Edge scanning device and metal contamination detection equipment

Abstract

The present invention discloses an edge scanning device and a metal contamination detection device, wherein the edge scanning device comprises: a rotating component, comprising a bearing part, the bearing part is used to bear the sample to be tested, and the rotating component can drive the sample to be tested to rotate; a scanning liquid supply and recovery component, comprising a nozzle, used to spit out and recover scanning liquid droplets; a receiving component, comprising a supporting arm, the scanning liquid droplets are contained between the nozzle and the supporting arm, and can wrap the edge of the sample to be tested. The above-mentioned edge scanning device can scan and sample the edge of the sample to be tested, so as to provide conditions for sampling and detecting the edge of the sample to be tested.

Description

Technical Field

[0001] The invention relates to the technical field of sampling scanning, and in particular to an edge scanning device and metal contamination detection equipment. Background Art

[0002] The preparation of high-performance, low-power chips requires the introduction of a large number of new chemical elements, and the introduction of different chemical elements will increase the difficulty of metal contamination control during chip manufacturing. At present, the most common metal contamination detection equipment is the gas phase decomposition metal contamination collection system and the inductively coupled plasma mass spectrometer, but these detection equipment mainly focuses on the central area of ​​the wafer to be tested. Summary of the invention

[0003] The object of the present invention is to provide an edge scanning device and a metal contamination detection device, wherein the edge scanning device can scan and sample the edge portion of a sample to be tested, thereby providing conditions for sampling and detecting the edge portion of the sample to be tested.

[0004] In order to solve the above technical problems, the present invention provides an edge scanning device, comprising: a rotating component, including a bearing part, the bearing part is used to carry the sample to be tested, and the rotating component can drive the sample to be tested to rotate; a scanning liquid supply and recovery component, including a nozzle, used to spit out and recover scanning droplets; a receiving component, including a supporting arm, the scanning droplets are accommodated between the nozzle and the supporting arm, and can wrap the edge of the sample to be tested.

[0005] During the specific operation, first, the sample to be tested can be placed on the carrying part; then, the scanning liquid supply and recovery component can spit out scanning liquid droplets through the nozzle, and the upper end of the scanning liquid droplets is still connected to the nozzle, that is, the scanning liquid droplets are not separated from the nozzle, and the lower end of the scanning liquid droplets can be supported on the support arm to avoid the dripping of the scanning liquid droplets. At the same time, the scanning liquid droplets can also wrap the edge of the sample to be tested; then, the rotating component can be started to drive the sample to be tested to rotate at least one circle, so that the scanning liquid droplets can sample various positions of the edge of the sample to be tested; then, the scanning liquid supply and recovery component can recover the scanning liquid droplets through the nozzle, that is, the scanning sampling of the edge of the sample to be tested can be completed, so as to provide conditions for the sampling and detection of the edge of the sample to be tested.

[0006] In other words, the edge scanning device provided by the present invention can fill the gap in the prior art, making it possible to sample and detect the edge of the sample to be tested, thereby helping to improve the sampling and detection range of the sample to be tested.

[0007] Optionally, a cleaning component is also included for cleaning the support arm.

[0008] Optionally, the support arm has a supporting station and a cleaning station, and the receiving component is further configured with a driving mechanism for driving the support arm to switch between the supporting station and the cleaning station.

[0009] Optionally, the cleaning component includes a shell, a cleaning chamber is formed in the shell, and the shell wall is also provided with a first inlet and outlet connected to the cleaning chamber, and the support arm can enter and exit the cleaning chamber through the first inlet and outlet; the cleaning component is also configured with a cleaning member for cleaning the support arm in the cleaning chamber.

[0010] Optionally, the cleaning component includes a liquid washing portion, and the lower end portion of the shell is further provided with a first liquid discharge port communicated with the cleaning chamber; and / or, the cleaning component includes an air washing portion.

[0011] Optionally, the receiving component is further provided with a height-adjusting member for adjusting the installation height of the support arm.

[0012] Optionally, the bearing portion is a negative pressure suction cup.

[0013] Optionally, it also includes a platform plate, and the rotating component and the receiving component are both installed on the platform plate; a first annular groove body is provided on the upper surface of the platform plate, and the first groove body encloses a set area on the upper surface of the platform plate, and the orthographic projection of the sample to be tested on the upper surface of the platform plate is located in the set area, and the platform plate is also provided with a second liquid discharge port connected to the first groove body.

[0014] Optionally, a second annular groove body is further provided on the upper surface of the platform plate, the second groove body is located in the set area, and the second groove body is arranged around the rotating component, and a first connecting groove is provided between the second groove body and the first groove body.

[0015] Optionally, the upper surface of the platform plate between the second trough body and the first trough body is gradually inclined downward from the direction away from the second trough body.

[0016] Optionally, a cleaning component is further included for cleaning the support arm, and the cleaning component is also installed on the platform plate; a third annular groove body is also provided on the upper surface of the platform plate, and the third groove body is arranged around the cleaning component, and the third groove body is connected with the first groove body through a second connecting groove.

[0017] Optionally, at least the portions of the rotating component, the scanning liquid supply and recovery component, the receiving component and the cleaning component located above the upper surface of the platform plate are made of corrosion-resistant material, or at least the portions of the rotating component, the scanning liquid supply and recovery component, the receiving component and the cleaning component located above the upper surface of the platform plate are coated with a corrosion-resistant coating; and / or the platform plate is made of corrosion-resistant material, or at least the upper surface of the platform plate is coated with a corrosion-resistant coating.

[0018] Optionally, a cover is further included, wherein the cover is mounted on the platform plate and encloses the platform plate to form a receiving cavity, and the cover is provided with a second inlet and outlet, and the sample to be tested can enter and exit the receiving cavity through the second inlet and outlet.

[0019] Optionally, a ventilation component is further included for ventilating the accommodating cavity; and / or the cover is made of a corrosion-resistant material, or the cover is coated with a corrosion-resistant coating.

[0020] Optionally, the support arm is made of antistatic material; or, the support arm is coated with an antistatic coating.

[0021] The present invention also provides a metal contamination detection device, comprising the above-mentioned edge scanning device.

[0022] Since the above-mentioned edge scanning device has the above-mentioned technical effects, the metal contamination detection equipment having the edge scanning device should also have similar technical effects, so it will not be described in detail here. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 It is a schematic structural diagram of the edge scanning device provided by the present invention when scanning the outer edge of the sample to be tested;

[0024] Figure 2 for Figure 1 A top view of

[0025] Figure 3 for Figure 1 Schematic diagram of the structure from another perspective;

[0026] Figure 4 This is a schematic diagram of the structure of the edge scanning device provided by the present invention when cleaning the support arm;

[0027] Figure 5 It is a structural schematic diagram of the receiving component;

[0028] Figure 6 It is a schematic diagram of the structure of the cleaning component;

[0029] Figure 7 for Figure 6sectional view of

[0030] Figure 8 It is a structural schematic diagram of the platform plate;

[0031] Fig. 9 for Figure 8 Cross-sectional view of .

[0032] Figure 1-Figure 9 The reference numerals in the figures are described as follows:

[0033] 1 rotating component, 11 bearing part;

[0034] 2 nozzles;

[0035] 3 receiving component, 31 supporting arm, 311 concave portion, 32 transfer arm, 33 rotating shaft, 34 adjusting screw, 35 fixing plate, 351 fixing screw, 352 positioning pin, 353 bearing, 36 motor bracket, 37 motor, 38 coupling, 39 connecting key;

[0036] 4 cleaning component, 41 shell, 411 upper shell, 412 lower shell, 413 cleaning chamber, 414 first inlet and outlet, 415 first liquid discharge port, 42 first liquid discharge head, 43 liquid supply head, 44 air supply head;

[0037] 5 platform plate, 51 first tank body, 52 second liquid discharge port, 53 second liquid discharge head, 54 second tank body, 55 first connecting groove, 56 third tank body, 57 second connecting groove, 5a setting area, 5b cone portion;

[0038] 6 cover, 61 second inlet and outlet, 62 third inlet and outlet, 63 accommodating chamber;

[0039] 7. Air extraction unit;

[0040] A: Sample to be tested. DETAILED DESCRIPTION

[0041] In order to enable those skilled in the art to better understand the technical solution of the present invention, the present invention is further described in detail below in conjunction with the accompanying drawings and specific embodiments.

[0042] The words "first", "second", etc. mentioned in this article are only for the convenience of describing two or more structures or components with the same or similar structures and / or functions, and do not imply any special limitation on the order and / or importance.

[0043] In this document, the descriptions of directions or positional relationships such as "upper" and "lower" are based on the range and positional relationship of the device during actual use, or can also refer to Figure 1 The relationship between orientation and position in.

[0044] Please refer to Figure 1-Figure 9 , Figure 1 It is a schematic diagram of the structure of the edge scanning device provided by the present invention when scanning the outer edge of the test sample, Figure 2 for Figure 1 A top view of Figure 3 for Figure 1 A schematic diagram of the structure from another perspective. Figure 4 This is a schematic diagram of the structure of the edge scanning device provided by the present invention when cleaning the support arm. Figure 5 It is a structural diagram of the receiving components. Figure 6 It is a schematic diagram of the structure of the cleaning components. Figure 7 for Figure 6 A cross-sectional view of Figure 8 is the structural diagram of the platform plate. Fig. 9 for Figure 8 Cross-sectional view of .

[0045] As described in the background technology section, the metal contamination detection equipment in the prior art mainly performs sampling detection on the central area of ​​the wafer to be tested, while ignoring the sampling detection on the edge area of ​​the wafer to be tested, resulting in incomplete metal contamination detection of the wafer to be tested.

[0046] To this end, the present invention provides an edge scanning device, such as Figure 1-Figure 3 As shown, the edge scanning device includes: a rotating component 1, including a carrying part 11, the carrying part 11 is used to carry a sample A to be tested, and the sample A to be tested can be a wafer or other similar sample pieces. The rotating component 1 can drive the sample A to be tested to rotate; a scanning liquid supply and recovery component, including a nozzle 2, used to spit out and recover scanning droplets; a receiving component 3, including a supporting arm 31, the scanning droplets are accommodated between the nozzle 2 and the supporting arm 31, and can wrap the edge of the sample A to be tested.

[0047] During the specific operation, first, the sample A to be tested can be placed on the carrying part 11; then, the scanning liquid supply and recovery component can spit out scanning liquid droplets through the nozzle 2, and the upper end of the scanning liquid droplets is still connected to the nozzle 2, that is, the scanning liquid droplets are not separated from the nozzle 2, and the lower end of the scanning liquid droplets can be supported on the support arm 31 to avoid the dripping of the scanning liquid droplets. At the same time, the scanning liquid droplets can also wrap the edge of the sample A to be tested; then, the rotating component 1 can be started to drive the sample A to be tested to rotate for at least one circle, so that the scanning liquid droplets can sample various positions of the edge of the sample A to be tested; then, the scanning liquid supply and recovery component can recover the scanning liquid droplets through the nozzle 2, that is, the scanning sampling of the edge of the sample A to be tested can be completed, so as to provide conditions for sampling and detection of the edge of the sample A to be tested.

[0048] In other words, the edge scanning device provided by the present invention can fill the gap in the prior art, making it possible to sample and detect the edge of the sample A to be tested, thereby helping to improve the sampling and detection range of the sample A to be tested.

[0049] It should be noted that, although the edge scanning device provided by the present invention is originally designed for metal contamination detection, the application scope of the edge scanning device is obviously not limited to metal contamination detection. In fact, it can also be applied to other types of impurity detection, such as dust detection, etc. In other words, the application field cannot be used as a limitation on the implementation scope of the edge scanning device provided by the present invention; and for different application fields, the types of scanned droplets may vary, which is not limited in detail here.

[0050] The bearing part 11 is mainly used to bear the test sample A, and there are many choices for its structural form, as long as it can achieve the bearing function. In a specific solution, the bearing part 11 can be a negative pressure suction cup to adsorb the test sample A under the action of negative pressure, so that the bearing and fixation of the test sample A can be more reliable; the specific design of the negative pressure extraction pipeline is not limited here, as long as it can ensure that the negative pressure adsorption force can be formed.

[0051] The rotating component 1 is also provided with a driving mechanism. To facilitate the distinction from the driving mechanism of the receiving component 3 described later, the driving mechanism of the rotating component 1 can be referred to as a first driving mechanism. The first driving mechanism is mainly used to drive the bearing portion 11 to rotate, thereby driving the test sample A disposed on the bearing portion 11 to rotate. The specific structure of the first driving mechanism is not limited here, as long as it can realize the driving function, or, reference can be made to the relevant description of the specific structure of the second driving mechanism described later.

[0052] Furthermore, a cleaning component 4 may be included to clean the support arm 31. Thus, after each edge scan is completed and the scanning droplets are recovered, the support arm 31 may be cleaned by the cleaning component 4 to avoid cross contamination, which is of positive significance for ensuring the accuracy of subsequent test results.

[0053] The support arm 31 can be in the same position for the support of the scanning droplets and the subsequent cleaning. Alternatively, the support arm 31 can be in different positions for the support of the scanning droplets and the subsequent cleaning. For the convenience of description, the position where the support arm 31 supports the scanning droplets can be called the supporting position, and the position where the support arm 31 can be cleaned by the cleaning component 4 can be called the cleaning position; with this design, the cleaning component 4 can be installed at a position relatively far away from the nozzle 2 and the sample A to be tested, which can avoid mutual interference and influence between the components during installation and use.

[0054] Specifically in the embodiment of the present invention, the latter solution is preferably adopted. In this case, a driving mechanism may be further configured to drive the support arm 31 to switch between the supporting station and the cleaning station. The displacement output by the driving mechanism may be in the form of linear displacement or rotational displacement, as long as the technical effect of station switching can be achieved; and the structural form of the driving mechanism may also be different for different displacement forms.

[0055] For example, if the displacement output by the driving mechanism is a linear displacement, the driving mechanism may be a driving element such as a cylinder or a hydraulic cylinder that can directly output a linear displacement, or the driving mechanism may be a motor. In this case, it is also necessary to use a transmission structure such as a gear rack structure and a screw structure that can convert the rotational displacement into a linear displacement. If the displacement output by the driving mechanism is a rotational displacement, the driving mechanism may be a driving element such as a motor that can directly output a rotational displacement, and a reducer or other structure may be configured if necessary.

[0056] In the scheme of the accompanying drawings, Figure 5 As shown, the driving mechanism can be a driving and rotating mechanism. For the sake of distinction, the driving and rotating mechanism of the receiving component 3 can be referred to as a second driving and rotating mechanism. The second driving and rotating mechanism can include a motor 37, and the rotating shaft of the motor 37 can be connected to the rotating shaft 33 through a coupling 38; the motor 37 can be installed on the fixing plate 35 through a motor bracket 36, and the fixing plate 35 can be fixedly installed through a connecting piece in the form of a fixing screw 351, and the fixing plate 35 can also be configured with a positioning piece in the form of a positioning pin 352 to determine the installation position of the second driving and rotating mechanism. In specific practice, the positioning is first performed through the positioning pin 352, so that the installation of the fixing screw 351 can be relatively convenient; the fixing plate 35 can be provided with a bearing 353 for realizing rotation. The shaft 33 rotates relative to the fixed plate 35; the rotating shaft 33 can be directly connected to the support arm 31, or a transfer arm 32 can be configured. The rotating shaft 33 can be connected to the support arm 31 through the transfer arm 32. The transfer arm 32 and the support arm 31 can be connected by a connecting piece in the form of a screw or the like. The transfer arm 32 and the rotating shaft 33 can be connected by a connecting key 39 to ensure that the transfer arm 32 and the rotating shaft 33 can rotate synchronously. It can be known that the support arm 31 is directly used to contact the scanning droplets, and its material performance requirements are relatively high. The embodiment of the present invention preferably requires an anti-static material such as PEEK (Poly ether ether ketone) or at least coated with an anti-static coating. The support arm 31 and the transfer arm 32 are arranged in sections, and only the material of the support arm 31 needs to be controlled, which can effectively control the cost, and can conveniently select support arms 31 of different materials for use according to needs, and at the same time, it can meet the setting position requirements of the support arm 31.

[0057] It should be noted that the above description of the specific structure of the second drive mechanism is only an exemplary description of the embodiment of the present invention, and cannot be used as a limitation on the scope of implementation of the edge scanning device provided by the present invention. Under the condition of satisfying the function, the second drive mechanism can also adopt other structural forms. For example, please continue to refer to Figure 5 The motor 37 may also be provided with a reducer, and then connected to the rotating shaft 33 via the output shaft of the reducer. Of course, the rotating shaft of the motor 37 or the output shaft of the reducer may also be directly used as the rotating shaft 33; the motor bracket 36 and the fixing plate 35 may be integrated, that is, the two may also be one component to reduce the number of parts.

[0058] The portion of the support arm 31 used to support the scanning droplet may be a flat surface. Figure 5 As shown, the portion of the support arm 31 used to support the scanning droplets may also be a concave portion 311. The concave portion 311 may have a better supporting effect and can better prevent the scanning droplets from falling, which is a preferred solution of the embodiment of the present invention.

[0059] Furthermore, the receiving part 3 can also be configured with a height adjustment component for adjusting the installation height of the support arm 31, so that when the support arm 31 is located at the supporting position, the support arm 31 and the nozzle 2 can cooperate to better support the scanning droplets, and the scanning droplets are still hung on the nozzle 2.

[0060] There are also many options for the structural form of the height adjustment component, such as setting an adjustment screw rod, etc. In the embodiment of the accompanying drawings, Figure 5 As shown, the connecting end of the adapter arm 32 and the rotating shaft 33 may include two docking parts arranged opposite to each other. The distance between the two docking parts can be adjusted by configuring an adjusting screw 34 so that the two docking parts can clamp the rotating shaft 33 or release the rotating shaft 33. When the two docking parts do not clamp the rotating shaft 33, the adapter arm 32 can be displaced along the axial direction of the rotating shaft 33 to facilitate adjusting the installation position of the adapter arm 32 and the rotating shaft 33, thereby changing the installation height of the support arm 31. When the installation height of the support arm 31 is determined, the adjusting screw 34 can be tightened to fix the installation height of the support arm 31.

[0061] Combination Figure 4 , Figure 6 as well as Figure 7The cleaning component 4 may include a shell 41, a cleaning chamber 413 may be formed in the shell 41, and a first inlet and outlet 414 connected to the cleaning chamber 413 may be provided on the shell wall of the shell 41, and the support arm 31 may enter and exit the cleaning chamber 413 through the first inlet and outlet 414 (in a rotating or translating manner), and the cleaning component 4 may also be provided with a cleaning member for cleaning the support arm 31 in the cleaning chamber 413. With this solution, the cleaning component 4 can clean the support arm 31 in the cleaning chamber 413, and the cleaning medium can be easily recycled, which is not easy to cause pollution to the external environment.

[0062] The cleaning component may include a liquid washing part, which may include a liquid supply head 43, through which the cleaning liquid may enter the cleaning chamber 413, and the type of the cleaning liquid is not limited here. In a specific implementation, the cleaning liquid is preferably water to avoid introducing other chemical components and affecting the accuracy of scanning droplets for scanning and sampling the edge of the test sample A. The lower end of the housing 41 may also be provided with a first liquid discharge port 415 connected to the cleaning chamber 413, and the first liquid discharge port 415 is also connected to the first liquid discharge head 42 for discharging the waste liquid in the cleaning chamber 413.

[0063] The cleaning component may also include an air washing part, which may include an air supply head 44, through which the gas may enter the cleaning chamber 413. The gas may exist directly as a cleaning gas to clean the support arm 31 by air washing. Alternatively, the gas may also be used only as a drying gas. In this case, the air washing part needs to be used in conjunction with the liquid washing part. After the liquid washing part rinses the support arm 31, the air washing part can blow dry the support arm 31; in this way, after the support arm 31 leaves the cleaning chamber 413, it is not easy to cause the escape of the cleaning liquid, which is conducive to ensuring the environment around the cleaning component 4. The types of the above-mentioned gases are not limited here. In specific practice, those skilled in the art can choose according to their needs; in the embodiment of the present invention, it is preferred to use an inert gas in the form of nitrogen or the like. The inert gas is relatively stable in nature and is not easy to contaminate the support arm 31, thereby affecting the subsequent normal use of the support arm 31.

[0064] For more detailed description, Figure 7For reference, the shell 41 may include an upper shell 411 and a lower shell 412, and a first inlet and outlet 414 may be formed at the joint of the upper shell 411 and the lower shell 412. Specifically, a notch may be provided in the upper shell 411 and / or the lower shell 412 to form the above-mentioned first inlet and outlet 414, and the connection method between the upper shell 411 and the lower shell 412 is not limited herein; the liquid supply head 43 and the air supply head 44 may both be provided in the upper shell 411, and corresponding liquid delivery channels and air delivery channels may be provided in the upper shell 411, and the specific structural form, setting position, etc. of these channels are not limited herein; the lower shell 412 may be used to form the main body of the cleaning chamber, and at least the lower portion of its inner wall may be in a tapered cone to facilitate the collection and discharge of waste liquid at the first liquid discharge port 415, that is, the first liquid discharge port 415 may be formed in the lower shell 412, and the first liquid discharge head 42 may be provided in the lower shell 412.

[0065] The specific structural forms of the liquid supply head 43, the gas supply head 44 and the first liquid discharge head 42 are not described here. In actual applications, those skilled in the art can set them as needed. In the embodiment of the accompanying drawings, the above three components are actually adapters for connecting the housing 41 with an external liquid source, a gas source and a waste liquid recovery component.

[0066] Please continue to refer to Figure 1 , Figure 2 The edge scanning device provided by the present invention may also include a platform plate 5, and the aforementioned rotating component 1, receiving component 3 and cleaning component 4 may all be installed on the platform plate 5, and the specific installation method may be to connect them using connecting members in the form of screws or the like; Figure 8 , Fig. 9 The upper surface of the platform plate 5 may be provided with a first annular groove 51, and the first groove 51 encloses a set area 5a ( Figure 8 In the embodiment, for the convenience of marking, the set area 5a is pulled upward, but in fact the set area 5a is a part of the upper surface of the platform plate 5), the orthographic projection of the sample A to be tested on the upper surface of the platform plate 5 can be located in the set area 5a, and the platform plate 5 can also be provided with a second drainage port 52 connected to the first tank body 51, and the second drainage port 52 can also be connected to a second drainage head 53 for discharging the waste liquid collected in the first tank body 51. The number and setting position of the second drainage port 52 are not limited here.

[0067] With the above structure, since the orthographic projection of the sample A to be tested on the upper surface of the platform plate 5 is located within the set area 5a, that is, the first trough body 51 can surround the sample A to be tested, and the first trough body 51 is located on the outside of the sample A to be tested, when part of the scanning droplets drip or escape during the scanning process, this part of the scanning droplets can be collected by the first trough body 51, and then can be discharged from the second liquid discharge port 52 and the second liquid discharge head 53, which is beneficial to reduce liquid accumulation.

[0068] The upper surface of the platform plate 5 may also be provided with a second annular groove body 54, which may be located in the set area 5a, and the second groove body 54 may be arranged around the rotating component 1, that is, the radial dimension of the second groove body 54 is smaller than that of the first groove body 51, and a first connecting groove 55 may be arranged between the second groove body 54 and the first groove body 51. The second groove body 54 may act as a liquid partitioning groove, which can block the waste liquid dissipated from the platform plate 5 outside the second groove body 54 to prevent the waste liquid from affecting the rotating component 1; and the waste liquid accumulated in the second groove body 54 may flow into the first groove body 51 through the first connecting groove 55 for discharge. The solution of the first groove body 51 and the second groove body 54 sharing the liquid discharge port can reduce the number of liquid discharge ports, thereby simplifying the structure of the platform plate 5.

[0069] Of course, the second tank body 54 may also be independently configured with a drain port, in which case the waste liquid accumulated in the second tank body 54 may be discharged through the drain port of the second tank body 54 .

[0070] Furthermore, if Fig. 9 As shown, the upper surface of the platform plate 5 between the second trough body 54 and the first trough body 51 may be a conical surface 5b that gradually slopes downward from the direction away from the second trough body 54. In this way, the waste liquid dispersed in the set area 5a can be more easily gathered to the first trough body 51, so as to better overcome the technical problem of liquid accumulation on the platform plate 5.

[0071] Please continue to refer to Figure 8 The upper surface of the platform plate 5 may also be provided with a third annular groove 56, which may be arranged around the cleaning component 4, and the third groove 56 may be connected to the first groove 51 through the second connecting groove 57. The third groove 56 may also function as a liquid separator, which may block the waste liquid dissipated from the platform plate 5 outside the third groove 56 to prevent the waste liquid from affecting the cleaning component 4; and the waste liquid accumulated in the third groove 56 may flow into the first groove 51 through the second connecting groove 57 and be discharged. The solution of the first groove 51 and the third groove 56 sharing a liquid discharge port may reduce the number of liquid discharge ports, thereby simplifying the structure of the platform plate 5.

[0072] Of course, the third tank body 56 may also be independently configured with a drain port, in which case the waste liquid accumulated in the third tank body 56 may be discharged through the drain port of the third tank body 56 .

[0073] Furthermore, a cover 6 may be included, which may be mounted on the platform plate 5 and may be enclosed with the platform plate 5 to form a receiving cavity 63; the cover 6 may be provided with a second inlet and outlet 61, and the sample A to be tested may enter and exit the receiving cavity 63 through the second inlet and outlet 61, and the specific entry and exit method may be by means of a manipulator, etc.; Figure 1 For a solution in which the support arm 31 can move, the cover 6 can also be provided with a third inlet and outlet 62 for the support arm 31 to enter and exit the accommodating chamber 63 .

[0074] The edge scanning device provided by the present invention may further include a ventilation component for ventilating the accommodating chamber 63 to ensure the cleanliness of the atmosphere inside the accommodating chamber 63. The ventilation component may include an air supply portion and an air extraction portion 7, wherein the air supply portion is used to provide gas with higher cleanliness, and the air extraction portion 7 is used to recover this part of the gas to ensure that the atmosphere in the accommodating chamber 63 can be in a flowing and updated state, thereby maintaining the cleanliness of the gas inside the accommodating chamber 63.

[0075] The scanning droplets used in the edge scanning device provided by the present invention may be corrosive to a certain extent. Therefore, there may be certain requirements for the materials of the components in the edge scanning device to extend the service life as much as possible.

[0076] Each component in the edge scanning device can be made of corrosion-resistant materials, or at least the outer surface of each component can be coated with a corrosion-resistant coating to enhance the resistance of each component to corrosive liquids such as acids and alkalis. Or, at least, the material of the part of each component located above the upper surface of the platform plate 5 is selected from corrosion-resistant materials or coated with corrosion-resistant coatings; specifically, the cover 6 can be made of corrosion-resistant materials or coated with corrosion-resistant coatings, and the material of at least the part of the rotating component 1, the scanning liquid supply and recovery component, the receiving component 3, and the cleaning component 4 located above the upper surface of the platform plate 5 can be corrosion-resistant materials, or the rotating component 1, the scanning liquid supply and recovery component, the receiving component 3, and the cleaning component 4 located above the upper surface of the platform plate 5 can be coated with corrosion-resistant coatings; the material of the platform plate 5 can be corrosion-resistant materials, or at least the upper surface of the platform plate 5 is coated with corrosion-resistant coatings.

[0077] The specific types of corrosion-resistant materials and corrosion-resistant coatings are not limited here. In actual applications, those skilled in the art can determine them based on actual conditions such as the types of corrosive substances in the specific use environment.

[0078] The present invention also provides a metal contamination detection device, comprising the edge scanning device involved in the above-mentioned embodiments.

[0079] Since the above-mentioned edge scanning device has the above-mentioned technical effects, the metal contamination detection equipment having the edge scanning device should also have similar technical effects, so it will not be described in detail here.

[0080] The above are only preferred embodiments of the present invention. It should be pointed out that, for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principles of the present invention. These improvements and modifications should also be regarded as the scope of protection of the present invention.

Claims

1. An edge scanning device, characterized in that: include: The rotating component (1) comprises a bearing portion (11), wherein the bearing portion (11) is used to bear a sample to be tested (A), and the rotating component (1) is capable of driving the sample to be tested (A) to rotate; A scanning liquid supply and recovery component, comprising a nozzle (2) for spitting out and recovering scanning liquid droplets; A receiving component (3) comprising a supporting arm (31), wherein the scanning droplets are contained between the nozzle (2) and the supporting arm (31) and are capable of wrapping around the edge of the sample to be tested (A); The device further comprises a platform plate (5), the rotating component (1) and the receiving component (3) being both mounted on the platform plate (5); a first annular groove body (51) is provided on the upper surface of the platform plate (5); the first groove body (51) encloses a set area (5a) on the upper surface of the platform plate (5); the orthographic projection of the sample to be tested (A) on the upper surface of the platform plate (5) is located within the set area (5a); and the platform plate (5) is further provided with a second liquid discharge port (52) in communication with the first groove body (51); The upper surface of the platform plate (5) is further provided with a second groove body (54) in the shape of an annulus, the second groove body (54) being located in the set area (5a), and the second groove body (54) being arranged around the rotating component (1), and a first connecting groove (55) being arranged between the second groove body (54) and the first groove body (51); the upper surface of the platform plate (5) between the second groove body (54) and the first groove body (51) is gradually inclined downward from a direction away from the second groove body (54); The upper surface of the platform plate (5) is further provided with a third groove body (56) in an annular shape, and the third groove body (56) is connected to the first groove body (51) via a second connecting groove (57).

2. The edge scanning device according to claim 1, characterized in that: It also includes a cleaning component (4) for cleaning the support arm (31).

3. The edge scanning device according to claim 2, characterized in that: The support arm (31) has a supporting position and a cleaning position, and the receiving component (3) is also provided with a driving mechanism for driving the support arm (31) to switch between the supporting position and the cleaning position.

4. The edge scanning device according to claim 3, characterized in that: The cleaning component (4) comprises a shell (41), a cleaning chamber (413) is formed in the shell (41), a shell wall of the shell (41) is further provided with a first inlet and outlet (414) connected to the cleaning chamber (413), and the supporting arm (31) can enter and exit the cleaning chamber (413) through the first inlet and outlet (414); The cleaning component (4) is also provided with a cleaning member for cleaning the support arm (31) in the cleaning chamber (413).

5. The edge scanning device according to claim 4, characterized in that: The cleaning component comprises a liquid washing portion, and the lower end of the housing (41) is further provided with a first liquid discharge port (415) communicating with the cleaning chamber (413); and / or, The cleaning member includes an air washing portion.

6. The edge scanning device according to claim 1, characterized in that: The receiving component (3) is also provided with a height adjustment member for adjusting the installation height of the supporting arm (31).

7. The edge scanning device according to claim 1, characterized in that: The bearing portion (11) is a negative pressure suction cup.

8. The edge scanning device according to any one of claims 1, 6 and 7, characterized in that: It also comprises a cleaning component (4) for cleaning the support arm (31); the cleaning component (4) is also mounted on the platform plate (5); and the third trough (56) is arranged around the cleaning component (4).

9. The edge scanning device according to claim 8, characterized in that: The material of at least the portion of the rotating component (1), the scanning liquid supply and recovery component, the receiving component (3), and the cleaning component (4) located above the upper surface of the platform plate (5) is a corrosion-resistant material, or the material of at least the portion of the rotating component (1), the scanning liquid supply and recovery component, the receiving component (3), and the cleaning component (4) located above the upper surface of the platform plate (5) is coated with a corrosion-resistant coating; and / or The platform plate (5) is made of a corrosion-resistant material, or at least the upper surface of the platform plate (5) is coated with a corrosion-resistant coating.

10. The edge scanning device according to any one of claims 1 to 7, characterized in that: The device further comprises a cover (6), wherein the cover (6) is mounted on the platform plate (5) and encloses the platform plate (5) to form a receiving cavity (63), wherein the cover (6) is provided with a second inlet and outlet (61), and the sample to be tested (A) can enter and exit the receiving cavity (63) through the second inlet and outlet (61).

11. The edge scanning device according to claim 10, characterized in that: It also includes a ventilation component, used to ventilate the accommodating chamber (63); and / or, The cover (6) is made of a corrosion-resistant material, or the cover (6) is coated with a corrosion-resistant coating.

12. The edge scanning device according to any one of claims 1 to 7, characterized in that: The support arm (31) is made of antistatic material; or, The support arm (31) is coated with an antistatic coating.

13. A metal contamination detection device, characterized in that: Comprising an edge scanning device as claimed in any one of claims 1-12.

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