A collimator focal plane assembly alignment method using a laser tracker

Abstract

In order to solve the adjustment problem of the coaxial collimator focal plane assembly with vertical optical axis, the application provides a collimator focal plane assembly adjustment method using a laser tracker. First, the laser interferometer is used to give the collimator focal point position; then, the laser tracker is erected near the plane mirror and measured to establish the plane mirror coordinate system, the collimator optical axis is introduced, and the common conversion point coordinates are measured; again, the laser tracker is erected near the collimator, the plane mirror coordinate system is restored by using the common conversion point, the collimator optical axis straight line is constructed between the folding mirror and the interferometer by measuring the folding mirror normal line, and the straight line is used as the theoretical direction of the focal plane assembly guide rail; finally, the iterative process of the adjustment and test of the guide rail direction and the normal direction of the target of the focal plane assembly is carried out according to the measured direction and the theoretical direction, and the adjustment of the collimator focal plane assembly is finally completed. The application can meet the adjustment requirements of the parallelism between the guide rail direction of the collimator focal plane assembly and the collimator optical axis.

Description

TECHNICAL FIELD

[0001] The present application belongs to the field of optical system adjustment technology, and particularly relates to a collimator focal plane assembly adjustment method using a laser tracker, which is suitable for the adjustment of a guide rail and a target for defocusing adjustment in a coaxial collimator focal plane assembly with a vertical optical axis and the position of the target relative to the optical axis and focal point of the collimator, and can meet the parallelism adjustment requirement of the guide rail direction of the collimator focal plane assembly and the optical axis of the collimator. BACKGROUND

[0002] With the increasing resolution requirement of space remote sensors, the aperture of remote cameras is also increasing. In order to overcome the influence of the gravity deformation of a large-aperture primary mirror in a horizontal optical axis state, a vertical adjustment method of the remote sensor is developed. After the optical lens adjustment is completed, the position of the focal plane device of the remote camera needs to be accurately calibrated to ensure that the position of the focal plane assembly is strictly coincident with the focal plane position of the optical lens. Generally, the calibration of the focal plane device is completed by using the transmission function test method. Therefore, in order to ensure that the optical performance of the optical lens adjusted by the vertical adjustment method does not change during the calibration of the focal plane device, a collimator with a vertical optical axis needs to be developed to complete the transmission function test of the lens.

[0003] In the process of position calibration of the focal plane device of the remote camera, the calculation method of the axial magnification is generally used, that is, the transmission function value of the remote camera is maximized by defocusing the target of the collimator. The defocusing amount of the target of the collimator relative to the infinite position is calculated by the axial magnification, and the focal plane device is adjusted according to the data, so that the transmission function value of the remote camera is maximized when the target of the collimator is at the infinite position. The defocusing amount of the target of the collimator is generally adjusted by a one-dimensional translation guide rail to move the target along the optical axis of the collimator. During the adjustment of the collimator, it is necessary to ensure that the moving direction of the one-dimensional guide rail is parallel to the optical axis of the collimator. If the parallelism of the moving direction of the guide rail and the optical axis of the collimator is poor, the defocusing amount of the target will be inaccurate, which will lead to the repeated positioning of the focal plane device of the remote camera due to the inaccurate adjustment amount of the focal plane device. SUMMARY

[0004] The technical problem to be solved by the present application is that the parallelism adjustment of the target guide rail direction, the normal direction of the target plane and the optical axis of the coaxial collimator with a vertical optical axis. Based on the wave aberration test optical path during the adjustment of the collimator and according to the test application principle of the laser tracker in optical adjustment, a collimator focal plane assembly adjustment method using a laser tracker is proposed.

[0005] The technical solution of the present application is as follows:

[0006] A collimator focal plane assembly adjustment method using a laser tracker, the collimator focal plane assembly comprising a guide rail and a target mounted on the guide rail, comprising:

[0007] After the collimator adjustment is completed, the wavefront aberration of each field of view of the collimator is given by using the laser interferometer, and the focal point position of the central field of view of the collimator is determined, the collimator is an optical system with a vertical optical axis, and during the adjustment, the collimator is located on a vertical adjustment tower with a height of 3 m, and the light outlet is directed towards the ground;

[0008] A laser tracker 1# station is erected near the plane mirror to establish a plane mirror coordinate system, the optical axis of the collimator is introduced, and the coordinates of the common conversion point are measured; the laser tracker 1# station is located on the ground and is 1-2 m away from the plane mirror;

[0009] A laser tracker 2# station is erected near the collimator, the plane mirror coordinate system is restored by using the common conversion point, the straight line of the optical axis of the collimator is constructed between the folding mirror and the laser interferometer as the theoretical direction of the guide rail of the focal plane assembly by measuring the normal line of the folding mirror; the laser tracker 2# station is located in the same horizontal plane as the collimator and is 1-2 m away from the collimator;

[0010] The actual direction of the guide rail of the focal plane assembly and the normal direction of the target plane are adjusted and tested iteratively according to the theoretical direction of the guide rail, and finally the adjustment of the collimator focal plane assembly is completed.

[0011] Preferably, the position of the laser interferometer satisfies:

[0012] After the collimator adjustment is completed, the plane mirror is rotated, the wavefront aberration of each field of view of the collimator is given according to the position of the field of view mark on the target, and the position of the central field of view is the position of the laser interferometer.

[0013] Preferably, the method for introducing the optical axis of the collimator is as follows:

[0014] Uniformly distributed measuring points are measured on the reflecting surface of the plane mirror, at each measuring point, the target ball is lightly touched on the reflecting surface of the plane mirror, and the three-dimensional coordinates of the target ball are measured by using the laser tracker 1# station, the number of measuring points is ≥6, in the SA software matched with the laser tracker 1# station, a plane is constructed by using the three-dimensional coordinates of the target ball at all measuring points, and a straight line perpendicular to the plane is constructed, the straight line is the normal line of the plane mirror and also the optical axis of the collimator.

[0015] Preferably, the method for establishing the plane mirror coordinate system is as follows:

[0016] The plane mirror coordinate system is constructed in the SA software of the laser tracker 1# station, wherein the optical axis of the collimator is defined as the Z axis, and two different measuring points on the surface of the plane mirror are arbitrarily selected as the origin and the X axis positioning point.

[0017] Preferably, the common transfer points are arranged on the support structure of the collimator, the number of which is greater than or equal to 6, to ensure that the laser tracker 1# station and the laser tracker 2# station near the plane mirror can effectively measure all the common transfer points.

[0018] When measuring the coordinates of the common transfer points, the plane mirror coordinate system is set as the working coordinate system in the SA software of the laser tracker 1# station, and the three-dimensional coordinates of all the common transfer points are measured by using the laser tracker 1# station.

[0019] Preferably, the method for restoring the plane mirror coordinate system by using the common transfer points is as follows:

[0020] The three-dimensional coordinate values of the common transfer points measured by the laser tracker 1# station are input into the SA software of the laser tracker 2# station, the common transfer points are measured by using the instrument positioning function and the best fitting function in the SA software of the laser tracker 2# station, the plane mirror coordinate system is restored at the laser tracker 2# station, and the plane mirror coordinate system is used as the working coordinate system.

[0021] Preferably, the measurement points are uniformly arranged on the reflecting surface of the mirror, the number of the measurement points is greater than or equal to 6, at each measurement point, the target ball is lightly touched on the reflecting surface of the mirror, the three-dimensional coordinates of the target ball are measured by using the laser tracker 2# station, a plane is constructed by using the three-dimensional coordinates of the target ball at all the measurement points, and a straight line perpendicular to the plane is constructed, which is the normal line of the mirror.

[0022] Preferably, when the collimator optical axis straight line is constructed between the mirror and the laser interferometer, the focal point position of the collimator is determined in the following manner:

[0023] The target ball is arranged on the guide rail, the laser interferometer convergence point is measured by using the self-collimation of the laser interferometer spherical wave through the target ball center, the target ball center is adjusted to coincide with the laser interferometer convergence point by measuring the surface shape defocus amount of the target ball, and the three-dimensional coordinates of the target ball center at the laser interferometer convergence point are measured by using the laser tracker 2# station, which is the focal point position of the collimator.

[0024] Preferably, the theoretical direction of the guide rail of the focal plane assembly is determined in the following manner:

[0025] The included angle θ between the collimator optical axis and the normal line of the mirror is calculated, the symmetric straight line of the collimator optical axis relative to the normal line of the mirror is constructed according to θ, the parallel line of the symmetric straight line is constructed, the parallel line passes through the laser interferometer convergence point, and the parallel line is the theoretical direction of the guide rail, which coincides with the collimator optical axis after being reflected by the mirror.

[0026] Preferably, the actual direction of the guide rail of the focal plane assembly and the normal direction of the target plane are adjusted and tested according to the theoretical direction of the guide rail, and finally the adjustment of the collimator focal plane assembly is completed, and the specific implementation manner is as follows:

[0027] The target ball is moved to both ends of the rail stroke by using the rail movement knob, and the two positions of the target ball are measured by the laser tracker 2# station, and a straight line is constructed in the SA software of the laser tracker 2# station by using the coordinates of the target ball positions at both ends, and the straight line is the actual direction of the rail measured;

[0028] The difference between the actual direction of the rail and the theoretical direction of the rail is calculated in the SA software of the laser tracker 2# station, and the position of the rail is adjusted in an iterative process of measurement-adjustment until the actual direction of the rail coincides with the theoretical direction of the rail, and the rail is fixed by screws;

[0029] The target is reinstalled on the rail, the target ball is lightly touched on the surface of the target, and the three-dimensional coordinates of the target ball are measured by using the laser tracker 2# station, the measurement point positions are uniformly distributed on the surface of the target, and the number of measurement points is greater than or equal to 6, in the SA software matched with the laser tracker 2# station, a plane is constructed by using the three-dimensional coordinates of the target ball at all measurement points, and a straight line perpendicular to the plane is constructed, and the straight line is the normal line of the target, the mounting seat of the target is adjusted so that the normal line direction of the target is parallel to the theoretical direction of the rail, and the focusing assembly of the collimator is completed.

[0030] The beneficial effects of the present application are:

[0031] 1) The focusing assembly of the collimator is adjusted by using the laser tracker, which has the advantages of fast test speed and high precision;

[0032] 2) According to the characteristics of the coaxial collimator optical system, the normal line of the plane mirror measured by the laser tracker is used as the optical axis of the collimator, and the abstract optical axis is characterized by the SA software, which is used as the theoretical value of the collimator focusing assembly adjustment;

[0033] 3) The three-dimensional coordinates of the central field focal point position of the collimator are accurately measured by using the self-collimation principle of the laser tracker, which is used as the adjustment origin of the collimator focusing assembly;

[0034] 4) The working coordinate systems of the two laser tracker stations on the ground and at the height of the collimator are unified by using the common point conversion principle, which ensures the consistency of the measurement reference;

[0035] 5) The focusing assembly of the coaxial collimator with vertical optical axis is adjusted by using the laser tracker, which solves the problem that the theodolite cannot be used in the vertical detection light path, and has universal application prospects in the adjustment and test of other types of collimator focusing assemblies. BRIEF DESCRIPTION OF DRAWINGS

[0036] Figure 1 Coaxial collimator wavefront aberration test optical path of vertical optical axis;

[0037] Figure 2 Collimator target schematic diagram with field mark position;

[0038] Figure 3 Collimator focal plane assembly assembly and adjustment schematic diagram using laser tracker;

[0039] Figure 4 Actual moving direction test schematic diagram of guide rail in focal plane assembly;

[0040] Figure 5 Target normal direction test schematic diagram in focal plane assembly;

[0041] Explanation of reference numerals

[0042] 1-laser interferometer; 2-guide rail; 3-target; 4-supporting structure; 5-mirror; 6-primary mirror; 7-secondary mirror; 8-plane mirror; 9-target ball; 10-laser tracker 1# station; 11-plane mirror coordinate system; 12-common conversion point; 13-collimator optical axis; 14-mirror normal; 15-angle θ between collimator optical axis and mirror normal; 16-laser tracker 2# station; 17-laser interferometer convergence point; 18-theoretical direction of guide rail; 19-actual direction of guide rail; 20-normal direction of target plane. DETAILED DESCRIPTION

[0043] To realize the precise calibration and assembly of the parallelism between the target guide rail direction of the collimator and the collimator optical axis of the vertical optical axis collimator, the present application proposes a collimator focal plane assembly assembly and calibration method using laser tracker according to the structural characteristics of the coaxial reflective collimator of vertical optical axis, which can ensure that the parallelism between the moving direction of the guide rail and the collimator optical axis is better than 12″. The traditional assembly and calibration method generally uses the theodolite aiming crosshair line target of the collimator focal plane to realize the parallelism, but the theodolite cannot be used in the optical path of the vertical optical axis collimator, so the traditional method needs to be improved. The present application uses laser tracker to greatly improve the parallelism precision between the moving direction of the guide rail and the collimator optical axis, and solves the problem of the collimator structure blocking the traditional method of assembling and calibrating the target guide rail position under the premise of ensuring the detection precision.

[0044] Figure 1 For the coaxial collimator wavefront aberration test optical path of vertical optical axis, Figure 2 For the collimator target schematic diagram with field mark position, Figure 3 For the collimator focal plane assembly assembly and adjustment schematic diagram using laser tracker, Figure 4 For the actual moving direction test schematic diagram of guide rail in focal plane assembly,Figure 5 A schematic diagram for testing the normal direction of the target in the focal plane assembly.

[0045] The collimator focal plane assembly adjusting method using a laser tracker comprises the following steps:

[0046] Step 1: After the collimator is adjusted, the wavefront aberration of each field of view of the collimator is given by the laser interferometer 1 to determine the focal point position of the central field of view of the collimator.

[0047] Determine the position of the laser interferometer 1: After the collimator is adjusted, the wavefront aberration of each field of view is given by rotating the plane mirror according to the field of view mark position on the target 3, and the position of the laser interferometer 1 is fixed at the central field of view position to ensure its position stability.

[0048] Step 2: A laser tracker 1# measuring station 10 is erected near the plane mirror 8 and measured to establish a plane mirror coordinate system 11, introduce a collimator optical axis 13, and measure the common conversion point coordinates 12. The laser tracker 1# measuring station is located on the ground and is 2m away from the plane mirror 1;

[0049] Collimator optical axis 13 introduction: gently touch the target ball 9 to the reflecting surface of the plane mirror 8, and measure the three-dimensional coordinates of the target ball 9 using the laser tracker. The measurement point position is uniformly distributed on the surface of the plane mirror 8, and the number of measurement points is ≥6. In the SA software of the laser tracker, a plane is constructed using all the measurement points, and a straight line perpendicular to the plane is constructed. The straight line is the normal line of the plane mirror and also the collimator optical axis 13.

[0050] Plane mirror coordinate system 11 establishment: the plane mirror coordinate system 11 is constructed in the SA software, wherein the Z axis is the collimator optical axis 13, and the origin and X axis positioning point are arbitrarily selected from two different measurement points.

[0051] Common conversion point 12 arrangement: the common conversion points are arranged on the support structure 4 of the collimator, and the number is ≥6 to ensure the effectiveness of the measurement of all common conversion points 12 by the laser tracker 1# measuring station 10 and the laser tracker 2# measuring station 16 close to the plane mirror.

[0052] Common conversion point 12 measurement: the plane mirror coordinate system 11 is set as the working coordinate system in the SA software, and the three-dimensional coordinates of all common conversion points 12 are measured by the laser tracker 1# measuring station 10;

[0053] Step 3, erect laser tracker 2# station 16 near collimator, use common conversion point 12 to restore plane mirror coordinate system 11, through measuring the normal line 14 of folding mirror 5, construct the collimator optical axis straight line between folding mirror 5 and laser interferometer 1 as the theoretical direction 18 of guide rail of focal plane assembly. The laser tracker 2# station is located in the same horizontal plane with the collimator, and the distance between the collimator and the laser tracker 2# station is 1-2 m;

[0054] Restoration of plane mirror coordinate system 11: input the coordinate value of common conversion point 12 into the SA software of laser tracker 2# station 16, use the instrument positioning function and the best fitting function in the SA software to measure the common conversion point 12 by using the laser tracker 2# station 16, restore the plane mirror coordinate system 11 in the laser tracker 2# station 16, and take it as the working coordinate system.

[0055] Normal line 14 of collimator folding mirror: gently touch the reflecting surface of folding mirror 5 with target ball 9, measure the three-dimensional coordinates of target ball 9 by using laser tracker 2# station 16, the measurement points are uniformly distributed on the folding mirror surface, the number of measurement points is greater than or equal to 6, in the SA software matched with the laser tracker, a plane is constructed by using all the measurement points, and a straight line perpendicular to the plane is constructed, which is the normal line 14 of folding mirror.

[0056] Measurement of focal point position of collimator: erect target ball 9 on guide rail 2, the autocollimation of spherical wave of laser interferometer 1 by the center of target ball 9 can be measured through the convergence point 17 of interferometer, the center of target ball 9 is adjusted to be coincident with the convergence point 17 of interferometer by measuring the defocus amount of the surface shape of target ball 9, and the three-dimensional coordinates of the center of target ball 9 at the convergence point 17 of interferometer are measured by using laser tracker 2# station 16, which is the focal point position of collimator.

[0057] Calculation of the angle θ between the normal line 13 of plane mirror and the normal line 14 of folding mirror of collimator: the angle θ between the optical axis 13 of collimator and the normal line 14 of folding mirror is calculated by using the SA software, the symmetric straight line of the optical axis 13 of collimator relative to the normal line 14 of folding mirror is constructed according to θ, and then a parallel line of the symmetric straight line is constructed by taking the convergence point 17 of interferometer as a point on the straight line, which is the theoretical direction 18 of guide rail, and after being reflected by folding mirror 5, it coincides with the optical axis 13 of collimator.

[0058] Step 4, iterative process of adjustment and test of the actual direction 19 of guide rail of focal plane assembly and the normal direction 20 of target plane according to the theoretical direction 18 of guide rail, and finally complete the adjustment of focal plane assembly of collimator.

[0059] Measurement of actual moving direction of guide rail 2: adjust the target ball to the two ends of the stroke of guide rail 2, measure the positions of target ball 9 by using laser tracker 2# station 16, and construct a straight line by using the two points in SA, which is the actual direction 19 of guide rail;

[0060] Iterative adjustment of the guide rail 2 position: the difference between the actual direction 19 of the guide rail and the theoretical direction 18 of the guide rail is calculated in the SA, and the guide rail 2 position is adjusted - measured - adjusted in an iterative process with the interferometer convergence point 17 as the center of adjustment until the actual direction 19 of the guide rail coincides with the theoretical direction 18 of the guide rail, and the guide rail 2 is fixed with screws.

[0061] Target 3 direction adjustment: reinstall the target 3 on the guide rail 2, lightly touch the target ball 9 to the plane of the target 3, measure the three-dimensional coordinates of the target ball 9 using the laser tracker 2 station 16, the measurement point positions are evenly distributed on the target surface, and the number of measurement points is ≥6, in the SA software of the laser tracker, a plane is constructed using all the measurement points, and a straight line perpendicular to the plane is constructed, which is the normal direction 20 of the target plane, and the installation seat of the target is adjusted so that the normal direction 20 of the target plane is parallel to the theoretical direction 18 of the guide rail. Finally, the focusing assembly of the collimator is completed.

[0062] The coaxial collimator with a vertical optical axis reflects the outgoing light using a large-aperture plane mirror during lens adjustment, and the interferometer gives the aberration of the collimator lens. When the collimator lens adjustment is completed, the position of the outgoing light convergence point of the interferometer is the position of the infinite focus point of the collimator, and the optical axis of the large-aperture plane mirror is the optical axis of the collimator. The present application establishes a plane mirror coordinate system using a laser tracker, the Z axis is the normal line of the plane mirror, i.e. the optical axis of the collimator, and the normal direction of the mirror folding of the collimator is given in this coordinate system, and the angle θ between the optical axis of the collimator and the normal line of the mirror folding of the collimator is calculated by the SA software. At the same time, the position of the outgoing light convergence point of the interferometer is measured using the target ball of the tracker, and a straight line in the direction of the guide rail is constructed using P and θ in the SA software, which is the theoretical value of the direction of the guide rail. When the guide rail is moved to both ends, the position of the target ball is constructed, the difference between the theoretical value is calculated, and the adjustment is carried out according to the difference, which can ensure that the direction of the target guide rail is parallel to the optical axis of the collimator. The present application can meet the parallelism adjustment requirements of the guide rail direction of the focusing assembly of the collimator and the optical axis of the collimator. The target defocus amount is accurate, and the success rate of positioning work of the remote sensing camera focusing device is effectively improved.

[0063] The contents not described in detail in the specification of the present application belong to the known technology of the person skilled in the art.

Claims

1. A method for assembling and adjusting a collimator focal plane assembly using a laser tracker, wherein the collimator focal plane assembly includes a guide rail and a target mounted on the guide rail, characterized in that, The application comprises the following steps: After the collimator is installed and adjusted, the wave aberration of each field of view of the collimator is given by using a laser interferometer, and the focal point position of the central field of view of the collimator is determined, wherein the collimator is an optical system with a vertical optical axis, and is installed and adjusted on a vertical installation tower with a height of 3 m, and the light outlet is directed towards the ground; A laser tracker 1# station is arranged near the plane mirror, a plane mirror coordinate system is established, the optical axis of the collimator is introduced, and the coordinates of the common conversion points are measured, wherein the laser tracker 1# station is located on the ground and is 1-2 m away from the plane mirror; A laser tracker 2# station is arranged near the collimator, the plane mirror coordinate system is recovered by using the common conversion points, the normal line of the folding mirror is measured, the straight line of the optical axis of the collimator between the folding mirror and the laser interferometer is constructed, and the straight line is used as the theoretical direction of the guide rail of the focal plane assembly, wherein the laser tracker 2# station is located on the same horizontal plane as the collimator and is 1-2 m away from the collimator; The actual direction of the guide rail of the focal plane assembly and the normal direction of the target plane are installed and adjusted according to the theoretical direction of the guide rail, and iterative testing is performed, and finally the installation and adjustment of the focal plane assembly of the collimator are completed.

2. The collimator focal plane assembly alignment method using a laser tracker according to claim 1, wherein, The position of the laser interferometer satisfies the following conditions: After the collimator is installed and adjusted, the plane mirror is rotated, the wave aberration of each field of view of the collimator is given according to the position of the field of view mark on the target, and the position of the central field of view is the position of the laser interferometer.

3. The collimator focal plane assembly alignment method using a laser tracker of claim 1, wherein, The method for introducing the optical axis of the collimator is as follows: A plurality of measuring points are uniformly distributed on the reflecting surface of the plane mirror, at each measuring point, the target ball is lightly touched on the reflecting surface of the plane mirror, the three-dimensional coordinates of the target ball are measured by using the laser tracker 1# station, the number of measuring points is greater than or equal to 6, in the SA software matched with the laser tracker 1# station, a plane is constructed by using the three-dimensional coordinates of the target ball at all the measuring points, and a straight line perpendicular to the plane is constructed, the straight line is the normal line of the plane mirror and also the optical axis of the collimator.

4. The collimator focal plane assembly alignment method using a laser tracker of claim 3, wherein, The method for establishing the plane mirror coordinate system is as follows: The plane mirror coordinate system is constructed in the SA software of the laser tracker 1# station, wherein the optical axis of the collimator is defined as the Z axis, and two different measuring points on the surface of the plane mirror are selected as the origin and the X axis positioning point.

5. The collimator focal plane assembly alignment method using a laser tracker of claim 4, wherein, The common conversion points are arranged on the support structure of the collimator, and the number of the common conversion points is greater than or equal to 6, so that the laser tracker 1# station and the laser tracker 2# station near the plane mirror can effectively measure all the common conversion points; When the coordinates of the common conversion points are measured, the plane mirror coordinate system is set as the working coordinate system in the SA software of the laser tracker 1# station, and the three-dimensional coordinates of all the common conversion points are measured by using the laser tracker 1# station.

6. The collimator focal plane assembly alignment method using a laser tracker of claim 5, wherein, The method for recovering the plane mirror coordinate system by using the common conversion points is as follows: The three-dimensional coordinate values of the common conversion points measured by the laser tracker 1# station are input into the SA software of the laser tracker 2# station, the common conversion points are measured by using the instrument positioning function and the best fitting function in the SA software of the laser tracker 2# station, the plane mirror coordinate system is recovered in the laser tracker 2# station, and the plane mirror coordinate system is used as the working coordinate system.

7. The collimator focal plane assembly alignment method using a laser tracker of claim 1, wherein, At the uniform distribution measuring points of the mirror reflecting surface, the number of measuring points is greater than or equal to 6, at each measuring point, the target ball is lightly touched on the reflecting surface of the mirror, the three-dimensional coordinates of the target ball are measured by using the measuring station 2# of the laser tracker, a plane is constructed by using the three-dimensional coordinates of the target ball at all measuring points, and a straight line perpendicular to the plane is constructed, and the straight line is the normal line of the mirror.

8. The collimator focal plane assembly alignment method using a laser tracker of claim 1, wherein, When the straight line of the optical axis of the collimator is constructed between the mirror and the laser interferometer, the focal point position of the collimator is determined in the following manner: The target ball is arranged on the guide rail, the laser interferometer converging point is measured by using the self-collimation of the spherical wave of the laser interferometer through the ball center of the target ball, the ball center of the target ball at the laser interferometer converging point is measured by adjusting the target ball to coincide with the laser interferometer converging point through the measurement of the defocus amount of the surface shape of the target ball, and the three-dimensional coordinates of the ball center of the target ball at the laser interferometer converging point are measured by using the measuring station 2# of the laser tracker, and the point is the focal point position of the collimator.

9. The collimator focal plane assembly alignment method using a laser tracker of claim 1, wherein, The theoretical direction of the guide rail of the focal plane assembly is determined in the following manner: The angle θ between the optical axis of the collimator and the normal line of the mirror is calculated, the symmetric straight line of the optical axis of the collimator relative to the normal line of the mirror is constructed according to θ, and then the parallel line of the symmetric straight line is constructed, and the parallel line passes through the laser interferometer converging point, and the parallel line is the theoretical direction of the guide rail, which coincides with the optical axis of the collimator after being reflected by the mirror.

10. The collimator focal plane assembly alignment method using a laser tracker of claim 1, wherein, The actual direction of the guide rail of the focal plane assembly and the normal line direction of the target plane are adjusted and tested according to the theoretical direction of the guide rail, and finally the adjustment of the focal plane assembly of the collimator is completed, and the specific implementation manner is as follows: The target ball is moved to both ends of the guide rail stroke by using the guide rail movement knob, the two positions of the target ball are measured by using the measuring station 2# of the laser tracker, and a straight line is constructed by using the position coordinates of the target ball at both ends in the SA software of the measuring station 2# of the laser tracker, and the straight line is the actual direction of the guide rail measured; The difference between the actual direction of the guide rail and the theoretical direction of the guide rail is calculated in the SA software of the measuring station 2# of the laser tracker, the position of the guide rail is adjusted as the center of adjustment, and the iteration process of measurement and adjustment is carried out until the actual direction of the guide rail coincides with the theoretical direction of the guide rail, and the guide rail is fixed by using a screw; The target is reinstalled on the guide rail, the target ball is lightly touched on the plane of the target, the three-dimensional coordinates of the target ball are measured by using the measuring station 2# of the laser tracker, the measuring points are uniformly distributed on the surface of the target, and the number of measuring points is greater than or equal to 6, a plane is constructed by using the three-dimensional coordinates of the target ball at all measuring points in the SA software matched with the measuring station 2# of the laser tracker, and a straight line perpendicular to the plane is constructed, and the straight line is the normal line of the target, the mounting seat of the target is adjusted so that the normal line direction of the target is parallel to the theoretical direction of the guide rail, and the adjustment of the focal plane assembly of the collimator is completed.

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