A safety control system applied to wafer processing equipment

Abstract

The application discloses a safety control system applied to wafer processing equipment, which comprises a safety door switch, a control module, a safety relay and a servo driver, the safety door switch is connected with the control module, the control module is connected with the safety relay, the safety relay is connected with the servo driver, the safety door switch outputs double-path switch signals and locking signals to the control module, the control module outputs a locking and unlocking command to the safety door switch, the control module outputs an STO signal to the safety relay according to the double-path switch signals and the locking signals, the safety relay outputs an action signal to the servo driver, and the servo driver outputs an STO feedback signal to the control module based on the working state.

Description

Technical Field

[0001] This invention relates to the field of semiconductor wafer processing technology, and in particular to a safety control system for wafer processing equipment. Background Technology

[0002] Currently, the semiconductor industry manufactures semiconductor chips by forming electronic circuits such as ICs (Integrated Circuits) or LSIs (Large Scale Integrations) on the surface of semiconductor wafers. Chips are the carriers of integrated circuits, and chip manufacturing involves processes such as chip design, wafer fabrication, wafer processing, electrical measurement, dicing, packaging, and testing. Among these processes, chemical mechanical polishing (CMP) is used in wafer processing.

[0003] Wafer processing equipment comprises various functional modules, such as polishing units, transfer units, measurement units, cleaning units, and drying units. The integration of wafer processing equipment is high, and its cabinet typically features numerous protective doors corresponding to each functional module. When the equipment needs to be stopped urgently, inspected, or maintained, these protective doors must be opened. Internal operating mechanisms, such as polishing and cleaning components, must cease operation at this time to prevent personal injury or other safety accidents. Therefore, it is essential to reliably disconnect the motor power supply without cutting off the driver power, preventing the motor from outputting torque and avoiding unexpected motor starts. Summary of the Invention

[0004] This invention provides a safety control system for wafer processing equipment, which aims to at least solve one of the technical problems existing in the prior art.

[0005] This invention provides a safety control system for wafer processing equipment, including a safety door switch, a control module, a safety relay, and a servo driver. The safety door switch is connected to the control module, the control module is connected to the safety relay, and the safety relay is connected to the servo driver. The safety door switch outputs a dual-channel switching signal and a locking signal to the control module. The control module outputs a lock / unlock command to the safety door switch. The control module outputs an STO signal to the safety relay based on the dual-channel switching signal and the locking signal. The safety relay outputs an action signal to the servo driver. The servo driver outputs an STO feedback signal to the control module based on its operating state.

[0006] In one embodiment, the wafer processing equipment is divided into multiple areas according to function. The safety doors in different areas are connected to different control modules through their respective safety door switches. The different control modules are cascaded to control the servo drive of another area according to the opening and closing status of the safety door in one area.

[0007] In one embodiment, the safety control system includes a transmission module safety door switch and a robotic arm safety door switch, wherein the servo driver of the transmission module is safely stopped when the robotic arm safety door switch is opened.

[0008] In one embodiment, the control module includes a monitoring unit for receiving switch signals, a locking feedback unit for monitoring locking signals, a protective lock unit for safety door switch locking control and STO control, and an output unit.

[0009] In one embodiment, the monitoring unit and the locking feedback unit are respectively connected to the protective lock unit, the protective lock unit is connected to the output unit, the dual-channel switch signal is input to the monitoring unit, the locking signal is input to the locking feedback unit, the STO feedback signal is input to the output unit, and the output unit outputs the STO signal and the locking / unlocking command.

[0010] In one embodiment, an external forced unlock signal is input to the protective lock unit.

[0011] In one embodiment, the protective lock unit outputs an alarm to provide a notification.

[0012] In one embodiment, the control module includes a main control module and an expansion module.

[0013] In one embodiment, the main control module includes a first monitoring unit, a first locking feedback unit, a first protective lock unit, a second monitoring unit, a second locking feedback unit, a second protective lock unit, and a first AND gate. The first monitoring unit and the first locking feedback unit are respectively connected to the first protective lock unit, the second monitoring unit and the second locking feedback unit are respectively connected to the second protective lock unit, and the first protective lock unit and the second protective lock unit are respectively connected to the first AND gate.

[0014] In one embodiment, the expansion module includes a third monitoring unit, a third locking feedback unit, a third protective lock unit, a fourth monitoring unit, a fourth locking feedback unit, a fourth protective lock unit, and a second AND door. The third monitoring unit and the third locking feedback unit are respectively connected to the third protective lock unit, the fourth monitoring unit and the fourth locking feedback unit are respectively connected to the fourth protective lock unit, and the third protective lock unit and the fourth protective lock unit are respectively connected to the second AND door.

[0015] In one embodiment, the output of the third protective lock unit is also connected to the input of the first door.

[0016] The beneficial effects of this invention include: monitoring the open, closed and locked states of the safety door, and controlling the STO function of the servo driver according to the state of the safety door, thereby controlling the safe operation and shutdown of the motor. Attached Figure Description

[0017] The advantages of the present invention will become clearer and easier to understand through the detailed description taken in conjunction with the following accompanying drawings, but these drawings are merely illustrative and do not limit the scope of protection of the present invention, wherein:

[0018] Figure 1 This invention illustrates a wafer processing apparatus according to an embodiment of the present invention;

[0019] Figure 2 This invention illustrates a safety door of a wafer processing apparatus according to an embodiment of the present invention;

[0020] Figures 3 to 5 Example 1 is shown;

[0021] Figures 6 to 8 Examples 2 and 3 are shown. Detailed Implementation

[0022] The technical solutions of the present invention will be described in detail below with reference to specific embodiments and accompanying drawings. The embodiments described herein are specific implementations of the present invention, used to illustrate the concept of the present invention; these descriptions are explanatory and exemplary, and should not be construed as limiting the implementation methods and scope of protection of the present invention. It should be noted that, unless otherwise specified, the embodiments and features described in this application can be combined with each other. In addition to the embodiments described herein, those skilled in the art can employ other obvious technical solutions based on the content disclosed in the claims and specification of this application. These technical solutions include those that make any obvious substitutions and modifications to the embodiments described herein. It should be understood that, unless specifically stated otherwise, for ease of understanding, the following description of specific embodiments of the present invention is based on the premise that the relevant equipment, devices, components, etc., are in their original static state and are not given external control signals or driving forces.

[0023] Furthermore, it should be noted that the terms used in this application to indicate orientation, such as front, back, up, down, left, right, top, bottom, front, back, horizontal, and vertical, are merely for ease of explanation and to aid in the understanding of relative position or direction, and are not intended to limit the orientation of any device or structure.

[0024] To illustrate the technical solution described in this invention, the following description will be provided with reference to the accompanying drawings and embodiments.

[0025] In this application, chemical mechanical polishing is also called chemical mechanical planarization, and wafer is also called wafer, silicon wafer, substrate, etc., with the same meaning and actual function.

[0026] like Figure 1 As shown, a wafer processing equipment 100 provided in one embodiment of the present invention includes: a cache module 110, two processing modules 120 and a front-end module 150.

[0027] The cache module 110 can be configured with multiple layers, and the multi-layer cache module 110 can cache multiple wafers simultaneously.

[0028] Processing module 120 is used for polishing wafers, and two processing modules 120 can work independently. Each processing module 120 may include: polishing unit 121, first robot arm 122, transfer unit 123, second robot arm 124, and cleaning unit 125.

[0029] like Figure 1 As shown, the wafer processing equipment 100 includes four polishing units 121, which can be chemical mechanical polishing units. When the wafer processing equipment 100 is operating, the wafer can enter any one or more of the four polishing units 121 for polishing. After completing one or more polishing steps, the wafer is sent back to the transfer unit 123. Figure 1 As shown, each polishing unit 121 may include a polishing disc 211, a polishing head 212, and a loading and unloading platform 213. The loading and unloading platforms 213 of both polishing units 121 are located adjacent to the second robot arm 124.

[0030] like Figure 1 As shown, a transfer module 130 can be formed between the polishing units 121 of the two processing modules 120, and transfer units 123 can be disposed within the transfer module 130. The transfer units 123 can transfer wafers between the first robot 122 and the second robot 124. The first robot 122 moves between the buffer module 110 and the transfer unit 123, and between the transfer unit 123 and the cleaning unit 125. The second robot 124 is used to transfer wafers to the polishing unit 121.

[0031] like Figure 1As shown, each cleaning unit 125 may include a cleaning module 251, a drying module 252, a vertical buffer module 253, and a flipping module 254, arranged side by side. The cleaning module 251 can be implemented using various cleaning devices, such as brushing or rotary cleaning. The drying module 252 can be implemented using a post-processing device.

[0032] like Figure 1 As shown, each cleaning unit 125 may further include a third robotic arm 255 and a fourth robotic arm 256. The third robotic arm 255 moves above the cleaning module 251 and the vertical buffer module 253, and the fourth robotic arm 256 moves above the cleaning module 251, the drying module 252 and the flipping module 254.

[0033] like Figure 1 As shown, there is a space 140 between the cleaning units 125 of the two processing modules 120, and the two first robotic arms 122 and the buffer module 110 are arranged in the space 140.

[0034] like Figure 2 As shown, the wafer processing equipment 100 has multiple safety doors installed on its cabinet. During normal operation, all safety doors are closed to provide a sealed chamber environment. Each safety door is equipped with a safety door switch. The wafer processing equipment 100 can be divided into multiple areas according to function, for example, by the corresponding positions of the two processing modules 120 and the front-end module 150, or further subdivided by the polishing unit 121 and the cleaning unit 125. The numerous safety doors on the cabinet are located in different areas and are also distinguished according to these areas.

[0035] See Figure 2 Let's take a specific application scenario as an example. Figure 2 The upper left side of the door is a double door for the transmission module. Two safety door switches are installed inside the door: transmission module safety door switch A1 and transmission module safety door switch A2. Figure 2 The right-hand double door is a robotic arm safety door, equipped with robotic arm safety door switch B1 and robotic arm safety door switch B2. For example, the transmission module corresponding to the transmission module safety door can be a transmission unit 123, and the robotic arm corresponding to the robotic arm safety door can be a first robotic arm 122 or a second robotic arm 124.

[0036] During normal production, safety door switches A1 and A2 of the transmission module, and safety door switches B1 and B2 of the robotic arm, all need to be closed and locked. When safety door switch A1 or A2 of the transmission module is open, the transmission module motor needs to be safely stopped. At this time, the robotic arm is far enough away from the safety door of the transmission module that personnel will not touch the robotic arm when maintaining the transmission module, so there is no need to stop the robotic arm safely. In other words, the opening and closing status of the safety door of the transmission module on the left side does not need to affect the movement mechanism of the robotic arm on the right side.

[0037] When either robot arm safety door switch B1 or B2 is opened, the robot arm motor stops safely. Simultaneously, due to the relatively long size of the transmission module and the possibility of personnel touching it while maintaining the robot arm within the safety door area, it is necessary to simultaneously stop the transmission module safely by controlling its servo driver. In other words, the opening and closing status of the robot arm safety door on the right side requires simultaneous control of the transmission module's movement mechanism on the left side.

[0038] It is understandable that when any device or module in the wafer processing equipment 100 malfunctions, or when a device suddenly stops operating, appropriate measures need to be taken.

[0039] To enable safety control, this invention provides a safety control system for wafer processing equipment, which implements STO (Safe Torque Off) control.

[0040] Example 1:

[0041] like Figure 3 As shown in Embodiment 1, the safety control system includes a safety door switch, a control module, a safety relay, and a servo driver. The safety door switch is connected to the control module, the control module is connected to the safety relay, and the safety relay is connected to the servo driver. The control module can be implemented using a PLC (Programmable Logic Controller). Additionally, the servo driver is connected to the motors in each functional module unit to control the motor's operating state.

[0042] like Figure 3As shown, the safety door switch outputs switch signal 1, switch signal 2 (i.e., dual-channel switch signals), and a lock signal to the control module. Switch signal 1 and switch signal 2 indicate whether the safety door switch is currently open or closed; outputting dual-channel switch signals improves reliability and avoids false alarms. The lock signal indicates whether the safety door switch is closed and locked. The control module outputs lock / unlock commands to the safety door switch, thereby controlling the safety door switch to perform the locking or unlocking action. A closed-loop control and detection system is implemented between the safety door switch and the control module.

[0043] The control module outputs an STO signal to the safety relay based on switch signal 1, switch signal 2, and the latching signal. The safety relay then controls the STO function of the servo drive. The safety relay outputs an action signal to the servo drive, enabling it. Based on its operating state, the servo drive outputs an STO feedback signal to the control module, thereby monitoring the operation of the servo drive's STO function. A closed-loop control and detection system is achieved between the control module, the safety relay, and the servo drive through the STO signal, action signal, and STO feedback signal.

[0044] Based on the hardware structure of the above safety control system, the open, closed and locked states of the safety door are monitored, and the STO function of the servo driver is controlled according to the state of the safety door, thereby controlling the safe operation and shutdown of the motor.

[0045] like Figure 4 As shown in Embodiment 1, the control module includes a monitoring unit, a locking feedback unit, a protective lock unit, and an output unit. The monitoring unit and the locking feedback unit are connected to the protective lock unit, which is connected to the output unit. A dual-channel switch signal is input to the monitoring unit, a locking signal is input to the locking feedback unit, and an external forced unlocking signal is input to the protective lock unit. The protective lock unit can output an alarm signal for notification. An STO feedback signal is input to the output unit, and the output unit outputs an STO signal and a locking / unlocking command. The forced unlocking signal can be input via an external control button. Each unit in the control module described here can be implemented by a software functional unit.

[0046] Understandable Figure 3 and Figure 4 This diagram only shows a scheme for connecting the control module to the relevant components of a single safety door (e.g., safety door switch, safety relay, and servo driver). In practical applications, multiple safety doors can be connected to the control module. Figure 5 The scheme of connecting two safety doors to the control module is shown, and it also adopts the working principle of Embodiment 1, which will not be described in detail here.

[0047] The working process of a safety control system will be explained using a specific application scenario as an example.

[0048] When the safety door closes, the monitoring unit outputs a signal to the protective lock unit. The protective lock unit then outputs an STO signal and a lock / unlock command via its output unit. If the locking signal from the safety door switch returns to the locking feedback unit, the safety door completes the locking control. If the expected locking signal is not returned, the control module will output a locking fault, such as an alarm signal, and cancel the locking command.

[0049] Example 2:

[0050] Example 2 illustrates a method for controlling a device equipped with numerous safety doors divided into different zones. Figure 6 The example shows two regions.

[0051] like Figure 6 As shown, safety doors located in different areas are connected to different control modules via their respective safety door switches. Furthermore, the different control modules can be cascaded to control the servo drive of another area based on the opening and closing status of the safety doors in one area.

[0052] In one embodiment, such as Figure 6 As shown, the control module includes a main control module and an expansion module.

[0053] like Figure 6 As shown, safety door switches 1 and 2 are connected to the main control module. Safety door switch 1 outputs switch signal 1, switch signal 2, and lock signal 1 to the main control module. The main control module outputs lock / unlock command 1 to safety door switch 1. Safety door switch 2 outputs switch signal 3, switch signal 4, and lock signal 2 to the main control module. The main control module outputs lock / unlock command 2 to safety door switch 2. The main control module outputs STO signal 1 to safety relay 1 based on all received switch and lock signals. Safety relay 1 outputs an action signal to servo driver 1 and servo driver 2. Servo driver 1 and servo driver 2 can be connected in series to output STO feedback signal 1 to the main control module. Of course, servo driver 1 and servo driver 2 can also each output an STO feedback signal to the main control module.

[0054] like Figure 6As shown, safety door switches 3 and 4 are connected to the expansion module. Safety door switch 3 outputs switch signal 5, switch signal 6, and lock signal 3 to the expansion module. The expansion module outputs lock / unlock command 3 to safety door switch 3. Safety door switch 4 outputs switch signal 7, switch signal 8, and lock signal 4 to the expansion module. The expansion module outputs lock / unlock command 4 to safety door switch 4. The expansion module outputs STO signal 2 to safety relay 2 based on all received switch and lock signals. Safety relay 2 outputs an action signal to servo driver 3 and servo driver 4. Servo driver 3 and servo driver 4 can output STO feedback signal 2 to the expansion module.

[0055] like Figure 7 As shown, the main control module includes a first monitoring unit, a first locking feedback unit, a first protective lock unit, a second monitoring unit, a second locking feedback unit, a second protective lock unit, a first AND gate, output unit 1, output unit 2, and output unit 3. The first monitoring unit and the first locking feedback unit are respectively connected to the first protective lock unit; the second monitoring unit and the second locking feedback unit are respectively connected to the second protective lock unit; and the first and second protective lock units are respectively connected to the first AND gate. One output terminal of the first protective lock unit is also connected to the input terminal of output unit 1, and output unit 1 outputs a lock / unlock command 1. One output terminal of the second protective lock unit is also connected to the input terminal of output unit 2, and output unit 2 outputs a lock / unlock command 2. The output terminal of the first AND gate is connected to the input terminal of output unit 3, and the STO feedback signal 1 is also connected to output unit 3, and output unit 3 outputs the STO signal 1.

[0056] like Figure 8 As shown, the expansion module includes a third monitoring unit, a third locking feedback unit, a third protective lock unit, a fourth monitoring unit, a fourth locking feedback unit, a fourth protective lock unit, a second AND gate, an output unit 4, an output unit 5, and an output unit 6. The third monitoring unit and the third locking feedback unit are connected to the third protective lock unit, the fourth monitoring unit and the fourth locking feedback unit are connected to the fourth protective lock unit, and the third and fourth protective lock units are connected to the second AND gate. One output terminal of the third protective lock unit is also connected to the input terminal of output unit 4, and output unit 4 outputs a lock / unlock command 3. One output terminal of the fourth protective lock unit is also connected to the input terminal of output unit 5, and output unit 5 outputs a lock / unlock command 4. The output terminal of the second AND gate is connected to the input terminal of output unit 6, and the STO feedback signal 2 is also connected to output unit 6, and output unit 6 outputs the STO signal 2.

[0057] In Example 2, the output signals of the first and second protective lock units, respectively connected to safety door switch 1 and safety door switch 2, are output as STO signal 1 to region 1 through the first AND gate, thereby controlling the servo driver in region 1. The control of region 2 is the same as that of region 1.

[0058] Example 3:

[0059] Example 3 Figure 7 and Figure 8 As shown by the gray dashed line with arrows, the main control module and the expansion module are cascaded, thereby enabling the safety door switch 3 in area 2 to simultaneously control the servo drive in area 1. Figure 8 One output terminal of the third protective lock unit connected to the safety door switch 3 is simultaneously connected to the second AND door and Figure 7 The first AND gate in the system outputs a control signal that is simultaneously input to both the first and second AND gates, thereby affecting STO signal 1 and STO signal 2. This enables the safety door switch 3 to simultaneously control the servo driver in area 1 and the servo driver in area 2.

[0060] When a safety door switch in one area needs to control a servo driver in another area, the solution in Example 3 can be used. This eliminates the need to modify the existing hardware circuitry; only the internal program unit needs to be modified.

[0061] It is understood that the above embodiments are merely examples, and due to space limitations, it is impossible to list all other connection and control methods for a number of safety doors. The number of safety doors controlled is not limited to the values ​​listed above, and can be designed according to actual needs in other embodiments. All technical ideas disclosed in this application and basic principles adopted in this application should be covered by the claims of this invention.

[0062] This application has the following advantages:

[0063] a. By programming the control module, relatively complex control can be achieved.

[0064] b. All safety door switches are individually connected to the control module, and the signals can be monitored independently, resulting in simple wiring.

[0065] c. By programming the control module, the output channel of the control module can realize the electromagnetic locking function of the safety door switch.

[0066] d. After the STO function of the servo drive is activated, the STO feedback signal can be connected to the feedback channel of the control module, which can achieve the PLD safety level.

[0067] e. Multiple network interface modules can be configured for the control module, allowing it to connect to different host systems. All input and output signals in the control module can be read by the host system.

[0068] The accompanying drawings in this specification are schematic diagrams used to illustrate the concept of the invention and to schematically show the shapes of the various parts and their interrelationships. It should be understood that, in order to clearly show the structure of the various components of the embodiments of the invention, the drawings are not drawn to the same scale, and the same reference numerals are used to indicate the same parts in the drawings.

[0069] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0070] Although embodiments of the invention have been shown and described, those skilled in the art will understand that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the claims and their equivalents.

Claims

1. A safety control system applied to a wafer processing equipment divided into multiple functional areas, characterized in that, The system includes a safety door switch, a control module, a safety relay, and a servo driver. The safety door switch is connected to the control module, the control module is connected to the safety relay, and the safety relay is connected to the servo driver. The safety door switch outputs a dual-channel switch signal and a locking signal to the control module. The control module outputs a lock / unlock command to the safety door switch. The control module outputs an STO signal to the safety relay based on the dual-channel switch signal and the locking signal. The safety relay outputs an action signal to the servo driver. The servo driver outputs an STO feedback signal to the control module based on its operating state. Safety doors located in different areas are connected to different control modules through their respective safety door switches. The different control modules are cascaded to control the servo drive of another area based on the opening and closing status of the safety door in one area.

2. The safety control system as described in claim 1, characterized in that, It includes a safety door switch for the transmission module and a safety door switch for the robotic arm. When the safety door switch for the robotic arm is opened, the servo drive that controls the transmission module to stop safely.

3. The safety control system as described in claim 1, characterized in that, The control module includes a monitoring unit for receiving switch signals, a locking feedback unit for monitoring locking signals, a protective lock unit for safety door switch locking control and STO control, and an output unit.

4. The safety control system as described in claim 3, characterized in that, The monitoring unit and the locking feedback unit are respectively connected to the protective lock unit, the protective lock unit is connected to the output unit, the dual-channel switch signal is input to the monitoring unit, the locking signal is input to the locking feedback unit, the STO feedback signal is input to the output unit, and the output unit outputs the STO signal and the locking / unlocking command.

5. The safety control system as described in claim 3, characterized in that, An external forced unlocking signal is input to the protective lock unit.

6. The safety control system as described in claim 3, characterized in that, The protective lock unit outputs an alarm to provide a notification.

7. The safety control system as described in claim 1, characterized in that, The control module includes a main control module and an expansion module.

8. The safety control system as described in claim 7, characterized in that, The main control module includes a first monitoring unit, a first locking feedback unit, a first protective lock unit, a second monitoring unit, a second locking feedback unit, a second protective lock unit, and a first AND gate. The first monitoring unit and the first locking feedback unit are respectively connected to the first protective lock unit, the second monitoring unit and the second locking feedback unit are respectively connected to the second protective lock unit, and the first protective lock unit and the second protective lock unit are respectively connected to the first AND gate.

9. The safety control system as described in claim 8, characterized in that, The expansion module includes a third monitoring unit, a third locking feedback unit, a third protective lock unit, a fourth monitoring unit, a fourth locking feedback unit, a fourth protective lock unit, and a second AND gate. The third monitoring unit and the third locking feedback unit are respectively connected to the third protective lock unit, the fourth monitoring unit and the fourth locking feedback unit are respectively connected to the fourth protective lock unit, and the third protective lock unit and the fourth protective lock unit are respectively connected to the second AND gate.

10. The safety control system as described in claim 9, characterized in that, The output of the third protective lock unit is also connected to the input of the first door.

Images