An automatic switch barrel cover filling device and method for abrasive liquid

Abstract

The present invention discloses an automatic barrel cover opening and closing filling device and method for grinding fluid, including a vision camera positioning system, a mechanical barrel cover opening and closing assembly, a nitrogen filling system, and a grinding fluid filling system, which are successively and separately installed at the Z-axis end of a three-axis reciprocating mechanism. The three-axis reciprocating mechanism is controlled by a PLC, and a tray and a barrel body are provided below the three-axis reciprocating mechanism. The present invention can quickly position the barrel cover, quickly align and unscrew the barrel cover; can effectively purge the filling barrel to protect the filling fluid and ensure the filling quality; can ensure the realization of the functions of opening and closing the cover, and is convenient and fast; can label the weight of each barrel, facilitate recording the liquid injection amount each time, and is conducive to cost statistics.

Description

Technical Field

[0001] The present invention relates to an automatic operating device, belonging to the technical field of semiconductor polishing liquid filling, and particularly relates to a polishing liquid automatic barrel cover opening and filling device and method. Background Art

[0002] With the development of technology, filling technology has increasingly entered people's lives. Traditional filling technology has problems such as inaccurate positioning and low efficiency. At the same time, when filling, the filling barrel is not purged and protected, which affects the filling quality. Summary of the Invention

[0003] The present invention provides a polishing liquid automatic barrel cover opening and filling device and method. By introducing a vision camera positioning system into the filling technology, it can greatly improve the positioning efficiency in a small space and achieve rapid filling. At the same time, before filling, nitrogen purging is carried out, which can effectively protect the filling liquid and ensure the filling quality.

[0004] To achieve the above object, the present invention is implemented by adopting the following technical solutions:

[0005] A polishing liquid automatic barrel cover opening and filling device includes a vision camera positioning system, a mechanical barrel cover opening and closing component, a nitrogen filling system, and a polishing liquid filling system, which are sequentially and separately installed at the Z-axis end of a three-axis reciprocating mechanism. The three-axis reciprocating mechanism is controlled by a PLC. A tray and a barrel body are provided below the three-axis reciprocating mechanism.

[0006] As a preference of the above solution, it further includes a device steel structure for installing each system and component. An efficient filtration system is provided at the top of the device steel structure, a lifting door component is provided at the front of the device steel structure, and a weighing component is provided at the bottom of the device steel structure.

[0007] As a preference of the above solution, the three-axis reciprocating mechanism includes an X-axis transmission mechanism, a Y-axis transmission mechanism, a Z-axis transmission mechanism, and a wire harness installed in sequence. The transmission mechanism includes a module screw shaft, a screw slide is provided on the module screw shaft, and one end of the module screw shaft is connected to a motor.

[0008] As a preference of the above solution, the vision camera positioning system includes a camera, which is fixedly connected to the Z-axis of the three-axis reciprocating mechanism through a camera fixing sheet metal, and a vision camera field of view is connected to the lower end of the camera.

[0009] Preferably, in the above solution, the mechanical switch barrel cover assembly includes a switch barrel cover servo reduction motor, which is fixedly connected to the Z-axis of the three-axis reciprocating mechanism through a reduction motor fixed vertical plate; the output shaft of the switch barrel cover servo reduction motor is connected to the switch cover driving shaft through a switch cover driving shaft coupling, and the end of the switch cover driving shaft is connected to the capping member through a capping member rod sleeve and a capping member rod; the lower end of the outer shell of the switch barrel cover servo reduction motor is fixedly installed with a barrel cover limit sleeve through a barrel cover limit sleeve mounting plate, an elastic glass bead is provided on the inner wall of the barrel cover limit sleeve, and adjacent two barrel cover limit sleeve mounting plates are connected through a barrel cover limit sleeve sliding rod and a barrel cover limit sleeve sliding rod fixing member, and a barrel cover limit sleeve compression spring is wound around the barrel cover limit sleeve sliding rod; a mechanical switch barrel cover assembly housing is provided outside the barrel cover limit sleeve mounting plate.

[0010] Preferably, in the above solution, the nitrogen filling system includes a limit ring, which is fixedly connected to the Z-axis of the three-axis reciprocating mechanism through a buffer fixing plate, and the lower end of the limit ring is connected to a mounting plate through a buffer column, and a hose connector is provided on the mounting plate.

[0011] Preferably, in the above solution, the grinding fluid filling system includes a DC motor, which is connected to a screw lead screw through a coupling, and a PFA straight pipe, an induction piece and a sensor are installed on the screw lead screw.

[0012] Preferably, in the above solution, the high-efficiency filtration system includes a high-efficiency fan and a filter.

[0013] An automatic switch barrel cover filling method for grinding fluid includes the following steps:

[0014] S1. Position the plastic barrel cover pre-arranged manually through a vision camera positioning system fixed on the three-axis reciprocating mechanism.

[0015] S2. The vision camera positioning system feeds back the position information of the barrel cover to the PLC, and the PLC drives the three-axis reciprocating mechanism to carry the mechanical switch barrel cover assembly to align with and screw up the barrel cover, so that the barrel cover is completely separated from the thread and the barrel cover is lifted.

[0016] S3. After the barrel cover is separated, the three-axis reciprocating mechanism moves in one direction to align the nitrogen filling system with the barrel mouth, and fills nitrogen into the barrel for a certain period of time.

[0017] S4. After the nitrogen filling is completed, the three-axis reciprocating mechanism moves a certain distance again, the grinding fluid filling system aligns with the barrel mouth, the liquid injection pipe extends into the barrel for a certain distance, and rises at a constant speed during the liquid injection process.

[0018] S5. After the liquid injection is completed, the grinding fluid filling system leaves the barrel mouth, and the mechanical switch barrel cover assembly returns to the barrel mouth to complete the capping action.

[0019] As a preference of the above solution, when the switch acts, the PLC drives the three-axis reciprocating mechanism to carry the mechanical switch barrel cover assembly to align with the barrel cover and descend as a whole until the barrel cover limiting sleeve completely covers the barrel cover. The switch barrel cover servo reduction motor rotates to drive the switch cover driving shaft connected through the switch cover driving shaft coupling. The upper end of the cap screwing part rod sleeve is connected to the bottom of the switch cover driving shaft, and a compressible cap screwing part rod is installed inside. The end of the cap screwing part rod is provided with a cap screwing part. The cap screwing part rotates 360 degrees in the initial state and will insert into the rectangular groove of the barrel cover during rotation, and then the barrel cover is screwed up. After the barrel cover is screwed up, its edge will press over the elastic glass beads arranged on the inner wall of the barrel cover limiting sleeve to realize the function of opening the cover; when closing the cover, the barrel cover stuck in the barrel cover limiting sleeve aligns with the thread of the barrel mouth, and the cap screwing part rotates in reverse to realize the function of closing the cover.

[0020] Due to the above structure, the beneficial effects of the present invention are as follows:

[0021] 1. The three-axis reciprocating mechanism is equipped with a vision camera positioning system, which can quickly position the barrel cover, and its position information is fed back to the PLC. The PLC drives the three-axis reciprocating mechanism to carry the mechanical switch barrel cover assembly to align with and screw up the barrel cover.

[0022] 2. The filling device is equipped with a nitrogen filling system, which can effectively purge the filling barrel, protect the filling liquid, and ensure the filling quality.

[0023] 3. Elastic glass beads are arranged on the inner wall of the barrel cover limiting sleeve. After the barrel cover is screwed up, its edge will press over the arranged elastic glass beads to ensure the realization of the function of opening the cover. At the same time, when closing the cover, the barrel cover stuck in the barrel cover limiting sleeve aligns with the thread of the barrel mouth, and the cover opening part rotates in reverse to realize the function of closing the cover, which is convenient and fast.

[0024] 4. A weighing unit is arranged at the bottom of the device steel structure, which can label the weight of each barrel, facilitate the recording of the liquid injection amount each time, and is conducive to cost statistics. Description of the Drawings

[0025] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following will briefly introduce the drawings required for description in the embodiments.

[0026] Figure 1 It is the overall structure schematic diagram of the automatic switch barrel cover filling device for grinding fluid of the present invention;

[0027] Figure 2 It is the partial structure schematic diagram of the present invention;

[0028] Figure 3 It is the structure schematic diagram of the mechanical switch barrel cover assembly of the present invention;

[0029] Figure 4 It is the working flow chart of the automatic switch barrel cover filling method for grinding fluid of the present invention;

[0030] In the figure, 1 - device steel structure; 2 - three - axis reciprocating mechanism; 201 - X - axis drive mechanism; 202 - Y - axis drive mechanism; 203 - Z - axis drive mechanism; 204 - wire harness; 3 - vision camera positioning system; 301 - camera fixing sheet metal; 302 - camera; 303 - vision camera field of view; 4 - mechanical switch barrel cover assembly; 401 - switch barrel cover servo reduction motor; 402 - reduction motor fixing vertical plate; 403 - switch cover drive shaft coupling; 404 - switch cover drive shaft; 405 - mechanical switch barrel cover assembly housing; 406 - barrel cover limit sleeve sliding rod; 407 - barrel cover limit sleeve pressure spring; 408 - barrel cover limit sleeve sliding rod fixing part; 409 - cap - screwing part rod sleeve; 410 - cap - screwing part rod; 411 - barrel cover limit sleeve; 412 - cap - screwing part; 5 - nitrogen filling system; 501 - limit ring; 502 - hose joint; 503 - buffer column; 504 - mounting plate; 6 - grinding fluid filling system; 601 - PFA straight pipe; 602 - coupling; 603 - DC motor; 604 - induction piece; 605 - sensor; 7 - high - efficiency filtration system; 8 - lifting door assembly; 9 - weighing assembly; 10 - barrel cover. Specific embodiments

[0031] Next, the technical solutions of the present invention will be clearly and completely described in conjunction with the accompanying drawings of the present invention. Based on the embodiments in the present invention, all other embodiments obtained by those of ordinary skill in the art without making creative efforts belong to the scope of protection of the present invention.

[0032] As Figures 1 to 3 shown, this embodiment provides an automatic grinding fluid switch - barrel - cover filling device, including a vision camera positioning system 3, a mechanical switch barrel cover assembly 4, a nitrogen filling system 5, and a grinding fluid filling system 6, which are successively and separately installed at the Z - axis end of the three - axis reciprocating mechanism 2. The three - axis reciprocating mechanism 2 is controlled by a PLC, and a tray and a barrel body are provided below the three - axis reciprocating mechanism 2.

[0033] In this embodiment, it further includes a device steel structure 1 for installing each system and component. A high - efficiency filtration system 7 is provided at the top of the device steel structure 1, a lifting door assembly 8 is provided at the front of the device steel structure 1, and a weighing assembly 9 is provided at the bottom of the device steel structure 1.

[0034] In this embodiment, the three - axis reciprocating mechanism 2 includes an X - axis drive mechanism 201, a Y - axis drive mechanism 202, a Z - axis drive mechanism 203, and a wire harness 204 that are successively installed. The drive mechanism includes a module screw shaft, a screw slide is provided on the module screw shaft, and one end of the module screw shaft is connected to a motor.

[0035] In this embodiment, the visual camera positioning system 3 includes a camera 302, which is fixedly connected to the Z-axis of the three-axis reciprocating mechanism 2 through a camera fixing sheet metal 301. A visual camera field of view 303 is connected to the lower end of the camera 302.

[0036] In this embodiment, the mechanical switch barrel cover assembly 4 includes a switch barrel cover servo reduction motor 401, which is fixedly connected to the Z-axis of the three-axis reciprocating mechanism 2 through a reduction motor fixing vertical plate 402. The output shaft of the switch barrel cover servo reduction motor 401 is connected to a switch cover driving shaft 404 through a switch cover driving shaft coupling 403. The end of the switch cover driving shaft 404 is connected to a capping member 412 through a capping member rod sleeve 409 and a capping member rod 410. The lower end of the outer shell of the switch barrel cover servo reduction motor 401 is fixedly installed with a barrel cover limiting sleeve 411 through a barrel cover limiting sleeve mounting plate. Elastic beads are provided on the inner wall of the barrel cover limiting sleeve 411. The adjacent two barrel cover limiting sleeve mounting plates are connected through a barrel cover limiting sleeve sliding rod 406 and a barrel cover limiting sleeve sliding rod fixing member 408. A barrel cover limiting sleeve compression spring 407 is wound around the barrel cover limiting sleeve sliding rod 406. A mechanical switch barrel cover assembly housing 405 is provided outside the barrel cover limiting sleeve mounting plate.

[0037] In this embodiment, the nitrogen filling system 5 includes a limiting ring 501, which is fixedly connected to the Z-axis of the three-axis reciprocating mechanism 2 through a buffer fixing plate. The lower end of the limiting ring 501 is connected to a mounting plate 504 through a buffer column 503. A hose joint 502 is provided on the mounting plate 504.

[0038] In this embodiment, the grinding fluid filling system 6 includes a DC motor 603, which is connected to a screw lead screw through a coupling 602. A PFA straight pipe 601, an induction sheet 604, and a sensor 605 are installed on the screw lead screw.

[0039] In this embodiment, the high-efficiency filtration system 7 includes a high-efficiency fan and a filter.

[0040] As Figure 4 shown, this embodiment also provides a method for automatically opening and closing the barrel cover of grinding fluid, including the following steps:

[0041] S1. Position the plastic barrel cover previously arranged manually through the visual camera positioning system 3 fixed on the three-axis reciprocating mechanism 2.

[0042] S2. The visual camera positioning system 3 feeds back the position information of the barrel cover to the PLC. The PLC drives the three-axis reciprocating mechanism 2 to carry the mechanical switch barrel cover assembly 4 to align with and unscrew the barrel cover, so that the barrel cover is completely separated from the thread and the barrel cover is lifted.

[0043] S3. After the barrel cover is separated, the three-axis reciprocating mechanism 2 moves in one direction to align the nitrogen filling system 5 with the barrel mouth, and nitrogen is continuously filled into the barrel for a certain period of time.

[0044] S4, after the nitrogen filling is completed, the three-axis reciprocating mechanism 2 moves a certain distance again, the grinding liquid filling system 6 is aligned with the barrel mouth, the injection pipe penetrates a certain distance into the barrel, and rises at a uniform speed during the injection process;

[0045] S5. After the liquid injection is completed, the grinding liquid filling system 6 leaves the barrel mouth, and the mechanical switch barrel cover assembly 4 returns to the barrel mouth to complete the cover closing action.

[0046] In this embodiment, when the switch is in action, the PLC drives the three-axis reciprocating mechanism 2 to carry the mechanical switch barrel cover assembly 4 to align with the barrel cover and descend as a whole until the barrel cover limit sleeve 411 completely covers the barrel cover, and the switch barrel cover servo reduction motor 401 rotates to drive the switch cover driving shaft 404 connected through the switch cover driving shaft coupling 403, and the upper end of the cover screw rod sleeve 409 is connected to the bottom of the switch cover driving shaft 404, and a compressible cover screw rod 410 is installed inside, and a cover screw rod 410 is provided at the end of the cover screw rod 410. The cover screw 412 rotates 360 degrees in the initial state and is inserted into the rectangular groove of the barrel cover during the rotation process, and then the barrel cover is rotated up. After the barrel cover is rotated up, its edge will press over the elastic glass bead set on the inner wall of the barrel cover limit sleeve 411 to realize the cover opening function; when closing the cover, the barrel cover stuck in the barrel cover limit sleeve 411 is aligned with the thread of the barrel mouth, and the cover screw 412 is reversed to realize the cover closing action.

[0047] In this embodiment, the three-axis reciprocating mechanism is provided with a visual camera positioning system, which can quickly locate the barrel cover, and its position information is fed back to the PLC. The PLC drives the three-axis reciprocating mechanism to carry the mechanical switch barrel cover assembly to align and screw up the barrel cover. The filling device has a nitrogen filling system, which can effectively purge the filling barrel, protect the filling liquid, and ensure the filling quality. Elastic glass beads are arranged on the inner wall of the barrel cover limit sleeve. After the barrel cover is screwed up, its edge will press over the set elastic glass beads to ensure the opening function. At the same time, when closing the cover, the barrel cover stuck in the barrel cover limit sleeve is aligned with the thread of the barrel mouth, and the cover opening piece can be reversed to realize the closing action, which is convenient and quick. A weighing unit is arranged at the bottom of the steel structure of the device, and the weight of each barrel can be marked, which is convenient for recording the amount of liquid used each time and is conducive to cost statistics.

[0048] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A grinding liquid automatic opening and closing barrel cover filling device, Features: The invention comprises a visual camera positioning system (3), a mechanical switch barrel cover assembly (4), a nitrogen filling system (5) and a grinding liquid filling system (6), which are respectively installed at the Z-axis end of a three-axis reciprocating mechanism (2). The three-axis reciprocating mechanism (2) is controlled by a PLC, and a tray and a barrel body are provided below the three-axis reciprocating mechanism (2). The mechanical switch barrel cover assembly (4) comprises a switch barrel cover servo reduction motor (401), which is fixedly connected to the Z-axis of the three-axis reciprocating mechanism (2) via a reduction motor fixing vertical plate (402). The output shaft of the switch barrel cover servo reduction motor (401) is connected to the switch cover driving shaft (404) via a switch cover driving shaft coupling (403), and the end of the switch cover driving shaft (404) is connected to the cover screwing member (412) via a cover screwing member rod sleeve (409) and a cover screwing member rod (410). The lower end of the housing of the servo reduction motor (401) for switching the barrel cover is fixedly mounted with a barrel cover limit sleeve (411) through a barrel cover limit sleeve mounting plate, and an elastic glass bead is arranged on the inner wall of the barrel cover limit sleeve (411). Two adjacent barrel cover limit sleeve mounting plates are connected by a barrel cover limit sleeve sliding rod (406) and a barrel cover limit sleeve sliding rod fixing member (408), and a barrel cover limit sleeve pressure spring (407) is wound around the barrel cover limit sleeve sliding rod (406); a mechanical barrel cover switch assembly housing (405) is arranged on the outer side of the barrel cover limit sleeve mounting plate; during the opening process, the cover screwing member (412) rotates 360 degrees in the initial state, and is inserted into the rectangular groove of the barrel cover during the rotation process, and then the barrel cover is rotated up, and after the barrel cover is rotated up, its edge will press over the elastic glass bead arranged on the inner wall of the barrel cover limit sleeve (411).

2. A grinding liquid automatic opening and closing barrel cover filling device according to claim 1, Features: It also includes a device steel structure (1) for installing various systems and components. The top of the device steel structure (1) is provided with a high-efficiency filtering system (7), the front of the device steel structure (1) is provided with a lifting door assembly (8), and the bottom of the device steel structure (1) is provided with a weighing assembly (9).

3. A grinding liquid automatic opening and closing barrel cover filling device according to claim 1, Features: The three-axis reciprocating mechanism (2) comprises an X-axis transmission mechanism (201), a Y-axis transmission mechanism (202), a Z-axis transmission mechanism (203) and a wiring harness (204) which are installed in sequence, the transmission mechanism comprising a module screw shaft, a screw slide is provided on the module screw shaft, and one end of the module screw shaft is connected to a motor.

4. A grinding liquid automatic opening and closing barrel cover filling device according to claim 1, Features: The visual camera positioning system (3) comprises a camera (302) which is fixedly connected to the Z axis of the three-axis reciprocating mechanism (2) via a camera fixing sheet metal (301), and the lower end of the camera (302) is connected to a visual camera field of view (303).

5. A grinding liquid automatic opening and closing barrel cover filling device according to claim 1, Features: The nitrogen filling system (5) includes a limit ring (501), which is fixedly connected to the Z-axis of the three-axis reciprocating mechanism (2) through a buffer fixing plate. The lower end of the limit ring (501) is connected to a mounting plate (504) through a buffer column (503), and a hose joint (502) is provided on the mounting plate (504).

6. An automatic switch barrel cover filling device for grinding fluid according to claim 1, characterized in that: The grinding fluid filling system (6) includes a DC motor (603), which is connected to a screw lead screw through a coupling (602). A PFA straight pipe (601), an induction sheet (604), and a sensor (605) are installed on the screw lead screw.

7. An automatic switch barrel cover filling device for grinding fluid according to claim 2, characterized in that: The high-efficiency filtration system (7) includes a high-efficiency fan and a filter.

8. An automatic switch barrel cover filling method for grinding fluid, characterized in that: using an automatic switch barrel cover filling device for grinding fluid as described in any one of claims 1 to 7, and including the following steps: S1. Through the vision camera positioning system (3) fixed on the three-axis reciprocating mechanism (2), position the plastic barrel cover pre-arranged by the operator; S2. The vision camera positioning system (3) feeds back the position information of the barrel cover to the PLC. The PLC drives the three-axis reciprocating mechanism (2) to carry the mechanical switch barrel cover assembly (4) to align with and unscrew the barrel cover, so that the barrel cover is completely disengaged from the thread and lifted up; S3. After the barrel cover is disengaged, the three-axis reciprocating mechanism (2) moves in one direction to align the nitrogen filling system (5) with the barrel opening, and fills nitrogen into the barrel for a certain period of time; S4. After the nitrogen filling is completed, the three-axis reciprocating mechanism (2) moves a certain distance again, the grinding fluid filling system (6) aligns with the barrel opening, and the liquid injection pipe extends into the barrel for a certain distance and rises at a constant speed during the liquid injection process; S5. After the liquid injection is completed, the grinding fluid filling system (6) leaves the barrel opening, and the mechanical switch barrel cover assembly (4) returns to the barrel opening to complete the closing cover action.

9. An automatic switch barrel cover filling method for grinding fluid according to claim 8, characterized in that: During the switch action, the PLC drives the three-axis reciprocating mechanism (2) to carry the mechanical switch barrel cover assembly (4) to align with the barrel cover and descend as a whole until the barrel cover limit sleeve (411) completely covers the barrel cover. The switch barrel cover servo reduction motor (401) rotates to drive the switch cover driving shaft (404) connected through the switch cover driving shaft coupling (403). The upper end of the cap screwing part rod sleeve (409) is connected to the bottom of the switch cover driving shaft (404), and a compressible cap screwing part rod (410) is installed inside. The end of the cap screwing part rod (410) is provided with a cap screwing part (412). The cap screwing part (412) rotates 360 degrees in the initial state and will insert into the rectangular groove of the barrel cover during the rotation process, and then unscrew the barrel cover. After the barrel cover is unscrewed, its edge will press over the elastic glass beads arranged on the inner wall of the barrel cover limit sleeve (411) to realize the opening function; during the closing action, the barrel cover stuck in the barrel cover limit sleeve (411) aligns with the thread of the barrel opening, and the cap screwing part (412) rotates in the reverse direction to realize the closing action.

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