Mask alignment interface

Abstract

The application relates to the technical field of mask transmission, in particular to a mask alignment and handover device which comprises a fixing frame, a suction disc arranged at the bottom of the fixing frame and used for adsorbing and fixing a mask plate, front, rear, left and right side plates respectively arranged at the four sides of the fixing frame, and the directions of the fixing frame towards the front, rear, left and right side plates being front, rear, left and right directions respectively; a driving mechanism arranged on the fixing frame and connected with the front, rear, left and right side plates, which can simultaneously drive the front and rear side plates to move towards each other and the left and right side plates to move towards each other; and positioning columns fixedly arranged on the front, rear, left and right side plates, the four positioning columns being capable of abutting against the four sides of the mask plate to position the mask plate in the horizontal direction. The device can complete the alignment, fixation and handover of the mask plate, the alignment operation is simple, and the overall structure is simple.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of mask transmission, in particular to a mask alignment and transfer device. BACKGROUND

[0002] A mask plate is an indispensable material for an exposure process, and the mask plate carries a design pattern. Light transmits through the pattern to project the design pattern on a wafer. Mask transmission is to load the mask plate from a plate library to a mask table and ensure a certain plate loading accuracy. A mask positioning device is used to complete the alignment of the mask plate to ensure the plate loading accuracy. The disadvantages of the prior art are:

[0003] The alignment method of the existing equipment for the mask plate usually installs a mask plate position measurement system in the transmission system. The position deviation of the mask plate read by the position measurement system is transmitted to a host computer. The host computer issues a position compensation instruction. A manipulator moves to compensate for the position deviation of the mask plate to achieve the purpose of aligning the mask plate. The prior art needs to design a position measurement system, mask plate alignment marks and a compensation movement shaft of the manipulator. The alignment process is complicated and the structure is complex. SUMMARY

[0004] The purpose of the present application is to provide a mask alignment and transfer device which can complete the alignment, fixation and transfer of the mask plate, and the alignment operation is simple and the overall structure is simple.

[0005] The technical solution of the present application is as follows:

[0006] A mask alignment and transfer device comprises a fixing frame, a suction cup for adsorbing and fixing a mask plate is arranged at the bottom of the fixing frame, front, rear, left and right side plates are respectively arranged on the four sides of the fixing frame, and the directions of the fixing frame towards the front, rear, left and right side plates are front, rear, left and right directions respectively;

[0007] A driving mechanism is arranged on the fixing frame, the driving mechanism is connected with the front, rear, left and right side plates, and can simultaneously control the front and rear side plates to move towards each other or in opposite directions in the front-rear direction and the left and right side plates to move towards each other or in opposite directions in the left-right direction;

[0008] Positioning columns are fixedly arranged on the front, rear, left and right side plates, and the positioning columns on the front, rear, left and right side plates can jointly abut against the four sides of the mask plate to position the mask plate in the horizontal direction.

[0009] Further, the driving mechanism comprises a first cylinder, a second cylinder, a third cylinder and a fourth cylinder, the first cylinder is connected with the front side plate, the second cylinder is connected with the rear side plate, the third cylinder is connected with the left side plate, and the fourth cylinder is connected with the right side plate.

[0010] Further, a vacuum suction mechanism is further included, the vacuum suction mechanism comprises a first vacuum pipeline and a second vacuum pipeline, the first vacuum pipeline is communicated with the first cylinder and the second cylinder, and the second vacuum pipeline is communicated with the third cylinder and the fourth cylinder.

[0011] Further, the vacuum suction mechanism further comprises a third vacuum pipeline, the suction disc is provided with a vacuum suction cavity, the vacuum suction cavity comprises a negative pressure connecting port and a plurality of vacuum suction ports, the plurality of vacuum suction ports are used for collectively suction-fixing the mask plate, and the negative pressure connecting port is communicated with the third vacuum pipeline through an electromagnetic valve.

[0012] Further, a first sliding table module and a second sliding table module are further included, the first sliding table module comprises a matched first guide rail and a first sliding block, the first guide rail is fixedly arranged on the fixed frame, and the first cylinder is connected with the front side plate through the first sliding block.

[0013] The second sliding table module comprises a matched second guide rail and a second sliding block, the second guide rail is fixed on the fixed frame, and the second cylinder is connected with the rear side plate through the second sliding block.

[0014] Further, a third sliding table module and a fourth sliding table module are further included, the third sliding table module comprises a matched third guide rail and a third sliding block, the third guide rail is fixed on the fixed frame, and the third cylinder is connected with the left side plate through the third sliding block.

[0015] The fourth sliding table module comprises a matched fourth guide rail and a fourth sliding block, the fourth guide rail is fixed on the fixed frame, and the fourth cylinder is connected with the right side plate through the fourth sliding block.

[0016] Further, a pressure sensor is arranged in the vacuum suction cavity.

[0017] Further, the suction disc is made of flexible material, the suction disc is hung at the bottom of the fixed frame through a plurality of flexible pieces arranged uniformly, the flexible piece comprises a fixed end and a floating end, and the floating end floats along with the flexible deformation of the suction disc.

[0018] Further, a mechanical hand is further included, the mechanical hand is used for carrying the mask plate and moving the mask plate to be directly below the suction disc.

[0019] Further, the front side plate and the rear side plate are provided with hooks, or the left side plate and the right side plate are provided with hooks, which can prevent the mask from falling off after being adsorbed by the suction cup.

[0020] Compared with the prior art, the present application has the following advantages:

[0021] The whole device has simple structure, and in operation: firstly, the driving mechanism is operated to move the front side plate, the rear side plate, the left side plate and the right side plate towards the front side, the rear side, the left side and the right side respectively, so as to form an outward opening trend, and the front side plate, the rear side plate, the left side plate and the right side plate on the four sides of the fixing frame are equivalent to a clamping jaw which can open and close freely; when the front side plate, the rear side plate, the left side plate and the right side plate on the four sides of the fixing frame are opened outward, the device is in an open state; then the mask is placed below the suction cup (the mask can be moved manually or by a mechanical hand), so that the suction cup contacts the mask and the four sides of the mask correspond to the periphery of the suction cup; then the driving mechanism is started again to move the front side plate, the rear side plate, the left side plate and the right side plate on the four sides of the fixing frame inward to return to the initial closed state; the positioning columns on the four sides of the fixing frame are respectively located on the four sides of the mask, so that the mask is clamped and fixed by the positioning columns on the four sides of the fixing frame to realize positioning and preliminary fixing; after the mask is aligned and positioned, the suction cup is started to adsorb and fix the mask to realize fixing of the mask; finally, the suction cup is stopped to lose the adsorption force, so that the suction cup is separated from the mask, and the mask is handed over to a mechanical hand or the next mechanism to complete the handover of the mask, thereby realizing alignment, fixing and handover of the mask, and the operation is relatively simple. BRIEF DESCRIPTION OF DRAWINGS

[0022] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following will briefly introduce the drawings needed to be used in the embodiments. It should be understood that the following drawings only show some embodiments of the present application, and therefore should not be regarded as a limitation to the scope, and other related drawings can also be obtained by those skilled in the art without any creative effort.

[0023] Figure 1 A schematic view of the three-dimensional structure of the mask alignment and handover of the present application;

[0024] Figure 2 A schematic view of the structure of the contact surface between the bottom of the suction cup and the mask;

[0025] Figure 3 A schematic view of the structure of the mask after being adsorbed and fixed by the suction cup;

[0026] Figure 4 A schematic view of the structure of the mask after being separated from the suction cup.

[0027] 1 - mask plate; 2 - chuck; 3 - vacuum suction mechanism; 301 - first vacuum pipeline; 302 - second vacuum pipeline; 303 - third vacuum pipeline; 4 - fixing frame; 5 - flexible sheet; 6 - driving mechanism; 601 - first air cylinder; 602 - second air cylinder; 603 - third air cylinder; 604 - fourth air cylinder;

[0028] 7 - positioning column; 801 - front side plate; 802 - rear side plate; 803 - left side plate; 804 - right side plate;

[0029] 9 - manipulator; 10 - hook. DETAILED DESCRIPTION

[0030] In order to make the objects, technical solutions and advantages of the embodiments of the present application clearer, the following will be combined with the accompanying drawings for the embodiments of the present application to make a clear and complete description of the technical solutions in the embodiments of the present application. Obviously, the described embodiments are a part of the embodiments of the present application, rather than all the embodiments. The components of the embodiments of the present application described and shown in the accompanying drawings can be arranged and designed in various different configurations.

[0031] Therefore, the following detailed description of the embodiments of the present application provided in the accompanying drawings is not intended to limit the scope of the claimed present application, but only represents selected embodiments of the present application. All other embodiments obtained by those of ordinary skill in the art based on the embodiments in the present application without creative labor are within the scope of protection of the present application.

[0032] It should be noted that: similar reference numerals and letters represent similar items in the following drawings, therefore, once an item is defined in one drawing, it does not need to be further defined and explained in the subsequent drawings.

[0033] In the description of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship when the product of the present application is usually placed, which is only for the convenience of describing the present application and simplifying the description, and does not indicate or imply that the indicated device or element must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application. In addition, the terms "first", "second", "third" and the like are only used for differentiation in description, and cannot be understood as indicating or implying relative importance.

[0034] In addition, the terms "horizontal", "vertical", "overhanging" and the like do not mean that the components must be absolutely horizontal or overhanging, but can be slightly inclined. For example, "horizontal" only means that its direction is relatively more horizontal than "vertical", and does not mean that the structure must be completely horizontal, but can be slightly inclined.

[0035] In the description of the present application, it is also necessary to point out that, unless otherwise explicitly specified and limited, the terms "arrange", "mount", "connect", "connect" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium, or it can be the communication inside two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0036] Some embodiments of the present application will be described in detail below with reference to the accompanying drawings. The following examples and features in the examples can be combined with each other without conflict.

[0037] Example 1

[0038] Referring to Figures 1-4 The present embodiment provides a mask alignment transfer device, comprising a fixing frame 4, the bottom of the fixing frame 4 is provided with a suction cup 2 for adsorbing and fixing a mask plate 1, four sides of the fixing frame 4 are respectively provided with a front side plate 801, a rear side plate 802, a left side plate 803 and a right side plate 804, and the directions of the fixing frame 4 towards the front side plate 801, the rear side plate 802, the left side plate 803 and the right side plate 804 are front, rear, left and right directions respectively.

[0039] A driving mechanism 6 is arranged on the fixing frame 4, the driving mechanism 6 is connected with the front side plate 801, the rear side plate 802, the left side plate 803 and the right side plate 804, and can simultaneously control the front side plate 801 and the rear side plate 802 to move towards each other or in opposite directions in the front-rear direction, and the left side plate 803 and the right side plate 804 to move towards each other or in opposite directions in the left-right direction. That is, the driving mechanism 6 can drive the front side plate 801, the rear side plate 802, the left side plate 803 and the right side plate 804 to move synchronously towards the direction of the fixing frame (inwardly retract), and also can drive them to move synchronously away from the direction of the fixing frame (outwardly expand).

[0040] The front side plate 801, the rear side plate 802, the left side plate 803 and the right side plate 804 are all fixedly provided with a positioning column 7, and the positioning columns 7 on the front side plate 801, the rear side plate 802, the left side plate 803 and the right side plate 804 can jointly abut against the four sides of the mask plate to position the mask plate in the horizontal direction.

[0041] It should be noted that the front side plate 801, the rear side plate 802, the left side plate 803 and the right side plate 804 are not directly connected with the fixing frame 4, but are indirectly connected with the fixing frame 4 through the driving mechanism 6. Preferably, the front side plate 801 and the rear side plate 802 are arranged in parallel with each other, and the left side plate 803 and the right side plate 804 are arranged in parallel with each other. The number of the positioning columns 7 arranged on the front side plate 801, the rear side plate 802, the left side plate 803 or the right side plate 804 is at least one, and the number of the positioning columns 7 is determined according to the specific situation. The positioning columns 7 located on the four sides of the fixing frame 4 are mainly used for corresponding abutting against the four sides of the mask plate to achieve the horizontal positioning of the mask plate.

[0042] In actual operation: first, the driving mechanism 6 is operated to move the front side plate 801, the rear side plate 802, the left side plate 803 and the right side plate 804 towards the front side, the rear side, the left side and the right side respectively, forming an outward opening trend. The front side plate 801, the rear side plate 802, the left side plate 803 and the right side plate 804 located on the four sides of the fixing frame 4 correspond to a self-opening and closing clamping jaw. When the front side plate 801, the rear side plate 802, the left side plate 803 and the right side plate 804 located on the four sides of the fixing frame 4 are opened outward, they are in an open state. Then the rectangular mask plate 1 is placed on the bottom of the suction cup 2 corresponding to the outer periphery of the suction cup 2, and the suction cup 2 is in contact with the mask plate 1. Then the driving mechanism 6 is started again to move the front side plate 801, the rear side plate 802, the left side plate 803 and the right side plate 804 located on the four sides of the fixing frame 4 inward to return to the initial closed state. The positioning columns 7 located on the four sides of the fixing frame 4 are respectively located on the four sides of the mask plate, and the positioning columns 7 located on the four sides of the fixing frame 4 abut against the four sides of the mask plate to achieve the horizontal positioning of the mask plate. After the mask plate is aligned and positioned, the suction cup 2 is started to adsorb and fix the mask plate to achieve the fixation of the mask plate. Finally, the suction cup 2 is stopped to lose the adsorption force, and the suction cup 2 is separated from the mask plate, and the mask plate is handed over to the next operation process, so as to realize the alignment, fixation and handover of the mask plate 1.

[0043] Specifically, the driving mechanism 6 comprises a first cylinder 601, a second cylinder 602, a third cylinder 603 and a fourth cylinder 604, the first cylinder 601 is connected with the front side plate 801, the second cylinder 602 is connected with the rear side plate 802, the third cylinder 603 is connected with the left side plate 803, and the fourth cylinder 604 is connected with the right side plate 804. The first cylinder 601, the second cylinder 602, the third cylinder 603 and the fourth cylinder 604 are all fixed on the fixed frame 4, the telescopic rods of the first cylinder 601 and the second cylinder 602 are in front-rear direction, and the telescopic rods of the third cylinder 603 and the fourth cylinder 604 are in left-right direction. The first cylinder 601 drives the front side plate 801 to move in front-rear direction, the second cylinder 602 drives the rear side plate 802 to move in front-rear direction, the third cylinder 603 drives the left side plate 803 to move in left-right direction, and the fourth cylinder 604 drives the right side plate 804 to move in left-right direction.

[0044] The mask alignment transfer device also comprises a vacuum suction mechanism 3, the vacuum suction mechanism 3 comprises a first vacuum pipeline 301 and a second vacuum pipeline 302, the first vacuum pipeline 301 is communicated with the first cylinder 601 and the second cylinder 602, and the second vacuum pipeline 302 is communicated with the third cylinder 603 and the fourth cylinder 604. It should be noted that the first vacuum pipeline 301 can synchronously control or separately control the first cylinder 601 and the second cylinder 602. When the first vacuum pipeline 301 synchronously controls the first cylinder 601 and the second cylinder 602, no electromagnetic valve is needed between the first cylinder 601, the second cylinder 602 and the first vacuum pipeline 301, the first cylinder 601 is directly communicated with the first vacuum pipeline 301, and the second cylinder 602 is also directly communicated with the first vacuum pipeline 301. When the first vacuum pipeline 301 separately controls the first cylinder 601 and the second cylinder 602, the first cylinder 601 and the second cylinder 602 are respectively communicated with the first vacuum pipeline 301 through electromagnetic valves. Similarly, the second vacuum pipeline 302 can synchronously control or separately control the third cylinder 603 and the fourth cylinder 604, which will not be described here.

[0045] In the embodiment, the vacuum adsorption mechanism 3 further comprises a third vacuum pipeline 303, the suction cup 2 is provided with a vacuum adsorption cavity comprising a negative pressure connecting port and a plurality of vacuum suction ports for collectively adsorbing and fixing the mask plate 1, and the negative pressure connecting port of the vacuum adsorption cavity is communicated with the third vacuum pipeline 303 through an electromagnetic valve. Specifically, the contact area between the suction cup 2 and the mask plate 1 is designed with four vacuum cavities, the lower surfaces of the four vacuum cavities are coplanar, the vacuum cavities are communicated with each other to form a large vacuum adsorption cavity, the negative pressure connecting port of the vacuum adsorption cavity is communicated with the third vacuum pipeline 303, and when the suction cup 2 is attached to the upper surface of the mask plate 1, the third vacuum pipeline 303 is communicated with negative pressure, and the vacuum between the suction cup 2 and the mask plate 1 is established to fix the mask plate 1 on the suction cup 2.

[0046] The mask alignment transfer device also comprises first, second, third and fourth slide module groups which play a guiding role. The extension rod of the first cylinder 601 is connected with the front side plate 801 through the first slide module group, the extension rod of the second cylinder 602 is connected with the rear side plate 802 through the second slide module group, the extension rod of the third cylinder 603 is connected with the left side plate 803 through the third slide module group, and the extension rod of the fourth cylinder 604 is connected with the right side plate 804 through the fourth slide module group.

[0047] The first slide module group comprises a matched first guide rail and a first sliding block, the first guide rail is fixedly arranged on the fixed frame 4, and the first cylinder 601 is connected with the front side plate 801 through the first sliding block. The first guide rail is arranged in the front-rear direction, and when the first cylinder 601 operates, the extension rod of the first cylinder 601 drives the first sliding block to move along the first guide rail, thereby driving the front side plate 801 to translate in the front-rear direction.

[0048] The second slide module group comprises a matched second guide rail and a second sliding block, the second guide rail is fixed to the fixed frame 4, and the second cylinder 602 is connected with the rear side plate 802 through the second sliding block. The second guide rail is arranged in the front-rear direction, and when the second cylinder 602 operates, the extension rod of the second cylinder 602 drives the second sliding block to move along the second guide rail, thereby driving the rear side plate 802 to translate in the front-rear direction.

[0049] The third slide module group comprises a matched third guide rail and a third sliding block, the third guide rail is fixed to the fixed frame 4, and the third cylinder 603 is connected with the left side plate 803 through the third sliding block. The third guide rail is arranged in the left-right direction, and when the third cylinder 603 operates, the extension rod of the third cylinder 603 drives the third sliding block to move along the third guide rail, thereby driving the left side plate 803 to translate in the left-right direction.

[0050] The fourth sliding table module comprises a matched fourth guide rail and a fourth sliding block, the fourth guide rail is fixed to the fixed frame 4, and the fourth cylinder 604 is connected with the right side plate 804 through the fourth sliding block. The fourth guide rail is arranged along the left-right direction, and when the fourth cylinder 604 operates, the telescopic rod of the fourth cylinder 604 drives the fourth sliding block to move along the fourth guide rail, thereby driving the right side plate 804 to translate in the left-right direction.

[0051] In the embodiment, the first vacuum pipeline 301, the second vacuum pipeline 302 and the third vacuum pipeline 303 are respectively communicated with the vacuum suction device through electromagnetic valves, and the vacuum suction device can control the provision of negative pressure by the first vacuum pipeline 301, the second vacuum pipeline 302 and the third vacuum pipeline 303 respectively.

[0052] In the embodiment, a pressure sensor is arranged in the vacuum adsorption cavity, the pressure in the vacuum adsorption cavity is detected through the pressure sensor, and then it can be judged whether the mask plate 1 falls off after being adsorbed by the suction cup 2.

[0053] The suction cup 2 is made of flexible material, the suction cup 2 is hung at the bottom of the fixed frame 4 through a plurality of flexible sheets 5 arranged uniformly, the flexible sheet 5 comprises a fixed end and a floating end, and the floating end floats along with the flexible deformation of the suction cup 2. Preferably, three flexible sheets 5 are arranged. The suction cup 2 adjusts the posture adaptively according to the horizontal direction of the mask plate 1, the suction cup 2 is connected with the fixed frame 4 through the three flexible sheets 5, the fixed ends of the three flexible sheets 5 are connected with the fixed frame 4, the floating ends are connected with the suction cup 2, the three flexible sheets 5 are arranged in a circular and uniform circumferential array, the distribution mode limits the horizontal displacement or deflection of the suction cup 2, the flexible sheet 5 has high elasticity, and the suction cup 2 is hung at the bottom of the fixed frame 4 through the flexible sheet 5. When the suction cup 2 contacts with the mask plate 1, the suction cup 2 can adjust the horizontal posture adaptively and keep adhering to the upper surface of the mask plate 1.

[0054] It should be noted that when the mask plate 1 and the suction cup 2 are aligned, the mask plate 1 and the suction cup 2 can be manually contacted by manual movement, and in the preferred embodiment of the present application, a mechanical hand 9 for carrying the mask plate 1 is arranged, the mask plate 1 is automatically moved to the position below the suction cup 2 by the mechanical hand 9, the mask plate 1 is contacted with the suction cup 2, the mechanical hand 9 replaces manual work, saves time and effort, is more accurate and stable, and improves the alignment accuracy.

[0055] The device is designed to have a mask plate 1 state monitoring function, a sensor is designed to detect the vacuum cavity pressure value, the mask plate 1 state is detected by judging the pressure value, and the mask plate 1 adsorption is judged to be firm or not by comparing the threshold value.

[0056] The front side plate 801 and the rear side plate 802 of the device are provided with hooks 10, or the left side plate 803 and the right side plate 804 are provided with hooks 10, which can prevent the mask plate 1 from falling off after being adsorbed by the suction cup 2. Specifically, the hooks 10 are arranged on the positioning columns 7 of the left side plate 803 and the right side plate 804. When the suction cup 2 adsorbs the mask plate 1, if the vacuum in the vacuum cavity fails, the mask plate 1 is lifted by the hooks 10, and the mask plate 1 will not fall due to the failure of the vacuum, ensuring the safety of the mask plate 1.

[0057] The overall working principle of the mask alignment transfer device is as follows:

[0058] First, the driving mechanism 6 is operated to move the front side plate 801, the rear side plate 802, the left side plate 803 and the right side plate 804 towards the front side, the rear side, the left side and the right side respectively, forming an outward opening trend. The front side plate 801, the rear side plate 802, the left side plate 803 and the right side plate 804 on the four sides of the fixed frame 4 are equivalent to a self-opening and closing clamp jaw. When the front side plate 801, the rear side plate 802, the left side plate 803 and the right side plate 804 on the four sides of the fixed frame 4 open outward, they are in an open state. The suction cup 2 of the mask alignment transfer device is located above the manipulator 9, and the manipulator 9 moves the mask plate 1 to the position directly below the suction cup 2. When the suction cup 2 contacts the mask plate 1 carried on the manipulator 9, the suction cup 2 deforms flexibly in contact with the mask plate 1, and the suction cup 2 and the mask plate 1 adaptively fit together. After the manipulator 9 releases the mask plate 1, the device is driven to move horizontally by the extension and contraction of the first cylinder 601, the second cylinder 602, the third cylinder 603 and the fourth cylinder 604, and the positioning columns 7 on the four sides are retracted to be in a closed state. The positioning columns 7 on the four sides of the fixed frame 4 collectively abut against the four sides of the mask plate 1 to complete the horizontal positioning of the mask plate 1. The device adsorbs and fixes the mask plate 1 by establishing a vacuum between the suction cup 2 and the mask plate 1. The device transfers the mask to the manipulator 9 or the next mechanism by releasing the vacuum, thereby completing the transfer of the mask plate 1. When the device fixes the mask plate 1 by establishing a vacuum, the pressure sensor has the function of detecting the negative pressure value, and the size of the negative pressure value is used to judge whether the mask plate 1 is fixed firmly. When the vacuum adsorption of the mask plate 1 fails, the hooks 10 arranged on the device can bear the mask plate 1 to prevent the mask plate 1 from falling and being damaged.

[0059] Example 2

[0060] In the embodiment, the driving mechanism 6 comprises a first bidirectional cylinder and a second bidirectional cylinder. Two ends of the first bidirectional cylinder are connected with the front side plate 801 and the rear side plate 802 respectively, and the first bidirectional cylinder drives the front side plate 801 and the rear side plate 802 to move in the front-rear direction to realize simultaneous opening or closing. Two ends of the second bidirectional cylinder are connected with the left side plate 803 and the right side plate 804 respectively, and the second bidirectional cylinder drives the left side plate 803 and the right side plate 804 to move in the left-right direction to realize simultaneous opening or closing.

[0061] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present application, and are not intended to limit the present application; although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that they can still modify the technical solutions recorded in the foregoing embodiments, or make equivalent replacements for some or all of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present application.

[0062] In addition, those skilled in the art can understand that although some embodiments herein include certain features included in other embodiments rather than other features, the combination of features of different embodiments means to be within the scope of the present application and form different embodiments. For example, in the above claims, any one of the claimed embodiments can be used in any combination. The information disclosed in the BACKGROUND section is only intended to deepen the understanding of the overall background of the present application, and should not be regarded as acknowledging or implying in any form that the information constitutes prior art known to those skilled in the art.

[0063] Although embodiments of the present application have been shown and described, those skilled in the art can understand that various changes, modifications, replacements and variations can be made to these embodiments without departing from the principles and spirit of the present application, and the scope of the present application is defined by the appended claims and their equivalents.

[0064] The above description is only the preferred embodiments of the present application and is not intended to limit the present application. Those skilled in the art can make various changes and modifications to the present application. Any modification, equivalent replacement, improvement, etc. made within the spirit and principles of the present application shall be included in the protection scope of the present application.

Claims

1. A mask alignment interface device, characterized by The utility model relates to a mask plate fixing frame, including fixed frame (4), the bottom of fixed frame (4) is provided with the sucking disc (2) for adsorbing and fixing mask plate (1), four sides of fixed frame (4) are provided with front side plate (801), rear side plate (802), left side plate (803) and right side plate (804) respectively, the direction of fixed frame (4) to front side plate (801), rear side plate (802), left side plate (803) and right side plate (804) is forward, rearward, leftward and rightward respectively, The driving mechanism (6) is arranged on the fixed frame (4) and is connected with the front side plate (801), the rear side plate (802), the left side plate (803) and the right side plate (804), and can simultaneously drive the front side plate (801) and the rear side plate (802) to move towards each other and the left side plate (803) and the right side plate (804) to move towards each other. The front side plate (801), the rear side plate (802), the left side plate (803) and the right side plate (804) are all fixedly provided with positioning columns (7), and the positioning columns (7) on the front side plate (801), the rear side plate (802), the left side plate (803) and the right side plate (804) can jointly abut against four sides of the mask plate to position the mask plate in the horizontal direction. The sucking disc (2) is made of flexible material, the sucking disc (2) is hung on the bottom of the fixed frame (4) through three flexible sheets (5) arranged uniformly, the flexible sheets (5) include fixed ends and floating ends, the fixed ends of the three flexible sheets (5) are connected with the fixed frame, the floating ends are connected with the sucking disc (2), and the floating ends float along with the flexible deformation of the sucking disc (2); when aligning the mask plate (1) with the sucking disc (2), a mechanical hand (9) for carrying the mask plate (1) is arranged, the mask plate (1) is automatically moved to the position directly below the sucking disc (2) through the mechanical hand (9), and the mask plate (1) is correspondingly contacted with the sucking disc (2).

2. The mask alignment interface device of claim 1, wherein, The driving mechanism (6) includes a first cylinder (601), a second cylinder (602), a third cylinder (603) and a fourth cylinder (604), the first cylinder (601) is connected with the front side plate (801), the second cylinder (602) is connected with the rear side plate (802), the third cylinder (603) is connected with the left side plate (803), and the fourth cylinder (604) is connected with the right side plate (804).

3. The mask alignment interface device of claim 2, wherein, The utility model also includes a vacuum adsorption mechanism (3), the vacuum adsorption mechanism (3) includes a first vacuum pipeline (301) and a second vacuum pipeline (302), the first vacuum pipeline (301) is communicated with the first cylinder (601) and the second cylinder (602), and the second vacuum pipeline (302) is communicated with the third cylinder (603) and the fourth cylinder (604).

4. The mask alignment interface device of claim 3, wherein, The vacuum suction mechanism (3) further comprises a third vacuum pipeline (303), the suction cup (2) is provided with a vacuum suction cavity, the vacuum suction cavity comprises a negative pressure connecting port and a plurality of vacuum suction ports, the plurality of vacuum suction ports are used for collectively suctioning and fixing the mask plate (1), and the negative pressure connecting port is communicated with the third vacuum pipeline (303) through a solenoid valve.

5. The mask alignment interface device of claim 4, wherein, Further comprising a first sliding table module and a second sliding table module, the first sliding table module comprises a matched first guide rail and a first sliding block, the first guide rail is fixedly arranged on the fixed frame (4), and the first air cylinder (601) is connected with the front side plate (801) through the first sliding block. The second sliding table module comprises a matched second guide rail and a second sliding block, the second guide rail is fixed to the fixed frame (4), and the second air cylinder (602) is connected with the rear side plate (802) through the second sliding block.

6. The mask alignment interface device of claim 4, wherein, Further comprising a third sliding table module and a fourth sliding table module, the third sliding table module comprises a matched third guide rail and a third sliding block, the third guide rail is fixed to the fixed frame (4), and the third air cylinder (603) is connected with the left side plate (803) through the third sliding block. The fourth sliding table module comprises a matched fourth guide rail and a fourth sliding block, the fourth guide rail is fixed to the fixed frame (4), and the fourth air cylinder (604) is connected with the right side plate (804) through the fourth sliding block.

7. The mask alignment interface of claim 4, wherein, The inside of the vacuum suction cavity is provided with a pressure sensor.

8. The mask alignment interface of claim 1, wherein, The front side plate (801) and the rear side plate (802) are both provided with hooks (10), or the left side plate (803) and the right side plate (804) are both provided with hooks (10), and the hooks (10) can prevent the mask plate (1) from falling off after being suctioned by the suction cup (2).

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