Temperature control system and method

Abstract

The present application relates to the technical field of semiconductor, and especially relates to a temperature control system and method, the temperature control system comprising a heat exchange device, a water tank and a branch pipeline, the outlet of the heat release channel of the heat exchange device is communicated with the inlet of the water tank, the outlet of the water tank is communicated with a load through a first main pipeline, the load is communicated with the outlet of the heat release channel of the heat exchange device through a second main pipeline, and the two ends of the branch pipeline are communicated with the first main pipeline and the second main pipeline respectively. The temperature of the circulating liquid in the temperature control system can be greatly reduced, especially the influence of high-temperature circulating liquid on the temperature of the water tank, the high-temperature resistance requirement of the liquid level sensor and the heat preservation material in the water tank is reduced, the safety and reliability of the equipment are improved, the system design problem of the high temperature of the water tank is solved, and the risk caused by the high temperature is reduced.

Description

Technical Field

[0001] This invention relates to the field of semiconductor technology, and in particular to a temperature control system and method. Background Technology

[0002] In the integrated circuit manufacturing industry, heat exchanger-type temperature control equipment is needed to control temperatures above 25°C for parts requiring a certain high temperature or for mixing high-temperature and low-temperature liquids. Currently, high-temperature requirements are generally in the range of 20~100°C. New process technologies require temperatures above 100°C, and the high-temperature temperature control equipment used poses a risk of burns to the entire circulation system and imposes significant requirements on high-temperature components, necessitating substantial investment to meet these demands.

[0003] Existing heat exchanger-type temperature control equipment uses single-loop or dual-loop systems, both of which suffer from high water tank temperatures and the inability of level sensors to withstand high temperatures. In integrated circuit-specific temperature control equipment, due to the need for liquid recovery, the water tank is generally large, thus posing a risk of burns from high temperatures inside the equipment and negatively impacting internal electrical components and the temperature of the control box. When existing systems operate in high-temperature ranges, the liquid inside the tank is always hot, posing a risk of high temperatures and raising concerns about the heat resistance of level sensors and insulation materials. Summary of the Invention

[0004] This invention provides a temperature control system and method to solve one of the technical problems existing in the prior art, thereby significantly reducing the temperature of the circulating fluid in the temperature control system, especially the impact of high-temperature circulating fluid on the water tank temperature, and reducing the high-temperature resistance requirements of the liquid level sensor and insulation materials in the water tank.

[0005] The present invention provides a temperature control system, including a heat exchange device, a water tank and branch pipes. The outlet of the heat dissipation channel of the heat exchange device is connected to the inlet of the water tank. The outlet of the water tank is connected to the load through a first main pipeline. The load and the inlet of the heat dissipation channel of the heat exchange device are connected through a second main pipeline. The two ends of the branch pipes are respectively connected to the first main pipeline and the second main pipeline.

[0006] According to a temperature control system provided by the present invention, a three-way valve is provided at the connection between the branch pipeline and the second main pipeline.

[0007] According to a temperature control system provided by the present invention, the first main pipeline is provided with a pump body and a heater in sequence along the circulation direction of the circulating liquid.

[0008] According to a temperature control system provided by the present invention, a first temperature sensor is provided on the first main pipeline between the connection point of the branch pipeline and the first main pipeline and the pump body, so as to control the opening degree of the three-way valve according to the detection value of the first temperature sensor.

[0009] According to a temperature control system provided by the present invention, a second temperature sensor is provided on the first main pipeline between the heater and the load, so as to control the heating temperature of the heater according to the detection value of the second temperature sensor.

[0010] According to a temperature control system provided by the present invention, a third temperature sensor is provided on the second main pipeline between the connection position of the branch pipeline and the second main pipeline and the load, so as to control the opening degree of the three-way valve according to the detection value of the third temperature sensor.

[0011] According to a temperature control system provided by the present invention, the first main pipeline is connected to the load through a first valve body, the second main pipeline is connected to the load through a second valve body, and a vent pipe is provided behind the first valve body along the direction of the circulating liquid flow.

[0012] The present invention also provides a temperature control method, which applies the temperature control system described above, comprising:

[0013] The opening ratio of the three-way valve is controlled based on the actual temperature of the circulating fluid after the first main pipeline merges with the branch pipeline.

[0014] According to a temperature control method provided by the present invention, controlling the opening ratio of the three-way valve based on the actual temperature value of the circulating fluid after the first main pipeline merges with the branch pipeline includes:

[0015] The PID2 parameter is output to control the opening degree of the three-way valve based on the difference between the set temperature value of the circulating fluid after the first main pipeline merges with the branch pipeline and the actual temperature value of the circulating fluid after the first main pipeline merges with the branch pipeline.

[0016] A temperature control method according to the present invention further includes:

[0017] The output duty cycle of the heater is controlled based on the actual temperature of the circulating liquid at the heater outlet.

[0018] According to a temperature control method provided by the present invention, controlling the output duty cycle of the heater based on the actual temperature value of the circulating liquid at the heater outlet includes:

[0019] The PID1 parameter is used to control the output duty cycle of the heater based on the difference between the set temperature of the circulating liquid at the heater outlet and the actual temperature of the circulating liquid at the heater outlet.

[0020] A temperature control method according to the present invention further includes:

[0021] The opening degree of the three-way valve is controlled according to the actual temperature value of the circulating fluid before the branch pipe of the second main pipeline.

[0022] According to a temperature control method provided by the present invention, controlling the opening degree of the three-way valve based on the actual temperature value of the circulating fluid before the branch pipe of the second main pipeline includes:

[0023] If the change in the actual temperature of the circulating fluid before the branch pipe of the second main pipeline is greater than the first set value, and the change continues for a set time, then the set temperature of the circulating fluid after the branch pipe of the first main pipeline is reduced by the second set value, or the PID set value of the actual temperature of the circulating fluid after the branch pipe of the first main pipeline is increased, and the set temperature of the circulating fluid after the branch pipe of the first main pipeline remains unchanged.

[0024] According to a temperature control method provided by the present invention, controlling the opening degree of the three-way valve based on the actual temperature value of the circulating fluid before the branch pipe of the second main pipeline further includes:

[0025] If the change in the actual temperature of the circulating fluid before the branch pipe of the second main pipeline is less than the first set value, and the time is maintained for a set time, then the set temperature of the circulating fluid after the branch pipe of the first main pipeline is increased by the second set value, or the PID set value of the actual temperature of the circulating fluid after the branch pipe of the first main pipeline is decreased, and the set temperature of the circulating fluid after the branch pipe of the first main pipeline remains unchanged.

[0026] The temperature control system provided by this invention consists of a heat exchanger's heat dissipation channel, a water tank, and a load connected in sequence to form a circulation loop. The high-temperature circulating liquid, which completes heat exchange and temperature control within the load, flows out of the load and into the temperature control system. When passing through the second main pipeline, it can be divided into two paths: one path flows directly into the first main pipeline through a branch pipeline without undergoing any heat exchange or cooling; the other path passes through the heat dissipation channel of the heat exchanger and exchanges heat with the coolant in the heat absorption channel of the heat exchanger to lower its temperature. The cooled circulating liquid then flows into the water tank for heat preservation, and then flows out of the water tank into the first main pipeline, where it merges with the uncooled high-temperature circulating liquid before flowing back into the load.

[0027] This invention can meet the high-temperature temperature control requirements for semiconductors above 100℃. In the low-temperature circuit composed of the heat exchange device, the flow ratio of the high-temperature circulating liquid entering the heat exchange device for cooling can be changed by controlling the flow of the branch pipes. It mixes with the uncooled high-temperature liquid to achieve the target temperature, which can significantly reduce the temperature of the circulating liquid in the temperature control system, especially the impact of the high-temperature circulating liquid on the water tank temperature. It also reduces the high-temperature resistance requirements of the liquid level sensor and insulation materials in the water tank, improves the safety and reliability of the equipment, solves the system design problem of high temperature in the water tank, and reduces the risks caused by high temperature.

[0028] In addition to the technical problems solved by the present invention, the technical features of the technical solutions constituted by the present invention, and the advantages brought about by the technical features of these technical solutions as described above, other technical features of the present invention and the advantages brought about by these technical features will be further explained in conjunction with the accompanying drawings, or will be learned through the practice of the present invention. Attached Figure Description

[0029] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0030] Figure 1 This is a schematic diagram of the temperature control system provided by the present invention;

[0031] Figure label:

[0032] 100. Heat exchanger; 200. Water tank; 300. Branch piping;

[0033] 400, First main pipeline; 410, Pump body; 420, Heater; 430, First temperature sensor; 440, Second temperature sensor; 450, First valve body;

[0034] 500, Second main pipeline; 510, Third temperature sensor; 520, Second valve body;

[0035] 600, three-way valve; 700, load. Detailed Implementation

[0036] The embodiments of the present invention will be described in further detail below with reference to the accompanying drawings and examples. The following examples are for illustrative purposes only and should not be construed as limiting the scope of the invention.

[0037] In the description of the embodiments of the present invention, it should be noted that the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing the embodiments of the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the embodiments of the present invention. In addition, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0038] In the description of the embodiments of the present invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "connected" and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in the embodiments of the present invention based on the specific circumstances.

[0039] In embodiments of the present invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0040] Furthermore, in the description of the embodiments of the present invention, unless otherwise stated, "multiple", "multiple roots", and "multiple groups" mean two or more, and "several", "several roots", and "several groups" mean one or more.

[0041] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0042] like Figure 1 As shown, the temperature control system provided in this embodiment of the invention includes a heat exchange device 100, a water tank 200, and a branch pipe 300. The outlet of the heat dissipation channel of the heat exchange device 100 is connected to the inlet of the water tank 200. The outlet of the water tank 200 is connected to the load 700 through the first main pipe 400. The load 700 and the inlet of the heat dissipation channel of the heat exchange device 100 are connected through the second main pipe 500. The two ends of the branch pipe 300 are connected to the first main pipe 400 and the second main pipe 500, respectively.

[0043] In the temperature control system of this invention, the heat exchange device 100's heat dissipation channel, water tank 200, and load 700 are sequentially connected to form a circulation loop. The high-temperature circulating liquid that completes heat exchange and temperature control in the load 700 flows out of the load 700 and into the temperature control system. When passing through the second main pipeline 500, it can be divided into two paths. One path flows directly into the first main pipeline 400 through the branch pipeline 300 without any heat exchange or cooling. The other path passes through the heat dissipation channel of the heat exchange device 100 and exchanges heat with the coolant in the heat absorption channel of the heat exchange device 100 to cool down. The cooled circulating liquid then flows into the water tank 200 for heat preservation, and then flows out of the water tank 200 into the first main pipeline 400, where it merges with the uncooled high-temperature circulating liquid and then flows back into the load 700.

[0044] This invention can meet the high-temperature temperature control requirements for semiconductors above 100℃. In the low-temperature circuit formed by the heat exchange device 100, the flow rate of the high-temperature circulating liquid entering the heat exchange device 100 for cooling can be changed through the flow control of the branch pipe 300. This liquid mixes with the uncooled high-temperature liquid to reach the target temperature, significantly reducing the temperature of the circulating liquid in the temperature control system, especially the impact of the high-temperature circulating liquid on the temperature of the water tank 200. This reduces the high-temperature resistance requirements of the liquid level sensor and insulation materials inside the water tank 200, improves equipment safety and reliability, solves the system design problem of high-temperature water tank 200, and reduces the risks associated with high temperatures.

[0045] In this embodiment, the heat absorption passage of the heat exchange device 100 is connected to the cooling system, and the cooling system uses cooling water as the cold source. The heat exchange device 100 can be a plate heat exchanger or a tubular cooling water heat exchanger, etc.

[0046] According to one embodiment of the present invention, a three-way valve 600 is provided at the connection between the branch pipe 300 and the second main pipe 500. In this embodiment, the three-way valve 600 is provided on the second main pipe 500, and the branch pipe 300 is connected through the three-way valve 600. That is, the high-temperature circulating liquid flowing out of the load 700 in the second main pipe 500 can be divided into two paths after passing through the three-way valve 600. One path is a low-temperature circuit composed of the heat exchange device 100 and the water tank 200, and the other path is a high-temperature circuit directly connected to the first main pipe 400 by the branch pipe 300. The flow ratio of the high-temperature circulating liquid entering the heat exchange device 100 for cooling to the high-temperature circulating liquid entering the branch pipe 300 is controlled by the three-way valve 600 to ensure that the circulating liquid flowing into the load 700 after mixing in the first main pipe 400 meets the temperature requirements.

[0047] In other embodiments, valve bodies may be installed on the second main pipeline 500 and the branch pipeline 300 respectively, thereby controlling the flow rate of the high-temperature circulating liquid entering the low-temperature circuit and the branch pipeline 300.

[0048] According to one embodiment of the present invention, a pump body 410 and a heater 420 are sequentially arranged along the circulation direction of the circulating liquid in the first main pipeline 400. In this embodiment, the low-temperature circulating liquid flowing out of the water tank 200 and the high-temperature circulating liquid flowing out of the branch pipeline 300 are mixed in the first main pipeline 400, pumped out by the pump body 410, and then, after being further temperature-adjusted by the heater 420, enter the load 700. The heater 420 performs high-precision temperature control, and then, after passing through a series of sensors for flow rate, pressure, and temperature, the output is sent to the load 700 of the main process equipment, completing one cycle.

[0049] According to one embodiment of the present invention, a first temperature sensor 430 is provided on the first main pipeline 400 between the connection point of the branch pipeline 300 and the first main pipeline 400 and the pump body 410, so as to control the opening degree of the three-way valve 600 according to the detection value of the first temperature sensor 430. In this embodiment, after the low-temperature circulating liquid flowing out of the water tank 200 and the high-temperature circulating liquid flowing out of the branch pipeline 300 are mixed in the first main pipeline 400, the temperature of the mixed circulating liquid is first detected by the first temperature sensor 430. This position is the temperature of the circulating liquid at the initial stage of mixing, and the detection is more accurate. According to the circulating liquid temperature value detected by the first temperature sensor 430, the opening ratio of the three-way valve 600 is adjusted, that is, the flow rate of the cooled and uncooled circulating liquid is adjusted in time, thereby making the overall circulating liquid temperature control accuracy in the temperature control system higher.

[0050] According to one embodiment of the present invention, a second temperature sensor 440 is provided on the first main pipeline 400 between the heater 420 and the load 700 to control the heating temperature of the heater 420 based on the detection value of the second temperature sensor 440. In this embodiment, after the mixed circulating liquid is temperature-adjusted by the heater 420, the temperature of the circulating liquid is first detected by the second temperature sensor 440. If the temperature does not meet the requirements for the circulating liquid temperature entering the load 700, the heating temperature of the heater 420 is adjusted according to the circulating liquid temperature value detected by the second temperature sensor 440, which can further improve the temperature control accuracy.

[0051] According to one embodiment of the present invention, a third temperature sensor 510 is provided on the second main pipeline 500, which is located between the branch pipeline 300 and the second main pipeline 500 and the load 700, to control the opening degree of the three-way valve 600 based on the detection value of the third temperature sensor 510. In this embodiment, the high-temperature circulating liquid flowing out of the load 700 first passes through the third temperature sensor 510 to detect the temperature of the circulating liquid, and then passes through the three-way valve 600 to split into two paths. Based on the circulating liquid temperature value detected by the third temperature sensor 510, the opening ratio of the three-way valve 600 is controlled. That is, the temperature of the circulating liquid that has just flowed into the temperature control system but has not yet been distributed by the three-way valve 600 is detected. The three-way valve 600 is fed forward controlled based on the detection result. The corresponding control process of the first temperature sensor 430 can be adjusted based on the temperature result, resulting in higher temperature control accuracy and better system safety.

[0052] According to one embodiment of the present invention, a first main pipeline 400 is connected to a load 700 via a first valve body 450, and a second main pipeline 500 is connected to the load 700 via a second valve body 520. A vent pipe is provided behind the first valve body 450 along the flow direction of the circulating liquid. In this embodiment, the installation of the vent pipe enables the temperature control system and the recovery of circulating liquid in the load 700. The system and process equipment power is turned off, the first valve body 450 is closed, and the second valve body 520 is opened. Nitrogen or dry compressed air is injected through the vent pipe outside the outlet of the first valve body 450, blowing the circulating liquid from the external pipeline and the load 700 to the second valve body 520. After passing through the three-way valve 600 and the heat exchange device 100, the liquid is recovered to the water tank 200. When used again, the first valve body 450 is opened, and the system and process equipment are started to transport the circulating liquid in the water tank 200 to the load 700.

[0053] This invention also provides a temperature control method, which applies the temperature control system described in the above embodiments, including:

[0054] Based on the actual temperature of the circulating fluid after the first main pipeline 400 merges with the branch pipeline 300, control the opening ratio of the three-way valve 600.

[0055] The temperature control method of this invention is based on a circulation loop consisting of a heat exchange device 100, a water tank 200, a pump body 410, a heater 420, a three-way valve 600, and a load 700. The low-temperature circulating liquid flowing from the water tank 200 and the high-temperature circulating liquid flowing from the branch pipe 300 are mixed in the first main pipe 400. The temperature of the mixed circulating liquid is first detected by a first temperature sensor 430, which measures the initial temperature of the circulating liquid, making the detection more accurate. Based on the circulating liquid temperature value detected by the first temperature sensor 430, the opening ratio of the three-way valve 600 is adjusted, that is, the flow rates of the cooled and uncooled circulating liquids are adjusted in a timely manner, thereby improving the overall circulating liquid temperature control accuracy within the temperature control system.

[0056] According to one embodiment of the present invention, controlling the opening ratio of the three-way valve 600 based on the actual temperature value of the circulating fluid after the first main pipeline 400 merges with the branch pipeline 300 includes:

[0057] Based on the difference between the set temperature of the circulating fluid after the first main pipeline 400 merges with the branch pipeline 300 and the actual temperature of the circulating fluid after the first main pipeline 400 merges with the branch pipeline 300, the PID2 parameter is output to control the opening degree of the three-way valve 600.

[0058] In this embodiment, the difference between the set value and the detected value of the first temperature sensor 430 is used as the input value to output PID2 parameters, controlling the opening ratio of the three-way valve 600. In other embodiments, the first temperature sensor 430 can also use other control logic to adjust the opening ratio of the three-way valve 600, such as through set mapping conditions.

[0059] According to one embodiment of the present invention, the temperature control method further includes:

[0060] The output duty cycle of heater 420 is controlled based on the actual temperature of the circulating liquid at the outlet of heater 420.

[0061] In this embodiment, after the temperature of the mixed circulating liquid is adjusted by the heater 420, the temperature of the circulating liquid is first detected by the second temperature sensor 440. If the temperature does not meet the requirements of the circulating liquid temperature entering the load 700, the heating temperature of the heater 420 is adjusted according to the circulating liquid temperature value detected by the second temperature sensor 440, which can further improve the temperature control accuracy.

[0062] According to one embodiment of the present invention, controlling the output duty cycle of heater 420 based on the actual temperature of the circulating liquid at the outlet of heater 420 includes:

[0063] Based on the difference between the set temperature of the circulating liquid at the outlet of heater 420 and the actual temperature of the circulating liquid at the outlet of heater 420, the PID1 parameter is output to control the output duty cycle of heater 420.

[0064] In this embodiment, the difference between the set value of the second temperature sensor 440 and the detected value of the second temperature sensor is used as the input value to output PID1 parameters, thereby controlling the output duty cycle of the heater 420. In other embodiments, the second temperature sensor 440 can also use other control logic to adjust the output duty cycle of the heater 420, such as through set mapping conditions.

[0065] According to one embodiment of the present invention, the temperature control method further includes:

[0066] The opening degree of the three-way valve 600 is controlled based on the actual temperature of the circulating fluid before the branch pipe 300 of the second main pipeline 500.

[0067] In this embodiment, the high-temperature circulating fluid flowing out of the load 700 first passes through the third temperature sensor 510 to detect the circulating fluid temperature, and then passes through the three-way valve 600 to split into two paths. Based on the circulating fluid temperature value detected by the third temperature sensor 510, the opening ratio of the three-way valve 600 is controlled. That is, the temperature of the circulating fluid that has just flowed into the temperature control system but has not yet been distributed by the three-way valve 600 is detected. The three-way valve 600 is fed forward controlled by the detection result. The corresponding control process of the first temperature sensor 430 can be adjusted by the temperature result, so that the temperature control accuracy is higher and the system safety effect is better.

[0068] According to one embodiment of the present invention, controlling the opening degree of the three-way valve 600 based on the actual temperature value of the circulating fluid before the branch pipe 300 of the second main pipeline 500 includes:

[0069] If the change in the actual temperature of the circulating fluid before the branch pipe 300 of the second main pipeline 500 is greater than the first set value per second, and this continues for a set time, then the set temperature of the circulating fluid after the branch pipe 300 of the first main pipeline 400 is reduced by the second set value, or the PID set value of the actual temperature of the circulating fluid after the branch pipe 300 of the first main pipeline 400 is increased, and the set temperature of the circulating fluid after the branch pipe 300 of the first main pipeline 400 remains unchanged.

[0070] According to one embodiment of the present invention, controlling the opening degree of the three-way valve 600 based on the actual temperature value of the circulating fluid before the branch pipe 300 of the second main pipeline 500 further includes:

[0071] If the change in the actual temperature of the circulating fluid before the branch pipe 300 of the second main pipeline 500 is less than the first set value per second, and this continues for a set time, then the set temperature of the circulating fluid after the branch pipe 300 of the first main pipeline 400 is increased by the second set value, or the PID setting value of the actual temperature of the circulating fluid after the branch pipe 300 of the first main pipeline 400 is decreased, and the set temperature of the circulating fluid after the branch pipe 300 of the first main pipeline 400 remains unchanged.

[0072] In this embodiment, the first set value can be multiple interval range values, and the second set value can be an interval range value that corresponds one-to-one with each interval range value of the first set value.

[0073] When using the valve, it is not limited to whether the valve body is an electric valve, a solenoid valve, or other type of valve that can be switched on or off.

[0074] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A temperature control system, characterized in that: The device includes a heat exchanger, a water tank, and branch pipes. The outlet of the heat exchanger's heat dissipation channel is connected to the inlet of the water tank. The outlet of the water tank is connected to a load via a first main pipeline. The load and the inlet of the heat exchanger's heat dissipation channel are connected via a second main pipeline. Both ends of the branch pipes are connected to the first main pipeline and the second main pipeline, respectively. A three-way valve is installed at the connection point between the branch pipe and the second main pipeline. A pump body and a heater are sequentially installed along the circulation direction of the circulating liquid in the first main pipeline. A first temperature sensor is installed on the first main pipeline between the connection point of the branch pipe and the first main pipeline and the pump body, so as to control the opening degree of the three-way valve according to the detection value of the first temperature sensor.

2. The temperature control system according to claim 1, characterized in that: A second temperature sensor is provided on the first main pipeline between the heater and the load to control the heating temperature of the heater based on the detection value of the second temperature sensor.

3. The temperature control system according to claim 1, characterized in that: A third temperature sensor is provided on the second main pipeline between the connection point of the branch pipeline and the second main pipeline and the load, so as to control the opening degree of the three-way valve according to the detection value of the third temperature sensor.

4. The temperature control system according to claim 1, characterized in that: The first main pipeline is connected to the load through a first valve body, and the second main pipeline is connected to the load through a second valve body. A vent pipe is provided behind the first valve body along the direction of the circulating fluid flow.

5. A temperature control method, characterized in that: The temperature control system as described in any one of claims 1 to 4 includes: The opening ratio of the three-way valve is controlled based on the actual temperature of the circulating fluid after the first main pipeline merges with the branch pipeline.

6. The temperature control method according to claim 5, characterized in that: The control of the opening ratio of the three-way valve based on the actual temperature of the circulating fluid after the first main pipeline merges with the branch pipeline includes: The PID2 parameter is output to control the opening degree of the three-way valve based on the difference between the set temperature value of the circulating fluid after the first main pipeline merges with the branch pipeline and the actual temperature value of the circulating fluid after the first main pipeline merges with the branch pipeline.

7. The temperature control method according to claim 5, characterized in that: Also includes: The output duty cycle of the heater is controlled based on the actual temperature of the circulating liquid at the heater outlet.

8. The temperature control method according to claim 7, characterized in that: The step of controlling the heater's output duty cycle based on the actual temperature of the circulating liquid at the heater's outlet includes: The PID1 parameter is used to control the output duty cycle of the heater based on the difference between the set temperature of the circulating liquid at the heater outlet and the actual temperature of the circulating liquid at the heater outlet.

9. The temperature control method according to claim 5, characterized in that: Also includes: The opening degree of the three-way valve is controlled according to the actual temperature value of the circulating fluid before the branch pipe of the second main pipeline.

10. The temperature control method according to claim 9, characterized in that: The step of controlling the opening degree of the three-way valve based on the actual temperature value of the circulating fluid before the branch pipe of the second main pipeline includes: If the change in the actual temperature of the circulating fluid before the branch pipe of the second main pipeline is greater than the first set value, and the change continues for a set time, then the set temperature of the circulating fluid after the branch pipe of the first main pipeline is reduced by the second set value, or the PID set value of the actual temperature of the circulating fluid after the branch pipe of the first main pipeline is increased, and the set temperature of the circulating fluid after the branch pipe of the first main pipeline remains unchanged.

11. The temperature control method according to claim 9, characterized in that: The step of controlling the opening degree of the three-way valve based on the actual temperature value of the circulating fluid before the branch pipe of the second main pipeline further includes: If the change in the actual temperature of the circulating fluid before the branch pipe of the second main pipeline is less than the first set value, and the time is maintained for a set time, then the set temperature of the circulating fluid after the branch pipe of the first main pipeline is increased by the second set value, or the PID set value of the actual temperature of the circulating fluid after the branch pipe of the first main pipeline is decreased, and the set temperature of the circulating fluid after the branch pipe of the first main pipeline remains unchanged.

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