Device and method for measuring internal pressure of sealed vacuum electronic device

Abstract

The present invention relates to a device and method for measuring the internal pressure of a sealed vacuum electronic device. The device comprises: a sampling chamber containing a sample holder; a standard volume chamber connected to the sampling chamber via a pipeline; a puncture mechanism disposed on the sampling chamber; a vacuum gauge connected to the sampling chamber via a pipeline; a molecular pump assembly connected to the sampling chamber via a pipeline; and an inflation device connected to the sampling chamber via a pipeline. The present invention can effectively improve the accuracy of measuring the internal pressure of a sealed vacuum electronic device.

Description

Technical Field

[0001] The present invention relates to the field of pressure measurement, and in particular to a device and method for measuring the internal pressure of a sealed vacuum electronic device. Background Art

[0002] Throughout their lifecycle, sealed vacuum electronic devices maintain a good internal vacuum level, and the composition of various gases is relatively stable. However, after the packaging step, if the internal pressure exceeds the specified value, the vacuum insulation performance deteriorates. Excessively high H2O partial pressure within the vacuum package can cause water vapor leakage, leading to problems such as leakage, short circuits, and electrical degradation in components within the tube. Therefore, measuring and analyzing the gas pressure and composition within sealed vacuum electronic devices is crucial. Currently, pressure measurement within sealed vacuum electronic devices relies on a crystal oscillator pre-packaged within the tube. Changes in the crystal's resistance are used to measure the pressure in the vacuum chamber. This method can reflect changes in total pressure, but the measurement accuracy is very low, at only 30%. The pressure value obtained by this method is an inferred value, not a direct measurement, and therefore has low reliability. Summary of the Invention

[0003] In view of this, the present invention aims to provide a device and method for measuring the internal pressure of a sealed vacuum electronic device, which can improve the accuracy of measuring the internal pressure of the sealed vacuum electronic device.

[0004] In a first aspect, a first embodiment of the present invention proposes a device for measuring the internal pressure of a sealed vacuum electronic device, the device comprising: a sampling chamber, wherein a sample clamp is provided in the sampling chamber; a standard volume chamber, connected to the sampling chamber via a pipeline; a puncture mechanism, provided on the sampling chamber; a vacuum gauge, connected to the sampling chamber via a pipeline; a molecular pump group, connected to the sampling chamber via a pipeline; and an inflation device, connected to the sampling chamber via a pipeline.

[0005] In a preferred embodiment of the present invention, the device further includes: a first vacuum valve, arranged on the pipeline between the vacuum gauge and the sampling chamber; a second vacuum valve, arranged on the pipeline between the standard volume chamber and the sampling chamber; and a third vacuum valve, arranged on the pipeline between the molecular pump group and the sampling chamber.

[0006] In a preferred embodiment of the present invention, the device further comprises: an observation window disposed on the sampling cavity.

[0007] In a second aspect, a second embodiment of the present invention provides a method for measuring the internal pressure of a sealed vacuum electronic device, using the apparatus for measuring the internal pressure of a sealed vacuum electronic device as described in any one of the first aspects, the method comprising:

[0008] S100, fixing the sample to be tested on the sample fixture, connecting the sampling cavity and the standard volume chamber, evacuating the sampling cavity and the standard volume chamber, and then filling the vacuumed sampling cavity and the standard volume chamber with standard gas through the inflation device, and recording the first pressure P1 of the sampling cavity and the standard volume chamber;

[0009] S200, isolating the sampling chamber and the standard volume chamber, evacuating the sampling chamber, then connecting the sampling chamber and the standard volume chamber, and recording a second pressure P2 of the sampling chamber and the standard volume chamber;

[0010] S300, evacuating the sampling chamber and the standard volume chamber, then filling the sampling chamber and the standard volume chamber in a vacuum state with standard gas through the inflation device, and recording a third pressure P3 of the sampling chamber and the standard volume chamber;

[0011] S400, isolating the sampling chamber and the standard volume chamber, evacuating the sampling chamber, and then crushing the sample to be tested by the puncture mechanism, and recording a fourth pressure P4 of the sampling chamber;

[0012] S500, evacuating the sampling chamber, connecting the sampling chamber and the standard volume chamber, and recording a fifth pressure P5 of the sampling chamber and the standard volume chamber;

[0013] S600 , determining the internal pressure of the sample to be tested according to the volume V1 of the sampling cavity, the volume V2 of the standard volume chamber, the first pressure P1 , the second pressure P2 , the third pressure P3 , the fourth pressure P4 , and the fifth pressure P5 .

[0014] In a preferred embodiment of the present invention, step S600 includes:

[0015] Determining the volume V of the sample to be tested according to the first pressure P1, the second pressure P2, the volume V1 of the sampling cavity, and the volume V2 of the standard volume chamber;

[0016] Determining the volume V4 of the electronic device inside the sample to be tested according to the third pressure P3, the fifth pressure P5, the volume V1 of the sampling cavity, and the volume V2 of the standard volume chamber;

[0017] Determining the volume V0 of the inner lumen of the sample to be tested according to the volume V of the sample to be tested and the volume V4 of the electronic device;

[0018] The internal pressure P0 of the sample to be tested is determined according to the volume V1 of the sampling cavity, the volume V4 of the electronic device, the volume V0 of the internal lumen of the sample to be tested, and the fourth pressure P4.

[0019] In a preferred embodiment of the present invention, the volume V of the sample to be tested is determined according to the first pressure P1, the second pressure P2, the volume V1 of the sampling cavity, and the volume V2 of the standard volume chamber, and the calculation formula is:

[0020]

[0021] In a preferred embodiment of the present invention, the volume V4 of the electronic device inside the sample to be tested is determined according to the third pressure P3, the fifth pressure P5, the volume V1 of the sampling cavity, and the volume V2 of the standard volume chamber. The calculation formula is:

[0022]

[0023] In a preferred embodiment of the present invention, the volume V0 of the inner lumen of the sample to be tested is determined according to the volume V of the sample to be tested and the volume V4 of the electronic device, and the calculation formula is:

[0024] V0=V-V4.

[0025] In a preferred embodiment of the present invention, the internal pressure P0 of the sample to be tested is determined based on the volume V1 of the sampling cavity, the volume V4 of the electronic device, the volume V0 of the internal lumen of the sample to be tested, and the fourth pressure P4, and the calculation formula is:

[0026]

[0027] In a preferred embodiment of the present invention, the standard gas is pure nitrogen.

[0028] The apparatus and method for measuring the internal pressure of a sealed vacuum electronic device according to the embodiments of the present invention use a standard volume chamber as an aid in testing. Based on the principle that the internal volume and gas volume of the sampling chamber are different before and after puncturing the quartz tube to be tested (i.e., the sample to be tested) are different, the pressure of the sampling chamber is measured three times, and the cavity pressure, cavity volume, and quartz tube volume of the sealed vacuum electronic device are calculated. This can effectively improve the accuracy of measuring the internal pressure of the sealed vacuum electronic device and analyzing the gas composition therein. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0030] Figure 1 Schematic diagram of the structure of a device for measuring the internal pressure of a sealed vacuum electronic device according to a first embodiment of the present invention;

[0031] Figure 2 FIG. 4 is a flow chart of a method for measuring the internal pressure of a sealed vacuum electronic device according to a second embodiment of the present invention. DETAILED DESCRIPTION

[0032] The description of the embodiments in this specification should be combined with the corresponding drawings, which should be considered a complete part of this specification. In the drawings, the shapes and thicknesses of the embodiments may be exaggerated and indicated for simplicity or convenience. Furthermore, the various structural components in the drawings will be described separately. It is worth noting that components not shown in the drawings or not described in words are known to those of ordinary skill in the art.

[0033] The description of the embodiments herein and any references to directions and orientations are for ease of description only and are not to be construed as limiting the scope of the present invention. The following description of the preferred embodiments may involve combinations of features, which may exist independently or in combination. The present invention is not specifically limited to the preferred embodiments. The scope of the present invention is defined by the claims.

[0034] like Figure 1 1 is a schematic structural diagram of a device for measuring the internal pressure of a sealed vacuum electronic device according to a first embodiment of the present invention. The device includes: a sampling chamber 1, in which a sample holder is provided; a standard volume chamber 2, connected to the sampling chamber 1 via a pipeline; a puncture mechanism 12, provided on the sampling chamber 1; a vacuum gauge 13, connected to the sampling chamber 1 via a pipeline; a molecular pump group 17, connected to the sampling chamber 1 via a pipeline; and an inflation device 19, connected to the sampling chamber 1 via a pipeline.

[0035] like Figure 1 As shown, in this embodiment, the device also includes: a first vacuum valve 14, which is arranged on the pipeline between the vacuum gauge 13 and the sampling chamber 1; a second vacuum valve 15, which is arranged on the pipeline between the standard volume chamber 2 and the sampling chamber 1; a third vacuum valve 16, which is arranged on the pipeline between the molecular pump group 17 and the sampling chamber 1; and an observation window 18, which is arranged on the sampling chamber 1.

[0036] like Figure 2 FIG. 1 is a flow chart of a method for measuring the internal pressure of a sealed vacuum electronic device according to a second embodiment of the present invention. Using the apparatus for measuring the internal pressure of a sealed vacuum electronic device according to the first embodiment, the method includes:

[0037] S100, fix the sample to be tested on the sample fixture, and connect the sampling chamber 1 and the standard volume chamber 2, evacuate the sampling chamber 1 and the standard volume chamber 2, and then fill the sampling chamber 1 and the standard volume chamber 2 in a vacuum state with standard gas through the inflation device 19, and record the first pressure P1 of the sampling chamber 1 and the standard volume chamber 2.

[0038] like Figure 1 As shown, in this embodiment, the sample to be tested is fixed to the sample holder 11. The first vacuum valve 14, the second vacuum valve 15, and the third vacuum valve 16 are opened, while the other vacuum valves remain closed. The molecular pump assembly 17 is activated to evacuate the sampling chamber 1 and its connecting pipes. The third vacuum valve 16 is closed, and the sampling chamber 1 is filled with standard gas using the inflation device 19. The pressure measured by the vacuum gauge 13 at this moment is recorded as P1.

[0039] S200 , isolating the sampling chamber 1 and the standard volume chamber 2 , evacuating the sampling chamber 1 , then connecting the sampling chamber 1 and the standard volume chamber 2 , and recording the second pressure P2 of the sampling chamber 1 and the standard volume chamber 2 .

[0040] like Figure 1 As shown, in this embodiment, the second vacuum valve 15 is closed, the third vacuum valve 16 is opened, the sampling chamber 1 and the connecting pipes are evacuated to a vacuum again, the third vacuum valve 16 is closed, and the second vacuum valve 15 is opened. After the pressure in the sampling chamber 1 stabilizes, the pressure measured by the vacuum gauge 13 at this moment is recorded as P2.

[0041] S300, evacuate the sampling chamber 1 and the standard volume chamber 2, then fill the sampling chamber 1 and the standard volume chamber 2 in the vacuum state with standard gas through the inflation device 19, and record the third pressure P3 of the sampling chamber 1 and the standard volume chamber 2.

[0042] like Figure 1 As shown, in this embodiment, the third vacuum valve 16 is opened to evacuate the sampling chamber 1 and the connecting pipes. The third vacuum valve 16 is then closed, and the sampling chamber 1 is filled with standard gas using the inflation device 19. The pressure measured by the vacuum gauge 13 at this moment is recorded as P3.

[0043] S400 , isolating the sampling chamber 1 and the standard volume chamber 2 , evacuating the sampling chamber 1 , and then crushing the sample to be tested by the puncture mechanism 12 , and recording the fourth pressure P4 of the sampling chamber 1 .

[0044] like Figure 1 As shown, in this embodiment, the second vacuum valve 15 is closed, the third vacuum valve 16 is opened, the sampling chamber 1 and the connecting pipes are evacuated to vacuum again, the puncture mechanism 12 is used to break the sample to be tested, and the pressure measured by the vacuum gauge 13 at this moment is recorded as P4.

[0045] S500 , evacuating the sampling chamber 1 , then connecting the sampling chamber 1 and the standard volume chamber 2 , and recording the fifth pressure P5 of the sampling chamber 1 and the standard volume chamber 2 .

[0046] like Figure 1 As shown, in this embodiment, the third vacuum valve 16 is opened to evacuate the sampling chamber 1 and its connecting pipes. The third vacuum valve 16 is closed, and the second vacuum valve 15 is opened. After the pressure in the sampling chamber 1 stabilizes, the pressure measured by the vacuum gauge 13 is recorded as P5.

[0047] S600 , determining the internal pressure of the sample to be tested according to the volume V1 of the sampling cavity 1 , the volume V2 of the standard volume chamber 2 , the first pressure P1 , the second pressure P2 , the third pressure P3 , the fourth pressure P4 and the fifth pressure P5 .

[0048] In this embodiment, step S600 includes:

[0049] a. Determine the volume V of the sample to be tested based on the first pressure P1, the second pressure P2, the volume V1 of the sampling chamber 1, and the volume V2 of the standard volume chamber 2. The calculation formula is:

[0050]

[0051] b. Determine the volume V4 of the electronic device inside the sample to be tested based on the third pressure P3, the fifth pressure P5, the volume V1 of the sampling chamber 1, and the volume V2 of the standard volume chamber 2. The calculation formula is:

[0052]

[0053] c. Determine the volume V0 of the internal lumen of the sample to be tested based on the volume V of the sample to be tested and the volume V4 of the electronic device. The calculation formula is:

[0054] V0=V-V4

[0055] d. Determine the internal pressure P0 of the sample to be tested based on the volume V1 of the sampling chamber 1, the volume V4 of the electronic device, the volume V0 of the internal lumen of the sample to be tested, and the fourth pressure P4. The calculation formula is:

[0056]

[0057] In this embodiment, the sampling chamber 1 is equipped with a corresponding baking unit 3 on the outside; the vacuum gauge 13 can be a capacitance diaphragm vacuum gauge; the standard gas provided by the inflation device 19 is pure nitrogen, and the gas filled into the inflation device 19 should be of the same order of magnitude as the user-provided reference value P0 when its pressure is measured. During testing, the standard sample or test sample is fixed inside the sampling chamber 1 by the sample fixture 11, and its internal air pressure P0 and volume V0 are provided by the user. The pressure value (or vacuum degree) P1 of the sampling chamber 1 is measured by the vacuum gauge 13, and the volume V1 is pre-measured by the static expansion method; the volume V2 of the standard volume chamber 2 (including the valve) is pre-tested by the measurement unit, and the third pressure P3 can be measured or calculated by the vacuum gauge 13.

[0058] The apparatus and method for measuring the internal pressure of a sealed vacuum electronic device according to the embodiments of the present invention use a standard volume chamber as an aid in testing. Based on the principle that the internal volume and gas volume of the sampling chamber are different before and after puncturing the quartz tube to be tested (i.e., the sample to be tested) are different, the pressure of the sampling chamber is measured three times, and the cavity pressure, cavity volume, and quartz tube volume of the sealed vacuum electronic device are calculated. This can effectively improve the accuracy of measuring the internal pressure of the sealed vacuum electronic device and analyzing the gas composition therein.

[0059] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A method for measuring the internal pressure of a sealed vacuum electronic device, implemented using a device for measuring the internal pressure of a sealed vacuum electronic device, characterized in that: The measuring device comprises: A sampling cavity (1), wherein a sample holder is provided in the sampling cavity (1); A standard volume chamber (2) is connected to the sampling chamber (1) via a pipeline; A puncture mechanism (12) is provided on the sampling cavity (1); a vacuum gauge (13) connected to the sampling chamber (1) via a pipeline; a molecular pump group (17), connected to the sampling chamber (1) via a pipeline; an inflation device (19) connected to the sampling chamber (1) via a pipeline; The measuring method comprises the following steps: S100, fixing the sample to be tested on the sample fixture, and connecting the sampling chamber (1) and the standard volume chamber (2), evacuating the sampling chamber (1) and the standard volume chamber (2), and then filling the sampling chamber (1) and the standard volume chamber (2) in a vacuum state with standard gas through the inflation device (19), and recording the first pressure P1 of the sampling chamber (1) and the standard volume chamber (2); S200, isolating the sampling chamber (1) and the standard volume chamber (2), evacuating the sampling chamber (1), then connecting the sampling chamber (1) and the standard volume chamber (2), and recording the second pressure P2 of the sampling chamber (1) and the standard volume chamber (2); S300, evacuating the sampling chamber (1) and the standard volume chamber (2), then filling the sampling chamber (1) and the standard volume chamber (2) in a vacuum state with standard gas through the inflation device (19), and recording the third pressure P3 of the sampling chamber (1) and the standard volume chamber (2); S400, isolating the sampling chamber (1) and the standard volume chamber (2), evacuating the sampling chamber (1), and then crushing the sample to be tested by the puncture mechanism (12), and recording the fourth pressure P4 of the sampling chamber (1); S500, evacuating the sampling chamber (1), then connecting the sampling chamber (1) and the standard volume chamber (2), and recording the fifth pressure P5 of the sampling chamber (1) and the standard volume chamber (2); S600, determining the internal pressure of the sample to be tested based on the volume V1 of the sampling cavity (1), the volume V2 of the standard volume chamber (2), the first pressure P1, the second pressure P2, the third pressure P3, the fourth pressure P4 and the fifth pressure P5.

2. The method for measuring the internal pressure of a sealed vacuum electronic device according to claim 1, wherein: Step S600 includes: Determining the volume V of the sample to be tested according to the first pressure P1, the second pressure P2, the volume V1 of the sampling cavity (1) and the volume V2 of the standard volume chamber (2); Determining the volume V4 of the electronic device inside the sample to be tested according to the third pressure P3, the fifth pressure P5, the volume V1 of the sampling cavity (1), and the volume V2 of the standard volume chamber (2); Determining the volume V0 of the inner lumen of the sample to be tested according to the volume V of the sample to be tested and the volume V4 of the electronic device; The internal pressure P0 of the sample to be tested is determined according to the volume V1 of the sampling cavity (1), the volume V4 of the electronic device, the volume V0 of the internal lumen of the sample to be tested and the fourth pressure P4.

3. The method for measuring the internal pressure of a sealed vacuum electronic device according to claim 2, wherein: The volume V of the sample to be tested is determined according to the first pressure P1, the second pressure P2, the volume V1 of the sampling cavity (1) and the volume V2 of the standard volume chamber (2), and the calculation formula is:

4. The method for measuring the internal pressure of a sealed vacuum electronic device according to claim 2, wherein: The volume V4 of the electronic device inside the sample to be tested is determined according to the third pressure P3, the fifth pressure P5, the volume V1 of the sampling cavity (1) and the volume V2 of the standard volume chamber (2), and the calculation formula is:

5. The method for measuring the internal pressure of a sealed vacuum electronic device according to claim 2, wherein: The volume V0 of the inner lumen of the sample to be tested is determined according to the volume V of the sample to be tested and the volume V4 of the electronic device. The calculation formula is: V0=V-V4.

6. The method for measuring the internal pressure of a sealed vacuum electronic device according to claim 2, wherein: The internal pressure P0 of the sample to be tested is determined according to the volume V1 of the sampling cavity (1), the volume V4 of the electronic device, the volume V0 of the internal lumen of the sample to be tested, and the fourth pressure P4, and the calculation formula is:

7. The method for measuring the internal pressure of a sealed vacuum electronic device according to claim 2, wherein: The standard gas is pure nitrogen.

8. The method for measuring the internal pressure of a sealed vacuum electronic device according to claim 1, wherein: The measuring device further comprises: a first vacuum valve (14) disposed on a pipeline between the vacuum gauge (13) and the sampling chamber (1); a second vacuum valve (15) disposed on the pipeline between the standard volume chamber (2) and the sampling chamber (1); The third vacuum valve (16) is arranged on the pipeline between the molecular pump group (17) and the sampling chamber (1).

9. The method for measuring the internal pressure of a sealed vacuum electronic device according to claim 1, wherein: The measuring device further comprises: An observation window (18) is provided on the sampling cavity (1).

Images