An apparatus for preparing silane

Abstract

This invention relates to silane preparation technology, addressing the problems of heat loss to the outside and reduced distillation efficiency due to liquid blocking vapor rise. Specifically, it relates to a silane preparation apparatus, including a distillation column shell. A vapor outlet pipe is integrally formed on the upper surface of the distillation column shell, and a liquid outlet pipe is integrally formed on the lower surface of the distillation column shell. This invention heats the liquid inside the moving chamber by agitation, allowing heat exchange between the gas and liquid phases due to their temperature difference. The heat inside the connecting chamber can then transfer heat to the liquid phase, improving distillation efficiency. Furthermore, it isolates the internal temperature of the distillation column from external loss. The separation of liquid and vapor on the trays by the vent pipe prevents mutual obstruction, and the downward-flowing liquid is dispersed by the opening rotating plates, increasing the contact area with the vapor and allowing for better heat exchange between the vapor and liquid, thus improving distillation efficiency.

Description

Technical Field

[0001] This invention relates to silane preparation technology, specifically to an apparatus for preparing silane. Background Technology

[0002] Silanes are compounds of silicon and hydrogen, and are a collective term for a series of compounds, including silanes, disilanes, and some more advanced silane-hydrogen compounds.

[0003] In existing technologies, silane separation is required from the products obtained after the disproportionation reaction of trichlorosilane. When the product is distilled using a distillation column, the generated vapor is transported from top to bottom. During this transport, because the distillation column is in direct contact with the external environment, the heat inside the distillation column is easily lost to the outside. After the heat is lost, some of the vapor is prone to condensation before being discharged from the top of the distillation column due to the decrease in internal temperature, which affects the yield of silane. In addition, the vapor flowing from bottom to top inside the distillation column needs to be transported upward through the sieve holes on the column plate, while the liquid on the column plate flows downward through the sieve holes, which hinders the upward flow speed of the vapor and affects the distillation efficiency.

[0004] To address the aforementioned technical problems, this application proposes a solution. Summary of the Invention

[0005] The purpose of this invention is to improve distillation efficiency by agitating and heating the liquid inside the active chamber, allowing heat exchange between the gas and liquid phases due to their temperature difference. This improves the efficiency of distillation by allowing heat transfer from the internal chamber to the liquid phase, while preventing heat loss from the distillation column itself. The separation of liquid and vapor on the trays by the vent pipe prevents them from obstructing each other, and the downward-flowing liquid is dispersed by the opening rotating plate, increasing the contact area with the vapor and allowing for better heat exchange between the vapor and liquid. This improves distillation efficiency and solves the problems of heat loss to the outside and reduced distillation efficiency due to liquid blocking vapor rise. Therefore, this invention provides an apparatus for preparing silane.

[0006] The objective of this invention can be achieved through the following technical solutions:

[0007] An apparatus for preparing silane includes a distillation column shell. A vapor outlet pipe is integrally formed on the upper surface of the distillation column shell, a liquid outlet pipe is integrally formed on the lower surface of the distillation column shell, a reflux pipe is integrally formed above the outer wall of the distillation column shell, a vapor pipe is integrally formed below the outer wall of the distillation column shell, a feed pipe is integrally formed at the middle position of the outer wall of the distillation column shell, and a plurality of trays are connected to the inner wall of the distillation column shell. Each tray has an integrally formed downcomer on its outer wall. A plurality of evenly distributed sieve holes are formed on the upper surface of each tray. A downcomer is integrally formed at the middle position inside the distillation column shell. The distillation column is provided with a movable cavity. Several uniformly distributed heating stators are integrally formed on both sides of the inner wall of the movable cavity. Limiting slide rails are installed on both the upper and lower sides of the inner wall of the movable cavity. A sliding plate is slidably connected inside the limiting slide rail. The sliding plate slides inside the limiting slide rail under the drive of a driving assembly. Several uniformly distributed heating rotors are installed on the upper surface of the sliding plate. A connecting cavity is opened in the middle of the interior of the tray. A connecting pipe is connected to the lower surface of the connecting cavity corresponding to the sieve hole position. A connecting groove is opened on the inner wall of the distillation column shell corresponding to the connecting cavity position.

[0008] In a preferred embodiment of the present invention, an inlet pipe is connected to the middle position of two adjacent limiting slide rails on the outer side wall of the distillation column shell, and a drain pipe is integrally formed on the other side of the outer side wall of the distillation column shell corresponding to the position of the inlet pipe. A control valve is installed on the side of the outer side wall of the inlet pipe and the drain pipe away from the distillation column shell. A transmission pipe is integrally formed on both sides of the outer side wall of the inlet pipe near the position of the distillation column shell, and a plurality of evenly distributed connecting pipes are connected to the outer side wall of the transmission pipe.

[0009] In a preferred embodiment of the present invention, the driving assembly includes a transmission shaft, an installation groove is provided on the inner sidewall of the drain pipe corresponding to the position of the transmission shaft, a connecting plate is installed on the upper end of the transmission shaft, a drive motor is installed on the outer sidewall of the distillation column shell corresponding to the position of the connecting plate, the output end of the drive motor is connected to the connecting plate, a transmission wheel is connected to the outer sidewall of the transmission shaft, a plurality of evenly distributed interlocking tooth grooves are provided on the inner sidewall of the sliding plate, a connecting shaft is rotatably connected to the upper surface of the limiting slide rail corresponding to the position of the interlocking tooth grooves, a transmission gear is connected to the outer sidewall of the connecting shaft corresponding to the position of the sliding plate, a transmission wheel is also connected to the outer sidewall of the connecting shaft corresponding to the position of the transmission wheel, and the two transmission wheels are connected by a transmission belt.

[0010] In a preferred embodiment of the present invention, a vent pipe is installed on the upper surface of the tower plate corresponding to the sieve hole position. Three support blocks are integrally formed on the outer wall of the vent pipe corresponding to the sieve hole position. Dividing grooves are opened in three directions on the outer wall of the vent pipe. A rotating plate is rotatably connected to the upper surface inside the dividing groove. A central plate is provided inside the vent pipe corresponding to the rotating plate position. An adjusting connecting rod is installed on the outer wall of the central plate corresponding to the rotating plate position.

[0011] In a preferred embodiment of the present invention, a spiral fan blade is rotatably connected to the inside of the vent pipe near the center plate via a rotating shaft, and a drive wheel is rotatably connected to the upper side wall of the spiral fan blade. The rotating shaft inside the adjacent vent pipe is connected to the drive wheel and a transmission belt for transmission.

[0012] In a preferred embodiment of the present invention, the method for preparing silane includes the following steps:

[0013] Step 1: The raw material tank is connected to the feed pipe via a pipeline. A pump connected to the raw material tank transfers the stored raw material to the inside of the distillation column shell. The raw liquid entering the distillation column shell falls to the top of the trays and permeates through the sieve holes on the upper tray to the lower tray, eventually accumulating at the bottom of the distillation column shell. A level sensor inside the distillation column shell detects that the liquid level has reached a set height. Once this level is detected, the raw liquid at the bottom of the distillation column shell is transferred through a pipeline to the reboiler connected to the outlet pipe. Inside the reboiler, the raw liquid is heated and converted into steam. The steam then... The steam is transported back to the interior of the distillation column from the steam pipe. Inside the distillation column, the steam rises through the sieve holes on the trays, and during this rise, it comes into contact with the liquid on the trays for heat and mass transfer. After reaching the top of the distillation column, the steam is transported from the steam outlet pipe to the condenser. The condenser condenses the steam into liquid and then transports it to the reflux tank. Once the liquid level sensor inside the reflux tank detects that the liquid level has reached the set height, the reflux pump connected to the reflux tank transports the liquid from the reflux tank back to the interior of the distillation column from the reflux pipe.

[0014] Step 2: During the distillation of silane prepared from the disproportionation reaction of trichlorosilane inside the distillation column shell, a drive motor connected to the outer wall of the distillation column shell drives a connecting plate connected to the output end of the drive motor to rotate. The drive shaft and the connecting shaft are connected by a drive belt, so that the drive shaft can drive the connecting shaft to rotate during rotation. The connecting shaft rotates under the support of the limiting slide rail on the inner wall of the distillation column shell. During the rotation of the connecting shaft, the drive gear on the outer wall drives the sliding plate to rotate around the central axis of the distillation column shell inside the limiting slide rail. During the rotation of the sliding plate, the heating rotor connected to the sliding plate agitates the liquid inside the active cavity to generate vortex liquid. During the flow, it collides with the heating stators on both sides of the inner wall of the active cavity, which breaks the vortex in the liquid and generates heat, so that the temperature of the liquid inside the active cavity gradually increases. The liquid inside the active cavity can flow from the connecting groove to the inside of the connecting cavity.

[0015] Step 3: The connecting pipes on both sides of the transfer pipe connected to the outer wall of the liquid inlet pipe can disperse the cold liquid flowing in from the liquid inlet pipe and transfer it into the moving chamber after passing through several connecting pipes. The amount of liquid flowing in from the liquid inlet pipe can be controlled by opening and closing the control valve. The cold liquid and the liquid inside the moving chamber are uniformly mixed under the stirring of the heating rotor. When liquid is input at the liquid inlet pipe, the control valve on the liquid outlet pipe opens to allow the liquid inside the moving chamber to flow out, which facilitates the adjustment of the temperature of the liquid inside the moving chamber. When liquid flows at the liquid inlet and liquid outlet pipes at several locations on the distillation column shell, the flow sensor connected to the control valve can detect the flow rate.

[0016] Step 4: The liquid on the upper tray flows down to the lower tray through the sieve holes. During the flow, it passes through the gap between the vent pipe and the sieve holes. The outer side of the vent pipe between the upper and lower trays can be opened by adjusting the connecting rod to rotate the plate, so that the liquid left from the upper layer is blocked by the rotating plate and does not flow into the vent pipe. Several rotating shafts at the upper end of the vent pipes located at the top of the distillation column shell are driven to rotate by the transmission belt. During the rotation, the spiral fan blades connected to the rotating shafts rotate to accelerate the flow rate of steam inside the vent pipe.

[0017] Compared with the prior art, the beneficial effects of the present invention are:

[0018] 1. The heating rotor on the sliding plate rotates under the drive of the motor, stirring the liquid inside the moving chamber. Heat is generated during the collision between the heating rotor and the heating stator, and the temperature rises. The heated liquid can be transferred to the connecting chamber, so that heat exchange occurs between the gas and liquid phases due to the temperature difference. The heat inside the connecting chamber can transfer heat to the liquid phase, improving the distillation efficiency and preventing the heat loss from the inside of the distillation column, thus having a heat preservation effect on the inside of the distillation column.

[0019] 2. The separation of liquid and vapor on the tray by the vent pipe prevents them from obstructing each other. The downward-flowing liquid is dispersed by the open rotating plate, increasing the contact area with the vapor and allowing for better heat exchange between the vapor and the liquid. After heat exchange, the upward-flowing vapor can flow along the rotating plate into the vent pipe and then upward along the vent pipe without being obstructed by the liquid, which is beneficial to improving distillation efficiency. Attached Figure Description

[0020] To facilitate understanding by those skilled in the art, the present invention will be further described below with reference to the accompanying drawings.

[0021] Figure 1 This is a structural diagram of the main body of the present invention;

[0022] Figure 2 This is a diagram of the communicating cavity structure of the present invention;

[0023] Figure 3 For the present invention Figure 2 Enlarged structural diagram of part A;

[0024] Figure 4 This is a diagram showing the internal structure of the active cavity of the present invention;

[0025] Figure 5 This is a structural diagram of the connecting groove of the present invention;

[0026] Figure 6 For the present invention Figure 5 Enlarged structural diagram of part B;

[0027] Figure 7 This is a structural diagram of the vent pipe of the present invention;

[0028] Figure 8 For the present invention Figure 7 A diagram of the structure viewed from below;

[0029] In the diagram: 1. Distillation column shell; 21. Inlet pipe; 22. Control valve; 23. Connecting pipe; 24. Transfer pipe; 25. Heating stator; 26. Heating rotor; 27. Movable cavity; 28. Limiting slide rail; 29. ​​Sliding plate; 210. Connecting cavity; 211. Drive wheel; 212. Connecting shaft; 213. Drive belt; 214. Drain pipe; 215. Drive shaft; 216. Connecting plate; 217. Transmission. 218. Gear; 219. Engaging tooth groove; 220. Connecting pipe; 31. Connecting groove; 32. Vent pipe; 33. Support block; 34. Dividing plate groove; 35. Spiral fan blade; 36. Rotating shaft; 37. Drive wheel; 38. Rotating plate; 39. Center plate; 4. Adjusting connecting rod; 5. Steam outlet pipe; 6. Reflux pipe; 7. Sieve hole; 8. Tower plate; 9. Steam pipe; 10. Liquid outlet pipe; 11. Downcomer plate; 12. Feed pipe. Detailed Implementation

[0030] The technical solution of the present invention will be clearly and completely described below with reference to the embodiments. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0031] Example 1:

[0032] Please see Figure 1-5 As shown, an apparatus for preparing silane includes a distillation column shell 1, an integrally formed steam outlet pipe 4 on the upper surface of the distillation column shell 1, an integrally formed liquid outlet pipe 9 on the lower surface of the distillation column shell 1, an integrally formed reflux pipe 5 on the upper side wall of the distillation column shell 1, an integrally formed steam pipe 8 on the lower side wall of the distillation column shell 1, an integrally formed feed pipe 11 at the middle position of the outer side wall of the distillation column shell 1, a plurality of trays 7 connected to the inner side wall of the distillation column shell 1, a downcomer plate 10 integrally formed on the outer side wall of the tray 7, and a plurality of evenly distributed sieve holes 6 on the upper surface of the tray 7.

[0033] The raw material tank is connected to the feed pipe 11 via a pipeline. A raw material pump connected to the pipeline transfers the stored raw material from the tank to the interior of the distillation column shell 1. The raw liquid entering the distillation column shell 1 falls above the tray 7 and permeates through the sieve holes 6 on the upper tray 7 to the lower tray 7, eventually accumulating at the bottom of the distillation column shell 1. A level sensor inside the distillation column shell 1 detects that the liquid level has reached a set height. The raw liquid at the bottom of the distillation column shell 1 is then transferred through a pipeline to a reboiler connected to the outlet pipe 9. Inside the reboiler, the raw liquid is heated and converted into steam. The steam then passes through a pipe... The steam is transported back to the interior of the distillation column shell 1 from the steam pipe 8. Inside the distillation column shell 1, the steam rises through the sieve holes 6 on the tray 7. During the rise, it comes into contact with the liquid on the tray 7 for heat and mass transfer. After the steam reaches the top of the distillation column shell 1, it is transported to the condenser from the steam outlet pipe 4. The condenser condenses the steam into liquid and then transports it to the reflux tank through the pipeline. When the liquid level sensor inside the reflux tank detects that the liquid level has reached the set height, the reflux pump on the pipeline connected to the reflux tank transports the liquid inside the reflux tank back to the interior of the distillation column shell 1 from the reflux pipe 5 through the reflux pipe.

[0034] A movable cavity 27 is provided in the middle of the interior of the distillation column shell 1. Several uniformly distributed heating stators 25 are integrally formed on both sides of the inner wall of the movable cavity 27. Limiting slide rails 28 are installed on both the upper and lower sides of the inner wall of the movable cavity 27. A sliding plate 29, which is annular, is slidably connected inside the limiting slide rails 28. The sliding plate 29 slides inside the limiting slide rails 28 under the drive of a drive assembly. Several uniformly distributed heating rotors 26 are installed on the upper surface of the sliding plate 29. A connecting cavity 210 is provided in the middle of the interior of the column tray 7. The heated liquid inside the movable cavity 27 can flow into the connecting cavity 210 to heat the column tray 7. A connecting pipe is connected to the lower surface of the connecting cavity 210 at the position corresponding to the sieve holes 6. 219. A connecting groove 220 is provided on the inner side wall of the distillation column shell 1 at the position corresponding to the connecting cavity 210. A liquid inlet pipe 21 is connected to the outer side wall of the distillation column shell 1 at the position between two adjacent limit slide rails 28. A liquid outlet pipe 214 is integrally formed on the other side of the outer side wall of the distillation column shell 1 at the position corresponding to the liquid inlet pipe 21. Liquid enters at the position of the liquid inlet pipe 21 and is discharged at the position of the liquid outlet pipe 214, so that the interior of the distillation column body 1 reaches dynamic equilibrium. A control valve 22 is installed on the side of the outer side wall of the liquid inlet pipe 21 and the liquid outlet pipe 214 away from the distillation column shell 1. A transmission pipe 24 is integrally formed on both sides of the outer side wall of the liquid inlet pipe 21 near the position of the distillation column shell 1. Several evenly distributed connecting pipes 23 are connected to the outer side wall of the transmission pipe 24.

[0035] The drive assembly includes a drive shaft 215, an installation groove is provided on the inner wall of the drain pipe 214 corresponding to the position of the drive shaft 215, a connecting plate 216 is installed on the upper end of the drive shaft 215, a drive motor is installed on the outer wall of the distillation column shell 1 corresponding to the position of the connecting plate 216, the output end of the drive motor is connected to the connecting plate 216, a drive wheel 211 is connected to the outer wall of the drive shaft 215, a number of evenly distributed interlocking tooth grooves 218 are provided on the inner wall of the sliding plate 29, the drive gear 217 interlocks with the interlocking tooth grooves 218 and drives them to rotate, a connecting shaft 212 is rotatably connected to the upper surface of the limiting slide rail 28 corresponding to the position of the interlocking tooth grooves 218, a drive gear 217 is connected to the outer wall of the connecting shaft 212 corresponding to the position of the sliding plate 29, a drive wheel 211 is also connected to the outer wall of the connecting shaft 212 corresponding to the position of the drive wheel 211, and the two drive wheels 211 are connected by a drive belt 213.

[0036] In the existing technology, silane separation is required in the product obtained after the disproportionation reaction of trichlorosilane. When the product is distilled using a distillation column, the generated vapor is transferred from top to bottom. During the transfer process, because the distillation column is in direct contact with the external environment, the heat inside the distillation column is easily lost to the outside. After the heat is lost, some of the vapor is easily condensed before being discharged from the top of the distillation column due to the decrease in internal temperature, which affects the yield of silane.

[0037] During the distillation of silane prepared from the disproportionation reaction of trichlorosilane inside the distillation column shell 1, a drive motor connected to the outer wall of the distillation column shell 1 drives a connecting plate 216 connected to the output end of the drive motor to rotate. A transmission shaft 215 and a connecting shaft 212 are connected via a transmission belt, allowing the transmission shaft 215 to rotate and drive the connecting shaft 212 to rotate. The connecting shaft 212 rotates under the support of a limiting slide rail 28 on the inner wall of the distillation column shell 1. During the rotation of the connecting shaft 212, a transmission gear 217 on the outer wall drives a sliding plate 29 to rotate within the limiting slide rail 216. The inner side of the sliding plate 29 rotates around the central axis of the distillation column shell 1. During the rotation of the sliding plate 29, the heating rotor 26 connected to the sliding plate 29 agitates the liquid inside the movable chamber 27, generating vortex liquid. During the flow, it collides with the heating stators 25 on both sides of the inner wall of the movable chamber 27, breaking the vortex in the liquid and generating heat, causing the temperature of the liquid inside the movable chamber 27 to gradually rise. The liquid inside the movable chamber 27 can flow from the connecting groove 220 to the connecting chamber 210. The connecting pipe 23 connected to the transmission pipe 24 on both sides of the outer wall of the inlet pipe 21 can allow the liquid flowing from the inlet pipe 21 to flow into the movable chamber 21. The cold liquid is dispersed through several connecting pipes 23 and then transported into the movable chamber 27. The amount of liquid flowing in from the inlet pipe 21 can be controlled by opening and closing the control valve 22. The cold liquid and the liquid inside the movable chamber 27 are uniformly mixed under the stirring of the heating rotor 26. When liquid is input at the inlet pipe 21, the control valve 22 on the drain pipe 214 opens to allow the liquid inside the movable chamber 27 to flow out, facilitating the adjustment of the temperature of the liquid inside the movable chamber 27. When liquid flows at several locations on the distillation column shell 1, the control valve 21 and drain pipe 214 are connected to the control valve 22. The flow sensor on valve 22 can detect the flow rate. The heating rotor 26 on sliding plate 29 rotates under the drive of the drive motor to stir the liquid inside the movable chamber 27. The liquid generates heat during the collision between the heating rotor 26 and the heating stator 25, and the temperature rises. The heated liquid can be transferred to the connecting chamber 210. When the gas phase and liquid phase come into contact, heat exchange occurs due to the temperature difference between the two. The heat inside the connecting chamber 210 can transfer heat to the liquid phase, improve the distillation efficiency, and prevent the heat loss from the inside of the distillation column body 1, thus having a heat preservation effect on the inside of the distillation column body 1.

[0038] Example 2:

[0039] Please see Figure 5-8As shown, a ventilation pipe 31 is installed on the upper surface of the tower plate 7 at the position corresponding to the sieve hole 6. Three support blocks 32 are integrally formed on the outer wall of the ventilation pipe 31 at the position corresponding to the sieve hole 6. The outer wall of the ventilation pipe 31 has a dividing plate groove 33 in three directions. A rotating plate 37 is rotatably connected to the upper surface of the inner part of the dividing plate groove 33. The rotating plate 37 is arc-shaped and its radius is the same as that of the ventilation pipe 31. A center plate 38 is provided inside the ventilation pipe 31 at the position corresponding to the rotating plate 37. An adjusting connecting rod 39 is installed on the outer wall of the center plate 38 at the position corresponding to the rotating plate 37. A spiral fan blade 34 is rotatably connected to the upper part of the ventilation pipe 31 near the center plate 38 through a rotating shaft 35. A drive wheel 36 is rotatably connected to the upper part of the outer wall of the spiral fan blade 34. The rotating shaft 35 inside the adjacent ventilation pipe 31 is connected to the drive wheel 36 and the transmission belt 213 through the transmission.

[0040] In the prior art, the steam flowing from bottom to top inside the distillation column body 1 needs to be transported upward through the sieve holes 6 on the column plate 7 during the flow process, and the liquid on the column plate 7 flows downward through the sieve holes 6, which hinders the upward flow speed of the steam and affects the distillation efficiency.

[0041] The liquid on the upper tray 7 flows down to the lower tray 7 through the sieve holes 6. During the flow, it passes through the gap between the vent pipe 31 and the sieve holes 6. The outer side of the vent pipe 31 between the upper and lower trays 7 can be opened by adjusting the rotating plate 37 through the adjusting rod 39, so that the liquid left from the upper layer is blocked by the rotating plate 37 and does not flow into the vent pipe 31. The rotating shafts 35 at the upper ends of several vent pipes 31 located at the top of the distillation column shell 1 are driven to rotate by the transmission belt 213. During the rotation, The rotation of the spiral fan blades 34 connected to the rotating shaft 35 accelerates the flow rate of steam inside the vent pipe 31. The vent pipe 31 separates the liquid and steam on the tray 7, preventing them from obstructing each other. The downward-flowing liquid is dispersed by the opening rotating plate 37, increasing the contact area with the steam and allowing for better heat exchange between the steam and the liquid. After heat exchange, the upward-flowing steam can flow along the rotating plate 37 into the vent pipe 31 and upward along the vent pipe 31 without being obstructed by the liquid, which is beneficial to improving the distillation efficiency.

[0042] The preferred embodiments of the present invention disclosed above are merely illustrative of the invention. These preferred embodiments do not exhaustively describe all details, nor do they limit the invention to any specific implementation. Clearly, many modifications and variations can be made based on the content of this specification. This specification selects and specifically describes these embodiments to better explain the principles and practical applications of the invention, thereby enabling those skilled in the art to better understand and utilize the invention. The invention is limited only by the claims and their full scope and equivalents.

Claims

1. An apparatus for preparing silane, comprising a distillation column shell (1), wherein a steam outlet pipe (4) is integrally formed on the upper surface of the distillation column shell (1), a liquid outlet pipe (9) is integrally formed on the lower surface of the distillation column shell (1), a reflux pipe (5) is integrally formed on the upper side wall of the distillation column shell (1), a steam pipe (8) is integrally formed on the lower side wall of the distillation column shell (1), a feed pipe (11) is integrally formed at the middle position of the outer side wall of the distillation column shell (1), a plurality of trays (7) are connected to the inner side wall of the distillation column shell (1), a downcomer plate (10) is integrally formed on the outer side wall of the tray (7), and a plurality of uniformly distributed sieve holes (6) are provided on the upper surface of the tray (7), characterized in that, A movable cavity (27) is provided in the middle of the interior of the distillation column shell (1). Several uniformly distributed heating stators (25) are integrally formed on both sides of the inner wall of the movable cavity (27). Limiting slide rails (28) are installed on the upper and lower sides of the inner wall of the movable cavity (27). A sliding plate (29) is slidably connected inside the limiting slide rail (28). The sliding plate (29) slides inside the limiting slide rail (28) under the drive of the driving component. Several uniformly distributed heating rotors (26) are installed on the upper surface of the sliding plate (29). A connecting cavity (210) is provided in the middle of the interior of the tower plate (7). A connecting pipe (219) is connected to the lower surface of the connecting cavity (210) at the position corresponding to the sieve hole (6). A connecting groove (220) is provided in the inner wall of the distillation column shell (1) at the position corresponding to the connecting cavity (210). A ventilation pipe (31) is installed on the upper surface of the tower plate (7) at the position corresponding to the sieve hole (6). Three support blocks (32) are integrally formed on the outer wall of the ventilation pipe (31) at the position corresponding to the sieve hole (6). The outer wall of the ventilation pipe (31) is provided with a plate groove (33) in three directions. A rotating plate (37) is rotatably connected to the upper surface of the inner side of the plate groove (33). A center plate (38) is provided inside the ventilation pipe (31) at the position corresponding to the rotating plate (37). An adjusting rod (39) is installed on the outer wall of the center plate (38) at the position corresponding to the rotating plate (37).

2. The apparatus for preparing silane according to claim 1, characterized in that, A liquid inlet pipe (21) is connected to the middle position of the two adjacent limiting slide rails (28) on the outer side wall of the distillation column shell (1). A drain pipe (214) is integrally formed on the other side of the outer side wall of the distillation column shell (1) corresponding to the position of the liquid inlet pipe (21). A control valve (22) is installed on the side of the outer side wall of the liquid inlet pipe (21) away from the distillation column shell (1). A transmission pipe (24) is integrally formed on both sides of the outer side wall of the liquid inlet pipe (21) near the position of the distillation column shell (1). A number of evenly distributed connecting pipes (23) are connected to the outer side wall of the transmission pipe (24).

3. The apparatus for preparing silane according to claim 2, characterized in that, The drive assembly includes a drive shaft (215), and an installation groove is provided on the inner wall of the drain pipe (214) corresponding to the position of the drive shaft (215). A connecting plate (216) is installed on the upper end of the drive shaft (215). A drive motor is installed on the outer wall of the distillation column shell (1) corresponding to the position of the connecting plate (216). The output end of the drive motor is connected to the connecting plate (216). A drive wheel (211) is connected to the outer wall of the drive shaft (215). An opening is provided on the inner wall of the sliding plate (29). There are several evenly distributed interlocking tooth grooves (218). The upper surface of the limiting slide rail (28) is rotatably connected to the interlocking tooth grooves (218). The outer wall of the connecting shaft (212) is connected to the sliding plate (29) at the position of the connecting plate (29). The outer wall of the connecting shaft (212) is also connected to the transmission wheel (211) at the position of the transmission wheel (211). The two transmission wheels (211) are connected by transmission belt (213).

4. The apparatus for preparing silane according to claim 3, characterized in that, Inside the vent pipe (31), near the center plate (38), a spiral fan blade (34) is rotatably connected via a rotating shaft (35). Above the outer side wall of the spiral fan blade (34), a drive wheel (36) is rotatably connected. The rotating shaft (35) inside the adjacent vent pipe (31) is connected via the drive wheel (36) and a transmission belt (213).

5. A method for preparing silanes according to claim 4, characterized in that, Includes the following steps: Step 1: The raw material tank is connected to the feed pipe (11) via a pipeline. The raw material tank is pumped by the raw material pump on the connecting pipeline to the inside of the distillation column shell (1). The raw liquid entering the distillation column shell (1) falls above the tray (7) and permeates from the sieve hole (6) on the upper tray (7) to the lower tray (7), and then accumulates at the bottom of the distillation column shell (1). When the liquid level sensor inside the distillation column shell (1) detects that the liquid level has reached the set height, the raw liquid at the bottom of the distillation column shell (1) is transferred to the reboiler connected to the outlet pipe (9) via a pipeline. The raw liquid is heated and converted into steam inside the reboiler. The steam is transported back to the interior of the distillation column shell (1) from the position of the steam pipe (8) through the pipeline. The steam rises through the sieve holes (6) on the tray (7) inside the distillation column shell (1). During the rise, it comes into contact with the liquid on the tray (7) for heat and mass transfer. After the steam is transported to the top of the distillation column shell (1), it is transported to the interior of the condenser through the pipeline from the position of the steam outlet pipe (4). After the steam is condensed into liquid by the condenser, it is transported to the reflux tank through the pipeline. After the liquid level sensor inside the reflux tank detects that the liquid level has reached the set height, the liquid inside the reflux tank is transported back to the interior of the distillation column shell (1) through the reflux pump on the pipeline connected to the reflux tank from the position of the reflux pipe (5). Step 2: During the distillation of silane prepared after the disproportionation reaction of trichlorosilane inside the distillation column shell (1), the drive motor connected to the outer wall of the distillation column shell (1) drives the connecting plate (216) connected to the output end of the drive motor to rotate. The transmission shaft (215) and the connecting shaft (212) are connected by a transmission belt, so that the transmission shaft (215) can drive the connecting shaft (212) to rotate during the rotation. The connecting shaft (212) rotates under the support of the limiting slide rail (28) on the inner wall of the distillation column shell (1). During the rotation of the connecting shaft (212), the transmission belt on the outer wall drives the connecting shaft (216) to rotate. The moving gear (217) drives the sliding plate (29) to rotate around the central axis of the distillation column shell (1) inside the limiting slide rail (28). During the rotation of the sliding plate (29), the heating rotor (26) connected to the sliding plate (29) stirs the liquid inside the active cavity (27) to generate vortex liquid. During the flow, it collides with the heating stator (25) on both sides of the inner wall of the active cavity (27), which breaks the vortex in the liquid and generates heat, causing the liquid temperature inside the active cavity (27) to gradually rise. The liquid inside the active cavity (27) can flow from the position of the connecting groove (220) to the inside of the connecting cavity (210). Step 3: The connecting pipe (23) on the transmission pipe (24) connected to both sides of the outer wall of the liquid inlet pipe (21) can transmit the cold liquid flowing in from the liquid inlet pipe (21) into the active chamber (27) after being dispersed by several connecting pipes (23). The amount of liquid flowing in from the liquid inlet pipe (21) can be controlled by opening and closing the control valve (22). The cold liquid and the liquid inside the active chamber (27) are mixed evenly under the stirring of the heating rotor (26). When the liquid is input at the liquid inlet pipe (21), the control valve (22) on the drain pipe (214) is opened to allow the liquid inside the active chamber (27) to flow out, which facilitates the adjustment of the temperature of the liquid inside the active chamber (27). When the liquid flows at the liquid inlet pipe (21) and drain pipe (214) at several locations on the distillation column shell (1), the flow sensor connected to the control valve (22) can detect the flow rate. Step 4: The liquid on the upper tray (7) flows down to the lower tray (7) through the sieve hole (6). During the flow, it flows through the gap between the vent pipe (31) and the sieve hole (6). The outer side of the vent pipe (31) between the upper tray (7) and the lower tray (7) can be opened by adjusting the connecting rod (39) to rotate the plate (37), so that the liquid flowing down from the upper layer is blocked by the rotating plate (37) and will not flow into the vent pipe (31). Several rotating shafts (35) at the upper end of the vent pipes (31) located at the top of the distillation column shell (1) are driven to rotate by the transmission belt (213). During the rotation, the spiral fan blades (34) connected to the rotating shaft (35) rotate to accelerate the flow rate of the steam inside the vent pipe (31).

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