Nozzle inspection method, nozzle inspection apparatus, and substrate processing apparatus including the same

Abstract

The present application provides a nozzle inspection method and a nozzle inspection device capable of accurately detecting defects of nozzles of an inkjet head in a short time. The nozzle inspection method includes: ejecting a plurality of liquid droplets into a first attention area of a substrate by using a first nozzle, so as to form an inspection pattern; and judging whether the first nozzle has defects based on the inspection pattern.

Description

Technical Field

[0001] The present invention relates to a nozzle inspection method, a nozzle inspection apparatus, and a substrate processing apparatus including the nozzle inspection apparatus. Background Technology

[0002] To manufacture display devices such as LCD panels, PDP panels, and LED panels, printing processes (e.g., RGB patterning) are performed on a substrate. These printing processes are carried out using printing equipment equipped with inkjet heads. Summary of the Invention

[0003] Technical problems to be solved

[0004] However, defects can occur when the chemical solution is not properly ejected from the inkjet head nozzles. Therefore, it is necessary to regularly inspect the inkjet head nozzles for abnormalities. However, existing inkjet head inspection methods are time-consuming and lack accuracy in defect detection.

[0005] The technical problem to be solved by the present invention is to provide a nozzle inspection method that can accurately detect defects in inkjet head nozzles in a short time.

[0006] Another technical problem to be solved by the present invention is to provide a nozzle inspection device that can accurately detect defects in inkjet head nozzles in a short time.

[0007] Another technical problem to be solved by the present invention is to provide a substrate processing apparatus that can accurately detect defects in inkjet nozzles in a short time.

[0008] The technical problems of this invention are not limited to those described above. Those skilled in the art can clearly understand other technical problems not mentioned in the following description.

[0009] Solution

[0010] An aspect of the nozzle inspection method of the present invention for solving the above-mentioned technical problems includes: spraying a plurality of droplets into a first region of interest of a substrate using a first nozzle to form an inspection pattern; and determining whether the first nozzle has a defect based on the inspection pattern.

[0011] One aspect of the nozzle inspection apparatus of the present invention for solving the other technical problem mentioned above may include: a stage capable of moving a substrate; an inkjet head module disposed above the stage and including a first nozzle that sprays multiple droplets into a first area of ​​interest on the substrate to form an inspection pattern; a vision module disposed above the stage and capturing images of the inspection pattern; and a control module that determines whether the first nozzle is defective based on the capturing results.

[0012] One aspect of the substrate processing apparatus of the present invention for solving another of the aforementioned technical problems may include: a first stage disposed in a first region; a second stage disposed in a second region; a frame disposed across the first stage and the second stage; an inkjet head module disposed on the frame and capable of spraying droplets in the first region or the second region; and a vision module disposed above the second stage, wherein the second stage enables the inspection substrate to move, the inkjet head module can spray multiple droplets into a first region of interest of the inspection substrate to form an inspection pattern, and the vision module can capture images of the inspection pattern.

[0013] Specific details of other embodiments are included in the detailed description and accompanying drawings. Attached Figure Description

[0014] Figure 1 This is a conceptual diagram illustrating a nozzle inspection device according to some embodiments of the present invention.

[0015] Figure 2 It is a diagram used to illustrate multiple regions of interest on the substrate.

[0016] Figure 3 This is a diagram illustrating a nozzle inspection method according to some embodiments of the present invention.

[0017] Figure 4 and Figure 5 It is used for explanation Figure 3 The first example of the intermediate step diagram of the pattern forming step S1 is shown.

[0018] Figures 6 to 9 It is used for explanation Figure 3 The intermediate step diagram of the second example of the pattern forming step S1 is shown.

[0019] Figure 10 It is used for explanation Figure 3 The flowchart of the third example of the pattern formation step S1 is shown.

[0020] Figure 11 and Figure 12 It is used for explanation Figure 3 The fourth example of the intermediate step diagram of the pattern forming step S1 is shown.

[0021] Figure 13 An inspection pattern formed by the inkjet head module is shown as an example.

[0022] Figure 14 It is used for explanation Figure 3 The flowchart for defect judgment step S2.

[0023] Figures 15 to 17 This is an exemplary droplet shape used to illustrate the defect assessment steps.

[0024] Figure 18 This is a conceptual diagram illustrating a substrate processing apparatus that incorporates a nozzle inspection device according to some embodiments of the present invention. Detailed Implementation

[0025] Preferred embodiments of the present invention will now be described in detail with reference to the accompanying drawings. The advantages and features of the present invention, as well as methods for achieving these advantages and features, will be explained by referring to the following description in conjunction with the accompanying drawings. Figure 1 The invention becomes clear from the detailed description of the embodiments. However, the invention is not limited to the embodiments disclosed below, but can be implemented in many different forms. These embodiments are provided only to make the disclosure of the invention complete and to fully inform those skilled in the art of the scope of the invention, which is defined only by the scope of the claims. Throughout the specification, the same reference numerals refer to the same constituent elements.

[0026] To readily describe the relationship between one element or component and another, as shown in the figure, spatial relative terms such as "below," "below," "lower," "above," and "upper" can be used. It should be understood that, in addition to the orientation shown in the figure, spatial relative terms also include terms indicating the different orientations of the elements during use or operation. For example, when the element shown in the figure is flipped, an element described as "below" or "below" of another element may be located "above" of that element. Therefore, the exemplary term "below" can include both "below" and "above" orientations. An element may also be oriented in another direction, thus allowing the spatial relative terms to be interpreted according to orientation.

[0027] Although the terms "first," "second," etc., are used to describe various elements, constituent elements, and / or parts, these elements, constituent elements, and / or parts are obviously not limited by these terms. These terms are only used to distinguish one element, constituent element, and / or part from another element, constituent element, and / or part. Therefore, the first element, first constituent element, or first part mentioned below can obviously also be a second element, second constituent element, or second part within the technical concept of the present invention.

[0028] Figure 1 This is a conceptual diagram illustrating a nozzle inspection device according to some embodiments of the present invention. Figure 2 It is a diagram used to illustrate multiple regions of interest on the substrate.

[0029] First, refer to Figure 1According to some embodiments of the present invention, the nozzle inspection device 10 includes a stage 120, a first frame 210, an inkjet head module 220, a second frame 310, a vision module 320, a control module 500, etc.

[0030] The stage 120 is a region for supporting the substrate G and moving the substrate G. The method of moving the substrate G on the stage 120 is not limited to a specific manner. For example, the substrate G can be held and moved by a clamp, or it can be moved by a plate that moves in a roller-to-roll manner.

[0031] The stage 120 may extend in the second direction Y, for example, and may move the substrate G along the second direction Y (refer to reference numeral 121). Here, the substrate G may be a substrate for inspection, and the substrate for inspection may be a film for inspection, or a transparent substrate (e.g., a glass substrate) used in a display device.

[0032] The first frame 210 is arranged across the stage 120 above it. The first frame 210 can extend in the first direction X.

[0033] The inkjet head module 220 can be mounted on the first frame 210 and can move along the first frame 210 (refer to reference numeral 221). As shown, the inkjet head module 220 can move in a first direction X, but is not limited thereto. The inkjet head module 220 can include multiple heads for ejecting ink, and each head can include multiple nozzles. The ink can be, for example, QD (Quantum Dot) ink, but is not limited thereto. In the figures, the width of the inkjet head module 220 is shown to be approximately the same as the width of the substrate G, but is not limited thereto.

[0034] Multiple nozzles of the inkjet head module 220 spray multiple droplets onto multiple regions of interest (ROIs) of the substrate G.

[0035] Here, for reference Figure 2On the substrate G, multiple regions of interest (ROIs) can be arranged along a first direction X and a second direction Y. Here, a region of interest (ROI) refers to a virtual region used to distinguish the area where ink is ejected. The ROIs can be determined by calculations performed by the control module 500. As shown in the figure, multiple ROIs can be arranged as multiple lines L1 to L4. ROIs on the upper and lower lines can be staggered. For example, one end E1 of ROI on line L1 and one end E2 of ROI on line L2 can be staggered. One end E2 of ROI on line L2 and one end E3 of ROI on line L3 can be staggered. One end E3 of ROI on line L3 and one end E4 of ROI on line L4 can be staggered.

[0036] This arrangement of multiple regions of interest (ROIs) can have a form corresponding to the arrangement of multiple nozzles in the inkjet head module 220.

[0037] Specifically, the first nozzle of the multiple nozzles in the inkjet head module 220 sprays multiple droplets toward the corresponding region of interest (ROI) to form an inspection pattern (see reference). Figures 3 to 13 ).

[0038] The second frame 310 is arranged across the stage 120 above the stage 120. The second frame 310 can extend in the first direction X.

[0039] The vision module 320 can be mounted on the second rack 310 and can move along the second rack 310 (refer to reference numeral 321). As shown, the vision module 320 can move in the first direction X, but is not limited thereto. The vision module 320 captures images of the formed inspection pattern.

[0040] The control module 500 controls the stage 120, the first frame 210, the inkjet head module 220, the second frame 310, and the vision module 320, etc. Furthermore, the control module 500 can determine whether the first nozzle has defects based on the captured inspection pattern. This will be discussed later using... Figures 14 to 17 Describe the judgment method.

[0041] Although not shown separately, the first rack 210 and the second rack 310 can also move in the second direction Y.

[0042] The following will utilize Figures 3 to 17 This describes a nozzle inspection method according to some embodiments of the present invention.

[0043] Figure 3 This is a diagram illustrating a nozzle inspection method according to some embodiments of the present invention. Figure 4 and Figure 5It is used for explanation Figure 3 The first example of the intermediate step diagram of the pattern forming step S1 is shown.

[0044] First, refer to Figure 3 Multiple droplets are sprayed into the first region of interest (ROI) using the first nozzle 229 to form an inspection pattern (S1).

[0045] like Figure 4 As shown, the substrate G is moved to the position P0 where the droplet is to be sprayed, and then the substrate G is stopped. Next, the first droplet d1 is sprayed into the first area of ​​interest of the stopped substrate G using the first nozzle 229.

[0046] Next, as Figure 5 As shown, the second droplet d2 is sprayed again into the first area of ​​interest of the stopped substrate G using the first nozzle 229.

[0047] In this way, a predetermined number of droplets are sprayed. For example, when the preset number of times is 5, the droplets are sprayed 5 times consecutively.

[0048] Next, based on the formed inspection pattern, it is determined whether the first nozzle 229 has defects (S2).

[0049] Since multiple droplets are sprayed onto a single area of ​​interest to form an inspection pattern, the size of the inspection pattern is increased, thereby improving inspection accuracy. Furthermore, if inspection were to be performed by spraying multiple areas of interest separately with a single nozzle to form an inspection pattern, it could take a considerable amount of time. However, in the nozzle inspection method according to some embodiments of the present invention, since multiple droplets are sprayed onto a single area of ​​interest, the inspection time can be shortened.

[0050] Figures 6 to 9 It is used for explanation Figure 3 The intermediate step diagram of the second example of the pattern forming step S1 is shown.

[0051] refer to Figure 6 While moving substrate G1 from first position P1 to second position P2 (refer to reference numeral 121a), a first droplet d11 is sprayed into the first area of ​​interest using a first nozzle 229.

[0052] Next, refer to Figure 7 While moving substrate G1 from second position P2 to first position P1 (refer to reference numeral 121b), a second droplet d12 is sprayed into the second region of interest using a first nozzle 229.

[0053] Next, refer to Figure 8The substrate G1 is moved again from the first position P1 to the second position P2 (refer to reference numeral 121c in the attached drawing), and a third droplet d21 is sprayed into the first region of interest using the first nozzle 229. Since two droplets (i.e., d11 and d21) are dropped into the first region of interest, the size of the droplets in the first region of interest will increase.

[0054] Next, refer to Figure 9 Then, the substrate G1 is moved again from the second position P2 to the first position P1 (refer to reference numeral 121d in the attached drawing), and a fourth droplet d22 is sprayed into the second region of interest using the first nozzle 229. Since two droplets (i.e., d21 and d22) are dropped into the second region of interest, the size of the droplets in the second region of interest will increase.

[0055] Figure 10 It is used for explanation Figure 3 The flowchart of the third example of the pattern formation step S1 is shown below. For ease of explanation, the main focus will be on the use of... Figures 6 to 9 The characteristics described are different.

[0056] refer to Figure 10 While moving the substrate G1 from the first position P1 to the second position P2, a droplet (first droplet) is sprayed into the first area of ​​interest using the first nozzle (S21).

[0057] Next, the substrate G1 is moved from the second position P2 to the first position P1 (S22). When moving from the second position P2 to the first position P1, the droplet ejection operation is not performed.

[0058] Next, while moving the substrate G1 from the first position P1 to the second position P2, an additional droplet (second droplet) is ejected into the first region of interest using the first nozzle (S23). Due to the ejection of the additional droplet, the droplet size in the first region of interest increases.

[0059] Next, the substrate G1 is moved from the second position P2 to the first position P1 (S24). When moving from the second position P2 to the first position P1, the droplet ejection operation is not performed.

[0060] Figure 11 and Figure 12 It is used for explanation Figure 3 The fourth example of the intermediate step diagram of the pattern forming step S1 is shown.

[0061] refer to Figure 11 While moving substrate G2 from first position P1 to third position P3 (refer to reference numeral 122a), first droplet d11, second droplet d12 and third droplet d13 are sequentially sprayed into first region of interest, second region of interest and third region of interest by first nozzle 229.

[0062] refer to Figure 12 While moving substrate G2 from third position P3 to first position P1 (refer to reference numeral 122b), the fourth droplet d23, the fifth droplet d22, and the sixth droplet are sequentially sprayed into the third region of interest, the second region of interest, and the first region of interest by the first nozzle 229. Figure 12 The image shows the shape after the fifth droplet d22 is ejected and before the sixth droplet is ejected.

[0063] Figure 13 This is an example diagram illustrating an inspection pattern formed by the inkjet head module.

[0064] refer to Figure 13 The first area of ​​interest (ROI1) corresponds to the normal injection situation.

[0065] Regions of Interest (ROI) 2 (second), 4 (fourth), and 5 (fifth) correspond to the situation where multiple droplets are ejected to different locations. That is, they correspond to the situation where multiple droplets are not ejected to the correct locations. This is equivalent to "abnormal dripping" or "the formation of satellite droplets."

[0066] The third area of ​​interest (ROI3) corresponds to the case where no droplets are ejected. This is equivalent to "no ejection".

[0067] The sixth area of ​​concern (ROI6) corresponds to the situation where multiple droplets are sprayed to the correct positions but the predetermined amount is not sprayed. This is equivalent to a "spray quantity defect".

[0068] The following is for reference. Figures 14 to 17 Detailed Explanation Figure 3 Defect judgment step S2.

[0069] Figure 14 It is used for explanation Figure 3 The flowchart for defect judgment step S2.

[0070] refer to Figure 14 First, check whether there are droplets that meet the minimum benchmark (S7) in the first area of ​​interest.

[0071] In step S7, if there is a droplet that meets the minimum benchmark (Yes), proceed to the next step S8. If there is no droplet that meets the minimum benchmark (No), the nozzle that sprayed the droplet is determined to be an abnormal nozzle (or a defective nozzle).

[0072] Specifically, such as Figure 15As shown, within the region of interest, the first droplet A1 and the second droplet A2 can be circular, and the third droplet A3 can be amorphous. The third droplet A3 is judged to have been generated due to microparticles or surface markings, and therefore excluded from the judgment. That is, the third droplet A3 is not judged as a droplet. Therefore, the droplets that are subject to judgment (i.e., the droplets that meet the minimum criteria) are A1 and A2.

[0073] Or, such as Figure 16 As shown, within the area of ​​interest, the fourth droplet A4 is circular and is the droplet to be judged.

[0074] Next, if a droplet that meets the minimum benchmark exists in step S7, check whether there is only one droplet (S8). In step S8, if there is only one droplet (yes), proceed to the next step S9. If it is determined that there are two or more droplets (no), the nozzle that sprays the droplets is determined to be an abnormal nozzle.

[0075] Specifically, due to Figure 15 Since droplets A1 and A2 were identified as two separate droplets, the nozzle spraying these droplets was deemed an abnormal nozzle. Because... Figure 16 The droplet A4 in the sample is determined to be 1, so proceed to the next step S9.

[0076] Next, it is checked whether the droplet meets the multi-drop criterion (S9). In step S9, if the droplet meets the multi-drop criterion (yes), the nozzle is judged as a normal nozzle; if the droplet does not meet the multi-drop criterion (no), the nozzle that sprays the droplet is judged as an abnormal nozzle.

[0077] Multiple drop criteria can be determined based on droplet size (e.g., diameter, radius, circumference). Specifically, it can be determined whether the droplet size corresponds to a value above a first reference value and below a second reference value. That is, when the droplet is smaller than the first reference value, it is considered an insufficient spray (i.e., too little drop) and therefore not meeting the multiple drop criteria. Conversely, when the droplet is larger than the second reference value, it is considered an insufficient spray (i.e., too much drop) and therefore not meeting the multiple drop criteria.

[0078] exist Figure 16 In this case, the diameter of droplet A4 is D1 and can be determined to be smaller than the first reference value. Therefore, the spray... Figure 16 The nozzle of droplet A4 can be identified as an abnormal nozzle.

[0079] On the other hand, besides utilizing Figures 14 to 16 In addition to the methods described, additional methods can also be used.

[0080] For example, within the area of ​​interest, it is possible to form such as Figure 17 The snowman-shaped droplet A5 is shown. The snowman-shaped droplet A5 can be classified as similar to an amorphous droplet (see reference). Figure 15 A3) is thus excluded. However, in the case where it is not excluded, because Figure 17 There is one A5 droplet in the snowman shape, so the spray... Figure 17 The nozzle spraying droplet A5 might also be judged as a normal nozzle (i.e., a judgment error may occur). To improve this problem, a reference circle SC corresponding to the diameter D2 of droplet A5 can be assumed, and the difference between the width of droplet A5 and the diameter of reference circle SC can be calculated (i.e., whether the ratio of the droplet width to the diameter of the reference circle is greater than a reference ratio). For example, since the ratio of the width of the snowman-shaped droplet A5 to the diameter of the reference circle SC is less than a reference ratio (e.g., 90%), the nozzle spraying droplet A5 could be judged as an abnormal nozzle.

[0081] Alternatively, the circumference of droplet A5 can be compared with the circumference of the reference circle SC, and a small difference indicates a normal nozzle, while a large difference indicates an abnormal nozzle. For example, since the difference between the circumference of the snowman-shaped droplet A5 and the circumference of the reference circle SC is above the reference value, it can be determined to be an abnormal nozzle.

[0082] Alternatively, the baseline circumference of a normal droplet under n spray cycles can be determined in advance through experiments. Therefore, it is also possible to determine whether the nozzle is abnormal by measuring the circumference of the droplet being evaluated and comparing it with the aforementioned baseline circumference.

[0083] Figure 18 This is a conceptual diagram illustrating a substrate processing apparatus employing a nozzle inspection device according to some embodiments of the present invention. (The use of...) Figure 1 and Figure 2 The features described are essentially the same.

[0084] refer to Figure 18 The substrate processing apparatus includes a first stage 110, a second stage 120, a first frame 210, a second frame 310, an inkjet head module 220, a vision module 320, a holder 107, etc.

[0085] The first platform 110 is arranged in the first region, and the second platform 120 is arranged in the second region adjacent to the first region.

[0086] A track 108 is arranged along the length of the first stage 110. A clamping member 107 can move along the track 108. Multiple holes 112 can be formed on the first stage 110, and gas can be supplied through the holes 112, thereby suspending the substrate to be manufactured. With the substrate to be manufactured suspended, the clamping member 107 can clamp and move the substrate.

[0087] A first frame 210 is arranged across a first stage 110 and a second stage 120. An inkjet head module 220 may be mounted on the first frame 210 and may move along the first frame 210 to eject droplets in a first region or a second region.

[0088] The substrate G for inspection is placed on the second stage 120, and the inkjet head module 220 sprays multiple droplets into the first area of ​​interest of the substrate G for inspection to form an inspection pattern.

[0089] For example, after moving the substrate G to the position P0 where the droplets will be ejected, the substrate G is stopped. While the substrate G is stopped, the inkjet head module 220 ejects droplets multiple times into the region of interest (ROI) of the substrate.

[0090] Alternatively, while moving the substrate G from the first position P1 to the second position P2, the inkjet head module 220 ejects droplets into the first region of interest, and while moving the substrate G back from the second position P2 to the first position P1, the inkjet head module 220 ejects droplets into the second region of interest. Then, while moving the substrate G from the first position P1 to the second position P2, the inkjet head module 220 additionally ejects droplets into the first region of interest. Then, while moving the substrate G again from the second position P2 to the first position P1, the inkjet head module 220 additionally ejects droplets into the second region of interest.

[0091] Alternatively, while moving the substrate G from the first position P1 to the second position P2, the inkjet head module 220 ejects droplets into the first region of interest, and then moves the substrate G back from the second position P2 to the first position P1. Then, while moving the substrate G from the first position P1 to the second position P2, the inkjet head module 220 additionally ejects droplets into the first region of interest.

[0092] Alternatively, while moving the substrate G from the first position P1 to the third position P3, the inkjet head module 220 sequentially ejects droplets into the first region of interest, the second region of interest, and the third region of interest. Then, while moving the substrate G from the third position P3 to the first position P1, the inkjet head module 220 additionally ejects droplets in the order of the third region of interest, the second region of interest, and the first region of interest.

[0093] The vision module 320 captures images of the formed inspection pattern.

[0094] Control Module 500 (Reference) Figure 1 The control module 500 determines whether the nozzle of the inkjet head module 220, which ejects droplets, has defects based on the captured inspection pattern. As described above, the control module 500 can check whether the droplets in the area of ​​interest meet the multiple droplet criteria. The multiple droplet criteria can be determined based on the size of the droplets (e.g., diameter, radius, circumference).

[0095] The embodiments of the present invention have been described above with reference to the accompanying drawings. However, those skilled in the art will understand that the present invention can be implemented in other specific forms without changing its technical concept or essential features. Therefore, it should be understood that the embodiments described above are exemplary in all respects and not restrictive.

Claims

1. A nozzle inspection method, comprising: Multiple droplets are sprayed into a first area of ​​interest on the substrate using a first nozzle, thereby forming an inspection pattern; as well as Based on the inspection pattern, determine whether the first nozzle has a defect. Forming the inspection pattern includes: While moving the substrate from the first position to the second position, the first droplet is sprayed into the first area of ​​interest using the first nozzle; Move the substrate from the second position to the first position; and While moving the substrate from the first position to the second position, a second droplet is sprayed into the first area of ​​interest using the first nozzle to overlap with the first droplet.

2. A nozzle inspection method, comprising: Multiple droplets are sprayed into a first area of ​​interest on the substrate using a first nozzle, thereby forming an inspection pattern; as well as Based on the inspection pattern, determine whether the first nozzle has a defect. Forming the inspection pattern includes: While the substrate is moved from the first position to the second position, the first nozzle is used to spray the first droplet, the second droplet and the third droplet into the first region of interest, the second region of interest and the third region of interest in sequence. as well as While moving the substrate from the second position to the first position, the first nozzle sequentially sprays a fourth droplet, a fifth droplet, and a sixth droplet into the third region of interest, the second region of interest, and the first region of interest, respectively, so as to overlap with the third droplet, the second droplet, and the first droplet, respectively.

3. The nozzle inspection method according to claim 1 or 2, wherein, Forming the inspection pattern includes: Stop the substrate at the first position; and The plurality of droplets are sprayed into a first area of ​​interest of the stopped substrate using the first nozzle.

4. The nozzle inspection method according to claim 1, wherein, Moving the substrate from the second position to the first position includes: While moving the substrate from the second position to the first position, a third droplet is sprayed into a second region of interest, which is different from the first region of interest, using the first nozzle.

5. The nozzle inspection method according to claim 4, further comprising: After spraying the second droplet into the first area of ​​interest, the substrate is moved from the second position to the first position, while a fourth droplet is sprayed into the second area of ​​interest using the first nozzle to overlap with the third droplet.

6. The nozzle inspection method according to claim 1 or 2, wherein, Determining whether the first nozzle has a defect based on the inspection pattern includes: Determine whether the size of the inspected pattern is above the first reference value.

7. The nozzle inspection method according to claim 1 or 2, wherein, Determining whether the first nozzle has a defect based on the inspection pattern includes: Determine whether there is only one of the inspection patterns within the first area of ​​interest.

8. The nozzle inspection method according to claim 1 or 2, wherein, Determining whether the first nozzle has a defect based on the inspection pattern includes: Determine whether the ratio of the width of the inspection pattern to the diameter of the reference circle is greater than or equal to the second reference value.

9. The nozzle inspection method according to claim 1 or 2, wherein, The substrate is used for inspection.

10. A nozzle inspection device, comprising: The stage enables the substrate to move; An inkjet head module is disposed above the stage and includes a first nozzle that sprays multiple droplets into a first area of ​​interest on the substrate to form an inspection pattern. A vision module is arranged above the stage and captures images of the inspection pattern. as well as The control module determines whether the first nozzle has a defect based on the captured images. The inkjet head module forms the inspection pattern including: As the substrate moves from the first position to the second position, the first nozzle sprays a first droplet into the first area of ​​interest. The substrate moves from the second position to the first position. As the substrate moves from the first position to the second position, the first nozzle sprays a second droplet into the first area of ​​interest to overlap with the first droplet.

11. A nozzle inspection device, comprising: The stage enables the substrate to move; An inkjet head module is disposed above the stage and includes a first nozzle that sprays multiple droplets into a first area of ​​interest on the substrate to form an inspection pattern. A vision module is arranged above the stage and captures images of the inspection pattern. as well as The control module determines whether the first nozzle has a defect based on the captured images. The inkjet head module forms the inspection pattern including: While the substrate moves from the first position to the second position, the first nozzle sequentially sprays a first droplet, a second droplet, and a third droplet into the first region of interest, the second region of interest, and the third region of interest, respectively. as well as While the substrate moves from the second position to the first position, the first nozzle sequentially sprays a fourth droplet, a fifth droplet, and a sixth droplet into the third region of interest, the second region of interest, and the first region of interest, respectively, so as to overlap with the third droplet, the second droplet, and the first droplet, respectively.

12. The nozzle inspection device according to claim 10 or 11, wherein, The stage stops the substrate at a first position, and The first nozzle of the inkjet head module sprays the plurality of droplets into a first area of ​​interest of the stopped substrate.

13. The nozzle inspection device according to claim 10, wherein, While the substrate moves from the second position to the first position, the first nozzle of the inkjet head module ejects a third droplet into a second region of interest, different from the first region of interest. After the second droplet is ejected into the first area of ​​interest, while the substrate moves from the second position to the first position, the first nozzle of the inkjet head module ejects a fourth droplet into the second area of ​​interest to overlap with the third droplet.

14. The nozzle inspection device according to claim 10 or 11, wherein, The control module determines whether the size of the inspection pattern is above the first reference value.

15. The nozzle inspection device according to claim 10 or 11, wherein, The control module determines whether there is only one of the inspection patterns within the first area of ​​interest.

16. A substrate processing apparatus, comprising: The first platform is located in the first area; The second platform is located in the second area; The frame is arranged to span the first platform and the second platform; An inkjet head module is mounted on the frame and is capable of ejecting droplets in the first region or the second region; as well as The vision module is positioned above the second platform. The second stage enables the inspection substrate to be moved. The inkjet head module includes a first nozzle that ejects multiple droplets into a first region of interest on the inspection substrate to form an inspection pattern. The vision module captures an image of the inspection pattern. The inkjet head module forms the inspection pattern including: As the inspection substrate moves from the first position to the second position, the first nozzle sprays a first droplet into the first area of ​​interest. The inspection substrate moves from the second position to the first position. As the inspection substrate moves from the first position to the second position, the first nozzle sprays a second droplet into the first area of ​​interest to overlap with the first droplet.

17. A substrate processing apparatus, comprising: The first platform is located in the first area; The second platform is located in the second area; The frame is arranged to span the first platform and the second platform; An inkjet head module is mounted on the frame and is capable of ejecting droplets in the first region or the second region; as well as The vision module is positioned above the second platform. The second stage enables the inspection substrate to be moved. The inkjet head module includes a first nozzle that ejects multiple droplets into a first region of interest on the inspection substrate to form an inspection pattern. The vision module captures an image of the inspection pattern. The inkjet head module forms the inspection pattern including: While the inspection substrate moves from the first position to the second position, the first nozzle sequentially sprays a first droplet, a second droplet, and a third droplet into the first region of interest, the second region of interest, and the third region of interest, respectively; and While the inspection substrate moves from the second position to the first position, the first nozzle sequentially sprays a fourth droplet, a fifth droplet, and a sixth droplet into the third region of interest, the second region of interest, and the first region of interest, respectively, so as to overlap with the third droplet, the second droplet, and the first droplet, respectively.

18. The substrate processing apparatus according to claim 16 or 17, wherein, The second stage stops the inspection substrate at the first position, and The first nozzle of the inkjet head module sprays the plurality of droplets into the first area of ​​interest of the stopped inspection substrate.

19. The substrate processing apparatus according to claim 16, wherein, While the inspection substrate moves from the second position to the first position, the first nozzle of the inkjet head module ejects a third droplet into a second region of interest, different from the first region of interest. After the second droplet is sprayed into the first area of ​​interest, while the inspection substrate moves from the second position to the first position, the first nozzle of the inkjet head module sprays a fourth droplet into the second area of ​​interest to overlap with the third droplet.

20. The substrate processing apparatus according to claim 16 or 17, further comprising: The control module determines whether the size of the inspected pattern is above the first reference value.

21. The substrate processing apparatus according to claim 16 or 17, further comprising: The control module determines whether there is only one of the inspection patterns within the first area of ​​interest.

Images