Quartz tube cutting apparatus and quartz tube cutting method

Abstract

The application discloses a quartz tube cutting device, which comprises a base, a workbench and a cutter holder arranged on the base; a tube body clamp is arranged on the top of the workbench, the tube body clamp is provided with a positioning hole, a rolling bearing is arranged in the positioning hole and is sleeved with and linked with a quartz tube, a lifting driving device capable of driving the tube body clamp to reciprocatingly lift and fall and a translation driving device capable of driving the workbench to reciprocatingly move along a horizontal direction are further arranged on the workbench; a cutter sleeve is arranged on the cutter holder, one end of the cutter sleeve is provided with a rotary cutter head matched with a cutting end of the quartz tube assembled in the tube body clamp, the rotary cutter head is provided with a rotation axis which is parallel to the axis of the quartz tube assembled in the tube body clamp, and a power switch for controlling the start and stop of the rotary cutter head is arranged on the workbench. The quartz tube cutting device can optimize the cutting operation method of the quartz tube, so that pollution and damage of the annealing sheet caused by taking out the annealing sheet from the quartz tube can be avoided. The application further discloses a quartz tube cutting method using the quartz tube cutting device.

Description

Technical Field

[0001] This invention relates to the field of quartz tube cutting technology and related equipment, and particularly to a quartz tube cutting device. This invention also relates to a method for opening quartz tubes using this quartz tube cutting device. Background Technology

[0002] High-purity quartz tubes possess characteristics such as high cleanliness, high temperature resistance, and an extremely low coefficient of thermal expansion, making them widely used in heat treatment processes. In semiconductor material research, high-purity quartz tubes are required for the N-type annealing of epitaxial wafers. This involves encapsulating the epitaxial wafer in a high-purity quartz tube under vacuum conditions and then placing it in an annealing furnace for heating, temperature control, and cooling. The purpose of vacuum sealing is to ensure that the interior of the quartz tube contains virtually no oxygen or water.

[0003] After a certain annealing process, the annealed sheet inside the quartz tube needs to be completely removed, and the surface of the annealed sheet must be free of contamination. Most common quartz tube cutting machines cut through the quartz tube in a water flow environment, using water to remove quartz dust generated during the cutting process. This process results in significant contamination and coarse cutting precision, failing to meet cleanliness requirements. Furthermore, it is particularly important to note that in vacuum-sealed annealed tubes, the external pressure is greater than the internal pressure immediately after cutting, directly causing quartz powder or water generated during the cutting process to rapidly enter the tube and contaminate the annealed sheet.

[0004] Because the annealing tube is thick and strong, it is not easily broken. Directly damaging the quartz tube would damage the annealing sheet, while cutting the quartz tube using conventional methods would contaminate the annealing sheet. This makes it very difficult to remove the annealing sheet from the quartz tube and causes many inconveniences to the implementation of related processes.

[0005] Therefore, how to avoid contamination and damage to the annealing sheet when removing it from the quartz tube is an important technical problem that needs to be solved by those skilled in the art. Summary of the Invention

[0006] The purpose of this invention is to provide a quartz tube cutting device that optimizes the cutting process of quartz tubes, thereby avoiding contamination and damage to the annealed sheets when removing them from the quartz tube. Another purpose of this invention is to provide a method for opening quartz tubes using this quartz tube cutting device.

[0007] To solve the above technical problems, the present invention provides a quartz tube cutting device, including a horizontally arranged base, a worktable movably arranged on the base, and a tool holder also arranged on the base;

[0008] The top of the workbench is provided with a tube clamp, and the middle of the tube clamp has a positioning hole for the quartz tube to pass through. The positioning hole is provided with a rolling bearing that is fitted and linked to the quartz tube. The workbench is also provided with a lifting drive device that can drive the tube clamp to reciprocate up and down, and a translation drive device that can drive the workbench to reciprocate in the horizontal direction.

[0009] The tool holder is equipped with a tool sleeve, and one end of the tool sleeve is equipped with a rotating cutter head that mates with the cutting end of the quartz tube assembled in the tube body clamp. The rotation axis of the rotating cutter head is parallel to the axis of the quartz tube assembled in the tube body clamp. A power switch for controlling the start and stop of the rotating cutter head is provided on the worktable.

[0010] Preferably, the blade sleeve has a horizontally extending adjustment cavity in the middle, an adjustment slider is slidably disposed in the adjustment cavity, an adjustment connecting rod is linked to the front end of the adjustment slider, and the front end of the adjustment connecting rod extends out of the blade sleeve and is coaxially linked to the rotating blade head.

[0011] Preferably, a locking bolt is inserted into the adjustment cavity from the outside to the inside on the side wall of the blade sheath, and the insertion end of the locking bolt is pressed and adapted to the outer wall of the adjustment slider.

[0012] Preferably, the base has a mounting hole in the middle, a rotating bearing is embedded in the mounting hole, and the bottom end of the tool holder is coaxially inserted into the rotating bearing and linked with the rotating bearing.

[0013] Preferably, the bottom of the tool holder is provided with an annular boss, and the annular boss has a limiting groove extending along its circumference, and a limiting bolt that is threadedly engaged with the base is inserted into the limiting groove.

[0014] Preferably, one end of the blade sleeve is provided with a limiting rubber plug, and the middle of the limiting rubber plug has a limiting hole for the adjusting connecting rod to pass through coaxially.

[0015] Preferably, a sealing plug is detachably installed at the other end of the blade sheath, and the outer wall of the sealing plug is pressed tightly against the inner wall of the adjustment cavity.

[0016] Preferably, it further includes a sleeve fitted outside the quartz tube, the sleeve being coaxially embedded between the rolling bearing and the quartz tube, and the sleeve being linked with the quartz tube, with an adjusting handwheel linkedly provided at one end of the sleeve away from the cut end of the quartz tube.

[0017] Preferably, both the lifting drive device and the translation drive device are lead screw assemblies.

[0018] This invention also provides a method for opening a quartz tube, which uses the quartz tube cutting equipment described above and includes the following steps:

[0019] In the preparation of the operation, the quartz tube to be cut is aligned and assembled in the tube fixture. Then, by the separate actions of the lifting drive device and the translation drive device, the horizontal position of the worktable and the vertical position of the tube fixture are adjusted to the correct position, so that the cutting end of the quartz tube assembled in the tube fixture is located at the target position that cooperates with the rotating cutter head.

[0020] For tube cutting, the rotating cutter head is started by power switch. Then, by operating the translation drive device and the lifting drive device in coordination, the worktable and tube clamp are controlled to move the quartz tube gradually closer to the rotating cutter head until the outer wall of the quartz tube is tangent to the rotating cutter head. Then, the quartz tube is controlled to slowly move closer to the axis of the rotating cutter head. During this process, the quartz tube rotates synchronously in the opposite direction to the rotating cutter head under the rotation friction of the rotating cutter head until the rotating cutter head cuts an annular groove with a preset cutting depth on the outer wall of the cutting end of the quartz tube.

[0021] To remove the quartz tube from the tube clamp after the tube body has been cut, wipe the annular groove cut with alcohol to remove powder impurities generated during the tube body cutting process. Then, gently tap the cut end of the quartz tube with an iron rod to break the quartz tube at the annular groove cut. After breaking the quartz tube, use tweezers to completely and cleanly remove the annealing sheet inside the quartz tube.

[0022] Compared to the aforementioned background technology, the quartz tube cutting equipment provided by this invention, during operation, aligns and assembles the quartz tube to be cut into the tube fixture according to the current working conditions. Then, through the separate actions of the lifting drive device and the translation drive device, the horizontal position of the worktable and the vertical position of the tube fixture are adjusted to the correct positions, so that the cutting end of the quartz tube assembled in the tube fixture is located at the target position that mates with the rotating cutter head. Then, the rotating cutter head is started by the power switch, and the translation drive device and the lifting drive device are operated in coordination to control the linkage between the worktable and the tube fixture, so that the quartz tube gradually approaches the rotating cutter head until the outer wall of the quartz tube is tangent to the rotating cutter head. Then, the quartz tube is controlled to slowly approach the axis of the rotating cutter head. During this process, the quartz tube rotates synchronously in the opposite direction to the rotating cutter head under the rotational friction of the rotating cutter head until the rotating cutter head cuts an annular groove with a preset cutting depth on the outer wall of the cutting end of the quartz tube. After the quartz tube is cut, remove it from the clamp. Wipe the annular groove cut with alcohol to remove powdery impurities generated during the cutting process. Then, gently tap the cut end of the quartz tube with an iron rod to break it at the annular groove cut. After breaking the quartz tube, use tweezers to carefully and cleanly remove the annealed sheet inside. This completes the cutting and opening of the quartz tube, allowing for the complete and uncontaminated removal of the annealed sheet, effectively avoiding contamination and damage to the annealed sheet during removal.

[0023] In the quartz tube opening method provided by this invention, through the sequential operation steps of preparation, tube cutting, and tube opening and removal, a ring-shaped groove is cut around the cutting end of the quartz tube by rotating the cutting head. Then, the cutting end of the quartz tube is gently tapped with an iron rod, which causes the quartz tube to break at the ring-shaped groove. After breaking the quartz tube, the annealed sheet inside the quartz tube can be completely and cleanly removed with tweezers, thereby effectively avoiding contamination and damage to the annealed sheet when removing it from the quartz tube. Attached Figure Description

[0024] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0025] Figure 1 This is a front view of the assembly structure of a quartz tube cutting device according to a specific embodiment of the present invention;

[0026] Figure 2 for Figure 1 Top view of the mating structure between the tool holder and the base;

[0027] Figure 3 for Figure 1 Top view of the structure of the middle workbench;

[0028] Figure 4 This is a schematic diagram showing the initial position of the rotating cutter head and the quartz tube.

[0029] Figure 5 This is a schematic diagram showing the tangential position between the rotating cutter head and the quartz tube.

[0030] Figure 6 This is a schematic diagram showing the intersection of the rotating cutter head and the quartz tube.

[0031] Figure 7 This is a flowchart of a quartz tube opening method provided in a specific embodiment of the present invention.

[0032] in,

[0033] 10-Base; 101-Mounting hole; 102-Rotating bearing; 103-Limit bolt; 11-Worktable; 111-Lifting drive device; 112-Translation drive device; 12-Tool holder; 121-Tool sleeve; 122-Rotating cutter head; 123-Adjusting cavity; 124-Adjusting slider; 125-Adjusting connecting rod; 126-Locking bolt; 127-Annular boss; 128-Limiting groove; 129-Limiting rubber plug; 1291-Limiting hole; 120-Sealing rubber plug; 13-Pipe clamp; 131-Positioning hole; 132-Rolling bearing; 133-Sleeve; 134-Adjusting handwheel; 14-Power switch; 20-Quartz tube. Detailed Implementation

[0034] The core of this invention is to provide a quartz tube cutting device that optimizes the cutting process of quartz tubes, thereby avoiding contamination and damage to the annealed sheets when removing them from the quartz tube; at the same time, it provides a method for opening quartz tubes using the quartz tube cutting device.

[0035] To enable those skilled in the art to better understand the present invention, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0036] Please refer to the reference. Figures 1 to 6 .

[0037] In a specific embodiment, the quartz tube cutting device provided by the present invention includes a horizontally arranged base 10, a worktable 11 movably arranged on the base 10, and a knife holder 12 arranged on the base 10.

[0038] The top of the workbench 11 is provided with a tube clamp 13. The tube clamp 13 has a positioning hole 131 in the middle for the quartz tube 20 to pass through. A rolling bearing 132 is provided in the positioning hole 131 to be fitted and linked with the quartz tube 20. The workbench 11 is also provided with a lifting drive device 111 that can drive the tube clamp 13 to reciprocate and lift, and a translation drive device 112 that can drive the workbench 11 to reciprocate in the horizontal direction.

[0039] The tool holder 12 is equipped with a tool sleeve 121. One end of the tool sleeve 121 is equipped with a rotating cutter head 122 that cooperates with the cutting end of the quartz tube 20 assembled in the tube body clamp 13. The rotation axis of the rotating cutter head 122 is parallel to the axis of the quartz tube 20 assembled in the tube body clamp 13. The worktable 11 is equipped with a power switch 14 for controlling the start and stop of the rotating cutter head 122.

[0040] During operation, the quartz tube 20 to be cut is aligned and assembled in the tube clamp 13 according to the current working conditions. Then, through the separate actions of the lifting drive device 111 and the translation drive device 112, the horizontal position of the worktable 11 and the vertical position of the tube clamp 13 are adjusted to the correct position, so that the cutting end of the quartz tube 20 assembled in the tube clamp 13 is located at the target position that cooperates with the rotating cutter head 122. Then, the rotating cutter head 122 is started by the power switch 14. The translation drive device 112 and the lifting drive device 111 are then operated in coordination to control the worktable 11 and the tube clamp 13 to move the quartz tube 20 closer and closer to the rotating cutter head 122 until the outer wall of the quartz tube 20 is tangent to the rotating cutter head 122. Then, the quartz tube 20 is controlled to slowly approach the axis of the rotating cutter head 122. During this process, the quartz tube 20 rotates synchronously in the opposite direction to the rotating cutter head 122 under the rotational friction of the rotating cutter head 122 until the rotating cutter head 122 cuts an annular groove with a preset cutting depth on the outer wall of the cutting end of the quartz tube 20. After the quartz tube 20 is cut, it is removed from the tube clamp 13. The annular groove cut is wiped with alcohol to remove powder impurities generated during the cutting process. Then, the cut end of the quartz tube 20 is gently tapped with an iron rod to break it at the annular groove cut. After breaking the quartz tube 20, the annealed sheet inside is completely and cleanly removed using tweezers. This completes the cutting and opening of the quartz tube 20, allowing the annealed sheet to be removed intact and without contamination, effectively avoiding contamination and damage to the annealed sheet during removal.

[0041] In practical applications, the quartz tube cutting equipment also includes a sleeve 133 fitted outside the quartz tube 20. The sleeve 133 is coaxially embedded between the rolling bearing 132 and the quartz tube 20, and the sleeve 133 is linked with the quartz tube 20. An adjusting handwheel 134 is linked to the end of the sleeve 133 away from the cutting end of the quartz tube 20. Under normal circumstances, the quartz tube 20 can rotate synchronously in the opposite direction to the rotating cutter head 122 under the rotational friction. However, if the quartz tube 20 being cut is too heavy or jammed during rotation, causing it to be unable to rotate synchronously in the opposite direction to the rotating head 122 or to rotate in the opposite direction, the operator can hold the adjusting handwheel 134 and rotate it moderately in the opposite direction to the rotation of the rotating head 122. This will cause the quartz tube 20, which is embedded in the sleeve 133, to rotate synchronously with the adjusting handwheel 134. This achieves the purpose of controlling the synchronous reverse rotation of the quartz tube 20 and the rotating head 122, thereby ensuring the forming effect of the annular groove cut at the cutting end of the quartz tube 20 and the effect of the subsequent tube opening operation of the quartz tube 20.

[0042] Furthermore, the blade sleeve 121 has a horizontally extending adjustment cavity 123 in the middle. An adjustment slider 124 is slidably disposed in the adjustment cavity 123. An adjustment connecting rod 125 is linked to the front end of the adjustment slider 124. The front end of the adjustment connecting rod 125 extends out of the blade sleeve 121 and is coaxially linked with the rotating cutter head 122. Before cutting the quartz tube 20, the adjustment slider 124 can be controlled to move moderately along the length direction of the adjustment cavity 123 according to the current working environment requirements and the size and specifications of the quartz tube 20 to be cut. This drives the adjustment connecting rod 125 to move synchronously, thereby adjusting the effective length of the adjustment connecting rod 125 extending out of the blade sleeve 121. This adjusts the position of the rotating cutter head 122 relative to the blade sleeve 121 until the position of the rotating cutter head 122 is adapted to the current cutting conditions of the quartz tube 20.

[0043] Based on this, a locking bolt 126 is inserted into the adjustment cavity 123 from the outside to the inside of the side wall of the blade sleeve 121. The insertion end of the locking bolt 126 is pressed and matched with the outer wall of the adjusting slider 124. After the position of the rotating cutter head 122 relative to the blade sleeve 121 is adjusted, the locking bolt 126 is screwed into the adjustment cavity 123 through the threaded engagement between the locking bolt 126 and the blade sleeve 121 until the insertion end of the locking bolt 126 is reliably pressed against the outer wall of the adjusting slider 124. This reliably locks the current position of the adjusting slider 124 in the adjustment cavity 123, thereby achieving reliable locking of the relative position between the rotating cutter head 122 and the blade sleeve 121. This ensures that the position of the rotating cutter head 122 is constant and the operation is stable during the subsequent cutting of the quartz tube 20, and thus ensures the cutting accuracy and processing effect of the annular groove at the cutting end of the quartz tube 20. If it is necessary to readjust the relative position between the rotating cutter head 122 and the cutter sleeve 121, the locking bolt 126 can be turned in the opposite direction to release the locking bolt 126 from the clamping fit with the adjusting slider 124 and disengage it. Then, readjust the position of the adjusting slider 124 in the adjusting cavity 123. After the position is adjusted, turn the locking bolt 126 in the forward direction to restore the clamping lock with the adjusting slider 124.

[0044] In addition, the base 10 has a mounting hole 101 in the middle, and a rotating bearing 102 is embedded in the mounting hole 101. The bottom end of the tool holder 12 is coaxially inserted into the rotating bearing 102 and is linked with the rotating bearing 102. Before cutting the quartz tube 20, the tool holder 12 can be controlled to rotate moderately on its fixed axis according to the current working conditions, under the linkage and adaptation of the rotating bearing 102. At this time, due to the linkage and adaptation of the rotating bearing 102, the tool holder 12 can rotate relative to the base 10 until the tool holder 12 rotates to the working position required by the current working conditions.

[0045] Furthermore, the bottom of the tool holder 12 is provided with an annular boss 127, and the annular boss 127 has a limiting groove 128 extending along its circumference. A limiting bolt 103 that is threadedly engaged with the base 10 is inserted into the limiting groove 128. Generally, the bottom end of the tool holder 12 is located below the annular boss 127, where it is fitted with the rotating bearing 102. During the rotation of the tool holder 12 relative to the base 10, the limiting bolt 103 is located in the limiting groove 128 and will not interfere with the rotation of the tool holder 12. After the tool holder 12 rotates to the target position relative to the base 10, the limiting bolt 103 is tightened until it is threadedly connected and fixed to the base 10. This secures the tool holder 12 to the base 10 by the clamping connection between the nut of the limiting bolt 103 and the annular boss 127, thus reliably locking the tool holder 12 to the current position of the base 10. This prevents the tool holder 12 from loosening or deflecting during the subsequent cutting of the quartz tube 20, ensuring the working accuracy and stability of the rotating head 122, and further ensuring the cutting effect of the rotating head 122 on the quartz tube 20.

[0046] Specifically, a limiting plug 129 is provided at one end of the cutter sleeve 121, and the limiting plug 129 has a limiting hole 1291 in the middle for the adjusting rod 125 to pass through coaxially. The limiting plug 129 can effectively reduce the structural impact between the adjusting rod 125 and the cutter sleeve 121, ensure the stability of the rotating cutter head 122 during operation, and through the alignment and cooperation between the limiting hole 1291 and the adjusting rod 125, effectively ensure the fixed-axis rotation tracking of the rotating cutter head 122 during operation, avoid eccentricity or vibration during the rotation of the rotating cutter head 122, thereby further optimizing the cutting accuracy and working effect of the rotating cutter head 122.

[0047] More specifically, a sealing plug 120 is detachably installed at the other end of the tool holder 121. The outer wall of the sealing plug 120 is pressed tightly against the inner wall of the adjustment cavity 123. During daily use, the sealing plug 120 reliably seals the adjustment cavity 123, preventing external dust and impurities from entering the adjustment cavity 123 and interfering with its internal moving parts such as the adjusting slider 124. If the adjusting slider 124 or other related parts need to be inspected, maintained, or replaced, the sealing plug 120 can be removed so that the corresponding parts located in the adjustment cavity 123 can be taken out from the port at the end where the sealing plug 120 is located, or tools can be inserted into the adjustment cavity 123 from that port to carry out the corresponding parts inspection, maintenance, or replacement work. After the work is completed, the sealing plug 120 is reassembled to the corresponding port to reseal the adjustment cavity 123.

[0048] On the other hand, both the lifting drive device 111 and the translation drive device 112 are lead screw assemblies. The operation of the lead screw assembly is simple and efficient, and its component structure is simple and reliable. It can fully guarantee the translation accuracy of the worktable 11 and the lifting and adjusting accuracy of the tube clamp 13, optimize the corresponding operating efficiency, and make the operation and use of the quartz tube cutting equipment more convenient and efficient.

[0049] In addition, to better understand the cutting process of the rotating cutter head 122 on the cutting end of the quartz tube 20 in this solution, the following is a combination of... Figures 4-6 The different mating positions between the rotating cutter head 122 and the quartz tube 20 are shown to further illustrate the cutting operation of the rotating cutter head 122 on the quartz tube 20.

[0050] As shown in the figure, the rotation radius of the rotary cutter head 122 is R, the outer diameter of the quartz tube 20 is r, the height difference between the axes of the rotary cutter head 122 and the quartz tube 20 is H, the number of rotations of the adjusting handwheel 134 is n, the pitch of the lead screw assembly is a, the rotation angle is θ, and the cutting depth is h. The cutting depth of the rotary cutter head 122 on the quartz tube 20 is determined by the feed rate, which can be calculated by the formula shown below:

[0051]

[0052]

[0053] (a1-a2) / a=n (3)

[0054] n×360°=θ (4)

[0055] Taking a quartz tube 20 with a wall thickness of 2mm as an example, the tube opening operation is carried out. The required cutting depth h is 1.8mm, and the corresponding rotation angle is calculated by formula (5) as θ0.

[0056]

[0057] Now, operate the lifting drive device 111 to adjust the vertical position of the quartz tube 20 so that the rotating cutter head 122 and the quartz tube 20 are on the same horizontal plane. At this time, the horizontal distance between the rotating cutter head 122 and the quartz tube 20 is denoted as a0. Figure 4 As shown. After the vertical position of the quartz tube 20 is adjusted, the translation drive device 112 is manipulated to drive the quartz tube 20 to begin feeding, so that the rotating cutter head 122 is tangent to the outer wall of the quartz tube 20. At this time, the horizontal distance between the rotating cutter head 122 and the quartz tube 20 is denoted as a1. Figure 5 As shown. Then, turn on the power switch 14, and the rotary cutter begins to run. Again, manipulate the translation drive device 112 to perform the feed motion. After rotating by an angle θ0, the cutting depth has reached 1.8mm, forming an annular groove, as shown. Figure 6As shown. Then, turn off the power switch 14, remove the quartz tube 20 after the tube body is cut from the tube body clamp 13, wipe the annular groove cut with alcohol to remove the powder impurities generated during the tube body cutting process, and then gently tap the cut end of the quartz tube 20 with an iron rod to break the quartz tube 20 at the annular groove cut. After breaking the quartz tube 20, use tweezers to completely and cleanly remove the annealing sheet inside the quartz tube 20.

[0058] Please refer to Figure 7 .

[0059] In a specific embodiment, the quartz tube opening method provided in one embodiment of the present invention employs the quartz tube cutting equipment described above, including:

[0060] Step S101, Job Preparation:

[0061] The quartz tube 20 to be cut is aligned and assembled in the tube clamp 13. Then, by the separate actions of the lifting drive device 111 and the translation drive device 112, the horizontal position of the worktable 11 and the vertical position of the tube clamp 13 are adjusted to the correct position, so that the cutting end of the quartz tube 20 assembled in the tube clamp 13 is located at the target position that cooperates with the rotating cutter head 122.

[0062] Step S102, Pipe cutting:

[0063] The rotating cutter head 122 is started by power switch 14. Then, by manipulating the translation drive device 112 and the lifting drive device 111 to work together, the worktable 11 and the tube clamp 13 are linked together, so that the quartz tube 20 gradually approaches the rotating cutter head 122 until the outer wall of the quartz tube 20 is tangent to the rotating cutter head 122. Then, the quartz tube 20 is controlled to slowly approach the axis of the rotating cutter head 122. During this process, the quartz tube 20 rotates synchronously in the opposite direction to the rotating cutter head 122 under the rotational friction of the rotating cutter head 122 until the rotating cutter head 122 cuts an annular groove with a preset cutting depth on the outer wall of the cutting end of the quartz tube 20.

[0064] Step S103, Opening the pipe and removing the part:

[0065] Remove the quartz tube 20, after it has been cut, from the tube clamp 13. Wipe the annular groove cut with alcohol to remove the powder impurities generated during the tube cutting process. Then, gently tap the cut end of the quartz tube 20 with an iron rod to break the quartz tube 20 at the annular groove cut. After breaking the quartz tube 20, use tweezers to completely and cleanly remove the annealing sheet inside the quartz tube 20.

[0066] This allows the quartz tube 20 to be cut open and the annealed sheet inside the quartz tube 20 to be removed completely and without contamination, thus effectively avoiding contamination and damage to the annealed sheet when it is removed from the quartz tube 20.

[0067] In summary, the quartz tube cutting equipment provided in this invention, during operation, involves aligning and assembling the quartz tube to be cut into the tube fixture according to the current working conditions. Then, through the separate actions of the lifting drive and the translation drive, the horizontal position of the worktable and the vertical position of the tube fixture are adjusted to their correct positions, ensuring that the cutting end of the quartz tube in the tube fixture is positioned at the target work position that mates with the rotating cutter head. Next, the rotating cutter head is started by the power switch. Then, by manipulating the translation drive and the lifting drive in coordination, the worktable and the tube fixture are controlled to move in tandem, causing the quartz tube to gradually approach the rotating cutter head until the outer wall of the quartz tube is tangent to the rotating cutter head. Afterward, the quartz tube is controlled to gently approach the axis of the rotating cutter head. During this process, the quartz tube rotates synchronously in the opposite direction to the rotating cutter head under the rotational friction, until the rotating cutter head cuts an annular groove with a preset cutting depth on the outer wall of the cutting end of the quartz tube. After the quartz tube is cut, remove it from the clamp. Wipe the annular groove cut with alcohol to remove powdery impurities generated during the cutting process. Then, gently tap the cut end of the quartz tube with an iron rod to break it at the annular groove cut. After breaking the quartz tube, use tweezers to carefully and cleanly remove the annealed sheet inside. This completes the cutting and opening of the quartz tube, allowing for the complete and uncontaminated removal of the annealed sheet, effectively avoiding contamination and damage to the annealed sheet during removal.

[0068] Furthermore, the quartz tube opening method using the quartz tube cutting equipment provided by this invention involves sequentially performing operation preparation, tube cutting, and tube opening and removal steps. By rotating the cutting head, an annular groove is cut circumferentially at the cutting end of the quartz tube. Then, by gently tapping the cutting end of the quartz tube with an iron rod, the quartz tube can be broken at the annular groove. This allows the annealed sheet inside the quartz tube to be completely and cleanly removed using tweezers after the quartz tube is broken, thus effectively avoiding contamination and damage to the annealed sheet when removing it from the quartz tube.

[0069] The quartz tube cutting device and the quartz tube opening method using the quartz tube cutting device provided by the present invention have been described in detail above. Specific examples have been used to illustrate the principles and implementation methods of the present invention. The descriptions of the above embodiments are only for the purpose of helping to understand the method and core ideas of the present invention. It should be noted that those skilled in the art can make several improvements and modifications to the present invention without departing from the principles of the present invention, and these improvements and modifications also fall within the protection scope of the claims of the present invention.

Claims

1. A quartz tube cutting device, characterized in that, It includes a horizontally arranged base, a worktable movably mounted on the base, and a tool holder mounted on the base; The top of the workbench is provided with a tube clamp, and the middle of the tube clamp has a positioning hole for the quartz tube to pass through. The positioning hole is provided with a rolling bearing that is fitted and linked to the quartz tube. The workbench is also provided with a lifting drive device that can drive the tube clamp to reciprocate up and down, and a translation drive device that can drive the workbench to reciprocate in the horizontal direction. The tool holder is equipped with a tool sleeve, and one end of the tool sleeve is equipped with a rotating cutter head that cooperates with the cutting end of the quartz tube assembled in the tube body clamp. The rotation axis of the rotating cutter head is parallel to the axis of the quartz tube assembled in the tube body clamp. The worktable is equipped with a power switch to control the start and stop of the rotating cutter head. It also includes a sleeve fitted outside the quartz tube, the sleeve being coaxially embedded between the rolling bearing and the quartz tube, and the sleeve being linked with the quartz tube, and an adjusting handwheel being linkedly provided at one end of the sleeve away from the cut end of the quartz tube. The blade sleeve has a horizontally extending adjustment cavity in the middle. An adjustment slider is slidably arranged in the adjustment cavity. An adjustment connecting rod is linked to the front end of the adjustment slider. The front end of the adjustment connecting rod extends out of the blade sleeve and is coaxially linked to the rotating blade head. During cutting, the quartz tube to be cut is aligned and assembled in the tube fixture. Then, by the separate actions of the lifting drive and the translation drive, the horizontal position of the worktable and the vertical position of the tube fixture are adjusted to the correct positions, so that the cutting end of the quartz tube assembled in the tube fixture is located at the target position that mates with the rotating cutter head. Then, the rotating cutter head is started by the power switch. By manipulating the translation drive and the lifting drive in coordination, the worktable and the tube fixture are controlled to move together, so that the quartz tube gradually approaches the rotating cutter head until the outer wall of the quartz tube is tangent to the rotating cutter head. Then, the quartz tube is controlled to slowly approach the axis of the rotating cutter head. During this process, the quartz tube rotates synchronously in the opposite direction to the rotating cutter head under the rotational friction of the rotating cutter head until the rotating cutter head cuts an annular groove with a preset cutting depth on the outer wall of the cutting end of the quartz tube. Normally, the quartz tube rotates synchronously in the opposite direction to the rotating cutter head due to the rotational friction. However, if the quartz tube being cut is too heavy or there is jamming during rotation, causing it to be unable to rotate synchronously in the opposite direction to the rotating cutter head or to rotate in the opposite direction, the operator can hold the adjusting handwheel and rotate it moderately in the opposite direction to the rotation of the rotating cutter head. This will cause the quartz tube, which is embedded in the sleeve, to rotate synchronously with the adjusting handwheel. This achieves the purpose of controlling the synchronous opposite rotation of the quartz tube and the rotating cutter head, thereby ensuring the forming effect of the annular groove cut at the cutting end of the quartz tube and the effect of subsequent tube opening operations.

2. The quartz tube cutting equipment as described in claim 1, characterized in that, A locking bolt is inserted into the adjustment cavity from the outside to the inside of the side wall of the blade sheath, and the insertion end of the locking bolt is pressed and adapted to the outer wall of the adjustment slider.

3. The quartz tube cutting equipment as described in claim 1, characterized in that, The base has a mounting hole in the middle, and a rotating bearing is embedded in the mounting hole. The bottom end of the tool holder is coaxially inserted into the rotating bearing and is linked with the rotating bearing.

4. The quartz tube cutting equipment as described in claim 3, characterized in that, The bottom of the tool holder is provided with an annular boss, and the annular boss has a limiting groove extending along its circumference. A limiting bolt that is threaded with the base is inserted into the limiting groove.

5. The quartz tube cutting equipment as described in claim 1, characterized in that, One end of the blade sheath is provided with a limiting rubber plug, and the middle of the limiting rubber plug has a limiting hole for the adjusting connecting rod to pass through coaxially.

6. The quartz tube cutting equipment as described in claim 5, characterized in that, A sealing plug is installed at the other end of the blade sheath, and the outer wall of the sealing plug is pressed tightly against the inner wall of the adjustment cavity.

7. The quartz tube cutting equipment as described in claim 1, characterized in that, Both the lifting drive device and the translation drive device are lead screw assemblies.

8. A method for opening a quartz tube, using the quartz tube cutting equipment as described in any one of claims 1 to 7, characterized in that, Including the following steps: In the preparation of the operation, the quartz tube to be cut is aligned and assembled in the tube fixture. Then, by the separate actions of the lifting drive device and the translation drive device, the horizontal position of the worktable and the vertical position of the tube fixture are adjusted to the correct position, so that the cutting end of the quartz tube assembled in the tube fixture is located at the target position that cooperates with the rotating cutter head. For tube cutting, the rotating cutter head is started by power switch. Then, by operating the translation drive device and the lifting drive device in coordination, the worktable and tube clamp are controlled to move the quartz tube gradually closer to the rotating cutter head until the outer wall of the quartz tube is tangent to the rotating cutter head. Then, the quartz tube is controlled to slowly move closer to the axis of the rotating cutter head. During this process, the quartz tube rotates synchronously in the opposite direction to the rotating cutter head under the rotation friction of the rotating cutter head until the rotating cutter head cuts an annular groove with a preset cutting depth on the outer wall of the cutting end of the quartz tube. To remove the quartz tube from the tube clamp after the tube body has been cut, wipe the annular groove cut with alcohol to remove powder impurities generated during the tube body cutting process. Then, gently tap the cut end of the quartz tube with an iron rod to break the quartz tube at the annular groove cut. After breaking the quartz tube, use tweezers to completely and cleanly remove the annealing sheet inside the quartz tube.

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