A multifunctional mechanical sensor and its preparation method

Abstract

The present invention provides a multifunctional mechanical sensor and a method for preparing the same, belonging to the field of sensor technology. The sensor comprises: a first substrate, a second substrate, a pressure sensing layer, and a stretch sensing layer; the pressure sensing layer is disposed on the first substrate, and the stretch sensing layer is disposed on the second substrate; the modulus of the first substrate is greater than the modulus of the second substrate; the second substrate is disposed on a symmetrical side of the first substrate, or the second substrate is disposed around the first substrate, or the first substrate and the second substrate are alternately connected in the same plane. The present invention is a multifunctional mechanical sensor with fully decoupled pressure, stretching, and upper and lower bending, which improves the sensor's measurement range and sensitivity.

Description

Technical Field

[0001] The present invention relates to the field of sensor technology, and in particular to a multifunctional mechanical sensor and a preparation method thereof. Background Art

[0002] Wearable flexible sensors can convert different mechanical responses into electrical signals, and have the advantages of flexibility, easy attachment, portability, high sensitivity, and fast response. They have great potential applications in health monitoring, human-computer interaction, artificial intelligence, etc. However, due to their single structural design, most flexible sensors currently have difficulty in achieving complete decoupling and differentiation of pressure, stretching, bending and other sensing. The sensor electrical signals caused by different mechanical stimuli such as pressure and stretching are relatively similar, making it difficult to identify different mechanical signals, limiting the application of flexible sensors in precise signal monitoring. Although some researchers have proposed some strategies, such as integrating sensor elements for detecting different mechanical dimensions, these methods still have disadvantages such as incomplete decoupling, crosstalk between pressure and stretching signals, narrow measurement range, and complex preparation process due to the integration of devices on the same substrate or substrates with the same modulus. Summary of the Invention

[0003] The problem solved by the present invention is that it is difficult for sensors in the prior art to achieve complete decoupling of pressure, stretching, bending and other sensing, resulting in a low sensing range of the sensor.

[0004] In order to solve at least one aspect of the above problems, the present invention provides a multifunctional mechanical sensor, including: a first substrate, a second substrate, a pressure sensing layer and a stretch sensing layer; the pressure sensing layer is arranged on the first substrate, and the stretch sensing layer is arranged on the second substrate; the modulus of the first substrate is greater than the modulus of the second substrate; the second substrate is arranged on a symmetrical side of the first substrate, or the second substrate is arranged around the first substrate, or the first substrate and the second substrate are alternately connected in the same plane.

[0005] The advantages of the multifunctional mechanical sensor of the present invention over the prior art are:

[0006] The present invention obtains a multifunctional mechanical sensor with full decoupling of pressure, stretching, and up and down bending by assembling a pressure sensing layer and a stretch sensing layer on a first substrate with a larger modulus and a second substrate with a smaller modulus, respectively, and arranging the first substrate and the second substrate in an alternating manner, or arranging the second substrate around the first substrate. When measuring tensile strain, the stretch sensing structure composed of the second substrate with a smaller modulus and the stretch sensing layer is stretched, while the pressure sensing structure composed of the first substrate with a larger modulus and the pressure sensing layer does not deform. Therefore, the deformation of the stretch sensing structure does not produce crosstalk to the pressure sensing structure. When measuring pressure, the pressure sensing structure also does not produce crosstalk to the stretch sensing structure. When bending up or down, the change in resistance of the stretch sensing layer can be used to determine whether it is bending up or down. Therefore, the multifunctional mechanical sensor of the present invention can identify stretching, pressure, and up and down bending, achieves full decoupling and multifunctional performance, and improves the measurement range and sensitivity of the sensor.

[0007] The present invention also provides a method for preparing a multifunctional mechanical sensor, comprising:

[0008] Prepare a first substrate, and prepare a second substrate on a symmetrical side or around the first substrate to obtain a combined substrate; or alternately prepare the first substrate and the second substrate in the same plane to obtain a combined substrate;

[0009] preparing a first electrode, and attaching the first electrode to the first substrate of the combined substrate;

[0010] preparing a stretch sensing layer dispersion, coating the stretch sensing layer dispersion on the second substrate of the combined substrate, and drying to obtain a stretch sensing layer, wherein the stretch sensing layer is connected to the first electrode; connecting second electrodes to both ends of the stretch sensing layer, and encapsulating the second electrode and the stretch sensing layer to obtain an intermediate component having the stretch sensing layer integrated on the second substrate;

[0011] A pressure sensing layer is prepared, and the pressure sensing layer is encapsulated on the first substrate of the intermediate component to obtain a multifunctional mechanical sensor.

[0012] Preferably, the preparation of the first substrate comprises: preparing the first substrate material into a first slurry, and applying the first slurry by a template scraping method, and obtaining the first substrate after curing; and / or,

[0013] The preparation of the second substrate on the symmetrical side or around the first substrate includes: preparing the second substrate material into a second slurry, applying the second slurry on the symmetrical side or around the first substrate by a template scraping method, and obtaining the second substrate after curing.

[0014] Preferably, the alternately preparing the first substrate and the second substrate in the same plane to obtain a combined substrate comprises:

[0015] Prepare a first slurry from a first base material, apply the first slurry by a template coating method, and obtain the first base after curing;

[0016] Prepare a second slurry from a second base material, apply the second slurry on one side of the first base by using a template scraping method, and obtain the second base after curing;

[0017] Applying the first slurry on one side of the second substrate by scraping and curing to obtain the first substrate;

[0018] The second slurry is applied on one side of the first substrate and the first slurry is applied on one side of the second substrate alternately to obtain the combined substrate.

[0019] Preferably, the first base material includes one of polydimethylsiloxane, rubber and polyurethane, and / or the second base material includes an organic silicon polymer.

[0020] Preferably, the preparing of the stretch sensing layer dispersion comprises: dispersing the first conductive material in an ethanol solution, and performing ultrasonic dispersion and magnetic stirring to obtain the stretch sensing layer dispersion.

[0021] Preferably, the first conductive material includes carbon nanotubes or conductive carbon black.

[0022] Preferably, before coating the stretch sensing layer dispersion on the second substrate of the combined substrate, the method further comprises: pre-stretching the second substrate;

[0023] Before connecting the second electrodes at both ends of the stretch sensing layer, the method further includes: releasing the pre-stretched state of the second substrate.

[0024] Preferably, the preparation of the pressure sensing layer includes: mixing polydimethylsiloxane, a curing agent and a second conductive material in a set proportion to obtain a pressure sensing layer slurry, wherein the second conductive material includes carbon nanofibers or graphene; using the pressure sensing layer material to print a multi-layer lattice structure, and obtaining the pressure sensing layer after curing.

[0025] Preferably, the materials of the first electrode and the second electrode include conductive nickel cloth, copper wire or silver wire.

[0026] The advantages of the preparation method of the present invention over the prior art are:

[0027] Through the method of the present invention, a multifunctional mechanical sensor that is fully decoupled from pressure, tension, and upper and lower bending is prepared. The preparation process is simple, and the remaining advantages are the same as those of the multifunctional mechanical sensor compared to the existing technology, which will not be repeated here. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 This is a schematic structural diagram of a multifunctional mechanical sensor according to an embodiment of the present invention;

[0029] Figure 2 Schematic diagram of the structure of the combined substrate in an embodiment of the present invention Figure 1 ;

[0030] Figure 3 Schematic diagram of the structure of the combined substrate in an embodiment of the present invention Figure 2 ;

[0031] Figure 4 Schematic diagram of the structure of the combined substrate in an embodiment of the present invention Figure 3 ;

[0032] Figure 5 Flowchart of a method for preparing a multifunctional mechanical sensor according to an embodiment of the present invention;

[0033] Figure 6 This is a flow chart of the preparation method of the multifunctional mechanical sensor in Example 1 of the present invention.

[0034] Description of reference numerals:

[0035] 1-first substrate; 2-second substrate; 3-first electrode; 4-stretch sensing layer; 5-pressure sensing layer; 6-second electrode. DETAILED DESCRIPTION

[0036] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, specific embodiments of the present invention are described in detail below with reference to the accompanying drawings.

[0037] like Figure 1 As shown, an embodiment of the present invention provides a multifunctional mechanical sensor, including: a first substrate 1, a second substrate 2, a pressure sensing layer 5 and a stretch sensing layer; the pressure sensing layer 5 is arranged on the first substrate 1, and the stretch sensing layer is arranged on the second substrate 2; the modulus of the first substrate 1 is greater than the modulus of the second substrate 2; the second substrate 2 is arranged on a symmetrical side of the first substrate 1, or the second substrate 2 is arranged around the first substrate 1, or the first substrate 1 and the second substrate 2 are alternately connected in the same plane.

[0038] This embodiment combines substrates with different moduli, and assembles the pressure sensing layer 5 and the stretch sensing layer on a first substrate 1 with a larger modulus and a second substrate 2 with a smaller modulus, respectively, to form a pressure sensing structure and a stretch sensing structure, respectively. Thus, when the multifunctional mechanical sensor is stretched, the second substrate 2 has a smaller modulus and is easily stretched, so the stretch sensing structure can generate a resistance signal change caused by the stretching. However, the pressure sensing structure composed of the first substrate 1 and the pressure sensing layer 5 has a larger modulus and is not easily stretched. It will not be affected by the stretch sensing structure and deform, so the pressure resistance signal of the pressure sensing structure remains constant. When pressure is applied to the multifunctional mechanical sensor, the pressure sensing structure is compressed, generating a resistance signal caused by the pressure, and the pressure does not contact the stretch sensing structure, so the resistance signal of the stretch sensing structure remains constant. This achieves the distinction between tension and pressure. When the multifunctional mechanical sensor bends upward, the stretching sensing layer will cause the stretching sensing layer 4 to break, resulting in an increase in resistance. When the multifunctional mechanical sensor bends downward, the stretching sensing layer can cause the stretching sensing layer 4 to stack, resulting in a decrease in resistance, thereby achieving the distinction between upward bending and downward bending.

[0039] In this embodiment, a combined substrate structure in which stretching and pressing do not affect each other is prepared by using substrate materials with different moduli. By assembling the pressure sensing layer 5 and the stretch sensing layer on the first substrate 1 with a larger modulus and the second substrate 2 with a smaller modulus, respectively, and the first substrate 1 and the second substrate 2 are arranged in an alternating manner, or the second substrate 2 is arranged around the first substrate 1, when measuring tensile strain, the stretch sensing structure is stretched, while the pressure sensing structure with a larger modulus does not deform, so the deformation of the stretch sensing structure does not produce crosstalk to the pressure sensing structure. When measuring pressure, the pressure sensing structure also does not produce crosstalk to the stretch sensing structure. When bending up and down, the resistance change of the stretch sensing layer can be used to determine whether it is bending up or down. Therefore, the multifunctional mechanical sensor of this embodiment can recognize the full decoupling of stretching and pressure as well as up and down bending, achieving full decoupling and multifunctional performance, and improving the measurement range of the sensor.

[0040] The second substrate 2 is arranged on the symmetrical side of the first substrate 1, for example, Figure 1The double-wing structure shown is obtained by placing the second substrate 2 on symmetrical sides of the first substrate 1. With the first substrate 1 as the center, the second substrate 2 is similar to the two wings of the first substrate 1. In this case, because the double-wing tensile structure and the central pressure structure have different moduli, the tensile deformation of the double-wing structure does not affect the deformation of the central pressure structure with a larger modulus. Furthermore, when pressure is applied to the central pressure structure, it does not contact the double-wing tensile structure, thereby achieving complete decoupling and separation of pressure and tension. Furthermore, because the double-wing tensile structure has high stretchability and the central pressure structure has good elasticity, the sensor of this embodiment can achieve a wide range of tensile and pressure measurements, including tensile deformation greater than 150% and a pressure measurement range of 0-500 kPa.

[0041] In addition, the second substrate 2 can also be arranged on the four symmetrical sides of the first substrate 1. For example, for a first substrate 1 shaped like a rectangle, the second substrate 2 can be respectively arranged on the four sides of the first substrate 1 to obtain a cross-shaped structure. Alternatively, with the first substrate 1 as the center, the second substrate 2 is arranged in the eight side directions of the first substrate 1 to obtain a M-shaped structure. Of course, the second substrate 2 can also be arranged in an odd number of directions of the first substrate 1. For example, if the first substrate 1 is circular, the second substrate 2 is arranged in three directions of the first substrate 1 to obtain a Y-shaped structure. It can be understood that when the amount of the second substrate 2 arranged on the symmetrical sides of the first substrate 1 reaches a sufficient amount, it is equivalent to the second substrate 2 being arranged around the first substrate 1. At this time, a concentric structure is obtained. For example, Figure 2 、 Figure 3 The center is shown as the first substrate 1 with a larger modulus, surrounded by the second substrate 2 with a smaller modulus. Similar to the double-wing structure, compression of the first substrate 1 with a larger modulus in the center does not affect the second substrate 2 with a smaller modulus around it, while tension of the second substrate 2 around it does not affect the first substrate 1 in the center. Upward and downward bending are similarly distinguished by the resistance change of the second substrate 2 around it.

[0042] In addition, the first substrate 1 can also be alternately connected with the second substrate 2 in the same plane, such as Figure 4 As shown, multiple substrates with different moduli are alternately combined. In this case, when measuring tension, because the first substrate 1 with a larger modulus is spaced between two second substrates 2 with smaller moduli, the tensile deformation of the second substrate 2 does not affect the first substrate 1. Similarly, when pressure is applied to the first substrate 1 with a larger modulus, it does not contact the second substrates 2 with smaller moduli on both sides of the first substrate 1.

[0043] Another embodiment of the present invention provides a method for preparing the multifunctional mechanical sensor, as follows: Figure 5 Shown, including:

[0044] Step S1, preparing a first substrate 1, and preparing a second substrate 2 on a symmetrical side or around the first substrate 1 to obtain a combined substrate; or alternately preparing the first substrate 1 and the second substrate 2 in the same plane to obtain a combined substrate;

[0045] Step S2, preparing a first electrode 3, and attaching the first electrode 3 to the first substrate 1 of the combined substrate;

[0046] Step S3, preparing a stretch sensing layer dispersion, coating the stretch sensing layer dispersion on the second substrate 2 of the combined substrate, and drying to obtain a stretch sensing layer 4, wherein the stretch sensing layer 4 is connected to the first electrode 3; connecting second electrodes 6 to both ends of the stretch sensing layer 4, and encapsulating the second electrode 6 and the stretch sensing layer 4 to obtain an intermediate component with a stretch sensing layer integrated on the second substrate 2;

[0047] Step S4: preparing a pressure sensing layer 5 and encapsulating the pressure sensing layer 5 on the first substrate 1 of the intermediate component to obtain a multifunctional mechanical sensor.

[0048] In some embodiments, the preparation of the first substrate 1 includes: making the first substrate material into a first slurry, and applying the first slurry by a template scraping method, and obtaining the first substrate 1 after curing. Wherein, the first substrate material includes one of polydimethylsiloxane (PDMS), rubber and polyurethane. Rubber includes various types of silicone rubber, such as butadiene rubber, methyl silicone rubber, methyl vinyl silicone rubber, nitrile silicone rubber, etc. The first substrate 1 is prepared by the above-mentioned elastomeric material, so that the first substrate 1 has good elasticity, thereby increasing the pressure measurement range. In addition, the template scraping method is used to prepare the first substrate 1 in this embodiment, and the process is simple and convenient.

[0049] Because the positional relationship between the second substrate 2 and the first substrate 1 can vary, the preparation process requires slight differences. For example, preparing the second substrate 2 on a symmetrical side or periphery of the first substrate 1 includes: preparing the second substrate material into a second slurry, applying the second slurry on the symmetrical side or periphery of the first substrate 1 using a template-based doctor blade method, and curing the second substrate 2. The second substrate material includes an organic silicone polymer (ecoflex), which has a low modulus and therefore high stretchability, which helps to increase the stretch measurement range.

[0050] When alternately preparing a first substrate 1 and a second substrate 2 on the same plane, the steps for preparing the combined substrate include: preparing a first substrate material into a first slurry, applying the first slurry using a template-based scraping method, and curing to obtain the first substrate 1; preparing a second substrate material into a second slurry, applying the second slurry using a template-based scraping method on one side of the first substrate 1, and curing to obtain the second substrate 2; applying the first slurry on one side of the second substrate 2, and curing to obtain the first substrate 1; and alternately applying the second slurry on one side of the first substrate 1 and the first slurry on one side of the second substrate 2 several times to obtain the combined substrate. The number of alternations is determined by the size of the substrates being prepared.

[0051] In some of the embodiments, after the combined substrate is prepared, the first electrode 3 is attached to the first substrate 1. It should be noted that for the alternating arrangement of the first substrate 1 and the second substrate 2, it should be understood that the first electrode 3 is attached to each first substrate 1. For the form in which the first substrate 1 is the center and the second substrate 2 is arranged on the symmetrical side or around the first substrate 1, since there is only one first substrate 1 located in the center, it can be understood that the first electrode 3 is attached to the first substrate 1 located in the center. The material of the first electrode 3 includes conductive nickel cloth, copper wire or silver wire. Taking conductive nickel cloth as an example, laser cutting of conductive nickel cloth is used to make interdigitated electrodes, and the interdigitated electrodes are attached to the first substrate 1.

[0052] In some embodiments, preparing the stretch sensing layer dispersion includes dispersing a first conductive material in an ethanol solution and performing ultrasonic dispersion and magnetic stirring to obtain the stretch sensing layer dispersion. The first conductive material includes carbon nanotubes or conductive carbon black. An appropriate amount of the dispersion is then injection-coated onto a second substrate 2, followed by high-temperature drying to obtain a uniformly distributed and dry stretch sensing layer 4. It is understood that the stretch sensing layer 4 is formed by injection-depositing the dispersion onto the second substrate 2 and is connected to the first electrode 3 attached to the first substrate 1.

[0053] In some preferred embodiments, before coating the stretch sensing layer dispersion on the second substrate 2 of the combined substrate, the second substrate 2 is also pre-stretched. By pre-stretching, the stretching performance of the sensor can be improved. In this embodiment, the measurable stretching rate of the sensor reaches 150%, and the resistance change reaches 200 times. In this embodiment, an appropriate amount of the dispersion is injected and coated on the second substrate 2 in a stretched state. After high-temperature drying, a uniformly distributed and dry stretch sensing layer 4 is obtained. Then, the pre-stretching state of the second substrate 2 is released, and the second electrode 6 is attached to both ends of the stretch sensing layer 4 by applying silver paste. The material of the second electrode 6 includes conductive nickel cloth, copper wire or silver wire. Finally, the second electrode 6 and the stretch sensing layer 4 are encapsulated with ecoflex material with the same material ratio as the second substrate 2. After high-temperature blast drying and curing, a stretch sensing layer is formed, thereby obtaining an intermediate component with a stretch sensing layer integrated on the second substrate 2 of the combined substrate.

[0054] In some embodiments, preparing the pressure sensing layer 5 includes mixing polydimethylsiloxane, a curing agent, and a second conductive material in a predetermined ratio to form a pressure sensing layer slurry. The second conductive material includes carbon nanofibers or graphene. The pressure sensing layer slurry is then used to print a multilayer lattice structure, which is then cured to form the pressure sensing layer 5. 3D printing is employed. By printing the pressure sensing layer 5 into a lattice structure, the sensor achieves a wide pressure measurement range, with a measured pressure of up to 500 kPa and a current change of 200 times, resulting in high sensitivity.

[0055] The present invention is further described below through specific examples.

[0056] Example 1

[0057] This embodiment provides a method for preparing a multifunctional mechanical sensor, wherein the structure of the combined substrate is a double-wing type. Figure 6 As shown, the preparation method specifically includes the following steps:

[0058] Substrate Preparation: Using PDMS as the primary substrate material, a first slurry was prepared. This slurry was applied via a stencil coating method and cured at 80°C for 4 hours to create a central PDMS substrate. A double-wing ecoflex substrate was then applied and cured on both sides of the cured PDMS substrate via a stencil coating method at 60°C for 2 hours. Interdigitated electrodes were formed using laser cutting of conductive nickel tape and attached to the central PDMS substrate.

[0059] Preparation of the Bi-wing Stretch Sensing Layer: The sensing layer is coated with a dispersion prepared by dispersing CNTs (carbon nanotubes) in an ethanol solution, followed by ultrasonic dispersion and magnetic stirring. An appropriate amount of the dispersion is injected and coated onto the stretched second substrate 2. After high-temperature drying, a uniformly distributed and dry stretch sensing layer 4 is obtained. The pre-stretched second substrate 2 is released, and a thin conductive fabric is applied to both ends of the stretch sensing layer 4 using a silver paste coating method. Finally, the layer is encapsulated with eco-flex of the same proportion. After high-temperature drying and curing, the bi-wing stretch sensing layer is completed.

[0060] Preparation of the central pressure sensing layer 5: To prepare the direct-write printing slurry, PDMS, a curing agent, and CNFs (carbon nanofibers) are first mixed in a specific proportion and mechanically stirred for 10 minutes until the texture is uniform and free of graininess. A direct-write printer is used to print the multi-layered, dot-matrix structure of the pressure sensing layer 5. After high-temperature air-blast curing, the pressure sensing layer 5 is complete. During assembly, a TPU spunbond membrane is encapsulated on the pressure sensing layer 5.

[0061] The base structure of this embodiment is made of a material with a larger middle modulus and a smaller double-wing modulus. When measuring tensile strain, the double-wing structure is stretched, while the middle module with a larger modulus does not deform. Therefore, the deformation of the double wings will not cause crosstalk to the pressure sensing module with a larger middle modulus. When measuring pressure, the middle pressure sensing module will not cause crosstalk to the tensile sensing module of the double-wing structure.

[0062] The working pressure module of this embodiment has a multi-level pore lattice structure prepared by 3D printing, which has higher performance. The measurable pressure range reaches 500kPa and the current change reaches 200 times. Through the pre-stretching preparation method, the stretching performance reaches a measurable stretching rate of 150%, and the resistance change reaches 200 times.

[0063] Although the present invention is disclosed as above, the scope of protection disclosed by the present invention is not limited thereto. Those skilled in the art may make various changes and modifications without departing from the spirit and scope of the present invention, and these changes and modifications will fall within the scope of protection of the present invention.

Claims

1. A method for preparing a multifunctional mechanical sensor, characterized in that: include: Prepare a first substrate (1), and prepare a second substrate (2) on a symmetrical side or around the first substrate (1) to obtain a combined substrate; Alternatively, the first substrate (1) and the second substrate (2) are alternately prepared in the same plane to obtain a combined substrate; preparing a first electrode (3), and attaching the first electrode (3) to the first substrate (1) of the combined substrate; A stretch sensing layer dispersion is prepared, and the stretch sensing layer dispersion is coated on the second substrate (2) of the combined substrate, and after drying, a stretch sensing layer (4) is obtained, and the stretch sensing layer (4) is connected to the first electrode (3); second electrodes (6) are connected to both ends of the stretch sensing layer (4), and after the second electrode (6) and the stretch sensing layer (4) are packaged, an intermediate component with the stretch sensing layer (4) integrated on the second substrate (2) is obtained; preparing a pressure sensing layer (5), and encapsulating the pressure sensing layer (5) on the first substrate (1) of the intermediate component to obtain a multifunctional mechanical sensor; Wherein, the preparation of the first substrate (1) comprises: preparing the first substrate material into a first slurry, and applying the first slurry by a template scraping method, and obtaining the first substrate (1) after curing; and / or, The method of preparing a second substrate (2) on the symmetrical side or around the first substrate (1) comprises: preparing a second substrate material into a second slurry, applying the second slurry on the symmetrical side or around the first substrate (1) by a template scraping method, and obtaining the second substrate (2) after curing.

2. The method for preparing a multifunctional mechanical sensor according to claim 1, wherein: The step of alternately preparing the first substrate (1) and the second substrate (2) in the same plane to obtain a combined substrate comprises: The first substrate material is made into a first slurry, the first slurry is applied by a template scraping method, and the first substrate (1) is obtained after curing; The second substrate material is made into a second slurry, and the second slurry is applied on one side of the first substrate (1) by a template scraping method, and the second substrate (2) is obtained after curing; Applying the first slurry on one side of the second substrate (2) by scraping, and obtaining the first substrate (1) after curing; The second slurry is applied on one side of the first substrate (1) and the first slurry is applied on one side of the second substrate (2) alternately to obtain the combined substrate.

3. The method for preparing a multifunctional mechanical sensor according to claim 1 or 2, characterized in that: The first base material includes one of polydimethylsiloxane, rubber and polyurethane, and / or the second base material includes an organic silicon polymer.

4. The method for preparing a multifunctional mechanical sensor according to claim 1, wherein: The preparation of the stretch sensing layer dispersion liquid includes: dispersing the first conductive material into an ethanol solution, and performing ultrasonic dispersion and magnetic stirring to obtain the stretch sensing layer dispersion liquid.

5. The method for preparing the multifunctional mechanical sensor according to claim 4, characterized in that: The first conductive material includes carbon nanotubes or conductive carbon black.

6. The method for preparing a multifunctional mechanical sensor according to claim 1, wherein: Before coating the stretch sensing layer dispersion on the second substrate (2) of the combined substrate, the method further comprises: pre-stretching the second substrate (2); Before connecting the second electrodes (6) at both ends of the stretch sensing layer (4), the method further includes: releasing the pre-stretched state of the second substrate (2).

7. The method for preparing a multifunctional mechanical sensor according to claim 1, wherein: The preparation of the pressure sensing layer (5) comprises: Mixing polydimethylsiloxane, a curing agent, and a second conductive material in a set ratio to obtain a pressure sensing layer slurry, wherein the second conductive material includes carbon nanofibers or graphene; The pressure sensing layer slurry is used to print a multi-layer dot matrix structure, and the pressure sensing layer (5) is obtained after curing.

8. The method for preparing a multifunctional mechanical sensor according to claim 1, wherein: The materials of the first electrode (3) and the second electrode (6) include conductive nickel cloth, copper wire or silver wire.

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