Image sensor and electronic device including the same

Abstract

An image sensor including: a sensor substrate including first pixels, second pixels, third pixels, and fourth pixels; and a color separation lens array, wherein each of the first pixels includes first and second focus signal regions that independently generate focus signals, and the first and second focus signal regions are arranged to be adjacent to each other in a first direction in the first pixels, and each of the fourth pixels includes third and fourth focus signal regions that independently generate focus signals, and the third and fourth focus signal regions are arranged to be adjacent to each other in a second direction different from the first direction in the fourth pixels.

Description

[0001] Cross-reference to related applications

[0002] This application is based on and claims priority to Korean Patent Application No. 10-2021-0128944 filed with the Korean Intellectual Property Office on September 29, 2021, and Korean Patent Application No. 10-2022-0039179 filed with the Korean Intellectual Property Office on March 29, 2022, the disclosure of which is incorporated herein by reference in its entirety. Technical Field

[0003] An image sensor is provided, comprising an array of dichroic lenses capable of focusing incident light according to the wavelength of the incident light, an electronic device including the image sensor, and a method for focusing incident light into the image sensor. Background Technology

[0004] Image sensors typically use color filters to sense the color of incident light. However, because color filters absorb light of colors other than their corresponding colors, they can have low light utilization efficiency. For example, when using an RGB color filter, only 1 / 3 of the incident light is transmitted through it, while the remaining 2 / 3 is absorbed. Therefore, the light utilization efficiency is only about 33%. Consequently, in color display devices or color image sensors, most of the light loss occurs in the color filter. Summary of the Invention

[0005] An image sensor with improved light utilization efficiency due to the use of a dichroic lens array capable of focusing incident light according to its wavelength is provided, an electronic device including the image sensor, and a method for focusing incident light into the image sensor.

[0006] An image sensor that improves autofocus performance due to the inclusion of a dichroic lens array is also provided, as well as an electronic device including the image sensor and a method for performing the improved autofocus operation.

[0007] Additional aspects will be set forth in part in the description which follows, and will also be apparent in part from the description, or may be learned by practicing the embodiments presented in this disclosure.

[0008] According to one aspect of this disclosure, an image sensor is provided, comprising: a sensor substrate including a plurality of first pixels configured to sense light of a first wavelength, a plurality of second pixels configured to sense light of a second wavelength different from the first wavelength, a plurality of third pixels configured to sense light of a third wavelength different from the first and second wavelengths, and a plurality of fourth pixels configured to sense light of the first wavelength; and a dichroic lens array configured to: converge light of the first wavelength onto each of the first pixels and each of the fourth pixels by changing the phase of the first wavelength light, converge light of the second wavelength onto each of the second pixels by changing the phase of the second wavelength light, and converge light of the third wavelength onto each of the third pixels by changing the phase of the third wavelength light, wherein the first pixels... Each of the four pixels includes a first focus signal region configured to generate a first focus signal and a second focus signal region configured to generate a second focus signal, wherein the first focus signal region and the second focus signal region independently generate the first focus signal and the second focus signal, and the first focus signal region and the second focus signal region are arranged to be adjacent to each other in a first direction in the first pixel; and each of the four pixels includes a third focus signal region configured to generate a third focus signal and a fourth focus signal region configured to generate a fourth focus signal, wherein the third focus signal region and the fourth focus signal region independently generate the third focus signal and the fourth focus signal, and the third focus signal region and the fourth focus signal region are arranged to be adjacent to each other in a second direction different from the first direction in the fourth pixel.

[0009] The sensor substrate includes multiple unit patterns, and in each of the unit patterns, a first pixel and a fourth pixel are arranged along a first diagonal direction and a second pixel and a third pixel are arranged along a second diagonal direction different from the first diagonal direction.

[0010] Each of the first pixels includes a first photosensitive unit and a second photosensitive unit configured to independently sense light, and the first photosensitive unit and the second photosensitive unit are arranged to divide each of the first pixels in two along a second direction, wherein a first focus signal of a first focus signal region is the output of the first photosensitive unit and a second focus signal of a second focus signal region is the output of the second photosensitive unit.

[0011] Each of the fourth pixels includes a third photosensitive unit and a fourth photosensitive unit configured to independently sense light, and the third photosensitive unit and the fourth photosensitive unit are arranged to divide each of the fourth pixels in two along a first direction, and the third focus signal of the third focus signal region is the output of the third photosensitive unit and the fourth focus signal of the fourth focus signal region is the output of the fourth photosensitive unit.

[0012] Each of the first pixels includes a first photosensitive unit, a second photosensitive unit, a third photosensitive unit, and a fourth photosensitive unit configured to independently sense light. The first photosensitive unit, the second photosensitive unit, the third photosensitive unit, and the fourth photosensitive unit are respectively arranged in a quadrant formed by dividing the first pixel into a 2×2 array. The first focus signal of the first focus signal region is the sum of the output from the first photosensitive unit and the output from the third photosensitive unit. The second focus signal of the second focus signal region is the sum of the output from the second photosensitive unit and the output from the fourth photosensitive unit.

[0013] Each of the fourth pixels includes a fifth photosensitive unit, a sixth photosensitive unit, a seventh photosensitive unit, and an eighth photosensitive unit configured to independently sense light. The fifth, sixth, seventh, and eighth photosensitive units are respectively arranged in quadrants formed by dividing the fourth pixel into a 2×2 array. The third focus signal of the third focus signal region is the sum of the outputs from the fifth photosensitive unit and the sixth photosensitive unit. The fourth focus signal of the fourth focus signal region is the sum of the outputs from the seventh photosensitive unit and the eighth photosensitive unit.

[0014] The sensor substrate further includes a pixel isolation layer that separates the first pixel, the second pixel, the third pixel and the fourth pixel from each other, and each of the first pixels further includes a first unit isolation layer that separates the first focus signal region from the second focus signal region, and each of the fourth pixels further includes a second unit isolation layer that separates the third focus signal region from the fourth focus signal region.

[0015] The first unit isolation layer extends along the second direction in the first pixel, and the second unit isolation layer extends along the first direction in the fourth pixel.

[0016] In the first and fourth pixels located at the center of the sensor substrate, the first unit isolation layer is configured to pass through the center of the first pixel and the second unit isolation layer is configured to pass through the center of the fourth pixel.

[0017] In the first pixel located at the outer edge of the sensor substrate along the first direction, the first unit isolation layer is offset toward the center of the sensor substrate in the first direction, and in the fourth pixel located at the outer edge of the sensor substrate along the second direction, the second unit isolation layer is offset toward the center of the sensor substrate in the second direction.

[0018] Each of the first unit isolation layer and the second unit isolation layer includes a first direction isolation layer extending along a first direction and a second direction isolation layer extending along a second direction and intersecting with the first direction isolation layer.

[0019] In the first pixel and the fourth pixel located in the central part of the sensor substrate, the intersection of the first direction isolation layer and the second direction isolation layer is located at the center of the first pixel or the fourth pixel.

[0020] In the first pixel and the fourth pixel located on the outer edge of the sensor substrate along the first direction, the first intersection point between the first direction isolation layer and the second direction isolation layer is offset toward the center of the sensor substrate in the first direction, and in the first pixel and the fourth pixel located on the outer edge of the sensor substrate along the second direction, the second intersection point between the first direction isolation layer and the second direction isolation layer is offset toward the center of the sensor substrate in the second direction.

[0021] The height of the first unit isolation layer and the second unit isolation layer is less than the height of the pixel isolation layer.

[0022] The height of the first unit isolation layer and the second unit isolation layer is approximately 1 / 4 to approximately 1 / 2 of the height of the pixel isolation layer.

[0023] Each of the second pixels includes a fifth focus signal region configured to generate a fifth focus signal and a sixth focus signal region configured to generate a sixth focus signal, wherein the fifth focus signal region and the sixth focus signal region independently generate the fifth focus signal and the sixth focus signal, and the fifth focus signal region and the sixth focus signal region are arranged to be adjacent to each other in a first diagonal direction; and each of the third pixels includes a seventh focus signal region configured to generate a seventh focus signal and an eighth focus signal region configured to generate an eighth focus signal, wherein the seventh focus signal region and the eighth focus signal region independently generate the seventh focus signal and the eighth focus signal, and the seventh focus signal region and the eighth focus signal region are arranged to be adjacent to each other in a first diagonal direction.

[0024] Each of the second pixels includes a first photosensitive unit and a second photosensitive unit configured to independently sense light, and the first photosensitive unit and the second photosensitive unit are arranged to divide each of the second pixels in a first diagonal direction, and the fifth focus signal of the fifth focus signal region is the output of the first photosensitive unit and the sixth focus signal of the sixth focus signal region is the output of the second photosensitive unit.

[0025] Each of the third pixels includes a third photosensitive unit and a fourth photosensitive unit configured to independently sense light, and the third photosensitive unit and the fourth photosensitive unit are arranged to divide each of the third pixels in a first diagonal direction, and the seventh focus signal of the seventh focus signal region is the output of the third photosensitive unit and the eighth focus signal of the eighth focus signal region is the output of the fourth photosensitive unit.

[0026] Each of the second pixels includes a first photosensitive unit, a second photosensitive unit, a third photosensitive unit, and a fourth photosensitive unit configured to independently sense light. The first photosensitive unit, the second photosensitive unit, the third photosensitive unit, and the fourth photosensitive unit are respectively arranged in quadrants formed by dividing the second pixel into a 2×2 array. The fifth focus signal of the fifth focus signal region is the output of the second photosensitive unit, and the sixth focus signal of the sixth focus signal region is the output of the third photosensitive unit. Alternatively, the fifth focus signal of the fifth focus signal region is the output of the first photosensitive unit, and the sixth focus signal of the sixth focus signal region is the output of the fourth photosensitive unit.

[0027] Each of the third pixels includes a fifth, a sixth, a seventh, and an eighth photosensitive unit configured to independently sense light, and the fifth, sixth, seventh, and eighth photosensitive units are respectively arranged in quadrants formed by dividing the third pixel into a 2×2 array, and the seventh focus signal of the seventh focus signal region is the output of the sixth photosensitive unit and the eighth focus signal of the eighth focus signal region is the output of the seventh photosensitive unit, or the seventh focus signal of the seventh focus signal region is the output of the fifth photosensitive unit and the eighth focus signal of the eighth focus signal region is the output of the eighth photosensitive unit.

[0028] The sensor substrate further includes a pixel isolation layer that separates the first pixel, the second pixel, the third pixel and the fourth pixel from each other, and each of the second pixels further includes a third unit isolation layer that separates the fifth focus signal region from the sixth focus signal region, and each of the third pixels further includes a fourth unit isolation layer that separates the seventh focus signal region from the eighth focus signal region.

[0029] Each of the third and fourth unit isolation layers extends along the first diagonal direction.

[0030] In the second and third pixels located at the center of the sensor substrate, the third unit isolation layer is configured to pass through the center of the second pixel and the fourth unit isolation layer is configured to pass through the center of the third pixel.

[0031] In the second and third pixels located on the outer edge of the sensor substrate along the second diagonal direction intersecting the first diagonal direction, the third unit isolation layer and the fourth unit isolation layer are offset toward the center of the sensor substrate in the second diagonal direction.

[0032] The color-separating lens array includes multiple first pixel corresponding regions, multiple second pixel corresponding regions, multiple third pixel corresponding regions, and multiple fourth pixel corresponding regions. Each of the multiple first pixel corresponding regions, multiple second pixel corresponding regions, multiple third pixel corresponding regions, and multiple fourth pixel corresponding regions includes multiple nanopillars. The nanopillars in the multiple second pixel corresponding regions and the multiple third pixel corresponding regions are arranged in a 4-fold symmetric manner, and the nanopillars in the multiple first pixel corresponding regions and the multiple fourth pixel corresponding regions are arranged in a 2-fold symmetric manner.

[0033] According to one aspect of this disclosure, an electronic device is provided, comprising: an image sensor configured to convert an optical image into an electrical signal; a processor configured to control the operation of the image sensor and store and output signals generated by the image sensor; and a lens assembly for providing light from an object to the image sensor, wherein the image sensor includes: a sensor substrate including a plurality of first pixels configured to sense light of a first wavelength, a plurality of second pixels configured to sense light of a second wavelength different from the first wavelength, a plurality of third pixels configured to sense light of a third wavelength different from the first and second wavelengths, and a plurality of fourth pixels configured to sense light of the first wavelength; and a dichroic lens array configured to: converge the light of the first wavelength to each of the first pixels and each of the fourth pixels by changing the phase of the light of the first wavelength, and converge the light of the second wavelength to each of the second pixels by changing the phase of the light of the second wavelength. Each of the first pixels includes a first focus signal region configured to generate a first focus signal and a second focus signal region configured to generate a second focus signal, wherein the first focus signal region and the second focus signal region independently generate the first focus signal and the second focus signal, and the first focus signal region and the second focus signal region are arranged to be adjacent to each other in a first direction in the first pixel, and each of the fourth pixels includes a third focus signal region configured to generate a third focus signal and a fourth focus signal region configured to generate a fourth focus signal, wherein the third focus signal region and the fourth focus signal region independently generate the third focus signal and the fourth focus signal, and the third focus signal region and the fourth focus signal region are arranged to be adjacent to each other in a second direction different from the first direction in the fourth pixel.

[0034] According to one aspect of this disclosure, an image sensor is provided, comprising: a sensor substrate including a plurality of first pixels configured to sense light of a first wavelength, a plurality of second pixels configured to sense light of a second wavelength different from the first wavelength, a plurality of third pixels configured to sense light of a third wavelength different from the first and second wavelengths, and a plurality of fourth pixels configured to sense light of the first wavelength; and a dichroic lens array configured to: direct light of the first wavelength onto each of the first pixels and each of the fourth pixels by changing the phase of the first wavelength light, direct light of the second wavelength onto each of the second pixels by changing the phase of the second wavelength light, and direct light of the third wavelength onto each of the third pixels by changing the phase of the third wavelength light, wherein at least one of the first pixel, second pixel, third pixel, or fourth pixel includes a first focus signal region configured to generate a first focus signal and a second focus signal region configured to generate a second focus signal.

[0035] The first focusing signal region and the second focusing signal region are configured to generate the first focusing signal and the second focusing signal independently of each other.

[0036] In the first pixel, the first focus signal region and the second focus signal region are arranged adjacent to each other in a first direction, and in the fourth pixel, the first focus signal region and the second focus signal region are arranged adjacent to each other in a second direction different from the first direction.

[0037] In the second or third pixel, the first focus signal region and the second focus signal region are arranged adjacent to each other in a third direction that is different from the first direction and the second direction.

[0038] The first direction is perpendicular to the second direction.

[0039] According to one aspect of this disclosure, an image sensor is provided, comprising: a sensor substrate including a plurality of first pixels configured to sense light of a first wavelength, a plurality of second pixels configured to sense light of a second wavelength different from the first wavelength, a plurality of third pixels configured to sense light of a third wavelength different from the first and second wavelengths, and a plurality of fourth pixels configured to sense light of the first wavelength; and a dichroic lens array including a plurality of first pixel corresponding regions corresponding to the plurality of first pixels, a plurality of second pixel corresponding regions corresponding to the plurality of second pixels, a plurality of third pixel corresponding regions corresponding to the plurality of third pixels, and a plurality of fourth pixel corresponding regions corresponding to the plurality of fourth pixels, wherein the plurality of first pixels... The first pixel corresponding region and the plurality of fourth pixel corresponding regions include a plurality of nanopillars. The arrangement of the plurality of nanopillars in the plurality of first pixel corresponding regions is rotated 90° relative to the arrangement of the plurality of nanopillars in the plurality of fourth pixel corresponding regions. Each of the first pixels includes a first focus signal region and a second focus signal region that generate focus signals independently of each other. The first focus signal region and the second focus signal region are arranged to be adjacent to each other in a first direction in the first pixel. Each of the fourth pixels includes a third focus signal region and a fourth focus signal region that generate focus signals independently of each other. The third focus signal region and the fourth focus signal region are arranged to be adjacent to each other in a second direction perpendicular to the first direction in the fourth pixel. Attached Figure Description

[0040] The above and other aspects, features, and advantages of some embodiments of this disclosure will become clearer from the following description taken in conjunction with the accompanying drawings, in which:

[0041] Figure 1 This is a block diagram of an image sensor according to an example embodiment;

[0042] Figure 2 This is a diagram illustrating an example of the pixel arrangement in the pixel array of an image sensor;

[0043] Figure 3A and Figure 3B This is a conceptual diagram illustrating the structure and function of a dichroic lens array according to an example embodiment;

[0044] Figure 4A and Figure 4B These are cross-sectional views of different sections of the pixel array in the image sensor according to an example embodiment;

[0045] Figure 5A It is a plan view showing the pixel arrangement in a pixel array. Figure 5B This is a plan view illustrating an example of arranging multiple nanopillars in multiple regions of a dichroic lens array. Figure 5C It is shown Figure 5BA partial enlarged view of the plan view, and Figure 5D and Figure 5E This is a plan view showing examples of other various shapes of dichroic lens arrays;

[0046] Figure 6A It shows along Figure 5B A diagram showing the phase distribution of green and blue light as line II′ passes through the dichroic lens array. Figure 6B It is a diagram showing the phase of green light passing through the dichroic lens array at the center of the corresponding pixel region, and Figure 6C It is a diagram showing the phase of blue light passing through the dichroic lens array at the center of the corresponding region of the pixel;

[0047] Figure 6D This is a diagram illustrating an example of the direction of travel of green light incident on the first green light convergence region, and Figure 6E This is a diagram illustrating an example of an array of regions where the first green light converges;

[0048] Figure 6F This is a diagram illustrating an example of the direction of travel of blue light incident on a region where blue light converges. Figure 6G This is a diagram illustrating an example of an array of regions where blue light converges;

[0049] Figure 7A It shows along Figure 5B The diagram showing the phase distribution of red and green light through line II-II' passing through the dichroic lens array. Figure 7B It is a diagram showing the phase of red light passing through the dichroic lens array at the center of the corresponding pixel region, and Figure 7C It is a diagram showing the phase of green light passing through the dichroic lens array at the center of the corresponding region of a pixel;

[0050] Figure 7D This is a diagram illustrating an example of the direction of travel of red light incident on a region where red light converges. Figure 7E This is a diagram illustrating an example of an array where red light converges;

[0051] Figure 7F This is a diagram illustrating an example of the direction of travel of green light incident on the second green light convergence region, and Figure 7G This is a diagram illustrating an example of an array of second green light convergence regions;

[0052] Figure 8A This is a diagram illustrating an example of the direction in which a pixel is divided into two photosensitive units to provide an autofocus signal in a phase-detection autofocus mode, and Figure 8B This is a graph illustrating an example of how the contrast of the autofocus signal changes according to the division direction of the photosensitive unit.

[0053] Figure 9A , Figure 9B and Figure 9C This is a plan view illustrating an exemplary structure of a pixel array in an image sensor having a dual-cell structure for providing an autofocus signal in a phase-detection autofocus mode;

[0054] Figure 10A , Figure 10B and Figure 10C This is a plan view illustrating an exemplary structure of a pixel array in an image sensor having a four-unit structure for providing an autofocus signal in a phase-detection autofocus mode;

[0055] Figure 11A and Figure 11B This is a cross-sectional view showing an exemplary structure of a pixel array in an image sensor, illustrating pixel isolation layers and unit isolation layers;

[0056] Figure 12A and Figure 12B This is a graph showing an example of how the intensity and contrast of the autofocus signal change according to the angle of incidence of light in a comparative example that does not take into account the directionality of the dichroic lens array.

[0057] Figure 13A and Figure 13B It is a graph illustrating an example of the change in intensity and contrast of the autofocus signal based on the incident angle of light in an embodiment that considers the directionality of the dichroic lens array.

[0058] Figure 14A This is a cross-sectional view showing an exemplary structure of a pixel array at the central portion of an image sensor, and Figure 14B This is a cross-sectional view showing an exemplary structure of a pixel array at the edge portion of an image sensor;

[0059] Figure 15 This is a plan view illustrating an example of the offset of the cell isolation layer in a pixel array with a dual-cell structure;

[0060] Figure 16 This is a plan view illustrating an example of the offset of the cell isolation layer in a pixel array with a four-cell structure;

[0061] Figure 17A and Figure 17B This is a graph showing the changes in the intensity and contrast of the autofocus signal according to the angle of incidence of light in a comparative example where the unit isolation layer is not offset.

[0062] Figure 18A and Figure 18BThis is a graph illustrating an example of how the intensity and contrast of the autofocus signal change according to the angle of incidence of light in an embodiment of unit isolation layer offset.

[0063] Figure 19 It is a block diagram of an electronic device including an image sensor according to one or more embodiments;

[0064] Figure 20 yes Figure 19 A block diagram of the camera module in the image; and

[0065] Figures 21 to 30 The figures illustrate various examples of electronic devices including an image sensor according to one or more embodiments. Detailed Implementation

[0066] Reference will now be made in detail to embodiments, examples of which are illustrated in the accompanying drawings, wherein similar elements are indicated by similar reference numerals throughout the drawings. In this respect, exemplary embodiments may take different forms and should not be construed as limited to the description set forth herein. Therefore, exemplary embodiments are described below only with reference to the accompanying drawings to explain various aspects. As used herein, the term “and / or” includes any and all combinations of one or more items in the associated list. Expressions such as “at least one of…” modify the entire list of elements when following a list of elements, rather than modifying individual elements in the list.

[0067] In the following, an image sensor including a dichroic lens array, an electronic device including the image sensor, and a method for focusing light in the electronic device will be described in detail with reference to the accompanying drawings. The exemplary embodiments of this disclosure are capable of various modifications and can be embodied in many different forms. In the drawings, similar reference numerals denote similar components, and the dimensions of components in the drawings may be enlarged for ease of illustration.

[0068] When a layer, film, region, or plate is referred to as being "on" another element, it can be placed directly above / below / to the left / right of another layer or substrate, or an intermediate layer may also be present.

[0069] It should be understood that although the terms "first" and "second," etc., may be used herein to describe individual components, these components should not be limited by these terms. These terms are used only to distinguish the components from one another. These terms do not limit the materials or structures of the components to be different from one another.

[0070] Singular expressions encompass plural expressions unless there is a clear distinction in the context. It will also be understood that when a part is referenced as "including" another component, that part may not exclude the other component, but may also include it, unless the context otherwise indicates.

[0071] Furthermore, terms such as “unit” and “module” used herein refer to units that perform at least one function or operation and can be implemented by hardware, software, or a combination of hardware and software.

[0072] The use of the term "above" and similar indicative terms can correspond to both the singular and plural forms.

[0073] Furthermore, the steps of all the methods described herein may be performed in any suitable order, unless otherwise indicated herein or the context expressly instructs otherwise. Additionally, the use of all exemplary terms (e.g., etc.) is solely for the purpose of describing the technical ideas in detail, and the scope of the claims is not limited by these terms unless the context is limited by the claims.

[0074] Figure 1 This is a block diagram of an image sensor 1000 according to an example embodiment. (Reference) Figure 1 The image sensor 1000 may include a pixel array 1100, a timing controller (T / C) 1010, a line decoder 1020, and an output circuit 1030. The image sensor 1000 may include a charge-coupled device (CCD) image sensor or a complementary metal-oxide-semiconductor (CMOS) image sensor.

[0075] Pixel array 1100 includes pixels arranged in two dimensions in multiple rows and columns. Row decoder 1020 selects one of the rows in pixel array 1100 in response to a row address signal output from timing controller 1010. Output circuit 1030 outputs photosensitive signals from column cells of the multiple pixels arranged in the selected row. For this purpose, output circuit 1030 may include a column decoder and an analog-to-digital converter (ADC). For example, output circuit 1030 may include: a column decoder; and multiple ADCs respectively configured for columns in pixel array 1100 or a single ADC configured at the output of the column decoder. Alternatively, output circuit 1030 may simultaneously output photosensitive signals from all pixels in pixel array 1100. Timing controller 1010, row decoder 1020, and output circuit 1030 may be implemented as a single chip or implemented in separate chips. Processor for processing image signals output from output circuit 1030 may be implemented as a single chip having timing controller 1010, row decoder 1020, and output circuit 1030. According to an example embodiment, the image sensor may include other components besides the pixel array 1100, timing controller (T / C) 1010, line decoder 1020, and output circuitry 1030.

[0076] The pixel array 1100 may include multiple pixels that sense light of different wavelengths. The pixel arrangement can be implemented in various ways. For example, Figure 2An example of pixel arrangement in pixel array 1100 of image sensor 1000 is shown. Figure 2 This illustrates the Bayer pattern commonly used in image sensors 1000. (Reference) Figure 2 A unit pattern comprises four quadrant regions, where the first quadrant can be a blue pixel B, the second quadrant can be a green pixel G, the third quadrant can be a red pixel R, and the fourth quadrant can be a green pixel G. Alternatively, a unit pattern can be referred to as a pixel, and the first to fourth quadrants within a pixel can be referred to as blue sub-pixels, green sub-pixels, red sub-pixels, and green sub-pixels, respectively. For consistency of terminology, it will be described below that the smallest unit outputting the image signal for each color is called a pixel, and four pixels arranged near the first to fourth quadrants (i.e., blue pixel B, green pixel G, red pixel R, and green pixel G) form a unit pattern. The unit pattern can be arranged two-dimensionally in a first direction (X-direction) and a second direction (Y-direction). In other words, in a 2×2 array of unit patterns, two green pixels G are arranged in one diagonal direction, and one blue pixel B and one red pixel R are arranged in the other diagonal direction. In the entire pixel arrangement, a first row in which a plurality of green pixels G and a plurality of blue pixels B are alternately arranged along the first direction, and a second row in which a plurality of red pixels R and a plurality of green pixels G are alternately arranged along the first direction, can be repeatedly arranged along the second direction. In the following description, the pixel array 1100 of the image sensor 1000 will have a Bayer pattern, but the operating principle can be applied to other patterns of pixel arrangement besides the Bayer pattern.

[0077] Image sensor 1000 may include a dichroic lens array for converging light of colors corresponding to specific pixels in pixel array 1100. Figure 3A and Figure 3B This is a diagram illustrating the structure and function of a dichroic lens array.

[0078] refer to Figure 3A A dichroic lens array (CSLA) may include multiple nanopillars (NPs) that differentially alter the phase of the incident light Li based on the positions of the corresponding pixel regions, as described below. The CSLA can be divided in various ways. For example, the CSLA may be divided into regions R1 corresponding to a first pixel, and regions L1 corresponding to a first wavelength of light included in the incident light Li. λ1 The convergence corresponds to the first pixel PX1; and the second pixel corresponds to the region R2, which corresponds to the second wavelength light L included in the incident light Li. λ2The converged second pixel PX2 corresponds to this. Each of the first pixel corresponding region R1 and the second pixel corresponding region R2 may include one or more nanopillars NP, and the first pixel corresponding region R1 and the second pixel corresponding region R2 may face the first pixel PX1 and the second pixel PX2 respectively. In another example, the dichroic lens array CSLA can be divided into: for making the first wavelength light L λ1 The first wavelength light converges to the first pixel PX1 in the convergence region L1, and the second wavelength light L... λ2 The second wavelength light converges to the second pixel PX2 in a converged region L2. The first wavelength light converged region L1 and the second wavelength light converged region L2 may partially overlap each other.

[0079] Dichroic lens arrays (CSLA) can generate the first wavelength L included in the incident light Li. λ1 Second wavelength light L λ2 Different phase distributions, so that the first wavelength light L λ1 It can converge onto the first pixel PX1 and make the second wavelength light L λ2 They can converge onto the second pixel, PX2.

[0080] For example, refer to Figure 3B At a position immediately after the first and second wavelengths of light have passed through the dichroic lens array (CSLA) (e.g., on the lower surface of the CSLA), the CSLA can make the first wavelength light L... λ1 Having a first phase distribution PP1 and a second wavelength light L λ2 Having a second phase distribution PP2, so that the first wavelength light L λ1 Second wavelength light L λ2 The light can converge on the corresponding first pixel PX1 and second pixel PX2, respectively. Specifically, the first wavelength light L passing through the dichroic lens array CSLA... λ1 It can have a first phase distribution PP1, which is maximized at the center of the region R1 corresponding to the first pixel and decreases with distance from the center of the region R1 (i.e., towards the region R2 corresponding to the second pixel). Such a phase distribution is similar to the phase distribution of light converging to a point after passing through a convex lens (e.g., a microlens with a convex center in the first wavelength light converging region L1), and the first wavelength light L... λ1 It can converge onto the first pixel PX1. Furthermore, the second wavelength light L passing through the dichroic lens array CSLA... λ2 The second phase distribution PP2 is maximized at the center of the region R2 corresponding to the second pixel, and decreases with distance from the center of the region R2 (e.g., towards the region R1 corresponding to the first pixel). Therefore, the second wavelength light L... λ2 They can converge onto the second pixel, PX2.

[0081] Because the refractive index of a material varies with the wavelength of light, such as Figure 3B As shown, the dichroic lens array CSLA can provide information about the first wavelength L. λ1 Second wavelength light L λ2 Different phase distributions. In other words, because the same material has different refractive indices depending on the wavelength of the light interacting with it, and the phase delay of light passing through the material varies with wavelength, the phase distribution can vary according to wavelength. For example, the region R1 corresponding to the first pixel corresponds to the first wavelength L. λ1 The refractive index and the region R1 corresponding to the first pixel for the second wavelength light L λ2 The refractive indices can be different from each other, and the first wavelength light L passing through the region R1 corresponding to the first pixel λ1 The phase delay and the second wavelength light L passing through the corresponding region R1 of the first pixel λ2 The phase delays of the light particles can be different from each other. Therefore, when designing a dichroic lens array (CSLA) based on the properties of light, it is possible to target the first wavelength L. λ1 Second wavelength light L λ2 Different phase distributions are available.

[0082] Dichroic lens arrays (CSLAs) may include nanopillars (NPs) arranged according to specific rules to allow light of the first wavelength (L) to pass through. λ1 Second wavelength light L λ2 Each nanopillar can have a first phase distribution PP1 and a second phase distribution PP2. Here, the rules can be applied to parameters such as the shape and size (width and height) of the nanopillars NP, the distance between the nanopillars NP, and their arrangement, and these parameters can be determined based on the phase distribution to be implemented by a dichroic lens array (CSLA).

[0083] The rules for arranging nanopillars (NPs) in the region R1 corresponding to the first pixel and the rules for arranging nanopillars (NPs) in the region R2 corresponding to the second pixel can be different from each other. In other words, the size, shape, spacing, and / or arrangement of the nanopillars (NPs) in the region R1 corresponding to the first pixel can be different from these parameters in the nanopillars (NPs) in the region R2 corresponding to the second pixel.

[0084] The cross-sectional diameter of the nanopillar NP can have a subwavelength dimension. Here, subwavelength refers to a wavelength smaller than the band of light to be separated. The nanopillar NP can have a dimension smaller than the shorter of the first and second wavelengths. When the incident light Li is visible light, the cross-sectional diameter of the nanopillar NP can be smaller than, for example, 400 nm, 300 nm, or 200 nm. Furthermore, the height of the nanopillar NP can be greater than about 500 nm to about 1500 nm of the cross-sectional diameter of the nanopillar. Although not shown in the figures, the nanopillar NP can be obtained by combining two or more pillars stacked along a third direction (e.g., the height direction (Z direction)).

[0085] Nanopillars (NPs) can include materials with a refractive index higher than that of the surrounding material. For example, nanopillars (NPs) can include c-Si, p-Si, a-Si, III-V compound semiconductors (GaP, GaN, GaAs, etc.), SiC, TiO2, SiN, and / or combinations thereof. A nanopillar (NP) with a refractive index different from that of the surrounding material can alter the phase of light passing through it. This is due to a phase retardation caused by the subwavelength shape and size of the nanopillar (NP), and the degree of this phase retardation can be determined by the specific shape and size and arrangement of the nanopillar (NP). The material surrounding the nanopillar (NP) can include a dielectric material with a refractive index lower than that of the nanopillar (NP). For example, the surrounding material can include SiO2 or air.

[0086] The first wavelength λ1 and the second wavelength λ2 can be in the infrared and visible light bands. However, one or more embodiments are not limited to this, and each band can be realized according to the rules of an array of multiple nanopillars NP. Furthermore, two wavelengths are separated and converged as an example. However, the embodiments are not limited to this. The incident light can be separated into three or more directions and converged according to the wavelength.

[0087] Furthermore, a dichroic lens array (CSLA) consists of a single layer, but a CSLA can have a structure with multiple layers stacked together.

[0088] In the following text, the example of the above-described dichroic lens array CSLA is applied to the pixel array 1100 of the image sensor 1000.

[0089] Figure 4A and Figure 4B These are cross-sectional views of the pixel array 1100 in the image sensor 1000, as seen from different cross-sections. Figure 5A This is a plan view showing the arrangement of pixels in the pixel array 1100 of the image sensor 1000. Figure 5B This is a plan view illustrating an example of arranging multiple nanopillars in multiple regions of a dichroic lens array in a pixel array 1100 of an image sensor 1000, and Figure 5C It is shown Figure 5B A magnified plan view of a portion of the image.

[0090] refer to Figure 4A and Figure 4B The pixel array 1100 of the image sensor 1000 includes: a sensor substrate 110 including a plurality of pixels 111, 112, 113, and 114 for sensing light; a spacer layer 120, which is transparent and disposed on the sensor substrate 110; and a dichroic lens array 130 on the spacer layer 120. The sensor substrate 110 may include a first pixel 111, a second pixel 112, and a third pixel 113 and a fourth pixel 114 for converting light into electrical signals. Figure 4A As shown, the first pixel 111 and the second pixel 112 can be arranged alternately along the first direction (X direction). At the y-direction position... Figure 4A In different cross-sections, the third pixel 113 and the fourth pixel 114 can be arranged alternately, such as... Figure 4B As shown in the accompanying drawings. Although not shown, pixel isolation layers for separating pixels can also be formed on the boundaries between pixels.

[0091] Figure 5A This illustrates that when the pixel array 1100 of the image sensor 1000 has, as shown in the diagram... Figure 2 The pixel arrangement shown is a Bayer pattern arrangement. This arrangement is configured to sense incident light using a unit pattern, such as a Bayer pattern. For example, first pixel 111 and fourth pixel 114 can sense green light, second pixel 112 can sense blue light, and third pixel 113 can sense red light. In a 2×2 array of unit patterns, two green pixels (e.g., first pixel 111 and fourth pixel 114) are arranged along one diagonal direction, and blue and red pixels (e.g., second pixel 112 and third pixel 113) can be arranged along the other diagonal direction.

[0092] Furthermore, the pixel array 1100 of the image sensor 1000 may also include a color filter array 140 between the sensor substrate 110 and the spacer layer 120. In this case, the color filter array 140 is disposed on the sensor substrate 110, and the spacer layer 120 may be disposed on the color filter array 140. The color filter array 140 may include a first color filter 141 on a first pixel 111, a second color filter 142 on a second pixel 112, a third color filter 143 on a third pixel 113, and a fourth color filter 144 on a fourth pixel 114. For example, the first color filter 141 and the fourth color filter 144 may be green color filters that transmit only green light, the second color filter 142 may be blue color filters that transmit only blue light, and the third color filter 143 may be red color filters that transmit only red light. Because the light, which has been substantially color-separated by the dichroic lens array 130, travels towards the first through fourth pixels 111, 112, 113, and 114, very little light loss occurs even when using the color filter array 140. Using the color filter array 140 can further improve the color purity of the image sensor 1000. However, the color filter array 140 is not a necessary component and can be omitted as long as the color separation efficiency of the dichroic lens array 130 is sufficiently high.

[0093] A spacer layer 120 is disposed between the sensor substrate 110 and the dichroic lens array 130 to maintain a constant distance between them. The spacer layer 120 may comprise a material transparent to visible light, such as a dielectric material having a lower refractive index and low absorption coefficient than the nanopillar NP in the visible light band, such as SiO2, siloxane spin-coated glass (SOG), etc. The thickness 120h of the spacer layer 120 can be determined based on the focal length of the light converged by the dichroic lens array 130, for example, it may be approximately half the focal length of the light at the reference wavelength λ0. When the refractive index of the spacer layer 120 for the reference wavelength λ0 is n and the pixel spacing is p, the focal length f of the reference wavelength light λ0 converged by the dichroic lens array 130 can be expressed by the following Equation 1.

[0094] [Equation 1]

[0095]

[0096] Assuming a reference wavelength λ0 of 540 nm (e.g., green light), a spacing of 0.8 μm between pixels 111, 112, 113, and 114, and a refractive index n of spacer layer 120 at 540 nm wavelength of 1.46, the focal length f of the green light (i.e., the distance between the lower surface of the dichroic lens array 130 and the point where the green light converges) is approximately 1.64 μm, and the thickness 120h of spacer layer 120 can be approximately 0.82 μm. In another example, assuming a reference wavelength λ0 of 540 nm (e.g., green light), a spacing of 1.2 μm between pixels 111, 112, 113, and 114, and a refractive index n of spacer layer 120 at 540 nm wavelength of 1.46, the focal length f of the green light is approximately 3.80 μm, and the thickness 120h of spacer layer 120 can be approximately 1.90 μm. In other words, when the pixel pitch is about 0.5 μm to about 0.9 μm, the thickness 120h of the aforementioned spacer layer 120 can be about 70% to about 120% of the pixel pitch, and when the pixel pitch is about 0.9 μm to about 1.3 μm, it can be about 110% to about 180% of the pixel pitch.

[0097] The dichroic lens array 130 may include: nanopillars NP, supported by spacer layers 120 and altering the phase of incident light; and a dielectric material, between the nanopillars NP, having a refractive index less than that of the nanopillars NP, such as air or SiO2.

[0098] refer to Figure 5B The dichroic lens array 130 can be divided into... Figure 5AThe four pixel corresponding regions 131, 132, 133, and 134 are corresponding to pixels 111, 112, 113, and 114. The first pixel corresponding region 131 corresponds to the first pixel 111 and is located on the first pixel 111 in the vertical direction; the second pixel corresponding region 132 corresponds to the second pixel 112 and is located on the second pixel 112 in the vertical direction; the third pixel corresponding region 133 corresponds to the third pixel 113 and is located on the third pixel 113 in the vertical direction; and the fourth pixel corresponding region 134 corresponds to the fourth pixel 114 and is located on the fourth pixel 114 in the vertical direction. That is, the first to fourth pixel corresponding regions 131, 132, 133, and 134 of the dichroic lens array 130 can be arranged to face the corresponding first to fourth pixels 111, 112, 113, and 114 of the sensor substrate 110 in the vertical direction. The first to fourth pixel corresponding regions 131, 132, 133, and 134 can be arranged two-dimensionally in a first direction (X direction) and a second direction (Y direction), such that a first row of alternating arrangements of the first pixel corresponding region 131 and the second pixel corresponding region 132 and a second row of alternating arrangements of the third pixel corresponding region 133 and the fourth pixel corresponding region 134 are arranged alternately and repeatedly. The dichroic lens array 130 includes a plurality of unit patterns arranged two-dimensionally like the pixel array of the sensor substrate 110, and each of the unit patterns includes pixel corresponding regions 131, 132, 133, and 134 (e.g., a first green pixel corresponding region, a blue pixel corresponding region, a red pixel corresponding region, and a second green pixel corresponding region) arranged in a 2×2 array.

[0099] In addition, similar to reference Figure 3B As described above, the dichroic lens array 130 can be divided into a green light convergence region for converging green light, a blue light convergence region for converging blue light, and a red light convergence region for converging red light.

[0100] The dichroic lens array 130 may include nanopillars NP, the size, shape, spacing, and / or arrangement of which are defined to focus green light individually onto first pixel 111 and fourth pixel 114, focus blue light individually onto second pixel 112, and focus red light individually onto third pixel 113. Furthermore, the thickness of the dichroic lens array 130 in the third direction (Z direction) may be similar to the height of the nanopillars NP, and may be approximately 500 nm to approximately 1500 nm.

[0101] refer to Figure 5BThe regions corresponding to the first pixel to the fourth pixel, 131, 132, 133, and 134, may include nanopillars NPs, each having a cylindrical cross-section. Nanopillars NPs with different cross-sectional areas are provided in the central portion of each region, and nanopillars NPs may also be provided at the center of the boundary between pixels and at the intersection between pixel boundaries.

[0102] Figure 5C It shows Figure 5B The arrangement of nanopillars NPs included in a portion of the region (i.e., the pixel-corresponding regions 131, 132, 133, and 134 in the unit pattern). Figure 5C In this context, nanopillars (NPs) are represented by numbers from 1 to 5 based on the cross-sectional dimensions of the unit cell pattern. (Reference) Figure 5C In the nanopillar NP, nanopillar 1, having the largest cross-sectional area, is located at the center of the second pixel corresponding region 132, and nanopillar 5, having the smallest cross-sectional area, can be arranged to surround nanopillar 1 and nanopillar 3, as well as at the center of the first pixel corresponding region 131 and the fourth pixel corresponding region 134. However, one or more embodiments are not limited to the above examples, and nanopillar NPs with various shapes, sizes, and arrangements can be applied if desired.

[0103] The nanopillars NPs included in the first pixel corresponding region 131 and the fourth pixel corresponding region 134 can have different distribution rules in the first direction (X direction) and the second direction (Y direction). For example, the nanopillars NPs arranged in the first pixel corresponding region 131 and the fourth pixel corresponding region 134 can have different dimensional arrangements in the first direction (X direction) and the second direction (Y direction). Figure 5C As shown, in the nanopillar NP, the cross-sectional area of ​​the nanopillar 4 located at the boundary between the first pixel-corresponding region 131 and the second pixel-corresponding region 132 adjacent to the first pixel-corresponding region 131 in the first direction (X direction) is different from the cross-sectional area of ​​the nanopillar 5 located at the boundary between the first pixel-corresponding region 131 and the third pixel-corresponding region 133 adjacent to the first pixel-corresponding region 131 in the second direction (Y direction). Similarly, the cross-sectional area of ​​the nanopillar 5 located at the boundary between the fourth pixel-corresponding region 134 and the third pixel-corresponding region 133 adjacent to the fourth pixel-corresponding region 134 in the first direction (X direction) is different from the cross-sectional area of ​​the nanopillar 4 located at the boundary between the fourth pixel-corresponding region 134 and the second pixel-corresponding region 132 adjacent to the fourth pixel-corresponding region 134 in the second direction (Y direction).

[0104] On the other hand, the nanopillars NP arranged in the second pixel corresponding region 132 and the third pixel corresponding region 133 can have a symmetrical arrangement rule along the first direction (X direction) and the second direction (Y direction). For example... Figure 5CAs shown, in the nanopillar NP, the cross-sectional area of ​​the nanopillar 4 at the boundary between the second pixel corresponding region 132 and the adjacent pixel in the first direction (X direction) is the same as the cross-sectional area of ​​the nanopillar 4 at the boundary between the second pixel corresponding region 132 and the adjacent pixel in the second direction (Y direction). For the third pixel corresponding region 133, the cross-sectional area of ​​the nanopillar 5 at the boundary between it and the adjacent pixel in the first direction (X direction) is the same as the cross-sectional area of ​​the nanopillar 5 at the boundary between it and the adjacent pixel in the second direction (Y direction).

[0105] The above distribution is due to the pixel arrangement in the Bayer pattern. Pixels adjacent to the second pixel 112 and the third pixel 113 in the first direction (X direction) and the second direction (Y direction) are identical (e.g., green pixels). However, the pixel adjacent to the first pixel 111 in the first direction (X direction) is a blue pixel, and the pixel adjacent to the first pixel 111 in the second direction (Y direction) is a red pixel; similarly, the pixel adjacent to the fourth pixel 114 in the first direction (X direction) is a red pixel, and the pixel adjacent to the fourth pixel 114 in the second direction (Y direction) is a blue pixel. Furthermore, the adjacent pixels of the first pixel 111 and the fourth pixel 114 in the four diagonal directions are green pixels, the adjacent pixels of the second pixel 112 in the four diagonal directions are red pixels, and the adjacent pixels of the third pixel 113 in the four diagonal directions are blue pixels. In the second pixel corresponding region 132 and the third pixel corresponding region 133, the nanopillars NP can be arranged in a 4-fold symmetrical configuration, and in the first pixel corresponding region 131 and the fourth pixel corresponding region 134, the nanopillars NP can be arranged in a 2-fold symmetrical configuration. Specifically, the first pixel corresponding region 131 and the fourth pixel corresponding region 134 are rotated 90° relative to each other.

[0106] exist Figure 5B and Figure 5C In this design, multiple nanopillars NP have a symmetrical circular cross-sectional shape. However, some nanopillars with asymmetrical cross-sectional shapes may be included. For example, the first pixel corresponding region 131 and the fourth pixel corresponding region 134 may employ nanopillars with asymmetrical cross-sections, each having a different width in the first direction (X direction) and the second direction (Y direction), while the second pixel corresponding region 132 and the third pixel corresponding region 133 may employ nanopillars with symmetrical cross-sections, each having the same width in the first direction (X direction) and the second direction (Y direction). The arrangement rules of the nanopillars NP are merely examples and are not limited thereto.

[0107] Figure 5B and Figure 5CThe dichroic lens array 130 shown is an example, and various shapes of dichroic lens arrays can be obtained through the above-described optimization design based on the size and thickness of the dichroic lens array, color characteristics, pixel pitch of the image sensor to which the dichroic lens array is applied, distance between the dichroic lens array and the image sensor, incident angle of incident light, etc. Furthermore, the dichroic lens array can be implemented using various other patterns instead of nanopillars. For example, Figure 5D This is a plan view exemplarily illustrating the shape of a cell pattern in a dichroic lens array of an image sensor of the Bayer pattern type, according to another embodiment. Figure 5E This is a plan view exemplarily illustrating the shape of a cell pattern in a dichroic lens array according to another embodiment.

[0108] Figure 5D Each of the first pixel corresponding region to the fourth pixel corresponding region 131a, 132a, 133a and 134a of the dichroic lens array 130a shown is optimized into a digital binary form of a 16×16 rectangular array, and Figure 5D The unit pattern has a 32×32 rectangular array shape. Unlike the example above, Figure 5E Each of the regions corresponding to the first pixel to the fourth pixel in the dichroic lens array 130b shown can be optimized into a non-digital continuous curve shape.

[0109] Figure 6A It shows along Figure 5B The line I-I' passes through the phase distribution of green and blue light in the dichroic lens array 130. Figure 6B The phase of green light passing through the dichroic lens array 130 at the centers of corresponding pixel regions 131, 132, 133, and 134 is shown, and Figure 6C The image shows the phase of blue light passing through the dichroic lens array 130 at the centers of corresponding pixel regions 131, 132, 133, and 134. Figure 6A For convenience, color filter array 140 is omitted. Figure 6A The phase distribution of the green and blue light shown is similar to Figure 3B The phase distribution of the first wavelength light and the second wavelength light is shown as an example.

[0110] refer to Figure 6A and Figure 6BGreen light passing through the dichroic lens array 130 can have a first green light phase distribution PPG1, which is maximized at the center of the first pixel corresponding region 131 and decreases with distance from the center of the first pixel corresponding region 131. Specifically, immediately after passing through the dichroic lens array 130 (i.e., on the lower surface of the dichroic lens array 130 or the upper surface of the spacer layer 120), the phase of the green light is maximized at the center of the first pixel corresponding region 131 and decreases with distance from the center of the first pixel corresponding region 131. Therefore, the phase is minimized at the center of the second pixel corresponding region 132 and the third pixel corresponding region 133 in the X and Y directions, and at the contact point of the first pixel corresponding region 131 and the fourth pixel corresponding region 134 in the diagonal direction.

[0111] Based on the phase of the light emitted from the center of the first pixel corresponding region 131, when the phase of the green light is set to 2π, light with a phase of approximately 0.9π to approximately 1.1π can be emitted from the centers of the second pixel corresponding region 132 and the third pixel corresponding region 133, and green light with a phase of approximately 1.1π to approximately 1.5π can be emitted from the contact point between the first pixel corresponding region 131 and the fourth pixel corresponding region 134. Therefore, the difference between the phase of the green light passing through the center of the first pixel corresponding region 131 and the phase of the green light passing through the centers of the second pixel corresponding region 132 and the third pixel corresponding region 133 can be approximately 0.9π to approximately 1.1π.

[0112] Furthermore, the first green light phase distribution PPG1 does not represent the maximum phase delay of light passing through the center of the region 131 corresponding to the first pixel. However, when the phase of light passing through the region 131 corresponding to the first pixel is 2π and the phase delay of light passing through another point is greater and has a phase value of 2π or greater, the first green light phase distribution PPG1 can represent the value remaining after subtracting 2nπ, i.e., the coiled phase distribution. For example, when the phase of light passing through the region 131 corresponding to the first pixel is 2π and the phase of light passing through the center of the region 132 corresponding to the second pixel is 3π, the phase in the region 132 corresponding to the second pixel can be the remaining π after subtracting 2π (n=1) from 3π.

[0113] refer to Figure 6A and Figure 6CBlue light passing through the dichroic lens array 130 can have a blue light phase distribution PPB, which is maximized at the center of the second pixel corresponding region 132 and decreases with distance from the center of the second pixel corresponding region 132. Specifically, immediately after passing through the dichroic lens array 130, the phase of the blue light is maximized at the center of the second pixel corresponding region 132 and decreases in concentric circles with distance from the center of the second pixel corresponding region 132. This phase is minimized at the center of the first pixel corresponding region 131 and the fourth pixel corresponding region 134 in the X and Y directions, and minimized at the center of the third pixel corresponding region 133 in the diagonal direction. When the phase of the blue light at the center of the second pixel corresponding region 132 is 2π, the phase at the center of the first pixel corresponding region 131 and the fourth pixel corresponding region 134 can be approximately, for example, approximately 0.9π to approximately 1.1π, and the phase at the center of the third pixel corresponding region 133 can be smaller than the phase at the center of the first pixel corresponding region 131 and the fourth pixel corresponding region 134, for example, approximately 0.5π to approximately 0.9π.

[0114] Figure 6D An example is shown of the direction of travel of green light incident on the first light convergence region, and Figure 6E An example of an array of first light-converging regions is shown.

[0115] like Figure 6D As shown, green light incident near the region 131 corresponding to the first pixel is converged to the first pixel 111 by the dichroic lens array 130. In addition to the region 131 corresponding to the first pixel, green light from the regions 132 and 133 corresponding to the second and third pixels also incident on the first pixel 111. That is, according to the above reference... Figure 6A and Figure 6B The phase distribution of the described green light, where green light passing through the first green light convergence region GL1 converges onto the first pixel 111, is obtained by connecting the centers of two second pixel corresponding regions 132 and two third pixel corresponding regions 133 adjacent to the first pixel corresponding region 131. Therefore, as... Figure 6E As shown, the dichroic lens array 130 can serve as a first green light converging region GL1 array for converging green light onto the first pixel 111. The first green light converging region GL1 can have an area larger than the area of ​​the corresponding first pixel 111, for example, it can be 1.2 to 2 times the area of ​​the first pixel 111.

[0116] Figure 6F An example is shown illustrating the direction of travel of blue light incident on the first blue light convergence region, and Figure 6G An example of an array showing the convergence region of blue light.

[0117] Blue light as Figure 6F The dichroic lens array 130 shown converges onto the second pixel 112, and blue light from corresponding regions 131, 132, 133, and 134 of the pixel is incident on the second pixel 112. Referring to the above... Figure 6A and Figure 6C The described phase distribution of blue light causes blue light passing through the blue light convergence region BL to converge onto the second pixel 112. The blue light convergence region BL is obtained by connecting the centers of four third pixel corresponding regions 133 adjacent to the second pixel's corresponding region 132 at their vertices. Therefore, as... Figure 6G As shown, the dichroic lens array 130 can serve as a blue light converging region array for converging blue light to the second pixel 112. The area of ​​the blue light converging region BL is larger than the area of ​​the second pixel 112, for example, it can be 1.5 to 4 times larger. The blue light converging region BL can partially overlap with the aforementioned first green light converging region GL1, second green light converging region GL2, and red light converging region RL.

[0118] Figure 7A It shows along Figure 5B Line II-II' passes through the phase distribution of red and green light in the dichroic lens array 130. Figure 7B The phase of red light passing through the dichroic lens array 130 at the centers of corresponding pixel regions 131, 132, 133, and 134 is shown, and Figure 7C The phase of green light passing through the dichroic lens array 130 is shown at the center of the corresponding pixel regions 131, 132, 133 and 134.

[0119] refer to Figure 7A and Figure 7BThe red light passing through the dichroic lens array 130 can have a red light phase distribution PPR, which is maximized at the center of the third pixel corresponding region 133 and decreases with distance from the center of the third pixel corresponding region 133. Specifically, immediately after passing through the dichroic lens array 130, the phase of the red light is maximized at the center of the third pixel corresponding region 133 and decreases in concentric circles with distance from the center of the third pixel corresponding region 133. This phase is minimized at the center of the first pixel corresponding region 131 and the fourth pixel corresponding region 134 in the X and Y directions, and minimized at the center of the second pixel corresponding region 132 in the diagonal direction. When the phase of the red light at the center of the third pixel corresponding region 133 is 2π, the phase at the center of the first pixel corresponding region 131 and the fourth pixel corresponding region 134 can be approximately, for example, about 0.9π to about 1.1π, and the phase at the center of the second pixel corresponding region 132 can be smaller than the phase at the center of the first pixel corresponding region 131 and the fourth pixel corresponding region 134, for example, about 0.5π to about 0.9π.

[0120] refer to Figure 7A and Figure 7C The green light passing through the dichroic lens array 130 can have a second green light phase distribution PP2, which is maximum at the center of the region 134 corresponding to the fourth pixel and decreases with distance from the center of the region 134 corresponding to the fourth pixel. Figure 6A The first green light phase distribution PPG1 and Figure 7A When comparing the second green light phase distribution PPG2, the second green light phase distribution PPG2 is obtained by shifting the first green light phase distribution PPG1 parallel to it by one pixel spacing in the X and Y directions. That is, the first green light phase distribution PPG1 has the maximum phase at the center of the first pixel corresponding region 131, while the second green light phase distribution PPG2 has the maximum phase at the center of the fourth pixel corresponding region 134, which is one pixel spacing away from the center of the first pixel corresponding region 131 along the X and Y directions. Figure 6B and Figure 7C The phase distributions shown in the diagram at the centers of pixel-corresponding regions 131, 132, 133, and 134 can be identical to each other. Regarding the phase distribution of green light based on the fourth pixel-corresponding region 134, when the phase of the green light emitted from the center of the fourth pixel-corresponding region 134 is set to 2π, light with a phase of approximately 0.9π to approximately 1.1π can be emitted from the centers of the second pixel-corresponding region 132 and the third pixel-corresponding region 133, and light with a phase of approximately 1.1π to approximately 1.5π can be emitted from the contact point between the first pixel-corresponding region 131 and the fourth pixel-corresponding region 134.

[0121] Figure 7DAn example is shown illustrating the direction of travel of red light incident on a region where red light converges. Figure 7E An example of an array showing the red light convergence region.

[0122] Red light is emitted by a dichroic lens array 130, as shown below. Figure 7D As shown, light converges onto the third pixel 113, and red light from corresponding regions 131, 132, 133, and 134 is incident on the third pixel 113. (Referring to the above...) Figure 7A and Figure 7B The described phase distribution of red light causes red light passing through the red light convergence region RL to converge onto the third pixel 113. The red light convergence region RL is obtained by connecting the centers of four second pixel corresponding regions 132 adjacent to the third pixel corresponding region 133 at their vertices. Therefore, as... Figure 7E As shown, the dichroic lens array 130 can serve as a red light convergence region array for converging red light onto the third pixel 113. The area of ​​the red light convergence region RL is larger than the area of ​​the third pixel 113, for example, it can be 1.5 to 4 times larger. The red light convergence region RL can partially overlap with the first green light convergence region GL1, the second green light convergence region GL2, and the blue light convergence region BL.

[0123] refer to Figure 7F and Figure 7G The green light incident near region 134 of the fourth pixel travels in a similar manner to the green light incident near region 131 of the first pixel, and as... Figure 7F As shown, the green light converges onto the fourth pixel 114. Therefore, as... Figure 7G As shown, the dichroic lens array 130 can serve as a second green light converging region array for converging green light onto the fourth pixel 114. The area of ​​the second green light converging region GL2 can be larger than the area of ​​the corresponding fourth pixel 114, for example, it can be 1.2 to 2 times larger.

[0124] The dichroic lens array 130 that meets the aforementioned phase distribution and performance can be automatically designed through various types of computer simulations. For example, the structure of the pixel-corresponding regions 131, 132, 133, and 134 can be optimized using natural heuristic algorithms such as genetic algorithms, particle swarm optimization algorithms, ant colony optimization algorithms, or reverse design based on adjoint optimization algorithms.

[0125] When designing dichroic lens arrays, the structures of the regions corresponding to green, blue, red, and infrared pixels can be optimized simultaneously, based on performance evaluation factors (such as dichroic spectrum, optical efficiency, signal-to-noise ratio, etc.) of multiple candidate dichroic lens arrays. For example, the structures of these regions can be optimized by pre-determining target values ​​for each evaluation factor and minimizing the sum of the differences between the actual evaluation values ​​of the candidate dichroic lens arrays and the target values ​​for multiple evaluation factors. Alternatively, performance can be indexed for each evaluation factor, and the structures of the regions corresponding to green, blue, red, and infrared pixels can be optimized to maximize the values ​​representing performance.

[0126] Furthermore, some or all of the first to fourth pixels 111, 112, 113, and 114 of the pixel array 1100 may include two or more independent photosensitive units, and two or more photosensitive units included in a pixel may share the convergence area of ​​the dichroic lens array 130. When multiple photosensitive units capable of independently sensing light are included in a pixel, the resolution of the image sensor 1000 can be improved. Furthermore, the autofocus function of the image sensor 1000 and / or a camera device including the image sensor 1000 can be achieved by using the difference between the signals obtained from the photosensitive units.

[0127] For example, phase-detection autofocus achieves autofocus by using the difference between the intensities of light incident on two independent photosensitive units within a pixel. For instance, when the focal point of the camera's lens assembly is exactly on the surface of the pixel array 1100, light beams passing through opposite edges of the lens assembly are concentrated at a single point on the surface of the pixel array 1100. In this case, the intensities of light incident on the two independent photosensitive units within a pixel are equal. However, when the focal point of the camera's lens assembly is not on the surface of the pixel array 1100, the amount of light incident on each pixel in the pixel array 1100 passing through one edge of the lens assembly is greater than the amount incident on the other edge. Furthermore, in this case, the angle of incidence of the light beam incident on each pixel in the pixel array 1100 can be more oblique than the principal ray angle (CRA). Therefore, the intensities of light incident on the two independent photosensitive units within a pixel are different. Thus, autofocus can be achieved by comparing two focus signals obtained from the two independent photosensitive units within a pixel.

[0128] In the phase-detection autofocus method described above, autofocus performance can be improved as the contrast between two focus signals increases. To improve the autofocus performance in the image sensor 1000, which includes a dichroic lens array 130, the orientation of the photosensitive units can be optimized, thereby increasing the contrast of the autofocus signal for each pixel. For example, Figure 8A An example is shown where a pixel is divided into two photosensitive units to provide an autofocus signal in a phase detection autofocus method, and Figure 8B This is an exemplary graph showing how the contrast of the autofocus signal changes according to the division direction of the photosensitive unit.

[0129] refer to Figure 8A A pixel PX can be divided into two independent photosensitive units C1 and C2. According to an example embodiment, the direction of maximum contrast of the autofocus signal can be identified by changing the direction in which the pixel PX is divided. That is, the direction of maximum contrast of the autofocus signal can be identified by changing the orientation of the two photosensitive units C1 and C2. For example, in... Figure 8A In the middle, azimuth angle This represents the angle formed by the boundary line between the two photosensitive units C1 and C2 and the second direction (Y direction). Figure 8B In the diagram, the graph indicated by Gb shows the result of measuring the contrast of the autofocus signal for the first pixel 111 (e.g., the first green pixel), the graph indicated by B shows the result of measuring the contrast of the autofocus signal for the second pixel 112 (e.g., the blue pixel), the graph indicated by R shows the result of measuring the contrast of the autofocus signal for the third pixel 113 (e.g., the red pixel), and the graph indicated by Gr shows the result of measuring the contrast of the autofocus signal for the fourth pixel 114 (e.g., the second green pixel). Azimuth angle This represents the angle formed by the boundary line between the two photosensitive units C1 and C2 and the second direction (Y direction). Assume the CRAθ of the light incident on the pixel array 1100 is approximately 10°.

[0130] like Figure 8BAs shown, in the first pixel 111, the contrast of the autofocus signal is maximized at an azimuth angle Φ of approximately 0° or 180°; in the second pixel 112 and the third pixel 113, the contrast of the autofocus signal is maximized at an azimuth angle Φ of approximately 45° or 135°; and in the fourth pixel 114, the contrast of the autofocus signal is maximized at an azimuth angle Φ of approximately 90°. According to an example embodiment, in the fourth pixel 114, the contrast of the autofocus signal can be maximized at azimuth angles Φ of approximately 90° and 270°. These results can be inferred based on the following assumptions: the first pixel corresponding region 131 and the fourth pixel corresponding region 134 of the dichroic lens array 130 are rotated 90° relative to each other, and the second pixel corresponding region 132 and the third pixel corresponding region 133 are in a state of fourfold symmetry. Therefore, when using the dichroic lens array 130, the autofocus performance can be improved by dividing the first pixel 111 along the second direction (Y direction), dividing the second pixel 112 and the third pixel 113 along the diagonal direction, and dividing the fourth pixel 114 along the first direction (X direction).

[0131] For example, Figures 9A to 9C This is a plan view illustrating an exemplary structure of a pixel array in an image sensor having a dual-cell structure for providing an autofocus signal in a phase detection autofocus method.

[0132] refer to Figure 9AThe first pixel 111 may include a first-1 photosensitive unit 111a and a first-2 photosensitive unit 111b obtained by dividing the first pixel 111 along a second direction (Y direction). In other words, the first-1 photosensitive unit 111a and the first-2 photosensitive unit 111b may be arranged adjacent to each other in the first pixel 111 along a first direction (X direction). The second pixel 112 includes a second-1 photosensitive unit 112a and a second-2 photosensitive unit 112b obtained by dividing the second pixel 112 along a 45° diagonal direction, and the third pixel 113 may include a third-1 photosensitive unit 113a and a third-2 photosensitive unit 113b obtained by dividing the third pixel 113 along a 45° diagonal direction. That is, the boundary line between the second-first photosensitive unit 112a and the second-second photosensitive unit 112b is set at a 45° angle relative to the first direction (X direction), and the boundary line between the third-first photosensitive unit 113a and the third-second photosensitive unit 113b is also set at a 45° angle relative to the first direction (X direction). In other words, the second-first photosensitive unit 112a and the second-second photosensitive unit 112b are arranged adjacent to each other in a 135° diagonal direction in the second pixel 112, and the third-first photosensitive unit 113a and the third-second photosensitive unit 113b are arranged adjacent to each other in a 135° diagonal direction in the third pixel 113. The fourth pixel 114 may include the fourth-first photosensitive unit 114a and the fourth-second photosensitive unit 114b obtained by dividing the fourth pixel 114 along the first direction (X direction). In other words, the 4-1 photosensitive unit 114a and the 4-2 photosensitive unit 114b are arranged adjacent to each other in the second direction (Y direction) in the fourth pixel 114. Although Figure 9A The boundary line between the second-1 photosensitive unit 112a and the second-2 photosensitive unit 112b is shown to be at a 45° angle relative to the first direction (X direction), but this disclosure is not limited thereto. Therefore, according to another example embodiment, the angle of the boundary line relative to the first direction may be different from 45°.

[0133] The first-1 photosensitive unit 111a and the first-2 photosensitive unit 111b of the first pixel 111 can independently output photosensitive signals, and in the phase detection autofocus method, the autofocus signal for the first pixel 111 can be obtained based on the difference between the photosensitive signals of the first-1 photosensitive unit 111a and the first-2 photosensitive unit 111b. In this respect, the first-1 photosensitive unit 111a can be a first focus signal region for generating a first focus signal for the first pixel 111, and the first-2 photosensitive unit 111b can be a second focus signal region for generating a second focus signal for the first pixel 111. In other words, the focus signal of the first focus signal region in the first pixel 111 is output from the first-1 photosensitive unit 111a, the focus signal of the second focus signal region in the first pixel 111 is output from the first-2 photosensitive unit 111b, and the first focus signal region and the second focus signal region of the first pixel 111 can independently generate focus signals. Furthermore, the total image signal of the first pixel 111 can be obtained by summing the photosensitive signal of the first-1 photosensitive unit 111a and the photosensitive signal of the first-2 photosensitive unit 111b.

[0134] Similarly, photosensitive units 112a and 112b can independently output photosensitive signals, and can be respectively a first focus signal region for generating a first focus signal and a second focus signal region for generating a second focus signal for the second pixel 112. The photosensitive signals of photosensitive units 112a and 112b are added together to obtain the total image signal of the second pixel 112. Similarly, photosensitive units 113a and 113b can independently output photosensitive signals, and can be respectively a first focus signal region for generating a first focus signal and a second focus signal region for generating a second focus signal for the third pixel 113. The photosensitive signals of photosensitive units 113a and 113b are added together to obtain the total image signal of the third pixel 113. Similarly, the 4-1 photosensitive unit 114a and the 4-2 photosensitive unit 114b can independently output photosensitive signals, and can be the first focus signal region for generating the first focus signal and the second focus signal region for generating the second focus signal of the fourth pixel 114, respectively. The photosensitive signals of the 4-1 photosensitive unit 114a and the 4-2 photosensitive unit 114b are added together to obtain the total image signal of the fourth pixel 114.

[0135] refer to Figure 9B The first pixel 111 and the fourth pixel 114 and Figure 9A Those are the same. In Figure 9BIn the second pixel 112, there are two photosensitive units 112a and 112b, which are divided along a 135° diagonal direction, and there are two photosensitive units 113a and 113b, which are divided along a 135° diagonal direction. That is, the boundary line between the second photosensitive unit 112a and the second photosensitive unit 112b is set at a 135° angle relative to the first direction (X direction), and the boundary line between the third photosensitive unit 113a and the third photosensitive unit 113b is also set at a 135° angle relative to the first direction (X direction). In other words, the second-first photosensitive unit 112a and the second-second photosensitive unit 112b are arranged adjacent to each other in the second pixel 112 in a 45° diagonal direction, and the third-first photosensitive unit 113a and the third-second photosensitive unit 113b are arranged adjacent to each other in the third pixel 113 in a 45° diagonal direction.

[0136] refer to Figure 9C The first pixel 111 and the fourth pixel 114 and Figure 9A The examples in the text are the same, and the directions in which the second-first photosensitive units 112a and 112b of the second pixel 112 are arranged, as are the directions in which the third-first photosensitive units 113a and 113b of the third pixel 113 are arranged, are the same as the directions in which the first-first photosensitive units 111a and 111b of the first pixel 111 are arranged. In other words, the second-first photosensitive units 112a and 112b are arranged adjacent to each other in the first direction (X direction) in the second pixel 112, and the third-first photosensitive units 113a and 113b are arranged adjacent to each other in the first direction (X direction) in the third pixel 113. Figure 8B As shown in the graph, in the second pixel 112 and the third pixel 113, the contrast of the autofocus signal changes less with the change in the direction of the photosensitive units than in the first pixel 111 and the fourth pixel 114. Therefore, for ease of manufacturing, the direction of the photosensitive units arranging the second pixel 112 and the third pixel 113 can coincide with the direction of the photosensitive units arranging the first pixel 111 or the fourth pixel 114. Figure 9C In the image, the direction in which the photosensitive units of the second pixel 112 and the third pixel 113 are arranged matches the direction in which the photosensitive unit of the first pixel 111 is arranged, but it can also match the direction in which the photosensitive unit of the fourth pixel 114 is arranged.

[0137] Figure 10A , Figure 10B and Figure 10C This is a plan view illustrating an exemplary structure of a pixel array in an image sensor having a four-unit structure for providing an autofocus signal in a phase-detection autofocus mode.

[0138] refer to Figure 10A The first pixel 111 may include a first-1 photosensitive unit 111a, a first-2 photosensitive unit 111b, a first-3 photosensitive unit 111c, and a first-4 photosensitive unit 111d obtained by dividing the first pixel 111 into four parts along a first direction (X direction) and a second direction (Y direction). The first-1 photosensitive unit 111a, the first-2 photosensitive unit 111b, the first-3 photosensitive unit 111c, and the first-4 photosensitive unit 111d can independently output photosensitive signals and can be respectively arranged in the quadrants that divide the first pixel 111 into four parts in a 2×2 array shape. In this configuration, the first-1 photosensitive units 111a and 111c, which are adjacent to each other in the second direction (Y direction), constitute the first focus signal region of the first pixel 111, and the first-2 photosensitive units 111b and 111d, which are adjacent to each other in the second direction (Y direction), constitute the second focus signal region of the first pixel 111. Therefore, the focus signal of the first focus signal region of the first pixel 111 is the sum of the output from the first-1 photosensitive unit 111a and the output from the first-3 photosensitive unit 111c, and the focus signal of the second focus signal region of the first pixel 111 is the sum of the output from the first-2 photosensitive unit 111b and the output from the first-4 photosensitive unit 111d. The total image signal of the first pixel 111 can be obtained by summing the outputs from the first-1 photosensitive units 111a, 111b, 111c, and 111d.

[0139] Furthermore, the second pixel 112 may include a second-1 photosensitive unit 112a, a second-2 photosensitive unit 112b, a second-3 photosensitive unit 112c, and a second-4 photosensitive unit 112d obtained by dividing the second pixel 112 into four parts along a first direction (X direction) and a second direction (Y direction). The second-1 photosensitive unit 112a, the second-2 photosensitive unit 112b, the second-3 photosensitive unit 112c, and the second-4 photosensitive unit 112d can independently output photosensitive signals and can be arranged respectively in the quadrants that divide the second pixel 112 into four parts in a 2×2 array shape. In the second pixel 112, the second-2 photosensitive unit 112b and the second-3 photosensitive unit 112c, which are adjacent to each other in a 45° diagonal direction, constitute the first focus signal region and the second focus signal region of the second pixel 112. Therefore, the focus signal of the first focus signal region of the second pixel 112 is the output of the second-2 photosensitive unit 112b, and the focus signal of the second focus signal region of the second pixel 112 is the output of the second-3 photosensitive unit 112c. The total image signal of the second pixel 112 can be obtained by summing the outputs from the second-1 photosensitive unit 112a, the second-2 photosensitive unit 112b, the second-3 photosensitive unit 112c, and the second-4 photosensitive unit 112d.

[0140] Furthermore, the third pixel 113 may include a third-1 photosensitive unit 113a, a third-2 photosensitive unit 113b, a third-3 photosensitive unit 113c, and a third-4 photosensitive unit 113d, obtained by dividing the third pixel 113 into four parts along a first direction (X direction) and a second direction (Y direction). The third-1 photosensitive unit 113a, the third-2 photosensitive unit 113b, the third-3 photosensitive unit 113c, and the third-4 photosensitive unit 113d can independently output photosensitive signals and can be arranged respectively in the quadrants that divide the third pixel 113 into four parts in a 2×2 array shape. Similar to the second pixel 112, in the third pixel 113, the third-2 photosensitive unit 113b and the third-3 photosensitive unit 113c, which are adjacent to each other in a 45° diagonal direction, are the first and second focusing signal regions of the third pixel 113. Therefore, the focus signal of the first focus signal region of the third pixel 113 is the output of the 3-2 photosensitive unit 113b, and the focus signal of the second focus signal region of the third pixel 113 is the output of the 3-3 photosensitive unit 113c. The total image signal of the third pixel 113 can be obtained by summing the outputs from the 3-1 photosensitive unit 113a, the 3-2 photosensitive unit 113b, the 3-3 photosensitive unit 113c, and the 3-4 photosensitive unit 113d.

[0141] The fourth pixel 114 may include a fourth-1 photosensitive unit 114a, a fourth-2 photosensitive unit 114b, a fourth-3 photosensitive unit 114c, and a fourth-4 photosensitive unit 114d, obtained by dividing the fourth pixel 114 into four parts along a first direction (X direction) and a second direction (Y direction). The fourth-1 photosensitive unit 114a, the fourth-2 photosensitive unit 114b, the fourth-3 photosensitive unit 114c, and the fourth-4 photosensitive unit 114d can independently output photosensitive signals and can be arranged in quadrants that are the four parts into which the fourth pixel 114 is divided in a 2×2 array shape. In the fourth pixel 114, the fourth-1st photosensitive unit 114a and the fourth-2nd photosensitive unit 114b, which are adjacent to each other in the first direction (X direction), constitute the first focus signal region of the fourth pixel 114, and the fourth-3rd photosensitive unit 114c and the fourth-4th photosensitive unit 1114d, which are adjacent to each other in the first direction (X direction), constitute the second focus signal region of the fourth pixel 114. Therefore, the focus signal of the first focus signal region of the fourth pixel 114 is the sum of the output from the fourth-1st photosensitive unit 114a and the output from the fourth-2nd photosensitive unit 114b, and the focus signal of the second focus signal region of the fourth pixel 114 is the sum of the output from the fourth-3rd photosensitive unit 114c and the output from the fourth-4th photosensitive unit 114d. The total image signal of the fourth pixel 114 can be obtained by summing the outputs from the fourth-1 photosensitive unit 114a, the fourth-2 photosensitive unit 114b, the fourth-3 photosensitive unit 114c, and the fourth-4 photosensitive unit 114d.

[0142] refer to Figure 10B The first pixel 111 and the fourth pixel 114 and Figure 10A Those are the same. In Figure 10B In the second pixel 112, photosensitive units 112a and 112d, which are adjacent to each other in a 135° diagonal direction, constitute the first and second focus signal regions of the second pixel 112. Therefore, the focus signal of the first focus signal region of the second pixel 112 is the output of photosensitive unit 112a, and the focus signal of the second focus signal region of the second pixel 112 is the output of photosensitive unit 112d. Similarly, photosensitive units 113a and 113d, which are adjacent to each other in a 135° diagonal direction, constitute the first and second focus signal regions of the third pixel 113. Therefore, the focus signal of the first focus signal region of the third pixel 113 is the output of photosensitive unit 113a, and the focus signal of the second focus signal region of the third pixel 113 is the output of photosensitive unit 113d.

[0143] According to an example embodiment, in the second pixel 112 and the third pixel 113, where the contrast of the autofocus signal does not change significantly depending on the arrangement direction of the focus signal region, the focus signal region can be configured in the same direction as the first pixel 111 or the fourth pixel 114. (See reference...) Figure 10C The second-1 photosensitive unit 112a and the second-3 photosensitive unit 112c, which are adjacent to each other in the second direction (Y direction), are the first focus signal regions of the second pixel 112. The second-2 photosensitive unit 112b and the second-4 photosensitive unit 112d, which are adjacent to each other in the second direction (Y direction), are the second focus signal regions of the second pixel 112. The third-1 photosensitive unit 113a and the third-3 photosensitive unit 113c, which are adjacent to each other in the second direction (Y direction), are the first focus signal regions of the third pixel 113. The third-2 photosensitive unit 113b and the third-4 photosensitive unit 113d, which are adjacent to each other in the second direction (Y direction), are the second focus signal regions of the third pixel 113. Therefore, the focus signal of the first focus signal region of the second pixel 112 is the sum of the output from the second-1 photosensitive unit 112a and the output from the second-3 photosensitive unit 112c; the focus signal of the second focus signal region of the second pixel 112 is the sum of the outputs from the second-2 photosensitive unit 112b and the second-4 photosensitive unit 112d; the focus signal of the first focus signal region of the third pixel 113 is the sum of the outputs from the third-1 photosensitive unit 113a and the third-3 photosensitive unit 113c; and the focus signal of the second focus signal region of the third pixel 113 is the sum of the outputs from the third-2 photosensitive unit 113b and the third-4 photosensitive unit 113d.

[0144] Figure 11A and Figure 11B This is a cross-sectional view illustrating an exemplary structure of a pixel array in an image sensor having a pixel isolation layer and a unit isolation layer, wherein, Figure 11A It is along Figure 10A The cross-sectional view of line A-A' and Figure 11B It is along Figure 10A The cross-sectional view taken by line B-B'.

[0145] refer to Figure 11A and Figure 11B The sensor substrate 110 may include a pixel isolation layer 101 for separating the first pixel 111, the second pixel 112, the third pixel 113, and the fourth pixel 114 from each other. Although Figure 11A Only the pixel isolation layer 101 separating the first pixel 111 and the second pixel 112 is shown, and Figure 11BA pixel isolation layer 101 separating the third pixel 113 and the fourth pixel 114 is shown, but this disclosure is not limited thereto. Therefore, in another cross-section taken along a different direction, the pixel isolation layer 101 may also separate the first pixel 111 and the third pixel 113, and the second pixel 112 and the fourth pixel 114. The pixel isolation layer 101 may extend along a third direction (Z direction) from the upper surface of the sensor substrate 110 to the lower surface of the photodiodes PD1 and PD2 below the sensor substrate 110.

[0146] Furthermore, the sensor substrate 110 may also include a unit isolation layer 102 for separating adjacent focus signal regions or adjacent photosensitive units. The unit isolation layer 102 may have a height smaller than the height of the pixel isolation layer 101. For example, the height of the unit isolation layer 102 may be approximately 1 / 4 to 1 / 2 of the height of the pixel isolation layer 101. The unit isolation layer 102 may extend along a third direction (Z direction) from the upper surface of the sensor substrate 110 to the middle portion of the light transmission layer 103 of the sensor substrate 110. The unit isolation layer 102 can reduce crosstalk generated between adjacent focus signal regions or between adjacent photosensitive units, thereby improving the contrast of the autofocus signal. However, the unit isolation layer 102 can absorb / reflect light and cause light loss, and therefore can be omitted when necessary. For example, in the third pixel 113, which is a red pixel with lower quantum efficiency, the unit isolation layer 102 may not be arranged. Furthermore, the unit isolation layer 102 may be provided... Figures 9A to 9C In the example shown.

[0147] Multiple photodiodes PD1, PD2, PD3, and PD4 can be located beneath the light transmission layer 103 of the sensor substrate 110. For example, four photodiodes PD1, PD2, PD3, and PD4 can be arranged to divide each of the first to fourth pixels 111, 112, 113, and 114 into four parts, and can have the same area. The four photodiodes PD1, PD2, PD3, and PD4 can correspond to the four photosensitive units in the first to fourth pixels 111, 112, 113, and 114, respectively. Figure 11A and Figure 11B In the image, each of the first to fourth pixels 111, 112, 113, and 114 includes four photodiodes PD1, PD2, PD3, and PD4, but in Figures 9A to 9C In the example shown, each of the first to fourth pixels 111, 112, 113 and 114 may consist of only two photodiodes PD1 and PD2.

[0148] Figure 12A and Figure 12BThis is a graph illustrating the change in intensity and contrast of the autofocus signal based on the angle of incidence of light, in a comparative example that does not consider the directionality of the dichroic lens array 130. Figure 12A In the diagram, the curves indicated by Gb1 and Gb2 represent the two focus signals of the first pixel 111, the curves indicated by B1 and B2 represent the two focus signals of the second pixel 112, the curves indicated by R1 and R2 represent the two focus signals of the third pixel 113, and the curves indicated by Gr1 and Gr2 represent the two focus signals of the fourth pixel 114. Furthermore, in... Figure 12A and Figure 12B The angle indicated on the horizontal axis represents the deviation of the incident light from the CRA. Figure 12B In the diagram, the curve indicated by Gb represents the contrast of the autofocus signal of the first pixel 111, the curve indicated by B represents the contrast of the autofocus signal of the second pixel 112, the curve indicated by R represents the contrast of the autofocus signal of the third pixel 113, and the curve indicated by Gr represents the contrast of the autofocus signal of the fourth pixel 114. (Reference) Figure 12A and Figure 12B The focus signals of the two green pixels (e.g., the first pixel 111 and the fourth pixel 114) are different from each other.

[0149] Figure 13A and Figure 13B This is a graph illustrating an example of the change in intensity and contrast of the autofocus signal based on the angle of incidence of light in an exemplary embodiment considering the directionality of the dichroic lens array 130. This is obtained by considering only the directionality of the first pixel 111 and the fourth pixel 114. Figure 13A and Figure 13B The curve diagram. The focus signal regions of the second pixel 112 and the third pixel 113 are assumed to be arranged in the same way as the focus signal region of the first pixel 111, such as... Figure 9C As shown. Reference Figure 13A and Figure 13B Compared to the focus signal of the comparison example, the focus signal converges into the focus signal of one of the two green pixels (e.g., the first pixel 111 and the fourth pixel 114) with higher contrast. In other words, in Figure 12A The focus signal of the fourth pixel 114, represented as Gr1 and Gr2, becomes equal to the focus signal of the first pixel 111, represented as Gb1 and Gb2. Furthermore, in Figure 12BThe contrast of the autofocus signal of the fourth pixel 111, denoted as Gr, becomes equal to the contrast of the autofocus signal of the first pixel 111, denoted as Gb. This is because the fourth-first photosensitive unit 114a and the fourth-second photosensitive unit 114b are arranged such that the fourth pixel 114 is divided along a direction (i.e., the first direction) that is rotated 90° relative to the direction dividing the first pixel 111 (i.e., the second direction). Therefore, the contrast of the autofocus signal in the image sensor 1000 can be significantly improved.

[0150] Furthermore, the CRA of light from a point on the object, after passing through the lens assembly of the camera, incident on the image sensor 1000, pixel array 1100, or sensor substrate 110, varies depending on the position on the image sensor 1000, pixel array 1100, or sensor substrate 110. For example, the CRA of incident light incident at the center of the image sensor 1000, pixel array 1100, or sensor substrate 110 is 0° and gradually increases with distance from the center. When the CRA changes, the contrast of the autofocus signal can also change. Therefore, the position of the unit isolation layer 102 can be adjusted according to the CRA.

[0151] Figure 14A This is a cross-sectional view showing an exemplary structure of a pixel array at the central portion of an image sensor, and Figure 14B This is a cross-sectional view showing an exemplary structure of a pixel array at the edge portion of an image sensor.

[0152] refer to Figure 14A At the central portion of the image sensor 1000, light is incident perpendicularly at a 0° CRA on the surface of the pixel array 1100. In this case, the unit isolation layer 102 may be located at the center of each pixel. For example, in a first pixel 111 located at the central portion of the image sensor 1000, the central portion of the pixel array 1100, or the central portion of the sensor substrate 110, the unit isolation layer 102 may be configured to pass through the center of the first pixel 111, and in a second pixel 112 located at the center of the image sensor 1000, the center of the pixel array 1100, or the center of the sensor substrate 110, the unit isolation layer 102 may be configured to pass through the center of the second pixel 112.

[0153] refer to Figure 14BAt the edge portion of the image sensor 1000, light can be incident on the surface of the pixel array 1100 at an angle greater than 0° CRA. In this case, in each pixel located at the edge portion of the image sensor 1000, the edge portion of the pixel array 1100, or the edge portion of the sensor substrate 110, the unit isolation layer 102 can be offset toward the center portion of the image sensor 1000, the center portion of the pixel array 1100, or the center portion of the sensor substrate 110.

[0154] To improve color separation efficiency and color purity, the color filter array 140 and the dichroic lens array 130 can also be offset in the same direction as the unit isolation layer 102. Furthermore, when the dichroic lens array 130 has a double-layer structure, the upper dichroic lens array can be offset further than the lower dichroic lens array. For example, when the dichroic lens array 130 includes a first dichroic lens array 130a and a second dichroic lens array 130b on the first dichroic lens array 130a, the second dichroic lens array 130b can be offset further towards the center of the image sensor 1000, the center of the pixel array 1100, or the center of the sensor substrate 110 compared to the first dichroic lens array 130a.

[0155] When the thickness of the light transmission layer 103 of the sensor substrate 110 is h1, the offset distance S1 of the unit isolation layer 102 can be represented by the following equation 2.

[0156] [Equation 2]

[0157] S1=h1×tan(sin -1 (n si -1 ×sinθ))

[0158] Here, θ represents the CRA of the incident light, and n si This represents the refractive index of the light transmission layer 103.

[0159] Furthermore, the offset distance S2 of the first dichroic lens array 130a can be represented by the following equation 3.

[0160] [Equation 3]

[0161] S2=S1+(h2+h3 / 2)×tan(sin -1 (n int -1 ×sinθ))

[0162] Here, h2 represents the thickness of the color filter array 140 and the spacer layer 120, h inth1 represents the average refractive index of the color filter array 140 and the spacer layer 120, and h3 represents the thickness of the first dichroic lens array 130a. When the color filter array 140 is omitted, h2 represents the thickness of the spacer layer 120 and n. int This indicates the refractive index of spacer layer 120.

[0163] Furthermore, the offset distance S3 of the second dichroic lens array 130b can be represented by the following equation 4.

[0164] [Equation 4]

[0165] S3=S1+S2+h3 / 2×tan(sin -1 (n Oxide -1 ×sinθ))

[0166] Here, n oxide The refractive index represents the dielectric material surrounding the nanopillars in the first dichroic lens array 130a.

[0167] In each of the pixels in the sensor substrate 110, the cell isolation layer 102 is offset, but the position, size, and shape of the pixel are maintained. Furthermore, the position, size, and shape of the plurality of photodiodes PD1 and PD2 arranged in the pixel can also be maintained.

[0168] Figure 15 This is a plan view illustrating an example of the offset of the cell isolation layer in a pixel array with a dual-cell structure. (Reference) Figure 15 The unit isolation layer 102 of the first pixel 111 extends along the second direction (Y direction), the unit isolation layers 102 in the second pixel 112 and the third pixel 113 extend along the first diagonal direction, and the unit isolation layer 102 in the fourth pixel 114 extends along the first direction (X direction). According to an example embodiment, such as... Figure 15 As shown, the unit isolation layer 102 in the first pixel 111, the unit isolation layer 102 in the second pixel 112, the unit isolation layer 102 in the third pixel 113, and the unit isolation layer 102 in the fourth pixel 114 extend in a straight line. At the center of the sensor substrate 110, each of the unit isolation layers 102 in the first to fourth pixels 111, 112, 113, and 114 can be configured to pass through the center of the corresponding first to fourth pixels 111, 112, 113, and 114.

[0169] Furthermore, in the first pixel 111 located at the outer edge of the sensor substrate 110 along the first direction, the unit isolation layer 102 may be offset towards the center of the sensor substrate 110 in the first direction, and in the fourth pixel 114 located at the outer edge of the sensor substrate 110, the unit isolation layer 102 may be offset towards the center of the sensor substrate 110 in the second direction. Additionally, in the second pixel 112 and the third pixel 113 located at the outer edge of the sensor substrate 110 along a second diagonal direction intersecting the first diagonal direction, the unit isolation layer 102 may be offset towards the center of the sensor substrate 110 in the second diagonal direction. However, in the second pixel 112 and the third pixel 113 located in the sensor substrate 110 along a first diagonal direction passing through the center of the sensor substrate 110, the unit isolation layer 102 may not be offset.

[0170] Figure 16 This is a plan view illustrating an example of the offset of the cell isolation layer in a pixel array with a four-cell structure. (Reference) Figure 16 In a pixel array 1100 with a four-unit structure, the unit isolation layer 102 may include a first-direction isolation layer 102a extending linearly in a first direction and a second-direction isolation layer 102b extending linearly in a second direction and intersecting the first-direction isolation layer 102a. At the center portion of the sensor substrate 110, the first-direction isolation layer 102a and the second-direction isolation layer 102b are arranged to pass through the center of each pixel. In other words, in each pixel located at the center portion of the sensor substrate 110, the intersection point between the first-direction isolation layer 102a and the second-direction isolation layer 102b is located at the center of each pixel.

[0171] In each of the pixels located on the outer edge portion of the sensor substrate 110 along the first direction, the second-direction isolation layer 102b is offset toward the center of the sensor substrate 110 in the first direction, and in each of the pixels located on the outer edge portion of the sensor substrate 110 along the second direction, the first-direction isolation layer 102a may be offset toward the center of the sensor substrate 110 in the second direction. In other words, in each of the pixels located on the outer edge portion of the sensor substrate 110 along the first direction, the intersection point between the first-direction isolation layer 102a and the second-direction isolation layer 102b may be offset toward the center of the sensor substrate 110 in the first direction, and in each of the pixels located on the outer edge portion of the sensor substrate 110 along the second direction, the intersection point between the first-direction isolation layer 102a and the second-direction isolation layer 102b may be offset toward the center of the sensor substrate 110 in the second direction.

[0172] Figure 17A and Figure 17BThis is a graph showing the changes in the intensity and contrast of the autofocus signal according to the angle of incidence of light in a comparative example where the unit isolation layer is not offset. Figure 17A and Figure 17B In this study, the directionality of the dichroic lens array 130 is not considered, and the CRA of the incident light is assumed to be approximately 30°. Figure 17A In the diagram, the curves indicated by Gb1 and Gb2 represent the two focus signals of the first pixel 111, the curves indicated by B1 and B2 represent the two focus signals of the second pixel 112, the curves indicated by R1 and R2 represent the two focus signals of the third pixel 113, and the curves indicated by Gr1 and Gr2 represent the two focus signals of the fourth pixel 114. Figure 17B In the graph, the curve indicated by Gb represents the contrast of the autofocus signal of the first pixel 111, the curve indicated by B represents the contrast of the autofocus signal of the second pixel 112, the curve indicated by R represents the contrast of the autofocus signal of the third pixel 113, and the curve indicated by Gr represents the contrast of the autofocus signal of the fourth pixel 114. Furthermore, Figure 17A and Figure 17B The angle shown on the horizontal axis indicates the angle of incidence of the incident light. (Reference) Figure 17A and Figure 17B In the comparison example, the two focus signals for each pixel do not show sufficient symmetry about CRA (30°).

[0173] Figure 18A and Figure 18B This is a graph illustrating the variation in the intensity and contrast of the autofocus signal according to the incident angle of light in an example embodiment of the unit isolation layer offset. Figure 18A and Figure 18B In this context, the orientation of the first pixel 111 and the fourth pixel 114 are considered, and the cell isolation layer 102 is offset by 4 nm / CRA (°) with a 30° CRA. (See reference...) Figure 18A and Figure 18B This restores the symmetry about the CRA (e.g., 30°) to a specific degree. Furthermore, the contrast of the autofocus signal is also increased.

[0174] According to the image sensor 1000 including the pixel array 1100 described above, light loss due to color filters (e.g., organic color filters) is minimal, thus ensuring sufficient light supply to the pixels even as they become smaller. Therefore, it is possible to manufacture ultra-high resolution, ultra-small size, and high sensitivity image sensors with hundreds of millions or more pixels. Such ultra-high resolution, ultra-small size, and high sensitivity image sensors can be used in various high-performance optical devices or high-performance electronic devices. These electronic devices may include, for example, smartphones, mobile phones, cellular phones, personal digital assistants (PDAs), laptop computers, personal computers (PCs), various portable devices, electronic devices, surveillance cameras, medical cameras, automobiles, Internet of Things (IoT) devices, other mobile or non-mobile computing devices, and are not limited thereto.

[0175] In addition to the image sensor 1000, the electronic device may also include a processor, such as an application processor (AP), for controlling the image sensor. This processor can control multiple hardware or software components and can perform various data processing and operations by driving an operating system or application via the processor. The processor may also include a graphics processing unit (GPU) and / or an image signal processor. When an image signal processor is included in the processor, images (or videos) acquired by the image sensor can be stored and / or output using the processor. Furthermore, the processor receives two photosensitive signals from opposite edges spaced apart from each other in each pixel of the image sensor and generates an autofocus signal based on the difference between these two photosensitive signals.

[0176] Figure 19 This is a block diagram illustrating an example of an electronic device ED01 including an image sensor 1000. (Reference) Figure 19In the network environment ED00, electronic device ED01 can communicate with another electronic device ED02 via a first network ED98 (short-range wireless communication network, etc.), or can communicate with another electronic device ED04 and / or server ED08 via a second network ED99 (long-range wireless communication network, etc.). Electronic device ED01 can communicate with electronic device ED04 via server ED08. Electronic device ED01 may include a processor ED20, a memory ED30, an input device ED50, an audio output device ED55, a display device ED60, an audio module ED70, a sensor module ED76, an interface ED77, a haptic module ED79, a camera module ED80, a power management module ED88, a battery ED89, a communication module ED90, a user identification module ED96, and / or an antenna module ED97. In electronic device ED01, some components (such as display device ED60) may be omitted, or another component may be added. Some components may be configured as an integrated circuit. For example, sensor module ED76 may be embedded in display device ED60. For example, the sensor module ED76 may include a fingerprint sensor, an iris sensor, an illuminance sensor, etc., and the display device may include a display, etc.

[0177] Processor ED20 can control one or more components (hardware, software components, etc.) of electronic device ED01 connected to processor ED20 by executing software (program ED40, etc.), and can perform various data processing or operations. As part of data processing or operations, processor ED20 can load commands and / or data received from another component (sensor module ED76, communication module ED90, etc.) into volatile memory ED32, process the commands and / or data stored in volatile memory ED32, and store the result data in non-volatile memory ED34. Processor ED20 may include a main processor ED21 (central processing unit, application processor, etc.) and an auxiliary processor ED23 (graphics processing unit, image signal processor, sensor hub processor, communication processor, etc.) that can operate independently of or with the main processor ED21. Auxiliary processor ED23 can use less power than main processor ED21 and can perform specified functions.

[0178] The auxiliary processor ED23, acting on behalf of the main processor ED21 when the main processor ED21 is inactive (dormant state), or working together with the main processor ED21 when the main processor ED21 is active (application execution state), can control the functions and / or states of some components (display device ED60, sensor module ED76, communication module ED90, etc.) of the electronic device ED01. The auxiliary processor ED23 (image signal processor, communication processor, etc.) can be implemented as part of another functionally related component (camera module ED80, communication module ED90, etc.).

[0179] The memory ED30 can store various data required by the components of the electronic device ED01 (processor ED20, sensor module ED76, etc.). This data may include, for example, input and / or output data and related commands concerning software (program ED40, etc.). The memory ED30 may include volatile memory ED32 and / or non-volatile memory ED34. The non-volatile memory ED34 may include internal memory ED36 fixedly installed in the electronic device ED01 and removable external memory ED38.

[0180] The program ED40 can be stored as software in the memory ED30 and may include the operating system ED42, middleware ED44 and / or application ED46.

[0181] Input device ED50 can receive commands and / or data from outside the electronic device ED01 (such as from a user) to be used in the components of the electronic device ED01 (such as the processor ED20). Input device ED50 may include a microphone, mouse, keyboard, and / or digital pen (stylus).

[0182] Audio output device ED55 can output sound signals to the external device ED01. Audio output device ED55 may include a speaker and / or a handset. The speaker can be used for general purposes such as multimedia playback or recording, and the handset can be used to receive calls. The handset can be coupled as part of the speaker or can be implemented as a stand-alone device.

[0183] Display device ED60 can provide visual information to the outside of electronic device ED01. Display device ED60 may include a display, holographic device or projector, and control circuitry for controlling the corresponding device. Display device ED60 may include touch circuitry configured to detect touch and / or sensor circuitry configured to measure the force generated by touch (pressure sensor, etc.).

[0184] The audio module ED70 can convert sound into electrical signals and vice versa. The audio module ED70 can obtain sound through the input device ED50, or can output sound through the audio output device ED55 and / or directly or wirelessly connected to the speaker and / or headphones of another electronic device (such as electronic device ED02) connected to electronic device ED01.

[0185] The sensor module ED76 can detect the operating status (power, temperature, etc.) or external environmental status (user status, etc.) of the electronic device ED01, and can generate electrical signals and / or data values ​​corresponding to the detected status. The sensor module ED76 may include a gesture sensor, gyroscope sensor, pressure sensor, magnetic sensor, accelerometer, grip sensor, proximity sensor, color sensor, infrared (IR) sensor, vivo sensor, temperature sensor, humidity sensor, and / or illuminance sensor.

[0186] Interface ED77 may support one or more specified protocols, which can be used for electronic device ED01 to connect directly or wirelessly to another electronic device (electronic device ED02, etc.). Interface ED77 may include a High Definition Multimedia Interface (HDMI), a Universal Serial Bus (USB) interface, an SD card interface, and / or an audio interface.

[0187] The connection terminal ED78 may include a connector through which electronic device ED01 can be physically connected to another electronic device (electronic device ED02, etc.). The connection terminal ED78 may include an HDMI connector, a USB connector, an SD card connector, and / or an audio connector (headphone connector, etc.).

[0188] The ED79 haptic module can convert electrical signals into mechanical stimuli (vibration, motion, etc.) or electrical stimuli that can be detected by the user through touch or motion. The ED79 haptic module may include a motor, piezoelectric devices, and / or electrical stimulation devices.

[0189] The ED80 camera module can capture still images and video. The ED80 camera module may include: a lens assembly comprising one or more lenses; Figure 1 The camera module ED80 includes an image sensor 1000, an image signal processor, and / or a flash. The lens assembly within the camera module can capture light emitted from the object being captured.

[0190] The power management module ED88 manages the power supplied to the electronic device ED01. The power management module ED88 can be implemented as part of a power management integrated circuit (PMIC).

[0191] Battery ED89 can supply power to the components of electronic device ED01. Battery ED89 may include a non-rechargeable primary battery, a rechargeable secondary battery, and / or a fuel cell.

[0192] Communication module ED90 can support the establishment of a direct (wired) communication channel and / or a wireless communication channel between electronic device ED01 and another electronic device (electronic device ED02, electronic device ED04, or server ED08, etc.), and perform communication through the established communication channel. Communication module ED90 can operate independently of processor ED20 (application processor, etc.) and can include one or more communication processors that support direct and / or wireless communication. Communication module ED90 may include wireless communication module ED92 (cellular communication module, short-range wireless communication module, Global Navigation Satellite System (GNSS) communication module, etc.) and / or wired communication module ED94 (local area network (LAN) communication module, power line communication module, etc.). The corresponding communication module within this module can communicate with another electronic device via a first network ED98 (a short-range communication network such as Bluetooth, WiFi Direct, or Infrared Data Association (IrDA)) or a second network ED99 (a long-range communication network such as a cellular network, the Internet, or computer network (LAN, WAN, etc.). The aforementioned different types of communication modules can be integrated into a single component (a single chip, etc.) or implemented as multiple separate components (multiple chips). The wireless communication module ED92 can identify and authenticate the electronic device ED01 in a communication network (e.g., the first network ED98 and / or the second network ED99) by using user information (e.g., International Mobile Subscriber Identity (IMSI)) stored in the user identification module ED96.

[0193] Antenna module ED97 can transmit signals and / or power to or from an external (other electronic device, etc.) device. The antenna may include a radiator as a conductive pattern formed on a substrate (PCB, etc.). Antenna module ED97 may include one or more antennas. When antenna module ED97 includes multiple antennas, communication module ED90 can select an antenna suitable for the communication type used in a communication network such as first network ED98 and / or second network ED99. Signals and / or power can be transmitted between communication module ED90 and another electronic device via the selected antenna. Another component (RFIC, etc.) besides the antenna may be included as part of antenna module ED97.

[0194] Some of the components can be connected to each other via communication methods in peripheral devices (bus, general purpose input and output (GPIO), serial peripheral interface (SPI), mobile industrial processor interface (MIPI), etc.) and can exchange signals (commands, data, etc.).

[0195] Commands or data can be sent or received between electronic device ED01 and external electronic device ED04 via server ED08 connected to the second network ED99. Other electronic devices ED02 and ED04 can be devices of the same or different types as electronic device ED01. All or some operations performed in electronic device ED01 can be performed in one or more of the other electronic devices ED02, ED04, and ED08. For example, when electronic device ED01 must perform a specific function or service, it can request one or more other electronic devices to perform that function or service, instead of performing it itself. The one or more electronic devices receiving the request perform additional functions or services related to the request and can transmit the results back to electronic device ED01. For this purpose, technologies such as cloud computing, distributed computing, or client-server computing can be used.

[0196] Figure 20 It is shown Figure 19 A block diagram of the ED80 camera module. (Reference) Figure 20 The camera module ED80 may include a lens assembly CM10, a flash CM20, and an image sensor 1000. Figure 1 The system includes an image sensor 1000, an image stabilizer CM40, a memory CM50 (buffer memory, etc.), and / or an image signal processor CM60. A lens assembly CM10 can collect light emitted from an object that is the target to be captured. A camera module ED80 may include multiple lens assemblies CM10, and in this case, the camera module ED80 may include a dual-camera module, a 360-degree camera, or a spherical camera. Some of the multiple lens assemblies CM10 may have the same lens properties (angle of view, focal length, autofocus, F-number, optical zoom, etc.) or different lens properties. The lens assembly CM10 may include a wide-angle lens or a telephoto lens.

[0197] The flash CM20 emits light to amplify light emitted or reflected from an object. The flash CM20 may include one or more light-emitting diodes (red-green-blue (RGB) LEDs, white LEDs, infrared LEDs, ultraviolet LEDs, etc.) and / or a xenon lamp. The image sensor 1000 may be a reference. Figure 1The image sensor described above converts light emitted or reflected from an object and transmitted through the lens assembly CM10 into electrical signals to obtain an image corresponding to the object. The image sensor 1000 may include one or more selected sensors from image sensors with different properties (e.g., RGB sensors, black-and-white (BW) sensors, IR sensors, or UV sensors). Each sensor included in the image sensor 1000 may be implemented as a charge-coupled device (CCD) sensor and / or a complementary metal-oxide-semiconductor (CMOS) sensor.

[0198] Image stabilizer CM40 responds to movement of camera module ED80 or electronic device ED01 including camera module ED80 by moving one or more lenses or image sensor 1000 included in lens assembly CM10 in a specific direction, or by controlling the operating characteristics of image sensor 1000 (adjusting readout timing, etc.) to compensate for the negative effects of movement. Image stabilizer CM40 can sense movement of camera module ED80 or electronic device ED01 using a gyroscope sensor (not shown) or accelerometer sensor (not shown) arranged in or outside camera module ED80. Image stabilizer CM40 can be implemented as an optical type.

[0199] The memory CM50 can store some or all of the image data acquired by the image sensor 1000 for subsequent image processing operations. For example, when multiple images are acquired at high speed, the acquired raw data (Bayer pattern data, high-resolution data, etc.) is stored in the memory CM50, and only the low-resolution image is displayed. Then, the raw data of the selected image (user selection, etc.) can be transferred to the image signal processor CM60. The memory CM50 can be integrated with the memory ED30 of the electronic device ED01, or it can include an additional memory that operates independently.

[0200] The image signal processor CM60 can perform image processing on images acquired by the image sensor 1000 or image data stored in the memory CM50. The image processing may include depth map generation, 3D modeling, panorama generation, feature extraction, image combination, and / or image compensation (noise reduction, resolution adjustment, brightness adjustment, blurring, sharpening, softening, etc.). The image signal processor CM60 can perform control (exposure time control or readout timing control, etc.) on components included in the camera module ED80 (image sensor 1000, etc.). Images processed by the image signal processor CM60 can be stored again in the memory CM50 for further processing, or can be provided to external components of the camera module ED80 (e.g., memory ED30, display device ED60, electronic device ED02, electronic device ED04, server ED08, etc.). The image signal processor CM60 can be integrated with the processor ED20, or can be configured as an additional processor operating independently of the processor ED20. When the image signal processor CM60 is configured as an additional processor separate from the processor ED20, the image processed by the image signal processor CM60 can undergo additional image processing by the processor ED20 and then be displayed on the display device ED60.

[0201] Furthermore, the image signal processor CM60 can receive two focus signals from each pixel in the image sensor 1000, and can generate an autofocus signal based on the difference between the two focus signals using a phase detection autofocus method. The image signal processor CM60 can control the lens assembly CM10, thereby enabling the focus of the lens assembly CM10 to be correctly formed on the surface of the image sensor 1000 based on the autofocus signal.

[0202] The electronic device ED01 may include multiple camera modules ED80 with different attributes or functions. In this case, one of the multiple camera modules ED80 may include a wide-angle camera, and another camera module ED80 may be a telephoto camera. Similarly, one of the multiple camera modules ED80 may include a front-facing camera, and another camera module ED80 may include a rear-facing camera.

[0203] According to the example embodiment, the image sensor 1000 can be applied to Figure 21 The mobile phone or smartphone shown is 1100m. Figure 22 The tablet computer or smart tablet computer 1200 shown is shown. Figure 23 The digital camera or video recorder 1300 shown Figure 24 The laptop computer shown is 1400 or Figure 25The television or smart TV 1500 shown is an example. For example, a smartphone 1100m, a smart tablet computer 1200, a camera or video recorder 1300, a laptop computer 1400, and the television or smart TV 1500 may include multiple high-resolution cameras, each including a high-resolution image sensor. According to an example embodiment, by using a high-resolution camera, depth information of objects in an image can be extracted, image defocus can be adjusted, or objects in an image can be automatically identified.

[0204] Furthermore, according to the example embodiment, the image sensor 1000 can be applied to Figure 26 The smart refrigerator 1600 shown Figure 27 The surveillance (or security) camera 1700 shown Figure 28 The robot 1800 shown Figure 29 Examples include medical cameras such as 1900. For instance, a smart refrigerator 1600 can automatically identify food items in the refrigerator using an image sensor and can notify the user via a smartphone about the presence of specific types of food, the types of food placed or removed, etc. Furthermore, a surveillance camera 1700 can provide ultra-high-resolution images using high sensitivity, enabling users to identify objects or people even in dark environments. A robot 1900 can enter disaster or industrial locations inaccessible to humans, providing high-resolution images to users. A medical camera 1900 can provide high-resolution images for diagnosis or surgery and can dynamically adjust its field of view.

[0205] Furthermore, according to the example embodiment, the image sensor 1000 can be applied to Figure 30 The vehicle 2000 is shown. The vehicle 2000 may include multiple vehicle cameras 2010, 2020, 2030, and 2040 at various locations. Each of the vehicle cameras 2010, 2020, 2030, and 2040 may include an image sensor. The vehicle 2000 can provide the driver with various information about the interior of the vehicle 2000 or the surroundings of the vehicle 2000 by using the multiple vehicle cameras 2010, 2020, 2030, and 2040, and can provide the driver with the information needed for autonomous driving by automatically recognizing objects or people in the images.

[0206] It should be understood that the embodiments described herein should be considered in a descriptive sense and not for limiting purposes only. The description of features or aspects in each embodiment should generally be considered as other similar features or aspects that may be used in other embodiments. Although one or more embodiments have been described with reference to the accompanying drawings, those skilled in the art will understand that various changes in form and detail may be made without departing from the spirit and scope defined by the appended claims.

Claims

1. An image sensor, comprising: A sensor substrate includes a plurality of first pixels configured to sense light of a first wavelength, a plurality of second pixels configured to sense light of a second wavelength different from the first wavelength, a plurality of third pixels configured to sense light of a third wavelength different from both the first and second wavelengths, and a plurality of fourth pixels configured to sense light of the first wavelength; and The dichroic lens array is configured as follows: By changing the phase of the first wavelength of light, the light of the first wavelength is focused onto each of the first pixel and each of the fourth pixel. By changing the phase of the second wavelength light, the second wavelength light is focused onto each of the second pixels, and By changing the phase of the third wavelength light, the third wavelength light is focused onto each of the third pixels. Each of the first pixels includes a first focus signal region configured to generate a first focus signal and a second focus signal region configured to generate a second focus signal. The first focus signal region and the second focus signal region independently generate the first focus signal and the second focus signal, respectively. The first focus signal region and the second focus signal region are arranged to be adjacent to each other in a first direction within the first pixel. Each of the fourth pixels includes a third focus signal region configured to generate a third focus signal and a fourth focus signal region configured to generate a fourth focus signal, wherein the third focus signal region and the fourth focus signal region independently generate the third focus signal and the fourth focus signal, and the third focus signal region and the fourth focus signal region are arranged to be adjacent to each other in the fourth pixel in a second direction different from the first direction.

2. The image sensor according to claim 1, wherein, The sensor substrate includes a plurality of unit patterns, and in each of the unit patterns, the first pixel and the fourth pixel are arranged along a first diagonal direction and the second pixel and the third pixel are arranged along a second diagonal direction different from the first diagonal direction.

3. The image sensor according to claim 1, wherein, Each of the first pixels includes a first photosensitive unit and a second photosensitive unit configured to independently sense light, and the first photosensitive unit and the second photosensitive unit are arranged to divide each of the first pixels in two along the second direction. Wherein, the first focusing signal in the first focusing signal region is the output of the first photosensitive unit, and the second focusing signal in the second focusing signal region is the output of the second photosensitive unit.

4. The image sensor according to claim 3, wherein, Each of the fourth pixels includes a third photosensitive unit and a fourth photosensitive unit configured to independently sense light, and the third photosensitive unit and the fourth photosensitive unit are arranged to divide each of the fourth pixels in two along the first direction. The third focusing signal in the third focusing signal region is the output of the third photosensitive unit, and the fourth focusing signal in the fourth focusing signal region is the output of the fourth photosensitive unit.

5. The image sensor according to claim 1, wherein, Each of the first pixels includes a first photosensitive unit, a second photosensitive unit, a third photosensitive unit, and a fourth photosensitive unit configured to independently sense light, and the first photosensitive unit, the second photosensitive unit, the third photosensitive unit, and the fourth photosensitive unit are respectively arranged in a quadrant formed by dividing the first pixel into a 2×2 array. Wherein, the first focusing signal in the first focusing signal region is the sum of the output from the first photosensitive unit and the output from the third photosensitive unit, and wherein, the second focusing signal in the second focusing signal region is the sum of the output from the second photosensitive unit and the output from the fourth photosensitive unit.

6. The image sensor according to claim 5, wherein, Each of the fourth pixels includes a fifth, a sixth, a seventh, and an eighth photosensitive unit configured to independently sense light, and the fifth, sixth, seventh, and eighth photosensitive units are respectively arranged in a quadrant formed by dividing the fourth pixel into a 2×2 array. The third focusing signal in the third focusing signal region is the sum of the output from the fifth photosensitive unit and the output from the sixth photosensitive unit, and the fourth focusing signal in the fourth focusing signal region is the sum of the output from the seventh photosensitive unit and the output from the eighth photosensitive unit.

7. The image sensor according to claim 1, wherein, The sensor substrate further includes a pixel isolation layer that separates the first pixel, the second pixel, the third pixel, and the fourth pixel from each other, and Each of the first pixels further includes a first unit isolation layer that separates the first focus signal region from the second focus signal region, and each of the fourth pixels further includes a second unit isolation layer that separates the third focus signal region from the fourth focus signal region.

8. The image sensor according to claim 7, wherein, The first unit isolation layer extends along the second direction in the first pixel, and the second unit isolation layer extends along the first direction in the fourth pixel.

9. The image sensor according to claim 8, wherein, In the first pixel and the fourth pixel located on the central portion of the sensor substrate, the first unit isolation layer is configured to pass through the center of the first pixel and the second unit isolation layer is configured to pass through the center of the fourth pixel.

10. The image sensor according to claim 9, wherein, In the first pixel located at the outer edge of the sensor substrate along the first direction, the first unit isolation layer is offset toward the center of the sensor substrate in the first direction, and in the fourth pixel located at the outer edge of the sensor substrate along the second direction, the second unit isolation layer is offset toward the center of the sensor substrate in the second direction.

11. The image sensor according to claim 7, wherein, Each of the first unit isolation layer and the second unit isolation layer includes a first direction isolation layer extending along the first direction and a second direction isolation layer extending along the second direction and intersecting with the first direction isolation layer.

12. The image sensor according to claim 11, wherein, In the first pixel and the fourth pixel located in the central portion of the sensor substrate, the intersection of the first directional isolation layer and the second directional isolation layer is located at the center of the first pixel or the fourth pixel.

13. The image sensor according to claim 12, wherein, In the first and fourth pixels located on the outer edge portion of the sensor substrate along the first direction, the first intersection point between the first direction isolation layer and the second direction isolation layer is offset toward the center portion of the sensor substrate in the first direction, and in the first and fourth pixels located on the outer edge portion of the sensor substrate along the second direction, the second intersection point between the first direction isolation layer and the second direction isolation layer is offset toward the center portion of the sensor substrate in the second direction.

14. The image sensor according to claim 7, wherein, The heights of the first unit isolation layer and the second unit isolation layer are less than the height of the pixel isolation layer.

15. The image sensor according to claim 14, wherein, The height of the first unit isolation layer and the second unit isolation layer is 1 / 4 to 1 / 2 of the height of the pixel isolation layer.

16. The image sensor according to claim 1, wherein, Each of the second pixels includes a fifth focus signal region configured to generate a fifth focus signal and a sixth focus signal region configured to generate a sixth focus signal, wherein the fifth focus signal region and the sixth focus signal region independently generate the fifth focus signal and the sixth focus signal, and the fifth focus signal region and the sixth focus signal region are arranged to be adjacent to each other in a first diagonal direction. Each of the third pixels includes a seventh focus signal region configured to generate a seventh focus signal and an eighth focus signal region configured to generate an eighth focus signal, wherein the seventh focus signal region and the eighth focus signal region independently generate the seventh focus signal and the eighth focus signal, and the seventh focus signal region and the eighth focus signal region are arranged to be adjacent to each other in the first diagonal direction.

17. The image sensor according to claim 16, wherein, Each of the second pixels includes a first photosensitive unit and a second photosensitive unit configured to independently sense light, and the first and second photosensitive units are arranged to divide each of the second pixels in half along the first diagonal direction. The fifth focusing signal in the fifth focusing signal region is the output of the first photosensitive unit, and the sixth focusing signal in the sixth focusing signal region is the output of the second photosensitive unit.

18. The image sensor according to claim 17, wherein, Each of the third pixels includes a third photosensitive unit and a fourth photosensitive unit configured to independently sense light, and the third photosensitive unit and the fourth photosensitive unit are arranged to divide each of the third pixels in two along the first diagonal direction. The seventh focusing signal in the seventh focusing signal region is the output of the third photosensitive unit, and the eighth focusing signal in the eighth focusing signal region is the output of the fourth photosensitive unit.

19. The image sensor according to claim 16, wherein, Each of the second pixels includes a first photosensitive unit, a second photosensitive unit, a third photosensitive unit, and a fourth photosensitive unit configured to independently sense light, and the first, second, third, and fourth photosensitive units are respectively arranged in quadrants formed by dividing the second pixel into a 2×2 array. Wherein, the fifth focusing signal in the fifth focusing signal region is the output of the second photosensitive unit and the sixth focusing signal in the sixth focusing signal region is the output of the third photosensitive unit, or the fifth focusing signal in the fifth focusing signal region is the output of the first photosensitive unit and the sixth focusing signal in the sixth focusing signal region is the output of the fourth photosensitive unit.

20. The image sensor according to claim 19, wherein, Each of the third pixels includes a fifth, a sixth, a seventh, and an eighth photosensitive unit configured to independently sense light, and the fifth, sixth, seventh, and eighth photosensitive units are respectively arranged in quadrants formed by dividing the third pixel into a 2×2 array. Wherein, the seventh focusing signal in the seventh focusing signal region is the output of the sixth photosensitive unit and the eighth focusing signal in the eighth focusing signal region is the output of the seventh photosensitive unit, or the seventh focusing signal in the seventh focusing signal region is the output of the fifth photosensitive unit and the eighth focusing signal in the eighth focusing signal region is the output of the eighth photosensitive unit.

21. The image sensor according to claim 16, wherein, The sensor substrate further includes a pixel isolation layer that separates the first pixel, the second pixel, the third pixel, and the fourth pixel from each other, and Each of the second pixels further includes a third unit isolation layer that separates the fifth focus signal region from the sixth focus signal region, and each of the third pixels further includes a fourth unit isolation layer that separates the seventh focus signal region from the eighth focus signal region.

22. The image sensor according to claim 21, wherein, Each of the third unit isolation layer and the fourth unit isolation layer extends along the first diagonal direction.

23. The image sensor according to claim 22, wherein, In the second and third pixels located on the central portion of the sensor substrate, the third unit isolation layer is configured to pass through the center of the second pixel and the fourth unit isolation layer is configured to pass through the center of the third pixel.

24. The image sensor according to claim 23, wherein, In the second and third pixels located on the outer edge of the sensor substrate along the second diagonal direction intersecting the first diagonal direction, the third unit isolation layer and the fourth unit isolation layer are offset toward the center of the sensor substrate in the second diagonal direction.

25. An electronic device comprising: An image sensor is configured to convert optical images into electrical signals; The processor is configured to control the operation of the image sensor and to store and output signals generated by the image sensor; as well as Lens assembly for supplying light from the object to the image sensor. The image sensor includes: A sensor substrate includes a plurality of first pixels configured to sense light of a first wavelength, a plurality of second pixels configured to sense light of a second wavelength different from the first wavelength, a plurality of third pixels configured to sense light of a third wavelength different from both the first and second wavelengths, and a plurality of fourth pixels configured to sense light of the first wavelength; and The dichroic lens array is configured as follows: By changing the phase of the first wavelength of light, the light of the first wavelength is focused onto each of the first pixel and each of the fourth pixel. By changing the phase of the second wavelength light, the second wavelength light is focused onto each of the second pixels, and By changing the phase of the third wavelength light, the third wavelength light is focused onto each of the third pixels. Each of the first pixels includes a first focus signal region configured to generate a first focus signal and a second focus signal region configured to generate a second focus signal. The first focus signal region and the second focus signal region independently generate the first focus signal and the second focus signal, respectively. The first focus signal region and the second focus signal region are arranged to be adjacent to each other in a first direction within the first pixel. Each of the fourth pixels includes a third focus signal region configured to generate a third focus signal and a fourth focus signal region configured to generate a fourth focus signal, wherein the third focus signal region and the fourth focus signal region independently generate the third focus signal and the fourth focus signal, and the third focus signal region and the fourth focus signal region are arranged to be adjacent to each other in the fourth pixel in a second direction different from the first direction.

26. An image sensor, comprising: A sensor substrate includes a plurality of first pixels configured to sense light of a first wavelength, a plurality of second pixels configured to sense light of a second wavelength different from the first wavelength, a plurality of third pixels configured to sense light of a third wavelength different from both the first and second wavelengths, and a plurality of fourth pixels configured to sense light of the first wavelength; and The dichroic lens array is configured as follows: By changing the phase of the light of the first wavelength, the light of the first wavelength is directed onto each of the first pixel and each of the fourth pixel. By changing the phase of the second wavelength of light, the second wavelength of light is directed onto each of the second pixels, and By changing the phase of the third wavelength of light, the third wavelength of light is directed onto each of the third pixels. Wherein, at least one of the first pixel, the second pixel, the third pixel, or the fourth pixel includes a first focus signal region configured to generate a first focus signal and a second focus signal region configured to generate a second focus signal.

27. The image sensor according to claim 26, wherein, The first focus signal region and the second focus signal region are configured to generate the first focus signal and the second focus signal independently of each other.

28. The image sensor according to claim 26, wherein, In the first pixel, the first focus signal region and the second focus signal region are arranged adjacent to each other in a first direction, and In the fourth pixel, the first focus signal region and the second focus signal region are arranged adjacent to each other in a second direction different from the first direction.

29. The image sensor according to claim 28, wherein: In the second pixel or the third pixel, the first focus signal region and the second focus signal region are arranged adjacent to each other in a third direction different from the first direction and the second direction.

30. The image sensor according to claim 28, wherein, The first direction is perpendicular to the second direction.

31. An image sensor, comprising: The sensor substrate includes a plurality of first pixels configured to sense light of a first wavelength, a plurality of second pixels configured to sense light of a second wavelength different from the first wavelength, a plurality of third pixels configured to sense light of a third wavelength different from both the first and second wavelengths, and a plurality of fourth pixels configured to sense light of the first wavelength. as well as The dichroic lens array includes multiple first pixel corresponding regions corresponding to the multiple first pixels, multiple second pixel corresponding regions corresponding to the multiple second pixels, multiple third pixel corresponding regions corresponding to the multiple third pixels, and multiple fourth pixel corresponding regions corresponding to the multiple fourth pixels. The plurality of first pixel corresponding regions and the plurality of fourth pixel corresponding regions include a plurality of nanopillars, and the arrangement of the plurality of nanopillars in the plurality of first pixel corresponding regions is rotated by 90° relative to the arrangement of the plurality of nanopillars in the plurality of fourth pixel corresponding regions. Each of the first pixels includes a first focus signal region and a second focus signal region that generate focus signals independently of each other, and the first focus signal region and the second focus signal region are arranged to be adjacent to each other in a first direction within the first pixel. Each of the fourth pixels includes a third focus signal region and a fourth focus signal region that generate focus signals independently of each other, and the third focus signal region and the fourth focus signal region are arranged to be adjacent to each other in a second direction perpendicular to the first direction in the fourth pixel.

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