds.

[0056] Figure 14 The resistance curve of the high-temperature resistant polymer precursor ceramic thin film sensor with alumina cylindrical curved surface prepared in Example 2 of the present invention is a test curve of the resistance as a function of temperature.

[0057] The attached figures are labeled as follows:

[0058] 100. Workbench; 1. Power supply; 2. Perforated plate; 3. Driver; 4. Start switch; 5. Emergency stop switch; 6. Motion controller;

[0059] 101. Y-axis module; 7. Y-axis motor; 8. Y-axis connecting plate; 9. Y-axis ball screw; 10. Y-axis limit proximity sensor; 11. Y-axis base plate; 12. Y-axis positioning ruler; 13. Y-axis slider;

[0060] 102. Auxiliary module; 14. Auxiliary connecting plate; 15. Auxiliary guide rod; 16. Auxiliary base plate; 17. Auxiliary slider;

[0061] 103. X-axis module; 18. X-axis motor; 19. X-axis connecting plate; 20. X-axis ball screw; 21. X-axis limit proximity sensor; 22. X-axis base plate; 23. X-axis positioning ruler; 24. X-axis slider;

[0062] 104. Z-axis module; 25. Z-axis motor; 26. Z-axis connecting plate; 27. Z-axis ball screw; 28. Z-axis limit proximity sensor; 29. ​​Z-axis base plate; 30. Z-axis positioning ruler; 31. Z-axis slider. Detailed Implementation

[0063] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0064] Combined implementation, for example Figure 1-3 This invention proposes a fabrication device for a curved high-temperature resistant polymer precursor ceramic thin film sensor, including a worktable 100, a Y-axis module 101, an auxiliary module 102, an X-axis module 103, a Z-axis module 104, a driver 3, a motion controller 6, a brush coating device 105, and a V-shaped clamp 106. The driver 3 and the motion controller 6 are fixed in front of the worktable 100.

[0065] The Y-axis module 101 can drive the X-axis module 103, the Z-axis module 104 and the brushing device 105 to move in the Y-axis direction, the X-axis module 103 can drive the Z-axis module 104 and the brushing device 105 to move in the X-axis direction, and the Z-axis module 10 can drive the brushing device 105 to move in the Z-axis direction.

[0066] The workbench 100 includes a workbench body, a power supply 1 is provided on one side of the workbench body, and all electrical equipment in the device draws power from the power supply 1. The power supply 1 is connected to an external line to provide power supply, start switch 4 and emergency stop switch 5 in real time. A perforated plate 2 is installed on the top of the workbench body, and a Y-axis module 101 and an auxiliary module 102 are respectively provided on both sides of the perforated plate 2.

[0067] like Figure 1The Y-axis module 101 includes a Y-axis motor 7, a Y-axis connecting plate 8, a Y-axis ball screw 9, a Y-axis limit proximity sensor 10, a Y-axis base plate 11, a Y-axis positioning ruler 12, and a Y-axis slider 13.

[0068] The Y-axis base plate 11 is fixed to the main body of the worktable and located on one side of the perforated plate 2. Y-axis connecting plates 8 are fixedly connected to the top of both ends of the Y-axis base plate 11. A Y-axis motor 7 is installed on one of the Y-axis connecting plates 8. A Y-axis ball screw 9 is fixedly connected to the output end of the Y-axis motor 7. The end of the Y-axis ball screw 9 away from the Y-axis motor 7 is rotatably connected to the other Y-axis connecting plate 8. A Y-axis slider 13 is threadedly connected to the Y-axis ball screw 9. A Y-axis limit proximity sensor 10 is installed on the Y-axis base plate 11. A Y-axis positioning ruler 12 is fixedly connected to one side of the Y-axis base plate 11.

[0069] Y-axis motor 7 drives Y-axis ball screw 9 to rotate in different directions, thereby driving Y-axis slider 13 to move in different directions. Y-axis limit proximity sensor 10 is existing technology. When Y-axis limit proximity sensor 10 senses Y-axis slider 13, it can stop the operation of Y-axis motor 7 and provide limit protection for the equipment.

[0070] A limit rod is fixedly connected between the two Y-axis connecting plates 8. The limit rod passes through the Y-axis slider 13 to ensure the horizontal movement of the Y-axis slider 13. The Y-axis ball screw 9, the Y-axis positioning ruler 12 and the Y-axis base plate 11 are set in parallel. The Y-axis positioning ruler 12 has a scale to make it easy to control the movement distance of the Y-axis slider 13.

[0071] The auxiliary module 102 includes an auxiliary connecting plate 14, an auxiliary guide rod 15, an auxiliary base plate 16, and an auxiliary slider 17;

[0072] The auxiliary base plate 16 is fixed on the main body of the workbench and located on one side of the perforated plate 2. The top of both ends of the auxiliary base plate 16 are fixedly connected to auxiliary connecting plates 14. An auxiliary guide rod 15 is rotatably connected between the two auxiliary connecting plates 14. An auxiliary slider 17 is slidably connected on the auxiliary guide rod 15.

[0073] like Figure 1 The auxiliary module 102 and the Y-axis module 101 are arranged in parallel. At least two auxiliary guide rods 15 are provided to ensure the horizontal movement of the auxiliary slider 17. The auxiliary base plate 16 and the auxiliary guide rods 15 are arranged in parallel.

[0074] like Figure 1 The X-axis module 103 includes an X-axis motor 18, an X-axis connecting plate 19, an X-axis ball screw 20, an X-axis limit proximity sensor 21, an X-axis base plate 22, an X-axis positioning ruler 23, and an X-axis slider 24.

[0075] Two X-axis connecting plates 19 are provided, which are fixed to the Y-axis slider 13 and the auxiliary slider 17 respectively. The auxiliary slider 17 provides support for the X-axis connecting plates 19 without affecting their movement. An X-axis base plate 22 is fixedly connected between the two X-axis connecting plates 19. An X-axis motor 18 is installed on one of the X-axis connecting plates 19. An X-axis ball screw 20 is fixedly connected to the output end of the X-axis motor 18. The end of the X-axis ball screw 20 away from the X-axis motor 18 is rotatably connected to the other X-axis connecting plate 19. An X-axis slider 24 is threadedly connected to the X-axis ball screw 20. An X-axis limit proximity sensor 21 is installed on the X-axis base plate 22. An X-axis positioning ruler 23 is installed on one side of the X-axis limit proximity sensor 21.

[0076] X-axis motor 18 drives X-axis ball screw 20 to rotate in different directions, thereby driving X-axis slider 24 to move in different directions. X-axis limit proximity sensor 21 is existing technology. When X-axis limit proximity sensor 21 senses X-axis slider 24, it can stop the operation of X-axis motor 18 and provide limit protection for the equipment.

[0077] A limit rod is fixedly connected between the two X-axis connecting plates 19. The limit rod passes through the X-axis slider 24 to ensure the horizontal movement of the X-axis slider 24. The X-axis ball screw 20, the X-axis positioning ruler 23 and the X-axis base plate 22 are set in parallel. The X-axis positioning ruler 23 has a scale to facilitate the control of the movement distance of the Y-axis slider 13.

[0078] like Figure 1 The Z-axis module 104 includes a Z-axis motor 25, a Z-axis connecting plate 26, a Z-axis ball screw 27, a Z-axis limit proximity sensor 28, a Z-axis base plate 29, a Z-axis positioning ruler 30, and a Z-axis slider 31.

[0079] The Z-axis base plate 29 is fixedly connected to the X-axis slider 24. Z-axis connecting plates 26 are fixedly connected to the top and bottom of the Z-axis base plate 29. A Z-axis motor 25 is fixedly installed on the top Z-axis connecting plate 26. A Z-axis ball screw 27 is fixedly connected to the output end of the Z-axis motor 25. The bottom of the Z-axis ball screw 27 is rotatably connected to the bottom Z-axis connecting plate 26. A Z-axis slider 31 is threaded onto the Z-axis ball screw 27. A Z-axis limit proximity sensor 28 is installed on the Z-axis base plate 29. A Z-axis positioning ruler 30 is fixedly connected to one side of the Z-axis base plate 29.

[0080] Z-axis motor 25 drives Z-axis ball screw 27 to rotate in different directions, thereby driving Z-axis slider 31 to move in different directions. Z-axis limit proximity sensor 28 is existing technology. When Z-axis limit proximity sensor 28 senses Z-axis slider 31, it can stop the operation of Z-axis motor 25 and provide limit protection for the equipment.

[0081] A limit rod is fixedly connected between the two Z-axis connecting plates 26. The limit rod passes through the Z-axis slider 31 to ensure the vertical movement of the Z-axis slider 31. The Z-axis ball screw 27, the Z-axis positioning ruler 30 and the Z-axis base plate 29 are set in parallel. The Z-axis positioning ruler 30 has a scale to facilitate the control of the movement distance of the Z-axis slider 31.

[0082] The X-axis module 103, Y-axis module 101, and Z-axis module 104 are perpendicular to each other. The brushing device 105 is fixed on the Z-axis slider 31. When the Z-axis ball screw 27 slides, the Z-axis slider 31 drives the brushing device 105 to slide.

[0083] A V-shaped clamp 106 is installed on the perforated plate 2. The V-shaped clamp 106 is used to clamp and fix the curved alumina substrate a. The X-axis motor 18, Y-axis motor 7, and Z-axis motor 25 are electrically connected to the driver 3 and the motion controller 6. The motion controller 6 is used to read and write G code and control the movement of the X-axis motor 18, Y-axis motor 7, and Z-axis motor 25 so that the brushing device 105 brushes the ceramic film sensitive layer and the ceramic film protective layer b on the curved alumina substrate a. During the curved surface brushing process, the brushing direction of the material brushed by the flexible brush head 37 is kept at 0° to 85° with the normal direction of the curved surface.

[0084] The brushing device 105 includes an adjustable angle bracket 33 and a scraper. The adjustable angle bracket 33 is mounted on the Z-axis slider 31 by a first set screw 35. Each of the four corners of the Z-axis slider 31 is provided with a set screw hole 32 that cooperates with the first set screw 35.

[0085] The scraper includes a pen barrel 36 and a flexible brush head 37, which are detachably connected. The pen barrel 36 and the flexible brush head 37 can be connected by snap-fit, threaded connection, adhesive or bolt fixing. The pen barrel 36 is installed on the adjustable angle frame 33 by a clamping screw 34.

[0086] The Z-axis slider 31 has an adjustable angle bracket 33 in front of it, with its angle set from 0° to 85°. The scraper consists of a pen 36 and a flexible brush head 37. The flexible brush head 37 is made of polyimide film (or a brush made of wolf hair, wool, etc.). The flexible brush head 37 is replaceable. The pen 36 is used to connect the flexible brush head 37 and the adjustable angle bracket 33. The Z-axis motor 25 is used to drive the brushing device 105 to slide along the Z-axis ball screw 27.

[0087] The V-shaped clamp 106 includes a V-shaped seat 38, a pressure rod 39, a clamping screw 40, and a slide rod 41. The V-shaped seat 38 is fixed to the top of the perforated plate 2, and the bottom of the slide rod 41 is fixed to the V-shaped seat 38. The pressure rod 39 is used to fix the curved alumina substrate a. The pressure rod 39 is sleeved with the slide rod 41, and the pressure rod 39 is fixed to the slide rod 41 by the clamping screw 40. Loosening the clamping screw 40 allows the pressure rod 39 to move up and down, thereby fixing the curved alumina substrate a of different heights.

[0088] like Figure 4 A method for manufacturing a curved high-temperature resistant polymer precursor ceramic thin film sensor includes the following steps:

[0089] Example 1

[0090] ① A single-sided polyimide thin tape (PI tape) with a thickness of 0.01mm to 0.2mm, a width of 10mm to 20mm, and a length of 10mm to 20mm is laid flat on a planar alumina substrate. A carbon dioxide laser is used to scan the designed path. The laser spot size is 0.1mm to 0.5mm, the scanning line width is set to 0.1mm to 0.8mm, the scanning speed is 100 to 500mm / s, and the scanning line spacing is 0.1mm to 0.5mm. The scanning path is determined according to the sensor type and design to obtain a carbonized polyimide pattern in the scanning area.

[0091] ② Fill 10wt% to 30wt% of titanium diboride nanopowder and 10wt% to 30wt% of zirconium diboride nanopowder into liquid polymer precursor ceramic PSN (liquid precursor polysilazane of polymer precursor ceramic SiCN), PSO (liquid precursor polysiloxane of SiOC), PSNB (liquid precursor polyborosilicate of SiBCN) or PCS (liquid precursor polycarbosilane of SiC), and stir magnetically for more than 1 hour to form a precursor ceramic slurry;

[0092] ③ Clean the curved aluminum oxide substrate a with alcohol. After cleaning, place the curved aluminum oxide substrate a on the V-shaped seat 38. Fix the curved aluminum oxide substrate a by tightening the screw 40, and make the pressure rod 39 and the slide rod 41 fix the curved aluminum oxide substrate a. Make the contact angle between the flexible brush head 37 of the brushing device 105 and the curved surface 45°. The V-shaped seat 38 can be placed in any direction.

[0093] ④ After scanning, the polyimide pattern along with the alumina substrate is placed in alcohol for decarbonization to obtain a polyimide tape with a mesh template. The tape is then peeled off from the alumina substrate and attached to the curved alumina substrate a.

[0094] ⑤ Move the flexible brush head 37 to the processing origin, set the processing origin as the origin of the machine tool coordinate system, and after the machine tool coordinate system origin is reset, it coincides with the workpiece coordinate system on which the G code is based;

[0095] ⑥ Turn on power 1, input G code in motion controller 6, and apply the precursor slurry to the curved surface with the polyimide template attached (the equipment for applying the precursor slurry to the curved surface with the polyimide template attached is existing technology and will not be described in detail here). Start the brushing equipment to automatically brush the slurry (the brushing process is as follows). Figure 4 a, Figure 4 b、 Figure 4 c and Figure 4 d) The running trajectory fills the template mesh with slurry and scrapes off the excess slurry in the mesh, leaving the desired pattern on the curved surface after the template is removed;

[0096] ⑦ The curved alumina is placed in a tube furnace and sintered in an air atmosphere to obtain a curved ceramic sensitive film with a thickness of 10μm to 50μm.

[0097] ⑧ Place a 3mm wide and 15mm long polyimide tape onto the alumina sheet, then place one end of the platinum wire onto the tape, and apply the PDC solder joint precursor slurry to the platinum wire on the polyimide tape, so that the diameter of the solder joint precursor is less than 3mm and the thickness is less than 3mm.

[0098] ⑨ The alumina sheet, along with the platinum wire, tape, and PDC solder joint precursor slurry, is placed in a tube furnace and heated using the same method as the curved film to obtain ceramic solder joints connected to the platinum wire.

[0099] ⑩ Apply the slurry to the pins of the curved ceramic sensitive film, press the ceramic solder joint side onto the slurry-coated pins, secure with tape, and heat in a tube furnace to 800–900°C to obtain a curved high-temperature resistant polymer precursor ceramic thin film sensor (e.g., Figure 7 , Figure 8 and Figure 9 ).

[0100] The alumina spherical curved surface high-temperature resistant polymer precursor ceramic thin film sensor prepared in Example 1 (such as...) Figure 9 (As shown) was placed in a tube furnace for temperature resistance performance testing. Figure 10 The high-temperature resistant polymer precursor ceramic thin film sensor with alumina spherical curved surface underwent six rounds of temperature cycling tests. The resistance change curve with temperature was almost a straight line, indicating that the sensor has good repeatability. Figure 11 The test curves show the resistance and temperature of the sensor over time, from which the sensor's rapid response to temperature changes can be clearly observed.

[0101] Example 2

[0102] ① Same as step ① in Example 1;

[0103] ② Same as step ② in Example 1;

[0104] Replace the curved alumina substrate a in Example 1 with an alumina cylinder, and follow steps ③ to ⑦ of Example 1.

[0105] ⑧ Same as step ⑧ in Example 1;

[0106] ⑨ Same as step ⑨ in Example 1;

[0107] ⑩ Same as step ⑩ in Example 1, a ceramic thin-film sensor with an alumina cylindrical curved surface and high-temperature resistant polymer precursor was obtained (e.g., Figure 12 (As shown).

[0108] The alumina cylindrical curved surface high-temperature resistant polymer precursor ceramic thin film sensor prepared in Example 2 (such as...) Figure 12 (As shown) was placed in a tube furnace for temperature resistance performance testing. Figure 13 The high-temperature resistant polymer precursor ceramic thin film sensor with a cylindrical curved surface of alumina was subjected to six rounds of temperature cycle testing. The test curve of its resistance changing with temperature was almost a straight line, indicating that the sensor has good repeatability. Figure 14 The test curves showing the resistance and temperature changes of the sensor over time clearly demonstrate the sensor's rapid response to temperature changes. Therefore, the curved high-temperature resistant polymer precursor ceramic thin film sensor prepared using the method of this invention has high feasibility and stability, and can effectively meet the sensing requirements in high-temperature environments.

[0109] The foregoing has shown and described the basic principles, main features, and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of the invention. Various changes and modifications can be made to the invention without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claimed invention.

Claims

1. A method for fabricating a curved high-temperature resistant polymer precursor ceramic thin film sensor, comprising a worktable (100) and a brush coating device (105) capable of moving along the X-axis, Y-axis and Z-axis directions on the worktable (100), characterized in that: The brushing device (105) includes an adjustable angle bracket (33) and a scraper. The scraper includes a pen handle (36) and a detachably connected flexible brush head (37). The flexible brush head (37) is a polyimide film or a hair brush head. The adjustable angle bracket (33) is mounted on a Z-axis slider (31) and enables the scraper to be adjusted and fixed at multiple angles within the range of 0° to 85°. The equipment also includes a V-shaped clamp (106), which includes a V-shaped seat (38), a pressure rod (39), a clamping screw (40), and a slide rod (41). The V-shaped seat (38) is fixed to the top of the perforated plate (2) of the worktable (100), the bottom of the slide rod (41) is fixed to the V-shaped seat (38), and the pressure rod (39) is sleeved with the slide rod (41) and fixed by the clamping screw (40) for clamping the curved alumina substrate. The brushing device (105) is used to brush a slurry onto a polyimide template attached to a curved alumina substrate. The polyimide template is formed by peeling off a polyimide tape with mesh holes from a planar alumina substrate and attaching it to the curved alumina substrate after the polyimide tape has been carbonized by scanning a carbon dioxide laser on the planar alumina substrate and then decarbonized in alcohol.

2. The method of claim 1, wherein: The adjustable angle bracket (33) is mounted on the Z-axis slider (31) by the first set screw (35). The four corners of the Z-axis slider (31) are provided with set screw holes (32) that cooperate with the first set screw (35). The pen barrel (36) is mounted on the adjustable angle bracket (33) by the clamping screw (34).

3. The method of claim 1, wherein: The worktable (100) also includes a power supply (1), a start switch (4), an emergency stop switch (5), a driver (3), and a motion controller (6); the motion controller (6) is used to read and write G code and control the movement of the X-axis motor (18), the Y-axis motor (7), and the Z-axis motor (25) to drive the brushing device (105) to brush the curved alumina substrate with polyimide template attached.

4. The method of claim 1, wherein: The worktable (100) is provided with a Y-axis module (101) and an auxiliary module (102); the Y-axis module (101) includes a Y-axis ball screw (9), a Y-axis limit proximity sensor (10) and a Y-axis positioning ruler (12); the auxiliary module (102) includes an auxiliary guide rod (15) and an auxiliary slider (17); an X-axis module (103) and a Z-axis module (104) are also provided above the worktable (100).

5. The preparation method according to claim 3, characterized in that, Includes the following steps: ① A single-sided polyimide thin tape with a thickness of 0.01mm~0.2mm, a width of 10mm~20mm, and a length of 10mm~20mm is laid flat on a planar alumina substrate. A carbon dioxide laser is used to scan the designed path. The laser spot size is 0.1mm~0.5mm, the scanning line width is set to 0.1mm~0.8mm, the scanning speed is 100~500mm / s, and the scanning line spacing is 0.1mm~0.5mm. The scanning path is determined according to the sensor type and design to obtain a carbonized polyimide pattern in the scanning area. ② Fill 10wt%~30wt% of titanium diboride nanopowder and 10wt%~30wt% of zirconium diboride nanopowder into liquid polymer precursor ceramics PSN, PSO, PSNB or PCS, and stir magnetically for more than 1 hour to form precursor ceramic slurry. ③ Clean the curved alumina substrate a with alcohol. After cleaning, place the curved alumina substrate a on the V-shaped seat (38). Fix the curved alumina substrate a by tightening the screw (40) and the pressure rod (39) and the slide rod (41). Make the contact angle between the flexible brush head (37) of the brushing device (105) and the curved surface 0° ~ 85°. ④ After scanning, the polyimide pattern along with the alumina substrate is placed in alcohol for decarbonization to obtain a polyimide tape with a mesh template. The tape is then peeled off from the alumina substrate and attached to the curved alumina substrate a. ⑤ Move the flexible brush head (37) to the machining origin and set the machining origin as the origin of the machine tool coordinate system. After the machine tool coordinate system origin is reset, it coincides with the workpiece coordinate system on which the G code is generated. ⑥ Turn on the power (1), input the G code in the motion controller (6), apply the precursor slurry to the curved surface with the polyimide template, start the brushing equipment to automatically brush the slurry, the running trajectory fills the template mesh with slurry and scrapes off the excess slurry in the mesh, and leaves the desired pattern on the curved surface after the template is removed. ⑦ The curved alumina is placed in a tube furnace and sintered in an air atmosphere to obtain a curved ceramic sensitive film with a thickness of 10μm~50μm; ⑧ Place a 3mm wide and 15mm long polyimide tape onto the alumina sheet, then place one end of the platinum wire onto the tape, and apply the PDC solder joint precursor slurry to the platinum wire on the polyimide tape, so that the diameter of the solder joint precursor is less than 3mm and the thickness is less than 3mm. ⑨ The alumina sheet, along with the platinum wire, tape, and PDC solder joint precursor slurry, is placed in a tube furnace and heated using the same method as the curved film to obtain ceramic solder joints connected to the platinum wire. The ceramic solder joints are hemispherical in shape. ⑩ Apply the slurry to the pins of the curved ceramic sensitive film, press the flat side of the ceramic solder joint onto the pins coated with slurry, fix it with tape, and heat it in a tube furnace to 800~900℃ to obtain a curved high-temperature resistant polymer precursor ceramic thin film sensor.

6. The preparation method according to claim 5, characterized in that: In step ③, the V-shaped seat (38) can be placed in any orientation.

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