Micromechanical gyroscope and electronic product

Abstract

The application provides a micromechanical gyroscope and an electronic product. The micromechanical gyroscope comprises a first mass block, a second mass block, a first driving member, a second driving member, a first coupling component and a second coupling component. The first mass block is oppositely arranged along a first direction. The second mass block, the first driving member and the second driving member are located between the first mass blocks. The first driving member and the second driving member are oppositely arranged along the first direction. Along a second direction, the second mass block is located on opposite sides of the first driving member and the second driving member. The first mass block located on a side of the first driving member away from the second driving member is connected with the first driving member through the first coupling component. The first mass block located on a side of the second driving member away from the first driving member is connected with the second driving member through the first coupling component. The two ends of the second mass block along the first direction are respectively connected with the first driving member and the second driving member through the second coupling component. In this way, the mutual interference degree of the mass blocks under different modes can be reduced.

Description

[0001] The present application relates to the technical field of gyroscopes, and in particular to a micromechanical gyroscope and an electronic product.

[0002] The micromechanical gyroscope is a micro angular velocity sensor made by using micromechanical machining technology and microelectronic technology. The driving mode of the micromechanical gyroscope swings around the axis of the vertical mass. When an angular velocity is applied, due to the Coriolis effect, the gyroscope transmits energy to the detection mode, so that the vibration disc swings in the out-of-plane direction under the relative driving. The angular velocity can be obtained by detecting the displacement of the out-of-plane swing.

[0003] The micromechanical gyroscope in the prior art shares the mass block with the detection mode and the driving mode, and the coupling detection errors of the two modes are superimposed.

[0004] Therefore, it is necessary to provide a new micromechanical gyroscope to solve the above problems.

[0005] The purpose of the present application is to provide a micromechanical gyroscope and an electronic product, which can reduce the mutual interference degree of the mass blocks in different modes, and is beneficial to improve the detection accuracy.

[0006] The technical scheme of the present application is as follows:

[0007] The present application provides a micromechanical gyroscope, comprising:

[0008] The first mass block and the second mass block are each provided with a plurality of;

[0009] The first driving member and the second driving member;

[0010] The first coupling member and the second coupling member are both flexible members;

[0011] The plurality of first mass blocks are arranged opposite to each other along a first direction, the second mass block, the first driving member and the second driving member are located between the first mass blocks, the first driving member and the second driving member are arranged opposite to each other along the first direction, and along a second direction perpendicular to the first direction, the plurality of second mass blocks are located on opposite sides of the first driving member and the second driving member;

[0012] The first mass block located on the side of the first driving member away from the second driving member is connected with the first driving member through the first coupling member, the first mass block located on the side of the second driving member away from the first driving member is connected with the second driving member through the first coupling member, and the two ends of the second mass block along the first direction are respectively connected with the first driving member and the second driving member through the second coupling members.​​​

[0013] In a possible design, the first mass blocks are symmetrically distributed along the first direction, the second mass blocks are symmetrically distributed along the second direction, and the first driving member and the second driving member are symmetrically arranged along the first direction.

[0014] In a possible design, the first coupling component includes a first connecting beam, and the first driving member and the first mass block and the second driving member and the first mass block are connected through the first connecting beam respectively.

[0015] The second coupling component includes a second connecting beam and a first coupling part, two ends of the first coupling part are connected with the second connecting beam, the first coupling part is connected with one end of the first driving member and the second mass block through the second connecting beam at two ends of the first coupling part respectively, and another first coupling part is connected with the other end of the second driving member and the second mass block through the second connecting beam at two ends of the first coupling part respectively.

[0016] In a possible design, the micromechanical gyroscope further includes a substrate, a third coupling component and a fourth coupling component, the third coupling component and the fourth coupling component are flexible components, the substrate has a square region, a first anchor point and a second anchor point, the first anchor point is arranged at each corner position of the square region, the first driving member and the second driving member are located on opposite sides of the square region, and the second mass blocks are located on opposite sides of the square region, and the second anchor point is located on a side, away from the square region, of the second mass block.

[0017] The second coupling component is connected with the first anchor point through the third coupling component, and the first mass blocks arranged oppositely along the first direction are connected with the second anchor point through the fourth coupling component.

[0018] In a possible design, the third coupling component includes a third connecting beam, and the second coupling component is connected with the first anchor point through the third connecting beam.

[0019] The fourth coupling component includes a fourth connecting beam and a second coupling part, the second coupling part is connected with the second anchor point, and two ends of the second coupling part are connected with the first mass blocks on two sides through the fourth connecting beam respectively.

[0020] In a possible design, the micromechanical gyroscope further includes a fifth coupling component, the fifth coupling component is a flexible component, the substrate further has a third anchor point, the third anchor point is located between the first driving member and the second driving member, the second mass blocks opposite to each other are connected through the fifth coupling component, and the fifth coupling component is connected with the third anchor point.

[0021] In a possible design, the fifth coupling component includes a third coupling part and a fifth connecting beam, the third coupling part is connected with the third anchor point, and two ends of the third coupling part are connected with the second mass blocks on two sides through the fifth connecting beam.

[0022] In a possible design, the micromechanical gyroscope further includes an in-plane driving transducer, an out-of-plane detection transducer and an in-plane detection transducer, the first driving member and the second driving member are respectively formed with a space for accommodation, the in-plane driving transducer is arranged in the space for accommodation, the out-of-plane detection transducer and the in-plane detection transducer are arranged above the first mass block and have a spacing therebetween, and the out-of-plane detection transducer is arranged above the second mass block.

[0023] In a possible design, the out-of-plane detection transducers arranged above the first mass block are symmetrically distributed along the first direction, the in-plane detection transducers arranged above the first mass block are symmetrically distributed along the first direction, and the out-of-plane detection transducers arranged above the second mass block are symmetrically distributed along the second direction.

[0024] The second aspect of the present application further provides an electronic product, and the electronic product includes:

[0025] a body;

[0026] The micromechanical gyroscope described above is mounted on the body.

[0027] The present application has the following beneficial effects:

[0028] The micro-mechanical gyroscope and the electronic product provided by the application have the following advantages: the first mass block is arranged opposite to the first direction, the second mass block, the first driving member and the second driving member are located between the first mass block, the first driving member and the second driving member are arranged opposite to the first direction, the second mass block is located on the opposite sides of the first driving member and the second driving member along the second direction, and the first driving member and the second driving member are connected with the first mass block on the two sides through the flexible components, the two ends of the second mass block are connected with the first driving member and the second driving member through the flexible components, so that the micro-mechanical gyroscope can reduce the coupling between the first mass block and the second mass block between the driving mode and the detection mode, reduce the displacement of the non-movement mass block, reduce the mutual interference degree of the first mass block and the second mass block in different modes, and is beneficial to improving the detection precision. BRIEF DESCRIPTION OF DRAWINGS

[0029] Figure 1 The front view of the micro-mechanical gyroscope provided by the application in a specific embodiment;

[0030] Figure 2 The enlarged view of I in Figure 1

[0031] Figure 3 The schematic view after adding the out-of-plane driving transducer, the out-of-plane detection transducer and the in-plane detection transducer; Figure 1

[0032] Figure 4 The side view of Figure 3

[0033] Figure 5 The structure schematic view of the micro-mechanical gyroscope provided by the application in the driving mode;

[0034] Figure 6 The structure schematic view of the micro-mechanical gyroscope provided by the application in the first detection mode;

[0035] Figure 7 The structure schematic view of the micro-mechanical gyroscope provided by the application in the second detection mode;

[0036] Figure 8 The structure schematic view of the micro-mechanical gyroscope provided by the application in the third detection mode.

[0037] REFERENCE SIGNS:

[0038] 1-first mass block;

[0039] 2-second mass block; 21-first end; 22-second end;

[0040] 3-first driving member;

[0041] ​​​4-Second driving component;

[0042] 5-First coupling component;

[0043] 6-Second coupling component; 61-Second connecting beam; 62-First coupling part;

[0044] 7-Base; 71-Square area; 72-First anchor point; 73-Second anchor point; 74-Third anchor point;

[0045] 8-Third coupling component;

[0046] 9-Fourth coupling component; 91-Fourth connecting beam; 92-Second coupling part;

[0047] 10-Fifth coupling component; 101-Third coupling part; 102-Fifth connecting beam;

[0048] 11-In-plane driven transducer;

[0049] 12-Out-of-plane detection transducer;

[0050] 13-In-plane detection transducer.

Detailed Implementation Methods

[0051] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0052] This invention provides a micromechanical gyroscope, such as Figures 1-2 As shown, this type of micromechanical gyroscope includes multiple first mass blocks 1, multiple second mass blocks 2, a first drive element 3, a second drive element 4, a first coupling component 5, and a second coupling component 6. The multiple first mass blocks 1 are arranged opposite each other along a first direction Y. The second mass blocks 2, the first drive element 3, and the second drive element 4 are located between the first mass blocks 1. The first drive element 3 and the second drive element 4 are arranged opposite each other along the first direction Y. Along a second direction X perpendicular to the first direction Y, the multiple second mass blocks 2 are located on opposite sides of the first drive element 3 and the second drive element 4. The first coupling component 5 and the second coupling component 6 are both flexible components. The first mass block 1 located on the side of the first drive element 3 away from the second drive element 4 is connected to the first drive element 3 through the first coupling component 5. The first mass block 1 located on the side of the second drive element 4 away from the first drive element 3 is connected to the second drive element 4 through the first coupling component 5. The two ends of the second mass block 2 along the first direction X are respectively connected to the first drive element 3 and the second drive element 4 through the second coupling component 6.

[0053] Micromechanical gyroscopes have four operating modes: driving mode, first detection mode, second detection mode, and third detection mode. For example... Figure 1As shown, the first mass 1 and the second mass 2 are both two, the first driving member 3 and the second driving member 4 are both one, the first driving member 3 is located above Figure 1 , the second driving member 4 is located below Figure 1 , the first mass 1 above the first driving member 3 is connected with the first driving member 3 through the first coupling component 5, the first mass 1 below the second driving member 4 is connected with the second driving member 4 through the first coupling component 5, the upper end of the second mass 2 is connected with the first driving member 3 through the second coupling component 6, the lower end of the second mass 2 is connected with the second driving member 4 through the second coupling component 6, and the first direction Y is defined as the direction of the Y axis, the second direction X is defined as the direction of the X axis, the Z axis is perpendicular to the X axis and the Y axis, and the plane where the X axis and the Y axis are located is defined as the reference plane, which is illustrated as follows:

[0054] When the micromechanical gyroscope detects the angular velocity, the micromechanical gyroscope is first brought into a driving mode. In the driving mode, the first driving member 3 moves along the first direction Y, and the second driving member 4 moves in the direction opposite to the first direction Y (for example, the motion directions of the first driving member 3 and the second driving member 4 are shown by black arrows in Figure 5 ). At this time, the first driving member 3 and the second driving member 4 drive the two first masses 1 to move along the Y axis in opposite directions, and drive the two second masses 2 to move along the X axis in opposite directions (for example, the motion directions of the first mass 1 and the second mass 2 are shown by white arrows in Figure 5 ).

[0055] When the micromechanical gyroscope is subjected to the Y-axis angular velocity, the micromechanical gyroscope is converted from the driving mode to a first detection mode. At this time, the second mass 2 is subjected to the Coriolis force in the Z-axis direction (for example, the Coriolis force is shown by a white arrow in Figure 6 ), so the second mass 2 generates the out-of-plane vibration displacement along the Z axis (i.e., the vibration displacement towards the outside of the reference plane), and the angular velocity of the micromechanical gyroscope around the Y axis can be obtained by detecting the out-of-plane vibration displacement of the second mass 2 along the Z axis.

[0056] When the micromechanical gyroscope is subjected to the X-axis angular velocity, the micromechanical gyroscope is converted from the driving mode to a second detection mode. At this time, the first mass 1 is subjected to the Coriolis force in the Z-axis direction (for example, the Coriolis force is shown by a white arrow in Figure 7 ), so the first mass 1 generates the out-of-plane vibration displacement along the Z axis (i.e., the vibration displacement towards the outside of the reference plane), and the angular velocity of the micromechanical gyroscope around the X axis can be obtained by detecting the out-of-plane vibration displacement of the first mass 1 along the Z axis.

[0057] When the micromechanical gyroscope is subjected to the Z-axis angular velocity, the micromechanical gyroscope is converted from the driving mode to a third detection mode. At this time, the first mass 1 is subjected to the Coriolis force in the X-axis direction (for example, the Coriolis force is shown by a white arrow in Figure 8When the first driving element 3 and the second driving element 4 are driven to vibrate along the first direction Y, the first mass 1 will produce an in-plane vibration displacement (i.e. vibration displacement in the reference plane) along the X axis, and the angular velocity of the micromechanical gyroscope around the Z axis can be obtained by detecting the in-plane vibration displacement of the first mass 1 along the X axis.

[0058] The micromechanical gyroscope provided by the embodiment has the first mass 1 arranged along the first direction Y, the second mass 2, the first driving element 3 and the second driving element 4 located between the first mass 1, the first driving element 3 and the second driving element 4 arranged along the first direction Y, the second mass 2 located on the opposite sides of the first driving element 3 and the second driving element 4 along the second direction X, and the first driving element 3 and the second driving element 4 connected to the first mass 1 on the two sides through flexible components, and the two ends of the second mass 2 connected to the first driving element 3 and the second driving element 4 through flexible components. When detecting the angular velocity, the micromechanical gyroscope can reduce the coupling between the first mass 1 and the second mass 2 in the driving mode and the detection mode, reduce the displacement of the non-moving mass, and reduce the mutual interference of the first mass 1 and the second mass 2 in different modes, thereby improving the detection accuracy.

[0059] Moreover, the driving and detection share a high mass ratio, effectively improving the conversion of Coriolis force and the sensitivity of the micromechanical gyroscope. The micromechanical gyroscope has a simple structure and is easy to integrate in a small size under limited process conditions, thereby reducing the cost.

[0060] The driving mode of the micromechanical gyroscope is differential driving, which can effectively improve the stability and impact resistance of the micromechanical gyroscope.

[0061] Moreover, the three detection modes of the micromechanical gyroscope can all realize anti-phase vibration, which can effectively immunize the influence of acceleration impact and orthogonal error.

[0062] Specifically, the plurality of first masses 1 are symmetrically distributed along the first direction Y, the plurality of second masses 2 are symmetrically distributed along the second direction X, and the first driving element 3 and the second driving element 4 are mutually symmetrical along the first direction Y. In this way, differential detection of the micromechanical gyroscope can be realized.

[0063] In a specific embodiment, as shown in Figures 3-4 The micromechanical gyroscope further includes an in-plane driving transducer 11 (also referred to as an in-plane driving electrode), an out-of-plane detection transducer 12 (also referred to as an out-of-plane detection electrode) and an in-plane detection transducer 13 (also referred to as an in-plane detection electrode). The first driving element 3 and the second driving element 4 are respectively formed with a space for accommodation, and the in-plane driving transducer 11 is arranged in the space for accommodation. The out-of-plane detection transducer 12 and the in-plane detection transducer 13 are arranged above the first mass 1 with a spacing therebetween, and the out-of-plane detection transducer 12 is arranged above the second mass 2.

[0064] When the micromechanical gyroscope is in the first detection mode, the second mass 2 generates a vibration displacement along the Z axis due to the action of the Coriolis force, at this time, the out-of-plane detection transducer 12 arranged above the second mass 2 detects the vibration displacement of the second mass 2 along the Z axis, and further obtains the angular velocity of the micromechanical gyroscope around the Y axis.

[0065] When the micromechanical gyroscope is in the second detection mode, the first mass 1 generates a vibration displacement along the Z axis due to the action of the Coriolis force, at this time, the out-of-plane detection transducer 12 arranged above the first mass 1 detects the vibration displacement of the first mass 1 along the Z axis, and further obtains the angular velocity of the micromechanical gyroscope around the X axis.

[0066] When the micromechanical gyroscope is in the third detection mode, the first mass 1 generates a vibration displacement along the X axis due to the action of the Coriolis force, at this time, the in-plane detection transducer 13 arranged above the first mass 1 detects the vibration displacement of the first mass 1 along the X axis, and further obtains the angular velocity of the micromechanical gyroscope around the Z axis.

[0067] Specifically, the plurality of out-of-plane detection transducers 12 arranged above the first mass 1 are symmetrically distributed along the first direction Y, the plurality of in-plane detection transducers 13 arranged above the first mass 1 are symmetrically distributed along the first direction Y, and the plurality of out-of-plane detection transducers 12 arranged above the second mass 2 are symmetrically distributed along the second direction X.

[0068] For example Figure 3 As shown, one out-of-plane detection transducer 12 is arranged above each second mass 2, and the two out-of-plane detection transducers 12 arranged above the two second masses 2 respectively are symmetrically distributed along the second direction X; one out-of-plane detection transducer 12 and two in-plane detection transducers 13 are arranged above each first mass 1, and the two out-of-plane detection transducers 12 arranged above the two first masses 1 respectively are symmetrically distributed along the first direction Y, and the two in-plane detection transducers 13 above the same first mass 1 are symmetrically distributed along the second direction X.

[0069] In this way, differential detection of the micromechanical gyroscope can be facilitated.

[0070] In one specific embodiment, please refer to Figure 2The first coupling component 5 comprises a first connecting beam, the first mass block 1 located on the side of the first driving member 3 away from the second driving member 4 is connected with the first driving member 3 through the first connecting beam, and the first mass block 1 located on the side of the second driving member 4 away from the first driving member 3 is connected with the second driving member 4 through the first connecting beam; the second coupling component 6 comprises a second connecting beam 61 and a first coupling part 62, the two ends of each first coupling part 62 are connected with the second connecting beam 61, the first coupling part 62 is connected with one end of the first driving member 3 and the second mass block 2 respectively through the second connecting beam 61 located at the two ends of the first coupling part 62, and the other first coupling part 62 is connected with the other end of the second driving member 4 and the second mass block 2 respectively through the second connecting beam 61 located at the two ends of the other first coupling part 62.

[0071] The first connecting beam and the second connecting beam 61 are flexible beams, and the first coupling part 62 is a flexible part. The first connecting beam, the second connecting beam 61 and the first coupling part 62 are used to provide the in-plane swing degree of freedom and the out-of-plane movement degree of freedom.

[0072] In a specific embodiment, as shown in Figure 1 , the second mass block 2 has a first end 21 and a second end 22 along the first direction Y, the first end 21 and the first driving member 3 are located on the same side of the second driving member 4, the second end 22 and the second driving member 4 are located on the same side of the first driving member 3, the first end 21 is connected with the first driving member 3 through the second coupling component 6, and the second end 22 is connected with the second driving member 4 through the other second coupling component 6.

[0073] For example Figure 1 , the first driving member 3 is located above the second driving member 4, the upper end of the second mass block 2 is the first end 21, and the lower end is the second end 22.

[0074] In a specific embodiment, please refer to Figure 1 , the micromechanical gyroscope further comprises a substrate 7, a third coupling component 8 and a fourth coupling component 9, the third coupling component 8 and the fourth coupling component 9 are flexible components, the substrate 7 has a square area 71, a first anchor point 72 and a second anchor point 73, the first anchor point 72 is arranged at each corner position of the square area 71, the first driving member 3 and the second driving member 4 are located on the opposite sides of the square area 71 along the first direction Y, a plurality of second mass blocks 2 are located on the opposite sides of the square area 71 along the second direction X, and the second anchor point 73 is located on the side of the second mass block 2 away from the square area 71; wherein the second coupling component 6 is connected with the first anchor point 72 through the third coupling component 8, and the first mass block 1 arranged oppositely along the first direction Y is connected with the second anchor point 73 through the fourth coupling component 9.

[0075] When the micromechanical gyroscope is in the first detection mode, the second mass block 2 is subjected to the Coriolis force, and since the second mass block 2 is connected to the first anchor point 72, the second mass block 2 will produce an out-of-plane roll along the Z axis.

[0076] When the micromechanical gyroscope is in the second detection mode, the first mass block 1 is subjected to the Coriolis force, and since the first mass block 1 is connected to the second anchor point 73, the first mass block 1 will produce an out-of-plane roll along the Z axis.

[0077] The third coupling component 8 and the fourth coupling component 9 are both used to provide an in-plane swing degree of freedom and an out-of-plane roll degree of freedom.

[0078] Specifically, the third coupling component 8 comprises a third connecting beam, and the second coupling component 6 is connected to the first anchor point 72 through the third connecting beam; the fourth coupling component 9 comprises a fourth connecting beam 91 and a second coupling part 92, the second coupling part 92 is connected to the second anchor point 73, and two ends of the second coupling part 92 are connected to the first mass blocks 1 on both sides through the fourth connecting beam 91. The third connecting beam and the fourth connecting beam 91 are both flexible beams, and the second coupling part 92 is a flexible part.

[0079] In addition, the micromechanical gyroscope further comprises a fifth coupling component 10, the fifth coupling component 10 is a flexible component, and the substrate 7 further has a third anchor point 74, the third anchor point 74 is located between the first driving part 3 and the second driving part 4, and is connected to the second mass blocks 2 opposite to each other along the second direction X through the fifth coupling component 10, and the fifth coupling component 10 is connected to the third anchor point 74. In this way, the parasitic mode of detection can be effectively suppressed, and the detection precision of the micromechanical gyroscope is improved.

[0080] Specifically, the fifth coupling component 10 comprises a third coupling part 101 and a fifth connecting beam 102, the third coupling part 101 is connected to the third anchor point 74, and two ends of the third coupling part 101 are connected to the second mass blocks 2 on both sides through the fifth connecting beam 102. The fifth connecting beam 102 is a flexible beam, and the third coupling part 101 is a flexible part.

[0081] The embodiment of the present application further provides an electronic product, which comprises a body and the micromechanical gyroscope in any one of the above embodiments, and the micromechanical gyroscope is mounted on the body.

[0082] In the working process of the electronic product, the micromechanical gyroscope can calculate the angular velocity of the electronic product, so as to control the electronic product, the micromechanical gyroscope reduces the mutual interference degree of the first mass block 1 and the second mass block 2 in different modes, improves the detection precision, and thus the use performance of the electronic product is improved.

[0083] The above merely describes the embodiments of the present application, and it should be pointed out that, for those skilled in the art, improvements can be made without departing from the inventive concept, and these all belong to the protection scope of the present application.

Claims

1. A micromechanical gyroscope, characterized in that, The micromechanical gyroscope includes: Multiple first mass blocks (1) and second mass blocks (2) are provided; First drive unit (3) and second drive unit (4); Both the first coupling component (5) and the second coupling component (6) are flexible components; Multiple first mass blocks (1) are arranged opposite each other along a first direction (Y), and second mass blocks (2), first driving member (3) and second driving member (4) are located between the first mass blocks (1). The first driving member (3) and second driving member (4) are arranged opposite each other along the first direction (Y). Along a second direction (X) perpendicular to the first direction (Y), multiple second mass blocks (2) are located on opposite sides of the first driving member (3) and second driving member (4). The first mass block (1) located on the side of the first driving member (3) away from the second driving member (4) is connected to the first driving member (3) through the first coupling member (5). The first mass block (1) located on the side of the second driving member (4) away from the first driving member (3) is connected to the second driving member (4) through the first coupling member (5). The two ends of the second mass block (2) along the first direction (Y) are respectively connected to the first driving member (3) and the second driving member (4) through the second coupling member (6). The first coupling component (5) is located in the area enclosed by the first mass block (1) and the second mass block (2), and includes a first connecting beam. The first driving component (3) and the first mass block (1) are connected to each other and the second driving component (4) and the first mass block (1) are connected by the first connecting beam. The second coupling component (6) is located in the area enclosed by the first mass block (1) and the second mass block (2), and includes a second connecting beam (61) and a first coupling part (62). Each of the first coupling parts (62) is connected to the second connecting beam (61) at both ends. The first coupling part (62) is connected to one end of the first driving member (3) and the second mass block (2) respectively through the second connecting beam (61) at both ends of it. The other first coupling part (62) is connected to the other end of the second driving member (4) and the second mass block (2) respectively through the second connecting beam (61) at both ends of it. The micromechanical gyroscope further includes a substrate (7) and a third coupling component (8). The substrate (7) has a first anchor point (72), and the first coupling part (62) is connected to the first anchor point (72) through the third coupling component (8). The first connecting beam and the second connecting beam are both flexible beams, and the first coupling part is a flexible part.

2. The micromechanical gyroscope according to claim 1, characterized in that: Multiple first mass blocks (1) are symmetrically distributed along the first direction (Y), multiple second mass blocks (2) are symmetrically distributed along the second direction (X), and the first driving member (3) and the second driving member (4) are symmetrical to each other along the first direction (Y).

3. The micromechanical gyroscope according to claim 1, characterized in that: The micromechanical gyroscope also includes a fourth coupling component (9). The third coupling component (8) and the fourth coupling component (9) are both flexible components. The substrate (7) also has a square area (71) and a second anchor point (73). The first anchor point (72) is provided at each corner of the square area (71). The first drive member (3) and the second drive member (4) are located on opposite sides of the square area (71). A plurality of second mass blocks (2) are located on opposite sides of the square area (71). The second anchor point (73) is located on the side of the second mass block (2) away from the square area (71). The first mass blocks (1) arranged relative to each other along the first direction (Y) are all connected to the second anchor point (73) through the fourth coupling component (9).

4. The micromechanical gyroscope according to claim 3, characterized in that: The third coupling component (8) includes a third connecting beam, and the second coupling component (6) is connected to the first anchor point (72) through the third connecting beam; The fourth coupling component (9) includes a fourth connecting beam (91) and a second coupling part (92). The second coupling part (92) is connected to the second anchor point (73). The two ends of the second coupling part (92) are respectively connected to the first mass blocks (1) on both sides through the fourth connecting beam (91).

5. The micromechanical gyroscope according to claim 4, characterized in that: The micromechanical gyroscope also includes a fifth coupling component (10), which is a flexible component. The substrate (7) also has a third anchor point (74), which is located between the first driving member (3) and the second driving member (4). The opposing second mass blocks (2) are connected through the fifth coupling component (10), and the fifth coupling component (10) is connected to the third anchor point (74).

6. The micromechanical gyroscope according to claim 5, characterized in that: The fifth coupling component (10) includes a third coupling part (101) and a fifth connecting beam (102). The third coupling part (101) is connected to the third anchor point (74). The two ends of the third coupling part (101) are respectively connected to the second mass blocks (2) on both sides through the fifth connecting beam (102).

7. The micromechanical gyroscope according to any one of claims 1-6, characterized in that: The micromechanical gyroscope further includes an in-plane driving transducer (11), an out-of-plane detection transducer (12), and an in-plane detection transducer (13). The first driving member (3) and the second driving member (4) respectively form a clearance space. The in-plane driving transducer (11) is disposed in the clearance space. The out-of-plane detection transducer (12) and the in-plane detection transducer (13) are arranged above the first mass block (1) with intervals between them. The out-of-plane detection transducer (12) is arranged above the second mass block (2).

8. The micromechanical gyroscope according to claim 7, characterized in that: The multiple out-of-plane detection transducers (12) arranged above the first mass block (1) are symmetrically distributed along the first direction (Y), the multiple in-plane detection transducers (13) arranged above the first mass block (1) are symmetrically distributed along the first direction (Y), and the multiple out-of-plane detection transducers (12) arranged above the second mass block (2) are symmetrically distributed along the second direction (X).

9. An electronic product, characterized in that, The electronic products include: ontology; The micromechanical gyroscope according to any one of claims 1-8, wherein the micromechanical gyroscope is mounted on the body.

Images