A method, device and storage medium for determining parameters of a laser focusing system

Abstract

The present invention provides a method, device and storage medium for determining parameters of a laser focusing system. The method for determining parameters of a laser focusing system is used to design a laser focusing system. The laser focusing system includes a box structure, a wind knife structure and a plurality of optical elements installed side by side in the box structure. An air inlet and an air outlet are provided at opposite ends of the box structure, and the wind knife structure is provided at the air inlet. The method for determining parameters includes: outputting wind knife airflow based on the wind knife structure to sweep the surface of the optical element, and outputting laminar wind with a preset laminar wind speed based on the laminar wind structure to between adjacent optical elements, obtaining the temperatures of a plurality of temperature measuring points on the surface of the optical element; determining the recommended value of the air outlet parameter of the wind knife structure according to the comparison between the temperatures of the plurality of temperature measuring points and the preset comparison parameters. The beneficial effects of the present invention are as follows: it is possible to avoid damage to the optical element when the laser focusing system is dynamically cleaned, and ensure the cleaning effect of dynamic cleaning.

Description

Technical Field

[0001] The present invention relates to the technical field of laser systems, and in particular to a method, device and storage medium for determining parameters of a laser focusing system. Background Art

[0002] In large-scale laser devices, laser focusing is the core. In the entire laser focusing system, optical components play a very important role. Optical components bear important responsibilities such as frequency modulation and focusing in the system, and high-energy lasers also cause great damage to optical components. The damage during each working state determines the service life of the optical components. However, the contaminants mixed in the components or in the internal space attached to the optical components will aggravate the damage to the components and greatly reduce the service life of the optical components. Therefore, it is very necessary to maintain the cleanliness of the components of the entire laser focusing system. The general method to maintain the cleanliness of the components is to clean and maintain them in a non-working state, but such maintenance is not enough. When high-energy lasers irradiate the surface of optical components, ablation will occur, generating a large number of particles. The fine defects attached to the surface of the components and the optical components cause a small part of the laser to scatter. The scattered light will cause ablation of the structural components and components through amplification or the high energy it carries, generating more particle pollutants. In such a vicious cycle, the reliability and life of the device will be greatly weakened.

[0003] The dynamic cleaning method for the laser focusing system is mainly to continuously provide clean airflow in the laser focusing system through the wind knife structure and the laminar wind structure, and to export the airflow from the corresponding air outlet structure to keep the laser focusing system clean, thereby achieving dynamic cleaning. However, the introduced airflow, such as the wind knife airflow, is usually close to the surface of the optical element. High-speed airflow may cause damage to the optical element, thereby affecting the actual operation of the laser focusing system. Summary of the invention

[0004] The problem solved by the present invention is how to avoid damage to optical components when dynamically cleaning a laser focusing system and ensure the cleaning effect of the dynamic cleaning.

[0005] In order to solve the above problems, the present invention provides a method for determining parameters of a laser focusing system, which is used to design a laser focusing system. The laser focusing system includes a box structure, a wind knife structure, and a plurality of optical elements installed side by side in the box structure. An air inlet and an air outlet are provided at opposite ends of the box structure, and the wind knife structure is arranged at the air inlet.

[0006] The parameter determination method comprises:

[0007] Based on the wind knife structure, the wind knife airflow is output to sweep the surface of the optical element, and based on the laminar wind structure, the laminar wind with a preset laminar wind speed is output to between adjacent optical elements to obtain the temperatures of multiple temperature measurement points on the surface of the optical element;

[0008] The recommended value of the air outlet parameter of the air knife structure is determined according to the comparison between the temperatures of the plurality of temperature measuring points and the preset comparison parameters.

[0009] In the present technical solution, the surface temperature of the optical element is determined by detecting and acquiring the temperatures of multiple temperature measuring points on the surface of the optical element. Thus, the temperatures of the multiple temperature measuring points are compared with preset comparison parameters to determine whether the surface temperature of the optical element meets the requirements. When the requirements are met, the air outlet parameters of the corresponding wind knife structure are the recommended values ​​of the air outlet parameters that meet the requirements. The laser focusing system can be designed based on the wind knife air outlet parameters or adjusted during actual operation of the laser focusing system, so that the laser focusing system can be dynamically cleaned reasonably to avoid damage to the optical element.

[0010] Further, the preset comparison parameter includes a preset temperature difference;

[0011] Before obtaining the temperatures of the multiple temperature measurement points of the optical element, the method for determining the parameters of the laser focusing system further includes:

[0012] Acquire multiple air outlet parameter design values ​​of the air knife structure, wherein, based on the air knife structure operating at the air outlet parameter design values, the temperatures of the multiple temperature measurement points acquired correspond to the air outlet parameter design values;

[0013] Determining the setting parameters of the air knife structure according to the comparison between the temperatures of the plurality of temperature measuring points and the preset comparison parameters comprises:

[0014] Calculate the maximum temperature difference of the temperatures of the plurality of temperature measuring points;

[0015] If the maximum temperature difference is less than or equal to the preset temperature difference, the air outlet parameter design values ​​corresponding to the temperatures of the plurality of temperature measuring points are determined as the air outlet parameter recommended values.

[0016] Furthermore, the method also includes determining a recommended value of a first spacing parameter of the wind knife structure according to a maximum pressure and a minimum pressure on the surface of the optical element.

[0017] Further, determining the recommended value of the first spacing parameter of the wind knife structure according to the maximum pressure and the minimum pressure on the surface of the optical element includes:

[0018] Controlling to increase the distance between the wind knife structure and the optical element;

[0019] Obtaining the maximum pressure and the minimum pressure on the surface of the optical element;

[0020] Calculating a pressure difference between the maximum pressure and the minimum pressure;

[0021] When the pressure difference decreases to reach a preset pressure difference, the current distance between the wind knife structure and the optical element is determined to be the first distance parameter recommended value.

[0022] Furthermore, the method further includes: determining a recommended value of a second spacing parameter between adjacent optical elements according to attenuation distances of a plurality of particles between adjacent optical elements.

[0023] Further, determining the recommended value of the second spacing parameter of adjacent optical elements according to the attenuation distance of the plurality of particles between the adjacent optical elements comprises:

[0024] Calculating the attenuation distances of particles with various particle diameters between adjacent optical elements, wherein the initial velocities of the particles are the same or different;

[0025] Establishing a particle attenuation coordinate diagram according to the attenuation distance of each of the particles;

[0026] A particle attenuation polynomial is obtained by fitting the particle attenuation coordinate diagram and the initial velocity corresponding to each of the particles;

[0027] Calculating the maximum attenuation distance of the particle according to the particle attenuation polynomial and a preset particle incident speed;

[0028] The recommended value of the second spacing parameter between adjacent optical elements is determined according to the maximum attenuation distance.

[0029] Furthermore, the particle attenuation polynomial includes: f(x,y)=2.653-1.299·x+0.06638·y+0.114·x 2 +0.01105 x y-3.353 10 -4 ·y 2 -0.002151 x 3 +1.193·10 -4 ·x 2 ·y-1.654·10 -5 ·x·y 2 +6.01·10 -7 ·y 3 +2.233·10 -5 ·x 4 , where f(x,y) represents the particle attenuation distance, x represents the particle diameter, and y represents the particle incident velocity.

[0030] Furthermore, the laser focusing system also includes a reflow structure, which includes a reflow chamber structure and a reflow plate, wherein the reflow plate is arranged at the air outlet, and a plurality of reflow ports are provided on the reflow plate, wherein the interior of the box structure, the reflow ports and the inner cavity of the reflow chamber structure are connected in sequence, and the parameter determination method of the laser focusing system also includes: determining the recommended value of the height parameter of the reflow chamber structure according to the airflow streamlines of the reflow chamber structure and the box structure.

[0031] Furthermore, the determining of the recommended value of the height parameter of the reflow chamber structure according to the airflow streamlines of the reflow chamber structure and the box structure includes:

[0032] Obtaining design values ​​of various height parameters of the reflux cavity structure;

[0033] Simulating the air flow in the box structure and the return chamber structure according to a plurality of height parameter design values;

[0034] Obtaining a streamline diagram of the air in the reflux cavity structure and the box structure;

[0035] Analyzing the vortex conditions of the air on both sides of the return plate according to the streamline diagram of the airflow;

[0036] If the eddy current condition meets the preset eddy current condition, the height parameter design value corresponding to the eddy current condition is determined as the height parameter recommended value.

[0037] A parameter determination device for a laser focusing system comprises a memory, a processor and a computer program stored in the memory and executable on the processor. When the processor executes the computer program, the parameter determination method for the laser focusing system as described above is implemented.

[0038] A computer-readable storage medium stores a computer program, which, when executed by a processor, implements the method for determining parameters of a laser focusing system as described above. BRIEF DESCRIPTION OF THE DRAWINGS

[0039] Figure 1 A flow chart of a method for determining parameters of a laser focusing system in an embodiment of the present invention;

[0040] Figure 2 A schematic diagram of airflow during dynamic cleaning of a laser focusing system in an embodiment of the present invention;

[0041] Figure 3 is a schematic diagram of the positional relationship between the optical element and the wind knife structure in an embodiment of the present invention;

[0042] Figure 4is a pressure distribution diagram on the surface of the optical element when the distance dm is 0 mm in an embodiment of the present invention;

[0043] Figure 5 Schematic diagram of pressure distribution at various positions on the surface of the optical element from the edge of the optical element when the distance dm is 0 mm in an embodiment of the present invention;

[0044] Figure 6 Schematic diagram of the maximum pressure and the minimum pressure on the surface of the optical element according to the embodiment of the present invention as the distance dm between the optical element and the wind knife structure changes;

[0045] Figure 7 is a particle attenuation coordinate diagram in an embodiment of the present invention;

[0046] Figure 8 A schematic diagram of a reflux structure in an embodiment of the present invention;

[0047] Fig. 9 1 is an air streamline diagram in the return cavity structure and the box structure when the return cavity structures of different heights are used in the embodiment of the present invention.

[0048] Description of reference numerals:

[0049] 1-Box structure; 2-Air knife structure; 3-Reflow plate; 4-Reflow chamber structure; 5-Optical element. DETAILED DESCRIPTION

[0050] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, specific embodiments of the present invention are described in detail below with reference to the accompanying drawings.

[0051] It should be noted that the terms "first", "second", etc. in the specification and claims of the present invention and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the numbers used in this way can be interchanged where appropriate, so that the embodiments of the present invention described herein can be implemented in an order other than those illustrated or described herein.

[0052] Reference Figure 1-2 As shown, the present invention proposes a method for determining parameters of a laser focusing system, which is used to design a laser focusing system. The laser focusing system includes a box structure 1, a wind knife structure 2, and a plurality of optical elements 5 installed side by side in the box structure 1. An air inlet and an air outlet are provided at opposite ends of the box structure 1, and the wind knife structure 2 is arranged at the air inlet;

[0053] The parameter determination method comprises:

[0054] S1 outputs an air knife airflow based on the air knife structure 2 to sweep the surface of the optical element 5, and outputs laminar wind with a preset laminar wind speed to between adjacent optical elements 5 based on the laminar wind structure, to obtain the temperatures of multiple temperature measurement points on the surface of the optical element 5;

[0055] S2 determines the recommended value of the air outlet parameter of the air knife structure 2 according to the comparison between the temperatures of the plurality of temperature measuring points and the preset comparison parameters.

[0056] In the related art, the method for dynamically cleaning the laser focusing system is mainly to continuously provide clean airflow in the laser focusing system through the wind knife structure 2 and the laminar wind structure, and to export the airflow from the corresponding air outlet structure to keep the laser focusing system clean, thereby achieving dynamic cleaning. However, the introduced airflow, such as the wind knife airflow, is usually at a small distance from the surface of the optical element 5. The high-speed airflow may cause damage to the optical element 5, thereby affecting the actual operation of the laser focusing system.

[0057] In the present invention, the parameter determination method of the laser focusing system is used to determine the actual construction or operation parameters of the structure in the laser focusing system, so that the laser focusing system can be designed according to the determined parameters when constructing it, or during the operation of the laser focusing system, actual control can be performed according to the determined parameters, so that the laser focusing system can be dynamically cleaned reasonably to avoid damage to the optical element 5.

[0058] Reference Figure 2 The laser focusing system of the present invention comprises a box structure 1, a wind knife structure 2 and a plurality of optical elements 5 installed side by side in the box structure 1, wherein the box structure 1 is used to form a sealed space to accommodate and fix the optical elements 5, and the laser incident on one side is focused and adjusted and then guided out through the plurality of optical elements 5 arranged side by side, and the incident laser passes through the optical elements 5 on the same optical path in sequence, wherein the opposite ends of the box structure 1 are used for the introduction of clean air and the guidance of air after dynamic cleaning, that is, there are relative air inlets and air outlets, and in this embodiment, the air inlet and the air outlet are connected by a fan so as to provide a heat dissipation zone between the fan and the box structure 1. A high-efficiency filter is arranged between the air inlet and the air outlet to purify the air, so as to form a laminar wind structure to provide laminar wind to the laser focusing system for air circulation. Under normal circumstances, the laminar wind speed of the laser focusing system is 0.45m / s, that is, the preset laminar wind speed is 0.45m / s; wherein, a flow stabilizing structure such as a pressure box including a flow stabilizing plate is arranged at the air inlet to stabilize the incoming air, and a return flow structure is arranged at the air outlet to facilitate the return of the outgoing air; wherein, a wind knife structure 2 is arranged at the air inlet to output the airflow, so as to perform a clean treatment, wherein the airflow output by the wind knife structure 2 and the laminar wind structure is parallel to the surface of the optical element 5, Figure 1The solid arrow in the middle refers to the wind knife airflow output by the wind knife structure 2, and the dotted arrow refers to the laminar wind output by the laminar wind structure. The wind knife airflow is close to the surface of the optical element 5, thereby forming a laser focusing system with a cyclic dynamic cleaning function.

[0059] In the present embodiment, the wind knife structure 2 outputs a wind knife airflow to sweep the surface of the optical element 5, and the laminar wind structure outputs laminar wind of a preset laminar wind speed to between adjacent optical elements 5, so as to dynamically clean the laser focusing system. The wind knife airflow output by the wind knife structure 2 is close to the surface of the optical element 5 and has a higher wind speed, which will affect the temperature of the surface of the optical element 5, such as making the temperature higher or making the temperature difference of some areas on the surface of the optical element 5 larger. Therefore, in the present embodiment, when determining the parameters, the temperatures of multiple temperature measuring points on the surface of the optical element 5 are obtained, and the temperature difference of multiple temperature measuring points on the surface of the optical element 5 can be set on the surface of the optical element 5. Six temperature sensors are evenly spaced to detect and acquire temperature at six temperature measuring points on the surface of the optical element 5, so as to determine the surface temperature of the optical element 5. Thus, the temperatures of the multiple temperature measuring points are compared with preset comparison parameters to determine whether the surface temperature of the optical element 5 meets the requirements. When the requirements are met, the air outlet parameters of the corresponding wind knife structure 2 are the recommended values ​​of the air outlet parameters that meet the requirements. The laser focusing system can be designed based on the air outlet parameters of the wind knife structure 2 or adjusted during actual operation of the laser focusing system, so that the laser focusing system can be dynamically cleaned reasonably to avoid damage to the optical element 5.

[0060] The air outlet parameter of the wind knife structure 2 may be the air outlet speed or the air outlet pressure. Usually, the air outlet speed and the air outlet pressure have a corresponding relationship.

[0061] Generally, the optical properties of the optical element 5 can correspond to the glass structure. Therefore, when determining the parameters, a simulation model can be constructed based on a glass structure similar to the optical element 5, and then a simulation can be performed to determine the required parameters according to the above parameter determination method.

[0062] In an optional embodiment of the present invention, the preset comparison parameter includes a preset temperature difference;

[0063] Before obtaining the temperatures of the multiple temperature measurement points of the optical element 5, the method for determining the parameters of the laser focusing system further includes:

[0064] Acquire multiple air outlet parameter design values ​​of the air knife structure 2, wherein, based on the operation of the air knife structure 2 at the air outlet parameter design values, the temperatures of the multiple temperature measurement points acquired correspond to the air outlet parameter design values;

[0065] The step of determining the setting parameters of the air knife structure 2 according to the comparison between the temperatures of the plurality of temperature measuring points and the preset comparison parameters includes:

[0066] Calculate the maximum temperature difference of the temperatures of the plurality of temperature measuring points;

[0067] If the maximum temperature difference is less than or equal to the preset temperature difference, the air outlet parameter design values ​​corresponding to the temperatures of the plurality of temperature measuring points are determined as the air outlet parameter recommended values.

[0068] In the laser focusing system, when the surface temperature of the optical element 5 is high or the temperature difference in the relevant area is large, direct damage will be caused to the optical element 5. In this embodiment, the preset comparison parameter includes a preset temperature difference to measure the temperature difference on the surface of the optical element 5; when the laser focusing system performs dynamic cleaning, the wind knife airflow output by the wind knife structure 2 has certain requirements, and the adjustment ability of the wind knife structure 2 may be relatively fixed. Therefore, before obtaining the temperatures of multiple temperature measuring points of the optical element 5, a variety of wind outlet parameter design values ​​of the wind knife structure 2 are also included. In this embodiment, the wind outlet parameter design value is the wind outlet speed of the wind knife structure 2. In actual use, the wind outlet speed is changed by changing the inlet pressure of the wind knife structure 2. In this embodiment, the wind outlet parameter design values ​​are 0.1Mpa, 0.2MPa, 0. .3MPa to determine the appropriate air outlet parameters among several air outlet parameter design values; for each air outlet parameter design value, there are corresponding multiple temperature measuring point temperatures, and the multiple temperature measuring point temperatures have a maximum temperature and a minimum temperature, so that the difference between the maximum temperature and the minimum temperature is the maximum temperature difference. Under normal circumstances, if the maximum temperature difference exceeds 0.2°C, it may cause damage to the surface of the optical element 5. Therefore, when the maximum temperature difference is less than or equal to 0.2°C, the multiple temperature measuring point temperatures corresponding to the maximum temperature difference, and the corresponding current air outlet parameter design value, that is, the recommended air outlet parameter value, can be used to set the parameters of the wind knife structure 2 during operation according to the recommended air outlet parameter value for actual control, so that the laser focusing system can be dynamically cleaned reasonably to avoid damage to the optical element 5.

[0069] In this embodiment, when using 0.2Mpa to output the wind knife airflow, the maximum temperature difference, that is, the difference between the maximum temperature and the minimum temperature among the temperatures of multiple temperature measuring points in the current situation, is calculated to be 0.193°C. This temperature is less than 0.2°C. Therefore, 0.2Mpa is the recommended value of the air outlet parameters that meet the requirements. When using 0.3Mpa to output the wind knife airflow, the maximum temperature difference is calculated to be 2.42°C, which cannot meet the requirements. It can be understood that when the air outlet speed and the corresponding pressure are smaller, for example 0.1Mpa, the maximum temperature difference is smaller, but a lower wind speed may result in poor cleaning effect.

[0070] In an optional embodiment of the present invention, the method further includes determining a recommended value of a first spacing parameter of the wind knife structure 2 according to a maximum pressure and a minimum pressure on the surface of the optical element 5 .

[0071] The wind knife airflow output by the wind knife structure 2 will affect the pressure on the surface of the optical element 5, which may cause damage to the optical element 5. For example, due to the excessive pressure difference on the surface of the optical element 5, the stress inside the optical element 5 is too large, resulting in damage. Therefore, in the present invention, the pressure on the surface of the optical element 5 is judged based on the maximum pressure and the minimum pressure on the surface of the optical element 5, so as to determine the first spacing parameter recommended value of the wind knife structure 2. The first spacing parameter recommended value represents the distance between the wind knife structure 2 and the optical element 5. Figure 3 In the example, the wind knife structure 2 is actually used to discharge air from the air outlet. The first recommended value of the spacing parameter is the distance between the air outlet of the wind knife structure 2 and the optical element 5. Figure 3 The wind knife structure 2 is arranged at the air inlet and has a long strip of air outlet to output the wind knife airflow. The direction of the wind knife airflow is parallel to the surface of the optical element 5. The spacing between the air outlet of the wind knife structure 2 and the optical element 5 includes two spacings, namely Figure 3 The vertical distance dm between the air outlet of the wind knife structure 2 and the end of the optical element 5, and the horizontal distance dn between the air outlet of the wind knife structure 2 and the surface of the optical element 5 can be adjusted by adjusting the distance dm and the distance dn, that is, the time for the wind knife airflow to reach the optical element 5 after flowing out of the air outlet and the interval between the wind knife airflow and the surface of the optical element 5 after flowing out of the air outlet can be adjusted, so as to reduce the influence of the air outlet of the wind knife structure 2 on the optical element 5. Specifically, by determining a reasonable first spacing parameter so that the actual position of the wind knife structure 2 can be set or controlled according to the first spacing parameter, so that the laser focusing system can be dynamically cleaned reasonably to avoid damage to the optical element 5.

[0072] In an optional embodiment of the present invention, determining the recommended value of the first spacing parameter of the wind knife structure 2 according to the maximum pressure and the minimum pressure on the surface of the optical element 5 includes:

[0073] Controlling to increase the distance between the wind knife structure 2 and the optical element 5;

[0074] Obtaining the maximum pressure and the minimum pressure on the surface of the optical element 5;

[0075] Calculating a pressure difference between the maximum pressure and the minimum pressure;

[0076] When the pressure difference decreases to reach the preset pressure difference, it is determined that the current distance between the wind knife structure 2 and the optical element 5 is the first distance parameter recommended value.

[0077] Reference Figure 4 and 5 As shown, they are respectively the pressure distribution diagrams on the surface of the optical element 5 when the interval dm=0. Taking the upper input wind knife airflow as an example, according to the flow direction of the wind knife airflow, since the air outlet of the wind knife structure 2 is close to the optical element 5, a negative pressure area, a positive pressure area and a micro-pressure area are formed on the surface of the optical element 5. The pressure of the optical element 5 in the negative pressure area may be between -182Pa and 0Pa, the pressure in the positive pressure area may be between 0Pa and 148Pa, and the pressure in the micro-pressure area may be between -1Pa and 1Pa, so that a large pressure difference appears on the surface of the optical element 5, resulting in a large stress, which is easy to damage the optical element 5. Figure 5 In the figure, the closer the edge of the optical element 5 is to the air inlet side, the greater the positive pressure or negative pressure is, and the farther the distance is, the closer the pressure is to 0 Pa.

[0078] Therefore, in this embodiment, referring to Figure 6 , taking the distance (height) dm between the wind knife structure 2 and the optical element 5 as an example, the farther the wind knife structure 2 is from the optical element 5, the smaller the impact on the optical element 5 will be, but the cleaning ability provided will be smaller. Therefore, the distance dm between the wind knife structure 2 and the optical element 5 is gradually increased at a smaller distance, such as 0. At this time, different distances will correspond to the maximum pressure and minimum pressure of the different optical elements 5, and then the pressure difference is obtained. A preset pressure difference is set to compare with the measured pressure difference. In this embodiment, when dm is 18mm, the maximum pressure and the minimum pressure are close, so that the pressure difference is small, close to 0pa, and the subsequent increase in the pressure difference is not obvious. Therefore, 18mm can be determined as a suitable first spacing parameter recommended value. According to the first spacing parameter recommended value, the actual position of the wind knife structure 2 can be set or controlled to reasonably perform dynamic cleaning on the laser focusing system to avoid damage to the optical element 5. Different preset pressure differences are set to reasonably reduce the distance dm while avoiding damage to the optical element 5, so as to achieve a better cleaning effect, thereby adjusting the wind knife structure 2 more reasonably.

[0079] The spacing dn can also be determined according to actual conditions. Usually, the value of the spacing dn is 4 mm.

[0080] In an optional embodiment of the present invention, the method further comprises: determining a recommended value of a second spacing parameter between adjacent optical elements 5 according to attenuation distances of a plurality of particles between adjacent optical elements 5 .

[0081] During the operation of the laser focusing system, when high-energy laser irradiates the surface of the optical element 5, ablation will occur, generating a large number of particles. After the particles adhere to the subsequent surface of the optical element 5, they will cause a small part of the laser to be scattered by the tiny defects in the optical element 5. The scattered light will cause ablation to the structural components and the optical element 5 through amplification or the high energy it carries, generating more particle contaminants. Such a vicious cycle will greatly weaken the reliability and life of the device.

[0082] Since particles splash outward, they may directly adhere to the surface of subsequent components, which will cause a decrease in load capacity. Introducing wind knife airflow and laminar wind between the optical elements 5 can attenuate the particles, that is, prevent the particles from falling onto the subsequent optical elements 5, thereby achieving cleaning. However, when the distance between adjacent optical elements 5 is too small, particles may still be attached.

[0083] Therefore, in this embodiment, based on determining the attenuation distance of multiple particles between adjacent optical elements 5, the second spacing parameter recommended value can be determined according to the attenuation situation, so that the spacing between adjacent optical elements 5 can be set or controlled according to the second spacing parameter recommended value. When the spacing is large, the particles can be attenuated between adjacent optical elements 5 based on the wind knife airflow and laminar wind, and can be smoothly exported through the airflow, so that the laser focusing system can be dynamically cleaned reasonably, thereby avoiding the adhesion of particles in the optical element 5, thereby avoiding poor laser focusing effect and avoiding damage to the optical element 5.

[0084] In an optional embodiment of the present invention, the determining of the recommended second spacing parameter value of the adjacent optical elements 5 according to the attenuation distances of the plurality of particles between the adjacent optical elements 5 comprises:

[0085] Calculating the attenuation distances of particles with various particle diameters between adjacent optical elements 5, wherein the initial velocities of the particles are the same or different;

[0086] Establishing a particle attenuation coordinate diagram according to the attenuation distance of each of the particles;

[0087] A particle attenuation polynomial is obtained by fitting the particle attenuation coordinate diagram and the initial velocity corresponding to each of the particles;

[0088] Calculating the maximum attenuation distance of the particle according to the particle attenuation polynomial and a preset particle incident speed;

[0089] The recommended value of the second spacing parameter between adjacent optical elements 5 is determined according to the maximum attenuation distance.

[0090] In this embodiment, based on the wind knife structure 2 outputting wind knife airflow between the adjacent optical elements 5 groups, and based on the laminar wind structure outputting laminar wind between the adjacent optical elements 5 groups, different particles have different attenuation distances due to different sizes and excitation speeds. Therefore, the attenuation distances of particles with various particle diameters at the same or different initial velocities can be calculated, so as to simulate the flight attenuation distances of different particles after the particles are generated in the actual situation. In this embodiment, fluent simulation can be applied, and a rectangular two-dimensional model can be used to calculate the attenuation distance. Specifically, the various particle diameters include 0.5 micron, 1 micron, 5 microns, 10 microns, 20 microns, 30 microns, 40 microns, 50 microns, 60 microns, 70 microns, 80 microns, and 90 microns. The density of the particles can be selected to be 2.2 kg / m 3 , and specifically calculate the attenuation distance with different initial velocities. As the diameter of the particle increases, the attenuation distance of the particle also increases, and the increase is more and more rapid. As the incident velocity increases, the attenuation distance of the particle also increases, but the growth rate gradually slows down. Therefore, although both the initial velocity and the particle diameter have an impact on the attenuation distance of the particle, the particle diameter has a greater impact on the attenuation distance. Therefore, by calculating the attenuation distance of various particle diameters to determine the recommended value of the second spacing parameter, it is possible to better avoid various types of particles from adhering to the surface of the optical element 5. Among them, a particle attenuation coordinate diagram about the attenuation distance and the particle diameter is established according to the calculated attenuation distance, such as Figure 7 As shown, according to the particle attenuation coordinate diagram and the initial velocity corresponding to each particle, a polynomial about the particle initial velocity, particle diameter, and particle attenuation distance can be fitted, that is, the particle attenuation polynomial. In this embodiment, the particle attenuation polynomial is determined as: f(x, y) = 2.653-1.299·x+0.06638·y+0.114·x 2 +0.01105 x y-3.353 10 -4 ·y 2 -0.002151 x 3 +1.193·10 -4 ·x 2 ·y-1.654·10 -5 ·x·y 2 +6.01·10 -7 ·y 3 +2.233·10 -5 ·x 4, where f(x,y) represents the particle attenuation distance, x represents the particle diameter, and y represents the particle incident velocity. In this way, the maximum attenuation distance of the particle can be calculated based on the initial velocity of the particle when it is splashed, that is, the preset particle incident velocity. In this embodiment, the maximum attenuation distance determined based on a preset particle incident velocity is 165.2 mm. Therefore, the determined second spacing parameter recommended value can be the maximum attenuation distance or a value adjacent to the maximum attenuation distance that has a preset relationship, such as 170 mm slightly larger than 165.2 mm. Therefore, the spacing between adjacent optical elements 5 can be set or controlled more reasonably according to the second spacing parameter recommended value. When the spacing is large, the particles can be attenuated between adjacent optical elements 5 based on the wind knife airflow and laminar wind, and can be smoothly exported through the airflow, so that the laser focusing system can be reasonably dynamically cleaned, thereby avoiding the attachment of particles in the optical element 5, thereby avoiding poor laser focusing effect, and avoiding damage to the optical element 5.

[0091] In an optional embodiment of the present invention, a simulation model corresponding to the laser focusing system is established, and whether the recommended value of the second spacing parameter meets the preset requirements is determined according to a simulation method, so that a simulation is performed based on the determined second spacing parameter to further clarify whether the second spacing parameter meets the requirements.

[0092] In an optional embodiment of the present invention, the laser focusing system also includes a reflow structure, the reflow structure includes a reflow chamber structure 4 and a reflow plate 3, the reflow plate 3 is arranged at the air outlet, a plurality of reflow ports are provided on the reflow plate 3, the interior of the box structure 1, the reflow ports and the inner cavity of the reflow chamber structure 4 are connected in sequence, and the parameter determination method of the laser focusing system also includes: determining the recommended value of the height parameter of the reflow chamber structure 4 according to the airflow streamlines of the reflow chamber structure 4 and the box structure 1.

[0093] Usually, due to space limitations, in order to better allow the laminar air flow and the wind knife air flow to flow into the fan and prevent pollutants from flowing back into the box structure 1, the air flow needs to be processed, such as setting a return flow structure perpendicular to the air inlet and outlet directions, so that the wind knife air flow and the laminar air flow can clean the inside of the box structure 1 and then carry the pollutants into the return flow structure. Figure 1 In the embodiment, the reflux structure is introduced in the vertical direction and is led out from the reflux structure in the horizontal direction. Figure 1 , 8 As shown in 9, Figure 8The middle arrow refers to the air flow diagram of laminar air and wind knife airflow. A return flow structure is arranged at the air outlet of the box structure 1 of the laser focusing system, so as to allow the laminar air and wind knife airflow to return to the fan, wherein the return flow structure includes a return flow cavity structure 4 and a return flow plate 3. The return flow plate 3 is arranged at the air outlet, so that the air outlet of the box structure 1 flows into the interior of the return flow cavity structure 4 from the multiple return flow ports at the air outlet, and is finally led out from one side of the return flow cavity structure 4. The interior of the return flow cavity structure 4 is a cavity structure. Based on the return flow structure, the wind knife airflow and the laminar air flow carry the pollution and circulate into the fan, and due to the wind knife Airflow and laminar wind have a certain speed. When entering the reflow structure, eddy currents may be generated, causing pollution to flow back to the inside of the box structure 1, causing the box structure 1 to be contaminated. Therefore, in this embodiment, based on the airflow streamlines between the reflow chamber structure 4 and the box structure 1, it is determined whether the pollutants will flow back into the box structure 1, so as to determine the recommended value of the height parameter that meets the requirements. Based on the recommended value of the height parameter, the inner cavity height of the reflow chamber structure 4 is designed to avoid the reflow of pollutants, thereby improving the dynamic cleaning effect, thereby avoiding poor laser focusing effect, and avoiding damage to the optical element 5.

[0094] In an optional embodiment of the present invention, the method of determining the recommended value of the height parameter of the return chamber structure 4 according to the airflow streamlines of the return chamber structure 4 and the box structure 1 includes:

[0095] Obtaining design values ​​of various height parameters of the reflux cavity structure 4;

[0096] Simulating the air flow in the box structure 1 and the return chamber structure 4 according to a plurality of height parameter design values;

[0097] Obtaining a streamline diagram of the air in the reflux chamber structure 4 and the box structure 1;

[0098] Analyze the vortex conditions of the air on both sides of the return plate 3 according to the streamline diagram of the airflow;

[0099] If the eddy current condition meets the preset eddy current condition, the height parameter design value corresponding to the eddy current condition is determined as the height parameter recommended value.

[0100] Normally, according to the external environment space setting, the overall height of the reflux structure cannot be too large, and thus the inner cavity height of the reflux chamber structure 4 cannot be too large. At the same time, too small a height will cause pollutants to flow back to the box structure 1. Therefore, a variety of height parameter design values ​​are designed to determine a suitable height parameter recommended value among these height parameter design values ​​for designing the height of the reflux chamber structure 4. In this embodiment, the height parameter design values ​​include 60mm, 80mm, and 100mm. For different height parameter design values, as well as laminar wind and wind knife airflow in the box structure 1 and the air flow in the box structure 1 and the reflux chamber structure 4, it is possible to simulate and emulate the following: Fig. 9 The flow diagram shown, Fig. 9 In the figure, the dotted line refers to the return plate 3, the air streamlines above the return plate 3 are in the box structure 1, and the air streamlines below the return plate 3 are in the return chamber structure 4. As shown in the figure, when the height of the return chamber structure 4 is 60 mm, serious vortices appear above and below the return plate 3. At this time, the retention time of the gas in the device becomes longer, and the retention time of the particulate pollutants therein also becomes longer accordingly. Therefore, if the height is too small, it cannot play a role in suppressing the return flow, but increases the vortex in the device. When the height of the return chamber structure 4 is 80 mm, there are still self-vortices above and below the return plate 3. At this time, the return flow The eddy current above the plate 3 is small, but this height is still not a reasonable height; when the height of the reflux chamber structure 4 is 100 mm, there is an eddy current below the reflux plate 3, while the eddy current above the reflux plate 3 disappears, achieving the expected effect and limiting the reflux area. Therefore, the reflux chamber should be selected to have a height of 100 mm or above, so as to determine the recommended value of the height parameter that meets the requirements. Based on the recommended value of the height parameter, the inner cavity height of the reflux chamber structure 4 is designed to avoid the reverse flow of contaminants to the box structure, thereby improving the dynamic cleaning effect, avoiding poor laser focusing effect, and avoiding damage to the optical element 5.

[0101] The present invention also proposes a parameter determination device for a laser focusing system, comprising a memory, a processor, and a computer program stored in the memory and executable on the processor. When the processor executes the computer program, the parameter determination method for the laser focusing system as described above is implemented. The beneficial effects thereof are similar to those of the parameter determination method for the laser focusing system described above, and will not be elaborated herein.

[0102] The present invention also proposes a computer-readable storage medium on which a computer program is stored. When the computer program is executed by a processor, the method for determining the parameters of the laser focusing system as described above is implemented. The beneficial effects thereof are similar to the beneficial effects of the method for determining the parameters of the laser focusing system described above, and will not be repeated here.

[0103] Although the disclosure is disclosed as above, the protection scope of the disclosure is not limited thereto. Those skilled in the art may make various changes and modifications without departing from the spirit and scope of the disclosure, and these changes and modifications will fall within the protection scope of the present invention.

Claims

1. A method for determining parameters of a laser focusing system, used for designing a laser focusing system, characterized in that: The laser focusing system comprises a box structure, a wind knife structure and a plurality of optical elements installed side by side in the box structure, an air inlet and an air outlet are arranged at opposite ends of the box structure, and the wind knife structure is arranged at the air inlet; The method for determining parameters of the laser focusing system comprises: Based on the wind knife structure, the wind knife airflow is output to sweep the surface of the optical element, and based on the laminar wind structure, the laminar wind with a preset laminar wind speed is output to between adjacent optical elements to obtain the temperatures of multiple temperature measurement points on the surface of the optical element; The recommended value of the air outlet parameter of the air knife structure is determined according to the comparison between the temperatures of the plurality of temperature measuring points and the preset comparison parameters.

2. The method for determining parameters of a laser focusing system according to claim 1, characterized in that: The preset comparison parameter includes a preset temperature difference; Before obtaining the temperatures of the multiple temperature measurement points of the optical element, the method for determining the parameters of the laser focusing system further includes: Acquire multiple air outlet parameter design values ​​of the air knife structure, wherein, based on the air knife structure operating at the air outlet parameter design values, the temperatures of the multiple temperature measurement points acquired correspond to the air outlet parameter design values; Determining the setting parameters of the air knife structure according to the comparison between the temperatures of the plurality of temperature measuring points and the preset comparison parameters comprises: Calculate the maximum temperature difference of the temperatures of the plurality of temperature measuring points; If the maximum temperature difference is less than or equal to the preset temperature difference, the air outlet parameter design values ​​corresponding to the temperatures of the plurality of temperature measuring points are determined as the air outlet parameter recommended values.

3. The method for determining parameters of a laser focusing system according to claim 1, characterized in that: Also includes: A recommended value of a first spacing parameter of the wind knife structure is determined according to a maximum pressure and a minimum pressure on the surface of the optical element.

4. The method for determining parameters of a laser focusing system according to claim 3, characterized in that: Determining the first spacing parameter recommended value of the wind knife structure according to the maximum pressure and the minimum pressure on the surface of the optical element includes: Controlling to increase the distance between the wind knife structure and the optical element; Obtaining the maximum pressure and the minimum pressure on the surface of the optical element; Calculating a pressure difference between the maximum pressure and the minimum pressure; When the pressure difference decreases to reach a preset pressure difference, the current distance between the wind knife structure and the optical element is determined to be the first distance parameter recommended value.

5. The method for determining parameters of a laser focusing system according to any one of claims 1 to 4, characterized in that: Also includes: The recommended value of the second spacing parameter between adjacent optical elements is determined according to the attenuation distances of the plurality of particles between adjacent optical elements.

6. The method for determining parameters of a laser focusing system according to claim 5, characterized in that: The method of determining the recommended second spacing parameter values ​​of adjacent optical elements according to the attenuation distances of the plurality of particles between the adjacent optical elements comprises: Calculating the attenuation distances of particles with various particle diameters between adjacent optical elements, wherein the initial velocities of the particles are the same or different; Establishing a particle attenuation coordinate diagram according to the attenuation distance of each of the particles; A particle attenuation polynomial is obtained by fitting the particle attenuation coordinate diagram and the initial velocity corresponding to each of the particles; Calculating the maximum attenuation distance of the particle according to the particle attenuation polynomial and a preset particle incident speed; The recommended value of the second spacing parameter between adjacent optical elements is determined according to the maximum attenuation distance.

7. The method for determining parameters of a laser focusing system according to claim 6, characterized in that: The particle attenuation polynomial includes: f(x, y) = 2.653-1.299·x+0.06638·y+0.114·x 2 +0.01105 x y-3.353 10 -4 ·y 2 -0.002151 x 3 +1.193·10 -4 ·x 2 ·y-1.654·10 -5 ·x·y 2 +6.01·10 -7 ·y 3 +2.233·10 -5 ·x 4 , where f(x,y) represents the particle attenuation distance, x represents the particle diameter, and y represents the particle incident velocity.

8. The method for determining parameters of a laser focusing system according to any one of claims 1 to 4, characterized in that: The laser focusing system also includes a reflux structure, which includes a reflux chamber structure and a reflux plate. The reflux plate is arranged at the air outlet, and a plurality of reflux ports are provided on the reflux plate. The interior of the box structure, the reflux ports and the inner cavity of the reflux chamber structure are connected in sequence. The parameter determination method of the laser focusing system also includes: determining the recommended value of the height parameter of the reflux chamber structure according to the airflow streamlines of the reflux chamber structure and the box structure.

9. The method for determining parameters of a laser focusing system according to claim 8, characterized in that: The determining of the recommended value of the height parameter of the reflow chamber structure according to the airflow streamlines of the reflow chamber structure and the box structure comprises: Obtaining design values ​​of various height parameters of the reflux cavity structure; Simulating the air flow in the box structure and the return chamber structure according to a plurality of height parameter design values; Obtaining a streamline diagram of the air in the reflux cavity structure and the box structure; Analyzing the vortex conditions of the air on both sides of the return plate according to the streamline diagram of the airflow; If the eddy current condition meets the preset eddy current condition, the height parameter design value corresponding to the eddy current condition is determined as the height parameter recommended value.

10. A device for determining parameters of a laser focusing system, characterized in that: The method comprises a memory, a processor and a computer program stored in the memory and executable on the processor, wherein the processor implements the parameter determination method of the laser focusing system according to any one of claims 1 to 9 when executing the computer program.

11. A computer-readable storage medium having a computer program stored thereon, characterized in that: When the computer program is executed by a processor, the method for determining parameters of a laser focusing system according to any one of claims 1 to 9 is implemented.

Images