Visual feedback control device

Abstract

The visual feedback control device (20) comprises: a camera (3) which outputs a target image (103); a template image storage unit (6) which stores the template image (106); an image processing unit (7) which uses the target image (103) and the template image (106) to measure the actual position of the target (5) with sub-pixel point accuracy and outputs the measured value (107) as an image processing result; a drive instruction generation unit (8) which generates a drive instruction signal (108); an error correction control unit (106); and a control unit (107). A unit (4) that uses an image processing measurement value (107) to correct an error in a drive instruction signal (108) to generate a drive correction signal (104); a mechanical drive unit (1) that changes the relative position of a mechanical front end (2) relative to a target object (5) based on the drive correction signal (104); and a template image analysis unit (9) that analyzes a template image (106) to calculate the measurement accuracy of the image processing measurement value (107) and outputs the calculated measurement accuracy as an image processing accuracy analysis value (109).

Description

Technical Field

[0001] The present invention relates to a visual feedback control device for controlling a mechanical system using images. Background Art

[0002] Devices such as electronic substrate mounting devices and inspection devices need to accurately position the mechanical front end that holds electronic components relative to a target position of an electronic substrate. Most devices do not directly measure the relative position error, or relative error, between the target position and the mechanical front end. Instead, they use an encoder mounted on the motor that moves the mechanical front end to measure it indirectly. Indirect methods of measuring relative error are sometimes unable to set the relative error between the actual target position and the mechanical front end to zero, making them unsuitable for applications that require high precision. As a method for directly measuring relative error, the following method is considered: photographing a moving object with a camera, using the image captured by the camera to calculate the distance the moving object actually moves when it moves from one location to another, and controlling the amount of movement of the moving object. However, in methods that calculate the movement distance of each pixel in the image, positioning control cannot be performed with a resolution finer than that of a single pixel.

[0003] To address the above-mentioned issues, Patent Document 1 discloses a technique in which an image processing device uses a template image to search for an object on a search image with sub-pixel precision, finer than a single pixel. The image processing device described in Patent Document 1 repeatedly performs a process of roughly searching for the object on the search image, calculating the error between the template image and the object on the search image using calculations performed using the template image placed at the roughly searched position and the search image, and then moving the template image by an amount corresponding to the error to calculate the error between the template image and the object. The image processing device described in Patent Document 1 converges the error between the template image and the object on the search image, thereby enabling the position of the object on the search image to be measured with sub-pixel precision.

[0004] Patent Document 1: Japanese Patent Application Laid-Open No. 2012-48593 Summary of the Invention

[0005] However, the technology described in Patent Document 1 can measure the position of an object to be explored from a captured image with sub-pixel accuracy. However, due to its exploration-based nature, the reliable resolution of the measured position is unclear. Consequently, it is difficult to determine whether the image processing device described in Patent Document 1 is applicable to mechanical devices requiring particularly high positioning accuracy.

[0006] The present invention has been made in view of the above-mentioned circumstances, and an object of the present invention is to provide a visual feedback control device capable of calculating the accuracy of a measurement position obtained by image processing.

[0007] To address the aforementioned issues and achieve the objectives, the present invention provides a visual feedback control device that controls the positioning operation of a mechanical tip at the position of a target object measured by image processing and calculates the image processing measurement accuracy. The visual feedback control device is characterized by comprising: a camera that captures an image of the target object and outputs it as a target image; a template image storage unit that stores a template image obtained by pre-capturing the target object; an image processing unit that uses the target image and the template image to measure the actual position of the target object with sub-pixel accuracy, which is higher than the pixel size of the target image and the template image, and outputs the result as an image processing measurement value; and a drive command generation unit that generates a drive command signal, which is a command for controlling the positioning operation of a mechanical drive unit connected to the mechanical tip. In addition, the visual feedback control device includes: an error correction control unit, which uses the image processing measurement value to correct the error of the drive instruction signal and generate a drive correction signal so that the mechanical front end is positioned at the position of the target object; a mechanical drive unit, which changes the relative position of the mechanical front end with respect to the target object based on the drive correction signal; and a template image analysis unit, which analyzes the template image, calculates the measurement accuracy of the image processing measurement value, and outputs it as an image processing accuracy analysis value.

[0008] Effects of the Invention

[0009] According to the present invention, there is an effect that the visual feedback control device can calculate the accuracy of the measurement position obtained by image processing. BRIEF DESCRIPTION OF THE DRAWINGS

[0010] Figure 1 This is a block diagram showing a configuration example of the visual feedback control device according to the first embodiment.

[0011] Figure 2 This is a flowchart showing the operation of the visual feedback control device according to the first embodiment.

[0012] Figure 3 This is a block diagram showing a configuration example of a template image analysis unit included in the visual feedback control device according to the first embodiment.

[0013] Figure 4 This is a flowchart showing the operation of the template image analysis unit included in the visual feedback control device according to the first embodiment.

[0014] Figure 5This is a diagram showing an example in which the processing circuit included in the visual feedback control device according to the first embodiment is composed of a processor and a memory.

[0015] Figure 6 This is a diagram showing an example in which the processing circuit included in the visual feedback control device according to the first embodiment is configured as dedicated hardware.

[0016] Figure 7 This is a block diagram showing another configuration example of the visual feedback control device according to the first embodiment.

[0017] Figure 8 This is a block diagram showing a configuration example of a visual feedback control device according to the second embodiment.

[0018] Figure 9 This is a block diagram showing a configuration example of a template image analysis unit included in the visual feedback control device according to the second embodiment.

[0019] Figure 10 This is a flowchart showing the operation of the template image analysis unit included in the visual feedback control device according to the second embodiment.

[0020] Figure 11 This is a block diagram showing a structural example of a visual feedback control device according to the third embodiment.

[0021] Figure 12 This is a block diagram showing a configuration example of a template image analysis unit included in the visual feedback control device according to the third embodiment.

[0022] Figure 13 This is a block diagram showing a structural example of a visual feedback control device according to a fourth embodiment.

[0023] Figure 14 This is a flowchart showing the operation of the visual feedback control device involved in embodiment 4.

[0024] Figure 15 This is a block diagram showing a structural example of a visual feedback control device according to the fifth embodiment.

[0025] Figure 16 This is a flowchart showing the operation of the visual feedback control device involved in embodiment 5.

[0026] Figure 17 This is a block diagram showing a configuration example of a template image analysis unit included in the visual feedback control device according to the fifth embodiment. DETAILED DESCRIPTION

[0027] Hereinafter, a visual feedback control device according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings.

[0028] Implementation method 1.

[0029] Figure 1 This is a block diagram showing an example configuration of a visual feedback control device 20 according to Embodiment 1. The visual feedback control device 20 controls the positioning operation for positioning the mechanical front end 2 at the position of a target object 5. The visual feedback control device 20 includes a mechanical drive unit 1, a mechanical front end 2, a camera 3, an error correction control unit 4, a template image storage unit 6, an image processing unit 7, a drive command generation unit 8, and a template image analysis unit 9.

[0030] The mechanical drive unit 1 changes the relative position of the mechanical front end 2 with respect to the target object 5 based on a drive correction signal 104 generated by the error correction control unit 4. The mechanical drive unit 1 is mechanically connected to the mechanical front end 2 and the camera 3. In accordance with the drive correction signal 104 output by the error correction control unit 4, the mechanical drive unit 1 combines the mechanical front end 2 and the camera 3 to perform positioning operations. The mechanical front end 2 has the function of acting on the target object 5 and is positioned relative to the installation position of the target object 5. The camera 3 captures the target object 5, or in fact, the area including the target object 5, and outputs it as a target image 103.

[0031] The template image storage unit 6 stores a pre-captured image of a range including the target object 5 as a template image 106. The image processing unit 7 performs image processing using the template image 106 and the target object image 103, measures the position of the target object 5 shown in the target object image 103, and outputs the measurement result of the position of the target object 5 as an image processing measurement value 107. Using the target object image 103 and the template image 106, the image processing unit 7 measures the actual position of the target object 5 with sub-pixel accuracy, which is higher than the pixel size of the pixels in the target object image 103 and the template image 106, and outputs the result as the image processing measurement value 107. Note that "pixel" and "pixel point" have the same meaning.

[0032] The drive command generation unit 8 generates a drive command signal 108, which is a command for controlling the positioning operation of the mechanical drive unit 1, so that the mechanical front end 2 is positioned relative to the target object 5. The error correction control unit 4 uses the drive command signal 108 and the image processing measurement value 107 to generate a drive correction signal 104, and outputs it to the mechanical drive unit 1 to enable the mechanical front end 2 to be positioned relative to the target object 5. Specifically, the error correction control unit 4 uses the image processing measurement value 107 to correct the error in the drive command signal 108 and generates the drive correction signal 104 so that the mechanical front end 2 is positioned at the position of the target object 5.

[0033] The template image analysis unit 9 analyzes the template image 106 , calculates the measurement accuracy of the image processing measurement value 107 output from the image processing unit 7 , and outputs the calculated value as an image processing accuracy analysis value 109 .

[0034] Next, the operation of the visual feedback control device 20 will be described. Figure 2 This is a flowchart illustrating the operation of the visual feedback control device 20 according to Embodiment 1. The visual feedback control device 20 positions the mechanical front end 2 relative to a set target object 5 and performs operations relative to the target object 5. Examples of operations performed by the visual feedback control device 20 relative to the target object 5 include placing an electronic component grasped by the mechanical front end 2 relative to a target object 5, such as a terminal portion on an electronic substrate, and inspecting the target object 5 by bringing an inspection device mounted on the mechanical front end 2 into contact with the target object 5. These operations require high precision, so the visual feedback control device 20 must position the mechanical front end 2 with high precision relative to the target object 5.

[0035] The mechanical drive unit 1 is mechanically coupled to the mechanical front end 2 and is driven in accordance with a drive correction signal 104 to position the mechanical front end 2. The error correction control unit 4 generates the drive correction signal 104 based on the drive command signal 108 and the image processing measurement value 107, performing operations such as proportional integration and filtering to accurately position the mechanical front end 2 relative to the target object 5. The drive command generation unit 8 generates the drive command signal 108 based on the previously known position of the target object 5 to position the mechanical front end 2 relative to the target object 5.

[0036] Here, the actual position of the target 5 may have an error relative to the previously known position of the target 5 due to individual differences among the target 5, variations in the placement of the target 5, vibrations of a structure such as a workbench on which the target 5 is placed, and other factors. Therefore, even when the mechanical drive unit 1 is driven based on the drive command signal 108 and the mechanical front end 2 is positioned, an error may occur between the mechanical front end 2 and the target 5.

[0037] In this embodiment, in the visual feedback control device 20, the template image analysis unit 9 analyzes the template image 106 stored in the template image storage unit 6 and calculates the image processing accuracy analysis value 109 as the accuracy of the image processing measurement value 107 output by the image processing unit 7 (step S11). The necessity and details of the operations performed by the template image analysis unit 9 will be described later.

[0038] A camera 3 is mechanically connected to the mechanical drive unit 1. The camera 3 captures the target 5 and outputs it as a target image 103 (step S12). The image processing unit 7 performs image processing using the target image 103 and a template image 106 stored in the template image storage unit 6. The image processing unit 7 detects the target 5 from the target image 103 and measures the position, rotation angle, and other information of the target 5. The image processing unit 7 measures the actual position of the target 5 with sub-pixel accuracy, which is higher than the pixel size of the target image 103, and outputs this as an image processing measurement value 107 (step S13). The drive command generation unit 8 generates a drive command signal 108 based on the previously known position of the target 5 (step S14). The error correction control unit 4 can determine the actual position of the target 5 from the image processing measurement value 107. Therefore, the error correction control unit 4 corrects the drive command signal 108 based on the image processing measurement value 107 to generate a drive correction signal 104, so that the mechanical front end 2 is positioned with high precision relative to the target 5 (step S15). The mechanical driving unit 1 is driven based on the driving correction signal 104, thereby positioning the mechanical front end 2 (step S16). The visual feedback control device 20 can repeatedly perform the operations of steps S12 to S16 until the positioning is completed.

[0039] The positioning accuracy of the mechanical front end 2 is affected by the accuracy of the image processing measurement value 107 output by the image processing unit 7. To obtain highly accurate image processing measurement values ​​107, the image processing unit 7 may consider using a target image 103 and a template image 106 with high resolution, i.e., a large number of pixels. However, using a target image 103 and a template image 106 with a large number of pixels in the image processing unit 7 increases the amount of image transfer, which may be unsuitable due to limitations such as the need for expensive, high-resolution cameras. Therefore, the image processing unit 7 may consider obtaining image processing measurement values ​​107 with sub-pixel accuracy, i.e., sub-pixel accuracy, through image processing using a target image 103 and a template image 106 with a small number of pixels. Considered image processing methods for obtaining sub-pixel accuracy image processing measurement values ​​107 using a target image 103 and a template image 106 with a small number of pixels include phase-only correlation (POC), pattern matching, and deep learning. Here, as an example, a case where the image processing unit 7 uses the phase-limited correlation method will be described.

[0040] The image processing unit 7 performs a two-dimensional discrete Fourier transform on the target image 103 and the template image 106 using the phase-limited correlation method, and calculates a correlation power spectrum using the obtained phase components. The image processing unit 7 then performs a two-dimensional inverse discrete Fourier transform on the normalized power spectrum to calculate a phase-limited correlation function. The phase-limited correlation function indicates the position at which the template image 106 is matched with respect to the target image 103. Therefore, by calculating the phase-limited correlation function, the image processing unit 7 can measure the position of the target object 5 shown in the target image 103 and output the measurement result of the target object 5's position as an image processing measurement value 107. In the phase-limited correlation method, the image processing unit 7 calculates the correlation between the template image 106 and the target image 103 using the phase components obtained by the two-dimensional discrete Fourier transform. Therefore, the complexity of the target image 103 and the template image 106, which contain various frequency components, is related to the accuracy of the position measurement. That is, the image used also affects the accuracy of position measurement, and therefore the accuracy of the image-processed measurement value 107 cannot be determined by the image processing method alone of the image processing unit 7 .

[0041] Therefore, in this embodiment, as in step S11, the template image analysis unit 9 analyzes the template image 106 stored in the template image storage unit 6 in advance before the image processing measurement value 107 is calculated by the image processing unit 7 for positioning control of the mechanical front end 2, and calculates the image processing accuracy analysis value 109 as the accuracy of the image processing measurement value 107 output by the image processing unit 7.

[0042] Regarding the analysis method of the template image 106 by the template image analysis unit 9, the template image 106 is analyzed using Figure 3 and Figure 4 Provide explanation. Figure 3 This is a block diagram showing a configuration example of the template image analysis unit 9 included in the visual feedback control device 20 according to the first embodiment. Figure 4 This is a flowchart showing the operation of the template image analyzing unit 9 included in the visual feedback control device 20 according to the first embodiment. Figure 4 The operation of the template image analysis unit 9 is shown in FIG. Figure 2 The template image analyzing unit 9 includes an analysis image generating unit 91 , a template image processing unit 92 , and an image processing accuracy analyzing unit 93 .

[0043] The analytical image generating unit 91 generates and outputs an analytical image 191A and an analytical image offset 191B based on the template image 106 (step S21). Specifically, the analytical image generating unit 91 generates the analytical image 191A by shifting it from the template image 106 by a predetermined distance. The predetermined distance is not a single pixel unit, but rather a number of pixels including decimals. If the predetermined distance is L, then when N is an integer, N<L<N+1 is obtained. In other words, the analytical image generating unit 91 generates the analytical image 191A by shifting the template image 106 by a decimal value relative to one pixel of the template image 106. At this point, the analytical image generating unit 91 performs appropriate filtering on the shifted analytical image 191A to generate the analytical image 191A. Furthermore, the analytical image generating unit 91 outputs the arbitrary distance after the shift as the analytical image offset 191B. In the following description, the analysis image shift amount 191B may be referred to as the movement amount of the analysis image 191A relative to the template image 106 .

[0044] The template image processing unit 92 calculates and outputs a calculated deviation value 192 as a result of image processing using the template image 106 and the analysis image 191A (step S22). Specifically, the template image processing unit 92 uses the template image 106 and the analysis image 191A to perform image processing similar to that performed by the image processing unit 7, and calculates the deviation between the analysis image 191A and the template image 106. In other words, the template image processing unit 92 uses the analysis image 191A and the template image 106 to measure the deviation between the analysis image 191A and the template image 106 using the same method as performed by the image processing unit 7. The template image processing unit 92 outputs the calculated deviation value 192.

[0045] Image processing accuracy analysis unit 93 calculates image processing accuracy analysis value 109 based on calculated deviation value 192 and analysis image deviation 191B (step S23). Specifically, image processing accuracy analysis unit 93 determines the accuracy of position measurement of target object 5 when template image 106 is used in image processing by image processing unit 7 based on the difference between calculated deviation value 192 and analysis image deviation 191B, which is the offset distance when analysis image 191A is generated from a previously known template image 106. Image processing accuracy analysis unit 93 calculates image processing accuracy analysis value 109 based on this position measurement accuracy.

[0046] Next, the hardware structure of the visual feedback control device 20 will be described. In the visual feedback control device 20, the mechanical drive unit 1 is a device having an actuator such as a motor. The camera 3 is a measuring device such as a digital camera. The template image storage unit 6 is a memory. The error correction control unit 4, template image storage unit 6, image processing unit 7, drive command generation unit 8, and template image analysis unit 9 are implemented by a processing circuit. The processing circuit can be a processor and memory that executes a program stored in the memory, or it can be dedicated hardware.

[0047] Figure 5 2 is a diagram showing an example in which the processing circuit 200 of the visual feedback control device 20 according to Embodiment 1 is composed of a processor 201 and a memory 202. When the processing circuit 200 is composed of a processor 201 and a memory 202, each function of the processing circuit 200 of the visual feedback control device 20 is implemented by software, firmware, or a combination of software and firmware. The software or firmware is described as a program and stored in the memory 202. In the processing circuit 200, each function is implemented by having the processor 201 read out and execute the program stored in the memory 202. That is, the processing circuit 200 has a memory 202, which stores the program that ultimately executes the processing of the visual feedback control device 20. In addition, these programs can be said to be the order and method for causing the computer to execute the visual feedback control device 20.

[0048] Here, the processor 201 may be a CPU (Central Processing Unit), a processing device, an arithmetic device, a microprocessor, a microcomputer, or a DSP (Digital Signal Processor). Furthermore, the memory 202 may be, for example, a non-volatile or volatile semiconductor memory such as RAM (Random Access Memory), ROM (Read Only Memory), a flash memory, an EPROM (Erasable Programmable ROM), or an EEPROM (registered trademark) (Electrically EPROM), a magnetic disk, a floppy disk, an optical disk, a compact disk, a minidisc, or a DVD (Digital Versatile Disc).

[0049] Figure 6 This is a diagram showing an example in which the processing circuit 203 of the visual feedback control device 20 according to the first embodiment is constituted by dedicated hardware. In the case in which the processing circuit 203 is constituted by dedicated hardware, Figure 6The processing circuit 203 shown is, for example, a single circuit, a composite circuit, a programmed processor, a parallel programmed processor, an ASIC (Application Specific Integrated Circuit), an FPGA (Field Programmable Gate Array), or a combination thereof. Each function of the visual feedback control device 20 can be implemented by the processing circuit 203 individually, or the functions can be aggregated and implemented by the processing circuit 203.

[0050] Furthermore, the functions of the visual feedback control device 20 may be partially implemented by dedicated hardware and partially implemented by software or firmware. As described above, the processing circuit can implement the functions described above by dedicated hardware, software, firmware, or a combination thereof.

[0051] As described above, according to this embodiment, in the visual feedback control device 20, the template image analysis unit 9 analyzes the template image 106 stored in the template image storage unit 6, thereby calculating the image processing accuracy analysis value 109, so that the measurement accuracy of the image processing measurement value 107 output by the image processing unit 7 can be ascertained in advance. This allows the user of the visual feedback control device 20 to ascertain the accuracy of the image processing measurement value 107 output by the image processing unit 7, thereby ascertaining the accuracy of positioning the mechanical front end 2 relative to the target object 5.

[0052] Furthermore, in this embodiment, the template image analysis unit 9 may generate the analysis image 191A, the analysis image deviation 191B, and the deviation calculation value 192 multiple times. In this case, the template image analysis unit 9 calculates the image processing accuracy analysis value 109 using the analysis image 191A, the analysis image deviation 191B, and the deviation calculation value 192 generated by each process. For example, the template image analysis unit 9 may output the worst value among the calculated multiple image processing accuracy analysis values ​​109 as the image processing accuracy analysis value 109.

[0053] In addition, in this embodiment, the user uses the image processing accuracy analysis value 109 calculated by the template image analysis unit 9 to understand the accuracy of the image processing measurement value 107 output by the image processing unit 7, but this is not limited to this and can also be used in the visual feedback control device. Figure 7 This is a block diagram showing another configuration example of the visual feedback control device 20a according to the first embodiment. Figure 1The visual feedback control device 20 shown in FIG. 1 replaces the image processing unit 7 with an image processing unit 7a. In the visual feedback control device 20a, the template image analysis unit 9 outputs the calculated image processing accuracy analysis value 109 to the image processing unit 7a. The image processing unit 7a can output the image processing measurement value 107 that has been smoothed using the resolution determined by the image processing accuracy analysis value 109. In other words, the image processing unit 7a determines the resolution of the image processing measurement value 107 to be output based on the image processing accuracy analysis value 109. As a result, when the error correction control unit 4 generates the drive correction signal 104 using the image processing measurement value 107, it is not necessary to use a value with an unnecessarily large number of bits for calculation, thereby reducing the computational load.

[0054] In this embodiment, the image processing method of the image processing unit 7 is specifically described as using the phase-limited correlation method. However, as mentioned above, pattern matching, deep learning, etc. may also be used. In this case, the template image analysis unit 9 can calculate the image processing accuracy analysis value 109 using the same image processing method as the image processing unit 7.

[0055] Furthermore, in this embodiment, considering the situation where there are multiple targets 5, the targets 5 are located in multiple locations, or the targets 5 are located in an uncertain location, the camera 3 is mechanically connected to the mechanical drive unit 1 in the visual feedback control device 20. However, if the location of the target 5 is already determined, the visual feedback control device 20 may fix the camera 3 in a location where the target 5 can be photographed.

[0056] In this embodiment, the visual feedback control device 20 has the mechanical front end 2 and camera 3 mechanically connected to the mechanical drive unit 1. However, this is not limiting. The visual feedback control device 20 may also be configured such that the mechanical front end 2 and camera 3 are fixed, the target object 5 is mechanically connected to the mechanical drive unit 1, and the target object 5 is positioned relative to the mechanical front end 2.

[0057] Implementation method 2.

[0058] In the second embodiment, the visual feedback control device includes an analysis template image storage unit storing analysis template images.

[0059] Figure 8 This is a block diagram showing a configuration example of a visual feedback control device 20b according to Embodiment 2. Figure 1 In the visual feedback control device 20 of the illustrated first embodiment, the template image analyzing unit 9 is replaced with a template image analyzing unit 9 b and an analysis template image storage unit 10 is added.

[0060] Next, the operation of the visual feedback control device 20b will be described. Figure 2 The flowchart of the operation of the visual feedback control device 20 of the first embodiment shown is the same. The analysis template image storage unit 10 stores an analysis template image 110A captured by shifting a predetermined distance from the template image 106 stored in the template image storage unit 6, and an analysis template image offset 110B indicating the predetermined distance. Specifically, the analysis template image storage unit 10 stores analysis template image 110A captured by shifting a predetermined distance from the imaging range of template image 106. The predetermined distance is not expressed in pixels, but rather in decimals.

[0061] The template image analyzing unit 9b calculates the measurement accuracy of the image processing measurement value 107 using the template image 106 and the analysis template image 110A, and outputs it as an image processing accuracy analysis value 109. Figure 9 and Figure 10 Provide explanation. Figure 9 This is a block diagram showing a configuration example of the template image analysis unit 9b included in the visual feedback control device 20b according to the second embodiment. Figure 10 This is a flowchart showing the operation of the template image analyzing unit 9b included in the visual feedback control device 20b according to the second embodiment. Figure 10 The operation of the template image analyzing unit 9b is shown in FIG. Figure 2 The detailed operation of step S11 of the flowchart shown in FIG.

[0062] The template image processing unit 92b calculates and outputs a calculated deviation value 192 as a result of image processing using the template image 106 and the analysis template image 110A (step S31). Specifically, the template image processing unit 92b performs image processing similar to that performed by the image processing unit 7 using the template image 106 and the analysis template image 110A, and calculates the deviation between the analysis template image 110A and the template image 106. The template image processing unit 92b outputs the calculated deviation value 192.

[0063] Image processing accuracy analysis unit 93b calculates image processing accuracy analysis value 109 based on calculated deviation value 192 and analysis template image deviation 110B (step S32). Specifically, image processing accuracy analysis unit 93b determines the accuracy of position measurement of target object 5 when image processing unit 7 uses template image 106 in image processing based on the difference between calculated deviation value 192 and the previously known offset distance of analysis template image 110A. Image processing accuracy analysis unit 93b calculates image processing accuracy analysis value 109 based on this position measurement accuracy.

[0064] The hardware configuration of the visual feedback control device 20b will be described. In the visual feedback control device 20b, the analysis template image storage unit 10 is a memory. The rest of the configuration of the visual feedback control device 20b is the same as that of the visual feedback control device 20 of the first embodiment.

[0065] As described above, according to this embodiment, in the visual feedback control device 20b, the template image analyzing unit 9b analyzes the template image 106 stored in the template image storage unit 6 and the analysis template image 110A stored in the analysis template image storage unit 10, thereby calculating the image processing accuracy analysis value 109, thereby enabling the user of the visual feedback control device 20b to ascertain in advance the accuracy of the image processing measurement value 107 output by the image processing unit 7. This allows the user of the visual feedback control device 20b to ascertain the accuracy of the image processing measurement value 107 output by the image processing unit 7, thereby ascertaining the accuracy of positioning the mechanical front end 2 relative to the target object 5.

[0066] Furthermore, in this embodiment, the analysis template image storage unit 10 may store multiple analysis template images 110A captured at a predetermined offset from the template image 106 stored in the template image storage unit 6. In this case, the template image analysis unit 9b calculates the image processing accuracy analysis value 109 using the multiple analysis template images 110A and the template image 106. Specifically, the template image analysis unit 9b calculates the image processing accuracy analysis value 109 based on the calculated offset values ​​for the multiple analysis template images 110A. For example, the template image analysis unit 9b may output the worst value among the multiple calculated image processing accuracy analysis values ​​109 as the image processing accuracy analysis value 109.

[0067] Furthermore, in this embodiment, the template image analysis unit 9b can calculate the image processing accuracy analysis value 109 using the analysis template image 110A and the template image 106, or a plurality of analysis template images 110A, or a plurality of analysis template images 110A and the template image 106. In this case, the template image analysis unit 9b, similar to the template image analysis unit 9 in the first embodiment, generates an analysis image 191A offset from the template image 106 by a predetermined distance, and calculates the image processing accuracy analysis value 109 using the analysis image 191A and the template image 106.

[0068] In addition, in this embodiment, the image processing accuracy analysis value 109 calculated by the template image analysis unit 9b can be used to Figure 7 The visual feedback control device is the same as the visual feedback control device 20a of the first embodiment shown in FIG. Although not shown in the figure, in the visual feedback control device, the template image analysis unit 9b outputs the calculated image processing accuracy analysis value 109 to the image processing unit 7a. The image processing unit 7a can output the image processing measurement value 107 that has been smoothed using the resolution determined by the image processing accuracy analysis value 109. In other words, the image processing unit 7a determines the resolution of the image processing measurement value 107 to be output based on the image processing accuracy analysis value 109. As a result, when the error correction control unit 4 generates the drive correction signal 104 using the image processing measurement value 107, there is no need to use a value with an unnecessarily large number of bits for calculation, thereby reducing the calculation load.

[0069] Implementation method 3.

[0070] In the third embodiment, the visual feedback control device includes a high-pixel template image storage unit storing a high-pixel template image.

[0071] Figure 11 : is a block diagram showing a configuration example of a visual feedback control device 20c according to Embodiment 3. Figure 1 In the visual feedback control device 20 of the illustrated first embodiment, the template image analyzing unit 9 is replaced with a template image analyzing unit 9 c , and a high-pixel template image storage unit 11 is added.

[0072] Next, the operation of the visual feedback control device 20c will be described. Figure 2The flowchart of the operation of the visual feedback control device 20 of the first embodiment shown is the same. The high-pixel template image storage unit 11 stores an image having a higher pixel count than the template image 106 stored in the template image storage unit 6 and used for image processing by the image processing unit 7, and having the same range as the template image 106, as a high-pixel template image 111. In other words, the high-pixel template image storage unit 11 stores an image captured in the same range as the capture range of the template image 106, but captured with a higher resolution than the template image 106.

[0073] The template image analysis unit 9c calculates the measurement accuracy of the image processing measurement value 107 using the template image 106 and the high-pixel template image 111, and outputs it as an image processing accuracy analysis value 109. Figure 12 Provide explanation. Figure 12 This is a block diagram showing a configuration example of the template image analysis unit 9c included in the visual feedback control device 20c according to the third embodiment. Figure 4 The flowchart of the operation of the template image analyzing unit 9 shown in the embodiment 1 is the same. The template image analyzing unit 9c includes an analysis image generating unit 91c, a template image processing unit 92c, and an image processing accuracy analyzing unit 93c.

[0074] The analytical image generator 91c generates and outputs an analytical image 191A and an analytical image offset 191B based on the high-pixel template image 111 (step S21). Specifically, the analytical image generator 91c generates analytical image 191A by depixelating it to the same number of pixels as the template image 106, within a range offset by a predetermined distance from the high-pixel template image 111. The predetermined distance is not a single pixel unit of the template image 106, but rather a number of pixels including decimals. The analytical image generator 91c then outputs the predetermined distance as analytical image offset 191B.

[0075] The template image processing unit 92c calculates and outputs a calculated deviation value 192 as a result of image processing using the template image 106 and the analysis image 191A (step S22). Specifically, the template image processing unit 92c performs image processing similar to that performed by the image processing unit 7 using the template image 106 and the analysis image 191A, and calculates the deviation between the analysis image 191A and the template image 106. The template image processing unit 92c outputs the calculated deviation value 192.

[0076] Image processing accuracy analysis unit 93c calculates image processing accuracy analysis value 109 based on calculated deviation value 192 and analysis image deviation 191B (step S23). Specifically, image processing accuracy analysis unit 93c determines the accuracy of position measurement of target object 5 when image processing unit 7 uses template image 106 based on the difference between calculated deviation value 192 and analysis image deviation 191B, which represents the offset distance when generating analysis image 191A from high-pixel template image 111 within the same range as template image 106. Image processing accuracy analysis unit 93c calculates image processing accuracy analysis value 109 based on this position measurement accuracy.

[0077] The hardware structure of the visual feedback control device 20c will be described. In the visual feedback control device 20c, the high-pixel template image storage unit 11 is a memory. The rest of the structure of the visual feedback control device 20c is the same as that of the visual feedback control device 20 of the first embodiment.

[0078] As described above, according to this embodiment, in the visual feedback control device 20c, the template image analysis unit 9c analyzes the template image 106 stored in the template image storage unit 6 and the high-pixel template image 111 stored in the high-pixel template image storage unit 11, thereby calculating the image processing accuracy analysis value 109, thereby enabling the user of the visual feedback control device 20c to ascertain in advance the accuracy of the image processing measurement value 107 output by the image processing unit 7. This allows the user of the visual feedback control device 20c to ascertain the accuracy of the image processing measurement value 107 output by the image processing unit 7, thereby ascertaining the accuracy of positioning the mechanical front end 2 relative to the target object 5.

[0079] Furthermore, in this embodiment, the template image analysis unit 9c may generate the analysis image 191A, the analysis image deviation 191B, and the deviation calculation value 192 multiple times. In this case, the template image analysis unit 9c calculates the image processing accuracy analysis value 109 using the analysis image 191A, the analysis image deviation 191B, and the deviation calculation value 192 generated by each process. For example, the template image analysis unit 9c may output the worst value among the calculated multiple image processing accuracy analysis values ​​109 as the image processing accuracy analysis value 109.

[0080] Furthermore, the high-pixel template image storage unit 11 stores an image covering the same range as the template image 106 as the high-pixel template image 111, but this is not limiting. If the image has a higher pixel count than the template image 106 when compared to the template image 106 within the same range, the high-pixel template image storage unit 11 may store an image covering a wider range than the template image 106 as the high-pixel template image 111. In this case, the template image analysis unit 9c performs the same processing as when the high-pixel template image storage unit 11 stores the high-pixel template image 111 covering the same range as the template image 106.

[0081] In addition, in this embodiment, the image processing accuracy analysis value 109 calculated by the template image analysis unit 9c can be used to Figure 7 The visual feedback control device is the same as the visual feedback control device 20a of the first embodiment shown in FIG. Although not shown in the figure, in the visual feedback control device, the template image analysis unit 9c outputs the calculated image processing accuracy analysis value 109 to the image processing unit 7a. The image processing unit 7a can output the image processing measurement value 107 that has been smoothed using the resolution determined by the image processing accuracy analysis value 109. In other words, the image processing unit 7a determines the resolution of the image processing measurement value 107 to be output based on the image processing accuracy analysis value 109. As a result, when the error correction control unit 4 generates the drive correction signal 104 using the image processing measurement value 107, there is no need to use a value with an unnecessary number of bits for calculation, thereby reducing the calculation load.

[0082] Implementation method 4.

[0083] In the fourth embodiment, the visual feedback control device includes a template image generating unit that generates the template image 106. The following describes the differences from the third embodiment.

[0084] Figure 13 : is a block diagram showing a configuration example of a visual feedback control device 20d according to Embodiment 4. Figure 11 In the visual feedback control device 20 c of the third embodiment shown, the template image storage unit 6 and the high-pixel template image storage unit 11 are replaced with a template image storage unit 6 d and a high-pixel template image storage unit 11 d , and a template image generation unit 12 is added.

[0085] Next, the operation of the visual feedback control device 20d will be described. Figure 14This is a flowchart illustrating the operation of the visual feedback control device 20d according to Embodiment 4. The high-pixel template image storage unit 11d stores an image having a higher pixel count than the template image 106 stored in the template image storage unit 6d and used for image processing by the image processing unit 7, and having the same range as the template image 106, as a high-pixel template image 111. Specifically, the high-pixel template image storage unit 11d stores an image captured within the same range as the template image 106 and captured with a higher resolution than the template image 106.

[0086] The template image generation unit 12 generates the template image 106 based on the high-pixel template image 111 (step S41). Specifically, the template image generation unit 12 generates the template image 106 by reducing the pixels of the high-pixel template image 111. The template image storage unit 6d stores the template image 106 generated by the template image generation unit 12 (step S42). The operation of the visual feedback control device 20d in steps S43 to S48 is the same as that in step S47. Figure 2 The operations of step S11 to step S16 of the visual feedback control device 20 of embodiment 1 shown in FIG. Figure 14 In the flowchart shown, the operations of steps S41 to S43 and step S44 can be performed in parallel or in reverse order. The visual feedback control device 20d can repeatedly perform the operations of steps S44 to S48 until positioning is completed.

[0087] The template image analysis unit 9c calculates the measurement accuracy of the image processing measurement value 107 using the template image 106 and the high-pixel template image 111, and outputs it as an image processing accuracy analysis value 109. The operation of the template image analysis unit 9c is the same as that of the template image analysis unit 9c in Embodiment 3. In the template image analysis unit 9c, the analysis image generation unit 91c generates an analysis image 191A and an analysis image deviation 191B based on the high-pixel template image 111. The template image processing unit 92c calculates a deviation calculation value 192 as a result of image processing using the template image 106 and the analysis image 191A. The image processing accuracy analysis unit 93c calculates an image processing accuracy analysis value 109 based on the deviation calculation value 192 and the analysis image deviation 191B.

[0088] The hardware structure of the visual feedback control device 20d will be described. In the visual feedback control device 20d, the template image generation unit 12 is implemented by a processing circuit. The processing circuit can be a processor and memory that executes a program stored in a memory, or it can be dedicated hardware. The rest of the structure of the visual feedback control device 20d is the same as that of the visual feedback control device 20c in Embodiment 3.

[0089] As described above, according to this embodiment, in the visual feedback control device 20d, the template image generation unit 12 generates the template image 106 based on the high-pixel template image 111 stored in the high-pixel template image storage unit 11d. The template image storage unit 6d stores the template image 106 generated by the template image generation unit 12. The template image analysis unit 9c analyzes the template image 106 stored in the template image storage unit 6d and the high-pixel template image 111 stored in the high-pixel template image storage unit 11d to calculate the image processing accuracy analysis value 109, thereby enabling the user of the visual feedback control device 20d to ascertain the accuracy of the image processing measurement value 107 output by the image processing unit 7. This allows the user of the visual feedback control device 20d to ascertain the accuracy of the image processing measurement value 107 output by the image processing unit 7, thereby ascertaining the accuracy of positioning the mechanical tip 2 relative to the target object 5.

[0090] Furthermore, in this embodiment, the template image analysis unit 9c may generate the analysis image 191A, the analysis image deviation 191B, and the deviation calculation value 192 multiple times. In this case, the template image analysis unit 9c calculates the image processing accuracy analysis value 109 using the analysis image 191A, the analysis image deviation 191B, and the deviation calculation value 192 generated by each process. For example, the template image analysis unit 9c may output the worst value among the calculated multiple image processing accuracy analysis values ​​109 as the image processing accuracy analysis value 109.

[0091] The high-pixel template image storage unit 11d stores an image covering the same range as the template image 106 as the high-pixel template image 111, but this is not limiting. If the image has a higher pixel count than the template image 106 in the same range, the high-pixel template image storage unit 11d may store an image covering a wider range than the template image 106 as the high-pixel template image 111. In this case, the template image generation unit 12 can generate the template image 106 by reducing the pixel count of the image cut out from the high-pixel template image 111, by selecting the range containing the target object 5.

[0092] In addition, in this embodiment, the image processing accuracy analysis value 109 calculated by the template image analysis unit 9c can be used to Figure 7The visual feedback control device is the same as the visual feedback control device 20a of the first embodiment shown in FIG. Although not shown in the figure, in the visual feedback control device, the template image analysis unit 9c outputs the calculated image processing accuracy analysis value 109 to the image processing unit 7a. The image processing unit 7a can output the image processing measurement value 107 that has been smoothed using the resolution determined by the image processing accuracy analysis value 109. In other words, the image processing unit 7a determines the resolution of the image processing measurement value 107 to be output based on the image processing accuracy analysis value 109. As a result, when the error correction control unit 4 generates the drive correction signal 104 using the image processing measurement value 107, there is no need to use a value with an unnecessary number of bits for calculation, thereby reducing the calculation load.

[0093] Implementation method 5.

[0094] In the fifth embodiment, in the visual feedback control device, the template image generation unit generates the template image 106 and the candidate template images based on the image processing accuracy analysis value 109. The differences from the fourth embodiment will be described.

[0095] Figure 15 : is a block diagram showing a configuration example of a visual feedback control device 20e according to Embodiment 5. Figure 13 In the visual feedback control device 20d of the fourth embodiment shown, the template image analyzing unit 9c, the high-pixel template image storage unit 11d, and the template image generating unit 12 are replaced by a template image analyzing unit 9e, a high-pixel template image storage unit 11e, and a template image generating unit 12e.

[0096] Next, the operation of the visual feedback control device 20e will be described. Figure 16 This is a flowchart illustrating the operation of the visual feedback control device 20e according to Embodiment 5. The high-pixel template image storage unit 11e stores, as a high-pixel template image 111, an image that covers a wider range than the template image 106 stored in the template image storage unit 6d and used for image processing by the image processing unit 7 and includes the target object 5, which has a higher pixel count when compared to the template image 106 within the same range. The template image generation unit 12e cuts out the image including the target object 5 from the high-pixel template image 111, reducing the pixel count to generate a candidate template image 112 (step S51).

[0097] Regarding the analysis method of the candidate template image 112 by the template image analysis unit 9e, the following is used: Figure 17 Provide explanation. Figure 17 This is a block diagram showing a configuration example of the template image analysis unit 9e included in the visual feedback control device 20e according to the fifth embodiment. Figure 4 The flowchart of the operation of the template image analyzing unit 9 shown in the embodiment 1 is the same. The template image analyzing unit 9e includes an analysis image generating unit 91e, a template image processing unit 92e, and an image processing accuracy analyzing unit 93e.

[0098] The analytical image generator 91e generates and outputs an analytical image 191A and an analytical image offset 191B based on the high-pixel template image 111 (step S21). Specifically, the analytical image generator 91e uses the high-pixel template image 111 and generates analytical image 191A, which is depixelated to the same number of pixels as the candidate template image 112, within a range offset by a specified distance from the candidate template image 112. The specified distance is not in units of a single pixel of the candidate template image 112, but rather is a number of pixels including decimals. The analytical image generator 91e then outputs the specified distance as analytical image offset 191B.

[0099] The template image processing unit 92e calculates and outputs a calculated deviation value 192 as a result of image processing using the candidate template image 112 and the analysis image 191A (step S22). Specifically, the template image processing unit 92e performs image processing similar to that performed by the image processing unit 7 using the candidate template image 112 and the analysis image 191A, and calculates the deviation between the analysis image 191A and the candidate template image 112. The template image processing unit 92e outputs the calculated deviation value 192.

[0100] The image processing accuracy analysis unit 93e calculates an image processing accuracy analysis value 109 based on the calculated deviation value 192 and the analysis image deviation 191B (step S23). Specifically, the image processing accuracy analysis unit 93e determines the accuracy of the position measurement of the target object 5 when the image processing unit 7 uses the candidate template image 112 in image processing based on the difference between the analysis image deviation 191B (the offset distance when generating the analysis image 191A from the previously known candidate template image 112) and the calculated deviation value 192. Based on this position measurement accuracy, the image processing accuracy analysis unit 93e calculates the image processing accuracy analysis value 109. In this embodiment, the image processing accuracy analysis unit 93e outputs the image processing accuracy analysis value 109 to the template image generation unit 12e.

[0101] Returning to the description of the operation of the visual feedback control device 20e, after the template image analysis unit 9e calculates the image processing accuracy analysis value 109, the template image generation unit 12e cuts the image containing the target object 5 from the high-pixel template image 111 at a different range than the previous candidate template image 112, and then reduces the pixels to generate a new candidate template image 112. The template image generation unit 12e can randomly determine the cutting location of the new candidate template image 112 through heuristics, or it can heuristically determine it using the image processing accuracy analysis value 109 as an evaluation value. The template image analysis unit 9e uses the new candidate template image 112 and the high-pixel template image 111 to calculate the image processing accuracy analysis value 109 through the same process as described above.

[0102] The visual feedback control device 20e repeatedly implements the cutting of the candidate template image 112 in the template image generation unit 12e and the calculation of the image processing accuracy analysis value 109 in the template image analysis unit 9e. The template image generation unit 12e uses the image processing accuracy analysis value 109 to select the candidate template image 112 with the best accuracy of the image processing measurement value 107 as the template image 106 (step S52). At this stage, the template image analysis unit 9e calculates the image processing accuracy analysis value 109 as the accuracy of the image processing measurement value 107 output by the image processing unit 7. The template image storage unit 6d stores the template image 106 generated by the template image generation unit 12e (step S53). The subsequent actions of the visual feedback control device 20e from step S54 to step S58 are the same as those in step S57. Figure 14 The operations of the visual feedback control device 20d of the embodiment 4 shown in FIG. 4 are the same as those of the step S44 to step S48. Figure 16 In the flowchart shown, the operations of steps S51 to S53 and step S54 can be performed in parallel or in reverse order. The visual feedback control device 20e can repeatedly perform the operations of steps S54 to S58 until positioning is completed.

[0103] Here, a method for heuristically determining a cropping location for a candidate template image 112 using the image processing accuracy analysis value 109 as an evaluation value in the template image generation unit 12e will be described. Genetic algorithms, particle swarm optimization (PSO), and other methods are considered as heuristic methods for determining a cropping location for a candidate template image 112 by the template image generation unit 12e. Here, as an example, a case where the template image generation unit 12e uses the particle swarm optimization method will be described. In this case, the position of each particle used in the particle swarm optimization method corresponds to the cropping location for the candidate template image 112. Each particle has four pieces of information: position, movement speed, position at which the image processing accuracy analysis value 109 is optimal, and image processing accuracy analysis value 109. The template image generation unit 12e searches for the optimal cropping location for the template image 106 while updating the position information of each particle. In this case, the visual feedback control device 20e also repeats the sequence of cutting out the candidate template image 112 in the template image generating unit 12e and calculating the image processing accuracy analysis value 109 in the template image analyzing unit 9e.

[0104] In the initial sequence, the template image generator 12e cuts out an image containing the target object 5 from the high-pixel template image 111 stored in the high-pixel template image storage unit 11e as a plurality of candidate template images 112. Here, the template image generator 12e cuts out the plurality of candidate template images 112 so that they are randomly arranged relative to the high-pixel template image 111. At this time, the location where each candidate template image 112 is cut out by the template image generator 12e is used as the position information for each particle.

[0105] The template image analysis unit 9e uses a plurality of candidate template images 112 and a high-pixel template image 111 to generate an analysis image 191A for each candidate template image 112 based on the high-pixel template image 111. The template image analysis unit 9e offsets each candidate template image 112 by a predetermined distance, depixels it to the same number of pixels as the candidate template image 112, and generates analysis image 191A. The predetermined distance is a pixel number including decimals relative to a single pixel of the candidate template image 112. Using analysis image 191A, the template image analysis unit 9e calculates an image processing accuracy analysis value 109 for each candidate template image 112.

[0106] In the second sequence, the template image generator 12e updates the positional information of each particle based on the initial positional information of each particle and the image processing accuracy analysis value 109, which serves as an evaluation value. Furthermore, the template image generator 12e updates the movement speed of each particle, calculated based on the amount of positional movement. The template image generator 12e sets the initial position and image processing accuracy analysis value 109 as the position and image processing accuracy analysis value 109 that best represent the image processing accuracy analysis value 109. Based on the positional information of each particle, the template image generator 12e generates a new candidate template image 112 cut from the high-pixel template image 111. The template image analyzer 9e uses each new candidate template image 112 and the high-pixel template image 111 to calculate the image processing accuracy analysis value 109 for each candidate template image 112.

[0107] In the third and subsequent sequences, the template image generator 12e updates the position information, movement speed, and best position and image processing accuracy analysis value 109 of each particle based on the previous position information, movement speed, and best position and image processing accuracy analysis value 109 of each particle, as well as the previous image processing accuracy analysis value 109 as an evaluation value. Based on the position information of each particle, the template image generator 12e generates a new candidate template image 112 cut out from the high-pixel template image 111. The template image analyzer 9e calculates the image processing accuracy analysis value 109 for each candidate template image 112 using each new candidate template image 112 and the high-pixel template image 111.

[0108] The visual feedback control device 20e terminates the sequence repetition by determining that the third and subsequent sequences have been repeated a predetermined number of times, or that the best image processing accuracy analysis value 109 for each particle has converged. Thus, in the visual feedback control device 20e, the template image generation unit 12e can select the best candidate template image 112 corresponding to the position information from the best image processing accuracy analysis value 109 for each particle, and output it as the template image 106.

[0109] As described above, the template image generation unit 12e generates a plurality of candidate template images 112 serving as candidates for the template image 106 from the high-pixel template image 111 based on the image processing accuracy analysis value 109. The template image analysis unit 9e outputs the measurement accuracy of the image processing measurement value 107 calculated using each of the plurality of candidate template images 112 and the high-pixel template image 111 as the image processing accuracy analysis value 109 corresponding to each candidate template image 112. Based on the image processing accuracy analysis value 109, the template image generation unit 12e outputs the candidate template image 112 corresponding to the image processing measurement value 107 with the highest measurement accuracy as the template image 106.

[0110] In addition, the hardware structure of the visual feedback control device 20e is the same as that of the visual feedback control device 20d in the fourth embodiment.

[0111] As described above, according to this embodiment, the visual feedback control device 20e repeats the generation of the candidate template image 112 by the template image generation unit 12e and the calculation of the image processing accuracy analysis value 109 using the candidate template image 112 and the high-pixel template image 111 by the template image analysis unit 9e, and selects the candidate template image 112 with the best image processing accuracy analysis value 109 as the template image 106. Thus, the visual feedback control device 20e generates a template image 106 with high measurement accuracy of the actual position relative to the target position, and uses the template image 106 that yields the high-precision image processing measurement value 107, thereby enabling high-precision positioning of the mechanical front end 2.

[0112] Furthermore, in this embodiment, the template image analysis unit 9e may generate the analysis image 191A, the analysis image deviation 191B, and the deviation calculation value 192 multiple times. In this case, the template image analysis unit 9e calculates the image processing accuracy analysis value 109 using the analysis image 191A, the analysis image deviation 191B, and the deviation calculation value 192 generated by each process. For example, the template image analysis unit 9e may output the worst value among the calculated multiple image processing accuracy analysis values ​​109 as the image processing accuracy analysis value 109.

[0113] In addition, in this embodiment, the image processing accuracy analysis value 109 calculated by the template image analysis unit 9e can be used to Figure 7The visual feedback control device is the same as the visual feedback control device 20a of the first embodiment shown in FIG. Although not shown in the figure, in the visual feedback control device, the template image analysis unit 9e outputs the calculated image processing accuracy analysis value 109 to the image processing unit 7a. The image processing unit 7a can output the image processing measurement value 107 that has been smoothed using the resolution determined by the image processing accuracy analysis value 109. That is, the image processing unit 7a determines the resolution of the image processing measurement value 107 to be output based on the image processing accuracy analysis value 109. As a result, when the error correction control unit 4 generates the drive correction signal 104 using the image processing measurement value 107, there is no need to use a value with an unnecessary number of bits for calculation, thereby reducing the calculation load.

[0114] The configuration shown in the above embodiment is merely an example, and can be combined with other known technologies, and the embodiments can be combined with each other. Part of the configuration can also be omitted or changed without departing from the scope of the invention.

[0115] Description of the label

[0116] 1 Mechanical drive unit, 2 Mechanical front end, 3 Camera, 4 Error correction control unit, 5 Target, 6, 6d Template image storage unit, 7, 7a Image processing unit, 8 Drive instruction generation unit, 9, 9b, 9c, 9e Template image analysis unit, 10 Analysis template image storage unit, 11, 11d, 11e High-pixel template image storage unit, 12, 12e Template image generation unit, 20, 20a, 20b, 20c, 20d, 20e Visual feedback control device, 91, 91c, 91e Analysis image generation unit, 92, 9 2b, 92c, 92e template image processing unit, 93, 93b, 93c, 93e image processing accuracy analysis unit, 103 target object image, 104 drive correction signal, 106 template image, 107 image processing measurement value, 108 drive instruction signal, 109 image processing accuracy analysis value, 110A template image for analysis, 110B template image deviation for analysis, 111 high-pixel template image, 112 candidate template image, 191A image for analysis, 191B image deviation for analysis, 192 deviation calculation value.

Claims

1. A visual feedback control device that controls the positioning action of positioning a mechanical front end at a target object. The visual feedback control device is characterized by having: a camera that captures the target object and outputs the captured image as a target object image; a template image storage unit for storing a template image obtained by pre-photographing the target object; an image processing unit that uses the target image and the template image to measure the actual position of the target object with a sub-pixel precision that is higher than the pixel size of the pixels of the target image and the template image, and outputs the measured value as an image processing measurement value; a drive command generating unit for generating a drive command signal as a command for controlling a positioning operation of a mechanical drive unit connected to the mechanical front end; an error correction control unit that uses the image processing measurement value to correct an error in the drive command signal so that the mechanical front end is positioned at the position of the target object, thereby generating a drive correction signal; the mechanical driving unit changes the relative position of the mechanical front end with respect to the target object based on the driving correction signal; an analysis image generating unit configured to generate an analysis image by shifting the template image by a fractional value relative to one pixel of the template image; a template image processing unit that uses the analysis image and the template image to measure a deviation between the analysis image and the template image by the same method as the image processing unit, and outputs the deviation as a calculated value; as well as The image processing accuracy analysis unit calculates an image processing accuracy analysis value based on the amount of movement of the analysis image relative to the template image and the calculated value of the deviation.

2. The visual feedback control device according to claim 1, characterized in that: The analysis template image storage unit is provided, which stores the analysis template image captured by moving the image at a predetermined distance relative to the capturing range of the template image. The template image processing unit outputs the calculated value of the amount of deviation using the template image and the analysis template image.

3. The visual feedback control device according to claim 1, characterized in that: A high-pixel template image storage unit is provided for storing images captured in a wider range than the capturing range of the template image and captured with a higher resolution than the template image, i.e., high-pixel template images. The template image processing unit outputs the calculated value of the deviation amount using the template image and the high-pixel template image.

4. The visual feedback control device according to claim 1, characterized in that: have: a high-pixel template image storage unit for storing a high-pixel template image, which is an image captured in a wider range than the capturing range of the template image and captured with a higher resolution than the template image; as well as a template image generating unit, which generates the template image based on the high-pixel template image, The template image storage unit stores the template image generated by the template image generation unit. The template image processing unit outputs the calculated value of the deviation amount using the template image and the high-pixel template image.

5. The visual feedback control device according to claim 4, characterized in that: The template image generating unit generates a plurality of candidate template images serving as candidates for the template image from the high-pixel template image based on the image processing accuracy analysis value. The image processing accuracy analysis unit outputs the measurement accuracy of the image processing measurement value calculated using each of the plurality of candidate template images and the high-pixel template image as the image processing accuracy analysis value corresponding to each of the candidate template images. The template image generating unit outputs the candidate template image corresponding to the image processing measurement value having the best measurement accuracy as the template image based on the image processing accuracy analysis value.

6. The visual feedback control device according to any one of claims 1 to 5, characterized in that: The image processing unit determines a resolution of the image processing measurement value to be output based on the image processing accuracy analysis value.

Images